Needle structure and electrostatic chuck

Abstract

The application provides a top pin structure and an electrostatic chuck. The electrostatic chuck comprises a top pin base, wherein a base connecting part is arranged on the top pin base; the top pin structure comprises a supporting assembly and a connecting assembly, a flexible supporting part is arranged on a first end of the supporting assembly, and the supporting assembly supports a substrate through the flexible supporting part; a first connecting part is arranged on a second end of the supporting assembly, a mounting hole is arranged on a first end of the connecting assembly, the first connecting part is located in the mounting hole, and the second end of the supporting assembly is detachably connected with the connecting assembly through the first connecting part; a limiting part is further arranged on the supporting assembly, and the limiting part abuts against an end face of the first end of the connecting assembly to limit the length of the part of the supporting assembly entering the mounting hole; a second connecting part is arranged on a second end of the connecting assembly, and the second end of the connecting assembly is detachably connected with the base connecting part through the second connecting part.

Description

Technical Field

[0001] This application relates to the field of precision machining, and more particularly to a pin structure and an electrostatic chuck. Background Technology

[0002] An electrostatic chuck (ESC) is a device that uses electrostatic force to fix objects, used for fixing and releasing substrates. The ejector pin structure, as an important component of the ESC, is used for automated loading and unloading of substrates. Its function complements the electrostatic adsorption function of the ESC, together achieving efficient and non-destructive substrate fixing and releasing operations. However, the ejector pin structure of current ESCs still needs optimization. Summary of the Invention

[0003] In view of this, embodiments of this application provide a new ejector pin structure to at least partially solve the above-mentioned problems.

[0004] This application provides a ejector pin structure for an electrostatic chuck. The electrostatic chuck includes an ejector pin base with a base connecting portion. The ejector pin structure includes a support component and a connecting component. A first end of the support component has a flexible support portion that supports a substrate. A second end of the support component has a first connecting portion. A first end of the connecting component has a mounting hole, and the first connecting portion is located in the mounting hole. The second end of the support component is detachably connected to the connecting component via the first connecting portion. A limiting portion is also provided on the support component, which abuts against the end face of the first end of the connecting component to limit the length of the portion of the support component entering the mounting hole. A second connecting portion is provided at the second end of the connecting component, and the second end of the connecting component is detachably connected to the base connecting portion via the second connecting portion.

[0005] In some alternative embodiments, the first connecting portion includes a protrusion, and a snap-fit ​​groove is formed on the wall of the mounting hole; the protrusion is located in the snap-fit ​​groove, and the second end of the support component is detachably connected to the connecting component through the snap-fit ​​of the protrusion and the snap-fit ​​groove.

[0006] In some alternative embodiments, the snap-fit ​​groove includes a first groove segment and a second groove segment, a first end of the first groove segment is connected to the edge of the mounting hole, and a second end of the first groove segment is connected to the first end of the second groove segment; the mounting hole is a circular hole, and at least a portion of the second groove segment is spirally arranged along the hole wall of the mounting hole.

[0007] In some alternative embodiments, the first groove segment is parallel to the central axis of the mounting hole.

[0008] In some alternative embodiments, the second end of the second groove segment is provided with a limiting through hole that penetrates the wall of the mounting hole, and the protrusion is located in the limiting through hole.

[0009] In some alternative embodiments, both the support component and the connecting component are columnar in shape, wherein the diameter of the support component is smaller than the diameter of the connecting component, and the central axes of the support component and the connecting component coincide.

[0010] In some alternative embodiments, the second connection portion includes a threaded structure, and the second end of the connection component is threadedly connected to the base connection portion via the threaded structure.

[0011] In some alternative embodiments, the connecting component is a metal structure, and the portion of the support component outside the flexible support is also a metal structure.

[0012] This application also provides an electrostatic chuck, including a pin base and a pin structure as described in any of the above embodiments, wherein the pin base and the pin structure are detachably connected.

[0013] In some alternative embodiments, the electrostatic chuck includes a plurality of said ejector pin structures, and the plurality of said ejector pin structures are detachably connected to the same ejector pin base.

