Mask and mask assembly

Abstract

The application discloses a mask and a mask assembly. The mask comprises an outer frame and a first mask strip linked with the outer frame, and the first mask strip extends along a first direction. The first mask strip comprises a first mask component, a second mask component and a first telescopic component for adjusting the distance between the first mask component and the second mask component. The first mask component and the second mask component extend side by side along the first direction. At least one of the side of the first mask component close to the second mask component and the side of the second mask component close to the first mask component is provided with a first telescopic component accommodating groove. When the first telescopic component is in a non-extended state, the distance between the first mask component and the second mask component is minimum. When the first telescopic component is in an extended state, the distance between the first mask component and the second mask component is increased. The technical scheme provided by the application improves the production efficiency of the display panel and reduces the production cost of the display panel.

Description

Technical Field

[0001] This invention relates to the field of mask technology, and more particularly to a mask plate and a mask assembly. Background Technology

[0002] With the development of display technology, the requirements for the luminous performance of display panels are becoming increasingly stringent.

[0003] Currently, to ensure the light-emitting performance of display panels, inorganic and organic encapsulation layers are typically used to encapsulate the light-emitting devices within the panel. Different sizes of display panels require different aperture masks; a single mask cannot meet the needs of products of varying sizes. Each adjustment necessitates redesigning and remanufacturing the mask, increasing both time and cost. Summary of the Invention

[0004] This invention provides a photomask and a photomask assembly to improve the production efficiency of display panels and reduce the production cost of display panels.

[0005] According to one aspect of the present invention, a photomask is provided, comprising: an outer frame and at least one first photomask strip connected to the outer frame, the first photomask strip extending along a first direction; wherein the first photomask strip comprises:

[0006] A first mask component, a second mask component, and a first telescopic component for adjusting the distance between the first mask component and the second mask component;

[0007] The first mask member and the second mask member extend side by side along the first direction; at least one location of the first mask member near the second mask member and the second mask member near the first mask member is provided with a first telescopic member receiving groove; when the first telescopic member is in a non-extended state, the first telescopic member is located in the first telescopic member receiving groove, and the distance between the first mask member and the second mask member is minimal; when the first telescopic member is in an extended state, at least a portion of the first telescopic member is located outside the first telescopic member receiving groove, and the distance between the first mask member and the second mask member increases.

[0008] Optionally, a first receiving groove is provided on the side of the first mask member close to the second mask member;

[0009] The second mask component has a second receiving groove on the side near the first mask component;

[0010] When the first telescopic member is in a non-extended state, a portion of the first telescopic member is located in the first receiving groove, and another portion is located in the second receiving groove;

[0011] The first telescopic member can extend and retract in a direction perpendicular to the first direction.

[0012] Optionally, the first telescopic member includes a telescopic sleeve; the telescopic sleeve includes an outer sleeve and an inner sleeve that can slide relative to each other in the outer sleeve along a direction perpendicular to the first direction;

[0013] When the first telescopic member is in a non-extended state, the outer cylinder is located in the first receiving groove, the end of the inner cylinder closer to the outer cylinder is located in the outer cylinder, and the end of the inner cylinder farther from the outer cylinder is located in the second receiving groove;

[0014] The end of the inner cylinder away from the outer cylinder is fixedly connected to the second mask component.

[0015] Optionally, the portion of the first telescopic member located in the first receiving groove is fixed in the first receiving groove; the portion of the first telescopic member located in the second receiving groove is fixed in the second receiving groove.

[0016] Alternatively, the first telescopic member can slide in the first receiving groove in a direction perpendicular to the first direction, and / or the first telescopic member can slide in the second receiving groove in a direction perpendicular to the first direction.

[0017] Optionally, in the first mask strip, the number of the first telescopic members is one, the first telescopic member extends in the first direction, and the length of the first telescopic member in the first direction is less than or equal to the length of the first mask member in the first direction, and less than or equal to the length of the second mask member in the first direction;

[0018] Alternatively, in the first mask strip, there may be multiple first telescopic members, and these multiple first telescopic members may be arranged at intervals in the first direction.

[0019] Optionally, the mask may further include:

[0020] At least one second mask strip connected to the outer frame, the second mask strip extending along a second direction different from the first direction, the first mask strip and the second mask strip forming a plurality of openings;

[0021] Preferably, there are multiple first mask strips, and the multiple first mask strips are arranged at intervals along the second direction;

[0022] Preferably, there are multiple second mask strips, and the multiple second mask strips are arranged at intervals along the first direction;

[0023] Preferably, the first direction and the second direction are perpendicular to each other.

