A thin sheet workpiece stable adsorption transfer robot

Abstract

The present application belongs to the technical field of industrial robots, and particularly relates to a thin material sheet-shaped workpiece stable adsorption transfer robot, which comprises a cabinet and a side cabinet, a mechanical arm is arranged on the cabinet, a suction disc rack assembly is fixedly connected to the working end of the mechanical arm, a plurality of Bernoulli suction discs are adjustably arranged on the suction disc rack assembly, a plurality of electrostatic adsorption components are arranged at the edge of the suction disc rack assembly, the side cabinet is arranged on one side of the cabinet, the workpieces are stacked and arranged on the side cabinet, a plurality of positioning blocks are uniformly and intervally arranged on the side cabinet around the workpieces, and each positioning block is in abutment with the edge of the workpiece. The Bernoulli suction disc is used for adsorption in the scheme, so that the Bernoulli suction disc non-contactly adsorbs the workpiece, damage or marks on the surface of a precise and fragile workpiece such as a display screen inner screen can be avoided, and the edge of the long and thin workpiece is additionally adsorbed and fixed by the electrostatic adsorption mode, so that the edge of the long and thin workpiece is prevented from being bent.

Description

Technical Field

[0001] This invention belongs to the field of industrial robot technology, specifically a robot for the stable adsorption and transfer of thin sheet-like workpieces. Background Technology

[0002] This invention relates to the field of automated handling robot technology, and is particularly applicable to the automated adsorption and transfer of precision thin sheet workpieces such as display screen inner screen and ultra-thin optical glass. Thin sheet workpieces are thin, weak, and their precision coatings are easily damaged. In the loading, unloading, and transfer processes, stringent requirements are placed on the non-destructive performance, material separation capability, and handling posture stability of the gripping mechanism.

[0003] Currently, the mainstream approach in the industry is to use robots equipped with multiple vacuum suction cups to transfer such workpieces. For example, a suction robot for a linkage-type feeding production line, disclosed in CN First Adjustment Slot 2053 Cabinet 10 Dielectric Adsorption Layer 290U, includes a robot arm mounting bracket, a linear bearing, a robot arm, a robot arm driver, a suction nozzle bracket, and a vacuum nozzle. The linear bearing is mounted on the robot arm mounting bracket. One end of the robot arm is mounted on the linear bearing. The robot arm driver drives the linear bearing to move up and down along the robot arm mounting bracket. The other end of the robot arm is equipped with a suction nozzle bracket. A vacuum nozzle is mounted on the suction nozzle bracket to adsorb parts. However, although this type of equipment can pick up workpieces using vacuum suction, it still has several inherent technical defects under actual large-scale production conditions, making it difficult to balance the success rate of material picking, workpiece protection effect, and transfer stability. Specific defects are as follows: 1. Using the traditional negative pressure vacuum suction cup adsorption method, the suction cup is in direct contact with the workpiece surface, and the workpiece surface within the suction cup coverage area is subjected to a large negative pressure adsorption effect, which can easily cause damage or leave marks on the surface of delicate and fragile workpieces such as the inner screen of a display screen.

[0004] 2. If a single Bernoulli suction cup is used, although it can achieve adsorption while reducing damage to the workpiece surface, it can only provide vertical upward lifting adsorption force for the main body of the workpiece. Long, thin sheet-shaped workpieces are prone to displacement due to inertia and bending of the edges during robot acceleration, turning, and emergency stop. Flexible blocks, mechanical grippers and other physical contact limiting structures are generally added, which can easily cause indentations, bumps and scratches on the screen frame.

