Tail gas treatment plant

Abstract

The application provides a tail gas treatment equipment for treating tail gas generated by a dry etching device, which comprises a shell, a gas extraction assembly, a combustion mechanism and a filtering device. The shell has a hollow structure and comprises a bottom wall in a first direction. The gas extraction assembly is arranged in the shell and fixed to the shell, and comprises a first inlet and a first outlet. The combustion mechanism is arranged in the shell and fixed to the shell, and comprises a second inlet and a second outlet, and the first outlet is communicated with the second inlet. The filtering device is fixed to the shell and comprises a third inlet, and the second outlet is communicated with the third inlet. The gas extraction assembly is arranged in a spaced mode with the bottom wall, the first inlet is located on a side of the gas extraction assembly away from the bottom wall, and the second outlet is located on a side of the combustion mechanism facing the bottom wall.

Description

Technical Field

[0001] This application relates to the field of exhaust gas treatment technology, and in particular to an exhaust gas treatment device. Background Technology

[0002] The semiconductor industry is a crucial sub-sector of the electronics and information manufacturing industry. With the smooth advancement of new infrastructure initiatives such as 5G, the Internet of Things, artificial intelligence, big data, and cloud computing, the semiconductor industry is experiencing rapid growth. The semiconductor industry requires the use of large quantities of acids, alkalis, organic solvents, and various special gases in processes such as cleaning, photolithography, resist removal, and drying. The entire production process generates a significant amount of toxic substances, acidic waste gases, alkaline waste gases, and organic waste gases.

[0003] The toxic substances and waste gases generated during this process cannot be directly discharged into the atmosphere. They must undergo relevant exhaust gas treatment. Only after the treated exhaust gas meets environmental emission requirements can it be discharged into the atmosphere. Summary of the Invention

[0004] This application provides an exhaust gas treatment device that can reduce the risk of blockage.

[0005] In a first aspect, embodiments of this application provide an exhaust gas treatment device for treating exhaust gas generated by a dry etching apparatus. The exhaust gas treatment device includes:

[0006] The outer shell has a hollow structure and includes a bottom wall in the first direction;

[0007] An air extraction assembly is disposed within and fixed to the housing, and the air extraction assembly includes a first inlet and a first outlet;

[0008] A combustion mechanism is disposed inside and fixed to the housing. The combustion mechanism includes a second inlet and a second outlet, with the first outlet connected to the second inlet.

[0009] A filter device, fixed to the housing, includes a third inlet and a second outlet connected to the third inlet;

[0010] The extraction assembly is spaced apart from the bottom wall, with the first inlet located on the side of the extraction assembly away from the bottom wall and the second outlet located on the side of the combustion mechanism facing the bottom wall.

[0011] In some embodiments, the first outlet is connected to the second inlet;

[0012] In some embodiments, the combustion mechanism is located on one side of the extraction assembly in the second direction, where the first direction intersects the second direction;

[0013] In some embodiments, the combustion mechanism includes a combustion chamber and a burner, with the burner located on the side of the combustion chamber away from the extraction assembly;

[0014] In some embodiments, the exhaust gas treatment device further includes a sealing assembly disposed at the connection between the first outlet and the second inlet.

[0015] In some embodiments, the combustion mechanism includes a combustion chamber, the outer wall of which is recessed inward to form a recessed space, and a portion of the structure in the extraction assembly is located within the recessed space.

[0016] In some embodiments, the combustion mechanism is located on one side of the extraction assembly along the second direction, and the first direction intersects the second direction;

[0017] The outer wall includes a first wall and a second wall opposite each other in the second direction. The first wall is located on the side of the second wall facing the air extraction assembly. A portion of the structure in the first wall is recessed toward the second wall to form a recessed space.

[0018] The combustion mechanism also includes a burner, which is installed on the second wall;

[0019] In some embodiments, the second wall is parallel to the first direction;

[0020] In some embodiments, the combustion mechanism further includes a connecting pipe protruding from the outer wall and located within a recessed space, the connecting pipe communicating with the interior of the combustion chamber and including a second inlet.

[0021] In some embodiments, a first pipeline is further included between the first outlet and the second inlet, the extension length of the first pipeline being L1, where L1 satisfies: 0 < L1 ≤ 20 cm;

[0022] In some embodiments, the first pipeline has a straight structure;

[0023] In some embodiments, the first conduit extends along a second direction, and the first direction intersects with the second direction;

[0024] In some embodiments, no control valve is provided on the first pipeline;

[0025] In some embodiments, no heating element is provided on the first pipeline.

[0026] In some embodiments, the housing includes a sidewall structure disposed on the periphery of the bottom wall, and the air extraction assembly is connected to the sidewall structure;

[0027] In some embodiments, at least a portion of the combustion mechanism is located between the extraction assembly and the bottom wall.

[0028] In some embodiments, the combustion mechanism is connected to the bottom wall;

[0029] In some embodiments, the housing further includes a top wall disposed opposite to the bottom wall in a first direction, and the distance between the air extraction component and the top wall is smaller than the distance between the air extraction component and the bottom wall.

[0030] In some embodiments, the filter device is located inside the housing;

[0031] In some embodiments, the filter is located on the side of the combustion mechanism near the bottom wall;

[0032] In some embodiments, the air extraction assembly, the combustion mechanism, and the filter device are arranged sequentially in a first direction;

[0033] In some embodiments, the housing includes a sidewall structure disposed on the periphery of the bottom wall and a first partition protruding from the inner surface of the sidewall structure, wherein the combustion mechanism and the filter device are disposed on opposite sides of the first partition, and the combustion mechanism is connected to the first partition.

[0034] In some embodiments, the filter device is connected to the bottom wall;

[0035] In some embodiments, the filter device includes a third outlet, and the housing includes a top wall opposite the bottom wall in a first direction, the top wall having a first hole;

[0036] The exhaust gas treatment equipment also includes an exhaust pipe, which connects the third outlet to the first hole.

[0037] In some embodiments, the filter device is located on one side of the combustion mechanism in the second direction, and the first and second directions are intersected.

[0038] In some embodiments, the filter device includes a third inlet, a second outlet connected to the third inlet, and the third inlet is disposed on one side of the filter device in a second direction;

[0039] In some embodiments, the air extraction assembly, the combustion mechanism, and the filter device are arranged sequentially in the second direction;

[0040] In some embodiments, the extraction assembly is located on the third-direction side of the combustion mechanism, where the first direction, the second direction, and the third direction intersect each other.

[0041] In some embodiments, the filter device is located outside the housing;

[0042] In some embodiments, the filter device is disposed on the side of the bottom wall away from the combustion mechanism;

[0043] In some embodiments, the filter device is connected to the bottom wall;

[0044] In some embodiments, the exhaust gas treatment device further includes a second pipe with a second hole in its bottom wall, the second pipe passing through the second hole and connecting to a second outlet and a filter device.

[0045] In some embodiments, a third conduit is also included for connecting the first inlet to the dry etching apparatus;

[0046] The extension length of the third pipeline is L2, and L2 satisfies: L2 > 20cm;

[0047] In some embodiments, the third conduit includes a pipe body and a heating element that covers the pipe body;

[0048] In some embodiments, the third conduit extends along a first direction.

