Gas diffusion device and coating system

Abstract

The application relates to a gas diffusion device and a coating system. The gas diffusion device comprises a main body, a shunt assembly and a gas path assembly. The main body is formed with a plurality of diffusion units, each diffusion unit comprising a plurality of diffusion cavities and a gas inlet. A plurality of through holes penetrating in the same direction are formed on the inner wall of the same side of all the diffusion cavities. The shunt assembly comprises a plurality of shunt members, each diffusion cavity being connected with a shunt member. The gas path assembly is arranged to extend into the corresponding diffusion cavity through the gas inlet and communicate with the shunt member in the diffusion cavity. Compared with the diffusion unit of the coating gas diffusion device in the prior art, the coating gas diffusion device in the application divides the diffusion unit into a plurality of diffusion cavities, reduces the space size of the diffusion cavities, reduces the difference in the flow of the coating gas in the diffusion cavities, and effectively improves the coating uniformity.

Description

Technical Field

[0001] This application relates to the field of coating technology, and in particular to a gas diffusion device and coating system. Background Technology

[0002] With advancements in coating technology, AMOLED (Active Matrix Organic Light Emitting Diode) is increasingly demanding higher uniformity in CVD (Chemical Vapor Deposition) film layers.

[0003] In existing technologies, coating gas diffuser plates (coating gas diffuser devices) are widely used in coating systems to improve the uniformity of coating gas and thus enhance the uniformity of CVD (chemical vapor deposition) films. However, the size of the coating gas diffuser unit in existing coating gas diffuser devices is relatively large (1850mm*1500mm). Correspondingly, the size of the diffuser cavity for coating gas diffusion within the coating gas diffuser unit is also large. This can easily lead to a large difference in the flow rate of coating gas around the perimeter and in the center after the gas is diverted by the diverter, resulting in poor CVD coating uniformity. Summary of the Invention

[0004] Therefore, it is necessary to provide a gas diffusion device and a coating system to solve the above problems.

[0005] A gas diffusion device, comprising:

[0006] The main body has a plurality of arrayed diffusion units formed thereon. Each diffusion unit includes a plurality of diffusion cavities and an air inlet. Each air inlet is connected to each diffusion cavity in a one-to-one correspondence, and each diffusion cavity is isolated from each other. A plurality of through holes are provided on the inner wall of the same side of all the diffusion cavities, and each through hole is configured to connect the corresponding diffusion cavity to the outside of the same side of the main body.

[0007] The flow splitting assembly includes a plurality of flow splitting elements, each of the diffusion cavities is equipped with a flow splitting element, and each flow splitting element is configured to split the airflow into the corresponding diffusion cavity;

[0008] The air passage assembly is configured to extend into the corresponding diffuser cavity through each of the air inlets and communicate with the flow divider in the diffuser cavity;

[0009] Each of the diffusion units has a first preset size L1 along the first direction and a second preset size L2 along the second direction.

[0010] In one embodiment, all diffusion cavities within each diffusion unit have the same size along a first direction, and all diffusion cavities within each diffusion unit have the same size along a second direction.

[0011] In one embodiment, each of the diffusion units includes four diffusion chambers and an air inlet.

[0012] In one embodiment, each of the diffusion units includes a plurality of diffusion plates and support plates, and each of the diffusion plates and each of the support plates are arranged in a one-to-one correspondence.

[0013] Each of the diffuser plates has several through holes extending in the same direction; the support plate surrounds one side of the diffuser plate and together with the diffuser plate forms the diffuser cavity, and the support plate has an air inlet communicating with the diffuser cavity.

[0014] In one embodiment, the support plate includes a first sub-support plate and a second sub-support plate. The first sub-support plate extends closed around the edge of the diffuser plate and protrudes from one side surface of the diffuser plate. The first sub-support plate and the diffuser plate together form the diffuser cavity. The second sub-support plate is fitted to the end of the first sub-support plate opposite to the diffuser plate and protrudes from the side of the first sub-support plate near the diffuser cavity. The second sub-support plate surrounds and forms the air inlet.

[0015] In one embodiment, the gas path assembly includes a main gas path and a plurality of branch gas path pipes. One end of the main gas path is configured to communicate with an external gas source, and the other end of the main gas path is configured to communicate with each of the branch gas path pipes. The end of each branch gas path pipe facing away from the main gas path is configured to extend into the corresponding diffuser cavity through a different air inlet and communicate with the diverter in the diffuser cavity.

[0016] In one embodiment, the opening size of the through hole at the end near the diffusion cavity is larger than the opening size at the end away from the diffusion cavity.

