Evaporation apparatus and control method thereof

Abstract

This application provides a vapor deposition apparatus and its control method, belonging to the technical field of electronic device manufacturing equipment. The vapor deposition apparatus includes: a substrate carrier for fixing a substrate to be processed; a conveying mechanism for providing a conveying path for the movement of the substrate carrier; one of the conveying mechanism and the substrate carrier is provided with multiple magnets, and the other is provided with multiple electromagnetic generators; the conveying mechanism has a first conveying mode and a second conveying mode. In the first conveying mode, magnetic force is generated between the electromagnetic generators and the magnets, so that the substrate carrier and the conveying mechanism are in a non-contact state; in the second conveying mode, the substrate carrier and the conveying mechanism are in a contact state; a vapor deposition chamber for vapor deposition of the substrate to be processed fed into the conveying mechanism; a sensing module for detecting whether there is a substrate carrier on the conveying mechanism; and a controller for controlling the electromagnetic generators according to the detection information of the sensing module, so that the conveying mechanism is in the first conveying mode or the second conveying mode, thereby providing a clean conveying environment.

Description

Technical Field

[0001] This application belongs to the field of electronic device manufacturing equipment technology, and more specifically, relates to a vapor deposition apparatus and its control method. Background Technology

[0002] Evaporation deposition equipment is used to deposit vapor deposition materials onto substrates and other objects to form films. There are two main types of evaporation deposition equipment: group-type and inline-type. In a group-type evaporation deposition machine, multiple independent process chambers are arranged around a central transfer chamber, and the substrate is transported between the central transfer chamber and the process chambers by a robotic arm. In an inline-type evaporation deposition machine, multiple process chambers are arranged in a straight line, and the substrate passes through each process chamber sequentially by a conveyor belt or a robotic arm.

[0003] Both group-type and inline-type vapor deposition machines involve the transport of substrates between different process chambers. Currently, the common method for transporting substrates between different process chambers is by using conveyor belts and robotic arms. However, conveyor belts and robotic arms are prone to contaminating the substrates during transport, increasing the likelihood of debris and dust adhering to the substrate surface, making it difficult to transport substrates in a clean environment. Summary of the Invention

[0004] The purpose of this application is to provide a vapor deposition apparatus and its control method to solve the technical problem in the prior art that substrates cannot be transported in a clean environment.

[0005] To achieve the above objectives, the technical solution adopted in this application is: to provide a vapor deposition apparatus, comprising:

[0006] Substrate carrier, used to fix the substrate to be processed;

[0007] A conveying mechanism is provided to provide a conveying path for the movement of the substrate carrier. One of the conveying mechanism and the substrate carrier is provided with multiple magnets along the traveling direction of the substrate to be processed, and the other is provided with multiple electromagnetic generators along the conveying direction of the conveying mechanism. The conveying mechanism has a first conveying mode and a second conveying mode. In the first conveying mode, the electromagnetic generators and the magnets generate magnetic force to keep the substrate carrier and the conveying mechanism in a non-contact state. In the second conveying mode, the substrate carrier and the conveying mechanism are in contact.

[0008] A vapor deposition chamber for vapor deposition of material onto the substrate to be processed, which is fed into the vapor deposition chamber by the conveying mechanism.

[0009] A sensing module is used to detect whether the substrate carrier is on the conveying mechanism;

[0010] A controller is configured to control multiple electromagnetic generators based on the detection information from the sensing module, so that the conveying mechanism is in either the first conveying mode or the second conveying mode.

[0011] Optionally, there are at least two sensing modules, and each sensing module is communicatively connected to the controller;

[0012] The distance between two adjacent sensing modules along the conveying direction is less than the length of the substrate carrier; and / or, the distance between two adjacent sensing modules along a first direction is less than the width of the substrate carrier, the first direction being perpendicular to the conveying direction of the conveying mechanism.

[0013] Optionally, the distance between the sensing module closest to the starting end of the conveying mechanism and the starting end of the conveying mechanism is less than the length of the substrate carrier;

[0014] Alternatively, the conveying mechanism has a target area for placing the substrate to be processed transferred by the robotic arm, and the distance between the sensing module closest to the starting end of the conveying mechanism and the boundary line of the target area closest to the starting end of the conveying mechanism is less than the length of the substrate carrier.

[0015] Optionally, the sensing module can be any one of a photoelectric sensor, an ultrasonic sensor, a radar sensor, and a vision inspection system.

[0016] Optionally, the central axis of the electromagnetic generator is inclined relative to the vertical direction.

[0017] Optionally, the tilt angle of the central axis of the electromagnetic generator relative to the vertical direction is adjustable.

[0018] Optionally, the electromagnetic generator includes a base, an electromagnetic generation module, and an angle adjustment mechanism. The electromagnetic generation module is hinged to the base, and the angle adjustment mechanism is drivenly connected to the electromagnetic generation module to adjust the tilt angle of the electromagnetic generation module relative to the vertical direction. The controller is communicatively connected to the angle adjustment mechanism.

[0019] Optionally, the tilt angle of the central axis of the electromagnetic generator relative to the vertical direction is no greater than 60°.

