Liquid material vaporization device

Abstract

Provided is a liquid material gasification device capable of preventing metal elution and gasifying a liquid material, the liquid material gasification device comprising: a main block having a mixing section that mixes a liquid material and a carrier gas; a liquid material supply tube that supplies the liquid material to the main block; a gas-liquid mixture discharge tube that discharges a gas-liquid mixture from the main block; and a heating section that heats the gas-liquid mixture discharge tube, wherein the main block is made of ceramic or plastic, the liquid material supply tube is made of ceramic or plastic, and the gas-liquid mixture discharge tube is made of ceramic.

Description

Technical Field

[0001] This invention relates to a liquid material vaporization device. Background Technology

[0002] Conventional apparatuses for generating material gases for semiconductor manufacturing processes, such as film deposition processes, include, as shown in Patent Document 1, devices that vaporize liquid materials to generate material gases. This liquid material vaporization apparatus comprises: a main block for mixing the liquid material and a carrier gas; a liquid material supply pipe for supplying the liquid material to the main block; a gas-liquid mixture outlet pipe for discharging the gas-liquid mixture from the main block; and a heating unit for heating the gas-liquid mixture. Furthermore, the main block, the liquid material supply pipe, and the gas-liquid mixture outlet pipe are constructed using heat-resistant and corrosion-resistant stainless steel.

[0003] However, with the increasing precision and quality of semiconductor manufacturing processes and the changes in the liquid materials used in recent years, metal leaching from the main body made of stainless steel has become a problem. If metal leaches into the liquid material, it may adversely affect the quality of subsequent semiconductor manufacturing processes. Existing technical documents

[0004] Patent Document 1: Japanese Patent Publication No. 2017-104815 Summary of the Invention

[0005] Therefore, the present invention was made to solve the above-mentioned problems, and the subject matter is to prevent metal leaching and to vaporize liquid materials.

[0006] That is, the liquid material vaporization apparatus of the present invention is characterized by comprising: a main block for mixing liquid material and carrier gas; a liquid material supply pipe for supplying the liquid material to the main block; a gas-liquid mixture outlet pipe for discharging the gas-liquid mixture from the main block; and a heating unit for heating the gas-liquid mixture outlet pipe, wherein the main block is made of ceramic or plastic, the liquid material supply pipe is made of ceramic or plastic, and the gas-liquid mixture outlet pipe is made of ceramic.

[0007] According to this liquid material vaporization device, the main body is made of ceramic or plastic, the liquid material supply pipe is made of ceramic or plastic, and the gas-liquid mixture outlet pipe is made of ceramic, thus preventing metal from dissolving into the liquid material and the gas-liquid mixture. Furthermore, the gas-liquid mixture outlet pipe, which is heated by the heating unit, is made of ceramic, which has a higher thermal conductivity than plastic, thus enabling efficient heating of the liquid material in the gas-liquid mixture outlet pipe to generate vaporized gas.

[0008] The main block, the liquid material supply pipe, and the gas-liquid mixture outlet pipe can also be composed of independent components. Based on this structure, the various components can be easily manufactured.

[0009] When connecting the liquid material supply pipe and the gas-liquid mixture outlet pipe to the main body block, it is advisable to connect them using fastening bolts. Specifically, it is advisable that the liquid material supply pipe and the gas-liquid mixture outlet pipe have ceramic flanges with through holes, and the fastening bolts fastened to the main body block are inserted through the through holes. Furthermore, when sealing between the main body block and the flange, it is advisable to form a receiving groove in the flange for accommodating the sealing member. However, when a receiving groove is formed in the flange, the mechanical strength of the portion with the receiving groove is reduced, and the flange is prone to damage when the fastening bolt is tightened. Therefore, the main body block may also have a receiving groove for accommodating the sealing member formed on the surface opposite to the flange.

[0010] In addition, in order to disperse the stress applied to the flange by tightening the fastening bolt and to prevent the flange from being damaged, a reinforcing plate may be provided between the head of the fastening bolt and the flange.