[0017] In one embodiment, the inner wall of the diffusion cavity having the through hole has a middle portion and an edge portion disposed around the middle portion, wherein the dimension of the middle portion along the through hole direction is greater than the dimension of the edge portion along the through hole direction.

[0018] In one embodiment, the middle portion has a third preset size L3 along the through-hole direction, and the edge portion has a fourth preset size L4 along the through-hole direction, where L4 = 1 / 2 * L3.

[0019] A coating system includes a gas diffusion device as described in the foregoing embodiments.

[0020] The aforementioned gas diffusion device and coating system include a main body, a flow-diverting component, and a gas path component. The main body has a plurality of arrayed diffusion units, each diffusion unit including a plurality of diffusion chambers and an air inlet. Each air inlet is connected to each diffusion chamber in a one-to-one correspondence, and the diffusion chambers are mutually isolated. A plurality of through holes extending in the same direction are formed on the inner wall of the same side of all diffusion chambers, and each through hole is configured to connect the corresponding diffusion chamber to the outside of the same side of the main body. The flow-diverting component includes a plurality of flow-diverting elements, and each diffusion chamber is fitted with one flow-diverting element, each flow-diverting element being configured to divert airflow to the corresponding diffusion chamber. The gas path component is configured to extend into the corresponding diffusion chamber through each air inlet and communicate with the flow-diverting element within that diffusion chamber. Each diffusion unit has a first preset dimension L1 along a first direction and a second preset dimension L2 along a second direction. Compared to the diffusion units in existing coating gas diffusion devices, the diffusion unit in this application divides the diffusion unit into several diffusion chambers, thereby reducing the size of the diffusion chambers and decreasing the variation in coating gas flow rate within the diffusion chambers, effectively improving coating uniformity. Furthermore, the diffusion unit provided in this application, while achieving uniform diffusion of the coating gas within the diffusion chambers, also reduces the difference in corrosion levels between the walls of the through holes in the middle and peripheral portions of the diffusion unit. This avoids the need for repeated cleaning of the severely corroded through holes in the middle portion during gas diffusion device cleaning. Thus, by uniformly cleaning the through holes in the middle and peripheral portions of the gas diffusion device, significant differences in the hole diameter between the middle and peripheral portions can be avoided, thereby extending the service life of the gas diffusion device and reducing costs. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the gas diffusion device in this application.

[0022] Figure 2 This is a schematic diagram of the diffusion unit in this application.

[0023] Figure 3 This is a cross-sectional structural diagram of the diffusion unit in this application.

[0024] Figure 4 This is a schematic diagram of the explosive structure of the diffusion unit in this application.

[0025] Figure Labels

[0026] Gas diffusion device 100;

[0027] Main body 10; diffuser plate 101; through hole 1011; support plate 102; first sub-support plate 1021; second sub-support plate 1022; diffuser unit 103; diffuser cavity 1031; air inlet 1032;

[0028] Flow divider assembly 11; Flow divider component 111;

[0029] Gas circuit assembly 12; Gas main pipe 121; Gas branch pipe 122;

[0030] First preset size L1; second preset size L2; third preset size L3; fourth preset size L4. Detailed Implementation

[0031] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0032] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0033] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0034] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0035] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0036] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0037] With advancements in coating technology, AMOLED (Active Matrix Organic Light Emitting Diode) is increasingly demanding higher uniformity in CVD (Chemical Vapor Deposition) film layers.

[0038] In existing technologies, coating gas diffuser plates (coating gas diffuser devices) are widely used in coating systems to improve the uniformity of coating gas and thus enhance the uniformity of CVD (chemical vapor deposition) films. However, the size of the coating gas diffuser unit in existing coating gas diffuser devices is relatively large (1850mm*1500mm). Correspondingly, the size of the diffuser cavity 1031 used for coating gas diffusion within the coating gas diffuser unit is also large. This can easily lead to a large difference in the flow rate of coating gas around the perimeter and in the center after the coating gas is diverted by the diverter, resulting in poor CVD coating uniformity.

[0039] Based on this, in order to solve the above problems, this application provides a coating gas diffusion device 100 in one or more embodiments. The coating gas diffusion device 100 divides the diffusion unit 103 into a plurality of diffusion cavities 1031 to reduce the spatial size of the diffusion cavities 1031, thereby reducing the difference in coating gas flow rate in the diffusion cavities 1031 and effectively improving coating uniformity.

[0040] For details, please see Figures 1 to 3 The coating gas diffusion device 100 includes a main body 10, a flow splitting assembly 11, and a gas path assembly 12. The main body 10 has a plurality of arrayed diffusion units 103. Each diffusion unit 103 includes a plurality of diffusion chambers 1031 and an air inlet 1032. Each air inlet 1032 is connected to each diffusion chamber 1031 in a one-to-one correspondence, and the diffusion chambers 1031 are mutually isolated. A plurality of through holes 1011 extending in the same direction are formed on the inner wall of the same side of all diffusion chambers 1031, and each through hole 1011 is configured to connect the corresponding diffusion chamber 1031 to the outside of the same side of the main body 10.