[0049] Secondly, embodiments of this application provide an exhaust gas treatment device for treating exhaust gas generated by a dry etching apparatus. The exhaust gas treatment device includes:

[0050] The outer shell has a hollow structure;

[0051] An air extraction assembly is disposed within and fixed to the housing, and the air extraction assembly includes a first inlet and a first outlet;

[0052] A combustion mechanism is disposed inside and fixed to the housing. The combustion mechanism includes a second inlet and a second outlet, and the first outlet is connected to the first inlet.

[0053] A filter device, fixed to the housing, includes a third inlet and a second outlet connected to the third inlet;

[0054] The distance between the first outlet and the second inlet shall not exceed 20cm.

[0055] This application provides an exhaust gas treatment device that integrates both the extraction component and the combustion mechanism within a housing. This reduces the distance between the extraction component and the combustion mechanism, lowering the risk of blockage caused by excessively long transmission paths of exhaust gas between them. Furthermore, this application also adjusts the structure of the extraction component and the combustion mechanism, as well as their relative positions. The extraction component is positioned spaced apart from the bottom wall of the housing, and the first inlet is located on the side of the extraction component facing away from the bottom wall. This allows the exhaust gas between the dry etching device and the extraction component to move along the direction of gravity, meeting the operational needs of the extraction component. It also helps reduce the distance between the first inlet and the dry etching device, reducing the extraction difficulty. Additionally, the second outlet of the combustion mechanism is located on the side of the combustion mechanism facing the bottom wall, reducing the risk of exhaust gas accumulation below the combustion mechanism and meeting the exhaust gas flow requirements within the exhaust gas treatment device. Attached Figure Description

[0056] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments of this application will be briefly introduced below. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0057] Figure 1 This is a schematic diagram of the cooperation structure between an exhaust gas treatment device and a dry etching apparatus provided in an embodiment of this application;

[0058] Figure 2 This is a schematic diagram of another exhaust gas treatment device provided in an embodiment of this application;

[0059] Figure 3 This is a schematic diagram of another exhaust gas treatment device provided in an embodiment of this application;

[0060] Figure 4 This is a schematic diagram of another exhaust gas treatment device provided in an embodiment of this application;

[0061] Figure 5 This is a schematic diagram of another exhaust gas treatment device provided in an embodiment of this application;

[0062] Figure 6 This is a schematic diagram of another exhaust gas treatment device provided in the embodiments of this application.

[0063] Marker explanation:

[0064] 10. Outer shell; 11. Bottom wall; 12. Side wall structure; 13. Top wall; 14. First partition plate; 15. First hole; 16. Second hole;

[0065] 20. Air extraction assembly; 21. First inlet; 22. First outlet;

[0066] 30. Combustion mechanism; 31. Second inlet; 32. Second outlet; 33. Combustion chamber; 34. Burner; 35. Recessed space; 36. Connecting pipe;

[0067] 40. Filter device; 41. Third inlet; 42. Third outlet;

[0068] 50. Dry etching apparatus;

[0069] 60. Sealing components;

[0070] 71. First pipeline; 72. Second pipeline; 73. Third pipeline; 731. Pipe body; 732. Heating element;

[0071] 80. Exhaust pipe;

[0072] X, the first direction; Y, the second direction. Detailed Implementation

[0073] The features and exemplary embodiments of various aspects of this application will be described in detail below. To make the objectives, technical solutions, and advantages of this application clearer, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain this application and not to limit it. For those skilled in the art, this application can be implemented without some of these specific details. The following description of the embodiments is merely to provide a better understanding of this application by illustrating examples.

[0074] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising..." does not exclude the presence of additional identical elements in the process, method, article, or apparatus that includes said element.

[0075] Taking display panel production as an example, the production process of display panels is often accompanied by dry etching process. In order to meet the etching requirements, gases such as Cl2, CF4, SF6, O2, He, and BCl3 need to be introduced into the dry etching device 50. After a series of reactions, the dry etching device will discharge exhaust gases such as TiClx, AlClx, MoClx, MoFx and SiO2.

[0076] To reduce the pollution of exhaust gas to the external environment, the dry etching device 50 often needs to be used in conjunction with a vacuum pump and a combustion device. However, due to the specific operating requirements of the vacuum pump and the combustion device, they usually need to be spaced far apart and connected by a pipeline structure. However, this design is prone to pipeline blockage after use, which affects the normal operation of the exhaust gas treatment process.

[0077] Regarding the above issues, firstly, please refer to [link / reference needed]. Figure 1This application provides an exhaust gas treatment device for treating exhaust gas generated by a dry etching apparatus 50. The exhaust gas treatment device includes a housing 10, an extraction assembly 20, a combustion mechanism 30, and a filter device 40. The housing 10 has a hollow structure and includes a bottom wall 11 in a first direction X. The extraction assembly 20 is disposed inside and fixed to the housing 10, and includes a first inlet 21 and a first outlet 22. The combustion mechanism 30 is disposed inside and fixed to the housing 10, and includes a second inlet 31 and a second outlet 32, with the first outlet 22 connected to the second inlet 31.

[0078] The filter device 40 is fixed to the housing 10. The filter device 40 includes a third inlet 41 and a second outlet 32 ​​connected to the third inlet 41. The air extraction assembly 20 is spaced apart from the bottom wall 11. The first inlet 21 is located on the side of the air extraction assembly 20 away from the bottom wall 11, and the second outlet 32 ​​is located on the side of the combustion mechanism 30 facing the bottom wall 11.

[0079] The extraction assembly 20, the combustion mechanism 30, and the filter device 40 are the three core components of the exhaust gas treatment equipment. The extraction assembly 20 is a power machine used to absorb exhaust gas and transfer it to the combustion mechanism 30. Optionally, the extraction assembly 20 may include a vacuum pump, which is a device or equipment that uses mechanical, physical, chemical, or physicochemical methods to evacuate the container being evacuated.

[0080] The combustion device 30 can combust the exhaust gas to convert at least some toxic and harmful gases into non-toxic and harmless substances, thereby reducing environmental pollution and harm to human health. The filtration device 40 can filter the exhaust gas after combustion by the combustion device 30 to filter out some toxic and harmful substances, ensuring that the final exhaust gas emissions meet standards. Optionally, the filtration device 40 may include a water tank containing coolant, which, in addition to filtering the exhaust gas, also provides a cooling effect. The coolant may include water.

[0081] The exhaust gas treatment equipment provided in this application embodiment can be applied to treat exhaust gas generated by dry etching device 50. Some substances in the exhaust gas formed by dry etching process are easy to crystallize at room temperature. On this basis, if the exhaust gas exchanges heat with the external environment over a long path, some substances in the exhaust gas are easy to solidify, thereby causing blockage and other problems.

