A laser radar double-high-transparency metasurface antenna cover for a Rydberg radio frequency device and a preparation method thereof
Patent Information
- Application Number
- CN202610973117.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-07-01
- Publication Date
- 2026-09-25
AI Technical Summary
[0006]针对上述传统的激光、雷达高透技术不满足激光/雷达多频谱透波兼容需求的技术问题，本发明提供了一种里德堡射频装置用激光雷达双高透超表面天线罩及其制备方法
1、本发明由激光高透增透层、第一超表面透波层、玻璃介质层、第二超表面透波层四层复合结构协同工作，激光高透增透层采用交替光子晶体膜系，对510nm、852nm、1064nm激光透光率均超90%；两侧对称布置的超表面透波层针对2.88GHz雷达波实现低损耗透波，单一部件同时兼容光学、微波多频谱传输，摒弃传统激光透光件、雷达透波罩分体装配的方案，简化里德堡射频装置整机结构。
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Abstract
Description
Technical Field
[0001] This invention belongs to the field of radome technology, specifically relating to a high-transparency metasurface radome for LiDAR in Rydberg radio frequency devices and its preparation method. Background Technology
[0002] Common strong electromagnetic pulse environments, besides naturally occurring lightning current electromagnetic pulse environments, also include various high-power electromagnetic pulse environments arising from rapid technological advancements. These primarily include electromagnetic environments created by high-power directed energy weapon attacks and nuclear electromagnetic pulse environments created by nuclear weapon attacks. In other words, the rapid development of electromagnetic technology has resulted in electromagnetic signals permeating space carrying increasingly higher energy levels and covering increasingly wider frequency bands.
[0003] Traditional high-transmittance laser and radar technologies typically include transparent media, metal oxide ITO thin films, metal mesh, and traditional fiber composite radomes to achieve efficient laser transmission, electromagnetic wave shielding, wave absorption stealth, and wave transmission performance. They have a single function of efficient laser transmission or efficient radar wave transmission, but do not meet the requirements for multi-spectral wave transmission compatibility of laser / radar.
[0004] At present, the novel quantum system-based damage-resistant radio frequency front-end devices require high transmittance compatible with lidar, and the radomes are required to have high transmittance of laser (510nm, 852nm, 1064nm) and high transmittance of radar (2.88GHz) to meet the design requirements of high-efficiency transmittance of radar and laser in multiple spectrum.
[0005] Traditional high-transmittance technologies for lasers and radars typically include transparent media, metal oxide ITO films, metal mesh gratings, and traditional fiber composite radomes. These technologies have a single function of efficient laser transmission or efficient radar wave transmission, but they do not meet the requirements for multi-spectral transmission compatibility of lasers and radars. Summary of the Invention
[0006] To address the technical problem that traditional high-transmittance laser and radar technologies do not meet the requirements for multi-spectral wave transmission compatibility of laser / radar, this invention provides a dual high-transmittance metasurface radome for LiDAR in Rydberg radio frequency devices and its fabrication method.
