Laser device and method for maintaining a laser device

Abstract

The application provides a laser device and a maintenance method of the laser device. The laser device comprises a laser, a filtering assembly, a circulation loop and a control assembly. The laser comprises a shell, the shell forms an accommodating cavity, the accommodating cavity is used for arranging working gas, and the filtering assembly comprises a first filtering piece and a second filtering piece. The circulation loop is used for circulating and communicating the accommodating cavity and the filtering assembly. The circulation loop comprises a first main path, a second main path, a first branch path and a second branch path. The inlet of the first main path is communicated with the accommodating cavity, the outlet of the second main path is communicated with the accommodating cavity, the first branch path and the second branch path are connected in parallel and both ends are respectively communicated with the outlet of the first main path and the inlet of the second main path. The first filtering piece is arranged in the first branch path, the second filtering piece is arranged in the second branch path, the control assembly comprises a first control piece arranged in the first branch path and a second control piece arranged in the second branch path.

Description

Technical Field

[0001] This application relates to the field of display device technology, and in particular to a laser device and a method for maintaining the laser device. Background Technology

[0002] A laser device is a device that generates laser light. Its core principle is to amplify light through stimulated emission. There are various types of laser devices, among which gas laser devices are commonly used. However, in actual production processes, the maintenance of gas laser devices often requires a long time, which is detrimental to production capacity. Summary of the Invention

[0003] This application provides a laser device and a maintenance method for the laser device, which can improve the production capacity of the laser device.

[0004] In a first aspect, embodiments of this application provide a laser device, which includes a laser, a filter assembly, a circulation loop, and a control assembly. The laser includes a housing that encloses a cavity for dispensing a working gas. The filter assembly includes a first filter element and a second filter element.

[0005] The circulation loop is used to circulate between the receiving cavity and the filter assembly. The circulation loop includes a first main path, a second main path, a first branch path, and a second branch path. The inlet of the first main path is connected to the receiving cavity, and the outlet of the second main path is connected to the receiving cavity. The first branch path and the second branch path are connected in parallel, and both ends are respectively connected to the outlet of the first main path and the inlet of the second main path. The first filter element is disposed in the first branch path, and the second filter element is disposed in the second branch path. The control assembly includes a first control element disposed in the first branch path and a second control element disposed in the second branch path.

[0006] In some embodiments, multiple first control elements are provided, with some first control elements located between the inlet of the first filter element and the outlet of the first main path, and some first control elements located between the outlet of the first filter element and the inlet of the second main path.

[0007] In some embodiments, a plurality of first controls are configured to be turned off or turned on simultaneously;

[0008] In some embodiments, multiple second control elements are provided, with some second control elements located between the inlet of the second filter element and the outlet of the first main path, and some second control elements located between the outlet of the second filter element and the inlet of the second main path.

[0009] In some embodiments, a plurality of second controls are configured to be turned off or turned on simultaneously.

[0010] In some embodiments, the laser device further includes a first cleaning conduit and a second cleaning conduit. The first cleaning conduit includes a first conduit and a second conduit, both of which are connected to a first filter element. The second cleaning conduit includes a third conduit and a fourth conduit, both of which are connected to the second filter element.

[0011] The first cleaning medium can enter the first filter element through the first pipeline and exit the first filter element through the second pipeline; the second cleaning medium can enter the second filter element through the third pipeline and exit the second filter element through the fourth pipeline.

[0012] In some embodiments, the first cleaning medium and the second cleaning medium comprise the same material;

[0013] In some embodiments, the first cleaning medium comprises an inert gas;

[0014] In some embodiments, the first cleaning medium includes argon gas;

[0015] In some embodiments, the laser device further includes a third main path and a fourth main path, wherein the inlet of the first pipeline and the inlet of the third pipeline are connected in parallel to the third main path, and the outlet of the second pipeline and the outlet of the fourth pipeline are connected in parallel to the fourth pipeline.

[0016] In some embodiments, the laser device further includes a third control element and a fourth control element, wherein the third control element is disposed in the first cleaning pipeline and the fourth control element is disposed in the second cleaning pipeline;

[0017] In some embodiments, the number of third control elements is multiple, with some third control elements disposed in the first pipeline and some third control elements disposed in the second pipeline;

[0018] In some embodiments, there are multiple fourth control elements, with some fourth control elements disposed in the third pipeline and some fourth control elements disposed in the fourth pipeline.

[0019] In some embodiments, the laser device further includes a third cleaning conduit, which includes a fifth conduit and a sixth conduit, both of which are connected to the receiving cavity;

[0020] The third cleaning medium can enter the receiving cavity through the fifth pipeline and leave the receiving cavity through the sixth pipeline;

[0021] In some embodiments, the first cleaning medium and the third cleaning medium comprise the same material;

[0022] In some embodiments, the third cleaning medium includes argon gas;

[0023] In some embodiments, the housing includes a first inlet end, a second inlet end, a first outlet end, and a second outlet end that are spaced apart, a first main line connected to the first outlet end, a second main line connected to the first inlet end, a fifth pipeline connected to the second inlet end, and a sixth pipeline connected to the second outlet end.

[0024] In some embodiments, the fifth pipeline is connected to the third main pipeline, and the sixth pipeline is connected to the fourth main pipeline;

[0025] In some embodiments, the laser device further includes a fifth control element disposed in the third cleaning pipeline;

[0026] In some embodiments, the number of fifth control elements is multiple, with some fifth control elements disposed in a fifth pipeline and some fifth control elements disposed in a sixth pipeline;

[0027] In some embodiments, the laser device further includes a sixth control element disposed on the third main path, the third main path including a first part and a second part that are interconnected, the first part being disposed between the inlet of the fifth pipeline and the inlet of the first pipeline, and the second part being disposed between the inlet of the first pipeline and the inlet of the third pipeline.

[0028] The sixth control component is located in the first part;

[0029] In some embodiments, the laser device further includes a seventh control element disposed on the fourth main path, the fourth main path including a third part and a fourth part that are interconnected, the third part being disposed between the outlet of the sixth pipeline and the outlet of the second pipeline, and the fourth part being disposed between the outlet of the second pipeline and the outlet of the fourth pipeline.

[0030] The seventh control element is located in the third part.

[0031] In some embodiments, the first conduit is connected to the first branch;

[0032] In some embodiments, the third conduit is connected to the second branch;

[0033] In some embodiments, the second conduit is connected to the first branch;

[0034] In some embodiments, the fourth conduit is connected to the second branch.

[0035] In some embodiments, the first branch includes a fifth part, the fifth part including a first sub-segment and a second sub-segment, the inlet of the first sub-segment being connected to the outlet of the first main branch, and the outlet of the second sub-segment being connected to the first filter element;

[0036] The outlet of the first sub-section is connected in parallel with the outlet of the first pipeline to the inlet of the second sub-section;

[0037] In some embodiments, the first filter element includes a third inlet end, and the first sub-section and the first pipeline are both connected to the third inlet end through a second sub-section;

[0038] In some embodiments, a portion of the first control element is disposed in the first sub-segment;

[0039] In some embodiments, the second branch includes a sixth section, the sixth section including a third sub-segment and a fourth sub-segment, the inlet of the third sub-segment being connected to the outlet of the first main branch, and the outlet of the fourth sub-segment being connected to the first filter element.

