Industrial robot

Abstract

In an industrial robot, the first arm includes: a first arm portion (13) whose base end portion (13b) is rotatably connected to the main body portion; and a second arm portion (14) whose base end portion (14b) is rotatably connected to the front end portion (13c) of the first arm portion. The second arm (8) includes: a third arm portion (15) whose base end portion (15b) is rotatably connected to the main body portion; and a fourth arm portion (16) whose base end portion (16b) is rotatably connected to the front end portion (15c) of the third arm portion. The base end portion (13b) and the base end portion (15b) overlap in the vertical direction, and the front end portion (14c) and the front end portion (16c) are positioned offset in the vertical direction. The first arm portion is bent in the vertical direction such that the front end portion (13c) and the front end portion (15c) are positioned at the same height, and the fourth arm portion is bent in the vertical direction such that the base end portion (14b) and the base end portion (16b) are positioned at the same height.

Description

Technical Field

[0001] This invention relates to an industrial robot. Background Technology

[0002] Previously, horizontally articulated industrial robots were known (see, for example, Patent Document 1). Patent Document 1 describes a dual-arm robot with two arms. In this industrial robot, each arm consists of a first arm component, a second arm component, and a hand component. The base end of the first arm component is rotatably connected to a base. The base end of the second arm component is rotatably connected to the front end of the first arm component. The base end of the hand component is rotatably connected to the front end of the second arm component. The first arm component is positioned above the base. The second arm component is positioned above the first arm component. The hand component is positioned above the second arm component.

[0003] In the industrial robot described in Patent Document 1, one of the two arms is designated as the first arm, and the other as the second arm. The first arm component of the first arm is positioned below the first arm component of the second arm, and the second arm component of the first arm is positioned above the second arm component of the second arm. The base ends of the first arm component of the first arm and the first arm component of the second arm overlap vertically. When the first arm and the second arm are in a predetermined state, the front ends of the second arm component of the first arm and the second arm component of the second arm overlap vertically.

[0004] Existing technical documents

[0005] Patent documents

[0006] Patent Document 1: Japanese Patent Application Publication No. 2008-272864 Summary of the Invention

[0007] In the industrial robot described in Patent Document 1, the first arm component of the first arm is positioned below the first arm component of the second arm, and the second arm component of the first arm is positioned above the second arm component of the second arm. The vertical length of the joint that forms the connection between the first and second arm components of the first arm is different from the length of the joint that forms the connection between the first and second arm components of the second arm. Therefore, in this industrial robot, the two joints have different structures. Consequently, the number of parts constituting the industrial robot increases, potentially increasing the cost of the industrial robot.

[0008] Therefore, the technical problem of the present invention is to provide a horizontal multi-joint industrial robot, which includes a first arm and a second arm. The base ends of the first arm and the second arm overlap in the vertical direction. When the first arm and the second arm are in a predetermined state, the front ends of the first arm and the front ends of the second arm overlap in the vertical direction. The joint structure of the first arm and the joint structure of the second arm can be made into the same structure.

[0009] To solve the above-mentioned technical problems, an industrial robot of one aspect of the present invention includes: a first hand and a second hand for loading a transported object; a first arm rotatably connected to the first hand at its front end; a second arm rotatably connected to the second hand at its front end; and a main body for rotatably connecting the base ends of the first arm and the second arm. The first arm includes: a first arm portion whose base end is rotatably connected to the main body; a second arm portion whose base end is rotatably connected to the front end of the first arm portion; the second arm includes: a third arm portion whose base end is rotatably connected to the main body; and a fourth arm portion whose base end is rotatably connected to the front end of the third arm portion. The second arm portion is positioned above the first arm portion. The first arm is rotatably connected to the front end of the second arm, the fourth arm is positioned above the third arm, the base end of the second arm is rotatably connected to the front end of the fourth arm, the base ends of the first arm and the third arm overlap in the vertical direction and are positioned above the main body, when the first arm and the second arm are in a predetermined state, the front ends of the second arm and the fourth arm overlap in the vertical direction, at least one of the first arm and the third arm bends in the vertical direction such that the front ends of the first arm and the third arm are positioned at the same height, at least one of the second arm and the fourth arm bends in the vertical direction such that the base ends of the second arm and the fourth arm are positioned at the same height.

[0010] In the industrial robot of this aspect, the first arm includes: a first arm portion whose base end is rotatably connected to the main body portion; and a second arm portion whose base end is rotatably connected to the front end of the first arm portion. The second arm includes: a third arm portion whose base end is rotatably connected to the main body portion; and a fourth arm portion whose base end is rotatably connected to the front end of the third arm portion. Furthermore, in this aspect, at least one of the first arm portion and the third arm portion is bent in a vertical direction such that the front ends of the first arm portion and the front ends of the third arm portion are positioned at the same height, and at least one of the second arm portion and the fourth arm portion is bent in a vertical direction such that the base ends of the second arm portion and the base ends of the fourth arm portion are positioned at the same height.

[0011] Therefore, in this aspect, the vertical length of the joint of the first arm, which serves as the connecting part between the first and second arms, can be the same as the vertical length of the joint of the second arm, which serves as the connecting part between the third and fourth arms. Therefore, in this aspect, the joints of the first and second arms can have the same structure. Therefore, in this aspect, the number of parts constituting the industrial robot can be reduced, thereby lowering the cost of the industrial robot. Furthermore, in this aspect, the same maintenance method can be used to maintain the joints of the first and second arms, thus improving the maintainability of both joints.

