Clamping device for a transport chamber and method for positioning a substrate

Abstract

The application relates to a clamping device applied to a conveying cavity and a substrate positioning method. The clamping device comprises a first driving unit and a plurality of clamping units. The clamping unit comprises a roller connected to the first driving unit and capable of rotating around the axis of the roller relative to the first driving unit; the clamping piece has a first clamping surface and a second clamping surface; the clamping unit can be moved along a first direction to make the first clamping surface abut against the first side surface of the substrate and the second clamping surface abut against the end surface of the substrate in response to the driving operation of the first driving unit; and the clamping piece can drive the roller to rotate around the axis of the roller in response to the pushing action of the substrate. By increasing the contact area between the clamping device and the substrate, the stress concentration on the unit area can be reduced, the risk of substrate breakage is lowered, the contact area between the clamping device and the substrate is increased, the substrate can be better positioned and fixed, and the substrate is prevented from sliding or moving.

Description

Technical Field

[0001] This application relates to the field of display technology, and in particular to a clamping device and a substrate positioning method applied to a transfer cavity. Background Technology

[0002] Array CVD refers to Chemical Vapor Deposition (CVD) technology applied in the manufacturing process of arrays. This technology is widely used in semiconductor manufacturing and flat panel display (FPD) manufacturing. In the flat panel display manufacturing process, the array CVD process cavity is mainly used to deposit various functional layers in the thin film transistor (TFT) array.

[0003] Transfer chambers are used to efficiently and safely transfer substrates, such as glass substrates, between different process chambers. When a substrate is fed into a transfer chamber, it is typically positioned and calibrated by multiple clamping elements in a clamping device to ensure its accurate positioning in subsequent processes.

[0004] In related technologies, the clamping device is prone to causing the substrate to crack during the positioning and calibration process. Summary of the Invention

[0005] Therefore, it is necessary to provide a clamping device for use in a transfer cavity to address the problem that existing clamping devices are prone to causing substrate breakage during the positioning process.

[0006] This application first provides a clamping device for use in a transfer cavity, used to clamp a substrate, the substrate having two first side surfaces distributed along a first direction and two end surfaces distributed along the thickness direction of the substrate; the clamping device includes:

[0007] A first driving unit is disposed in the transmission cavity;

[0008] Multiple clamping units, at least two of which are spaced apart and facing each other along the first direction, and at least two of which are spaced apart along the conveying direction of the conveying cavity; each clamping unit includes a roller, which is connected to the first driving unit and is rotatable relative to the first driving unit about the axis of the roller, and the axis of the roller is parallel to the thickness direction of the substrate.

[0009] The clamping member is connected to the side surface of the roller away from the first driving unit; the clamping member has a first clamping surface and a second clamping surface; the clamping unit is responsive to the driving operation of the first driving unit and moves along the first direction so that the first clamping surface abuts against the first side surface of the substrate, and the second clamping surface abuts against the end surface of the substrate.

[0010] The clamping member is responsive to the pushing action of the substrate to drive the roller to rotate around the axis of the roller, so that the extension direction of the first clamping surface is parallel to the extension direction of the first side surface of the substrate; any two of the thickness direction of the substrate, the first direction, and the conveying direction of the conveying cavity are perpendicular.

[0011] In one embodiment, the first driving unit includes a plurality of units, and each of the first driving units is connected to one of the clamping units in a one-to-one correspondence.

[0012] In one embodiment, a first driving unit and a first transmission unit are disposed between two clamping units distributed along the first direction;

[0013] The first transmission unit includes a transmission wheel and two transmission racks arranged along the transmission direction of the transmission cavity; both transmission racks extend along the first direction and mesh with the transmission wheel; the transmission racks are connected to the rollers on the corresponding sides.

[0014] The transmission wheel is connected to the first drive unit, and the transmission wheel is driven to rotate by the first drive unit so as to drive the two transmission racks to move closer or further away synchronously.

[0015] In one embodiment, a first driving unit and a second transmission unit are disposed between two clamping units distributed along the conveying direction of the conveying cavity;

[0016] The second transmission unit includes a first connecting plate and two second connecting plates distributed along the conveying direction of the conveying cavity, wherein the second connecting plates are connected to the rollers on the corresponding sides;

[0017] The first connecting plate is connected to the first driving unit. The first connecting plate is driven by the first driving unit and moves along the first direction to drive the two second connecting plates to move synchronously along the first direction.

[0018] In one embodiment, the power output end of the first drive unit is provided with an adapter, the adapter including two adapter ends distributed along the thickness direction of the substrate; the roller has two connecting ends distributed along the thickness direction of the substrate.

[0019] One of the connecting end and the adapter end is provided with a rotating column, and the other is provided with a rotating hole. The rotating column is rotatably connected to the wall of the rotating hole.

[0020] In one embodiment, the clamping device further includes a guide unit, which includes a guide rail disposed in the transfer cavity and a slider slidably connected to the guide rail, and the adapter is connected to the slider.

[0021] In one embodiment, an elastic element is connected between the roller and the adapter, the elastic element being used to drive the clamping member to reset after the external force exerted by the substrate on the clamping member is removed.

[0022] In one embodiment, the clamping device further includes a position detection element for acquiring position data of the substrate. The position detection element is communicatively connected to the control unit of the clamping device, so that the control unit adjusts the clamping force applied to the substrate by the clamping unit based on the position data and through the first driving unit.