[0040] The outlet of the third sub-section is connected in parallel to the outlet of the third pipeline to the inlet of the second sub-section;

[0041] In some embodiments, the second filter element includes a fourth inlet end, and the third sub-section and the third pipeline are both connected to the fourth inlet end through the fourth sub-section;

[0042] In some embodiments, a portion of the second control element is disposed in the third sub-segment.

[0043] Secondly, embodiments of this application provide a laser device, including a laser, a filtering assembly, and a control assembly. The laser includes a housing that encloses a cavity for distributing a working gas. The filtering assembly includes a first filter and a second filter, and the control assembly includes a first control element and a second control element. The first filter is connected to the cavity via the first control element, and the second filter is also connected to the cavity via the second control element. The first and second control elements operate independently and respectively control the connection or isolation of the first and second filters relative to the cavity.

[0044] Thirdly, embodiments of this application provide a method for maintaining a laser device, wherein the laser device is the laser device in any of the foregoing embodiments, and the maintenance method includes:

[0045] Open the first control element to connect the first filter element to the receiving cavity;

[0046] Turn off the second control element to isolate the second filter element from the receiving cavity;

[0047] Replace the filter element structure in the second filter element;

[0048] The sealing performance of at least a portion of the piping structure between the second filter element and the receiving cavity is tested.

[0049] When the sealing degree is greater than the threshold, a second cleaning medium is supplied to the second filter element;

[0050] The working gas is filled into the second filter element.

[0051] This application provides a laser device and a maintenance method for the laser device. In this application embodiment, by providing a first filter element and a second filter element in the filter assembly and setting them in parallel, when one of them needs maintenance, the other can still be used to meet the operating needs of the laser device. This allows the laser device to operate and the filter element replacement process to be carried out simultaneously, thereby improving the overall production capacity of the laser device.

[0052] Furthermore, since both the first and second control components are located on the branch structure, when one filter is being maintained, at least a portion of the branch structure corresponding to that filter can be isolated from the first and second main paths. Therefore, even if the branch structure corresponding to that filter is connected to the external environment during replacement, environmental substances will not enter the first main path, the second main path, or even the receiving cavity. Based on this, the first main path, the second main path, and the receiving cavity will not be contaminated by environmental substances, thereby reducing the adverse effects of the external environment on the receiving cavity and improving the reliability of the laser. Moreover, during maintenance, only a portion of the branch structure in the circulation loop needs to be cleaned and its seal checked, which helps reduce the amount of cleaning medium used and the difficulty and time required for seal checks, thus improving maintenance efficiency and reducing maintenance costs. Attached Figure Description

[0053] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments of this application will be briefly introduced below. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0054] Figure 1 This is a schematic diagram of the structure of a laser device in related technologies;

[0055] Figure 2 This is a schematic diagram of the structure of a laser device provided in an embodiment of this application;

[0056] Figure 3 This is a schematic diagram of another laser device provided in an embodiment of this application;

[0057] Figure 4 This is a schematic diagram of another laser device provided in an embodiment of this application;

[0058] Figure 5 This is a schematic diagram of another laser device provided in an embodiment of this application;

[0059] Figure 6 This is a schematic diagram of another laser device provided in an embodiment of this application;

[0060] Figure 7This is a schematic diagram of another laser device provided in an embodiment of this application;

[0061] Figure 8 This is a flowchart of a maintenance method for a laser device provided in an embodiment of this application.

[0062] Marker explanation:

[0063] 10. Laser;

[0064] 20. Filter assembly; 21. First filter element; 22. Second filter element;

[0065] 30. Loop; 31. First main road; 32. Second main road; 33. First branch road; 331. Fifth section; 332. First sub-segment; 333. Second sub-segment; 34. Second branch road; 341. Sixth section; 342. Third sub-segment; 343. Fourth sub-segment;

[0066] 41. First control component; 42. Second control component; 43. Third control component; 44. Fourth control component; 45. Fifth control component; 46. Sixth control component; 47. Seventh control component;

[0067] 50. First cleaning pipeline; 51. First pipeline; 52. Second pipeline;

[0068] 60. Second cleaning pipeline; 61. Third pipeline; 62. Fourth pipeline;

[0069] 71. Third Main Road; 711. First Section; 712. Second Section; 72. Fourth Main Road; 721. Third Section; 722. Fourth Section;

[0070] 80. Third cleaning pipeline; 81. Fifth pipeline; 82. Sixth pipeline;

[0071] 91. Filter structure. Detailed Implementation

[0072] The features and exemplary embodiments of various aspects of this application will be described in detail below. To make the objectives, technical solutions, and advantages of this application clearer, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain this application and not to limit it. For those skilled in the art, this application can be implemented without some of these specific details. The following description of the embodiments is merely to provide a better understanding of this application by illustrating examples.

[0073] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising..." does not exclude the presence of additional identical elements in the process, method, article, or apparatus that includes said element.

[0074] Taking display panel production as an example, the excimer laser annealing equipment used by panel manufacturers often includes a gas laser device. After operating for a period of time, the gas laser device will generate some micro-particle impurities. In order to reduce the impact of these micro-particle impurities on the operation of the gas laser device, the gas laser device usually needs to be equipped with a filter structure 91. (Refer to the attached diagram) Figure 1 It can be seen that the filter structure 91 in the gas laser device of the relevant technology is usually a single filter element design. Therefore, when the filter structure 91 needs to be replaced or maintained, the entire gas laser device needs to be shut down. Furthermore, the maintenance of the filter structure 91 typically includes a replacement phase, a seal inspection phase, a cleaning phase, and a ventilation phase. For example, the replacement phase takes about 2 hours, the seal inspection phase takes about 4 hours, the cleaning phase takes about 1 hour, and the ventilation phase takes about 3 hours. This results in the entire maintenance process of the filter structure 91 taking about ten hours, wasting production time and reducing capacity.

[0075] Regarding the above issues, firstly, please refer to [link / reference needed]. Figure 2 This application provides a laser device, which includes a laser 10, a filter assembly 20, a circulation loop 30, and a control assembly. The laser 10 includes a housing that encloses a cavity for storing working gas. The filter assembly 20 includes a first filter element 21 and a second filter element 22.

[0076] The circulation loop 30 is used to circulate the receiving cavity and the filter assembly 20. The circulation loop 30 includes a first main path 31, a second main path 32, a first branch path 33, and a second branch path 34. The inlet of the first main path 31 is connected to the receiving cavity, and the outlet of the second main path 32 is connected to the receiving cavity. The first branch path 33 and the second branch path 34 are connected in parallel, and both ends are connected to the outlet of the first main path 31 and the inlet of the second main path 32, respectively. The first filter element 21 is disposed in the first branch path 33, and the second filter element 22 is disposed in the second branch path 34. The control assembly includes a first control element 41 disposed in the first branch path 33 and a second control element 42 disposed in the second branch path 34.

[0077] Laser 10 is the main component of the laser device used to produce laser light. The housing is the cavity in laser 10 used to generate laser light. The housing has a hollow structure and encloses a cavity for containing the working gas. The housing can be cylindrical in shape. The working gas can undergo a gaseous reaction within the cavity. For example, taking xenon chloride (XeCl) as the working gas, its working principle is that xenon gas reacts with chlorine gas to produce xenon chloride. During the decomposition process of xenon chloride, there are changes in energy levels, thereby generating laser light.