[0011] It is possible to consider forming a plurality of through holes in the flange portion in the circumferential direction, and having a plurality of fastening bolts inserted through the plurality of through holes sharing the reinforcing plate. This structure allows the stress generated by the tightening of each fastening bolt to be distributed over a large area.

[0012] The liquid material vaporization apparatus of the present invention further includes a control valve disposed on the main body block to adjust the flow rate of the liquid material. The valve core of this control valve also comes into contact with the liquid material; therefore, if the valve core is made of metal, metal may dissolve from the valve core. To prevent metal from dissolving from the valve core, a resin coating may be applied to the valve core of the control valve.

[0013] As a specific embodiment of the heating unit, it is possible to consider having: a heat transfer block arranged to surround the outer peripheral surface of the gas-liquid mixture outlet pipe; and a heater built into the heat transfer block. In this case, the gas-liquid mixture outlet pipe is subjected to a load by the heat transfer block and the cylindrical heater, which may cause the gas-liquid mixture outlet pipe to break. To prevent damage to the gas-liquid mixture outlet pipe caused by the load of the heating section, the heat transfer block or the heater can be supported by a support member that is independently provided with the gas-liquid mixture outlet pipe.

[0014] To facilitate the installation of the heat transfer block onto the gas-liquid mixture outlet pipe without subjecting it to excessive impact, the heat transfer block may be composed of multiple aluminum blocks, which are then fastened to the gas-liquid mixture outlet pipe using fastening components.

[0015] The liquid material vaporization apparatus of the present invention further includes a carrier gas supply pipe connected to the main body block and supplying the carrier gas to the main body block. Furthermore, the carrier gas supply pipe may also be made of ceramic or plastic. Based on this structure, the liquid material supply pipe and the carrier gas supply pipe can also be used as a common component. Furthermore, even if the liquid material flows back into the carrier gas supply pipe, metal leaching can be prevented.

[0016] The ceramic is preferably silicon carbide (SiC). Silicon carbide (SiC) is particularly suitable for the purposes of this invention because it does not leach metals as well as other ceramics such as alumina. Furthermore, SiC has excellent thermal conductivity, enabling efficient heating of liquid materials by constructing a gas-liquid mixture outlet pipe from SiC.

[0017] The plastic is preferably a fluorinated resin or a polyether ether ketone resin (PEEK resin). Examples of fluorinated resins include PTFE (polytetrafluoroethylene), PFA (perfluoroalkoxyalkane), or ETFE (ethylene-tetrafluoroethylene).

[0018] Furthermore, the liquid material vaporization apparatus of the present invention is characterized by comprising: a main block to which liquid material is supplied; a control valve disposed on the main block for adjusting the flow rate of the liquid material; a liquid material supply pipe for supplying the liquid material to the main block; a liquid material outlet pipe for discharging the liquid material from the main block; and a heating unit for heating the liquid material outlet pipe, wherein the main block is made of ceramic or plastic, the liquid material supply pipe is made of ceramic or plastic, and the liquid material outlet pipe is made of ceramic.

[0019] Thus, according to the present invention, it is possible to prevent metal leaching and to vaporize liquid materials. Attached Figure Description

[0020] Figure 1 This is a cross-sectional view schematically illustrating the structure of a liquid material vaporization apparatus according to one embodiment of the present invention. Figure 2 This is a top view showing the main block, liquid material supply pipe, carrier gas supply pipe, and gas-liquid mixture outlet pipe of the same embodiment. Figure 3 These are cross-sectional views of (a) the heating section and (b) the heating section after it has been disassembled, according to the same embodiment. Figure 4This is an enlarged cross-sectional view of the valve core of the control valve in the same embodiment. Figure 5 This is a cross-sectional view showing the connection structure between the main body block and the flange in the same embodiment. Figure 6 These are perspective views of (a) the assembly of the reinforcing plate and (b) the reinforcing plate, which are the same embodiment. Figure 7 This is a schematic diagram showing the state of the heating element relative to the housing support in the same embodiment. Figure 8 This is a schematic diagram showing the structure of a liquid material vaporization device according to a modified embodiment. Figure 9 These are (a) a rear view, (b) a side view, and (c) a perspective view showing the structure of the flange portion in a modified embodiment. Figure 10 These are perspective views of (a) the liquid material supply pipe and (b) the carrier gas supply pipe, showing the structure of the flange portion in a modified embodiment. Figure 11 This is a cross-sectional view schematically showing the structure of a liquid material vaporization apparatus according to a modified embodiment. Detailed Implementation

