Mask handling apparatus and method

Abstract

The application provides a mask plate processing device and method, and relates to the technical field of mask plates. The mask plate processing device comprises a bearing assembly and a supporting assembly. The bearing assembly is used for bearing a mask plate to be processed. The mask plate comprises a mask frame and a plurality of mask screen surface areas extending along a first direction. The plurality of mask screen surface areas are arranged along a second direction. The first direction is perpendicular to the second direction. The supporting assembly can be moved to a target position along a direction parallel to the mask plate and support the mask frame of the mask plate. The supporting assembly comprises a supporting part and an extension part connected with the supporting part. The extension part can drive the supporting part to extend along a direction perpendicular to the mask frame to support the mask frame. The shape of the side of the supporting part in contact with the mask plate comprises a spherical shape. In this way, the area of the mask frame that needs to be welded can be more accurately supported, and the success rate of welding the mask frame and the mask screen surface areas can be improved.

Description

Technical Field

[0001] This application relates to the field of mask technology, and more specifically, to a mask processing apparatus and method. Background Technology

[0002] With the development of display device manufacturing technology, organic light-emitting diode (OLED) and flat panel display devices based on light-emitting diode (LED) technologies have been widely used due to their advantages such as high image quality, energy saving, thin body, and wide range of applications. Currently, OLED display panels are mainly deposited by evaporating the R, G, and B light-emitting layers using a fine metal mask (FMM).

[0003] However, the flatness of commonly used precision metal photomasks is insufficient, which can affect the vapor deposition of OLED display panels. Summary of the Invention

[0004] To overcome the above-mentioned shortcomings in the prior art, the purpose of this application is to provide a mask processing device, the mask processing device comprising:

[0005] A support assembly for supporting a mask template to be processed, the mask template including a mask frame and a plurality of mask mesh areas extending along a first direction; the plurality of mask mesh areas are arranged along a second direction, the first direction being perpendicular to the second direction;

[0006] A support component, which can move to a target position in a direction parallel to the mask template and support the mask frame of the mask template;

[0007] The support assembly includes a support member and a telescopic member connected to the support member. The telescopic member can drive the support member to extend in a direction perpendicular to the mask frame to support the mask frame. The shape of the side of the support member that contacts the mask template includes a spherical shape.

[0008] In one possible implementation, the support assembly further includes a buffer component that contacts the support assembly and is used to buffer the pressure applied to the support assembly.

[0009] In one possible implementation, the buffer component includes a spring, the spring extending in the same direction as the extension component.

[0010] In one possible implementation, the support component further includes a protective layer located on the surface of the support member, the protective layer serving to protect the support member.

[0011] In one possible implementation, the material of the protective layer includes graphene.

[0012] In one possible implementation, the support assembly further includes a first sensing component, a second sensing component, and a driving component. The first sensing component is used to detect displacement data of the support component, the second sensing component is used to detect pressure data of the support component, and the driving component is used to drive the telescopic component to extend or retract based on the displacement data detected by the first sensing component and the pressure data detected by the second sensing component.

[0013] In one possible implementation, the mask processing device further includes an alarm component, which issues an alarm when the displacement data detected by the first sensing component is greater than a first preset threshold and / or the pressure data detected by the second sensing component is greater than a second preset threshold.

[0014] In one possible implementation, the mask processing device further includes a position detection component and a control component, wherein the position detection component is used to detect the target position where welding operations need to be performed, and the control component is used to control the support component to move to the target position.

[0015] Another object of this application is to provide a mask processing method. Using the mask processing apparatus provided in this application, the mask processing method includes:

[0016] A mask template to be processed is placed on the support component. The mask template includes a mask frame and a plurality of mask mesh areas extending along a first direction. The plurality of mask mesh areas are arranged along a second direction, and the first direction is perpendicular to the second direction.