[0078] Besides xenon chloride, other materials can be used as the working gas, and this application embodiment does not limit this. Furthermore, the laser device provided in this application can be applied to excimer laser annealing equipment, or to other equipment scenarios using laser devices. Further, the laser device provided in this application can be applied to the production process of display panels, or to other fields such as medical and communications, and this application embodiment does not limit this.

[0079] The filter assembly 20 is a component in the laser device used to filter microparticle impurities. The filter assembly 20 is located outside the laser 10 and is connected to the receiving cavity via a circulation loop 30. Unlike the single-filter design in related technologies, the filter assembly 20 in this embodiment includes at least a first filter element 21 and a second filter element 22, meaning the filter assembly 20 includes at least two filter elements. Depending on the actual needs, the filter assembly 20 may include only the first filter element 21 and the second filter element 22 to make it a dual-filter design, or it may include more filter elements; this embodiment does not limit this.

[0080] To meet the communication requirements between the first filter element 21 and the second filter element 22 relative to the receiving cavity, this application embodiment also improves the pipeline structure for connecting the filter assembly 20 and the laser 10. Specifically, the circulation loop includes at least a first main path 31, a second main path 32, a first branch path 33, and a second branch path 34. The first branch path 33 is a branch structure for setting the first filter element 21, the second branch path 34 is a branch structure for setting the second filter element 22, the first main path 31 is a pipeline structure connected to the outlet of the receiving cavity, and the second main path 32 is a pipeline structure connected to the inlet of the receiving cavity.

[0081] The first branch 33 and the second branch 34 are connected in parallel, and their two ends are respectively connected to the outlet of the first main road 31 and the inlet of the second main road 32. That is, the first filter element 21 and the second filter element 22 are connected to the first main road 31 in parallel through the first branch 33 and the second branch 34, and are also connected to the second main road 32 in parallel through the first branch 33 and the second branch 34. In this way, the first filter element 21 and the second filter element 22 can be circulated in the receiving cavity.

[0082] Based on this, the embodiments of this application respectively provide a first control element 41 and a second control element 42 for the first branch 33 and the second branch 34. The first control element 41 is used to control the conduction or isolation between the first filter element 21 and the receiving cavity, and the second control element 42 is used to control the conduction or isolation between the second filter element 22 and the receiving cavity, thereby improving the productivity of the entire laser device.

[0083] Specifically, when neither the first filter element 21 nor the second filter element 22 requires maintenance, both the first filter element 21 and the second filter element 22 are connected to the receiving cavity. The working gas and micro-particle impurities can enter the first filter element 21 located in the first branch 33 and the second filter element 22 located in the second branch 34 through the first main path 31, respectively. During the filtration process, the micro-particle impurities are blocked from continuing to flow. Then, the filtered working gas flows into the second main path 32 and finally returns to the receiving cavity.

[0084] When the second filter element 22 needs maintenance, the first filter element 21 is connected to the receiving cavity, and the second filter element 22 is isolated from the receiving cavity. Working gas and micro-particle impurities can pass through the first main path 31 and only enter the first filter element 21 in the first branch path 33, and do not enter the second filter element 22 located in the second branch path 34. At this time, the first filter element 21 can still meet the filtration needs of micro-particle impurities, while the second filter element 22 can be replaced and maintained.

[0085] Therefore, when a single filter element needs maintenance, other filter elements can still filter micro-particle impurities. Thus, when some filter elements need maintenance, the filter element can be isolated from the containment cavity, and other filter elements can be used to meet the overall operating needs of the laser 10. This allows the laser device to operate and the filter element replacement process to be carried out simultaneously, thereby improving the overall production capacity of the laser device.

[0086] It should be noted that the “connection” mentioned in the embodiments of this application refers to the physical connection relationship between structures. Taking the inlet of the first main road 31 connected to the receiving cavity as an example, the connection here means that the inlet of the first main road 31 can be directly connected to the shell used to form the receiving cavity, or the inlet of the first main road 31 can also be connected to the shell through other pipeline structures.

[0087] In contrast, the terms "conduction" and "isolation" mentioned in the embodiments of this application refer to state relationships. Taking the first filter element 21 being in communication with the receiving cavity as an example, "conduction" means that the working gas located in the receiving cavity can flow to the first filter element 21. Similarly, taking the second filter element 22 being isolated from the receiving cavity as an example, "isolation" means that the working gas located in the receiving cavity cannot flow to the second filter element 22. The terms "connection," "conduction," and "isolation" mentioned later in this application are similar and will not be elaborated further.

[0088] Furthermore, when the laser device is operating normally and neither the first filter element 21 nor the second filter element 22 needs to be replaced or maintained, both the first filter element 21 and the second filter element 22 can be connected to the relative cavity, or one of the first filter element 21 and the second filter element 22 can be connected to the relative cavity while the other is isolated from the relative cavity. This application embodiment does not limit this.

[0089] In summary, in this embodiment, by providing a first filter element 21 and a second filter element 22 within the filter assembly 20 and connecting them in parallel, the other can still meet the operational needs of the laser device even when one requires maintenance. This allows for simultaneous operation of the laser device and filter element replacement, thereby increasing the overall productivity of the laser device. Actual verification shows that the maintenance time of the laser device in this embodiment can be reduced by approximately 70% compared to existing technologies.

[0090] Furthermore, since both the first control element 41 and the second control element 42 are located on the branch structure, when one of the filters is being maintained, at least a portion of the branch structure corresponding to that filter can be isolated from the first main path 31 and the second main path 32. Therefore, during the replacement process, even if the branch structure corresponding to that filter is connected to the external environment, environmental substances will not enter the first main path 31, the second main path 32, or even the receiving cavity. Based on this, the first main path 31, the second main path 32, and the receiving cavity will not be contaminated by environmental substances, thereby reducing the adverse effects of the external environment on the receiving cavity and improving the reliability of the laser 10. Moreover, during maintenance, only a portion of the branch structure in the circulation loop needs to be cleaned and its seal checked, which helps reduce the amount of cleaning medium used, as well as the difficulty and time required for seal checks, thus improving maintenance efficiency and reducing maintenance costs. Actual verification shows that the amount of cleaning medium used in the laser device of this embodiment can be reduced by approximately 60% compared to the prior art.

[0091] In some embodiments, such as Figure 2 As shown, there are multiple first control components 41. Some of the first control components 41 are located between the inlet of the first filter element 21 and the outlet of the first main road 31, and some of the first control components 41 are located between the outlet of the first filter element 21 and the inlet of the second main road 32.

[0092] The first control element 41 is a control element used to control whether the first filter element 21 is connected to or isolated from the receiving cavity. Considering that the first filter element 21 can be connected to both the inlet and outlet of the receiving cavity through a circulation loop, in order to meet the needs of both connection and isolation between the first filter element 21 and the receiving cavity, this embodiment of the application sets the number of first control elements 41 to multiple. Some of the first control elements 41 are disposed on the outlet side of the first filter element 21, so that the outlet of the first filter element 21 and the receiving cavity can be controlled to be in a connected or isolated state. Some of the first control elements 41 are disposed on the inlet side of the first filter element 21, so that the inlet of the first filter element 21 and the receiving cavity can be controlled to be in a connected or isolated state.

[0093] The first control element 41 can take many forms. For example, the first control element 41 can be a control valve, and the control valve can include various types such as electronic valves and check valves. Different first control elements 41 can be of the same type or different types. This application embodiment does not limit this.

