Reaction apparatus and coating apparatus

Abstract

The application relates to a reaction device, which comprises a coating cavity with a coating chamber, a cleaning port arranged on the inner wall of the coating chamber, a heating disc arranged in the coating chamber and provided with a bearing position for bearing a workpiece to be processed, a plasma source with an air inlet and an air outlet in communication with each other, the air inlet being used for inputting cleaning gas, the plasma source being configured to ionize and excite the input cleaning gas, and the air outlet being used for outputting the ionized cleaning gas, and an on-off assembly connected with the plasma source and the coating cavity respectively and capable of being controlled to be opened and closed, so that the coating chamber does not need to be broken into vacuum during maintenance or replacement of the plasma source, the time consumed for re-evacuating the coating chamber is reduced, and the time consumed for the maintenance or replacement of the plasma source is effectively reduced.

Description

Technical Field

[0001] This application relates to the field of coating technology, and in particular to a reaction apparatus and coating equipment. Background Technology

[0002] Currently, in existing plasma-enhanced chemical vapor deposition (PECVD) thin film processes, due to the diffusion characteristics of plasma, thin films are formed not only on the wafer surface, but also on the surface of the spray plate, the sidewalls of the coating chamber, and the bottom of the heating plate.

[0003] Therefore, the coating chamber needs to be cleaned after the process is completed. The existing PECVD cleaning method generally uses a remote plasma source (RPS) for chamber cleaning. That is, the cleaning gas is activated by the plasma source and diffuses into the interior of the coating chamber to thoroughly clean the coating chamber, heating plate, etc.

[0004] Over time, plasma sources experience reduced activation efficiency for cleaning gases due to the aging of internal components, necessitating periodic maintenance or replacement. Furthermore, the coating chamber typically requires a high vacuum during the coating process. Repairing or replacing the plasma source necessitates breaking the vacuum in the coating chamber and then spending considerable time re-vacuuming it, thus impacting the production efficiency of the coating equipment. Summary of the Invention

[0005] Therefore, it is necessary to provide a reaction device and coating equipment to address the problem that repairing or replacing plasma sources requires a lot of time.

[0006] A reaction apparatus, comprising:

[0007] A coating cavity has a coating chamber, and a cleaning port is provided on the inner wall of the coating chamber;

[0008] A heating plate is disposed in the coating chamber, and the heating plate is provided with a support position for supporting the workpiece to be processed;

[0009] A plasma source has an inlet and an outlet that are connected to each other. The inlet is used to input clean gas, and the plasma source is configured to ionize and excite the input clean gas. The outlet is used to output the ionized clean gas.

[0010] A switching component is connected to the plasma source and the coating chamber respectively, and the switching component can be controlled to open and close. When the switching component is open, the switching component connects the air outlet and the cleaning port, and the cleaning gas output from the air outlet can clean the inner wall of the coating chamber and / or the surface of the heating plate through the cleaning port. When the switching component is closed, the air outlet and the cleaning port are disconnected from each other.

[0011] In one embodiment, the on / off component is provided with a connecting port, which is connected to the air outlet and the cleaning port respectively. When the on / off component is opened, the connecting port is connected to the cleaning port.

[0012] When the on / off component is closed, the connection port and the cleaning port are disconnected from each other, and the on / off component can be separated from the plasma source.

[0013] In one embodiment, the plasma source has an exhaust pipe with an exhaust port and a first flange arranged circumferentially around the exhaust port. The first flange has a plurality of first mounting holes spaced circumferentially around the exhaust port.

[0014] The on / off assembly is provided with a first connecting pipe, a connecting port on the first connecting pipe, and a second flange arranged circumferentially around the connecting port. The second flange is provided with a plurality of second mounting holes spaced apart circumferentially around the connecting port. When the connecting port is aligned with the air outlet, each second mounting hole is aligned with one of the first mounting holes.

[0015] The reaction device also includes a plurality of fasteners, each of which passes through one of the first mounting holes and the corresponding second mounting holes, and connects the first flange and the connecting flange.

[0016] In one embodiment, the on / off component includes an automatic on / off element that connects the air outlet and the cleaning port and is configured to open or close in response to a corresponding signal.

[0017] The reaction device also includes a control unit, which is communicatively connected to the automatic on / off component, and the control unit is capable of outputting signals to control the automatic on / off component to open and close.