[0005] 3. Existing transfer equipment lacks a targeted workpiece layer separation structure. Stacked thin sheet workpieces will adhere tightly to each other due to atmospheric pressure difference and film micro-adsorption. It is difficult to quickly increase the interlayer gap during the picking operation. The pressure difference between the upper and lower surfaces of the workpiece is unbalanced, and problems such as failure to successfully separate a single workpiece or failure of adsorption picking often occur. Summary of the Invention

[0006] To overcome the shortcomings of existing technologies, this invention addresses the technical problem of using a Bernoulli suction cup for non-contact adsorption of workpieces. This avoids damage or leaving marks on delicate and fragile workpiece surfaces, such as the inner screen of a display screen, thereby improving the quality of adsorption and transfer. While the Bernoulli suction cup provides the main picking function for adsorbing the workpiece body, electrostatic adsorption is used to additionally adsorb and fix the edges of the workpiece. This prevents the edges of long and thin workpieces from bending due to inertia during adsorption, picking, and transfer, thus protecting the workpiece. By setting air outlets and air supply connectors, high-speed airflow can be blown into the stacked workpieces through the air outlets during adsorption and picking, increasing the gap between the stacked workpieces. This allows the Bernoulli suction cup and electrostatic adsorption components to more smoothly adsorb and pick up the workpieces, avoiding the problem of difficulty in picking up workpieces due to unbalanced air pressure between the upper and lower surfaces when the workpieces are stacked too tightly.

[0007] To achieve the above objectives, the present invention provides the following technical solution: a robot for the stable adsorption and transfer of thin sheet-like workpieces, comprising: The equipment includes a cabinet and a side cabinet. The cabinet is equipped with a robotic arm, and the working end of the robotic arm is fixedly connected to a suction cup frame assembly. The suction cup frame assembly is adjustablely equipped with multiple Bernoulli suction cups, and multiple sets of electrostatic adsorption components are provided at the edge of the suction cup frame assembly. The side cabinet is located on one side of the cabinet and supports stacked workpieces. Multiple positioning blocks are evenly spaced around the workpieces on the side cabinet, and each positioning block abuts against the edge of the workpiece.

[0008] Furthermore, the suction cup frame assembly includes a connecting plate, which is fixedly connected to the working end of the robotic arm. An I-beam is fixedly connected to the bottom side of the connecting plate, and support rods are fixedly connected to both ends of the I-beam. Two end plates are symmetrically arranged at both ends of the support rods. Each Bernoulli suction cup is located between the I-beam and the end plates, and the electrostatic adsorption component is located at the corresponding positions of the support rods and end plates.

[0009] Furthermore, two sets of suction cup frames are bridged between the two sides of the I-beam and the two end plates respectively. Each set of suction cup frames is used to support and install the Bernoulli suction cup. A set of mounting holes is opened on both sides of the I-beam and on the surface of each end plate in a direction parallel to the end plate. A second adjustment groove is opened at the end of each set of suction cup frames at the corresponding position of each set of mounting holes.

[0010] Furthermore, each set of suction cup frames has a first adjustment groove along the direction perpendicular to the end plate, and a threaded rod slides through each first adjustment groove. The top of the adjacent threaded rod is fixedly connected to a suction cup seat, and the bottom of the threaded rod is fixedly connected to the corresponding threaded rod. The position and height of the threaded rod in the first adjustment groove are adjustable, and the position of the threaded rod can be locked and fixed by a nut.

[0011] Furthermore, the Bernoulli suction cup is positioned at a location corresponding to the main body of the workpiece, the electrostatic adsorption component is positioned at a location corresponding to the edge of the workpiece, and each of the electrostatic adsorption components is located at a corresponding position between each positioning block.

[0012] Furthermore, the electrostatic adsorption component is provided with a separator, each separator is provided with an air blowing slot, each air blowing slot is inclined towards the bottom edge of the electrostatic adsorption component, and each separator is provided with an air supply connector communicating with the air blowing slot.

[0013] Furthermore, a cylinder is provided at the corresponding position of each electrostatic adsorption component on the support rod and end plate. The extended end of each cylinder is fixedly connected to the electrostatic adsorption component. A mounting crossbeam is fixedly connected between the connecting plate and the two end plates. A mounting upright is fixedly connected to each end plate. Each cylinder is fixedly connected to the corresponding mounting upright and mounting crossbeam.

