Mask plate assembly, control method thereof, and evaporation apparatus

Abstract

The disclosure provides a mask plate assembly and a control method thereof and an evaporation equipment, and relates to the technical field of display. The mask plate assembly comprises an outer frame, the outer frame comprising a first frame, a second frame, a third frame and a fourth frame connected in sequence; the first frame and the third frame are respectively provided with a clamping groove extending along a first direction; a plurality of first covering strips extend along a second direction, the first end of the first covering strip is located within the clamping groove range of the first frame, and the second end of the first covering strip is located within the clamping groove range of the third frame; a first moving assembly comprises a first driving mechanism and a first supporting piece pair; wherein the first surface of the limiting part is used for supporting the first covering strip, the second surface of the limiting part is connected with the first end of the connecting part, the second end of the connecting part is connected with the first driving mechanism; the first driving mechanism is used for driving the first supporting piece pair to move synchronously, so that the first covering strip supported by the first supporting piece pair moves to a target position.

Description

Technical Field

[0001] This disclosure relates to the field of display technology, specifically to a mask assembly and its control method, and vapor deposition equipment. Background Technology

[0002] In the manufacturing process of display panels, chemical vapor deposition (CVD) is typically used in conjunction with a photomask to create the encapsulation layer. The aperture size of the photomask is precisely matched to the size of the display panel, reserving the cutting line area for the subsequent dicing process. However, different display panel models have different sizes, so a corresponding photomask is required for each model. This not only increases manufacturing costs but also necessitates photomask replacement when changing production batches, resulting in wasted manpower and time. Furthermore, different process chambers require different photomask models, and photomask replacement can easily lead to incompatibility issues between the photomask and the process chamber. Summary of the Invention

[0003] In view of this, the present disclosure provides a mask assembly and its control method, as well as a vapor deposition equipment.

[0004] In a first aspect, one embodiment of this disclosure provides a mask assembly, comprising: an outer frame, the outer frame including a first side frame, a second side frame, a third side frame, and a fourth side frame connected in sequence; the first side frame and the third side frame each having a slot extending along a first direction, the slot including a limiting opening; a plurality of first masking strips, the first masking strips extending along a second direction, the first end of the first masking strip being located within the slot of the first side frame, the second end of the first masking strip being located within the slot of the third side frame, the first direction intersecting the second direction; and a first moving component, the first moving component including a first... A drive mechanism and a pair of first support members; wherein the pair of first support members includes two support members, which are respectively disposed in the slots of the first frame and the third frame; the support members include a limiting part and a connecting part, the outer contour of the limiting part matches the opening shape of the limiting opening, the first surface of the limiting part is used to support the first covering strip, the second surface of the limiting part is connected to the first end of the connecting part, and the second end of the connecting part is connected to the first drive mechanism; the first drive mechanism is used to drive the pair of first support members to move synchronously, so that the first covering strip supported by the pair of first support members moves to the target position.

[0005] In conjunction with the first aspect, in some implementations of the first aspect, the second frame and the fourth frame are respectively provided with slots extending along the second direction; the mask assembly further includes: a plurality of second masking strips, the second masking strips extending along the first direction, the first end of the second masking strips being located within the slot range of the second frame, and the second end of the second masking strips being located within the slot range of the fourth frame; a second moving assembly, the second moving assembly including a second driving mechanism and a pair of second supporting members; wherein, the pair of second supporting members includes two supporting members respectively disposed in the slots of the second frame and the slots of the fourth frame; the second driving mechanism is used to drive the pair of second supporting members to move synchronously, so that the plurality of second masking strips and the plurality of first masking strips together form a plurality of target vapor deposition openings.

[0006] In conjunction with the first aspect, in some implementations of the first aspect, the cross-sectional shape of the limiting part includes a trapezoid, the long base of the trapezoid corresponds to the first surface of the limiting part, the short base of the trapezoid corresponds to the second surface of the limiting part, and the inclination angle of the side of the trapezoid is consistent with the inclination angle of the inner wall of the limiting opening; the first surface of the limiting part includes a first groove extending along the second direction, the bottom width of the first groove matches the width of the first covering strip; the side wall of the first groove is inclined to form a guide structure for the first covering strip.

[0007] In conjunction with the first aspect, in some implementations of the first aspect, the first driving mechanism includes a lifting part and a translation part; the lifting part is used to move the support member from a first height position to a second height position; wherein, at the first height position, the first surface of the limiting part is flush with the upper surface of the outer frame, so that the first covering strip supported by the support member rests on the upper surface of the outer frame; at the second height position, the first surface of the limiting part extends beyond the upper surface of the outer frame, so that the first covering strip supported by the support member moves away from the upper surface of the outer frame; the translation part is used to move the support member along a first direction when the support member is at the second height position.

[0008] In conjunction with the first aspect, in some implementations of the first aspect, the mask assembly further includes a sensor disposed at the end of the slot; the sensor is used to determine the initial position of the first masking strip.