[0018] In one embodiment, the coating chamber further includes a detection element for detecting the amount of plasma in the airflow output from the cleaning port;

[0019] The detection element is communicatively connected to the control element, and when the detection element detects that the number of plasma particles is less than or equal to a preset value, the control element sends a signal to shut down the automatic on / off element.

[0020] In one embodiment, the on / off assembly further includes a manual on / off element, the automatic on / off element is interconnected with the manual on / off element, and one of the automatic on / off element and the manual on / off element is connected to the cleaning port and the other is connected to the air outlet. The manual on / off element is configured to open or close under the action of an external force.

[0021] In one embodiment, the manual on / off element includes a valve body and a movable handle, the movable handle being movably mounted on the valve body, and the movable handle being able to control the opening and closing of the valve body during movement.

[0022] In one embodiment, the automatic on / off switch and the manual on / off switch are detachably connected.

[0023] In one embodiment, the reaction apparatus further includes a gas distributor and a three-way valve, the gas distributor being connected to the gas outlet and the cleaning port;

[0024] The inner wall of the coating chamber is also provided with a process port. The three-way valve includes a first port, a second port and a third port. The first port is used to input process gas. The second port is connected to the process port. The third port is connected to the gas distribution component. The second port can be selectively connected to either the first port or the third port.

[0025] A coating apparatus comprising a reaction device as described in any of the preceding claims.

[0026] When the plasma source of the above-mentioned reaction apparatus needs maintenance or replacement, the on / off component can be closed first to disconnect the gas outlet and the cleaning port, thus preventing communication between the interior of the plasma source and the interior of the coating chamber. At this time, the coating chamber can maintain a vacuum state, while the interior of the plasma source can be de-vacuumed to achieve the same atmospheric pressure as the outside atmosphere, facilitating maintenance or replacement of the plasma source.

[0027] After the plasma source is repaired or replaced, the on / off switch can be opened to connect the gas outlet and the cleaning port. Although the gas inside the plasma source will enter the coating chamber and affect the vacuum level of the coating chamber, the amount of gas inside the plasma source is small, so even if the coating chamber is evacuated again, it will not take too much time.

[0028] Thus, during the repair or replacement of the plasma source, the coating chamber does not need to be evacuated, which also reduces the time spent on re-evacuating the coating chamber. This effectively reduces the time spent on repairing or replacing the plasma source and improves the production efficiency of the coating equipment. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the reaction apparatus in some embodiments of this application.

[0030] Figure 2 for Figure 1 A schematic diagram of the coating cavity in the embodiment.

[0031] Figure 3 This is a schematic diagram of the reaction device in another embodiment of this application.

[0032] Explanation of reference numerals in the attached figures:

[0033] 10 Coating chamber; 11 Coating cavity; 12 Cleaning port; 13 Process port; 14 Heating plate; 15 Inspection piece; 16 Cleaning tube;

[0034] Plasma source 20; exhaust pipe 21;

[0035] On / off assembly 30; first connecting pipe 32; second connecting pipe 33; automatic on / off component 34; manual on / off component 35; valve body 36; movable handle 37;

[0036] First flange 40; Second flange 41; Third flange 42; Fourth flange 43; Fifth flange 44; Sixth flange 45;

[0037] Fastener 50; Gas distribution component 51; Three-way valve 52; First port 53; Second port 54; Third port 55;

[0038] Process gas source 60; spray plate 61; spray nozzle 62. Detailed Implementation

[0039] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0040] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0041] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0042] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0043] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0044] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0045] See Figure 1 and Figure 2 , Figure 1 A schematic diagram of the structure of a reaction apparatus according to an embodiment of this application is shown. Figure 2 It shows Figure 1 A schematic diagram of the coating chamber 10 of the reaction apparatus in the embodiment. The reaction apparatus provided in one embodiment of this application includes a coating chamber 10, a heating plate 14, a plasma source 20, and an on / off assembly 30.

[0046] The inner wall of the coating chamber 10 has a process port 13, which is connected to a process gas source 60. The process gas source 60 can be a steel cylinder or similar container storing process gas. The process gas is introduced into the coating chamber 11 through the process port 13 for coating treatment of the workpiece. A heating plate 14 is located inside the coating chamber 11 and has a support position for holding the workpiece. The heating plate 14 can heat the workpiece located at the support position to promote the surface reactivity of the workpiece. At the same time, it can also enhance the migration rate of gas molecules on the surface of the workpiece through thermal activation, providing an energy basis for subsequent thin film deposition.

