Three-phase linear actuator

Abstract

Provided is a three-phase linear actuator in which a moving element does not tilt when a non-contact bearing is used. The dimensions of each part of a second block (B2) are determined, and energization of each of a first three-phase winding (WW1-WW3) and a second three-phase winding (WW11-WW13) is controlled so that the point of action of the resultant force of a first resultant magnetic attraction force acting in the Z direction between a plurality of second salient pole teeth (PT2) of a first 3-magnetic pole portion (MP1-MP3) of a first armature unit (AU1) and a plurality of first salient pole teeth (PT1) facing the plurality of second salient pole teeth (PT2), and a second resultant magnetic attraction force acting in the Z direction between a plurality of second salient pole teeth (P2) of a second 3-magnetic pole portion (MP11-MP13) of a second armature unit and a plurality of first salient pole teeth (PT1) facing the plurality of second saliant pole teeth (PT2) is located within a region centered on the center of gravity of the moving element and having a given pitch (Pt) as a radius.

Description

Technical Field

[0001] This invention relates to a three-phase linear actuator in which the moving part is supported in a floating state by a non-contact bearing such as an air bearing. Background Technology

[0002] Japanese Patent No. 4899469 (Patent Document 1) discloses a planar stage device for moving a planar plate on which a workpiece is placed along the XY direction. This planar stage device includes a moving mechanism (linear actuator) that moves the planar plate, which is levitated by a non-contact bearing device, in parallel. This moving mechanism has a drive mechanism mounted on an air bearing, comprising a moving member M having magnetic poles that generate a moving magnetic field, and a planar pressure plate with salient pole teeth arranged in a checkerboard or stripe pattern on the back of the planar plate opposite to the air bearing. Recently, a three-phase linear actuator has been considered for use in this moving mechanism.

[0003] Prior art literature

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent No. 4899469

[0006] In a typical three-phase linear actuator that does not use non-contact bearings such as air bearings, the moving part M is firmly supported, so even if the suppression of cogging torque becomes a problem, the tilting of the moving part M will not be a problem. However, according to the inventor's research, when a three-phase linear actuator is used in the drive mechanism of the planar plate of a planar platform device using air bearings, the planar plate tilts beyond the allowable value if the three-phase excitation is not considered.

[0007] For example, suppose the three-phase linear actuator used employs the following configuration: a first block having a plurality of convex first salient pole teeth formed by magnetic bodies arranged in a checkerboard or striped pattern at a given interval is used as a fixing member; a planar plate is provided on a second block opposite the first block, comprising a first armature unit and a second armature unit. In this case, the first armature unit comprises: a first yoke having a plurality of second salient pole teeth formed at its front end and arranged in one direction, the plurality of second salient pole teeth being spaced apart from the plurality of first salient pole teeth of the first block and arranged in a striped pattern at a given interval; and a first three-phase winding wound around the pole posts of the first three pole parts. Furthermore, the second armature unit includes: a second yoke having a plurality of second salient pole teeth formed in a convex shape at its front end and arranged along the stated direction, the plurality of second salient pole teeth being opposed to a plurality of first salient pole teeth of the first block at intervals and arranged in a stripe pattern at a given spacing; and a second and third phase winding, with pole posts wound around the second and third pole portions. It also includes a connecting portion that connects the first yoke of the first armature unit and the second yoke of the second armature unit arranged along the stated direction.

[0008] In such a three-phase linear actuator, when the first three-phase winding of the pole piece wound on the first three magnetic pole sections of the first armature unit is energized as the U-phase, V-phase, and W-phase, and the second three-phase winding of the pole piece wound on the second three magnetic pole sections of the second armature unit is energized as the U-phase, V-phase, and W-phase, if the U-phase is simultaneously energized, the second plate with the planar plate will tilt towards the side where the U-phase is located. Furthermore, when the first three-phase winding of the pole piece wound on the first three magnetic pole sections of the first armature unit is energized as the U-phase, V-phase, and W-phase, and the second three-phase winding of the pole piece wound on the second three magnetic pole sections of the second armature unit is energized as the U-phase, V-phase, and W-phase, if the W-phase is simultaneously energized, the second plate with the planar plate will tilt towards the side where the W-phase is located. If this phenomenon occurs, it results in a decrease in the machining accuracy of the machining apparatus using the planar stage device. Summary of the Invention

[0009] The purpose of this invention is to provide a three-phase linear actuator in which the moving parts do not substantially tilt when using non-contact bearings.

[0010] Methods for solving problems

[0011] The three-phase linear actuator of the first aspect of the present invention comprises: a first block having a plurality of convex first salient pole teeth formed thereon, wherein the plurality of first salient pole teeth, when defined as mutually orthogonal X, Y, and Z directions, are composed of magnetic bodies arranged in a checkerboard pattern or in a stripe pattern along the X and Y directions at a given interval; a second block opposite to the first block; and a non-contact bearing, wherein the first block is a fixed member and the second block is a movable member, and the movable member is movably supported relative to the fixed member in a floating state. The second block comprises n (n is a positive integer greater than or equal to 1) first armature units and n second armature units. The n first armature units have: a first 3m (m is a positive integer greater than or equal to 1) magnetic pole portions, wherein a plurality of convex second salient pole teeth are formed at the front end, which are opposite to the plurality of first salient pole teeth of the first block in the Z direction with gaps and arranged in a stripe pattern in the X direction at a given interval, and are arranged in the X direction; and a first three-phase winding, which is wound around the pole posts of the first 3m magnetic pole portions. The n second armature units each have: a second 3m magnetic pole section, with a plurality of convex second salient pole teeth formed at the front end, which are opposed to the plurality of first salient pole teeth of the first block in the Z direction with gaps and arranged in a stripe pattern in the X direction at a given interval, and arranged along the X direction; and a second three-phase winding, which is wound around the pole post of the second 3m magnetic pole section. Furthermore, a connecting portion comprising a magnetic material is provided to connect the n first armature units and the n second armature units. In the three-phase linear actuator, the first three-phase windings of the n first armature units and the second three-phase windings of the n second armature units are respectively energized, and the first 3m magnetic pole sections and the second 3m magnetic pole sections are energized, thereby generating a moving magnetic field that moves along the X direction, causing the moving component to move. In this invention, the dimensions of each part of the second block are determined, and the energization of the first three-phase winding and the second three-phase winding is controlled such that the point of application of the combined resultant force of the first composite magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth in the first 3m magnetic pole portions of the n first armature units and the plurality of first salient pole teeth opposite to the plurality of second salient pole teeth, and the second composite magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth in the second 3m magnetic pole portions of the n second armature units and the plurality of first salient pole teeth opposite to the plurality of second salient pole teeth, lies within a region centered on the center of gravity of the moving member and with a given spacing as the radius. According to this invention, by employing the above-described structure, a three-phase linear actuator can be provided in which the moving member moving in the X direction will not substantially tilt, even when using non-contact bearings. Furthermore, the determination of the "region with a given spacing as the radius" is confirmed experimentally and is not derived theoretically.

[0012] In the implementation of the first method, n first armature units and n second armature units may be arranged alternately along the X direction. Alternatively, n combined units formed by arranging the first and second armature units along the X direction may be arranged along the X direction. Furthermore, it is preferable that the first 3m magnetic pole portions of the first armature unit are energized as the U phase, V phase, and W phase, and simultaneously, the second 3m magnetic pole portions of the second armature unit are energized as the W phase, V phase, and U phase.

[0013] The second type of three-phase linear actuator comprises: a first piece having a plurality of convex first salient pole teeth formed thereon, serving as a fixed member, wherein the plurality of first salient pole teeth are composed of magnetic bodies arranged in a checkerboard pattern along the X and Y directions at a given interval when the X, Y and Z directions are defined to be mutually orthogonal; a second piece, positioned opposite the first piece with a gap, serving as a movable member; and a non-contact bearing for movably supporting the movable member relative to the fixed member in a floating state.

[0014] Furthermore, the second block includes a first and a second X-direction armature block, and a first and a second Y-direction armature block. The first and second X-direction armature blocks each have n (n is a positive integer greater than or equal to 1) first armature units, n second armature units, and a connecting portion. The first armature unit has: a first 3m (m is a positive integer greater than or equal to 1) magnetic pole portions, with a plurality of convex second salient pole teeth formed at the front end, which are opposed to the plurality of first salient pole teeth of the first block in the Z direction with gaps and arranged in a stripe pattern in the X direction at a given interval, and arranged along the X direction; and a first three-phase winding, which is wound around the pole posts of the first 3m magnetic pole portions. The second armature unit has: a second 3m magnetic pole portions, with a plurality of convex second salient pole teeth formed at the front end, which are opposed to the plurality of first salient pole teeth of the first block in the Z direction with gaps and arranged in a stripe pattern in the X direction at a given interval, and arranged along the X direction; and a second three-phase winding, which is wound around the pole posts of the second 3m magnetic pole portions. The connecting portion includes magnetic material and connects the n first armature units and the n second armature units.

[0015] Furthermore, the first and second Y-direction armature blocks each have n (n is a positive integer greater than or equal to 1) third armature units, n fourth armature units, and connecting portions. The third armature unit has: a third 3m (m is a positive integer greater than or equal to 1) magnetic pole portions, with a plurality of convex second salient pole teeth formed at the front end, which are opposed to the plurality of first salient pole teeth of the first block in the Z direction with gaps and arranged in a stripe pattern in the Y direction at a given interval, and arranged along the Y direction; and a third three-phase winding, which is wound around the pole posts of the third 3m magnetic pole portions. The fourth armature unit has: a fourth 3m magnetic pole portions, with a plurality of convex second salient pole teeth formed at the front end, which are opposed to the plurality of first salient pole teeth of the first block in the Z direction with gaps and arranged in a stripe pattern in the Y direction at a given interval, and arranged along the Y direction; and a fourth three-phase winding, which is wound around the pole posts of the fourth 3m magnetic pole portions. The connecting portion includes magnetic material and connects the n third armature units and the n fourth armature units.

[0016] Furthermore, the first and second X-direction armature blocks are arranged along a first diagonal, and the first and second Y-direction armature blocks are arranged along a second diagonal orthogonal to the first diagonal. The first three-phase windings of the n first armature units and the second three-phase windings of the n second armature units of the first and second X-direction armature blocks are energized, and the first 3m magnetic pole portions and the second 3m magnetic pole portions are energized, thereby generating a moving magnetic field that moves along the X-direction. Additionally, the third three-phase windings of the n third armature units and the fourth three-phase windings of the n fourth armature units of the first and second Y-direction armature blocks are energized, and the third 3m magnetic pole portions and the fourth 3m magnetic pole portions are energized, thereby generating a moving magnetic field that moves along the Y-direction.

