An annealing furnace

Abstract

The application relates to the annealing technical field, and particularly discloses an annealing furnace which comprises a furnace body and a furnace door. The furnace body is internally provided with an annealing cavity, and the furnace door is arranged on the furnace body and used for opening and closing the opening of the annealing cavity. The inner circumferential wall of the annealing cavity and the side of the furnace door facing the annealing cavity are both provided with a heat preservation layer. On the heat preservation layer, a heat reflection structure is arranged at each corner of the annealing cavity. The heat reflection structure comprises three adjacent connecting surfaces and a heat reflection surface connecting the three connecting surfaces. The three connecting surfaces are respectively attached to the three inner wall surfaces adjacent to the annealing cavity. The heat reflection surface is an arc surface concavely arranged towards the corner of the annealing cavity. The annealing furnace can reduce the heat dissipation rate of the corner of the annealing cavity, improve the uniformity of the temperature in the annealing cavity, and further improve the annealing yield of the workpiece.

Description

Technical Field

[0001] This invention relates to the field of annealing technology, and more particularly to an annealing furnace. Background Technology

[0002] Annealing is an essential process in manufacturing array substrates for displays. Annealing optimizes the physical, chemical, and electrical properties of the array substrate, thereby ensuring the functionality and reliability of the devices. Annealing furnaces are indispensable processing equipment in annealing.

[0003] The furnace chamber of existing annealing furnaces is generally a cuboid structure. The corners of the three adjacent inner walls form a cavity-like structure. The cavity structure is close to the radiation characteristics of a blackbody, and the radiation energy escapes to the external environment more efficiently. This makes the radiative heat dissipation rate in the corner area much higher than that in the planar area. Therefore, the temperature in this area is generally lower than that in the middle of the furnace chamber, making it difficult to control the temperature uniformity of the furnace chamber and affecting the annealing yield of the workpiece.

[0004] Therefore, there is an urgent need to develop an annealing furnace to solve the above-mentioned technical problems. Summary of the Invention

[0005] The present invention provides an annealing furnace that can reduce the heat dissipation rate at the corners of the annealing chamber, improve the temperature uniformity within the annealing chamber, and thus improve the annealing yield of the annealed workpiece.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] An annealing furnace includes a furnace body and a furnace door. The furnace body has an annealing chamber with an opening on one side. The furnace door is located on the furnace body and is used to open and close the opening of the annealing chamber. Each inner wall surface of the annealing chamber and the side of the furnace door facing the annealing chamber are provided with a heat insulation layer.

[0008] On the insulation layer, a heat-reflecting structure is provided at the corner formed by any three adjacent inner wall surfaces of the annealing cavity. The heat-reflecting structure includes three connecting surfaces and a heat-reflecting surface. The three connecting surfaces are arranged adjacently and respectively fit against the three adjacent inner wall surfaces of the annealing cavity. The heat-reflecting surface connects the three connecting surfaces. The heat-reflecting surface is an arc surface, and the arc surface is recessed at the corner of the annealing cavity. The heat-reflecting surface is used to reflect heat radiation back into the annealing cavity.

[0009] Optionally, the heat-reflective structure is made of a heat-reflective material; or, the heat-reflective surface is provided with a heat-reflective coating, the heat-reflective coating containing a heat-reflective material.

[0010] Optionally, the heat-reflective material includes at least one of metal or ceramic.

[0011] Optionally, the heat-reflective structure further includes a hollow portion.

[0012] Optionally, the hollow part is a vacuum cavity disposed inside the heat-reflective structure; or, the hollow part is a cavity disposed inside the heat-reflective structure, and the cavity is filled with a phase change energy storage material; or, the hollow part is a hollow microsphere layer disposed on the heat-reflective surface.

[0013] Optionally, the heat-reflective surface may have a plurality of protrusions; or, the heat-reflective surface may have a plurality of grooves; or, the heat-reflective surface may be coated with a phase change microcapsule layer.

[0014] Optionally, the furnace door is slidably connected to the furnace body in a horizontal direction to open or close the opening of the annealing chamber.