[0023] And / or, the clamping device further includes a force detection element for detecting clamping force, the force detection element being communicatively connected to the control unit of the clamping device.

[0024] In one embodiment, the clamping member has a mounting groove on one side surface facing the roller, and a portion of the roller is accommodated in the mounting groove;

[0025] And / or, at least one of the first clamping surface and the second clamping surface is provided with an elastic buffer layer;

[0026] And / or, at least one of the first clamping surface and the second clamping surface is provided with a mesh-like texture structure;

[0027] And / or, at least one of the first clamping surface and the second clamping surface is provided with a groove;

[0028] And / or, the clamping device further includes a second driving unit disposed in the transfer cavity, the second driving unit being used to drive the clamping unit to move along the thickness direction of the substrate so that the second clamping surface abuts against the end face of the substrate.

[0029] This application embodiment also provides a method for positioning a substrate, utilizing the clamping device described above, the positioning method comprising:

[0030] The first driving unit drives the clamping unit to move along the first direction so that the second clamping surface abuts against the end face of the substrate.

[0031] When the first clamping surface comes into contact with the first side surface of the substrate, the clamping unit stops moving;

[0032] Detect the position data of the substrate;

[0033] Based on the position data, the first drive unit drives the clamping unit to move along the first direction to adjust the clamping force of the clamping unit.

[0034] The aforementioned clamping device and substrate positioning method applied to the transfer cavity, when the substrate is fed into the transfer cavity, drives the clamping unit to move along a first direction via a first driving unit, causing the clamping member to abut against the substrate, thereby clamping and positioning the substrate. During the positioning process, since rollers are connected between the first driving unit and the clamping member, the clamping member can freely adjust its angle and position within a certain range; if the substrate is offset, the rollers will rotate to automatically adapt the clamping member to the position of the substrate, ensuring a tight fit between the clamping member and the substrate; at the same time, the rotational characteristics of the rollers can also buffer the rigid impact caused by the driving operation of the first driving unit, avoiding damage to the substrate. As the first driving unit continues to operate, multiple clamping units will drive the substrate back to the correct position, thereby calibrating the substrate to the accurate position, so that the first clamping surface fully abuts against the first side surface of the substrate, and the second clamping surface fully abuts against the end face of the substrate, that is, the clamping member and the substrate are in surface contact. This increases the contact area between the clamping element and the substrate. With a larger contact area, the total force applied to the contact surface is more widely distributed, thus reducing the pressure per unit area. Simultaneously, a smaller contact area typically leads to higher localized stress, which accelerates substrate wear. Increasing the contact area reduces localized stress concentration, lowering the risk of substrate breakage. Furthermore, increasing the contact area between the clamping element and the substrate helps to better position and fix the substrate, preventing slippage or movement. Using a clamping device to calibrate and position the substrate ensures accurate positioning in subsequent processes, significantly reducing product defects caused by positional deviations, reducing rework, improving overall production efficiency, and helping to ensure consistency across all products. Attached Figure Description

[0035] Figure 1 This is a schematic diagram of the clamping device provided in the first embodiment of this application.

[0036] Figure 2 for Figure 1 An exploded view of the clamping device from another perspective.

[0037] Figure 3 This is a schematic diagram of the clamping device provided in the second embodiment of this application.

[0038] Figure 4 This is a schematic diagram of the clamping device provided in the third embodiment of this application.

[0039] Figure 5 This is a schematic diagram of the clamping device from another perspective, as provided in the fourth embodiment of this application.

[0040] Reference numerals: 10, Conveying cavity; 100, First driving unit; 200, Clamping unit; 210, Roller; 211, Connecting end; 220, Clamping component; 221, First clamping surface; 222, Second clamping surface; 223, Mounting groove; 300, First transmission unit; 310, Transmission wheel; 320, Transmission rack; 400, Second transmission unit; 410, First connecting plate; 420, Second connecting plate; 500, Adapter; 510, Adapter end; 600, Guide unit; 610, Guide rail; 620, Slider; 710, Position detection component; 720, Force detection component; 800, Second driving unit; 900, Base plate; 910, First side surface; 920, End face. Detailed Implementation

[0041] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0042] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0043] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0044] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0045] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0046] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0047] In semiconductor manufacturing and flat panel display (FPD) manufacturing processes, especially in steps involving thin-film deposition, extremely high positional precision is required. For example, in the fabrication of array TFTs (thin-film transistors), the deposition of each layer of material must precisely cover predetermined locations. Modern displays and semiconductor devices typically involve stacking multiple layers of different materials. For instance, gaseous precursors are introduced into a reaction chamber via a process chamber, where a chemical reaction occurs on a heated substrate surface, generating a solid thin film that is deposited on that surface. A transfer chamber acts as an intermediary between multiple process chambers, efficiently and safely transferring the substrate between them. The transfer chamber is typically connected to the process chambers and is usually maintained in a relatively stable vacuum state to ensure seamless docking with each process chamber. This ensures that the substrate is not contaminated by airborne particles or chemicals during transfer between different process steps. The transfer chamber is usually equipped with a robotic arm or other transport structure, which uses this structure to move the substrate from the transfer chamber into the process chamber for processing. After processing, the substrate is returned to another process chamber via the transfer chamber, thus transferring the substrate from one process chamber to another.