[0021] Hereinafter, one embodiment of the liquid material vaporization apparatus of the present invention will be described with reference to the accompanying drawings. Furthermore, for ease of understanding, any of the figures shown below have been depicted schematically or with appropriate omissions or exaggerations. The same reference numerals are used to label the same constituent elements, and descriptions are omitted where appropriate.

[0022] <Basic Structure of Liquid Material Vaporization Device 100> The liquid material vaporization apparatus 100 of this embodiment is used to supply a predetermined flow rate of material gas to, for example, a chamber assembled in a semiconductor production line and used in a semiconductor manufacturing process.

[0023] Specifically, the liquid material vaporization device 100 mixes liquid material LM and carrier gas CG to generate a gas-liquid mixture GL. By heating the gas-liquid mixture GL, the liquid material LM contained in the gas-liquid mixture GL is vaporized to generate material gas MG.

[0024] like Figure 1 and Figure 2As shown, the liquid material vaporization device includes: a main block 2 for mixing liquid material LM and carrier gas CG; a liquid material supply pipe 3 for supplying liquid material LM to the main block 2; a carrier gas supply pipe 4 for supplying carrier gas CG to the main block 2; a gas-liquid mixture outlet pipe 5 for discharging gas-liquid mixture GL from the main block 2; a control valve 6 disposed on the main block 2 for adjusting the flow rate of liquid material LM; and a heating unit 7 for heating the gas-liquid mixture GL by heating the gas-liquid mixture outlet pipe 5. Additionally, in Figure 2 The control valve 6 and the heating unit 7 are omitted from the illustration.

[0025] The main body 2 has a mixing section 2x for mixing liquid material LM and carrier gas CG. In addition, liquid material flow channel 2a for liquid material LM to flow, carrier gas flow channel 2b for carrier gas CG to flow, and gas-liquid mixture flow channel 2c for gas-liquid mixture GL to flow are formed in the main body 2.

[0026] Furthermore, the confluence of the liquid material flow channel 2a and the carrier gas flow channel 2b forms a mixing section 2x of the liquid material LM and the carrier gas CG. A gas-liquid mixture flow channel 2c is connected to this mixing section 2x. Moreover, the mixing section 2x opens inside the valve seat portion 21 formed on the upper surface of the main body block 2. The valve seat portion 21 is a component that controls the abutment or disengagement of the control valve 6. Additionally, an annular groove 22 is formed around the valve seat portion 21 on the upper surface of the main body block 2, and the liquid material flow channel 2a opens into the annular groove 22.

[0027] A liquid material supply pipe 3 is connected upstream of the liquid material flow channel 2a of the main body block 2, supplying liquid material LM to the liquid material flow channel 2a. A carrier gas supply pipe 4 is connected upstream of the carrier gas flow channel 2b of the main body block 2, supplying carrier gas CG to the carrier gas flow channel 2b. In addition, a gas-liquid mixture outlet pipe 5 is connected downstream of the gas-liquid mixture flow channel 2c of the main body block 2, discharging the gas-liquid mixture from the gas-liquid mixture flow channel 2c. The connection structure of these pipes 3 to 5 will be described later.

