Integrated multifunctional composite coating equipment and coating method

Abstract

The present application relates to the technical field of vacuum coating, and particularly relates to an integrated multifunctional composite coating equipment and a coating method, the equipment comprising a base, a fixed door cavity assembly and two groups of movable door cavity assemblies hinged to the two sides of the fixed door cavity assembly, the two movable door cavity assemblies alternately close with the fixed door cavity assembly to form a vacuum cavity, the vacuum cavity is provided with a composite coating function assembly for performing at least two kinds of coating and / or surface treatment processes, each movable door cavity assembly is provided with a public rotating disc and a plurality of racks, the public rotating disc drives each rack to revolve and rotate through a transmission gear pair; the transmission chain of the racks and the public rotating disc is provided with a clutch brake mechanism driven by the opening and closing displacement of the movable door cavity assembly, each clutch brake mechanism is synchronously engaged when the door is closed, and is synchronously disengaged when the door is opened, so that each rack can rotate independently of each other, thereby facilitating workpiece clamping, posture adjustment and inspection, reducing the operation interference and safety risk caused by the linkage of the racks, and improving the feeding and discharging efficiency.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating technology, specifically to an integrated multifunctional composite coating equipment and coating method. Background Technology

[0002] Physical vapor deposition (PVD) composite coating equipment is widely used in surface modification and functional film preparation for hardware products, optical components, precision devices, and other fields. It integrates multiple coating processes and supports a cavity structure that allows for alternating operation of two workstations. It can complete multiple surface treatment processes in the same vacuum environment, effectively reducing pollution and efficiency loss caused by workpiece transfer. It is an important development direction for coating equipment.

[0003] The existing dual-station integrated coating equipment uses a planetary gear system that is always meshed to achieve revolution and rotation. When the door is open for loading and unloading, the rotation transmission chain cannot be disconnected. When a single set of material racks is touched, it triggers the rotation of the entire station, which makes workpiece clamping and alignment cumbersome and makes it difficult to adjust the posture of irregular precision parts. At the same time, there is a safety hazard of operators being scratched by the rotating material rack. Both clamping efficiency and operational safety need to be improved.

[0004] The information disclosed in this background section is intended only to enhance the understanding of the general background of the invention and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Summary of the Invention

[0005] This invention provides an integrated multifunctional composite coating equipment and coating method, thereby effectively solving the problems pointed out in the background art.

[0006] To achieve the above objectives, the technical solution adopted by the present invention is as follows: An integrated multifunctional composite coating equipment includes: a base, a fixed cavity assembly disposed on the base, and two sets of movable cavity assemblies hinged to both sides of the fixed cavity assembly; The two moving door cavity assemblies alternately close with the fixed door cavity assembly to form a vacuum cavity by either the moving door cavity assembly and the fixed door cavity assembly. A composite coating functional assembly is provided in the vacuum cavity, which is used to perform at least two different coating and / or surface treatment processes on the workpiece in the vacuum cavity. Each of the moving door cavity assemblies includes a moving door cavity, a rotating disk rotatably disposed within the moving door cavity, and a plurality of material racks arranged circumferentially on the rotating disk. A transmission gear pair is provided between the material racks and the rotating disk. When the rotating disk rotates, it drives each of the material racks to revolve around the rotating disk and rotate on its own axis. A clutch and braking mechanism is provided on the transmission chain between the material rack and the rotary disk. The clutch and braking mechanism is driven by the opening and closing displacement of the moving door cavity assembly relative to the fixed door cavity assembly. When the moving door cavity assembly is closed, each of the clutch and brake mechanisms is driven to engage synchronously, causing each of the material racks to revolve around the revolution disk and rotate on its own axis. When the moving door cavity assembly is opened, each of the clutch and brake mechanisms is driven to disengage synchronously, so that each of the material racks is released from the transmission linkage and can rotate independently.

[0007] Furthermore, the composite coating functional components include at least two of the following: a tungsten filament evaporation module, a magnetron sputtering module, a multi-arc coating module, a cavity cleaning module, and a silicone oil protective film coating module.

[0008] Furthermore, the transmission gear pair includes a central gear fixedly disposed on the inner wall of the top of the moving door cavity, and planetary gears correspondingly disposed on the upper end of each of the material racks; The central gear is arranged coaxially with the revolution disk, and each of the planetary gears is always meshed with the central gear; When the revolving disk rotates, it drives each of the planetary gears to revolve around the central gear, and causes each of the planetary gears to rotate on its own axis under the meshing action with the central gear.