[0020] This application also provides a control method for the vapor deposition apparatus as described above, comprising:

[0021] When the sensing module detects that the substrate carrier is on the conveying mechanism, it controls the electromagnetic generator to be energized so that the substrate carrier and the conveying mechanism are in a non-contact state.

[0022] When the sensing module detects that there is no substrate carrier on the conveying mechanism, it controls the electromagnetic generator to be de-energized, so that the substrate carrier is in contact with the conveying mechanism.

[0023] Optionally, the direction of the magnetic force between the electromagnetic generator and the magnet can be controlled according to the specifications of the substrate to be processed.

[0024] The beneficial effects of the vapor deposition apparatus provided in this application are as follows: Compared with the prior art, in the vapor deposition apparatus of this application, one of the substrate carrier and the conveying mechanism is provided with a magnet, and the other is provided with an electromagnetic generator. The controller controls the electromagnetic generator to be turned on when there is a substrate carrier on the conveying mechanism according to the detection result of the sensing module. The magnetic force between the magnet and the electromagnetic generator makes the substrate to be processed suspend in a suspended state and not in contact with the conveying mechanism, thereby providing a cleaner conveying environment. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 A schematic diagram of the flow path of the substrate to be processed in the vapor deposition apparatus provided in the embodiments of this application;

[0027] Figure 2 A side view showing the mating of the conveying mechanism and the substrate carrier provided in an embodiment of this application;

[0028] Figure 3 A schematic diagram illustrating the use of an electromagnetic generator and a magnet to achieve conveying in accordance with an embodiment of this application;

[0029] Figure 4 One of the schematic diagrams showing the layout of the sensing module provided in the embodiments of this application;

[0030] Figure 5 This is the second schematic diagram showing the layout of the sensing module provided in the embodiments of this application.

[0031] The following are the labeling elements in the figure:

[0032] 100. Substrate to be processed; 110. Cleaning chamber; 120. Buffer area; 130. Evaporation chamber; 10. Substrate carrier; 11. Guide groove; 20. Conveying mechanism; 21. Roller; 30. Electromagnetic generator; 40. Magnet; 50. Current control module; 60. Sensing module. Detailed Implementation

[0033] To make the technical problems, technical solutions, and beneficial effects to be solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0034] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0035] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0036] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0037] Evaporation equipment is a surface treatment device that forms a thin film on the surface of a substrate through evaporation or sputtering. The thin film improves the substrate's hardness, corrosion resistance, and appearance, and is widely used in semiconductors, display panels, optical coatings, solar cells, and other fields.

[0038] The vapor deposition apparatus provided in this application is suitable for forming thin films on a substrate by vapor deposition of a vapor deposition material. For example, the vapor deposition apparatus can be used to deposit organic materials or the like onto a glass substrate for manufacturing a display panel. The substrate material can be silicon wafers, glass, or plastic. In addition, the substrate material can also be polymer films, metals, or other materials. For example, the substrate is a plate with a polyimide film laminated on a glass substrate. As for the vapor deposition material, in addition to organic materials, metallic materials such as metals and metal oxides can also be selected.

[0039] This application provides a vapor deposition apparatus, please refer to it as well. Figures 1 to 5The system includes a substrate carrier 10, a conveying mechanism 20, a vapor deposition chamber 130, a sensing module 60, and a controller. The substrate carrier 10 is used to fix the substrate 100 to be processed. The conveying mechanism 20 provides a conveying path for the movement of the substrate carrier 10. One of the conveying mechanism 20 and the substrate carrier 10 is provided with multiple magnets 40 along the traveling direction of the substrate 100, and the other is provided with multiple electromagnetic generators 30. The multiple electromagnetic generators 30, in conjunction with the multiple magnets 40, can generate a magnetic force that keeps the substrate carrier 10 and the conveying mechanism 20 in a non-contact state. The vapor deposition chamber 130 vaporizes the substrate 100 to be processed, which is fed into the vapor deposition chamber 130 by the conveying mechanism 20, with vapor deposition material.

[0040] The conveying mechanism 20 has a first conveying mode and a second conveying mode. In the first conveying mode, the electromagnetic generator 30 and the magnet 40 generate a magnetic force to keep the substrate carrier 10 in a non-contact state with the conveying mechanism 20. The magnetic force can be either an attractive or repulsive force; this application does not specifically limit this, as long as it can achieve levitation of the substrate carrier. In the second conveying mode, the substrate carrier 10 is in contact with the conveying mechanism 20. The sensing module 60 is used to detect whether there is a substrate carrier 10 on the conveying mechanism 20. The controller controls the conveying mode of the conveying mechanism 20 to switch between the first and second conveying modes, and controls the switching of multiple electromagnetic generators 30 based on the detection information from the sensing module 60.