[0014] In this embodiment, the ejector pin structure includes a support component and a connecting component. A flexible support portion is provided at the first end of the support component, supporting the substrate. A first connecting portion is provided at the second end of the support component. A mounting hole is formed at the first end of the connecting component, with the first connecting portion located within the mounting hole. The second end of the support component is detachably connected to the connecting component via the first connecting portion. A limiting portion is also provided on the support component, abutting against the end face of the first end of the connecting component. A second connecting portion is provided at the second end of the connecting component, detachably connecting to the base connecting portion. By adjusting the length of the support component entering the mounting hole at the first end of the connecting component, the total height of the ejector pin structure can be adjusted. Furthermore, the limiting portion of the support component limits the maximum length of the second end of the support component entering the mounting hole at the first end of the connecting component. Therefore, when the limiting portion of the support component abuts against the end face of the first end of the connecting component, the total height of the ejector pin structure is the desired set height. In this embodiment of the application, when adjusting the height of the ejector pin structure, the support component reaches the position where the limit part abuts against the end face of the first end of the connecting component, that is, the total height of the ejector pin structure is precisely adjusted to the required set height, preventing the height of the ejector pin structure from being too high or too low, avoiding the ejector pin structure from easily shaking due to being too high, or failing to meet the set height requirement due to being too low, thereby ensuring the accuracy of the ejector pin structure loading or unloading the substrate. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings.

[0016] Figure 1 This is a schematic diagram of the structure of an electrostatic chuck according to an optional embodiment of this application;

[0017] Figure 2 This is a perspective view of one possible embodiment of the ejector pin structure in this application;

[0018] Figure 3 This is a front view of one possible embodiment of the ejector pin structure in this application;

[0019] Figure 4 This is a schematic diagram of the structure of a support component according to an optional embodiment of this application;

[0020] Figure 5 This is a cross-sectional schematic diagram of a connection component according to an optional embodiment of this application.

[0021] Figure label:

[0022] 10. Electrostatic chuck; 20. Base plate; 100. Ejector pin structure; 110. Support assembly; 111. Flexible support part; 112. Protrusion part; 113. Limiting part; 120. Connecting assembly; 130. Mounting hole; 131. Snap-fit ​​groove; 1311. First groove segment; 1312. Second groove segment; 1313. Limiting through hole; 200. Ejector pin base; 300. Chuck body; 400. Drive device. Detailed Implementation

[0023] To enable those skilled in the art to better understand the technical solutions in the embodiments of this application, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art should fall within the protection scope of the embodiments of this application.

[0024] The terminology used in the embodiments of this application is for the purpose of describing particular embodiments only and is not intended to be limiting of this application. The singular forms “a,” “the,” and “the” used in the embodiments of this application and the appended claims are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the term “and / or” as used in the embodiments of this application refers to and includes any or all possible combinations of one or more associated listed items.

[0025] It should be understood that in the description of the embodiments of this application, the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing the scheme of the embodiments of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application.

[0026] Furthermore, when an element or layer is referred to as being "on" another element or layer, "connected to," or "bonded to" another element or layer, the element or layer may be directly on the other element or layer, directly connected to, or directly bonded to the other element or layer, or there may be intermediate elements or layers. However, when an element or layer is referred to as being "directly on" another element or layer, "directly connected to," or "directly bonded to" another element or layer, there are no intermediate elements or layers.

[0027] The terms First, Second, etc., are used to describe various elements, components, regions, layers, and / or parts, but these elements, components, regions, layers, and / or parts should not be limited by these terms. These terms are used to distinguish one element, component, region, layer, and / or part from another element, component, region, layer, and / or part.

[0028] Unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0029] As described in the background section, the ejector pin structure of the current electrostatic chuck still needs optimization. Specifically, the existing ejector pin structure is difficult to adjust precisely to the required set height when adjusting the height. The final adjustment result may be too high or too low. When the height of the ejector pin structure is too high, the ejector pin structure will easily wobble, affecting the performance of the ejector pin structure. When the height of the ejector pin structure is too low, the ejector pin structure will not meet the set height requirements, affecting the accuracy of the ejector pin structure in loading or unloading the substrate.

[0030] This application provides a novel ejector pin structure 100 for use in electrostatic chucks, at least partially solving the aforementioned problems. The specific implementation of this application embodiment is further described below with reference to the accompanying drawings. Figure 1 As shown, the electrostatic chuck 10 includes a pin base 200, and a base connecting part is provided on the pin base 200.

[0031] like Figure 2 or Figure 3 As shown, the ejector pin structure 100 includes a support component 110 and a connecting component 120. A flexible support portion 111 is provided at the first end of the support component 110, and the support component 110 supports the substrate through the flexible support portion 111. It should be understood that flexibility refers to the property of being able to deform under external force, such as bending, stretching, or twisting, without breaking, and possessing elastic recovery capability. The aforementioned flexible support portion 111 is a flexible structure made of flexible materials such as rubber or silicone. In the embodiments of this application, the ejector pin structure 100 supports the substrate through the flexible support portion 111, avoiding stress concentration at the edges or weak areas of the substrate (such as an ultra-thin glass substrate or flexible OLED substrate) caused by rigid support, reducing the risk of substrate microcracks or breakage. Simultaneously, it adapts to substrate deformation and surface unevenness, improving process uniformity. The flexible support portion 111 can absorb equipment vibration or external impact, reducing vibration interference transmitted to the substrate and improving the stability of precision processes such as photolithography and etching performed on the substrate.

