Evaporation machine release film pouring device and evaporation system

Abstract

The application relates to the technical field of display, in particular to a vapor deposition machine release film pouring device and a vapor deposition system. The vapor deposition machine release film pouring device comprises a track, a box body and a driving assembly. The track comprises a first end and a second end. The first end is located below a release film discharge port of a vapor deposition machine. The second end extends away from the release film discharge port. The height of the second end is greater than that of the first end. The box body is slidably arranged on the track. The box body is suitable for receiving the discarded release film output by the release film discharge port. The driving assembly is in transmission connection with the box body to drive the box body to move on the track. A first stop block is arranged at the first end of the track. The stop piece comprises a body part and a stop part. One end of the body part is hinged to the side of the box body close to the first end. The stop part is an arc-shaped elastic piece. One end of the stop part is connected to the other end of the body part. The other end of the stop part is suitable for abutting against the first stop block. The track, the box body and the stop block are made of conductive materials. The track is grounded. The stop piece is at least partially slidably lapped on the track.

Description

Technical Field

[0001] This application relates to the field of display technology, and in particular to a release film pouring device and a vapor deposition system for a vapor deposition machine. Background Technology

[0002] In the OLED (Organic Light Emitting Diode) industry, the vapor deposition and encapsulation process requires the use of upper and lower protective films. Before applying the films to the product, the release film on the surface of the upper and lower protective films needs to be removed. The removed release film is transferred and transported to the unloading room and poured into a waste release film box. The waste release film box needs to be manually removed from the unloading mechanism using a forklift, and the waste film is then taken out and discarded. The waste release film box is then forked back into the unloading mechanism. During this process, because personnel use forklifts to handle the waste release film box, if there are any errors during special operations, such as when the forklift runs out of power, or when personnel do not follow the operating instructions and directly enter the unloading mechanism to retrieve the waste film, it can lead to major equipment malfunctions and personnel injuries. Furthermore, the removal of the release film generates static electricity, and the release film piled up in the box is difficult to remove. Summary of the Invention

[0003] To solve the above-mentioned technical problems, this application provides a release film pouring device and a vapor deposition system for a vapor deposition machine, which does not require additional mechanical cooperation, has good stability, no static electricity accumulation, and the release film is easy to remove.

[0004] In one aspect, this application provides a release film unloading device for a vapor deposition machine, comprising: a track, a housing, a drive assembly, a first stop block, and a stop member. The track includes a first end and a second end. The first end is located below the release film outlet of the vapor deposition machine, and the second end extends away from the release film outlet, with a height greater than the height of the first end. The housing is slidably mounted on the track and is suitable for receiving waste release film output from the release film outlet. The drive assembly is drively connected to the housing and is suitable for driving the housing to move on the track. The first stop block is located at the first end of the track. The stop member includes: a body portion, one end of which is hinged to the side of the housing near the first end; and a stop portion, which is an arc-shaped elastic member, one end of which is connected to the other end of the body portion, and the other end of which is adapted to abut against the first stop block. The track, housing, and stop member are all made of conductive materials. The track is grounded, and at least a portion of the stop member is slidably attached to the track.

[0005] In conjunction with the first aspect, in some implementations of the first aspect, the angle between the track and the horizontal plane is greater than or equal to 10° and less than or equal to 40°.

[0006] In conjunction with the first aspect, in some implementations of the first aspect, the angle between the track and the horizontal plane is greater than or equal to 20° and less than or equal to 30°.

[0007] In conjunction with the first aspect, in some implementations of the first aspect, the number of tracks is two, and the two tracks are set in parallel.

[0008] In conjunction with the first aspect, in some implementations of the first aspect, the track is a straight track or a curved track.

[0009] In conjunction with the first aspect, in some implementations of the first aspect, the stop further includes: a through groove and a connecting portion. The through groove is slidably mounted on the track, wherein at least one of its two sides is provided with the connecting portion. The connecting portion is hinged at one end to the side of the housing near the first end, and at the other end is obliquely connected to the end of the through groove away from the stop.

[0010] In conjunction with the first aspect, in some implementations of the first aspect, the stop member further includes a conductive rubber layer disposed on at least one inner side surface of the through groove.

[0011] In conjunction with the first aspect, in some implementations of the first aspect, the stop further includes: a damping block disposed on the side of the stop portion near the first stop block, wherein the stiffness of the damping block is less than the stiffness of the stop portion.

[0012] In conjunction with the first aspect, in some implementations of the first aspect, the drive component includes a winch disposed at the second end of the track, the winch being connected by a cable to the end of the housing away from the first stop block.

[0013] In conjunction with the first aspect, in some implementations of the first aspect, the drive assembly includes a rack and a drive motor. The rack is arranged parallel to the track. The drive motor is mounted on the housing, and its output end has a gear that meshes with the rack.