[0014] Furthermore, the electrostatic adsorption component includes a mounting plate, which is fixedly connected to the extended end of the cylinder. A base plate is fixedly connected to the bottom side of the mounting plate, an insulating layer is fixedly disposed on the bottom side of the base plate, a dielectric adsorption layer is disposed on the bottom side of the insulating layer, and an electrode layer is embedded between the insulating layer and the dielectric adsorption layer.

[0015] Furthermore, the cabinet is equipped with an automatic control component, an air supply component, and an air pressure control component. Each Bernoulli suction cup and air supply connector is connected to the air supply component via a flexible hose.

[0016] In summary, compared with the prior art, the beneficial effects of the present invention are as follows: (1) This solution uses a Bernoulli suction cup for adsorption, which allows the Bernoulli suction cup to adsorb the workpiece in a non-contact manner, thus avoiding damage or leaving marks on the surface of delicate and fragile workpieces such as the inner screen of a display screen, thereby improving the quality of adsorption and transfer.

[0017] (2) While using Bernoulli suction cup to adsorb the main body of the workpiece to provide the main picking function, electrostatic adsorption is used to additionally adsorb and fix the edge of the workpiece. This avoids the long and thin workpiece edge from bending due to inertia and other reasons during the adsorption, picking and transfer process, which would cause damage or even breakage to the fragile workpiece and protect the workpiece.

[0018] (3) By setting up air inlets and air supply connectors, high-speed airflow can be blown into the stacked workpieces through the air inlets during adsorption and pickup, which increases the gap between the stacked workpieces, allowing the Bernoulli suction cup and electrostatic adsorption components to adsorb and pick up the workpieces more smoothly, avoiding the problem that the workpieces are too tightly stacked and difficult to pick up due to the unbalanced air pressure between the upper and lower surfaces of the workpieces. Attached Figure Description

[0019] Figure 1 This is a three-dimensional schematic diagram of the present patent.

[0020] Figure 2 This is a top view of the present patent.

[0021] Figure 3 This is a side view of the present patent.

[0022] Figure 4 for Figure 3 A magnified view of a portion of point A in the middle.

[0023] Figure 5 This is a schematic diagram of the main structure of this patent.

[0024] Figure 6 This is a structural diagram of the main mechanism of this patent from another perspective.

[0025] Figure 7 This is a schematic diagram of the electrostatic adsorption component.

[0026] Figure 8 This is a schematic diagram of the suction cup holder assembly.

[0027] Explanation of reference numerals in the attached drawings: Cabinet 10; Robotic arm 11; Side cabinet 12; Positioning block 13; Workpiece 14; Connecting plate 15; I-beam plate 16; End plate 17; Support rod 18; Suction cup frame 19; First adjustment slot 20; Suction cup seat 21; Threaded rod 22; Bernoulli suction cup 23; Cylinder 24; Mounting plate 25; Base plate 26; Insulating layer 27; Electrode layer 28; Dielectric adsorption layer 29; Separator 30; Air supply connector 31; Air blowing slot 32; Mounting hole 33; Second adjustment slot 34; Mounting stand 35; Mounting crossbar 36. Detailed Implementation

[0028] To enable those skilled in the art to better understand the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings.

[0029] like Figure 1-8 As shown, a robot for stable adsorption and transfer of thin sheet-like workpieces includes a side cabinet 12, on which stacked workpieces 14 are supported. Multiple positioning blocks 13 are evenly spaced around the workpieces 14 on the side cabinet 12, with each positioning block 13 abutting against the edge and corner of the workpiece 14. A cabinet 10 is provided on one side of the side cabinet 12, and a robotic arm 11 is provided on the cabinet 10. The working end of the robotic arm 11 is connected to a suction cup frame assembly. Two Bernoulli suction cups 23 are respectively provided on the suction cup frame assembly at corresponding positions on the main body of the workpiece 14. In this embodiment, the Bernoulli suction cups 23 are preferably large-area square Bernoulli suction cups to effectively increase adsorption stability and adsorption force.