[0048] To ensure the precise positioning and stability of the substrate throughout the manufacturing process, thereby guaranteeing high precision and consistency, a clamping device is installed in the transfer chamber to correct the position of the substrate placed by the ATM (Atmospheric Transfer Module) robot and the Vacuum (Vacuum Transfer Module) robot, preventing the substrate from shifting during placement and ensuring that the substrate is accurately positioned in the process chamber (PC) or carrier storage tool (CST).

[0049] The inventors of this application have discovered that existing clamping devices are designed with cylindrical clamping posts that abut against the side of the substrate. While the clamping posts can fix and correct the position of the substrate to a certain extent, the point contact between the clamping posts and the substrate results in a small contact area, leading to stress concentration and making the substrate prone to cracking during the positioning process.

[0050] Based on the aforementioned problems, this application provides a clamping device and a substrate positioning method for a transfer cavity. By increasing the contact area between the clamping device and the substrate, the pressure per unit area is reduced, thereby reducing local stress concentration and lowering the risk of substrate breakage. Moreover, by increasing the contact area between the clamping device and the substrate, the substrate can be better positioned and fixed, preventing the substrate from sliding or moving.

[0051] See Figure 1 and Figure 2 As shown, Figure 1 This is a schematic diagram of the clamping device provided in the first embodiment of this application. Figure 2 for Figure 1 An exploded view of the clamping device from another perspective is shown. For example... Figure 1 This is a top-down view of the clamping device. Figure 2 Then it is Figure 1 The clamping device shown is viewed from the front. An embodiment of this application provides a clamping device for use in a transfer cavity 10, used to clamp a substrate 900. The substrate 900 has two first side surfaces 910 distributed along a first direction and two end surfaces 920 distributed along the thickness direction of the substrate. The clamping device includes a first driving unit 100 and a plurality of clamping units 200.

[0052] The first driving unit 100 is disposed in the transfer cavity 10; at least two clamping units 200 are spaced apart and facing each other along a first direction, and the at least two clamping units 200 are spaced apart along the transfer direction of the transfer cavity 10; each clamping unit 200 includes a roller 210, which is connected to the first driving unit 100 and is rotatable relative to the first driving unit 100 about the axis of the roller 210, and the axis of the roller 210 is parallel to the thickness direction of the substrate 900; a clamping member 220 is connected to the side surface of the roller 210 away from the first driving unit 100; the clamping member 220 has a first clamping surface 221 and a second clamping surface. Surface 222; The clamping unit 200 is responsive to the driving operation of the first driving unit 100 and moves along a first direction, such that the first clamping surface 221 abuts against the first side surface 910 of the substrate 900, and the second clamping surface 222 abuts against the end surface 920 of the substrate 900; The clamping member 220 is responsive to the pushing action of the substrate 900 to drive the roller 210 to rotate around the axis of the roller 210, so that the extending direction of the first clamping surface 221 is parallel to the extending direction of the first side surface 910 of the substrate 900; any two of the thickness direction of the substrate 900, the first direction, and the conveying direction of the conveying cavity 10 are perpendicular. See reference Figure 1 and Figure 2 As shown, the first direction is the X direction in the diagram, the conveying direction of the conveying cavity 10 is the Y direction in the diagram, and the thickness direction of the substrate 900 is the Z direction in the diagram. Understandably, taking a rectangular plate-shaped substrate 900 as an example, the first direction can be the width direction of the substrate 900, and the second direction can be the length direction of the substrate 900.

[0053] exist Figure 1 In the illustrated embodiment, four clamping units 200 are respectively positioned at the four corners of the substrate 900. This allows the clamping force to be evenly distributed along the edges of the substrate 900, thus avoiding localized stress concentration. Furthermore, the positions of the four clamping points can be adjusted according to actual needs, making it suitable for substrates 900 of different sizes and shapes. Effective clamping of substrates 900 of various specifications can be achieved through simple adjustments, improving the versatility of the device.

[0054] In other embodiments, the number of clamping units 200 may also be an even number, such as six. Figure 1 Taking the shown perspective as an example, three clamping units 200 are disposed on the left side of the substrate 900, and are evenly distributed along the conveying direction Y of the conveying cavity 10, i.e., respectively for contacting the upper left, middle left, and lower left positions of the substrate 900. Correspondingly, another three clamping units 200 are disposed on the right side of the substrate 900, and are evenly distributed along the conveying direction Y of the conveying cavity 10, respectively for contacting the upper right, middle right, and lower right positions of the substrate 900. By increasing the contact area between the clamping units 200 and the substrate 900, the risk of breakage of the substrate 900 is further reduced.

[0055] The clamping device described above, applied to the transfer cavity 10, when the substrate 900 is sent into the transfer cavity 10, drives the clamping unit 200 to move along the first direction X through the first driving unit 100, so that the clamping member 220 abuts against the substrate 900, thereby clamping and positioning the substrate 900.

[0056] During the positioning process, because the roller 210 connects the first driving unit 100 and the clamping member 220, the clamping member 220 can freely adjust its angle and position within a certain range; if the substrate 900 is offset, for example in Figure 1 In the view shown, when the substrate 900 is offset, the geometric center line perpendicular to the wide side of the substrate 900 forms an angle with the conveying direction Y of the conveying cavity 10, that is, there is a left and right offset. The roller 210 will rotate to make the clamping member 220 automatically adapt to the position of the substrate 900, ensuring that the clamping member 220 and the substrate 900 are in close contact. At the same time, the rotation characteristics of the roller 210 can also buffer the rigid impact brought about by the driving operation of the first driving unit 100, avoiding damage to the substrate 900.