[0014] In conjunction with the first aspect, in some implementations of the first aspect, the release film pouring device of the vapor deposition machine also includes rollers, which are rotatably mounted at the bottom of the housing, and the housing contacts the track through the rollers, wherein the rollers are made of conductive material.

[0015] In conjunction with the first aspect, in some implementations of the first aspect, a layer of conductive rubber is coated on the contact surface between the roller and the track.

[0016] In conjunction with the first aspect, in some implementations of the first aspect, the release film unloading device for the vapor deposition machine further includes a second stop block, which is disposed on the track near the second end and is adapted to prevent the box from sliding off the track.

[0017] In conjunction with the first aspect, in some implementations of the first aspect, a positioning groove is provided on at least one of the two sides of the housing; the release film pouring device for the vapor deposition machine further includes: a bushing and a pin. The bushing is fixedly disposed on the side of the track. The pin slidably passes through the bushing and is configured to insert into the positioning groove to limit the movement of the housing on the track.

[0018] In conjunction with the first aspect, in some implementations of the first aspect, the release film unloading device of the vapor deposition machine further includes a drive device, which is connected to a pin shaft drive to drive the pin shaft to insert or pull out of the positioning groove.

[0019] In conjunction with the first aspect, in some implementations of the first aspect, the drive device includes any of the following: an electric cylinder, a pneumatic cylinder, or a hydraulic cylinder.

[0020] In conjunction with the first aspect, in some implementations of the first aspect, the release film unloading device for the vapor deposition machine further includes a position sensor, which is disposed on the side of the track and configured to acquire position information of the housing.

[0021] In conjunction with the first aspect, in some implementations of the first aspect, the position sensor includes any or a combination of the following: an infrared sensor, a laser sensor, a trigger switch, and a ranging sensor.

[0022] In conjunction with the first aspect, in some implementations of the first aspect, the release film unloading device of the vapor deposition machine further includes an L-shaped edge and a lifting device. The L-shaped edge is disposed on at least one side of the two sides of the housing, and is parallel to the track. The L-shaped edge and the side of the housing together form an inverted groove structure. The lifting device includes: a fixed end disposed on the side of the track; and an output end extending from the top of the fixed end. The output end is movable in the vertical direction and is configured to move upward against the inverted groove structure when the pin is engaged in the positioning groove, so that the housing rotates about the line containing the pin axis.

[0023] In conjunction with the first aspect, in some implementations of the first aspect, the lifting device further includes a roller, which is rotatably disposed on the top of the output end and is adapted to make rolling contact with the inverted groove structure.

[0024] In conjunction with the first aspect, in some implementations of the first aspect, the release film unloading device for the vapor deposition machine further includes: a gravity sensor and / or a height sensor. The gravity sensor is disposed on the chamber and configured to acquire weight information of the release film within the chamber. The height sensor is disposed within the chamber and configured to acquire height information of the stacked release film within the chamber.

[0025] In conjunction with the first aspect, in some implementations of the first aspect, the height sensor includes an infrared sensor and / or a laser sensor.

[0026] Secondly, one embodiment of this application provides a vapor deposition system, including: a vapor deposition machine, including a release film outlet; and a vapor deposition machine release film unloading device as described in the foregoing embodiment.

[0027] According to the embodiments of this application, the release film unloading device and evaporation system for the evaporation machine are provided with an inclined upward extending track below the release film outlet of the evaporation machine. In conjunction with the first stop block and the stop component on the box that is slidably connected to the track, static electricity is eliminated during the positioning and stopping process, reducing the release film adhesion rate, so as to facilitate the transfer and removal of the release film. Attached Figure Description

[0028] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0029] Figure 1 The image shown is a front view of a release film pouring device for a vapor deposition machine according to an embodiment of this application.

[0030] Figure 2 As shown Figure 1 The diagram shows a partial enlarged view of the release film pouring device for the vapor deposition machine.

[0031] Figure 3 As shown Figure 1 The image shows a top view of the release film pouring device for the vapor deposition machine.

[0032] Figure 4 The image shown is a perspective view of the stop member of the release film pouring device for an evaporation machine provided in an embodiment of this application.

[0033] Figure 5 The image shown is a perspective view of the stop member of the release film pouring device for a vapor deposition machine according to another embodiment of this application.

[0034] Figure 6 The image shown is a top view of a release film pouring device for a vapor deposition machine according to another embodiment of this application.

[0035] Figure 7 The image shown is a partial perspective view of the release film pouring device for a vapor deposition machine according to another embodiment of this application.

[0036] Figure label:

[0037] 1. Evaporation coating machine; 2. Release film outlet; 3. Track; 301. First end; 302. Second end; 4. Housing; 5. First stop block; 6. Stop component; 601. Main body; 602. Stop part; 603. Through groove part; 604. Connecting part; 605. Shock absorber; 7. Hinge support; 8. Conductive rubber layer; 9. Winch; 901. Cable; 902. Fixed pulley; 903. Hanging ring; 10. Rack; 11. Drive motor; 12. Gear; 13. Roller; 14. Second stop block; 15. Fixed bracket; 16. Positioning groove; 17. Bushing; 18. Pin; 19. Drive device; 20. L-shaped edge; 21. Lifting device; 2101. Fixed end; 2102. Output end; 2103. Rolling wheel. Detailed Implementation

[0038] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0039] Figure 1 The image shown is a front view of a release film unloading device for a vapor deposition machine according to an embodiment of this application.

