A vacuum laser heating apparatus

CN122833238APending Publication Date: 2026-09-29SHENZHEN RAYSEES TECHNOLOGY CO LTD +1
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Patent Information

Application Number
CN202610634155.3
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-05-09
Publication Date
2026-09-29

AI Technical Summary

Technical Problem

[0003]现有激光加热设备多在常压开放环境下进行加工,行业内通常采用常规密闭腔体减少外界干扰以控制加工环境,但是该方式无法有效降低环境湿度,被加热工件仍易出现氧化现象;部分设备虽具备基础压力调节功能,却无法根据不同加热工况实现压力的灵活匹配,导致工艺适用范围受限,加工质量难以稳定保障,为此提出一种真空激光加热设备

Benefits of technology

本发明通过真空泵对真空腔体抽真空降低环境湿度、真空腔体通入惰性气体形成保护,实现被加热物的双重防氧化防护,通过压力传感器检测腔体压力、真空调压阀配合工况调节压力至预设值,实现真空环境压力的灵活适配,具有提升加工质量、扩大工艺适用范围、保障加热过程稳定的好处,解决了传统激光加热设备环境湿度不可控易使被加热物氧化、压力无法适配不同工况、工艺窗口窄、加工质量难以保证的问题。

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Abstract

The application relates to the technical field of laser heating, and discloses a vacuum laser heating device, which comprises a vacuum cavity, a laser module, a vacuum pump, a pressure sensor and a vacuum pressure regulating valve; the laser module is arranged in the vacuum cavity or at a heating station corresponding to the vacuum cavity, is used for emitting laser to a heated object in the vacuum cavity to realize heating; the vacuum pump is communicated with the vacuum cavity and is used for performing vacuumizing treatment on the vacuum cavity to reduce the environmental humidity in the vacuum cavity; the pressure sensor is arranged on the vacuum cavity and is used for detecting the pressure value in the vacuum cavity in real time; the vacuum pressure regulating valve is communicated with the vacuum cavity and is used for adjusting the pressure in the vacuum cavity to a preset value according to the pressure value detected by the pressure sensor and in combination with different laser heating conditions. The application realizes double anti-oxidation of vacuum dehumidification and inert gas, realizes self-adaptive pressure adjustment, improves processing quality, widens a process window and guarantees heating stability.
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Description

Technical Field

[0001] This invention relates to the field of laser heating technology, specifically to a vacuum laser heating device. Background Technology

[0002] Laser heating technology has been widely used in the field of precision material processing. Relying on the characteristics of concentrated laser energy and high heating efficiency, it has become the mainstream technology for high-precision workpiece heating treatment. The environmental adaptability and processing stability of related heating equipment directly affect the quality of finished products.

[0003] Existing laser heating equipment is mostly used for processing in an open environment under normal pressure. The industry usually uses conventional sealed cavities to reduce external interference and control the processing environment. However, this method cannot effectively reduce the ambient humidity, and the heated workpiece is still prone to oxidation. Although some equipment has basic pressure regulation function, it cannot flexibly match the pressure according to different heating conditions, which limits the scope of application of the process and makes it difficult to guarantee the stable processing quality. Therefore, a vacuum laser heating equipment is proposed. Summary of the Invention

[0004] In view of the shortcomings of the prior art, the present invention provides a vacuum laser heating device to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a vacuum laser heating device, comprising: Vacuum chamber, laser module, vacuum pump, pressure sensor and vacuum pressure valve; The laser module is installed inside the vacuum cavity or at the corresponding heating station of the vacuum cavity, and is used to emit laser light to the object to be heated inside the vacuum cavity to achieve heating. The vacuum pump is connected to the vacuum chamber and is used to evacuate the vacuum chamber, reduce the humidity inside the vacuum chamber, and prevent the heated object from oxidizing during the laser heating process. The pressure sensor is installed on the vacuum chamber and is used to detect the pressure value inside the vacuum chamber in real time. The vacuum pressure valve is connected to the vacuum chamber and is used to adjust the pressure in the vacuum chamber to a preset value based on the pressure value detected by the pressure sensor and in combination with different laser heating conditions, thereby expanding the process window of laser heating. The vacuum chamber is also used to introduce inert gas, which, together with the vacuum environment, forms an inert gas protection for the heated object, further preventing oxidation. At the same time, the vacuum chamber can block the laser, achieving safety protection for operators and the surrounding equipment. It can inhibit the oxidation and deterioration of the heated object from the source, stabilize the quality of laser heating processing, meet the pressure requirements of diverse heating conditions, broaden the scope of application of the process, and make the laser heating process more stable and reliable.