[0041] See Figure 1 The substrate 100 to be processed is along Figure 1 The direction indicated by the middle arrow indicates the flow between different process chambers. It should be noted that the transfer between different process chambers can be achieved using a robotic arm or conveyor belt. The substrate 100 to be processed enters the evaporation chamber 130 for evaporation after being cleaned in the cleaning chamber 110. Since the cleaning time for a single substrate is shorter than the evaporation time, the cleaned substrate is temporarily stored in the buffer area 120. Only after the previous substrate has been evaporated in the evaporation chamber 130 is the next substrate transferred from the buffer area 120 to the transport mechanism 20, and then transported to the evaporation chamber 130 via the transport mechanism 20. It should be noted that although... Figure 1 The image shows a linear vapor deposition machine, but the technical solution disclosed in this application is also applicable to a group vapor deposition machine, as long as it involves the cleaning and transfer of the substrate 100 to be processed, and is not limited to the type of vapor deposition machine.

[0042] The substrate carrier 10 is used to fix the substrate 100 to be processed, and the movement of the substrate 100 is achieved by moving the substrate carrier 10. Optionally, the substrate carrier 10 includes a carrier body and a suction cup disposed on the carrier body, which adsorbs and fixes the substrate 100 to be processed. When the substrate 100 to be processed is finished and needs to be removed from the substrate carrier 10, the suction cup releases the substrate 100. To prevent the substrate 100 to be processed from falling during transport, the substrate carrier 10 also includes a pressing block, which is rotatably mounted on the carrier body. When the substrate 100 to be processed is adsorbed by the suction cup, the pressing block rotates to press the substrate 100 to be processed onto the surface of the substrate carrier 10.

[0043] The conveying mechanism 20 extends through the vapor deposition chamber 130, meaning both ends of the conveying mechanism 20 extend outside the vapor deposition chamber 130 for convenient loading and unloading. The conveying mechanism 20 can be a belt conveyor, roller conveyor, or chain conveyor. Taking a roller conveyor as an example, see [reference needed]. Figure 2 The substrate carrier 10 includes a carrier body, with guide grooves 11 formed on its left and right sides. The guide grooves 11 are parallel to the conveying direction of the conveying mechanism 20. The X-axis is defined as the conveying direction of the conveying mechanism 20. The cross-section of the guide groove 11 is U-shaped, with its opening facing outwards from the conveying mechanism 20. The conveying mechanism 20 has a frame, which includes two opposing side plates, forming a channel between the two side plates for the substrate carrier 10 to move. Multiple rotatable rollers 21 are mounted on the inner surface of each side plate, and the rollers 21 are inserted into the corresponding guide grooves 11, thereby allowing the substrate carrier 10 to move freely relative to the conveying mechanism 20, forming a second conveying mode. During the conveying process using the first conveying mode, in the event of a power outage or malfunction, the cooperation of the guide grooves 11 and rollers 21 can prevent the substrate carrier 10 from falling off the conveying path, thereby preventing damage to the substrate or it from leaving the conveying path. The controller controls the electromagnetic generator 30 by supplying current to the multiple coils of the electromagnetic generator 30, thereby generating a propulsive force in the traveling direction of the substrate carrier 10 or a magnetic levitation force relative to the conveying mechanism 20, thus forming a first conveying mode.

[0044] In an alternative embodiment, please refer to the following: Figures 2 to 5Magnets 40 are mounted on the substrate carrier 10, and electromagnetic generators 30 are mounted on the conveying mechanism 20. Specifically, on the upper surface of the carrier body at the location where the guide groove 11 is formed, multiple magnets 40 are arranged in a straight line parallel to the conveying direction (X-axis) of the conveying mechanism 20. Correspondingly, multiple electromagnetic generators 30 are provided on the frame of the conveying mechanism 20. By the electromagnetic force acting between the magnets 40 and the electromagnetic generators 30, the substrate carrier 10 can be levitated and travel along the conveying direction (X-axis). It should be noted that as long as a coil is arranged on one of the conveying mechanism 20 and the substrate carrier 10, and a magnet 40 is arranged on the other, the substrate carrier 10 can be levitated, preventing the substrate carrier 10 from contacting the conveying mechanism 20 and thus providing a clean conveying environment.

[0045] Understandably, the guide groove 11 has a pair of parallel guide surfaces, with the rolling surface of the roller 21 sandwiched between the two guide surfaces. The opening width between the guide surfaces is larger than the diameter of the roller 21, thus forming a gap L. When the electromagnetic generator 30 is in the off state, the substrate carrier 10 is not subjected to magnetic force and sinks due to its own weight, causing the guide groove 11 to contact the roller 21 to form support and drive the substrate carrier 10 to move. When the electromagnetic generator 30 is off, an electromagnetic force is generated between the magnet 40 and the electromagnetic generator 30, causing the roller 21 housed in the guide groove 11 to float within the gap L.

[0046] When the substrate carrier 10, on which the substrate to be processed 100 is fixed, moves, either a first conveying mode (magnetic levitation conveying mode) or a second conveying mode (roller conveying mode) can be selected. In the first conveying mode, the substrate carrier 10 is magnetically levitated, and in a state where the guide groove 11 and the roller 21 are not in contact, an electromagnetic force is used to generate a driving force in the direction of travel, thereby conveying the substrate carrier 10. In the magnetic levitation conveying mode, since there are no mechanical contact parts, the generation of dust, powder caused by friction, etc., can be suppressed, thereby preventing the degradation of the vapor deposition quality during vacuum vapor deposition. In the second conveying mode, the substrate carrier 10 is supported by the contact between the guide groove 11 of the substrate carrier 10 and the roller 21 on the conveying mechanism 20, and the substrate carrier 10 is conveyed by the rotation of the roller 21.

