A self-locking sample holder assembly for preventing sample falling in ultra-high vacuum coating

Abstract

This invention belongs to the technical field of ultra-high vacuum coating equipment. It discloses a self-locking sample holder assembly for ultra-high vacuum coating that prevents detachment. A base mechanism is used to fix the sample holder mechanism. Screws are used to fix end caps on opposite sides of the base substrate, forming an arc-shaped guide groove for the sample holder. The distance between the groove edges on the sample inlet side of the fixed end cap is greater than the distance between the groove edges on the opposite side. A guide post is provided between the groove edges on the opposite side of the sample inlet side of the base substrate. The sample holder mechanism is used to carry the sample. A pressure plate is installed on the edge of the sample holder. An approximately L-shaped guide and limiting groove is opened at the bottom of the sample holder. The guide post on the base substrate is placed within the guide and limiting groove and can move along the guide and limiting groove. This invention achieves a dual-guide function during movement, thereby achieving radial limiting. The sample holder assembly is self-locking and prevents detachment when installed with the coating area facing downwards and requiring rotation around an axis. This invention is simple to operate, has a low failure rate, is inexpensive, and is compatible with high-temperature environments. It can be applied in various ultra-high vacuum coating processes.

Description

Technical Field

[0001] This invention belongs to the technical field of ultra-high vacuum coating equipment, and specifically relates to a sample holder assembly for ultra-high vacuum coating. Background Technology

[0002] Ultra-high vacuum deposition technology is a core method for preparing high-purity, high-precision functional thin films, widely used in cutting-edge fields such as semiconductors, quantum devices, and superconducting materials. In practical applications, the sample holder typically has a high-temperature heating source above 1000°C on its back, is mounted horizontally downwards, and has a rotation function around an axis to improve film uniformity. Under these operating conditions, the sample holder must withstand the combined effects of gravity and centrifugal force, requiring extremely high reliability in its fixation. Furthermore, the ultra-high vacuum environment necessitates that all components inside the chamber be made of vacuum-compatible materials, making the sample holder assembly fixation scheme crucial.

[0003] Currently disclosed examples include CN221999951U, a sample holder that can accommodate multiple samples; CN113884698A, a transfer vacuum sample holder and vacuum interconnection system, which allows the same small sample holder to transfer samples between various cryogenic scanning tunneling microscopes and near-normal pressure scanning tunneling microscopes; and CN221847245U, an ultra-high vacuum sample holder for a vacuum interconnection system, which achieves rapid sample fixation by arranging annularly distributed protrusions on the sample holder body and installing elastic sheets on the protrusions.

[0004] Traditional screw fixing in ultra-high vacuum chambers is inconvenient to operate and has low replacement efficiency; adhesive fixing is incompatible with high-temperature ultra-high vacuum environments; electrostatic chucks are complex, expensive, and their high-temperature stability cannot be guaranteed. Threaded fastening, adhesive bonding, or electrostatic adsorption are common fixing methods to date, but all have significant drawbacks. For example, threaded fastening methods involve cumbersome installation and disassembly of the sample holder assembly and are extremely inconvenient to operate within the limited space of the chamber; adhesive bonding methods are incompatible with ultra-high vacuum environments; and electrostatic adsorption methods are expensive and their stability at high temperatures cannot be guaranteed.

[0005] Therefore, while ensuring coating efficiency and stability, there is an urgent need for a sample holder assembly for ultra-high vacuum coating that is easy to operate in an ultra-high vacuum chamber, inexpensive, heat-resistant, and compatible with ultra-high vacuum. However, existing technologies have not yet produced a sample holder fixing solution that simultaneously meets the requirements of compatibility with ultra-high vacuum environments, ease of operation, high-temperature conditions, and low cost. Summary of the Invention

[0006] The purpose of this invention is to solve the problem of sample holder components easily falling off during the coating process in the field of ultra-high vacuum technology, which are simultaneously subjected to gravity and centrifugal force. It provides an anti-fall-off self-locking sample holder component for ultra-high vacuum coating. The component has a simple structure and achieves the anti-fall-off self-locking function through the dual-guide limiting structure design of the base substrate and the circular sample holder, combined with the combined action of screws and pressure plates. Under the premise of ensuring coating efficiency and stability, it is convenient to operate in the ultra-high vacuum chamber, has low cost, is resistant to high temperature, and is compatible with ultra-high vacuum.

