Transport device, vacuum evaporation apparatus, and control method for vacuum evaporation apparatus

Abstract

Embodiments of the present application provide a transport device, a vacuum evaporation device and a control method of the vacuum evaporation device. The transport device is used for supporting a substrate to move in the vacuum evaporation device. The transport device comprises a plurality of driving units, a plurality of pressure detection members and a control unit. The plurality of driving units are arranged at intervals along a first direction. Each driving unit comprises driving rollers arranged oppositely along a second direction. The driving rollers of the driving unit are respectively used for supporting opposite sides of the substrate along the second direction and driving the substrate to move along the first direction. The first direction and the second direction are perpendicular. The plurality of pressure detection members are arranged on the driving rollers. The pressure detection members are used for detecting pressure acting on the driving rollers and generating pressure information. The control unit is in signal connection with the plurality of pressure detection members. The control unit is used for generating movement information about the substrate transported by the transport device according to the pressure information. In the present application, the transport device can accurately detect movement information of the substrate in a vacuum environment.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to a transport device, a vacuum evaporation equipment, and a control method for the vacuum evaporation equipment. Background Technology

[0002] Vacuum evaporation equipment is a device that evaporates and deposits materials onto the surface of a substrate in a vacuum environment using an evaporation source. It is widely used in the semiconductor manufacturing industry.

[0003] During the processing of substrates in vacuum evaporation equipment, the substrate moves relative to the evaporation source, which facilitates the uniform deposition of evaporation material on a large area of ​​the substrate. If the substrate deviates from the preset movement path during movement, the evaporation material will be deposited in the wrong area, thus affecting product quality. In related technologies, optical equipment is used to detect whether the substrate deviates from the movement path in a vacuum environment. However, the transport device for transporting the substrate may deform in a vacuum environment, causing the position of the substrate on the transport device to change, making it impossible for the optical equipment to accurately detect the substrate position. Summary of the Invention

[0004] This application provides a transportation device, a vacuum evaporation equipment, and a control method for the vacuum evaporation equipment, aiming to improve the technical problem that the substrate position cannot be effectively detected during the evaporation process of the relevant vacuum evaporation equipment.

[0005] An embodiment of the first aspect of this application provides a transport device for supporting a substrate to move within a vacuum evaporation equipment; the transport device includes:

[0006] Multiple driving units are spaced apart along a first direction. Each driving unit includes driving rollers that are arranged opposite each other along a second direction. The driving rollers of the driving units are respectively used to support the opposite sides of the substrate along the second direction and to drive the substrate to move along the first direction. The first direction and the second direction are perpendicular.

[0007] Multiple pressure detection elements are respectively set on the drive roller. The pressure detection elements are used to detect the pressure of the substrate on the drive roller and generate pressure information.

[0008] The control unit is connected to multiple pressure sensors and generates movement information about the substrate being transported by the transport device based on the pressure information generated by each pressure sensor.

[0009] According to an embodiment of the first aspect of this application, the driving unit includes a first driving roller and a second driving roller disposed opposite to each other along a second direction, the first driving roller being spaced apart along a first direction, and the second driving roller being spaced apart along a first direction.

[0010] The pressure detection element is mounted on the first drive roller.

[0011] According to an embodiment of the first aspect of this application, a plurality of pressure detection elements are respectively disposed on the first drive roller and the second drive roller.

[0012] According to an embodiment of the first aspect of this application, the length of the substrate carried on the driving unit along the first direction is H1, and the spacing between adjacent driving units along the first direction is H2, where H1 > H2.

[0013] According to the implementation of the first aspect of this application, H1 > 3 * H2.

[0014] According to an embodiment of the first aspect of this application, the drive roller includes:

[0015] The roller body has a surface designed to contact the edge of the substrate.

[0016] A drive unit, connected to the roller body, is used to drive the roller body to rotate axially in a second direction.

[0017] According to an embodiment of the first aspect of this application, a pressure detection element is disposed on the roller body;

[0018] According to an embodiment of the first aspect of this application, the pressure detection element is disposed at one end of the roller body away from the drive element.

[0019] According to an embodiment of the first aspect of this application, the roller body has a first groove, and a pressure detection element is disposed in the first groove and surrounds the roller body.

[0020] According to an embodiment of the first aspect of this application, the drive roller further includes a signal line embedded in the roller body, one end of the signal line being electrically connected to a pressure detection element, and the other end of the signal line being electrically connected to a control unit.

[0021] According to an embodiment of the first aspect of this application, the drive roller further includes a conductive ring connected to a signal line. The conductive ring is disposed on the outer side of the roller body and is electrically connected to the signal line and a control unit. The drive member is used to drive the roller body to rotate relative to the conductive ring.