[0012] As described above, according to one aspect of the present invention, in a horizontally articulated industrial robot, there are two arms, a first arm and a second arm, the base ends of the first arm and the second arm overlap in the vertical direction, and when the first arm and the second arm are in a predetermined state, the front ends of the first arm and the front ends of the second arm overlap in the vertical direction, so that the structure of the joint portion of the first arm and the joint portion of the second arm are the same. Attached Figure Description

[0013] Figure 1 This is a top view of the industrial robot according to an embodiment of the present invention.

[0014] Figure 2 From Figure 1 The FF direction in the image represents a rear view of a portion of the industrial robot.

[0015] Figure 3 From Figure 1 The GG direction in the image represents a side view of a portion of the industrial robot.

[0016] Figure 4 yes Figure 1 The top view of the industrial robot with its first arm extended.

[0017] Figure 5 It is used for explanation Figure 1 A schematic cross-sectional view of the results of the first and second arms shown.

[0018] Figure 6A It is used for explanation Figure 1 The top view showing the result of the first arm section. Figure 6B It is used for explanation Figure 1 The top view of the structure of the third arm shown. Figure 6C It is used for explanation Figure 1 The top view of the structure of the second arm shown. Figure 6D It is used for explanation Figure 1 The top view of the structure of the fourth arm shown.

[0019] Figure 7It is used for explanation Figure 1 The cross-sectional view of the structure of the first joint shown.

[0020] Figure 8 From Figure 7 The HH direction in the diagram represents the first pulley, the second pulley, and the first belt.

[0021] Figure 9 From Figure 7 The JJ direction in the diagram represents the first pulley, the second pulley, and the second belt.

[0022] Figures 10A to 10E This is a schematic diagram illustrating the structure of the first arm and the third arm in another embodiment of the present invention.

[0023] Figures 11A to 11E This is a schematic diagram illustrating the structure of the second and fourth arms in another embodiment of the present invention. Detailed Implementation

[0024] Embodiments of the present invention will now be described with reference to the accompanying drawings.

[0025] (The overall structure of an industrial robot)

[0026] Figure 1 This is a top view of the industrial robot 2 according to an embodiment of the present invention. Figure 2 From Figure 1 The FF direction in the image represents a rear view of a portion of industrial robot 2. Figure 3 From Figure 1 The GG direction in the image represents a side view of a portion of industrial robot 2. Figure 4 yes Figure 1 The top view of the extended arm 7 of the industrial robot 2 shown. Figure 5 It is used for explanation Figure 1 A schematic cross-sectional view of the structure of arms 7 and 8 shown.

[0027] The industrial robot 2 (hereinafter referred to as "robot 2") of this embodiment is a horizontal multi-joint robot used for handling semiconductor wafers 3 (hereinafter referred to as "wafers 3"), which are objects to be handled. The wafer 3 is formed in the shape of a thin disk. Robot 2 includes: two hands 5 and 6 for loading the wafer 3; an arm 7 rotatably connected to the hand 5 at its front end; an arm 8 rotatably connected to the hand 6 at its front end; and a main body 9 for rotatably connecting the base end of the arm 7 and the base end of the arm 8 (see...). Figure 5 ), and a housing 10 for the main body 9 to house it. That is to say, robot 2 is a dual-arm robot. In this embodiment, hand 5 is the first hand, hand 6 is the second hand, arm 7 is the first arm, and arm 8 is the second arm.

[0028] Arm 7 is a multi-jointed arm that extends and retracts in the horizontal direction. Arm 7 includes: an arm portion 13, the base end portion 13b of which is rotatably connected to the main body portion 9; and an arm portion 14, the base end portion 14b of which is rotatably connected to the front end portion 13c of the arm portion 13. In this embodiment, arm 7 is composed of arm portion 13 and arm portion 14. Arm portion 14 is disposed above arm portion 13. The base end portion of hand 5 is rotatably connected to the front end portion 14c of arm portion 14. The base end portion of hand 5 is disposed above the front end portion 14c of arm portion 14. In this embodiment, arm portion 13 is a first arm portion, and arm portion 14 is a second arm portion.

[0029] Like arm 7, arm 8 is also a multi-jointed arm that extends and retracts in the horizontal direction. Arm 8 includes: arm portion 15, the base end portion 15b of which is rotatably connected to body portion 9; and arm portion 16, the base end portion 16b of which is rotatably connected to front end portion 15c of arm portion 15. In this embodiment, arm 8 is composed of arm portion 15 and arm portion 16. Arm portion 16 is disposed above arm portion 15. The base end portion of hand 6 is rotatably connected to front end portion 16c of arm portion 16. The base end portion of hand 6 is disposed above front end portion 16c of arm portion 16. In this embodiment, arm portion 15 is the third arm portion, and arm portion 16 is the fourth arm portion.

[0030] Arms 7 and 8 can extend and retract horizontally between a position where the front ends of hands 5 and 6 are away from the main body 9 when arms 7 and 8 are extended and the front ends of hands 5 and 6 are close to the main body 9 when arms 7 and 8 are retracted. When hand 5 carries wafer 3, arm 7 extends and retracts relative to the main body 9, causing hand 5 to move linearly in a certain direction. When hand 6 carries wafer 3, arm 8 extends and retracts relative to the main body 9, causing hand 6 to move linearly in a certain direction.