[0057] As the first driving unit 100 continues to operate, the multiple clamping units 200 drive the substrate 900 back to its upright position, thereby calibrating the substrate 900 to an accurate position. This ensures that the first clamping surface 221 fully abuts against the first side surface 910 of the substrate 900, and the second clamping surface 222 fully abuts against the end face 920 of the substrate 900, meaning that the clamping member 220 and the substrate 900 are in surface contact. This increases the contact area between the clamping member 220 and the substrate 900. When the contact area is increased, the total force applied to the contact surface is more widely distributed, thereby reducing the pressure per unit area. At the same time, a smaller contact area usually leads to higher local stress, which accelerates the wear of the substrate 900. By increasing the contact area, local stress concentration can be reduced, lowering the risk of substrate 900 breakage. Moreover, by increasing the contact area between the clamping member 220 and the substrate 900, the substrate 900 can be better positioned and fixed, preventing the substrate 900 from sliding or moving. By calibrating and positioning the substrate 900 using a clamping device, its precise positioning in subsequent processes can be ensured, which can significantly reduce product defects caused by positional deviations, reduce the number of reworks, thereby improving overall production efficiency and helping to ensure the consistency of all products.

[0058] In some embodiments, the clamping member 220 is made of PEEK (Polyether Ether Ketone), a high-performance engineering plastic with a low coefficient of friction, which reduces friction when in contact with the substrate 900, preventing scratches or damage to the substrate 900. Furthermore, PEEK has high rigidity, providing stable clamping force, while its light weight reduces motion inertia and improves response speed. Additionally, PEEK is heat-resistant and chemically stable, making it suitable for harsh operating environments. In other embodiments, the clamping member 220 may also be made of a composite of PEEK and carbon fiber, further enhancing its durability and wear resistance.

[0059] See Figure 2As shown, in some embodiments, the clamping member 220 is L-shaped and stepped, with both the first clamping surface 221 and the second clamping surface 222 being planar. Planar contact allows for a more uniform distribution of clamping force, thereby reducing local stress concentration and effectively lowering the risk of substrate 900 breakage due to localized high pressure. Furthermore, the larger planar contact area provides a more stable support base, helping to prevent the substrate 900 from sliding or shifting during transport. Simultaneously, planar contact provides better positioning accuracy because the contact point between the two planes is relatively fixed, making it less prone to minute displacements. Planar contact is also less likely to scratch the surface of the substrate 900, minimizing physical damage. The planar design can also be adjusted in size according to actual needs, accommodating substrates 900 of different sizes and shapes. Effective clamping of substrates 900 of various specifications can be achieved through simple adjustments, improving the versatility of the equipment.

[0060] In some embodiments, at least one of the first clamping surface 221 and the second clamping surface 222 is provided with a mesh-like texture structure, the texture structure including a plurality of mutually perpendicular texture lines. For example, in some embodiments, the first clamping surface 221 is provided with a texture structure. In other embodiments, the second clamping surface 222 is provided with a texture structure. In other embodiments, both the first clamping surface 221 and the second clamping surface 222 are provided with texture structures.

[0061] This mesh-like textured structure increases the actual contact area of ​​the first clamping surface 221 and the second clamping surface 222, thereby significantly improving the coefficient of friction. This allows the clamping member 220 to grip the substrate 900 more firmly, preventing the substrate 900 from sliding or moving. Furthermore, even if there are minute unevenness or contaminating particles on the surface of the substrate 900, the mesh-like textured structure provides a better grip because it can form contact at multiple points.

[0062] Furthermore, this mesh-like textured structure increases friction while dispersing stress from multiple directions. The nodes of the mesh act as buffer points for stress concentration; when stress is transmitted to a node, it disperses outwards. By distributing the contact force across multiple small areas, pressure concentration at a single point is reduced, thus decreasing the localized pressure on the substrate 900 surface and lowering the risk of scratches or damage. Additionally, if liquids or gases are present in the process environment (e.g., during cleaning or coating), the mesh-like textured structure helps to quickly expel excess liquids or gases, keeping the clamping surfaces dry and clean. Of course, the mesh-like textured structure also offers higher wear resistance because the contact force is dispersed across more points, reducing the wear rate at individual contact points. By reducing wear, the lifespan of the clamping device can be extended, lowering maintenance costs and replacement frequency.

[0063] In one embodiment, at least one of the first clamping surface 221 and the second clamping surface 222 is provided with a groove (not shown in the figure). For example, in some embodiments, the first clamping surface 221 is provided with a groove. In other embodiments, the second clamping surface 222 is provided with a groove. In still other embodiments, both the first clamping surface 221 and the second clamping surface 222 are provided with grooves.

[0064] By machining a series of grooves on the first clamping surface 221 and the second clamping surface 222, the roughness of the clamping surfaces can be increased, thereby improving the coefficient of friction and thus better securing the substrate 900. Simultaneously, the grooves also serve to disperse stress; when the substrate 900 is subjected to external force, the stress diffuses along the direction of the grooves, reducing the local pressure on the surface of the substrate 900 and lowering the risk of scratches or damage. In some cases, for substrates 900 with minor surface irregularities or slight deformations, the grooves can better embed into these fine structures, providing stronger grip.

