Inkjet printing apparatus, substrate processing apparatus, inkjet printing method, and electronic apparatus

Abstract

The present invention relates to an inkjet printing apparatus, a substrate processing apparatus, an inkjet printing method, and an electronic apparatus. The inkjet printing apparatus can include a stage on which an object substrate is placed; a stage driving portion configured to horizontally move the stage; a head portion located above the stage and configured to eject ink including a first solvent toward the object substrate; a porous plate located above the stage and overlapping the object substrate in a plane; and a solvent providing portion that provides a second solvent to the porous plate, the second solvent having a vapor pressure greater than or equal to a vapor pressure of the first solvent.

Description

Technical Field

[0001] This invention relates to an inkjet printing apparatus, a substrate processing apparatus, an inkjet printing method, and an electronic device. More specifically, this invention relates to an inkjet printing apparatus, a substrate processing apparatus, an inkjet printing method, and an electronic device for manufacturing display devices. Background Technology

[0002] A display device is a device that displays images to provide visual information to a user. Among display devices, organic light-emitting display apparatuses have recently attracted much attention.

[0003] Inkjet printing equipment can be used in the manufacture of display devices. Some patterns included in the display device can be formed using inkjet printing equipment. To improve the quality of the display device, it is important to form patterns of uniform thickness. Summary of the Invention

[0004] Technical issues

[0005] One object of the present invention is to provide an inkjet printing apparatus capable of forming patterns of uniform thickness.

[0006] Another object of the present invention is to provide a substrate processing apparatus including an inkjet printing apparatus.

[0007] Another object of the present invention is to provide an inkjet printing method capable of forming patterns of uniform thickness.

[0008] Another object of the present invention is to provide an electronic device including a display device having a pattern manufactured using an inkjet printing apparatus.

[0009] However, the present invention is not limited to the above objectives, and various extensions can be made without departing from the spirit and scope of the present invention.

[0010] Solution

[0011] To achieve the above-described object of the present invention, an inkjet printing apparatus according to an exemplary embodiment of the present invention may include: a stage for placing a target substrate; a stage drive configured to move the stage horizontally; a head located above the stage and configured to eject ink comprising a first solvent toward the target substrate; a perforated plate located above the stage and overlapping the target substrate in a plane; and a solvent supply unit for supplying a second solvent to the perforated plate, the second solvent having a vapor pressure greater than or equal to the vapor pressure of the first solvent.

[0012] In one embodiment, the second solvent provided to the porous plate can increase the vapor pressure around the first solvent of the ink ejected onto the target substrate, thereby suppressing the evaporation of the first solvent.

[0013] In one embodiment, on a plane, the entire area of ​​the object substrate that is horizontally moved by the stage drive during an inkjet printing process for the object substrate is defined as the object region, and the perforated plate may be arranged to overlap with the entire object region.

[0014] In one embodiment, the porous plate may include a plurality of sub-porous plates spaced apart from each other.

[0015] In one embodiment, on a plane, the entire area where the target substrate is located, which is horizontally moved by the stage drive during an inkjet printing process for the target substrate, is defined as the target area, and the sub-perforated plates can be arranged throughout the target area.

[0016] In one embodiment, the inkjet printing apparatus may further include: a solvent tank for storing the second solvent; and a solvent supply unit for supplying the second solvent stored in the solvent tank to the solvent supply unit.

[0017] In one embodiment, the solvent tank may include a pressure regulating unit that regulates the pressure of the second solvent stored in the solvent tank to regulate the amount of the second solvent supplied to the solvent supply unit.

[0018] In one embodiment, the inkjet printing apparatus may further include a heating section for heating the perforated plate or the solvent supply section.

[0019] In one embodiment, the inkjet printing apparatus may further include: a solvent trap disposed around the stage and the stage drive; and a cooling unit for cooling the solvent trap to a temperature lower than that of the stage, the stage drive, the substrate, and the head.

[0020] In one embodiment, the solvent trap may have a porous structure.

[0021] In one embodiment, the inkjet printing apparatus may further include: a chamber providing an internal space for accommodating the stage, the stage drive, the head, the perforated plate, and the solvent supply; and an exhaust port connected to an exhaust orifice defined in the chamber and configured to exhaust gas from the internal space of the chamber.

[0022] In one embodiment, the inkjet printing apparatus may further include a control unit that controls the operation of the exhaust port to interrupt the exhaust of the exhaust port before performing an inkjet printing process on the target substrate.

[0023] To achieve another objective of the present invention described above, a substrate processing apparatus according to an exemplary embodiment of the present invention may include: an inkjet printing apparatus for performing an inkjet printing process on a target substrate; a drying apparatus for performing a drying process on the target substrate after the inkjet printing process has ended; and a transfer apparatus for transferring the target substrate after the inkjet printing process has ended from the inkjet printing apparatus to the drying apparatus. The inkjet printing apparatus may include: a stage for placing the target substrate; a stage drive configured to horizontally move the stage; a head located above the stage and configured to eject ink comprising a first solvent toward the target substrate; a first porous plate located above the stage and overlapping the target substrate in a plane; and a first solvent supply unit for supplying a second solvent to the first porous plate, the second solvent having a vapor pressure greater than or equal to the vapor pressure of the first solvent. At least one of the drying apparatus and the transfer apparatus may include a second porous plate and a second solvent supply unit for supplying the second solvent to the second porous plate.

[0024] To achieve another objective of the present invention described above, an inkjet printing method according to an exemplary embodiment of the present invention may include: providing a second solvent to a porous plate overlapping a target substrate on a plane, the second solvent having a vapor pressure greater than or equal to the vapor pressure of a first solvent included in the ink stored in the head; and ejecting the ink from the head toward the target substrate while horizontally moving a stage on which the target substrate is disposed.