[0017] The support assembly is controlled to move to the target position in a direction parallel to the mask template and to support the mask frame of the mask template; the support assembly includes a support component and a telescopic component connected to the support component, the telescopic component can drive the support component to extend in a direction perpendicular to the mask frame to support the mask frame; the shape of the side of the support component that contacts the mask template includes a spherical shape.

[0018] In one possible implementation, the step of controlling the support component to support the mask frame of the mask template includes:

[0019] Control the telescopic component to drive the support component to extend to the target distance in a direction perpendicular to the mask frame;

[0020] The displacement data of the support component is detected by the first sensing component, and the pressure data of the support component is detected by the second sensing component.

[0021] The drive component is controlled to drive the telescopic component to extend and retract based on the displacement data detected by the first sensor component and the pressure data detected by the second sensor component, so as to support the mask frame of the mask template.

[0022] Compared with the prior art, this application has the following beneficial effects:

[0023] This application provides a mask processing device and method. By setting the shape of the support component to a sphere and driving the support component to extend in a direction perpendicular to the mask frame through the telescopic component, more precise point support can be provided for the area on the mask frame that needs to be welded, preventing local depressions in the mask frame, reducing the distance between the mask frame and the mask mesh area, making the mask frame and the mask mesh area fit together, avoiding poor solder joints, and improving the welding success rate between the mask frame and the mask mesh area. Attached Figure Description

[0024] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is one of the structural schematic diagrams of the mask processing device provided in the embodiments of this application;

[0026] Figure 2 This is a schematic diagram of the structure of the mask template provided in the embodiments of this application;

[0027] Figure 3 This is one of the structural schematic diagrams of the support component provided in the embodiments of this application;

[0028] Figure 4 This is a second schematic diagram of the structure of the mask processing device provided in the embodiments of this application;

[0029] Figure 5 This is a second schematic diagram of the structure of the support component provided in the embodiments of this application;

[0030] Figure 6 The third schematic diagram of the structure of the support component provided in the embodiments of this application;

[0031] Figure 7Fourth schematic diagram of the structure of the support component provided in the embodiments of this application;

[0032] Figure 8 This is the third schematic diagram of the structure of the mask processing device provided in the embodiments of this application;

[0033] Figure 9 A schematic flowchart illustrating the mask processing method provided in this application embodiment;

[0034] Figure 10 This is a schematic diagram of a sub-step of step S120 provided in an embodiment of this application.

[0035] Icons: 100-Support component; 110-Telescopic component; 120-Support component; 130-Buffer component; 140-Protective layer; 150-First sensing component; 160-Second sensing component; 200-Mask template; 201-Target position; 210-Mask frame; 220-Mask mesh area; 300-Moving component; 310-First guide rail; 320-Second guide rail. Detailed Implementation

[0036] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0037] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0038] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0039] In the description of this application, it should be noted that the terms "center," "upper," "lower," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of the invention is in use. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. In addition, the terms "first," "second," and "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0040] It should be noted that, where there is no conflict, different features in the embodiments of this application can be combined with each other.

[0041] The inventors discovered that in existing technologies, it is often necessary to stretch and fix the mask template before subsequent operations such as vapor deposition. During the stretching and fixing process, multiple mask mesh areas can be placed on the mask frame surface, and the mask mesh areas and the mask frame can be fixedly connected by solder joints. When welding the mask mesh areas to the mask frame, support columns can be used to support the mask frame. However, the commonly used support columns have a circular shape on the side that contacts the mask frame, which cannot support the central area of ​​the circular ring. This easily leads to sagging and drooping of the mask frame, with a maximum sagging of 0.12 mm. Furthermore, it can cause incomplete solder joints, reducing the welding yield between the mask mesh areas and the mask frame. Currently, the welding defect rate due to excessive spacing between the mask mesh areas and the mask frame exceeds 3%.

[0042] In view of this, this embodiment provides a solution that can solve the above problems. The solution provided in this embodiment will be described in detail below.