[0007] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is as follows: A high-transparency metasurface radome for LiDAR in a Rydberg radio frequency device, wherein the radome consists of four functional layers tightly stacked and bonded from the inside out, namely a high-transparency laser layer, a first metasurface wave-transmitting layer, a glass dielectric layer, and a second metasurface wave-transmitting layer. The laser high-transmittance anti-reflection layer is disposed on the innermost side of the radome, and the outer surface of the laser high-transmittance anti-reflection layer is completely bonded to the inner surface of the first metasurface wave-transparent layer; the first metasurface wave-transparent layer is sandwiched between the laser high-transmittance anti-reflection layer and the glass dielectric layer, and the outer surface of the first metasurface wave-transparent layer is completely bonded to the inner surface of the glass dielectric layer; the glass dielectric layer is sandwiched between the first metasurface wave-transparent layer and the second metasurface wave-transparent layer, and the outer surface of the glass dielectric layer is completely bonded to the inner surface of the second metasurface wave-transparent layer; the second metasurface wave-transparent layer is disposed on the outermost side of the radome; The laser high-transmittance anti-reflection layer adopts an alternating multilayer coating structure of low-refractive-index magnesium fluoride and high-refractive-index titanium dioxide, achieving anti-reflection in the 510nm, 852nm, and 1064nm laser bands based on the photonic bandgap principle. The first and second metasurface wave-transparent layers are both conductive thin film layers etched with a periodic double-sided annular unit array. The double-sided annular unit structure enables the radome to achieve bidirectional incident and polarization-insensitive high-efficiency wave-transparent resonance for 2.88GHz radar waves. The glass dielectric layer is a light-transmitting insulating substrate with a dielectric constant of 1.06~8, a loss tangent of 0.001~0.025, and a thickness of 1.1~4.5mm. The four-layer composite structure works together to achieve high-transmittance compatibility for both laser and radar waves, making it suitable for use with Rydberg quantum RF front-end devices.
[0008] The laser high-transparency anti-reflection layer is attached to the inner surface of the first metasurface wave-transparent layer. The laser high-transparency anti-reflection layer contains 5 groups of alternating titanium dioxide / magnesium fluoride film layers, totaling 10 thin films; the refractive index of titanium dioxide is 2.3, the refractive index of magnesium fluoride is 1.35, and the thickness of a single film ranges from 50nm to 200nm.
[0009] The first metasurface wave-transparent layer is formed on the inner side of the glass dielectric layer, and the second metasurface wave-transparent layer is formed on the outer side of the glass dielectric layer; the conductive film of the first metasurface wave-transparent layer and the second metasurface wave-transparent layer is an ITO film with a film conductivity of 3~5Ω / □ and a film thickness of 350nm~500nm.
[0010] The first metasurface wave-transparent layer and the second metasurface wave-transparent layer have a uniformly distributed periodic double-sided annular unit array on their surfaces, and the array unit has two implementation structures. The first type of unit has an outer frame length of 40mm and a ring border width of 1.5mm. The second type of unit: the outer frame of the unit is 47mm long, the inner ring has an effective light-transmitting side length of 45mm, and the ring frame width is 1.5mm; The unit array adopts a 7×7 periodic full-coverage arrangement, with an overall array size of 280mm×280mm, and the array completely covers the inner and outer surfaces of the glass dielectric layer.
[0011] The glass dielectric layer is made of float glass with a dielectric constant of 5.8 and a thickness of 2.0 mm. The glass dielectric layer serves as the intermediate supporting substrate, with the inner side supporting the first metasurface wave-transparent layer and the outer side supporting the second metasurface wave-transparent layer.
[0012] The radome is assembled on the outside of the Rydberg atomic radio frequency detection front end. The incident laser penetrates the laser high-transparency anti-reflection layer, the first metasurface wave-transparent layer, the glass dielectric layer, and the second metasurface wave-transparent layer from the inside to the outside. The radar electromagnetic wave can be incident from any side of the radome and penetrate the four functional layers in both directions. The integrated composite structure improves the optical field excitation efficiency of the Rydberg atomic gas cell, reduces the probability of atomic ionization under high-power microwaves, and enhances the anti-electromagnetic pulse damage performance of the radio frequency front end.
[0013] A method for fabricating a dual high-transparency metasurface radome for a LiDAR device used in a Rydberg radio frequency device includes the following steps: S1. Take a glass dielectric layer substrate made of float glass, and pre-coat the inner and outer sides of the substrate with ITO conductive film; use pulsed laser etching equipment to simultaneously scan the ITO film layers on the front and back of the substrate, and etch the inner ITO film to form the first metasurface wave-transparent layer, and etch the outer ITO film to form the second metasurface wave-transparent layer, to obtain a three-layer composite semi-finished product. S2. Using electron beam evaporation process, titanium dioxide and magnesium fluoride thin films are alternately deposited on the inner surface of the first metasurface wave-transparent layer inside the semi-finished product. The deposition temperature is 200℃, the working pressure is 20Pa, and the deposition power is 2200W. Five sets of alternating anti-reflection films are deposited to form a laser high-transparency anti-reflection layer on the innermost side. S3. After cooling and cleaning, the four-layer integrated radome prototype is prepared.
