Mask plate assembly apparatus and assembly method

Abstract

This application provides a mask assembly device and method. The mask assembly device includes a positioning component with a positioning platform having a recess; a platform including a first platform and multiple auxiliary platforms; multiple sets of height adjustment components, each set of height adjustment components being connected one-to-one with the first platform and the multiple auxiliary platforms, the multiple sets of height adjustment components enabling at least one of the first platform and the multiple auxiliary platforms to raise the mask frame to a preset height; and multiple sets of clamping adjustment components arranged around the periphery of the recess, the multiple sets of clamping adjustment components being configured to clamp the outer edge portion of the mask frame raised to the preset height in multiple directions to keep the mask frame in a tensioned state, and to drive the tensioned mask frame to move along the horizontal plane on the platform. The embodiments of this application use height adjustment components and clamping adjustment components to assemble the mask strip under tension after alignment of the mask frame, thereby improving the mask assembly efficiency and accuracy, and increasing production efficiency.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, specifically to a photomask assembly device and assembly method. Background Technology

[0002] Magnetron sputtering is an important thin film preparation technology widely used in various fields such as functional thin films, decorative thin films, and microelectronic thin films. In the magnetron sputtering process, the mask plays a crucial role in thin film preparation, determining the deposition area and shape of the sputtered material. The mask consists of a mask frame and multiple mask strips. Typically, these strips and the mask frame are assembled manually. Assemblers need to rely on experience to determine the placement of the mask strips within the mask frame before placing the mask on the magnetron sputtering machine for alignment. Fine-tuning is required for any misaligned mask strips, which is time-consuming, results in low assembly accuracy, and significantly impacts production efficiency. Summary of the Invention

[0003] This application provides a mask assembly device and assembly method to improve mask assembly efficiency and accuracy, thereby increasing production efficiency.

[0004] In a first aspect, a mask assembly device is provided. The mask includes a mask frame and multiple mask strips. The mask assembly device includes: a positioning component having a positioning platform with a recess; a platform movably connected to the recess, the platform including a first platform and multiple auxiliary platforms annularly sleeved around the outer periphery of the first platform; and multiple sets of height adjustment components, each set of height adjustment components being connected one-to-one with the first platform and the multiple auxiliary platforms. The multiple sets of height adjustment components enable the surfaces of the first platform and the auxiliary platforms to be flush with the surface of the positioning platform, and the mask frame can be placed on the platform. The component enables at least one of the first stage and multiple auxiliary stages to raise the mask frame to a preset height, with the outer edge of the mask frame located outside the stage of the raised portion; multiple sets of clamping adjustment components are disposed on the positioning platform, arranged around the periphery of the recess, and configured to clamp the outer edge of the mask frame raised to the preset height in multiple directions to keep the mask frame in a tensioned state; multiple mask strips can be assembled onto the mask frame; and the multiple sets of clamping adjustment components can drive the tensioned mask frame to move along the horizontal plane on the stage to align the mask frame with the stage of the raised portion.

[0005] In conjunction with the first aspect, some implementations of the first aspect further include: a control element disposed on the positioning element, the control element being electrically connected to multiple sets of height adjustment elements and multiple sets of clamping adjustment elements respectively, the control element being able to control the multiple sets of height adjustment elements to move respectively, so that the surface of the stage and the surface of the positioning platform are flush, or only the first stage is raised to a preset height, or the first stage and at least one adjacent auxiliary stage are raised to a preset height, and after at least part of the stage is raised to the preset height, the control element is able to control the multiple sets of clamping adjustment elements to move in the horizontal direction to clamp the mask frame and tension it, and is able to control the multiple sets of clamping adjustment elements to drive the mask frame to move in the horizontal direction until the center of the mask frame coincides with the center of the stage.

[0006] In conjunction with the first aspect, in some implementations of the first aspect, the height adjustment component includes: a first cylinder disposed on the recessed bottom wall, the first cylinder being electrically connected to a control component; and a plurality of support rods, one end of which is connected to a first push rod of the first cylinder, and the other end of which is connected to a first platform or an auxiliary platform, the first push rod extending in a vertical direction, and the plurality of support rods being arranged at intervals along the periphery of the corresponding first platform or auxiliary platform.

[0007] In conjunction with the first aspect, in some implementations of the first aspect, the clamping adjustment component includes: a second cylinder disposed on the positioning platform, the second cylinder being electrically connected to a control component, and a second push rod of the second cylinder extending in a horizontal direction; a positioning plate disposed on the second push rod, the second cylinder enabling the positioning plate to move horizontally to approach or move away from the mask frame; a first clamping block disposed on the positioning plate; a second clamping block disposed on the positioning plate, and the second clamping block being spaced apart above the first clamping block; and a driving unit disposed on the positioning plate, the driving unit being electrically connected to the control component, and the driving unit being connected to at least one of the first clamping block and the second clamping block, so that the first clamping block and the second clamping block can approach each other to clamp the mask frame or move away from each other to release the mask frame.