[0065] In one embodiment, a transition arc surface (not shown in the figure) is provided between the first clamping surface 221 and the second clamping surface 222. The transition arc surface can provide a smooth transition path, avoiding stress concentration problems caused by sharp edges or right angles, that is, it can avoid stress concentration at the corners, and the stress dispersion effect is more obvious.

[0066] In one embodiment, at least one of the first clamping surface 221 and the second clamping surface 222 is provided with an elastic buffer layer. In some embodiments, the elastic buffer layer can be an elastic material such as rubber, silicone, or polyurethane. This not only increases the friction between the clamping member 220 and the substrate 900, reducing the risk of substrate 900 displacement, but also further disperses stress. Furthermore, the elastic buffer layer acts as a buffer when the substrate 900 is clamped by the clamping member 220, protecting the surface of the substrate 900 from damage. In addition, the elastic buffer layer can automatically adjust according to minor unevenness on the surface of the substrate 900 to ensure optimal contact.

[0067] See Figure 1 and Figure 2 As shown, in one embodiment, the first drive unit 100 includes multiple units, each first drive unit 100 being connected to a clamping unit 200 in a one-to-one correspondence. That is, each clamping unit 200 is controlled by an independent first drive unit 100, thus allowing the position and force of each clamping unit 200 to be adjusted individually as needed. Simultaneously, if a problem occurs with a drive unit, it can be quickly located and resolved, reducing downtime. For example, in... Figure 1 In the embodiment shown, there are four first driving units 100 and four clamping units 200.

[0068] like Figure 1 As shown, in some embodiments, the first drive unit 100 can be a cylinder, and the clamping unit 200 is connected to the end of the piston rod of the cylinder. The cylinder can provide a large pushing and pulling force and has a fast operating speed, enabling it to complete the positioning operation in a short time. Moreover, it has a relatively simple structure, low maintenance requirements, and a low failure rate, which helps to reduce downtime and maintenance costs. In some embodiments, the cylinder is equipped with a pressure regulating valve, which allows for convenient adjustment of the clamping force output by the cylinder, avoiding excessive pressure on the substrate 900 that could cause damage.

[0069] In other embodiments, the first drive unit 100 can be an electric cylinder equipped with a servo motor or a stepper motor, which can achieve very high position control accuracy. In other embodiments, the first drive unit 100 can be a linear motor or an electric actuator, etc.

[0070] See Figure 3 As shown, Figure 3 This is a schematic diagram of the clamping device provided in the second embodiment of this application. In one embodiment, a first driving unit 100 and a first transmission unit 300 are provided between two clamping units 200 distributed along the first direction X; the first transmission unit 300 includes a transmission gear and two transmission racks 320 arranged along the transmission direction Y of the transmission cavity 10; the two transmission racks 320 extend along the first direction X and are both engaged with the transmission gear for transmission; the transmission racks 320 are connected to the rollers 210 on the corresponding sides; the transmission gear is connected to the first driving unit 100.

[0071] Specifically, the first drive unit 100 outputs rotational power, thereby driving the transmission gear to rotate synchronously. Under the action of the transmission gear and the transmission rack 320 meshing, the two transmission racks 320 will move closer or further apart synchronously. For example, when the first drive unit 100 drives the transmission gear to rotate counterclockwise, the two transmission racks 320 move further apart synchronously, causing the two clamping units 200 distributed along the first direction X to move away from the substrate 900. When the first drive unit 100 drives the transmission gear to rotate clockwise, the two transmission racks 320 move closer together synchronously, causing the two clamping units 200 distributed along the first direction X to move closer to the substrate 900, thereby clamping and positioning the substrate 900.

[0072] With this configuration, only one first drive unit 100 is needed to control the movement of two clamping units 200, reducing the number of required drivers and thus lowering system complexity and overall cost. The reduced number of first drive units 100 simplifies the control logic, making it easier to program and debug. Furthermore, the first drive unit 100 can be positioned between the two clamping units 200, significantly reducing the overall volume of the clamping device along the first direction X, making it more compact. Additionally, the reduced number of first drive units 100 means fewer potential failure points, resulting in higher system reliability and reduced energy consumption, thus achieving energy conservation and emission reduction. In this embodiment, the first drive unit 100 can be a rotary motor, such as a servo motor or a stepper motor.

[0073] See Figure 4 As shown, Figure 4 This is a schematic diagram of a clamping device provided in the third embodiment of this application. In one embodiment, a first driving unit 100 and a second transmission unit 400 are disposed between two clamping units 200 distributed along the transmission direction Y of the transmission cavity 10; the second transmission unit 400 includes a first connecting plate 410 and two second connecting plates 420 distributed along the transmission direction Y of the transmission cavity 10, the second connecting plates 420 being connected to rollers 210 on the corresponding side; the first connecting plate 410 is connected to the first driving unit 100, and the first connecting plate 410 is driven by the first driving unit 100 to move along the first direction X, so as to drive the two second connecting plates 420 to move synchronously along the first direction X.