[0017] The dimensions of each part of the second block are determined, and the energization of the first three-phase winding, the second three-phase winding, the third three-phase winding, and the fourth three-phase winding is controlled so that the points of application of the combined resultant force of the first and second combined forces, and the points of application of the combined resultant force of the third and fourth combined forces, are located within a region centered on the center of gravity of the moving part and with a given spacing as the radius. The first combined force is the combined resultant force obtained by combining the first combined magnetic attraction force in the Z direction between the multiple second salient pole teeth of the first 3m magnetic poles of the first X-direction armature block and the multiple first salient pole teeth opposite to the multiple second salient pole teeth, and the second combined magnetic attraction force in the Z direction between the multiple second salient pole teeth of the second 3m magnetic poles and the multiple first salient pole teeth opposite to the multiple second salient pole teeth. The second combined force is the combined resultant force obtained by combining the first combined magnetic attraction force in the Z direction between the multiple second salient pole teeth of the first 3m magnetic poles of the second X-direction armature block and the multiple first salient pole teeth opposite to the multiple second salient pole teeth, and the second combined magnetic attraction force in the Z direction between the multiple second salient pole teeth of the second 3m magnetic poles. The third combined force is a combined force obtained by integrating the fourth combined magnetic attraction force acting in the Z direction between the multiple second salient pole teeth of the m magnetic pole portions and the multiple first salient pole teeth opposite to the multiple second salient pole teeth. This third combined force is a combined force obtained by integrating the fifth combined magnetic attraction force acting in the Z direction between the multiple second salient pole teeth of the third 3m magnetic pole portions of the first Y-direction armature block and the multiple first salient pole teeth opposite to the multiple second salient pole teeth, and the combined force acting in the Z direction between the multiple second salient pole teeth of the fourth 3m magnetic pole portions and the multiple first salient pole teeth opposite to the multiple second salient pole teeth. The fourth combined force is a combined force obtained by combining the sixth combined magnetic attraction force between the teeth in the Z direction. This fourth combined force is a combined force obtained by combining the seventh combined magnetic attraction force between the multiple second salient pole teeth and the multiple first salient pole teeth opposite to the multiple second salient pole teeth in the third 3m magnetic pole section of the second Y direction armature block in the Z direction, and the eighth combined magnetic attraction force between the multiple second salient pole teeth and the multiple first salient pole teeth opposite to the multiple second salient pole teeth in the Z direction.

[0018] With this configuration, a three-phase linear actuator can be provided that does not substantially tilt even when the moving part moves along either the X or Y direction. Furthermore, since the X-direction armature block and the Y-direction armature block each have a common structure, the design and manufacture of a three-phase linear actuator for moving parts along the X and Y directions become easier.

[0019] The third aspect of the three-phase linear actuator of the present invention comprises: a first block having a plurality of convex first salient pole teeth formed thereon, the first salient pole teeth being composed of magnetic bodies arranged in a checkerboard pattern along the X and Y directions at a given interval when the X, Y, and Z directions are defined to be orthogonal; a second block opposite to the first block; and a non-contact bearing, which serves as a fixed member for the first block and as a movable member for the second block, the movable member being movably supported relative to the fixed member in a floating state. The second block comprises a first armature unit to a fourth armature unit. The first armature unit comprises: a first 3m magnetic pole portion having a plurality of convex second salient pole teeth formed at its front end, which are opposite to the plurality of first salient pole teeth of the first block in the Z direction with gaps and arranged in a stripe pattern in the X direction at a given interval, and arranged along the X direction; and a first three-phase winding wound around the pole posts of the first 3m magnetic pole portion. The second armature unit has: a second 3m magnetic pole portion, with a plurality of convex second salient pole teeth formed at its front end, which are spaced apart in the Z direction and arranged in a striped pattern in the X direction at a given interval, and arranged along the X direction; and a second and third phase winding, which is wound around the pole post of the second 3m magnetic pole portion. The third armature unit has: a third 3m magnetic pole portion, with a plurality of convex second salient pole teeth formed at its front end, which are spaced apart in the Z direction and arranged in a striped pattern in the Y direction at a given interval, and arranged along the Y direction; and a third three-phase winding, which is wound around the pole post of the third 3m magnetic pole portion. The fourth armature unit has: a fourth 3m magnetic pole portion, with a plurality of convex second salient pole teeth formed at its front end, which are spaced apart in the Z direction and arranged in a striped pattern in the Y direction at a given interval, and arranged along the Y direction; and a fourth three-phase winding, which is wound around the pole post of the fourth 3m magnetic pole portion. Furthermore, it includes a connecting portion that links the first armature unit to the fourth armature unit, such that the first and second armature units are arranged along a first diagonal, and the third and fourth armature units are arranged along a second diagonal orthogonal to the first diagonal. In the three-phase linear actuator, the first and second three-phase windings are energized, and the first and second 3m magnetic pole portions are energized, thereby generating a moving magnetic field that moves along the X direction. The third and fourth three-phase windings are energized, and the third and fourth 3m magnetic pole portions are energized, thereby generating a moving magnetic field that moves along the Y direction, causing the moving member to move along the XY direction.

[0020] In the three-phase linear actuator of the third method, the dimensions of each part of the second block are determined, and the energization of the first three-phase winding, the second three-phase winding, the third three-phase winding, and the fourth three-phase winding is controlled such that the point of application of the combined resultant force of the first composite magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth and the plurality of first salient pole teeth opposite to the plurality of second salient pole teeth in the first 3m magnetic pole section, the second composite magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth and the plurality of first salient pole teeth opposite to the plurality of second salient pole teeth in the second 3m magnetic pole section, the third composite magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth and the plurality of first salient pole teeth opposite to the plurality of second salient pole teeth in the third 3m magnetic pole section, and the fourth composite magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth and the plurality of first salient pole teeth opposite to the plurality of second salient pole teeth in the fourth 3m magnetic pole section, is located within a region centered on the center of gravity of the moving part and with a given spacing as the radius.

[0021] According to the present invention, by adopting the above-described structure, it is possible to provide a three-phase linear actuator in which the moving part moving in the XY direction will not substantially tilt even when using non-contact bearings.

[0022] In the three-phase linear actuator of the third embodiment, in order to achieve the above-mentioned effect, it is preferable that the first 3m magnetic poles of the first armature unit are energized as the U phase, V phase and W phase, and at the same time, the second 3m magnetic poles of the second armature unit are energized as the W phase, V phase and U phase. In addition, it is preferable that the third 3m magnetic poles of the third armature unit are energized as the U phase, V phase and W phase, and at the same time, the fourth 3m magnetic poles of the fourth armature unit are energized as the W phase, V phase and U phase.

[0023] The fourth aspect of the three-phase linear actuator of the present invention comprises: a first block having a plurality of convex first salient pole teeth formed thereon, the plurality of first salient pole teeth being composed of magnetic bodies arranged in a checkerboard pattern along the X and Y directions at a given interval when mutually orthogonal X, Y, and Z directions are defined; a second block opposite to the first block; and a non-contact bearing, wherein the first block is a fixed member and the second block is a movable member, the movable member being movably supported relative to the fixed member in a floating state. The second block comprises two X-direction combination units and two Y-direction combination units. The first armature unit and the second armature unit are arranged along the X direction to form two X-direction combined units. The first armature unit has: a first 3m magnetic pole portions (m is a positive integer greater than or equal to 1), with a plurality of convex second salient pole teeth formed at the front end, which are opposite to a plurality of first salient pole teeth of the first block in the Z direction with gaps and arranged in a stripe pattern in the X direction at a given interval, and arranged along the X direction; and a first three-phase winding, which is wound around the pole posts of the first 3m magnetic pole portions. The second armature unit has: a second 3m magnetic pole portions, with a plurality of convex second salient pole teeth formed at the front end, which are opposite to a plurality of first salient pole teeth of the first block in the Z direction with gaps and arranged in a stripe pattern in the X direction at a given interval, and arranged along the X direction; and a second three-phase winding, which is wound around the pole posts of the second 3m magnetic pole portions. In addition, the third armature unit and the fourth armature unit are arranged along the Y direction to form two Y-direction combined units. The third armature unit has: a third 3m magnetic pole portion, with a plurality of convex second salient pole teeth formed at the front end, which are opposite to the plurality of first salient pole teeth of the first block in the Z direction with gaps and arranged in a stripe pattern in the Y direction at a given interval, and arranged along the Y direction; and a third three-phase winding, which is wound around the pole post of the third 3m magnetic pole portion. The fourth armature unit has: a fourth 3m magnetic pole portion, with a plurality of convex second salient pole teeth formed at the front end, which are opposite to the plurality of first salient pole teeth of the first block in the Z direction with gaps and arranged in a stripe pattern in the Y direction at a given interval, and arranged along the Y direction; and a fourth three-phase winding, which is wound around the pole post of the fourth 3m magnetic pole portion. Furthermore, the second block has a connecting portion that connects two X-direction combination units and two Y-direction combination units, such that the first armature unit of one combination unit of the two X-direction combination units and the second armature unit of the other combination unit are arranged along the first diagonal, and the third armature unit of one combination unit of the two Y-direction combination units and the fourth armature unit of the other combination unit are arranged along the second diagonal.In the fourth type of three-phase linear actuator, the first and second three-phase windings in the two X-direction combination units are energized respectively, and the first 3m magnetic poles and the second 3m magnetic poles are energized, thereby generating two moving magnetic fields that are arranged in parallel and move along the X-direction. The third and fourth three-phase windings in the two Y-direction combination units are energized respectively, and the third 3m magnetic poles and the fourth 3m magnetic poles are energized, thereby generating two moving magnetic fields that are arranged in parallel and move along the Y-direction, causing the moving part to move along the XY direction.