[0041] The diversion assembly 11 includes a plurality of diversion components 111, and each of the diffusion cavities 1031 is equipped with a diversion component 111. Each diversion component 111 is configured to divert the coating gas to the corresponding diffusion cavity 1031.

[0042] It is understood that the diverter 111 is an important component of the coating gas diffusion device 100, and its main function is to uniformly distribute the coating gas to various regions of the diffusion cavity 1031 to ensure that the coating gas can diffuse evenly to the target area. The diverter 111, through its special structural design, such as having multiple tiny channels or pores, allows the coating gas to be uniformly distributed to various parts of the diffusion plate 101 through these channels.

[0043] Furthermore, the channel design of the diverter 111 includes its shape, size, and distribution density, all of which affect the distribution effect of the coating gas.

[0044] Furthermore, the porosity and pore size distribution of the flow divider 111 are crucial to the uniformity of the coating gas. Appropriate porosity and pore size ensure that the coating gas does not generate excessive resistance during passage and can diffuse uniformly. In this application, the shape, size, distribution density, porosity, and pore size distribution of the channel design of the flow divider 111 can all be adjusted according to actual needs. The channel design of the flow divider 111 is well known to those skilled in the art and will not be elaborated upon here.

[0045] The gas path assembly 12 is configured to extend into the corresponding diffusion cavity 1031 through each of the air inlets 1032 and communicate with the flow divider 111 within the diffusion cavity 1031. It is understood that the gas path assembly 12 is connected to an external gas source and is used to deliver coating gas to the flow divider 111.

[0046] During the operation of the coating gas diffusion device 100, coating gas from an external gas source is delivered to the diverter 111 within each of the diffusion chambers 1031 via the gas path assembly 12. After the coating gas is input into the diverter 111, the diverter 111 can evenly distribute the coating gas to each region of the diffusion chamber 1031 where the diverter 111 is located. Furthermore, the uniformly dispersed coating gas within the diffusion chamber 1031 flows to the outside through each of the through holes 1011, thereby achieving the function of uniform coating.

[0047] In this application, each of the diffusion units 103 has a first preset size L1 along the first direction and a second preset size L2 along the second direction.

[0048] It should be noted that the coating gas diffusion device 100 is generally plate-shaped, and correspondingly, each diffusion unit 103 on the coating gas diffusion device 100 is also plate-shaped. It can be understood that "plate-shaped" refers to having a large flat surface and a relatively thin thickness, similar to common sheet materials. Furthermore, plate-shaped materials typically possess good planar stability and a certain degree of mechanical strength. Their thinness reduces weight and saves space, facilitating processing and transportation.

[0049] In this application, the first direction corresponds to the length direction of the coating gas diffusion device 100, and the second direction corresponds to the width direction of the coating gas diffusion device 100. It is understood that the coating gas diffusion device 100 and the diffusion unit 103 may be plate-shaped, therefore, the first direction and the second direction may also correspond to other directions depending on the specific shape of the coating gas diffusion device 100 and the diffusion unit 103.

[0050] In this application, the first preset size meets the condition: L1 = 1850 mm, and the second preset size meets the condition: L1 = 1500 mm. That is, compared to the diffusion unit 103 in the prior art coating gas diffusion device 100, the coating gas diffusion device 100 in this application divides the diffusion unit 103 into several diffusion chambers 1031, thereby reducing the spatial size of the diffusion chambers 1031, reducing the difference in coating gas flow rate within the diffusion chambers 1031, and effectively improving coating uniformity.

[0051] Furthermore, the diffusion unit 103 provided in this embodiment of the application, while achieving uniform diffusion of the coated gas in the diffusion cavity 1031, can reduce the difference in corrosion degree between the walls of the through holes 1011 on the middle part and the surrounding edge part of the diffusion unit 103. This avoids the need to repeatedly clean the severely corroded through holes 1011 in the middle part when cleaning the gas diffusion device 100. In this way, by uniformly cleaning the through holes 1011 on the middle part and the surrounding edge part of the gas diffusion device 100, a large difference in the pore size of the through holes 1011 on the middle part and the surrounding edge part can be avoided, thereby improving the service life of the gas diffusion device 100 and helping to reduce costs.