[0025] In one embodiment, the second solvent provided to the porous plate can increase the vapor pressure around the first solvent of the ink ejected onto the target substrate, thereby suppressing the evaporation of the first solvent.

[0026] In one embodiment, on a plane, the entire area where the object substrate is located, which moves horizontally during an inkjet printing process for the object substrate, is defined as the object region, and the perforated plate may be arranged to overlap with the entire object region.

[0027] In one embodiment, the inkjet printing method may further include the steps of heating the perforated plate or providing the second solvent to the perforated plate via a solvent supply section.

[0028] In one embodiment, the inkjet printing method may further include the step of cooling a solvent trap disposed around the stage to a temperature lower than the temperature of the stage, the temperature of the target substrate, and the temperature of the head.

[0029] In one embodiment, the inkjet printing method may further include a step of interrupting gas venting from a chamber that provides internal space for accommodating the stage, the head, the perforated plate, and the solvent supply unit before the step of ejecting the ink.

[0030] To achieve another objective of the present invention described above, an electronic device according to an exemplary embodiment of the present invention may include: a display device for displaying an image, and including a substrate and a pattern disposed on the substrate and formed by an inkjet printing apparatus; and a processor for transmitting image data signals and inputting control signals to the display device. The inkjet printing apparatus may include: a stage for placing a target substrate; a stage drive configured to horizontally move the stage; a head located above the stage and configured to eject ink comprising a first solvent toward the target substrate; a perforated plate located above the stage and overlapping the target substrate in a plane; and a solvent supply unit for supplying a second solvent to the perforated plate, the second solvent having a vapor pressure greater than or equal to the vapor pressure of the first solvent.

[0031] Beneficial effects

[0032] According to embodiments of the present invention, a pattern with uniform thickness can be formed by inkjet printing process, and the printing quality of inkjet printing apparatus can be improved.

[0033] However, the effects of the present invention are not limited to those described above, and various extensions can be made without departing from the spirit and scope of the present invention. Attached Figure Description

[0034] Figure 1 This is a schematic diagram illustrating the configuration of an inkjet printing apparatus according to one embodiment.

[0035] Figure 2 It is shown that it includes Figure 1 A three-dimensional diagram of some components of an inkjet printing device.

[0036] Figure 3 It is shown that it includes Figure 1 A plan view of the stage and perforated plate in an inkjet printing device.

[0037] Figure 4 This is a schematic diagram illustrating the configuration of an inkjet printing apparatus according to one embodiment.

[0038] Figure 5 It is shown that it includes Figure 4 A plan view of the stage and perforated plate in an inkjet printing device.

[0039] Figure 6 This is a schematic diagram illustrating the configuration of an inkjet printing apparatus according to one embodiment.

[0040] Figure 7 This is a schematic diagram illustrating the configuration of an inkjet printing apparatus according to one embodiment.

[0041] Figure 8 This is a schematic diagram illustrating a concept of a substrate processing apparatus according to one embodiment.

[0042] Figure 9 This is a plan view showing a display device according to an embodiment.

[0043] Figure 10 yes Figure 9 A cross-sectional view of the display device.

[0044] Figure 11 This is a block diagram illustrating an electronic device according to one embodiment.

[0045] Figure 12 This is a schematic diagram illustrating an electronic device according to various embodiments.

[0046] Explanation of reference numerals in the attached figures

[0047] 100: Inkjet printing equipment

[0048] 110: Chamber

[0049] 120: Taiwan

[0050] 121: Support plate

[0051] 122: Taiwan Drive Department

[0052] 130: Head

[0053] 141: Perforated Plate

[0054] 142: Solvent Supply Department

[0055] 151: Solvent Tank

[0056] 152: Solvent Supply Department

[0057] 160: Exhaust port

[0058] 170: Heating section

[0059] 181: Solvent trap

[0060] 182: Cooling section

[0061] 190: Control Department

[0062] 200: Object substrate Detailed Implementation

[0063] The specific structural and functional descriptions of the embodiments of the invention disclosed herein are illustrative only for the purpose of describing the embodiments of the invention, and the embodiments of the invention may be implemented in various forms and should not be construed as limited to the embodiments described herein.

[0064] This invention can be modified in various ways and can have various forms, and specific embodiments will be illustrated in the accompanying drawings and described in detail herein. However, it should be understood that this is not intended to limit the invention to the specific disclosed forms, but rather to include all modifications, equivalents, and substitutions included within the spirit and scope of the invention.

[0065] The terms "first," "second," etc., can be used to describe various constituent elements, but the constituent elements should not be limited by the terms. The terms can be used to distinguish one constituent element from another. For example, without departing from the scope of the invention, a first constituent element can be named a second constituent element, and similarly, a second constituent element can be named a first constituent element.

[0066] It should be understood that when referring to a constituent element as "connected" to another constituent element, it can mean a direct connection or direct link to the other constituent element, but other constituent elements may also exist in between. Other expressions describing the relationship between constituent elements, such as "between" or "adjacent to," should also be interpreted in the same way.

[0067] The terminology used in this application is for describing specific embodiments only and is not intended to limit the invention. Unless the context clearly indicates otherwise, singular expressions include plural expressions. It should be understood that in this application, terms such as "comprising" or "having" are intended to specify the presence of stated features, numbers, steps, operations, constituent elements, components, or combinations thereof, but do not preclude the possibility of the presence or addition of one or more other features or numbers, steps, operations, constituent elements, components, or combinations thereof.

[0068] The terms “below,” “under,” “below,” “below,” “above,” “on the upper side,” “above,” “on the upper side,” “above,” and “on top” are used to describe the relationships between the constituent elements shown in the accompanying drawings. These terms are relative concepts and are described based on the directions indicated in the drawings.