[0047] The controller adjusts the current of the electromagnetic generator 30 to regulate the conveying speed of the substrate 100 to be processed in the first conveying mode. (See also...) Figure 3The electromagnetic generator 30 includes multiple coil units, each coil unit comprising six coils: two U-phase, two V-phase, and two W-phase. The two U-phase, V-phase, and W-phase coils are connected in series. The coils are wound on an electric core, or the electric core is not used. The controller is electrically connected to each coil unit via wires. By supplying a U-phase current Iu to the U-phase coil, a V-phase current Iv to the V-phase coil, and a W-phase current Iw to the W-phase coil, each coil unit is energized. Specifically, the controller includes a current control module 50, with one current control module 50 configured for each coil unit, allowing independent control of each coil unit and facilitating localized adjustment of the magnetic force magnitude and direction.

[0048] The substrate 100 to be processed is transferred from the buffer area 120 to the conveying mechanism 20 by a robotic arm or conveyor belt. The sensing module 60 detects whether there is a substrate carrier 10 to prevent the robotic arm from operating without a substrate carrier. If a substrate carrier 10 is detected, the controller controls the electromagnetic generator 30 to be energized and switches to the first conveying mode, so that the substrate 100 to be processed does not come into contact with the conveying mechanism 20 and is in a magnetic levitation state, thereby providing a cleaner conveying environment.

[0049] The vapor deposition apparatus provided in this application includes a magnet 40 on one of the substrate carrier 10 and the conveying mechanism 20, and an electromagnetic generator 30 on the other. Based on the detection results from the sensing module 60, the controller activates the electromagnetic generator 30 when the substrate carrier 10 is on the conveying mechanism 20. The magnetic force between the magnet 40 and the electromagnetic generator 30 keeps the substrate 100 to be processed suspended, preventing it from contacting the conveying mechanism 20 and thus providing a cleaner conveying environment. Furthermore, the electromagnetic generator 30 can be deactivated when there is no substrate carrier 10 on the conveying mechanism 20, thereby saving energy.

[0050] In another embodiment of this application, see [reference] Figure 4 and Figure 5 At least two sensing modules 60 are provided, and each sensing module 60 is communicatively connected to the controller. The distance between two adjacent sensing modules 60 along the conveying direction (X-axis) is less than the length of the substrate carrier 10; and / or, the distance between two adjacent sensing modules 60 along a first direction is less than the width of the substrate carrier 10. The first direction is perpendicular to the conveying direction (X-axis) of the conveying mechanism 20.

[0051] The length of the substrate carrier 10 refers to its extension along the conveying direction (X-axis) after being placed on the conveying mechanism 20. The width of the substrate carrier 10 refers to its extension along the first direction after being placed on the conveying mechanism 20. When one of the multiple sensing modules 60 detects incoming material, the controller controls the conveying mechanism 20 to switch to the first conveying mode.

[0052] In an optional embodiment, multiple sensing modules 60 are arranged linearly at intervals along a first direction or the conveying direction (X-axis) of the conveying mechanism 20. For example, two sensing modules 60 are equally spaced along the conveying direction (X-axis) of the conveying mechanism 20, with the distance between the two sensing modules 60 being less than the length of the substrate carrier 10. When the placement position of the substrate carrier 10 is not offset, both sensing modules 60 can detect the incoming material. When the placement position of the substrate carrier 10 is offset, at least one of the sensing modules 60 can detect the incoming material. See also Figure 4 and Figure 5 Five sensing modules 60 are arranged along the conveying direction (X-axis) of the conveying mechanism 20 to prevent missed detections. The five sensing modules 60 are equally spaced, with the distance between any two adjacent sensing modules 60 being less than the length of the substrate carrier 10. Alternatively, two sensing modules 60 are arranged at intervals along the first direction, i.e., perpendicular to the conveying direction (X-axis) of the conveying mechanism 20, with the distance between the two sensing modules 60 being less than the width of the substrate carrier 10. In another optional embodiment, multiple sensing modules 60 are spaced apart along the first direction and staggered along the conveying direction (X-axis) of the conveying mechanism 20. For example, there are two sensing modules 60, spaced apart along the first direction and staggered along the conveying direction (X-axis) of the conveying mechanism 20, i.e., the line connecting the two sensing modules 60 forms an acute angle with the first direction. In addition, there can be three or four sensing modules 60. For example, three sensing modules 60 are connected sequentially to form a triangle. Or, four sensing modules 60 are connected sequentially to form a quadrilateral or a triangle. As long as the distance between two adjacent sensing modules 60 along the first direction is less than the width of the substrate carrier 10, and the distance along the conveying direction (X-axis) of the conveying mechanism 20 is less than the length of the substrate carrier 10, it is acceptable.