[0082] To reduce the risk of blockage, the positions of the extraction assembly 20 and the combustion mechanism 30 are adjusted in this embodiment. In related technologies, the vacuum pump and the combustion device are often separated by a large distance and connected by corresponding pipeline structures. However, in this embodiment, the exhaust gas treatment device includes a housing 10, and both the extraction assembly 20 and the combustion mechanism 30 are located inside the housing 10, that is, the extraction assembly 20 and the combustion mechanism 30 are integrated into the same structure. This eliminates the large distance between the extraction assembly 20 and the combustion mechanism 30, thereby reducing the risk of blockage caused by exhaust gas transmission between the extraction assembly 20 and the combustion mechanism 30. The extraction assembly 20 and the combustion mechanism 30 can be directly connected, or they can be spaced apart and connected by a pipeline structure; this embodiment does not impose any limitations on this.

[0083] Since both the extraction assembly 20 and the combustion mechanism 30 have their own operational needs, it is not possible to simply place them in the same structure. Adjustments to their individual structures and relative positions are also necessary. Specifically, considering that the extraction assembly 20 needs to communicate with the dry etching device 50, and that the dry etching device 50 is often located above the extraction assembly 20, in order to bring the extraction assembly 20 closer to the dry etching device 50 to meet actual extraction requirements, this embodiment sets the extraction assembly 20 to be spaced apart from the bottom wall 11 of the outer casing 10. The bottom wall 11 is a wall structure of the outer casing 10 in the first direction X. During the use of the exhaust gas treatment equipment, the first direction X is parallel to the direction of gravity, and the bottom wall 11 is located in the lower region of the outer casing 10.

[0084] Furthermore, the present application embodiment also adjusts the structure of the extraction component 20, setting the first inlet 21 of the extraction component 20 to the side of the extraction component 20 away from the bottom wall 11. This design, on the one hand, allows the communication direction of the first inlet 21 to be parallel to the first direction X, that is, parallel to the direction of gravity, so that the exhaust gas located between the dry etching device 50 and the extraction component 20 can move along the direction of gravity, meeting the operating needs of the extraction component 20. On the other hand, it also helps to reduce the distance between the first inlet 21 and the dry etching device 50, reduce the difficulty of extraction of the extraction component 20, and reduce the risk of crystallization blockage of the exhaust gas between the dry etching device 50 and the extraction component 20.

[0085] For the combustion mechanism 30, the exhaust gas after combustion treatment usually accumulates at a lower position below the combustion mechanism 30. In order to make it easier for the exhaust gas after combustion treatment to enter the filter device 40 for filtration treatment, the structure of the combustion mechanism 30 is also adjusted in this embodiment. The second outlet 32 ​​is set on the side of the combustion mechanism 30 facing the bottom wall 11. In this way, the exhaust gas after combustion treatment can move into the filter device 40 through the second outlet 32, which meets the needs of exhaust gas flow inside the exhaust gas treatment equipment.

[0086] In summary, in this embodiment, both the extraction component 20 and the combustion mechanism 30 are integrated within the housing 10 to reduce the distance between them and lower the risk of blockage due to excessively long transmission paths of exhaust gas between them. Furthermore, this embodiment also adjusts the structure of the extraction component 20 and the combustion mechanism 30, as well as their relative positions. The extraction component 20 is positioned spaced apart from the bottom wall 11 of the housing 10, and the first inlet 21 is located on the side of the extraction component 20 away from the bottom wall 11. This allows the exhaust gas between the dry etching device 50 and the extraction component 20 to move along the direction of gravity, meeting the operational needs of the extraction component 20. Simultaneously, it helps reduce the distance between the first inlet 21 and the dry etching device 50, reducing the extraction difficulty of the extraction component 20. In addition, the second outlet 32 ​​of the combustion mechanism 30 is located on the side of the combustion mechanism 30 facing the bottom wall 11. This can reduce the risk of exhaust gas accumulating below the combustion mechanism 30 and meet the needs of exhaust gas flow inside the exhaust gas treatment equipment.

[0087] It should be noted that the relative positional relationship between the combustion mechanism 30 and the extraction assembly 20 is not limited in this embodiment. For example, the combustion mechanism 30 and the extraction assembly 20 can be arranged side-by-side in the first direction X, or they can be arranged side-by-side in other directions intersecting the first direction X; that is, the combustion mechanism 30 and the extraction assembly 20 can be arranged along the direction of gravity or along a horizontal direction. The relationship between the combustion mechanism 30 and the filter device 40 is similar, and will not be described further in this embodiment.

[0088] The present application does not limit the positional relationship of the filter device 40 relative to the housing 10. The filter device 40 may be integrated into the housing 10 together with the air extraction assembly 20 and the combustion mechanism 30, or the filter assembly may be disposed outside the housing 10.

[0089] In addition, "fixed" mentioned in the embodiments of the present application refers to that the relative positional relationship between different structures remains unchanged, which does not mean that the two are directly connected. The embodiments of the present application impose no limitation on the fixing modes of the air extraction assembly 20, the combustion mechanism 30 and the filtering device 40 relative to the outer housing 10. For example, the air extraction assembly 20 may be connected to the outer housing 10 to remain fixed relative to the outer housing 10, or the air extraction assembly 20 may not be connected to the outer housing 10 but connected to the combustion mechanism 30, and the combustion mechanism 30 is connected to the outer housing 10, which can also achieve relative fixation between the air extraction assembly 20 and the outer housing 10.

[0090] In some embodiments, please refer to Figure 2 , the first outlet 22 is connected to the second inlet 31.

[0091] The "connection" mentioned herein means that the first outlet 22 is in direct corresponding contact and communication with the second inlet 31, that is, no additional pipeline structure is used between the air extraction assembly 20 and the combustion mechanism 30. The embodiments of the present application impose no limitation on the specific connection mode of the first outlet 22 and the second inlet 31. Optionally, an external thread may be provided at the first outlet 22, and an internal thread may be provided at the second inlet 31, and the two are connected by threads to achieve mutual communication. Alternatively, an internal thread is provided at the first outlet 22, and a matching external thread is provided at the second inlet 31.

[0092] In the embodiments of the present application, the first outlet 22 and the second inlet 31 are directly connected, and no other pipeline structure is provided therebetween, so as to reduce the risk of tail gas blockage caused by small pipe diameter, long length and many bent areas of the pipeline structure between the air extraction assembly 20 and the combustion mechanism 30, and meanwhile, there is no need to consider the risk of temperature reduction and crystallization of tail gas between the air extraction assembly 20 and the combustion mechanism 30. Moreover, since the pipeline structure is omitted in this design, the cleaning of the pipeline structure can be reduced, thereby reducing the number of disassembly, maintenance or cleaning of the pipeline structure, lowering the risk of air leakage between the air extraction assembly 20 and the combustion mechanism 30. In addition, it also helps to reduce the arrangement of other components matched with the pipeline structure, such as control valves, thereby reducing the overall equipment cost of the tail gas treatment equipment.

[0093] In some embodiments, as shown in Figure 2 , the combustion mechanism 30 is located on one side of the air extraction assembly 20 in the second direction Y, and the first direction X intersects the second direction Y. The second direction Y is a direction intersecting the gravity direction. Optionally, the first direction X is perpendicular to the second direction Y, that is, the second direction Y is a horizontal direction.

