A plasma local surface cleaning device and cleaning method

Abstract

This invention provides a plasma local surface cleaning device and method. The cleaning device includes a feeding structure, an infeed structure, a local fine alignment structure, a conveying structure, a plasma cleaning structure, and a discharging structure. The feeding structure picks up the material to be locally cleaned and aligns it at a set angle and position. The local fine alignment structure precisely aligns the area to be cleaned with the cleaning holes. After fine alignment, a shielding plate fixes the material and blocks the non-cleaned areas. The conveying structure transports the shielding plate and material to the cleaning area of ​​the plasma cleaning structure and returns the cleaned material to the local fine alignment structure. The feeding structure achieves primary material alignment, and the local fine alignment structure, through detection by a visual inspection device, drives a fine-tuning structure to perform secondary alignment, improving the accuracy of local cleaning.

Description

Technical Field

[0001] This invention relates to the field of plasma cleaning technology, specifically to a plasma local surface cleaning device and cleaning method. Background Technology

[0002] Plasma local cleaning equipment is a high-end surface treatment equipment that uses plasma technology to precisely clean, activate, and modify specific areas of a workpiece surface. Due to its advantages such as non-destructive, pollution-free, high precision, and wide adaptability, it is now widely used in high-end precision manufacturing fields such as semiconductor packaging, optical devices, precision electronics, and microelectromechanical systems.

[0003] Before the product is sent into the plasma cleaning unit for cleaning, it needs to be positioned. Currently, there are two main positioning technologies: I. Manually Assisted Alignment Scheme: This scheme relies on manual visual observation of the workpiece area to be cleaned. By manually adjusting the front-to-back, left-to-right displacement and angular deviation of the platform, the position of the workpiece is finely adjusted so that the local area to be cleaned on the workpiece is aligned with the emission area of ​​the plasma nozzle. After alignment is completed, the platform structure is locked. Manually assisted positioning is a commonly used scheme for local cleaning of small and medium batches of precision workpieces.

[0004] II. Fixed mold limiting and alignment scheme: This scheme uses a customized limiting tooling mold that perfectly matches the shape and size of the workpiece to clamp and fix the workpiece inside the mold. The limiting groove and positioning boss of the mold are used to achieve precise limiting of the workpiece, so that the preset local area to be cleaned on the workpiece accurately corresponds to the working area of ​​plasma cleaning. Without the need for single fine adjustment, repeatable and precise alignment of batch workpieces can be achieved.

[0005] Manual alignment relies entirely on the operator's experience and visual judgment. Human vision has inherent errors, making micron-level precision impossible. This easily leads to misalignment of the area to be cleaned and coverage deviations, resulting in incomplete cleaning of certain areas or accidental cleaning of non-target areas, and is also inefficient. Tooling molds can only accommodate standardized workpieces of a single size and shape. For irregularly shaped, multi-sized, small-batch precision workpieces, frequent mold changes and customization are required, resulting in extremely poor equipment adaptability and significantly increasing production costs and changeover time. Furthermore, this solution cannot perform secondary calibration for minute deviations in the area to be cleaned, affecting alignment accuracy and consequently the cleaning effect, making it unsuitable for high-precision localized cleaning scenarios involving microstructures.

[0006] Furthermore, plasma cleaning relies on the bombardment of high-energy plasma particles to treat the surface of products. During the cleaning process, a certain amount of energy is generated, causing the product to vibrate or even shift, resulting in cleaning deviations. This affects scenarios requiring precision cleaning, such as cleaning the circular hole where a camera is mounted on a mobile phone casing. If deviations occur, the cleaning dimensions around the hole may be insufficient, affecting the stability of the camera's installation and even causing the camera to detach. Therefore, improvements to existing technologies are necessary. Summary of the Invention

[0007] To address the problems in the prior art, the present invention provides a plasma local surface cleaning device and a cleaning method using the plasma local surface cleaning device, thereby improving positioning accuracy and efficiency and enhancing the local surface cleaning effect.

[0008] This invention relates to a plasma local surface cleaning device, comprising a worktable, and a loading structure, a feeding structure, a local fine alignment structure, a conveying structure, a plasma cleaning structure, and a unloading structure disposed on the worktable. The feeding structure is used to grab the material to be locally cleaned and align it at a set position according to a set angle; the feeding structure is used to grab the material at the set position and transport it to the designated position of the local fine alignment structure; the local fine alignment structure includes a shielding plate, a visual inspection device, and a fine-tuning structure. The shielding plate is provided with cleaning holes that match the surface area to be cleaned of the material. The visual inspection device is used for fine alignment of the surface area to be cleaned of the material with the cleaning holes. The shielding plate is used to shield the non-cleaned area of ​​the material after fine alignment; the conveying structure is used to convey the shielding plate and the material to the cleaning area of ​​the plasma cleaning structure and return the cleaned material to the local fine alignment structure; the plasma cleaning structure is used to clean the surface area to be cleaned of the material; the unloading structure is used to convey the cleaned material to the unloading point for unloading. The feeding structure is used to adjust the feeding position of the material so that the feeding positions of all materials are consistent, thereby achieving the first alignment of the material. The feeding structure is used to move the material with the feeding position determined to the local fine alignment structure. The local fine alignment structure is detected by a vision inspection device, which drives the fine adjustment structure to make fine adjustments to the position, thereby achieving the second alignment of the material. The shielding plate protects the local surface of the finely aligned material, which is only exposed by the plasma cleaning structure.