[0043] Please refer to Figure 1 , Figure 1 Example: A possible structural schematic diagram of the mask processing device provided in this embodiment. The mask processing device may include a load-bearing component and a support component 100.

[0044] The support component can be used to support the mask template 200 to be processed. Please refer to [reference needed]. Figure 2 The mask template 200 may include a mask frame 210 and multiple mask mesh areas 220 extending along a first direction D1. The multiple mask mesh areas 220 may be arranged along a second direction D2, and the first direction D1 may be perpendicular to the second direction D2. Each mask mesh area 220 may have a patterned area and a welding area, with the welding area located between adjacent patterned areas.

[0045] In this embodiment, a fixing component is provided on the support component. When the mask template 200 is located on the support component, the fixing component can be used to limit or fix the mask template 200 to prevent it from moving or shaking during the welding process, thereby ensuring the accuracy and quality of the welding.

[0046] In some examples, the mask 200 can be a fine metal mask (FMM).

[0047] The support component 100 can move to the target position 201 in a direction parallel to the mask template 200 and support the mask frame 210 of the mask template 200 so that the mask frame 210 fits into the mask mesh area 220, which facilitates welding.

[0048] In this embodiment, the support component 100 can be located below the carrier component. The support component 100 can move along a direction parallel to the mask template 200 to directly below the area to be welded, and support the mask frame 210 to prevent sagging or denting of the welding area during welding, thereby ensuring the stability and accuracy of the welding process. The target position 201 refers to the position on the mask frame 210 that needs to be welded, and the orthographic projection of the welding area of ​​the mask mesh area 220 onto the mask frame 210 can cover this target position 201.

[0049] When supported by the support component 100, the orthographic projection of the support component 100 on the mask frame 210 can at least partially coincide with the orthographic projection of the mask mesh area 220 on the mask frame 210.

[0050] Please refer to Figure 3 The support assembly 100 may include a support member 120 and a telescopic member 110 connected to the support member 120. The telescopic member 110 can drive the support member 120 to extend in a direction perpendicular to the mask frame 210 to support the mask frame 210. The shape of the side of the support member 120 that contacts the mask template 200 may be spherical.

[0051] In this embodiment, the telescopic component 110 can extend in a direction perpendicular to the mask frame 210, thereby causing the support component 120 connected to the telescopic component 110 to also extend in a direction perpendicular to the mask frame 210, thus supporting the mask frame 210 through the support component 120. Specifically, the support component 120 can be spherical in shape, with a diameter ranging from 2 mm to 3 mm. This allows for more precise point support of the welding area, improving welding accuracy.

[0052] It is understandable that the maximum telescopic length of the telescopic component 110 can be adjusted according to actual needs, and the size of the support component 120 can also be adjusted according to actual needs, without specific limitations here.

[0053] For example, the support component 120 can be a steel ball.

[0054] It should be noted that, Figure 1 The number of support components 100 is only an example. The number of support components 100 can also be two, three, etc., and can be adjusted according to actual needs. No specific limit is made here.

[0055] In some examples, please refer to Figure 4 The number of support components 100 can be two, and the two support components 100 can support different areas of the mask frame 210 respectively. Specifically, when the mask frame 210 and the mask mesh area 220 are welded simultaneously in different areas of the mask frame 210, the two support components 100 can support different positions at the same time, thus improving welding efficiency.

[0056] After the mask frame 210 and the mask mesh area 220 are welded together, the mask template 200 can be used to vapor deposit luminescent material on the display panel.

[0057] Based on the above design, in the mask processing device provided in this embodiment, by setting the shape of the support member 120 as a sphere, and by driving the support member 120 to extend in a direction perpendicular to the mask frame 210 through the telescopic member 110, more precise point support can be provided for the area on the mask frame 210 that needs to be welded, preventing local depressions in the mask frame 210, reducing the distance between the mask frame 210 and the mask mesh area 220, making the mask frame 210 fit with the mask mesh area 220, avoiding incomplete solder joints, and improving the welding success rate between the mask frame 210 and the mask mesh area 220.