[0052] It should also be noted that, in this application, the specific values ​​of the first preset size and the second preset size are set based on the actual size of the gas diffusion device 100 in the prior art. The core of this invention is to reduce the difference in coating gas flow rate within the diffusion chambers 1031 by dividing the larger diffusion unit 103 into several spatially appropriate diffusion cavities 1031, thereby effectively improving coating uniformity. Therefore, the specific values ​​of the first preset size and the second preset size can be adjusted according to actual conditions.

[0053] In some embodiments, see Figure 2 and Figure 3 All the diffusion cavities 1031 in each diffusion unit 103 have the same size along the first direction, and all the diffusion cavities 1031 in each diffusion unit 103 have the same size along the second direction.

[0054] It is understood that each diffusion unit 103 has multiple diffusion cavities 1031 of the same size, which facilitates modular production of the diffusion unit 103, saving production costs and improving production efficiency.

[0055] Furthermore, all of the diffusion cavities 1031 adopt the same size, which is beneficial for assembling the same flow divider 111 in the diffusion cavity 1031 and can facilitate the control of the gas path assembly 12 to deliver coating gas to each of the diffusion cavities 1031 at the same flow rate, thus facilitating control and management.

[0056] Further, please see Figure 2 and Figure 3 The specific number of diffusion cavities 1031 formed in each diffusion unit 103 is not limited. Specifically, in the embodiments of this application, each diffusion unit 103 includes four diffusion cavities 1031 and an air inlet 1032.

[0057] It is understandable that if the size of the diffusion cavity 1031 is too large, it is easy to cause a large difference in the flow rate of the coating gas around the periphery and the middle after the coating gas is diverted by the diverter 111, which in turn leads to poor uniformity of CVD coating.

[0058] Furthermore, the length or width of the diffusion cavity 1031 determines the diffusion area of ​​the coating gas. A larger length or width can increase the diffusion range of the coating gas, but it may also lead to a decrease in the flow velocity of the coating gas, affecting the diffusion efficiency.

[0059] Based on this, by dividing the diffusion unit 103 into four diffusion cavities 1031 of uniform size, this application can ensure that the diverter 111 achieves a better diversion effect in the diffusion cavity 1031, so that the difference in coating gas flow rate between the periphery and the middle of the diffusion cavity 1031 after diversion by the diverter 111 is small, thereby achieving a uniform coating effect.

[0060] It should be noted that the specific number of diffusion cavities 1031 formed in each diffusion unit 103 was obtained through experimental testing. The relevant parameters and steps of the experimental testing are conventional techniques for those skilled in the art and will not be described in detail here.

[0061] It can also be noted that the specific shape of the diffusion cavity 1031 also affects the uniformity of the diffusion of the coating gas. In this application, the specific shape of the diffusion cavity 1031 is not limited, for example, the diffusion cavity 1031 is circular, rectangular, polygonal, etc.

[0062] Specifically, the symmetry of the circular diffusion cavity 1031 allows the coating gas to diffuse relatively uniformly from the center to the surrounding area. If the size and distribution of the circular diffusion cavity 1031 are reasonable, it can effectively reduce eddies and local accumulation of the coating gas during the diffusion process, thereby improving the uniformity of the coating gas.

[0063] The rectangular diffusion cavity 1031 is suitable for specific process requirements, such as diffusion of coating gases on a large-area substrate. However, the rectangular diffusion cavity 1031 may result in uneven distribution of the coating gas at the corners. To improve uniformity, it is typically necessary to optimize the aspect ratio of the diffusion cavity 1031 and the location of the coating gas inlet.

[0064] The polygonal diffuser cavity 1031 provides more flexible design space to adapt to complex coating gas distribution requirements. By rationally designing the number of sides and angles of the polygon, the flow path of the coating gas can be optimized, local resistance can be reduced, and thus the uniformity of the coating gas can be improved.

[0065] In some embodiments, see Figure 2 and Figure 3Each of the diffusion units 103 includes a plurality of diffusion plates 101 and support plates 102, and each of the diffusion plates 101 and each of the support plates 102 are arranged in a one-to-one correspondence.

[0066] Each of the diffuser plates 101 has a plurality of through holes 1011 extending in the same direction. The support plate 102 surrounds one side of the diffuser plate 101 and together with the diffuser plate 101 forms the diffuser cavity 1031, and the support plate 102 has an air inlet 1032 communicating with the diffuser cavity 1031.

[0067] It is understood that the support plate 102 possesses good mechanical strength and stability to support the diffuser plate 101 and ensure its reliability during operation. In this application, the support plate 102 and the diffuser plate 101 are connected through processes such as diffusion bonding to achieve higher bonding strength.

[0068] Furthermore, the support plate 102 may be provided with a guide channel to guide the flow of coating gas, ensuring that the coating gas can be evenly distributed to each area of ​​the diffusion cavity 1031.