[0074] Specifically, the first driving unit 100 outputs linear power, thereby causing the first connecting plate 410 and the second connecting plate 420 to move synchronously, which in turn drives the two clamping units 200 distributed along the conveying direction Y of the conveying cavity 10 to move synchronously along the first direction X. For example, both clamping units 200 move along the direction close to the substrate 900, thereby clamping and positioning the substrate 900.

[0075] Thus, only one first drive unit 100 is needed to control the movement of two clamping units 200, reducing the number of required drivers and thereby lowering the system's complexity and overall cost. The reduced number of first drive units 100 simplifies the control logic, making it easier to program and debug. Furthermore, the first drive unit 100 can be positioned between the two clamping units 200, significantly reducing the overall volume of the clamping device along the first direction X, resulting in a more compact layout and smaller footprint. In this embodiment, the first drive unit 100 can be a cylinder or a linear motor, etc.

[0076] See Figure 5 As shown, Figure 5This is a schematic diagram of a clamping device from another perspective, as provided in the fourth embodiment of this application. Figure 5 In the illustrated embodiment, the power output end of the first drive unit 100 is provided with an adapter 500, which includes two adapter ends 510 distributed along the thickness direction Z of the substrate 900; the roller 210 has two connecting ends 211 distributed along the thickness direction Z of the substrate 900. One of the connecting ends 211 and the adapter ends 510 is configured with a rotating column, and the other with a rotating hole. The rotating column is rotatably connected to the wall of the rotating hole. Thus, when the first drive unit 100 outputs a linear motion, the roller 210 can move synchronously along the first direction X, and can also rotate around its own axis when subjected to an external force.

[0077] For example, in the embodiment shown in the attached figure, the connecting end 211 of the roller 210 is constructed with a rotating post, and the connecting end 211 of the adapter 500 is constructed with a rotating hole. The rotating post passes through the rotating hole, thereby realizing the rotational connection between the roller 210 and the adapter 500, that is, realizing the rotational connection between the roller 210 and the first driving unit 100. When the substrate 900 is offset, the roller 210 can rotate to make the clamping member 220 automatically adapt to the position of the substrate 900, ensuring that the clamping member 220 and the substrate 900 are tightly fitted. At the same time, the rotational characteristics of the roller 210 can also buffer the rigid impact brought about by the driving operation of the first driving unit 100, avoiding damage to the substrate 900.

[0078] Of course, in other embodiments, the connecting end 211 of the roller 210 may be constructed with a rotating hole, and the connecting end 211 of the adapter 500 may be constructed with a rotating column, thereby realizing the rotational connection between the roller 210 and the first drive unit 100.

[0079] See Figure 5 As shown, in one embodiment, the clamping device further includes a guide unit 600, which includes a guide rail 610 disposed in the transfer cavity 10 and a slider 620 slidably connected to the guide rail 610. An adapter 500 is connected to the slider 620. The cooperation of the guide rail 610 and the slider 620 ensures that the clamping member 220 moves smoothly along a predetermined path, reducing unnecessary lateral offset or vibration, thereby improving the straightness of the movement and repeatability. Simultaneously, the guide rail 610 and the slider 620 effectively disperse the force applied to the clamping member 220, preventing local stress concentration, extending service life, and improving system reliability. In some embodiments, limit switches and position sensors, such as linear encoders, are installed on the guide rail 610, thus enabling real-time monitoring of the position of the clamping member 220 and preventing accidental over-movement of the clamping member 220.

[0080] See Figure 2As shown, in one embodiment, the clamping member 220 has a mounting groove 223 on its surface facing the roller 210, and a portion of the roller 210 is accommodated in the mounting groove 223. By embedding the roller 210 portion into the mounting groove 223, the contact area and constraint force between the clamping member 220 and the roller 210 are increased, thereby improving the stability of the entire device. Simultaneously, the mounting groove 223 effectively prevents the roller 210 from accidentally disengaging from the clamping member 220, enhancing the safety and reliability of the clamping device.

[0081] In some embodiments, one of the groove wall of the mounting groove 223 and the rolling surface of the roller 210 is provided with a keyway, and the other is provided with a key, such as a flat key or a semi-circular key; the connection between the clamping member 220 and the roller 210 is achieved by the key engaging into the keyway. In other embodiments, the clamping member 220 and the roller 210 can also be fixed together by fasteners such as bolts.

[0082] In one embodiment, an elastic element (not shown) connects the roller 210 and the adapter 500. This elastic element drives the clamping member 220 to reset after the external force exerted by the substrate 900 on the clamping member 220 is removed. Understandably, when the clamping member 220 is positioned on the substrate 900 in an offset state, the elastic element will temporarily deform when the clamping member 220 and the roller 210 rotate to adapt to the position of the substrate 900. After calibration, the restoring force of the elastic element will cause the clamping member 220 and the roller 210 to automatically return to their original positions; simultaneously, the elastic element can absorb vibrations, acting as a buffer. Both the roller 210 and the adapter 500 are designed with fixing grooves for installing and fixing the elastic element, ensuring that the elastic element can freely deform when the roller 210 deflects and quickly return to its original shape after the deflection force disappears.

[0083] See Figure 5 As shown, in one embodiment, the clamping device further includes a position detection element 710 for acquiring the position of the substrate 900. The position detection element 710 is communicatively connected to the control unit of the clamping device, so that the control unit adjusts the clamping force of the clamping unit 200 according to the position data. For example, when the position deviation is large, the clamping force can be increased to straighten the substrate 900; when the position deviation is small, the clamping force can be reduced to avoid the problem of the substrate 900 breaking due to excessive clamping force.