[0058] In one possible implementation, the support component 100 may further include a buffer component 130, which may contact the support component 120 and may be used to buffer the pressure on the support component 120.

[0059] In this embodiment, the buffer component 130 and the telescopic component 110 can be located on the same side of the support component 120. When the telescopic component 110 drives the support component 120 to extend or retract, the support component 120 may be subjected to vibration or impact. The buffer component 130 can effectively absorb the vibration of the support component 120, prevent the support component 120 from breaking or deforming, and the buffer component 130 can also reduce the pressure transmitted to the mask frame 210, prevent the mask frame 210 from deforming due to uneven force, thereby improving welding accuracy and quality.

[0060] In one possible implementation, please refer to Figure 5 The buffer member 130 may include a spring, and the extension direction of the spring may be the same as the extension direction of the telescopic member 110.

[0061] In this embodiment, the spring has good elasticity and energy absorption capacity, which can effectively buffer external impacts. When the support member 120 is subjected to external pressure, the spring will be compressed, which can absorb and disperse the pressure on the support member 120, thereby reducing the pressure acting directly on the support member 120.

[0062] Specifically, when the telescopic component 110 extends or retracts the support component 120 in a direction perpendicular to the mask frame 210, the spring provides a buffering effect in the same direction, protecting the support component 120 from damage due to excessive pressure, while also preventing damage to the mask template 200. When the telescopic component 110 brings the support component 120 into contact with the mask frame 210, the spring can promptly buffer the pressure on the support component 120, ensuring the smoothness of the entire support process.

[0063] In addition, the maximum deformation of the spring can be greater than the maximum extension length of the telescopic member 110. This ensures that the spring can effectively buffer the pressure on the support member 120 and prevent the mask frame 210 from deforming due to uneven force. The maximum extension length of the telescopic member 110 can be 8 cm to 12 cm, and preferably 10 cm.

[0064] It should be noted that the buffer component 130 is not limited to a spring, but can also be made of rubber, sponge, etc., as long as it can buffer external impacts. No specific limitation is made here.

[0065] In one possible implementation, please refer to Figure 6 The support component 100 may also include a protective layer 140 located on the surface of the support member 120, which can be used to protect the support member 120.

[0066] In this embodiment, a protective layer 140 can be provided on the surface of the support member 120, and the protective layer 140 can completely cover the surface of the support member 120. The thickness of the protective layer 140 can range from 1.5 mm to 2.5 mm, and the thickness of the protective layer 140 is preferably 2 mm.

[0067] It should be noted that the thickness of the protective layer 140 can be adjusted according to the pressure of the support component 120 on the mask frame 210, and no specific limitation is made here.

[0068] During the process of supporting the mask frame 210 by the support member 120, there is relative friction between the support member 120 and the mask frame 210. By providing a protective layer 140 on the surface of the support member 120, the friction between the support member 120 and the mask frame 210 can be reduced, thereby effectively preventing wear on the surface of the support member 120 and improving the stability and accuracy of the support. In addition, the protective layer 140 can also prevent the support member 120 from contacting external moisture and other substances, extending the service life of the support member 120.

[0069] In one possible implementation, the material of the protective layer 140 may include graphene.

[0070] In this embodiment, graphene has high hardness and strong wear resistance. Therefore, the protective layer 140 made of graphene can withstand greater friction and is not easily worn. It can also maintain a good protective effect for a long time, effectively extending the service life of the support component 120.

[0071] In addition, during the welding process between the mask frame 210 and the mask mesh area 220, a large amount of heat may be generated. Graphene can quickly conduct the heat away, reduce the temperature of the support component 120, improve heat dissipation efficiency, and ensure that the support component 120 works in a suitable temperature environment.

[0072] It should be noted that the material of the protective layer is not limited to graphene, but can also include other materials such as silicone and polyurethane. The specific choice can be made according to actual needs, and no specific limitation is made here.