[0015] Optionally, at the opening of the furnace body near the annealing chamber, a plurality of first nozzles are provided on one side wall of the furnace body in the horizontal direction. The plurality of first nozzles are spaced apart along the height direction of the furnace body. When the furnace door slides open the opening of the annealing chamber, it moves away from the first nozzles. The plurality of first nozzles are connected to a gas supply mechanism. The plurality of first nozzles are used to spray high-temperature gas when the furnace door is opened to form an air curtain at the opening of the annealing chamber.

[0016] Optionally, at the opening of the furnace body near the annealing chamber, a plurality of second nozzles are provided on another side wall of the furnace body in the horizontal direction. The plurality of second nozzles are connected to the gas supply mechanism and are used to spray high-temperature gas when the furnace door is opened. The plurality of second nozzles are staggered with the plurality of first nozzles.

[0017] Optionally, the gas supply mechanism includes:

[0018] An air jacket is disposed inside the furnace body and surrounds the annealing chamber;

[0019] A first manifold, wherein the first manifold is provided with a plurality of air outlets, each of the air outlets being connected to a first nozzle;

[0020] A first air pump, the inlet of which is connected to the air interlayer, and the outlet of which is connected to the inlet of the first manifold.

[0021] The beneficial effects of this invention are as follows:

[0022] This invention provides an annealing furnace, including a furnace body and a furnace door. The furnace body has an annealing chamber, and heat-reflecting structures are provided at any three corners formed by the inner wall surfaces of the annealing chamber. Each heat-reflecting structure includes three adjacent connecting surfaces and heat-reflecting surfaces connected to these connecting surfaces. The three connecting surfaces are used to connect to the three adjacent inner wall surfaces of the annealing chamber, and the heat-reflecting surfaces are used to reflect heat radiation back into the annealing chamber. This arrangement reduces the heat dissipation efficiency at each corner of the annealing chamber through the heat reflection effect of the heat-reflecting surfaces.

[0023] By setting the heat reflective surface as an arc surface recessed at the corner of the annealing cavity, on the one hand, the shape of the corner of the annealing cavity is improved. Compared with the original "concave" structure of the corner of the annealing cavity, the heat dissipation rate at each corner of the annealing cavity is reduced in structure, thereby reducing the temperature difference between each corner and the center of the annealing cavity and improving the temperature uniformity inside the annealing cavity. On the other hand, the arc-shaped heat reflective surface has a better reflection effect, further reducing the heat loss at each corner of the annealing cavity.

[0024] By setting the three adjacent connecting surfaces in the heat-reflective structure to fit with the three adjacent inner wall surfaces of the annealing cavity, the fixing effect of the heat-reflective structure is improved on the one hand; on the other hand, the heat-reflective structure can occupy as little space as possible, which is conducive to improving the space utilization of the annealing cavity. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the annealing furnace provided in Embodiment 1 of the present invention;

[0026] Figure 2 This is a schematic diagram of a heat-reflective structure provided in Embodiment 1 of the present invention;

[0027] Figure 3 This is a schematic diagram of another heat-reflective structure provided in Embodiment 1 of the present invention;

[0028] Figure 4 This is a schematic diagram of the heat reflection structure provided in Embodiment 2 of the present invention;

[0029] Figure 5 This is a schematic diagram of the heat reflection structure provided in Embodiment 3 of the present invention;

[0030] Figure 6 This is a schematic diagram of the heat reflection structure provided in Embodiment 4 of the present invention;

[0031] Figure 7 This is a schematic diagram of the heat reflection structure provided in Embodiment 5 of the present invention;

[0032] Figure 8 This is a schematic diagram of the heat reflection structure provided in Embodiment Six of the present invention;

[0033] Figure 9This is a schematic diagram of the annealing furnace provided in Embodiment 7 of the present invention.