[0022] According to an embodiment of the first aspect of this application, the pressure detection element is a piezoresistive sensor.

[0023] An embodiment of the second aspect of this application provides a vacuum evaporation apparatus, including a transport device as provided in the first aspect.

[0024] An embodiment of the third aspect of this application provides a control method for a vacuum evaporation deposition apparatus, wherein the vacuum evaporation deposition apparatus is as provided in the second aspect, and the method includes:

[0025] Control multiple drive units to drive the substrate to move along a first direction;

[0026] Based on the pressure information generated by the pressure detection device, information about the movement of the substrate transported by the transport device is generated.

[0027] According to an embodiment of the third aspect of this application, the plurality of pressure detection elements includes a first detection element disposed on the same side of the plurality of drive units; based on the pressure information generated by the pressure detection elements, movement information regarding the substrate transported by the transport device is generated, including:

[0028] Based on the pressure information generated by multiple first detection elements, information about the movement of the two ends of the substrate that are positioned opposite each other along a first direction is generated.

[0029] According to an embodiment of the third aspect of this application, a plurality of pressure detection elements include a second detection element and a third detection element disposed opposite to each other along a first direction; based on the pressure information generated by the pressure detection elements, movement information regarding the substrate transported by the transport device is generated, including:

[0030] Based on the pressure information generated by the second and third detectors that are positioned opposite each other along the first direction, information about the movement of the two ends of the substrate positioned opposite each other along the second direction is generated.

[0031] In the transportation device, vacuum evaporation equipment, and control method of vacuum evaporation equipment provided in the embodiments of this application, multiple driving units are arranged at intervals along a first direction. Each driving unit includes driving rollers arranged opposite each other along a second direction, such that the driving rollers are used to support the opposite sides of the substrate along the second direction and to drive the substrate to move along the first direction. By setting pressure detection elements on the driving rollers, the pressure detection elements can detect the pressure acting on the driving rollers and generate pressure information. This pressure information indicates that the driving rollers are subjected to pressure from the substrate. The pressure of the substrate does not change with the vacuum environment, so that the control unit can accurately generate movement information of the substrate transported by the transportation device based on the pressure information generated by each pressure detection element. Attached Figure Description

[0032] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the embodiments of this application will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0033] Figure 1 This is a schematic diagram of the planar structure of a transportation device provided in some embodiments of this application;

[0034] Figure 2 This is a schematic diagram of the planar structure of the transport device support substrate provided in some embodiments of this application during vapor deposition;

[0035] Figure 3This is a planar structure of the transport device support base plate when it moves, provided in some embodiments of this application;

[0036] Figure 4 This is a planar structure of the transport device support base plate when it moves, provided in some embodiments of this application;

[0037] Figure 5 This is a partial structural schematic diagram of a transportation device provided in some embodiments of this application.

[0038] Explanation of reference numerals in the attached figures:

[0039] 20. Chamber; 200. Substrate;

[0040] 1. Drive unit; 11. Drive roller; 11a. First drive roller; 11b. Second drive roller; 111. Roller body; 112. Drive component; 113. First groove; 114. Signal line; 115. Conductive ring; 12. Drive component;

[0041] 2. Pressure detection element; 3. Control unit;

[0042] X, first direction; Y, second direction; S, movement path. Detailed Implementation

[0043] The features and exemplary embodiments of various aspects of this application will now be described in detail. To make the objectives, technical solutions, and advantages of this application clearer, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only configured to explain this application and are not configured to limit this application. For those skilled in the art, this application can be implemented without some of these specific details. The following description of the embodiments is merely to provide a better understanding of this application by illustrating examples of this application.

[0044] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising..." does not exclude the presence of additional identical elements in the process, method, article, or apparatus that includes the element.

[0045] It should be understood that when describing the structure of a component, when referring to a layer or region as being "above" or "on top of" another layer or region, it can mean that it is directly above the other layer or region, or that it contains other layers or regions between it and the other layer or region. Furthermore, if the component is flipped over, that layer or region will be located "below" or "under" the other layer or region.

[0046] During the processing of substrates in vacuum evaporation equipment, the substrate moves relative to the evaporation source, which facilitates the uniform deposition of evaporation material on a large area of ​​the substrate. If the substrate deviates from the preset movement path during movement, the evaporation material will be deposited in the wrong area, thus affecting product quality. In related technologies, optical equipment is used to detect whether the substrate deviates from the movement path in a vacuum environment. However, the transport device for transporting the substrate may deform in a vacuum environment, causing the position of the substrate on the transport device to change, making it impossible for the optical equipment to accurately detect the substrate position.