[0053] The substrate carrier 10 transported by the robotic arm or conveyor belt may be misaligned. If only one sensing module 60 is provided, effective detection will not be possible when the substrate carrier 10 is outside the detection range of that sensing module 60. Therefore, multiple sensing modules 60 are provided to ensure effective detection. In addition, if one sensing module 60 fails, multiple sensing modules 60 can be used to perform detection through other sensing modules 60, ensuring smooth operation of the detection process.

[0054] When the conveyor belt transfers the substrate carrier 10, on which the substrate 100 to be processed is fixed, to the conveying mechanism 20, the distance between the sensing module 60, which is closest to the starting end of the conveying mechanism 20, and the starting end of the conveying mechanism 20 is less than the length of the substrate carrier 10. The sensing module 60 is positioned close to the starting end of the conveying mechanism 20 so that when the substrate carrier 10, on which the substrate 100 to be processed is fixed, is transferred to the conveying mechanism 20, the sensing module 60 can quickly detect the incoming material, shorten the time that the substrate 100 to be processed is in the second conveying mode on the conveying mechanism 20, and reduce the possibility of dust adhesion.

[0055] It should be noted that when multiple sensing modules 60 are arranged linearly at intervals along the first direction, the distance between each sensing module 60 and the starting end of the conveying mechanism 20 is less than the length of the substrate carrier 10. When multiple sensing modules 60 are arranged at intervals along the first direction and form multiple rows along the conveying direction (X-axis) of the conveying mechanism 20, only the distance between the row of sensing modules 60 closest to the starting end of the conveying mechanism 20 and the starting end of the conveying mechanism 20 is less than the length of the substrate carrier 10.

[0056] Similarly, the conveying mechanism 20 has a target area for placing the substrate 100 to be processed, which is transferred from other workpieces by a robotic arm. Typically, there is a gap between the target area and the starting end of the conveying mechanism 20 to prevent the substrate carrier 10 from falling. If a robotic arm is used to move the substrate carrier 10, which holds the substrate 100 to be processed, to the target area of ​​the conveying mechanism 20, then to ensure timely detection, the distance between the boundary line of the target area near the starting end of the conveying mechanism 20 and the sensing module 60 closest to the starting end of the conveying mechanism 20 is less than the length of the substrate carrier 10.

[0057] In another embodiment of this application, the sensing module 60 is any one of a photoelectric sensor, an ultrasonic sensor, a radar sensor, and a vision inspection system.

[0058] Optionally, the photoelectric sensor includes a transmitter and a receiver. In one embodiment, the transmitter and receiver are positioned on the same side of the material placement area on the conveying mechanism 20. The light signal emitted by the transmitter can be received by the receiver after reflection. If the receiver receives the light signal emitted by the transmitter, it means that there is a substrate carrier 10 on the conveying mechanism 20. The controller controls the conveying mechanism 20 to switch to the first conveying mode, reducing the possibility of contamination of the substrate 100 to be processed on the substrate carrier 10. If the receiver does not receive the light signal emitted by the transmitter, it means that there is no substrate carrier 10 on the conveying mechanism 20, indicating that the robot and conveyor belt are operating idly. The controller controls the conveying mechanism 20 to be in the second conveying mode, reducing power consumption. In another embodiment, the transmitter and receiver are positioned on opposite sides of the material placement area on the conveying mechanism 20, with the transmitter and receiver installed opposite each other and the optical paths aligned. If the receiver receives the light signal emitted by the transmitter, it means that there is no substrate carrier 10 on the conveying mechanism 20, indicating that the robot and conveyor belt are operating idly. If the receiver does not receive the light signal emitted by the transmitter, it means that there is a substrate carrier 10 on the conveying mechanism 20. The controller controls the conveying mechanism 20 to switch to the first conveying mode to reduce the possibility of contamination of the substrate 100 to be processed on the substrate carrier 10. Alternatively, the photoelectric sensor is a fiber optic sensor. The fiber optic sensor can be a through-beam, reflective, or diffuse emission type, and its detection method is similar to that of a photoelectric sensor that includes a receiver and a transmitter, so it will not be described in detail here.

[0059] Alternatively, the sensing module 60 can be an ultrasonic sensor. The ultrasonic sensor emits ultrasonic waves and determines the presence of the substrate carrier 10 on the conveying mechanism 20 based on the echo time or intensity. After the robot or conveyor belt transfers the substrate carrier 10 to the current workstation, the ultrasonic sensor emits ultrasonic waves to prevent the robot and conveyor belt from operating idle. Taking the ultrasonic sensor determining the presence of the substrate carrier 10 on the conveying mechanism 20 based on the echo time as an example, if the robot and conveyor belt are operating idle, the echo time is the first duration. If the echo time detected by the sensing module 60 is the first duration, the controller controls the conveying mechanism 20 to be in the second conveying mode, and all electromagnetic generators 30 are turned off to reduce power consumption.