[0009] Furthermore, it also includes a protective cover and a client installed above the workbench. The client is equipped with vision inspection software, which is used to acquire the image detected by the vision inspection device, and based on the image, determine whether the surface cleaning area of ​​the material to be cleaned is precisely aligned with the cleaning hole, and send a feedback signal to the controller. The controller controls the fine-tuning structure to adjust the angle or position of the material.

[0010] Furthermore, the feeding structure includes a group of one or more parallel feeding robot structures, a first drive mechanism for driving the feeding robot structures to move along the X direction, a centering structure for receiving the material grasped by the robot and centering and regularizing the material, and a second drive mechanism for driving the feeding robot structure or the centering structure to move along the Y-axis. After the material is grasped by the robot, it can be placed on the centering platform of the centering structure under the drive of the first drive mechanism and the second drive mechanism. The centering structure can center and regularize the material in a set position.

[0011] Furthermore, the first driving mechanism includes a first slide rail, a guide rail, and a mounting frame arranged in parallel. A first slider is provided on the first slide rail and the guide rail. The two ends of the mounting frame are respectively fixed on two first sliders. One or more robotic arm structures are arranged side by side on the mounting frame. The centering structure includes a fixed plate and a centering platform provided above the fixed plate. The centering platform is provided with an X-direction straightening channel and a Y-direction straightening channel. An X+-direction straightening guide rod and an X-direction straightening guide rod are provided in the X-direction straightening channel. A Y+-direction straightening guide rod and a Y-direction straightening guide rod are provided in the Y-direction straightening channel. The fixed plate is provided with a third driving structure for driving the X+-direction straightening guide rod and the X-direction straightening guide rod to center and straighten the material in the X direction, and a fourth driving structure for driving the Y+-direction straightening guide rod and the Y-direction straightening guide rod to center and straighten the material in the Y direction.

[0012] Furthermore, the local fine alignment structure includes a fixed panel, a platform mounted on the fixed panel, a flame guide structure corresponding to the area to be cleaned on the platform, a shielding plate positioned above the platform, a visual inspection device positioned above the shielding plate, a material inlet / outlet channel between the platform and the shielding plate, and a downward driving structure for driving the shielding plate to press the material. The fine-tuning structure includes a rotating structure mounted on the fixed panel, with the platform positioned above the rotating structure, capable of being driven to rotate by the rotating structure to adjust the angle of the material.

[0013] Furthermore, the fine-tuning structure also includes a motion track disposed on the fixed panel and arranged along the length direction of the fixed panel, a motion slider disposed on the motion track, and a fine-tuning drive structure for driving the motion slider to move along the motion track. The local fine alignment structure also includes a visual adjustment structure for adjusting the position of the visual inspection device.

[0014] Furthermore, the fine-tuning drive structure includes a synchronous belt, a synchronous belt drive pulley and a synchronous belt driven pulley disposed at both ends of the synchronous belt, and a fine-tuning motor that drives the synchronous belt drive pulley to rotate. The fine-tuning motor, the synchronous belt drive pulley and the synchronous belt driven pulley are fixed on the fixed panel by a bracket.

[0015] Furthermore, the feeding structure includes a translational manipulator structure, a first vertical motion structure that drives the translational manipulator structure to move downward to adsorb or place materials, and a translational motion structure that drives the translational manipulator structure to move horizontally. The unloading structure includes an unloading manipulator structure and a second vertical motion structure that drives the unloading manipulator structure to move downward to adsorb or place materials. The unloading structure is fixed on the translational motion structure by an unloading slider and cooperates with the loading manipulator structure to realize the loading and unloading of materials on the platform.

[0016] Furthermore, the conveying structure includes a conveying track and a conveying plate disposed on the conveying track and capable of sliding along the conveying track, with the fixed panel disposed on the conveying plate.

[0017] The present invention also provides a plasma local surface cleaning method, implemented based on the aforementioned plasma local surface cleaning equipment, comprising the following steps: S1: The material is delivered to the designated location, and the feeding robot structure of the feeding structure grabs the material; S2: Under the drive of the second drive mechanism, the centering platform of the centering structure moves to the bottom of the loading robot structure, and the loading robot structure places the material on the centering platform; S3: Under the drive of the second drive mechanism, the centering structure moves to the feeding structure. At the same time, the third and fourth drive structures of the centering structure act simultaneously, driving the alignment rods in the X and Y directions to move synchronously towards the center, thereby centering and aligning the material. S4: After the material is aligned, the feeding robot of the feeding structure grabs the material, moves it to the local fine alignment structure, and places it on the platform. S5: A visual inspection device for precise alignment of local structures captures the image below and then uploads it to the client; S6: Based on the real-time received image, the client identifies whether the area to be cleaned on the surface of the material is precisely aligned with the cleaning hole. If so, the shielding plate moves down to cover the material, and then step S7 is executed. If not, the client calculates the material fine-tuning angle and / or distance based on the image, and then sends a control command to the fine-tuning structure through the controller to control the fine-tuning structure to fine-tune the angle and / or position of the material until the area to be cleaned on the surface of the material is precisely aligned with the cleaning hole, and the shielding plate moves down to cover the material. S7: The conveying structure transports the platform and shielding plate together to the plasma cleaning structure to achieve local surface cleaning of the material; S8: Cleaning is complete. The conveying structure returns to its initial position, the shielding plate moves upward, and the cleaned material is released. S9: The unloading structure grabs the material on the platform and moves it to the unloading point for unloading.

[0018] Compared with the prior art, the advantages of the present invention are: strong compatibility, applicable to local surface cleaning of materials of various shapes, and high local cleaning precision.