[0047] For example, when manufacturing a display panel, multiple material layers need to be sequentially deposited on a substrate. When the target material layer is deposited on the substrate using a vacuum evaporation device, an optical device is used to detect whether the substrate deviates from the moving path in the vacuum environment. If the transport device deforms in the vacuum environment, the positions of the transport device and the substrate will change together, which will cause the optical device to be unable to accurately detect the position of the substrate. As a result, it will be impossible to adjust the substrate or the evaporation source according to the detected substrate position, causing the evaporation material to evaporate to the wrong area.

[0048] To address the aforementioned problems, this application provides a control method for a transport device, a vacuum evaporation equipment, and a vacuum evaporation equipment. The following description, in conjunction with the accompanying drawings, will illustrate various embodiments of the control method for the transport device, the vacuum evaporation equipment, and the vacuum evaporation equipment.

[0049] The first aspect of this application provides a transportation device, such as... Figure 1 , Figure 2 and Figure 3 As shown, the transport device is used to support the substrate 200 to move in the vacuum evaporation equipment; the transport device includes multiple drive units 1, multiple pressure detection elements 2 and control unit 3. The multiple drive units 1 are spaced apart along the first direction X. The drive unit 1 includes drive rollers 11 that are arranged opposite each other along the second direction Y. The drive rollers 11 of the drive unit 1 are respectively used to support the opposite sides of the substrate 200 along the second direction Y and to drive the substrate 200 to move along the first direction X. The first direction X and the second direction Y are perpendicular.

[0050] Multiple pressure detection elements 2 are disposed on the drive roller 11. The pressure detection elements 2 are used to detect the pressure acting on the drive roller 11 and generate pressure information. The control unit 3 is signal-connected to the multiple pressure detection elements 2. The control unit 3 is used to generate movement information about the substrate 200 transported by the transport device based on the pressure information generated by each pressure detection element 2.

[0051] This application provides a transport device applicable to a vacuum evaporation deposition apparatus. This apparatus can be used to fabricate array substrates, display panels, and display devices having the aforementioned array substrates and display panels. During the production of the display panel, the vacuum evaporation deposition apparatus can fabricate various functional layers, such as light-emitting layers, electron injection layers, electron transport layers, hole injection layers, and hole transport layers. In some embodiments, when fabricating the light-emitting layer, a mask with an opening is stacked on one side of the substrate 200 to obtain a composite component. The transport device transports the composite component to the evaporation chamber 20, where the evaporation material is deposited onto the substrate 200 through the opening to form the light-emitting layer. In other embodiments, when fabricating the light-emitting layer, an isolation structure with an isolation opening is provided on the substrate 200. The transport device transports the substrate 200 to the evaporation chamber 20, where the evaporation material is deposited within the isolation opening. The evaporation material outside the isolation opening is removed to form the light-emitting layer.

[0052] In the fabrication of display panels, a substrate 200 is used as a carrier. Multiple display panels are simultaneously fabricated on the substrate 200 to obtain a master panel. The master panel is then cut to obtain multiple independent display panels. This manufacturing method, which involves fabricating a master panel followed by cutting, significantly improves production efficiency and material utilization. The multiple material layers on the substrate 200 are the foundation for the functionality of the display panel. During the fabrication process, multiple material layers are sequentially stacked on the substrate 200 along the thickness direction of the display panel to form the required functional structure, which includes, but is not limited to, thin-film transistors, light-emitting units, and signal lines. In this application, the substrate 200 supported by the transport device can be an intermediate component at any stage in the fabrication of the target product. That is, this application does not limit the material layers disposed on the substrate 200, the structures assisting in vapor deposition, or the material layers to be vapor-deposited. The structure assisting in vapor deposition can be a photomask.

[0053] Vacuum evaporation equipment may include multiple chambers 20, including a sample inlet chamber, a transfer chamber, a pretreatment chamber, an evaporation chamber, a cooling chamber, etc. The multiple drive units 1 provided in this application can be used to drive the substrate 200 from one chamber 20 to another, or to move within a single chamber 20. Those skilled in the art can configure the drive units 1 according to the required movement path S for processing the substrate 200, thereby enabling the transport device to drive the substrate 200 to move within the vacuum evaporation equipment along the configured movement path S.

[0054] For example, the drive unit 1 supports the substrate 200 and drives the substrate 200 to move from the transfer chamber 20 to the evaporation chamber 20.

[0055] For example, the drive unit 1 supports the substrate 200 and drives the substrate 200 to move relative to the evaporation source within the evaporation chamber 20.

[0056] Multiple drive units 1 are spaced apart along a first direction X, and the multiple drive units 1 work together to drive the substrate 200 to move along the first direction X. The substrate 200 can be supported on multiple drive units 1 at the same time to improve the stability of the substrate 200 on the transport device.