[0069] Unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. Terms, such as those defined in common dictionaries, should be interpreted as having the same meaning as they have in the context of the relevant art, and are not to be interpreted in an idealized or overly formal sense unless expressly defined in this application.

[0070] In this specification, the x-axis, y-axis, and z-axis are not limited to the three axes of an orthogonal coordinate system, and can be interpreted to include their broad meaning. For example, the x-axis, y-axis, and z-axis can be orthogonal to each other, but can also refer to different directions that are not orthogonal to each other.

[0071] Hereinafter, embodiments of the present invention will be described in more detail with reference to the accompanying drawings. The same or similar reference numerals are used for the same constituent elements in the drawings, and repeated descriptions of the same constituent elements will be omitted or simplified.

[0072] Figure 1 This is a schematic diagram illustrating the configuration of an inkjet printing apparatus according to one embodiment. Figure 2 It is shown that it includes Figure 1 A three-dimensional diagram of some components of an inkjet printing device. Figure 3 It is shown that it includes Figure 1 A plan view of the stage and perforated plate in an inkjet printing device.

[0073] Reference Figures 1 to 3 In one embodiment, the inkjet printing apparatus 100 may include a chamber 110, a stage 120, a support plate 121, a stage drive unit 122, a head 130, a perforated plate 141, a solvent supply unit 142, a solvent tank 151, a solvent supply unit 152, an exhaust port 160, and a control unit 190.

[0074] In the inkjet printing apparatus 100, an inkjet printing process can be performed on a target substrate 200. The inkjet printing apparatus 100 can be used to eject ink onto the target substrate 200 to form various patterns. Here, the target substrate 200 can be a structure on various types of substrates such as glass substrates, plastic substrates, and semiconductor wafers, on which thin films and / or patterns formed of various substances such as metallic substances, insulating substances, and semiconductor substances are formed. For example, the target substrate 200 can be a configuration for manufacturing flat panel display devices such as organic light-emitting display devices and liquid crystal display devices, but this is exemplary, and the present invention is not limited thereto. For example, the inkjet printing apparatus 100 can be used to form the organic light-emitting layer of an organic light-emitting display device (e.g., Figure 10 (The organic light-emitting layer EML is an example, but this is exemplary, and the invention is not limited thereto.)

[0075] The chamber 110 provides an internal space that accommodates the stage 120, support plate 121, stage drive unit 122, head 130, perforated plate 141, and solvent supply unit 142. The chamber 110 can isolate this internal space from the outside.

[0076] In one embodiment, the chamber 110 may include an upper wall 110-U, a lower wall 110-B, and a side wall 110-S. The upper wall 110-U may be spaced apart from the lower wall 110-B in the upward direction (+z direction). The side wall 110-S may connect the upper wall 110-U and the lower wall 110-B. The internal space may be defined by the upper wall 110-U, the lower wall 110-B, and the side wall 110-S.

[0077] Stage 120 may be disposed on the lower side of the interior space of chamber 110. Object substrate 200 may be disposed on stage 120. Stage 120 may include a mounting surface for the object substrate 200. For example, stage 120 may be configured to fix the object substrate 200 using vacuum adsorption or electrostatic force, but the invention is not limited thereto.

[0078] Support plate 121 can support stage 120 below (in the -z direction). Stage drive unit 122, configured to move stage 120 horizontally and object substrate 200 disposed on stage 120, can be arranged on support plate 121. In one embodiment, stage drive unit 122 can reciprocate stage 120 in the ±x direction.

[0079] The head 130 can be disposed within the interior space of the chamber 110 and located above (in the +z direction) the stage 120 and the object substrate 200 disposed on the stage 120. The head 130 can eject ink toward the object substrate 200 disposed on the stage 120. The ink can be a fluid comprising a first solvent.

[0080] The head 130 may include a storage section 131 and a nozzle 132. The storage section 131 provides a space for storing ink. The nozzle 132 can eject ink received from the storage section 131 toward the target substrate 200. In one embodiment, the head 130 may also include a configuration capable of measuring the amount of ink or adjusting the ejection speed. Furthermore, although not shown in the figures, the inkjet printing apparatus 100 may also include an ink tank for storing ink and an ink supply section for supplying ink from the ink tank to the head 130.

[0081] In one embodiment, such as Figure 2As shown, the inkjet printing apparatus 100 may further include a gantry 133 and a head fixing portion 134. For example, the gantry 133 may be fixed to a support plate 121. The gantry 133 may include a vertical extension extending in the z-direction and a horizontal extension extending in the y-direction and connecting to the vertical extension. The head fixing portion 134 may be coupled to the horizontal extension of the gantry 133. The head 130 may alternatively be coupled to the head fixing portion 134.

[0082] In one embodiment, such as Figure 2 As shown, when the width of the head 130 in the y-direction is less than the width of the target substrate 200 in the y-direction, a head drive portion (not shown) configured to reciprocate the head fixing portion 134 in the ±y-direction can be arranged in the horizontal extension. In another embodiment, unlike that shown in the figures, when the width of the head 130 in the y-direction is equal to or greater than the width of the target substrate 200 in the y-direction, the head drive portion may also be omitted.

[0083] The porous plate 141 can be arranged within the interior space of the chamber 110 and can be positioned above (in the +z direction) the stage 120 and the object substrate 200 disposed on the stage 120. To increase the evaporation rate of the second solvent, which will be described later, the porous plate 141 can have a porous structure with a wide surface area. For example, the porous plate 141 can comprise porous materials such as porous ceramics or sponges.

