Evaporation source device and evaporation apparatus

Abstract

This application provides an evaporation source device and a vapor deposition equipment, belonging to the technical field of vapor deposition film coating. The evaporation source device includes a support base, an evaporation assembly, and a drive assembly. The evaporation assembly includes a crucible and two housings, with heating and / or cooling components disposed within the housings. The end faces of the two housings abut against each other to form a receiving cavity, in which the crucible is placed. The drive assembly drives at least one housing to move, forming at least one inlet / outlet between the two housings for the crucible to enter and exit. By driving the two housings to move relative to each other, the crucible can be easily moved in and out of the receiving cavity, enabling the evaporation source device to work in conjunction with a robotic arm to achieve automated crucible replacement and improve the automation level of the vapor deposition equipment.

Description

Technical Field

[0001] This application belongs to the technical field of vapor deposition coating, and more specifically, relates to an evaporation source device and vapor deposition equipment. Background Technology

[0002] In modern industrial production, vapor deposition technology is a key process widely used in thin film deposition. One of the core components of a vapor deposition apparatus is the evaporation source, responsible for heating the material to be evaporated to a sufficiently high temperature to generate the required vapor. A traditional evaporation source typically consists of a crucible and a heater. The crucible is a high-temperature resistant container used to hold the material to be evaporated, while the heater surrounds the crucible and transfers heat to the material inside the crucible through resistance heating or induction heating, causing it to evaporate.

[0003] Currently, most evaporation sources are designed with a cavity inside the heater to house the crucible. Before the evaporation process begins, the operator needs to place the crucible inside the heater cavity and then start the heater to heat the material inside. Once the crucible is placed in the heater and heating begins, it is difficult to remove it due to the high temperature and space constraints. This not only increases the difficulty of the operator's work but also, in continuous production, the time-consuming crucible replacement significantly reduces production efficiency. Summary of the Invention

[0004] The purpose of this application is to provide an evaporation source device and a vapor deposition equipment to solve the problem in the prior art that the crucible is difficult to remove from the heater in the evaporation source device.

[0005] To achieve the above objectives, in a first aspect, this application provides an evaporation source apparatus, comprising: Support base; An evaporation assembly includes a crucible and two housings. The housings are disposed on a support base and each housing has a mounting chamber. A heating component and / or a cooling component are disposed in the mounting chamber. Partial end faces of the two housings abut each other and together enclose a receiving chamber that is closed on the periphery and open on the top. The crucible has an evaporation chamber with an open top and is placed in the receiving chamber. A drive assembly, wherein at least one of the housings is movably connected to the support base, the drive assembly being connected to the movable housing for driving the housing to move such that the two housings are separated from each other to form at least one inlet / outlet on the periphery of the receiving chamber for the crucible to enter and exit.

[0006] In some embodiments of the first aspect, the evaporation assembly further includes a support shaft disposed on the support base, the support shaft extending vertically and located outside the receiving chamber; two housings are symmetrically arranged along a plane passing through the axis of the support shaft, and both housings are rotatably connected to the support shaft; the drive assembly is used to drive the two housings to rotate simultaneously about the support shaft facing each other or back to back.

[0007] In some embodiments of the first aspect, the bottom of the housing is provided with a guide post, and the support base is provided with an arc-shaped guide groove extending in the circumferential direction along the support axis, and the guide post is slidably embedded in the arc-shaped guide groove.

[0008] In some embodiments of the first aspect, the driving component includes: A drive plate is slidably connected to the support base, and the sliding direction of the drive plate is parallel to the symmetry plane of the two housings; two sliding grooves are formed on the drive plate, and the extending direction of the sliding grooves is perpendicular to the symmetry plane. Each sliding groove corresponds to each guide post, and the guide post is slidably embedded in the sliding groove. A driver, mounted on the support base, is used to drive the drive plate to slide, so that when the drive plate slides, it drives the two guide columns to move facing each other or back to back through the two slide grooves respectively.

[0009] In some embodiments of the first aspect, each of the grooves is provided with an elastic element, which is connected to the corresponding guide post and is used to apply an elastic force to the two guide posts to move in opposite directions.

[0010] In some embodiments of the first aspect, the mounting chamber includes a heating chamber and a cooling chamber, the cooling chamber being located on the side of the heating chamber facing away from the receiving chamber; the heating component is disposed in the heating chamber, and the cooling component is disposed in the cooling chamber.

[0011] In some embodiments of the first aspect, the mounting chamber is a vacuum chamber or filled with an inert gas.

[0012] In some embodiments of the first aspect, the evaporation assembly further includes a support ring located within the receiving chamber and fixed relative to the support base, with the bottom of the crucible inserted into the inner side of the support ring.