[0047] Specifically, taking the reaction apparatus applied to a PECVD equipment as an example, the workpiece to be processed is placed on a heating plate 14, and the temperature of the workpiece is maintained by temperature control of the heating plate 14, typically between 200 and 400 degrees Celsius. Process gases, such as silane (SiH4), ammonia (NH3), or oxygen (O2), are introduced into the coating chamber 11. These gases are excited under the action of a high-frequency electric field to form plasma, which contains a large number of ions, free radicals, and electrons. These active particles chemically react with the surface of the workpiece on the heating plate 14, causing gas molecules to decompose and deposit on the surface of the workpiece to form a thin film. Optionally, the workpiece can be a substrate or a wafer.

[0048] During this process, not only is the surface of the workpiece coated, but a thin film is also inevitably deposited on the heating plate 14 and the inner wall of the reaction chamber. This is because after the reactive gas decomposes in the plasma environment, the active particles not only deposit on the surface of the workpiece but also react on other surfaces within the reaction chamber, resulting in the formation of thin films on these surfaces as well. Over time, these deposits accumulate, affecting the stability and uniformity of subsequent processes.

[0049] To this end, a cleaning port 12 is also provided on the inner wall of the coating chamber 11. The plasma source 20 is interconnected with the cleaning port 12 so as to clean the coating chamber 11 and the heating plate 14 by outputting a cleaning gas containing plasma from the plasma source 20. Specifically, the plasma source 20 has an inlet and an outlet that are interconnected. The inlet is used to input a cleaning gas, such as fluoride gas. The plasma source 20 is configured to ionize and excite the input cleaning gas, thereby forming active ions in the cleaning gas.

[0050] The air outlet is connected to the cleaning port 12. The air outlet is used to output the ionized cleaning gas so that the cleaning gas carrying active ions is input into the coating chamber 11 through the cleaning port 12. The active ions in the cleaning gas will react with the film deposited on the inner wall of the coating chamber 11 and the heating plate 14 and remove it, thereby ensuring the consistency of each process and the cleanliness of the surface of the workpiece to be treated, thereby improving production efficiency and product quality.

[0051] The on / off component 30 is connected to the plasma source 20 and the coating chamber 11 respectively. The on / off component 30 can be opened and closed in a controlled manner. When the on / off component 30 is open, the on / off component 30 connects the gas outlet and the cleaning port 12. The cleaning gas with active ions output from the gas outlet can pass through the on / off component 30 and enter the cleaning port 12, thereby cleaning the inner wall of the coating chamber 11 and the surface of the heating plate 14.

[0052] When the on / off component 30 is closed, the air outlet and cleaning port 12 are disconnected, meaning they cannot communicate. At this time, the coating chamber 11 is disconnected from the plasma source 20. In actual use, during coating treatment, the coating chamber 11 has a high vacuum. Therefore, if the plasma source 20 needs to be disassembled for maintenance, the vacuum in the coating chamber 11 is usually broken by introducing inert gas to make the pressure in both the coating chamber 11 and the plasma source 20 the same as the external atmospheric pressure, allowing the plasma source 20 to separate from the coating chamber 10. After repairing or replacing the plasma source 20, the coating chamber 11 needs to be evacuated again. Both breaking and evacuating the vacuum chamber take a significant amount of time, resulting in a longer maintenance or replacement time for the plasma source 20.

[0053] To reduce the time required for repairing or replacing the plasma source 20, when repair or replacement is needed, the on / off component 30 can be closed to disconnect the vent and cleaning port 12, thus preventing communication between the interior of the plasma source 20 and the interior of the coating chamber 11. At this time, the coating chamber 11 can maintain a vacuum, while the interior of the plasma source 20 can be de-vacuumed to achieve the same atmospheric pressure as the outside atmosphere, facilitating repair or replacement of the plasma source 20.

[0054] After the plasma source 20 is repaired or replaced, the on / off component 30 can be opened to connect the gas outlet and the cleaning port 12. Although the gas inside the plasma source 20 will enter the coating chamber 11 and affect the vacuum level of the coating chamber 11, the amount of gas inside the plasma source 20 is small, and it will not take too much time to re-vacuum the coating chamber 11.