[0073] In one possible implementation, the support component 100 may further include a first sensing component 150, a second sensing component 160, and a driving component. The first sensing component 150 may be used to detect displacement data of the support component 120, the second sensing component 160 may be used to detect pressure data of the support component 120, and the driving component may be used to drive the telescopic component 110 to extend or retract based on the displacement data detected by the first sensing component 150 and the pressure data detected by the second sensing component 160.

[0074] In this embodiment, please refer to Figure 7The first sensing component 150 can be connected to the telescopic component 110, and the second sensing component 160 can be connected to the support component 120. Before the telescopic component 110 drives the support component 120 to extend in a direction perpendicular to the mask frame 210, the target extension distance of the support component 120 and the target pressure of the support component 120 on the mask frame 210 can be preset. After the target distance and target pressure are determined, the telescopic component 110 can automatically extend according to the target distance and target pressure, thereby driving the support component 120 to move to support the mask frame 210, so that the mask frame 210 fits against the mask mesh area 220. The target distance and target pressure can be set according to the distance between the telescopic component 110 and the mask frame 210.

[0075] During the movement of the telescopic component 110 and the support component 120, the first sensing component 150 can detect the displacement data of the support component 120 in real time, and the second sensing component 160 can detect the pressure data of the support component 120 in real time. After the telescopic component 110 has extended, it is determined whether there is a difference between the displacement data detected by the first sensing component 150 and the target distance, and at the same time, it is determined whether there is a difference between the pressure data detected by the second sensing component 160 and the target pressure. If there is a difference between the displacement data detected by the first sensing component 150 and the target distance, and / or, there is a difference between the pressure data detected by the second sensing component 160 and the target pressure, the driving component can further drive the telescopic component 110 to extend and retract, thereby adjusting the height of the support component 120 to improve the support effect of the support component 120. For example, if the first sensing component 150 detects that the displacement data of the support component 120 is less than the target distance, the driving component can control the telescopic component 110 to extend until the displacement data of the support component 120 is equal to the target distance; if the first sensing component 150 detects that the displacement data of the support component 120 is greater than the target distance, the driving component can control the telescopic component 110 to retract until the displacement data of the support component 120 is equal to the target distance.

[0076] The first sensing component 150 can be a displacement sensor, and the second sensing component 160 can be a pressure sensor.

[0077] In the prior art, the telescopic component 110 can only be set manually. However, in this embodiment, the displacement and pressure data of the support component 120 can be monitored in real time, and the telescopic component 110 can be dynamically adjusted according to the displacement and pressure data. This can achieve precise support for the mask frame 210, avoid the inability to effectively support the mask frame 210 due to positional deviation, or cause unnecessary damage to the mask frame 210. In addition, it can reduce manual intervention, reduce errors and accidents caused by human factors, and thus improve the quality and efficiency of mask processing 200.

[0078] In one possible implementation, the mask processing device may further include an alarm component that can trigger an alarm when the displacement data detected by the first sensing component 150 is greater than a first preset threshold and / or the pressure data detected by the second sensing component 160 is greater than a second preset threshold.

[0079] In this embodiment, without damaging the mask template 200, the maximum distance the support member 120 extends can be preset as a first preset threshold, and the maximum pressure of the support member 120 on the mask frame 210 can be preset as a second preset threshold.

[0080] During the movement of the support component 120 driven by the telescopic component 110, the first sensing component 150 can detect the displacement data of the support component 120 in real time, and the second sensing component 160 can detect the pressure data of the support component 120 in real time. When the displacement data detected by the first sensing component 150 is greater than the first preset threshold and / or the pressure data detected by the second sensing component 160 is greater than the second preset threshold, the alarm component can sound an alarm. In this way, damage to the mask template 200 due to abnormal displacement or pressure can be prevented, and maintenance costs can be reduced.