[0040] Figure 2 As shown Figure 1 The diagram shown is a partial enlarged view of the release film pouring device for the vapor deposition machine. Figure 3 As shown Figure 1 The diagram shows a top view of the release film unloading device for the vapor deposition machine. Figure 4 The image shown is a perspective view of the stop member of the release film pouring device for an evaporation machine provided in an embodiment of this application.

[0041] According to a first aspect of this application, one embodiment of this application provides a release film unloading device for a vapor deposition machine, such as... Figures 1 to 4As shown, the system includes: a track 3, a housing 4, a drive assembly, a first stop block 5, and a stop member 6. The track 3 includes a first end 301 and a second end 302. The first end 301 is located below the release film outlet 2 of the vapor deposition machine, and the second end 302 extends away from the release film outlet 2, with a height greater than that of the first end 301. The housing 4 is slidably mounted on the track 3 and is used to receive waste release film output from the release film outlet 2. The drive assembly is connected to the housing 4 and is used to drive the housing 4 to move on the track 3. The first stop block 5 is located at the first end 301 of the track 3. The stop member 6 includes: a body part 301, one end of which is hinged to the side of the housing 4 near the first end 301; and a stop part 602, which is an arc-shaped elastic member, one end of which is connected to the other end of the body part 601, and the other end of which is used to abut against the first stop block 5. Among them, the track 3, the box 4 and the stop 6 are all made of conductive materials. The track 3 is grounded and the stop 6 is slidably connected to the track 3 in at least part of its structure.

[0042] In this embodiment, by setting an inclined upward extending track 3 below the release film outlet 2 of the vapor deposition machine, the box 4 is moved out with the help of the drive assembly and sent back by gravity. With the help of the first stop block and the stop component on the box 4 that can be slidably connected to the track 3, static electricity is eliminated at the same time during the positioning and stopping process, reducing the release film adhesion rate, so as to facilitate the transfer and removal of the release film.

[0043] Based on the first aspect, the data in Table 1 were obtained through experimental comparison in some implementation methods of the first aspect.

[0044] Table 1

[0045] plan Electrostatic voltage (V) Release film adhesion rate Static elimination 5000+ 30％ This application proposal <100 <5％

[0046] In conjunction with the first aspect, in some implementations of the first aspect, the track 3 is set as an inclined structure, which can utilize gravity to assist in returning to its original position. After the release film is poured out, the box 4 can slide back below the discharge port by its own weight, without the need for additional power, saving energy and reducing mechanical complexity. In addition, ergonomic optimization can be carried out. After the second end 302 is raised, the operator can pick up the film or pour the material at a higher position, reducing bending over and reducing labor intensity. Furthermore, the inclined track can adapt to the height restrictions of the factory building, avoid interference with the equipment on the top, and improve space utilization.

[0047] In conjunction with the first aspect, in some implementations of the first aspect, the angle between the track 3 and the horizontal plane is greater than or equal to 10° and less than or equal to 40°. Preferably, the angle between the track 3 and the horizontal plane is greater than or equal to 20° and less than or equal to 30°.

[0048] In this embodiment, by designing the track 3 to be inclined upwards, the box 4 can be raised to a height that facilitates the removal of the release film, or to a height that facilitates the pouring of the release film. Furthermore, after the release film is removed, the box 4 can be slid back to below the release film outlet 2 of the vapor deposition machine using its own weight, without any power, to continue receiving new discarded release film. Specifically, when the amount of release film in the box 4 reaches a preset value, the drive component is activated (either manually or automatically by the operator) to move the box 4 to a preset position (height) on the track 3. The locking component (the specific structure will be described later) is activated to fix the position of the box 4. The release film inside the box 4 is removed, the locking component is released, and the box 4 slides along the track 3 towards the first end 301 under the action of gravity. After approaching the first stop block 5, the stop part 602 of the stop member 6 contacts the first stop block 5, deforms, and absorbs the kinetic energy of the box 4. The box 4 then stops below the release film outlet 2 of the vapor deposition machine. Throughout the process, the stop 6 remains in contact with the track 3. Since the housing 4, track 3 and stop 6 are all made of conductive materials and the track 3 is grounded, the charge accumulated in the housing 4 and the release film inside the housing 4 can be effectively discharged, preventing the release film from adsorbing to each other or adsorbing to the inner wall of the housing 4, which would increase the difficulty of removing the release film.

[0049] In conjunction with the first aspect, in some implementations of the first aspect, when the inclination angle of track 3 is less than 10°, the gravitational force is insufficient, and the box 4 may not be able to slide back automatically; when the inclination angle of track 3 is greater than 40°, the box 4 slides down too fast, requiring an additional braking device and increasing costs.