[0009] In conjunction with the first aspect, in some implementations of the first aspect, the mask assembly further includes a storage slot disposed inside the first border and / or the third border for storing the first masking strip.

[0010] Secondly, one embodiment of this disclosure provides a control method for a mask assembly, applied to the mask assembly provided in the first aspect above. The control method for the mask assembly includes: acquiring a control command, the control command including target positions for each of a plurality of first masking strips; and, based on the control command, controlling a first driving mechanism to drive a pair of first supporting members to move synchronously, so that the first masking strips supported by the first supporting members move to their respective target positions.

[0011] In conjunction with the second aspect, in some implementations of the second aspect, the mask assembly further includes a sensor that, based on control commands, controls a first drive mechanism to drive a first support pair to move synchronously, including: determining an initial position of the first masking strip based on the sensor; determining a target moving distance of the first masking strip based on the initial position and control commands; controlling the first drive mechanism to drive the first support pair to move synchronously to the initial position and support the first masking strip; and controlling the first drive mechanism to drive the first support pair to move synchronously along a first direction by the target moving distance.

[0012] Thirdly, one embodiment of this disclosure provides a vapor deposition apparatus, including the mask assembly provided in the first aspect above.

[0013] In conjunction with the third aspect, in some implementations of the third aspect, the vapor deposition equipment further includes: a visual inspection device for detecting the actual position of the first masking strip after it has moved to the target position; and an adjustment device, disposed in the process chamber of the vapor deposition equipment, for cooperating with the visual inspection device to dynamically adjust the actual position of the first masking strip.

[0014] The mask assembly provided in this disclosure adjusts the spacing between multiple first masking strips through a first moving component, so that the opening size of the mask assembly is precisely matched with the size of different display panels. This avoids equipping each model of display panel with a corresponding mask, reducing manufacturing costs, saving manpower and time, and avoiding the problem of mask model mismatch with process chamber. Attached Figure Description

[0015] Figure 1 The image shown is a top view of a mask assembly provided in an exemplary embodiment of this disclosure.

[0016] Figure 2 As shown Figure 1 A schematic cross-sectional view of the mask assembly along A-A' provided in the illustrated embodiment.

[0017] Figure 3 The diagram shown is a structural schematic of a support member provided in an exemplary embodiment of this disclosure.

[0018] Figure 4 The diagram shown is a structural schematic of a first drive mechanism provided in an exemplary embodiment of this disclosure.

[0019] Figure 5 The image shown is a top view of a mask assembly provided in another exemplary embodiment of this disclosure.

[0020] Figure 6 The diagram shown is a schematic of a support member installed in a slot according to an exemplary embodiment of the present disclosure.

[0021] Figure 7 The diagram shown is a structural schematic of a support member provided in another exemplary embodiment of this disclosure.

[0022] Figure 8 The diagram shows a support member at a first height position and a second height position, provided in an exemplary embodiment of this disclosure.

[0023] Figure 9 The diagram shown is a flowchart illustrating a control method for a mask assembly provided in an embodiment of this disclosure.

[0024] Figure 10 The diagram shown is a flowchart illustrating a step of synchronous movement of a first support member by controlling a first drive mechanism based on control commands, according to an embodiment of this disclosure.

[0025] Figure label:

[0026] 100, Outer frame; 100A, Upper surface of the first frame; 100B, Lower surface of the first frame; 110, Slot of the first frame; 110', Slot of the third frame; 111, Limiting opening; 120, Slot of the second frame; 120', Slot of the fourth frame;

[0027] 200. First covering strip;

[0028] 300, First moving component; 310, First support pair; 311, Support in the slot of the first frame; 3111, Limiting part; 3111A, First surface of the limiting part; 3111B, Second surface of the limiting part; G1, First groove; 3112, Connecting part; 311', Support in the slot of the third frame; 320, First drive mechanism; 321, Electric motor; 322, Transmission mechanism;

[0029] 400. Second covering strip;

[0030] 500, Second moving component; 510, Second support pair; 511, Support in the slot of the second frame; 511', Support in the slot of the fourth frame; 520, Second drive mechanism;

[0031] D1, first direction; D2, second direction. Detailed Implementation

[0032] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.

[0033] The encapsulation layer prevents water and oxygen from penetrating, protecting the underlying film from environmental corrosion and thus extending the lifespan of the display panel. To avoid damage to the encapsulation layer during subsequent cutting processes and to prevent a reduction in encapsulation effectiveness, operators typically use a mask to cover the cutting area during the vapor deposition process of the encapsulation layer, ensuring that the encapsulation layer is deposited only in the unmasked areas.

[0034] However, to ensure a precise match between the mask opening size and the display panel size, each display panel model requires a corresponding mask, resulting in high manufacturing costs. Furthermore, different process chambers require different mask models. During mask replacement, operator errors may lead to a mismatch between the mask model and the process chamber, causing inaccurate alignment of the mask within the chamber and affecting the evaporation accuracy.