[0009] Furthermore, the rotary disk includes a coaxial annular top plate and an annular bottom plate spaced apart vertically, as well as a plurality of connecting rods connecting the annular top plate and the annular bottom plate; The outer peripheral wall of the annular base plate is provided with transmission teeth for meshing with the output gear of the drive motor to drive the revolving disk to rotate around its own axis.

[0010] Furthermore, the clutch braking mechanism includes: A sleeve is fixedly disposed at the end of the material rack, and the sleeve passes through the annular top plate and the planetary gear, and a bearing is disposed between the sleeve and the planetary gear; A movable component is at least partially disposed within the sleeve, and the movable component is slidably disposed along the axial direction of the sleeve. The upper end of the movable component extends outward from the outside of the sleeve, and the extended end of the movable component is provided with a movable engagement portion. A fixed engagement portion is fixedly disposed on the upper end face of the planetary gear, and is used to axially engage or disengage with the moving engagement portion; An elastic reset member is disposed between the movable member and the sleeve, and is used to provide an elastic force that causes the movable member to drive the movable engagement portion away from the fixed engagement portion; The movable part is driven by an external driving force to slide back and forth along the axial direction so that the moving joint part engages with the fixed joint part.

[0011] Furthermore, a circumferential limiting structure is provided between the movable member and the sleeve. The circumferential limiting structure is used to restrict the rotation of the movable member relative to the sleeve and allow the movable member to slide axially relative to the sleeve, so that the movable member can transmit torque to the sleeve.

[0012] Furthermore, a thrust bearing is provided on the end face of the movable joint opposite to the fixed joint. The external driving force acts on the movable joint through the thrust bearing, so that the movable joint can rotate relative to the force-applying component of the external driving force when subjected to axial thrust.

[0013] Furthermore, it also includes a synchronous clutch drive mechanism, which includes an annular movable plate coaxially disposed above the rotary disk, and an axial guide structure disposed between the annular movable plate and the annular top plate. The annular movable plate can be slidably and reciprocally along the axial direction of the moving door cavity through the axial guide structure. The annular movable plate is provided with a receiving groove on the side facing the revolution disk, and each thrust bearing is at least partially housed in the corresponding receiving groove; When the annular movable plate moves toward the revolution disk, it synchronously pushes all the moving parts to move axially through each of the thrust bearings, so that each moving joint engages synchronously with the corresponding fixed joint.

[0014] Furthermore, a guide seat is provided on the inner side of the top of the fixed door cavity assembly corresponding to the position of the annular movable plate, and a guide slope is provided at one end of the guide seat facing the movable door cavity assembly. The outer periphery of the annular movable plate is provided with a chamfer that cooperates with the guide slope. When the moving door cavity assembly closes toward the fixed door cavity assembly, the chamfer moves relative to the guide inclined surface to convert the rotational opening and closing displacement of the moving door cavity assembly into an axial downward pressing displacement of the annular movable plate toward the revolution disk.

[0015] This invention also includes an integrated multifunctional composite coating method, employing the integrated multifunctional composite coating equipment described above, comprising the following steps: When any of the moving door cavity components is opened relative to the fixed door cavity component, the clutch and brake mechanism is simultaneously disengaged, and each of the material racks is released from the transmission linkage and can rotate independently of each other, and the workpiece to be plated is respectively clamped on each of the material racks. The moving door cavity assembly is closed relative to the fixed door cavity assembly and enclosed to form a vacuum cavity. The clutch and braking mechanism engages synchronously. Each of the material racks is connected to the rotating disk via the transmission gear pair to form a transmission connection. The vacuum chamber is evacuated to a preset vacuum level; The rotary table is driven to rotate, and each of the material racks revolves around the rotary table and rotates on its own axis; The composite coating function component is activated to perform at least two different coating and / or surface treatment processes on the workpiece according to a preset coating process. After the coating is completed, the composite coating function component is stopped, and the vacuum chamber is filled with gas; When the moving door cavity assembly is opened relative to the fixed door cavity assembly, the clutch and brake mechanism is simultaneously disengaged, and each of the material racks is released from transmission linkage and can rotate independently of each other, so as to remove the coated workpiece.