[0007] The technical solution adopted by the present invention to achieve the above objectives is: an anti-detachment self-locking sample holder assembly for ultra-high vacuum coating, comprising a base mechanism and a sample holder mechanism; The base mechanism is used to fix the sample holder mechanism; it includes a base plate and a fixed end cap. The base plate is annular, and the fixed end cap is placed on the base plate and fastened by screws. Two arc-shaped guide grooves for the sample holder are formed between the fixed end cap and the base plate. The arc-shaped guide plate of the arc-shaped guide groove is integral with the base plate or integral with the fixed end cap. The inlet side groove edge and the opposite side groove edge of the arc-shaped guide plate are both straight edges. The height of the arc-shaped guide groove is less than the thickness of the sample holder. The diameter of the arc-shaped guide groove is the same as the diameter of the sample holder. The distance between the inlet side groove edges of the arc-shaped guide groove is greater than the distance between the opposite side groove edges. Guide posts are provided on the base plate between the opposite side groove edges. The sample holder mechanism is used to carry the sample; it includes a sample holder and a pressure plate. The pressure plate is installed on the edge of the sample holder. The sample holder is a circular strip with parallel chords cut on both sides. The distance between the parallel chords is smaller than the distance between the sides of the sample holder's arc-shaped guide groove on the sample inlet side, but larger than the distance between the sides of the sample inlet groove on the opposite side. The sample holder is placed in the arc-shaped guide groove of the sample holder, and the sample holder contacts the fixed end cap surface and generates friction. One end of the sample holder has a handle, and the other end has a locking block. The locking block has an approximately L-shaped guide limiting groove. The long side of the guide limiting groove is an arc-shaped groove with the same diameter as the sample holder, and the short side ends have sample inlet chamfers on both sides, with a sample inlet chamfer size of C2×45°. The approximately L-shaped bend of the guide limiting groove has a sample withdrawal radius with a withdrawal radius size r=0.5mm-1mm. The guide post on the base plate is placed in the guide limiting groove and can move along the guide limiting groove. Preferably, the sample holder has a pressure plate mounting hole, the pressure plate is an elastic pressure plate, the pressure plate is placed on the pressure plate mounting hole and installed on the sample holder by fixing screws.

[0008] Preferably, the sample holder is provided with 3-6 pressure tablets at intervals.

[0009] Preferably, the front end of the sample tray arc-shaped guide groove on the sample inlet side is designed with a tapered chamfer, the angle of which is 10° to 60° with the sample inlet direction.

[0010] Preferably, the base substrate, sample holder, fixing end cap screw, and fixing screw are made of SUS310 material; the pressing plate and fixing end cap are made of tantalum material.

[0011] Compared with traditional technologies, the advantages of the anti-drop self-locking sample holder assembly for ultra-high vacuum coating of this invention are composed of two core innovations: "dual guidance + self-locking". Specifically, the sample holder adopts a dual-guide limiting structure, which, while achieving the anti-drop self-locking function, also offers advantages such as simple operation, high replacement efficiency, high high-temperature stability, and compatibility with ultra-high vacuum, as detailed below: 1. The base plate and sample holder feature a dual-guided limiting structure design, utilizing an arc-shaped guide groove and a guide limiting groove for the sample holder. Combined with the fixed end cap and pressure plate, this design achieves a self-locking function to prevent detachment and displacement of the sample holder assembly during the coating process, significantly improving structural stability. This invention is particularly suitable for applications where the sample coating area faces downwards, the coating process requires rotation around an axis, and a heat source is connected to the back of the sample.

[0012] 2. Compatible with high-temperature environments, a heating source can be installed on the back side of the sample holder coating area to promote surface reconstruction of deposited atoms, ensuring the density and functionality of the film during the coating process.

