Glass substrate transition housing system and transition enclosure

Abstract

The embodiment of the present application provides a glass substrate transition accommodating system and a transition box. The glass substrate transition accommodating system comprises a transition box, a transfer mechanism and a pumping mechanism. The transfer mechanism is used for moving the glass substrate. The pumping mechanism is used for adjusting the pressure in the transition box. The transition box comprises a transition chamber and a limiting assembly. The glass substrate is accommodated in the transition chamber. The limiting assembly comprises a connecting part and a limiting part. The connecting part is arranged on a bottom plate. The limiting part is movably arranged between a avoiding position and a limiting position relative to the connecting part. When the limiting part is in the avoiding position, the limiting part and the glass substrate are spaced apart. When the limiting part is in the limiting position, the limiting part and the glass substrate arranged in the first area abut. During the movement of the limiting part from the avoiding position to the limiting position, the deviated glass substrate can be corrected to the first area. The problem that the risk of breakage of the deviated glass substrate is increased after the deviated glass substrate is transferred to the PVD main chamber is solved. The processing yield of the display panel is improved.

Description

Technical Field

[0001] This application relates to the field of display device technology, and in particular to a glass substrate transition housing system and a transition box. Background Technology

[0002] Organic light-emitting diode (OLED) and flat panel display devices based on light-emitting diode (LED) technologies are widely used in various consumer electronics products such as mobile phones, televisions, laptops, and desktop computers due to their advantages such as high image quality, energy saving, thin body and wide range of applications, becoming the mainstream of display devices.

[0003] In related technologies, PVD (Physical Vapor Deposition) equipment is used in the manufacturing process of display devices. PVD equipment can be used to deposit film layers on the surface of glass substrates. However, during the use of PVD equipment, the breakage rate of glass substrates is relatively high, which urgently needs to be improved. Summary of the Invention

[0004] This application provides a glass substrate transition housing system and a transition box, which aim to reduce the breakage rate of glass substrates in PVD equipment and improve the processing yield of display panels.

[0005] An embodiment of the first aspect of this application provides a glass substrate transition accommodating system applied in a physical vapor deposition apparatus. The glass substrate is used to fabricate a display panel. The glass substrate transition accommodating system includes: a transition box, comprising a base plate, a cover plate, a transition chamber, and limiting components. The cover plate covers the base plate along a first direction to form the transition chamber, which is used to accommodate the glass substrate. The base plate includes a first region and a second region. The second region is disposed around the first region. A plurality of limiting components are disposed in the second region and surround the first region. The first region is used to accommodate the glass substrate. A transfer mechanism is used to transfer the glass substrate to the transition chamber and / or remove the glass substrate from the transition chamber. A vacuum mechanism is connected to the transition chamber to adjust the pressure inside the transition chamber. The limiting components include a connecting portion and a limiting portion. The connecting portion is disposed on the base plate. The limiting portion is movably disposed relative to the connecting portion between a clearance position and a limiting position. When the limiting portion is in the clearance position, the limiting portion and the glass substrate are spaced apart. When the limiting portion is in the limiting position, the limiting portion abuts against the glass substrate disposed in the first region.

[0006] According to an embodiment of the first aspect of this application, the limiting part is configured to be rotatable relative to the base plate about a first direction.

[0007] According to an embodiment of the first aspect of this application, the connecting part includes a driving member and a rotating shaft. The driving member is connected to the base plate. One end of the rotating shaft is connected to the driving member in a first direction, and the other end is fixedly connected to the limiting part. The driving member is used to drive the rotating shaft to rotate, so as to drive the limiting part to rotate relative to the base plate around the first direction.

[0008] According to an embodiment of the first aspect of this application, the transition box includes four limiting components arranged in an array along the second direction and the third direction. The limiting part includes two connecting segments that are connected to each other. The two connecting segments extend along the second direction and the third direction, respectively. The connecting part is connected to at least one connecting segment. When the connecting part is in the limiting position, the two connecting segments abut against the glass substrate along the second direction and the third direction, respectively. The first direction, the second direction and the third direction intersect each other.

[0009] According to an embodiment of the first aspect of this application, the limiting component is disposed on both sides of the first region in a second direction, or the limiting component is disposed on both sides of the first region in a third direction.

[0010] According to the first aspect of the present application, the connecting segment includes a base and an elastic member that are connected to each other. The connecting part is connected to a base. The elastic member is disposed on the side of the base away from the bottom plate. When the limiting part is in the limiting position, the elastic member abuts against the glass substrate. The base and the glass substrate are spaced apart.

[0011] According to an embodiment of the first aspect of this application, the two substrates are detachably connected, and / or the substrates are detachably connected to the connecting portion.

[0012] According to the embodiment of the first aspect of this application, elastic members are provided at intervals on two substrates.

[0013] According to an embodiment of the first aspect of this application, the substrate includes a first end and a second end disposed opposite to each other, the first ends of the two substrates are connected to each other, and the elastic members of the two connecting segments are both disposed at the second end.

[0014] According to an embodiment of the first aspect of this application, the elastic element includes a support column and an elastic layer. The support column is connected to the substrate and extends along a first direction, and the elastic layer is rotatably sleeved on the support column.

[0015] According to an embodiment of the first aspect of this application, the transition box further includes a plurality of support members, which are spaced apart and extend out of the first region along a first direction. The support members are used to support the glass substrate along the first direction, and the dimension of the limiting component in the first direction is greater than or equal to the dimension of the support member in the first direction.