[0024] In the third-phase linear actuator of the fourth type, the dimensions of each part of the second block are determined, and the energization of the first three-phase winding, the second three-phase winding, the third three-phase winding, and the fourth three-phase winding is controlled such that the combined resultant force of the following forces lies within a region centered on the center of gravity of the moving part and with a given spacing as the radius: the resultant force of a first combined magnetic attraction in the Z direction between a plurality of second salient pole teeth in the first 3m magnetic pole section and a plurality of first salient pole teeth opposite to the plurality of second salient pole teeth, generated in one of the two X-direction combination units, and the resultant force of a second combined magnetic attraction in the Z direction between a plurality of second salient pole teeth in the second 3m magnetic pole section and a plurality of first salient pole teeth opposite to the plurality of second salient pole teeth; and the resultant force of a first combined magnetic attraction in the Z direction between a plurality of second salient pole teeth in the first 3m magnetic pole section and a plurality of first salient pole teeth opposite to the plurality of second salient pole teeth, generated in the other X-direction combination unit, and the resultant force of a second combined magnetic attraction in the Z direction between a plurality of second salient pole teeth in the second 3m magnetic pole section and a plurality of first salient pole teeth opposite to the plurality of second salient pole teeth; The resultant force of the second composite magnetic attraction acting in the Z direction between the plurality of first salient pole teeth facing each other, and such that the combined resultant force of the following forces lies within a region centered on the center of gravity of the moving member and with a given spacing as the radius: the resultant force of the third composite magnetic attraction acting in the Z direction between the plurality of second salient pole teeth and the plurality of first salient pole teeth facing each other in the third 3m magnetic pole section, generated in one of the two Y-direction combination units; and the resultant force of the second composite magnetic attraction acting in the Z direction between the plurality of second salient pole teeth and the plurality of first salient pole teeth facing each other in the fourth 3m magnetic pole section; and the resultant force of the third composite magnetic attraction acting in the Z direction between the plurality of second salient pole teeth and the plurality of first salient pole teeth facing each other in the third 3m magnetic pole section, generated in another Y-direction combination unit; and the resultant force of the fourth composite magnetic attraction acting in the Z direction between the plurality of second salient pole teeth and the plurality of first salient pole teeth facing each other in the fourth 3m magnetic pole section.

[0025] According to the present invention, by adopting the above-described structure, similar to the three-phase linear actuator of the third embodiment, it is possible to provide a three-phase linear actuator in which the moving part moving in the XY direction will not substantially tilt even when using non-contact bearings.

[0026] In the third-phase linear actuator of the fourth embodiment, in order to achieve the above-mentioned effect, it is preferable that the first 3m magnetic poles of the first armature unit are energized as the U phase, V phase and W phase, and simultaneously, the second 3m magnetic poles of the second armature unit are energized as the W phase, V phase and U phase, the third 3m magnetic poles of the third armature unit are energized as the U phase, V phase and W phase, and simultaneously, the fourth 3m magnetic poles of the second armature unit are energized as the W phase, V phase and U phase.

[0027] If we summarize the structure of a three-phase linear actuator that does not tilt when the moving part moves along the XY direction, it becomes as follows: The second block has n X-direction combination units and n Y-direction combination units. The first armature unit and the second armature unit are arranged along the X direction to form an X-direction combination unit. The first armature unit has: a first 3m (m is a positive integer greater than or equal to 1) magnetic pole portions, with a plurality of convex second salient pole teeth formed at the front end, which are opposite to the plurality of first salient pole teeth of the first block in the Z direction with gaps and arranged in a stripe pattern in the X direction at a given interval, and arranged along the X direction; and a first three-phase winding, which is wound around the pole posts of the first 3m magnetic pole portions. The second armature unit has: a second 3m magnetic pole portions, with a plurality of convex second salient pole teeth formed at the front end, which are opposite to the plurality of first salient pole teeth of the first block in the Z direction with gaps and arranged in a stripe pattern in the X direction at a given interval, and arranged along the X direction; and a second three-phase winding, which is wound around the pole posts of the second 3m magnetic pole portions. The third and fourth armature units are arranged along the Y direction to form n Y-direction combination units. The third armature unit has: a third 3m magnetic pole portion, with a plurality of convex second salient pole teeth formed at its front end, which are spaced apart in the Z direction and arranged in a striped pattern in the Y direction at a given interval; and a third three-phase winding wound around the pole posts of the third 3m magnetic pole portion. The fourth armature unit has: a fourth 3m magnetic pole portion, with a plurality of convex second salient pole teeth formed at its front end, which are spaced apart in the Z direction and arranged in a striped pattern in the Y direction at a given interval; and a fourth three-phase winding wound around the pole posts of the fourth 3m magnetic pole portion. Furthermore, the second block has a connecting portion that connects the first and second armature units included in the n X-direction combination units, and the third and fourth armature units included in the n Y-direction combination units. Based on this, in the three-phase linear actuator, the configuration of n first armature units and n second armature units in the second block, and n third armature units and n fourth armature units in the n Y-direction combination units is determined, such that the n first armature units and n second armature units in the n X-direction combination units, and the n third armature units and n fourth armature units in the n Y-direction combination units are energized, thereby generating one or more moving magnetic fields moving along the X-direction and one or more moving magnetic fields moving along the Y-direction, causing the moving part to move along the XY direction.Furthermore, the dimensions of each part of the second block are determined, and the energization of each of the n first three-phase windings, n second three-phase windings, n third three-phase windings, and n fourth three-phase windings is controlled, such that the point of application of the combined resultant force of the multiple second salient pole teeth of the n first 3m magnetic pole parts and the multiple second salient pole teeth of the n second 3m magnetic pole parts in the 3n X-direction combination unit and the multiple first salient pole teeth of the first block in the Z-direction, and the point of application of the combined resultant force of the multiple second salient pole teeth of the n third 3m magnetic pole parts and the multiple second salient pole teeth of the n fourth 3m magnetic pole parts in the n Y-direction combination units and the multiple first salient pole teeth of the first block in the Z-direction, are located within a region centered on the center of gravity of the moving part and with a given spacing as the radius. Attached Figure Description

[0028] Figure 1 This is a schematic longitudinal sectional view of the three-phase linear actuator of this embodiment.

[0029] Figure 2 Observe from the position of line II-II in the direction of the arrow. Figure 1 The image shown is a bottom view of the second block of the three-phase linear actuator of this embodiment, which serves as the moving part.

[0030] Figure 3 Observe from the position of line III-III in the direction of the arrow. Figure 1 The diagram shows a top view of the second block of the three-phase linear actuator of this embodiment.

[0031] Figure 4 (A) to Figure 4 (C) is a schematic diagram illustrating the structure and positional relationship between the moving and fixed parts of the three-phase linear actuator in this embodiment.

[0032] Figure 5 It is a diagram that schematically illustrates the relationship of magnetic attraction generated when a moving part moves.

[0033] Figure 6 (A) and Figure 6 (B) is shown Figure 1 A diagram showing a variation of the implementation method.

[0034] Figure 7 This is a bottom view of the second block of the three-phase linear actuator according to the second embodiment of the present invention.

[0035] Figure 8 (A) to Figure 8 (C) is a schematic diagram illustrating the structure of the Y-direction armature block used in the second block of the three-phase linear actuator of this embodiment.

[0036] Figure 9 This is a schematic diagram illustrating the force relationships in the second embodiment.

[0037] Figure 10 This is a schematic diagram illustrating the third embodiment.

[0038] Figure 11 This is a schematic diagram illustrating the force relationships in the third embodiment.

[0039] Figure 12 This is a schematic diagram illustrating the fourth embodiment.

[0040] Figure 13 This is a schematic diagram illustrating the force relationships in the fourth embodiment.

[0041] Explanation of reference numerals in the attached figures

[0042] AB non-contact bearing

[0043] AU1 First Armature Unit

[0044] AU2 Second Armature Unit

[0045] AU3 Third Armature Unit

[0046] AU4 Fourth Armature Unit

[0047] B1 First Block

[0048] B2 Second Block

[0049] CP Linkage Department

[0050] M moving parts

[0051] MP1~MP3 Magnetic Pole Section

[0052] MP11~MP13 Magnetic pole section

[0053] MP21~MP23 Magnetic pole section

[0054] MP31~MP33 Magnetic Pole Section

[0055] N nozzle

[0056] PT First Salient Pole Tooth

[0057] PT second salient pole tooth

[0058] S fastener

[0059] WW1~WW3 First and third phase windings

[0060] WW11~WW13 Second and Third Phase Windings

[0061] WW21~WW23 Third three-phase winding

[0062] WW31~WW33 Fourth three-phase winding. Detailed Implementation

[0063] Hereinafter, an example of a preferred embodiment of the three-phase linear actuator of the present invention will be described with reference to the accompanying drawings.

[0064] [First Implementation]

[0065] Figure 1 This is a schematic longitudinal sectional view of the three-phase linear actuator according to the first embodiment of the present invention. Furthermore, in Figure 1 In the image, the shading used to represent the cross-section has been omitted. Additionally, Figure 2 Observe from the position of line II-II in the direction of the arrow. Figure 1 The image shown is a bottom view of the second block B2 of the three-phase linear actuator of this embodiment, which serves as the moving part M. Figure 3 Observe from the position of line III-III in the direction of the arrow. Figure 1 The diagram shows a top view of the second block B2 of the three-phase linear actuator of this embodiment. Additionally, Figure 4 (A) to Figure 4 (C) is a schematic diagram illustrating the structural and positional relationship between the moving member (slider) M and the fixed member (pressure plate) S of the three-phase linear actuator in this embodiment. Furthermore, in Figures 1 to 4 The diagram shows arrows representing the mutually orthogonal X, Y, and Z directions.

[0066] The three-phase linear actuator of this embodiment includes: a first piece B1 constituting a fixed member S called a pressure plate, and a second piece B2 constituting a moving member M called a slider. Figure 4 As schematically shown, the first block B1 has the following structure: it has a plurality of convex first salient pole teeth PT1 formed thereon, the first salient pole teeth PT1 being formed by a given spacing Pt[ Figure 4 The (C) is composed of magnetic materials arranged in a checkerboard or striped pattern. In this embodiment, a non-contact bearing AB is provided, which is movably supported by an air bearing that serves as a moving part M, with the second B2 movably supported relative to the first B1 in a floating state. Figure 1 ).exist Figure 1 as well as Figure 2 The diagram shows a nozzle N supplying air to the air bearing AB. Air ejected from nozzle N passes through a passage formed within the second block B2 and exits through an injection port at the bottom opening of the second block B2, maintaining the second block B2 in a floating state relative to the first block B1. In this embodiment, the air bearing AB is configured such that, in the absence of a moving magnetic field generated in the three-phase linear actuator, the moving member M is parallel to the fixed member S. Furthermore, since the structure of the air bearing is well-known, further explanation is omitted.