[0031] The base end portion 13b of arm 13 and the base end portion 15b of arm 15 overlap in the vertical direction. In this embodiment, the base end portion 13b is disposed below the base end portion 15b. The base ends 13b and 15b are disposed above the main body 9. When arms 7 and 8 are in a predetermined state, the front end portion 14c of arm 14 and the front end portion 16c of arm 16 overlap in the vertical direction. Specifically, when arms 7 and 8 are retracted to a predetermined reference position (see...), Figure 1 The front ends 14c and 16c overlap in the vertical direction. That is, when arms 7 and 8 are retracted to the specified reference position, hands 5 and 6 overlap in the vertical direction.

[0032] In this embodiment, the front end portion 14c is positioned above the front end portion 16c. That is, the hand 5 is positioned above the hand 6. Furthermore, when the arms 7 and 8 are retracted to their reference positions, when viewed from above, the arms 7 and 8 are symmetrically bent and symmetrically positioned. The more specific structure of the arms 7 and 8 will be described later.

[0033] Robot 2 also includes: a first arm drive mechanism that rotates arms 13 and 14 to extend and retract arm 7; and a second arm drive mechanism that rotates arms 15 and 16 to extend and retract arm 8. The first and second arm drive mechanisms are housed within housing 10. The first arm drive mechanism includes: a hollow rotating shaft 18 rotatably held by the main body 9 (see...). Figure 5 The second arm drive mechanism includes a rotating shaft 19, which is rotatably held by the main body 9 (see [reference]). Figure 5 ); and a motor for rotating the rotating shaft 19, etc.

[0034] Rotating shafts 18 and 19 are rotatable relative to the main body 9 with their vertical rotation axis. Rotating shaft 19 is disposed on the inner circumference of rotating shaft 18. The base end portion 13b of arm portion 13 is fixed to the upper end portion of rotating shaft 18. The base end portion 15b of arm portion 15 is fixed to the upper end portion of rotating shaft 19. The axis of rotation of rotating shaft 18 coincides with the axis of rotation of rotating shaft 19. That is, the rotation center of arm portion 13 relative to the main body 9 coincides with the rotation center of arm portion 15 relative to the main body 9.

[0035] Robot 2 also includes: a lifting mechanism that raises and lowers arms 7 and 8, main body 9, first arm drive mechanism, and second arm drive mechanism relative to housing 10; and a rotating mechanism that rotates arms 7 and 8, main body 9, first arm drive mechanism, second arm drive mechanism, and lifting mechanism relative to housing 10 with the vertical direction as the axis of rotation. The lifting mechanism and the rotating mechanism are housed within housing 10.

[0036] (Arm structure)

[0037] Figure 6A It is used for explanation Figure 1 A top view of the structure of arm 13 shown. Figure 6B It is used for explanation Figure 1 A top view of the structure of arm 15 shown. Figure 6C It is used for explanation Figure 1 A top view of the structure of arm 14 shown. Figure 6D It is used for explanation Figure 1 A top view of the structure of the arm 16 shown.

[0038] In this embodiment, arms 7 and 8 are parallel linkage arms with two parallel linkage mechanisms 22. Arm 13 is composed of two (a pair) parallel arms 23 and 24, and arm 14 is composed of two parallel arms 25 and 26. Arm 15 is composed of two parallel arms 27 and 28, and arm 16 is composed of two parallel arms 29 and 30.

[0039] Parallel arms 23 to 30 are formed, for example, of aluminum alloy. Parallel arms 23 and 24 are configured at the same height, as are parallel arms 25 and 26. Parallel arms 27 and 28 are configured at the same height, and parallel arms 29 and 30 are configured at the same height. Figure 5 For convenience, parallel arm 23 and parallel arm 24 are shown together, and parallel arm 27 and parallel arm 28 are also shown together.

[0040] The base ends of parallel arm portions 23, 24, 27, and 28 are rotatably connected to the main body portion 9. In this embodiment, the base end of parallel arm portion 23 is fixed to the upper end of the rotating shaft 18, and the base end of parallel arm portion 27 is fixed to the upper end of the rotating shaft 19. Hand 5 is rotatably connected to the front ends of parallel arm portions 25 and 26. Hand 6 is rotatably connected to the front ends of parallel arm portions 29 and 30. The base end of parallel arm portion 25 is rotatably connected to the front end of parallel arm portion 23, and the base end of parallel arm portion 26 is rotatably connected to the front end of parallel arm portion 24. The base end of parallel arm portion 29 is rotatably connected to the front end of parallel arm portion 27, and the base end of parallel arm portion 30 is rotatably connected to the front end of parallel arm portion 28.

[0041] In the horizontal direction, the distances between the rotation center of parallel arm 23 relative to the main body 9 and the rotation center of parallel arm 25 relative to parallel arm 23, the distances between the rotation center of parallel arm 24 relative to the main body 9 and the rotation center of parallel arm 26 relative to parallel arm 24, the distances between the rotation center of parallel arm 25 relative to parallel arm 23 and the rotation center of hand 5 relative to parallel arm 25, and the distances between the rotation center of parallel arm 26 relative to parallel arm 24 and the rotation center of hand 5 relative to parallel arm 26 are equal.

[0042] Furthermore, in the horizontal direction, these distances are equal to the distance between the rotation center of parallel arm 27 relative to the main body 9 and the rotation center of parallel arm 29 relative to parallel arm 27, the distance between the rotation center of parallel arm 28 relative to the main body 9 and the rotation center of parallel arm 30 relative to parallel arm 28, the distance between the rotation center of parallel arm 29 relative to parallel arm 27 and the rotation center of hand 6 relative to parallel arm 29, and the distance between the rotation center of parallel arm 30 relative to parallel arm 28 and the rotation center of hand 6 relative to parallel arm 30.