[0030] like Figure 1-8 As shown, multiple electrostatic adsorption components are respectively provided on the edge of the suction cup frame assembly. The electrostatic adsorption components are located at corresponding positions of each positioning block 13. The electrostatic adsorption components include a mounting plate 25, which is fixedly connected to the extended end of the cylinder 24. A base plate 26 is fixedly connected to the bottom side of the mounting plate 25. An insulating layer 27 is fixedly provided on the bottom side of the base plate 26. A dielectric adsorption layer 29 is provided on the bottom side of the insulating layer 27. An electrode layer 28 is embedded between the insulating layer 27 and the dielectric adsorption layer 29. A separator 30 is also provided on each mounting plate 25. Each separator 30 is provided with an air blowing slot 32. Each air blowing slot 32 is inclined towards the bottom edge of the electrostatic adsorption component. An air supply connector 31 communicating with the air blowing slot 32 is provided on each separator 30.

[0031] By setting up the Bernoulli suction cup 23, the workpiece 14 can be stably adsorbed and picked up. According to the working principle of the Bernoulli suction cup, the Bernoulli suction cup 23 does not directly contact the workpiece body. Compared with the traditional negative pressure vacuum suction cup adsorption method, the adsorption method of the Bernoulli suction cup 23 in this solution can also avoid damage or leaving marks on the surface of delicate and fragile workpieces such as the inner screen of the display screen, thereby improving the quality of adsorption and transfer.

[0032] Meanwhile, while the Bernoulli suction cup 23 is used to adsorb the main body of the workpiece 14 to provide the main picking function, the edge of the workpiece 14 is additionally adsorbed and fixed by electrostatic adsorption. This avoids the bending of the long and thin edge of the workpiece 14 due to inertia and other reasons during the adsorption, picking and transfer process, which would cause damage or even breakage to the fragile workpiece 14, thus protecting the workpiece.

[0033] Furthermore, due to the working principle of the Bernoulli suction cup 23, the Bernoulli suction cup 23 can restrict the degree of freedom of the workpiece 14 in the direction perpendicular to the ground, but it is difficult to restrict the degree of freedom of the workpiece 14 in the direction parallel to the ground. Therefore, by setting an electrostatic adsorption component to adsorb and fix the edge of the workpiece 14, the Bernoulli suction cup 23 can restrict the degree of freedom of the workpiece 14, improve the adsorption stability of the workpiece 14 during the transfer process, and thus improve the quality of the transfer work.

[0034] Furthermore, since the adsorption force of electrostatic adsorption components is relatively weak, if electrostatic adsorption is used, a very large area of ​​electrostatic adsorption components is required to barely meet the needs of adsorption, pickup and transfer of workpieces. This results in an unnecessary increase in the contact area with the workpiece and a sharp increase in cost. Therefore, a Bernoulli suction cup 23 with strong adsorption capacity is used to provide stable and effective adsorption for the main body of the workpiece 14 and bear the main weight of the workpiece 14. Electrostatic adsorption components are used for the edges of the workpiece 14 to achieve the effect of fixing the edges. The two adsorption methods are used in combination to adapt to the actual use scenario and balance the cost.

[0035] Meanwhile, by setting the air blowing slot 32 and the air supply connector 31, a high-speed airflow can be blown into the stacked workpieces 14 through the air blowing slot 32 during adsorption and pickup, which increases the gap between the stacked workpieces 14, allowing the Bernoulli suction cup 23 and the electrostatic adsorption component to more smoothly adsorb and pick up the workpieces 14, avoiding the problem that the workpieces 14 are too tightly stacked and difficult to pick up due to the air pressure imbalance between the upper and lower surfaces of the workpieces 14.