[0006] Preferably, the laser module is an infrared laser module, which is adapted to the heating conditions inside the vacuum cavity. It stably outputs laser light to heat the object being heated. The infrared laser module is fixed above the workstation inside the vacuum cavity and outputs infrared laser light. It matches the low temperature and low humidity environment of the vacuum cavity, and the output power is stable. It is optimized for the absorption characteristics of the object being heated to ensure heating uniformity and processing consistency. The infrared laser module is adapted to the vacuum cavity environment. The infrared laser light is efficiently absorbed by most materials, resulting in high heating efficiency and a small heat-affected zone.

[0007] Preferably, the laser module includes a laser chip, which serves as the core component for laser emission and provides a laser source for heating operations within the vacuum cavity. The laser chip is encapsulated inside the infrared laser module and is the core light-emitting unit. After being powered on, it generates laser light, which is then collimated and shaped before being output, providing a stable and controllable light source for heating within the vacuum cavity. It is suitable for long-term operation under vacuum conditions. As the core of the infrared laser module, the laser chip has high luminous efficiency, small size, and long lifespan, making it suitable for long-term operation within the vacuum cavity.

[0008] Preferably, the inert gas is an inert gas that does not react with the heated object. It is introduced through the air intake structure of the vacuum chamber and works in conjunction with the vacuum environment to achieve oxidation protection. The vacuum chamber has a preset independent air intake structure. The inert gas is introduced at a constant speed through the air intake structure, forming a protective atmosphere on the basis of vacuum. It does not react with the workpiece to cause oxidation or corrosion and maintains a stable protective state throughout the process. The inert gas is introduced through the air intake structure of the vacuum chamber and works in conjunction with the vacuum to form a double protection, isolating oxygen and water vapor and completely avoiding high-temperature oxidation.

[0009] Preferably, the vacuum pump is an adjustable speed vacuum pump, which, together with the vacuum pressure regulating valve, achieves precise adjustment of the vacuum chamber pressure. The speed of the adjustable speed vacuum pump is adjusted by the control unit, and is linked with the opening of the vacuum pressure regulating valve to finely adjust the pumping rate according to the target pressure, so as to achieve stable and fluctuating precise control of the vacuum chamber pressure. The adjustable speed vacuum pump, together with the vacuum pressure regulating valve, achieves precise adjustment of the vacuum chamber pressure.

[0010] Preferably, the pressure sensor is a real-time digital display pressure sensor. The real-time digital display pressure sensor feeds back real-time pressure data in the vacuum chamber. The real-time digital display pressure sensor converts the chamber pressure into a digital signal for direct display. The data is synchronized in real time, which is convenient for manual observation and automatic control. The pressure feedback is delayed and reliable. The real-time digital display pressure sensor intuitively displays the vacuum chamber pressure, and the data is accurate in real time, which is convenient for monitoring and adjustment.

[0011] Preferably, the vacuum chamber pressure regulating valve is an electric regulating valve that automatically adjusts the pressure of the vacuum chamber according to a preset pressure value. The electric regulating valve type vacuum chamber pressure regulating valve receives the pressure signal and automatically adjusts the opening degree, and performs closed-loop regulation according to the preset pressure value. It does not require manual operation, has a fast pressure response and high control accuracy. The electric regulating valve type vacuum chamber pressure regulating valve can automatically adjust the vacuum chamber pressure without manual intervention, has a fast response and high accuracy, and stably maintains the pressure according to the preset value.

[0012] Preferably, the vacuum chamber is a sealed chamber, and its sealing performance meets the requirements for use in a vacuum environment and inert gas protection. The sealed vacuum chamber adopts a combination of flange and sealing ring, with no leakage at the assembly surface. It can maintain the set vacuum level and inert gas concentration, meet the requirements for long-term vacuum pressure maintenance and protective atmosphere. The sealed vacuum chamber has reliable sealing and can maintain the vacuum level and inert gas concentration for a long time, avoiding leakage that could lead to oxidation or pressure fluctuations.