[0016] According to an embodiment of the first aspect of this application, the limiting component further includes a first stop member disposed on the base plate. When the limiting part is in the avoidance position, the first stop member stops the limiting part on the side away from the first region.

[0017] According to an embodiment of the first aspect of this application, the limiting component further includes a second stop member disposed on the base plate. When the limiting portion is in the limiting position, the second stop member stops the limiting portion on the side facing the first region.

[0018] An embodiment of the second aspect of this application provides a transition box for use in the glass substrate transition receiving system of the first aspect embodiment described above. The transition box includes a base plate, a cover plate, a transition chamber, and limiting components. The cover plate covers the base plate along a first direction to form the transition chamber. A first region and a second region are provided on the side of the base plate facing the transition chamber. The second region is arranged around the first region. A plurality of limiting components are arranged around the first region. The first region is used to receive the glass substrate. The limiting components include a connecting portion and a limiting portion. The connecting portion is disposed in the second region. The limiting portion is used to abut against the glass substrate in the first region. The limiting portion is movable relative to the connecting portion between a clearance position and a limiting position. When the limiting portion is in the clearance position, the limiting portion and the glass substrate are spaced apart. When the limiting portion is in the limiting position, the limiting portion and the glass substrate disposed in the first region abut against each other.

[0019] The third aspect of this application provides a physical vapor deposition apparatus, including the glass substrate transition containment system described in the first aspect embodiment above.

[0020] The glass substrate transition accommodating system provided in this application embodiment includes a transition box, a transfer mechanism, and a vacuum mechanism. The transfer mechanism is used to transfer the glass substrate into or remove the glass substrate from the transition box. The vacuum mechanism is used to adjust the pressure inside the transition box. The transition box includes a base plate, a cover plate, a transition chamber, and limiting components. The cover plate covers the base plate along a first direction to form a transition chamber for accommodating the glass substrate. The base plate is provided with a first region and a second region. The second region surrounds the first region. A plurality of limiting components are disposed in the second region and surround the first region. The limiting components are used to fix the glass substrate inside the transition chamber. The limiting components include a connecting part and a limiting part. The connecting part is disposed on the base plate, and the limiting part is movable between the connecting part and the limiting position. When the limiting part is in the avoiding position, the limiting part and the glass substrate are spaced apart to reduce the risk of interference between the limiting part and the glass substrate. When the limiting part is in the limiting position, the limiting part and the glass substrate disposed in the first region abut against each other to fix the glass substrate in the first region. During the process of the limiting part moving from the avoiding position to the limiting position, the glass substrate that has shifted in the transition cavity can be corrected to the first region. This improves the problem that the glass substrate is difficult to fix and the risk of breakage increases after the glass substrate that has shifted in the transition cavity is transferred to the PVD main cavity, which helps to improve the processing yield of the display panel. Attached Figure Description

[0021] Other features, objects, and advantages of this application will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings, wherein the same or similar reference numerals denote the same or similar features.

[0022] Figure 1 This is a schematic diagram of the structure of a glass substrate transition accommodating system in one embodiment;

[0023] Figure 2 yes Figure 1 Sectional view at point AA;

[0024] Figure 3 This is a schematic diagram of the structure of a limiting component in a glass substrate transition accommodating system in one embodiment;

[0025] Figure 4 This is a partial structural diagram of the glass substrate transition accommodating system in one embodiment, showing the limiting part in an avoidance position.

[0026] Figure 5 This is a partial structural diagram of the limiting part of the glass substrate transition accommodating system in one embodiment, where the limiting part is in the limiting position.

[0027] Figure 6 This is a schematic diagram of the limiting component of the glass substrate transition receiving system in another embodiment;

[0028] Figure 7 This is a partial structural diagram of the limiting part of the glass substrate transition receiving system in another embodiment, where the limiting part is in the limiting position.

[0029] Figure 8 yes Figure 7 Enlarged structural diagram at point B;

[0030] Figure 9 This is a partial structural diagram of the limiting part of the glass substrate transition receiving system in an avoidance position in another embodiment;

[0031] Figure 10 This is a partial structural diagram of the limiting part of the glass substrate transition receiving system in an avoidance position in another embodiment;

[0032] Figure 11 This is a partial structural diagram of the limiting part of the glass substrate transition receiving system in a limiting position in another embodiment.

[0033] Explanation of reference numerals in the attached figures:

[0034] 100. Glass substrate transition containment system;

[0035] 110. Transition box; 111. Base plate; 112. Cover plate; 113. Transition chamber; 1111. First area; 1112. Second area;

[0036] 120. Transfer agency;

[0037] 130. Air extraction mechanism;

[0038] 140. Limiting component; 141. Connecting part; 142. Limiting part; 143. Connecting segment; 144. Base; 145. Elastic element; 1441. First end; 1442. Second end; 1451. Support column; 1452. Elastic layer; 146. First stop; 147. Second stop; 1411. Driving element; 1412. Rotating shaft;

[0039] 150. Support components;

[0040] X, first direction; Y, second direction; Z, third direction. Detailed Implementation

[0041] The features and exemplary embodiments of various aspects of this application will now be described in detail. Numerous specific details are set forth in the following detailed description to provide a comprehensive understanding of this application. However, it will be apparent to those skilled in the art that this application can be implemented without some of these specific details. The following description of embodiments is merely intended to provide a better understanding of this application by illustrating examples. In the accompanying drawings and the following description, at least some well-known structures and techniques are not shown to avoid unnecessarily obscuring the application; and, for clarity, the dimensions of some structures may be exaggerated. Furthermore, the features, structures, or characteristics described below can be combined in any suitable manner in one or more embodiments.