[0067] like Figure 4 As shown, the second block B2 has one first armature unit AU1 and one second armature unit AU2. The first armature unit AU1 has: one first three magnetic pole portions MP1 to MP3, with a plurality of first salient pole teeth PT1 of the first block B1 facing each other at a given spacing Pt at the front end. Figure 4 The second armature unit AU2 has: a second three-phase winding WW11 to MP13, with a plurality of convex second salient pole teeth PT2 arranged in a stripe pattern at a given spacing Pt, opposite to the plurality of first salient pole teeth PT1 of the first block B1, and arranged in a stripe pattern along the X direction; and a second three-phase winding WW11 to WW13, wound on the pole post of the second three-phase winding MP11 to MP13. Furthermore, the pole posts of the second three-phase winding MP11 to MP13 are connected by a magnetic yoke Y1. The yoke Y1 of the first armature unit AU1 and the yoke Y2 of the second armature unit AU2 are connected by a connecting portion CP comprising magnetic material, such that the first armature unit AU1 and the second armature unit AU2 are arranged along the X direction. In this example, since the connecting portion CP constitutes a worktable, it has a larger shape that is generally opposite to the first armature unit AU1 and the second armature unit AU2, but theoretically, the part that connects the yoke Y1 and the yoke Y2 is called the connecting portion.

[0068] In this embodiment, for illustrative purposes, the first armature unit AU1 and the second armature unit AU2 are described as having a first set of three magnetic pole portions MP1 to MP3 and a second set of three magnetic pole portions MP11 to MP13. However, the number of magnetic pole portions in one first armature unit AU1 and one second armature unit AU2 is only required to be 3m each. If expressed as a higher-order concept in the above embodiment, it becomes the first 3m magnetic pole portions MP1 to MP3 (m is a positive integer greater than or equal to 1) and the second 3m magnetic pole portions MP11 to MP13.

[0069] Furthermore, in the three-phase linear actuator, the first three-phase windings WW1 to WW3 of the first armature unit AU1 and the second three-phase windings WW11 to WW13 of the second armature unit AU2 are energized respectively, and the first three magnetic poles MP1 to MP3 and the second three magnetic poles MP11 to MP13 are energized, thereby generating a moving magnetic field that moves along the X direction, causing the moving part M to move along the X direction. Figure 5 This is a diagram schematically illustrating the relationship of the magnetic attraction generated when the moving part M moves. (Example) Figure 5 As shown, during the period when the moving member M moves due to the moving magnetic field, a first combined magnetic attraction force f1 acting in the Z direction is generated between the plurality of second salient pole teeth PT2 of the first three magnetic pole portions MP1 to MP3 of the first armature unit AU1 and the plurality of first salient pole teeth PT1 opposite to the plurality of second salient pole teeth PT2. Additionally, a second combined magnetic attraction force f2 acting in the Z direction is generated between the plurality of second salient pole teeth PT2 of the second three magnetic pole portions MP11 to MP13 of the second armature unit AU2 and the plurality of first salient pole teeth PT1 opposite to the plurality of second salient pole teeth PT2. In this embodiment, the dimensions of each part of the second block B2 are determined, and the energization of the first three-phase windings WW1 to WW3 and the second three-phase windings WW11 to WW13 is controlled such that the point of application of the combined force (f1 + f2) of the first combined magnetic attraction force f1 and the second combined magnetic attraction force f2 is located within a region centered on the center of gravity of the moving member M and with a given distance Pt as the radius. Thus, through experimentation, it was confirmed that a three-phase linear actuator can be provided in which the moving parts do not substantially tilt when using non-contact bearings. Furthermore, the determination of "the region where the given spacing Pt is set as the radius" was determined by the inventors through experimentation, and was not derived theoretically, but as long as it is within this defined range, there are no practical obstacles.

[0070] Specifically, in this embodiment, the spacing Pt of the plurality of first salient pole teeth PT1, the spacing Pt of the plurality of second salient pole teeth PT2, the spacing Pt3 between the first three magnetic pole portions MP1 to MP3, the spacing Pt4 between the second three magnetic pole portions MP11 to MP13, and the length L in the X direction of the connecting portion CP are determined. In this embodiment, the spacing Pt of the plurality of first salient pole teeth PT1 is equal to the spacing Pt of the three second salient pole teeth PT2, and the spacing Pt3 between the first three magnetic pole portions MP1 to MP3, the spacing Pt4 between the second three magnetic pole portions MP11 to MP13, and the length of the connecting portion CP have the relationship Pt3 < Pt4 < L. However, these dimensional relationships are only one example. As long as the relationship between the point of application of the combined force described above and the center of gravity of the moving member M holds, the dimensions of each part can also be different. It can be Pt3 = Pt4, or L ≤ Pt3 (Pt4).

[0071] In this embodiment, the energizing control of the first three-phase windings WW1-WW3 and the second three-phase windings WW11-WW13 is implemented such that when the first three magnetic pole portions MP1-MP3, arranged along the movement direction (X direction) of the first armature unit, are energized as U-phase, V-phase, and W-phase, simultaneously, the second three magnetic pole portions MP11-MP13, arranged along the X direction, are energized as W-phase, V-phase, and U-phase. In the above dimensional relationships, when such energizing control is performed, as... Figure 5As shown, the relationship between the point of application of the combined force and the center of gravity of the moving part M holds true. As a result, even when using a non-contact bearing AB, the moving part M, moving along the X direction, will not tilt significantly. According to the inventors' experiments, in this embodiment, it was confirmed that the tilt angle converges within a tilt angle range of ±0.003 degrees to ±0.005 degrees. Furthermore, this tilt angle range varies depending on the magnetic pole size and attractive force; therefore, the present invention is not limited to this tilt angle range.

[0072] Figure 6 (A) and Figure 6 (B) shows Figure 1 A variation of the implementation method. In the above implementation method, the second block B2 has one first armature unit AU1 and one second armature unit AU2, but the second block B2 may also have n (n is a positive integer greater than or equal to 1) first armature units AU1 and n second armature units AU2. Figure 6 (A) and Figure 6 (B) shows a variation using two first armature units AU1 and two second armature units AU2. Figure 6 (A) and Figure 6 In a variation of (B), an example is shown where two combined units CU1 and CU2, consisting of a first armature unit AU1 and a second armature unit AU2 arranged along the X direction, are arranged in the X direction. Figure 6 In example (A), the two combined units CU1 and CU2 are arranged alternately along the X direction. Figure 6 In example (B), the two combination units CU1 and CU2 are arranged along the X direction such that, in the two combination units CU1 and CU2, one armature unit of the other combination unit is located between the combination units. These examples can also achieve the same effect as the first embodiment.

[0073] If the structure of the first embodiment is described using higher-level concepts incorporating these examples, it becomes as follows. In particular, the second block B2 has n (n is a positive integer greater than or equal to 1) first armature units AU1 and n second armature units AU2.

[0074] n first armature units AU1 each have: first 3m (m is a positive integer greater than or equal to 1) magnetic pole portions MP1 to MP3, with a plurality of convex second salient pole teeth PT2 formed at their front ends, which are opposite to the plurality of first salient pole teeth PT1 of the first block B1 in the Z direction with gaps and arranged in a stripe pattern in the X direction with a given spacing Pt, and arranged along the X direction; and first three-phase windings WW1 to WW3, wound on the pole posts of the first 3m magnetic pole portions MP1 to MP3. n second armature units AU2 each have: second 3m magnetic pole portions MP11 to MP13, with a plurality of convex second salient pole teeth PT2 formed at their front ends, which are opposite to the plurality of first salient pole teeth PT1 of the first block B1 in the Z direction with gaps and arranged in a stripe pattern in the X direction with a given spacing Pt, and arranged along the X direction; and second three-phase windings WW11 to WW13, wound on the pole posts of the second 3m magnetic pole portions MP11 to MP13. Furthermore, it includes a connecting part CP, which comprises a magnetic material, connecting n first armature units AU1 and n second armature units AU2. In the three-phase linear actuator, the first three-phase windings WW1-WW3 of the n first armature units and the second three-phase windings WW11-WW13 of the n second armature units are respectively energized, and the first 3m magnetic pole portions MP1-MP3 and the second 3m magnetic pole portions MP11-MP13 are energized, thereby generating a moving magnetic field that moves along the X direction, causing the moving member M to move. In this invention, the dimensions of each part of the second block B2 are determined, and the energization of the first three-phase windings WW1 to WW3 and the second three-phase windings WW11 to WW13 is controlled, such that the point of application of the combined resultant force of the first composite magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth PT2 of the first 3m magnetic pole parts MP1 to MP3 of the n first armature units and the plurality of first salient pole teeth PT1 opposite to the plurality of second salient pole teeth PT2, and the second composite magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth PT2 of the second 3m magnetic pole parts MP11 to MP13 of the n second armature units and the plurality of first salient pole teeth PT1 opposite to the plurality of second salient pole teeth PT2, lies within a region R centered on the center of gravity of the moving part and with a given spacing Pt as the radius.

[0075] [Second Implementation]

[0076] Figure 7 A bottom view of the second block B2 of the three-phase linear actuator according to the second embodiment of the present invention is shown. Figure 8 (A) to Figure 8 (C) is a schematic diagram illustrating the structure of the Y-direction armature block used in the second block B2 of the three-phase linear actuator in this embodiment. In this embodiment, the structure of the second block B2 is similar to... Figures 1 to 4 This differs from the first embodiment shown. Therefore, the explanation will focus on the structure of the second block B2. Figure 7 As shown, the second block B2 includes first and second X-direction armature blocks XAB1 and XAB2, and first and second Y-direction armature blocks YAB1 and YAB2. The first and second X-direction armature blocks XAB1 and XAB2 have the same structure as in the first embodiment, and have the same... Figure 4 The structure shown is the same. Therefore, the first and second X-direction armature blocks XAB1 and XAB2 are the same as those shown. Figure 4 Similarly, the structure shown includes a first armature unit AU1, a second armature unit AU2, and a connecting portion CP. The first armature unit AU1 has: first three magnetic pole portions MP1 to MP3, with a plurality of convex second salient pole teeth PT2 formed at the front end, which are opposed to the plurality of first salient pole teeth PT1 of the first block B1 in the Z direction with a gap and arranged in a stripe pattern in the X direction at a given spacing Pt, and arranged along the X direction; and first three-phase windings WW1 to WW3, wound on the pole posts of the three magnetic pole portions MP1 to MP3. The second armature unit AU2 has: a second third magnetic pole section MP11 to MP13, with a plurality of convex second salient pole teeth PT2 formed at the front end, which are opposite to the plurality of first salient pole teeth PT1 of the first block B1 in the Z direction with a gap and arranged in a stripe pattern in the X direction with a given spacing Pt, and arranged along the X direction; and a second and third phase winding WW11 to WW13, which are wound on the pole posts of the second third magnetic pole section MP11 to MP13. The connecting part CP includes magnetic material and connects the first armature unit AU1 and the second armature unit AU2.