[0008] In conjunction with the first aspect, in some implementations of the first aspect, a first gasket is provided on the side of the first clamping block facing the second clamping block, and a second gasket is provided on the side of the second clamping block facing the first clamping block. When the first clamping block and the second clamping block clamp the mask frame, the first gasket and the second gasket are in contact with the two sides of the mask frame, respectively. The first gasket and the second gasket are made of polyurethane.

[0009] In conjunction with the first aspect, in some implementations of the first aspect, the number of clamping adjustment members includes eight sets, and the eight sets of clamping adjustment members are respectively disposed at the four corners of the recess. In the two sets of clamping adjustment members disposed at each corner, the second push rod of one set of clamping adjustment members extends along the first direction so that a portion of the outer edge of the mask frame extends into or out of the first clamping block and the second clamping block, and the second push rod of the other set of clamping adjustment members extends along the second direction so that a portion of the outer edge of the mask frame extends into or out of the first clamping block and the second clamping block, wherein the first direction and the second direction are perpendicular.

[0010] In conjunction with the first aspect, in some implementations of the first aspect, the surface of the positioning platform is provided with a wear-resistant layer, the wear-resistant layer being made of nylon; and / or, the surface of the first stage is provided with a wear-resistant layer, the wear-resistant layer being made of nylon; and / or, the surface of the auxiliary stage is provided with a wear-resistant layer, the wear-resistant layer being made of nylon.

[0011] In conjunction with the first aspect, in some implementations of the first aspect, when the surfaces of the first stage and the plurality of auxiliary stages are flush with the surface of the positioning platform, there is a first gap between the outer edge of the outermost auxiliary stage and the edge of the positioning platform that forms a recess, the first gap being less than or equal to 1 mm; and / or, there is a second gap between the first stage and the adjacent auxiliary stage, the second gap being less than or equal to 1 mm; and / or, there is a third gap between any adjacent auxiliary stage, the third gap being less than or equal to 1 mm.

[0012] The second aspect also provides a method for assembling a mask template, applied to the mask template assembly equipment described above. The assembly method includes: obtaining a mask frame to be assembled and multiple mask strips; placing the mask frame on a positioning platform and performing a first alignment based on the platform, initially aligning the center of the mask frame with the center of the platform, wherein the surface of the first platform and the surfaces of the multiple auxiliary platforms are flush with the surface of the positioning platform; multiple sets of height adjustment components select at least one of the first platform and the multiple auxiliary platforms according to the size of the mask frame to carry the mask frame up to a preset height, exposing the outer edge of the mask frame outside the platform; clamping the outer edge of the mask frame with multiple sets of clamping adjustment components and tensioning the mask frame; performing a second alignment of the tensioned mask frame with multiple sets of clamping adjustment components, aligning the center of the tensioned mask frame with the center of the platform of the raised portion; and taking multiple mask strips and assembling them onto the tensioned mask frame respectively.

[0013] In conjunction with the second aspect, in some implementations of the second aspect, after multiple mask strips are assembled onto a tensioned mask frame, the assembly method further includes: placing a positioning component below the magnetron sputtering machine, with the assembled mask template mounted on the positioning component; performing a third alignment of the tensioned assembled mask template using multiple sets of clamping adjustment components to align the center of the mask frame with the center of the working area of ​​the magnetron sputtering machine; determining whether each cutout area on the mask template is aligned with the preset deposition area of ​​the magnetron sputtering machine; if so, the assembled mask template can be removed for the next set of assembly; otherwise, the misaligned mask strips are removed and reassembled until aligned.

[0014] This application provides a mask assembly device and assembly method. The mask assembly device includes a positioning component with a positioning platform having a recess; a platform movably connected to the recess, the platform including a first platform and a plurality of auxiliary platforms annularly sleeved on the outer periphery of the first platform; and multiple sets of height adjustment components, each set of height adjustment components being connected one-to-one with the first platform and the plurality of auxiliary platforms, the multiple sets of height adjustment components enabling the surfaces of the first platform and the auxiliary platforms to be flush with the surface of the positioning platform, allowing the mask frame to be placed at least on the platform, and the multiple sets of height adjustment components enabling the first platform and the plurality of auxiliary platforms to be aligned. At least one of them drives the mask frame to rise to a preset height, with the outer edge of the mask frame located outside the platform of the raised part; multiple sets of clamping adjustment components are set on the positioning platform, and the multiple sets of clamping adjustment components are arranged around the periphery of the recess. The multiple sets of clamping adjustment components are configured to clamp the outer edge of the mask frame at the preset height in multiple directions so that the mask frame is in a tensioned state. Multiple mask strips can be assembled onto the mask frame. The multiple sets of clamping adjustment components can drive the tensioned mask frame to move along the horizontal plane on the platform to align the mask frame with the platform of the raised part.