[0042] In the description of this application, it should be noted that, unless otherwise stated, "a plurality of" means two or more; the terms "upper," "lower," "left," "right," "inner," "outer," etc., indicating orientation or positional relationships are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0043] The directional terms appearing in the following description refer to the directions shown in the figures and are not intended to limit the specific structure of the embodiments of this application. It should also be noted in the description of this application that, unless otherwise explicitly specified and limited, the terms "installation" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0044] Please see Figures 1 to 5 , Figure 1 This is a schematic diagram of the structure of a glass substrate transition accommodating system in one embodiment; Figure 2 yes Figure 1 Sectional view at point AA; Figure 3 This is a schematic diagram of the structure of a limiting component in a glass substrate transition accommodating system in one embodiment; Figure 4 This is a partial structural diagram of the glass substrate transition accommodating system in one embodiment, showing the limiting part in an avoidance position. Figure 5 This is a partial structural diagram of the limiting part of the glass substrate transition accommodating system in one embodiment, where the limiting part is in the limiting position.

[0045] like Figures 1 to 5As shown, an embodiment of the first aspect of this application provides a glass substrate transition accommodating system 100, applied in a physical vapor deposition apparatus. The glass substrate is used to fabricate a display panel. The glass substrate transition accommodating system 100 includes a transition chamber 110, a transfer mechanism 120, and a vacuum mechanism 130. The transition chamber 110 includes a base plate 111, a cover plate 112, a transition chamber 113, and limiting components 140. The cover plate 112 covers the base plate 111 along a first direction X to form the transition chamber 113, which is used to accommodate the glass substrate. The base plate 111 is provided with a first region 1111 and a second region 1112. The second region 1112 is disposed around the first region 1111. A plurality of limiting components 140 are disposed in the second region 1112 and surround the first region 1111. The first region 1111 is configured to accommodate a glass substrate; the transfer mechanism 120 is configured to transfer the glass substrate to the transition chamber 113 and / or remove the glass substrate from the transition chamber 113; the suction mechanism 130 is connected to the transition chamber 113 to adjust the pressure inside the transition chamber 113. The limiting component 140 includes a connecting portion 141 and a limiting portion 142. The connecting portion 141 is disposed on the base plate 111. The limiting portion 142 is movably disposed relative to the connecting portion 141 between a clearance position and a limiting position. When the limiting portion 142 is in the clearance position, the limiting portion 142 and the glass substrate are spaced apart. When the limiting portion 142 is in the limiting position, the limiting portion 142 abuts against the glass substrate disposed in the first region 1111.

[0046] In the glass substrate transition receiving system 100 provided in this application embodiment, the glass substrate transition receiving system 100 includes a transition box 110, a transfer mechanism 120, and a vacuum mechanism 130. The transfer mechanism 120 is used to transfer the glass substrate into the transition box 110 or remove the glass substrate from the transition box 110. The vacuum mechanism 130 is used to adjust the pressure inside the transition box 110. The transition box 110 includes a base plate 111, a cover plate 112, a transition chamber 113, and a limiting component 140. The cover plate 112 covers the base plate 111 along a first direction X to form the transition chamber 113 for receiving the glass substrate. The base plate 111 is provided with a first region 1111 and a second region 1112. The second region 1112 is arranged around the first region 1111. A plurality of limiting components 140 are arranged in the second region 1112 and around the first region 1111. The limiting components 140 are used to fix the glass substrate in the transition chamber 113. The glass substrate and the limiting assembly 140 include a connecting portion 141 and a limiting portion 142. The connecting portion 141 is disposed on the base plate 111. The limiting portion 142 is movable relative to the connecting portion 141 between a clearance position and a limiting position. When the limiting portion 142 is in the clearance position, the limiting portion 142 and the glass substrate are spaced apart to reduce the risk of interference between the limiting portion 142 and the glass substrate. When the limiting portion 142 is in the limiting position, the limiting portion 142 abuts against the glass substrate disposed in the first region 1111 to fix the glass substrate in the first region 1111. During the process of the limiting portion 142 moving from the clearance position to the limiting position, the glass substrate that has shifted in the transition chamber 113 can be corrected to the first region 1111. This improves the problem that the glass substrate is difficult to fix and the risk of breakage increases after the glass substrate that has shifted in the transition chamber 113 is transferred to the PVD main chamber, which helps to improve the processing yield of the display panel.

[0047] Physical vapor deposition equipment can convert solid materials into a gaseous state through physical means in a vacuum environment, and then deposit them on the surface of a glass substrate to form a functional film layer.

[0048] Physical vapor deposition equipment typically includes a main chamber and a glass substrate transition containment system 100, in which the glass substrate is deposited and coated.

[0049] Since the main chamber needs to maintain a vacuum environment during operation, the transition chamber 113 of the glass substrate transition accommodating system 100 is connected to the main chamber through a gate. The transition chamber 113 can temporarily store the glass substrate, avoiding frequent exposure of the main chamber to the atmospheric environment.

[0050] Specifically, the transfer mechanism 120 includes a first transfer section and a second transfer section. The first transfer section is located inside the main chamber, and the second transfer section is located outside the main chamber. The transition box 110 includes a first gate and a second gate. The first gate is used to isolate the transition chamber 113 from the main chamber, and the second gate is used to isolate the transition chamber 113 from the external environment.