[0057] A driving unit 1 may include two driving rollers 11, which are arranged opposite each other along the second direction Y. A driving unit 1 may also include multiple driving rollers 11, which are arranged opposite each other along the second direction Y. The driving roller 11 located on the same side of the substrate 200 is a first driving roller 11a, and the driving roller 11b located on the other side of the substrate 200 is a second driving roller 11b. The first driving roller 11a and the second driving roller 11b are spaced apart along the second direction Y. The oppositely arranged first driving roller 11a and the second driving roller 11b are used to support the edges of the substrate 200, so that when the driving unit 1 is located in the evaporation chamber 20, the driving unit 1 will not obstruct the deposition of evaporation material onto the substrate 200. The first driving roller 11a and the second driving roller 11b can be driven to rotate by a rotary motor, and the rotating first driving roller 11a and the second driving roller 11b drive the substrate 200 to move along the first direction X.

[0058] When a mask is stacked on the substrate 200, the mask directly contacts the first drive roller 11a and the second drive roller 11b, which are disposed opposite to each other. For example... Figure 2 As shown, when the substrate 200 is not stacked with a mask, the substrate 200 directly contacts the first drive roller 11a and the second drive roller 11b that are disposed opposite to each other.

[0059] When the substrate 200 is supported on the drive roller 11, the gravity of the substrate 200 acts on the drive roller 11. The pressure detection device 2 provided on the drive roller 11 can detect the pressure of the substrate 200 acting on the drive roller 11 and generate pressure information.

[0060] When the substrate 200 is centrally placed on the first drive roller 11a and the second drive roller 11b, which are arranged opposite each other along the second direction Y, the pressure detected by the pressure detection element 2 on the first drive roller 11a and the second drive roller 11b is the same. When the substrate 200 is biased towards the first drive roller 11a, the pressure detected by the pressure detection element 2 on the first drive roller 11a is greater than the pressure detected by the pressure detection element 2 on the second drive roller 11b. When the substrate 200 is biased towards the second drive roller 11b, the pressure detected by the pressure detection element 2 on the first drive roller 11a is less than the pressure detected by the pressure detection element 2 on the second drive roller 11b. The control unit 3 can analyze and generate movement information about the substrate 200 based on the pressure information detected by the pressure detection element 2 on the drive roller 11a, which is arranged opposite each other along the first direction X. This movement information may include the side of the substrate 200 biased towards the first drive roller 11a in the transport device, the side of the substrate 200 biased towards the second drive roller 11b in the transport device, and the degree of deviation.

[0061] Multiple drive rollers 11 located on the same side support the substrate 200 together. When the first end of the substrate 200 shifts toward the side where the first drive roller 11a is located, and remains centered with respect to the second end located opposite the first end along the first direction X, the pressure detected by the pressure detection element 2 on the first drive roller 11a supporting the first end is greater than the pressure detected by the pressure detection element 2 on the first drive roller 11a supporting the second end. The control unit 3 can analyze and generate movement information about the substrate 200 based on the pressure information detected by the pressure detection elements 2 on the multiple drive rollers 11 located on the same side. This movement information may include the direction and degree of deviation of the substrate 200 at both ends along the second direction Y.

[0062] In this embodiment, multiple drive units 1 are spaced apart along the first direction X. Each drive unit 1 includes drive rollers 11 arranged opposite each other along the second direction Y. The drive rollers 11 are used to support the opposite sides of the substrate 200 along the second direction Y and to drive the substrate 200 to move along the first direction X. By setting pressure detection elements 2 on the drive rollers 11, the pressure detection elements 2 can detect the pressure acting on the drive rollers 11 and generate pressure information. This pressure information indicates that the drive rollers 11 are subjected to pressure from the substrate 200. The pressure of the substrate 200 does not change with the vacuum environment, so that the control unit can accurately generate movement information of the substrate 200 transported by the transport device based on the pressure information generated by each pressure detection element 2.

[0063] Please see Figure 4In some embodiments, the drive unit 1 includes a first drive roller 11a and a second drive roller 11b arranged opposite to each other along the second direction Y, a plurality of first drive rollers 11a are spaced apart along the first direction X, a plurality of second drive rollers 11b are spaced apart along the first direction X, and a pressure detection element 2 is disposed on the first drive roller 11a.

[0064] The pressure detection element 2 can be installed only on the drive rollers 11 located on the same side among the multiple drive rollers 11. When the pressure information detected by the pressure detection element 2 is greater than a preset threshold, it indicates that the substrate 200 is shifted to the side of the drive roller 11 on which the pressure detection element 2 is installed; when the pressure information detected by the pressure detection element 2 is less than the preset threshold, it indicates that the substrate 200 is shifted to the side of the drive roller 11 without the pressure detection element 2. When the pressure information detected by multiple pressure detection elements 2 is not the same, it indicates that the overall shift direction and degree of the substrate 200 along the first direction X are inconsistent.