[0060] Alternatively, the sensing module 60 can be a vision inspection system, including an industrial camera. It determines whether the robot arm or conveyor belt is operating idly by analyzing images captured by the industrial camera. In addition, the sensing module 60 can also be a load cell or a pressure sensor, as long as it can identify whether the robot arm or conveyor belt is moving the substrate carrier 10.

[0061] When there are multiple sensing modules 60, the types of the multiple sensing modules 60 can be the same or different. In one optional embodiment, some sensing modules 60 are photoelectric sensors, and others are ultrasonic sensors. In another embodiment, some sensing modules 60 are a vision inspection system, and others are photoelectric sensors. In yet another embodiment, the multiple sensing modules 60 are of the same type, all being photoelectric sensors. Alternatively, the multiple sensing modules 60 may all be ultrasonic sensors.

[0062] In one embodiment, see Figure 5 The magnetic force generated between the electromagnetic generator 30 and the magnet 40 is in the vertical direction. In another embodiment, see [reference needed]. Figure 4 The magnetic force generated between the electromagnetic generator 30 and the magnet 40 is inclined relative to the vertical direction towards the conveying direction (X-axis) of the conveying mechanism 20. Therefore, this magnetic force can be decomposed into a vertical component and a horizontal component. The vertical component provides levitation support for the substrate carrier 10, while the horizontal component propels the substrate carrier 10 to move along the conveying direction (X-axis), achieving contactless conveying.

[0063] To tilt the magnetic force generated between the electromagnetic generator 30 and the magnet 40, optionally, refer to... Figure 5 The central axis of the coil of the electromagnetic generator 30 is set at an angle relative to the vertical direction.

[0064] The tilt angle θ of the central axis of the electromagnetic generator 30 relative to the vertical direction is either fixed or adjustable. When the coil of the electromagnetic generator 30 is energized, it generates a magnetic field. This magnetic field interacts with the magnet 40 to produce a magnetic force in the tilt direction. This magnetic force can be decomposed into a vertical component and a horizontal component. Specifically, the direction of the horizontal component of the magnetic force is determined by the direction of the coil current. By switching the current direction, the polarity of the magnetic field can be changed, thereby reversing the direction of the horizontal component. For example, when the current flows in the first direction, the horizontal component points towards the conveying direction (X-axis) of the conveying mechanism 20, assisting the substrate carrier 10 in accelerating or maintaining its speed; when the current flows in the opposite direction, the horizontal component points in the opposite direction of the conveying direction (X-axis) of the conveying mechanism 20, used for deceleration or correction.

[0065] Specifically, the controller includes a current control module 50, which dynamically adjusts the magnitude and direction of the current in the electromagnetic generator 30 according to the real-time position of the substrate carrier 10. For example, when the substrate carrier 10 approaches the target position, the current direction is reversed to provide braking force; when the substrate carrier 10 is detected to be deviating from the delivery center, the current direction of the electromagnetic generator 30 at different positions is adjusted to generate a corrective torque.

[0066] This embodiment achieves non-contact driving of the substrate carrier 10 through the tilted electromagnetic generator 30 and controllable current direction, avoiding wear or contamination caused by mechanical friction, and providing a high-cleanliness environment for the transport of the substrate 100 to be processed.

[0067] In one embodiment of this application, the tilt angle θ of the electromagnetic generator 30 relative to the vertical direction is fixed. For example, the electromagnetic generator 30 is fixed to the frame of the conveying mechanism 20, and its tilt angle θ relative to the vertical direction is a factory-preset fixed value. Alternatively, the electromagnetic generator 30 is fastened to the frame of the conveying mechanism 20 by mounting brackets and bolts, ensuring that the electromagnetic generator 30 maintains a stable tilt angle θ during operation. The fixed tilt angle θ design simplifies the structure of the vapor deposition apparatus and reduces costs. In another embodiment of this application, the tilt angle θ of the electromagnetic generator 30 relative to the vertical direction is adjustable. During use, the tilt angle θ can be flexibly adjusted according to the size of the substrate 100 to be processed and the transmission speed in the second conveying mode.

[0068] In one specific embodiment of this application, the electromagnetic generator 30 includes a base, an electromagnetic generation module, and an angle adjustment mechanism. The electromagnetic generation module is hinged to the base via a rotating shaft and can rotate around the rotating shaft under the action of the angle adjustment mechanism to adjust its tilt angle θ relative to the vertical direction. Optionally, the angle adjustment mechanism includes a rotary drive and a connecting rod. The rotary drive is fixed to the base, and its output shaft is connected to the electromagnetic generation module via the connecting rod. Under the drive of the rotary drive, the electromagnetic generation module rotates around the rotating shaft, thereby realizing the adjustment of the tilt angle θ. The rotary drive is a servo motor or a stepper motor. In one embodiment, the rotary drive can rotate clockwise or counterclockwise; the tilt angle θ can be increased or decreased by setting and adjusting the rotation direction of the rotary drive. The electromagnetic generation module is equipped with an angle sensor to detect the tilt angle θ of the electromagnetic generation module in real time and feed it back to the control system. The controller determines the target angle based on the size of the substrate 100 to be processed, and then controls the rotary drive to move according to the feedback signal from the angle sensor until the tilt angle θ of the electromagnetic generation module reaches the target angle.