[0084] In one embodiment, the porous plate 141 may be located above the head 130 (in the +z direction). That is, the distance in the z direction between the target substrate 200 and the porous plate 141 may be greater than the distance in the z direction between the target substrate 200 and the head 130. To reduce process errors, the head 130 may be arranged very close to the target substrate 200 (e.g., spaced apart by tens to hundreds of micrometers). Conversely, the lower surface of the porous plate 141 may be uneven, so the porous plate 141 may be arranged relatively far from the target substrate 200 (e.g., spaced apart by several millimeters).

[0085] The perforated plate 141 can overlap with the stage 120 and the target substrate 200 in a planar manner. As described above, during the inkjet printing process on the target substrate 200, the stage 120 and the target substrate 200 disposed on the stage 120 can be horizontally moved (reciprocated in the ±x direction) by the stage drive 122. Figure 3 In the plan view, stage 120a and object substrate 200a can be shown in the state where stage 120 and object substrate 200 move to their maximum extent in the -x direction, and stage 120b and object substrate 200b can be shown in the state where stage 120 and object substrate 200 move to their maximum extent in the +x direction. For example... Figure 3As shown, on a plane, the entire area where the object substrate 200, which reciprocates in the ±x direction via the stage drive 122 during an inkjet printing process targeting the object substrate 200, is located can be defined as the object region OA. That is, during the inkjet printing process (e.g., during ink ejection from the head 130), the object substrate 200 can always be located within the object region OA on a plane.

[0086] In one embodiment, such as Figure 3 As shown, the perforated plate 141 can be arranged to overlap the entire target area OA in a plane. That is, during the inkjet printing process, the perforated plate 141 can always overlap the target substrate 200 in a plane. In the plane, the area of ​​the perforated plate 141 can be larger than the area of ​​the target area OA.

[0087] The solvent supply unit 142 can be arranged on the perforated plate 141 within the internal space of the chamber 110. The solvent supply unit 142 can supply the second solvent received from the solvent tank 151 to the perforated plate 141. The solvent supply unit 142 can provide space for storing the second solvent received from the solvent tank 151.

[0088] A second solvent, supplied to the porous plate 141, can be stored in the solvent tank 151. The solvent supply unit 152 can supply the second solvent stored in the solvent tank 151 to the solvent supply unit 142. Although... Figure 1 The solvent tank 151 is shown to be arranged outside the chamber 110, but the solvent tank 151 can also be arranged inside the chamber 110. For example, the second solvent stored in the solvent tank 151 can be supplied to the perforated plate 141 by means of pumping, head difference, capillary force, etc., through the solvent supply unit 152 and the solvent supply unit 142.

[0089] The second solvent may have a vapor pressure greater than or equal to the vapor pressure of the first solvent included in the ink ejected from head 130. In one embodiment, the first solvent may be the same as the second solvent. In another embodiment, the first solvent is a different solvent from the second solvent and may be selected from volatile solvents with relatively high vapor pressures. In cases where the ink includes multiple types of first solvents, the second solvent may have a vapor pressure greater than or equal to the vapor pressure of the solvent with the highest vapor pressure among the first solvents.

[0090] The second solvent supplied to the porous plate 141 can increase the vapor pressure around the first solvent of the ink ejected from the head 130 onto the target substrate 200, thereby suppressing the evaporation of the first solvent. For example, the second solvent supplied to the porous plate 141 can evaporate at a faster rate than the first solvent of the ink ejected from the head 130 onto the target substrate 200. As the second solvent supplied to the porous plate 141 evaporates rapidly, the periphery of the porous plate 141 (e.g., the lower region of the porous plate 141 and the upper region of the target substrate 200) can be saturated with the vapor of the evaporated second solvent. Therefore, the evaporation of the first solvent of the ink ejected onto the target substrate 200 can be suppressed.

[0091] In the absence of the porous plate 141 providing the second solvent, the first solvent of the ink ejected onto the target substrate 200 may evaporate easily during the inkjet printing process. In this case, the first solvent of the ink ejected onto the target substrate 200 may evaporate unevenly. Specifically, the evaporation rate of the first solvent may be relatively low in the central portion of the target substrate 200, and relatively high in the edge regions. If the first solvent of the ink ejected onto the target substrate 200 evaporates unevenly during the inkjet printing process, the thickness of the pattern to be formed by the inkjet printing process may become uneven.

[0092] However, according to embodiments of the present invention, as the second solvent supplied to the porous plate 141 evaporates rapidly, the evaporation of the first solvent of the ink ejected onto the target substrate 200 can be suppressed during the inkjet printing process. In the drying process following the inkjet printing process, the first solvent of the ink ejected onto the target substrate 200 can evaporate uniformly. Therefore, a pattern of uniform thickness can be formed, and the printing quality of the inkjet printing apparatus 100 can be improved.

[0093] In one embodiment, the solvent tank 151 may include a pressure regulating unit that regulates the pressure of the second solvent stored in the solvent tank 151. The pressure regulating unit can regulate the pressure of the second solvent to regulate the amount of the second solvent supplied to the solvent supply unit 142 via the solvent supply unit 152. Therefore, it is possible to prevent or reduce the excessive supply of the second solvent to the solvent supply unit 142, which could cause the solvent supply unit 142 or the perforated plate 141 to droop downwards or for the second solvent to fall downwards (in the -z direction) from the perforated plate 141 in a liquid state.

[0094] In one embodiment, the exhaust port 160 may be connected to an exhaust vent EH defined at a sidewall 110-S of the chamber 110. The exhaust port 160 may be configured to exhaust gases and impurities from the interior space of the chamber 110.