[0043] Parallel arms 25 and 26 are formed as oblong flat plates with their thickness direction being vertical. When viewed from a direction perpendicular to the long side and vertical direction of parallel arms 25 and 26, the shapes of parallel arms 25 and 26 are straight lines with their front and base ends at the same height. In other words, when viewed from a direction perpendicular to the long side and vertical direction of arm 14, the shape of arm 14 is a straight line with its front end 14c and base end 14b at the same height.

[0044] Parallel arms 27 and 28 are formed as oblong flat plates with their thickness direction being vertical. When viewed from a direction perpendicular to the long side and vertical direction of parallel arms 27 and 28, the shapes of parallel arms 27 and 28 are straight lines with their front and base ends at the same height. In other words, when viewed from a direction perpendicular to the long side and vertical direction of arm 15, the shape of arm 15 is a straight line with its front end 15c and base end 15b at the same height.

[0045] Viewed from above, the parallel arms 23 and 24 are elongated oval. As described above, the base end portion 13b of arm 13 is positioned below the base end portion 15b of arm 15, and the base ends of parallel arms 23 and 24 are positioned below the base ends of parallel arms 27 and 28. The parallel arms 23 and 24 are curved in the vertical direction, such that the front ends of parallel arms 23 and 24 are at the same height as the front ends of parallel arms 27 and 28. That is, arm 13 is curved in the vertical direction, such that the front end portion 13c of arm 13 and the front end portion 15c of arm 15 are at the same height.

[0046] Parallel arms 23 and 24 are bent into a stepped shape (Z-shaped bend). That is, arm 13 is bent into a stepped shape. Parallel arm 23 is composed of two flat plate portions 23b and 23c with the thickness direction in the vertical direction, and a connecting portion 23d connecting the flat plate portions 23b and 23c. Flat plate portion 23b includes the base end of parallel arm 23, and flat plate portion 23c includes the front end of parallel arm 23. Flat plate portion 23c is disposed on the upper side of flat plate portion 23b.

[0047] Similar to parallel arm 23, parallel arm 24 is composed of two flat plate portions 24b and 24c, with the vertical direction being the thickness direction, and a connecting portion 24d connecting the flat plate portions 24b and 24c. Flat plate portion 24b includes the base end of parallel arm 24, and flat plate portion 24c includes the front end of parallel arm 24. Flat plate portion 24c is disposed on the upper side of flat plate portion 24b. The length of flat plate portions 23c and 24c in the long side direction of parallel arms 23 and 24 is longer than the length of flat plate portions 23b and 24b in the long side direction of parallel arms 23 and 24. The thickness of flat plate portions 23b, 23c, 24b, and 24c is equal to the thickness of parallel arms 27 and 28.

[0048] When viewed from above, the parallel arms 29 and 30 are oblong in shape. As described above, the front end portion 14c of arm 14 is positioned above the front end portion 16c of arm 16, and the front ends of parallel arms 25 and 26 are positioned above the front ends of parallel arms 29 and 30. Parallel arms 29 and 30 are bent in the vertical direction such that the base ends of parallel arms 25 and 26 are at the same height as the base ends of parallel arms 29 and 30. That is, arm 16 is bent in the vertical direction such that the base ends 14b of arm 14 and 16b of arm 16 are at the same height.

[0049] Parallel arms 29 and 30 are bent into a stepped shape. That is, arm 16 is bent into a stepped shape. Parallel arm 29 is composed of two flat plate portions 29b and 29c, whose thickness direction is vertical, and a connecting portion 29d connecting the flat plate portions 29b and 29c. Flat plate portion 29b includes the base end of parallel arm 29, and flat plate portion 29c includes the front end of parallel arm 29. Flat plate portion 29c is disposed below flat plate portion 29b.

[0050] Similar to parallel arm 29, parallel arm 30 is composed of two flat plate portions 30b and 30c with the vertical direction as the thickness direction, and a connecting portion 30d connecting the flat plate portions 30b and 30c. Flat plate portion 30b includes the base end of parallel arm 30, and flat plate portion 30c includes the front end of parallel arm 24. Flat plate portion 30c is disposed below flat plate portion 30b. The length of flat plate portions 29c and 30c in the long side direction of parallel arms 29 and 30 is longer than the length of flat plate portions 29b and 30b in the long side direction of parallel arms 29 and 30. The thickness of flat plate portions 29b, 29c, 30b, and 30c is equal to the thickness of parallel arms 25 and 26. The width of connecting portions 23d and 24d in the long side direction of parallel arms 23 and 24 is wider than the width of connecting portions 29d and 30d in the long side direction of parallel arms 29 and 30 (see...). Figure 5 ).

[0051] (Structure of the joint)

[0052] Figure 7 It is used for explanation Figure 1 A cross-sectional view of the structure of the joint 33 shown. Figure 8 From Figure 7 The HH direction in the diagram represents pulley 45, lower pulley 55, and belt 47. Figure 9 From Figure 7 The JJ direction in the diagram represents pulley 45, upper pulley 56, and belt 48.

[0053] Arm 7 includes a joint portion 33, which serves as a connection between arm portions 13 and 14. Arm 8 includes a joint portion 34, which serves as a connection between arm portions 15 and 16. As described above, arm portion 13 is bent such that the front end portion 13c of arm portion 13 and the front end portion 15c of arm portion 15 are positioned at the same height, and arm portion 16 is bent such that the base end portion 14b of arm portion 14 and the base end portion 16b of arm portion 16 are positioned at the same height. That is, the vertical length of joint portion 33 is equal to the vertical length of joint portion 34. In this embodiment, joint portion 33 and joint portion 34 have the same structure and shape. In this embodiment, joint portion 33 is a first joint portion, and joint portion 34 is a second joint portion.