[0077] Additionally, as shown in Figure 8, the first and second Y-direction armature blocks YAB1 and YAB2 have a third armature unit AU3, a fourth armature unit AU4, and a connecting portion CP. The third armature unit AU3 has: a third three-pole portion MP21 to MP23, with a plurality of convex second salient pole teeth PT2 formed at the front end, which are opposite to the plurality of first salient pole teeth PT1 of the first block B1 in the Z direction with a gap and arranged in a stripe pattern in the Y direction at a given spacing Pt, and arranged along the Y direction; and a third three-phase winding WW21 to WW23, which are wound on the third three-pole portion MP21 to MP23. The pole posts of P21 to MP23, the fourth armature unit AU4 has: a fourth third magnetic pole section MP31 to MP33, with a plurality of convex second salient pole teeth PT2 formed at the front end, which are opposite to a plurality of first salient pole teeth PT1 of the first block B1 in the Z direction with a gap and arranged in a stripe pattern in the Y direction with a given spacing Pt, and arranged along the Y direction; and a fourth three-phase winding WW31 to WW33, which is wound on the pole posts of the fourth third magnetic pole section MP31 to MP33, the connecting part CP includes magnetic material, and connects the third armature unit AU3 and the fourth armature unit AU4.

[0078] And, as Figure 7As shown, the first and second X-direction armature blocks XAB1 and XAB2 are arranged along the first diagonal CL1, and the first and second Y-direction armature blocks YAB1 and YAB2 are arranged along the second diagonal CL2, which is orthogonal to the first diagonal CL1. The first three-phase windings WW1 to WW3 of the first armature unit and the second three-phase windings WW11 to WW13 of the second armature unit of the first and second X-direction armature blocks XAB1 and XAB2 are respectively energized, and the first three magnetic pole portions MP1 to MP3 and the second three magnetic pole portions MP11 to MP13 are energized, thereby generating a moving magnetic field that moves along the X direction. In addition, the third three-phase windings WW21 to WW23 of the third armature unit of the first and second Y-direction armature blocks YAB1 and YAB2 and the fourth three-phase windings WW31 to WW33 of the fourth armature unit are respectively energized, and the third three magnetic pole parts MP21 to MP23 and the fourth three magnetic pole parts MP31 to MP33 are energized, thereby generating a moving magnetic field that moves along the Y direction.

[0079] exist Figure 9The diagram schematically illustrates the relationships between the first to fourth combined forces F1 to F4, which are theoretically conceived magnetic attraction forces, the combined force F12 of the first combined force F1 and the second combined force F2, and the combined force F34 of the third combined force F3 and the fourth combined force F4, in this embodiment. In this embodiment, the first combined force F1 is defined as the force obtained by combining the first combined magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth PT2 of the first three magnetic pole portions MP1 to MP3 of the first X-direction armature block XAB1 and the plurality of first salient pole teeth PT1 opposite to the plurality of second salient pole teeth PT2, and the second combined magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth PT2 of the second three magnetic pole portions MP11 to MP13 and the plurality of first salient pole teeth PT1 opposite to the plurality of second salient pole teeth PT2. Furthermore, the force obtained by combining the third combined magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth PT2 of the first three magnetic pole portions MP1 to MP3 of the second X-direction armature block XAB2 and the plurality of first salient pole teeth PT1 opposite to the plurality of second salient pole teeth PT2, and the fourth combined magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth PT2 of the second three magnetic pole portions MP11 to MP13 and the plurality of first salient pole teeth PT1 opposite to the plurality of second salient pole teeth PT2, is defined as the second combined resultant force F2. And the force obtained by combining the first combined resultant force F1 and the second combined resultant force F2 is defined as the resultant force F12. In addition, the force obtained by combining the fifth combined magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth PT2 of the third three magnetic pole portions MP21 to P23 of the first Y-direction armature block YAB1 and the plurality of first salient pole teeth PT1 opposite to the plurality of second salient pole teeth PT2, and the sixth combined magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth PT2 of the fourth three magnetic pole portions MP21 to MP23 and the plurality of first salient pole teeth PT1 opposite to the plurality of second salient pole teeth PT2, is defined as the third combined resultant force F3. Furthermore, the force obtained by combining the seventh composite magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth PT2 of the third three magnetic pole portions MP31 to MP33 of the second Y-direction armature block YAB2 and the plurality of first salient pole teeth PT1 opposite to the plurality of second salient pole teeth PT2, and the eighth composite magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth PT2 of the fourth three magnetic pole portions MP31 to MP33 and the plurality of first salient pole teeth PT1 opposite to the plurality of second salient pole teeth PT2, is defined as the fourth composite resultant force F4. And the force obtained by combining the third composite resultant force F3 and the fourth composite resultant force is defined as the composite resultant force F34.In this embodiment, the dimensions of each part of the second block B2 are determined. In addition, the energization of the first three-phase windings WW1 to WW3, the second three-phase windings WW11 to WW13, the third three-phase windings WW21 to WW23, and the fourth three-phase windings WW31 to WW33 is controlled so that the point of action of the resultant force F12 and the resultant force F34 on the second block B2 is located within the region R centered on the center of gravity of the second block constituting the moving member M and with the given spacing Pt as the radius.

[0080] To achieve the aforementioned effect, in the three-phase linear actuator of this embodiment, the first three magnetic poles MP1 to MP3 of the first armature unit AU1 are energized as the U phase, V phase, and W phase, respectively. Simultaneously, the second three magnetic poles MP11 to MP13 of the second armature unit AU2 are energized as the W phase, V phase, and U phase. Furthermore, the third three magnetic poles MP21 to MP23 of the third armature unit AU3 are energized as the U phase, V phase, and W phase, respectively. Simultaneously, the fourth three magnetic poles MP31 to MP33 of the fourth armature unit AU4 are energized as the W phase, V phase, and U phase. With this configuration, a three-phase linear actuator can be provided that, even when the moving member M moves along either the X or Y direction, the moving member M moving along the XY direction will not substantially tilt. Furthermore, according to this embodiment, since the armature blocks XAB1 and XAB2 in the X direction and the armature blocks YAB1 and YAB2 in the Y direction are common structures, the design and manufacture of a three-phase linear actuator in which the moving part moves along the XY direction becomes easier.

[0081] In this embodiment, for the sake of explanation, it will be stated that the first armature unit AU1 to the fourth armature unit AU4 each have 3 magnetic pole portions, but the number of magnetic pole portions in one armature unit only needs to be 3m each. If expressed in a higher-order concept, it becomes 3m magnetic pole portions (m is a positive integer greater than or equal to 1).

[0082] [Third Implementation]

[0083] Figure 10 The third embodiment is shown. Like the second embodiment, this embodiment allows the moving member to move along the XY directions. The difference between the third and second embodiments is that, instead of the two X-direction armature blocks in the second embodiment, a first armature unit AU1 and a second armature unit AU2 are arranged along the first diagonal CL1; and instead of the two Y-direction armature blocks, a third armature unit AU3 and a fourth armature unit AU4 are arranged along the second diagonal CL2, which is orthogonal to the first diagonal CL1. Furthermore, the windings are not shown in the diagram.

[0084] Specifically, the second armature unit B2 includes a first armature unit AU1 to a fourth armature unit AU4. The first armature unit AU1 has: first three magnetic pole portions MP1 to MP3, with a plurality of convex second salient pole teeth PT2 formed at its front end, which are opposite to the plurality of first salient pole teeth PT1 of the first B1 in the Z direction with gaps and arranged in a stripe pattern in the X direction at a given spacing Pt, and arranged along the X direction; and a first three-phase winding WW1 to WW3, wound on the pole posts of the first three magnetic pole portions MP1 to MP3. The second armature unit AU2 has: second three magnetic pole portions MP11 to MP13, with a plurality of convex second salient pole teeth PT2 formed at its front end, which are opposite to the plurality of first salient pole teeth PT1 of the first B1 in the Z direction with gaps and arranged in a stripe pattern in the X direction at a given spacing Pt, and arranged along the X direction; and a second three-phase winding WW11 to WW13, wound on the pole posts of the second three magnetic pole portions MP11 to MP13. The third armature unit AU3 has: three third magnetic pole portions MP21 to MP23, with a plurality of convex second salient pole teeth PT2 formed at the front end, which are opposite to the plurality of first salient pole teeth PT1 of the first block B1 in the Z direction with gaps and arranged in a stripe pattern in the Y direction with a given spacing Pt, and arranged along the Y direction; and a third three-phase winding WW21 to WW23, wound on the pole posts of the third third magnetic pole portions MP21 to MP23. The fourth armature unit AU4 has: three fourth magnetic pole portions MP31 to MP33, with a plurality of convex second salient pole teeth PT2 formed at the front end, which are opposite to the plurality of first salient pole teeth PT1 of the first block B1 in the Z direction with gaps and arranged in a stripe pattern in the Y direction with a given spacing Pt, and arranged along the Y direction; and a fourth three-phase winding WW31 to WW33, wound on the pole posts of the fourth third magnetic pole portions MP31 to MP33. Furthermore, in the three-phase linear actuator of this embodiment, the first three-phase windings WW1 to WW3 and the second three-phase windings WW11 to WW13 are energized respectively, and the first three magnetic poles MP1 to MP3 and the second three magnetic poles MP11 to MP13 are energized, thereby generating a moving magnetic field that moves along the X direction. The third three-phase windings WW21 to WW23 and the fourth three-phase windings WW31 to WW33 are energized respectively, and the third three magnetic poles MP21 to MP23 and the fourth three magnetic poles MP31 to MP33 are energized, thereby generating a moving magnetic field that moves along the Y direction, causing the moving member M to move along the XY direction.