[0095] If venting is performed at vent 160 during the inkjet printing process, the vapor supplied to the porous plate 141 for the evaporation of the second solvent is vented to the outside, which may not inhibit the evaporation of the first solvent of the ink ejected onto the target substrate 200. Therefore, in one embodiment, venting at vent 160 may be interrupted or the venting volume may be significantly reduced before performing the inkjet printing process on the target substrate 200.

[0096] The control unit 190 can control the operation of components included in the inkjet printing apparatus 100. For example, the control unit 190 can control the operation of the control drive unit 122, the head drive unit, and the head 130 based on the shape and size of the pattern to be formed. For example, the control unit 190 can control the operation of the pressure regulating unit of the solvent tank 151 and the exhaust port 160. For example, before performing an inkjet printing process on the target substrate 200, the control unit 190 can control the operation of the exhaust port 160, causing the exhaust from the exhaust port 160 to be interrupted or the exhaust volume to be significantly reduced.

[0097] The following section will briefly describe the use of references Figures 1 to 3 The inkjet printing method of the inkjet printing apparatus 100 described.

[0098] First, the venting from the vent 160 can be interrupted or the venting volume can be significantly reduced before ink is ejected from the head 130. Furthermore, a second solvent can be supplied to the porous plate 141. Because the second solvent has a relatively high vapor pressure and the porous plate 141 has a wide surface area and porous structure, the evaporation of the second solvent can occur actively within the porous plate 141, and the vapor from the evaporated second solvent can be vented to the outside. Therefore, the periphery of the porous plate 141 (e.g., the lower region of the porous plate 141 and the upper region of the target substrate 200) can be saturated with the vapor from the evaporated second solvent.

[0099] Next, ink can be ejected from the head 130 toward the object substrate 200 while the stage 120 on which the object substrate 200 is mounted is moved horizontally. At this time, the periphery of the perforated plate 141 (e.g., the lower region of the perforated plate 141 and the upper region of the object substrate 200) is saturated with vapor from the second solvent, thus suppressing the evaporation of the first solvent from the ink ejected onto the object substrate 200.

[0100] Once the inkjet printing process on the target substrate 200 is complete, the target substrate 200 can be moved outside the chamber 110 for subsequent processes (e.g., drying processes).

[0101] Figure 4 This is a schematic diagram illustrating the configuration of an inkjet printing apparatus according to one embodiment. Figure 5 It is shown that it includes Figure 4A plan view of the stage and perforated plate in an inkjet printing device.

[0102] Figure 4 It can correspond to Figure 1 ,and Figure 5 It can correspond to Figure 3 In the following text, with reference to Figures 1 to 3 The description focuses on the differences between the described embodiments. Figure 4 and Figure 5 Examples of implementations.

[0103] Reference Figure 4 and Figure 5 In one embodiment, the porous plate 141 may include a plurality of sub-porous plates 141a spaced apart from each other. In a plane, the plurality of sub-porous plates 141a may be arranged throughout the entire target region OA. That is, the plurality of sub-porous plates 141a may be arranged to largely overlap with the target region OA in a plane. For example, in a plane, the area of ​​each of the plurality of sub-porous plates 141a may be smaller than the area of ​​the target substrate 200.

[0104] Figure 6 This is a schematic diagram illustrating the configuration of an inkjet printing apparatus according to one embodiment.

[0105] Figure 6 It can correspond to Figure 1 In the following text, with reference to Figures 1 to 3 The description focuses on the differences between the described embodiments. Figure 6 Examples of implementations.

[0106] Reference Figure 6 In one embodiment, the inkjet printing apparatus 100 may further include a heating unit 170. The heating unit 170 may be arranged within the internal space of the chamber 110 adjacent to the perforated plate 141 and / or the solvent supply unit 142, and may heat the perforated plate 141 and / or the solvent supply unit 142. Therefore, the evaporation rate of the second solvent in the perforated plate 141 may be further increased.

[0107] Figure 7 This is a schematic diagram illustrating the configuration of an inkjet printing apparatus according to one embodiment.

[0108] Figure 7 It can correspond to Figure 1 In the following text, with reference to Figures 1 to 3 The description focuses on the differences between the described embodiments. Figure 7 Examples of implementations.

[0109] Reference Figure 7 In one embodiment, the inkjet printing apparatus 100 may further include a solvent trap 181 and a cooling unit 182.

[0110] Solvent trap 181 can be disposed within the interior space of chamber 110. In one embodiment, solvent trap 181 can be disposed around stage 120, support plate 121, and stage drive 122. In one embodiment, solvent trap 181 can also be disposed around head 130. In one embodiment, solvent trap 181 can have a porous structure with a wide surface area. For example, solvent trap 181 can comprise the same material as porous plate 141, but the invention is not limited thereto.

[0111] Cooling unit 182 can be connected to solvent trap 181 and cool solvent trap 181. Cooling unit 182 can cool solvent trap 181 to a temperature lower than the temperature of other components of the internal space of chamber 110. For example, cooling unit 182 can cool solvent trap 181 to a temperature lower than each of the temperature of stage 120, support plate 121, stage drive unit 122, and head 130. Therefore, solvent trap 181 can recover vapors of the second solvent evaporated in porous plate 141 and can prevent or reduce condensation that may occur in other components of the internal space of chamber 110 (e.g., stage 120, support plate 121, stage drive unit 122, head 130, etc.).

[0112] Figure 8 This is a schematic diagram illustrating a concept of a substrate processing apparatus according to one embodiment.

[0113] Reference Figure 8 In one embodiment, the substrate processing apparatus 1000 may include the above-mentioned references. Figures 1 to 7 The inkjet printing apparatus 100, drying apparatus 800, and conveying apparatus 900 are described.