[0054] The joint 33 includes: a rotating shaft 35 for fixing the front end of the parallel arm 23; a rotating shaft 36 for fixing the base end of the parallel arm 25; a rotating shaft 37 for fixing the front end of the parallel arm 24; a rotating shaft 38 for fixing the base end of the parallel arm 26; and a shaft retaining member 39 for holding the rotating shafts 35 and 38 so that they can rotate. The rotating shafts 35 and 38 are formed into a cylindrical shape with the vertical direction as the axial direction. The rotating shafts 35 and 38 can rotate axially with the vertical direction as the axial direction. The shaft retaining member 39 holds the lower end of the rotating shafts 35 and 38. A bearing 40 is disposed between the rotating shafts 35 and 38 and the shaft retaining member 39.

[0055] The front end of the parallel arm 23 is fixed to the rotating shaft 35 on the upper side of the shaft retaining member 39. The upper part of the rotating shaft 35 is disposed on the inner circumferential side of the rotating shaft 36. The rotating shaft 36 is rotatably held by the rotating shaft 35. The rotating shaft 36 is disposed on the upper side of the front end of the parallel arm 23. The base end of the parallel arm 25 is fixed to the upper end of the rotating shaft 36. Two bearings 42 are disposed between the outer circumferential surface of the rotating shaft 35 and the inner and outer circumferential surfaces of the rotating shaft 36. The two bearings 42 are arranged at a distance from each other in the vertical direction. The bearing 42 disposed on the upper side is disposed on the inner circumferential side of the upper end of the rotating shaft 36, and the bearing 42 disposed on the lower side is disposed on the inner circumferential side of the lower end of the rotating shaft 36.

[0056] The base end of the parallel arm 26 is fixed to the upper end of the rotating shaft 38. The upper part of the rotating shaft 38 is disposed on the inner circumferential side of the rotating shaft 37. The rotating shaft 37 is rotatably held by the rotating shaft 38. The rotating shaft 37 is disposed below the base end of the parallel arm 26. The rotating shaft 37 is disposed above the shaft retaining member 39. The front end of the parallel arm 24 is fixed to the lower end of the rotating shaft 37. Two bearings 43 are disposed between the outer circumferential surface of the rotating shaft 38 and the inner circumferential surface of the rotating shaft 37. The two bearings 43 are arranged at a distance from each other in the vertical direction. The bearing 43 disposed on the upper side is disposed on the inner circumferential side of the upper end of the rotating shaft 37, and the bearing 42 disposed on the lower side is disposed on the inner circumferential side of the lower end of the rotating shaft 36.

[0057] The joint 33 is equipped with pulleys 45 and 46 and belts 47 and 48 for power transmission to move the arm 7 (see...). Figure 8 and Figure 9 Pulley 45 is fixed to the lower end of rotating shaft 35. Pulley 46 is fixed to the lower end of rotating shaft 38. Belts 47 and 48 are formed in the shape of belts. In this embodiment, pulley 45 is the first pulley, pulley 46 is the second pulley, belt 47 is the first belt, and belt 48 is the second belt.

[0058] The pulley 46 consists of a lower pulley 55 and an upper pulley 56, which are divided in the vertical direction. The lower pulley 55 is located below the upper pulley 56. The lower pulley 55 and the upper pulley 56 are fixed together by screws 57. The pulleys 45 and 46 are located below the front end 13c of the arm 13. The pulleys 45 and 46 are located below the shaft retaining member 39. A cover 58 covering the pulleys 45 and 46 is installed on the lower surface of the shaft retaining member 39.

[0059] like Figure 8 and Figure 9 As shown, one end of belts 47 and 48 is fixed to pulley 45. The other end of belts 47 and 48 is fixed to pulley 46. Specifically, the other end of belt 47 is fixed to the lower pulley 55, and the other end of belt 48 is fixed to the upper pulley 56. The winding direction of belt 47 around pulley 45 is opposite to the winding direction of belt 48 around pulley 45. The winding direction of belt 47 around pulley 46 is opposite to the winding direction of belt 48 around pulley 46. That is to say, belts 47 and 48 are fixed to pulleys 45 and 46 in an oblique manner.

[0060] Specifically, belt 47 starts from the fixed position of belt 47 relative to pulley 45 and moves towards... Figure 8 , Figure 9 The belt 48 is wound in a counter-clockwise direction (hereinafter referred to as "counter-clockwise direction"), starting from the fixed position of the belt 48 relative to the pulley 45 and moving towards... Figure 8 , Figure 9The belt is wound in a clockwise direction (hereinafter referred to as "clockwise direction"). In addition, the belt 47 is wound counterclockwise from the fixed position of the belt 47 relative to the pulley 46, and the belt 48 is wound clockwise from the fixed position of the belt 48 relative to the pulley 46.

[0061] As described above, joints 33 and 34 have the same structure and shape. Similar to joint 33, joint 34 includes: a rotating shaft 35 for fixing the front end of parallel arm 27; a rotating shaft 36 for fixing the base end of parallel arm 29; a rotating shaft 37 for fixing the front end of parallel arm 28; a rotating shaft 38 for fixing the base end of parallel arm 30; and a shaft retaining member 39 for holding rotating shafts 35 and 38 in a rotatable position. Pulleys 45 and 46 and belts 47 and 48 for power transmission to move arm 8 are arranged in joint 34. Pulleys 45 and 46 are located below the front end 15c of arm 15.