[0035] To address the above issues, this disclosure provides a mask assembly and its control method, as well as a vapor deposition equipment, to avoid frequent mask replacements, reduce manufacturing costs, save manpower and time, and avoid the problem of mask model mismatch with process chamber.

[0036] The mask assembly provided in the embodiments of this disclosure is illustrated below with reference to the accompanying drawings.

[0037] Figure 1 The image shown is a top view of a mask assembly provided in an exemplary embodiment of this disclosure. Figure 1 As shown, the mask assembly includes an outer frame 100, a plurality of first masking strips 200, and a first moving component 300.

[0038] From a top view, the outer frame 100 is generally rectangular, including a first border, a second border, a third border, and a fourth border connected in sequence. The first border and the third border are positioned opposite each other, and the second border and the fourth border are positioned opposite each other. For example, the overall dimensions of the outer frame 100 can be set to 1105mm × 1700mm.

[0039] A slot 110 extending along a first direction D1 is provided on the first frame, and a slot 110' extending along the first direction D1 is provided on the third frame. The slots 110 and 110' of the first and third frames are parallel to each other and symmetrical about the central axis of the outer frame 100. The first direction D1 can be the extension direction of the first and / or third frames, or it can be any other direction.

[0040] Figure 2 As shown Figure 1 The illustrated embodiment provides a schematic cross-sectional view of the mask assembly along line A-A'. (See attached diagram.) Figure 2As shown, the first frame of the outer frame 100 comprises an oppositely arranged upper surface 100A and a lower surface 100B. In the actual application of the mask assembly, the upper surface 100A is a side surface of the first frame facing away from the bottom plate of the process chamber, and the lower surface 100B is a side surface of the first frame facing the bottom plate of the process chamber.

[0041] The clamping groove 110 penetrates the upper surface 100A and the lower surface 100B of the first frame. The clamping groove 110 comprises a limiting opening 111, and the limiting opening 111 is close to the upper surface 100A of the first frame. In a direction from the upper surface 100A toward the lower surface 100B, an inner wall of the limiting opening 111 gradually narrows toward a central axis of the clamping groove 110.

[0042] The structure of the clamping groove 110' on the third frame is similar to that of the clamping groove 110 on the first frame, and reference can be made to the structure of the clamping groove 110 for details, which will not be repeated herein.

[0043] With continued reference to Figure 1 , the plurality of first shielding strips 200 all extend along a second direction D2 and are parallel to each other. The second direction D2 intersects with a first direction D1, and the second direction D2 may be an extending direction of the second frame and / or the fourth frame, or may be any other direction. Illustratively, the second direction D2 is perpendicular to the first direction D1, the plurality of first shielding strips 200 are arranged side by side along the first direction D1, and each of the first shielding strips 200 extends along the second direction D2.

[0044] The first shielding strip 200 is lapped on the upper surfaces of the first frame and the third frame. A first end of the first shielding strip 200 is located within the clamping groove 110 of the first frame, and a second end of the first shielding strip 200 is located within the clamping groove 110' of the third frame. That the first end of the first shielding strip 200 is located within the clamping groove 110 of the first frame means that an orthographic projection of the first end of the first shielding strip 200 on a plane where the outer frame is located is within a range of an orthographic projection of the clamping groove 110 on the plane.

[0045] The first moving assembly 300 comprises a first supporting member pair 310 and a first driving mechanism 320. The first supporting member pair 310 comprises two supporting members, which are respectively a supporting member 311 disposed in the clamping groove 110 of the first frame and a supporting member 311' disposed in the clamping groove 110' of the third frame.

[0046] Figure 3 is a schematic structural diagram of a supporting member provided by an exemplary embodiment of the present disclosure. As shown in Figure 3 , the supporting member 311 comprises a limiting portion 3111 and a connecting portion 3112. In conjunction with Figure 2It can be observed that the outer contour of the limiting part 3111 matches the opening shape of the limiting opening 111. When the support member 311 is placed in the slot 110, the side surface of the limiting part 3111 abuts against the inner wall of the limiting opening 111 to restrict the movement of the support member 311 in the vertical direction, thus keeping the support member 311 stable in the vertical direction. Here, the vertical direction refers to the direction perpendicular to the plane of the outer frame. The side surface of the connecting part 3112 can fit against the inner wall of the slot 110 excluding the limiting opening 111; or, the connecting part 3112 can be slightly narrower than the width of the slot 110, so that the side surface of the connecting part 3112 is spaced a certain distance from the inner wall of the slot 110 excluding the limiting opening 111.

[0047] The limiting part 3111 includes a first surface 3111A and a second surface 3111B disposed opposite to each other. When the support member 311 is placed in the slot 110, the first surface 3111A faces the upper surface 100A of the first frame. The first surface 3111A is used to support the first covering strip 200. Specifically, when the support member 311 supports the first covering strip 200, the first surface 3111A of the support member 311 contacts the first end of the first covering strip 200, and when the support member 311 moves, it drives the first covering strip 200 to move.