[0016] The technical solution of this invention can achieve the following technical effects: By installing a clutch mechanism on the transmission chain between the material rack and the rotary table, driven by the opening and closing displacement of the moving door cavity assembly, a control method is achieved where the transmission chain automatically disconnects when the door opens and automatically engages synchronously when the door closes. In the open state, the transmission linkage of each material rack is released and becomes an independent rotating unit. When the operator touches any material rack, it only causes that material rack to rotate individually without triggering the linkage of the entire workstation. This avoids the clamping and alignment difficulties caused by the existing always-meshing transmission structure, and also avoids the cumbersome posture adjustment of irregular precision parts and the safety hazard of the operator being scratched by the rotating material rack. This improves the efficiency of loading and unloading operations and the safety of equipment use. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the structure of an integrated multifunctional composite coating equipment; Figure 2 A schematic diagram of the structure of the movable valve cavity assembly after removing the movable valve cavity and the annular movable plate; Figure 3 This is a schematic diagram of the clutch braking mechanism; Figure 4 This is a cross-sectional view of the clutch and braking mechanism; Figure 5 This is a structural diagram of the moving part; Figure 6 This is a schematic diagram of the sleeve structure; Figure 7 A schematic diagram of the structure for removing the moving valve cavity from the moving valve cavity assembly; Figure 8 This is a schematic diagram of the structure of a ring-shaped movable plate; Figure 9 This is a three-dimensional schematic diagram of the bottom of the guide seat.

[0019] Reference numerals: 1. Base; 2. Fixed door cavity assembly; 21. Guide seat; 211. Guide slope; 3. Moving door cavity assembly; 31. Moving door cavity; 32. Revolutionary disc; 321. Annular top plate; 322. Annular bottom plate; 322a. Transmission gear; 323. Connecting rod; 33. Material rack; 34. Central gear; 35. Planetary gear; 36. Clutch and brake mechanism; 361. Sleeve; 361a. Cross guide hole; 362. Bearing; 363. Moving part; 363a. Cross key; 364. Moving engagement part; 364a. Moving engagement tooth; 365. Fixed engagement part; 365a. Fixed engagement tooth; 366. Elastic reset part; 367. Thrust bearing; 37. Annular moving plate; 371. Guide column; 372. Receiving groove; 373. Chamfer. Detailed Implementation

[0020] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0021] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0022] like Figures 1 to 9 As shown: An integrated multifunctional composite coating equipment includes: a base 1, a fixed cavity assembly 2 disposed on the base 1, and two sets of movable cavity assemblies 3 hinged to both sides of the fixed cavity assembly 2; The two moving door cavity assemblies 3 alternately close with the fixed door cavity assembly 2 to form a vacuum cavity by either the moving door cavity assembly 3 and the fixed door cavity assembly 2. A composite coating functional assembly is provided in the vacuum cavity. The composite coating functional assembly is used to perform at least two different coating and / or surface treatment processes on the workpiece in the vacuum cavity. Each movable door cavity assembly 3 includes a movable door cavity 31, a rotating disk 32 rotatably disposed within the movable door cavity 31, and a plurality of material racks 33 arranged circumferentially on the rotating disk 32. A transmission gear pair is provided between the material racks 33 and the rotating disk 32. When the rotating disk 32 rotates, it drives each material rack 33 to revolve and rotate on its own axis. A clutch and brake mechanism 36 is provided on the transmission chain between the material rack 33 and the rotary table 32. The clutch and brake mechanism 36 is driven by the opening and closing displacement of the moving door cavity assembly 3 relative to the fixed door cavity assembly 2. When the moving door cavity assembly 3 is closed, the clutch and brake mechanisms 36 are driven to engage synchronously, so that each material rack 33 revolves with the rotary table 32 and rotates on its own axis. When the moving door cavity assembly 3 is opened, the clutch and brake mechanisms 36 are driven to disengage synchronously, so that the transmission linkage of each material rack 33 is released and they can rotate independently.

[0023] The overall working principle of the equipment is as follows: When the door is open, the clutch and brake mechanism 36 remains disengaged, and each material rack 33 can be independently and manually rotated to any angle, which is convenient for workpiece clamping and posture adjustment; when the moving door cavity assembly 3 is closed, the closing displacement of the door body synchronously triggers the clutch and brake mechanism 36 to engage, and after vacuuming, the rotating disk 32 drives the material rack 33 to perform a compound motion of revolution and rotation, which, together with the composite coating function component, completes the multi-process coating treatment; after the coating is completed, the moving door cavity assembly 3 is opened, and the opening displacement of the door body synchronously triggers the clutch and brake mechanism 36 to disengage, and each material rack 33 returns to an independent rotatable state, which is convenient for workpiece removal and quality inspection.

