Piping device

Abstract

A pipe device includes a main body (13) formed of a first fluororesin material, having a first boundary surface (13a); a joint member (15) formed of a second fluororesin material, having a second boundary surface (15a); and an intermediate member (17) formed of a third fluororesin material, integrally shaped with the joint member (15) via the second boundary surface (15a). The main body (13) has a recess (19) opening to the first boundary surface (13a), with a cylindrical wall portion (21) protruding at a length lower than a thickness of the intermediate member (17) provided around an opening of the recess (19). The first fluororesin material and the second fluororesin material are non-melting fluororesin materials exhibiting non-melting at a melting point of the third fluororesin material, and the intermediate member (17) is integrally shaped with the main body (13) in a state where the intermediate member (17) sinks and is buried in the intermediate member at at least a front end portion of the cylindrical wall portion (21), forming a space portion from the intermediate member and the recess.

Description

Technical Field

[0001] This invention relates to a piping device having an internal flow path for fluid flow and forming part of the piping. Background Technology

[0002] In various industries such as chemical plants, semiconductor manufacturing, food processing, medical care, and biotechnology, piping equipment, including valves and fluid mixers, with internal flow paths, is used as part of the piping system to facilitate fluid flow. Particularly in semiconductor manufacturing, where strong chemicals, such as acids, are often used as liquid solutions, a leak-proof sealing structure—the so-called external sealing structure—is employed to prevent leakage of these chemicals.

[0003] Generally, this type of external sealing structure is formed by combining machined parts together. However, in this structure, even if the mating surfaces are slightly deformed due to machining errors, gaps can form and stagnation within the flow path, leading to a decrease in yield. Therefore, for example, when using other components to close a recess formed in part of the flow path that opens to the outside, a diaphragm or gasket-like elastic component can usually be sandwiched between the opposing surfaces of the two components to seal the two components without creating gaps. Furthermore, when it is not possible to sandwich a component such as a diaphragm between the opposing surfaces of the two components, as in the flow control valve described in Patent Document 1, sometimes a method is used such as heating the mating surfaces of the two components above their melting point and then welding them together.

[0004] [Existing Technical Documents]

[0005] [Patent Literature]

[0006] Patent Document 1: Japanese Patent No. 7146204 Summary of the Invention

[0007] [The problem the invention aims to solve]

[0008] As described in Patent Document 1, in a method of welding two abutting members by heating their abutting surfaces together, the material of each member is heated above its melting point and becomes fluid. Therefore, sometimes when the two abutting surfaces are pressed together, the fluidized material overflows from between the two members into the flow path, forming a stepped portion. This stepped portion creates a stagnant portion of the liquid in the flow path, which also contributes to the deterioration of the yield.

[0009] Therefore, the purpose of this invention is to solve the problems existing in the prior art by connecting two components in piping equipment without gaps and without creating a step difference.

[0010] [Technical means to solve the problem]

[0011] In view of the aforementioned objective, the present invention provides a piping device comprising: a body formed of a first fluoropolymer material having a first boundary surface; a connecting member formed of a second fluoropolymer material having a second boundary surface; and an intermediate member formed of a heat-weldable third fluoropolymer material integrally formed with the connecting member via the second boundary surface. The body has a recess opening toward the first boundary surface, and an annular cylindrical wall portion protruding from the first boundary surface with a length less than the thickness of the intermediate member is provided around the opening of the recess. The first and second fluoropolymer materials are non-melting fluoropolymer materials that are non-melting at the melting point of the third fluoropolymer material. With at least the front end of the cylindrical wall portion sunk and embedded in the intermediate member, the inner circumferential surface and the top surface of the cylindrical wall portion are integrally formed with the intermediate member, and a space portion is formed by the intermediate member and the recess.