[0081] In one possible implementation, the mask processing device may further include a position detection component and a control component. The position detection component can be used to detect the target position 201 where welding operations need to be performed, and the control component can be used to control the support component 100 to move to the target position 201.

[0082] In this embodiment, the position detection component can detect the target position 201 where welding operation needs to be performed and determine the coordinate information of the target position 201. The control component can control the support component 100 to move in a direction parallel to the mask frame 210 according to the coordinate information of the target position 201, so that the support component 100 is located directly below the target position 201 where welding operation needs to be performed, so as to provide more precise point support for the welding area.

[0083] In some examples, please refer to Figure 8The mask processing device may further include a movable component 300, and a support component 100 may be disposed on one side of the movable component 300. The movable component 300 may include two first guide rails 310 extending along a first direction D1 and a second guide rail 320 extending along a second direction D2. The second guide rail 320 may be located between the two first guide rails 310 and movably connected to the two first guide rails 310, and the second guide rail 320 may move along the first guide rails 310 in the first direction D1. The support component 100 may be movably connected to the second guide rail 320, and the support component 100 may move along the second guide rail 320 in the second direction D2. The telescopic component 110 of the support component 100 may extend or retract along a third direction D3. Wherein, the first direction D1 is perpendicular to the second direction D2, and the third direction D3 is perpendicular to both the first direction D1 and the second direction D2.

[0084] In the above design, the coordinate information of the target position 201 can be accurately detected by the position detection component, thereby improving the accuracy of the support component 100 and avoiding errors.

[0085] This embodiment also provides a mask processing method. The mask processing method can use the mask processing device provided in this embodiment. Please refer to [reference needed]. Figure 9 The mask processing method may include the following steps.

[0086] Step S110: The mask template 200 to be processed is placed on the support component. The mask template 200 includes a mask frame 210 and a plurality of mask mesh areas 220 extending along a first direction D1. The plurality of mask mesh areas 220 are arranged along a second direction D2, and the first direction D1 is perpendicular to the second direction D2.

[0087] Step S120: Control the support assembly 100 to move relative to the mask template 200 disposed on the bearing assembly to the target position 201, and support the mask frame 210 of the mask template 200; the support assembly 100 includes a support member 120 and a telescopic member 110 connected to the support member 120, the telescopic member 110 can drive the support member 120 to extend in a direction perpendicular to the mask frame 210 to support the mask frame 210; the shape of the side of the support member 120 that contacts the mask template 200 includes a spherical shape.

[0088] In this embodiment, the mask template 200 to be processed can first be placed on the support assembly and fixed by the fixing component of the support assembly. The fixing component can be used to limit or fix the mask template 200 to prevent it from moving or shaking during the welding process, thereby ensuring the accuracy and quality of the welding. After the mask template 200 to be processed is fixed on the support assembly, the support assembly 100 can be moved to the target position 201 in a direction parallel to the mask template 200, and the telescopic component 110 can be controlled to drive the support component 120 to extend in a direction perpendicular to the mask template 200 to support the mask frame 210, so that the mask frame 210 fits against the mask mesh area 220. The support component 120 can be spherical in shape, and the diameter of the sphere can be between 2 mm and 3 mm, so that more precise point support can be provided for the welding area. For example, the support component 120 can be a steel ball.

[0089] Specifically, during the process of controlling the support assembly 100 to move to the target position 201 in a direction parallel to the mask template 200, the target position 201 where the welding operation needs to be performed can be detected first by the position detection assembly, and then the support assembly 100 can be moved by the control assembly. In this way, the accuracy of welding can be improved.

[0090] Additionally, the mask mesh area 220 may be provided with patterned areas and welding areas, with the welding areas located between adjacent patterned areas. The orthographic projection of the welding area of ​​the mask mesh area 220 onto the mask frame 210 can cover the target position 201 of the mask frame 210.