[0013] In some embodiments of the first aspect, the support base includes: Fixed base; A rotating platform is rotatably connected to the fixed component; both the evaporation component and the driving component are disposed on the rotating platform; there are multiple evaporation components and multiple driving components, each evaporation component and each driving component corresponds one-to-one, and the multiple evaporation components are arranged along the circumferential direction of the rotating platform.

[0014] Secondly, this application also provides a vapor deposition apparatus, including an apparatus body and an evaporation source device as described in the first aspect and any embodiment thereof, the apparatus body having a vapor deposition chamber, and the evaporation source device being disposed within the vapor deposition chamber.

[0015] The advantages of the evaporation source device and vapor deposition equipment provided in this application are as follows: Compared with the prior art, the two shells in the evaporation source device can move relative to each other under the control of the drive assembly, so as to form at least one inlet / outlet on the periphery of the receiving chamber, allowing the crucible to easily enter and exit the receiving chamber. It can be used in conjunction with a robotic arm to achieve automated crucible replacement, improving the automation level of the vapor deposition equipment. Furthermore, the heating and / or cooling components built into the shells can heat and / or cool the crucible inside the receiving chamber, ensuring uniform heating of the crucible, a simple and stable structure, and minimal interference with the relative movement of the two shells. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the vapor deposition equipment in the embodiments of this application; Figure 2 This is a schematic diagram of the evaporation source device in the embodiments of this application; Figure 3 This is a cross-sectional view of the evaporation source device in an embodiment of this application; Figure 4 for Figure 3 Enlarged view of section A; Figure 5 This is an exploded view of the casing in an embodiment of this application; Figure 6 This is an exploded view of the evaporation source device in the embodiments of this application; Figure 7 This is a schematic diagram of the structure in which the two housings are in the open state in an embodiment of this application; Figure 8 This is a schematic diagram of the evaporation source device from another perspective in the embodiments of this application; Figure 9 This is a state diagram of the drive component in an embodiment of this application when both housings are in a closed state; Figure 10 This is a state diagram of the driving component in an embodiment of this application when both housings are in the open state; Figure 11 This is a top view of the evaporation source device in another embodiment of this application; Figure 12 This is a cross-sectional view of an evaporation source device in another embodiment of this application.

[0018] The following are the labeling elements in the figure: 10-Equipment body; 101-Evaporation chamber; 20-Evaporation source device; 30-Vacuum pump; 100-Support base; 1001-Arc-shaped guide groove; 110-Fixed base; 120-Rotating table; 121-Main shaft; 200-Evaporation assembly; 201-Accommodation chamber; 210-Shell; 210a-Main body; 210b-Bottom cover; 210c-Partition; 2101-Heating chamber; 2102-Cooling chamber; 211-Guide column; 220-Crucible; 230-Heating component; 231-First linear component; 240-Cooling component; 241-Second linear component; 250-Support shaft; 260-Bearing ring; 300-Drive assembly; 310-Drive plate; 3101-Slide groove; 320-Driver; 330-Elastic element. Detailed Implementation

[0019] To make the technical problems, technical solutions, and beneficial effects to be solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0020] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0021] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0022] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0023] Reference Figure 1 This application provides a vapor deposition apparatus, which includes an apparatus body 10, an evaporation source device 20, and a vacuum pump 30. The apparatus body 10 has a vapor deposition chamber 101, the evaporation source device 20 is disposed in the vapor deposition chamber 101, and the vacuum pump 30 is mounted on the apparatus body 10. When the vapor deposition apparatus is running, the vacuum pump 30 creates a vacuum environment in the vapor deposition chamber 101. The evaporation source device 20 holds vapor deposition material and heats the vapor deposition material, causing it to evaporate or sublimate and adhere to the surface of a substrate in the vapor deposition chamber 101, forming a thin film on the substrate.

[0024] Reference Figure 2 The evaporation source device 20 includes a support base 100, an evaporation component 200, and a drive component 300.

[0025] The support base 100 can be a plate-like structure of any shape. It is used in the vapor deposition equipment to provide stable support for the evaporation assembly 200 and the drive assembly 300. In this embodiment, the support base 100 is a horizontally placed circular plate. The evaporation assembly 200 is mounted on the upper surface of the support base 100, and the drive assembly 300 is mounted on the lower surface. This prevents vapor generated by the evaporation assembly 200 during operation, or vapor deposition material splashed to the outside due to high temperature, from directly falling onto the drive assembly 300, thus preventing the drive assembly 300 from malfunctioning due to excessive temperature and ensuring the stable operation of the evaporation source device 20.