[0015] This embodiment of the application uses multiple sets of height adjustment components to allow the first platform and multiple auxiliary platforms to rise appropriately according to the actual size of the mask frame. This ensures stable support of the mask frame while exposing the edges of the mask frame for clamping by multiple sets of clamping adjustment components to tension the mask frame. The multiple sets of clamping adjustment components can align the tensioned mask frame with the platform, so that the mask strip can be assembled with the raised platform as a reference when assembling it onto the mask frame. This improves the accuracy of assembling the mask strip onto the mask frame, and allows workers to easily and quickly assemble the mask template, improving assembly efficiency, reducing the probability of assembly inaccuracies, and thus improving production efficiency. Attached Figure Description

[0016] The accompanying drawings, which are included to provide a further understanding of this application and constitute a part of this application, illustrate exemplary embodiments of the application and are used to explain the application, but do not constitute an undue limitation of the application. In the drawings:

[0017] Figure 1 This is a top view of a mask assembly device according to an embodiment of this application.

[0018] Figure 2 This is a front cross-sectional view of a mask assembly device in one embodiment of this application.

[0019] Figure 3 This is a front cross-sectional view of the positioning platform placing the mask frame in one embodiment of this application.

[0020] Figure 4 This is a top view of the first platform in one embodiment of this application.

[0021] Figure 5 This is a top view of the mask frame and the rising platform in one embodiment of this application.

[0022] Figure 6 This is a front cross-sectional view of the mask frame after it has been raised in a mask assembly device according to an embodiment of this application.

[0023] Figure 7 This is a schematic diagram of the mask frame being tensioned by the clamping adjustment member in one embodiment of this application.

[0024] Figure 8 This is a flowchart of a mask assembly method in one embodiment of this application.

[0025] Figure 9 This is a flowchart of a mask template assembly method in another embodiment of this application. Detailed Implementation

[0026] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Many specific details are set forth in the following detailed description to provide a comprehensive understanding of this application. However, it will be apparent to those skilled in the art that this application can be implemented without some of these specific details. The following description of the embodiments is merely to provide a better understanding of this application by illustrating examples. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application. The features and exemplary embodiments of various aspects of this application will be described in detail below.

[0027] Figure 1 This is a top view of a mask assembly device in one embodiment of this application. Figure 2 This is a front cross-sectional view of a mask assembly device in one embodiment of this application. Figure 3 This is a front cross-sectional view of the positioning platform placing the mask frame in one embodiment of this application. Figure 4This is a top view of the first platform in one embodiment of this application. Figure 5 This is a top view of the mask frame and the rising platform in one embodiment of this application. Arrow X points in the first direction, arrow Y points in the second direction, and arrow Z points in the vertical direction. The first direction X, the second direction Y, and the vertical direction Z are all perpendicular to each other, and will not be emphasized separately thereafter.

[0028] like Figures 1 to 3 The mask assembly equipment includes a positioning component 1, a platform 2, multiple sets of height adjustment components 3 and multiple sets of clamping adjustment components 4. The platform 2, multiple sets of height adjustment components 3 and multiple sets of clamping adjustment components 4 are all set on the positioning component 1 to assemble the mask frame 5 and multiple mask strips into a mask template.

[0029] It is understood that the photomask is used in a magnetron sputtering machine, which has a working platform for placing the substrate. The photomask is installed above the substrate and below the discharge area of ​​the magnetron sputtering machine, so that the sputtered material passes through the cutout area of ​​the photomask and is deposited onto the corresponding area of ​​the substrate where a film is to be formed. The precision of the cutout area enclosed in the photomask determines the accuracy of the film formed on the substrate. Therefore, the assembly precision requirements for the mask frame 5 and multiple mask strips in the photomask are high. However, the current mask frame 5 and mask strips are prone to deformation due to their own materials, making it difficult for operators to assemble the mask frame 5 and mask strips together with high precision and efficiency. The photomask assembly equipment provided in this embodiment can effectively solve this problem.