[0055] Thus, during the maintenance or replacement of the plasma source 20, the coating chamber 11 does not need to be evacuated, which also reduces the time spent on re-evacuating the coating chamber 11. This effectively reduces the time spent on the maintenance or replacement of the plasma source 20 and improves the production efficiency of the coating equipment.

[0056] In some embodiments of this application, the on / off component 30 is provided with a connecting port, which is connected to the air outlet and the cleaning port 12 respectively. When the on / off component 30 is open, the connecting port and the cleaning port 12 are connected, and the cleaning gas from the air outlet is sequentially input into the coating chamber 11 through the connecting port and the cleaning port 12. When the on / off component 30 is closed, the connecting port and the cleaning port 12 are disconnected from each other, that is, the air outlet and the connecting port are disconnected from each other.

[0057] When the on / off component 30 is closed, it can separate from the plasma source 20, allowing the plasma source 20 to be separated from the coating chamber 10 in case of a malfunction. This enables the plasma source 20 to be disassembled for repair or replaced. Furthermore, the closure of the on / off component 30 disconnects the cleaning port 12 from the outside environment, ensuring that the coating chamber 11 remains under vacuum even when the plasma source 20 is removed.

[0058] In some embodiments, the plasma source 20 has an exhaust pipe 21 that communicates with the interior of the plasma source 20, and an exhaust port is provided on the exhaust pipe 21. The cleaning gas ionized inside the plasma source 20 is output from the plasma source 20 through the exhaust pipe 21. Further, the on / off assembly 30 is provided with a first connecting pipe 32 that can communicate with the cleaning port 12, and a connecting port is provided at the end of the first connecting pipe 32 away from the coating cavity 10. The first connecting pipe 32 can be connected to the exhaust pipe 21, so that the connecting port and the exhaust port are interconnected.

[0059] The air outlet pipe 21 is provided with a first flange 40 arranged circumferentially around the air outlet, and the first flange 40 is provided with a plurality of first mounting holes spaced apart circumferentially around the air outlet, each first mounting hole penetrating the first flange 40 along the circumferential direction of the air outlet. Furthermore, the first connecting pipe 32 is provided with a second flange 41, and the second flange 41 is provided with a plurality of second mounting holes spaced apart circumferentially around the connecting port, each second mounting hole penetrating the second flange 41 along the axial direction of the connecting port. When the connecting port and the air outlet are aligned, each second mounting hole aligns with one of the first mounting holes.

[0060] The coating equipment also includes a plurality of fasteners 50, each fastener 50 passing through one of the first mounting holes and the corresponding second mounting holes, and connecting the first flange 40 and the connecting flange. That is, the first connecting pipe 32 and the air outlet pipe 21 are connected to each other by the fasteners 50, and the air outlet and the connecting port are connected to each other. Optionally, the fasteners 50 are bolts and nuts, the bolts passing through the second mounting holes and the first mounting holes, and the first flange 40 and the second flange 41 are fixed together by the nuts that are threaded to the bolts.

[0061] It should be noted that in some other embodiments, the fastener 50 may also include only a bolt, and one of the second mounting hole and the first mounting hole may be a threaded hole. The vent flange and the connecting flange are connected to each other by the threaded connection of the bolt and the threaded hole, thereby connecting the vent pipe 21 and the first connecting pipe 32 to each other.

[0062] Thus, when it is necessary to separate the plasma source 20 from the coating chamber 10, it is only necessary to remove the multiple fasteners 50 on the first flange 40 and the second flange 41. After that, the exhaust pipe 21 can be separated from the first connecting pipe, thereby separating the plasma source 20 from the coating chamber 10 for separate maintenance or replacement of the plasma source 20. Furthermore, when removing the multiple fasteners 50 on the first flange 40 and the second flange 41, the connecting port and the cleaning port 12 can be disconnected first to avoid affecting the vacuum level of the vacuum chamber when disassembling the plasma source 20.

[0063] In some specific embodiments, the coating cavity 10 also has a cleaning tube 16, one end of which is connected to the cleaning port 12, and the other end is provided with a third flange 42. The third flange 42 is provided with a plurality of third mounting holes spaced around the circumference of the cleaning tube 16, and each third mounting hole penetrates the third flange 42 along the axial direction of the cleaning tube 16.