[0051] When the glass substrate needs to be moved into the transition chamber 113, the air extraction assembly fills the transition chamber 113 with air to increase the air pressure in the transition chamber 113. The second gate opens and the first gate closes, connecting the transition chamber 113 with the external environment. The second transfer unit transfers the glass substrate from the outside to the transition chamber 113. The second transfer unit leaves the transition chamber 113, the second gate closes, and the air extraction assembly extracts the air from the transition chamber 113. When the glass substrate needs to be moved from the transition chamber 113 into the main chamber, the first gate opens and the second gate closes. The first transfer unit transfers the glass substrate from the transition chamber 113 to the main chamber, and the first gate closes.

[0052] Optionally, the transfer mechanism 120 can be a robotic arm, a conveyor belt, an AGV (Automated Guided Vehicle), etc.

[0053] During the process of the transfer mechanism 120 placing the glass substrate into the transition chamber 113, the glass substrate is prone to misalignment or displacement within the transition chamber 113 due to vibration or shaking during the operation of the transfer mechanism 120. In the prior art, the limiting component 140 is fixedly connected to the base plate 111. The limiting component 140 cannot actively correct the misalignment of the glass substrate in the transition chamber 113. This results in the first transfer unit transferring the glass substrate to the main chamber, but the fixing mechanism in the main chamber cannot accurately fix it, leading to an increased risk of glass substrate breakage and a low processing yield of the display panel.

[0054] Based on this, in the embodiments of this application, the connecting part 141 can move between the avoidance position and the limiting position, so that the limiting component 140 can actively correct the glass substrate that is offset in the transition chamber 113, thereby reducing the risk of the glass substrate breaking in the main chamber.

[0055] Optionally, the transition box 110 includes a bottom plate 111 and a cover plate 112. The cover plate 112 covers the bottom plate 111 along a first direction X to form a transition chamber 113. The cover plate 112 includes an end plate and a side plate connected to the end plate. The side plate is connected to the bottom plate 111. A first gate and a second gate are both disposed on the side plate. The specific shape and size of the transition box 110 can be designed independently. For example, the transition box 110 is cubic in shape.

[0056] Specifically, the base plate 111 includes a first region 1111 and a second region 1112. The second region 1112 is arranged around the first region 1111. The first region 1111 is used to accommodate the glass substrate. When the orthographic projection of the glass substrate on the base plate 111 coincides with the first region 1111, the glass substrate is considered to be in the correct position. At this time, the first transfer part moves the glass substrate into the main chamber, and the fixing mechanism in the main chamber can more easily fix the glass substrate. When the orthographic projection of the glass substrate at the bottom is located in the second region 1112, the glass substrate is considered to be offset.

[0057] The shape and size of the first region 1111 match the shape and size of the glass substrate. For example, the glass substrate is cubic, the first region 1111 is rectangular, and the length and width dimensions of the glass substrate are the same as the length and width dimensions of the first region 1111.

[0058] Multiple limiting components 140 are disposed in the second region 1112 and surround the first region 1111, and at least three limiting components 140 are spaced apart from each other and not collinear, so that the limiting components 140 can fix the glass substrate in the transition chamber 113 and prevent the glass substrate from sliding or deflecting in the transition chamber 113.

[0059] The number of limit components 140 can be designed by the user. For example, the number of limit components 140 can be 3, 4, 5, 8, etc.

[0060] The limiting component 140 includes a connecting part 141 and a limiting part 142. The connecting part 141 is disposed in the second region 1112 of the base plate 111 to reduce the risk of interference damage between the connecting part 141 and the glass substrate.

[0061] If the limiting part 142 is movable relative to the connecting part 141, then the limiting part 142 is rotatable relative to the connecting part 141. For example, the limiting part 142 and the connecting part 141 are connected by a rotating shaft; or the limiting part 142 is translatable relative to the connecting part 141. For example, the limiting part 142 and the connecting part 141 are connected by a slide rail or slide groove, or the limiting part 142 and the connecting part 141 are connected by a lead screw and nut.

[0062] The limiting part 142 can move between the avoidance position and the limiting position. When the limiting part 142 is in the avoidance position, the limiting part 142 is located entirely in the second region 1112 to avoid interference between the limiting part 142 and the glass substrate. When the limiting part 142 is in the limiting position, the limiting part 142 abuts against the edge of the glass substrate along the first direction X and / or the second direction Y to fix the glass substrate.

[0063] Optionally, when the transfer mechanism 120 moves the glass substrate into the transition chamber 113, the limiting part 142 is in the avoidance position. After the transfer mechanism 120 places the glass substrate in the transition chamber 113 and moves it out of the transition chamber 113, the limiting part 142 moves from the avoidance position to the limiting position.

[0064] Optionally, the glass substrate transition receiving system 100 further includes a detection unit for detecting the position of the transfer mechanism 120. For example, the detection unit is a grating switch provided on the cover plate 112. When the transfer mechanism 120 enters the transition chamber 113, the transfer mechanism 120 blocks the grating, and the limiting part 142 is in a clearance position. When the transfer mechanism 120 exits the transition chamber 113, the transfer mechanism 120 no longer blocks the grating, and the limiting part 142 moves to the limiting position.

[0065] If the glass substrate extends into the second region 1112 due to the shaking or vibration of the transfer mechanism 120, the limiting part 142 interferes with the glass substrate during the process of the limiting part 142 moving from the avoidance position to the limiting position, and the limiting part 142 corrects the glass substrate into the first region 1111.

[0066] In some embodiments, such as Figures 1 to 3 As shown, the limiting part 142 is rotatable relative to the base plate 111 about the first direction X.

[0067] In these embodiments, the limiting portion 142 is rotatable relative to the base plate 111 about a first direction X, which helps to simplify the structure of the limiting assembly 140 and reduce the weight of the limiting assembly 140.