[0030] Specifically, the positioning component 1 has a positioning platform 11, which has a recess 12; the platform 2 is movably connected to the recess 12, and the platform 2 includes a first platform 21 and a plurality of auxiliary platforms 22 that are annularly sleeved on the outer periphery of the first platform 21; each set of height adjustment components 3 is respectively connected to the first platform 21 and the plurality of auxiliary platforms 22 in a one-to-one correspondence, and the plurality of height adjustment components 3 can make the surfaces of the first platform 21 and the auxiliary platforms 22 flush with the surface of the positioning platform 11, so that the mask frame 5 can be placed on the platform 2 at least, and the plurality of height adjustment components 3 can make the first platform 21 and the plurality of auxiliary platforms... At least one of 22 drives the mask frame 5 to rise to a preset height, with the outer edge of the mask frame 5 located outside the platform 2 of the raised portion; multiple sets of clamping adjustment members 4 are disposed on the positioning platform 11, and the multiple sets of clamping adjustment members 4 are arranged around the periphery of the recess 12. The multiple sets of clamping adjustment members 4 are configured to clamp the outer edge portion of the mask frame 5 raised to the preset height in multiple directions so that the mask frame 5 is in a tensioned state. Multiple mask strips can be assembled onto the mask frame 5. The multiple sets of clamping adjustment members 4 can drive the tensioned mask frame 5 to move along the horizontal plane on the platform 2 to align the mask frame 5 with the platform 2 of the raised portion.

[0031] In this embodiment, multiple sets of height adjustment components 3 enable the first platform 21 and multiple auxiliary platforms 22 to rise appropriately according to the actual size of the mask frame 5. This allows for stable support of the mask frame 5 while exposing the edges of the mask frame 5 for clamping by multiple sets of clamping adjustment components 4 to tension the mask frame. The multiple sets of clamping adjustment components 4 can align the tensioned mask frame 5 with the platform 2, so that when assembling the mask strip onto the mask frame 5, the raised platform 2 can be used as a reference for assembly. This improves the accuracy of assembling the mask strip onto the mask frame 5, and allows workers to easily and quickly assemble the mask template, improving assembly efficiency, reducing the probability of assembly inaccuracies, and thus improving production efficiency.

[0032] In addition, by setting the first platform 21 and multiple auxiliary platforms 22, it is possible to match the assembly of mask templates of different specifications and sizes. When changing the assembly of mask templates of different sizes, it is only necessary to adjust the first platform 21 and multiple auxiliary platforms 22 to rise in different combinations by using multiple sets of height adjustment components 3. It has a wide range of applications, is universal, and is conducive to the standardization of mask template assembly.

[0033] In some embodiments, the mask assembly equipment may further include a control component disposed on the positioning component 1. The control component is electrically connected to multiple sets of height adjustment components 3 and multiple sets of clamping adjustment components 4. The control component can control the movement of the multiple sets of height adjustment components 3 to make the surface of the platform 2 flush with the surface of the positioning platform 11, or to raise only the first platform 21 to a preset height, or to raise the first platform 21 and at least one adjacent auxiliary platform 22 to a preset height. After at least part of the platform 2 has risen to the preset height, the control component can control the movement of the multiple sets of clamping adjustment components 4 in the horizontal direction to clamp the mask frame 5 and tension it, and can control the multiple sets of clamping adjustment components 4 to move the mask frame 5 in the horizontal direction until the center of the mask frame 5 coincides with the center of the platform 2. The control component enables the automatic determination and selection of matching height adjustment components 3 and clamping adjustment components 4 according to the required size of the assembled mask, which work sequentially, further improving the assembly accuracy and the assembly effect, and facilitating the standardization of mask assembly.

[0034] Optionally, the positioning element 1 can be configured as a positioning seat that can be placed on the worktable of the magnetron sputtering machine. The positioning element 1 has a certain height in the vertical direction Z, so that there is enough space in the inwardly recessed recess 12 on the positioning platform 11 to place multiple sets of height adjustment elements 3.

[0035] Optionally, the depth of the recess 12 provided on the positioning platform 11 can be adaptively adjusted according to the structure of the height adjustment component 3 and the actual height at which the platform 2 is raised, without being specifically limited.

[0036] Understandably, the shape and size of the recess 12 can be matched with the shape and size of the platform 2. A first gap, less than or equal to 1 mm, exists between the outer edge of the outermost auxiliary platform 22 and the edge of the positioning platform 11 forming the recess 12. A second gap, less than or equal to 1 mm, exists between the first platform 21 and the adjacent auxiliary platform 22. A third gap, less than or equal to 1 mm, exists between any adjacent auxiliary platform 22. This is to limit the gaps between the multiple rings in the platform 2 and the gap between the platform 2 and the recess 12 to prevent particulate impurities from falling into the gaps and affecting the lifting and lowering of the platform 2.