[0032] In some optional embodiments, the connecting component 120 is a metal structural component, and the portion of the supporting component 110 outside the flexible support portion 111 is also a metal structural component. For example, the material of the portion of the supporting component 110 outside the flexible support portion 111 can be a metal such as copper, aluminum, stainless steel, or aluminum alloy to ensure the structural strength of the supporting component 110. The flexible support portion 111 can be connected to the metal portion of the supporting component 110 by means of adhesion or mechanical fixation to ensure that the two will not detach or loosen during operation.

[0033] The second end of the support component 110 is provided with a first connecting part, and the first end of the connecting component 120 is provided with a mounting hole 130. The first connecting part of the second end of the support component 110 is located in the mounting hole 130 of the first end of the connecting component 120. Furthermore, the second end of the support component 110 is detachably connected to the connecting component 120 through the first connecting part.

[0034] The mounting hole 130 can be circular, polygonal, or other suitable shapes. This application embodiment does not limit the specific shape of the mounting hole 130.

[0035] As a feasible implementation, the detachable connection between the second end of the support component 110 and the connecting component 120 can be a threaded connection. Exemplarily, the first connecting portion may include a first threaded structure, the mounting hole 130 is a circular hole, and the connecting component 120 may include a second threaded structure disposed along the wall of the mounting hole 130, and the first threaded structure and the second threaded structure can be screwed together for fixation. Thus, a detachable threaded connection is achieved between the second end of the support component 110 and the connecting component 120 through the first threaded structure and the second threaded structure.

[0036] like Figure 2-5 As shown, in some optional embodiments, the first connecting portion includes a protrusion 112, and a snap-fit ​​groove 131 is formed on the wall of the mounting hole 130 at the first end of the connecting component 120; the protrusion 112 is located in the snap-fit ​​groove 131, and the second end of the supporting component 110 is detachably connected to the connecting component 120 through the snap-fit ​​of the protrusion 112 and the snap-fit ​​groove 131. The protrusion 112 can be hemispherical, cylindrical, conical, or other suitable shapes, and it snaps against the groove wall of the snap-fit ​​groove 131 to fix the second end of the supporting component 110 in the mounting hole 130. The detachable connection between the second end of the supporting component 110 and the connecting component 120 facilitates the replacement of the supporting component 110 in the ejector structure 100. Therefore, when the supporting component 110 is damaged such as broken or bent, only the supporting component 110 can be replaced, while the connecting component 120 is retained, thereby reducing the usage cost of the ejector structure 100.

[0037] The snap-fit ​​groove 131 on the wall of the mounting hole 130 can be connected to the edge of the mounting hole 130. When the first connecting part is installed into the mounting hole 130, the protrusion 112 of the first connecting part can enter the snap-fit ​​groove 131 at the edge of the mounting hole 130 and move along the snap-fit ​​groove 131 so that the first connecting part can be smoothly installed into the mounting hole 130.

[0038] In this embodiment, the first connecting portion includes a protrusion 112, and a snap-fit ​​groove 131 is formed on the wall of the mounting hole 130. The protrusion 112 is located in the snap-fit ​​groove 131, and the second end of the support component 110 is detachably connected to the connecting component 120 through the snap-fit ​​between the protrusion 112 and the snap-fit ​​groove 131. The snap-fit ​​between the protrusion 112 and the snap-fit ​​groove 131 provides a reliable mechanical lock, ensuring that the support component 110 and the connecting component 120 will not easily separate during operation, and the connection remains stable even under vibration or impact conditions. Furthermore, this snap-fit ​​design allows for quick installation and disassembly of the support component 110 and the connecting component 120. During installation, simply align the protrusion 112 with the snap-fit ​​groove 131 and insert it, then use a simple rotation or pushing action to move the protrusion 112 into the predetermined position of the snap-fit ​​groove 131 to complete the connection. During disassembly, simply reverse the operation to remove the protrusion 112 from the snap-fit ​​groove 131, greatly reducing the installation and disassembly time and improving work efficiency. In addition, the engagement of the protrusion 112 and the snap-fit ​​groove 131 can be achieved inside the second end of the connecting assembly 120 without taking up too much extra space, so that the entire ejector pin structure 100 can be designed to be more compact.