[0065] For example, the first end of the substrate 200 is offset towards the first drive roller 11a, and the second end of the substrate 200 is offset towards the second drive roller 11b. The gravity generated by the first end of the substrate 200 is applied more to the first drive roller 11a, and the gravity generated by the second end of the substrate 200 is applied more to the second drive roller 11b. The pressure information detected by the pressure detection element 2 for supporting the first end is greater than a preset threshold of the pressure information detected by the pressure detection element 2 for supporting the second end. Based on this pressure information, movement information is generated indicating that the first end of the substrate 200 is offset towards the first drive roller 11a and the second end is offset towards the second drive roller 11b. The position of the substrate 200 is adjusted according to this movement information.

[0066] Please see Figure 3 In some embodiments, multiple pressure detection elements 2 are respectively disposed on the first drive roller 11a and the second drive roller 11b, so that the substrate 200 can be determined to be offset towards the first drive roller 11a or towards the second drive roller 11b based on the pressure information generated by the pressure detection element 2 disposed on the first drive roller 11a and the pressure information generated by the pressure detection element 2 disposed on the second drive roller 11b.

[0067] For example, the substrate 200 is shifted to the side of the first drive roller 11a, and more of the weight of the substrate 200 is applied to the first drive roller 11a. The pressure information detected by the pressure detection device 2 is greater than a preset threshold. Based on the pressure information, movement information of the substrate 200 shifting to the side of the first drive roller 11a is generated, and the position of the substrate 200 is adjusted according to the movement information.

[0068] In some embodiments, the length of the substrate 200 supported on the driving unit 1 along the first direction X is H1, and the spacing between adjacent driving units 1 along the first direction X is H2, where H1 > H2.

[0069] The pressure detection element 2 can be disposed on each drive roller 11 or on some drive rollers 11. By setting H1 > H2, at least two of the multiple pressure detection elements 2 located on the same side can detect the pressure exerted by the substrate 200 on the drive roller 11. Thus, the deviation direction and degree of the substrate 200 from the relative movement path of its two ends in the first direction X can be analyzed based on the pressure information generated by the at least two pressure detection elements 2.

[0070] In some embodiments, H1 > 3 * H2, such that when the transport device transports the substrate 200, at least three pressure detection elements 2 can detect the pressure of the substrate 200 acting on the drive roller 11, so as to analyze the deviation direction and degree of the two ends of the substrate 200 relative to the moving path in the first direction X through the pressure information generated by the multiple pressure detection elements 2.

[0071] Please refer to the following: Figure 5 In some embodiments, the drive roller 11 includes a roller body 111 and a drive member 112. The surface of the roller body 111 is used to contact the edge of the substrate 200. The drive member 112 is connected to the roller body 111 and is used to drive the roller body 111 to rotate axially in a second direction Y.

[0072] By setting multiple driving elements 112, each driving element 112 can control the roller 111 to rotate at different speeds, thereby adjusting the roller 111 to rotate in opposite directions or at different speeds, so as to drive the substrate 200 to move out of the stuck position.

[0073] In some embodiments, the pressure detection element 2 is disposed on the roller body 111.

[0074] The substrate 200 can be placed directly on the pressure detection element 2. Pressure is applied to the pressure detection element 2 through the substrate 200, causing the pressure-sensitive resistor of the pressure detection element 2 to deform under pressure, resulting in a change in its resistance value. By measuring the change in resistance value, the pressure detection element 2 generates pressure information based on the resistance value.

[0075] The pressure detection element 2 can be a stress-based sensor. The substrate 200 can be placed on the roller 111. When the roller 111 is subjected to pressure from the substrate 200, it will undergo a slight deformation, which will be captured by the pressure detection element 2. The pressure detection element 2 converts the deformation into pressure information.

[0076] In some embodiments, the pressure detection element 2 is disposed at the end of the roller body 111 away from the drive element 112 to ensure that the roller body 111 supported by the drive roller 11 can directly contact the substrate 200.

[0077] In some embodiments, the roller body 111 has a first groove 113, and the pressure detection element 2 is disposed in the first groove 113 and surrounds the roller body 111.

[0078] The pressure detection element 2 is arranged around the roller body 111 so that the pressure detection element 2 can detect the pressure applied by the substrate 200 when the roller body 111 rotates to any angle.

[0079] Optionally, the pressure detection element 2 is disposed in the first groove 113, and the outer surface of the pressure detection element 2 is flush with the outer surface of the roller body 111, so as to avoid the pressure detection element 2 being separated from the substrate 200 when the roller body 111 supports the substrate 200, so as to ensure that the pressure detection element 2 can directly contact the substrate 200.