[0037] Optionally, each surface of the positioning platform 11, the first stage 21, and the auxiliary stage 22 must be provided with a wear-resistant layer. The wear-resistant layer can improve the stability of the placed mask frame 5 and prevent the mask frame 5 from easily shifting horizontally under the action of multiple sets of height adjustment components 3. The wear-resistant layer is made of nylon.

[0038] It is understandable that the preset height is at least 10mm, and the distance from the raised mask frame 5 to the positioning platform 11 is greater than or equal to 10mm.

[0039] In some embodiments, such as Figure 4 The center 21a of the first platform 21 is the center of the platform 2. The first platform 21 is divided into a grid 211 with the center 21a as the reference. Each grid 211 must be a square. The length and width of each grid 211 are fixed, such as 10mm, 20mm, etc.

[0040] Optionally, the annular dimensions of the multiple auxiliary stages 22 can be set to be the same or different, and can be matched according to the dimensions of several commonly used photomasks.

[0041] For example, such as Figure 3 and Figure 5The photomasks, arranged from largest to smallest, include a first photomask, a second photomask, and a third photomask. When assembling the first photomask, the first mask frame is placed on the initially aligned platform 2. The first mask frame contacts the three outermost auxiliary platforms 22 on platform 2, with the outer edge of the first mask frame located on the outermost auxiliary platform 22. In this case, only the two auxiliary platforms 22 in contact with the first mask frame are raised, while the outermost auxiliary platform 22 remains stationary. When assembling the second photomask, the second mask frame is placed on the initially aligned platform 2, and the first mask... The mold frame contacts the first platform 21 and the two adjacent auxiliary platforms 22 on the platform 2. The outer edge of the second mask frame is located on the second auxiliary platform 22. In this case, only the first platform 21 and the adjacent auxiliary platform 22 are raised. When assembling the third mask template, the third mask frame of the third mask template is placed on the platform 2 after initial alignment. The third mask frame contacts the first platform 21 and the adjacent auxiliary platform 22 on the platform 2. The outer edge of the third mask frame is located on the adjacent first auxiliary platform 22. In this case, only the first platform 21 is raised. And so on, without further details.

[0042] In some embodiments, the height adjustment component 3 includes a first cylinder 31 and a plurality of support rods 32. The first cylinder 31 is disposed on the bottom wall of the recess 12 and is electrically connected to a control component. One end of each of the plurality of support rods 32 is connected to a first push rod of the first cylinder 31, and the other end is connected to a first platform 21 or an auxiliary platform 22. The first push rod extends in the vertical direction Z, and the plurality of support rods 32 are arranged at intervals along the periphery of the corresponding first platform 21 or auxiliary platform 22. The plurality of support rods 32 can ensure that the connected first platform 21 or auxiliary platform 22 is subjected to stable force, and prevent the mask frame 5 from shifting during the upward movement.

[0043] It is understandable that the multiple support rods 32 supporting each first platform 21 or auxiliary platform 22 are distributed and evenly arranged.

[0044] In addition, among the multiple sets of height adjustment components 3 connected to the first platform 21 and each auxiliary platform 22, the first cylinders 31 and multiple bearing rods 32 of the multiple sets of height adjustment components 3 are staggered and do not interfere with each other.

[0045] Figure 6 This is a front cross-sectional view of the mask frame after it has been raised in a mask assembly device according to an embodiment of this application. Figure 7 This is a schematic diagram of the mask frame being tensioned by the clamping adjustment member in one embodiment of this application.

[0046] like Figure 6 and Figure 7The clamping adjustment component 4 includes a second cylinder 41, a positioning plate 42, a first clamping block 43, a second clamping block 44, and a drive unit 45. The second cylinder 41 is disposed on the positioning platform 11 and is electrically connected to the control component. The second push rod of the second cylinder 41 extends horizontally. The positioning plate 42 is disposed on the second push rod. The second cylinder 41 enables the positioning plate 42 to move horizontally to approach or move away from the mask frame 5. The first clamping block 43 is disposed on the positioning plate 42. The second clamping block 44 is disposed on the positioning plate 42 and is spaced above the first clamping block 43. The drive unit 45 is disposed on the positioning plate 42 and is electrically connected to the control component. The drive unit 45 is connected to at least one of the first clamping block 43 and the second clamping block 44 so that the first clamping block 43 and the second clamping block 44 can approach each other to clamp the mask frame 5 or move away from each other to release the mask frame 5.