[0094] In this embodiment, the combustion mechanism 30 and the extraction component 20 are not arranged side by side along the first direction X, but are arranged side by side along the second direction Y. This helps to reduce the size of the outer casing 10 in the first direction X, reduce the risk of the outer casing 10 being too large in a single direction, reduce the difficulty of manufacturing the outer casing 10, and improve the overall stability and balance of the exhaust gas treatment device.

[0095] In some embodiments, such as Figure 2 As shown, the combustion mechanism 30 includes a combustion chamber 33 and a burner 34, with the burner 34 located on the side of the combustion chamber 33 away from the exhaust assembly 20.

[0096] The combustion chamber 33 has a hollow structure. The exhaust gas entering the combustion mechanism 30 will be burned in the combustion chamber 33. The second inlet 31 and the second outlet 32 ​​are both connected to the combustion chamber 33. The burner 34 is the core component for realizing the combustion process. Optionally, the burner 34 can generate a high-temperature plasma flame. The combustion mechanism 30 also includes an air inlet connected to the combustion chamber 33. The exhaust gas enters the combustion chamber 33 through the second inlet 31, and air enters the combustion chamber 33 through the air inlet. The two are fully mixed and undergo a chemical reaction in the area near the combustion chamber 33, and some harmful components in the exhaust gas are decomposed and converted by high temperature.

[0097] In addition to the adjustments to the structure and position of the combustion mechanism 30 and the extraction assembly 20 in the above embodiments, this application embodiment also adjusts the positions of the combustion chamber 33 and the burner 34 in the combustion mechanism 30, so that the burner 34 is located on the side of the combustion chamber 33 away from the extraction assembly 20. This allows the combustion chamber 33 to be closer to the extraction assembly 20 relative to the burner 34. Under this design, the presence of the burner 34 does not affect the distance between the extraction assembly 20 and the combustion chamber 33, and the gas extracted by the extraction assembly 20 can directly enter the combustion chamber 33, thereby further reducing the risk of crystallization and solidification of the exhaust gas and reducing the occurrence of blockage. Simultaneously, since the combustion chamber 33 is located between the burner 34 and the extraction assembly 20, the combustion chamber 33 can act as a barrier between the burner 34 and the extraction assembly 20, reducing the risk of interference between the two components during operation and improving the overall operational reliability of the exhaust gas treatment equipment.

[0098] In some embodiments, such as Figure 2 As shown, the exhaust gas treatment equipment also includes a sealing component 60, which is disposed at the connection between the first outlet 22 and the second inlet 31.

[0099] The presence of the sealing assembly 60 reduces the risk of air leakage between the vacuum pump assembly 20 and the combustion mechanism 30. In related technologies, since the vacuum pump and the combustion device need to be connected via a piping structure, seals are required at the connection points between the two components and the piping structure. Furthermore, when the piping structure is long, it needs to be connected through multiple sub-pipes. In addition, seals are also required between adjacent sub-pipes, which often results in multiple seals between the vacuum pump and the combustion device.

[0100] In this embodiment, since the first outlet 22 is directly connected to the second inlet 31 and there are no other pipeline structures between them, only one sealing component 60 is needed to achieve the sealing effect between the extraction component 20 and the combustion mechanism 30. This helps to reduce costs and also helps to reduce the risk of air leakage between the extraction component 20 and the combustion mechanism 30.

[0101] In some embodiments, please refer to Figure 3 The combustion mechanism 30 includes a combustion chamber 33, the outer wall of which is recessed inward to form a recessed space 35, and a portion of the structure of the extraction assembly 20 is located within the recessed space 35.

[0102] The wall structure of the combustion chamber 33 includes an outer wall and an inner wall. The inner wall is used to enclose and form a cavity in which exhaust gas and air can mix and undergo combustion and chemical reactions, while the outer wall is used to fix the burner 34.

[0103] Furthermore, in addition to adjusting the relative position between the combustion chamber 33 and the combustion mechanism 30, this embodiment also adjusts the morphology of the combustion chamber 33 accordingly. A portion of the structure in the outer wall of the combustion chamber 33 is designed to be concave to form a recessed space 35 for a portion of the structure in the extraction assembly 20. This adjustment of the combustion chamber 33's morphology helps to further improve the integration between the extraction assembly 20 and the combustion mechanism 30, thereby reducing the distance between them and further reducing the risk of blockage between them. Simultaneously, the presence of the recessed space 35 also serves to avoid interference with the extraction assembly 20, thereby reducing structural interference between them and meeting the integration requirements of the extraction assembly 20 and the combustion mechanism 30.

[0104] It should be noted that the morphology of the inner wall is not limited in this application embodiment. The morphology of the inner wall can be similar to that of the outer wall, or the two can have different morphologies. The figure shows a case where the inner wall and the outer wall have similar morphologies, and the cavity formed by the inner wall has an irregular structure.

[0105] In some embodiments, such as Figure 3As shown, the combustion mechanism 30 is located on one side of the extraction assembly 20 along the second direction Y, where the first direction X intersects the second direction Y. The outer wall includes a first wall and a second wall opposite each other in the second direction Y. The first wall is located on the side of the second wall facing the extraction assembly 20, and a portion of the structure in the first wall is recessed towards the second wall to form a recessed space 35. The combustion mechanism 30 also includes a burner 34, which is disposed on the second wall.

[0106] The first wall and the second wall are two opposing surfaces of the outer wall in the second direction Y. The first wall is located on the side of the combustion chamber 33 near the exhaust assembly 20, and the first wall is recessed inward to form a recessed space 35 for accommodating part of the structure of the exhaust assembly 20.

[0107] Based on this, in this embodiment, the burner 34 is disposed on the second wall. This allows the exhaust assembly 20 and the burner 34 to be separated by the combustion chamber 33, reducing operational interference between them. This also helps to mitigate the adverse effects of the recessed space 35 on the installation of the burner 34, reducing the installation difficulty of the burner 34 and improving the connection reliability between the combustion chamber 33 and the burner 34. Further optionally, the second wall is parallel to the first direction X, i.e., the second wall is flat, which further reduces the installation difficulty of the burner 34.

[0108] In some embodiments, such as Figure 3 As shown, the combustion mechanism 30 also includes a connecting pipe that protrudes from the outer wall and is located in the recessed space 35. The connecting pipe communicates with the combustion chamber 33 and includes a second inlet 31.

[0109] The connecting pipe is a conduit structure in the combustion mechanism 30 used to connect to the extraction assembly 20. The connecting pipe 36 is integrally connected to the outer wall and connects to the receiving cavity formed by the inner wall. Further, in this embodiment, by having the connecting pipe protrude relative to the outer wall and located within the recessed space 35, the combustion mechanism 30 and the extraction assembly 20 can be connected within the recessed space 35. This utilizes the wall structure surrounding the recessed space 35 to enclose and protect the connection point between the combustion mechanism 30 and the extraction assembly 20, thereby improving the reliability of the connection between the combustion mechanism 30 and the extraction assembly 20.

[0110] In some embodiments, such as Figure 1 As shown, the exhaust gas treatment equipment also includes a first pipe 71 connected between the first outlet 22 and the second inlet 31. The extension length of the first pipe 71 is L1, and L1 satisfies: 0 < L1 ≤ 20 cm.