[0014] Compared with the prior art, the beneficial effects of this invention are: 1. This invention consists of a four-layer composite structure: a high-transparency laser anti-reflection layer, a first metasurface wave-transparent layer, a glass dielectric layer, and a second metasurface wave-transparent layer. The high-transparency laser anti-reflection layer uses an alternating photonic crystal film system, achieving a transmittance of over 90% for 510nm, 852nm, and 1064nm lasers. The symmetrically arranged metasurface wave-transparent layers on both sides achieve low-loss wave transmission for 2.88GHz radar waves. A single component is compatible with both optical and microwave multi-spectral transmission, eliminating the traditional separate assembly of laser light-transmitting components and radar wave-transparent covers, thus simplifying the overall structure of the Rydberg radio frequency device.
[0015] 2. The first metasurface wave-transparent layer and the second metasurface wave-transparent layer of the present invention are symmetrically arranged on the inner and outer sides of the glass dielectric layer. The double-sided annular periodic unit array can realize bidirectional equivalent wave transmission of radar electromagnetic waves and has no significant attenuation for electromagnetic waves of arbitrary polarization. At the same time, the microwave performance can be iteratively optimized by adjusting the size of the annular unit. After optimization, the radar wave transmittance is increased from 84.2% to 86.3%, and the low insertion loss characteristic meets the requirements for receiving multi-angle radio frequency signals in complex electromagnetic environments.
[0016] 3. The composite structure of this invention can improve the laser excitation efficiency of the Rydberg atomic gas cell, reduce the probability of atomic ionization, and enhance the resistance of quantum radio frequency devices to damage from high-power electromagnetic pulses. The overall structure is thin and compact, and can be integrated by relying on mature laser etching and electron beam evaporation processes. The glass dielectric layer substrate has a wide range of options and can be adapted to various detection platforms such as airborne, vehicle-mounted, and laboratory, with good mass production consistency. Attached Figure Description
[0017] To more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings in the following description are merely exemplary, and those skilled in the art can derive other embodiments based on the provided drawings without creative effort.
[0018] The structures, proportions, sizes, etc. illustrated in this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed herein, and are not intended to limit the conditions under which the present invention can be implemented. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size, without affecting the effects and objectives that the present invention can produce, should still fall within the scope of the technical content disclosed in the present invention.
[0019] Figure 1 This is a cross-sectional view of Example 1; Figure 2 This is a diagram of the metasurface wave-transparent layer unit in Example 1; Figure 3 This is a diagram of the metasurface wave-transparent layer array combination in Example 1; Figure 4 This is a graph showing the laser transmittance of the dual high-transmittance antenna radome for Example 1. Figure 5 This is the insertion loss curve of the dual high-transparency antenna radome for the lidar in Example 1; Figure 6 This is a cross-sectional view of Example 2; Figure 7 This is a diagram of the metasurface wave-transparent layer unit in Example 2; Figure 8This is a diagram of the metasurface wave-transparent layer array combination in Example 2; Figure 9 This is a graph showing the laser transmittance of the dual high-transmittance antenna radome for Example 2. Figure 10 This is the insertion loss curve of the dual high-transparency antenna radome for Example 2.
[0020] Wherein: 1 is the laser high-transmittance anti-reflection layer, 2 is the first metasurface wave-transmitting layer, 3 is the glass dielectric layer, and 4 is the second metasurface wave-transmitting layer. Detailed Implementation
[0021] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. These descriptions are only for further illustrating the features and advantages of the present invention, and not for limiting the claims of the present invention. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0022] The specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and are not intended to limit the scope of the invention.
[0023] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "a plurality of" means two or more.