[0062] exist Figure 5 For convenience, the joint 33 shown includes rotating shafts 35 and 36, bearings 42, and pulleys 45, etc. Figure 7 The left side of the middle and the joint 33 including the rotating shafts 37 and 38, bearings 43 and pulleys 46, etc. Figure 7 The right side of the image is mixed up. Similarly, in... Figure 5 In the joint 34 shown, the parts of the joint 34 including the rotating shafts 35 and 36, the bearings 42 and the pulleys 45, etc., and the parts of the joint 34 including the rotating shafts 37 and 38, the bearings 43 and the pulleys 46, etc., are mixed together.

[0063] (Main effects of this implementation method)

[0064] As described above, in this embodiment, arm 13 is bent in the vertical direction such that the front end portion 13c of arm 13 and the front end portion 15c of arm 15 are positioned at the same height, and arm 16 is bent in the vertical direction such that the base end portion 14b of arm 14 and the base end portion 16b of arm 16 are positioned at the same height. Therefore, in this embodiment, the vertical length of joint 33 and the vertical length of joint 34 can be set to the same length, making the structure of joint 33 the same as the structure of joint 34. Therefore, in this embodiment, the number of parts constituting robot 2 can be reduced, thereby reducing the cost of robot 2. Furthermore, in this embodiment, the same maintenance method can be used to maintain joints 33 and 34, thus improving the maintainability of the two joints 33 and 34.

[0065] In this embodiment, the arm 16, whose front end portion 16c is located below the front end portion 14c, is bent vertically, such that the base end portion 14b and the base end portion 16b are positioned at the same height. Therefore, in this embodiment, even though the front end portion 16c is located below the front end portion 14c, the vertical length of the joint portion 34 can be increased. Thus, in this embodiment, the vertical spacing between the two bearings 42 and the vertical spacing between the two bearings 43 can be increased within the joint portion 34. As a result, the rigidity of the joint portion 34 can be ensured in this embodiment.

[0066] In this embodiment, arms 7 and 8 are parallel linkage arms with two parallel linkage mechanisms 22. Therefore, in this embodiment, it is not necessary to configure a power transmission mechanism such as a belt inside arms 13 to 16. Therefore, in this embodiment, even if arms 13 and 16 are bent in the vertical direction, the structure of arms 13 and 16 can be simplified. Furthermore, in this embodiment, pulleys 45 and 46 are disposed on the lower side of the front end 13c of arm 13 and the front end 15c of arm 15, thus expanding the area where pulleys 45 and 46 can be installed. Therefore, in this embodiment, the outer diameter of pulleys 45 and 46 can be increased, resulting in improved operating accuracy of arms 7 and 8.

[0067] (Example of arm deformation)

[0068] Figures 10A to 10E This is a schematic diagram illustrating the structure of the arm portions 13 and 15 according to another embodiment of the present invention. Figures 11A to 11E This is a schematic diagram illustrating the structure of the arm portions 14 and 16 according to another embodiment of the present invention.

[0069] In the above embodiments, such as Figure 10A As shown, the base end portion 15b of the arm portion 15 can be disposed below the base end portion 13b of the arm portion 13. In this case, for example, the arm portion 13 is formed as a straight line, and the arm portion 15 is curved in the vertical direction, such that the front end portion 13c of the arm portion 13 and the front end portion 15c of the arm portion 15 are disposed at the same height. In the above embodiment, as Figure 10B As shown, the arm 13 can be bent in two stages, or in three or more stages.

[0070] In the above embodiments, such as Figure 10C As shown, it is also possible that both arm 13 and arm 15 are bent, such that the front end portion 13c and the front end portion 15c are positioned at the same height. Furthermore, when both arm 13 and arm 15 are bent, as... Figure 10D As shown, the front ends 13c and 15c can be disposed below the base end 15b. Furthermore, as... Figure 10EAs shown, the arm 13 can also be formed as a straight line, and the base end 15b is positioned above the arm 15, which is curved such that the front end 13c and the front end 15c are positioned at the same height. In this case, the front ends 13c and 15c are positioned below the base 15b.

[0071] In the above embodiments, such as Figure 11A As shown, the front end portion 14c of the arm 14 can be disposed below the front end portion 16c of the arm 16. In this case, for example, the arm 16 is formed as a straight line, and the arm 14 is curved in the vertical direction, such that the base end portion 14b of the arm 14 and the base end portion 16b of the arm 16 are disposed at the same height. In the above embodiment, as Figure 11B As shown, arm 16 can be bent in two stages, or in three or more stages.

[0072] In the above embodiments, such as Figure 11C As shown, it is also possible that both arm 14 and arm 16 are bent, such that the base end portion 14b and base end portion 16b are positioned at the same height. Furthermore, when both arm 14 and arm 16 are bent, as... Figure 11D As shown, the base ends 14b and 16b can be disposed below the front end 14c. Furthermore, as... Figure 11E As shown, alternatively, the arm 16 above the front end portion 14c can be bent, such that the base end portion 14b and the base end portion 16b are positioned at the same height. In this case, the base end portions 14b and 16b are positioned below the front end portion 16c.

[0073] (Other implementation methods)

[0074] The above-described embodiments are examples of preferred embodiments of the present invention, but are not limited thereto. Various modifications can be made without departing from the spirit of the present invention.