[0111] In this embodiment, the first outlet 22 and the second inlet 31 are not directly connected; a first pipe 71 is provided between them to connect the combustion mechanism 30 and the extraction assembly 20. However, unlike related technologies, this embodiment integrates both the combustion mechanism 30 and the extraction assembly 20 within the housing 10, resulting in a smaller distance between them. This allows the extension length of the first pipe 71 to be no more than 20 cm, meaning the first pipe 71 has a shorter extension length. This design allows exhaust gas leaving the extraction assembly 20 to quickly enter the combustion mechanism 30 through the first pipe 71, thereby reducing the heat exchange between the exhaust gas and the external environment within the first pipe 71, reducing the risk of crystallization and solidification of the exhaust gas within the first pipe 71, reducing the risk of blockage in the first pipe 71, reducing the frequency of cleaning and disassembling the first pipe 71, and improving the operational reliability and overall operating time of the exhaust gas treatment equipment.

[0112] Furthermore, due to the presence of the first pipeline 71, there can be a certain distance between the combustion mechanism 30 and the extraction assembly 20, which can reduce the risk of interference between the two, thus eliminating the need to match and adjust the outer contour of the combustion mechanism 30 and the extraction assembly 20, reducing the design difficulty.

[0113] In some embodiments, the first pipe 71 has a straight structure, that is, the first pipe 71 does not have a bend area.

[0114] In this embodiment, the first pipe 71 does not have a bend, which allows the combustion mechanism 30 and the extraction assembly 20 to move in a straight line, reducing the flow rate change caused by bending and the increase in heat exchange with the outside. This helps to further reduce the risk of exhaust gas crystallizing and solidifying in the first pipe 71 and reduce the risk of blockage in the first pipe 71.

[0115] In some embodiments, the first conduit 71 extends along the second direction Y, and the first direction X intersects the second direction Y.

[0116] This application embodiment is applicable to the case where the combustion mechanism 30 and the exhaust assembly 20 are arranged side by side in the second direction Y. By extending the first pipeline 71 along the second direction Y, the exhaust gas treatment device can share part of the size in the first direction X and the second direction Y, thereby reducing the risk of the outer shell 10 being too large in a single direction, improving the overall structural stability of the exhaust gas treatment device, and reducing the manufacturing difficulty of the outer shell 10.

[0117] In some embodiments, no control valve is provided on the first pipeline 71.

[0118] In this embodiment, the combustion mechanism 30 and the extraction assembly 20 are always in a conductive state. The exhaust gas in the first pipeline 71 is not restricted by the valve structure during its movement, thereby increasing the flow rate of the exhaust gas from the extraction assembly 20 to the combustion mechanism 30 and further reducing the risk of blockage in the first pipeline 71.

[0119] In some embodiments, no heating element is provided on the first conduit 71.

[0120] Because the extension length of the first pipe 71 is relatively small, the contact area between the exhaust gas and the pipe structure within the first pipe 71 is small. Consequently, the heat exchange between the exhaust gas and the external environment through the pipe structure is limited. Therefore, the exhaust gas within the first pipe 71 is unlikely to crystallize and solidify through heat exchange with the external environment. Thus, even without a heating element on the first pipe 71, the exhaust gas is unlikely to solidify within it. Therefore, in this embodiment, no heating element is provided on the first pipe 71, which helps reduce costs and minimizes damage to the first pipe 71 caused by heating elements.

[0121] In some embodiments, such as Figure 1 As shown, the outer casing 10 includes a side wall structure 12 disposed around the bottom wall 11, and the air extraction assembly 20 is connected to the side wall structure 12.

[0122] As described above, the vacuum assembly 20 needs to be spaced apart from the bottom wall 11. Therefore, in this embodiment, the vacuum assembly 20 is directly connected to the side wall structure 12 of the outer casing 10. This satisfies both the need for fixing the vacuum assembly 20 to the outer casing 10 and allows for a spaced-apart design between the vacuum assembly 20 and the bottom wall 11, offering strong practicality and flexibility. This embodiment does not limit the specific connection method between the vacuum assembly 20 and the side wall structure 12. For example, they can be fixed by welding or threaded connection.

[0123] In some embodiments, the combustion mechanism 30 is at least partially disposed between the extraction assembly 20 and the bottom wall 11.

[0124] In this embodiment of the application, by at least partially arranging the combustion mechanism 30 between the extraction component 20 and the bottom wall 11, the space between the extraction component 20 and the bottom wall 11 can be utilized. This improves the integration between the combustion mechanism 30 and the extraction component 20, while flexibly utilizing different areas of space inside the housing 10 in the first direction X, thereby increasing the utilization rate of the internal space of the housing 10 and thus helping to reduce the size of the exhaust gas treatment device.

[0125] In some embodiments, please refer to Figure 4The combustion mechanism 30 is connected to the bottom wall 11. By connecting the combustion mechanism 30 and the extraction component 20 to the bottom wall 11 and the side wall structure 12 respectively, the combustion mechanism 30 and the extraction component 20 can be misaligned in three-dimensional space, reducing the risk of contact interference between the two and meeting the integration requirements of the combustion mechanism 30 and the extraction component 20 in the exhaust gas treatment equipment.

[0126] It should be noted that, since the second outlet 32 ​​is located on the side of the combustion mechanism 30 facing the bottom wall 11, in order to reduce the interference between the pipeline structure between the combustion mechanism 30 and the filter device 40 and the bottom wall 11, a support structure can be provided on the surface of the combustion mechanism 30 where the second outlet 32 ​​is located. The support structure is used to achieve the spacing between the second outlet 32 ​​and the bottom wall 11. Alternatively, in some embodiments, the surface of the combustion mechanism 30 where the second outlet 32 ​​is located can also be in direct contact with the bottom wall 11. In this case, the pipeline structure between the combustion mechanism 30 and the filter device 40 can extend through the bottom wall 11 to the outside of the housing 10 and be correspondingly connected to the filter device 40.

[0127] In some embodiments, such as Figure 4 As shown, the outer casing 10 also includes a top wall 13 disposed opposite to the bottom wall 11 in the first direction X, and the distance between the air extraction assembly 20 and the top wall 13 is smaller than the distance between the air extraction assembly 20 and the bottom wall 11.

[0128] The top wall 13 and the side wall are disposed opposite each other in the first direction X. Normally, the dry etching device 50 is located on one side of the top wall 13 of the housing 10. Based on this, in this embodiment, the distance between the suction component 20 and the top wall 13 is set to be less than the distance between the suction component 20 and the bottom wall 11, so that the suction component 20 is disposed closer to the top wall 13. This reduces the distance between the suction component 20 and the dry etching device 50, improves the suction capacity of the suction component 20 for the dry etching device 50, and reduces the risk of blockage between the suction component 20 and the dry etching device 50.

[0129] In some embodiments, such as Figure 1 As shown, the filter device 40 is disposed inside the housing 10.