[0019] This invention enables the material to be aligned at the first stage of feeding by setting a centering structure in the feeding structure, so that all the fed materials are in the same position. This allows the subsequent secondary alignment to be achieved quickly and precisely by only making minor adjustments, thereby improving the efficiency of secondary alignment and greatly reducing the difficulty of precise alignment.

[0020] This invention improves alignment accuracy and automation by setting up a visual inspection device to assist alignment and by automatically adjusting the fine-tuning structure. Furthermore, by aligning the centering structure once, the visual processing algorithm is greatly simplified, fundamentally avoiding alignment deviations caused by large movements and the possibility of blind spots in visual recognition, thus meeting the requirements for high-precision surface cleaning.

[0021] This invention drives the feeding and unloading structures with the same motion mechanism, coordinating their movements, simplifying the structure, and improving loading and unloading efficiency. Attached Figure Description

[0022] To more clearly illustrate the solutions in this invention or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the overall structure of the plasma local surface cleaning equipment of the present invention; Figure 2 This is a schematic diagram of the assembly structure of the various components on the workbench of the present invention; Figure 3 This is a schematic diagram of one embodiment of the feeding structure; Figures 4-6 This is a schematic diagram of one embodiment of the centering structure; Figure 7 A schematic diagram of an embodiment of a local precision alignment structure, a conveying structure, and a feeding structure; Figure 8 and Figure 9 This is a schematic diagram of a local fine alignment structure. Figure 10This is a flowchart of the plasma local surface cleaning method of the present invention. Detailed Implementation

[0024] Unless otherwise defined, all technical and scientific terms used in this invention have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains; the terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to limit the invention; the terms "comprising" and "having," and any variations thereof, in the specification, claims, and foregoing drawings are intended to cover non-exclusive inclusion. The terms "first," "second," etc., in the specification, claims, or foregoing drawings are used to distinguish different objects, not to describe a particular order.

[0025] In this invention, the reference to "embodiment" means that a specific feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of the invention. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it a mutually exclusive, independent, or alternative embodiment to other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described in this invention can be combined with other embodiments.

[0026] To enable those skilled in the art to better understand the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings.

[0027] like Figure 1 and Figure 2 As shown, the plasma local surface cleaning equipment of the present invention includes a worktable 32, a loading structure, a feeding structure, a local fine alignment structure, a conveying structure, a plasma cleaning structure 35, and a unloading structure 37 disposed on the worktable 32. The loading structure is used to grab the material 2 to be locally cleaned and align the material 2 at a set position according to a set angle. The feeding structure is used to grab the material 2 at the set position and transport it to the designated position of the local fine alignment structure. The local fine alignment structure includes a shielding plate 22, a visual inspection device 18, and a fine-tuning structure for finely aligning the area of ​​the material to be cleaned with the cleaning holes. The shielding plate 22 is used to shield the non-cleaning area of ​​the material after fine alignment. The conveying structure is used to transport the shielding plate and the material to the cleaning area of ​​the plasma cleaning structure 35 and return the cleaned material to the local fine alignment structure. The plasma cleaning structure 35 is used to clean the area of ​​the material to be cleaned. The unloading structure 37 is used to transport the cleaned material to the unloading point for unloading.

[0028] The feeding structure is used to adjust the feeding position of the material so that the feeding positions of all materials are consistent, thereby achieving the first alignment of the material. The feeding structure is used to move the material with the feeding position determined to the local fine alignment structure. The local fine alignment structure is detected by a vision inspection device, which drives the fine adjustment structure to make fine adjustments to the position, thereby achieving the second alignment of the material. The shielding plate protects the local surface of the finely aligned material, which is only exposed by the plasma cleaning structure.

[0029] The shielding plate 22 of the present invention can be square, round or other shapes. The shielding plate 22 can be made of various wear-resistant composite materials. The cleaning holes can also be different shapes, so that only the unshielded part of the material is exposed according to the cleaning requirements, protecting the surface of all the shielded parts of the material, and allowing the unshielded exposed parts to be plasma cleaned.

[0030] Preferably, this example also includes a protective cover 33 and a client 34 disposed above the workbench 32. The client 34 is equipped with visual inspection software, which is used to acquire the image detected by the visual inspection device, and to determine whether the surface cleaning area of ​​the material to be cleaned is precisely aligned with the cleaning hole based on the image, and to send a feedback signal to the controller. The controller controls the fine-tuning structure to adjust the angle or position of the material. An indicator light 36 is also provided on the top surface of the protective cover 33 to indicate the working status of the plasma local surface cleaning equipment of the present invention.

[0031] This example demonstrates dual-station operation. The loading structure, feeding structure, local fine alignment structure, conveying structure, and unloading structure 37 are all in two sets, symmetrically arranged on the worktable with the plasma cleaning structure 35 in the middle of the worktable as the center, enabling the two working systems to operate synchronously. In this example, a client 34 is set on both sides of the protective cover 33 to monitor and control the operation of the two systems. In this example, a feed port 331 is set at both the front and rear ends of the protective cover, allowing the loading structure to connect with the loading conveyor line to achieve automated loading.

[0032] like Figure 3 As shown, the feeding structure in this example includes a group of one or more parallel feeding robot structures 1, a first drive mechanism for driving the feeding robot structure 1 to move along the X direction, a centering structure 3 for receiving the material 2 grasped by the robot and centering the material 2, and a second drive mechanism for driving the feeding robot structure 1 or the centering structure 3 to move along the Y-axis. After the material 2 is grasped by the robot, it can be placed on the centering platform 301 of the centering structure 3 under the drive of the first drive mechanism and the second drive mechanism. The centering structure 3 can center and center the material 2 in a set position.