[0068] Specifically, in some embodiments, such as Figures 1 to 3 As shown, the connecting part 141 includes a driving member 1411 and a rotating shaft 1412. The driving member 1411 is connected to the base plate 111. One end of the rotating shaft 1412 is connected to the driving member 1411 in the first direction X, and the other end is fixedly connected to the limiting part 142. The driving member 1411 is used to drive the rotating shaft 1412 to rotate, so as to drive the limiting part 142 to rotate relative to the base plate 111 around the first direction X.

[0069] In these embodiments, the drive member 1411 is used to drive the rotating shaft 1412 to rotate, and the rotating shaft 1412 drives the limiting part 142 to rotate. The rotating shaft 1412 and the limiting part 142 are fixedly connected to improve the connection reliability between the two.

[0070] Optionally, the connection method between the rotating shaft 1412 and the limiting part 142 can be threaded connection, snap-fit, adhesive bonding, riveting, etc.

[0071] For example, the drive component 1411 is an electric motor, a cylinder, or a hydraulic cylinder, etc.

[0072] Optionally, the transition housing 110 is provided with multiple limit components 140, and the multiple limit components 140 share the same drive component 1411 to facilitate the synchronous operation of each limit part 142; or each limit component 140 is provided with a separate drive component 1411 to reduce the difficulty of setting up the limit component 140.

[0073] In some embodiments, such as Figures 1 to 5 As shown, the transition housing 110 includes four limiting components 140 arranged in an array along the second direction Y and the third direction Z. The limiting part 142 includes two interconnected connecting segments 143, which extend along the second direction Y and the third direction Z respectively. The connecting part 141 is connected to at least one connecting segment 143. When the connecting part 141 is in the limiting position, the two connecting segments 143 abut against the glass substrate along the second direction Y and the third direction Z respectively. The first direction X, the second direction Y, and the third direction Z intersect each other.

[0074] In these embodiments, the limiting portion 142 includes interconnected connecting segments 143 that extend in the second direction Y and the third direction Z, respectively. When the connecting portion 141 is in the limiting position, the two connecting segments 143 can abut against the glass substrate and limit it along the second direction Y and the third direction Z, respectively, so as to improve the limiting reliability of the limiting component 140 on the glass substrate while reducing the number of limiting components 140.

[0075] For example, the glass substrate is rectangular, with the second direction Y and the third direction Z being the length and width directions of the glass substrate, respectively. Four limiting components 140 are disposed diagonally in the second region 1112. The limiting part 142 includes two connecting segments 143, which are a first segment and a second segment, respectively. The first segment extends along the second direction Y, and the second segment extends along the third direction Z. The first segment can abut against the glass substrate along the third direction Z, and the second segment can abut against the glass substrate along the second direction Y, so that the glass substrate in the first region 1111 can be corrected and fixed in both the second direction Y and the third direction Z by a single limiting part 142.

[0076] Optionally, the connecting portion 141 is connected to one or two connecting segments 143. For example, the connecting portion 141 and the limiting portion 142 are rotatably configured relative to each other, with one end of the first segment connected to the second segment and the other end of the first segment connected to the pivot of the connecting portion 141; or the connecting portion 141 can push the limiting portion 142 to translate, with the push rod of the connecting portion 141 connected to the two limiting portions 142 respectively.

[0077] Optionally, a buffer layer is provided on the surface of the connecting segment 143. The buffer layer can absorb external forces to reduce the impact force between the connecting segment 143 and the glass substrate, thereby reducing the risk of collision damage between the connecting segment 143 and the glass substrate.

[0078] For example, the buffer layer can be a rubber layer or a silicone layer, etc.

[0079] In some embodiments, such as Figure 4 and Figure 5 As shown, the limiting component 140 is disposed on both sides of the first region 1111 in the second direction Y, or the limiting component 140 is disposed on both sides of the first region 1111 in the third direction Z.

[0080] In these embodiments, the difficulty of setting the limiting component 140 is reduced by placing the limiting component 140 on the same side of the first region 1111 in the second direction Y or the third direction Z.

[0081] Optionally, the dimension of the first region 1111 along the second direction Y to the edge of the base plate 111 is L1, and the dimension of the first region 1111 along the third direction Z to the edge of the base plate 111 is L2. If L1 > L2, then the four limiting components 140 are respectively disposed on both sides of the first region 1111 in the second direction Y; if L1 < L2, then the four limiting components 140 are respectively disposed on both sides of the first region 1111 in the third direction Z.

[0082] In some embodiments, such as Figures 1 to 5 As shown, the transition box 110 also includes a plurality of support members 150, which are spaced apart and extend out of the first region 1111 along the first direction X. The support members 150 are used to support the glass substrate along the first direction X. The size of the limiting component 140 in the first direction X is greater than or equal to the size of the support member 150 in the first direction X.

[0083] In these embodiments, a plurality of support members 150 are spaced apart and extend out of the first region 1111 along the first direction X. The support members 150 are capable of supporting the glass substrate. The space between adjacent support members 150 facilitates the transfer mechanism 120 to retract after placing the glass substrate. The dimension of the limiting component 140 in the first direction X is greater than or equal to the dimension of the support member 150 in the first direction X, so that the limiting portion 142 can reliably abut against the glass substrate.

[0084] For example, the transfer mechanism 120 is a robot arm. After the robot arm places the glass substrate on the support member 150, the robot arm can withdraw from the transition chamber 113 from the space between adjacent support members 150.