[0047] Optionally, the positioning component 1 may also be provided with multiple third cylinders 48. The third push rod of each third cylinder 48 can be connected to a second cylinder 41. The extension direction of the third push rod is parallel to the vertical direction Z. That is, the second cylinder 41 is movably connected to the positioning platform 11, so that the height of the first clamping block 43 and the second clamping block 44 in the vertical direction Z can be adaptively adjusted according to the change of the preset height of the mask frame 5, thereby improving the application range of the mask assembly.

[0048] Optionally, a first gasket 47 is provided on the side of the first clamping block 43 facing the second clamping block 44, and a second gasket 46 is provided on the side of the second clamping block 44 facing the first clamping block 43. When the first clamping block 43 and the second clamping block 44 clamp the mask frame 5, the first gasket 47 and the second gasket 46 respectively contact the two sides of the mask frame 5. The first gasket 47 and the second gasket 46 are made of polyurethane to avoid damaging the mask frame 5.

[0049] In some embodiments, the number of clamping adjustment members 4 includes eight sets, which are respectively disposed at the four corners of the recess 12. In the two sets of clamping adjustment members 4 disposed at each corner, the second push rod of one set of clamping adjustment members 4 extends along the first direction X so that a portion of the outer edge of the mask frame 5 extends into or out of the first clamping block 43 and the second clamping block 44, and the second push rod of the other set of clamping adjustment members 4 extends along the second direction Y so that a portion of the outer edge of the mask frame 5 extends into or out of the first clamping block 43 and the second clamping block 44. This arrangement ensures that the mask frame 5 is subjected to uniform force when tensioned, and avoids local deformation of the tensioned mask frame 5.

[0050] Understandably, when aligning the tensioned mask frame 5 with the center 21a of the first platform 21, the second push rods of the second cylinders 41, which are positioned opposite each other in each direction (the first direction X and the second direction Y), extend and retract by the same distance but in opposite directions, in order to achieve fine-tuning of the position of the mask frame 5 relative to the platform 2. Furthermore, during the alignment process, the grid 211 on the first platform 21 can be referenced to determine whether alignment is complete, thereby improving alignment accuracy.

[0051] After alignment, the staff can determine the specific assembly position in the tensioned mask frame 5 based on the grid 211 on the first stage 21, so that the assembled mask has high precision. When the assembled mask is placed in the magnetron sputtering machine, the magnetron sputtering machine will tension the mask in the corresponding position. At this time, the consistency between the mask and the area to be filmed on the substrate below will be higher, so as to meet the high-precision film formation requirements of the magnetron sputtering machine.

[0052] Figure 8 This is a flowchart of a mask assembly method in one embodiment of this application. Figure 9 This is a flowchart of a mask template assembly method in another embodiment of this application.

[0053] This application also provides a method for assembling a mask template, such as... Figure 8 and Figure 9 As shown, the assembly method is used to assemble the mask frame 5 and multiple mask strips into a mask template on a mask template assembly device. The mask template assembly device can be referred to the relevant descriptions of the above embodiments. The steps of the mask template assembly method are described as follows.

[0054] S110: Obtain the mask frame 5 and multiple mask strips to be assembled.

[0055] S120: Place the mask frame 5 on the positioning platform 11 and perform the first alignment based on the stage 2, initially aligning the center of the mask frame 5 with the center of the stage 2, wherein the surface of the first stage 21 and the surfaces of the multiple auxiliary stages 22 are flush with the surface of the positioning platform 11.

[0056] S130: Multiple height adjustment components 3 select at least one of the first platform 21 and multiple auxiliary platforms 22 according to the size of the mask frame 5 to carry the mask frame 5 to a preset height, and the outer edge of the mask frame 5 is exposed outside the platform 2.

[0057] S140: The mask frame 5 is clamped to the outer edge by multiple sets of clamping adjustment parts 4 and tensioned.

[0058] S150: The tensioned mask frame 5 is re-aligned by multiple sets of clamping adjustment parts 4, and the center of the tensioned mask frame 5 is aligned with the center of the platform 2 of the raised part.

[0059] S160: Take multiple mask strips and assemble them into the tensioned mask frame 5.

[0060] This embodiment achieves the clamping and positioning of mask templates of different sizes through the cooperation of multiple sets of height adjustment components 3 and multiple sets of clamping adjustment components 4. During this process, multiple alignments are performed to facilitate the high-precision and high-efficiency assembly of multiple mask strips onto the tensioned mask frame 5 by the workers. This realizes the high-efficiency and high-precision assembly of mask templates, which is conducive to the standardization of mask template assembly and improves production efficiency.