[0024] In use, the workpiece to be coated is first hung on the material rack 33 of the opening side-moving door cavity assembly 3. The angle of a single material rack 33 can be rotated arbitrarily to facilitate the loading of materials by the worker. Then, the side-moving door cavity assembly 3 is pushed to rotate around the hinge axis until it is completely closed with the fixed door cavity assembly 2. During the closing process, the clutch braking mechanism 36 completes the engagement action simultaneously. Then, the vacuum pumping system is started to pump the cavity to the preset vacuum degree. The revolution drive mechanism is started to drive the revolution disk 32 to rotate. Finally, the corresponding functional modules in the composite coating functional component are started in sequence according to the process requirements. After the coating operation is completed, the operation of each module is stopped. After the cavity is refilled with atmospheric air, the corresponding side-moving door cavity assembly 3 is opened. The clutch braking mechanism 36 is disengaged simultaneously. The coated workpiece can be removed by turning the material racks 33 one by one.

[0025] By setting a clutch mechanism on the transmission chain between the material rack 33 and the rotary table 32, driven by the opening and closing displacement of the moving door cavity assembly 3, a control method is achieved in which the transmission chain automatically disconnects when the door is opened and automatically engages synchronously when the door is closed. In the open state, the transmission linkage of each material rack 33 is released and becomes an independent rotating unit. When the operator touches any material rack 33, it only causes that material rack 33 to rotate alone without triggering the linkage of the entire workstation. This avoids the difficulty of clamping and alignment caused by the linkage mechanism in the existing always meshed transmission structure, and also avoids the cumbersome posture adjustment of irregular precision parts and the safety hazard of the operator being scratched by the rotating material rack 33. This improves the efficiency of loading and unloading operations and the safety of equipment use. Meanwhile, each material rack 33 can rotate independently at any angle when the door is open. Operators can observe any workpiece without disassembling it completely, avoiding the risk of secondary contamination and damage caused by repeated disassembly of workpieces for quality inspection in traditional solutions, and reducing the time cost of workpiece quality inspection and rework. The synchronous engagement when the door is closed ensures the consistency of the revolution and rotation of each station during the coating process and the reliability of the transmission, ensuring the uniformity and stability of the composite coating process. On this basis, in conjunction with the composite coating functional components set in the vacuum chamber, this invention not only has multi-functional composite coating process capabilities, but also improves clamping efficiency and operational safety.

[0026] It should be noted that the specific module types included in the above-mentioned composite coating functional components can be adapted to the actual coating process requirements. As an optional implementation method, the composite coating functional components include at least two of the following: tungsten filament evaporation module, magnetron sputtering module, multi-arc coating module, cavity cleaning module, and silicone oil protective film coating module. Among them, any two or more of the above modules can be selected and used in combination according to process requirements. The modules are spatially isolated by an openable shield to suppress aluminum vapor contamination of magnetron sputtering targets and multi-arc targets, and to avoid cross-interference problems such as large multi-arc liquid droplets falling onto the workpiece surface and hexamethyldisiloxane polymerization products clogging the evaporation source.

[0027] As a preferred embodiment of the above, the transmission gear pair includes a central gear 34 fixedly disposed on the inner wall of the top of the moving door cavity 31, and planetary gears 35 correspondingly disposed on the upper end of each material rack 33; The central gear 34 is arranged coaxially with the planetary disk 32, and each planetary gear 35 is always meshed with the central gear 34; When the revolution disk 32 rotates, it drives each planetary gear 35 to revolve around the central gear 34, and causes each planetary gear 35 to rotate under the meshing action with the central gear 34, thereby driving each material rack 33 to synchronously obtain a composite motion of revolution and rotation. It should be noted that the central gear 34 can also be fixedly set on the top inner wall of the moving door cavity 31 or other fixed positions, as long as it can be arranged coaxially with the revolution disk 32 and provide a fixed meshing gear ring for the planetary gears 35. Such position adjustment does not constitute a substantial change to the present invention.

[0028] In this embodiment, the rotary disk 32 includes a coaxial annular top plate 321 and an annular bottom plate 322 that are spaced apart vertically, and a plurality of connecting rods 323 that connect the annular top plate 321 and the annular bottom plate 322. The outer peripheral wall of the annular base plate 322 is provided with transmission teeth 322a, which are used to mesh with the output gear of the drive motor to drive the rotating disk 32 to rotate around its own axis. Specifically, the drive motor can also be installed in the fixed door cavity assembly 2 or at the bottom of the moving door cavity 31. Each structure is an alternative implementation that can be replaced by another, and they are not applied to the same product at the same time. These alternative implementations do not constitute a limitation on the scope of protection.