[0085] Optionally, the drive member 1411 is disposed on the base plate 111, one end of the rotating shaft 1412 is connected to the drive member 1411, and the other end of the rotating shaft 1412 extends along the first direction X and is fixedly connected to the limiting part 142 so that the limiting part 142 can reliably abut against the glass substrate.

[0086] Optionally, the specific shape, size, and quantity of the support member 150 can be designed independently. For example, the support member 150 may be cylindrical or prismatic, and the quantity of the support member 150 may be 2, 5, 10, 20, etc.

[0087] Please see Figure 6 , Figure 7 , Figure 8 and Figure 9 , Figure 6 This is a schematic diagram of the limiting component of the glass substrate transition receiving system in another embodiment; Figure 7 This is a partial structural diagram of the limiting part of the glass substrate transition receiving system in another embodiment, where the limiting part is in the limiting position. Figure 8 yes Figure 7 Enlarged structural diagram at point B; Figure 9 This is a partial structural diagram of the limiting part of the glass substrate transition receiving system in another embodiment, where the limiting part is in an avoidance position.

[0088] In some embodiments, such as Figures 6 to 9 As shown, the connecting segment 143 includes a base 144 and an elastic member 145 that are connected to each other. The connecting part 141 is connected to a base 144. The elastic member 145 is disposed on the side of the base 144 away from the bottom plate 111. When the limiting part 142 is in the limiting position, the elastic member 145 abuts against the glass substrate. The base 144 and the glass substrate are spaced apart.

[0089] In these embodiments, the connecting segment 143 includes a base 144 and an elastic member 145 that are connected to each other. When the connecting portion 141 is in the limiting position, the elastic member 145 abuts against the glass substrate to buffer the impact force between the limiting portion 142 and the glass substrate. The base 144 and the glass substrate are spaced apart. The base 144 can reliably support the elastic member 145 and avoid the problem of collision between the base 144 and the glass substrate, thereby reducing the risk of damage to the glass substrate in the transition chamber 113 and helping to improve the processing yield of the display panel.

[0090] Optionally, the base 144 can be made of metal to enhance the overall strength of the limiting part 142 and improve the service life of the connecting segment 143. For example, the base 144 can be an aluminum alloy plate or a stainless steel plate, etc.

[0091] Optionally, the elastic element 145 is connected to the base 144 and abuts against the glass substrate to correct and fix the glass substrate. The elastic element 145 can buffer the impact force on the glass substrate and reduce the risk of collision damage to the glass substrate. For example, the material of the elastic element 145 can be rubber or silicone, etc.

[0092] The substrate 144 and the glass substrate are spaced apart, so the side of the elastic member 145 facing the glass substrate is spaced apart from the side of the substrate 144 facing the glass substrate. When the limiting part 142 is in the limiting position, only the elastic member 145 can abut against the glass substrate.

[0093] For example, the distance between the side surface of the elastic member 145 facing the glass substrate and the side surface of the substrate 144 facing the glass substrate can be 0.2 mm, 0.3 mm, 0.5 mm, etc.

[0094] Optionally, the elastic element 145 and the base 144 are detachably connected to facilitate maintenance and replacement of the elastic element 145.

[0095] For example, the connection between the elastic element 145 and the base 144 can be a snap-fit ​​or bolt connection, etc.

[0096] Optionally, the base 144 of the two connecting segments 143 is integrally formed to reduce the number of splicing seams in the limiting part 142, thereby enhancing the structural strength of the limiting part 142.

[0097] In some embodiments, such as Figure 6 As shown, the two bases 144 are detachably connected, and / or the bases 144 are detachably connected to the connecting part 141.

[0098] In these embodiments, the two bases 144 are detachably connected, and / or the bases 144 are detachably connected to the connecting portion 141, in order to reduce the difficulty of maintenance and replacement of the limiting portion 142.

[0099] Optionally, the two bases 144 are a first base 144 and a second base 144, one end of the first base 144 is detachably connected to the connecting part 141, and the other end of the first base 144 is detachably connected to the second base 144.

[0100] For example, the connection between the two bases 144, and between the base 144 and the connecting part 141, is a snap-fit ​​connection or a bolt connection, etc.

[0101] In some embodiments, such as Figure 6 As shown, elastic elements 145 are spaced apart on the two bases 144.

[0102] In these embodiments, the elastic members 145 disposed on the two substrates 144 are spaced apart so that the elastic members 145 can avoid the corners of the glass substrate and reduce the risk of damage to the corners of the glass substrate.

[0103] Optionally, a plurality of elastic elements 145 may be provided at intervals on a single substrate 144 to increase the contact area between the limiting part 142 and the glass substrate, so as to disperse the force exerted by the limiting part 142 on the glass substrate.

[0104] Optionally, the elastic members 145 of the two limiting parts 142 are both centrally located on the base 144 to better avoid the corner positions of the glass substrate.

[0105] In some embodiments, such as Figure 6 As shown, the substrate 144 includes a first end 1441 and a second end 1442 disposed opposite to each other. The first ends 1441 of the two substrates 144 are connected to each other, and the elastic members 145 of the two connecting segments 143 are both disposed at the second end 1442.

[0106] In these embodiments, the substrate 144 includes a first end 1441 and a second end 1442 disposed opposite to each other. The first ends 1441 of the two substrates 144 are connected to each other, and the elastic members 145 of the two connecting segments 143 are disposed at the second end 1442 to increase the distance between the two elastic members 145 so as to better avoid the corner position of the glass substrate.

[0107] Optionally, the spacing between the elastic members 145 located on the two connecting segments 143 can be designed according to the actual situation.