[0050] Preferably, when the tilt angle of the track 3 is between 20° and 30° (including the end point), tests have shown that the sliding speed of the box 4 is stable at this angle (approximately 0.5 to 1 m / s), and no additional deceleration device is required.

[0051] In conjunction with the first aspect, in some implementations of the first aspect, the release film pouring device of the vapor deposition machine further includes a roller 13, which is rotatably mounted on the bottom of the housing 4. The housing 4 contacts the track 3 through the roller 13, wherein the roller 13 is made of a conductive material, such as metal or alloy.

[0052] In conjunction with the first aspect, in some implementations of the first aspect, the roller 13 is made of aluminum alloy, which has the characteristics of high strength, light weight, and low cost. An alternative solution is that the roller 13 is made of a conductive composite material, such as carbon fiber reinforced polymer (CFRP), which combines lightweight and conductivity.

[0053] In conjunction with the first aspect, in some implementations of the first aspect, the roller 13 is a double-row roller to improve the load capacity of the housing 4. Further optionally, the roller 13 and the track 3 are respectively provided with a limiting groove and a limiting protrusion structure with a concave-convex fit. The two are in sliding contact with each other through the concave-convex fit to prevent the housing 4 from derailing and to keep the roller 13 in contact with the track 3 at all times, so as to ensure that the static electricity transmission path is always unobstructed.

[0054] In conjunction with the first aspect, in some implementations of the first aspect, there are two tracks 3, which are arranged in parallel. By setting two tracks 3, the stability of the box 4 during movement can be effectively guaranteed.

[0055] In conjunction with the first aspect, in some implementations of the first aspect, track 3 is a straight track or a curved track.

[0056] In this embodiment, the actual space and location of the equipment can be adapted to select either a straight track or a curved track. For example, if the site space is large, track 3 can be set as a straight line; if the site space is limited, or the equipment is placed near a corner, track 3 can be set as an arc to improve space utilization.

[0057] In conjunction with the first aspect, in some implementations of the first aspect, when factory space is limited, an arc-shaped track (such as a 90° turn) is used to bypass obstacles, improving space utilization. Optionally, speed bumps are provided on the arc section of track 3 to ensure that the box 4 passes smoothly through the arc section and to appropriately reduce speed to prevent centrifugal force from causing the release film to scatter. Optionally, the speed bumps can be patterns such as stripes or protrusions distributed in an array on the surface of track 3, or they can be a film layer with a high coefficient of friction, such as a conductive rubber layer.

[0058] Figure 5 The image shown is a perspective view of the stop member of the release film pouring device for a vapor deposition machine according to another embodiment of this application.

[0059] In conjunction with the first aspect, in some implementations of the first aspect, such as Figure 2 and Figure 5 As shown, the stop member 6 further includes a through groove 603 and a connecting portion 604. The through groove 603 is slidably mounted on the track 3, wherein at least one of the two sides of the through groove 603 is provided with the connecting portion 604. One end of the connecting portion 604 is hinged to the side of the housing 4 near the first end 301, for example, it is hinged to a hinge support 7 provided on the side of the housing 4, and the other end is obliquely connected to the end of the through groove 603 away from the stop portion 602.

[0060] In this embodiment, by adjusting the angle between the central axis of the connecting part 604 and the central axis of the through groove part 603, when the box body 4 slides on the track 3, the bottom of the through groove part 603 is parallel to and in contact with the track 3. The groove size and shape of the through groove part 603 are matched with the size and shape of the track 3. That is, when the stop member 6 is slidably placed on the track, the through groove part is just clamped on the track 3, thereby ensuring the stability of the connection between the stop member 6 and the track 3.

[0061] In conjunction with the first aspect, in some implementations of the first aspect, the stop member 6 further includes a conductive rubber layer disposed on at least one inner surface of the through groove portion 603. The volume resistivity of the conductive rubber layer is greater than or equal to 10^3 Ω·cm and less than or equal to 10^5 Ω·cm; the hardness (Shore A) is greater than or equal to 50 and less than or equal to 70; and the abrasion resistance (Taber test) is less than 100 mg / 1000 rpm.

[0062] In this embodiment, by providing a layer of conductive rubber between the through groove 603 and the track 3, the noise generated by friction when the two slide relative to each other can be reduced while ensuring electrical conductivity between them. At the same time, the elastic and deformable properties of the conductive rubber further ensure the stability of the electrical conductivity connection between the two.

[0063] In conjunction with the first aspect, in some implementations of the first aspect, the stop member 6 further includes a shock absorber 605, which is disposed on the side of the stop portion 602 near the first stop block 5.

[0064] In this embodiment, by providing a shock-absorbing block 605 at the position where the stop part 603 contacts the first stop block 5, the stiffness of the shock-absorbing block 605 is less than the stiffness of the stop part 602, which can further improve the ability of the stop part 6 to absorb the kinetic energy of the box body 4, so that the box body 4 can be more stably stopped below the release film outlet 2 of the vapor deposition machine.