[0029] As a preferred embodiment of the above embodiment, the clutch braking mechanism 36 includes: Sleeve 361 is fixedly installed at the end of material rack 33, and sleeve 361 passes through annular top plate 321 and planetary gear 35. Bearing 362 is provided between sleeve 361 and planetary gear 35. The movable part 363 is at least partially disposed inside the sleeve 361, and the movable part 363 is slidably disposed along the axial direction of the sleeve 361. The upper end of the movable part 363 extends out of the sleeve 361, and the extended end of the movable part 363 is provided with a movable engagement portion 364. The fixed engagement portion 365 is fixedly disposed on the upper end face of the planetary gear 35 and is used to engage or disengage axially with the movable engagement portion 364. The elastic reset member 366 is disposed between the movable member 363 and the sleeve 361, and is used to provide an elastic force that causes the movable member 363 to drive the moving engagement 364 to disengage from the fixed engagement 365. The movable part 363 is driven by an external driving force to slide back and forth along the axial direction so that the movable engagement part 364 engages with the fixed engagement part 365. Specifically, when the movable engagement part 364 is not subjected to an external driving force, under the elastic force of the elastic reset part 366, the movable engagement part 364 and the fixed engagement part 365 are in a separated state. At this time, when the planetary gear 35 rotates, due to the presence of the bearing 362, the rotation of the planetary gear 35 cannot be transmitted to the sleeve 361 and the material rack 33 through the clutch mechanism. That is, the transmission chain between the material rack 33 and the rotary disk 32 is disconnected. At this time, the operator can manually rotate a single material rack 33 without being restricted by the linkage of the rotary disk 32 and other material racks 33. When the movable engagement part 364 moves toward the fixed engagement part 365 under the action of an external driving force, the fixed engagement part 365 and the movable engagement part 364 engage with each other. At this time, when the planetary gear 35 rotates, it transmits torque to the material rack 33 in sequence through the fixed engagement part 365, the movable engagement part 364, the moving part 363 and the sleeve 361, driving the material rack 33 to rotate. At the same time, the material rack 33 revolves with the rotary disk 32. By controlling the on and off of the external driving force, the engagement and disengagement control of the transmission chain between the material rack 33 and the rotary disk 32 is realized. As an optional implementation, the fixed engagement portion 365 can be integrally formed with the planetary gear 35, or it can be separately formed and fixedly connected to the planetary gear 35, as long as it can cooperate with the moving engagement portion 364 to achieve torque engagement and disengagement. This example does not constitute a limitation on the scope of protection.

[0030] The movable engagement portion 364 is provided with a plurality of movable engagement teeth 364a distributed circumferentially, and the fixed engagement portion 365 is provided with a plurality of fixed engagement teeth 365a distributed circumferentially. The movable engagement teeth 364a and the fixed engagement teeth 365a are arranged opposite each other in the axial direction and can mesh with each other. When the movable engagement portion 364 moves toward the fixed engagement portion 365, the movable engagement teeth 364a and the fixed engagement teeth 365a mesh with each other in the axial direction, thereby realizing the transmission of torque. This arrangement has reliable engagement, small axial dimension, no slippage, and is especially suitable for long-term stable operation in a vacuum environment. As an alternative, the moving joint 364 and the fixed joint 365 can also adopt an end face friction plate type joint structure. Each structure is an alternative implementation method that can be selected according to the specific working conditions and the magnitude of the transmitted torque. All of them are within the protection scope of this application.

[0031] As a preferred embodiment of the above embodiment, a circumferential limiting structure is provided between the movable member 363 and the sleeve 361. The circumferential limiting structure is used to restrict the rotation of the movable member 363 relative to the sleeve 361 and allow the movable member 363 to slide axially relative to the sleeve 361 so that torque is transmitted between the movable member 363 and the sleeve 361. Specifically, one specific implementation of the circumferential limiting structure is a cross-shaped key 363a provided on the outer periphery of the movable member 363 and a cross-shaped guide hole 361a opened on the inner wall of the top of the sleeve 361. The cross-shaped key 363a and the cross-shaped guide hole 361a slide in the axial direction to achieve circumferential limiting and axial guiding.

[0032] In this embodiment, a thrust bearing 367 is provided on the end face of the movable engagement portion 364 opposite to the fixed engagement portion 365. The external driving force is applied to the movable engagement portion 364 through the thrust bearing 367, so that the movable engagement portion 364 can rotate relative to the force-applying component of the external driving force under the state of being subjected to axial thrust. Specifically, when the clutch mechanism is engaged, the movable engagement portion 364 rotates together with the fixed engagement portion 365, while the force-applying component of the external driving force remains stationary. The thrust bearing 367 is provided to avoid friction and interference between the rotation of the movable engagement portion 364 and the force-applying component, reduce the end face friction between the movable engagement portion 364 and the force-applying component, reduce component wear and opening and closing resistance, and extend the service life of the equipment.