[0108] In some embodiments, such as Figures 6 to 8 As shown, the elastic element 145 includes a support column 1451 and an elastic layer 1452. The support column 1451 is connected to the base 144 and extends along the first direction X. The elastic layer 1452 is rotatably sleeved on the support column 1451.

[0109] In these embodiments, the support column 1451 and the substrate 144 are connected to support the elastic layer 1452. The elastic layer 1452 is rotatably sleeved on the support column 1451 so that when the elastic member 145 contacts the glass substrate, the rotating elastic layer 1452 helps to buffer the impact force between the limiting part 142 and the glass substrate, reducing the risk of glass substrate breakage and helping to improve the processing yield of the display device.

[0110] Optionally, the support column 1451 and the base 144 are integrally formed to improve the connection reliability of the support column 1451 and the base 144.

[0111] For example, the elastic layer 1452 is annular to be fitted onto the support post 1451. For example, the elastic layer 1452 is a rubber ring or a silicone ring, etc.

[0112] Optionally, a snap-fit ​​element is provided at one end of the elastic layer 1452 away from the substrate 144. The orthographic projection of the snap-fit ​​element in the extension direction of the support column 1451 at least partially covers the elastic layer 1452. The snap-fit ​​element is used to prevent the elastic layer 1452 from detaching from the support column 1451 along the first direction X.

[0113] Please see Figure 10 and Figure 11 , Figure 10 This is a partial structural diagram of the limiting part of the glass substrate transition receiving system in an avoidance position in another embodiment; Figure 11 This is a partial structural diagram of the limiting part of the glass substrate transition receiving system in a limiting position in another embodiment.

[0114] In some embodiments, such as Figure 10 and Figure 11 As shown, the limiting component 140 also includes a first stop 146, which is disposed on the base plate 111. When the limiting part 142 is in the avoidance position, the first stop 146 stops the limiting part 142 on the side away from the first region 1111.

[0115] In these embodiments, the limiting component 140 further includes a first stop 146 disposed on the base plate 111. When the limiting part 142 is in the avoidance position, the first stop 146 stops the limiting part 142 on the side away from the first region 1111, reducing the risk of collision damage between the limiting part 142 and the cover plate 112 in the event that the connecting part 141 is out of control.

[0116] Optionally, the first stop 146 and the base plate 111 are integrally formed to enhance the connection strength between the base plate 111 and the first stop 146; or the first stop 146 and the base plate 111 are detachably connected to facilitate maintenance and replacement of the first stop 146.

[0117] Optionally, the limiting part 142 includes a base 144 and an elastic member 145. When the limiting part 142 is in the avoidance position, the base 144 stops at the first stop member 146. The elastic member 145 and the first stop member 146 are spaced apart to reduce the collision between the elastic member 145 and the first stop member 146, which helps to improve the service life of the elastic member 145.

[0118] In some embodiments, such as Figure 10 and Figure 11 As shown, the limiting assembly 140 also includes a second stop 147, which is disposed on the base plate 111. When the limiting part 142 is in the limiting position, the second stop 147 stops the limiting part 142 on the side facing the first region 1111.

[0119] In these embodiments, the limiting component 140 further includes a second stop 147 disposed on the base plate 111. When the limiting part 142 is in the limiting position, the second stop 147 stops the limiting part 142 on the side facing the first region 1111, so as to reduce the risk of collision and crush damage to the limiting part 142 and the glass substrate in the event that the connecting part 141 is out of control.

[0120] Specifically, the second stop 147 is disposed in the second region 1112, and the limiting part 142 extends out with a limiting protrusion. When the limiting part 142 is in the limiting position, the limiting protrusion stops the second stop 147 on the side facing the first region 1111, so as to prevent the limiting part 142 from excessively squeezing the glass substrate.

[0121] Optionally, the limiting protrusion extends out of the base 144 to enhance the structural strength of the limiting protrusion.

[0122] Optionally, the first stop 146 and the second stop 147 can stop on the same limiting protrusion to simplify the structure of the limiting part 142 and reduce the processing difficulty of the transition box 110.

[0123] like Figures 1 to 5 As shown, an embodiment of the second aspect of this application provides a transition box 110, applied to the glass substrate transition receiving system 100 of the first aspect embodiment described above. The transition box 110 includes a base plate 111, a cover plate 112, a transition chamber 113, and limiting components 140. The cover plate 112 covers the base plate 111 along a first direction X to form the transition chamber 113. A first region 1111 and a second region 1112 are provided on the side of the base plate 111 facing the transition chamber 113. The second region 1112 is arranged around the first region 1111. A plurality of limiting components 140 are disposed in the second region 1112 and surround it. The limiting component 140 is arranged around the first region 1111, which is used to accommodate the glass substrate. The first region 1111 is used to accommodate the glass substrate. The limiting component 140 includes a connecting part 141 and a limiting part 142. The connecting part 141 is disposed on the base plate 111. The limiting part 142 is used to abut against the glass substrate in the first region 1111. The limiting part 142 is movable relative to the connecting part 141 between a clearance position and a limiting position. When the limiting part 142 is in the clearance position, the limiting part 142 and the glass substrate are spaced apart. When the limiting part 142 is in the limiting position, the limiting part 142 abuts against the glass substrate disposed in the first region 1111.

[0124] Since the transition box 110 provided in the second aspect embodiment of this application is applied to the glass substrate transition receiving system 100 of the first direction X embodiment described above, the beneficial effects of the transition box 110 provided in the second aspect embodiment of this application are all described in the first aspect embodiment described above, and will not be repeated here.