[0036] like Figure 1-8 As shown, the suction cup frame assembly includes a connecting plate 15, which is fixedly connected to the working end of the robotic arm 11. An I-beam plate 16 is fixedly connected to the bottom side of the connecting plate 15. Support rods 18 are fixedly connected to both ends of the I-beam plate 16. Two end plates 17 are symmetrically arranged at both ends of the support rods 18. Each Bernoulli suction cup 23 is located between the I-beam plate 16 and the end plates 17. Electrostatic adsorption components are located at corresponding positions on the support rods 18 and the end plates 17.

[0037] The connecting plate 15, the I-beam plate 16, the end plate 17, and the support rod 18 are spliced ​​together to form a suction cup frame for mounting and supporting the Bernoulli suction cup 23 and the electrostatic adsorption components. The splicing method allows for more flexible adjustment of the size of the suction cup frame according to different target workpiece sizes to meet different usage scenarios and needs.

[0038] like Figure 1-8As shown, two sets of suction cup frames 19 are bridged between the two sides of the I-beam plate 16 and the two end plates 17 respectively. Each set of suction cup frames 19 is used to support and install the Bernoulli suction cup 23. A set of mounting holes 33 are opened on both sides of the I-beam plate 16 and on the surface of each end plate 17 in a direction parallel to the end plate 17. A second adjustment groove 34 is opened at the end of each set of suction cup frames 19 at the corresponding position of each set of mounting holes 33. A first adjustment groove 20 is opened on each set of suction cup frames 19 in a direction perpendicular to the end plate 17. A threaded rod 22 is slidably inserted in each first adjustment groove 20. The top of the adjacent threaded rod 22 is fixedly connected to the suction cup seat 21, and the bottom of the threaded rod 22 is fixedly connected to the corresponding threaded rod 22. The position and height of the threaded rod 22 in the first adjustment groove 20 are adjustable. The position of the threaded rod 22 can be locked and fixed by a nut.

[0039] By providing mounting holes 33 and a second adjustment groove 34, the suction cup holder 19 and the Bernoulli suction cup 23 can be freely adjusted in the direction parallel to the end plate 17. By providing a first adjustment groove 20, the Bernoulli suction cup 23 can be adjusted in the direction perpendicular to the end plate 17. Furthermore, by providing a threaded rod 22, the height of the Bernoulli suction cup 23 can be freely adjusted, thereby achieving free adjustment of the Bernoulli suction cup 23 in all directions to adapt to different workpieces and different usage requirements.

[0040] like Figure 1-8 As shown, cylinders 24 are provided at the corresponding positions of each electrostatic adsorption component on the support rod 18 and the end plate 17. The extended end of each cylinder 24 is fixedly connected to the electrostatic adsorption component. A mounting crossbeam 36 is fixedly connected between the connecting plate 15 and the two end plates 17. A mounting stand 35 is fixedly connected to the end plate 17 respectively. Each cylinder 24 is fixedly connected to the corresponding mounting stand 35 and mounting crossbeam 36 respectively.

[0041] Because the Bernoulli suction cup 23 has a narrow gap between its bottom surface and the workpiece when adsorbing the workpiece, allowing airflow to pass through, while the electrostatic adsorption component has direct contact with the workpiece without gaps when adsorbing, the height of the electrostatic adsorption component and the separator 30 can be adjusted by setting the cylinder 24, as well as the height difference between the bottom surface of the Bernoulli suction cup 23 and the bottom surface of the electrostatic adsorption component. This ensures that when adsorbing, the gap between the Bernoulli suction cup 23 and the workpiece surface is appropriate while keeping the workpiece 14 straight and not bent, thus ensuring that the Bernoulli suction cup 23 can work stably and achieve a good adsorption effect.

[0042] The cabinet 10 is equipped with an automatic control component, an air supply component, and an air pressure control component. Each Bernoulli suction cup 23 and air supply connector 31 is connected to the air supply component via a hose.