[0013] Preferably, the vacuum pump, pressure sensor, and vacuum pressure valve form a linked control structure to automatically regulate the vacuum chamber pressure in a closed loop. The adjustable speed vacuum pump, real-time digital display pressure sensor, and vacuum pressure valve are connected to the same control unit to form a closed loop, which corrects the pressure in real time and automatically maintains it within a preset range. This adapts to continuous processing under multiple working conditions. The adjustable speed vacuum pump, real-time digital display pressure sensor, and vacuum pressure valve form an automated closed-loop control system to monitor and quickly correct the vacuum chamber pressure in real time, keeping it within the optimal range.

[0014] Preferably, the vacuum chamber is equipped with a sealed door for taking out and putting in the heated object. The vacuum chamber is equipped with a sealed door with a hinge and locking sealing structure, which allows for smooth opening and closing and no leakage after closing. This facilitates the taking out and putting in the heated object without damaging the vacuum and protective atmosphere of the chamber. The sealed door of the vacuum chamber facilitates the taking out and putting in the heated object, and the seal is reliable after closing without damaging the vacuum and protective atmosphere.

[0015] Compared with the prior art, the present invention provides a vacuum laser heating device with the following advantages: This invention utilizes a vacuum pump to evacuate the vacuum chamber, reducing ambient humidity, and introduces an inert gas into the chamber for protection, achieving dual anti-oxidation protection for the heated object. A pressure sensor detects the chamber pressure, and a vacuum pressure valve adjusts the pressure to a preset value according to the operating conditions, enabling flexible adaptation to the vacuum environment pressure. This invention offers advantages such as improved processing quality, expanded process applicability, and stable heating process. It solves the problems of uncontrollable ambient humidity leading to oxidation of the heated object, inability to adapt pressure to different operating conditions, narrow process window, and difficulty in guaranteeing processing quality in traditional laser heating equipment. Attached Figure Description

[0016] Figure 1 This is a perspective view of the vacuum cavity structure of the present invention; Figure 2 This is a perspective view of the overall structure of the present invention; Figure 3 This is a system schematic diagram of the present invention.

[0017] In the diagram: 1. Vacuum chamber; 2. Laser module; 3. Vacuum pump; 4. Pressure sensor; 5. Vacuum pressure valve; 6. Sealing door. Detailed Implementation

[0018] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0019] This invention provides a technical solution, a vacuum laser heating device. Please refer to [link / reference]. Figure 1 , Figure 2 and Figure 3The system includes: a vacuum chamber 1, a laser module 2, a vacuum pump 3, a pressure sensor 4, and a vacuum pressure regulating valve 5. The laser module 2 is located inside the vacuum chamber 1 or at a corresponding heating station within the vacuum chamber 1, used to emit laser light to the object being heated within the vacuum chamber 1. The vacuum pump 3 is connected to the vacuum chamber 1 and is used to evacuate the vacuum chamber 1, reducing the humidity inside and preventing oxidation of the object being heated during laser heating. The pressure sensor 4 is located on the vacuum chamber 1 and is used to detect the pressure value inside the vacuum chamber 1 in real time. The vacuum pressure regulating valve 5 is connected to the vacuum chamber 1 and is used to adjust the pressure inside the vacuum chamber 1 to a preset value based on the pressure value detected by the pressure sensor 4 and different laser heating conditions, thereby expanding the laser heating process window. The vacuum chamber 1 is also used to introduce inert gas to cooperate with the vacuum... The environment forms an inert gas barrier around the heated material, further preventing oxidation. Simultaneously, the vacuum chamber 1 blocks the laser, ensuring safety for operators and the surrounding equipment. Vacuum chamber 1 is a sealed, pressure-bearing structure. The laser module 2 is aligned with the heating station within the chamber. A vacuum pump 3, connected to the chamber via piping, evacuates the gas. A pressure sensor 4 probe extends into the chamber to collect pressure. A vacuum pressure valve 5 is connected in series in the gas path. Inert gas is introduced through a pre-set interface. Vacuum chamber 1 is made of opaque, high-strength material, completely isolating the laser and achieving integrated vacuum anti-oxidation, pressure adaptation, and safety protection. Through the coordinated operation of vacuum chamber 1, laser module 2, vacuum pump 3, pressure sensor 4, and vacuum pressure valve 5, vacuum pump 3 reduces humidity, inhibiting oxidation at its source. The inert gas, combined with the vacuum, further enhances protection, significantly improving processing quality. Pressure sensor 4 and vacuum pressure valve 5 can be adjusted according to operating conditions, greatly expanding the process window. The vacuum chamber 1 blocks the laser, protecting personnel and surrounding equipment, and integrates anti-oxidation, working condition adaptation and safety protection, providing a reliable solution for laser heating design and application, and improving yield and safety of use.