[0061] It is understandable that in step S150, the second alignment specifically includes: aligning the inner edge of the tensioned mask frame 5 with the outer edge of the first stage 21, so that the distance from the inner edge of the mask frame 5 to the outer edge of the first stage 21 in each region is the same.

[0062] Optionally, in step S160, when assembling multiple mask strips onto the tensioned mask frame 5, the specific position where the mask strips need to be installed is determined according to the grid 211 on the first platform 21 to ensure the accuracy of the assembly.

[0063] In some embodiments, after assembling multiple mask strips onto a tensioned mask frame 5 using a mask assembly device to obtain a mask template, a detection and testing step may be included, as follows:

[0064] S170. Place the positioning component 1 below the magnetron sputtering machine. The positioning component 1 is equipped with the assembled mask template.

[0065] S180. The tensioned assembled mask template is aligned for the third time by multiple sets of clamping adjustment parts 4 so that the center of the mask frame 5 is aligned with the center of the working area of ​​the magnetron sputtering machine.

[0066] S190. Determine whether each cutout area on the mask template is aligned with the preset deposition area of ​​the magnetron sputtering machine. If so, the assembled mask template can be removed for the next assembly. Otherwise, remove the misaligned mask strips and reassemble them until they are aligned.

[0067] This embodiment uses this detection method to conveniently and quickly determine whether the assembled mask template meets the accuracy requirements, thereby reducing the probability of non-compliance and saving time.

[0068] It is understandable that the preset deposition area of ​​the magnetron sputtering machine can be understood as the area of ​​the substrate that needs to be filmed when the substrate is placed under the magnetron sputtering machine, which will not be described in detail.

[0069] It should be noted that the dimensions of layers and regions may be exaggerated in the accompanying drawings of this application for clarity. Furthermore, it is understood that when an element or layer is referred to as being "on" another element or layer, it may be directly on the other element, or there may be intermediate layers. Additionally, it is understood that when an element or layer is referred to as being "below" another element or layer, it may be directly below the other element, or there may be more than one intermediate layer or element. Furthermore, it is understood that when a layer or element is referred to as being "between" two layers or two elements, it may be the only layer between the two layers or two elements, or there may be more than one intermediate layer or element. Similar reference numerals throughout indicate similar elements.

[0070] Furthermore, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising..." does not exclude the presence of additional identical elements in the process, method, article, or apparatus that includes the element.

[0071] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0072] The above are merely preferred embodiments of this application and are not intended to limit this application. Any modifications or equivalent substitutions made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A mask assembly device, characterized in that, The mask template includes a mask frame and multiple mask strips, and the mask template assembly equipment includes: A positioning component having a positioning platform, wherein the positioning platform is provided with a recess; A platform is movably connected to the recess, the platform including a first platform and a plurality of auxiliary platforms that are annularly sleeved on the outer periphery of the first platform; Multiple sets of height adjustment components are provided, each set of height adjustment components being connected one-to-one with the first platform and multiple auxiliary platforms. The multiple sets of height adjustment components enable the surfaces of the first platform and the auxiliary platforms to be flush with the surface of the positioning platform. The mask frame can be placed on at least one of the platforms. The multiple sets of height adjustment components enable at least one of the first platform and the multiple auxiliary platforms to raise the mask frame to a preset height. The outer edge of the mask frame is located outside the platform of the raised portion. Multiple sets of clamping adjustment components are disposed on the positioning platform. The multiple sets of clamping adjustment components are arranged around the periphery of the recess. The multiple sets of clamping adjustment components are configured to clamp the outer edge portion of the mask frame that has risen to the preset height in multiple directions so that the mask frame is in a tensioned state. Multiple mask strips can be assembled onto the mask frame. The multiple sets of clamping adjustment components can drive the tensioned mask frame to move along the horizontal plane on the platform to align the mask frame with the platform of the raised portion.

2. The mask assembly equipment according to claim 1, characterized in that, Also includes: A control component is disposed on the positioning component. The control component is electrically connected to multiple sets of height adjustment components and multiple sets of clamping adjustment components. The control component can control the multiple sets of height adjustment components to move respectively, so that the surface of the platform and the surface of the positioning platform are flush, or only the first platform is raised to the preset height, or the first platform and at least one adjacent auxiliary platform are raised to the preset height. After at least part of the platform is raised to the preset height, the control component can control the multiple sets of clamping adjustment components to move horizontally to clamp the mask frame and tension it, and can control the multiple sets of clamping adjustment components to drive the mask frame to move horizontally until the center of the mask frame coincides with the center of the platform.