[0026] The evaporation assembly 200 includes a crucible 220 and two housings 210. The housings 210 are disposed on the support base 100 and have mounting chambers. Heating components 230 and / or cooling components 240 are disposed in the mounting chambers. Partial end faces of the two housings 210 abut each other and together form a receiving chamber 201 that is closed on the periphery and open on the top. The crucible 220 has an evaporation chamber with an open top and is placed in the receiving chamber 201.

[0027] The crucible 220 is a hollow container with an open top, forming an evaporation chamber inside to hold the vapor-deposited material. The crucible 220 can be made of a metallic material (such as a molybdenum alloy, tungsten alloy, or platinum-rhodium alloy) or a ceramic material (such as alumina, silicon nitride, or silicon carbide) to provide good high-temperature resistance and high strength. The crucible 220 can be of any shape; in this embodiment, it is a vertically arranged cylindrical shape.

[0028] The housing 210 is a component with a certain volume. Two housings 210 are arranged opposite each other, and at least a portion of the inner walls of the two housings 210 are spaced apart to form a receiving chamber 201 between the two housings 210. The shape can be adapted to the shape of the crucible 220 to form a receiving chamber 201 that matches the shape of the crucible 220. In this embodiment, the two housings 210 are arranged in a symmetrical semi-annular structure. When the two housings 210 abut against each other, a cylindrical receiving chamber 201 extending vertically and open at the top is formed between the arcuate inner walls of the two housings 210 to adapt to the cylindrical crucible 220, so that the crucible 220 can be installed in the receiving chamber 201 with the opening facing upward.

[0029] The interior of the housing 210 is hollow, forming an installation chamber inside. This chamber is used to install the heating element 230 and / or the cooling element 240. The heating element 230 transfers heat to the vapor-deposited material within the crucible 220, causing the material to evaporate or sublimate. The heating element 230 can be electromagnetic, resistance, or radiant, as long as it can heat the vapor-deposited material within the crucible 220. The cooling element 240 cools the crucible 220 to prevent overheating or excessive evaporation of the vapor-deposited material during heating. The cooling element 240 can be a cooling circulation pipe, using circulating cooling liquid or cooling gas to achieve the cooling effect.

[0030] It is understood that either the heating element 230 or the cooling element 240 can be installed in the mounting chamber, or both the heating element 230 and the cooling zone can be installed in the mounting chamber simultaneously. Specifically, when only the heating element 230 is installed inside the housing 210, the cooling element 240 can be installed on the outside of the housing 210 or in other structural parts. When only a cooler is installed in the housing 210, the heating element 230 can be installed on the outside of the housing 210 to heat the crucible 220.

[0031] Reference Figure 3In this embodiment, a heating component 230 and a cooling component 240 are simultaneously disposed within the housing 210. Furthermore, the mounting chamber includes a heating chamber 2101 and a cooling chamber 2102, with the cooling chamber 2102 located on the side of the heating chamber 2101 facing away from the receiving chamber 201. The heating component 230 is disposed within the heating chamber 2101, and the cooling component 240 is disposed within the cooling chamber 2102. The heating chamber 2101 and the cooling chamber 2102 can be independent of each other or interconnected.

[0032] By placing the heating chamber 2101 close to the receiving chamber 201, a heating element 230 is installed to heat the vapor-deposited material inside the crucible 220. This proximity of the heating element 230 to the crucible 220 improves heating efficiency, reduces heat loss, and increases the evaporation efficiency of the vapor-deposited material inside the crucible 220. The cooling chamber 2102, located outside the heating chamber 2101, is used to install a cooling element 240, enabling the cooling element 240 to simultaneously cool both the inner heating element 230 and the crucible 220 during operation.

[0033] When the evaporation source device 20 is running, the heating element 230 heats the crucible 220 inside the containment chamber, causing the vapor deposition material inside the crucible 220 to evaporate or sublimate. The evaporated material is released into the vapor deposition chamber 101 through the top opening of the containment chamber 201, and then adheres to the substrate surface to form a thin film. The cooling element 240 cools the heating element 230 and the crucible 220 to prevent the vapor deposition material from overheating or evaporating too quickly, ensuring the stability and controllability of the vapor deposition process.

[0034] Reference Figure 4 Furthermore, the bottom of the housing 210 may have a first through hole and a second through hole. The first through hole connects to the heating chamber 2101, and the second through hole connects to the cooling chamber 2102. In actual use, the heating component 230 has a first linear member 231, such as a heating wire, heating tube, or power cord, which can pass through the first through hole to connect to an external power source. The cooling component 240 has a second linear member 241, such as a cooling water pipe or cooling cable, which can pass through the second through hole to connect to an external cooling water source. Furthermore, sealing rings can be installed in both the first and second through holes to tightly fill the gaps between the first through hole and the first linear member 231, and between the second through hole and the second linear member 241, preventing gas or liquid leakage and ensuring the airtightness of the housing 210 and the stability of the internal environment.