[0114] The drying process for the object substrate 200 after the inkjet printing process has ended can be performed in the drying apparatus 800. The transfer device 900 can transfer the object substrate 200, which has completed the inkjet printing process in the inkjet printing apparatus 100, from the inkjet printing apparatus 100 to the drying apparatus 800.

[0115] In one embodiment, means for suppressing the evaporation of a first solvent of ink ejected onto the target substrate 200 prior to performing the drying process may be arranged in at least one of the drying apparatus 800 and the conveying apparatus 900.

[0116] In one embodiment, at least one of the drying chamber of the drying apparatus 800 and the conveying chamber of the conveying device 900 may be arranged with... Figure 1 The porous plate 141 and the solvent supply section 142 have substantially the same or similar configurations.

[0117] In one embodiment, with Figure 1The exhaust port 160 has a substantially identical or similar configuration and can be connected to at least one of the exhaust ports of the drying chamber and the exhaust ports of the transfer chamber.

[0118] In one embodiment, with Figure 8 The solvent trap 181 and the cooling section 182 may have substantially the same or similar configurations and may be arranged in at least one of the drying chamber and the transfer chamber.

[0119] Therefore, before performing the drying process for the target substrate 200 in the drying apparatus 800, uneven evaporation of the first solvent of the ink ejected onto the target substrate 200 in the transfer device 900 and / or the drying apparatus 800 can be suppressed.

[0120] Figure 9 This is a plan view showing a display device according to an embodiment. Figure 10 yes Figure 9 A cross-sectional view of the display device.

[0121] Figure 9 and Figure 10 The display device DD can utilize a reference Figures 1 to 7 The inkjet printing apparatus 100 described is manufactured to this purpose.

[0122] Reference Figure 9 The display device DD may include a display area DA and a non-display area NDA. The display area DA can display an image. Multiple pixels PX can be arranged in the display area DA. The light emitted by each pixel PX can be combined to generate an image.

[0123] Each pixel PX may include pixel circuitry and a light-emitting element (ED) electrically connected to the pixel circuitry. The pixel circuitry may include at least one transistor TR (e.g., a thin-film transistor) and at least one capacitor (not shown). The light-emitting element (ED) may emit light based on a drive current supplied from the pixel circuitry. For example, the light-emitting element (ED) may emit any of red, green, and blue light, but this is exemplary and the invention is not limited thereto. The light-emitting element (ED) may include organic light-emitting elements, inorganic light-emitting elements, quantum dot light-emitting elements, or micro light-emitting elements, etc. In the following, examples of light-emitting elements (EDs) as organic light-emitting elements will be described.

[0124] Figure 10 It can be shown Figure 9An example of a cross-section of the display area DA of a display device DD.

[0125] Reference Figure 10 In one embodiment, the display device DD may include a substrate SUB, a buffer layer BFL, a transistor TR, a first insulating layer IL1, a second insulating layer IL2, a third insulating layer IL3, a pixel defining layer PDL, a light-emitting element ED, and an encapsulation layer ENC.

[0126] A substrate SUB can form the base of a display device (DD). The substrate SUB can be an insulating substrate formed of transparent or opaque materials. The substrate SUB can be flexible or rigid. The substrate SUB can have a single-layer structure or a multi-layer structure comprising multiple stacked layers of different materials.

[0127] A buffer layer (BFL) can be disposed on a substrate (SUB). The buffer layer (BFL) prevents impurities such as oxygen and moisture from diffusing through the substrate (SUB) to the surface above it. The buffer layer (BFL) can comprise inorganic insulating materials such as silicon compounds or metal oxides. For example, the buffer layer (BFL) can comprise silicon oxide (SiO2). x ), silicon nitride (SiN) x ), silicon oxynitride (SiO) x N y ), aluminum oxide (AlO) x ), aluminum nitride (AlN) x ), tantalum oxide (TaO) x ), hafnium oxide (HfO) x ), zirconium oxide (ZrO x Titanium oxide (TiO) x These can be used individually or in combination. The buffer layer BFL can have a single-layer structure or a multi-layer structure including multiple insulating layers.

[0128] The transistor TR can be disposed on the buffer layer BFL. The transistor TR may include an active layer ACT, a gate electrode GE, a first contact electrode SE, and a second contact electrode DE.

[0129] The active layer ACT can be disposed on the buffer layer BFL. The active layer ACT can include oxide semiconductors, silicon semiconductors, organic semiconductors, etc. For example, oxide semiconductors can include oxides of at least one of indium (In), gallium (Ga), tin (Sn), zirconium (Zr), vanadium (V), hafnium (Hf), cadmium (Cd), germanium (Ge), chromium (Cr), titanium (Ti), and zinc (Zn). Silicon semiconductors can include amorphous silicon, polycrystalline silicon, etc. The active layer ACT can include a first contact region S, a second contact region D, and a channel region CH between the first contact region S and the second contact region D. The first contact region S and the second contact region D can have higher conductivity than the channel region CH.

[0130] The first insulating layer IL1 can be disposed on the active layer ACT. The first insulating layer IL1 can cover the active layer ACT on the buffer layer BFL. The first insulating layer IL1 may include an inorganic insulating material.