[0039] like Figure 5 As shown, in some optional embodiments, the snap-fit ​​groove 131 includes a first groove segment 1311 and a second groove segment 1312. The first end of the first groove segment 1311 is connected to the edge of the mounting hole 130, and the second end of the first groove segment 1311 is connected to the first end of the second groove segment 1312. The mounting hole 130 is a circular hole, and at least a portion of the second groove segment 1312 is spirally arranged along the hole wall of the mounting hole 130.

[0040] As a feasible implementation, the first end of the first groove segment 1311 is connected to the edge of the mounting hole 130, and the first groove segment 1311 is parallel to the central axis of the mounting hole 130, forming a straight guide groove segment. This eliminates the need for a complex alignment process when inserting the first connecting part. The operator only needs to insert the first connecting part in a straight line along the central axis of the mounting hole 130 to smoothly complete the initial installation of the mounting component on the connecting component 120, greatly improving assembly efficiency and reducing the time and difficulty of manual operation. Of course, in other feasible implementations, the first groove segment 1311 can also form a certain angle with the central axis of the mounting hole 130; this embodiment does not limit the specific angle of the first groove segment 1311.

[0041] The second groove segment 1312 is spirally arranged along the wall of the mounting hole 130 to form a spiral channel. The spiral direction and pitch of the second groove segment 1312 can be determined according to the size of the ejector pin structure 100 and the usage requirements. It is sufficient to ensure that the support component 110 can move smoothly along the second groove segment 1312 and be locked when rotating. The specific determination method can be referred to relevant technologies, which will not be elaborated here.

[0042] The width of the snap-fit ​​groove 131 is slightly larger than the size of the protrusion 112, ensuring that the protrusion 112 can slide smoothly within the groove without excessive gaps that could cause the connection to loosen. The depth of the groove can be determined based on the experience of those skilled in the art. The surface of the snap-fit ​​groove 131 can be finely machined to achieve a high degree of smoothness, reducing frictional resistance and wear of the protrusion 112 during sliding. Simultaneously, surface coating techniques, such as hard chrome plating, can be used to enhance its surface hardness and wear resistance, extending the service life of the snap-fit ​​groove 131.

[0043] In this embodiment, the first groove segment 1311 is connected to the edge of the mounting hole 130. The first groove segment 1311 guides the installation of the first connecting portion protrusion 112, providing guidance for the insertion of the first connecting portion of the support assembly 110 into the mounting hole 130 at the first end of the connecting assembly 120. This ensures accurate alignment of the support assembly 110 during insertion into the mounting hole 130, preventing misalignment or jamming and guaranteeing the assembly accuracy of the support assembly 110 and the connecting assembly 120. The second groove segment 1312 is spirally arranged along the wall of the mounting hole 130, allowing the protrusion 112 to gradually engage with the second groove segment 1312 through rotation. This improves the tightness of the engagement between the protrusion 112 and the second groove segment 1312, enhancing the reliability of the connection between the support assembly 110 and the connecting assembly 120 and preventing loosening due to vibration or impact during operation. Furthermore, the spirally arranged second groove segment 1312 allows the support assembly 110 to adjust its length within the mounting hole 130 within a certain range. This adjustability allows the ejector structure 100 to adapt to different height requirements to a certain extent, improving the versatility and flexibility of the ejector structure 100.

[0044] like Figure 2 , Figure 3 or Figure 5 As shown, in some optional embodiments, the second end of the second groove segment 1312 is provided with a limiting through hole 1313 that penetrates the wall of the mounting hole 130, and the protrusion 112 is located in the limiting through hole 1313.

[0045] The shape of the limiting through hole 1313 is adapted to the shape of the protrusion 112, for example, the same as the shape of the protrusion 112, and its size is slightly larger than the size of the protrusion 112, so that the protrusion 112 can enter smoothly and have a certain amount of room to move, while the connection stability will not be affected by the excessive gap.

[0046] When the protrusion 112 enters the limiting through hole 1313, the height of the support assembly 110 is the required set height, preventing connection failure due to excessive rotation or instability due to insufficient rotation. The limiting through hole 1313 allows observation that the height of the support assembly 110 is precisely at the set height, facilitating accurate height adjustment by operators. The limiting through hole 1313 extends at an angle to the central axis of the mounting hole 130, forming an oblique limiting structure to enhance the limiting effect.

[0047] The support component 110 is also provided with a limiting part 113, which abuts against the end face of the first end of the connecting component 120 to limit the length of the part of the support component 110 that enters the mounting hole 130.