[0028] Control valve 6 functions as a flow control valve, such as... Figure 1 As shown, the control valve 6 is disposed on the upper surface of the main body block 2 via a sealing member (not shown). The control valve 6 includes: a diaphragm 61, which serves as the valve core, abutting against or separating from the valve seat portion 21 of the main body block 2; and an actuator 62, which presses the diaphragm 61 to deform it. In addition, the actuator 62 is, for example, an actuator using a piezoelectric stack.

[0029] Furthermore, the diaphragm 61 of the control valve 6 separates from the valve seat 21, and the liquid material LM flows from the liquid material flow channel 2a into the mixing section 2x via the annular groove 22. The liquid material LM and the carrier gas CG are mixed to generate a gas-liquid mixture GL.

[0030] Here, a mass flow meter (not shown) is installed upstream of the liquid material supply pipe 3 to measure the flow rate of the liquid material LM flowing in the liquid material supply pipe 3. Furthermore, the control valve 6 performs feedback control by adjusting the flow rate of the liquid material LM supplied to the mixing section 2x to a predetermined flow rate based on the mass flow meter measurement. Additionally, a mass flow controller is installed upstream of the carrier gas supply pipe 4 to adjust the flow rate of the carrier gas flowing in the carrier gas supply pipe 4.

[0031] like Figure 1 and Figure 3 As shown, the heating unit 7 includes: a heat transfer block 71, which is arranged to surround the outer peripheral surface of the gas-liquid mixture outlet pipe 5; and a heater 72, which is built into the heat transfer block 71.

[0032] like Figure 3 As shown, the heat transfer block 71 transfers heat from the heater 72 to the gas-liquid mixture outlet pipe 5. The heat transfer block 71 has multiple (in this case, two) aluminum blocks 71a and 71b. A semi-cylindrical groove 71m is formed on the inner surface of each block 71a and 71b, which contacts the outer peripheral surface of the gas-liquid mixture outlet pipe 5. Furthermore, these two blocks 71a and 71b are fastened by the fastening member 73 while installed in the gas-liquid mixture outlet pipe 5. Alternatively, the heat transfer block 71 can be divided into three or more parts.

[0033] Furthermore, the heater 72 is a cylindrical heater built into the heat transfer block 71. The heater 72 is built into the heat transfer block 71 by being inserted into a mounting hole formed in the heat transfer block 71. Additionally, when the heater 72 uses an aluminum nitride heater or the like, its thermal expansion coefficient is close to that of SiC, so it can also be directly attached to the gas-liquid mixture outlet pipe 5.

[0034] The heating section 7, configured in this way, heats the gas-liquid mixture GL flowing in the gas-liquid mixture outlet pipe 5. In this embodiment, the structure is as follows: a nozzle section 5N (see reference 5N) is formed inside the gas-liquid mixture outlet pipe 5. Figure 1 The vaporization of liquid material LM is promoted by spraying the gas-liquid mixture GL using the nozzle section 5N.

[0035] <Structure to prevent metal leaching> Furthermore, the liquid material vaporization device 100 of this embodiment has a structure in which metal does not dissolve into the liquid material LM and the gas-liquid mixture GL.

[0036] Specifically, the main body block 2, the liquid material supply pipe 3, and the gas-liquid mixture outlet pipe 5 are made of ceramics with excellent heat resistance and corrosion resistance. Furthermore, in this embodiment, the carrier gas supply pipe 4 is also made of ceramic. Silicon carbide (SiC) is used as the ceramic. Silicon carbide (SiC) is a material that does not exhibit metal leaching, even in other ceramics such as alumina. Moreover, the main body block 2, the liquid material supply pipe 3, the gas-liquid mixture outlet pipe 5, and the carrier gas supply pipe 4 are each composed of independent components.

[0037] Furthermore, a resin coating is applied to the diaphragm 61, which serves as the valve core of the control valve 6. Specifically, such as... Figure 4 As shown, a resin coating is applied to the entire seat surface of the liquid contact surface of the diaphragm 61, thereby forming a resin layer 61x.