[0075] In the above embodiment, arms 7 and 8 may not be parallel linkage arms. That is, arms 13 to 16 may each be composed of a single arm. In this case, a power transmission mechanism such as a belt is arranged inside arms 13 to 16. In the above embodiment, a gear train for power transmission can be arranged in joints 33 and 34 instead of pulleys 45 and 46 and belts 47 and 48. Furthermore, in the above embodiment, the base of hand 5 may be located below the front end 14c of arm 14, and the base of hand 6 may be located below the front end 16c of arm 16. In the above embodiment, the object to be transported by robot 2 may be an object other than chip 3.

[0076] (The composition of this technology)

[0077] This technology can adopt the following structure.

[0078] (1) An industrial robot, It includes: a first hand and a second hand for loading objects; a first arm rotatably connected to the first hand at its front end; a second arm rotatably connected to the second hand at its front end; and a main body for rotatably connecting the base ends of the first arm and the second arm. The first arm includes: a first arm portion whose base end is rotatably connected to the main body portion; and a second arm portion whose base end is rotatably connected to the front end of the first arm portion. The second arm includes: a third arm portion whose base end is rotatably connected to the main body portion; and a fourth arm portion whose base end is rotatably connected to the front end end of the third arm portion. The second arm is positioned higher than the first arm. The base of the first hand is rotatably connected to the front end of the second arm. The fourth arm is positioned higher than the third arm. The base of the second hand is rotatably connected to the front end of the fourth arm. The base ends of the first arm and the third arm overlap vertically and are disposed on the upper side of the main body. When the first arm and the second arm are in a predetermined state, the front ends of the second arm and the front ends of the fourth arm overlap in the vertical direction. At least one of the first arm and the third arm is bent in a vertical direction such that the front ends of the first arm and the front ends of the third arm are positioned at the same height. At least one of the second arm and the fourth arm is bent in the vertical direction such that the base end of the second arm and the base end of the fourth arm are positioned at the same height.

[0079] (2) The industrial robot according to (1), wherein, At least one of the first arm and the third arm is bent into a stepped shape. At least one of the second arm and the fourth arm is bent into a stepped shape.

[0080] (3) The industrial robot according to (1) or (2), wherein, The base end of the first arm is disposed below the base end of the third arm. The front end of the second arm is positioned higher than the front end of the fourth arm. When viewed from directions perpendicular to the long side and vertical direction of the third arm, the shape of the third arm is a straight line in which the base end and the front end of the third arm are positioned at the same height. When viewed from directions perpendicular to the long side and vertically, the second arm is a straight line with its base and front ends at the same height. The first arm and the fourth arm are curved.

[0081] (4) The industrial robot according to any one of (1) to (3), wherein, The first joint portion, which serves as the connecting portion between the first arm and the second arm, and the second joint portion, which serves as the connecting portion between the third arm and the fourth arm, have the same structure and shape.

[0082] (5) The industrial robot according to any one of (1) to (4), wherein, The first arm and the second arm are parallel link arms with two parallel linkage mechanisms. The first arm, the second arm, the third arm, and the fourth arm are each composed of two parallel arms that are parallel to each other.

[0083] (6) The industrial robot according to (5), wherein, In the first joint portion, which serves as the connecting portion between the first arm and the second arm, and in the second joint portion, which serves as the connecting portion between the third arm and the fourth arm, a first pulley, a second pulley, a first belt, and a second belt are provided for moving the first arm and the second arm. The first belt and the second belt are formed into a belt shape. One end of the first belt and one end of the second belt are fixed to the first pulley. The other end of the first belt and the other end of the second belt are fixed to the second pulley. The first belt is wound in the opposite direction to the first pulley, which is the same as the second belt. The first belt is wound in the opposite direction to the second belt around the second pulley. The first pulley and the second pulley are positioned below the front end of the first arm and the front end of the third arm.

[0084] In this technology, for example, at least one of the first arm and the third arm is bent into a stepped shape, and at least one of the second arm and the fourth arm is bent into a stepped shape.

[0085] In this technology, preferably, the base end of the first arm is disposed below the base end of the third arm, and the front end of the second arm is disposed above the front end of the fourth arm. When viewed from a direction perpendicular to the long side and the vertical direction of the third arm, the shape of the third arm is a straight line in which the base end and the front end of the third arm are disposed at the same height. When viewed from a direction perpendicular to the long side and the vertical direction of the second arm, the shape of the second arm is a straight line in which the base end and the front end of the second arm are disposed at the same height. The first arm and the fourth arm are curved.

[0086] With this configuration, even if the front end of the third arm is positioned below the front end of the second arm, the vertical length of the joint of the second arm, which serves as the connection between the third and fourth arms, can be increased. Therefore, for example, when the connection of the second arm uses two rotatable bearings to support the fourth arm, arranged in a vertically spaced manner, the distance between the two bearings can be increased. As a result, the rigidity of the joint of the second arm can be ensured.

[0087] In this technology, for example, the first joint portion that serves as the connecting portion between the first arm portion and the second arm portion and the second joint portion that serves as the connecting portion between the third arm portion and the fourth arm portion have the same structure and shape.

[0088] In this technology, for example, the first arm and the second arm are parallel link arms with two parallel linkage mechanisms, and the first arm, second arm, third arm, and fourth arm are composed of two parallel arms that are parallel to each other. In this case, it is not necessary to arrange a drive mechanism such as a belt inside the first arm, second arm, third arm, and fourth arm. Therefore, even if at least one of the first arm and the third arm is bent in the vertical direction, the structure of the bent first arm and the third arm can be simplified. Furthermore, even if at least one of the second arm and the fourth arm is bent in the vertical direction, the structure of the bent second arm and the fourth arm can be simplified.