[0048] like Figure 2-4 As shown, the support component 110 is also provided with a protruding limiting part 113. The protruding direction of the limiting part 113 can be perpendicular to the length direction of the support component 110. Of course, the protruding direction of the limiting part 113 can also be other directions, as long as the limiting part 113 can abut against the end face of the first end of the connecting component 120, preventing the second end of the support component 110 from continuing to move into the mounting hole 130 on the connecting component 120. The shape of the limiting part 113 can be cubic, cylindrical, conical, or other shapes. The embodiments of this application do not limit the specific shape of the limiting part 113. According to the required set height of the ejector pin structure 100, the height of the ejector pin structure 100 can be set to the set height when the limiting part 113 abuts against the end face of the first end of the connecting component 120. Thus, during the installation or adjustment of the ejector pin structure 100, it is not necessary to carefully adjust the length of the support component 110 inserted into the connecting component 120. By abutting the snap-fit ​​part of the second end of the support component 110 against the end face of the first end of the connecting component 120, the ejector pin structure 100 can be quickly adjusted to the required set height. This can reduce the adjustment time and labor costs of the ejector pin structure 100. When the ejector pin structure 100 installed on the electrostatic chuck 10 is damaged, the staff can complete the repair and replacement of the ejector pin structure 100 more quickly, improve work efficiency, and reduce material waste and repair costs caused by improper operation.

[0049] The second end of the connecting component 120 is provided with a second connecting part, and the second end of the connecting component 120 can be detachably connected to the base connecting part through the second connecting part.

[0050] In some optional embodiments, the second connecting portion includes a threaded structure, and the second end of the connecting assembly 120 is threadedly connected to the base connecting portion via the threaded structure. Exemplarily, the second connecting portion may include a mounting hole located at the second end of the connecting assembly 120, into which the base connecting portion can be installed. The second connecting portion may also include a third threaded structure disposed on the inner wall of the mounting hole. Correspondingly, a fourth threaded structure may be disposed on the surface of the base connecting portion, and the third and fourth threaded structures can be screwed together to fix them, thereby achieving a detachable threaded connection between the second end of the connecting assembly 120 and the base connecting portion. Alternatively, the base connecting portion may have a mounting hole, into which the second connecting portion can be installed. A third threaded structure is disposed on the inner wall of the mounting hole, and correspondingly, a fourth threaded structure is disposed on the surface of the second connecting portion. The third and fourth threaded structures can be screwed together to fix them, thereby achieving a detachable threaded connection between the second end of the connecting assembly 120 and the base connecting portion.

[0051] The second end of the connecting component 120 is threadedly connected to the base connecting part via a threaded structure. This has advantages such as simple structure, reliable connection, and convenient assembly and disassembly, ensuring the reliability of the connection between the second end of the connecting component 120 and the base connecting part while maintaining detachability. In other optional embodiments, the second end of the connecting component 120 is detachably connected to the base connecting part via a second connecting part, or it can be a snap-fit ​​or other suitable connection. This application does not limit the scope of the embodiments.

[0052] In this embodiment, the ejector pin structure 100 includes a support component 110 and a connecting component 120. The first end of the support component 110 has a flexible support portion 111, which supports the substrate. The second end of the support component 110 has a first connecting portion. The first end of the connecting component 120 has a mounting hole 130, in which the first connecting portion is located. The second end of the support component 110 is detachably connected to the connecting component 120 via the first connecting portion. The support component 110 also has a limiting portion 113, which abuts against the end face of the first end of the connecting component 120. The second end of the connecting component 120 has a second connecting portion, which is detachably connected to the base connecting portion. By adjusting the length of the support component 110 entering the mounting hole 130 at the first end of the connecting component 120, the total height of the ejector pin structure 100 can be adjusted. Furthermore, the maximum length of the second end of the support component 110 entering the mounting hole 130 at the first end of the connecting component 120 can be limited by the limiting portion 113 of the support component 110. This allows the total height of the ejector pin structure 100 to be set to the desired height when the limiting portion 113 of the support component 110 abuts against the end face of the first end of the connecting component 120. In this embodiment, when adjusting the height of the ejector pin structure 100, the position where the limiting portion 113 of the support component 110 abuts against the end face of the first end of the connecting component 120 precisely adjusts the total height of the ejector pin structure 100 to the desired set height. This prevents the ejector pin structure 100 from being too high or too low, avoiding wobbling due to excessive height or failure to meet the set height requirement due to insufficient height, thereby ensuring the accuracy of the ejector pin structure 100 in loading or unloading the substrate.

[0053] like Figure 2 As shown, in some optional embodiments, both the support component 110 and the connecting component 120 are cylindrical in shape, wherein the diameter of the support component 110 is smaller than the diameter of the connecting component 120, and the central axes of the support component 110 and the connecting component 120 coincide.