[0048] The second surface 3111B of the limiting part 3111 is connected to the connecting part 3112. Specifically, the connecting part 3112 includes a first end and a second end. The second surface 3111B is connected to the first end of the connecting part 3112, and the second end of the connecting part 3112 is connected to the first driving mechanism 320.

[0049] It is understood that the limiting part 3111 and the connecting part 3112 of the support 311 can be connected by welding, bonding or other means, or the limiting part 3111 and the connecting part 3112 can also be made by an integral molding process. This disclosure does not impose any specific limitations on this.

[0050] The first drive mechanism 320 is used to drive the first support pair 310 to move synchronously. Specifically, the operator inputs the display panel model or size on the machine base or control handle of the vapor deposition equipment. Based on the operator's input, corresponding control commands are generated, including the target positions of multiple first masking strips. Based on the control commands, the first drive mechanism 320 drives the first support pair 310 to move synchronously. The support member 311 in the first support pair supports the first end of the first masking strip 200, and the support member 311' in the first support pair supports the second end of the first masking strip 200; when the first support pair 310 moves synchronously, the first masking strip 200 supported by the first support pair 310 moves to the target position.

[0051] Figure 4The diagram shown is a structural schematic of a first driving mechanism provided in an exemplary embodiment of this disclosure. Figure 4 As shown, the first drive mechanism 320 consists of a motor 321 and a transmission mechanism 322. The second end of the connecting part of the support member 311 is connected to the transmission mechanism 322. The operation of the motor 321 drives the transmission mechanism 322 to move the support member 311 mounted on the transmission mechanism 322.

[0052] For example, the motor may be a stepper motor, located at a corner of the outer frame. The transmission mechanism 322 includes a slide rail and a slider disposed on the first frame. The slide rail extends along a first direction D1, and the slider is driven by the motor 321 to move along the slide rail. The support member 311 is connected to the slider, and when the slider moves driven by the motor 321, it drives the support member 311 to move.

[0053] Alternatively, the motor 321 can be located below the bottom plate of the process chamber of the vapor deposition equipment, and drive the support 311 in the process chamber to move through the transmission mechanism 322; in this case, the transmission mechanism 322 may include a bearing structure for mechanical transmission, or it may achieve non-contact transmission through magnetic transmission or other means.

[0054] Continue to refer to Figure 1 The structure and driving method of the support member 311' located in the card slot 110' of the third frame are similar to those of the support member 311 in the card slot 110 of the first frame. For details, please refer to the structure and driving method of the support member 311, which will not be repeated here.

[0055] To ensure synchronous movement of the support member 311 and the support member 311', their transmission mechanisms should be symmetrically arranged. For example, symmetrical guide rails and sliders are provided on the first and third side frames respectively; the support member 311 and the support member 311' can be driven by different motors, and their synchronous movement can be achieved through synchronous shaft or pulse synchronization control; alternatively, to improve the synchronicity of movement of the support member 311 and the support member 311', a single motor can be used to simultaneously drive the transmission mechanisms of both the support member 311 and the support member 311'.

[0056] The support component can be made of high-temperature and corrosion-resistant ceramic or metal materials. The first drive mechanism, the first cover strip, the second cover strip, and other structures can be made of high-temperature resistant metal materials with low thermal expansion coefficients to avoid misalignment of the various structures in the mask assembly due to thermal expansion during the vapor deposition process.

[0057] In this embodiment of the disclosure, the spacing between multiple first masking strips is adjusted by the first moving component so that the opening size of the mask assembly is precisely matched with the size of different display panels. This avoids equipping each model of display panel with a corresponding mask, reduces manufacturing costs, saves manpower and time, and avoids the problem of mask model mismatch with process chamber.

[0058] During the adjustment of the spacing of the first masking strips, the first support member supports both ends of the same first masking strip to prevent the first masking strip from tilting or bending under force during movement. Furthermore, the first masking strip rests on the upper surface of the outer frame, allowing for easy removal and replacement of the old first masking strip when it needs to be replaced, further extending the service life of the mask assembly.

[0059] It is understood that, in the embodiments of this disclosure, as Figure 1 As shown, the first and third borders are shorter than the second and fourth borders; in other embodiments, the first and third borders may also be longer than the second and fourth borders; or, in other embodiments, the borders of the outer frame may present other regular or irregular shapes besides stripes, and this disclosure does not impose specific limitations on this.

[0060] Continue to refer to Figure 1 In addition to the structure described above, the mask assembly also includes a plurality of second masking strips 400 extending along the first direction D1. The plurality of second masking strips 400 intersect with the plurality of first masking strips 200 to form a mesh structure, and the mesh openings of the mesh structure constitute a plurality of vapor deposition openings of the mask assembly. When the plurality of first masking strips 200 are all moved to their respective target positions by the first moving component, the spacing between adjacent first masking strips 200 matches the size of the display panel in the first direction D1.