[0020] Please see Figure 1 and Figure 2 Laser module 2 is an infrared laser module, adapted to the heating conditions within the vacuum chamber 1. It stably outputs laser light to heat the object being heated. Fixed above the workstation within the vacuum chamber 1, the infrared laser module 2 outputs infrared laser light, matching the low-temperature, low-humidity vacuum environment. Its output power is stable and optimized for the absorption characteristics of the heated object, ensuring heating uniformity and processing consistency. The infrared laser module 2 is compatible with the vacuum chamber 1 environment; infrared laser light is efficiently absorbed by most materials, resulting in high heating efficiency and a small heat-affected zone. Its stable output under vacuum and low-humidity conditions avoids interference from fluctuations under normal pressure, ensuring uniform heating. The high compatibility of the infrared laser module 2 with the vacuum environment improves processing accuracy and surface quality, reduces defects, and is suitable for heating high-precision materials, broadening the equipment's application scenarios and enhancing process stability and reliability.

[0021] Please see Figure 1 and Figure 2 Laser module 2 includes a laser chip, which serves as the core component for laser emission, providing the laser source for heating operations within the vacuum chamber 1. Encapsulated within the infrared laser module 2, the laser chip is the core light-emitting unit. Upon power-up, it generates laser light, which is then collimated and shaped before being output, providing a stable and controllable light source for heating within the vacuum chamber 1. Suitable for long-term operation under vacuum conditions, the laser chip, as the core of the infrared laser module 2, boasts high luminous efficiency, small size, and long lifespan, making it ideal for continuous operation within the vacuum chamber 1. Its stable output ensures controllable laser energy, guaranteeing consistent heating temperature and rate, and improving processing repeatability. The high integration of the laser chip simplifies the module structure, reduces the risk of failure, ensures stable performance in a vacuum environment, prevents oxidation damage, and continuously provides a reliable laser source, guaranteeing stable equipment operation and processing quality.

[0022] Please see Figure 1 and Figure 2 The inert gas is a non-reactive gas that does not react with the heated material. It is introduced through the air intake structure of vacuum chamber 1, working in conjunction with the vacuum environment to achieve oxidation protection. Vacuum chamber 1 has a pre-set independent air intake structure, through which the inert gas is introduced at a uniform rate, forming a protective atmosphere on top of the vacuum. This prevents oxidation and corrosion reactions with the workpiece, maintaining a stable protective state throughout the process. The inert gas, introduced through the air intake structure of vacuum chamber 1, forms a double protection with the vacuum, isolating oxygen and moisture, and completely avoiding high-temperature oxidation. The inert gas does not react with the workpiece, does not contaminate the material, and maintains stable composition and performance. The uniform gas supply and stable protective atmosphere of the air intake structure make it suitable for easily oxidized metals and precision components, significantly improving surface quality and yield, solving the problem of oxidation caused by traditional heating, and expanding the application range of high-precision machining.

[0023] Please see Figure 1 and Figure 2 Vacuum pump 3 is an adjustable-speed vacuum pump, which, in conjunction with vacuum pressure regulating valve 5, achieves precise pressure regulation of vacuum chamber 1. The speed of the adjustable-speed vacuum pump 3 is regulated by the control unit, and in conjunction with the opening of vacuum pressure regulating valve 5, it finely adjusts the pumping rate according to the target pressure, achieving stable and fluctuation-free precise control of the pressure in vacuum chamber 1. The adjustable-speed vacuum pump 3, in conjunction with vacuum pressure regulating valve 5, achieves precise pressure regulation of vacuum chamber 1. The adjustable-speed pump can adjust the pumping rate as needed to avoid pressure overshoot or undershoot, and combined with the pressure regulating valve for fine pressure control, it meets the heating requirements of different materials, power, and temperature. Stable pressure can reduce problems such as uneven heating, deformation, and oxidation, improve process consistency and finished product quality, make the equipment adaptable to multiple processing scenarios, and improve process flexibility and production stability.