[0085] exist Figure 11The diagram schematically illustrates the relationship between the first to fourth combined magnetic attraction forces f1 to f4, the first combined force F1, and the second combined force F2, which are theoretically conceived magnetic attraction forces in this embodiment. In this embodiment, the dimensions of each part of the second block B2 are determined, and the energization of the first three-phase windings WW1 to WW3, the second three-phase windings WW11 to WW13, the third three-phase windings WW21 to WW23, and the fourth three-phase windings WW31 to WW33 is controlled, such that the points of action of the combined force F1 and the combined force F2 are located within a region R centered on the center of gravity of the moving part and with a given spacing Pt as the radius. The combined force F1 is the first combined magnetic attraction force f1 acting in the Z direction between the plurality of second salient pole teeth PT2 of the first three magnetic pole parts MP1 to MP3 and the plurality of first salient pole teeth PT1 opposite to the plurality of second salient pole teeth PT2, and the second three-phase windings WW1 to MP3. The combined force F2 is the resultant force of a second composite magnetic attraction force f2 acting in the Z direction between the multiple second salient pole teeth PT2 of the three magnetic pole sections MP11 to MP13 and the multiple first salient pole teeth PT1 opposite to the multiple second salient pole teeth PT2. This combined force F2 is the resultant force of a third composite magnetic attraction force f3 acting in the Z direction between the multiple second salient pole teeth PT2 of the three magnetic pole sections MP21 to MP23 and the multiple first salient pole teeth PT1 opposite to the multiple second salient pole teeth PT2, and a fourth composite magnetic attraction force f4 acting in the Z direction between the multiple second salient pole teeth PT2 of the three magnetic pole sections MP31 to MP33 and the multiple first salient pole teeth PT1 opposite to the multiple second salient pole teeth PT2.

[0086] In this embodiment, it is also preferred that the first three magnetic pole portions MP1 to MP3 of the first armature unit are energized as the U phase, V phase, and W phase, and simultaneously, the second three magnetic pole portions MP11 to MP13 are energized as the W phase, V phase, and U phase. Furthermore, the third 3m magnetic pole portions MP21 to MP23 of the third armature unit are energized as the U phase, V phase, and W phase, and simultaneously, the fourth 3m magnetic pole portions MP31 to MP33 are energized as the W phase, V phase, and U phase. According to this embodiment, a three-phase linear actuator in which the moving member M, moving in the XY direction when using a non-contact bearing, does not substantially tilt can also be provided.

[0087] In this embodiment, for the sake of explanation, it will be stated that the first armature unit AU1 to the fourth armature unit AU4 each have 3 magnetic pole portions, but the number of magnetic pole portions in one armature unit only needs to be 3m each. If expressed in a higher-order concept, it becomes 3m magnetic pole portions (m is a positive integer greater than or equal to 1).

[0088] [Fourth Implementation]

[0089] Figure 12The fourth embodiment is shown. Like the third embodiment, this embodiment allows the moving member to move along the XY directions. In this embodiment, the second block B2 includes two X-direction combination units XCU1 and XCU2, and two Y-direction combination units YCU1 and YCU2. Furthermore, the windings are not shown in the diagram.

[0090] Two X-direction combination units, XCU1 and XCU2, are configured such that the first armature unit AU1 and the second armature unit AU2 are arranged along the X-direction. The first armature unit AU1 has: first three magnetic pole portions MP1 to MP3; a plurality of convex second salient pole teeth PT2 formed at the front end, which are opposite to the plurality of first salient pole teeth PT1 of the first block B1 in the Z-direction with a gap and arranged in a stripe pattern in the X-direction at a given spacing Pt, and are arranged along the X-direction; and first three-phase windings WW1 to WW3. The second armature unit AU2 has the following components: the pole posts of the first three magnetic pole portions MP11 to MP13, with a plurality of convex second salient pole teeth PT2 formed at the front end, which are opposite to the plurality of first salient pole teeth PT1 of the first block B1 in the Z direction with a gap and arranged in a stripe pattern in the X direction with a given spacing Pt; and the second and third phase windings WW11 to WW13, which are wound on the pole posts of the second three magnetic pole portions MP11 to MP13.

[0091] Additionally, the two Y-direction combination units YCU1 and YCU2 are configured such that the third armature unit AU3 and the fourth three-phase windings WW31 to WW33 are arranged along the Y-direction. The third armature unit AU3 has: a third set of three magnetic pole portions MP21 to MP23, with a plurality of convex second salient pole teeth PT2 formed at the front end, which are opposite to the plurality of first salient pole teeth PT1 of the first block B1 in the Z-direction with a gap and arranged in a stripe pattern in the Y-direction at a given spacing Pt, and arranged along the Y-direction; and the third three-phase windings WW21 to WW33. W23, the pole post wound on the third magnetic pole section MP21~MP23, the fourth three-phase winding WW31~WW33 has: the fourth third magnetic pole section MP31~MP33 has a plurality of convex second salient pole teeth PT2 formed at the front end, which are opposite to the plurality of first salient pole teeth PT1 of the first block B1 in the Z direction with a gap and are arranged in a stripe pattern in the Y direction with a given spacing Pt, and are arranged in the Y direction; and the fourth three-phase winding WW31~WW33, the pole post wound on the fourth third magnetic pole section MP31~MP33.

[0092] Furthermore, the second unit B2 includes a connecting portion CP that connects two X-direction combination units and two Y-direction combination units, such that the first armature unit AU1 of one combination unit and the second armature unit AU2 of the other combination unit of the two X-direction combination units XCU1 and XCU2 are arranged along a first diagonal, and the third armature unit AU3 of one combination unit and the fourth armature unit AU4 of the other combination unit of the two Y-direction combination units YCU1 and YCU2 are arranged along a second diagonal. In this three-phase linear actuator, the first three-phase windings WW1~WW3 and the second three-phase windings WW11~WW13 in the two X-direction combination units XCU1 and XCU2 are energized respectively, and the first three magnetic pole portions MP1~MP3 and the second three magnetic pole portions MP11~MP13 are energized, thereby generating two moving magnetic fields that are arranged in parallel and move along the X direction. Furthermore, the third three-phase windings WW21~WW23 and the fourth three-phase windings WW31~WW33 in the two Y-direction combination units YCU1 and YCU2 are respectively energized, and the third magnetic pole parts MP21~P23 and the fourth magnetic pole parts MP31~MP33 are energized, thereby generating two moving magnetic fields that are arranged in parallel and move along the Y direction, causing the moving part M to move along the XY direction.

[0093] like Figure 13As shown, in the three-phase linear actuator of this embodiment, the dimensions of each part of the second block B2 are determined, and the energization of the first three-phase windings WW1-WW3, the second three-phase windings WW11-WW13, the third three-phase windings WW21-WW23, and the fourth three-phase windings WW31-WW33 is controlled so that the points of application of the combined force F12 and the combined force F34 are located within a region R centered on the center of gravity of the moving part and with a given spacing Pt as the radius. The combined force F12 is the combined force of the combined forces F1 and F2. The combined force F1 is generated in one X-direction combined unit XCU1 of the two X-direction combined units XCU1 and XCU2, and is generated in the first X-direction combined unit XCU1. The resultant force F2 is generated in another X-direction combination unit XCU2 and acts in the Z-direction between the plurality of second salient pole teeth PT2 of the three magnetic pole sections MP1 to MP3 and the plurality of first salient pole teeth PT1 opposite to the plurality of second salient pole teeth PT2. This resultant force F2 is the first combined magnetic attraction force acting in the Z-direction between the plurality of second salient pole teeth PT2 of the three magnetic pole sections MP1 to MP3 and the plurality of first salient pole teeth PT1 opposite to the plurality of second salient pole teeth PT2. The magnetic attraction, and the resultant force of the second composite magnetic attraction acting in the Z direction between the plurality of second salient pole teeth PT2 of the second three magnetic pole sections MP11-MP13 and the plurality of first salient pole teeth PT1 opposite to the plurality of second salient pole teeth PT2, the combined resultant force F34 is the combined resultant force of resultant force F3 and resultant force F4, the resultant force F3 is generated in one Y-direction combination unit YCU1 of the two Y-direction combination units YCU1 and YCU2, the third composite magnetic attraction acting in the Z direction between the plurality of second salient pole teeth PT2 of the third three magnetic pole sections MP21-MP23 and the plurality of first salient pole teeth PT1 opposite to the plurality of second salient pole teeth PT2, and the fourth three magnetic pole section MP31-MP23, the third composite magnetic attraction acting in the Z direction between the plurality of second salient pole teeth PT2 and the plurality of first salient pole teeth PT1 opposite to the plurality of second salient pole teeth PT2, and the third composite magnetic attraction acting in the Z direction between the plurality of second salient pole teeth PT2 of the third three magnetic pole sections MP21-MP23, and the third composite magnetic attraction acting in the Z direction between the plurality of second salient pole teeth PT2 and the plurality of first salient pole teeth PT1 opposite to the plurality of second salient pole teeth PT2, the fourth three magnetic pole section MP31-MP23, the third composite magnetic attraction acting in the Z direction between the plurality of second salient pole teeth PT2 and the plurality of first salient pole teeth PT1 opposite to the plurality of second salient pole teeth PT2 ... The resultant force F4 is the resultant force of the second composite magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth PT2 of MP33 and the plurality of first salient pole teeth PT1 opposite to the plurality of second salient pole teeth PT2. This resultant force F4 is generated in another Y-direction combination unit YCU2 and is the resultant force of the third composite magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth PT2 of the third three magnetic pole parts MP21 to MP23 and the plurality of first salient pole teeth PT1 opposite to the plurality of second salient pole teeth PT2, and the resultant force of the fourth composite magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth PT2 of the fourth three magnetic pole parts MP31 to MP33 and the plurality of first salient pole teeth PT1 opposite to the plurality of second salient pole teeth PT2.

[0094] According to this embodiment, by adopting the above-described structure, a three-phase linear actuator can be provided in which the moving member M moving along the XY direction will not substantially tilt even when using a non-contact bearing AB. Furthermore, in this three-phase linear actuator, to achieve the above-described effect, the first three magnetic pole portions MP1 to MP3 of the first armature unit AU1 are energized as U-phase, V-phase, and W-phase, and simultaneously, the second three magnetic pole portions MP11 to MP13 of the second armature unit AU2 are energized as W-phase, V-phase, and U-phase, the third three magnetic pole portions MP21 to MP23 of the third armature unit AU3 are energized as U-phase, V-phase, and W-phase, and simultaneously, the fourth three magnetic pole portions MP31 to MP33 of the fourth armature unit AU4 are energized as W-phase, V-phase, and U-phase.