[0094] In some embodiments, a plurality of first controls 41 are configured to be turned off or turned on simultaneously.

[0095] In this embodiment, considering that the first filter element 21 needs to be circulated within the receiving cavity during operation, the first control element 41 located on both the inlet and outlet sides of the first filter element 21 needs to be in the open state. However, during maintenance of the first filter element 21, it needs to be isolated from the receiving cavity; therefore, the first control element 41 located on both the inlet and outlet sides of the first filter element 21 needs to be in the closed state. Thus, by configuring multiple first control elements 41 to be simultaneously closed or simultaneously open, the need for connection or isolation between the first filter element 21 and the receiving cavity at different times is met.

[0096] In some alternative embodiments, the plurality of first control elements 41 are all electronic valves. Based on this, considering that the plurality of first control elements 41 need to be turned off or on simultaneously, they can be configured to be driven and controlled together by the same electrical signal. Of course, in another embodiment, the plurality of first control elements 41 can be driven and controlled separately by different electrical signals, as long as the requirement for simultaneous turning off or on of the plurality of first control elements 41 can be met at the same time.

[0097] It should be noted that the second control element 42 can adopt the same design as the first control element 41. In some embodiments, multiple second control elements 42 are provided, with some second control elements 42 disposed between the inlet of the second filter element 22 and the outlet of the first main channel 31, and some second control elements 42 disposed between the outlet of the second filter element 22 and the inlet of the second main channel 32. Further optionally, multiple second control elements 42 are configured to be turned off or turned on simultaneously.

[0098] In some embodiments, please refer to Figure 3 The laser device also includes a first cleaning conduit 50 and a second cleaning conduit 60. The first cleaning conduit 50 includes a first conduit 51 and a second conduit 52, both of which are connected to the first filter element 21. The second cleaning conduit 60 includes a third conduit 61 and a fourth conduit 62, both of which are connected to the second filter element 22. The first cleaning medium can enter the first filter element 21 through the first conduit 51 and exit the first filter element 21 through the second conduit 60. The second cleaning medium can enter the second filter element 22 through the third conduit 61 and exit the second filter element 22 through the fourth conduit 62.

[0099] As can be seen from the foregoing, taking the maintenance of the second filter element 22 as an example, in addition to replacing the second filter element 22, it is also necessary to clean the replaced second filter element 22 and the second branch 34 where the second filter element 22 is located. In addition, to meet the cleaning requirements, the laser device in this embodiment of the application is further provided with a first cleaning pipeline 50 and a second cleaning pipeline 60. The first cleaning pipeline 50 is a pipeline structure used to achieve the cleaning of the replaced first filter element 21 and the first branch 33 where the first filter element 21 is located. Similarly, the second cleaning pipeline 60 is a pipeline structure used to achieve the cleaning of the replaced second filter element 22 and the second branch 34 where the second filter element 22 is located.

[0100] The first cleaning pipeline 50 includes a first pipeline 51 and a second pipeline 52. The first pipeline 51 is connected to the inlet side of the first filter element 21, and the first cleaning medium enters the first filter element 21 through the first pipeline 51. The second pipeline 52 is connected to the outlet side of the first filter element 21, and the first cleaning medium exiting from the first filter element 21 leaves the laser device through the second pipeline 52.

[0101] It should be noted that, considering that the parts of the first branch 33 that need to be cleaned are usually in a conductive state with the first filter element 21, depending on the actual needs, the first pipe 51 can be directly connected to the first filter element 21. In this way, the first cleaning medium can enter the first filter element 21 through the first pipe 51 and flow into the first branch 33 through the first filter element 21. Alternatively, the first pipe 51 can also be directly connected to the first branch 33, allowing the first cleaning medium to enter the first branch 33 and flow into the first filter element 21. Therefore, regardless of the connection method, the first cleaning medium can enter both the first branch 33 and the first filter element 21, thus achieving the cleaning of both. Similarly, the second pipe 52 can be directly connected to the first filter element 21, or the second pipe 52 can also be directly connected to the first branch 33.

[0102] The second cleaning pipeline 60 includes a third pipeline 61 and a fourth pipeline 62. The arrangement of the third pipeline 61 and the fourth pipeline 62 allows the second cleaning medium to pass through and exit the second filter element 22 and the second branch 34. The arrangement of the third pipeline 61 and the fourth pipeline 62 can be referred to the description of the arrangement of the first pipeline 51 and the second pipeline 52 above, and will not be repeated in this embodiment.

[0103] In this embodiment, a first cleaning conduit 50 and a second cleaning conduit 60 are respectively provided for the first filter element 21 and the second filter element 22, enabling independent cleaning of the two filter elements. Furthermore, when one filter element is being maintained and cleaned, the cleaning medium only enters the replaced filter element through the corresponding cleaning conduit and does not enter the other filter element. This ensures that the other filter element is not affected by the cleaning medium and can maintain communication with the receiving cavity, thus meeting the operational requirements of the laser device and improving its productivity.

[0104] The embodiments of this application do not limit the specific material composition and phase of the first cleaning medium and the second cleaning medium. The first cleaning medium and the second cleaning medium may include the same material or different materials, and at least one of them may be liquid or at least one of them may be gaseous.

[0105] In some alternative embodiments, the first cleaning medium and the second cleaning medium comprise the same material.

[0106] In this embodiment, considering that the first filter element 21 and the second filter element 22 serve the same function and can both use the same filter material, the cleaning medium used to clean the first filter element 21 and the second filter element 22 can also use the same material, which helps to reduce maintenance costs.

[0107] In some embodiments, the first cleaning medium comprises an inert gas. Similarly, alternatively, the second cleaning medium may comprise an inert gas.

[0108] In this embodiment, inert gases typically possess high chemical stability and generally do not react with other structural materials. Therefore, by including an inert gas in the first cleaning medium, the impact of the first cleaning medium on structures such as the first filter element 21 and the first branch 33 is reduced, thereby improving the lifespan of the laser device. Further optionally, the first cleaning medium includes argon gas. Similarly, optionally, the second cleaning medium includes argon gas.

[0109] In some embodiments, please refer to Figure 4 The laser device also includes a third main path 71 and a fourth main path 72. The inlet of the first pipeline 51 and the inlet of the third pipeline 61 are connected in parallel to the third main path 71, and the outlet of the second pipeline 52 and the outlet of the fourth pipeline 62 are connected in parallel to the fourth pipeline 62.

[0110] Both the first pipeline 51 and the third pipeline 61 are connected to the third main pipeline 71. When the first filter element 21 requires maintenance, the first cleaning medium selectively enters the first pipeline 51 through the third main pipeline 71, and then enters the first filter element 21 and the first branch pipeline 33 through the first pipeline 51 to achieve a cleaning effect. When the second filter element 22 requires maintenance, the second cleaning medium selectively enters the third pipeline 61 through the third main pipeline 71, and then enters the second filter element 22 and the second branch pipeline 34 through the third pipeline 61 to achieve a cleaning effect.

[0111] Both the second pipe 52 and the fourth pipe 62 are connected to the fourth main pipe 72. When the first filter element 21 requires maintenance, the first cleaning medium, after cleaning the first filter element 21 and the first branch pipe 33, enters the fourth main pipe 72 through the second pipe 52 and exits the laser device through the fourth main pipe 72. When the second filter element 22 requires maintenance, the second cleaning medium, after cleaning the second filter element 22 and the second branch pipe 34, enters the fourth main pipe 72 through the fourth pipe 62 and exits the laser device through the fourth main pipe 72.