[0130] In this embodiment, the extraction assembly 20, the combustion mechanism 30, and the filter device 40 are all integrated within the housing 10, which further improves the integration of multiple components in the exhaust gas treatment equipment, reduces the overall size of the exhaust gas treatment equipment, and reduces the space occupied by the exhaust gas treatment equipment.

[0131] In some embodiments, the filter device 40 is located on the side of the combustion mechanism 30 near the bottom wall 11.

[0132] As can be seen from the foregoing, the second outlet 32 ​​of the combustion mechanism 30 is located on the side near the bottom wall 11, and the second outlet 32 ​​needs to be connected to the filter device 40. Based on this, the embodiment of this application sets the filter device 40 on the side of the combustion mechanism 30 near the bottom wall 11, so that the pipeline between the filter device 40 and the combustion mechanism 30 only needs to extend along the first direction X to meet the connection requirements between the two, thereby reducing the design difficulty and facilitating the increase of the exhaust gas velocity between the filter device 40 and the combustion mechanism 30.

[0133] In some embodiments, please refer to Figure 5 The extraction assembly 20, the combustion mechanism 30, and the filter device 40 are arranged sequentially in the first direction X. In other words, the combustion mechanism 30 is located between the filter device 40 and the extraction assembly 20 in the first direction X, the extraction assembly 20 is located on the side of the combustion mechanism 30 facing the top wall 13, and the filter device 40 is located on the side of the combustion mechanism 30 facing the bottom wall 11.

[0134] In this embodiment, by sequentially arranging the extraction assembly 20, the combustion mechanism 30, and the filter device 40 in the first direction X, the extraction assembly 20 is positioned closer to the dry etching apparatus 50 relative to the other two components, thereby improving the extraction capability of the extraction assembly 20 for the dry etching apparatus 50. Simultaneously, the filter device 40 is positioned on the side of the combustion mechanism 30 where the second outlet 32 ​​is located, thereby reducing the difficulty of pipe connection between the filter device 40 and the combustion mechanism 30.

[0135] In some embodiments, such as Figure 1 As shown, the outer casing 10 includes a side wall structure 12 disposed around the bottom wall 11, and a first partition 14 protruding from the inner surface of the side wall structure 12. The combustion mechanism 30 and the filter device 40 are disposed on opposite sides of the first partition 14, and the combustion mechanism 30 is connected to the first partition 14.

[0136] The first partition 14 is a plate-shaped structure disposed inside the outer shell 10 to separate the internal space of the outer shell 10. The first partition 14 can be integrally connected with the side wall structure 12, or the two can be separate structures and connected and fixed by welding or other means.

[0137] The first partition 14 divides the internal space of the outer casing 10 into two regions in the first direction X. The combustion mechanism 30 is disposed in one region, while the filter device 40 is disposed in the other region. It should be noted that, in order to meet the communication requirements between the filter device 40 and the combustion mechanism 30, the first partition 14 needs to be provided with corresponding through-hole structures or notches so that the pipes connecting the filter device 40 and the combustion mechanism 30 can enter both regions simultaneously.

[0138] Furthermore, in this embodiment of the application, the first partition 14 not only positions the combustion mechanism 30 and the filter device 40 on different sides so that they are arranged side by side in the first direction X, but the first partition 14 can also connect the combustion mechanism 30 to meet the fixing requirements between the housing 10 and the combustion mechanism 30.

[0139] In some embodiments, the filter device 40 is connected to the bottom wall 11.

[0140] In this embodiment, the filter device 40 is not connected to the first partition 14 together with the combustion mechanism 30, but is directly connected to the bottom wall 11. This reduces the risk of interference between the filter device 40 and the combustion mechanism 30 at the connection point. At the same time, this can reduce the external stress on the first partition 14, thereby improving the structural reliability of the exhaust gas treatment equipment.

[0141] In some embodiments, such as Figure 1 As shown, the filter device 40 includes a third outlet 42, and the housing 10 includes a top wall 13 opposite to the bottom wall 11 in the first direction X, with a first hole 15 provided in the top wall 13. The exhaust gas treatment device also includes an exhaust pipe 80, which connects the third outlet 42 and the first hole 15.

[0142] The exhaust gas that meets the standards after being filtered by the filter device 40 can leave the exhaust gas treatment equipment through the exhaust pipe 80, while some harmful substances can remain inside the filter device 40 to reduce damage to the external environment and human health. Based on this, in this embodiment, the filter device 40 is connected to the bottom wall 11, and the outlet of the exhaust pipe 80 is connected to the first hole 15 on the top wall 13. This helps to increase the size of the exhaust pipe 80 in the first direction X, making it difficult for harmful substances to leave the first hole 15 through the exhaust pipe 80, thereby further improving the reliability of the exhaust gas treatment equipment.

[0143] In some embodiments, please refer to Figure 6 The filter device 40 is located on one side of the combustion mechanism 30 in the second direction Y, and the first direction X and the second direction Y are intersected.

[0144] In this embodiment, the filter device 40 and the combustion mechanism 30 are not arranged side by side in the first direction X, but in the second direction Y. This helps to reduce the size of the housing 10 in the first direction X, reduce the risk of the housing 10 being too large in a single direction, reduce the difficulty of manufacturing the housing 10, and improve the overall stability and balance of the exhaust gas treatment equipment.

[0145] In some embodiments, such as Figure 6As shown, the filter device 40 includes a third inlet 41 and a second outlet 32 ​​connected to the third inlet 41. The third inlet 41 is located on one side of the filter device 40 in the second direction Y.

[0146] In view of the case where the filter device 40 and the combustion mechanism 30 are arranged side by side in the second direction Y, the present application embodiment also adjusts the position of the third inlet 41 on the filter device 40 so that it is located on one side of the filter device 40 in the second direction Y. In this way, the third inlet 41 can be relatively close to the combustion mechanism 30, thereby helping to reduce the extension length of the pipeline structure between the filter device 40 and the combustion mechanism 30.

[0147] The positional relationship between the extraction assembly 20 and the filter assembly is not limited in this embodiment. In some embodiments, the extraction assembly 20, the combustion mechanism 30, and the filter device 40 are arranged sequentially in the second direction Y, which helps to simplify the design of the extraction assembly 20, the combustion mechanism 30, and the filter device 40. Alternatively, in other embodiments, the extraction assembly 20 is located on the side of the combustion mechanism 30 in the third direction, with the first direction X, the second direction Y, and the third direction intersecting each other. This allows the outer shell 10 to share a certain size in the first direction X, the second direction Y, and the third direction, thereby reducing the manufacturing difficulty of the outer shell 10.

[0148] In some embodiments, such as Figure 4 As shown, the filter device 40 is located outside the housing 10.

[0149] In this application, the filter device 40 is set separately from the extraction assembly 20 and the combustion mechanism 30. Based on this, if the filter device 40 needs to be maintained or replaced, the maintenance needs can be met without disassembling the housing 10. At the same time, the exhaust pipe 80 connected to the third opening of the filter device 40 does not need to enter the interior of the housing 10. This helps to reduce the adverse effects of the filter device 40 and the exhaust pipe 80 on the overall size of the housing 10 and the layout design of the extraction assembly 20 and the combustion mechanism 30.