[0091] In the above design, by controlling the support component 100 to support the mask frame 210, it can be ensured that the mask frame 210 is in close contact with the mask mesh area 220, avoiding displacement and deformation during the welding process, thereby improving welding quality and precision. In addition, by setting the shape of the support component 120 as a sphere, more precise point support can be provided for the areas on the mask frame 210 that need to be welded, avoiding incomplete welds.

[0092] In one possible implementation, please refer to Figure 10 Step S120 may include the following sub-steps.

[0093] Step S121: Control the telescopic component 110 to drive the support component 120 to extend to the target distance in a direction perpendicular to the mask frame 210.

[0094] In this embodiment, the telescopic component 110 can be controlled to move in a direction close to the mask frame 210. The telescopic component 110 can drive the support component 120 located on the telescopic component 110 to move synchronously, so that the displacement data of the support component 120 is equal to the preset target distance. The target distance can be equal to the distance between the support component 120 and the mask frame 210 when the support component 120 is not extended.

[0095] When the displacement data of the support component 120 is equal to the preset target distance, the support component 120 can make the mask frame 210 fit with the mask mesh area 220, which facilitates welding.

[0096] In addition, when the telescopic component 110 is extended or retracted, in order to reduce the vibration or impact on the support component 120, the pressure on the support component 120 can be buffered by the buffer component 130, thereby improving welding accuracy and quality. The buffer component 130 may include a spring. When the support component 120 is subjected to external pressure, the spring is compressed to absorb and disperse the pressure on the support component 120, thereby reducing the pressure acting directly on the support component 120.

[0097] Step S122: The displacement data of the support member 120 is detected by the first sensing component 150, and the pressure data of the support member 120 is detected by the second sensing component 160.

[0098] In this embodiment, the first sensing component 150 can be connected to the telescopic component 110, and the second sensing component 160 can be connected to the support component 120. When the telescopic component 110 drives the support component 120 to extend in a direction perpendicular to the mask frame 210, the first sensing component 150 can detect the displacement data of the support component 120 in real time, and the second sensing component 160 can detect the pressure data of the support component 120 in real time. The first sensing component 150 can be a displacement sensor, and the second sensing component 160 can be a pressure sensor.

[0099] When the displacement data detected by the first sensing component 150 exceeds a first preset threshold, and / or the pressure data detected by the second sensing component 160 exceeds a second preset threshold, the alarm component can be controlled to sound an alarm. The first preset threshold can refer to the maximum distance the support component 120 can extend without damaging the mask template 200; the second preset threshold can refer to the maximum pressure exerted by the support component 120 on the mask frame 210 without damaging the mask template 200.

[0100] Step S123: Control the driving component to drive the telescopic component 110 to extend or retract according to the displacement data detected by the first sensing component 150 and the pressure data detected by the second sensing component 160, so as to support the mask frame 210 of the mask template 200.

[0101] In this embodiment, after the telescopic component 110 drives the support component 120 to extend to the target distance, it can be determined whether there is a difference between the displacement data detected by the first sensing component 150 and the preset target distance, and simultaneously determine whether there is a difference between the pressure data detected by the second sensing component 160 and the preset target pressure. If there is a difference between the displacement data detected by the first sensing component 150 and the preset target distance, and / or, if there is a difference between the pressure data detected by the second sensing component 160 and the preset target pressure, the driving component can drive the telescopic component 110 to extend or retract further. The target pressure can refer to the pressure exerted by the support component 120 on the mask frame 210 when the support component 120 extends to the target distance.

[0102] In the above design, the displacement and pressure data of the support component 120 are monitored in real time by the first sensing component 150 and the second sensing component 160. The extension and retraction of the telescopic component 110 are dynamically adjusted by the drive component based on the displacement and pressure data. This achieves precise support for the mask frame 210, preventing ineffective support due to positional deviations or unnecessary damage to the mask frame 210. Furthermore, it reduces manual intervention, minimizing errors and accidents caused by human factors, thereby improving the quality and efficiency of mask processing. Additionally, when the displacement data detected by the first sensing component 150 exceeds a first preset threshold and / or the pressure data detected by the second sensing component 160 exceeds a second preset threshold, an alarm component can be activated to effectively prevent damage to the mask frame 200.