[0112] In summary, the third main channel 71 can satisfy both the need for the first cleaning medium to enter the first pipeline 51 and the need for the second cleaning medium to enter the third pipeline 61, while the fourth main channel 72 can satisfy both the need for the first cleaning medium to leave the second pipeline 52 and the need for the second cleaning medium to leave the fourth pipeline 62. Therefore, in this embodiment, the arrangement of the third main channel 71 and the fourth main channel 72 can meet the cleaning needs of the filter assembly 20, while simplifying the number of pipelines in the laser device, thereby reducing the layout complexity of the laser device and lowering the overall cost.

[0113] In some embodiments, such as Figure 4 As shown, the laser device also includes a third control element 43 and a fourth control element 44. The third control element 43 is disposed in the first cleaning pipeline 50, and the fourth control element 44 is disposed in the second cleaning pipeline 60.

[0114] The third control element 43 is a control element used to control whether the first cleaning pipeline 50 is connected relative to the third main pipeline 71 and the fourth main pipeline 72. Further, the third control element 43 can control the connection or isolation between the first filter element 21 and the first branch pipeline 33 relative to the third main pipeline 71 and the fourth main pipeline 72. In other words, the third control element 43 can control whether the cleaning medium enters the first filter element 21 and the first branch pipeline 33 through the third main pipeline 71, and control whether the cleaning medium enters the fourth main pipeline 72 from the first filter element 21 and the first branch pipeline 33.

[0115] In some optional embodiments, there are multiple third control elements 43, with some third control elements 43 disposed in the first pipeline 51 and some third control elements 43 disposed in the second pipeline 52. The third control elements 43 disposed in the first pipeline 51 are used to control whether the cleaning medium enters the first filter element 21 and the first branch line 33 through the third main line 71, while the third control elements 43 disposed in the second pipeline 52 are used to control whether the cleaning medium enters the fourth main line 72 from the first filter element 21 and the first branch line 33.

[0116] The fourth control element 44 is used to control whether the second cleaning pipeline 60 is connected relative to the third main pipeline 71 and the fourth main pipeline 72. Further, the fourth control element 44 can control the connection or isolation between the second filter element 22 and the second branch pipeline 34 relative to the third main pipeline 71 and the fourth main pipeline 72. In other words, the fourth control element 44 can control whether the cleaning medium enters the second filter element 22 and the second branch pipeline 34 through the third main pipeline 71, and control whether the cleaning medium enters the fourth main pipeline 72 from the second filter element 22 and the second branch pipeline 34.

[0117] In some optional embodiments, there are multiple fourth control elements 44, some of which are disposed in the third pipeline 61 and some in the fourth pipeline 62. The fourth control elements 44 disposed in the third pipeline 61 are used to control whether the cleaning medium enters the second filter element 22 and the second branch line 34 through the third main line 71, while the third control elements 43 disposed in the fourth pipeline 62 are used to control whether the cleaning medium enters the fourth main line 72 from the second filter element 22 and the second branch line 34.

[0118] It should be noted that the third control element 43 can take many forms. For example, the third control element 43 can be a control valve, and the control valve can include various types such as electronic valves and check valves. Different first control elements 41 can be of the same type or different types. This application embodiment does not limit this. The same applies to the fourth control element 44.

[0119] In this embodiment, the third control element 43 can control the connection or isolation of the first filter element 21 and the first branch 33 relative to the third main path 71 and the fourth main path 72, and the fourth control element 44 can control the connection or isolation of the second filter element 22 and the second branch 34 relative to the third main path 71 and the fourth main path 72. Thus, by means of the third control element 43 and the fourth control element 44, the first filter element 21 and the second filter element 22 can be cleaned independently, thereby enabling the laser device to operate and the filter element replacement process to be carried out simultaneously, thereby improving the overall production capacity of the laser device.

[0120] In some embodiments, such as Figure 4As shown, the laser device also includes a third cleaning conduit 80, which includes a fifth conduit 81 and a sixth conduit 82, both of which are connected to the receiving cavity. The third cleaning medium can enter the receiving cavity through the fifth conduit 81 and exit the receiving cavity through the sixth conduit 82.

[0121] Considering that a certain amount of microparticle impurities may accumulate inside the laser device 10 after a period of operation, in addition to maintaining the first filter element 21 and the second filter element 22, the laser device 10 also needs to be cleaned. Therefore, in this embodiment, a third cleaning pipeline 80 is added. The third cleaning pipeline 80 includes a fifth pipeline 81 and a sixth pipeline 82. The fifth pipeline 81 is connected to the inlet side of the receiving cavity, through which the third cleaning medium enters the receiving cavity. The sixth pipeline 82 is connected to the outlet side of the receiving cavity, through which the third cleaning medium exiting the receiving cavity leaves the laser device.

[0122] The embodiments of this application do not impose limitations on the relative relationship between the third cleaning pipeline 80 and the first cleaning pipeline 50 and the second cleaning pipeline 60. For example, the third cleaning pipeline 80 is not connected to the first cleaning pipeline 50 and the second cleaning pipeline 60.

[0123] In this embodiment, by providing a third cleaning pipeline 80, the cleaning needs of the laser 10 itself can be met. At the same time, the third cleaning pipeline 80 is set independently relative to the first cleaning pipeline 50 and the second cleaning pipeline 60. That is, the cleaning process of the laser 10 itself no longer depends on the cleaning process of the filter component 20. This allows the laser 10 and the filter component 20 to be cleaned separately, thereby reducing the consumption of cleaning media, reducing cleaning costs, and providing greater flexibility and practicality.

[0124] The specific material composition and phase of the third cleaning medium are not limited in the embodiments of this application. The third cleaning medium and the first cleaning medium may include the same material or different materials, and the third cleaning medium may be liquid or gaseous. Optionally, the first cleaning medium and the third cleaning medium may include the same material. Further optionally, the third cleaning medium may include argon gas.

[0125] In some embodiments, the housing includes a first inlet end, a second inlet end, a first outlet end, and a second outlet end, which are spaced apart. A first main channel 31 is connected to the first outlet end, a second main channel 32 is connected to the first inlet end, a fifth pipeline 81 is connected to the second inlet end, and a sixth pipeline 82 is connected to the second outlet end. In other words, the third cleaning pipeline 80 and the circulation loop 30 are respectively connected to different positions on the housing.

[0126] In this embodiment, the third cleaning pipeline 80 and the circulation loop 30 are not connected to the same location on the housing, but are connected at different locations on the housing. This helps to reduce the risk of contact interference between the third cleaning pipeline 80 and the circulation loop 30, reduce mutual interference between the two and the difficulty of pipeline layout.

[0127] In some embodiments, please refer to Figure 5 The fifth pipeline 81 connects to the third main pipeline 71, and the sixth pipeline 82 connects to the fourth main pipeline 72.

[0128] The first pipeline 51, the third pipeline 61, and the fifth pipeline 81 are connected in parallel to the third main pipeline 71. Based on this, the cleaning medium located in the third main pipeline 71 can selectively enter at least one of the first pipeline 51, the third pipeline 61, and the fifth pipeline 81 to achieve cleaning treatment of at least one of the first filter element 21, the second filter element 22, and the laser 10.