[0054] Since the processing of columnar structures is relatively simple and mature processing techniques such as lathe processing and grinding can be used, the shape of both the support component 110 and the connecting component 120 is columnar. This facilitates the processing of the support component 110 and the connecting component 120 and makes it easier to control the dimensional accuracy and surface quality of the support component 110 and the connecting component 120.

[0055] The diameter of the support component 110 is smaller than that of the connecting component 120, which facilitates the creation of a mounting hole 130 at the first end of the connecting component 120 to accommodate the second end of the support component 110, allowing the first connecting portion to enter the mounting hole 130 with respect to the second end of the support component 110. The central axis of the mounting hole 130 at the first end of the connecting component 120 can coincide with the central axis of the support component 110, so that the mounting hole 130 can be located in the middle of the connecting component 120.

[0056] The coaxial connection between the support component 110 and the connecting component 120 helps reduce the eccentric moment between them, thereby enhancing the stability of their connection. Furthermore, the coincidence of the central axes of the support component 110 and the connecting component 120 facilitates their installation or assembly, eliminating the need for complex alignment and adjustments, thus improving assembly efficiency and reducing the time and difficulty of manual operation.

[0057] This application also provides an electrostatic chuck, such as... Figure 1 As shown, the electrostatic chuck 10 provided in this application embodiment includes a pin base 200 and a pin structure 100 as described in any of the above embodiments. The pin base 200 and the pin structure 100 are detachably connected.

[0058] Specifically, the ejector pin structure 100 may include a support component and a connecting component. The first end of the support component has a flexible support portion, through which the support component supports the substrate 20. The second end of the support component has a first connecting portion, and the first end of the connecting component has a mounting hole. The first connecting portion is located in the mounting hole, and the second end of the support component is detachably connected to the connecting component via the first connecting portion. The support component also has a limiting portion that abuts against the end face of the first end of the connecting component to limit the length of the portion of the support component entering the mounting hole. The second end of the connecting component has a second connecting portion, through which the second end of the connecting component can be detachably connected to the base connecting portion.

[0059] In this embodiment, the ejector pin structure 100 includes a support component and a connecting component. A flexible support portion is provided at the first end of the support component, supporting the substrate 20. A first connecting portion is provided at the second end of the support component. A mounting hole is formed at the first end of the connecting component, with the first connecting portion located within the mounting hole. The second end of the support component is detachably connected to the connecting component via the first connecting portion. A limiting portion is also provided on the support component, abutting against the end face of the first end of the connecting component. A second connecting portion is provided at the second end of the connecting component, detachably connecting to the base connecting portion. By adjusting the length of the support component entering the mounting hole at the first end of the connecting component, the total height of the ejector pin structure 100 can be adjusted. Furthermore, the maximum length of the second end of the support component entering the mounting hole at the first end of the connecting component can be limited by the limiting portion of the support component. Therefore, when the limiting portion of the support component abuts against the end face of the first end of the connecting component, the total height of the ejector pin structure 100 can be set to the desired height. In this embodiment of the application, when adjusting the height of the ejector pin structure 100, the support component reaches the position where the limit portion abuts against the end face of the first end of the connecting component, that is, the total height of the ejector pin structure 100 is precisely adjusted to the required set height, preventing the height of the ejector pin structure 100 from being too high or too low, avoiding the ejector pin structure 100 from easily shaking due to being too high, or failing to meet the set height requirement due to being too low, thereby ensuring the accuracy of the ejector pin structure 100 in loading or unloading the substrate 20.

[0060] The electrostatic chuck 10 utilizes the principle of electrostatic adsorption. By generating an electrostatic field inside the chuck, it tightly adsorbs the substrate 20 onto the chuck surface, thereby achieving stable fixation of the substrate 20. This enables high-precision positioning and fixation of the substrate 20, with uniform adsorption force, ensuring the positional accuracy of the substrate 20 during processing. Therefore, it is widely used in semiconductor manufacturing, display panel production, and other precision machining fields. A detailed introduction to the electrostatic chuck 10 follows.

[0061] like Figure 1 As shown, the electrostatic chuck 10 also includes a chuck body 300 and a drive device 400.

[0062] The chuck body 300 may include an electrode layer and an insulating layer. The electrode layer is typically made of a conductive material, such as a metal (aluminum, copper, tungsten, etc.) or a conductive ceramic. The electrode layer can be a single electrode or a combination of multiple electrodes, and can be designed into different shapes and layouts according to specific requirements. The insulating layer is located on the first side of the electrode layer and is used for contact with the substrate 20. It is typically made of a ceramic material, such as alumina or aluminum nitride, and has good mechanical strength, high temperature resistance, and thermal conductivity.