[0064] Furthermore, the switching component 30 also includes a second connecting pipe 33 connected to the first connecting pipe 32. The switching component 30 can control the connection or disconnection between the first connecting pipe 32 and the second connecting pipe 33. A fourth flange 43 is provided on the second connecting pipe 33. A plurality of fourth mounting holes are provided on the fourth flange 43 around the second connecting pipe 33 in a circumferential direction. The fourth mounting holes penetrate the fourth flange 43 along the axial direction of the second connecting pipe 33.

[0065] When the second connecting pipe 33 is aligned with the cleaning pipe 16, each fourth mounting hole is aligned with one of the third mounting holes, and each fastener 50 can also be inserted into the fourth mounting hole and the corresponding third mounting hole, so that the third flange 42 and the fourth flange 43 are connected to each other through the fastener 50, thereby making the second connecting pipe 33 and the cleaning pipe 16 interconnected.

[0066] Thus, by disassembling the multiple fasteners 50 on the third flange 42 and the fourth flange 43, the on / off assembly 30 can be separated from the coating chamber 10, allowing the on / off assembly 30 to be disassembled individually. This not only facilitates the individual maintenance or replacement of the on / off assembly 30, but also allows the reaction device to be disassembled into multiple individual components for transport by separating the on / off assembly 30 from the plasma source 20 and the coating chamber 10, thereby reducing the transportation cost of the reaction device.

[0067] In some embodiments of this application, the on / off component 30 includes an automatic on / off element 34, which connects the air outlet and the cleaning port 12 and is configured to connect or disconnect the air outlet and the cleaning port 12 upon receiving a corresponding signal. Furthermore, the coating apparatus also includes a control element, which is communicatively connected to the automatic on / off element 34 and is capable of outputting a signal to control the automatic on / off element 34 to connect or disconnect the air outlet and the cleaning port 12.

[0068] Thus, when the operator needs to disconnect the air outlet and cleaning port 12, they only need to press the corresponding button on the control unit. The control unit sends a signal to the automatic on / off component 34 to disconnect the air outlet and cleaning port 12, and the automatic on / off component 34 closes, thereby disconnecting the air outlet and cleaning port 12 from each other. Alternatively, the control unit sends a signal to the automatic on / off component 34 to connect the air outlet and cleaning port 12, and the automatic on / off component 34 opens, thereby connecting the air outlet and cleaning port 12 to each other. The operator does not need to manually operate the on / off component 30, reducing the operator's workload and improving the automation level of the equipment.

[0069] Optionally, the automatic on / off element 34 is a solenoid valve, and the control element controls whether the solenoid coil inside the solenoid valve is energized to control the opening and closing of the solenoid valve. Specifically, the solenoid valve has a valve that is connected to both the air outlet and the cleaning port 12. The solenoid valve also contains a valve core for controlling the opening and closing of the valve. When the control element energizes the solenoid coil inside the solenoid valve, the generated magnetic field attracts the valve core, opening the valve and allowing clean gas to pass through. At this time, the automatic on / off element 34 is in the open state. When the solenoid coil is de-energized, the magnetic field disappears, and the valve core returns to its original position under the action of a spring or other reset device, closing the valve and preventing fluid flow. At this time, the automatic on / off element 34 is in the closed state.

[0070] In other embodiments, the automatic on / off element 34 can also be a stepper motor valve, where a stepper motor valve uses a stepper motor to control the opening and closing of its internal valve, thereby opening and closing the cleaning port 12 and the air outlet. It should be noted that the automatic on / off element 34 can be any other valve structure capable of independently completing the on / off process, and is not limited here.

[0071] In some embodiments, the coating chamber 11 further includes a detection element 15, which is used to detect the amount of plasma output from the cleaning port 12. The detection element 15 is communicatively connected to a communication element, and when the detection element 15 detects that the amount of plasma in the airflow output from the cleaning port 12 is less than or equal to a preset value, the control element sends a signal to close the automatic on / off element 34.

[0072] In other words, when the detection element 15 detects that the amount of plasma output from the cleaning port 12 is too low, the control element will determine that the cleaning airflow output from the cleaning port 12 is insufficient to clean the inner wall of the coating chamber 11 and the surface of the heating plate 14, and the plasma source 20 needs to be repaired or replaced. At this time, the control element will control the automatic on / off element 34 to close, thereby disconnecting the connection between the air outlet and the cleaning port 12, allowing the operator to begin repairing or replacing the plasma source 20.