[0095] In this embodiment, for the sake of explanation, it will be stated that the first armature unit AU1 to the fourth armature unit AU4 each have 3 magnetic pole portions, but the number of magnetic pole portions in one armature unit only needs to be 3m each. If expressed in a higher-order concept, it becomes 3m magnetic pole portions (m is a positive integer greater than or equal to 1).

[0096] Industrial availability

[0097] According to the present invention, a three-phase linear actuator is provided in which the moving parts do not tilt even when using non-contact bearings.

Claims

1. A three-phase linear actuator, comprising: The first piece has a plurality of convex first salient pole teeth, which, when defined as mutually orthogonal X, Y and Z directions, are composed of magnetic bodies arranged in a checkerboard pattern or in a stripe pattern along the X and Y directions at a given interval. The second block comprises n first armature units, n second armature units, and a connecting portion. The first armature unit has: a first 3m magnetic pole portion, and a plurality of convex second salient pole teeth formed at the front end in the Z direction with gaps between them and the plurality of first salient pole teeth of the first block, and arranged in a stripe pattern in the X direction at the given spacing, and arranged along the X direction. The first three-phase winding is wound around the pole post of the first 3m magnetic pole portion. The n second armature units have: a second 3m magnetic pole portion, which forms a plurality of convex second convex pole teeth at the front end that are opposite to the plurality of first convex pole teeth of the first block with a gap and are arranged in a stripe pattern at a given interval, and are arranged along the X direction. The second and third phase windings are wound around the pole posts of the second 3m magnetic poles, and the connecting part includes magnetic material to connect the n first armature units and the n second armature units; and In a non-contact bearing, the first block is designated as a fixed component, and the second block is designated as a movable component. The movable component is movably supported relative to the fixed component in a floating state. Where n is a positive integer greater than or equal to 1, and m is a positive integer greater than or equal to 1. The first three-phase windings of the n first armature units and the second three-phase windings of the n second armature units are respectively energized, and the first 3m magnetic pole portions and the second 3m magnetic pole portions are energized, thereby generating a moving magnetic field that moves along the X direction, causing the moving component to move. The three-phase linear actuator is characterized in that... The dimensions of each part of the second block are determined, and the energization of the first three-phase winding and the second three-phase winding is controlled such that the point of application of the combined resultant force of the first composite magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth and the plurality of first salient pole teeth opposite to the plurality of second salient pole teeth in the first 3m magnetic pole parts of the n first armature units, and the second composite magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth and the plurality of first salient pole teeth opposite to the plurality of second salient pole teeth in the second 3m magnetic pole parts of the n second armature units, is located in a region centered on the center of gravity of the moving member and with the given spacing as the radius.

2. The three-phase linear actuator according to claim 1, wherein, n first armature units and n second armature units are configured to be arranged alternately along the X direction.

3. The three-phase linear actuator according to claim 1, wherein, The first armature unit and the second armature unit are arranged along the X direction to form n combined units, which are arranged along the X direction.

4. The three-phase linear actuator according to claim 1, 2, or 3, wherein, The first 3m magnetic poles of the first armature unit are energized as U phase, V phase and W phase, and at the same time, the second 3m magnetic poles of the second armature unit are energized as W phase, V phase and U phase.

5. A three-phase linear actuator, characterized in that, have: The first piece has a plurality of convex first salient pole teeth forming a fixing member. When the plurality of first salient pole teeth are defined to be mutually orthogonal X, Y and Z directions, they are composed of magnetic bodies arranged in a checkerboard pattern along the X and Y directions at a given interval. The second piece, positioned opposite the first piece with a gap, becomes a movable component. A non-contact bearing movably supports the moving member relative to the fixed member in a floating state. The second piece has: The first X-direction armature block and the second X-direction armature block have n first armature units, n second armature units and connecting portions. The first armature unit has: a first 3m magnetic pole portion, and a plurality of convex second salient pole teeth are formed at the front end in the Z direction, which are opposed to the plurality of first salient pole teeth of the first block with a gap and arranged in a stripe pattern in the X direction at the given spacing, and are arranged along the X direction; The first three-phase winding is wound around the pole post of the first 3m magnetic pole portion. The second armature unit has: a second 3m magnetic pole portion, which forms a plurality of convex second convex pole teeth at the front end that are opposed to the plurality of first convex pole teeth of the first block with a gap and arranged in a stripe pattern at the given spacing, and are arranged along the X direction. The second and third phase windings are wound around the pole posts of the second 3m magnetic pole portions. The connecting portion includes magnetic material and connects the n first armature units and the n second armature units; and The first Y-direction armature block and the second Y-direction armature block each have n third armature units, n fourth armature units, and connecting portions. Each third armature unit has: a third 3m magnetic pole portion, with a plurality of convex second salient pole teeth formed at its front end in the Z-direction, spaced apart and arranged in a stripe pattern in the Y-direction at a given interval; and a third three-phase winding wound around the pole posts of the third 3m magnetic pole portion. Each fourth armature unit has: a fourth 3m magnetic pole portion, with a plurality of convex second salient pole teeth formed at its front end, spaced apart and arranged in a stripe pattern at a given interval; and a fourth three-phase winding wound around the pole posts of the fourth 3m magnetic pole portion. The connecting portions comprise magnetic material and connect the n third armature units and the n fourth armature units. Where n is a positive integer greater than or equal to 1, and m is a positive integer greater than or equal to 1. The configuration is such that the first X-direction armature block and the second X-direction armature block are arranged along a first diagonal, and the first Y-direction armature block and the second Y-direction armature block are arranged along a second diagonal orthogonal to the first diagonal. The configuration is such that the first three-phase windings of the n first armature units of the first X-direction armature block and the second three-phase windings of the n second armature units of the second X-direction armature block are respectively energized, and the first 3m magnetic pole portions and the second 3m magnetic pole portions are energized, thereby generating a moving magnetic field that moves along the X-direction. The configuration is such that the third three-phase windings of the n third armature units of the first Y-direction armature block and the second Y-direction armature block, and the fourth three-phase windings of the n fourth armature units, are respectively energized, and the third 3m magnetic pole portions and the fourth 3m magnetic pole portions are energized, thereby generating a moving magnetic field that moves along the Y-direction. The dimensions of each part of the second block are determined, and the energization of the first three-phase winding, the second three-phase winding, the third three-phase winding, and the fourth three-phase winding is controlled so that the points of application of the combined force of the first and second combined forces, and the points of application of the combined force of the third and fourth combined forces, are located within a region centered on the center of gravity of the moving part and with the given spacing as the radius. The first combined force is a combined force obtained by combining the first combined magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth in the first 3m magnetic pole portions of the first X-direction armature block and the plurality of first salient pole teeth opposite to the plurality of second salient pole teeth, and the second combined magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth in the second 3m magnetic pole portions and the plurality of first salient pole teeth opposite to the plurality of second salient pole teeth. The second combined force is a combined force obtained by combining the third combined magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth in the first 3m magnetic pole portions of the second X-direction armature block and the plurality of first salient pole teeth opposite to the plurality of second salient pole teeth, and the fourth combined magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth in the second 3m magnetic pole portions and the plurality of first salient pole teeth opposite to the plurality of second salient pole teeth. The third combined force is a combined force obtained by combining the fifth combined magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth and the plurality of first salient pole teeth opposite to the plurality of second salient pole teeth in the third 3m magnetic pole section of the first Y-direction armature block, and the sixth combined magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth and the plurality of first salient pole teeth opposite to the plurality of second salient pole teeth in the fourth 3m magnetic pole section. The fourth combined force is a combined force obtained by combining the seventh combined magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth and the plurality of first salient pole teeth opposite to the plurality of second salient pole teeth in the third 3m magnetic pole section of the second Y-direction armature block, and the eighth combined magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth and the plurality of first salient pole teeth opposite to the plurality of second salient pole teeth in the fourth 3m magnetic pole section.

6. A three-phase linear actuator, comprising: The first piece has a plurality of convex first salient pole teeth, which, when defined as mutually orthogonal X, Y and Z directions, are composed of magnetic bodies arranged in a checkerboard pattern along the X and Y directions at a given interval. The second part comprises a first armature unit, a second armature unit, a third armature unit, a fourth armature unit, and a connecting part. The first armature unit has: a first 3m magnetic pole portion, and a plurality of convex second convex pole teeth formed at the front end in the Z direction, which are opposed to the plurality of first convex pole teeth of the first part in the Z direction with a gap and arranged in a stripe pattern at the given interval, and arranged along the X direction. The first three-phase winding is wound around the pole posts of the first 3m magnetic pole portions. The second armature unit has: a second 3m magnetic pole portions, with a plurality of convex second salient pole teeth formed at the front end, which are opposite to the plurality of first salient pole teeth of the first block and arranged in a striped pattern in the X direction at the given spacing, and arranged along the X direction; and a second three-phase winding is wound around the pole posts of the second 3m magnetic pole portions. The third armature unit has: a third 3m magnetic pole portions, with a plurality of convex second salient pole teeth formed at the front end, which are opposite to the plurality of first salient pole teeth of the first block at the Z direction, and arranged in a striped pattern in the Y direction at the given spacing, and arranged along the Y direction. The fourth armature unit has: a fourth 3m magnetic pole portion, with a plurality of convex second convex pole teeth arranged in a stripe pattern in the Y direction at a given interval, opposite to the plurality of first convex pole teeth of the first block at a gap at the front end, and arranged along the Y direction; and a fourth three-phase winding, with a pole post wound on the fourth 3m magnetic pole portion, the connecting portion connecting the first armature unit to the fourth armature unit, such that the first armature unit and the second armature unit are arranged along a first diagonal, and the third armature unit and the fourth armature unit are arranged along a second diagonal orthogonal to the first diagonal; and In a non-contact bearing, the first block is designated as a fixed component, and the second block is designated as a movable component. The movable component is movably supported relative to the fixed component in a floating state. The first three-phase winding and the second three-phase winding are energized respectively, and the first 3m magnetic poles and the second 3m magnetic poles are energized, thereby generating a moving magnetic field that moves along the X direction. The third three-phase winding and the fourth three-phase winding are energized respectively, and the third 3m magnetic poles and the fourth 3m magnetic poles are energized, thereby generating a moving magnetic field that moves along the Y direction, causing the moving member to move along the XY direction. The three-phase linear actuator is characterized in that... The dimensions of each part of the second block are determined, and the energization of the first three-phase winding, the second three-phase winding, the third three-phase winding, and the fourth three-phase winding is controlled such that the point of application of the combined resultant force of the first composite magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth and the plurality of first salient pole teeth opposite to the plurality of second salient pole teeth in the first 3m magnetic pole section, the second composite magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth and the plurality of first salient pole teeth opposite to the plurality of second salient pole teeth in the second 3m magnetic pole section, the third composite magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth and the plurality of first salient pole teeth opposite to the plurality of second salient pole teeth in the third 3m magnetic pole section, and the fourth composite magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth and the plurality of first salient pole teeth opposite to the plurality of second salient pole teeth in the fourth 3m magnetic pole section, is located within a region centered on the center of gravity of the moving member and with the given spacing as the radius.