[0024] Optionally, in the intersection area of ​​the second mask strip and the first mask strip, the second mask strip is in a zigzag shape to make way for the extension of the first mask strip;

[0025] Preferably, the second mask strip includes a plurality of mask segments extending along the second direction and a connecting segment for connecting two adjacent mask segments; the connecting segment is located in the intersection area and on the side of the first mask strip closer to the substrate to be deposited; the mask segments are disposed in the same layer as the first mask strip, and the two mask segments connected by the connecting segment are located on opposite sides of the first mask strip;

[0026] Preferably, the surface of the mask segment away from the substrate to be deposited is flush with the surface of the first mask strip away from the substrate to be deposited;

[0027] Preferably, a first slider is provided on the surface of the end of the mask segment near the connecting segment; a first groove extending along the second direction is provided on the surface of the connecting segment near the mask segment, the first slider is embedded in the first groove and can slide along the first groove.

[0028] Optionally, each of the mask segments includes:

[0029] A first mask segment, a second mask segment, and a second telescopic member for adjusting the spacing between the first mask segment and the second mask segment;

[0030] The first mask segment and the second mask segment extend side by side along the second direction; at least one location of the first mask segment near the second mask segment and the second mask segment near the first mask segment is provided with a second telescopic member receiving groove; when the first telescopic segment is in a non-extended state, the second telescopic member is located in the second telescopic member receiving groove, and the distance between the first mask segment and the second mask segment is minimal; when the second telescopic member is in an extended state, at least a portion of the second telescopic member is located outside the second telescopic member receiving groove, and the distance between the first mask segment and the second mask segment increases.

[0031] According to another aspect of the present invention, a mask assembly is provided, comprising: a mask press plate and a mask plate as described in any embodiment of the present invention; the mask press plate is located on the surface of the mask plate away from the substrate to be deposited.

[0032] Optionally, the mask plate includes a plate frame and at least one first plate strip fixed to the plate frame, each of the first plate strips being located on the surface of a first mask strip away from the substrate to be deposited;

[0033] Each of the first mask members and the second mask members of the first mask strip has a second slider on the surface near the first mask strip; the surface of the first pressure plate strip near the first mask strip is provided with a second groove extending in a direction perpendicular to the first direction, and the second sliders on the surfaces of the first mask members and the second mask members are embedded in the second groove; when the distance between the first mask members and the second mask members changes, the second slider slides in the second groove;

[0034] Wherein, the width of the first pressure plate strip is greater than or equal to the maximum value of the distance between the first mask member and the second mask member, and less than or equal to the width of the first mask strip when the distance between the first mask member and the second mask member is the minimum;

[0035] Preferably, the mask further includes: at least one second mask strip connected to the outer frame, the second mask strip extending along a second direction different from the first direction, the first mask strip and the second mask strip forming a plurality of openings; the mask pressure plate further includes at least one second pressure plate strip fixed to the pressure plate frame, each of the first pressure plate strips corresponding to a surface of a second mask strip away from the substrate to be deposited.

[0036] This invention provides a photomask and a photomask assembly. The photomask includes an outer frame and at least one first mask strip connected to the outer frame, the first mask strip extending along a first direction. The first mask strip includes a first mask component, a second mask component, and a first telescopic component for adjusting the distance between the first mask component and the second mask component. The first mask component and the second mask component extend side-by-side along the first direction. At least one location on the side of the first mask component near the second mask component and the side of the second mask component near the first mask component is provided with a first telescopic component receiving groove. When the first telescopic component is in a non-extended state, the first telescopic component is located in the first telescopic component receiving groove, and the distance between the first mask component and the second mask component is minimized. When the first telescopic component is in an extended state, at least a portion of the first telescopic component is located outside the first telescopic component receiving groove, and the distance between the first mask component and the second mask component increases. The technical solution provided by this invention, by setting the width of the first mask strip in the photomask to be adjustable, allows for adjustable opening sizes in the photomask, enabling it to accommodate display panels of different sizes, thereby improving the production efficiency of display panels and reducing the production cost of display panels.

[0037] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of the present invention, nor is it intended to limit the scope of the invention. Other features of the invention will become readily apparent from the following description. Attached Figure Description

[0038] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0039] Figure 1 This is a top view of a mask provided in an embodiment of the present invention;

[0040] Figure 2 yes Figure 1 The structure shown is a cross-sectional view along AA1.

[0041] Figure 3 yes Figure 1 Another cross-sectional view of the structure shown along AA1;

[0042] Figure 4 yes Figure 1 Another cross-sectional view of the structure shown along AA1;

[0043] Figure 5 yes Figure 1 Another cross-sectional view of the structure shown along AA1;

[0044] Figure 6 This is a top view of another mask provided in an embodiment of the present invention;

[0045] Figure 7 yes Figure 6 The structure shown is a cross-sectional view along BB1.

[0046] Figure 8 yes Figure 6 Another cross-sectional view of the structure shown along BB1;

[0047] Figure 9 yes Figure 6 Another cross-sectional view of the structure shown along BB1;

[0048] Figure 10 This is a top view of another mask provided in an embodiment of the present invention;

[0049] Figure 11 yes Figure 10 Another cross-sectional view of the structure shown along CC1;

[0050] Figure 12 This is a top view of a mask assembly provided in an embodiment of the present invention;

[0051] Figure 13 This is a top view of a mask press plate provided in an embodiment of the present invention;

[0052] Figure 14 yes Figure 12 The structure shown is a cross-sectional view along DD1.