[0129] The second pipeline 52, the fourth pipeline 62, and the sixth pipeline 82 are connected in parallel to the fourth main pipeline 72. Based on this, the cleaning medium after cleaning at least one of the first filter element 21, the second filter element 22, and the laser 10 can enter the fourth main pipeline 72 through the corresponding pipeline, thereby meeting the requirement that the cleaning medium leaves the laser device.

[0130] In this embodiment, the first cleaning pipeline 50, the second cleaning pipeline 60 and the third cleaning pipeline 80 all input the cleaning medium through the third main pipeline 71 and discharge the cleaning medium to the outside of the laser device through the fourth main pipeline 72. This design helps to further simplify the number of pipelines in the laser device, thereby reducing the layout complexity of the laser device and reducing the overall cost.

[0131] In some embodiments, such as Figure 5 As shown, the laser device also includes a fifth control element 45 disposed in the third cleaning pipeline 80.

[0132] The fifth control element 45 is a control element used to control whether the third cleaning pipeline 80 is connected relative to the third main pipeline 71 and the fourth main pipeline 72. Further, the fifth control element 45 can control whether the receiving cavity is connected or disconnected relative to the third main pipeline 71 and the fourth main pipeline 72. In other words, the fifth control element 45 can control whether the cleaning medium enters the receiving cavity through the third main pipeline 71 and whether the cleaning medium enters the fourth main pipeline 72 from the receiving cavity.

[0133] In some optional embodiments, there are multiple fifth control elements 45, some of which are disposed in the fifth pipeline 81 and some of which are disposed in the sixth pipeline 82. The fifth control elements 45 disposed in the fifth pipeline 81 are used to control whether the cleaning medium enters the receiving cavity through the third main pipeline 71, while the fifth control elements 45 disposed in the sixth pipeline 82 are used to control whether the cleaning medium enters the fourth main pipeline 72 from the receiving cavity.

[0134] In some embodiments, such as Figure 5 As shown, the laser device also includes a sixth control component 46 disposed on the third main circuit 71. The third main circuit 71 includes a first part 711 and a second part 712 that are interconnected. The first part 711 is disposed between the inlet of the fifth pipe 81 and the inlet of the first pipe 51, and the second part 712 is disposed between the inlet of the first pipe 51 and the inlet of the third pipe 61. The sixth control component 46 is disposed on the first part 711.

[0135] As can be seen from the attached diagram, the cleaning medium located in the third main channel 71 needs to pass through the first section 711 before entering the second section 712; that is, the outlet of the first section 711 is connected to the inlet of the second section 712. Furthermore, the cleaning medium in the third main channel 71 is first divided: one part enters the third cleaning pipeline 80, where the fifth control element 45 controls whether it enters the receiving cavity; the other part enters the first section 711, where the sixth control element 46 controls whether it enters the filter assembly 20.

[0136] Therefore, in this embodiment of the application, by cooperating with the fifth control element 45 and the sixth control element 46, it is possible to control whether the cleaning medium enters the containment cavity to clean the laser 10 or enters the filter assembly 20 to clean at least one of the first filter element 21 and the second filter element 22, thereby achieving preliminary flow control of the cleaning medium and meeting the cleaning or operation needs of the laser device.

[0137] Similarly, in some embodiments, such as Figure 5 As shown, the laser device also includes a seventh control component 47 disposed on the fourth main path 72. The fourth main path includes a third part 721 and a fourth part 722 that are interconnected. The third part 721 is disposed between the outlet of the sixth pipe 82 and the outlet of the second pipe 52, and the fourth part 722 is disposed between the outlet of the second pipe 52 and the outlet of the fourth pipe 62. The seventh control component 47 is disposed on the third part 721.

[0138] In some embodiments, please refer to Figure 6 The first pipeline 51 is connected to the first branch 33.

[0139] In this embodiment, the first conduit 51 is directly connected to the first branch 33, rather than directly to the first filter element 21. This means the first filter element 21 only needs one inlet end for connection to the first branch 33. This design allows the first filter element 21 to be connected to the receiving cavity and the first conduit 51 while reducing the number of inlets on the first filter element 21, thus minimizing its negative impact on the size of the first filter element 21 and reducing the space occupied by the filter assembly 20. Similarly, optionally, the third conduit 61 is connected to the second branch 34.

[0140] In some alternative embodiments, such as Figure 6 As shown, the second pipe 52 is connected to the first branch 33. This means the first filter element 21 only needs one outlet end for connection to the first branch 33, further reducing the space occupied by the filter assembly 20. Similarly, optionally, the fourth pipe 62 is connected to the second branch 34.

[0141] In some embodiments, combined with Figure 2 and Figure 6 Specifically, the first branch 33 includes a fifth section 331, which includes a first sub-section 332 and a second sub-section 333. The inlet of the first sub-section 332 is connected to the outlet of the first main road 31, and the outlet of the second sub-section 333 is connected to the first filter element 21. The outlet of the first sub-section 332 is connected in parallel with the outlet of the first pipeline 51 to the inlet of the second sub-section 333.

[0142] In this embodiment, the first segment 332 and the second segment 333 are two sub-segment structures of the fifth part 331. The first segment 332 is used to connect with the first main road 31, and the second segment 333 is used to connect with the first filter element 21. On this basis, the outlet of the first segment 332 and the outlet of the first pipeline 51 are connected in parallel to the inlet of the second segment 333. In this way, the second segment 333 plays the role of transporting working gas during the operation of the first filter element 21, and also plays the role of transporting cleaning medium during the maintenance of the first filter element 21.

[0143] Furthermore, since the second sub-section 333 is directly connected to the first filter element 21, external substances can more easily enter the second sub-section 333 during the replacement of the first filter element 21. Based on this, since the cleaning medium needs to pass through the second sub-section 333 before entering the first filter element 21, this design, in addition to using the second sub-section 333 to transport the cleaning medium, also allows the cleaning medium to clean the second sub-section 333, thereby meeting the cleaning needs of the first branch 33.

[0144] In some embodiments, the first filter element 21 includes a third inlet end, and the first sub-section 332 and the first pipeline 51 are both connected to the third inlet end through the second sub-section 333.

[0145] In this embodiment, since the second segment 333 is connected to both the first pipeline 51 to transport the cleaning medium and the first segment 332 to transport the working gas, the first filter element 21 only needs to have one inlet end for connecting to the second segment 333, thereby reducing the number of inlets on the first filter element 21 and reducing its adverse effect on the size of the first filter element 21.

[0146] In some embodiments, a portion of the first control element 41 is disposed in the first sub-segment 332.

[0147] In this embodiment, the first control element 41 disposed on the first sub-segment 332 is used to control whether the working gas enters the second sub-segment 333. During the maintenance of the first filter element 21, the first control element 41 can isolate the second sub-segment 333 from the containment cavity, thereby reducing the risk of environmental substances entering the containment cavity and improving the operational reliability of the laser device.

[0148] The design of the second branch 34 can be similar to that of the first branch 33 described above, and will not be repeated in this embodiment. In some embodiments, the second branch 34 includes a sixth part 341, which includes a third sub-segment 342 and a fourth sub-segment 343. The inlet of the third sub-segment 342 is connected to the outlet of the first main branch 31, and the outlet of the fourth sub-segment 343 is connected to the first filter element 21. The outlet of the third sub-segment 342 is connected in parallel with the outlet of the third pipe 61 to the inlet of the second sub-segment 343.