[0061] The two ends of the second masking strip 400 can be fixed to the second and fourth edges of the outer frame, respectively. In this case, the spacing between the multiple second masking strips 400 is fixed, and the mask assembly can only change the size of the vapor deposition opening in the first direction D1. Alternatively, the two ends of the second masking strip can be resting on the upper surfaces of the second and fourth edges, respectively. Since the number of second masking strips is small, the position of the second masking strips can be adjusted using the adjustment device originally used to adjust the position of the mask in the vapor deposition equipment. Alternatively, to improve the moving efficiency of the second masking strips, another exemplary embodiment of this disclosure provides a mask assembly.

[0062] Figure 5 The image shown is a top view of a mask assembly provided in another exemplary embodiment of this disclosure. Figure 1 , Figure 5As shown, the structure of the mask assembly in this embodiment differs from that in the above embodiment in that the second and fourth sides of the mask assembly are respectively provided with slots extending along the second direction D2, namely slot 120 on the second side and slot 120' on the fourth side. The slots 120 and 120' on the second side are parallel to each other and symmetrical about the central axis of the outer frame 100. The structures of slots 120 and 120' are similar to those of slot 110 on the first side in the above embodiment, and can be referred to for details, which will not be repeated here.

[0063] The mask assembly also includes multiple second masking strips 400 and a second moving assembly 500.

[0064] Multiple second cover strips 400 extend along the first direction D1 and are parallel to each other. The second cover strips 400 overlap the upper surfaces of the second frame and the fourth frame, with the first end of the second cover strip 400 located within the slot 120 of the second frame and the second end of the second cover strip 400 located within the slot 120' of the fourth frame.

[0065] The second moving component 500 includes a second support pair 510 and a second driving mechanism 520. The second support pair 510 includes two supports, namely a support 511 disposed in the slot 120 of the second side frame and a support 511' disposed in the slot 120' of the fourth side frame. The structures of the supports 511 and 511' are similar to those of the support 311 in the above embodiment, and can be referred to in detail for the structure of the support 311, which will not be repeated here.

[0066] When the support member 511 is placed in the slot 120, its vertical movement is restricted by the slot 120. The first surface of the support member 511 faces the upper surface of the second frame and is used to support the second cover strip 400. Specifically, when the support member 511 supports the second cover strip 400, the first surface of the support member 511 contacts the first end of the second cover strip 400, and when the support member 511 moves, it drives the second cover strip 400 to move.

[0067] One end of the support member 511 facing away from the upper surface of the second frame is connected to the second drive mechanism 520. The second drive mechanism 520 is used to drive the second support member pair 510 to move synchronously. Specifically, the operator inputs the display panel model or size on the machine base or control handle of the vapor deposition equipment. Based on the operator's input, corresponding control commands are generated, including the target positions of multiple second cover strips. Based on the control commands, the second drive mechanism 520 drives the second support member pair 510 to move synchronously. The support member 511 in the second support member pair supports the first end of the second cover strip 400, and the support member 511' in the second support member pair supports the second end of the second cover strip 400. When the second support member pair 510 moves synchronously, the second cover strip 400 supported by the second support member pair 510 moves to the corresponding target position. The structure of the second drive mechanism 520 is similar to that of the first drive mechanism 320 in the above embodiment. For details, please refer to the structure of the first drive mechanism 320, which will not be described again here.

[0068] When the multiple second masking strips 400 are all moved to their respective target positions by the second moving component 500, the spacing between adjacent second masking strips 400 matches the size of the display panel in the second direction D2. When the multiple first masking strips 200 and the multiple second masking strips 400 are all located at their respective target positions, the multiple first masking strips 200 and the multiple second masking strips 400 intersect to form multiple vapor deposition openings that match the size of the display panel.

[0069] Understandably, upon receiving a control command, the first moving component and the second moving component can be controlled to operate separately based on the control command. Alternatively, the first moving component and the second moving component can be controlled to operate simultaneously based on the control command, synchronously adjusting the spacing between the multiple first covering strips and the multiple second covering strips. This disclosure does not impose specific limitations in this regard.

[0070] In this embodiment of the present disclosure, the spacing between multiple second masking strips is adjusted by the second moving component. Combined with the first moving component and the first masking strip, the evaporation opening of the mask assembly can freely change its length and width, further enriching the application scenarios of the mask assembly.

[0071] The specific structures of the support component and the first drive mechanism in the first moving component will be described below.

[0072] Continue to refer to Figure 3 The support member 311 includes a limiting part 3111 and a connecting part 3112. In a plane perpendicular to the first direction, the limiting part 3111 has a trapezoidal cross-sectional shape, with the long base of the trapezoid corresponding to the first surface 3111A of the limiting part and the short base corresponding to the second surface 3111B of the limiting part. The two sides (or legs) of the trapezoid correspond to the two side surfaces of the limiting part 3111 facing the inner wall of the limiting opening.