[0024] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.
[0025] Example 1
[0026] The geometric structure of the dual high-transparency metasurface radome for lidar was modeled using CST software, such as... Figure 1 As shown, the radome is arranged in four layers from the inside out: a laser high-transparency anti-reflection layer 1, a first metasurface wave-transmitting layer 2, a glass dielectric layer 3, and a second metasurface wave-transmitting layer 4.
[0027] The high-transparency antireflection layer 1 for lasers is composed of alternating layers of magnesium fluoride and titanium dioxide. The magnesium fluoride has a refractive index of 1.35 and a single layer thickness of 180 nanometers, while the titanium dioxide has a refractive index of 2.3 and a single layer thickness of 125 nanometers. The layer combination is a cyclic arrangement of titanium dioxide and magnesium fluoride, with a total of 5 sets of alternating layers.
[0028] Both the first metasurface wave-transparent layer 2 and the second metasurface wave-transparent layer 4 are ITO thin films with a conductivity of 3 ohms / □ and a thickness of 500 nanometers; the film surface is etched with a periodic ring-shaped unit array, such as... Figure 2 , Figure 3 As shown, the outer frame of the unit has a side length a of 40mm and the width of the annular frame b is 1.5mm. The unit array adopts a 7×7 periodic arrangement, and the overall size of the array is 280mm×280mm. The array completely covers the inner and outer sides of the glass dielectric layer 3.
[0029] The glass dielectric layer 3 is made of float glass with a dielectric constant of 5.8, a loss tangent of 0.025, and a thickness of 2.0 mm. The inner side of the glass dielectric layer 3 carries the first metasurface wave-transparent layer 2, and the outer side carries the second metasurface wave-transparent layer 4.
[0030] The antenna radome manufacturing process in this embodiment consists of two steps: The first step is the laser etching process: Select a glass dielectric layer 3 substrate with ITO thin film coated on both sides, use a pulsed laser etching device to scan the front and back of the substrate simultaneously, process the double-sided metasurface pattern in one go, the array period is 7×7, the overall size is 280mm×280mm, the number of processing times is set to 1, the processing height is 4mm, the processing current is 40%, and the processing accuracy is 0.1mm. After etching, the first metasurface wave-transparent layer 2 is formed on the inner side of the substrate, and the second metasurface wave-transparent layer 4 is formed on the outer side of the substrate.
[0031] The second step is the antireflection coating process: an electron beam evaporation process is used to deposit a high-transmittance laser antireflection layer 1 on the inner surface of the first metasurface wave-transparent layer 2. The deposition temperature is set to 200℃, the working pressure is 20Pa, and the deposition power is 2200W. Five sets of target materials are deposited in an alternating order of magnesium fluoride and titanium dioxide, so that the high-transmittance laser antireflection layer 1 can achieve a transmittance of more than 90% for the target laser band.
[0032] Example 1: Performance curves of the dual high-transparency radome for lidar are shown below. Figure 4 , Figure 5 As shown; Figure 4 As shown, the laser high-transmittance antireflective layer 1 exhibits laser transmittance of 90.2%, 92.5%, and 98% for the 510nm, 852nm, and 1064nm wavelength bands, respectively, demonstrating excellent laser high-transmittance characteristics; Figure 5As shown, the combined structure of the first metasurface wave-transparent layer 2, the glass dielectric layer 3, and the second metasurface wave-transparent layer 4 has an insertion loss of 0.74 dB in the 2.88 GHz radar wave band and a radar wave transmittance of 84.2%.
[0033] Example 2
[0034] The radome stacking structure sequence in this embodiment is completely consistent with that in Embodiment 1, such as... Figure 6 As shown, from the inside out, the layers are: laser high-transparency anti-reflection layer 1, first metasurface wave-transparent layer 2, glass dielectric layer 3, and second metasurface wave-transparent layer 4. The materials, film parameters, and substrate parameters of the laser high-transparency anti-reflection layer 1 and the glass dielectric layer 3 are the same as those in Example 1.