[0069] Optionally, when the substrate 100 to be processed is transferred, the central axis of the electromagnetic generator 30 extends vertically. When the controller determines that the first conveying mode needs to be activated based on the detection information from the sensing module 60, it first controls the electromagnetic generator 30 to adjust its tilt angle θ, and then energizes the coil of the electromagnetic generator 30. Alternatively, in the initial stage of use, the controller pre-adjusts the tilt angle θ of the electromagnetic generator 30 according to the size of the substrate 100 to be processed. In this case, when the substrate 100 to be processed is transferred, the central axis of the electromagnetic generator 30 is tilted relative to the vertical direction, and the controller directly energizes the coil of the electromagnetic generator 30 based on the detection information from the sensing module 60, without waiting for the angle adjustment of the electromagnetic generator 30, resulting in a fast response speed.

[0070] In one specific embodiment, the tilt angle θ of the central axis of the electromagnetic generator 30 relative to the vertical direction is no greater than 60°. For example, the tilt angle θ is 5°, 10°, 20°, 27°, 60°, etc.

[0071] With a fixed tilt angle θ between the central axis of the coil of the electromagnetic generator 30 and the vertical direction, the tilt angle θ can be designed to be 15°, 30°, or 45°, etc., to meet the magnetic field distribution requirements of different application scenarios. With an adjustable tilt angle θ between the central axis of the coil of the electromagnetic generator 30 and the vertical direction, the maximum value of the tilt angle θ does not exceed 60°, ensuring the efficiency of magnetic levitation transport.

[0072] Optionally, the tilt angle θ satisfies: 10° ≤ θ ≤ 45°. If the tilt angle θ is too small, the horizontal component of the force will be too low, resulting in insufficient driving efficiency. If the tilt angle θ is too large, the vertical component of the force Fz may not be able to fully counteract the gravity of the substrate carrier 10 and the substrate 100 to be processed. By optimizing this angle range, efficient decomposition of the magnetic force can be achieved.

[0073] In addition, this application also provides a control method for the vapor deposition apparatus as described above. This control method includes: when the sensing module 60 detects a substrate carrier 10 on the conveying mechanism 20, controlling the electromagnetic generator 30 to be energized, so that the substrate carrier 10 and the conveying mechanism 20 are in a non-contact state. When the sensing module 60 detects no substrate carrier 10 on the conveying mechanism 20, controlling the electromagnetic generator 30 to be de-energized, so that the substrate carrier 10 and the conveying mechanism 20 are in contact. By identifying the presence of a substrate carrier 10 on the conveying mechanism 20 by the sensing module 60, and then controlling the switching of the electromagnetic generator 30, a clean conveying environment for the substrate carrier 10 can be provided, while also saving energy.

[0074] In another embodiment of this application, the magnetic direction between the electromagnetic generator 30 and the magnet 40 is controlled according to the specifications of the substrate 100 to be processed.

[0075] The specifications of the substrate 100 to be processed can be input by the user or automatically identified by the recognition device. The specifications of the substrate 100 to be processed include its length and width information. Different specifications of substrates 100 to be processed have different weights, and the substrate carrier 10 may vary, resulting in different magnetic forces required for magnetic levitation.

[0076] In one optional embodiment, the tilt angle θ of the central axis of the electromagnetic generator 30 relative to the vertical direction is controlled according to the specifications of the substrate 100 to be processed. Specifically, the angle of the electromagnetic generator 30 is adjusted by controlling the rotation drive, thereby adjusting the vertical component of the magnetic force to ensure that it can overcome the gravity of the substrate carrier 10, etc. In yet another optional embodiment, the electromagnetic generator 30 is tilted relative to the vertical direction, and the magnitudes of the horizontal and vertical components of the magnetic force are controlled by controlling the current of the electromagnetic generator 30.

[0077] By controlling the direction of the magnetic force according to the specifications of the substrate 100 to be processed, the vertical and horizontal components of the magnetic force can be controlled, thereby facilitating the movement of the substrate carrier 10.

[0078] This application also provides a controller, which controls the electromagnetic generator 30 to be energized when the sensing module 60 detects that there is a substrate carrier 10 on the conveying mechanism 20, so that the substrate carrier 10 and the conveying mechanism 20 are in a non-contact state; and controls the electromagnetic generator 30 to be de-energized when the sensing module 60 detects that there is no substrate carrier 10 on the conveying mechanism 20, so that the substrate carrier 10 and the conveying mechanism 20 are in a contact state.

[0079] In another embodiment of this application, the controller is also used to control the magnetic direction between the electromagnetic generator 30 and the magnet 40 according to the specifications of the substrate 100 to be processed.