[0063] When the electrode layer is energized, a potential difference is formed between the electrode layer and the substrate 20 placed on the insulating layer, thereby generating an electrostatic field. This electric field causes opposite charges to be generated on the surface of the substrate 20, which is then attracted to the chuck surface. The main function of the insulating layer is to isolate the electrode from the substrate 20, preventing direct current conduction, and also helps to form a uniform electrostatic field. The high resistivity of the insulating layer ensures that the electric field is mainly concentrated between the electrode and the substrate 20, improving the adsorption efficiency.

[0064] The ejector pin base 200 is located on the second side of the electrode layer opposite to the first side, serving as the foundation for the ejector pin structure 100 and supporting and driving its movement. The chuck body 300 may have a through hole for the ejector pin structure 100 to pass through, allowing it to extend or retract from the first side of the chuck body 300 via the through hole in the electrostatic chuck, thus enabling the lifting and lowering of the substrate 20. Furthermore, the ejector pin base 200 can be connected to a drive device 400 (such as a cylinder or motor), which drives the ejector pin base 200 to rise or fall, thereby causing the ejector pin structure 100 to extend or retract from the first side of the chuck body 300. The following embodiment provides a detailed description of the loading and unloading process of the electrostatic chuck 10.

[0065] Before loading the substrate 20, the ejector pin base 200, driven by the drive device 400, moves towards the chuck body 300, causing the support assembly of the ejector pin structure 100 to pass through the through hole of the chuck body 300. This raises the flexible support portion of the support assembly to a predetermined position above the first side of the electrostatic chuck, for example, 105 mm above the first side of the electrostatic chuck, ready to receive the substrate 20. The substrate 20 can be moved above the electrostatic chuck 10 using a robotic arm or conveying device, and then slowly lowered, placing the substrate 20 onto the flexible support portion of the ejector pin structure 100. At this time, the flexible support portion provides initial support and positioning for the substrate 20. After the substrate 20 is placed and stabilized in the flexible support, the ejector pin base 200 moves away from the chuck body 300 under the drive of the drive device 400, causing the ejector pin structure 100 to gradually retract away from the chuck body 300. The substrate 20 supported by the flexible support slowly falls onto the surface of the first side of the chuck body 300. At the same time, the electrostatic chuck is energized to generate electrostatic adsorption force, which firmly adsorbs the substrate 20 onto the surface of the first side of the chuck body, thus completing the loading process of the substrate 20.

[0066] After the substrate 20 has been processed on the chuck body 300, it needs to be unloaded from the electrostatic chuck 10. First, the ejector pin base 200 moves closer to the chuck body 300 under the drive of the drive device 400, causing the support assembly of the ejector pin structure 100 to pass through the through hole of the chuck body 300. This allows the flexible support portion of the support assembly to lift the substrate 20 from the first side surface of the chuck body 300, separating the substrate 20 from the first side surface of the chuck body 300. After the ejector pin structure 100 lifts the substrate 20 to a certain height, a robotic arm or conveyor device can be moved above the electrostatic chuck 10 to grab or lift the substrate 20 lifted by the ejector pin structure 100. After the robotic arm or conveying device removes the substrate 20, the ejector pin base 200 moves away from the chuck body 300 under the drive of the drive device 400, causing the ejector pin structure 100 to gradually retract away from the chuck body 300 and return to its initial position, preparing for the next round of substrate 20 loading operation.

[0067] In some optional embodiments, the electrostatic chuck 10 includes a plurality of ejector pin structures 100, and the plurality of ejector pin structures 100 are detachably connected to the same ejector pin base 200. The ejector pin base 200 may be provided with a plurality of base connecting portions, and each ejector pin structure 100 may be detachably connected to one base connecting portion.

[0068] In this embodiment of the application, by detachably connecting the multiple ejector pin structures 100 to the same ejector pin base 200, the multiple ejector pin structures 100 can be moved synchronously to the same height, so that the substrate 20 can be stably placed on the multiple ejector pin structures 100, thereby ensuring that the multiple substrates 20 can stably support the substrate 20.

[0069] In some optional embodiments, the first connecting portion of the ejector pin structure includes a protrusion, and a snap-fit ​​groove is formed on the wall of the mounting hole; the protrusion is located in the snap-fit ​​groove, and the second end of the support component is detachably connected to the connecting component through the snap-fit ​​groove of the protrusion.

[0070] In some optional embodiments, the snap-fit ​​groove includes a first groove segment and a second groove segment, the first end of the first groove segment is connected to the edge of the mounting hole, and the second end of the first groove segment is connected to the first end of the second groove segment; the mounting hole is a circular hole, and at least a portion of the second groove segment is spirally arranged along the hole wall of the mounting hole.