[0024] Please see Figure 1 and Figure 2Pressure sensor 4 is a real-time digital display pressure sensor. It provides real-time pressure data from within the vacuum chamber 1, converting the chamber pressure into a digital signal for direct display. The data is synchronized in real-time, facilitating both manual observation and integration with automatic control. The pressure feedback is delay-free and highly accurate. The real-time digital display pressure sensor 4 provides a clear and accurate display of the pressure in the vacuum chamber 1, simplifying monitoring and adjustment. The delay-free feedback allows operators to quickly grasp the status and facilitates integration with automatic control. Precise pressure data is fundamental for accurate pressure regulation, ensuring the equipment operates within its optimal range, reducing defects caused by pressure deviations, improving processing stability and reliability, reducing operational difficulty, and enhancing ease of use and safety.

[0025] Please see Figure 1 and Figure 2 The vacuum chamber pressure regulating valve 5 is an electrically adjustable valve that automatically adjusts the pressure in the vacuum chamber 1 according to a preset pressure value. Receiving a pressure signal, the electrically adjustable valve 5 automatically adjusts its opening, performing closed-loop regulation according to the preset pressure value. No manual operation is required, resulting in fast pressure response and high control accuracy. The electrically adjustable valve 5 can automatically regulate the pressure in the vacuum chamber 1 without manual intervention, maintaining a stable pressure at the preset value. Automatic control reduces human error, improves process consistency, and is suitable for continuous automated production. It quickly adjusts pressure under different heating conditions, expanding the process window, ensuring stable processing quality, and improving equipment automation and production efficiency.

[0026] Please see Figure 1 and Figure 2 Vacuum chamber 1 is a sealed chamber, with sealing performance meeting the requirements for vacuum environment and inert gas protection. The sealed vacuum chamber 1 uses a combination of flanges and sealing rings, with no leakage at the assembly surface. It can maintain the set vacuum level and inert gas concentration, meeting the requirements for long-term vacuum pressure holding and protective atmosphere. The sealed vacuum chamber 1 has reliable sealing, maintaining the vacuum level and inert gas concentration for extended periods, avoiding oxidation or pressure fluctuations caused by leakage. Good sealing reduces the load on vacuum pump 3, extending its lifespan and saving energy. Stable vacuum and atmosphere ensure stable heating processes, improving processing quality and yield, making it suitable for long-term continuous production, and improving equipment reliability and production economy.

[0027] Please see Figure 1 and Figure 2The vacuum pump 3, pressure sensor 4, and vacuum pressure regulating valve 5 form a linked control structure for automated closed-loop regulation of the pressure in the vacuum chamber 1. The adjustable-speed vacuum pump 3, real-time digital display pressure sensor 4, and vacuum pressure regulating valve 5 are connected to the same control unit to form a closed loop, correcting the pressure in real time and automatically maintaining it within a preset range. This adapts to continuous processing under multiple operating conditions. The adjustable-speed vacuum pump 3, real-time digital display pressure sensor 4, and vacuum pressure regulating valve 5 form an automated closed-loop control system, monitoring and quickly correcting the pressure in the vacuum chamber 1 in real time to maintain it within the optimal range. Closed-loop control improves pressure stability, adapts to complex and variable operating conditions, reduces manual intervention, increases automation and production efficiency, ensures consistent heating quality, reduces defect rates, and enhances the equipment's process adaptability.

[0028] Please see Figure 1 and Figure 2 The vacuum chamber 1 is equipped with a sealed door 6 for loading and unloading heated objects. The sealed door 6 features a hinged and locking sealing structure, ensuring smooth opening and closing and leak-free operation. This facilitates loading and unloading without disrupting the vacuum and protective atmosphere of the chamber. The convenient loading and unloading improves material handling efficiency, making it suitable for mass production. The good sealing maintains a stable chamber environment, avoiding repeated vacuuming and refilling, saving time and reducing energy consumption. The sealed door 6 enhances the ease of operation and production efficiency, ensures continuous processing and quality stability, and improves practicality.