[0033] In this example, the first driving mechanism and the second driving structure are set separately. The second driving structure includes a second slide rail 13, a second slider 11 set on the second slide rail 13, and a second motor 9 that drives the second slider 11 to move along the second slide rail 13. The centering structure 3 is set on the second slider 11. A position detection sensor 10 that limits the stroke of the second slider 11 is also set on the second slide rail 13.

[0034] The first driving mechanism in this example includes a first slide rail 5, a guide rail 8 and a mounting frame 7 arranged in parallel. The first slide rail 5 and the guide rail 8 are provided with first sliders 4. The two ends of the mounting frame 7 are respectively fixed on the two first sliders 4. One or more loading robot structures 1 are arranged side by side on the mounting frame 7.

[0035] The loading robot structure 1 in this example includes a suction cup structure 102 located at the bottom and a Z-axis drive structure 101 that drives the suction cup structure 102 to move vertically. In this example, the Z-axis drive structure 101 is a cylinder. Air pipe connectors are provided on the suction cup structure 102 and above the cylinder to provide suction force to the suction cup structure 102 and drive the cylinder to move.

[0036] like Figures 4-6 As shown, the centering structure 3 includes a fixed plate 302 and a centering platform 301 fixed above the fixed plate 302 by four columns 303. The centering platform 301 is provided with an X-direction straightening channel 306 and a Y-direction straightening channel 304. The X-direction straightening channel 306 is provided with an X+ direction straightening guide rod 307 and an X- direction straightening guide rod 308. The Y-direction straightening channel 304 is provided with a Y+ direction straightening guide rod 309 and a Y- direction straightening guide rod 305. The fixed plate 302 is provided with a third driving structure for driving the X+ direction straightening guide rod 307 and the X- direction straightening guide rod 308 to center and straighten the material 2 in the X direction, and a fourth driving structure for driving the Y+ direction straightening guide rod 309 and the Y- direction straightening guide rod 305 to center and straighten the material 2 in the Y direction.

[0037] Preferably, the third drive structure in this example includes a third motor 310, a first driving pulley, a first driven pulley 314, a first belt 311, a first fixing structure 316, a second fixing structure 312, a first adapter structure 315, and a second adapter structure 313. The first driving pulley is connected to the drive shaft of the third motor 310. One end of the first belt 311 is sleeved on the first driving pulley, and the other end is sleeved on the first driven pulley 314. A first fixing structure 316 is provided on one side of the first belt 311, and a second fixing structure 312 is provided on the other side. The distances of the first fixing structure 316 and the second fixing structure 312 from the center of the first belt 311 are equal. One end of the first adapter structure 315 is fixed to the first fixing structure 316. One end of the first motor 310 is fixedly connected to one end of the X+ direction straightening guide rod 307, and the other end of the X+ direction straightening guide rod 307 extends from the X direction straightening channel 306 on the upper centering platform 301. One end of the second adapter structure 313 is fixed to the second fixed structure 312, and the other end is fixedly connected to one end of the X- direction straightening guide rod 308. The other end of the X- direction straightening guide rod 308 extends from the X direction straightening channel 306 on the upper centering platform 301. The third motor 310 drives the first belt 311 to rotate, causing the first fixed structure 316 and the second fixed structure 312 to move in opposite directions, thereby causing the X+ direction straightening guide rod 307 and the X- direction straightening guide rod 308 to move simultaneously toward or away from the X direction center, so as to straighten or loosen the material 2 in the X direction.

[0038] The fourth drive structure in this example includes a fourth motor 317, a second driving pulley, a second driven pulley 319, a second belt 318, a third fixing structure 322, a fourth fixing structure 320, a third adapter structure 323, and a fourth adapter structure 321. The second driving pulley is connected to the drive shaft of the fourth motor 317. One end of the second belt 318 is fitted onto the second driving pulley, and the other end is fitted onto the second driven pulley 319. A third fixing structure 322 is located on one side of the second belt 318, and a fourth fixing structure 320 is located on the other side. The third fixing structure 322 and the fourth fixing structure 320 are equidistant from the center of the second belt 318. One end of the third adapter structure 323 is fixed to the third fixing structure 322, and the other end... One end of the Y+ oriented straightening guide rod 309 is fixedly connected to the other end of the Y+ oriented straightening guide rod 309, which extends from the Y- oriented straightening channel 304 on the upper centering platform 301. One end of the fourth adapter structure 321 is fixed to the fourth fixed structure 320, and the other end is fixedly connected to one end of the Y- oriented straightening guide rod 305, which extends from the Y- oriented straightening channel 304 on the upper centering platform 301. The fourth motor 317 drives the second belt 318 to rotate, causing the third fixed structure 322 and the fourth fixed structure 320 to move in opposite directions, thereby causing the Y+ oriented straightening guide rod 309 and the Y- oriented straightening guide rod 305 to move simultaneously toward or away from the Y- oriented center, thus centering or loosening the material 2 in the Y direction.

[0039] The third and fourth drive structures of this invention adopt a motor-driven belt method, which is lower in cost, smaller in footprint, and more flexible in layout compared with other arrangements such as lead screw motors.