[0073] In some specific embodiments, the control unit is also equipped with a reminder component, such as an audible and visual alarm. When the detection component 15 detects that the number of plasmas output from the cleaning port 12 is too low, the control unit simultaneously activates the reminder component to issue an alarm, so as to remind the operator that the plasma source 20 needs to be repaired or replaced.

[0074] Furthermore, the plasma source 20 is also equipped with a valve for opening and closing the air inlet. The control unit is electrically connected to the valve and the plasma source 20. When the detection port detects that the amount of plasma output from the cleaning port 12 is too low, the control unit will not only disconnect the air outlet from the cleaning port 12, but also control the valve to close the air inlet to stop the input of cleaning gas into the plasma source 20. At the same time, the control unit will also stop the plasma source 20 from ionizing and exciting the cleaning gas to save energy.

[0075] Optionally, the detection element 15 is a current probe. The current probe is used to estimate the plasma density by inserting a conductive probe into the plasma in the clean gas flow and applying a bias voltage, measuring the current between the probe and the plasma, and plotting a current-voltage characteristic curve.

[0076] In some specific embodiments, the on / off assembly 30 further includes a manual on / off element 35, an automatic on / off element 34 and a manual on / off element 35 that are interconnected, and one of the automatic on / off element 34 and the manual on / off element 35 is connected to the cleaning port 12 and the other is connected to the air outlet, and the manual on / off element 35 is configured to be able to open and close under the action of external force.

[0077] In other words, an automatic shut-off device 34 and a manual shut-off device 35 are provided between the plasma source 20 and the coating chamber 10. Only when both the automatic shut-off device 34 and the manual shut-off device 35 are in the open state can the cleaning gas from the outlet flow into the cleaning port 12 through the automatic shut-off device 34 and the manual shut-off device 35, thereby cleaning the inner wall of the coating chamber 11 and the heating element.

[0078] As long as either the automatic on / off switch 34 or the manual on / off switch 35 is closed, the air outlet and the cleaning port 12 will be disconnected. In actual use, the manual on / off switch 35 remains open. When it is necessary to disconnect the air outlet and the cleaning port 12 for maintenance of the plasma source 20, the automatic on / off switch can be turned off via the control unit. However, under special conditions, such as a malfunction of the automatic on / off switch 34 or the control unit, the operator can use the manual on / off switch 35 and close it to disconnect the air outlet and the cleaning port 12.

[0079] In some specific embodiments, the manual on / off element 35 includes a valve body 36 and a movable handle 37. One end of the valve body 36 is connected to the automatic on / off element 34 in the communication direction, and the other end is connected to the air outlet or cleaning port 12. That is, when the automatic on / off element 34 is connected to the cleaning port 12, the valve body 36 is connected to the air outlet, and when the automatic on / off element 34 is connected to the air outlet, the valve body 36 is connected to the cleaning port 12.

[0080] The movable handle 37 is movably mounted on the valve body 36, and during its movement, the movable handle 37 controls the opening and closing of the valve body 36. Thus, when the operator needs to manually control the manual on / off element 35, they can operate the movable handle 37 to control the opening and closing of the valve body 36, thereby controlling the opening and closing of the manual on / off element 35. Optionally, the movable handle 37 is a circular handle; when the movable handle 37 rotates clockwise, the valve body 36 opens; when the movable handle 37 rotates counterclockwise, the valve body 36 closes.

[0081] Optionally, the valve body 36 is a stop valve, and the movable handle 37 is connected to the valve core of the stop valve to control the movement of the valve core within the stop valve, thereby controlling the opening and closing of the stop valve. It is understood that in some other embodiments, the on / off assembly 30 may also include only one of an automatic on / off element 34 and a manual on / off element 35.

[0082] In one specific embodiment, the automatic on / off switch 34 is connected to the gas outlet, and the manual on / off switch 35 is connected to the cleaning port. That is, the manual on / off switch 35 is located between the automatic on / off switch 34 and the coating chamber 10. Therefore, when the manual on / off switch 35 is closed, the connection between the automatic on / off switch 34 and the cleaning port 12 is also broken. At this time, not only can the plasma source 20 be disassembled, but the automatic on / off switch 34 can also be disassembled for maintenance. Furthermore, since the manual on / off switch 35 is in the closed state, even if the automatic on / off switch 34 is disassembled, it will not affect the vacuum level in the vacuum chamber.