[0033] In this embodiment, the thrust bearing 367 can be implemented as a planar thrust ball bearing, including an upper ring, a lower ring, and a plurality of rolling elements disposed between the upper and lower rings. The lower ring is fixedly connected to the end face of the moving joint 364, and the upper ring abuts against the bottom wall of the receiving groove 372 of the annular movable plate 37. When the annular movable plate 37 applies axial thrust to the moving joint 364 through the lower ring, rolling elements, and upper ring, the rolling elements roll between the upper and lower rings, thereby achieving decoupling of axial thrust transmission and circumferential rotation. As an alternative implementation, the thrust bearing 367 can also be a cylindrical roller thrust bearing 367, including a shaft ring, a housing ring, and a plurality of cylindrical rollers disposed between the shaft ring and the housing ring, which can also achieve the above functions. Each structure is an alternative implementation that can be replaced by another, and they are not applied to the same product at the same time.

[0034] It also includes a synchronous clutch drive mechanism, which includes an annular movable plate 37 coaxially disposed above the rotary disk 32, and an axial guide structure disposed between the annular movable plate 37 and the annular top plate 321. The annular movable plate 37 can be slidably and reciprocally along the axial direction of the movable door cavity 31 through the axial guide structure. The annular movable plate 37 is provided with a receiving groove 372 on the side facing the revolving disk 32, and each thrust bearing 367 is at least partially housed in the corresponding receiving groove 372; When the annular movable plate 37 moves toward the rotary disk 32, it pushes all the movable parts 363 to move axially in sync through each thrust bearing 367, so that each moving joint 364 engages synchronously with the corresponding fixed joint 365. This achieves the synchronous action of the clutch mechanism of all the material racks 33 controlled by a single driving force, ensuring the consistency and synchronicity of the actions of each station. As an optional implementation, a wear-resistant pad is embedded at the bottom of the receiving groove 372 to reduce wear between the thrust bearing 367 and the receiving groove 372. This example does not constitute a limitation on the scope of protection and is within the scope of protection of this application.

[0035] In this embodiment, the axial guide structure includes multiple guide posts 371 fixedly disposed on the annular movable plate 37 and extending downward along the axial direction, and multiple guide holes correspondingly disposed on the annular top plate 321. Each guide post 371 is slidably inserted into the corresponding guide hole, so that the annular movable plate 37 can slide stably along the axial direction of the guide post 371 without radial displacement.

[0036] Among them, a guide seat 21 is provided on the inner side of the top of the fixed door cavity assembly 2, corresponding to the position of the annular movable plate 37. The guide seat 21 is provided with a guide slope 211 at one end facing the movable door cavity assembly 3, and the outer periphery of the annular movable plate 37 is provided with a chamfer 373 that cooperates with the guide slope 211. When the moving door cavity assembly 3 closes to the fixed door cavity assembly 2, the chamfer 373 moves relative to the guide inclined surface 211 to convert the rotational opening and closing displacement of the moving door cavity assembly 3 into the axial downward displacement of the annular movable plate 37 toward the rotating disk 32, thereby driving the clutch mechanisms to engage synchronously; when the moving door cavity assembly 3 opens, the annular movable plate 37 resets in the direction away from the rotating disk 32 under the action of the elastic reset member 366, and the clutch mechanisms disengage synchronously. As an optional implementation, multiple rolling elements, specifically balls, can be provided on the guide seat 21. The sliding friction between the guide seat 21 and the annular movable plate 37 is converted into rolling friction through the rolling elements, thereby reducing motion resistance and extending service life.

[0037] This invention also includes an integrated multifunctional composite coating method, employing the integrated multifunctional composite coating equipment described above, comprising the following steps: S10: Open any moving door cavity assembly 3 relative to the fixed door cavity assembly 2, the clutch and brake mechanism 36 disengages simultaneously, each material rack 33 is released from transmission linkage and can rotate independently of each other, and the workpiece to be plated is clamped on each material rack 33 respectively. S20: The moving door cavity assembly 3 is closed relative to the fixed door cavity assembly 2 and enclosed to form a vacuum cavity. The clutch and brake mechanism 36 engages synchronously. Each material rack 33 is connected to the rotating disk 32 via a transmission gear pair to form a transmission connection. S30: Evacuate the vacuum chamber to the preset vacuum level; S40: Drives the rotary table 32 to rotate, and each material rack 33 rotates with the rotary table 32 and also rotates on its own. S50: Activate the composite coating function component and perform at least two different coating and / or surface treatment processes on the workpiece according to the preset coating process. S60: After the coating is completed, stop the composite coating function component and fill the vacuum chamber with gas; S70: The moving door cavity assembly 3 is opened relative to the fixed door cavity assembly 2, the clutch and brake mechanism 36 is simultaneously disengaged, each material rack 33 is released from transmission linkage and can rotate independently of each other, and the coated workpiece is removed.