[0053] Figure 15 This is a top view of another mask plate provided in an embodiment of the present invention. Detailed Implementation

[0054] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0055] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0056] This invention provides a photomask. Figure 1 This is a top view of a photomask provided in an embodiment of the present invention. Figure 2 yes Figure 1 The diagram shows a cross-sectional view of the structure along AA1. Figure 3 yes Figure 1 The diagram shows another cross-sectional view of the structure along AA1. Figure 4 yes Figure 1 The diagram shows another cross-sectional view of the structure along AA1. Figure 5 yes Figure 1 The structure shown is another cross-sectional view along AA1, see reference. Figures 1-5The photomask 10 includes: an outer frame 100 and at least one first mask strip 110 connected to the outer frame 100, the first mask strip 110 extending along a first direction X; wherein, the first mask strip 110 includes:

[0057] A first mask member 111, a second mask member 112, and a first telescopic member 113 for adjusting the distance between the first mask member 111 and the second mask member 112;

[0058] A first mask member 111 and a second mask member 112 extend side-by-side along a first direction X; a first telescopic member receiving groove is provided at least at one location on the side of the first mask member 111 near the second mask member 112 and at the side of the second mask member 112 near the first mask member 111; wherein, Figure 2 The illustrated structure exemplarily shows that a first telescopic member receiving groove is provided on the side of the first mask member 111 near the second mask member 112. Figure 3 The structure shown exemplarily illustrates that the second mask member 112 is provided with a first telescopic member receiving groove on the side near the first mask member 111; Figure 4 and Figure 5 The structure shown exemplarily illustrates that both the first mask member 111 on the side near the second mask member 112 and the second mask member 112 on the side near the first mask member 111 have a first telescopic member receiving groove.

[0059] refer to Figures 2-5 When the first telescopic member 113 is in a non-extended state, the first telescopic member 113 is located in the first telescopic member receiving groove, and the distance between the first mask member 111 and the second mask member 112 is minimal. Figure 6 This is a top view of another mask provided in an embodiment of the present invention. Figure 7 yes Figure 6 The structure shown is a cross-sectional view along BB1, for reference. Figure 6 and Figure 7 When the first telescopic member 113 is in the extended state, at least a portion of the first telescopic member 113 is located outside the first telescopic member receiving groove, and the distance between the first mask member 111 and the second mask member 112 increases. Figure 7 Example shown Figure 4 The cross-sectional structure of the first telescopic member 113 in the structure shown is in the extended state.

[0060] Specifically, the mask 10 includes an outer frame 100 and at least one first mask strip 110 connected to the outer frame 100. Multiple openings K are formed in the area enclosed by the outer frame 100 through the at least one first mask strip 110. Each opening K corresponds to a deposition area of ​​the substrate to be deposited, and the area where the first mask strip 110 is located is a non-deposition area. For example, the mask 10 can be used to fabricate a display panel motherboard, which includes multiple display panels. Each opening K can correspond to a deposition area of ​​the inorganic encapsulation layer of a display panel. In other embodiments of the present invention, the mask 10 may further include at least one second mask strip connected to the outer frame 100. The second mask strip extends along a second direction Y different from the first direction X, and a greater number of openings K can be formed through the at least one first mask strip 110 and the at least one second mask strip.

[0061] The first mask strip 110 includes a first mask member 111 and a second mask member 112 extending side-by-side along a first direction X, and a first telescopic member 113 for adjusting the distance between the first mask member 111 and the second mask member 112. The first telescopic member 113 is located between the first mask member 111 and the second mask member 112, with one end fixed to the first mask member 111 and the other end fixed to the second mask member 112. The first telescopic member 113 can extend and retract in its axial direction (perpendicular to the first direction X). When the first telescopic member 113 extends along its axial direction, its length increases, and the distance between the first mask member 111 and the second mask member 112 increases with the increase in length. When the first telescopic member 113 retracts along its axial direction, its length decreases, and the distance between the first mask member 111 and the second mask member 112 decreases with the decrease in length. When the length of the first telescopic member 113 retracts to its minimum length, i.e., when the first telescopic member 113 is in a non-extended state, the distance between the first mask member 111 and the second mask member 112 reaches its minimum. At this point, the first telescopic member 113 is completely or mostly located within the first telescopic member receiving groove. The minimum distance between the first mask member 111 and the second mask member 112 may be zero or non-zero.

[0062] The width of the first mask strip 110 is considered to be the distance between the side of the first mask member 111 away from the second mask member 112 and the side of the second mask member 112 away from the first mask member 111. Therefore, by adjusting the distance between the first mask member 111 and the second mask member 112 through the first telescopic member 113, the width of the first mask strip 110 can be adjusted. Changes in the width of the first mask strip 110 will cause changes in the size of the opening K in the mask 10. The technical solution provided by this embodiment of the invention, by setting the width of the first mask strip 110 in the mask 10 to be adjustable, allows for the adjustment of the size of the opening K in the mask 10, making it suitable for display panels of different sizes, thereby improving the production efficiency of the display panel and reducing the production cost of the display panel. Moreover, by setting different widths after adjustment of the first mask strip 110, the preparation of mixed-layout display panel motherboards can also be achieved.