[0034] In the picture:

[0035] 100. Furnace body; 110. Annealing chamber;

[0036] 200. Furnace door;

[0037] 300. Heat-reflective structure; 310. Connecting surface; 320. Heat-reflective surface; 330. Vacuum cavity; 331. Phase change energy storage material; 340. Hollow microsphere layer; 350. Protrusion; 360. Groove; 370. Phase change microcapsule layer;

[0038] 400. First nozzle;

[0039] 500. Gas supply mechanism; 510. First manifold; 520. First air pump;

[0040] 600, Second nozzle. Detailed Implementation

[0041] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0042] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0043] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0044] In the description of this invention, it should be noted that the terms "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this invention is in use. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0045] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0046] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0047] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0048] Example 1

[0049] The furnace chamber of existing annealing furnaces is generally a cuboid structure. The corners of the three adjacent inner walls form a cavity-like structure. The cavity structure is close to the radiation characteristics of a blackbody, and the radiation energy escapes to the external environment more efficiently. This makes the radiative heat dissipation rate in the corner area much higher than that in the planar area. Therefore, the temperature in this area is generally lower than that in the middle of the furnace chamber, making it difficult to control the temperature uniformity of the furnace chamber and affecting the annealing yield of the workpiece.

[0050] For example, in the annealing process of the array substrate of a display, poor furnace temperature uniformity will directly affect the physical and electrical properties of the array substrate material.

[0051] Based on the above problems, this embodiment provides an annealing furnace that can reduce the heat dissipation rate at the corners of the annealing chamber, improve the temperature uniformity within the annealing chamber, and thus improve the annealing yield of the annealed workpiece.

[0052] Specifically, such as Figure 1 and Figure 2 As shown, the annealing furnace includes a furnace body 100 and a furnace door 200.

[0053] The furnace body 100 includes an annealing chamber 110. The annealing chamber 110 is used for annealing workpieces; that is, the workpiece to be annealed is placed in the annealing chamber 110, and the temperature of the annealing chamber 110 is controlled to the required annealing temperature for the workpiece. An opening is provided on one side of the annealing chamber 110, through which the workpiece to be annealed is placed into the annealing chamber 110, and through which the annealed workpiece is removed from the annealing chamber 110 after annealing.

[0054] A furnace door 200 is installed on the furnace body 100 and is used to open and close the annealing chamber 110. Each inner wall surface of the annealing chamber 110 and the side of the furnace door 200 facing the annealing chamber 110 are provided with an insulation layer. By providing the insulation layer, on the one hand, the heat loss from the furnace body 100 to the outside can be effectively reduced, improving thermal efficiency and allowing the annealing chamber 110 to reach the set temperature more quickly, shortening heating time and reducing energy consumption; on the other hand, it helps maintain the temperature stability within the annealing chamber 110, thus ensuring uniform heating of the workpiece, improving the annealing quality of the workpiece, and reducing thermal stress, preventing the furnace body 100 from deforming or cracking due to uneven temperature; furthermore, it can reduce the temperature of the outer surface of the furnace body 100, thus reducing heat radiation to the surrounding environment, improving operational safety, and indirectly reducing greenhouse gas emissions, contributing to environmental protection. Furthermore, by providing insulation layers on each inner wall surface of the annealing chamber 110 and on the side of the furnace door 200 near the annealing chamber 110, the insulation layers completely enclose the annealing chamber 110, resulting in better insulation performance. It is worth noting that the thicker the insulation layer, the better the insulation effect. In this embodiment, the thickness of the insulation layer can be set according to actual needs and is not specifically limited. In this embodiment, the annealing chamber 110 has a cuboid structure.

[0055] On the insulation layer, a heat reflection structure 300 is provided at any three adjacent inner wall surfaces of the annealing cavity 110. The heat reflection structure 300 includes three adjacent connecting surfaces 310 and a heat reflection surface 320 connecting the three connecting surfaces 310. The three connecting surfaces 310 are respectively attached to the three adjacent inner wall surfaces of the annealing cavity 110. The heat reflection surface 320 is an arc surface recessed towards the corner of the annealing cavity 110. The heat reflection surface 320 is used to reflect heat radiation back into the annealing cavity 110.