[0012] In the piping equipment, the first fluoropolymer material forming the main body and the second fluoropolymer material forming the connecting member are fluoropolymer materials that are non-molten below the melting point of the third fluoropolymer material forming the intermediate member. Therefore, even when heated to the melting point of the third fluoropolymer material, the main body and the connecting member can maintain their shape. With at least a portion of the cylindrical wall portion provided around the opening of the recess in the main body submerged and embedded in the intermediate member, the intermediate member can be integrally formed with the main body (specifically, its cylindrical wall portion). As described above, if the intermediate member is integrally formed with the main body with at least the front end of the annular cylindrical wall portion provided in the main body submerged and embedded in the intermediate member integrally formed with the connecting member, then the inner circumferential surface and the front end surface (top surface) of at least the front end portion of the cylindrical wall portion of the main body are integrated with the intermediate member integrally formed with the connecting member. As a result, even if a gap occurs between the first boundary surface of the main body and the intermediate member, the cylindrical wall portion of the main body and the intermediate member are reliably sealed. Therefore, the space formed by the recess of the main body and the intermediate member is sealed from the outside between the main body, the intermediate member, and the connecting member, reliably preventing fluid in the space from leaking out. Furthermore, in this application, the state in which the front end of the cylindrical wall portion is sunk and embedded in the intermediate member refers to the state in which at least the front end face (top face) and the inner peripheral face of the cylindrical wall portion are in contact with the intermediate member without gap, including the state in which the outer peripheral face of the cylindrical wall portion is not in contact with the intermediate member.

[0013] In the piping equipment, it is preferable that the cylinder wall portion is arranged around the opening of the recess, and is formed in a manner that is flush with the inner circumferential surface of the recess. If the cylinder wall portion is arranged around the opening of the recess, and is formed in a manner that is flush with the inner circumferential surface of the recess, then no step difference is formed in the connection between the main body and the intermediate member in the space portion, and no stagnation portion is generated.

[0014] In the piping equipment, an inflow path and an outflow path communicating with the space portion can be formed in the main body.

[0015] In the piping equipment, the intermediate component is preferably membrane-like or plate-like.

[0016] Furthermore, the thickness of the intermediate component can be set to a range of 50 μm to 100 mm. In this case, the length of the portion of the cylinder wall submerged in the intermediate component can be set to a range of 0.5 μm to 95 mm.

[0017] As one embodiment, the first and second fluororesin materials may be polytetrafluoroethylene (PTFE). In this case, the third fluororesin material is preferably perfluoroalkoxyalkane (PFA) or modified PTFE.

[0018] [The effects of the invention]

[0019] According to the piping device of the present invention, even if a gap is generated between the first boundary surface of the main body and the intermediate member, the cylindrical wall portion of the main body and the intermediate member are reliably sealed. Therefore, the space formed by the recess of the main body, the intermediate member and the connecting member integrally formed therewith is sealed from the outside between the main body and the intermediate member and the connecting member, and can reliably prevent fluid in the space from leaking to the outside through the gap between the main body and the intermediate member and the connecting member. Attached Figure Description

[0020] [ Figure 1 ] Figure 1 This is a perspective view showing the overall structure of a vortex fluid mixer as one embodiment of a piping device based on the present invention.

[0021] [ Figure 2 ] Figure 2 Viewed from above Figure 1 The diagram shows the layout of the piping system.

[0022] [ Figure 3 ] Figure 3 It is along Figure 2 The diagram shows a cross-sectional view of the piping equipment for line III-III.

[0023] [ Figure 4 ] Figure 4 It means manufacturing Figure 1 The diagram illustrates an example of a piping system procedure.

[0024] [ Figure 5 ] Figure 5 It means manufacturing Figure 1 The diagram illustrates an example of a piping system procedure.

[0025] [ Figure 6 ] Figure 6 It means manufacturing Figure 1 The diagram illustrates an example of a piping system procedure.

[0026] Explanation of reference numerals in the attached figures

[0027] 11: Vortex Fluid Mixer

[0028] 13: Main Body

[0029] 13a: First boundary surface

[0030] 15: Joining components

[0031] 15a: Second boundary surface

[0032] 17: Intermediate components

[0033] 19: concave part

[0034] 21: Cylinder wall section Detailed Implementation

[0035] Hereinafter, embodiments of the piping equipment based on the present invention will be described with reference to the accompanying drawings.

[0036] Initially, refer to Figures 1 to 3 The overall structure of the vortex fluid mixer 11, which is an example of a piping device based on the present invention, is described.