[0063] It should be noted that when the distance between the first mask member 111 and the second mask member 112 increases as the first telescopic member 113 extends, a gap is formed between the first mask member 111 and the second mask member 112. Therefore, a shielding plate 114 may be provided on the surface of the first mask strip 110 away from the substrate to be deposited or on the surface of the first mask strip 110 close to the substrate to be deposited, to shield the gap between the first mask member 111 and the second mask member 112, ensuring that the first mask strip 110 shields the non-deposition area. The first mask strip may also include a shielding plate 114 extending along the first direction X.

[0064] Preferably, a shielding plate 114 is provided on the surface of the first mask strip 110 away from the substrate to be deposited. The mask 10 provided in this embodiment can be used in conjunction with the mask pressure plate 20. The mask pressure plate 20 is located on the surface of the mask 10 away from the substrate to be deposited. By applying downward pressure to the mask 10 through the mask pressure plate 20, the gap between the mask 10 and the substrate to be deposited is reduced, thereby reducing the amount of gas escaping from the gap. This, in turn, reduces the amount of inorganic encapsulation material deposited on the non-encapsulated area, alleviates or avoids unevenness in the non-encapsulated area, facilitates the smooth progress of subsequent production processes such as cutting, and improves the production yield of OLED displays. Therefore, the mask pressure plate 20 can be reused as the shielding plate 114.

[0065] Based on the above embodiments, refer to Figure 4Optionally, the first mask member 111 is provided with a first receiving groove on the side near the second mask member 112; the second mask member 112 is provided with a second receiving groove on the side near the first mask member 111. The first telescopic member receiving groove includes the first receiving groove and the second receiving groove. It can be understood that the first receiving groove and the second receiving groove together constitute the first telescopic member receiving groove. When the first telescopic member 113 is in a non-extended state, a part of the first telescopic member 113 is located in the first receiving groove, and the other part is located in the second receiving groove.

[0066] The technical solution provided by this invention, by separately distributing the first telescopic member receiving groove on one side of two mask members, reduces the difficulty of setting grooves on one side of the first mask member 111 or the second mask member 112 compared to distributing the first telescopic member receiving groove on one side of a single mask member. Furthermore, it increases the depth of the first telescopic member receiving groove, thereby increasing the length of the first telescopic member 113 in its non-extended state, and consequently, increasing the length of the first telescopic member 113 in its fully extended state. In its fully extended state, the first telescopic member 113 reaches its maximum length. Increasing the length of the first telescopic member 113 in its fully extended state expands the length adjustment range of the first telescopic member 113, i.e., expands the width adjustment range of the first mask strip 110, thereby expanding the application scenarios of the mask plate 10.

[0067] Based on the above embodiments, a comparison Figure 4 and Figure 7 Optionally, the portion of the first telescopic member 113 located in the first receiving groove is fixed in the first receiving groove; the portion of the first telescopic member 113 located in the second receiving groove is fixed in the second receiving groove. This can be understood as the portion of the first telescopic member 113 located in the first receiving groove having a relatively fixed position, and the portion of the first telescopic member 113 located in the second receiving groove having a relatively fixed position, neither of which will slide relative to the other in the groove. The width of the first mask strip 110 is adjusted only by the extension and retraction of the first telescopic member 113.

[0068] Based on the above embodiments, Figure 8 yes Figure 6 The structure shown is another cross-sectional view along BB1, for comparison. Figure 4 and Figure 8 Optionally, the first telescopic member 113 can slide in the first receiving groove in a direction perpendicular to the first direction X, and / or the first telescopic member 113 can slide in the second receiving groove in a direction perpendicular to the first direction X. Figure 8An exemplary embodiment shows that the first telescopic member 113 can slide in a first receiving groove in a direction perpendicular to the first direction X, and the first telescopic member 113 can slide in a second receiving groove in a direction perpendicular to the first direction X.

[0069] This can be understood as follows: the first telescopic member 113 can slide in the first receiving groove along a direction perpendicular to the first direction X; the portion of the first telescopic member 113 located in the second receiving groove is relatively fixed in position within the second receiving groove and will not slide; the width of the first mask strip 110 can be adjusted by the extension and retraction of the first telescopic member 113 and by its relative sliding within the first receiving groove. Alternatively, the second telescopic member can slide in the second receiving groove along a direction perpendicular to the first direction X; the portion of the first telescopic member 113 located in the first receiving groove is relatively fixed in position within the first receiving groove and will not slide; the width of the first mask strip 110 can be adjusted by the extension and retraction of the first telescopic member 113 and by its relative sliding within the second receiving groove. Alternatively, the first telescopic member 113 can slide in the first receiving groove in a direction perpendicular to the first direction X, and the first telescopic member 113 can slide in the second receiving groove in a direction perpendicular to the first direction X. The width of the first mask strip 110 can be adjusted by the extension and retraction of the first telescopic member 113, the relative sliding of the first telescopic member 113 in the second receiving groove, and the relative sliding of the first telescopic member 113 in the second receiving groove.