[0040] Preferably, in order to make the alignment rods in the four directions run more smoothly, a third slide rail 324 is provided on the upper surface of the fixed plate 302 facing the centering platform 301. A third slider 325 is provided on the third slide rail 324. The X+ alignment guide rod 307, X- alignment guide rod 308, Y+ alignment guide rod 309 and Y- alignment guide rod 305 are respectively provided on the upper surface of the third slide rail 324 in the corresponding directions. The first adapter structure 315, the second adapter structure 313, the third adapter structure 323 and the fourth adapter structure 321 respectively drive the third slider 325 in their respective directions to move, thereby driving the third slider 325, and the X+ alignment guide rod 307, X- alignment guide rod 308, Y+ alignment guide rod 309 and Y- alignment guide rod 305 to move.

[0041] Preferably, the material contact surface of the centering platform 301 that contacts the material is provided with a buffer structure 326. The buffer structure can be a velvet layer, a soft rubber layer, etc., so as to avoid frictional scratches caused by the hard base of the centering platform 301 during the movement, which would affect the quality of the material surface.

[0042] In this example, there are two X+ and two X- alignment guide rods 307 and 308, respectively, which are equally spaced from the X-axis center. There are two groups of four Y+ and four Y- alignment guide rods 305, each group symmetrically arranged with the Y-axis center of the alignment platform 301 as the center of symmetry. Alternatively, in this example, there could also be two Y+ and two Y- alignment guide rods 309 and 305, equally spaced from the Y-axis center of the alignment platform.

[0043] Preferably, in this example, the first belt 311 and the second belt 318 are arranged in layers and cross each other. In order to avoid interference with the fixed structure arranged on them, the first adapter structure 315 and the second adapter structure 313 are provided with a first avoidance part to avoid the fourth drive structure, and the three adapter structures and the fourth adapter structure 321 are provided with a second avoidance part to avoid the third drive structure.

[0044] As can be seen from the above, the beneficial effects of the present invention are: the present invention adopts a feeding robot structure 1, and a centering platform 301 is set after the feeding robot structure 1 grasps the material, which improves the feeding speed and positioning accuracy, meets the consistency requirements of feeding material 2, and provides a foundation for the subsequent stage of local fine cleaning.

[0045] By separating the first drive mechanism and the second drive mechanism, the movements of the centering platform 301 and the loading robot structure 1 are coordinated, which further improves the loading speed. The loading robot structure 1 is composed of multiple sets, which can grab multiple sets of materials 2 at one time to meet the loading needs of multiple sets.

[0046] The present invention sets up an X-axis regularization channel 306 and a Y-axis regularization channel 304 on the centering platform 301, and uses a two-axis, four-way regularization guide rod to center and regularize the material 2. On the one hand, it improves the positioning accuracy of the material 2, and on the other hand, it can adapt to materials 2 of various sizes and has good compatibility.

[0047] like Figure 7As shown, the feeding structure in this example includes a translational robotic arm structure 14 disposed above the centering structure, a vertical motion structure 15 that drives the translational robotic arm structure 14 to move downward to adsorb or place materials, and a translational motion structure 16 that drives the translational robotic arm structure 14 to translate. In this example, the translational robotic arm structure 14 is a suction cup structure, the vertical motion structure 15 is a robotic arm control cylinder, and the translational motion structure 16 is a servo motor. This example uses a suction cup mechanism to adsorb material 2, achieving non-destructive picking and placing of material 2. In this example, after the translational robotic arm structure 14 grasps the material 2, the robotic arm control cylinder controls the translational robotic arm structure 14 to move upward. Then, through the control of the servo motor, the material 2 is precisely moved to the local precision alignment structure. Then, the robotic arm control cylinder controls the translational robotic arm structure 14 to move downward, placing the material 2 on the platform at the local precision alignment structure. The material 2 is released, and then the servo motor drives the translational robotic arm structure 14 to move back for the next round of grasping.

[0048] like Figures 8-9 As shown, the local precision alignment structure of the present invention also includes a fixed panel 27, a platform 23 disposed on the fixed panel 27, a shielding plate 22 disposed above the platform 23, a visual inspection device 18 disposed above the shielding plate 22, a cleaning hole 221 on the shielding plate 22 matching the area to be cleaned, a material inlet / outlet channel between the platform 23 and the shielding plate 22, and a downward driving structure for driving the shielding plate 22 to press the material 2. In this example, the downward driving structure includes a downward motor 28 and a lead screw 29 driven by the downward motor 28. The shielding plate 22 is connected to the lead screw 29. The downward motor 28 drives the lead screw to rotate, thereby driving the shielding plate 22 to move vertically downwards or upwards.

[0049] The visual inspection device 18 includes a visual camera 182 and a light source 181 disposed below the visual camera 182. The visual inspection device 18 is used to detect whether the cleaning hole 221 is precisely aligned with the surface area 201 of the material to be cleaned. After the cleaning hole 221 is precisely aligned with the surface area 201 of the material to be cleaned, the pressing drive structure can drive the shielding plate 22 to press the material 2. The cleaning hole 221 leaves the surface area 201 to be cleaned for local cleaning.

[0050] This invention utilizes a visual inspection device 18 to assist in detecting whether the alignment is accurate, significantly improving the accuracy and reliability of alignment compared to manual visual inspection. Furthermore, by setting up a shielding plate 22 with pre-drilled cleaning holes 221, and automatically pressing and covering the material after precise positioning, it protects the product areas not to be cleaned and ensures secure fixation after precise alignment, preventing deviations caused by slight vibrations during transport or cleaning, thus improving the surface cleaning quality of the product.