[0073] Figure 6 The diagram shown is a schematic representation of a support member installed in a slot according to an exemplary embodiment of this disclosure. Figure 6 As shown, since the opening shape of the slot limiting opening matches the outer contour of the limiting part, correspondingly, on a plane perpendicular to the first direction, the inclination angle α1 of the cross-section of the inner walls on both sides of the limiting opening is equal to the inclination angle α2 of the side of the trapezoidal cross-section of the limiting part 3111. Furthermore, the distance d2 between the inner walls on both sides of the limiting opening is equal to the distance d1 between the two side edges of the trapezoidal cross-section of the limiting part 3111. When the support member is placed in the slot from top to bottom, the two side surfaces of the limiting part 3111 facing the inner wall of the limiting opening abut against the inner walls on both sides of the limiting opening, thereby keeping the support member stable in the vertical direction.

[0074] The cross-sectional shape of the connecting part 3112 is rectangular, and at least part of the connecting part 3112 is in contact with the inner wall of the slot except for the limiting opening, so as to further limit the support member from tilting and swaying towards the inner walls on both sides of the slot.

[0075] Figure 7 The diagram shown is a structural schematic of a support member provided in another exemplary embodiment of this disclosure. Figure 7 As shown, the first surface 3111A of the limiting portion includes a first groove G1 extending along a second direction, and the first groove G1 is located at the middle position of the first surface 3111A. The depth of the first groove G1 is slightly greater than the thickness of the first covering strip, and the bottom width of the first groove G1 matches the width of the first covering strip. The sidewalls of the first groove G1 are inclined to form a guide structure for the first covering strip.

[0076] In the actual use of the mask assembly, the support is driven by the first moving component to move below the first masking strip. The first masking strip slides down the side wall of the first groove G1 to the bottom. Since the bottom width is the same as the width of the first masking strip, the first masking strip can fit perfectly into the first groove G1, so that the support and the first masking strip will not move relative to each other during the process of the support moving the first masking strip.

[0077] This disclosure describes the structure of the support member and the way the support member, slot, and first masking strip are coupled. The limiting part of the support member engages with the slot to keep the support member stable in the vertical direction. The first masking strip fits into the first groove of the support member to maintain relative stability between the first masking strip and the support member. During the adjustment of the position of the first masking strip, the stability of each structure in the mask assembly can be improved, and the accuracy of the displacement range of the first masking strip can be improved.

[0078] In some embodiments, the first drive mechanism includes a lifting section and a translation section. The lifting section is used to move the support member from a first height position to a second height position. Figure 8 As shown in (a), when the support is at the first height position, the first surface 3111A of the limiting part is flush with the upper surface of the outer frame (i.e., the upper surface 100A of the first frame); or, the first surface 3111A of the limiting part may be slightly lower than the upper surface of the outer frame. Figure 8 As shown in (b), when the support is in the second height position, the first surface 3111A of the limiting part extends beyond the upper surface of the outer frame.

[0079] The translation unit is used to move the support member along a first direction. When the support member is at a first height position, the translation unit moves the support member horizontally along the first direction to below the first covering strip. Then, the lifting unit raises the support member to a second height position. During this process, the first covering strip above the support member contacts the first surface 3111A of the support member and is supported by the support member. As the support member rises to the second height position, the first covering strip supported by the support member moves away from the upper surface of the outer frame. When the support member is at the second height position, the translation unit moves the support member horizontally along the first direction to the target position of the first covering strip. Then, the lifting unit moves the support member to the first height position so that the first covering strip supported by the support member rests on the upper surface of the outer frame and is at the target position of the first covering strip. At this time, the first covering strip detaches from the support member, and the support member can continue to move to below another first covering strip and continue to move it to the corresponding target position.

[0080] For example, a positioning groove can be provided on the upper surface of the outer frame, and the position of the positioning groove is aligned with the target position of the first masking strip. When the first masking strip is placed on the upper surface of the outer frame, the first masking strip is fitted into the positioning groove to prevent the first masking strip from shifting. Depending on the display panel model to which the mask assembly is applicable, multiple positioning grooves adapted to different display panel models can be provided on the upper surface of the outer frame to improve the applicability of the mask assembly.

[0081] In some embodiments, the mask assembly further includes a sensor. The sensor is disposed at the end of the slot and is used to determine the initial position of the first masking strip within the slot area. The initial position is the position of the first masking strip before it is moved by the first moving component.

[0082] After determining the initial position of the first masking strip based on sensors and obtaining its target position based on control commands, the first moving component can be controlled to move the first masking strip from its initial position to the target position. Then, sensors can be used to verify whether the first masking strip has reached the target position, ensuring that it is accurately placed at the target location.

[0083] Since the first support pair moves synchronously, to save costs, a sensor can be installed at the end of only one of the slots on the first and third sides. Alternatively, to improve positioning accuracy, sensors can be installed in both slots; this disclosure does not impose any specific limitations on this.

[0084] Since the width and length of different display panel models vary, the number of first masking strips required to form the corresponding vapor deposition openings in the mask assembly during the manufacturing process also varies. To accommodate excess first masking strips, another exemplary embodiment of this disclosure provides a mask assembly whose structure differs from the above embodiment in that the mask assembly further includes a storage slot disposed inside the first frame and / or the third frame for storing the first masking strips.