[0089] In this technology, preferably, a first pulley, a second pulley, a first belt, and a second belt are provided in the first joint portion that serves as the connecting portion between the first arm and the second arm, and in the second joint portion that serves as the connecting portion between the third arm and the fourth arm, for moving the first arm and the second arm. The first belt and the second belt are formed into belts. One end of the first belt and one end of the second belt are fixed to the first pulley, and the other end of the first belt and the other end of the second belt are fixed to the second pulley. The winding direction of the first belt around the first pulley is opposite to the winding direction of the second belt around the first pulley, and the winding direction of the first belt around the second pulley is opposite to the winding direction of the second belt around the second pulley. The first pulley and the second pulley are disposed on the lower side of the front end portion of the first arm and the front end portion of the third arm.

[0090] With this configuration, the first and second pulleys are positioned at the front end of the first arm and below the front end of the third arm, thus expanding the installation area for the first and second pulleys. Consequently, the outer diameters of the first and second pulleys can be increased, resulting in improved operational accuracy of the first and second arms.

[0091] Symbol Explanation

[0092] 2. Robots (Industrial Robots)

[0093] 3. Chip (semiconductor chip, object to be transported)

[0094] 5th hand (first hand)

[0095] 6th hand (second hand)

[0096] 7 arms (first arm)

[0097] 8 arms (second arm)

[0098] 9. Main body

[0099] 13. Arm (First Arm)

[0100] 13b Base end (base end of the first arm)

[0101] 13c Front end (front end of the first arm)

[0102] 14. Arm (Second Arm)

[0103] 14b Base end (base end of the second arm)

[0104] 14c Front end (front end of the second arm)

[0105] 15. Arm (Third Arm)

[0106] 15b Base end (base end of the third arm)

[0107] 15c Front end (front end of the third arm)

[0108] 16. Arm (Fourth Arm)

[0109] 16b Base end (base end of the fourth arm)

[0110] 16c Front end (front end of the fourth arm)

[0111] 22 Parallel Linkage Mechanism

[0112] 23 to 30 parallel arm

[0113] 33 Joint (First Joint)

[0114] 34 Joint (Second Joint)

[0115] 45 Pulley (First Pulley)

[0116] 46. ​​Pulley (Second Pulley)

[0117] 47. Belt (First Belt)

[0118] 48. Belt (second belt).

Claims

1. An industrial robot, characterized in that, include: First hand and second hand, which are used for loading objects to be transported; first arm, the first hand is rotatably connected to the front end of the first arm; second arm, the second hand is rotatably connected to the front end of the second arm; And a main body portion, which allows the base ends of the first arm and the second arm to be rotatably connected. The first arm includes: a first arm portion, the base end of which is rotatably connected to the main body portion; and a second arm portion, the base end of which is rotatably connected to the front end of the first arm portion. The second arm includes: a third arm portion, the base end of which is rotatably connected to the main body portion; and a fourth arm portion, the base end of which is rotatably connected to the front end of the third arm portion. The second arm is positioned higher than the first arm. The base of the first hand is rotatably connected to the front end of the second arm. The fourth arm is positioned higher than the third arm. The base of the second hand is rotatably connected to the front end of the fourth arm. The base ends of the first arm and the third arm overlap vertically and are positioned higher than the main body. When the first arm and the second arm are in a predetermined state, the front ends of the second arm and the front ends of the fourth arm overlap in the vertical direction. At least one of the first arm and the third arm is bent in a vertical direction such that the front ends of the first arm and the front ends of the third arm are positioned at the same height. At least one of the second arm and the fourth arm is bent in the vertical direction such that the base end of the second arm and the base end of the fourth arm are positioned at the same height.

2. The industrial robot according to claim 1, characterized in that, At least one of the first arm and the third arm is bent into a stepped shape. At least one of the second arm and the fourth arm is bent into a stepped shape.

3. The industrial robot according to claim 1 or 2, wherein, The base end of the first arm is disposed below the base end of the third arm. The front end of the second arm is positioned higher than the front end of the fourth arm. When viewed from directions perpendicular to the long side and vertical direction of the third arm, the shape of the third arm is a straight line in which the base end and the front end of the third arm are positioned at the same height. When viewed from directions perpendicular to the long side and vertically, the second arm is a straight line with its base and front ends at the same height. The first arm and the fourth arm are bent.

4. The industrial robot according to claim 1 or 2, wherein, The first joint portion, which serves as the connecting portion between the first arm and the second arm, and the second joint portion, which serves as the connecting portion between the third arm and the fourth arm, have the same structure and shape.

5. The industrial robot according to claim 1 or 2, wherein, The first arm and the second arm are parallel link arms with two parallel linkage mechanisms. The first arm, the second arm, the third arm, and the fourth arm are each composed of two parallel arms that are parallel to each other.

6. The industrial robot according to claim 5, wherein, In the first joint portion, which serves as the connecting portion between the first arm and the second arm, and in the second joint portion, which serves as the connecting portion between the third arm and the fourth arm, a first pulley, a second pulley, a first belt, and a second belt are provided for moving the first arm and the second arm. The first belt and the second belt are formed into a belt shape. One end of the first belt and one end of the second belt are fixed to the first pulley. The other end of the first belt and the other end of the second belt are fixed to the second pulley. The first belt is wound in the opposite direction to the first pulley, which is the same as the second belt. The first belt is wound in the opposite direction to the second belt around the second pulley. The first pulley and the second pulley are positioned below the front end of the first arm and the front end of the third arm.

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