[0051] Preferably, the fine-tuning structure in this example includes an angle fine-tuning structure, which includes a rotating structure 24 disposed on the fixed panel 27. The platform 23 is disposed above the rotating structure 24 via the mounting plate 30 and can be driven to rotate by the rotating structure 24. Since this example is plasma cleaning, a flame guiding structure 231 is also provided on the platform 23 and the mounting plate 30 to realize the downward conduction of heat and avoid the influence of heat on the material. Because a flame guiding structure 231 is provided in the middle, it can absorb the impact force of plasma cleaning and avoid the high-energy particles of plasma bombarding from causing the material to vibrate or even shift, resulting in cleaning deviation.

[0052] As a preferred embodiment of the present invention, the fine-tuning structure further includes a linear fine-tuning structure disposed on the fixed panel 27 for driving the platform 23 to move in a direction perpendicular to the material 2 inlet / outlet channel. The linear fine-tuning structure includes a motion track 271 disposed on the fixed panel 27, a motion slider 26 disposed on the motion track 271, and a fine-tuning drive structure 25 for driving the motion slider 26 to move along the motion track 271. The fine-tuning drive structure 25 can be a servo motor. In this example, for smoother operation, the fine-tuning drive structure 25 includes a synchronous belt 253, a synchronous belt drive pulley 252 and a synchronous belt driven pulley 254 disposed at both ends of the synchronous belt 253, and a fine-tuning motor 251 for driving the synchronous belt drive pulley 252 to rotate. The fine-tuning motor 251, the synchronous belt drive pulley 252, and the synchronous belt driven pulley 254 are fixed on the fixed panel 27 by a bracket 31.

[0053] This example first uses the centering structure 3 to achieve initial material positioning, ensuring consistency in material orientation and position. Then, through precise control of the servo motor, it is placed in the designated position on the platform 23. Under normal circumstances, the placement of material 2 already meets the requirements for local cleaning. This example is suitable for local cleaning of high-precision equipment. Therefore, after placing the material, the vision inspection device 18 is activated for inspection. If the surface to be cleaned 201 is precisely aligned with the cleaning hole 221 on the shielding plate 22, the shielding plate 22, driven by the pressing motor 28, presses the material firmly. If there is a slight angular deviation, the rotating structure 24 drives the platform to rotate, adjusting the alignment angle. When there is a positional deviation, a linear fine-tuning structure is used to fine-tune the position, thereby achieving precise alignment.

[0054] Preferably, the fine alignment structure in this example is also compatible with different sizes and positions. The centering structure in this example has an X-axis alignment channel 306 and a Y-axis alignment channel 304. The material 2 is centered and aligned by a two-axis, four-way alignment guide rod, which can be applied to materials of various sizes. In addition, the cleaning holes 221 on the shielding plate 22 in this example are in several groups, and sealing plugs 222 are also provided to cover the unused cleaning holes 221, thereby adapting to cleaning holes 221 in different positions. In addition, the visual inspection device 18 in this example can also be adjusted according to different products and different cleaning areas of the products. Specifically, the fine alignment structure of the plasma cleaning equipment in this example also includes two first columns 17 set on both sides of the fixed panel 27, and a visual adjustment structure set above the first columns 17. A vertical plate 21 is fixed on one side of the visual adjustment structure, and the visual inspection device 18 is fixed on the vertical plate 21. In this example, the visual adjustment structure is a visual adjustment rod 19 arranged along the material inlet / outlet direction. The visual adjustment rod 19 has an adjustment block 20 that cooperates with it. The visual adjustment rod 19 has an adjustment groove 191, and the adjustment block 20 has several through holes 201 corresponding to the positions of the adjustment groove 191. Adjustment bolts for fixing the adjustment block 20 are installed in the through holes 201. After the visual adjustment structure is adjusted to the correct position, the adjustment bolts are tightened to secure it. Alternatively, this example could be configured with an automatic calibration structure such as a motor to achieve adaptive calibration of the visual inspection device 18 according to different cleaning areas.

[0055] like Figure 7 As shown, the conveying structure in this example is a conveying track 39. The fixed panel 27 is set on the conveying track 39, and the fixed panel 27 is driven by the conveying motor to slide on the conveying track 39 to convey the material 2 to the bottom of the plasma cleaning structure 35 to achieve local surface cleaning.

[0056] The unloading structure 37 in this example includes an unloading fixing plate 371, an unloading cylinder 372 mounted on the unloading fixing plate 371, and an unloading robot structure 373 driven by the unloading cylinder 372. The unloading fixing plate 371 is mounted on the unloading slider 38 on the translational motion structure 16. In this example, the feeding structure and the unloading structure are driven by the same motion mechanism. After the unloading robot structure 373 removes the cleaned material, the translational robot structure 14 of the feeding structure can place the next material to be cleaned, which simplifies the structure and improves the loading and unloading efficiency.

[0057] like Figure 10 As shown, the present invention also provides a plasma local surface cleaning method, implemented based on the aforementioned plasma local surface cleaning equipment, comprising the following steps: S1: The material is delivered to the designated location, and the feeding robot structure of the feeding structure grabs the material; S2: Under the drive of the second drive mechanism, the centering platform of the centering structure moves to the bottom of the loading robot structure, and the loading robot structure places the material on the centering platform; S3: Under the drive of the second drive mechanism, the centering structure moves to the feeding structure. At the same time, the third and fourth drive structures of the centering structure act simultaneously, driving the alignment rods in the X and Y directions to move synchronously towards the center, thereby centering and aligning the material. S4: After the material is aligned, the feeding robot of the feeding structure grabs the material, moves it to the local fine alignment structure, and places it on the platform. S5: A visual inspection device for precise alignment of local structures captures the image below and then uploads it to the client; S6: The client's visual inspection software identifies whether the material's surface cleaning area and the cleaning hole are precisely aligned based on the real-time received image. If so, the shielding plate moves down to cover the material, and then step S7 is executed. If not, the client calculates the material's fine-tuning angle and / or distance based on the image, and then sends a control command to the fine-tuning structure to control the fine-tuning structure to fine-tune the angle and / or position of the material until the material's surface cleaning area and the cleaning hole are precisely aligned, and the shielding plate moves down to cover the material. S7: The conveying structure transports the platform and shielding plate together to the plasma cleaning structure to achieve local surface cleaning of the material; S8: Cleaning is complete. The conveying structure returns to its initial position, the shielding plate moves upward, and the cleaned material is released. S9: The unloading structure grabs the material on the platform and moves it to the unloading point for unloading.