[0035] It is understood that the housing 210 can be a one-piece structure or a split structure to facilitate the assembly of the heating element 230 and the cooling element 240 into the mounting cavity. (Refer to...) Figure 5In this embodiment, the housing 210 includes a body portion 210a, a bottom cover portion 210b, and a partition portion 210c. The body portion 210a is hollow with an open bottom. The bottom cover portion 210b is fixed to the bottom of the body portion 210a and closes its bottom opening, forming an installation chamber between the body portion 210a and the bottom cover portion 210b. The partition portion 210c is located inside the installation chamber and is integrally formed with the body portion 210a, dividing the installation chamber into an independent heating chamber 2101 and a cooling chamber 2102. The bottom cover portion 210b and the body portion 210a can be connected and fixed by fasteners, snap-fit ​​connections, adhesives, etc., to facilitate the housing of the heating component 230 and the cooling component 240 within the installation chamber.

[0036] Furthermore, the installation chamber is a vacuum chamber or filled with an inert gas, such as argon, neon, or helium, to reduce heat exchange between the heating element 230 and the cooling element 240 and the outside environment during operation, thereby improving the heat preservation effect of the shell 210.

[0037] The vacuum chamber can be obtained by evacuation or by installing a suction pump inside the mounting chamber to continuously maintain the vacuum level. Inert gas can be filled into the mounting chamber through the first or second through hole at the bottom of the housing, or external inert gas can be continuously introduced into the mounting chamber through a circulation pipeline on the housing to maintain an inert gas atmosphere inside the mounting chamber.

[0038] In addition, an insulation layer, such as insulation cotton or insulation foam, can be provided on the outer wall of the shell 210 to reduce heat transfer between the shell 210 and the external environment, improve the thermal insulation performance of the shell 210, and further reduce heat loss.

[0039] Reference Figure 6 and Figure 7 In the two housings 210, at least one housing 210 is movably connected to the support 100, for example, slidably connected to the support 100 or rotatably connected to the support 100, so that the two housings 210 can move relative to each other. The drive assembly 300 is connected to the movable housing 210 and is used to drive the housing 210 to move so that the two housings 210 separate from each other to form at least one inlet / outlet on the periphery of the receiving chamber 201 for the crucible 220 to enter and exit.

[0040] By enabling at least one of the housings 210 to move, the two housings 210 can be in a closed state, interconnected to form a receiving cavity, and in an open state, where the two housings 210 are separated to open the receiving cavity. In the open state, at least one side of the two housings 210 is spaced apart, and the horizontal distance is greater than the outer diameter of the crucible 220, thereby forming an inlet / outlet on one side of the receiving cavity 201 for the crucible 220 to enter and exit the receiving cavity horizontally, facilitating the replacement of the crucible 220.

[0041] In practical applications, the drive assembly 300 can be controlled by the control system of the vapor deposition equipment. When the vapor deposition equipment reaches the step where the crucible 220 needs to be replaced, the control system automatically starts the drive assembly 300. The drive assembly 300 moves the movable housing 210, causing the two housings 210 to separate from each other, thereby forming one or more inlets and outlets around the receiving chamber 201 for the crucible 220 to enter and exit. This allows the old crucible 220 to be quickly removed through the inlets and outlets, and the new crucible 220 to be placed into the receiving chamber 201. Subsequently, the drive assembly 300 starts again, moving the movable housing 210 so that the two housings 210 re-abut and close the receiving chamber 201, allowing the vapor deposition operation to continue.

[0042] Furthermore, a robotic arm for gripping the crucible 220 can be installed in the vapor deposition equipment. The robotic arm and the drive assembly 300 are jointly controlled by the control system, enabling the robotic arm to be linked with the opening and closing of the two housings 210. For example, when the drive assembly 300 starts and moves the movable housing 210 to form an inlet / outlet for the crucible 220 to enter and exit, the control system simultaneously activates the robotic arm, causing it to reach into the receiving chamber 201, grip the old crucible 220, and remove it. Subsequently, the robotic arm moves again, accurately placing the new crucible 220 into a predetermined position within the receiving chamber 201. After the robotic arm completes the replacement of the crucible 220, the drive assembly 300 starts again, moving the movable housing 210 so that the two housings 210 re-abut and tightly seal the receiving chamber 201. Through the coordinated control of the robotic arm and the drive assembly 300, the automation level of the vapor deposition equipment can be improved, the complexity and risk of manual operation can be reduced, and the efficiency of the vapor deposition operation can be increased.