[0131] The gate electrode GE can be disposed on the first insulating layer IL1. The gate electrode GE can overlap with the channel region CH of the active layer ACT. The gate electrode GE can include conductive materials such as metals, alloys, conductive metal nitrides, conductive metal oxides, and transparent conductive materials. For example, the gate electrode GE can include gold (Au), silver (Ag), aluminum (Al), platinum (Pt), nickel (Ni), titanium (Ti), palladium (Pd), magnesium (Mg), calcium (Ca), lithium (Li), chromium (Cr), tantalum (Ta), tungsten (W), copper (Cu), molybdenum (Mo), scandium (Sc), neodymium (Nd), iridium (Ir), aluminum-containing alloys, silver-containing alloys, copper-containing alloys, molybdenum-containing alloys, and aluminum nitrides (AlN). x ), tungsten nitride (WN) x ), titanium nitride (TiN) x ), chromium nitride (CrN) x ), Tantalum nitride (TaN) x ), zinc oxide (ZnO) x Indium tin oxide (ITO), tin oxide (SnO) x Indium oxide (InO) x Gallium oxide (GaO) x Indium zinc oxide (IZO), etc. These can be used individually or in combination. The gate electrode (GE) can have a single-layer structure or a multi-layer structure including multiple conductive layers.

[0132] The second insulating layer IL2 can be disposed on the gate electrode GE. The second insulating layer IL2 can cover the gate electrode GE on the first insulating layer IL1. The second insulating layer IL2 may include an inorganic insulating material.

[0133] The first contact electrode SE and the second contact electrode DE can be disposed on the second insulating layer IL2. The first contact electrode SE and the second contact electrode DE can be connected to the first contact region S and the second contact region D of the active layer ACT, respectively. The first contact electrode SE and the second contact electrode DE can include conductive materials.

[0134] The third insulating layer IL3 can be disposed on the first contact electrode SE and the second contact electrode DE. The third insulating layer IL3 can include organic insulating materials. For example, the third insulating layer IL3 can include photoresist, polyacryl-based resin, polyimide-based resin, polyamide-based resin, siloxane-based resin, acrylic-based resin, epoxy-based resin, etc. These can be used alone or in combination with each other.

[0135] The light-emitting element ED can be disposed on the third insulating layer IL3. The light-emitting element ED may include a first electrode E1, an organic light-emitting layer EML, and a second electrode E2.

[0136] The first electrode E1 can be disposed on the third insulating layer IL3. The first electrode E1 may include a conductive material. The first electrode E1 can be connected to the second contact electrode DE through a contact hole formed in the third insulating layer IL3. Therefore, the first electrode E1 can be electrically connected to the transistor TR. For example, the first electrode E1 can be used as the anode of the light-emitting element ED.

[0137] A pixel defining layer (PDL) may be disposed on the first electrode E1. The PDL may cover the peripheral portion of the first electrode E1 and may define a pixel opening that exposes the central portion of the first electrode E1. The light-emitting area may be defined by this pixel opening. The PDL may include an organic insulating material. In one embodiment, the PDL may further include an inorganic or organic material containing a black light-shielding material.

[0138] An organic light-emitting layer (EML) can be disposed on the first electrode E1 and the pixel defining layer (PDL). In one embodiment, the EML can be disposed within a pixel opening of the PDL. The EML may include an organic light-emitting material.

[0139] In one embodiment, the organic light-emitting material may include low-molecular-weight organic compounds or high-molecular-weight organic compounds. Examples of low-molecular-weight organic compounds include copper phthalocyanine, N,N'-diphenylbenzidine, and tris-(8-hydroxyquinoline)aluminum. Examples of high-molecular-weight organic compounds include poly(3,4-ethylenedioxythiophene), polyaniline, polyphenylenevinylene, and polyfluorene, but the invention is not limited thereto. These can be used alone or in combination with each other.

[0140] The second electrode E2 can be disposed on the organic light-emitting layer EML. The second electrode E2 may include a conductive material. For example, the second electrode E2 can be used as the cathode of the light-emitting element ED.

[0141] In one embodiment, the light-emitting element ED may further include a functional layer disposed between the first electrode E1 and the organic light-emitting layer EML and / or between the organic light-emitting layer EML and the second electrode E2. The functional layer may include a hole injection layer, a hole transport layer, an electron transport layer, an electron injection layer, etc.

[0142] The encapsulation layer ENC can be disposed on the second electrode E2. The encapsulation layer ENC may include at least one inorganic encapsulation layer and at least one organic encapsulation layer. In one embodiment, the encapsulation layer ENC may include a first inorganic encapsulation layer IEL1 disposed on the second electrode E2, an organic encapsulation layer OEL disposed on the first inorganic encapsulation layer IEL1, and a second inorganic encapsulation layer IEL2 disposed on the organic encapsulation layer OEL.

[0143] Some of the patterns included in the display device DD can be referenced. Figures 1 to 7 The inkjet printing apparatus 100 described is used to form the image. For example, an organic light-emitting layer (EML) can be formed using a reference. Figures 1 to 7 The inkjet printing apparatus 100 described herein is used to form the pattern. However, the invention is not limited thereto, and other patterns arranged on the substrate SUB can also be formed using the reference. Figures 1 to 7 The inkjet printing apparatus 100 described is used to form the inkjet printing device.

[0144] Figure 11 This is a block diagram illustrating an electronic device according to one embodiment.

[0145] Reference Figure 11An electronic device 10 according to an embodiment of the present invention may include a display module 11, a processor 12, a memory 13 and a power module 14.

[0146] Reference Figure 9 and Figure 10 The described display device DD can be applied to various electronic devices 10. Electronic devices 10 may include the display device DD, and may also include modules or devices with other additional functions besides the display device DD.

[0147] The processor 12 (e.g., a host processor) may include at least one of a central processing unit (CPU), an application processor (AP), a graphics processing unit (GPU), a communication processor (CP), an image signal processor (ISP), and a controller.

[0148] The memory 13 may store the data information required for the operation of the processor 12 or the display module 11. If the processor 12 runs the application stored in the memory 13, the input image data and / or input control signals are transmitted to the display module 11, which processes the received signals and can then output image information through the display screen.