[0069] In addition, in some high-temperature or special environments, the support plate 102 is made of antioxidant material to improve the reliability and service life of the product.

[0070] It should be noted that the specific material of the support plate 102 is not limited. For example, the support plate 102 can be a metal, a composite material, or a corrosion-resistant material. Specifically, metal materials include aluminum alloys, copper and copper alloys, nickel and nickel alloys, etc. These materials have good thermal conductivity and mechanical strength, making them suitable for applications requiring high thermal conductivity and strength. Composite materials, such as carbon fiber paper, are used to meet specific performance requirements. Corrosion-resistant materials, such as titanium alloys, are selected.

[0071] Furthermore, the specific material selection for the support plate 102 needs to be considered in conjunction with the specific working environment. For example, in fuel cells, the backsheet of the gas diffusion layer is usually made of materials such as carbon fiber paper, which has good air permeability and conductivity. In semiconductor manufacturing, the backsheet may need to be diffused and bonded to the target material to achieve high-precision material bonding.

[0072] In some embodiments, see Figure 3 and Figure 4The support plate 102 includes a first sub-support plate 1021102 and a second sub-support plate 1022102. The first sub-support plate 1021102 extends closedly around the edge of the diffuser plate 101 and protrudes from one side surface of the diffuser plate 101. The first sub-support plate 1021102 and the diffuser plate 101 together form the diffuser cavity 1031. The second sub-support plate 1022102 is fitted to the end of the first sub-support plate 1021102 opposite to the diffuser plate 101 and protrudes from the side of the first sub-support plate near the diffuser cavity 1031. The second sub-support plate 1022102 surrounds and forms the air inlet 1032.

[0073] It is understood that the specific connection methods between the first sub-support plate 1021102 and the second sub-support plate 1022102, and between the first sub-support plate 1021102 and the diffuser plate 101, are not limited. For example, mechanical connection, welding, adhesive connection, and tenon and mortise connection can be used between the first sub-support plate 1021102 and the second sub-support plate 1022102, and between the first sub-support plate 1021102 and the diffuser plate 101.

[0074] Specifically, mechanical connections are methods of fixing plates together using mechanical components (such as bolts, screws, and rivets). Mechanical connections specifically include: bolted connections, screwed connections, and riveted connections.

[0075] Bolt connections offer advantages such as strong connections, ease of disassembly and replacement, and suitability for applications requiring frequent assembly and disassembly. Screw connections are characterized by simple operation and high connection strength, making them suitable for thin-plate connections; for example, they can be used in this application to connect the first sub-support plate 1021102 and the second sub-support plate 1022102, and the first sub-support plate 1021102 and the diffuser plate 101. Rivet connections offer strong connections and are shear-resistant welded connections.

[0076] Welding is a method of joining plates together by heating the surfaces to melt and bond them together. Specific welding methods include spot welding, seam welding, and gas shielded welding. Spot welding is fast, simple to operate, and improves assembly efficiency, and is suitable for joining thin plates. Seam welding offers high strength and good sealing, making it suitable for long seam connections. Gas shielded welding provides high-quality welds and is suitable for various metal materials.

[0077] Adhesive bonding is a method of joining panels together using adhesives. Adhesive bonding includes structural adhesive bonding and hot melt adhesive bonding. Structural adhesive bonding offers high bond strength, is suitable for joining various materials, and produces a smooth joint. Hot melt adhesive bonding offers fast bonding speed, is easy to operate, and is suitable for thermoplastic materials.

[0078] Mortise and tenon joints are a traditional woodworking method of connection, achieved through the interlocking of tenons and mortises. Mortise and tenon joints offer strong connections, require no nails or glue, and possess high artistic value.

[0079] It should be noted that when selecting the specific connection method between the first sub-support plate 1021102 and the second sub-support plate 1022102, and between the first sub-support plate 1021102 and the diffuser plate 101, the materials of the first sub-support plate 1021102, the second sub-support plate 1022102, and the diffuser plate 101 should be fully considered. For example, if the three are metal plates, welding and riveting are suitable; if the three are wood, mortise and tenon joints and screw connections are suitable; and plastic plates are suitable for snap-fit ​​and adhesive connections.

[0080] In addition, the uses of the first sub-support plate 1021102, the second sub-support plate 1022102, and the diffuser plate 101 need to be considered, and an appropriate connection method should be selected according to the usage scenario of the plates. For example, bolt connection is suitable if the three need to be frequently disassembled and assembled, and welding or bonding is suitable if the three need to be sealed.

[0081] Furthermore, the strength requirements of the first sub-support plate 1021102, the second sub-support plate 1022102, and the diffuser plate 101 also need to be considered, and the connection method should be selected according to the load borne by the plates. For example, welding or riveting is suitable for high-load applications, while snap-fit ​​or adhesive bonding is suitable for low-load applications.