[0037] The piping device according to the present invention includes: a body 13 formed of a first fluororesin material and having a first boundary surface 13a; a connecting member 15 formed of a second fluororesin material and having a second boundary surface 15a; and an intermediate member 17, existing between the body 13 and the connecting member 15 and formed of a third fluororesin material, wherein the intermediate member 17 is integrally formed and joined to the connecting member 15 via the second boundary surface 15a. The intermediate member 17 is film-like or plate-like, and its thickness may be, for example, in the range of 50 μm to 100 mm.

[0038] In the main body 13, a recess 19 is formed that opens to the first boundary surface 13a, and an annular cylindrical wall portion 21 protruding from the first boundary surface 13a with a length shorter than the thickness of the intermediate member is provided around the opening of the recess 19 to the first boundary surface 13a. The inner peripheral surface of the recess 19 and the inner peripheral surface of the cylindrical wall portion 21 are smoothly connected to form a flush plane. In addition, the intermediate member 17, which is integrally formed with the connecting member 15, is integrally formed with the main body 13 on the first boundary surface 13a side with at least the front end of the annular cylindrical wall portion 21 recessed and embedded in the intermediate member 17. The length of the cylindrical wall portion 21 recessed and embedded in the intermediate member 17 is shorter than the thickness of the intermediate member 17, for example, it can be set to a range of 0.5 μm to 95 mm. However, the length of the cylindrical wall portion 21 that is sunk and embedded in the intermediate member 17 is shorter than the thickness of the intermediate member 17, and is not limited to the aforementioned range as long as at least the front end face (top surface) of the cylindrical wall portion 21 does not connect with the intermediate member 17 but penetrates through the intermediate member 17. Furthermore, in this application, the state in which the front end of the cylindrical wall portion 21 is sunk and embedded in the intermediate member 17 refers to the state in which at least the front end face (top surface) and the inner peripheral surface of the cylindrical wall portion 21 are in contact with the intermediate member 17 without gap, including the state in which the outer peripheral surface of the cylindrical wall portion 21 is not in contact with the intermediate member 17.

[0039] Thus, the recess 19 of the main body 13 forms a space by closing the opening to the first boundary surface 13a using the intermediate member 17 integrally formed with the connecting member 15. The main body 13 and the intermediate member 17 are formed such that the inner peripheral surface and top surface of at least the front end of the annular cylindrical wall portion 21 of the main body 13 are integral with the intermediate member 17. As a result, even if a gap is generated between the first boundary surface 13a of the main body 13 and the intermediate member 17, the annular cylindrical wall portion 21 of the main body 13 and the intermediate member 17 are reliably sealed (i.e. closed), thus reliably preventing fluid from leaking out from the internal space through the joint between the main body 13 and the connecting member 15.

[0040] The third fluororesin material forming the intermediate component 17 includes a heat-melting fluororesin material, which can be bonded to other resin materials by being heated to above the melting point and melted, and then cooled and solidified. The first fluororesin material forming the main body 13 and the second fluororesin material forming the bonding component 15 are non-melting, insoluble (non-melting) fluororesin materials that do not melt below the melting point of the third fluororesin material and exhibit shape-maintaining non-melting properties.

[0041] As a sparingly soluble (non-melting) fluoropolymer material, for example, a fluoropolymer material with a melting point higher than that of the third fluoropolymer material, or a fluoropolymer material that becomes gel-like and does not completely melt even when heated to its melting point, can be used. Furthermore, the first and second fluoropolymer materials can contain the same type of fluoropolymer material or different types of fluoropolymer materials, as long as they exhibit non-melting properties below the melting point of the third fluoropolymer material. For example, the first and second fluoropolymer materials can be polytetrafluoroethylene (PTFE), and the third fluoropolymer material can be perfluoroalkoxyalkane (PFA) or modified PTFE.