[0058] As one embodiment of the invention, this example cleans the area around the camera hole on a mobile phone casing. This cleaning removes dirt from the surface of the mounting ring with a set outer diameter around the camera hole, creating a rough surface to facilitate adhesive adhesion and improve camera fixation. If the mounting ring is misaligned, the camera's outer perimeter will be unbalanced, leading to installation errors and potentially causing the camera to detach. Therefore, the alignment accuracy during localized cleaning is crucial.

[0059] Due to the alignment structure, when materials are conveyed to the platform, the cleaning holes on the shielding plate roughly correspond to the camera's circular hole, requiring only minor adjustments. Since the shielding plate can obscure the phone casing, without the alignment structure, an additional reference object would be needed; otherwise, the phone casing could not be positioned, and visual inspection would be impossible. This invention avoids the shielding plate obstructing the phone casing, thus preventing ineffective positioning.

[0060] In step S5, the image captured by the visual inspection device includes the large circle of the cleaning hole on the shielding plate and the small circle of the mobile phone camera hole, and then it is uploaded to the client.

[0061] In step S6, after receiving the image, the visual inspection software in this example determines the positional relationship based on the center positions of the large and small circles. If the centers of the large and small circles coincide, it indicates that the area to be cleaned and the cleaning holes have achieved precise alignment. The shielding plate moves down to cover the material, blocking all areas of the phone casing except for the area to be cleaned and fixing it in place. Then, it is sent into the plasma cleaning structure to clean the local surface. If they do not coincide, the offset and fine-tuning amount are calculated based on the deviation between the two centers, and then the data is sent to the controller. The controller generates control instructions for the fine-tuning structure based on this data, controlling the fine-tuning structure to fine-tune the position of the material. Once the adjustment is in place, steps S5 and S6 are returned to execution until the area to be cleaned and the cleaning holes have achieved precise alignment.

[0062] If the cleaning area in this example has a different shape, then the shape of the cleaning aperture will also be adjusted accordingly. This adapts to different cleaning requirements. The energy of the plasma in this invention can be conducted downwards from the camera aperture to the flame guide structure, improving the accuracy and stability of local surface cleaning.

[0063] As can be seen from the above, the beneficial effects of the present invention are: 1. By setting the centering structure of the feeding structure, the material can be aligned at the first time during feeding, so that all the fed materials are in the same position. This allows the subsequent secondary alignment to be finely adjusted quickly to achieve precise alignment, improving the efficiency of secondary alignment and greatly reducing the difficulty of precise alignment.

[0064] 2. By setting up a visual inspection device to assist in alignment and by automatically adjusting the fine-tuning structure, the alignment accuracy and automation level are greatly improved. Furthermore, by aligning the centering structure once, the visual processing algorithm is greatly simplified, fundamentally avoiding alignment deviations caused by large movements and the possibility of blind spots in visual recognition, thus meeting the requirements for high-precision surface cleaning.

[0065] The specific embodiments described above are preferred embodiments of the present invention and are not intended to limit the specific scope of the present invention. The scope of the present invention includes, but is not limited to, these specific embodiments. All equivalent changes made in accordance with the present invention are within the protection scope of the present invention.

Claims

1. A plasma local surface cleaning device, characterized in that: This includes a worktable, and on top of that, a loading structure, a feeding structure, a local precision alignment structure, a conveying structure, a plasma cleaning structure, and a unloading structure. The feeding structure is used to grab the material to be locally cleaned and align it at a set position according to a set angle; the feeding structure is used to grab the material at the set position and transport it to the designated position of the local fine alignment structure; the local fine alignment structure includes a shielding plate, a visual inspection device, and a fine-tuning structure. The shielding plate is provided with cleaning holes that match the surface area to be cleaned of the material. The visual inspection device is used for fine alignment of the surface area to be cleaned of the material with the cleaning holes. The shielding plate is used to shield the non-cleaned area of ​​the material after fine alignment; the conveying structure is used to convey the shielding plate and the material to the cleaning area of ​​the plasma cleaning structure and return the cleaned material to the local fine alignment structure; the plasma cleaning structure is used to clean the surface area to be cleaned of the material; the unloading structure is used to convey the cleaned material to the unloading point for unloading. The feeding structure is used to adjust the feeding position of the material so that the feeding positions of all materials are consistent, thereby achieving the first alignment of the material. The feeding structure is used to move the material with the feeding position determined to the local fine alignment structure. The local fine alignment structure is detected by a vision inspection device, which drives the fine adjustment structure to make fine adjustments to the position, thereby achieving the second alignment of the material. The shielding plate protects the local surface of the finely aligned material, which is only exposed by the plasma cleaning structure.

2. The plasma local surface cleaning equipment according to claim 1, characterized in that: It also includes a protective cover and a client installed above the workbench. The client is equipped with vision inspection software, which is used to acquire the image detected by the vision inspection device, and based on the image, determine whether the surface area to be cleaned of the material is precisely aligned with the cleaning hole, and send a feedback signal to the controller. The controller controls the fine-tuning structure to adjust the angle or position of the material.