[0070] It should be noted that when the first telescopic member 113 is configured to slide in the first receiving groove in a direction perpendicular to the first direction X, a limiting structure is provided at the opening of the first receiving groove to prevent the first telescopic member 113 from slipping out of the first receiving groove; when the first telescopic member 113 is configured to slide in the second receiving groove in a direction perpendicular to the first direction X, a limiting structure is provided at the opening of the second receiving groove to prevent the first telescopic member 113 from slipping out of the second receiving groove.

[0071] The technical solution provided by the embodiments of the present invention expands the adjustment range of the width of the first mask strip 110 by setting the first telescopic member 113 to slide in the first receiving groove in a direction perpendicular to the first direction X, and / or setting the first telescopic member 113 to slide in the second receiving groove in a direction perpendicular to the first direction X.

[0072] Based on the above embodiments, refer to Figures 2-5 Optionally, the first telescopic member 113 includes a telescopic sleeve; the telescopic sleeve includes an outer cylinder 1131 and an inner cylinder 1132 that can slide relative to the outer cylinder 1131 in a direction perpendicular to the first direction X, thereby realizing the adjustment of the length of the first telescopic member 113. In some embodiments of the present invention, reference is made to... Figures 2-4When the first telescopic member 113 is in the non-extended state, the outer cylinder 1131 is located in the first receiving groove, the end of the inner cylinder 1132 near the outer cylinder 1131 is located in the outer cylinder 1131, and the end of the inner cylinder 1132 away from the outer cylinder 1131 is located in the second receiving groove; the end of the inner cylinder 1132 away from the outer cylinder 1131 is fixedly connected to the second mask member 112. In other embodiments of the present invention, refer to Figure 5 The outer cylinder 1131 is located in the first receiving groove and part of the second receiving groove. The inner cylinder 1132 is located in the outer cylinder 1131 at one end, and in the second receiving groove at the other end.

[0073] Based on the above embodiments, optionally, Figure 9 yes Figure 6 The structure shown is another cross-sectional view along BB1, see reference. Figure 9 A second slider 02 is provided on the side of the first mask component 111 and the second mask component 112 away from the substrate to be deposited. A second groove is provided on the surface of the shielding plate 114 or the mask pressure plate 20 (first pressure plate strip 21). The second slider 02 is embedded in the second groove to prevent the shielding plate 114 or the mask pressure plate 20 from falling off when the first mask component 111 and the second mask component 112 move to both sides.

[0074] Based on the above embodiments, optionally, in the first mask strip 110, the number of the first telescopic member 113 is one, the first telescopic member 113 extends in the first direction X, and the length of the first telescopic member 113 in the first direction X is less than or equal to the length of the first mask member 111 in the first direction X, and less than or equal to the length of the second mask member 112 in the first direction X.

[0075] The length of the first mask member 111 in the first direction X is equal to the length of the second mask member 112 in the first direction X. For example, the length of the first mask member 111 in the first direction X can be one-half, two-thirds, or three-quarters of its original length in the first direction X. By providing a first telescopic member 113 with a longer length in the first direction X, the width of the first mask strip 110 can be adjusted synchronously and uniformly at different positions. Furthermore, if the length of the first telescopic member 113 in the first direction X is equal to the length of the first mask member 111 in the first direction X, the deposited material can be blocked by the first telescopic member 113, eliminating the need for an additional shielding plate 114.

[0076] Based on the above embodiments, optionally, the first mask strip 110 may have multiple first telescopic members 113, which are spaced apart in the first direction X. By providing multiple first telescopic members 113 spaced apart in the first direction X, it is possible to ensure that the width of the first mask strip 110 can be adjusted synchronously and equally at different positions, while also improving the pressure-bearing capacity of the first mask member 111 and the second mask member 112.

[0077] Based on the above embodiments, Figure 10 This is a top view of another mask provided in an embodiment of the present invention, see reference. Figure 10 Optionally, the mask plate 10 may also include at least one second mask strip 120 connected to the outer frame 100. The second mask strip 120 extends along a second direction Y different from the first direction X. A greater number of openings K can be formed by at least one first mask strip 110 and at least one second mask strip 120.

[0078] refer to Figure 10 In the photomask 10, there are multiple first mask strips 110, arranged alternately along the second direction Y. There are also multiple second mask strips 120, arranged alternately along the first direction X. The first direction X and the second direction Y can be perpendicular to each other. In the intersection region Q1 between the second mask strip 120 and the first mask strip 110, the second mask strip 120 is zigzag-shaped to make way for the extension of the first mask strip 110. The second mask strip 120 can be a single, integral structure or segmented.