[0043] Reference Figure 6 and Figure 7 In this embodiment, the evaporation assembly 200 further includes a support shaft 250 disposed on the support base 100. The support shaft 250 extends vertically and is located outside the receiving chamber 201. Two housings 210 are symmetrically arranged along a plane passing through the axis of the support shaft 250, and both housings 210 are rotatably connected to the support shaft 250. The drive assembly 300 is used to drive the two housings 210 to rotate simultaneously around the support shaft 250, facing each other or back to back.

[0044] Among them, the support shaft 250 is a shaft that is vertically fixed to the top of the support base 100. The outer wall surface of the housing 210 protrudes a connecting part in the direction of the support shaft 250. A through hole is opened on the connecting part, and the support shaft 250 passes through the through hole, so that the housing 210 and the support shaft 250 are rotatably connected, so as to switch between the closed state and the open state through the relative rotation of the two housings 210.

[0045] When both housings 210 are rotatably connected to the support shaft 250, the bottom of the housing 210 may be provided with a guide post 211, and the support base 100 is provided with an arc-shaped guide groove 1001 extending along the circumferential direction of the support shaft 250. The guide post 211 is slidably embedded in the arc-shaped guide groove 1001.

[0046] The guide post 211 is a protruding post structure located at the bottom of the housing 210 and extending towards the support base 100. Its shape and size match the arc-shaped guide groove 1001, ensuring that the housing 210 can move along a predetermined trajectory when rotating around the support shaft 250. The arc-shaped guide groove 1001 is a groove structure formed on the support base 100 and extending along the circumference of the support shaft 250, used to guide and constrain the rotation trajectory of the housing 210.

[0047] The guide post 211 is embedded in the arc-shaped guide groove 1001, which makes the housing 210 stable during rotation and less prone to shaking or displacement. At the same time, it also limits the maximum opening angle of the two housings 210, preventing the housings 210 from separating excessively during rotation, thereby ensuring the stability and safety of the receiving chamber 201.

[0048] Alternatively, one housing 210 can be fixed relative to the support base 100, while the other housing 210 is rotatably connected to the support shaft 250, allowing only one housing 210 to rotate around the support shaft 250, thus opening the receiving chamber 201. The housing 210 can also be slidably connected to the support base 100 in a certain direction. For example, the housing 210 can be slidably connected to the support base 100 via a linear slide rail structure, allowing the two housings 210 to slide facing each other or back to back, thus opening or closing the receiving chamber 201. The drive assembly 300 can be adapted to the movement pattern of the housing 210.

[0049] Reference Figure 8 , Figure 9 and Figure 10In this embodiment, the drive assembly 300 includes a drive plate 310 and a driver 320. The drive plate 310 is slidably connected to the support base 100, and the sliding direction of the drive plate 310 is parallel to the plane of symmetry of the two housings 210. Two sliding grooves 3101 are formed on the drive plate 310, and the extending direction of the sliding grooves 3101 is perpendicular to the plane of symmetry. Each sliding groove 3101 corresponds to each guide post 211, and the guide post 211 is slidably embedded in the sliding groove 3101. The driver 320 is mounted on the support base 100 and is used to drive the drive plate 310 to slide, so that when the drive plate 310 slides, it drives the two guide posts 211 to move facing each other or back to back through the two sliding grooves 3101 respectively.

[0050] Specifically, the drive plate 310 is a plate-shaped structure disposed on the support base 100, and its shape is adapted to the positions of the guide posts 211 on both sides. In this embodiment, the drive plate 310 is a rectangular plate extending along a direction perpendicular to the plane of symmetry of the two housings 210. The drive plate 310 can be slidably connected to the support base 100 by means of a slide rail structure, or it can be directly spaced from the support base 100 and connected to the driver 320, with the driver 320 supporting the drive plate 310 on one side of the support base 100 and driving the drive plate 310 to move.

[0051] Two sliding grooves 3101 are formed on the drive plate 310. The extension direction of these two sliding grooves 3101 is perpendicular to the symmetry plane of the housing 210. In this embodiment, the extension direction of the sliding grooves 3101 is parallel to the extension direction of the drive plate 310, and the two sliding grooves 3101 are symmetrically arranged on both sides of the drive plate 310 along the symmetry plane of the two housings 210. Each sliding groove 3101 corresponds to a guide post 211, which is embedded in the sliding groove 3101. When the drive plate 310 slides under the drive of the driver 320, the guide post 211 can be moved through the sliding groove 3101. The guide post 211 is confined in the arc-shaped guide groove 1001, and thus the two housings 210 are driven to rotate around the support shaft 250 under the action of the arc-shaped guide groove 1001.

[0052] The actuator 320 is a driving element mounted on the support base 100. It can be an electric push rod, a pneumatic cylinder, or a hydraulic cylinder, etc., used to provide driving force to drive the drive plate 310 to slide on the support base 100. When the vapor deposition equipment is running, the control system sends a control signal to the actuator 320. Upon receiving the control signal, the actuator 320 drives the drive plate 310 connected to it to slide, thereby driving the two housings 210 to rotate simultaneously around the support shaft 250, realizing the opening and closing of the receiving chamber 201.