[0065] In conjunction with the first aspect, in some implementations of the first aspect, an electromagnet is provided inside the first stop block 5, and the stop part 602 contains ferromagnetic material. When the housing 4 approaches the first stop block 5, the electromagnet is energized and repels the stop part 602, achieving a soft stop for the housing 4 relative to the first stop block 5, thereby eliminating mechanical collision noise. Furthermore, the magnetic force of the electromagnet can be adjusted to adapt to housing 4 under different loads.

[0066] In conjunction with the first aspect, in some implementations of the first aspect, the stress distribution when the box 4 impacts the stop block 5 at a speed of 1 m / s is simulated using ANSYS:

[0067] Without damping block 605: Stress concentration (peak value 120MPa) in stop part 602, prone to fatigue fracture.

[0068] Adding a shock absorber block 605 (polyurethane material): reduces stress to 60MPa and extends service life by 3 times.

[0069] In conjunction with the first aspect, in some implementations of the first aspect, such as Figures 1-3 As shown, the drive assembly includes a winch 9, which is located at the second end of the track 3. The winch 9 is connected to the end of the housing 4 away from the first stop block 5 via a cable 301.

[0070] In this embodiment, the winch 901, in conjunction with the fixed pulley 903 located at the second end 302 of the track 3 and the hanging ring 903 located on the box 4, together with the cable 901, lifts the box 4 to move towards the second end 302 of the track.

[0071] Figure 6 The image shown is a top view of a release film pouring device for a vapor deposition machine according to another embodiment of this application.

[0072] In conjunction with the first aspect, in some alternative implementations of the first aspect, such as Figure 6 As shown, the drive assembly includes a rack 10 and a drive motor 11. The rack 10 is arranged parallel to the track 3. The drive motor 11 is mounted on the housing 4, and the output end of the drive motor 11 is provided with a gear 12 that meshes with the rack 10.

[0073] In this embodiment, the rack 10 is positioned below the housing 4, for example, between the two tracks 3 (e.g., Figure 6 (As shown), it can also be set on one or both sides of the track 3. The drive motor 11 is set at the bottom of the housing 4, and the output end of the drive motor 11 is provided with a gear 12 that meshes with the rack 10. Through electrical connection, the drive gear 12 rotates and drives the housing 4 to move on the track 3. Optionally, a reducer is also provided between the gear 12 and the rack 10.

[0074] In conjunction with the first aspect, in some alternative implementations of the first aspect, the drive assembly includes a sprocket and a chain. The sprocket is fixed to the second end 302 of the track, and the chain is laid parallel to the track 3. A small sprocket driven by a motor is installed at the bottom of the housing 4, meshing with the main chain. The motor drives the chain transmission to move the housing 4 on the track. Compared to gears and racks, chain transmission is more resistant to dusty environments, and its load capacity can reach 1 ton, making it more suitable for large vapor deposition machines.

[0075] In conjunction with the first aspect, in some implementations of the first aspect, the parameters of the above three driving methods are shown in Table 2.

[0076] Table 2

[0077] Driver type Maximum load Positioning accuracy Maintenance cycle hoist 200kg ±5cm per month Gear and rack 500kg ±1mm Quarterly Chain and sprocket 1000kg ±3mm Half a year

[0078] In conjunction with the first aspect, in some alternative implementations of the first aspect, the drive components include a linear motor stator built into track 3 and a mover mounted at the bottom of housing 4. Contactless drive is achieved through PLC (Programmable Logic Controller) control, which is particularly suitable for OLED evaporation lines with high cleanliness requirements and operating conditions requiring frequent start-stop cycles (>30 times per hour).

[0079] In conjunction with the first aspect, in some implementations of the first aspect, a layer of conductive rubber is coated on the contact surface between the roller 13 and the track 3. For example, it is deposited on the outside of the metal roller 13 for a period of time.

[0080] In conjunction with the first aspect, in some implementations of the first aspect, the release film unloading device for the vapor deposition machine further includes a second stop block 14, which is disposed on the track 3 near the second end 302. The second stop block 14 is adapted to prevent the housing 4 from sliding off the track. Optionally, the second stop block 14 is positioned above the region of the track 3 near the second end via a fixing bracket 15.

[0081] In conjunction with the first aspect, in some implementations of the first aspect, at least one of the two sides of the housing 4 is provided with a positioning groove 16; the release film unloading device for the vapor deposition machine further includes: a bushing 17 and a pin 18. The bushing 17 is fixedly disposed on the sides of both sides of the track 3. The pin 18 slidably passes through the bushing 17 and is configured to insert into the positioning groove 16 to limit the movement of the housing 4 on the track 3 (i.e., the locking component mentioned above).