[0079] Optional, Figure 11 yes Figure 10 The structure shown is another cross-sectional view along CC1, see reference. Figure 11 The second mask strip 120 includes a plurality of mask segments 121 extending along the second direction Y and a connecting segment 122 for connecting two adjacent mask segments 121; the connecting segment 122 is located in the intersection region Q1 and is located on the side of the first mask strip 110 closer to the substrate to be deposited; the mask segments 121 are disposed in the same layer as the first mask strip 110, and the two mask segments 121 connected by the connecting segment 122 are located on opposite sides of the first mask strip 110.

[0080] Further reference Figure 11A first slider 01 is provided on the surface of the end of the mask segment 121 near the connecting segment 122; a first groove extending in the second direction Y is provided on the surface of the connecting segment 122 near the mask segment 121. The first slider 01 is embedded in the first groove and can slide along the first groove. The mask segment 121 and the connecting segment 122 can be connected by the first slider 01 and the first groove. In addition, the mask segment 121 and the connecting segment 122 can also slide relative to each other by the first slider 01 and the first groove. When the width of the first mask strip 110 located between two adjacent mask segments 121 increases, the mask segment 121 can slide away from the first mask strip 110 relative to the connecting segment 122, thereby increasing the distance between the two adjacent mask segments 121 and providing space for increasing the width of the first mask strip 110. The first groove can be a trapezoidal groove, and the first slider 01 can be a trapezoidal protrusion that fits into the first groove.

[0081] Based on the above embodiments, refer to Figure 11 Optionally, the surface of the mask section 121 away from the substrate to be deposited is flush with the surface of the first mask strip 110 away from the substrate to be deposited, thereby facilitating the placement of the mask plate 20.

[0082] Based on the above embodiments, optionally, each mask segment 121 includes:

[0083] A first mask segment, a second mask segment, and a second telescopic member for adjusting the spacing between the first mask segment and the second mask segment;

[0084] The first mask segment and the second mask segment are arranged side by side along the second direction Y; at least one of the first mask segment near the second mask segment and the second mask segment near the first mask segment is provided with a second telescopic member receiving groove; when the first telescopic segment is in a non-extended state, the second telescopic member is located in the second telescopic member receiving groove, and the distance between the first mask segment and the second mask segment is minimal; when the second telescopic member is in an extended state, at least a portion of the second telescopic member is located outside the second telescopic member receiving groove, and the distance between the first mask segment and the second mask segment increases.

[0085] The technical solution provided by the embodiments of the present invention, in addition to setting the width of the first mask strip 110 in the mask plate 10 to be adjustable, also sets the width of the second mask strip 120 to be adjustable, so that the size of the opening K in the mask plate 10 can be further finely adjusted, applicable to display panels of different sizes, thereby improving the production efficiency of the display panel and reducing the production cost of the display panel.

[0086] The configuration of the second telescopic member can refer to the configuration of the second telescopic member in any of the embodiments described above, and will not be repeated here. The configuration of the receiving groove for the second telescopic member can refer to the configuration of the receiving groove for the first telescopic member in any of the embodiments described above, and will not be repeated here.

[0087] Figure 12 This is a top view of a mask assembly provided in an embodiment of the present invention. Figure 13 This is a top view of a mask press plate provided in an embodiment of the present invention. Figure 14 yes Figure 12 The structure shown is a cross-sectional view along DD1, for reference. Figures 12-14 The present invention also provides a mask assembly, including: a mask pressure plate 20 and a mask plate 10 as described in any embodiment of the present invention; the mask pressure plate 20 is located on the surface of the mask plate 10 away from the substrate 30 to be deposited.

[0088] By applying downward pressure to the mask plate 10 through the mask plate 20, the gap between the mask plate 10 and the substrate 30 to be deposited is reduced, thereby reducing the amount of gas overflowing from the gap, which in turn reduces the amount of inorganic encapsulation material deposited on the non-encapsulated area, reduces the area of ​​the shadow area S2 formed on the periphery of the area to be deposited S1, alleviates or avoids unevenness in the non-encapsulated area, facilitates the smooth progress of subsequent production processes such as cutting, and improves the production yield of OLED displays.

[0089] Optional, Figure 12 The schematic diagram of the surface structure along the EE1 section of the structure shown is as follows: Figures 2-5 ,refer to Figure 12 , Figure 13 , Figure 14 and combined Figures 1-5 The mask plate 20 includes a plate frame 200 and at least one first plate strip 210 fixed to the plate frame 200. Each first plate strip 210 is located on the surface of a first mask strip 110 away from the substrate 30 to be deposited. The shape and width of the plate frame 200 and the outer frame 100 of the mask 10 can be the same, so that the plate frame 200 and the outer frame 100 of the mask 10 are aligned and arranged to prevent the plate frame 200 from affecting the areas to be deposited and non-deposited areas on the substrate 30 to be deposited.