[0053] In this embodiment, the drive assembly 300 can be installed on the lower surface of the support base 100. The arc-shaped guide groove 1001 extends vertically through the support base 100, and the bottom end of the guide post 211 passes through the arc-shaped guide groove 1001 and connects to the slide groove 3101. This shields the drive assembly 300 from the lower side of the support base 100, preventing interference with the placement and removal of the crucible 220. It also provides some protection for the drive component, preventing damage from the vapor deposition material or high temperature. Furthermore, installing the drive assembly 300 on the lower surface of the support base 100 reduces the overall height of the evaporation source device 20, making its structure more compact and facilitating installation and use in vapor deposition equipment.

[0054] Furthermore, each groove 3101 may be provided with an elastic element 330, which is connected to the corresponding guide post 211 and is used to apply elastic force to the two guide posts 211 to move towards each other.

[0055] The elastic element 330 can be a spring, sheet metal, or elastic rubber, or other elastic components. One end of the elastic element 330 is fixedly connected to the side wall of the slide groove 3101, and the other end is connected to the guide post 211, so that the guide post 211 can slide within the slide groove 3101 and be subjected to the elastic force of the elastic element 330. When the drive plate 310 slides under the drive of the driver 320, it will drive the slide groove 3101 and the elastic element 330 to move together, thereby applying an elastic force to the guide post 211 through the elastic element 330, causing the two housings 210 to move closer or further apart.

[0056] When the two housings 210 are in the closed state, they can remain in a mutually abutting state under the action of the elastic element 330, thereby ensuring the sealing and stability of the receiving chamber 201. It also helps to reduce energy loss during the vapor deposition process and improve vapor deposition efficiency and quality.

[0057] In this embodiment, the elastic element 330 is a helical spring. The axis of the elastic element 330 is parallel to the extension direction of the slide groove 3101 and is built into the slide groove 3101. The guide post 211 is provided with a first positioning protrusion that can protrude towards the side of the elastic element 330. The inner wall of the corresponding extension end of the slide groove 3101 is provided with a second positioning protrusion that can protrude towards the elastic element 330. The two ends of the helical spring are respectively sleeved on the first positioning protrusion and the second positioning protrusion. When the drive plate 310 drives the guide post 211 to move and drive the two housings 210 to move back to the open state, the guide rod drives the first positioning protrusion to move towards the second positioning protrusion, thereby compressing the helical spring and causing the helical spring to generate an elastic force to drive the guide post 211 to reset, so that the two housings 210 reset more quickly and smoothly. Furthermore, after the two housings 210 are reset to the closed state, the helical spring also has a certain amount of compression, which applies elastic force to the guide post 211, keeping the two housings 210 in the closed state. They are not easily opened by external forces such as equipment vibration, thus ensuring the sealing and heat preservation effect of the cavity.

[0058] Refer to Figure 6 and Figure 7 In some embodiments, the evaporation assembly 200 further includes a support ring 260, which is located in the receiving chamber 201 and fixed relative to the support base 100, and the bottom of the crucible 220 is inserted into the inner side of the support ring 260.

[0059] The support ring 260 is an annular structure whose inner diameter matches the outer diameter of the crucible 220, allowing the crucible 220 to be stably inserted into the inner side of the support ring 260. The outer diameter of the support ring 260 is smaller than the inner diameter of the receiving cavity and is built into the bottom of the receiving cavity. The support ring 260 can be made of high-temperature resistant, high-strength metal or ceramic materials to meet the requirements of the vapor deposition operation. The support ring 260 can be fixed relative to the support base 100, for example, by welding or bolting, to ensure that the support ring 260 will not move or deform during the vapor deposition process, thus ensuring the stability of the crucible 220 within the receiving cavity 201. After the crucible 220 is placed inside the receiving chamber 201, its bottom is supported by the inner side of the support ring 260. This prevents the crucible 220 from tipping over due to the loss of clamping force from the two housings 210 when the two housings 210 move to open the receiving chamber 201. The crucible 220 can then stably wait for the robot arm to remove it, and it also facilitates the placement of a new crucible 220 into the receiving chamber 201. The design of the support ring 260 enhances the stability of the crucible 220 within the receiving chamber 201, improving the safety and reliability of the vapor deposition operation, and also facilitating the robot arm's positioning and gripping of the crucible 220.