[0080] In some embodiments, the drive roller 11 further includes a signal line 114 embedded in the roller body 111, one end of the signal line 114 being electrically connected to the pressure detection element 2, and the other end of the signal line 114 being electrically connected to the control unit.

[0081] The signal line 114 can be disposed on the roller body 111 along the first direction X. The signal line 114 can be made of a conductive material, and the roller body 111 can be made of an insulating material, so that the signal line 114 can be directly formed on the roller body 111.

[0082] In some embodiments, the drive roller 11 further includes a conductive ring 115 connected to the signal line 114. The conductive ring 115 is disposed on the outer side of the roller body 111 and is electrically connected to the signal line 114 and the control unit. The drive member 112 is used to drive the roller body 111 to rotate relative to the conductive ring 115.

[0083] The conductive ring 115 can be arranged around the drive roller 11, or it can be arranged around a portion of the drive roller 11. The conductive ring 115 contacts the end of the signal line 114 that is away from the pressure detection element 2. The conductive ring 115 is electrically connected to the signal line 114 and the control unit. When the drive element 112 drives the roller 111 to rotate, the conductive ring 115 remains stationary and keeps in contact with the rotating signal line 114, so that the pressure detection element 2, the signal line 114, the conductive ring 115 and the control unit are electrically connected in sequence.

[0084] In some embodiments, the pressure detection element 2 is a piezoresistive sensor. When the piezoresistive sensor is subjected to force, the resistivity of the piezoresistive sensor changes, and the current output by the piezoresistive sensor changes. The measured pressure information can be calculated from the information of this changing current.

[0085] Please see Figures 1 to 5 The second aspect of this application also provides a vacuum evaporation apparatus, which includes the transport device as described in the first aspect.

[0086] Vacuum evaporation equipment may include multiple chambers 20, including a sample introduction chamber, a transfer chamber, a pretreatment chamber, an evaporation chamber, and a cooling chamber. The sample introduction chamber serves as the interface between the vacuum evaporation equipment and the external environment, using a vacuum and gas purification system to transfer the substrate 200 from the atmospheric environment to a vacuum environment, preventing direct exposure of the substrate 200 to atmospheric pollution. The transfer chamber acts as a transit station for transferring the substrate 200 between different chambers 20, maintaining a high vacuum environment to ensure the substrate 200 remains uncontaminated during transport. The pretreatment chamber is used to clean or treat the surface of the substrate 200 using processes such as plasma cleaning and heating degassing, effectively improving the adhesion between the evaporation material and the substrate 200. The evaporation chamber is used to heat and deposit the evaporation material onto the surface of the substrate 200 in a vacuum environment using an evaporation source. The evaporation source can employ methods such as resistance heating, electron beam heating, or laser heating to achieve material evaporation. The cooling chamber is used to cool the substrate 200 after vapor deposition, preventing thermal stress or oxidation when the high-temperature substrate 200 is exposed to the atmosphere. The driving unit 1 provided in this application can be used to drive the substrate 200 from the sample injection chamber into the evaporation chamber, from the transfer chamber into the evaporation chamber, and from the pretreatment chamber into the evaporation chamber. Those skilled in the art can set the driving unit 1 according to the required movement path S of the substrate 200, so that the substrate 200 moves along the required movement path S in the vacuum vapor deposition equipment.

[0087] In this embodiment, multiple drive units 1 are spaced apart along the first direction X. Each drive unit 1 includes drive rollers 11 arranged opposite each other along the second direction Y. The drive rollers 11 are used to support the opposite sides of the substrate 200 along the second direction Y and to drive the substrate 200 to move along the first direction X. By setting pressure detection elements 2 on the drive rollers 11, the pressure detection elements 2 can detect the pressure acting on the drive rollers 11 and generate pressure information. This pressure information indicates that the drive rollers 11 are subjected to pressure from the substrate 200. The pressure of the substrate 200 does not change with the vacuum environment, so that the control unit can accurately generate movement information of the substrate 200 transported by the transport device based on the pressure information generated by each pressure detection element 2.

[0088] Since the vacuum evaporation equipment provided in the second aspect of this application includes the transport device of any of the embodiments of the first aspect described above, the vacuum evaporation equipment provided in the second aspect of this application has the beneficial effects of the transport device of any of the embodiments of the first aspect described above, which will not be repeated here.

[0089] An embodiment of the third aspect of this application also provides a control method for a vacuum evaporation deposition apparatus, the vacuum evaporation deposition apparatus including the transport device described above, the method comprising:

[0090] S110, control multiple drive units 1 to drive the substrate 200 to move along the first direction X;

[0091] S120: Based on the pressure information generated by the pressure detection element 2, movement information about the base plate 200 transported by the transport device is generated.