[0150] In some embodiments, the filter device 40 is disposed on the side of the bottom wall 11 opposite to the combustion mechanism 30.

[0151] Since the third outlet 42 is located on the side of the combustion mechanism 30 facing the bottom wall 11, in order to facilitate the connection between the filter device 40 and the combustion mechanism 30, this embodiment of the application does not place the filter device 40 on the side wall structure 12 or the top wall 13 of the housing 10, but on the side of the bottom wall 11 away from the combustion mechanism 30. In this way, the pipeline structure between the filter device 40 and the combustion mechanism 30 only needs to extend along the first direction X, without the need to set up a bend area, thereby reducing the pipeline length between the filter device 40 and the combustion mechanism 30 and reducing the risk of blockage between the filter device 40 and the combustion mechanism 30.

[0152] In some embodiments, the filter device 40 is connected to the bottom wall 11.

[0153] In this embodiment, by connecting the filter device 40 to the bottom wall 11, the filter device 40 and the outer shell 10 are relatively fixed. Based on this, the filter device 40 can remain fixed relative to the combustion mechanism 30, thereby improving the connection between the two and the operational reliability.

[0154] In some embodiments, such as Figure 4 As shown, the exhaust gas treatment equipment also includes a second pipe 72, and the bottom wall 11 is provided with a second hole 16. The second pipe 72 passes through the second hole 16 and is connected to the second outlet 32 ​​and the filter device 40.

[0155] Since the filter device 40 is located outside the housing 10, in order to achieve communication between the filter device 40 and the combustion mechanism 30 and reduce the length of the pipeline between them, this embodiment of the application provides a second hole 16 on the bottom wall 11. The second pipeline 72 passes through the second hole 16 to achieve communication between the filter device 40 and the combustion mechanism 30. With this design, the second pipeline 72 can extend only along the first direction X and there are no bends, thereby reducing the risk of blockage of the second pipeline 72.

[0156] In some embodiments, such as Figure 1 As shown, the exhaust gas treatment equipment also includes a third pipe 73 for connecting the first inlet 21 to the dry etching device 50. The extension length of the third pipe 73 is L2, and L2 satisfies: L2 > 20cm.

[0157] The third pipe 73 is a pipe structure used to connect the vacuum assembly 20 and the dry etching apparatus 50. In order to reduce the mutual influence between the vacuum assembly 20 and the dry etching apparatus 50, the extension length of the third pipe 73 in this embodiment is set to be greater than 20cm, so that there is a longer distance between the vacuum assembly 20 and the dry etching apparatus 50, thereby improving the reliability of the operation of the vacuum assembly 20 and the dry etching apparatus 50 respectively.

[0158] In some embodiments, such as Figure 1 As shown, the third pipeline 73 includes a pipe body 731 and a heating element 732 that covers the pipe body 731.

[0159] The tube body 731 is a major component of the third pipe 73. The tube body 731 forms a channel structure through which exhaust gas exiting the dry etching apparatus 50 can enter the extraction assembly 20. The heating element 732 is a component that covers the outside of the tube body 731 and is capable of heating. Since the third pipe 73 has a relatively long extension, to reduce the risk of crystallization and solidification of the exhaust gas within the third pipe 73 due to heat exchange with the external environment, this embodiment adds a heating element 732 to the third pipe 73. The heating element 732 helps maintain the temperature inside the channel structure of the tube body 731, thereby reducing the risk of crystallization and solidification of the exhaust gas within the third pipe 73, thus reducing the possibility of blockage in the third pipe 73 and improving the operational reliability of the exhaust gas treatment equipment.

[0160] In some embodiments, the third conduit 73 extends along the first direction X.

[0161] In this embodiment, the third pipe 73 has a straight pipe structure extending along the first direction X, that is, the third pipe 73 does not have a bend area, and the exhaust gas leaving the dry etching device 50 can enter the exhaust assembly 20 faster under the assistance of gravity, thereby further increasing the flow rate of the exhaust gas in the third pipe 73 and reducing the possibility of blockage in the third pipe 73.

[0162] Secondly, such as Figure 1 and Figure 2 As shown in the figure, this application embodiment provides an exhaust gas treatment device for treating exhaust gas generated by a dry etching apparatus 50. The exhaust gas treatment device includes a housing 10, an extraction assembly 20, a combustion mechanism 30, and a filter device 40. The housing 10 has a hollow structure. The extraction assembly 20 is disposed inside and fixed to the housing 10, and includes a first inlet 21 and a first outlet 22. The combustion mechanism 30 is disposed inside and fixed to the housing 10, and includes a second inlet 31 and a second outlet 32, with the first outlet 22 connected to the first inlet 21. The filter device 40 is fixed to the housing 10, and includes a third inlet 41, with the second outlet 32 ​​connected to the third inlet 41. The distance between the first outlet 22 and the second inlet 31 is no greater than 20 cm.

[0163] The extraction assembly 20, the combustion mechanism 30, and the filter device 40 are the three core components of the exhaust gas treatment equipment. The extraction assembly 20 is a power machine used to absorb exhaust gas and transfer it to the combustion mechanism 30. Optionally, the extraction assembly 20 may include a vacuum pump, which is a device or equipment that uses mechanical, physical, chemical, or physicochemical methods to evacuate the container being evacuated.

[0164] The combustion device 30 can combust the exhaust gas to convert at least some toxic and harmful gases into non-toxic and harmless substances, thereby reducing environmental pollution and harm to human health. The filtration device 40 can filter the exhaust gas after combustion by the combustion device 30 to filter out some toxic and harmful substances, ensuring that the final exhaust gas emissions meet standards. Optionally, the filtration device 40 may include a water tank containing coolant, which, in addition to filtering the exhaust gas, also provides a cooling effect. The coolant may include water.

[0165] The exhaust gas treatment equipment provided in this application embodiment can be applied to treat exhaust gas generated by dry etching device 50. Some substances in the exhaust gas formed by dry etching process are easy to crystallize at room temperature. On this basis, if the exhaust gas exchanges heat with the external environment over a long path, some substances in the exhaust gas are easy to solidify, thereby causing blockage and other problems.

[0166] To reduce the risk of blockage, the positions of the extraction assembly 20 and the combustion mechanism 30 have been adjusted in this embodiment. In related technologies, the vacuum pump and the combustion device are often spaced far apart and connected by corresponding pipeline structures. However, in this embodiment, the exhaust gas treatment device includes a housing 10, and both the extraction assembly 20 and the combustion mechanism 30 are located inside the housing 10, that is, the extraction assembly 20 and the combustion mechanism 30 are integrated into the same structure. Furthermore, the distance between the first outlet 22 and the second inlet 31 is no more than 20 cm, thereby reducing the risk of blockage caused by exhaust gas transmission between the extraction assembly 20 and the combustion mechanism 30.

[0167] It should be noted that the first outlet 22 and the second inlet 31 can be directly connected, or a pipeline structure can be provided between the first outlet 22 and the second inlet 31. This application embodiment does not impose any restrictions on this. Even if a pipeline structure is provided between the first outlet 22 and the second inlet 31, the extension length of the pipeline structure will not exceed 20cm, and the exhaust gas located in the pipeline structure can pass through quickly, thus preventing crystallization and solidification.