[0060] The inner ring shape of the support ring 260 can be arbitrary and can be adapted to the bottom shape of the crucible 220. (Refer to...) Figure 4In this embodiment, the bottom periphery of the crucible 220 is arc-shaped, and the inner wall of the support ring 260 is a conical surface adapted to the arc surface. The bottom of the crucible 220 can be inserted into the inner side of the conical surface to form a stable support structure. The conical design allows the crucible 220 to automatically center when inserted into the support ring 260, ensuring that the axis of the crucible 220 coincides with the axis of the support shaft 250, thereby improving the accuracy and stability of the vapor deposition operation.

[0061] In other embodiments, the support ring 260 can also be designed with other structures that match the shape of the bottom of the crucible 220, such as a flat bottom, a V-shaped bottom, or a wavy bottom, to accommodate crucibles 220 of different shapes and sizes. These designs ensure the stability of the crucible 220 within the receiving chamber 201 and facilitate the smooth operation of the vapor deposition process. The top edge of the support ring 260 can also be provided with a guide edge or a limiting groove. The guide edge or limiting groove guides the placement of the crucible 220, ensuring that the bottom of the crucible 220 is accurately inserted into the inner side of the support ring 260, and also prevents the crucible 220 from shifting or tipping over during the vapor deposition process. When the robotic arm grasps the crucible 220, the guide edge or limiting groove can also serve as a positioning reference for the robotic arm, improving the grasping accuracy and efficiency of the robotic arm.

[0062] Reference Figure 11 and Figure 12 In another embodiment, the evaporation source device 20 may include multiple evaporation components 200 and multiple driving components 300. The multiple evaporation components 200 are arranged along a circular path on the support base 100, and each driving component 300 corresponds one-to-one with each evaporation component 200. This allows for simultaneous or separate evaporation deposition operations by multiple evaporation components 200, thereby improving evaporation deposition efficiency. Each evaporation component 200 can be independently replaced and maintained with its crucible 220 without interference, further enhancing the reliability and flexibility of the equipment.

[0063] Specifically, when multiple evaporation components 200 are provided, the support base 100 may include a fixed base 110 and a rotating table 120, with the rotating table 120 rotatably connected to the fixed component. Both the evaporation component 200 and the drive component 300 are disposed on the rotating table 120, so that the rotating table 120 can drive the multiple evaporation components 200 to rotate together, adjust the relative position of each evaporation component 200, expand the evaporation range of the evaporation source device 20, and enable the vapor deposition material to be uniformly deposited on the substrate, thereby improving the uniformity and quality of vapor deposition.

[0064] In this embodiment, the rotary table 120 has a circular disc-shaped structure. A main shaft 121 is provided at the bottom of the rotary table 120, and the main shaft 121 is rotatably connected to the fixed base 110 via a bearing structure. A drive motor and a transmission structure can be provided on the fixed base 110. The drive motor is connected to the main shaft 121 through the transmission structure and is used to drive the rotary table 120 to rotate around the main shaft 121. The transmission structure can be a gear drive, belt drive, or chain drive, etc., which can stably transmit the power of the drive motor to the main shaft 121, thereby driving the rotary table 120 to rotate.

[0065] In each evaporation assembly 200, the support shaft 250 is located on the side of the housing 210 near the axis of the rotary table 120, so that when the two housings 210 are in the open state, the inlet and outlet located on the periphery of the receiving cavity face the outer part of the rotary table 120, so that the robot arm can put the crucible 220 into the receiving cavity 201 or take the crucible 220 out of the receiving cavity 201 from the outside of the rotary table 120.

[0066] In this embodiment, each evaporation assembly 200 has a heating component 230 and a cooling component 240 inside its housing 210. The heating component 230 has a first linear member 231, and the cooling component 240 has a second linear member 241. Both the first linear member 231 and the second linear member 241 need to be connected to external devices. The main shaft 121 can be hollow. The first linear member 231 and the second linear member 241, which are led out from the mounting chamber, pass through the inside of the main shaft 121 and then out to the outside of the evaporation equipment, connecting to the corresponding heating and cooling devices. This design can prevent the first linear member 231 and the second linear member 241 from getting tangled on the rotary table 120 or interfering with the movement of other components, while also maintaining the stability and reliability of the evaporation assembly 200 during rotation. Furthermore, the rotation of the rotary table 120 can be configured as a cycle of one revolution in the forward direction and one revolution in the reverse direction. While maintaining a stable connection between the linear component and the external device, this prevents excessive twisting of the linear component inside the spindle 121 and also reduces the risk of leakage due to reduced interface sealing.

[0067] In summary, the vapor deposition equipment provided in this application, by setting two symmetrically arranged housings 210 and driving the relative movement of the two housings 210 through a drive assembly 300, achieves rapid opening and closing of the receiving chamber 201. This allows the crucible 220 to easily enter and exit the receiving chamber, improving the flexibility and efficiency of crucible 220 replacement operations. Furthermore, this vapor deposition equipment can work in conjunction with a robotic arm to further automate the crucible 220 replacement operation, significantly improving the automation level of the vapor deposition equipment, reducing the complexity and labor intensity of manual operation, and simultaneously improving the continuity and stability of the production process.