[0038] As a resin coating, a fluorinated resin coating is applied. Examples of fluorinated resins used for coating include PTFE (polytetrafluoroethylene), PFA (perfluoroalkoxyalkane), or ETFE (ethylene-tetrafluoroethylene).

[0039] With this structure, in the liquid material vaporization device 100, the flow channels through which the liquid material LM passes and the flow channels through which the gas-liquid mixture GL passes are made of ceramic and fluorine-based resin, and are metal-free. Furthermore, the gas-liquid mixture outlet pipe 5, which is heated by the heating unit 7, is made of ceramic, which has a higher thermal conductivity than plastic. Therefore, the thermal conductivity from the heating unit 7 to the gas-liquid mixture GL is improved, enabling efficient heating of the liquid material LM in the gas-liquid mixture outlet pipe 5 to generate vaporized gas.

[0040] <Connection structure between main block 2 and pipes 3-5> like Figure 1 , Figure 2 and Figure 5 As shown, the liquid material supply pipe 3, the carrier gas supply pipe 4, and the gas-liquid mixture outlet pipe 5 have flanges 31, 41, and 51 for connection with the main body block 2. Figure 5 As shown, these flange portions 31, 41, and 51 have through holes H1, through which fastening bolts 8, which are fastened to the main body block 2, are inserted. In this embodiment, flange portions 31, 41, and 51 have multiple (three in this case) through holes H1 formed in the circumferential direction. Furthermore, the flange portions 31, 41, and 51 are fastened and fixed to the main body block 2 by three fastening bolts 8. Thus, the liquid material supply pipe 3, the carrier gas supply pipe 4, and the gas-liquid mixture outlet pipe 5 are connected to the main body block 2.

[0041] Moreover, such as Figure 5 As shown, in the main body block 2, a receiving groove 23 for accommodating the sealing member 9 is formed on the surface opposite to the flange portions 31, 41, and 51 of each tube 3 to 5. Here, the sealing member 9 can be, for example, an O-ring made of fluororubber.

[0042] Specifically, on the side of the main body block 2 where the upstream opening of the liquid material flow channel 2a is formed, a receiving groove 23 is formed in the portion opposite to the flange 31 of the liquid material supply pipe 3, surrounding the upstream opening of the liquid material flow channel 2a. Furthermore, on the side of the main body block 2 where the upstream opening of the carrier gas flow channel 2b is formed, a receiving groove 23 is formed in the portion opposite to the flange 41 of the carrier gas supply pipe 4, surrounding the upstream opening of the carrier gas flow channel 2b. Moreover, on the side of the main body block 2 where the upstream opening of the gas-liquid mixture flow channel 2c is formed, a receiving groove 23 is formed in the portion opposite to the flange 51 of the gas-liquid mixture outlet pipe 5, surrounding the upstream opening of the gas-liquid mixture flow channel 2c.

[0043] In this way, by forming the receiving groove 23 for accommodating the sealing member 9 on the main body block 2, it is not necessary to form the receiving groove 23 on the flange portions 31, 41, and 51 of each tube 3 to 5. Specifically, in the flange portions 31, 41, and 51, the surface opposite to the main body block 2 can be made flat. In addition, the thickness of the flange portions 31, 41, and 51 can be increased. As a result, even if they are made of ceramic or plastic, the mechanical strength of the flange portions 31, 41, and 51 can be improved. Furthermore, the upright portions (base ends) of the flange portions 31, 41, and 51 are rounded to concentrate stress, thereby improving mechanical strength.

[0044] Furthermore, in the liquid material vaporization apparatus 100 of this embodiment, particularly as Figure 5 and Figure 6 As shown, a reinforcing plate 10 is provided between the head 81 of the fastening bolt 8 and the flange portions 31, 41, and 51.

[0045] When the fastening bolt 8 is tightened, the reinforcing plate 10 disperses the stress applied from the head 81 of the fastening bolt 8 to the flange portions 31, 41, and 51. Furthermore, the reinforcing plate 10 is a component different from the washer that is externally embedded in the fastening bolt 8, and is a component whose contact area with the flange portions 31, 41, and 51 is larger than that of the washer.