[0082] In this embodiment, taking the box body as a cuboid as an example, the side of the box body 4 near the first end 301 is defined as the rear end, the side near the second end 302 is defined as the rear end, and the side between the front end and the rear end is the side (or both sides) in the general sense of this application. The bushing 17 is fixed by the bracket 15. Assuming that the bracket 1 is on the side of the track, when the height of the bushing 8 is the same as the height of the positioning groove 16 when the box body 4 moves to the corresponding position, and the two axes are concentric, so that the pin 18 can pass through the bushing and be embedded in the positioning groove, thereby locking the position of the box body 4 on the track 3 and preventing relative movement between the track 3 and the box body 4.

[0083] In conjunction with the first aspect, in some implementations of the first aspect, the release film unloading device of the vapor deposition machine further includes a drive device 19, which is connected to the pin 18 to drive the pin 18 to insert or pull out of the positioning groove 16.

[0084] In this embodiment, the drive device 19 drives the pin 18 to move, thereby achieving the purpose of automatically locking the housing 4.

[0085] In conjunction with the first aspect, in some implementations of the first aspect, the drive device includes any of the following: an electric cylinder, a pneumatic cylinder, or a hydraulic cylinder.

[0086] In conjunction with the first aspect, in some implementations of the first aspect, the housing locking mechanism can also employ pneumatic gripper locking. Specifically, pneumatic grippers are installed on both sides of the track 3, and the housing 4 is provided with side grooves adapted to the pneumatic grippers. When the housing 4 arrives, the pneumatic grippers clamp the side grooves of the housing 4, thereby locking the housing 4. Compared to pin locking, pneumatic gripper locking has a faster response speed, achieving an unlocking response time of <0.1 seconds.

[0087] In conjunction with the first aspect, in some implementations of the first aspect, the housing locking mechanism can also adopt an electromagnetic locking method. Specifically, a permanent magnet is embedded at the bottom of the housing 4, and an electromagnetic coil is provided on the track 3. When the housing 4 arrives, the electromagnetic coil is energized to generate a magnetic attraction force to fix the housing 4.

[0088] In conjunction with the first aspect, in some implementations of the first aspect, the release film unloading device for the vapor deposition machine further includes a position sensor, which is disposed on the side of the track and configured to acquire position information of the housing.

[0089] In this embodiment, the position sensor sends the collected position information of the housing to the controller, which then sends a command to the drive device. The drive device moves the pin and inserts it into the positioning groove. Optionally, the positioning grooves 16 are respectively arranged on both sides of the housing 4, and a drive device, bushing, and pin are respectively arranged on both sides of the housing 4.

[0090] In conjunction with the first aspect, in some implementations of the first aspect, the position sensor includes any or a combination of the following: an infrared sensor, a laser sensor, a trigger switch, and a ranging sensor.

[0091] Figure 7 The image shown is a partial perspective view of the release film pouring device for a vapor deposition machine according to another embodiment of this application.

[0092] In conjunction with the first aspect, in some implementations of the first aspect, such as Figure 7As shown, the release film pouring device of the vapor deposition machine also includes an L-shaped edge 20 and a lifting device 21. The L-shaped edge 20 is disposed on at least one side of the two sides of the housing 4, and is parallel to the track 3. The L-shaped edge 20 and the side of the housing 4 together form an inverted groove structure. The lifting device 21 includes: a fixed end 2101 disposed on the side of the track 3; and an output end 2102 extending from the top of the fixed end 2101. The output end 2102 is movable in the vertical direction and is configured to move upward against the inverted groove structure when the pin 18 is engaged in the positioning groove 16, so that the housing 4 rotates around the axis of the pin 18. Optionally, the L-shaped edge and the lifting device are disposed on the two sides of the housing.

[0093] In this embodiment, after the pin 18 is engaged in the positioning groove 16, it restricts the relative movement between the box 4 and the track 3. The output end 2102 of the lifting device 21 abuts against the L-shaped edge 20, and the output end 2102 continues to lift upward. The output end 2102 and the L-shaped edge 20 slide relative to each other. At the same time, the box 4 begins to rotate about the straight line where the pin's central axis is located, so that the operator can take out the release film in the box 4 or pour out the release film in the box 4.

[0094] In conjunction with the first aspect, in some implementations of the first aspect, the lifting device further includes a roller 2103, which is rotatably disposed on the top of the output end 2102 and is adapted to make rolling contact with the inverted groove structure.

[0095] In this embodiment, by providing a rolling wheel 2103 at the top of the output end 2102, the sliding friction between the output end 2102 and the L-shaped edge 20 is changed to rolling friction, thereby reducing wear and noise during operation.

[0096] In conjunction with the first aspect, in some implementations of the first aspect, the release film unloading device for the vapor deposition machine further includes: a gravity sensor and / or a height sensor. The gravity sensor is disposed on the housing 4 and configured to acquire weight information of the release film within the housing 4. The height sensor is disposed within the housing 4 and configured to acquire height information of the stacked release films within the housing 4.