[0043] In this embodiment, initially, the operator sets the positions of the cabinet 10 and the side cabinet 12 according to the specified positions, and adjusts the installation position of the positioning block 13 according to the specific size of the workpiece 14, so that the positioning block 13 can just abut the edge of the workpiece 14. The workpiece 14 is stacked between each positioning block 13. The control system sets the motion path of the robotic arm 11 and the suction cup frame assembly to complete the preparation work.

[0044] During the adsorption and pickup action, the control system automatically controls the robotic arm 11 to move the suction cup frame assembly above the workpiece 14, and then controls the suction cup frame assembly to move horizontally downward until the bottom side of the electrostatic adsorption component contacts the surface of the workpiece 14 and stops. Then, the Bernoulli suction cup 23 and the electrostatic adsorption component are activated to generate suction. When necessary, the control system controls the cylinder 24 to adjust the gap between the bottom surface of the Bernoulli suction cup 23 and the surface of the workpiece 14 to ensure that the Bernoulli suction cup 23 can perform good adsorption work.

[0045] Then, the robotic arm 11 drives the suction cup frame to lift. At the moment of lifting, high-pressure air is injected into the separator 30 through the air supply connector 31. The high-pressure air is then blown out from the air blowing slot 32 and acts between the workpieces 14 to separate the stacked workpieces 14. This avoids the problem of the workpiece 14 bending downwards due to the low air pressure at the top and the rapid separation at the bottom during lifting, which would cause an imbalance of air pressure between the top and bottom of the workpiece 14. During the picking and transfer process, the electrostatic adsorption component is used to adsorb the edge of the workpiece 14, which can also prevent the edge of the workpiece 14 from falling and bending, thus preventing damage.

[0046] After the robotic arm 11 drives the suction cup frame assembly and the workpiece 14 it adsorbs to the designated placement area, the control system shuts down the Bernoulli suction cup 23 and the electrostatic adsorption component, thus completing the transfer action. The above actions are repeated until all the stacked workpieces 14 have been transferred.

[0047] The aforementioned robotic arm 11, Bernoulli suction cup 23, cylinder 24, etc., are mature existing technologies. The structures in the attached drawings are only for illustration, and their internal structures and working principles will not be described in detail here.

[0048] The specification and claims use certain terms to refer to specific components. Those skilled in the art will understand that hardware manufacturers may use different names to refer to the same component. This specification and claims do not distinguish components based on differences in name, but rather on differences in function. The term "comprising" throughout the specification and claims is an open-ended term and should be interpreted as "comprising but not limited to." "Approximately" means that within an acceptable margin of error, those skilled in the art can solve the technical problem and substantially achieve the technical effect within a certain margin of error.

[0049] It should be noted that the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a product or system comprising a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a product or system. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the product or system that includes said element.

[0050] The foregoing description illustrates and describes several preferred embodiments of this application. However, as previously stated, it should be understood that this application is not limited to the forms disclosed herein and should not be construed as excluding other embodiments. It can be used in various other combinations, modifications, and environments, and can be altered within the scope of the application concept described herein through the foregoing teachings or techniques or knowledge in related fields. Any modifications and variations made by those skilled in the art that do not depart from the spirit and scope of this application should be within the protection scope of the appended claims.

Claims

1. A robot for the stable adsorption and transfer of thin sheet-like workpieces, characterized in that, The thin-sheet workpiece stable adsorption and transfer robot includes: The cabinet (10) and the side cabinet (12) are provided. The cabinet (10) is equipped with a robotic arm (11). The working end of the robotic arm (11) is fixedly connected to a suction cup frame assembly. The suction cup frame assembly is equipped with multiple Bernoulli suction cups (23). Multiple sets of electrostatic adsorption components are provided at the edge of the suction cup frame assembly. The side cabinet (12) is located on one side of the cabinet (10). The side cabinet (12) carries stacked workpieces (14). Multiple positioning blocks (13) are evenly spaced around the workpieces (14) on the side cabinet (12). Each positioning block (13) abuts against the edge of the workpiece (14).