[0046] The reinforcing plate 10 in this embodiment is a component shared by multiple fastening bolts 8 that are inserted through multiple through holes H1. Specifically, the reinforcing plate 10 is formed in a circumferential shape along the flange portions 31, 41, 51, and has multiple through holes 10h corresponding to the multiple through holes H1. The reinforcing plate 10 is a component shared by three fastening bolts 8, but it can also be a component provided for each fastening bolt 8, or a component shared by two or more fastening bolts 8.

[0047] Furthermore, since a heating element 7 is provided in the gas-liquid mixture outlet pipe 5, which is made of ceramic, the flange portion 51 of the gas-liquid mixture outlet pipe 5 is subjected to stress due to the load of the heating element 7, which may cause it to break. In addition, the flange portion 51 may also break due to impacts applied to the gas-liquid mixture outlet pipe 5 during device mounting or transportation. Therefore, in order to support the heating element 7 and reduce the load on the gas-liquid mixture outlet pipe 5, such as... Figure 7 As shown, the heat transfer block 71 or heater 72 is supported by the support member 11.

[0048] The support member 11 is independently provided with the gas-liquid mixture outlet pipe 5. Specifically, the support member 11 is connected to the housing 12, which at least houses the main body block 2 and the heating part 7, and is also connected to the heat transfer block 71. In this embodiment, the support member 11 is generally L-shaped, with one flat plate portion connected to the bottom surface of the housing 12 and the other flat plate portion connected to the side surface of the heat transfer block 71. Furthermore, the flange portion 52 on the downstream side of the gas-liquid mixture outlet pipe 5 is an irregularly shaped flange so as not to hinder the tightening of the fixing screws that fix the heat transfer block 71 to the support member 11.

[0049] Furthermore, the upstream flange 32 of the liquid material supply pipe 3 extends from the side of the housing 12 and connects to an external pipe made of, for example, fluoropolymer resin for supplying the liquid material LM. Similarly, the upstream flange 42 of the carrier gas supply pipe 4 extends from the side of the housing 12 and connects to an external pipe made of, for example, fluoropolymer resin for supplying the carrier gas CG. Moreover, the downstream flange 52 of the gas-liquid mixture outlet pipe 5 extends from the side of the housing 12 and connects to an external pipe made of, for example, fluoropolymer resin for discharging the vaporized material gas MG.

[0050] <Effects of this implementation method> Thus, according to the liquid material vaporization device 100 of this embodiment, the main body block 2 is made of ceramic, the liquid material supply pipe 3 is made of ceramic, and the gas-liquid mixture outlet pipe 5 is made of ceramic, thereby preventing the leaching of metal into the liquid material LM and the gas-liquid mixture GL.

[0051] <Other Implementation Methods> For example, such as Figure 8As shown, a heat sink 13 can also be provided between the flange 51 and the heating part 7 in the gas-liquid mixture outlet pipe 5. This heat sink 13 is, for example, made of aluminum and is provided to surround the outer peripheral surface of the gas-liquid mixture outlet pipe 5. Similar to the heat transfer block 71, the heat sink 13 can be considered to have a structure of two blocks, which are fastened by fastening members while being installed in the gas-liquid mixture outlet pipe 5. By providing the heat sink 13 in this way, heat transfer to the main body block 2 and the control valve 6 via the gas-liquid mixture outlet pipe 5 can be reduced, thereby reducing the thermal impact on the control valve 6, etc. Furthermore, a heat sink can also be provided on the main body block 2 to reduce heat transfer to the control valve 6, thereby reducing the thermal impact on the control valve 6, etc.