[0090] Optional, see reference Figure 9Each of the first mask members 111 and the second mask members 112 of the first mask strip 110 has a second slider 02 on the surface of the first mask member 110. The surface of the first pressure plate strip 210 near the first mask member 110 is provided with a second groove extending in a direction perpendicular to the first direction X. The second slider 02 on the surface of the first mask member 111 and the second mask member 112 is embedded in the second groove. When the distance between the first mask member 111 and the second mask member 112 changes, the second slider 02 slides in the second groove.

[0091] Specifically, the first mask component 111 and the first pressure plate strip 210, as well as the second mask component 112 and the first pressure plate strip 210, can be connected by the second slider 02 and the second groove to prevent the mask pressure plate 20 from falling off during the deposition process and to prevent the mask pressure plate 20 from falling off when the first mask component 111 and the second mask component 112 move to both sides. Furthermore, the first mask component 111 and the first pressure plate strip 210, as well as the second mask component 112 and the first pressure plate strip 210, can also slide relative to each other by the second slider 02 and the second groove to prevent the first pressure plate strip 210 from obstructing the movement of the first mask component 111 and the second mask component 112 to both sides. The second groove can be a trapezoidal groove, and the second slider 02 can be a trapezoidal protrusion that engages with the second groove.

[0092] Optionally, the width of the first pressure strip 210 is greater than or equal to the maximum value of the distance between the first mask member 111 and the second mask member 112, and less than or equal to the width of the first mask strip 110 when the distance between the first mask member 111 and the second mask member 112 is minimum. The distance between the first mask member 111 and the second mask member 112 is the distance from the side of the first mask member 111 closest to the second mask member 112 to the side of the second mask member 112 closest to the first mask member 111.

[0093] Specifically, setting the width of the first pressure strip 210 to be greater than or equal to the maximum spacing between the first mask member 111 and the second mask member 112 ensures that the first mask strip 110 blocks the non-deposition area when the mask pressure plate 20 is reused as a shielding plate 114, and prevents the first pressure strip 210 from falling out of the gap between the first mask member 111 and the second mask member 112. Setting the width of the first pressure strip 210 to be less than or equal to the width of the first mask strip 110 when the spacing between the first mask member 111 and the second mask member 112 is minimum prevents the first pressure strip 210 from blocking the deposition area when the width of the first mask strip 110 needs to be set to the minimum.

[0094] Optional, see reference Figure 10The mask 10 further includes at least one second mask strip 120 connected to the outer frame 100, the second mask strip 120 extending along a second direction Y different from the first direction X, and the first mask strip 110 and the second mask strip 120 forming a plurality of openings K; based on this, Figure 15 This is a top view of another mask plate provided in an embodiment of the present invention, for reference. Figure 15 The mask plate 20 further includes at least one second pressure plate strip 220 fixed to the pressure plate frame 200. In the deposition process, each first pressure plate strip 210 is located on the surface of a second mask strip 120 away from the substrate 30 to be deposited.

[0095] Specifically, a first pressure plate strip 210 is provided on the side of each first mask strip 110 away from the substrate 30 to be deposited, and a second pressure plate strip 220 is provided on the side of each second mask strip 120 away from the substrate 30 to be deposited. This ensures that each first mask strip 110 and each second mask strip 120 are subjected to downward pressure from the mask pressure plate 20, thereby improving the uniformity of force at different positions of the mask 10, preventing the mask 10 from warping, and ensuring the uniformity of the distance between the mask 10 and the substrate 30 to be deposited at different positions, which is beneficial to improving the deposition effect of the inorganic encapsulation layer.

[0096] Furthermore, in the mask plate 10, multiple first mask strips 110 and multiple second mask strips 120 form a mesh structure; in the mask pressure plate 20, multiple first pressure plate strips 210 and multiple second pressure plate strips 220 form a mesh structure.

[0097] Note that the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of the present invention, the scope of which is determined by the scope of the appended claims.

Claims

1. A photomask, characterized in that, include: An outer frame and at least one first mask strip connected to the outer frame, the first mask strip extending along a first direction; wherein the first mask strip includes: A first mask component, a second mask component, and a first telescopic component for adjusting the distance between the first mask component and the second mask component; The first mask member and the second mask member extend side by side along the first direction; at least one location of the first mask member near the second mask member and the second mask member near the first mask member is provided with a first telescopic member receiving groove; when the first telescopic member is in a non-extended state, the first telescopic member is located in the first telescopic member receiving groove, and the distance between the first mask member and the second mask member is minimal; when the first telescopic member is in an extended state, at least a portion of the first telescopic member is located outside the first telescopic member receiving groove, and the distance between the first mask member and the second mask member increases.

2. The photomask according to claim 1, characterized in that, The first mask component has a first receiving groove on the side near the second mask component; The second mask component has a second receiving groove on the side close to the first mask component; When the first telescopic member is in a non-extended state, a portion of the first telescopic member is located in the first receiving groove, and another portion is located in the second receiving groove; The first telescopic member can extend and retract in a direction perpendicular to the first direction.