[0168] In this embodiment, the extraction component 20 and the combustion mechanism 30 are both integrated into the housing 10, and the distance between the first outlet 22 and the second inlet 31 is no more than 20cm. This reduces the risk of blockage caused by the excessively long transmission path of exhaust gas between the extraction component 20 and the combustion mechanism 30, and improves the operational reliability and service life of the exhaust gas treatment equipment.

[0169] While the embodiments disclosed in this application are as described above, the content is merely for the purpose of facilitating understanding of this application and is not intended to limit the invention. Any person skilled in the art to which this application pertains may make any modifications and changes in form and detail of the implementation without departing from the spirit and scope disclosed in this application; however, the scope of protection of this application shall still be determined by the scope defined in the appended claims.

[0170] The above description is merely a specific embodiment of this application. Those skilled in the art will clearly understand that, for the sake of convenience and brevity, substitutions for other connection methods described above can be made by referring to the corresponding processes in the foregoing method embodiments, and will not be repeated here. It should be understood that the scope of protection of this application is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in this application, and these modifications or substitutions should all be covered within the scope of protection of this application.

Claims

1. A tail gas treatment device, characterized in that, The exhaust gas treatment equipment is used to treat the exhaust gas generated by the dry etching apparatus, and the exhaust gas treatment equipment includes: The outer shell has a hollow structure, and the outer shell includes a bottom wall in a first direction; An air extraction assembly is disposed within and fixed to the housing, the air extraction assembly including a first inlet and a first outlet; A combustion mechanism is disposed within and fixed to the housing. The combustion mechanism includes a second inlet and a second outlet, with the first outlet connected to the second inlet. A filter device is fixed to the housing, the filter device including a third inlet and a second outlet connected to the third inlet; The air extraction assembly is spaced apart from the bottom wall, the first inlet is located on the side of the air extraction assembly away from the bottom wall, and the second outlet is located on the side of the combustion mechanism facing the bottom wall.

2. The exhaust gas treatment equipment according to claim 1, characterized in that, The first outlet is connected to the second inlet; Preferably, the combustion mechanism is located on one side of the extraction assembly in the second direction, where the first direction intersects the second direction; Preferably, the combustion mechanism includes a combustion chamber and a burner, wherein the burner is located on the side of the combustion chamber opposite to the exhaust assembly; Preferably, the exhaust gas treatment device further includes a sealing assembly disposed at the connection between the first outlet and the second inlet.

3. The exhaust gas treatment equipment according to claim 2, characterized in that, The combustion mechanism includes a combustion chamber, the outer wall of which is recessed inward to form a recessed space, and a portion of the structure in the extraction assembly is located within the recessed space. Preferably, the combustion mechanism is located on one side of the extraction assembly along the second direction, and the first direction intersects the second direction; The outer wall includes a first wall and a second wall opposite each other in the second direction. The first wall is located on the side of the second wall facing the air extraction assembly. A portion of the structure in the first wall is recessed toward the second wall to form the recessed space. The combustion mechanism further includes a burner, which is disposed on the second wall; Preferably, the second wall is parallel to the first direction; Preferably, the combustion mechanism further includes a connecting pipe protruding from and connected to the outer wall and located within the recessed space, the connecting pipe communicating with the interior of the combustion chamber and including the second inlet.

4. The exhaust gas treatment equipment according to claim 1, characterized in that, It also includes a first pipeline connecting the first outlet and the second inlet, the extension length of the first pipeline being L1, where L1 satisfies: 0 < L1 ≤ 20 cm; Preferably, the first pipeline has a straight structure; Preferably, the first pipeline extends along the second direction, and the first direction intersects the second direction; Preferably, no control valve is provided on the first pipeline; Preferably, no heating element is provided on the first pipeline.

5. The exhaust gas treatment equipment according to claim 1, characterized in that, The housing includes a sidewall structure disposed on the periphery of the bottom wall, and the air extraction assembly is connected to the sidewall structure; Preferably, at least a portion of the combustion mechanism is located between the extraction assembly and the bottom wall; Preferably, the combustion mechanism is connected to the bottom wall; Preferably, the housing further includes a top wall disposed opposite to the bottom wall in the first direction, and the distance between the air extraction component and the top wall is smaller than the distance between the air extraction component and the bottom wall.

6. The exhaust gas treatment equipment according to claim 1, characterized in that, The filter device is located inside the housing; Preferably, the filter is located on the side of the combustion mechanism near the bottom wall; Preferably, the air extraction assembly, the combustion mechanism, and the filter device are arranged sequentially in the first direction; Preferably, the outer casing includes a sidewall structure disposed on the periphery of the bottom wall, and a first partition protruding from the inner surface of the sidewall structure. The combustion mechanism and the filter device are disposed on opposite sides of the first partition, and the combustion mechanism is connected to the first partition. Preferably, the filter device is connected to the bottom wall; Preferably, the filter device includes a third outlet, and the housing includes a top wall opposite the bottom wall in the first direction, the top wall being provided with a first hole; The exhaust gas treatment device also includes an exhaust pipe, which is connected to the third outlet and the first hole.

7. The exhaust gas treatment equipment according to claim 6, characterized in that, The filter device is located on one side of the combustion mechanism in the second direction, and the first direction and the second direction are intersecting. Preferably, the filter device includes a third inlet, the second outlet is connected to the third inlet, and the third inlet is disposed on one side of the filter device in the second direction; Preferably, the air extraction assembly, the combustion mechanism, and the filter device are arranged sequentially in the second direction; Preferably, the extraction assembly is located on the third-direction side of the combustion mechanism, and the first direction, the second direction, and the third-direction intersect each other.

8. The exhaust gas treatment equipment according to claim 1, characterized in that, The filter device is located outside the housing; Preferably, the filter device is disposed on the side of the bottom wall opposite to the combustion mechanism; Preferably, the filter device is connected to the bottom wall; Preferably, the exhaust gas treatment device further includes a second pipeline, the bottom wall is provided with a second hole, the second pipeline passes through the second hole and is connected to the second outlet and the filter device.

9. The exhaust gas treatment equipment according to claim 1, characterized in that, It also includes a third conduit for connecting the first inlet to the dry etching apparatus; The extension length of the third pipeline is L2, and L2 satisfies: L2 > 20cm; Preferably, the third pipeline includes a pipe body and a heating element that covers the pipe body; Preferably, the third pipeline extends along the first direction.

10. A tail gas treatment device, characterized in that, The exhaust gas treatment equipment is used to treat the exhaust gas generated by the dry etching apparatus, and the exhaust gas treatment equipment includes: The outer shell has a hollow structure; An air extraction assembly is disposed within and fixed to the housing, the air extraction assembly including a first inlet and a first outlet; A combustion mechanism is disposed within and fixed to the housing. The combustion mechanism includes a second inlet and a second outlet, with the first outlet connected to the first inlet. A filter device is fixed to the housing, the filter device including a third inlet and a second outlet connected to the third inlet; The distance between the first outlet and the second inlet is no more than 20cm.

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