[0092] The vacuum evaporation equipment can be the vacuum evaporation equipment provided in the embodiments of the second aspect above.

[0093] By setting multiple drive units 1 spaced apart along the first direction X, each drive unit 1 includes drive rollers 11 arranged opposite each other along the second direction Y, such that the drive rollers 11 are respectively used to support the opposite sides of the substrate 200 along the second direction Y and to drive the substrate 200 to move along the first direction X; by setting pressure detection elements 2 on the drive rollers 11, the pressure detection elements 2 can detect the pressure acting on the drive rollers 11 and generate pressure information, which indicates that the drive rollers 11 are subjected to pressure from the substrate 200. The pressure of the substrate 200 does not change with the vacuum environment, so that the control unit can accurately generate movement information of the substrate 200 transported by the transport device based on the pressure information generated by each pressure detection element 2.

[0094] Since the control method for the vacuum evaporation equipment provided in the third aspect of this application includes the vacuum evaporation equipment of any of the embodiments of the second aspect described above, the control method for the vacuum evaporation equipment provided in the third aspect of this application has the beneficial effects of the vacuum evaporation equipment of any of the embodiments of the second aspect described above, and will not be repeated here.

[0095] In some embodiments, the plurality of pressure sensing elements 2 include a first sensing element disposed on the same side of the plurality of drive units 1; S120 includes:

[0096] S210, based on the pressure information generated by multiple first detection elements, generate movement information about the two ends of the substrate 200 that are relatively positioned along the first direction X.

[0097] Multiple first detection elements are disposed on the drive roller 11 located on the same side of the multiple drive rollers 11. The multiple first detection elements can be disposed on the first drive roller 11a or on the second drive roller 11b.

[0098] For example, when the pressure information detected by the first detection element at the first end of the support substrate 200 is greater than the pressure information detected by the first detection element at the second end of the support substrate 200, movement information about the first end of the substrate 200 shifting toward the drive roller 11 on which the first detection element is provided is generated.

[0099] When the pressure information detected by the first detector at the first end of the support substrate 200 is equal to the pressure information detected by the first detector at the second end of the support substrate 200, movement information about the substrate 200 without offset along the first direction is generated.

[0100] When the pressure information detected by the first detector at the first end of the support substrate 200 is less than the pressure information detected by the first detector at the second end of the support substrate 200, a shift is generated regarding the first end of the substrate 200 toward the side of the drive roller 11 where no pressure detector 2 is provided.

[0101] In some embodiments, the plurality of pressure sensing elements 2 include a second sensing element and a third sensing element disposed opposite to each other along a first direction X; S120 includes:

[0102] S310, based on the pressure information generated by the second and third detectors that are positioned opposite each other along the first direction X, movement information about the two ends of the substrate 200 that are positioned opposite each other along the second direction Y is generated.

[0103] The second and third detection elements can be respectively disposed on the first drive roller 11a and the second drive roller 11b, and the first detection element can be reused as either the second or the third detection element. By comparing the pressure information generated by the second and third detection elements, movement information about the two ends of the substrate 200 disposed opposite each other along the second direction Y can be generated.

[0104] For example, if the pressure information generated by the second detector is greater than the pressure information generated by the third detector, movement information about the substrate 200 shifting towards the direction of the second detector can be generated.

[0105] When the pressure information generated by the second detector is equal to the pressure information generated by the third detector, movement information about the substrate 200 moving along the set path can be generated.

[0106] If the pressure information generated by the second detector is less than the pressure information generated by the third detector, then movement information about the substrate 200 shifting towards the direction of the third detector can be generated.

[0107] In some embodiments, it also includes:

[0108] Based on the movement information, the rotation direction and rotation speed of the first drive roller 11a and the second drive roller 11b are controlled to adjust the movement direction of the substrate 200.

[0109] When the pressure information detected by the pressure detection element 2 remains unchanged within a preset time, it indicates that the substrate 200 is stuck. By controlling the first drive roller 11a and the second drive roller 11b to rotate in opposite directions, the substrate 200 is moved out of the stuck position, so that the vacuum evaporation equipment in a vacuum environment does not need to be turned on to adjust the position of the substrate 200.

[0110] When the mobile information display substrate 200 shifts to one side, the rotation speed of the drive roller 11 on that side can be increased to adjust the moving direction of the substrate 200. The amount of change in the rotation speed of the drive roller 11 can be set according to the amount of shift of the substrate 200.