[0085] The slots of the first and third borders extend into the storage slot. If the number of first cover strips outside the storage slot exceeds the required number, the first moving component prioritizes moving the excess first cover strips closer to the storage slot into the storage slot, so that the excess first cover strips are stored in the storage slot. If the number of first cover strips outside the storage slot is less than the required number, the first moving component removes the first cover strips from the storage slot and moves them to the corresponding target position.

[0086] This avoids the problem of unnecessary first masking strips having nowhere to be placed, which would affect the vapor deposition effect of the mask assembly, and also allows the mask assembly to be adapted to more large-sized display panels.

[0087] In some embodiments, a storage slot for storing the second covering strip may be provided inside the second or fourth frame to adjust the number of the second covering strip as needed.

[0088] The above text combined Figures 1 to 8 The mask assembly embodiments of this disclosure have been described in detail below, in conjunction with... Figure 9 The present disclosure provides a detailed description of embodiments of the control method for the aforementioned mask assembly. It should be understood that the descriptions of the control method embodiments correspond to the descriptions of the mask assembly embodiments; therefore, any parts not described in detail can be found in the preceding mask assembly embodiments.

[0089] Figure 9 The diagram shown is a schematic flowchart of a control method for a mask assembly according to an embodiment of this disclosure. This control method is applied to the mask assembly provided in any of the above embodiments. Figure 9 As shown, the control method for the mask assembly provided in this embodiment includes the following steps.

[0090] S910, acquire control commands.

[0091] The control commands are generated based on the display panel model or size input by the operator on the machine or control handle of the vapor deposition equipment, and include the target positions of multiple first masking strips.

[0092] S920, based on control commands, controls the first drive mechanism to drive the first support member to move synchronously, so that the first covering strip supported by the first support member moves to the corresponding target position.

[0093] The first support pair supports both ends of the first covering strip. When the first support pair is driven by the first driving mechanism to move synchronously, the first covering strip supported by the first support pair moves accordingly until the target position corresponding to the first covering strip is reached.

[0094] Next, the first support member detaches from the first masking strip and is driven by the first drive mechanism to move under another first masking strip, supporting that first masking strip as it moves to the corresponding target position. This process is repeated until all the first masking strips are placed in their respective positions, at which point the mask assembly forms multiple vapor deposition openings that match the size of the display panel.

[0095] Figure 10 The diagram shown is a flowchart illustrating a synchronous movement step of a first drive mechanism controlling a first support member based on control commands, according to an embodiment of this disclosure. Figure 10 As shown in the embodiments of this disclosure, the step of controlling the first drive mechanism to drive the first support member to move synchronously based on control commands includes the following steps.

[0096] S921, based on the sensor, determines the initial position of the first covering strip.

[0097] A sensor is disposed at the end of the card slot to determine the initial position of the first cover strip within the card slot area. The initial position is the position of the first cover strip before it is moved by the first moving component.

[0098] S922, based on the initial position and control commands, determines the target movement distance of the first masking strip.

[0099] The control command includes the target position of the first masking strip, and the distance between the target position and the initial position is used as the target movement distance of the first masking strip.

[0100] S923, control the first drive mechanism so that the first drive mechanism drives the first support member to move synchronously to the initial position and support the first covering strip.

[0101] The first drive mechanism is controlled to operate, and the first drive mechanism drives the first support pair to move synchronously to the initial position. At this time, the support members in the first support pair are respectively located at both ends of the first covering strip, and the first covering strip is supported by the first support pair.

[0102] S924, control the first drive mechanism so that the first drive mechanism drives the first support member to move the target synchronously along the first direction by a distance.

[0103] The first drive mechanism is controlled to operate, driving the first support member to move a synchronously moving target a certain distance. At this time, the first support member moves to the corresponding target position of the first covering strip. The first covering strip supported by the first support member also moves to the corresponding target position.

[0104] The foregoing described embodiments of the mask assembly and its control method of this disclosure. The following continues with embodiments of the vapor deposition equipment of this disclosure. It should be understood that the descriptions of the vapor deposition equipment embodiments correspond to the descriptions of the mask assembly and its control method embodiments. Therefore, any parts not described in detail can be referred to the preceding embodiments of the mask assembly or the control method of the mask assembly.

[0105] The vapor deposition equipment provided in this disclosure includes the mask assembly provided in any of the above embodiments. The vapor deposition equipment includes a process chamber, in which the mask assembly is disposed. The vapor deposition equipment also includes a machine base or control handle, through which the operator can input the model or size of the display panel to be prepared.

[0106] In some embodiments, the vapor deposition equipment further includes a visual inspection device and an adjustment device. The visual inspection device is used to detect the actual position of the first masking strip after it has moved to the target position. The adjustment device is disposed in the process chamber of the vapor deposition equipment and is used in conjunction with the visual inspection device to dynamically adjust the actual position of the first masking strip, thereby achieving precise alignment of the first masking strip and further improving the dimensional accuracy of the vapor deposition openings in the mask assembly. The dynamic adjustment operation can be achieved by an operator controlling the adjustment device or by the control system automatically; this disclosure does not impose specific limitations in this regard.