[0125] The third aspect of this application provides a physical vapor deposition apparatus, including the glass substrate transition containment system described in the first aspect embodiment above.

[0126] Since the physical vapor deposition apparatus provided in the third aspect of this application includes the glass substrate transition accommodating system of the first aspect of the application, the beneficial effects of the physical vapor deposition apparatus provided in the third aspect of this application are all described in the first aspect of the application, and will not be repeated here.

[0127] The glass substrate in this application embodiment is used in devices with display functions, including but not limited to mobile phones, personal digital assistants (PDAs), tablet computers, e-books, televisions, access control systems, smart landline phones, and control consoles.

[0128] Although this application has been described with reference to preferred embodiments, various modifications can be made thereto and components can be replaced with equivalents without departing from the scope of this application. In particular, the technical features mentioned in the various embodiments can be combined in any manner, provided there is no structural conflict. This application is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A glass substrate transition containment system, applied in a physical vapor deposition apparatus, wherein the glass substrate is used to fabricate a display panel, characterized in that, The glass substrate transition accommodating system includes: A transition box includes a base plate, a cover plate, a transition chamber, and limiting components. The cover plate covers the base plate along a first direction to form the transition chamber, which is used to accommodate the glass substrate. The base plate includes a first region and a second region. The second region is disposed around the first region. A plurality of limiting components are disposed in the second region and are disposed around the first region. The first region is used to accommodate the glass substrate. A transfer mechanism for transferring the glass substrate to the transition chamber and / or removing the glass substrate from the transition chamber; An air extraction mechanism is connected to the transition chamber to regulate the pressure within the transition chamber. The limiting component includes a connecting part and a limiting part. The connecting part is disposed on the base plate. The limiting part is movable relative to the connecting part between a clearance position and a limiting position. When the limiting part is in the clearance position, the limiting part and the glass substrate are spaced apart. When the limiting part is in the limiting position, the limiting part and the glass substrate disposed in the first region abut against each other.

2. The glass substrate transition accommodating system according to claim 1, characterized in that, The limiting part is rotatable relative to the base plate around the first direction; Preferably, the connecting part includes a driving member and a rotating shaft. The driving member is connected to the base plate. One end of the rotating shaft is connected to the driving member in the first direction, and the other end is fixedly connected to the limiting part. The driving member is used to drive the rotating shaft to rotate, so as to drive the limiting part to rotate relative to the base plate around the first direction.

3. The glass substrate transition accommodating system according to claim 2, characterized in that, The transition housing includes four limiting components arranged in an array along the second and third directions. The limiting portion includes two interconnected connecting segments, which extend along the second direction and the third direction respectively. The connecting portion is connected to at least one of the connecting segments. When the connecting portion is in the limiting position, the two connecting segments abut against the glass substrate along the second direction and the third direction respectively. The first direction, the second direction, and the third direction intersect each other. Preferably, the limiting component is disposed on both sides of the first region in a second direction, or the limiting component is disposed on both sides of the first region in a third direction.

4. The glass substrate transition accommodating system according to claim 3, characterized in that, The connecting segment includes a base and an elastic element that are connected to each other. The connecting part is connected to the base. The elastic element is disposed on the side of the base away from the bottom plate. When the limiting part is in the limiting position, the elastic element abuts against the glass substrate. The base and the glass substrate are spaced apart. Preferably, the two substrates are detachably connected, and / or the substrates are detachably connected to the connecting portion.

5. The glass substrate transition accommodating system according to claim 4, characterized in that, The elastic elements are spaced apart and disposed on the two bases respectively; Preferably, the substrate includes a first end and a second end disposed opposite to each other, the first ends of the two substrates are connected to each other, and the elastic members of the two connecting segments are both disposed at the second end.

6. The glass substrate transition accommodating system according to claim 4, characterized in that, The elastic element includes a support column and an elastic layer. The support column is connected to the base and extends along the first direction. The elastic layer is rotatably sleeved on the support column.

7. The glass substrate transition accommodating system according to claim 2, characterized in that, The transition box also includes a plurality of support members, which are spaced apart and extend out of the first region along the first direction. The support members are used to support the glass substrate along the first direction, and the dimension of the limiting component in the first direction is greater than or equal to the dimension of the support member in the first direction.

8. The glass substrate transition accommodating system according to claim 2, characterized in that, The limiting component further includes a first stop member, which is disposed on the base plate. When the limiting part is in the avoidance position, the first stop member stops the limiting part on the side away from the first area. Preferably, the limiting component further includes a second stop member disposed on the base plate. When the limiting part is in the limiting position, the second stop member stops the limiting part on the side facing the first region.

9. A transition housing, applied to the glass substrate transition receiving system according to any one of claims 1-8, characterized in that, The transition housing includes a base plate, a cover plate, a transition chamber, and limiting components. The cover plate covers the base plate along a first direction to form the transition chamber. The base plate has a first region and a second region on the side facing the transition chamber. The second region surrounds the first region. A plurality of limiting components surround the first region. The first region is used to accommodate the glass substrate. The limiting components include a connecting portion and a limiting portion. The connecting portion is disposed in the second region. The limiting portion is used to abut against the glass substrate in the first region. The limiting portion is movable relative to the connecting portion between a clearance position and a limiting position. When the limiting portion is in the clearance position, the limiting portion and the glass substrate are spaced apart. When the limiting portion is in the limiting position, the limiting portion and the glass substrate disposed in the first region abut against each other.

10. A physical vapor deposition apparatus, characterized in that, The glass substrate transition housing system includes any one of claims 1-8.

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