[0038] The workflow is as follows: The operator first opens the moving door cavity assembly 3 relative to the fixed door cavity assembly 2, driving the annular movable plate 37 to move axially away from the rotating disk 32. Simultaneously, all clutches disengage, and the transmission chain between each material rack 33 and the rotating disk 32 is disconnected. At this time, each material rack 33 can rotate independently and freely. The operator then rotates each material rack 33 to an angle suitable for clamping and loads the workpieces to be plated one by one onto each material rack 33. For irregularly shaped precision parts and other workpieces with strict requirements for clamping orientation, the operator can independently adjust the angle of the corresponding material rack 33 at any time during the clamping process to achieve high-precision clamping. After clamping, the operator closes the movable door cavity assembly 3 relative to the fixed door cavity assembly 2. The closing displacement of the movable door cavity assembly 3 drives the annular movable plate 37 to move axially toward the rotating disk 32 via the guide inclined surface 211 on the guide seat 21. The annular movable plate 37 synchronously pushes each movable part 363 downward through each thrust bearing 367, so that each movable engagement part 364 engages synchronously with the corresponding fixed engagement part 365. The rotation gears of each material rack 33 are reconnected to the transmission chain of the rotating disk 32 through the clutch mechanism. Subsequently, the vacuum pump group evacuates the vacuum chamber to the preset vacuum level through the vacuum pump group interface. The drive motor drives the rotating disk 32 to rotate around its own axis. Each material rack 33 rotates with the rotating disk 32 and rotates through the transmission gear pair. According to the preset coating process, tungsten wire steam is selected sequentially or simultaneously. At least two of the following modules—the sputtering module, the magnetron sputtering module, the multi-arc coating module, the cavity cleaning module, and the silicone oil protective film coating module—are used to coat and / or surface treat the workpiece. The corresponding shielding cover is open when each module is working and closed when not in use to prevent cross-contamination. After coating is completed, each coating module is closed, and dry gas is introduced into the vacuum cavity to atmospheric pressure through the gas filling interface. The operator then opens the moving door cavity assembly 3 again, and each clutch mechanism disengages simultaneously, allowing each material rack 33 to rotate independently. The operator can rotate each material rack 33 to an angle that facilitates observation, allowing direct observation of the workpiece while the door is open, without needing to remove the entire workpiece, thus avoiding secondary contamination and the risk of impact. Finally, the coated workpiece is removed one by one from each material rack 33, completing the entire composite coating process.

[0039] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. An integrated multifunctional composite coating equipment, characterized in that, include: A base, a fixed door cavity assembly disposed on the base, and two sets of movable door cavity assemblies hinged to both sides of the fixed door cavity assembly; The two moving door cavity assemblies alternately close with the fixed door cavity assembly to form a vacuum cavity by either the moving door cavity assembly and the fixed door cavity assembly. A composite coating functional assembly is provided in the vacuum cavity, which is used to perform at least two different coating and / or surface treatment processes on the workpiece in the vacuum cavity. Each of the moving door cavity assemblies includes a moving door cavity, a rotating disk rotatably disposed within the moving door cavity, and a plurality of material racks arranged circumferentially on the rotating disk. A transmission gear pair is provided between the material racks and the rotating disk. When the rotating disk rotates, it drives each of the material racks to revolve around the rotating disk and rotate on its own axis. A clutch and braking mechanism is provided on the transmission chain between the material rack and the rotary disk. The clutch and braking mechanism is driven by the opening and closing displacement of the moving door cavity assembly relative to the fixed door cavity assembly. When the moving door cavity assembly is closed, each of the clutch and brake mechanisms is driven to engage synchronously, causing each of the material racks to revolve around the revolution disk and rotate on its own axis. When the moving door cavity assembly is opened, each of the clutch and brake mechanisms is driven to disengage synchronously, so that each of the material racks is released from the transmission linkage and can rotate independently.

2. The integrated multifunctional composite coating equipment according to claim 1, characterized in that, The composite coating functional components include at least two of the following: a tungsten filament evaporation module, a magnetron sputtering module, a multi-arc coating module, a cavity cleaning module, and a silicone oil protective film coating module.