[0097] In this embodiment, a gravity sensor detects the total weight of the housing 4 and the release film inside the housing 4 to determine whether the maximum amount of release film has been reached. A height sensor determines the stacking height of the release film inside the housing 4 to determine whether the maximum amount of release film has been reached. The maximum amount of release film can be determined by combining the gravity sensor and the height sensor; for example, the drive assembly is activated when either condition is met.

[0098] In conjunction with the first aspect, in some implementations of the first aspect, the height sensor includes an infrared sensor and / or a laser sensor.

[0099] In conjunction with the first aspect, some implementations of the first aspect utilize a combined weight-height method to determine whether the release film inside the chamber has reached its maximum quantity. Specifically, in the release film unloading device of the vapor deposition machine, data fusion from gravity and height sensors can significantly improve the accuracy of release film status monitoring. The core logic is to identify abnormal situations by cross-validating the data from both sensors, which can be broadly categorized into the following four situations.

[0100] 1. If the weight meets the standard but the stacking height is insufficient, the external manifestation is abnormal release film density (such as moisture or adhesion). The reason is that the weight per unit volume of the release film increases after it becomes damp, resulting in a lower stacking height for the same weight. The solution is to trigger a humidity alarm and check the humidity control of the vapor deposition environment.

[0101] 2. If the height meets the standard but the weight is insufficient, the external manifestation is that the release film is broken or unevenly piled up. The reason is that the breakage causes the film fragments to pile up loosely, resulting in less weight at the same height; or the outlet is blocked, causing local accumulation. The solution is to stop the discharge and check the integrity of the release film conveyor path.

[0102] 3. Both weight and height exceed the limits simultaneously, manifesting as excessive loading of release film. This is caused by a malfunction in the discharge control system or human error. The corrective action is to immediately stop discharge and initiate the emergency dumping procedure.

[0103] 4. If both weight and height are below the threshold, the outward manifestation is an interruption in the release film supply. This is caused by the depletion of upstream release film rolls or jamming of the conveyor mechanism. The corrective measures are to prompt for additional release film and check the status of the conveyor motor.

[0104] In conjunction with the first aspect, in some implementations of the first aspect, gravity sensors (such as strain gauges) and altitude sensors (such as laser rangefinders) acquire data synchronously at a frequency of 10 Hz.

[0105] In conjunction with the first aspect, in some implementations of the first aspect, the collected data is filtered, for example, Kalman filtering is used to eliminate vibration interference (such as swaying when the box moves).

[0106] In conjunction with the first aspect, in some implementations of the first aspect, the weight-height relationship curve is automatically corrected based on the preset density parameters of the release film material (PET / PP).

[0107] In conjunction with the first aspect, in some implementations of the first aspect, the gravity sensor is a stainless steel sealed load cell (IP67 protection) with a range of 500 kg (overload capacity of 150%), installed at the four corners of the support plate between the bottom of the housing 4 and the roller 13 (four-sensor redundant design).

[0108] In conjunction with the first aspect, in some implementations of the first aspect, the height sensor employs a laser rangefinder (such as the SICK DL100) or an ultrasonic sensor (such as the Baumer UNAM), or a combination of both. The laser rangefinder is suitable for high-precision scenarios (±0.1mm), while the ultrasonic sensor is a low-cost solution (±5mm) and dust-resistant. The height sensor is installed at the top center and above the four corners of the enclosure. Single-point monitoring at the top center is suitable for uniform stacking, while array monitoring at the four corners is suitable for detecting inclined surfaces or localized stacking.

[0109] In conjunction with the first aspect, certain implementations of the first aspect utilize weight-height sensor data fusion to achieve accurate status judgment, dynamic threshold management, and a rapid response mechanism. Specifically, it can accurately distinguish between scenarios such as normal stacking, moisture absorption, breakage, and blockage, automatically adjust alarm thresholds based on material characteristics and environmental conditions, and trigger protective actions within 200ms to prevent equipment damage or release film waste. Through the improvements to the technical solution in this application, the limitations of traditional single-sensor monitoring are reduced by more than 80%, significantly improving the stability and safety of the vapor deposition process.

[0110] Secondly, one embodiment of this application provides a vapor deposition system, including: a vapor deposition machine, including a release film outlet; and a vapor deposition machine release film unloading device as described in the foregoing embodiment.

[0111] In conjunction with the second aspect, in some implementations of the second aspect, the release film outlet 2 is linked with the unloading device. When discharging, the box 4 must be at the first end 301. When the unloading device malfunctions, the vapor deposition machine automatically stops discharging to prevent the release film from accumulating.

[0112] In the embodiments of this disclosure, unless otherwise specified, the connection can be a detachable connection using bolts, nuts, screws, clips, magnets, etc. In some connections where there is no particular requirement for a detachable fit, a non-detachable connection can be achieved through welding, bonding, etc.