2. The thin-film workpiece stable adsorption and transfer robot according to claim 1, characterized in that, The suction cup frame assembly includes a connecting plate (15), which is fixedly connected to the working end of the robotic arm (11). An I-beam (16) is fixedly connected to the bottom side of the connecting plate (15). Support rods (18) are fixedly connected to both ends of the I-beam (16). Two end plates (17) are symmetrically arranged at both ends of the support rods (18). Each Bernoulli suction cup (23) is located between the I-beam (16) and the end plates (17). The electrostatic adsorption component is located at the corresponding positions of the support rods (18) and the end plates (17).

3. The thin-film workpiece stable adsorption and transfer robot according to claim 2, characterized in that, Two sets of suction cup brackets (19) are bridged between the two sides of the I-beam (16) and the two end plates (17). Each set of suction cup brackets (19) is used to support and install the Bernoulli suction cup (23). A set of mounting holes (33) are opened on both sides of the I-beam (16) and on the surface of each end plate (17) in a direction parallel to the end plate (17). A second adjustment groove (34) is opened at the end of each set of suction cup brackets (19) at the corresponding position of each set of mounting holes (33).

4. The thin-film workpiece stable adsorption and transfer robot according to claim 3, characterized in that, Each suction cup holder (19) has a first adjustment groove (20) along the direction perpendicular to the end plate (17). A threaded rod (22) slides through each first adjustment groove (20). The top of the adjacent threaded rod (22) is fixedly connected to a suction cup seat (21). The bottom of the threaded rod (22) is fixedly connected to the corresponding threaded rod (22). The position and height of the threaded rod (22) in the first adjustment groove (20) are adjustable. The position of the threaded rod (22) can be locked and fixed by a nut.

5. The thin-film workpiece stable adsorption and transfer robot according to claim 1, characterized in that, The Bernoulli suction cup (23) is positioned at a location corresponding to the main body of the workpiece (14), and the electrostatic adsorption component is positioned at a location corresponding to the edge of the workpiece (14). Each of the electrostatic adsorption components is located at a position corresponding to the interval of each positioning block (13).

6. The thin-film workpiece stable adsorption and transfer robot according to claim 5, characterized in that, The electrostatic adsorption component is provided with a separator (30), each separator (30) is provided with an air blowing slot (32), each air blowing slot (32) is inclined to point towards the bottom edge of the electrostatic adsorption component, and each separator (30) is provided with an air supply connector (31) communicating with the air blowing slot (32).

7. The thin-film workpiece stable adsorption and transfer robot according to claim 1, characterized in that, A cylinder (24) is provided on the support rod (18) and the end plate (17) at the corresponding position of each electrostatic adsorption component. The extended end of each cylinder (24) is fixedly connected to the electrostatic adsorption component. A mounting crossbeam (36) is fixedly connected between the connecting plate (15) and the two end plates (17). A mounting stand (35) is fixedly connected to the end plate (17). Each cylinder (24) is fixedly connected to the corresponding mounting stand (35) and mounting crossbeam (36).

8. The thin-film workpiece stable adsorption and transfer robot according to claim 7, characterized in that, The electrostatic adsorption component includes a mounting plate (25), which is fixedly connected to the extended end of the cylinder (24). A substrate (26) is fixedly connected to the bottom side of the mounting plate (25). An insulating layer (27) is fixedly disposed on the bottom side of the substrate (26). A dielectric adsorption layer (29) is disposed on the bottom side of the insulating layer (27). An electrode layer (28) is embedded between the insulating layer (27) and the dielectric adsorption layer (29).

9. The thin-film workpiece stable adsorption and transfer robot according to claim 8, characterized in that, The cabinet (10) is equipped with an automatic control component, an air supply component and an air pressure control component, and each Bernoulli suction cup (23) and air supply connector (31) are connected to the air supply component via a hose.

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