[0052] Furthermore, as a structure to improve the mechanical strength of flanges 31, 41, and 51, such as Figure 9 As shown, one or more ribs 33, 43, 53 can also be formed to connect the back surfaces of the flanges 31, 41, 51 and the outer peripheral surfaces of each tube 3, 4, 5. By forming ribs 33, 43, 53 in this way, the mechanical strength of the flanges 31, 41, 51 can be improved. Furthermore, in the liquid material supply tube 3 where the heating section 7 is not provided, such as... Figure 10 As shown in (a), a rib 34 is formed along the outer circumferential surface from the flange 31 on the downstream side to the flange 32 on the upstream side of the liquid material supply pipe 3. Similarly, the same applies to the carrier gas supply pipe 4 where the heating section 7 is not provided. Figure 10 As shown in (b), ribs 44 are formed along the outer circumferential surface from the flange 41 on the downstream side to the flange 42 on the upstream side of the carrier gas supply pipe 4. By forming ribs 34 and 44 in this way, the mechanical strength of the flanges 31 and 41 can be improved.

[0053] Furthermore, at least one of the main body block 2, the liquid material supply pipe 3, and the carrier gas supply pipe 4 can also be made of a solid non-metallic material, synthetic resin, or plastic with excellent heat resistance and corrosion resistance. The plastic is a fluorinated resin or a polyether ether ketone resin (PEEK resin). Examples of fluorinated resins include PTFE (polytetrafluoroethylene), PFA (perfluoroalkoxyalkylene), or ETFE (ethylene tetrafluoroethylene).

[0054] Furthermore, at least one of the liquid material supply pipe 3, the carrier gas supply pipe 4, and the gas-liquid mixture outlet pipe 5 can be integrally formed with the main body block 2. When integrally formed including the gas-liquid mixture outlet pipe 5, integral forming with ceramic can be considered. Furthermore, when integrally formed excluding the gas-liquid mixture outlet pipe 5, integral forming with ceramic or plastic can be considered.

[0055] Alternatively, the structure could be as follows: by providing a heater to the main block 2, the liquid material LM flowing in the liquid material channel 2a and the gas-liquid mixture GL flowing in the gas-liquid mixture channel 2c are heated.

[0056] Furthermore, when the temperature used to vaporize the liquid material LM is low, the valve core 61 of the control valve 6 can also be made of plastic.

[0057] Based on this, in the aforementioned embodiment, the liquid material is vaporized after being mixed with a carrier gas to generate a gas-liquid mixture; however, a structure that does not use a carrier gas is also possible. In this case, such as Figure 11 As shown, the main body block 2 of the liquid material vaporization device 100 does not have a structure with a carrier gas flow channel 2b. Specifically, the liquid material vaporization device 100 includes: a main body block 2, to which liquid material LM is supplied; a control valve 6, provided on the main body block 2, for adjusting the flow rate of liquid material LM; a liquid material supply pipe 3 for supplying liquid material LM to the main body block 2; a liquid material outlet pipe 5 for outleting liquid material LM from the main body block 2; and a heating unit 7 for heating the liquid material outlet pipe 5. The liquid material outlet pipe 5 has the same structure as the gas-liquid mixture outlet pipe 5 of the described embodiment. Furthermore, the structures of the other parts are also the same as in the described embodiment.

[0058] Furthermore, the structure of the liquid material vaporization apparatus 100 of the above embodiment can also be used to construct a gas-liquid mixing apparatus. This gas-liquid mixing apparatus is a structure without the vaporization section of the above embodiment. That is, the gas-liquid mixing apparatus includes: a main body block 2 for mixing liquid material LM and carrier gas CG; a liquid material supply pipe 3 for supplying liquid material LM to the main body block 2; a carrier gas supply pipe 4 for supplying carrier gas CG to the main body block 2; and a gas-liquid mixture outlet pipe 5 for discharging the gas-liquid mixture GL from the main body block 2. Moreover, the main body block 2 is made of ceramic or plastic. The liquid material supply pipe 3 is made of ceramic or plastic. The carrier gas supply pipe 4 is made of ceramic or plastic. Furthermore, the gas-liquid mixture outlet pipe 5 is made of ceramic or plastic.