[0042] In this application, "piping equipment" refers to equipment that has an internal flow path for fluid flow and forms part of piping, such as valve devices and fluid mixers. Figures 1 to 3 In the illustrated embodiment, a vortex fluid mixer 11 is exemplified as a piping device based on the present invention. The space formed by the recess 19 of the main body 13, the connecting member 15 constituting the cover member, and the intermediate member 17 serves as a vortex chamber 23. The recess 19 is a generally cylindrical space with a generally circular cross-section. Furthermore, on the bottom surface of the recess 19 of the main body 13 (in... Figures 1 to 3 In the illustrated embodiment, a protrusion 25 protruding from the center of the bottom surface is provided on the vertex surface of the spatial portion. The protrusion 25 has a generally cylindrical shape with a generally circular cross-section, and an annular space is formed around the protrusion 25. Furthermore, the main body 13 is provided with: a first fluid supply passage 29 extending from the first inlet connection end 27 in a tangential direction relative to the inner peripheral surface of the recess 19 and in a horizontal direction in the figure, communicating with the recess 19; a second fluid supply passage 33 extending from the second inlet connection end 31 in a vertical direction in the figure and communicating with the middle portion of the first fluid supply passage 29; and a fluid discharge passage 37 extending from the outlet connection end 35 in a horizontal direction in the figure and then bending downward at a generally right angle to penetrate the protrusion 25 and communicate with the recess 19. The first fluid supply passage 29 and the second fluid supply passage 33 constitute an inflow passage communicating with the spatial portion, i.e., the vortex chamber 23, and the fluid discharge passage 37 constitutes an outflow passage communicating with the spatial portion, i.e., the vortex chamber 23. In addition, the protrusion 25 is located at the position where the fluid flowing into the vortex chamber 23 from the first fluid supply path 29 collides with the protrusion 25 and flows.

[0043] In this type of vortex fluid mixer 11, the additive fluid supplied from the second fluid supply passage 33 connected to the first fluid supply passage 29 merges with the main fluid supplied to the first fluid supply passage 29 and is supplied to the vortex chamber 23. The merged fluids form a vortex in the vortex chamber 23, mix under the action of the vortex, and are then discharged from the fluid discharge passage 37. Figures 1 to 3In the vortex fluid mixer 11 shown, a protrusion 25 is provided that protrudes from the center of the bottom surface of the recess 19, and a fluid discharge passage 37 passes through and extends through the protrusion 25. However, the position of the protrusion 25 is not limited to the center of the bottom surface of the recess 19, as long as at least a portion of the fluid supplied from the first fluid supply passage 29 collides with the protrusion 25. Furthermore, the fluid discharge passage 37 can connect to the recess 19 without passing through the protrusion 25, or the protrusion 25 may not be provided, as long as it can discharge the fluid in the vortex chamber 23.

[0044] In the vortex fluid mixer 11, at least the inner circumferential surface and the front end surface (top surface) of the cylindrical wall portion 21 provided around the opening of the recess 19 of the main body 13 are integrally formed with the intermediate member 17 that forms part of the cover member. The main body 13 and the cover member are sealed together, so the fluid in the vortex chamber 23 formed by the space portion formed by the recess 19 and the cover member can be reliably prevented from leaking out from the space between the main body 13 and the cover member to the outside.

[0045] Next, refer to Figures 4 to 6 This indicates the manufacturing process. Figures 1 to 3 An example of the method of the vortex fluid mixer 11 shown. Here, the intermediate component 17 of the vortex fluid mixer 11 is formed of a heat-welding third fluoropolymer material, namely PFA, the main body 13 is formed of a non-melting, insoluble first fluoropolymer material, namely PTFE, which is non-melting at the melting point of the third fluoropolymer material, namely PFA, and the connecting component 15 is formed of a non-melting, insoluble second fluoropolymer material, namely PTFE, which is non-melting at the melting point of the third fluoropolymer material, namely PFA.

[0046] First, such as Figure 4As shown, a recess 19 with a downward-opening protrusion 25 protruding downward from the top is formed on the bottom surface 39a of a first rectangular blank body 39 compressed from PTFE. An annular cylindrical wall portion 21 protruding from the first boundary surface 13a is formed around the opening of the recess 19 towards the bottom surface 39a, such that the inner circumferential surface smoothly connects with the inner circumferential surface of the recess 19 to form a flush plane. Thus, the cylindrical wall portion 21 protruding from the first boundary surface 13a is formed. Next, a first fluid supply passage 29 extending horizontally from the first side surface 39b of the first blank body 39 in a manner connected to the outer circumferential surface of the recess 19 in its tangential direction is formed by machining. A second fluid supply passage 33 extending vertically (up and down) from the top surface 39c of the first blank body 39 is formed and connected to the middle portion of the first fluid supply passage 29. In addition, by cutting, a fluid passage extending horizontally from the second side 39d of the first blank body 39 facing the first side 39b is made, and a fluid passage extending upward through the protrusion 25 is made. A fluid discharge path 37 is made by connecting the two fluid passages.