[0107] The basic principles of this disclosure have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this disclosure are merely examples and not limitations, and should not be considered as essential features of each embodiment of this disclosure. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the scope of this disclosure to the necessity of employing the aforementioned specific details for implementation.

[0108] The block diagrams of devices, apparatuses, and devices involved in this disclosure are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, and devices can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0109] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of this disclosure. Therefore, this disclosure is not intended to be limited to the aspects shown herein, but rather to be carried out within the widest scope consistent with the principles and novel features disclosed herein.

[0110] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this disclosure to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations therein.

Claims

1. A mask assembly, characterized in that, include: The outer frame includes a first side frame, a second side frame, a third side frame, and a fourth side frame connected in sequence; the first side frame and the third side frame are respectively provided with slots extending along a first direction, and the slots include limiting openings; Multiple first masking strips, each first masking strip extending along a second direction, with a first end of the first masking strip located within the slot of the first frame and a second end of the first masking strip located within the slot of the third frame, the first direction intersecting the second direction; A first moving component, the first moving component including a first drive mechanism and a first support member pair; The first support member includes two support members, which are respectively disposed in the slots of the first frame and the third frame; each support member includes a limiting part and a connecting part, the outer contour of the limiting part matches the opening shape of the limiting opening, the first surface of the limiting part is used to support the first covering strip, the second surface of the limiting part is connected to the first end of the connecting part, and the second end of the connecting part is connected to the first driving mechanism; The first drive mechanism is used to drive the first support pair to move synchronously, so that the first covering strip supported by the first support pair moves to the target position.

2. The mask assembly according to claim 1, characterized in that, The second frame and the fourth frame are respectively provided with slots extending in the second direction; The mask assembly further includes: Multiple second masking strips, the second masking strips extending along a first direction, the first end of the second masking strips being located within the slot range of the second frame, and the second end of the second masking strips being located within the slot range of the fourth frame; The second moving component includes a second drive mechanism and a pair of second support members; The second support member includes two support members respectively disposed in the slots of the second frame and the slots of the fourth frame; The second drive mechanism is used to drive the second support member to move synchronously, so that the multiple second cover strips and the multiple first cover strips together form multiple target vapor deposition openings.

3. The mask assembly according to claim 1 or 2, characterized in that, The cross-sectional shape of the limiting part includes a trapezoid, the long base of the trapezoid corresponds to the first surface of the limiting part, the short base of the trapezoid corresponds to the second surface of the limiting part, and the inclination angle of the side of the trapezoid is consistent with the inclination angle of the inner wall of the limiting opening. The first surface of the limiting part includes a first groove extending along the second direction, the bottom width of the first groove matching the width of the first covering strip; the sidewall of the first groove is inclined to form a guide structure for the first covering strip.

4. The mask assembly according to claim 1 or 2, characterized in that, The first drive mechanism includes a lifting section and a translation section; The lifting part is used to move the support member from a first height position to a second height position; wherein, at the first height position, the first surface of the limiting part is flush with the upper surface of the outer frame, so that the first covering strip supported by the support member overlaps the upper surface of the outer frame; at the second height position, the first surface of the limiting part extends beyond the upper surface of the outer frame, so that the first covering strip supported by the support member is away from the upper surface of the outer frame; The translation unit is used to move the support member along the first direction when the support member is at the second height position.

5. The mask assembly according to claim 1 or 2, characterized in that, It also includes a sensor disposed at the end of the card slot; the sensor is used to determine the initial position of the first cover strip.

6. The mask assembly according to claim 1 or 2, characterized in that, It also includes a storage slot located inside the first frame and / or the third frame for storing the first covering strip.

7. A method for controlling a mask assembly, characterized in that, A method for controlling the mask assembly as described in any one of claims 1 to 6, comprising: Obtain control commands, the control commands including target positions of each of the first masking strips; Based on the control command, the first drive mechanism is controlled to drive the first support pair to move synchronously, so that the first covering strip supported by the first support pair moves to the corresponding target position.

8. The control method for the mask assembly according to claim 7, characterized in that, The mask assembly further includes sensors, and the control of the first drive mechanism to drive the first support member to move synchronously based on the control command includes: Based on the sensor, the initial position of the first covering strip is determined; Based on the initial position and the control command, determine the target movement distance of the first covering strip; Control the first drive mechanism so that the first drive mechanism drives the first support member to move synchronously to the initial position and support the first covering strip; Control the first drive mechanism so that the first drive mechanism drives the first support member to move the target moving distance synchronously along the first direction.

9. A vapor deposition apparatus, characterized in that, Includes the mask assembly as described in any one of claims 1 to 6.

10. The vapor deposition equipment according to claim 9, characterized in that, Also includes: A visual inspection device is used to detect the actual position of the first masking strip after it has moved to the target position; An adjustment device is installed in the process chamber of the vapor deposition equipment to work in conjunction with the visual inspection device to dynamically adjust the actual position of the first masking strip.

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