[0059] Furthermore, various modifications or combinations of embodiments are possible as long as they do not violate the spirit of this invention. Explanation of reference numerals in the attached figures

[0060] 100 Liquid Material Gasification Device LM Liquid Materials CG carrier gas GL gas-liquid mixture 2 Main Block 3. Liquid material supply pipe 31 Flange portion 4. Carrier gas supply pipe 41 Flange portion 5. Gas-liquid mixture outlet pipe 51 Flange portion 6. Control valve 61 Valve core 7 Heating section 71 Heat transfer block 71a and 71b blocks 72 Heater 8 Fastening bolts H1 Through Hole 9. Sealing components 23 containment slots 10 Reinforcing Plates 11. Supporting components.

Claims

1. A liquid material vaporization device, wherein, have: The main block mixes the liquid material and carrier gas. A liquid material supply pipe supplies the liquid material to the main body block; A gas-liquid mixture outlet pipe is provided to outlet the gas-liquid mixture from the main body block; as well as The heating unit heats the gas-liquid mixture outlet pipe. The main body block is made of ceramic or plastic. The liquid material supply pipe is made of ceramic or plastic. The gas-liquid mixture outlet pipe is made of ceramic.

2. The liquid material vaporization device according to claim 1, wherein, The main block, the liquid material supply pipe, and the gas-liquid mixture outlet pipe are composed of independent components.

3. The liquid material vaporization apparatus according to claim 1 or 2, wherein, The liquid material supply pipe and the gas-liquid mixture outlet pipe have flanges with through holes, and fastening bolts fastened to the main body block are inserted through the through holes. The main block has a receiving groove for accommodating the sealing member on the surface opposite to the flange.

4. The liquid material vaporization apparatus according to claim 1 or 2, wherein, The liquid material supply pipe and the gas-liquid mixture outlet pipe have flanges with through holes, and fastening bolts fastened to the main body block are inserted through the through holes. A reinforcing plate is provided between the head of the fastening bolt and the flange.

5. The liquid material vaporization device according to claim 4, wherein, The flange portion has a plurality of through holes formed in the circumferential direction. The reinforcing plate is shared by multiple fastening bolts that are inserted through multiple through holes.

6. The liquid material vaporization apparatus according to any one of claims 1 to 5, wherein, The liquid material vaporization device also includes a control valve, which is located on the main body block to adjust the flow rate of the liquid material. The valve core of the control valve is coated with a resin coating.

7. The liquid material vaporization apparatus according to any one of claims 1 to 6, wherein, The heating element has: A heat transfer block is arranged to surround the outer peripheral surface of the gas-liquid mixture outlet pipe; and The heater is built into the heat transfer block. The heat transfer block or the heater is supported by a support member that is independently disposed from the gas-liquid mixture outlet pipe.

8. The liquid material vaporization apparatus according to claim 7, wherein, The heat transfer block is composed of multiple aluminum blocks. The multiple blocks are installed in the gas-liquid mixture outlet pipe by fastening them with fastening components.

9. The liquid material vaporization apparatus according to any one of claims 1 to 8, wherein, The liquid material vaporization device also includes a carrier gas supply pipe for supplying the carrier gas to the main block. The carrier gas supply pipe is made of ceramic or plastic.

10. The liquid material vaporization apparatus according to any one of claims 1 to 9, wherein, The ceramic is SiC ceramic.

11. The liquid material vaporization apparatus according to any one of claims 1 to 10, wherein, The plastic is a fluorinated resin or a polyetheretherketone resin.

12. A liquid material vaporization device, wherein, have: The main block is supplied with liquid material; A control valve, located on the main body block, adjusts the flow rate of the liquid material; A liquid material supply pipe supplies the liquid material to the main body block; A liquid material outlet tube, which outlets the liquid material from the main body block; as well as The heating unit heats the liquid material outlet pipe. The main body block is made of ceramic or plastic. The liquid material supply pipe is made of ceramic or plastic. The liquid material outlet tube is made of ceramic.

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