[0047] Next, a recess 43 with an upward opening is formed on the top surface 41a of the second preform 41, which is a cuboid shape formed by compression molding of PTFE. The length (depth) of the recess 43 from its bottom surface to its opening is longer than the length (i.e., height) of the cylinder wall portion 21 protruding from the first boundary surface 13a. Then, a film-like or plate-like resin aggregate 45 formed of PFA is housed within the recess 43 of the second preform 41. The height of the resin aggregate 45 is lower than the depth of the recess 43, and the resin aggregate 45 does not protrude upward beyond the recess 43 when housed within it. The resin aggregate 45 can be formed by machining, extrusion molding, or injection molding, or by filling the recess 43 with PFA powder or granules.

[0048] Next, the first blank 39 is placed on the second blank 41, in which the resin aggregate 45 is contained within the recess 43, such that the cylinder wall portion 21 of the first blank 39 is in contact with the resin aggregate 45. Then, the first blank 39, the second blank 41, and the resin aggregate 45, in this state, are placed in a heating furnace and heated at least above the melting point of the third fluoropolymer material, i.e., PFA. In this way, the first blank 39 and the second blank 41, formed from the first fluoropolymer material and the second fluoropolymer material, i.e., the insoluble PTFE, will not gel or melt even when heated above the melting point of PTFE, thus maintaining the shape of the cylinder wall portion 21 and the recess 43. On the other hand, the resin aggregate 45, formed from the heat-weldable third fluoropolymer material, i.e., PFA, is heated above its melting point and thus melts and flows. Since the second fluoropolymer material, i.e., PTFE, forming the recess 43, is insoluble, the second blank 41 maintains its shape, thus the resin aggregate 45 is retained within the recess 43 even when melted. In addition, such as Figure 5 As shown, when the resin assembly 45 melts, before the first boundary surface 13a of the first blank body 39, which maintains the shape, abuts against the top surface 41a of the second blank body 41, the cylindrical wall portion 21 formed in the blank body 39 sinks into the resin assembly 45. Since the height of the cylindrical wall portion 21 is shorter than the depth of the recess 43, when the first boundary surface 13a of the first blank body 39 abuts against the top surface 41a of the second blank body 41, the front end face of the cylindrical wall portion 21 formed in the first blank body 39 does not contact the bottom surface of the recess 43 formed in the second blank body 41. When cooled in this state, with at least the front end of the cylindrical wall portion 21 sinking into and embedded in the resin assembly 45 without penetrating the resin assembly 45, the resin assembly 45 is integrally formed and fused with the first blank body 39, and the resin assembly 45 is integrally formed and fused with the second blank body 41. When the resin assembly 45 and the second blank body 41 are integrally formed and fused together, the bottom surface of the recess 43 of the second blank body 41, which is in contact with the bottom surface of the resin assembly 45, forms a second boundary surface 15a.

[0049] Next, as Figure 6As shown, a vortex fluid mixer 11 can be manufactured by machining the first blank body 39, the second blank body 41, and the resin assembly 45, which are integrally formed and fused together. Specifically, by machining, a first inlet connection end 27, a second inlet connection end 31, and an outlet connection end 35 are respectively formed at the ends of the fluid supply passage 29, the second fluid supply passage 33, and the fluid discharge passage 37 of the first blank body 39, thus creating the main body 13. Furthermore, the sides and bottom of the second blank body 41 and the resin assembly 45 are machined until they become flush with the outer peripheral surface of the cylinder wall portion 21, thereby creating a connecting member 15 and an intermediate member 17 (i.e., a cover member) integrally formed via the second boundary surface 15a. In the vortex fluid mixer 11 constructed in this way, the bottom surface of the first blank body 39 surrounding the cylinder wall portion 21 forms a first boundary surface 13a, and the top surface of the connecting member 15 (the portion made from the bottom surface of the recess 43 of the second blank body 41) which is in contact with the bottom surface of the intermediate member 17 forms a second boundary surface 15a.