[0056] The heat-reflecting structure 300 reduces the heat dissipation efficiency at each corner of the annealing cavity 110 through the heat reflection effect of the heat-reflecting surface 320. By setting the heat-reflecting surface 320 to be an arc surface concave towards the corner of the annealing cavity 110, on the one hand, the shape of the corner of the annealing cavity 110 is improved. Compared with the original "concave" corner structure of the annealing cavity 110, the heat dissipation rate at each corner of the annealing cavity 110 is structurally reduced, thereby reducing the temperature difference between each corner and the center of the annealing cavity 110 and improving the uniformity of the internal temperature of the annealing cavity 110. On the other hand, the arc-shaped heat-reflecting surface 320 has a better reflection effect, further reducing the heat loss at each corner of the annealing cavity 110. By setting the three adjacent connecting surfaces 310 of the heat-reflecting structure 300 to fit with the three adjacent inner wall surfaces of the annealing cavity 110, on the one hand, the fixing effect of the heat-reflecting structure 300 is better. On the other hand, the heat-reflecting structure 300 can occupy as little space as possible, which is conducive to improving the space utilization of the annealing cavity 110.

[0057] Optionally, the insulation layer can be made of ceramic fiber materials, such as ceramic fiber cotton or ceramic fiber blocks, which have advantages such as being lightweight, flexible, easy to install, having low thermal conductivity, and strong thermal shock resistance. The insulation layer can also be made of refractory bricks and lightweight insulating bricks. Aerogel composite materials can also be used, etc., selected according to actual needs; this application does not impose specific limitations.

[0058] Alternatively, the connection between the furnace door 200 and the furnace body 100 can be one of the following:

[0059] Hinged connection: One side of the furnace door 200 is fixed to the furnace body 100 by a hinge, while the other side can be opened freely, suitable for small furnace bodies 100. This connection method allows the furnace door 200 to be opened by rotation, such as flipping to the left, right, upward, or downward. Flipping the furnace door upward is suitable for situations where there is ample space above the furnace body 100; flipping the furnace door downward is suitable for situations where there is ample space below the furnace body 100.

[0060] Sliding connection: The furnace door 200 can be slidably connected to the furnace body 100 via a slide rail. Depending on actual needs, the furnace door 200 can slide horizontally or vertically. The horizontal sliding method of the furnace door 200 is suitable for situations with limited space or a large furnace door 200; the vertical sliding method of the furnace door 200 is often used in occasions that require frequent opening and closing.

[0061] Bolted connection: The furnace door 200 is fixed to the furnace body 100 by bolts, which is suitable for applications requiring high sealing and strength. Preferably, detachable bolts can be used to facilitate the maintenance and replacement of the furnace door 200.

[0062] Pneumatic or hydraulic connection: The furnace door 200 can be automatically opened and closed by a pneumatic or hydraulic device, which is suitable for larger or heavier furnace doors 200, as well as occasions that require frequent operation.

[0063] Magnetic connection: The furnace door 200 is tightly attached to the furnace body 100 by electromagnetic force, which is suitable for occasions that require high sealing performance.

[0064] Spring connection: The furnace door 200 is opened and closed quickly with the help of a spring, which is suitable for occasions that require frequent operation.

[0065] It is worth noting that the connection method between the furnace door 200 and the furnace body 100 can be set according to actual needs, and this application does not impose specific limitations. However, the sealing between the furnace door 200 and the furnace body 100 should be ensured to prevent heat from rapidly escaping from the gap between the furnace body 100 and the furnace door 200, so as to ensure the temperature stability inside the annealing chamber 110 and thus ensure the annealing quality of the workpiece.

[0066] Furthermore, in one possible embodiment, the heat-reflective structure 300 is made of a heat-reflective material. This simplifies the processing of the heat-reflective structure 300; for example, the block-shaped heat-reflective material can be machined into the shape of the heat-reflective structure 300 by cutting. In another possible embodiment, a heat-reflective coating containing a heat-reflective material can also be applied to the heat-reflective surface 320. For example, the heat-reflective material can be mixed with a high-temperature resistant colloid and then coated onto the heat-reflective surface 320. This configuration reduces the amount of heat-reflective material used while maintaining the heat-reflective effect, thus reducing costs. Furthermore, forming the heat-reflective coating through coating also facilitates processing. In addition, the heat-reflective coating can protect the heat-reflective structure 300, which helps extend its service life.