[0071] In some alternative embodiments, the first groove segment is parallel to the central axis of the mounting hole.

[0072] In some optional embodiments, the second end of the second groove segment is provided with a limiting through hole that penetrates the wall of the mounting hole, and the protrusion is located in the limiting through hole.

[0073] In some alternative embodiments, both the support component and the connecting component are cylindrical in shape, wherein the diameter of the support component is smaller than the diameter of the connecting component, and the central axes of the support component and the connecting component coincide.

[0074] In some alternative embodiments, the second connection includes a threaded structure, and the second end of the connection assembly is threadedly connected to the base connection via the threaded structure.

[0075] In some alternative embodiments, the connecting components are metal structural members, and the portion of the supporting components outside the flexible support portion is also a metal structural member.

[0076] It should be understood that the electrostatic chuck 10 provided in this application embodiment is based on the same inventive concept as the aforementioned ejector pin structure embodiment and can achieve the same effect. For the specific implementation process, please refer to the description in the aforementioned ejector pin structure embodiment, which will not be repeated here.

[0077] It should be noted that, depending on the implementation needs, the various components / steps described in the embodiments of this application can be broken down into more components / steps, or two or more components / steps or parts of the operation of components / steps can be combined into new components / steps to achieve the purpose of the embodiments of this application.

[0078] Those skilled in the art will recognize that the units and method steps of the various examples described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are implemented in hardware or software depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of the embodiments of this application.

[0079] The above embodiments are only used to illustrate the embodiments of this application, and are not intended to limit the embodiments of this application. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the embodiments of this application. Therefore, all equivalent technical solutions also fall within the scope of the embodiments of this application, and the patent protection scope of the embodiments of this application should be defined by the claims.

Claims

1. A pin structure for an electrostatic chuck, characterized in that, The electrostatic chuck includes a ejector pin base, and a base connecting portion is provided on the ejector pin base; The ejector pin structure includes a support component and a connecting component. The first end of the support component is provided with a flexible support portion, through which the support component supports the substrate. The second end of the support component is provided with a first connecting portion. The first end of the connecting component is provided with a mounting hole, and the first connecting portion is located in the mounting hole. Furthermore, the second end of the support component is detachably connected to the connecting component through the first connecting portion. The support component is further provided with a limiting part, which abuts against the end face of the first end of the connecting component to limit the length of the part of the support component that enters the mounting hole; The second end of the connecting component is provided with a second connecting part, and the second end of the connecting component can be detachably connected to the base connecting part through the second connecting part.

2. The ejector pin structure according to claim 1, characterized in that, The first connecting part includes a protrusion, and a snap-fit ​​groove is formed on the wall of the mounting hole; the protrusion is located in the snap-fit ​​groove, and the second end of the support component is detachably connected to the connecting component through the snap-fit ​​groove of the protrusion.

3. The ejector pin structure according to claim 2, characterized in that, The snap-fit ​​groove includes a first groove segment and a second groove segment. The first end of the first groove segment is connected to the edge of the mounting hole, and the second end of the first groove segment is connected to the first end of the second groove segment. The mounting hole is a circular hole, and at least a portion of the second groove segment is spirally arranged along the hole wall of the mounting hole.

4. The ejector pin structure according to claim 3, characterized in that, The first groove is parallel to the central axis of the mounting hole.

5. The ejector pin structure according to claim 3, characterized in that, The second end of the second groove section is provided with a limiting through hole that penetrates the wall of the mounting hole, and the protrusion is located in the limiting through hole.

6. The ejector pin structure according to any one of claims 1-5, characterized in that, Both the support component and the connecting component are columnar in shape, wherein the diameter of the support component is smaller than the diameter of the connecting component, and the central axes of the support component and the connecting component coincide.

7. The ejector pin structure according to any one of claims 1-5, characterized in that, The second connection part includes a threaded structure, and the second end of the connection assembly is threadedly connected to the base connection part through the threaded structure.

8. The ejector pin structure according to any one of claims 1-5, characterized in that, The connecting component is a metal structure, and the portion of the supporting component outside the flexible support portion is also a metal structure.

9. An electrostatic chuck, characterized in that, It includes a pin base and a pin structure according to any one of claims 1-8, wherein the pin base is detachably connected to the pin structure.

10. The electrostatic chuck according to claim 9, characterized in that, The electrostatic chuck includes a plurality of said ejector pin structures, and the plurality of said ejector pin structures are detachably connected to the same ejector pin base.

Images