[0084] In some embodiments, the position detection element 710 can be a visual detection element, including a camera mounted on the clamping member 220. The camera captures markings (such as crosshairs, edge features, etc.) on the substrate 900, and transmits the captured information to the control unit. Then, an image processing algorithm is used to analyze the actual position of the substrate 900, thereby calculating the deviation relative to the target position. Based on the calculation result, the control unit can adjust the clamping force of the clamping member 220 through the first drive unit 100, so that the substrate 900 accurately returns to the target position.

[0085] In some embodiments, the position detection element 710 can be a photoelectric sensor. Understandably, photoelectric sensors are provided at all four corners of the substrate 900. These sensors detect the edge position of the substrate 900, and the position data is fed back to the control unit. The first drive unit 100 then adjusts the clamping force of the clamping member 220. In other embodiments, the position detection element 710 can also be a laser rangefinder. The laser rangefinder accurately measures the distance between the substrate 900 and a reference point, thereby determining the specific position of the substrate 900.

[0086] In some embodiments, the control unit can be a PID controller. The PID controller receives feedback data from the position detection element 710, analyzes the data, and calculates the deviation between the current position and the target position of the substrate 900. Based on the deviation data, it generates corresponding control commands and sends these commands to the first drive unit 100 to adjust the position, i.e., the clamping force, of the clamping element 220, thereby enabling rapid calibration of the substrate 900. Through real-time position feedback and closed-loop control, high-precision calibration of the substrate 900's position can be achieved, reducing the risk of breakage due to positional deviation. The entire calibration process requires no manual intervention, is highly automated, and improves production efficiency and stability.

[0087] See Figure 5As shown, in one embodiment, the clamping device further includes a force detection element 720 for detecting clamping force, which is communicatively connected to the control unit of the clamping device. By setting the force detection element 720, the clamping force can be monitored in real time to ensure that it does not exceed the maximum stress that the substrate 900 can withstand, preventing damage, deformation, or other forms of damage to the substrate 900 due to over-clamping. Simultaneously, by providing real-time feedback of clamping force data and combining it with data from the position detection element 710, the control unit can achieve more intelligent adaptive control, making fine adjustments based on the dual feedback from the position detection element 710 and the force detection element 720 to ensure optimal clamping performance. Furthermore, the force detection element 720 can also help identify potential problems, such as wear or loosening of the clamping element 220. When abnormal changes in clamping force are detected, an alarm can be issued or the machine can automatically stop for timely maintenance to avoid greater losses. In some embodiments, the force detection element 720 can be a force sensor, such as a pressure sensor or a capacitive force sensor.

[0088] See Figure 5 As shown, in one embodiment, the clamping device further includes a second driving unit 800 disposed in the transfer cavity 10. The second driving unit 800 is used to drive the clamping unit 200 to move along the thickness direction Z of the substrate 900 so that the second clamping surface 222 abuts against the end face 920 of the substrate 900. For example, in the embodiment shown in the figure, the second clamping surface 222 is used to abut against the lower end face 920 of the substrate 900. By driving the clamping unit 200 to rise or fall by the second driving unit 800, the horizontal height of the second clamping surface 222 can be adjusted so that the second clamping surface 222 can abut against the lower end face 920 of the substrate 900. In this way, the second clamping surface 222 can also provide support for the substrate 900. In some embodiments, the second driving unit 800 can be a cylinder, and the first driving unit 100 is connected to the end of the piston rod of the cylinder. The cylinder has a relatively simple structure, low maintenance requirements, and low failure rate, which helps to reduce downtime and maintenance costs.

[0089] In other embodiments, the second driving unit 800 may not be provided. When the substrate 900 is fed into the transfer cavity 10, the lower end surface 920 of the substrate 900 is at the same horizontal height as the second clamping surface 222. In this way, the clamping unit 200 only needs to move along the first direction X.

[0090] The aforementioned clamping device increases the contact area between the clamping member 220 and the substrate 900 by ensuring that the first clamping surface 221 of the clamping unit 200 fully abuts against the first side surface 910 of the substrate 900, and the second clamping surface 222 fully abuts against the end face 920 of the substrate 900. This reduces the pressure per unit area and simultaneously reduces local stress concentration, lowering the risk of substrate 900 breakage. Furthermore, by increasing the contact area between the clamping member 220 and the substrate 900, the substrate 900 can be better positioned and fixed, preventing it from sliding or moving. Using the clamping device to calibrate and position the substrate 900 ensures accurate positioning in subsequent processes, significantly reducing product defects caused by positional deviations, reducing rework frequency, improving overall production efficiency, and helping to ensure consistency across all products.

[0091] Based on the same inventive concept, this application also provides a positioning method for a substrate 900. Utilizing the clamping device described above, the positioning method includes: a first driving unit 100 driving a clamping unit 200 to move along a first direction X, so that a second clamping surface 222 abuts against an end face 920 of the substrate 900; when the first clamping surface 221 abuts against a first side surface 910 of the substrate 900, the clamping unit 200 stops moving; detecting the position and offset data of the substrate 900; and based on the position and offset data, the first driving unit 100 driving the clamping unit 200 to move along the first direction X to adjust the clamping force of the clamping unit 200. The system employs a position detection device 710 to acquire the position of the substrate 900 and feeds it back to the control unit. The control unit analyzes the data to calculate the deviation between the current position and the target position of the substrate 900. Based on the deviation data, it generates corresponding control commands and sends these commands to the first drive unit 100 to adjust the position and clamping force of the clamping device 220. This enables rapid calibration of the substrate 900. Through real-time position feedback and closed-loop control, high-precision calibration of the substrate 900's position is achieved, reducing the risk of breakage due to positional deviation. The entire calibration process requires no manual intervention, exhibiting a high degree of automation and improving production efficiency and stability.