[0111] In some embodiments, it also includes:

[0112] When the pressure information detected by the fourth pressure detection element among multiple pressure detection elements 2 is less than the pressure information detected by the pressure detection elements 2 on both sides of the fourth pressure detection element within a preset time, fault information about the fourth pressure detection element is generated.

[0113] The pressure information detected by the pressure detection elements 2 on the multiple drive rollers 11 used to support the substrate 200 is the same, gradually increases, or gradually decreases. When the pressure information detected by the fourth detection element among the multiple pressure detection elements 2 is less than the pressure information detected by the pressure detection elements 2 on both sides of the fourth detection element within a preset time, it indicates that the pressure detection element 2 is not making normal contact with the substrate 200, and it is necessary to adjust the fourth detection element and set the drive roller 11 of the fourth detection element according to the fault information.

[0114] The embodiments described above are not exhaustive and do not limit the invention to specific examples. Clearly, many modifications and variations can be made based on the above description. These embodiments are selected and specifically described in this specification to better explain the principles and practical applications of this application, thereby enabling those skilled in the art to effectively utilize this application and its modifications. This application is limited only by the claims and their full scope and equivalents.

Claims

1. A transport device, characterized in that, The transport device is used to support the movement of the substrate in the vacuum evaporation equipment; the transport device includes: Multiple driving units are spaced apart along a first direction. Each driving unit includes driving rollers arranged opposite each other along a second direction. The driving rollers of each driving unit are respectively used to support opposite sides of the substrate along the second direction and to drive the substrate to move along the first direction. The first direction and the second direction are perpendicular. Multiple pressure detection elements are respectively disposed on the drive roller, and the pressure detection elements are used to detect the pressure exerted by the substrate on the drive roller and generate pressure information; A control unit is connected to the plurality of pressure detection elements and is used to generate movement information about the substrate being transported by the transport device based on the pressure information generated by each of the pressure detection elements.

2. The transport device according to claim 1, characterized in that, The driving unit includes a first driving roller and a second driving roller arranged opposite to each other along a second direction, a plurality of the first driving rollers being spaced apart along the first direction, and a plurality of the second driving rollers being spaced apart along the first direction; The pressure detection element is disposed on the first drive roller; Or multiple pressure detection elements are respectively disposed on the first drive roller and the second drive roller.

3. The transport device according to claim 1, characterized in that, The length of the substrate supported on the driving unit along the first direction is H1, and the spacing between adjacent driving units along the first direction is H2, where H1 > H2. Preferably, H1 > 3 * H2.

4. The transport device according to claim 1, characterized in that, The drive roller includes: A roller body, the surface of which is used to contact the edge of the substrate; A driving component is connected to the roller body, and the driving component is used to drive the roller body to rotate axially in the second direction; Preferably, the pressure detection element is disposed on the roller body; Preferably, the pressure detection element is disposed at the end of the roller body opposite to the drive element.

5. The transport device according to claim 4, characterized in that, The roller body has a first groove, and the pressure detection element is disposed in the first groove and surrounds the roller body; Preferably, the drive roller further includes a signal line embedded in the roller body, one end of the signal line being electrically connected to the pressure detection element, and the other end of the signal line being electrically connected to the control unit; Preferably, the drive roller further includes a conductive ring connected to the signal line, the conductive ring being disposed on the outer side of the roller body, the conductive ring being electrically connected to the signal line and the control unit, and the drive member being used to drive the roller body to rotate relative to the conductive ring.

6. The transport device according to claim 1, characterized in that, The pressure detection device is a piezoresistive sensor.

7. A vacuum evaporation deposition apparatus, characterized in that, Includes the transport device as described in any one of claims 1-6.

8. A control method for a vacuum evaporation deposition equipment, characterized in that, The vacuum evaporation equipment as described in claim 7, wherein the method comprises: Control the plurality of driving units to drive the substrate to move along the first direction; Based on the pressure information generated by the pressure detection device, movement information about the substrate being transported by the transport device is generated.

9. The control method for the vacuum evaporation equipment according to claim 8, characterized in that, The plurality of pressure detection elements includes a first detection element disposed on the same side of the plurality of drive units; the step of generating movement information about the substrate transported by the transport device based on the pressure information generated by the pressure detection elements includes: Based on the pressure information generated by the plurality of the first detection elements, movement information about the two ends of the substrate that are disposed opposite to each other along the first direction is generated.

10. The control method for the vacuum evaporation equipment according to claim 8, characterized in that, The plurality of pressure detection elements includes a second detection element and a third detection element disposed opposite to each other along the first direction; the step of generating movement information about the substrate transported by the transport device based on the pressure information generated by the pressure detection elements includes: Based on the pressure information generated by the second and third detection elements that are positioned opposite each other along the first direction, movement information about the two ends of the substrate that are positioned opposite each other along the second direction is generated.

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