[0149] The power module 14 may include a power supply module such as a power adapter or battery device and a power conversion module that converts the power supplied by the power supply module to generate the power required for the operation of the electronic device 10.

[0150] At least one of the various configurations of the aforementioned electronic device 10 may be included in the reference Figure 9 and Figure 10 The display device DD is described. Furthermore, some of the individual modules functionally included within a single module may be included within the display device DD, while others may be provided separately from the display device DD. For example, the display device DD includes a display module 11, and the processor 12, memory 13, and power module 14 may be provided as other devices within the electronic device 10, rather than the display device DD.

[0151] Figure 12 This is a schematic diagram illustrating an electronic device according to various embodiments.

[0152] Reference Figure 12 Reference was applied Figure 9 and Figure 10The various electronic devices 10 described in the display device DD can include not only image display electronic devices such as smartphones 10_1a, tablet PCs 10_1b, laptop computers 10_1c, TVs 10_1d, and desktop monitors 10_1e, but also wearable electronic devices including display modules such as smart glasses 10_2a, head-mounted displays 10_2b, and smartwatches 10_2c, and vehicle electronic devices 10_3 including display modules such as car dashboards, central dashboards, CIDs (Center Information Displays) arranged on dashboards, and room mirror displays.

[0153] Although the invention has been described above with reference to exemplary embodiments thereof, those skilled in the art will understand that various modifications and alterations may be made to the invention without departing from the spirit and scope of the invention as set forth in the appended claims.

[0154] This invention can be applied to manufacturing apparatuses for various display devices. For example, it can be applied to manufacturing apparatuses for various display devices such as vehicle display devices, marine display devices, aircraft display devices, portable communication devices, display devices or information transmission display devices, and medical display devices.

Claims

1. An inkjet printing apparatus, comprising: A platform for mounting the object substrate; A stage drive unit is configured to move the stage horizontally; The head is located above the stage and configured to eject ink comprising a first solvent toward the object substrate; A porous plate is located above the stage and overlaps the object substrate in a plane; as well as A solvent supply unit provides a second solvent to the porous plate, the second solvent having a vapor pressure greater than or equal to the vapor pressure of the first solvent.

2. The inkjet printing apparatus according to claim 1, wherein, On a plane, The entire area where the target substrate is located, which is horizontally moved by the stage drive unit during the inkjet printing process on the target substrate, is defined as the target area. The perforated plate is arranged to overlap with the entire object area.

3. The inkjet printing apparatus according to claim 1, wherein, The porous plate comprises a plurality of sub-porous plates spaced apart from each other. On a plane, the entire area where the target substrate is horizontally moved by the stage drive unit during an inkjet printing process on the target substrate is defined as the target region. On a plane, the sub-perforated plates are arranged throughout the entire object area.

4. The inkjet printing apparatus according to claim 1, further comprising: Solvent tank, for storing the second solvent; as well as The solvent supply unit supplies the second solvent stored in the solvent tank to the solvent supply unit. The solvent tank includes a pressure regulating unit that regulates the pressure of the second solvent stored in the solvent tank to regulate the amount of the second solvent supplied to the solvent supply unit.

5. The inkjet printing apparatus according to claim 1, further comprising: The heating section heats the porous plate or the solvent supply section.

6. The inkjet printing apparatus according to claim 1, further comprising: A solvent trap is arranged around the stage and the stage drive unit; as well as The cooling unit cools the solvent trap to a temperature lower than the temperature of the stage, the temperature of the stage drive, the temperature of the target substrate, and the temperature of the head.

7. The inkjet printing apparatus according to claim 1, further comprising: A chamber provides an internal space to accommodate the stage, the stage drive unit, the head, the porous plate, and the solvent supply unit; An exhaust port is connected to an exhaust hole defined in the chamber and configured to exhaust gas from the interior space of the chamber; as well as The control unit controls the operation of the exhaust port to interrupt the exhaust of the exhaust port before performing the inkjet printing process on the target substrate.

8. A substrate processing apparatus, comprising: An inkjet printing apparatus for performing an inkjet printing process on a target substrate, and includes: A platform for mounting the object substrate; A stage drive unit is configured to move the stage horizontally; The head is located above the stage and configured to eject ink comprising a first solvent toward the object substrate; A first porous plate, located above the stage, overlaps the object substrate in a plane; and A first solvent supply unit supplies a second solvent to the first porous plate, the second solvent having a vapor pressure greater than or equal to the vapor pressure of the first solvent; A drying apparatus that performs a drying process on the target substrate after the inkjet printing process has concluded; and The conveying device transfers the substrate, after the inkjet printing process has ended, from the inkjet printing apparatus to the drying apparatus. At least one of the drying apparatus and the conveying apparatus includes a second porous plate and a second solvent supply unit that supplies the second solvent to the second porous plate.

9. An inkjet printing method, comprising: The step of providing a second solvent to a porous plate that overlaps with a substrate on a plane, wherein the second solvent has a vapor pressure greater than or equal to the vapor pressure of the first solvent included in the ink stored in the head; as well as The step of ejecting ink from the head toward the object substrate while the stage on which the object substrate is placed is moved horizontally.

10. An electronic device comprising: A display device for displaying images, and includes a substrate and a pattern disposed on the substrate and formed by an inkjet printing device; as well as The processor transmits image data signals and input control signals to the display device. The inkjet printing apparatus includes: A platform for mounting the object substrate; A stage drive unit is configured to move the stage horizontally; The head is located above the stage and configured to eject ink comprising a first solvent toward the object substrate; A porous plate, located above the stage, and overlapping the object substrate in a plane; and A solvent supply unit provides a second solvent to the porous plate, the second solvent having a vapor pressure greater than or equal to the vapor pressure of the first solvent.

Images