[0068] Furthermore, the heating element 230 and / or cooling element 240 built into the housing 210 of the vapor deposition equipment can precisely control the temperature of the crucible 220 within the housing chamber. This ensures uniform heating of the crucible during the vapor deposition process, thereby improving the consistency and reliability of the vapor deposition quality. Simultaneously, since both the heating element 230 and the cooling element 240 are built into the housing 210, they do not interfere with the relative movement of the two housings 210, allowing for smooth movement of the two housings 210.

[0069] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. An evaporation source device, characterized in that, include: Support base (100); An evaporation assembly (200) includes a crucible (220) and two housings (210). The housings (210) are disposed on the support base (100) and each housing (210) has a mounting chamber in which a heating component (230) and / or a cooling component (240) are disposed. Partial end faces of the two housings (210) abut each other and together form a receiving chamber (201) that is closed on the periphery and open on the top. The crucible (220) has an evaporation chamber with an open top and is placed in the receiving chamber (201). A drive assembly (300) wherein at least one of the housings (210) is movably connected to the support base (100), the drive assembly (300) is connected to the movable housing (210) for driving the housing (210) to move such that the two housings (210) are separated from each other to form at least one inlet / outlet for the crucible (220) to enter or exit on the periphery of the receiving chamber (201).

2. The evaporation source device according to claim 1, characterized in that, The evaporation assembly (200) further includes a support shaft (250) disposed on the support base (100), the support shaft (250) extending vertically and located outside the receiving chamber (201); the two housings (210) are symmetrically arranged along a plane passing through the axis of the support shaft (250), and both housings (210) are rotatably connected to the support shaft (250); the drive assembly (300) is used to drive the two housings (210) to rotate simultaneously around the support shaft (250) facing each other or back to back.

3. The evaporation source device according to claim 2, characterized in that, The bottom of the housing (210) is provided with a guide post (211), and the support base (100) is provided with an arc-shaped guide groove (1001) extending along the circumferential direction of the support shaft (250). The guide post (211) is slidably embedded in the arc-shaped guide groove (1001).

4. The evaporation source device according to claim 3, characterized in that, The drive component (300) includes: A drive plate (310) is slidably connected to the support base (100). The sliding direction of the drive plate (310) is parallel to the symmetry plane of the two housings (210). Two sliding grooves (3101) are provided on the drive plate (310). The extension direction of the sliding grooves (3101) is perpendicular to the symmetry plane. Each sliding groove (3101) corresponds to each guide post (211), and the guide post (211) is slidably embedded in the sliding groove (3101). A driver (320), mounted on the support base (100), is used to drive the drive plate (310) to slide, so that when the drive plate (310) slides, it drives the two guide columns (211) to move facing each other or back to back through the two slide grooves (3101).

5. The evaporation source device according to claim 4, characterized in that, Each of the grooves (3101) is provided with an elastic element (330), which is connected to the corresponding guide post (211) and is used to apply an elastic force to the two guide posts (211) to move in opposite directions.

6. The evaporation source device according to any one of claims 1-5, characterized in that, The mounting chamber includes a heating chamber (2101) and a cooling chamber (2102), the cooling chamber (2102) being located on the side of the heating chamber (2101) facing away from the receiving chamber (201); the heating component (230) is disposed in the heating chamber (2101), and the cooling component (240) is disposed in the cooling chamber (2102).

7. The evaporation source device according to claim 6, characterized in that, The installation chamber is a vacuum chamber or filled with inert gas.

8. The evaporation source device according to claim 7, characterized in that, The evaporation assembly (200) also includes a support ring (260), which is located in the receiving chamber (201) and fixed relative to the support base (100). The bottom of the crucible (220) is inserted into the inner side of the support ring (260).

9. The evaporation source device according to claim 8, characterized in that, The support base (100) includes: Fixed base (110); A rotating platform (120) is rotatably connected to the fixed component; both the evaporation component (200) and the driving component (300) are disposed on the rotating platform (120); there are multiple evaporation components (200) and multiple driving components (300), each evaporation component (200) and each driving component (300) corresponds to one another, and the multiple evaporation components (200) are arranged along the circumferential direction of the rotating platform (120).

10. A vapor deposition apparatus, characterized in that, The device includes a device body (10) and an evaporation source device as described in any one of claims 1-9, wherein the device body (10) has a vapor deposition chamber (101) and the evaporation source device (20) is disposed in the vapor deposition chamber (101).

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