[0082] Finally, appearance and cost requirements must be considered. If a high aesthetic standard is desired, mortise and tenon joints, adhesive bonding, or gluing can be used to avoid protruding screws or rivets. Different connection methods have significantly different costs. For example, bolted connections are less expensive, welding and riveting are more expensive, while adhesive connections have a moderate cost.

[0083] In this application, a suitable connection method can be selected according to the actual situation to ensure the stability and convenience of the connection between the first sub-support plate 1021102, the second sub-support plate 1022102 and the diffuser plate 101.

[0084] In some embodiments, see Figure 1 and Figure 2 The gas path assembly 12 includes a main gas path 121 and a plurality of branch gas path pipes 122. One end of the main gas path 121 is configured to communicate with an external gas source, and the other end of the main gas path 121 is configured to communicate with each of the branch gas path pipes 122. The end of each branch gas path pipe 122 opposite to the main gas path 121 is configured to extend into a corresponding diffuser cavity 1031 through a different air inlet 1032, and communicate with the diverter 111 in the diffuser cavity 1031.

[0085] It is understandable that the specific connection method between the main gas pipe 121 and the branch gas pipe 122 is not limited, such as: threaded connection, welding connection, socket connection, adhesive connection, flange connection, pipe connector connection, grooved connection, compression fitting connection, hot melt connection and electrofusion connection, etc.

[0086] Specifically, threaded connections, also known as threaded joints, connect pipes to each other or pipes to valves using internal and external threads. They are suitable for connecting steel pipes, copper pipes, and high-pressure pipelines. Threaded connections are convenient to use and offer advantages such as reliable connection, good versatility, and the ability to be disassembled and reused.

[0087] Welded connections are made by joining pipes together using welding processes. They are characterized by strong and durable joints, good sealing, high joint strength, and low maintenance requirements.

[0088] Socket joints involve inserting a pipe into the socket of a fitting, and then sealing it with a sealing material (such as a rubber ring) or a filler material (such as lead oxide). Socket joints offer a simple and quick connection and are suitable for cast iron pipes, ceramic pipes, plastic pipes, and more.

[0089] Adhesive bonding uses adhesives to bond pipes and fittings together. It is easy to use, cures quickly, and is suitable for drainage systems.

[0090] A flange connection involves fixing two pipes or fittings to flanges respectively, and then connecting the flanges together using bolts and gaskets. Flange connections offer advantages such as good strength and sealing performance, and a wide range of applications.

[0091] Pipe connectors achieve pressure sealing through a combination of stainless steel and rubber components. They offer flexible connections, rapid installation without the need for open flame, and high versatility.

[0092] Grooved connections involve machining an annular groove at the pipe joint, then connecting it using clamps, rubber sealing rings, and fasteners. Grooved connections do not damage the galvanized layer of the steel pipe, offer quick installation, good sealing, and easy disassembly.

[0093] Compression fittings use a lock nut and an open clamping ring to press the pipe onto the fitting. Compression fittings offer advantages such as easy installation, no special tools required, and detachability, making them suitable for small-diameter pipes.

[0094] Hot fusion welding involves heating the material at the pipe joint to melt it, then cooling it to form the desired shape. Hot fusion welding offers advantages such as ease of connection, long service life, and resistance to corrosion.

[0095] Electrofusion welding involves heating copper wires on the inner wall of a pipe fitting with electricity, melting the plastic resin, and then cooling it to form a solid bond. Electrofusion welding allows for flexible construction and produces a strong connection.

[0096] In this application, a suitable connection method can be selected according to the actual situation to ensure the stability and convenience of the connection between the main gas pipe 121 and the branch gas pipe 122.

[0097] In some embodiments, see Figure 2 and Figure 3 The opening size of the through hole 1011 at the end near the diffusion cavity 1031 is larger than the opening size at the end away from the diffusion cavity 1031.

[0098] It is understood that the diverter 111 is generally located in the middle region of the diffusion cavity 1031. Thus, when the diverter 111 diverts the coating gas, the middle region of the diffusion cavity 1031 will be filled with coating gas first, and the gas will gradually diffuse towards the edge region of the diffusion cavity 1031 until the diffusion cavity 1031 is filled with uniformly distributed coating gas.

[0099] In this application, the opening size of the through-hole 1011 near the diffusion cavity 1031 is set to be larger than the opening size of the end of the through-hole 1011 away from the diffusion cavity 1031. This ensures that the rate at which the coating gas flows into the through-hole 1011 from the diffusion cavity 1031 is greater than the rate at which the coating gas flows out of the through-hole 1011 into the external reaction chamber. This provides more time for the coating gas to diffuse within the diffusion cavity 1031, thereby ensuring the uniformity of the coating.