[0080] On the other hand, the present invention also provides a computer program product, the computer program product comprising a computer program stored on a non-transitory computer-readable storage medium, the computer program comprising program instructions, wherein when the program instructions are executed by a computer, the computer is able to execute the control methods provided by the above methods, the method comprising: when the sensing module 60 detects that there is a substrate carrier 10 on the conveying mechanism 20, controlling the electromagnetic generator 30 to be energized, so that the substrate carrier 10 and the conveying mechanism 20 are in a non-contact state; when the sensing module 60 detects that there is no substrate carrier 10 on the conveying mechanism 20, controlling the electromagnetic generator 30 to be de-energized, so that the substrate carrier 10 and the conveying mechanism 20 are in a contact state.

[0081] In another aspect, the present invention also provides a non-transitory computer-readable storage medium storing a computer program thereon, which, when executed by a processor, performs the control methods provided above. The method includes: when the sensing module 60 detects a substrate carrier 10 on the conveying mechanism 20, controlling the electromagnetic generator 30 to be energized, so that the substrate carrier 10 and the conveying mechanism 20 are in a non-contact state; and when the sensing module 60 detects no substrate carrier 10 on the conveying mechanism 20, controlling the electromagnetic generator 30 to be de-energized, so that the substrate carrier 10 and the conveying mechanism 20 are in contact.

[0082] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A vapor deposition apparatus, characterized in that: include: Substrate carrier (10) is used to fix the substrate to be processed (100); A conveying mechanism (20) is provided to provide a conveying path for the movement of the substrate carrier (10); one of the conveying mechanism (20) and the substrate carrier (10) is provided with a plurality of magnets (40) along the traveling direction of the substrate (100) to be processed, and the other is provided with a plurality of electromagnetic generators (30) along the conveying direction of the conveying mechanism (20); the conveying mechanism (20) has a first conveying mode and a second conveying mode. In the first conveying mode, the electromagnetic generators (30) and the magnets (40) generate magnetic force to keep the substrate carrier (10) and the conveying mechanism (20) in a non-contact state; in the second conveying mode, the substrate carrier (10) and the conveying mechanism (20) are in contact. Evaporation chamber (130) for evaporating evaporation material onto the substrate (100) to be processed, which is fed into the evaporation chamber (130) by the conveying mechanism (20); A sensing module (60) is used to detect whether the substrate carrier (10) is on the conveying mechanism (20); A controller is used to control a plurality of electromagnetic generators (30) based on the detection information of the sensing module (60) so that the conveying mode of the conveying mechanism (20) is in the first conveying mode or the second conveying mode.

2. The vapor deposition apparatus as described in claim 1, characterized in that: There are at least two sensing modules (60), and each sensing module (60) is communicatively connected to the controller; The distance between two adjacent sensing modules (60) along the conveying direction is less than the length of the substrate carrier (10); and / or, the distance between two adjacent sensing modules (60) along a first direction is less than the width of the substrate carrier (10), the first direction being perpendicular to the conveying direction of the conveying mechanism (20).

3. The vapor deposition apparatus as described in claim 2, characterized in that: The distance between the sensing module (60) closest to the starting end of the conveying mechanism (20) and the starting end of the conveying mechanism (20) is less than the length of the substrate carrier (10); Alternatively, the conveying mechanism (20) has a target area for placing the substrate (100) to be processed transferred by the robot arm, and the distance between the sensing module (60) closest to the starting end of the conveying mechanism (20) and the boundary line of the target area closest to the starting end of the conveying mechanism (20) is less than the length of the substrate carrier (10).

4. The vapor deposition apparatus according to any one of claims 1 to 3, characterized in that: The sensing module (60) can be any one of a photoelectric sensor, an ultrasonic sensor, a radar sensor, and a vision inspection system.

5. The vapor deposition apparatus as described in claim 1, characterized in that: The central axis of the electromagnetic generator (30) is inclined relative to the vertical direction.

6. The vapor deposition apparatus as described in claim 5, characterized in that: The tilt angle of the central axis of the electromagnetic generator (30) relative to the vertical direction is adjustable.

7. The vapor deposition apparatus as described in claim 6, characterized in that: The electromagnetic generator (30) includes a base, an electromagnetic generation module, and an angle adjustment mechanism. The electromagnetic generation module is hinged to the base, and the angle adjustment mechanism is drivenly connected to the electromagnetic generation module to adjust the tilt angle of the electromagnetic generation module relative to the vertical direction. The controller is communicatively connected to the angle adjustment mechanism.

8. The vapor deposition apparatus as described in claim 5, characterized in that: The tilt angle of the central axis of the electromagnetic generator (30) relative to the vertical direction is no greater than 60°.

9. A control method for a vapor deposition apparatus as described in any one of claims 1 to 8, characterized in that: include: When the sensing module (60) detects that the substrate carrier (10) is on the conveying mechanism (20), the electromagnetic generator (30) is energized to make the substrate carrier (10) and the conveying mechanism (20) in a non-contact state. When the sensing module (60) detects that there is no substrate carrier (10) on the conveying mechanism (20), it controls the electromagnetic generator (30) to be de-energized, so that the substrate carrier (10) and the conveying mechanism (20) are in contact.

10. The control method as described in claim 9, characterized in that: The direction of the magnetic force between the electromagnetic generator (30) and the magnet (40) is controlled according to the specifications of the substrate (100) to be processed.

Images