[0113] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0114] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0115] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0116] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0117] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A release film unloading device for a vapor deposition machine, characterized in that, include: The track includes a first end and a second end. The first end is located below the release film outlet of the vapor deposition machine, and the second end extends away from the release film outlet. The height of the second end is greater than the height of the first end. The housing is slidably mounted on the track and is suitable for receiving waste release film output from the release film outlet. A drive assembly is connected to the housing in a transmission manner, and the drive assembly is adapted to drive the housing to move on the track; The first stop block is located at the first end of the track; Stopping components, including: One end of the main body is hinged to the side of the box near the first end; The stop portion is an arc-shaped elastic element. One end of the stop portion is connected to the other end of the main body portion, and the other end of the stop portion is adapted to abut against the first stop block. The track, the housing, and the stop are all made of conductive materials. The track is grounded, and at least a portion of the stop is slidably attached to the track.

2. The release film unloading device for the vapor deposition machine according to claim 1, characterized in that, The angle between the track and the horizontal plane is greater than or equal to 10° and less than or equal to 40°. Preferably, the angle between the track and the horizontal plane is greater than or equal to 20° and less than or equal to 30°; Preferably, the number of tracks is two, and the two tracks are arranged in parallel; Preferably, the track is a straight track or a curved track.

3. The release film unloading device for the vapor deposition machine according to claim 1, characterized in that, The stop member also includes: A through-slot portion is slidably covered on the track, wherein at least one of the two sides of the through-slot portion is provided with a connecting portion; The connecting part is hinged at one end to the side of the housing near the first end, and at the other end is inclined to be connected to the end of the through groove that is away from the stop part. Preferably, the stop further includes: A conductive rubber layer is disposed on at least one inner side surface of the through groove. Preferably, the stop further includes: A shock absorber is disposed on the side of the stop portion near the first stop block, and the stiffness of the shock absorber is less than the stiffness of the stop portion.

4. The release film unloading device for a vapor deposition machine according to claim 1, characterized in that, The driving component includes: A winch is located at the second end of the track, and the winch is connected to the end of the housing away from the first stop block via a cable; or The driving component includes: A rack is arranged parallel to the track; A drive motor is mounted on the housing, and the output end of the drive motor is provided with a gear that meshes with the rack.

5. The release film unloading device for a vapor deposition machine according to claim 1, characterized in that, The release film unloading device for the vapor deposition machine also includes: A roller is rotatably mounted on the bottom of the housing, and the housing contacts the track through the roller. The roller is made of a conductive material. Preferably, the contact surface between the roller and the track is covered with a layer of conductive rubber.

6. The release film unloading device for a vapor deposition machine according to claim 1, characterized in that, The release film unloading device for the vapor deposition machine also includes: A second stop block is disposed on the track near the second end, and the second stop block is adapted to prevent the housing from sliding off the track.

7. The release film unloading device for a vapor deposition machine according to claim 1, characterized in that, At least one of the two sides of the housing is provided with a positioning groove; the release film unloading device for the vapor deposition machine further includes: The bushing is fixedly mounted on the side of the track; A pin, slidably passing through the bushing, is configured to insert into the positioning groove to limit the movement of the housing on the track; Preferably, the release film unloading device for the vapor deposition machine further includes: A drive device is connected to the pin shaft to drive the pin shaft to insert into or pull out of the positioning groove; Preferably, the driving device includes any of the following: an electric cylinder, a pneumatic cylinder, or a hydraulic cylinder; Preferably, the release film unloading device for the vapor deposition machine further includes: A position sensor is disposed on the side of the track, and the position sensor is configured to acquire position information of the housing; Preferably, the position sensor includes any or a combination of the following: an infrared sensor, a laser sensor, a trigger switch, and a ranging sensor.

8. The release film unloading device for a vapor deposition machine according to claim 7, characterized in that, The release film unloading device for the vapor deposition machine also includes: An L-shaped edge is disposed on at least one of the two sides of the housing, the L-shaped edge being parallel to the track, and the L-shaped edge and the side of the housing together forming an inverted groove structure; the lifting device includes: The fixed end is located on the side of the track; The output end extends from the top of the fixed end and is movable in the vertical direction. The output end is configured to move upward against the inverted groove structure when the pin is engaged in the positioning groove, so that the housing rotates about the line where the pin axis is located. Preferably, the lifting device further includes: A roller, rotatably disposed at the top of the output end, is adapted to make rolling contact with the inverted groove structure.

9. The release film unloading device for a vapor deposition machine according to claim 1, characterized in that, The release film unloading device for the vapor deposition machine also includes: A gravity sensor, disposed on the housing, is configured to acquire weight information of the release film within the housing; and / or A height sensor is disposed inside the box, and the height sensor is configured to acquire height information of the release film stack inside the box; Preferably, the height sensor includes an infrared sensor and / or a laser sensor.

10. A vapor deposition system, characterized in that, include: Evaporation equipment, including release film outlet; The release film pouring device for a vapor deposition machine as described in any one of claims 1 to 9.

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