[0013] 3. The operation is simple and convenient. The sample holder features an arc-shaped guide groove and guide limiting groove, as well as a chamfered front end on the sample inlet side, a rounded corner for sample removal, and a chamfered inlet structure. The sample holder installation and removal process requires no complex operations, greatly reducing the probability of misoperation and increasing the efficiency of sample holder replacement, thereby improving the overall work efficiency of the coating process. The rounded corner for sample removal and the limitation of dimensional data are not only for conventional mechanical processing purposes such as preventing bumps, but are designed out of necessity for the complete use of the product. Without this angle, when the component needs to be removed, the right-angled edge would require very high positional accuracy to achieve the removal; otherwise, jamming would occur, preventing the sample holder from being removed, affecting not only the removal efficiency but also the product quality. Furthermore, when r > 1mm, the sample holder is prone to being thrown out by centrifugal force in extreme cases. In other words, the design of the rounded corner for sample removal not only facilitates sample removal and solves the problem of difficult removal without this design, but also avoids the theoretical risks of sample holder displacement and being thrown out due to unsuitable dimensions.

[0014] 4. The sample holder assembly fixing structure has no complex structural design, and reduces the number of parts while meeting the functional requirements. The structure is compact, saves internal space of the ultra-high vacuum chamber, reduces costs, and improves economic efficiency.

[0015] 5. The sample holder assembly is compatible with a variety of samples, has strong versatility, can meet the coating requirements of various samples, and has broad prospects for practical engineering applications. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the external structure of the present invention; Figure 2 This is a vertical cross-sectional view of the present invention; Figure 3 This is a schematic diagram of the base plate structure; Figure 4 This is a schematic diagram of the sample holder structure of the present invention; Figure 5 This is a schematic diagram of the self-locking state structure of the present invention; Figure 6 This is a schematic diagram illustrating the installation and disassembly process of the present invention; In the figure: 1-base plate, 2-sample holder, 3-fixed end cap, 4-sample, 5-fixed end cap screw, 6-pressing plate, 7-fixing screw, 8-arc guide plate, 9-tapered chamfer, 10-arc edge of arc guide groove for sample holder, 11-guide post, 12-slot spacing on the side of the sample inlet groove, 13-slot spacing on the opposite side of the sample inlet groove, 14-guide limiting groove, 15-rounded corner for sample withdrawal, 16-chamfer for sample inlet, 17-parallel chord, 18-pressing plate mounting hole, 19-locking block. Detailed Implementation

[0017] The present invention will now be described in detail with reference to the accompanying drawings and embodiments, but the present invention is not limited to specific examples.

[0018] like Figure 1 and 2 The present invention relates to an anti-detachment self-locking sample holder assembly for ultra-high vacuum coating, comprising a base mechanism and a sample holder mechanism. The base mechanism is used to fix the sample holder mechanism; such as Figure 3 As shown, the system includes a base plate 1 and a fixed end cap 3. The base plate 1 is annular, and the fixed end cap 3 is placed on the base plate 1 and fastened by the fixed end cap screws 5. Two arc-shaped guide grooves for the sample holder are formed between the fixed end cap 3 and the base plate 1. The height of the arc-shaped guide grooves for the sample holder is less than the thickness of the sample holder 2. The sample holder 2 is placed in the arc-shaped guide grooves for the sample holder. The sample holder 2 is in surface contact with the fixed end cap 3 and generates friction, which limits the radial displacement of the sample holder 2 and ensures that the position of the coating target area is controllable. The diameter of the arc edge 10 of the arc-shaped guide groove for the sample holder is the same as the diameter of the sample holder 2. The groove edge on the sample inlet side and the groove edge on the opposite side of the arc-shaped guide plate 8 are both straight edges. The groove edge spacing 12 on the sample inlet side of the arc-shaped guide groove for the sample holder is greater than the groove edge spacing 13 on the opposite side of the sample inlet. The purpose of this structural design is to obtain accurate and effective feedback after the sample holder 2 is installed in place.