3. The mask assembly equipment according to claim 2, characterized in that, The height adjustment component includes: A first cylinder is disposed on the recessed bottom wall, and the first cylinder is electrically connected to the control component; Multiple support rods, one end of which is connected to the first push rod of the first cylinder, and the other end of which is connected to the first platform or the auxiliary platform. The first push rod extends vertically, and the multiple support rods are arranged at intervals along the periphery of the corresponding first platform or the auxiliary platform.

4. The mask assembly equipment according to claim 2, characterized in that, The clamping adjustment component includes: The second cylinder is disposed on the positioning platform. The second cylinder is electrically connected to the control component. The second push rod of the second cylinder extends in the horizontal direction. A positioning plate is disposed on the second push rod, and the second cylinder enables the positioning plate to move horizontally to approach or move away from the mask frame; A first clamping block is disposed on the positioning plate; The second clamping block is disposed on the positioning plate, and the second clamping block is spaced above the first clamping block; A drive unit is disposed on the positioning plate. The drive unit is electrically connected to the control unit and is connected to at least one of the first clamping block and the second clamping block, so that the first clamping block and the second clamping block can move closer to each other to clamp the mask frame or move further apart to release the mask frame.

5. The mask assembly equipment according to claim 4, characterized in that, The first clamping block has a first gasket on the side facing the second clamping block, and the second clamping block has a second gasket on the side facing the first clamping block. When the first clamping block and the second clamping block clamp the mask frame, the first gasket and the second gasket are in contact with the two sides of the mask frame respectively. The first gasket and the second gasket are made of polyurethane.

6. The mask assembly equipment according to claim 4, characterized in that, The number of clamping adjustment components includes eight sets, and the eight sets of clamping adjustment components are respectively disposed at the four corners of the recess. In the two sets of clamping adjustment components disposed at each corner, the second push rod of one set of clamping adjustment components extends along a first direction so that a portion of the outer edge of the mask frame extends into or out of the space between the first clamping block and the second clamping block, and the second push rod of the other set of clamping adjustment components extends along a second direction so that a portion of the outer edge of the mask frame extends into or out of the space between the first clamping block and the second clamping block. The first direction and the second direction are perpendicular to each other.

7. The mask assembly equipment according to any one of claims 1-6, characterized in that, The surface of the positioning platform is provided with a wear-resistant layer, the wear-resistant layer being made of nylon; and / or, The surface of the first stage is provided with a wear-resistant layer, the wear-resistant layer being made of nylon; and / or, The surface of the auxiliary platform is provided with a wear-resistant layer, and the wear-resistant layer is made of nylon.

8. The mask assembly equipment according to any one of claims 1-6, characterized in that, When the surfaces of the first stage, the plurality of auxiliary stages, and the positioning platform are flush, a first gap exists between the outer edge of the outermost auxiliary stage and the edge of the positioning platform forming the recess, the first gap being less than or equal to 1 mm; and / or, A second gap exists between the first stage and the adjacent auxiliary stage, the second gap being less than or equal to 1 mm; and / or, There is a third gap between any adjacent auxiliary stages, the third gap being less than or equal to 1 mm.

9. A method for assembling a photomask, applied to the photomask assembly equipment according to any one of claims 1-8, wherein the photomask includes a mask frame and a plurality of mask strips, and the assembly method includes: Obtain the mask frame to be assembled and multiple mask strips; The mask frame is placed on the positioning platform and the first alignment is performed based on the platform. The center of the mask frame is initially aligned with the center of the platform, wherein the surface of the first platform and the surfaces of the multiple auxiliary platforms are flush with the surface of the positioning platform. The multiple sets of height adjustment components select at least one of the first platform and the multiple auxiliary platforms according to the size of the mask frame to carry the mask frame up to the preset height, and the outer edge of the mask frame is exposed outside the platform; The mask frame is clamped to the outer edge by multiple sets of clamping adjustment components, and the mask frame is tensioned. The tensioned mask frame is re-aligned a second time by using multiple sets of clamping adjustment components, aligning the center of the tensioned mask frame with the center of the platform of the raised part; Multiple mask strips are assembled onto the tensioned mask frame.

10. The method for assembling a mask template according to claim 9, characterized in that, After assembling multiple mask strips into the tensioned mask frame, the assembly method further includes: The positioning component is placed below the magnetron sputtering machine, and the positioning component is equipped with the assembled mask template; The assembled mask template is aligned for the third time by multiple sets of clamping adjustment components so that the center of the mask frame is aligned with the center of the working area of ​​the magnetron sputtering machine. Determine whether each cutout area on the mask template is aligned with the preset deposition area of ​​the magnetron sputtering machine. If so, the assembled mask template can be removed for the next assembly. Otherwise, the misaligned mask strips are removed and reassembled until aligned.

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