[0100] It is understood that the main function of the through-hole 1011 is to uniformly distribute the gas to the downstream region of the diffuser plate 101, i.e., the reaction chamber of the coating system. Therefore, by rationally designing the diameter, length, and distribution of the through-hole 1011, the local accumulation of coating gas on the diffuser plate 101 can be effectively reduced, and the uniformity of the coating gas can be improved.

[0101] Specifically, the diameter of the via 1011 typically ranges widely. For example, in some plasma-enhanced chemical vapor deposition (PECVD) processes, the diameter of the via 1011 is generally 0.01 inches to 0.3 inches, with a preferred range of 0.01 inches to 0.1 inches. In the gas diffusion layer of a fuel cell, the diameter of the micropores is approximately 10.0 μm.

[0102] Furthermore, the size and shape of the through-hole 1011 can also be used to control the back pressure of the gas upstream of the diffuser plate 101. For example, by adjusting the diameter and length of the through-hole 1011, the flow resistance of the gas can be optimized, thereby achieving better gas distribution.

[0103] Furthermore, in some cases, the design of the through-hole 1011 can also be adapted to specific process requirements. In one embodiment, by providing through-holes 1011 of different diameters in different regions of the inner wall of the diffusion cavity 1031, the coating gas can have different flow rates in different regions, thereby achieving better gas distribution. In another embodiment, the inner wall of the diffusion cavity 1031 may be designed with multiple through-holes 1011 of different sizes to meet different gas flow rate and distribution requirements.

[0104] In this application, the size and shape of the through hole 1011 can be adjusted according to actual needs.

[0105] In some embodiments, see Figure 2 and Figure 3 The inner wall of the diffusion cavity 1031 with the through hole 1011 has a middle part and an edge part surrounding the middle part. The size of the middle part along the through hole 1011 is larger than the size of the edge part along the through hole 1011.

[0106] It is understood that in this application, the through-hole 1011 can be oriented in the thickness direction of the gas diffusion device 100.

[0107] Since the diverter 111 is generally located in the middle region of the diffusion cavity 1031, when the diverter 111 diverts the coating gas, the middle region of the diffusion cavity 1031 will be filled with coating gas first, and gradually diffuse towards the edge region of the diffusion cavity 1031 until the diffusion cavity 1031 is filled with uniformly distributed coating gas.

[0108] In this application, the size of the middle portion of the diffusion cavity 1031 along the through-hole 1011 is designed to be larger than the size of the edge portion of the diffusion cavity 1031 along the through-hole 1011. Correspondingly, the size of the through-hole 1011 in the middle portion along the thickness direction is also larger than the size of the through-hole 1011 in the edge portion. Thus, the resistance encountered by the coating gas flow through the through-hole 1011 in the edge portion is less than the resistance encountered when flowing through the through-hole 1011 in the middle portion. In other words, the coating gas passes through the through-hole 1011 in the edge portion more easily than the through-hole 1011 in the middle portion. This better promotes the flow of coating gas from the diverter 111 towards the edge portion, which is beneficial for achieving a uniform distribution of coating gas within the diffusion cavity 1031, thereby achieving a better uniform coating effect.

[0109] Furthermore, the middle portion has a third preset size L3 along the through hole 1011, and the edge portion has a fourth preset size L4 along the through hole 1011, where L4 = 1 / 2 * L3.

[0110] It is understood that when the edge portion has the fourth preset size L4 along the through hole 1011, and the middle portion has half of the third preset size L3 along the through hole 1011, the uniform distribution of the coating gas in the diffusion cavity 1031 can be better achieved, thereby achieving a better uniform coating effect.

[0111] It should be noted that the specific relationship between the third preset size L3 and the fourth preset size L4 is not limited, for example, L4=1 / 3*L3, L4=4 / 5*L3, etc. The specific relationship between the third preset size L3 and the fourth preset size L4 is obtained through experimental testing. The relevant parameters and steps of the experimental testing are conventional techniques for those skilled in the art and will not be elaborated here.

[0112] The gas diffusion device 100 provided in this application embodiment divides the diffusion unit 103 into several diffusion chambers 1031 to reduce the spatial size of the diffusion chambers 1031, thereby reducing the difference in coating gas flow rate within the diffusion chambers 1031 and effectively improving coating uniformity. Furthermore, each diffusion chamber 1031 needs to have the same size to facilitate modular production of the diffusion unit 103, saving production costs and improving production efficiency. It also facilitates the assembly of identical flow dividers 111 within the diffusion chambers 1031 and allows for convenient control of the gas path assembly 12 to deliver coating gas to each diffusion chamber 1031 at the same flow rate, thus enabling convenient control and management.