[0019] The base plate 1 and the arc-shaped guide plate of the sample holder's arc-shaped guide groove are integrated into one structure. This integration of the arc-shaped guide plate with the base plate / fixed end cap is designed to ensure reliable self-locking. One key aspect of self-locking is that the height of the arc-shaped guide groove of the sample holder should be less than the thickness of the sample holder as a prerequisite for generating friction. Other methods of combining and fixing the structure are prone to assembly errors, and interference factors are affected by processing, assembly, and usage frequency, thus impacting the performance. The front end of the arc-shaped guide plate of the sample holder's arc-shaped guide groove on the sample inlet side is designed with a tapered chamfer 9, with an angle of 45° to the sample inlet direction. This facilitates the alignment of the sample holder 2 during sample installation and reduces the wear area during use.

[0020] The base plate 1 has a guide post 11 located between the feed groove sides. Together with the guide limiting groove 14 of the sample holder 2, it is the key to achieve self-locking and anti-dropping.

[0021] The sample holder 2 is used to support sample 4, the surface of which is the target area for ultra-high vacuum coating; for example Figure 4 As shown, the sample holder 2 is a circular strip with parallel chords 17 cut on both sides. The distance between the parallel chords is less than the distance 12 between the groove sides of the sample holder's arc-shaped guide groove on the sample inlet side, and greater than the distance 13 between the groove sides of the sample inlet side. The sample holder 2 has 3-6 pressing plate mounting holes 18, preferably 4 pressing plates. The pressing plate 6 is an elastic pressing plate. The pressing plate 6 is used to limit the sample 4. The pressing plate 6 is placed on the pressing plate mounting hole 18 and is installed on the sample holder 2 by fixing screws 7.

[0022] The sample holder 2 has a handle at one end of its rounded section to ensure the versatility of this component. Without this handle, versatility would be significantly reduced, limiting its practical engineering applications. The bottom rounded section has a locking block 19 with an approximately L-shaped guide groove 14. The guide post 11 on the base plate 1 is placed within the guide groove 14 and can move along it. The long side of the guide groove 14 is an arc-shaped groove with the same diameter as the sample holder 2, and the short side ends have sample inlet chamfers 16 on both sides. The sample inlet chamfer 16 has a size of C2×45°. The chamfer size is designed for smooth operation; feedback from actual use indicates that C2×45° is the most effective and smoothest parameter. The L-shaped bend has a sample retraction radius 15 with a size r=0.5mm, and a maximum of 1mm.

[0023] During assembly and use, the fixing end cap 3 is placed on the corresponding position on the base plate 1 and then tightened with the fixing end cap screws 5, while ensuring that the gap between it and the base plate 1 (the height of the arc-shaped guide groove of the sample holder) is less than the thickness of the sample holder 2. After the sample 4 is placed in the center area of ​​the sample holder 2, the pressure plate 6 is placed in the pressure plate mounting hole 18, and then the fixing screws 7 are installed. The sample 4 is fixed by the friction force generated by the elastic deformation of the pressure plate 6, wherein the magnitude of the friction force is greater than the centrifugal force generated by the rotation of the sample 4 around the axis, ensuring the stability of the movement process.

[0024] like Figure 6 After the sample holder 2 enters the base plate 1 along the sample inlet chamfer 16, it makes contact with the straight groove edge of the circular sample holder 2 and the base plate 1 respectively and then moves in a straight line. When the edge of the sample holder 2 contacts the sample holder arc guide groove of the base plate, it can no longer move and the sample holder 2 is in place.

[0025] like Figure 5 The guide post 11 of the base substrate 1 rotates along the approximately L-shaped guide limiting groove 14 of the sample holder 2. It stops rotating when its head contacts the arc-shaped guide limiting groove. The fixed end cap 3 generates friction after contacting the sample holder 2. During the coating process, the sample holder 2's probability of rotating with the base substrate 1 is greatly reduced due to this friction. Because the radius of the sample holder 2's retraction radius 15 is small, the sample holder 2 will not radially displace or detach without external radial force. This achieves the anti-detachment self-locking purpose of the sample holder assembly during the coating process.