[0092] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0093] The above embodiments merely illustrate several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A clamping device for use in a transfer cavity, for clamping a substrate, the substrate having two first side surfaces distributed along a first direction and two end surfaces distributed along the thickness direction of the substrate; characterized in that, The clamping device includes: A first driving unit is disposed in the transmission cavity; Multiple clamping units, at least two of which are spaced apart and facing each other along the first direction, and at least two of which are spaced apart along the conveying direction of the conveying cavity; each clamping unit includes a roller, which is connected to the first driving unit and is rotatable relative to the first driving unit about the axis of the roller, and the axis of the roller is parallel to the thickness direction of the substrate. The clamping unit further includes a clamping member connected to the side surface of the roller away from the first driving unit; the clamping member has a first clamping surface and a second clamping surface; the clamping unit is responsive to the driving operation of the first driving unit and moves along the first direction so that the first clamping surface abuts against the first side surface of the substrate, and the second clamping surface abuts against the end surface of the substrate. The clamping member is responsive to the pushing action of the substrate to drive the roller to rotate around the axis of the roller, so that the extension direction of the first clamping surface is parallel to the extension direction of the first side surface of the substrate; any two of the thickness direction of the substrate, the first direction, and the conveying direction of the conveying cavity are perpendicular.

2. The clamping device according to claim 1, characterized in that, The first driving unit includes multiple units, and each first driving unit is connected to one of the clamping units in a one-to-one correspondence.

3. The clamping device according to claim 1, characterized in that, A first drive unit and a first transmission unit are disposed between the two clamping units distributed along the first direction; The first transmission unit includes a transmission wheel and two transmission racks arranged along the transmission direction of the transmission cavity; both transmission racks extend along the first direction and mesh with the transmission wheel; the transmission racks are connected to the rollers on the corresponding sides. The transmission wheel is connected to the first drive unit, and the transmission wheel is driven to rotate by the first drive unit so as to drive the two transmission racks to move closer or further away synchronously.

4. The clamping device according to claim 1, characterized in that, A first driving unit and a second transmission unit are disposed between the two clamping units distributed along the conveying direction of the conveying cavity; The second transmission unit includes a first connecting plate and two second connecting plates distributed along the conveying direction of the conveying cavity, wherein the second connecting plates are connected to the rollers on the corresponding sides; The first connecting plate is connected to the first driving unit. The first connecting plate is driven by the first driving unit and moves along the first direction to drive the two second connecting plates to move synchronously along the first direction.

5. The clamping device according to claim 1, characterized in that, The power output end of the first drive unit is provided with an adapter, the adapter including two adapter ends distributed along the thickness direction of the substrate; the roller has two connecting ends distributed along the thickness direction of the substrate. One of the connecting end and the adapter end is provided with a rotating column, and the other is provided with a rotating hole. The rotating column is rotatably connected to the wall of the rotating hole.

6. The clamping device according to claim 5, characterized in that, The clamping device further includes a guide unit, which includes a guide rail disposed in the transfer cavity and a slider slidably connected to the guide rail, and the adapter is connected to the slider.

7. The clamping device according to claim 5, characterized in that, An elastic element is connected between the roller and the adapter. The elastic element is used to drive the clamping member to reset after the external force exerted by the substrate on the clamping member is removed.

8. The clamping device according to claim 1, characterized in that, The clamping device further includes a position detection element for acquiring position data of the substrate. The position detection element is communicatively connected to the control unit of the clamping device so that the control unit adjusts the clamping force applied to the substrate by the clamping unit based on the position data and through the first driving unit. And / or, the clamping device further includes a force detection element for detecting clamping force, the force detection element being communicatively connected to the control unit of the clamping device.

9. The clamping device according to claim 1, characterized in that, The clamping member has a mounting groove on the side surface facing the roller, and a portion of the roller is fixedly disposed in the mounting groove; And / or, at least one of the first clamping surface and the second clamping surface is provided with an elastic buffer layer; And / or, at least one of the first clamping surface and the second clamping surface is provided with a mesh-like texture structure; And / or, at least one of the first clamping surface and the second clamping surface is provided with a groove; And / or, the clamping device further includes a second driving unit disposed in the transfer cavity, the second driving unit being used to drive the clamping unit to move along the thickness direction of the substrate so that the second clamping surface abuts against the end face of the substrate.

10. A method for positioning a substrate, characterized in that, The positioning method, using the clamping device according to any one of claims 1 to 9, comprises: The first driving unit drives the clamping unit to move along the first direction so that the second clamping surface abuts against the end face of the substrate. The clamping unit stops moving when the first clamping surface comes into contact with the first side of the substrate; Detect the position data of the substrate; Based on the position data, the first drive unit drives the clamping unit to move along the first direction to adjust the clamping force of the clamping unit.

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