3. The plasma local surface cleaning equipment according to claim 2, characterized in that: The feeding structure includes a group of one or more parallel feeding robot structures, a first drive mechanism for driving the feeding robot structures to move along the X direction, a centering structure for receiving the material grasped by the robot and centering the material, and a second drive mechanism for driving the feeding robot structure or the centering structure to move along the Y-axis. After the material is grasped by the robot, it can be placed on the centering platform of the centering structure under the drive of the first drive mechanism and the second drive mechanism. The centering structure can center and center the material in a set position.

4. The plasma local surface cleaning equipment according to claim 3, characterized in that: The first driving mechanism includes a first slide rail, a guide rail, and a mounting frame arranged in parallel. A first slider is provided on the first slide rail and the guide rail. The two ends of the mounting frame are respectively fixed on two first sliders. One or more robotic arm structures are arranged side by side on the mounting frame. The centering structure includes a fixed plate and a centering platform provided above the fixed plate. The centering platform is provided with an X-direction centering channel and a Y-direction centering channel. An X+-direction centering guide rod and an X-direction centering guide rod are provided in the X-direction centering channel. A Y+-direction centering guide rod and a Y-direction centering guide rod are provided in the Y-direction centering channel. The fixed plate is provided with a third driving structure for driving the X+-direction centering guide rod and the X-direction centering guide rod to center and center the material in the X-direction, and a fourth driving structure for driving the Y+-direction centering guide rod and the Y-direction centering guide rod to center and center the material in the Y-direction.

5. The plasma local surface cleaning equipment according to any one of claims 2-4, characterized in that: The local fine alignment structure includes a fixed panel, a platform mounted on the fixed panel, a flame guide structure corresponding to the area to be cleaned on the platform, a shielding plate positioned above the platform, a visual inspection device positioned above the shielding plate, a material inlet / outlet channel between the platform and the shielding plate, and a downward drive structure for driving the shielding plate to press the material. The fine-tuning structure includes a rotating structure mounted on the fixed panel, with the platform positioned above the rotating structure, capable of being driven to rotate by the rotating structure to adjust the angle of the material.

6. The plasma local surface cleaning equipment according to claim 5, characterized in that: The fine-tuning structure also includes a motion track disposed on the fixed panel and arranged along the length of the fixed panel, a motion slider disposed on the motion track, and a fine-tuning drive structure for driving the motion slider to move along the motion track. The local fine alignment structure also includes a visual adjustment structure for adjusting the position of the visual inspection device.

7. The plasma local surface cleaning equipment according to claim 6, characterized in that: The fine-tuning drive structure includes a synchronous belt, a synchronous belt drive pulley and a synchronous belt driven pulley disposed at both ends of the synchronous belt, and a fine-tuning motor that drives the synchronous belt drive pulley to rotate. The fine-tuning motor, the synchronous belt drive pulley and the synchronous belt driven pulley are fixed on the fixed panel by a bracket.

8. The plasma local surface cleaning equipment according to claim 5, characterized in that: The feeding structure includes a translational robotic arm structure, a first vertical motion structure that drives the translational robotic arm structure to move downward to absorb or place materials, and a translational motion structure that drives the translational robotic arm structure to move horizontally. The unloading structure includes an unloading robotic arm structure and a second vertical motion structure that drives the unloading robotic arm structure to move downward to absorb or place materials. The unloading structure is fixed to the translational motion structure by an unloading slider and cooperates with the feeding robotic arm structure to realize the feeding and unloading of materials on the platform.

9. The plasma local surface cleaning equipment according to claim 5, characterized in that: The conveying structure includes a conveying track and a conveying plate disposed on the conveying track and capable of sliding along the conveying track, with the fixed panel disposed on the conveying plate.

10. A plasma local surface cleaning method, implemented based on the plasma local surface cleaning equipment according to any one of claims 1-9, characterized in that, Includes the following steps: S1: The material is delivered to the designated location, and the feeding robot structure of the feeding structure grabs the material; S2: Under the drive of the second drive mechanism, the centering platform of the centering structure moves to the bottom of the loading robot structure, and the loading robot structure places the material on the centering platform; S3: Under the drive of the second drive mechanism, the centering structure moves to the feeding structure. At the same time, the third and fourth drive structures of the centering structure act simultaneously, driving the alignment rods in the X and Y directions to move synchronously towards the center, thereby centering and aligning the material. S4: After the material is aligned, the feeding robot of the feeding structure grabs the material, moves it to the local fine alignment structure, and places it on the platform. S5: A visual inspection device for precise alignment of local structures captures the image below and then uploads it to the client; S6: Based on the real-time received image, the client identifies whether the area to be cleaned on the surface of the material is precisely aligned with the cleaning hole. If so, the shielding plate moves down to cover the material, and then step S7 is executed. If not, the client calculates the material fine-tuning angle and / or distance based on the image, and then sends a control command to the fine-tuning structure through the controller to control the fine-tuning structure to fine-tune the angle and / or position of the material until the area to be cleaned on the surface of the material is precisely aligned with the cleaning hole, and the shielding plate moves down to cover the material. S7: The conveying structure transports the platform and shielding plate together to the plasma cleaning structure to achieve local surface cleaning of the material; S8: Cleaning is complete. The conveying structure returns to its initial position, the shielding plate moves upward, and the cleaned material is released. S9: The unloading structure grabs the material on the platform and moves it to the unloading point for unloading.

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