[0067] Optionally, the heat-reflecting material can be a metal, such as at least one of aluminum, molybdenum, and tungsten. A tungsten-molybdenum alloy is preferred. Tungsten-molybdenum alloys have sufficiently low saturated vapor pressure, minimal volatilization at high temperatures, and almost no contamination of the annealing chamber 110 and the workpiece; tungsten-molybdenum alloys have low emissivity and high surface finish, effectively reflecting heat back into the annealing chamber 110; they have very low thermal inertia but high heat permeability, thus enabling rapid heating or cooling, increasing the upper limit of the furnace temperature, and allowing operation under high vacuum conditions.

[0068] Alternatively, the heat-reflective material can also be ceramic, such as at least one of zirconium oxide and alumina. Zirconia can withstand temperatures above 2000℃ and has an infrared reflectivity of 70%-85%. Alumina has good chemical stability, withstands temperatures up to 1600℃, and has a heat reflectivity of 60%-75%.

[0069] Alternatively, the heat-reflective material can also be a metal-ceramic composite. Metal-ceramic composites combine the high reflectivity of metals with the high-temperature resistance of ceramics. Their performance is superior to that of single-metal or single-ceramic heat-reflective materials.

[0070] Furthermore, the heat-reflecting structure 300 also includes a hollow portion. By providing a hollow portion, the thermal conductivity of the heat-reflecting structure 300 can be reduced, effectively blocking heat conduction and thus reducing heat dissipation efficiency. Optionally, the hollow portion can be a cavity; it can also be multiple hollow columns; it can also be honeycomb-shaped, etc., depending on actual needs, and this application does not impose specific limitations.

[0071] Optionally, such as Figure 3 As shown, in this embodiment, the hollow part is a vacuum cavity 330 disposed inside the heat-reflective structure 300. The thermal conductivity of a vacuum is close to zero, and its thermal resistance is extremely high, 5 to 20 times that of air. At the same thickness, its heat insulation effect is significantly higher than that of air. Furthermore, the vacuum environment completely eliminates conduction and convection, effectively suppressing heat transfer. In addition, due to the absence of gas flow, its performance remains stable over long-term use.

[0072] Furthermore, in one possible embodiment, while ensuring the thickness of the three connecting surfaces 310 and the heat-reflecting surface 320, the remaining part of the heat-reflecting structure 300 is entirely a vacuum cavity 330. This configuration allows the vacuum cavity 330 to have the largest possible volume, resulting in better heat insulation. On the other hand, it reduces the amount of material used, saving costs. Furthermore, it effectively reduces the weight of the heat-reflecting structure 300, facilitating its handling and assembly.

[0073] Example 2

[0074] This embodiment provides an annealing furnace, which has a largely the same structure as that of Embodiment 1, with improvements only. Therefore, only the differences between the two will be described here, and the structures identical to those in Embodiment 1 will not be repeated.

[0075] The same or corresponding technical features as those in Embodiment 1 are referred to by the same reference numerals in the accompanying drawings.

[0076] Specifically, such as Figure 4 As shown, in this embodiment, the hollow part is a cavity disposed inside the heat-reflective structure 300, and the cavity is filled with phase change energy storage material 331. The phase change energy storage material 331 can absorb or release a large amount of heat during the phase change process and maintain a stable temperature during the phase change process. Furthermore, the phase change process is reversible and can be recycled multiple times.