[0083] Specifically, the end of the automatic switching component 34 away from the manual switching component 35 is provided with a first connecting pipe 32 and a first flange 40, and the end of the manual switching component 35 away from the automatic switching component 34 is provided with a second connecting pipe 33 and a fourth flange 43. Further, the end of the automatic switching component 34 near the manual switching component 35 is provided with a fifth flange 44, and the end of the manual switching component 35 near the automatic switching component 34 is provided with a sixth flange 45. The fifth flange 44 and the sixth flange 45 can be connected by fasteners 50 to connect the manual switching component 35 and the automatic switching component 34. The method of connecting the fifth flange 44 and the sixth flange 45 by fasteners 50 is similar to that of the first flange 40 and the second flange 41 described above, and will not be repeated here.

[0084] In some embodiments of this application, see [reference] Figure 3 The coating equipment also includes a gas distributor 51 and a three-way valve 52. The gas distributor 51 is connected to the gas outlet and the cleaning port 12. The clean gas output from the gas outlet is distributed into the cleaning port 12 by the gas distributor 51. The three-way valve 52 includes a first port 53, a second port 54, and a third port 55. The first port 53 is used to input process gas, the second port 54 is connected to the process port 13, and the third port 55 is connected to the gas distributor 51. The second port 54 can be selectively connected to either the first port 53 or the third port 55.

[0085] Thus, when the second port 54 is connected to the first port 53, the process gas in the process gas source 60 is input into the process port 13 through the first port 53 and the second port 54, thereby inputting the process gas into the coating chamber 11 for coating the workpiece. When the second port 54 is connected to the third port 55, the gas distributor 51 will distribute a portion of the cleaning gas into the process port 13 through the third port 55 and the second port 54, so that the cleaning gas can simultaneously clean the inner wall of the coating chamber 11 and the heating plate 14 through the process port 13 and the cleaning port 12.

[0086] In actual use, the reaction equipment also includes a spray plate 61 installed in the coating chamber 11. The spray plate 61 has multiple spray nozzles 62, each of which is connected to a process port 13, so that process gas can be evenly sprayed onto the workpiece to be treated on the heating plate 14 through the spray plate 61. By connecting the process port 13 to the gas distribution component 51, cleaning gas can also be evenly sprayed onto the heating plate 14 through the spray plate 61, thereby improving the cleaning effect on the heating plate 14.

[0087] This application also provides a coating apparatus, which includes the reaction device as described in any of the above embodiments. This coating apparatus can be a chemical vapor deposition (CVD) apparatus, preferably a plasma-enhanced chemical vapor deposition (PECVD) apparatus. It is understood that the coating apparatus of this application is not limited to this; those skilled in the art, after reading the technical solution of this application, can obviously apply it to other process equipment, such as atomic layer deposition (ALD) apparatus, which are not limited here. Furthermore, to cooperate with the above-described reaction device, the coating apparatus also includes a vacuum device and a reaction gas source, etc.

[0088] The above-mentioned reaction apparatus has at least the following advantages:

[0089] When the plasma source 20 needs maintenance or replacement, the on / off assembly 30 can be closed first to disconnect the exhaust port from the cleaning port 12, thus preventing the interior of the plasma source 20 from communicating with the interior of the coating chamber 11. At this time, the coating chamber 11 can maintain a vacuum state, while the interior of the plasma source 20 can be de-vacuumed to achieve the same atmospheric pressure as the outside atmosphere, facilitating maintenance or replacement of the plasma source 20.

[0090] After the plasma source 20 is repaired or replaced, the on / off component 30 can be opened to connect the gas outlet and the cleaning port 12. Although the gas inside the plasma source 20 will enter the coating chamber 11 and affect the vacuum level of the coating chamber 11, the amount of gas inside the plasma source 20 is small, and it will not take too much time to re-vacuum the coating chamber 11.

[0091] Thus, during the maintenance or replacement of the plasma source 20, the coating chamber 11 does not need to be evacuated, which also reduces the time spent on re-evacuating the coating chamber 11. This effectively reduces the time spent on the maintenance or replacement of the plasma source 20 and improves the production efficiency of the coating equipment.