[0035] The first metasurface wave-transparent layer 2 and the second metasurface wave-transparent layer 4 are still ITO thin films with a conductivity of 3 ohms / □ and a thickness of 500 nanometers; only the size of the periodic ring unit array on the surface of the thin film is adjusted, such as... Figure 7 , Figure 8 As shown, the outer frame of the unit has a side length c of 47mm, the effective light-transmitting side length of the inner ring d is 45mm, and the width of the ring frame e is 1.5mm. The unit array still adopts a 7×7 periodic arrangement, and the overall size of the array is 280mm×280mm, which completely covers the inner and outer surfaces of the glass dielectric layer 3.
[0036] In this embodiment, all the preparation processes and equipment parameters are exactly the same as in Example 1, except that the size of the ring unit pattern is modified in the laser etching process.
[0037] Performance test curves corresponding to the attached chart Figure 9 , Figure 10 .like Figure 9 As shown, the transmittance of the high-transmittance antireflection layer 1 for 510nm, 852nm, and 1064nm lasers showed no significant change compared to Example 1; as Figure 10 As shown, the combined structure of the first metasurface wave-transparent layer 2, the glass dielectric layer 3, and the second metasurface wave-transparent layer 4 reduces the insertion loss to 0.64dB in the 2.88GHz radar wave band and increases the radar wave transmittance to 86.3%, thus optimizing and improving the radar wave transmission performance compared to Example 1.
[0038] The above description only illustrates the preferred embodiments of the present invention. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present invention, and all such changes should be included within the protection scope of the present invention.
Claims
1. A dual high-transmittance metasurface radome for a LiDAR device used in a Rydberg radio frequency device, characterized in that: The radome consists of four functional layers that are tightly stacked and bonded together from the inside out. The four functional layers are a laser high-transmittance anti-reflection layer (1), a first metasurface wave-transmitting layer (2), a glass dielectric layer (3), and a second metasurface wave-transmitting layer (4). The laser high-transparency anti-reflection layer (1) is arranged on the innermost side of the radome, and the outer surface of the laser high-transparency anti-reflection layer (1) is completely attached to the inner surface of the first metasurface wave-transparent layer (2); the first metasurface wave-transparent layer (2) is sandwiched between the laser high-transparency anti-reflection layer (1) and the glass dielectric layer (3), and the outer surface of the first metasurface wave-transparent layer (2) is completely attached to the inner surface of the glass dielectric layer (3); the glass dielectric layer (3) is sandwiched between the first metasurface wave-transparent layer (2) and the second metasurface wave-transparent layer (4), and the outer surface of the glass dielectric layer (3) is completely attached to the inner surface of the second metasurface wave-transparent layer (4); the second metasurface wave-transparent layer (4) is arranged on the outermost side of the radome; The laser high-transparency anti-reflection layer (1) adopts a multilayer coating structure of alternating low-refractive-index magnesium fluoride and high-refractive-index titanium dioxide, and achieves anti-reflection in the 510nm, 852nm and 1064nm laser bands based on the photonic bandgap principle; the first metasurface wave-transparent layer (2) and the second metasurface wave-transparent layer (4) are both conductive thin film layers with etched periodic double-sided annular unit arrays. The double-sided annular unit structure enables the radome to achieve bidirectional incident and polarization-insensitive efficient wave-transparent resonance for 2.88GHz radar waves; the glass dielectric layer (3) is a light-transmitting insulating substrate with a dielectric constant of 1.06~8, a loss tangent of 0.001~0.025, and a thickness of 1.1~4.5mm; the four-layer composite structure works together to achieve high-transparency compatibility of laser and radar waves in both frequency bands, and is suitable for use with Rydberg quantum radio frequency front-end devices.