7. The three-phase linear actuator according to claim 5 or 6, wherein, The first 3m magnetic pole portions of the first armature unit are energized as the U phase, V phase, and W phase, and simultaneously, the second 3m magnetic pole portions of the second armature unit are energized as the W phase, V phase, and U phase. The third 3m magnetic poles of the third armature unit are energized as U-phase, V-phase and W-phase, and simultaneously, the fourth 3m magnetic poles of the fourth armature unit are energized as W-phase, V-phase and U-phase.

8. A three-phase linear actuator, comprising: The first piece has a plurality of convex first salient pole teeth, which, when defined as mutually orthogonal X, Y and Z directions, are composed of magnetic bodies arranged in a checkerboard pattern along the X and Y directions at a given interval. The second block comprises two X-direction combination units, two Y-direction combination units, and a connecting portion. The first armature unit and the second armature unit are arranged along the X-direction to form the X-direction combination unit. The first armature unit has: a first 3m magnetic pole portion, and a plurality of convex second salient pole teeth formed at the front end in the Z-direction, which are opposed to the plurality of first salient pole teeth of the first block with a gap and arranged in a stripe pattern at the given interval, and are arranged along the X-direction. The first three-phase winding, with pole posts wound around the first 3m magnetic pole portions, the second armature unit has: a second 3m magnetic pole portions, with a plurality of convex second salient pole teeth formed at the front end, facing the plurality of first salient pole teeth of the first block with gaps and arranged in a stripe pattern in the X direction at the given interval, and arranged along the X direction; and a second three-phase winding, with pole posts wound around the second 3m magnetic pole portions, the third armature unit and the fourth armature unit are arranged along the Y direction to form the Y-direction combined unit, the third armature unit having: a third 3m magnetic pole portions, with a plurality of convex second salient pole teeth formed at the front end, facing the plurality of first salient pole teeth of the first block with gaps and arranged in a stripe pattern in the Y direction at the given interval, and arranged along the Y direction; and a third three-phase winding. The winding is wound around the pole post of the third 3m magnetic pole portion. The fourth armature unit has: a fourth 3m magnetic pole portion, with a plurality of convex second salient pole teeth formed at the front end, which are opposed to the plurality of first salient pole teeth of the first block and arranged in a stripe pattern in the Y direction at the given spacing, and arranged along the Y direction; and a fourth three-phase winding is wound around the pole post of the fourth 3m magnetic pole portion. The connecting portion connects the two X-direction combination units and the two Y-direction combination units, such that the first armature unit of one combination unit of the two X-direction combination units and the second armature unit of the other combination unit are arranged along a first diagonal, and the third armature unit of one combination unit of the two Y-direction combination units and the fourth armature unit of the other combination unit are arranged along a second diagonal. and In a non-contact bearing, the first block is designated as a fixed component, and the second block is designated as a movable component. The movable component is movably supported relative to the fixed component in a floating state. Where m is a positive integer greater than or equal to 1. The first and second three-phase windings in the two X-direction combined units are energized, and the first and second 3m magnetic pole portions are energized, thereby generating two parallel moving magnetic fields that move along the X-direction. Similarly, the third and fourth three-phase windings in the two Y-direction combined units are energized, and the third and fourth 3m magnetic pole portions are energized, thereby generating two parallel moving magnetic fields that move along the Y-direction, causing the moving component to move along the XY direction. The three-phase linear actuator is characterized in that... The dimensions of each part of the second block are determined, and the energization of the first three-phase winding, the second three-phase winding, the third three-phase winding, and the fourth three-phase winding is controlled such that the point of application of the combined resultant force of the following forces is located in a region centered on the center of gravity of the moving part and with the given spacing as the radius: the resultant force of the first combined magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth in the first 3m magnetic pole parts and the plurality of first salient pole teeth opposite to the plurality of second salient pole teeth, and the second combined magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth in the second 3m magnetic pole parts and the plurality of first salient pole teeth opposite to the plurality of second salient pole teeth; The resultant force of the first combined magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth in the first 3m magnetic pole section and the plurality of first salient pole teeth opposite to the plurality of second salient pole teeth generated in the other X-direction combination unit, and the resultant force of the second combined magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth in the second 3m magnetic pole section and the plurality of first salient pole teeth opposite to the plurality of second salient pole teeth, and such that the point of application of the combined resultant force is located in a region centered on the center of gravity of the moving member and with the given spacing as the radius: the resultant force of the first combined magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth in the third 3m magnetic pole section and the plurality of first salient pole teeth opposite to the plurality of second salient pole teeth generated in the other X-direction combination unit, and the resultant force of the second combined magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth in the second 3m magnetic pole section and the plurality of first salient pole teeth opposite to the plurality of second salient pole teeth. The resultant force of the third combined magnetic attraction force acting in the Z direction between the plurality of first salient pole teeth opposite the second salient pole teeth and the resultant force of the third combined magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth and the plurality of first salient pole teeth opposite the plurality of second salient pole teeth in the fourth 3m magnetic pole section; and the resultant force of the third combined magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth and the plurality of first salient pole teeth opposite the plurality of second salient pole teeth in the third 3m magnetic pole section and the resultant force of the fourth combined magnetic attraction force acting in the Z direction between the plurality of second salient pole teeth and the plurality of first salient pole teeth opposite the plurality of second salient pole teeth in the fourth 3m magnetic pole section.

9. The three-phase linear actuator according to claim 8, wherein, The first 3m magnetic pole portions of the first armature unit are energized as the U phase, V phase, and W phase, and simultaneously, the second 3m magnetic pole portions of the second armature unit are energized as the W phase, V phase, and U phase. The third 3m magnetic poles of the third armature unit are energized as U-phase, V-phase and W-phase, and simultaneously, the fourth 3m magnetic poles of the fourth armature unit are energized as W-phase, V-phase and U-phase.

10. A three-phase linear actuator, comprising: The first piece has a plurality of convex first salient pole teeth, which, when defined as mutually orthogonal X, Y and Z directions, are composed of magnetic bodies arranged in a checkerboard pattern along the X and Y directions at a given interval. The second block comprises n X-direction combination units, n Y-direction combination units, and a connecting portion. The first armature unit and the second armature unit are arranged along the X-direction to form the X-direction combination unit. The first armature unit has: a first 3m magnetic pole portion, and a plurality of convex second salient pole teeth formed at the front end in the Z-direction, which are opposed to the plurality of first salient pole teeth of the first block with a gap and arranged in a stripe pattern at the given spacing, and are arranged along the X-direction. The first three-phase winding is wound around the pole posts of the first 3m magnetic pole portions. The second armature unit has: a second 3m magnetic pole portions, with a plurality of convex second salient pole teeth formed at the front end, which are opposed to the plurality of first salient pole teeth of the first block at a given interval and arranged in a stripe pattern in the X direction, and arranged along the X direction; and a second three-phase winding, with pole posts wound around the second 3m magnetic pole portions. The third armature unit and the fourth armature unit are arranged along the Y direction to form the Y-direction combined unit. The third armature unit has: a third 3m magnetic pole portions, with a plurality of convex second salient pole teeth formed at the front end, which are opposed to the plurality of first salient pole teeth of the first block at a given interval in the Z direction and arranged in a stripe pattern in the Y direction. The fourth armature unit has: a plurality of convex second salient pole teeth arranged in a striped pattern along the Y direction; and a third three-phase winding wound around the pole post of the third 3m magnetic pole portion; the fourth armature unit has: a fourth 3m magnetic pole portion having a plurality of convex second salient pole teeth formed at the front end with a gap between them and opposite to the plurality of first salient pole teeth of the first block and arranged in a striped pattern along the Y direction; and a fourth three-phase winding wound around the pole post of the fourth 3m magnetic pole portion; the connecting portion connects the first armature unit and the second armature unit included in the n X-direction combination units, and the third armature unit and the fourth armature unit included in the n Y-direction combination units to each other; and In a non-contact bearing, the first block is designated as a fixed component, and the second block is designated as a movable component. The movable component is movably supported relative to the fixed component in a floating state. Where n is a positive integer greater than 2, and m is a positive integer greater than 1. The configuration of n first armature units and n second armature units in the n X-direction combination units of the second block, and n third armature units and n fourth armature units in the n Y-direction combination units is determined such that the n first armature units and n second armature units in the n X-direction combination units, and the n third armature units and n fourth armature units in the n Y-direction combination units are energized, thereby generating one or more moving magnetic fields moving along the X-direction and one or more moving magnetic fields moving along the Y-direction, causing the moving member to move along the XY direction. The three-phase linear actuator is characterized in that... The dimensions of each part of the second block are determined, and the energization of each of the n first three-phase windings, n second three-phase windings, n third three-phase windings, and n fourth three-phase windings is controlled, such that the point of application of the combined resultant force of the multiple magnetic attraction forces acting in the Z direction between the multiple second salient pole teeth of the n first 3m magnetic pole parts and the multiple second salient pole teeth of the n second 3m magnetic pole parts and the multiple first salient pole teeth of the first block in the n X-direction combination units, and the point of application of the combined resultant force of the multiple magnetic attraction forces acting in the Z direction between the multiple second salient pole teeth of the n third 3m magnetic pole parts and the multiple second salient pole teeth of the n fourth 3m magnetic pole parts and the multiple first salient pole teeth of the first block in the n Y-direction combination units, are located within a region centered on the center of gravity of the moving member and with the given spacing as the radius.

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