[0149] In some alternative embodiments, the second filter element 22 includes a fourth inlet end, and the third sub-section 342 and the third pipeline 61 are both connected to the fourth inlet end via the fourth sub-section 343. Further optionally, a portion of the second control element 42 is disposed in the third sub-section 342.

[0150] Secondly, please refer to Figure 7 This application provides a laser device, including a laser 10, a filter assembly 20, and a control assembly. The laser 10 includes a housing that encloses a cavity for distributing a working gas. The filter assembly 20 includes a first filter element 21 and a second filter element 22. The control assembly includes a first control element 41 and a second control element 42. The first filter element 21 is connected to the cavity via the first control element 41, and the second filter element 22 is connected to the cavity via the second control element 42. The first control element 41 and the second control element 42 operate independently and respectively control the connection or isolation of the first filter element 21 and the second filter element 22 relative to the cavity.

[0151] Laser 10 is the main component of the laser device used to produce laser light. The housing is the cavity in laser 10 used to generate laser light. The housing has a hollow structure and encloses a cavity for containing the working gas. The housing can be cylindrical in shape. The working gas can undergo a gaseous reaction within the cavity. For example, taking xenon chloride (XeCl) as the working gas, its working principle is that xenon gas reacts with chlorine gas to produce xenon chloride. During the decomposition process of xenon chloride, there are changes in energy levels, thereby generating laser light.

[0152] Besides xenon chloride, other materials can be used as the working gas, and this application embodiment does not limit this. Furthermore, the laser device provided in this application can be applied to excimer laser annealing equipment, or to other equipment scenarios using laser devices. Further, the laser device provided in this application can be applied to the production process of display panels, or to other fields such as medical and communications, and this application embodiment does not limit this.

[0153] The filter assembly 20 is a component in the laser device used to filter microparticle impurities. The filter assembly 20 is located outside the laser 10 and is connected to the receiving cavity via a circulation loop 30. Unlike the single-filter design in related technologies, the filter assembly 20 in this embodiment includes at least a first filter element 21 and a second filter element 22, meaning the filter assembly 20 includes at least two filter elements. Depending on the actual needs, the filter assembly 20 may include only the first filter element 21 and the second filter element 22 to make it a dual-filter design, or it may include more filter elements; this embodiment does not limit this.

[0154] The control assembly includes a first control element 41 and a second control element 42, respectively corresponding to the first filter element 21 and the second filter element 22. The first control element 41 controls the connection or isolation between the first filter element 21 and the receiving cavity, and the second control element 42 controls the connection or isolation between the second filter element 22 and the receiving cavity. The first control element 41 and the second control element 42 operate independently; that is, the opening and closing of the first control element 41 is not affected by the opening and closing of the second control element 42. Furthermore, depending on the actual application scenario, one of the first control element 41 and the second control element 42 can be in the open state while the other is in the closed state, thereby improving the overall productivity of the laser device.

[0155] Specifically, when the second filter element 22 needs maintenance, the first control element 41 can be in the open state and the second control element 42 can be in the closed state. The first filter element 21 is connected to the receiving cavity through the first control element 41, and the second filter element 22 is isolated from the receiving cavity through the second control element 42. Working gas and micro-particle impurities can enter the first filter element 21 but not the second filter element 22. At this time, the first filter element 21 can still meet the filtration needs for micro-particle impurities, while the second filter element 22 can be replaced and maintained.

[0156] Therefore, when a single filter element requires maintenance, the other filter elements can still filter microparticle impurities. Thus, when some filter elements require maintenance, one of the first control element 41 and the second control element 42 can be set to the off state while the other is set to the on state. This allows the laser device to operate and the filter element replacement process to be carried out simultaneously, improving the overall productivity of the laser device. Furthermore, this design can reduce the risk of environmental substances entering the containment cavity when some filter elements are being maintained, thereby reducing the adverse effects of the external environment on the containment cavity and improving the reliability of the laser 10.

[0157] It should be noted that the present application embodiment does not limit the communication method between the first filter element 21 and the second filter element 22 relative to the receiving cavity. For example, the first filter element 21 and the second filter element 22 may each have completely independent pipeline structures for communicating with the receiving cavity, or some structures in the pipeline structures for communicating with the receiving cavity may be shared with each other. The present application embodiment does not limit this.

[0158] Thirdly, this application provides a method for maintaining a laser device, wherein the laser device is any of the laser devices described in the foregoing embodiments. Please refer to [link to relevant documentation]. Figure 8 Maintenance methods include:

[0159] S100: Open the first control unit.

[0160] In step S100, opening the first control element 41 enables the first filter element 21 and the receiving cavity to be connected, so that the laser device can be in operation. The first filter element 21 is used to filter the working gas, reducing the adverse effects of micro-particle impurities on the operation of the laser device.

[0161] S110: Shut down the second control unit.

[0162] In step S110, the second filter element 22 can be isolated from the containment cavity by turning off the second control element 42, so that even if the second filter element 22 is maintained or replaced in the future, it will not have an adverse effect on the reaction in the containment cavity.

[0163] It should be noted that, depending on the actual operation method, step S100 may be performed before step S110, or after step S110, or step S100 may be performed simultaneously with step S110.

[0164] S120: Replace the filter element structure in the second filter element.

[0165] In step S120, combined Figure 1 As shown in the structure, during the replacement process, the second filter element 22 and the second filter element 22 will be exposed to the environment, allowing environmental substances to enter the second filter element 22 and the second branch 34.

[0166] S130: Perform a seal test on at least a portion of the piping structure between the second filter element and the receiving cavity.

[0167] In step S130, after the filter element structure of the second filter element 22 is replaced, a sealing test is required to determine whether the laser device maintains a good seal. This is combined with... Figure 1 In the structure shown, since the above steps only affect the second filter element 22 and the second branch 34, in this step, only the sealing degree of the second filter element 22 and the second branch 34 can be tested. This reduces the sealing degree testing range and lowers the time required for sealing blockage testing.

[0168] S140: When the sealing degree is greater than the threshold, the second cleaning medium is supplied to the second filter element.

[0169] In step S140, the "threshold" mentioned here refers to a preset value. When the sealing degree is greater than the threshold, it indicates that the airtightness is good. At this time, the second filter element 22 needs to be cleaned to remove environmental substances from it. The second cleaning medium will not only enter the second filter element 22, but also enter the second branch 34, thus cleaning the second branch 34 as well.

[0170] In related technologies, the cleaning process usually needs to cover most of the components and most of the pipeline structure of the laser device. However, in this embodiment, only the second filter element 22 and the pipeline structure connected to the second filter element 22 need to be cleaned, thereby reducing the consumption of cleaning media and reducing cleaning costs.

[0171] S150: Fill the second filter element with working gas.

[0172] In step S150, by filling the second filter element 22 with working gas, the second cleaning medium is discharged outside the laser device. On this basis, the working gas in the second filter element 22 can enter the receiving cavity. Therefore, in subsequent steps, the second filter element 22 can be connected to the receiving cavity, thereby achieving the filtering effect of micro-particle impurities by means of the second filter element 22.

[0173] It should be noted that in steps S120 to S150, the first control element 41 can always remain in the open state, that is, the first filter element 21 is kept in the conductive state with the receiving cavity. This enables the laser device to operate and the filter element replacement process to be carried out simultaneously, thereby improving the overall production capacity of the laser device.