[0026] The base substrate 1, sample holder 2, fixing end cap screw 5, and fixing screw 7 are made of SUS310 material; the fixing end cap 3 and pressure plate 6 are made of tantalum material. All of these materials have low outgassing rates, excellent performance at high temperatures, and are non-magnetic.

[0027] The base substrate 1 is connected to a silicon carbide heater temperature control device on its back, which promotes surface reconstruction of deposited atoms, transforming the originally disordered physical accumulation into ordered thin film growth, thus ensuring the density and functionality of the thin film. The base substrate 1 is connected to a driving device for spatial position adjustment, including dimensional adjustments such as XYZ three-dimensional motion and rotational motion.

[0028] The above examples are for illustrative purposes only and do not imply that the specific implementation of the invention is limited to the contents of the specification and the examples described above. For those skilled in the art, making all or part of the equivalent substitutions for the technical solutions and features described in the foregoing examples does not deviate from the scope of this invention. Therefore, this invention is not limited to the specific details and the examples described above.

Claims

1. A self-locking sample holder assembly for ultra-high vacuum coating, comprising a base mechanism and a sample holder mechanism, characterized in that... ； The base mechanism is used to fix the sample holder mechanism; it includes a base plate and a fixed end cap. The base plate is annular, and the fixed end cap is placed on the base plate and fastened by screws. Two arc-shaped guide grooves for the sample holder are formed between the fixed end cap and the base plate. The arc-shaped guide plate of the arc-shaped guide groove is integral with the base plate or integral with the fixed end cap. The inlet side groove edge and the opposite side groove edge of the arc-shaped guide plate are both straight edges. The height of the arc-shaped guide groove is less than the thickness of the sample holder. The diameter of the arc-shaped guide groove is the same as the diameter of the sample holder. The distance between the inlet side groove edges of the arc-shaped guide groove is greater than the distance between the opposite side groove edges. Guide posts are provided on the base plate between the opposite side groove edges. The sample holder mechanism is used to carry the sample; it includes a sample holder and a pressure plate. The pressure plate is installed on the edge of the sample holder. The sample holder is a circular strip with parallel chords cut on both sides. The distance between the parallel chords is smaller than the distance between the sides of the sample holder's arc-shaped guide groove on the sample inlet side, but larger than the distance between the sides of the sample inlet side. The sample holder is placed in the arc-shaped guide groove of the sample holder, and the sample holder contacts the fixed end cap surface and generates friction. One end of the sample holder has a handle, and the other end has a locking block. The locking block has an approximately L-shaped guide limiting groove. The long side of the guide limiting groove is an arc-shaped groove with the same diameter as the sample holder, and the short side ends have sample inlet chamfers on both sides. The sample inlet chamfer size is C2×45°. The approximately L-shaped bend of the guide limiting groove has a sample withdrawal radius with a withdrawal radius size r=0.5mm-1mm. The guide post on the base plate is placed in the guide limiting groove and can move along the guide limiting groove.

2. The anti-detachment self-locking sample holder assembly for ultra-high vacuum coating according to claim 1, characterized in that; The sample holder has a pressure plate mounting hole. The pressure plate is an elastic pressure plate. The pressure plate is placed on the pressure plate mounting hole and installed on the sample holder by fixing screws.

3. The anti-detachment self-locking sample holder assembly for ultra-high vacuum coating according to claim 1, characterized in that; The sample holder has 3-6 pressure plates spaced apart.

4. The anti-detachment self-locking sample holder assembly for ultra-high vacuum coating according to claim 1, characterized in that; The sample holder's arc-shaped guide groove has a tapered chamfer at the front end of the sample inlet side, with the angle being 10° to 60° with the sample inlet direction.

5. The anti-detachment self-locking sample holder assembly for ultra-high vacuum coating according to claim 1, characterized in that; The base plate, sample holder, fixing end cap screws and fixing screws are made of SUS310 material; the pressing plate and fixing end cap are made of tantalum material.

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