[0113] Furthermore, this application sets the opening size of the end of the through-hole 1011 near the diffusion cavity 1031 to be larger than the opening size of the end of the through-hole 1011 away from the diffusion cavity 1031, so that the rate at which the coating gas flows into the through-hole 1011 from the diffusion cavity 1031 is greater than the rate at which the coating gas flows out of the through-hole 1011 into the external reaction chamber. This provides more time for the coating gas to diffuse within the diffusion cavity 1031, thereby ensuring the uniformity of the coating.

[0114] Furthermore, this application designs the size of the middle portion of the diffusion cavity 1031 along the through-hole 1011 direction to be larger than the size of the edge portion of the diffusion cavity 1031 along the through-hole 1011 direction. This ensures that the resistance encountered by the coating gas flow through the through-hole 1011 at the edge portion is less than the resistance encountered when flowing through the through-hole 1011 at the middle portion, thereby better promoting the flow of coating gas from the diverter 111 to the edge portion. This facilitates the uniform distribution of coating gas within the diffusion cavity 1031, thus achieving a better uniform coating effect.

[0115] This application also provides a coating system in one or more embodiments, including the coating gas diffusion device 100 as described in the foregoing embodiments.

[0116] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0117] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A gas diffusion device, characterized in that, include: The main body has a plurality of arrayed diffusion units formed thereon. Each diffusion unit includes a plurality of diffusion cavities and an air inlet. Each air inlet is connected to each diffusion cavity in a one-to-one correspondence, and each diffusion cavity is isolated from each other. A plurality of through holes are provided on the inner wall of the same side of all the diffusion cavities, and each through hole is configured to connect the corresponding diffusion cavity to the outside of the same side of the main body. The flow splitting assembly includes a plurality of flow splitting elements, each of the diffusion cavities is equipped with a flow splitting element, and each flow splitting element is configured to split the airflow into the corresponding diffusion cavity; The air passage assembly is configured to extend into the corresponding diffuser cavity through each of the air inlets and communicate with the flow divider in the diffuser cavity; Each of the diffusion units has a first preset size L1 along the first direction and a second preset size L2 along the second direction.

2. The gas diffusion device according to claim 1, characterized in that, All diffusion cavities within each diffusion unit have the same size along a first direction, and all diffusion cavities within each diffusion unit have the same size along a second direction.

3. The gas diffusion device according to claim 1, characterized in that, Each of the diffusion units includes four diffusion chambers and an air inlet.

4. The gas diffusion device according to claim 1, characterized in that, Each of the diffusion units includes a plurality of diffusion plates and support plates, and each of the diffusion plates and each of the support plates are arranged in a one-to-one correspondence; Each of the diffuser plates has several through holes extending in the same direction; the support plate surrounds one side of the diffuser plate and together with the diffuser plate forms the diffuser cavity, and the support plate has an air inlet communicating with the diffuser cavity.

5. The gas diffusion device according to claim 4, characterized in that, The support plate includes a first sub-support plate and a second sub-support plate. The first sub-support plate extends in a closed manner around the edge of the diffuser plate and protrudes from one side surface of the diffuser plate. The first sub-support plate and the diffuser plate together form the diffuser cavity. The second sub-support plate is fitted to the end of the first sub-support plate away from the diffuser plate and protrudes from the side of the first sub-support plate near the diffuser cavity. The second sub-support plate surrounds and forms the air inlet.

6. The gas diffusion device according to claim 1, characterized in that, The gas path assembly includes a main gas path and several branch gas path pipes. One end of the main gas path is configured to be connected to an external gas source, and the other end of the main gas path is configured to be connected to each of the branch gas path pipes. The end of each branch gas path pipe facing away from the main gas path is configured to extend into the corresponding diffuser cavity through a different air inlet and be connected to the diverter in the diffuser cavity.

7. The gas diffusion device according to claim 1, characterized in that, The opening size of the through hole at the end near the diffusion cavity is larger than the opening size at the end away from the diffusion cavity.

8. The gas diffusion device according to claim 7, characterized in that, The inner wall of the diffusion cavity with the through hole has a middle portion and an edge portion surrounding the middle portion. The size of the middle portion along the through hole direction is larger than the size of the edge portion along the through hole direction.

9. The gas diffusion device according to claim 7, characterized in that, The middle portion has a third preset size L3 along the through-hole direction, and the edge portion has a fourth preset size L4 along the through-hole direction, where L4 = 1 / 2 * L3.

10. A coating system, characterized in that, Includes the gas diffusion device as described in any one of claims 1 to 9.

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