[0077] By filling the heat-reflecting structure 300 with phase change energy storage material 331, the heat-reflecting structure 300 possesses both heat reflection and heat storage functions. This gives the heat-reflecting structure the following advantages: Firstly, it can reflect thermal radiation back into the annealing cavity 110 through the heat-reflecting surface 320, reducing heat loss within the annealing cavity 110; secondly, the phase change energy storage material 331 can absorb residual heat penetrating the heat-reflecting surface 320, delaying temperature dissipation and reducing heat dissipation efficiency at the corners of the annealing cavity 110; thirdly, it can reduce the operating temperature of the heat-reflecting surface 320 by absorbing heat, delaying oxidation or aging of the heat-reflecting surface 320 and extending the service life of the heat-reflecting structure 300.

[0078] It is worth noting that phase change energy storage material 331 with high temperature resistance should be selected to meet the high temperature working requirements of annealing chamber 110.

[0079] Optionally, the phase change energy storage material 331 can be a molten salt, such as nitrates (sodium nitrate, potassium nitrate) or mixed molten salts (e.g., 60% sodium nitrate + 40% potassium nitrate). The phase change temperature of elemental nitrates is 220℃-320℃. The phase change temperature of mixed molten salts is 220℃-565℃. Furthermore, it has low cost and good thermal stability.

[0080] Of course, other phase change energy storage materials 331 can also be selected, such as other composite phase change energy storage materials 331, as long as the phase change temperature meets the requirements. This application does not make specific limitations.

[0081] Example 3

[0082] This embodiment provides an annealing furnace, which has a largely the same structure as that of Embodiment 1, with improvements only. Therefore, only the differences between the two will be described here, and the structures identical to those in Embodiment 1 will not be repeated.

[0083] The same or corresponding technical features as those in Embodiment 1 are referred to by the same reference numerals in the accompanying drawings.

[0084] Specifically, such as Figure 5 As shown, in this embodiment, the hollow portion is a hollow microsphere layer 340 disposed on the heat-reflective surface 320. Hollow microspheres are tiny hollow particles filled with gas, have low thermal conductivity, and possess excellent heat insulation properties. Furthermore, their spherical shape allows for good flowability; the hollow microspheres can be mixed with high-temperature resistant resin and coated onto the heat-reflective surface 320 to form the hollow microsphere layer 340.

[0085] By setting a hollow microsphere layer 340 on the heat-reflecting surface 320, on the one hand, the heat insulation performance of the heat-reflecting structure 300 is improved, and the heat dissipation efficiency at the corner of the annealing cavity 110 is further reduced; on the other hand, the heat-reflecting surface 320 is made rougher, which increases the area of ​​the heat-reflecting surface 320, which is conducive to the scattering of the heat-reflecting surface 320, thereby improving the heat reflection effect; furthermore, the hollow microspheres are lightweight and hardly increase the weight of the heat-reflecting structure 300.

[0086] Alternatively, the hollow microspheres can be ceramic hollow microspheres, which are made of ceramic materials and have the advantages of being lightweight, high-strength, high-temperature resistant, and having high thermal insulation properties.

[0087] Example 4

[0088] This embodiment provides an annealing furnace, which has a largely the same structure as Embodiment 1, Embodiment 2, or Embodiment 3, with improvements only made based on Embodiment 1, Embodiment 2, or Embodiment 3. Therefore, only the differences are described here, and the structures identical to those in Embodiment 1, Embodiment 2, or Embodiment 3 will not be repeated here.

[0089] The same or corresponding technical features as those in Embodiment 1, Embodiment 2 or Embodiment 3 are referred to by the same reference numerals.

[0090] Specifically, such as Figure 6 As shown, in this embodiment, the heat-reflecting surface 320 is provided with a plurality of protrusions 350. By providing a plurality of protrusions 350 on the heat-reflecting surface 320, the scattering and reflection area can be increased, which is beneficial to improving the heat reflection effect.

[0091] Optionally, the protrusion 350 can be hemispherical. The hemispherical protrusion 350 has an arc-shaped reflective surface, which provides better reflection.

[0092] Optionally, the protrusion 350 can be integrated with the heat reflective surface 320, which is convenient for processing and the protrusion 350 is not easy to fall off.