[0174] While the embodiments disclosed in this application are as described above, the content is merely for the purpose of facilitating understanding of this application and is not intended to limit the invention. Any person skilled in the art to which this application pertains may make any modifications and changes in form and detail of the implementation without departing from the spirit and scope disclosed in this application; however, the scope of protection of this application shall still be determined by the scope defined in the appended claims.

[0175] The above description is merely a specific embodiment of this application. Those skilled in the art will clearly understand that, for the sake of convenience and brevity, substitutions for other connection methods described above can be made by referring to the corresponding processes in the foregoing method embodiments, and will not be repeated here. It should be understood that the scope of protection of this application is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in this application, and these modifications or substitutions should all be covered within the scope of protection of this application.

Claims

1. A laser device, characterized in that, include: A laser includes a housing that encloses a cavity for disposing of a working gas. A filter assembly, including a first filter element and a second filter element; A circulation loop is used to circulate between the receiving cavity and the filter assembly. The circulation loop includes a first main path, a second main path, a first branch path, and a second branch path. The inlet of the first main path is connected to the receiving cavity, and the outlet of the second main path is connected to the receiving cavity. The first branch path and the second branch path are arranged in parallel, and both ends are respectively connected to the outlet of the first main path and the inlet of the second main path. The first filter element is disposed in the first branch path, and the second filter element is disposed in the second branch path. The control component includes a first control element disposed on the first branch and a second control element disposed on the second branch.

2. The laser device according to claim 1, characterized in that, The first control element is provided in multiple ways. Some of the first control elements are located between the inlet of the first filter element and the outlet of the first main road, and some of the first control elements are located between the outlet of the first filter element and the inlet of the second main road. Preferably, the plurality of the first control elements are configured to be turned off or turned on simultaneously; Preferably, multiple second control components are provided, with some second control components located between the inlet of the second filter and the outlet of the first main road, and some second control components located between the outlet of the second filter and the inlet of the second main road. Preferably, the plurality of the second control elements are configured to be turned off or turned on simultaneously.

3. The laser device according to claim 1, characterized in that, It also includes a first cleaning pipeline and a second cleaning pipeline. The first cleaning pipeline includes a first pipe and a second pipe, both of which are connected to the first filter element. The second cleaning pipeline includes a third pipe and a fourth pipe, both of which are connected to the second filter element. The first cleaning medium can enter the first filter element through the first pipeline and exit the first filter element through the second pipeline; the second cleaning medium can enter the second filter element through the third pipeline and exit the second filter element through the fourth pipeline. Preferably, the first cleaning medium and the second cleaning medium comprise the same material; Preferably, the first cleaning medium comprises an inert gas; Preferably, the first cleaning medium includes argon gas.

4. The laser device according to claim 3, characterized in that, It also includes a third main pipeline and a fourth main pipeline, wherein the inlet of the first pipeline is connected in parallel to the inlet of the third pipeline to the third main pipeline, and the outlet of the second pipeline is connected in parallel to the outlet of the fourth pipeline to the fourth pipeline; Preferably, the laser device further includes a third control component and a fourth control component, wherein the third control component is disposed in the first cleaning pipeline and the fourth control component is disposed in the second cleaning pipeline; Preferably, there are multiple third control components, some of which are disposed in the first pipeline and some of which are disposed in the second pipeline; Preferably, there are multiple fourth control components, some of which are disposed in the third pipeline and some of which are disposed in the fourth pipeline.

5. The laser device according to claim 4, characterized in that, It also includes a third cleaning pipeline, which includes a fifth pipeline and a sixth pipeline, both of which are connected to the receiving cavity; The third cleaning medium can enter the receiving cavity through the fifth pipeline and leave the receiving cavity through the sixth pipeline; Preferably, the first cleaning medium and the third cleaning medium comprise the same material; Preferably, the third cleaning medium comprises argon gas; Preferably, the housing includes a first inlet end, a second inlet end, a first outlet end, and a second outlet end arranged at intervals, the first main channel is connected to the first outlet end, the second main channel is connected to the first inlet end, the fifth pipeline is connected to the second inlet end, and the sixth pipeline is connected to the second outlet end.

6. The laser device according to claim 5, characterized in that, The fifth pipeline is connected to the third main pipeline, and the sixth pipeline is connected to the fourth main pipeline; Preferably, the laser device further includes a fifth control component disposed in the third cleaning pipeline; Preferably, there are multiple fifth control components, some of which are disposed in the fifth pipeline and some of which are disposed in the sixth pipeline; Preferably, the laser device further includes a sixth control component disposed on the third main path, the third main path including a first part and a second part that are interconnected, the first part being disposed between the inlet of the fifth pipeline and the inlet of the first pipeline, and the second part being disposed between the inlet of the first pipeline and the inlet of the third pipeline; The sixth control element is disposed in the first part; Preferably, the laser device further includes a seventh control component disposed on the fourth main path, the fourth main path including a third part and a fourth part that are interconnected, the third part being disposed between the outlet of the sixth pipeline and the outlet of the second pipeline, and the fourth part being disposed between the outlet of the second pipeline and the outlet of the fourth pipeline. The seventh control element is located in the third part.

7. The laser device according to claim 3, characterized in that, The first pipeline is connected to the first branch; Preferably, the third pipeline is connected to the second branch; Preferably, the second pipeline is connected to the first branch; Preferably, the fourth pipeline is connected to the second branch.

8. The laser device according to claim 6, characterized in that, The first branch includes a fifth part, which includes a first sub-segment and a second sub-segment. The inlet of the first sub-segment is connected to the outlet of the first main road, and the outlet of the second sub-segment is connected to the first filter element. Wherein, the outlet of the first sub-section and the outlet of the first pipeline are connected in parallel to the inlet of the second sub-section; Preferably, the first filter element includes a third inlet end, and the first sub-section and the first pipeline are both connected to the third inlet end through the second sub-section; Preferably, a portion of the first control element is disposed in the first sub-segment; Preferably, the second branch includes a sixth part, the sixth part including a third sub-segment and a fourth sub-segment, the inlet of the third sub-segment being connected to the outlet of the first main road, and the outlet of the fourth sub-segment being connected to the first filter element; The outlet of the third sub-section is connected in parallel with the outlet of the third pipeline to the inlet of the second sub-section; Preferably, the second filter element includes a fourth inlet end, and the third sub-section and the third pipeline are both connected to the fourth inlet end through the fourth sub-section; Preferably, a portion of the second control element is disposed in the third sub-segment.

9. A laser device, characterized in that, include: A laser includes a housing that encloses a cavity for disposing of a working gas. A filter assembly, including a first filter element and a second filter element; The control assembly includes a first control element and a second control element, wherein the first filter element is connected to the receiving cavity through the first control element, and the second filter element is connected to the receiving cavity through the second control element. The first control element and the second control element operate independently, and respectively control the first filter element and the second filter element to conduct or isolate relative to the receiving cavity.

10. A method for maintaining a laser device, characterized in that, The laser device is the laser device as described in any one of claims 1 to 9, and the maintenance method includes: Open the first control element to connect the first filter element to the receiving cavity; Turn off the second control element to isolate the second filter element from the receiving cavity; Replace the filter element structure in the second filter element; The sealing performance of at least a portion of the piping structure between the second filter element and the receiving cavity is tested. When the sealing degree is greater than the threshold, a second cleaning medium is supplied to the second filter element; The working gas is filled into the second filter element.

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