[0029] This solution: After the equipment is started, vacuum pump 3 evacuates the vacuum chamber 1 to reduce internal humidity and inhibit oxidation of the heated object. Inert gas can be introduced through the air intake structure of the vacuum chamber 1 to form a double anti-oxidation atmosphere. Pressure sensor 4 collects and feeds back the pressure of the vacuum chamber 1 in real time. Vacuum pressure valve 5 automatically adjusts according to preset working conditions and pressure signals to maintain the chamber at the target pressure. Laser module 2 is provided with a light source by laser chip to heat the workpiece with infrared light. The adjustable speed vacuum pump 3, pressure sensor 4, and vacuum pressure valve 5 form a closed-loop linkage to automatically stabilize the pressure of the vacuum chamber 1 and adapt to different heating conditions. When picking up or putting down the workpiece, open the sealing door 6 and close and lock it after placement to re-establish the vacuum and protective atmosphere. Vacuum chamber 1 blocks the laser to ensure operational safety. The entire set of equipment completes heating under a vacuum controllable atmosphere, achieving oxidation-free, high-quality, wide-condition, and highly safe laser heating.

[0030] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0031] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A vacuum laser heating device, characterized in that, include: Vacuum chamber (1), laser module (2), vacuum pump (3), pressure sensor (4) and vacuum pressure valve (5); The laser module (2) is set inside the vacuum cavity (1) or at the corresponding heating station of the vacuum cavity (1) to emit laser light to the object to be heated in the vacuum cavity (1) to achieve heating; The vacuum pump (3) is connected to the vacuum chamber (1) and is used to evacuate the vacuum chamber (1) to reduce the humidity inside the vacuum chamber (1). The pressure sensor (4) is installed on the vacuum chamber (1) and is used to detect the pressure value inside the vacuum chamber (1) in real time. The vacuum pressure valve (5) is connected to the vacuum chamber (1) and is used to adjust the pressure in the vacuum chamber (1) to a preset value according to the pressure value detected by the pressure sensor (4) and in combination with different laser heating conditions. The vacuum chamber (1) is also used to introduce inert gas, which, in conjunction with the vacuum environment, forms an inert gas protection for the heated object.

2. The vacuum laser heating device according to claim 1, characterized in that: The laser module (2) is an infrared laser module (2), which is adapted to the heating conditions inside the vacuum cavity (1) and outputs laser to heat the object being heated.

3. The vacuum laser heating device according to claim 1, characterized in that: The laser module (2) includes a laser chip, which serves as the core component for laser emission and provides a laser source for heating operations within the vacuum cavity (1).

4. The vacuum laser heating device according to claim 1, characterized in that: The inert gas is an inert gas that does not react with the heated object. It is introduced through the air intake structure of the vacuum chamber (1) to work with the vacuum environment to achieve oxidation protection.

5. The vacuum laser heating device according to claim 1, characterized in that: The vacuum pump (3) is an adjustable speed vacuum pump (3), which, together with the vacuum pressure valve (5), realizes the adjustment of the pressure of the vacuum chamber (1).

6. The vacuum laser heating device according to claim 1, characterized in that: The pressure sensor (4) is a real-time digital display pressure sensor (4), which feeds back real-time pressure data in the vacuum chamber (1).

7. The vacuum laser heating device according to claim 1, characterized in that: The vacuum pressure valve (5) is an electric regulating valve that automatically adjusts the pressure of the vacuum chamber (1) according to the preset pressure value.

8. The vacuum laser heating device according to claim 1, characterized in that: The vacuum chamber (1) is a sealed chamber, and its sealing performance meets the requirements for use in a vacuum environment and inert gas protection.

9. A vacuum laser heating device according to claim 1, characterized in that: The vacuum pump (3), pressure sensor (4) and vacuum pressure valve (5) form a linkage control structure to automatically regulate the pressure of the vacuum chamber (1).

10. A vacuum laser heating device according to claim 1, characterized in that: The vacuum chamber (1) is equipped with a sealing door (6) for taking out and putting in heated objects.