2. The dual high-transmittance metasurface antenna radome for a LiDAR device in a Rydberg radio frequency device according to claim 1, characterized in that: The laser high-transparency anti-reflection layer (1) is attached to the inner surface of the first metasurface wave-transparent layer (2). The laser high-transparency anti-reflection layer (1) contains 5 groups of alternating titanium dioxide / magnesium fluoride film layers, totaling 10 thin films; the refractive index of titanium dioxide is 2.3, the refractive index of magnesium fluoride is 1.35, and the thickness of a single film layer ranges from 50nm to 200nm.
3. The dual high-transmittance metasurface radome for a LiDAR in a Rydberg radio frequency device according to claim 1, characterized in that: The first metasurface wave-transparent layer (2) is formed on the inner side plate of the glass dielectric layer (3), and the second metasurface wave-transparent layer (4) is formed on the outer side plate of the glass dielectric layer (3); the conductive film of the first metasurface wave-transparent layer (2) and the second metasurface wave-transparent layer (4) is an ITO film with a film conductivity of 3~5Ω / □ and a film thickness of 350nm~500nm.
4. The dual high-transmittance metasurface radome for a LiDAR in a Rydberg radio frequency device according to claim 1, characterized in that: The first metasurface wave-transparent layer (2) and the second metasurface wave-transparent layer (4) are uniformly distributed with a periodic double-sided annular unit array, and the array unit is divided into two implementation structures. The first type of unit has an outer frame length of 40mm and a ring border width of 1.5mm. The second type of unit: the outer frame of the unit is 47mm long, the inner ring has an effective light-transmitting side length of 45mm, and the ring frame width is 1.5mm; The unit array adopts a 7×7 periodic full-coverage arrangement, with an overall array size of 280mm×280mm, and the array completely covers the inner and outer surfaces of the glass dielectric layer (3).
5. The dual high-transmittance metasurface antenna radome for a LiDAR in a Rydberg radio frequency device according to claim 1, characterized in that: The glass dielectric layer (3) is made of float glass with a dielectric constant of 5.8 and a thickness of 2.0 mm. The glass dielectric layer (3) is the intermediate bearing substrate, with the inner side bearing the first metasurface wave-transparent layer (2) and the outer side bearing the second metasurface wave-transparent layer (4).
6. The dual high-transmittance metasurface antenna radome for a LiDAR in a Rydberg radio frequency device according to claim 1, characterized in that: The radome is assembled on the outside of the Rydberg atomic radio frequency detection front end. The incident laser penetrates the laser high-transparency anti-reflection layer (1), the first metasurface wave-transparent layer (2), the glass dielectric layer (3), and the second metasurface wave-transparent layer (4) from the inside to the outside. The radar electromagnetic wave can be incident from any side of the radome and penetrate the four functional layers in both directions. The integrated composite structure improves the excitation efficiency of the Rydberg atomic gas cell, reduces the probability of atomic ionization under high-power microwaves, and enhances the anti-electromagnetic pulse damage performance of the radio frequency front end.
7. A method for fabricating a double high-transparency metasurface radome for a LiDAR device for a Rydberg radio frequency device according to any one of claims 1-6, characterized in that, Includes the following steps: S1. Take a glass dielectric layer (3) substrate made of float glass. ITO conductive film is pre-coated on both the inner and outer sides of the substrate. The ITO film layer on the front and back of the substrate is scanned simultaneously using a pulsed laser etching device. The first metasurface wave-transparent layer (2) is formed by etching the inner ITO film, and the second metasurface wave-transparent layer (4) is formed by etching the outer ITO film, thus obtaining a three-layer composite semi-finished product. S2. Using electron beam evaporation process, titanium dioxide and magnesium fluoride thin films are alternately deposited on the inner surface of the first metasurface wave-transparent layer (2) inside the semi-finished product. The deposition temperature is 200℃, the working pressure is 20Pa, and the deposition power is 2200W. Five sets of alternating anti-reflection films are deposited to form a laser high-transparency anti-reflection layer (1) on the innermost side. S3. After cooling and cleaning, the four-layer integrated radome prototype is prepared.