3. The photomask according to claim 2, characterized in that, The first telescopic component includes a telescopic sleeve; the telescopic sleeve includes an outer sleeve and an inner sleeve that can slide relative to each other in the outer sleeve along a direction perpendicular to the first direction; When the first telescopic member is in a non-extended state, the outer cylinder is located in the first receiving groove, the end of the inner cylinder near the outer cylinder is located in the outer cylinder, and the end of the inner cylinder away from the outer cylinder is located in the second receiving groove; The end of the inner cylinder away from the outer cylinder is fixedly connected to the second mask component.

4. The photomask according to claim 2, characterized in that, The portion of the first telescopic member located in the first receiving groove is fixed in the first receiving groove; the portion of the first telescopic member located in the second receiving groove is fixed in the second receiving groove. Alternatively, the first telescopic member can slide in the first receiving groove in a direction perpendicular to the first direction, and / or the first telescopic member can slide in the second receiving groove in a direction perpendicular to the first direction.

5. The photomask according to claim 2, characterized in that, In the first mask strip, there is one first telescopic member. The first telescopic member extends in the first direction, and the length of the first telescopic member in the first direction is less than or equal to the length of the first mask member in the first direction, and less than or equal to the length of the second mask member in the first direction. Alternatively, in the first mask strip, there may be multiple first telescopic members, and these multiple first telescopic members may be arranged at intervals in the first direction.

6. The photomask according to any one of claims 1 to 5, characterized in that, Also includes: At least one second mask strip connected to the outer frame, the second mask strip extending along a second direction different from the first direction, the first mask strip and the second mask strip forming a plurality of openings; Preferably, there are multiple first mask strips, and the multiple first mask strips are arranged at intervals along the second direction; Preferably, there are multiple second mask strips, and the multiple second mask strips are arranged at intervals along the first direction; Preferably, the first direction and the second direction are perpendicular to each other.

7. The photomask according to claim 6, characterized in that, In the intersection area of ​​the second mask strip and the first mask strip, the second mask strip is in a zigzag shape to make way for the extension of the first mask strip; Preferably, the second mask strip includes a plurality of mask segments extending along the second direction and a connecting segment for connecting two adjacent mask segments; The connecting segment is located in the intersection area and on the side of the first mask strip closer to the substrate to be deposited; the mask segment is disposed in the same layer as the first mask strip, and the two mask segments connected by the connecting segment are located on opposite sides of the first mask strip; Preferably, the surface of the mask segment away from the substrate to be deposited is flush with the surface of the first mask strip away from the substrate to be deposited; Preferably, a first slider is provided on the surface of the end of the mask segment near the connecting segment; a first groove extending along the second direction is provided on the surface of the connecting segment near the mask segment, the first slider is embedded in the first groove and can slide along the first groove.

8. The photomask according to claim 7, characterized in that, Each of the mask segments includes: A first mask segment, a second mask segment, and a second telescopic member for adjusting the spacing between the first mask segment and the second mask segment; The first mask segment and the second mask segment extend side by side along the second direction; at least one location of the first mask segment near the second mask segment and the second mask segment near the first mask segment is provided with a second telescopic member receiving groove; when the first telescopic segment is in a non-extended state, the second telescopic member is located in the second telescopic member receiving groove, and the distance between the first mask segment and the second mask segment is minimal; when the second telescopic member is in an extended state, at least a portion of the second telescopic member is located outside the second telescopic member receiving groove, and the distance between the first mask segment and the second mask segment increases.

9. A mask assembly, characterized in that, include: The mask plate and the mask according to any one of claims 1 to 8; The mask plate is located on the surface of the mask away from the substrate to be deposited.

10. The mask assembly according to claim 9, characterized in that, The mask plate includes a plate frame and at least one first plate strip fixed to the plate frame, each of the first plate strips being located on the surface of a first mask strip away from the substrate to be deposited. Each of the first mask members and the second mask members of the first mask strip has a second slider on the surface near the first mask strip; the surface of the first pressure plate strip near the first mask strip is provided with a second groove extending in a direction perpendicular to the first direction, and the second sliders on the surfaces of the first mask members and the second mask members are embedded in the second groove; when the distance between the first mask members and the second mask members changes, the second slider slides in the second groove; Wherein, the width of the first pressure plate strip is greater than or equal to the maximum value of the distance between the first mask member and the second mask member, and less than or equal to the width of the first mask strip when the distance between the first mask member and the second mask member is the minimum; Preferably, the mask further includes: at least one second mask strip connected to the outer frame, the second mask strip extending along a second direction different from the first direction, the first mask strip and the second mask strip forming a plurality of openings; the mask pressure plate further includes at least one second pressure plate strip fixed to the pressure plate frame, each of the first pressure plate strips corresponding to a surface of a second mask strip away from the substrate to be deposited.

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