3. The integrated multifunctional composite coating equipment according to claim 1, characterized in that, The transmission gear pair includes a central gear fixedly disposed on the inner wall of the top of the moving door cavity, and planetary gears correspondingly disposed on the upper end of each of the material racks; The central gear is arranged coaxially with the revolution disk, and each of the planetary gears is always meshed with the central gear; When the revolving disk rotates, it drives each of the planetary gears to revolve around the central gear, and causes each of the planetary gears to rotate on its own axis under the meshing action with the central gear.

4. The integrated multifunctional composite coating equipment according to claim 3, characterized in that, The rotary disk includes a coaxial annular top plate and an annular bottom plate spaced apart vertically, as well as a plurality of connecting rods connecting the annular top plate and the annular bottom plate; The outer peripheral wall of the annular base plate is provided with transmission teeth for meshing with the output gear of the drive motor to drive the revolving disk to rotate around its own axis.

5. The integrated multifunctional composite coating equipment according to claim 4, characterized in that, The clutch braking mechanism includes: A sleeve is fixedly disposed at the end of the material rack, and the sleeve passes through the annular top plate and the planetary gear, and a bearing is disposed between the sleeve and the planetary gear; A movable component is at least partially disposed within the sleeve, and the movable component is slidably disposed along the axial direction of the sleeve. The upper end of the movable component extends outward from the outside of the sleeve, and the extended end of the movable component is provided with a movable engagement portion. A fixed engagement portion is fixedly disposed on the upper end face of the planetary gear, and is used to axially engage or disengage with the moving engagement portion; An elastic reset member is provided between the movable member and the sleeve to disengage the movable engagement portion from the fixed engagement portion; The movable part is driven by an external driving force to slide back and forth along the axial direction so that the moving joint part engages with the fixed joint part.

6. The integrated multifunctional composite coating equipment according to claim 5, characterized in that, A circumferential limiting structure is provided between the movable component and the sleeve. The circumferential limiting structure is used to restrict the rotation of the movable component relative to the sleeve and allow the movable component to slide axially relative to the sleeve so as to transmit torque between the movable component and the sleeve.

7. The integrated multifunctional composite coating equipment according to claim 5, characterized in that, A thrust bearing is provided on the end face of the movable joint opposite to the fixed joint. The external driving force acts on the movable joint through the thrust bearing, so that the movable joint rotates under the condition of being subjected to axial thrust.

8. The integrated multifunctional composite coating equipment according to claim 7, characterized in that, It also includes a synchronous clutch drive mechanism, which includes an annular movable plate coaxially disposed above the rotary disk, and an axial guide structure disposed between the annular movable plate and the annular top plate; The annular movable plate is provided with a receiving groove on the side facing the revolution disk, and each thrust bearing is at least partially housed in the corresponding receiving groove; When the annular movable plate moves toward the revolution disk, it synchronously pushes all the moving parts to move axially through each of the thrust bearings, so that each moving joint engages synchronously with the corresponding fixed joint.

9. The integrated multifunctional composite coating equipment according to claim 8, characterized in that, A guide seat is provided on the inner top of the fixed door cavity assembly corresponding to the position of the annular movable plate. The guide seat has a guide slope at one end facing the movable door cavity assembly, and the outer periphery of the annular movable plate has a chamfer that cooperates with the guide slope. When the moving door cavity assembly closes toward the fixed door cavity assembly, the chamfer moves relative to the guide inclined surface to convert the rotational opening and closing displacement of the moving door cavity assembly into an axial downward pressing displacement of the annular movable plate toward the revolution disk.

10. An integrated multifunctional composite coating method, characterized in that, The integrated multifunctional composite coating equipment as described in any one of claims 1 to 9 includes the following steps: When any of the moving door cavity components is opened relative to the fixed door cavity component, the clutch and brake mechanism is simultaneously disengaged, the transmission linkage of each of the material racks is released and they rotate independently of each other, and the workpieces to be plated are respectively clamped on each of the material racks. The moving door cavity assembly is closed relative to the fixed door cavity assembly and enclosed to form a vacuum cavity. The clutch and braking mechanism engages synchronously. Each of the material racks is connected to the rotating disk via the transmission gear pair to form a transmission connection. The vacuum chamber is evacuated to a preset vacuum level; The rotary table is driven to rotate, and each of the material racks revolves around the rotary table and rotates on its own axis; The composite coating function component is activated to perform at least two different coating and / or surface treatment processes on the workpiece according to a preset coating process. After the coating is completed, the composite coating function component is stopped, and the vacuum chamber is filled with gas; The moving door cavity assembly is opened relative to the fixed door cavity assembly, the clutch and brake mechanism is simultaneously disengaged, the transmission linkage of each material rack is released and they rotate independently of each other, and the coated workpiece is removed.

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