[0103] In summary, the embodiments of this application provide a mask processing device and method. By setting the shape of the support component to a sphere and driving the support component to extend in a direction perpendicular to the mask frame through the telescopic component, more precise point support can be provided for the area on the mask frame that needs to be welded, preventing local depressions in the mask frame, reducing the distance between the mask frame and the mask mesh area, making the mask frame and the mask mesh area fit together, avoiding incomplete welds, and improving the welding success rate between the mask frame and the mask mesh area.

[0104] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0105] The embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these all fall within the protection scope of the present invention. Therefore, the protection scope of this invention patent should be determined by the appended claims.

Claims

1. A mask processing device, characterized in that, include: A support component for supporting a mask template to be processed, the mask template including a mask frame and a plurality of mask mesh areas extending along a first direction; The plurality of said mask mesh regions are arranged along a second direction, wherein the first direction is perpendicular to the second direction; A support component, which can move to a target position in a direction parallel to the mask template and support the mask frame of the mask template; The support assembly includes a support member and a telescopic member connected to the support member. The telescopic member can drive the support member to extend in a direction perpendicular to the mask frame to support the mask frame. The shape of the side of the support member that contacts the mask template includes a spherical shape.

2. The mask processing device according to claim 1, characterized in that, The support assembly further includes a buffer component that contacts the support assembly and is used to buffer the pressure applied to the support assembly.

3. The mask processing device according to claim 2, characterized in that, The buffer component includes a spring, the spring extending in the same direction as the telescopic component.

4. The mask processing device according to claim 1, characterized in that, The support assembly further includes a protective layer located on the surface of the support member, the protective layer being used to protect the support member.

5. The mask processing device according to claim 4, characterized in that, The protective layer is made of graphene.

6. The mask processing device according to claim 1, characterized in that, The support assembly further includes a first sensing component, a second sensing component, and a driving component. The first sensing component is used to detect the displacement data of the support component, the second sensing component is used to detect the pressure data of the support component, and the driving component is used to drive the telescopic component to extend or retract based on the displacement data detected by the first sensing component and the pressure data detected by the second sensing component.

7. The mask processing apparatus according to claim 6, characterized in that, The mask processing device further includes an alarm component, which triggers an alarm when the displacement data detected by the first sensing component is greater than a first preset threshold and / or the pressure data detected by the second sensing component is greater than a second preset threshold.

8. The mask processing device according to claim 1, characterized in that, The mask processing device further includes a position detection component and a control component. The position detection component is used to detect the target position where welding operations need to be performed, and the control component is used to control the support component to move to the target position.

9. A mask processing method, characterized in that, Using the mask processing apparatus according to any one of claims 1-8, the method comprises: A mask template to be processed is placed on the support component. The mask template includes a mask frame and a plurality of mask mesh areas extending along a first direction. The plurality of mask mesh areas are arranged along a second direction, wherein the first direction is perpendicular to the second direction. The support assembly is controlled to move to the target position in a direction parallel to the mask template and to support the mask frame of the mask template; the support assembly includes a support component and a telescopic component connected to the support component, the telescopic component can drive the support component to extend in a direction perpendicular to the mask frame to support the mask frame; the shape of the side of the support component that contacts the mask template includes a spherical shape.

10. The mask processing method according to claim 9, characterized in that, The step of controlling the support component to support the mask frame of the mask template includes: Control the telescopic component to drive the support component to extend to the target distance in a direction perpendicular to the mask frame; The displacement data of the support component is detected by the first sensing component, and the pressure data of the support component is detected by the second sensing component. The drive component is controlled to drive the telescopic component to extend and retract based on the displacement data detected by the first sensor component and the pressure data detected by the second sensor component, so as to support the mask frame of the mask template.

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