[0050] The cylindrical wall portion 21 of the main body 13 does not penetrate the intermediate member 17 integrally formed with the connecting member 15. Instead, it is integrally formed and fused with the intermediate member 17, at least at its front end, which is sunk and embedded in the intermediate member 17. As a result, the recess 19 of the main body 13 is sealed by the connecting member 15 and the intermediate member 17, forming a space that constitutes the vortex chamber 23. Furthermore, since the front end of the cylindrical wall portion 21 is integrally formed with the intermediate member 17 at least on its inner circumferential surface and front end surface (top surface), the main body 13 is reliably sealed with the connecting member 15 and the intermediate member 17, preventing fluid in the internal space from leaking out from between the main body 13 and the connecting member 15 and the intermediate member 17. Moreover, the cylindrical wall portion 21 is sunk into the resin assembly 45, which becomes the intermediate member 17, while the resin assembly 45 is molten. Therefore, the formation of a stepped portion and the creation of a stagnant portion at the connection between the cylindrical wall portion 21 and the intermediate member 17 can be suppressed.

[0051] The present invention has been described above with reference to the illustrated vortex fluid mixer 11, which is an embodiment of the fluid device of the present invention. However, the present invention is not limited to the illustrated embodiment. For example, in the illustrated embodiment, the vortex fluid mixer 11 is exemplified as a piping device based on the present invention. A piping device refers to a device that has a flow path for fluid flow inside and is used as part of piping, such as a valve device or a fluid mixer. In addition, in the illustrated embodiment, PTFE is used as the first fluoropolymer material and the second fluoropolymer material, and PFA is used as the third fluoropolymer material. However, the first fluoropolymer material, the second fluoropolymer material, and the third fluoropolymer material are not limited to these. Furthermore, the manufacturing method of the vortex fluid mixer 11, which is an example of the piping device of the present invention, is only illustrative. As long as the structure of the piping device of the present invention is satisfied, the manufacturing method is not limited.

Claims

1. A piping system, characterized in that, include: The main body is formed of a first fluororesin material and has a first boundary surface; The joining member is formed of a second fluororesin material and has a second boundary surface; as well as The intermediate component, formed of a heat-weldable fluoropolymer material, is integrally formed with the joining component via the second boundary surface. The main body has a recess that opens toward the first boundary surface. Around the opening of the recess, there is an annular cylindrical wall portion that protrudes from the first boundary surface with a length lower than the thickness of the intermediate member. The first fluororesin material and the second fluororesin material are non-melting fluororesin materials that are non-melting below the melting point of the third fluororesin material. With at least the front end of the cylindrical wall portion sunk and embedded in the intermediate member, the inner circumferential surface and the top surface of the cylindrical wall portion are integrally formed with the intermediate member, and a space portion is formed by the intermediate member and the recess.

2. The piping equipment according to claim 1, wherein, The cylindrical wall portion is arranged around the opening of the recess, and is formed in such a way that it is flush with the inner circumferential surface of the recess.

3. The piping equipment according to claim 2, wherein, The main body has an inflow path and an outflow path that communicate with the space portion.

4. The piping equipment according to claim 3, wherein, The intermediate component is membrane-like or plate-like.

5. The piping equipment according to any one of claims 1 to 4, wherein, The thickness of the intermediate component ranges from 50 μm to 100 mm.

6. The piping equipment according to claim 5, wherein, The length of the portion of the cylinder wall that is submerged in the intermediate member ranges from 0.5 μm to 95 mm.

7. The piping equipment according to any one of claims 1 to 4, wherein, The first fluororesin material and the second fluororesin material are polytetrafluoroethylene.

8. The piping equipment according to claim 7, wherein, The third fluororesin material is a perfluoroalkoxyalkane or modified polytetrafluoroethylene.

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