[0092] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0093] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A reaction apparatus, characterized in that, The reaction apparatus includes: The coating cavity (10) has a coating chamber (11), and a cleaning port (12) is provided on the inner wall of the coating chamber (11). A heating plate (14) is provided inside the coating chamber (11), and the heating plate (14) is provided with a bearing position for bearing the workpiece to be processed; The plasma source (20) has an inlet and an outlet connected to each other. The inlet is used to input clean gas, and the plasma source (20) is configured to ionize and excite the input clean gas. The outlet is used to output the ionized clean gas. The on / off component (30) is connected to the plasma source (20) and the coating chamber (10) respectively, and the on / off component (30) can be opened and closed in a controlled manner. When the on / off component (30) is opened, the on / off component (30) connects the air outlet and the cleaning port (12). The cleaning gas output from the air outlet can clean the inner wall of the coating chamber (11) and / or the surface of the heating plate (14) through the cleaning port (12). When the on / off component (30) is closed, the air outlet and the cleaning port (12) are disconnected from each other.

2. The reaction apparatus according to claim 1, characterized in that, The on / off assembly (30) is provided with a connecting port, which is connected to the air outlet and the cleaning port (12) respectively. When the on / off assembly (30) is opened, the connecting port is connected to the cleaning port (12). When the on / off component (30) is closed, the connection port and the cleaning port (12) are disconnected from each other, and the on / off component (30) can be separated from the plasma source (20).

3. The reaction apparatus according to claim 2, characterized in that, The plasma source (20) has an exhaust pipe (21), an exhaust port is provided on the exhaust pipe (21), and a first flange (40) is arranged circumferentially around the exhaust port. The first flange (40) is provided with a plurality of first mounting holes spaced circumferentially around the exhaust port. The on / off assembly (30) is provided with a first connecting pipe (32), the first connecting pipe (32) is provided with a connecting port, and a second flange (41) is provided around the connecting port. The second flange (41) is provided with a plurality of second mounting holes spaced around the connecting port. When the connecting port is aligned with the air outlet, each second mounting hole is aligned with one of the first mounting holes. The reaction device also includes a plurality of fasteners (50), each of the fasteners (50) passing through one of the first mounting holes and the corresponding second mounting holes, and connecting the first flange (40) and the connecting flange.

4. The reaction apparatus according to claim 1, characterized in that, The on / off assembly (30) includes an automatic on / off element (34) that connects the air outlet and the cleaning port (12) and is configured to open or close in response to a corresponding signal. The reaction device also includes a control unit that is communicatively connected to the automatic on / off element (34) and is capable of outputting signals to control the automatic on / off element (34) to open and close.

5. The reaction apparatus according to claim 4, characterized in that, The coating chamber (11) also includes a detection element (15) for detecting the amount of plasma in the airflow output from the cleaning port (12); The detection element (15) is communicatively connected to the control element, and when the detection element (15) detects that the number of plasmas is less than or equal to a preset value, the control element sends a signal to shut down the automatic on / off element (34).

6. The reaction apparatus according to claim 4, characterized in that, The on / off assembly (30) also includes a manual on / off element (35), the automatic on / off element (34) and the manual on / off element (35) are interconnected, and one of the automatic on / off element (34) and the manual on / off element (35) is connected to the cleaning port (12) and the other is connected to the air outlet. The manual on / off element (35) is configured to open or close under the action of external force.

7. The reaction apparatus according to claim 6, characterized in that, The manual on / off component (35) includes a valve body (36) and a movable handle (37). The movable handle (37) is movably mounted on the valve body (36), and the movable handle (37) can control the valve body (36) to open and close during the operation.

8. The reaction apparatus according to claim 6, characterized in that, The automatic on / off switch (34) and the manual on / off switch (35) are detachably connected.

9. The reaction apparatus according to claim 1, characterized in that, The reaction device also includes a gas distribution component (51) and a three-way valve (52), wherein the gas distribution component (51) is connected to the gas outlet and the cleaning port (12); The inner wall of the coating chamber (11) is also provided with a process port (13). The three-way valve (52) includes a first port (53), a second port (54) and a third port (55). The first port (53) is used to input process gas. The second port (54) is connected to the process port (13). The third port (55) is connected to the gas distribution component (51). The second port (54) can be selectively connected to either the first port (53) or the third port (55).

10. A coating apparatus, characterized in that, Includes the reaction apparatus as described in any one of claims 1-9.

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