[0093] Optionally, the heat-reflective surface 320 is provided with a plurality of protrusions 350. In one possible embodiment, the plurality of protrusions 350 are arranged in an array on the heat-reflective surface 320. In another possible embodiment, the plurality of protrusions 350 form a plurality of circles on the heat-reflective surface 320, the circles having the same center but different diameters. In other possible embodiments, the arrangement of the plurality of protrusions 350 can also be other, depending on actual needs, and this application does not impose specific limitations.

[0094] Example 5

[0095] This embodiment provides an annealing furnace, which has a largely the same structure as Embodiment 1, Embodiment 2, or Embodiment 3, with improvements only made based on Embodiment 1, Embodiment 2, or Embodiment 3. Therefore, only the differences are described here, and the structures identical to those in Embodiment 1, Embodiment 2, or Embodiment 3 will not be repeated here.

[0096] The same or corresponding technical features as those in Embodiment 1, Embodiment 2 or Embodiment 3 are referred to by the same reference numerals.

[0097] Specifically, such as Figure 7 As shown, in this embodiment, the heat-reflecting surface 320 is provided with a plurality of grooves 360. By providing a plurality of grooves 360 on the heat-reflecting surface 320, the scattering and reflection area can be increased, which is beneficial to improving the heat reflection effect.

[0098] Optionally, the groove 360 ​​can be hemispherical. The hemispherical groove 360 ​​has an arc-shaped reflective surface, which provides better reflection.

[0099] Optionally, the heat-reflecting surface 320 is provided with a plurality of grooves 360. In one possible embodiment, the plurality of grooves 360 are arranged in an array on the heat-reflecting surface 320. In another possible embodiment, the plurality of grooves 360 form a plurality of circles on the heat-reflecting surface 320, the circles having the same center but different diameters. In other possible embodiments, the arrangement of the plurality of grooves 360 can also be other, depending on actual needs, and this application does not impose specific limitations.

[0100] Example 6

[0101] This embodiment provides an annealing furnace, which has a largely the same structure as Embodiment 1, Embodiment 2, or Embodiment 3, with improvements only made based on Embodiment 1, Embodiment 2, or Embodiment 3. Therefore, only the differences are described here, and the structures identical to those in Embodiment 1, Embodiment 2, or Embodiment 3 will not be repeated here.

[0102] The same or corresponding technical features as those in Embodiment 1, Embodiment 2 or Embodiment 3 are referred to by the same reference numerals.

[0103] Specifically, such as Figure 8 As shown, in this embodiment, a phase change microcapsule layer 370 is coated on the thermal emission surface. A phase change microcapsule is a structure that encapsulates a phase change material within a tiny capsule. This effectively prevents leakage of the phase change material. The phase change material in the microcapsule can absorb or release a large amount of heat during the phase change process and maintain a stable temperature. Furthermore, the phase change process is reversible and can be recycled multiple times.

[0104] By coating the heat-reflecting surface 320 with a phase change microcapsule layer 370, on the one hand, the reflective area of ​​the heat-reflecting surface 320 can be increased through the phase change microcapsules, thereby improving the heat reflection effect; on the other hand, the phase change energy storage material 331 can absorb a certain amount of heat, delaying temperature loss and reducing the heat dissipation efficiency at the corner of the annealing chamber 110.

[0105] Alternatively, phase change microcapsules can be mixed with a high-temperature resistant resin and coated onto the heat-reflective surface 320 to form a phase change microcapsule layer 370. The processing method is simple.

[0106] Example 7

[0107] This embodiment provides an annealing furnace, which has a generally similar structure to Embodiments 1, 2, 3, 4, 5, or 6, with improvements only made based on Embodiments 1, 2, 3, 4, 5, or 6. Therefore, only the differences are described here, and the structures identical to those in Embodiments 1, 2, 3, 4, 5, or 6 will not be repeated.

[0108] This embodiment uses the same reference numerals for the same or corresponding technical features as Embodiment 1, Embodiment 2, Embodiment 3, Embodiment 4, Embodiment 5 or Embodiment 6.

[0109] After the workpiece has been annealed, the furnace door 200 needs to be opened to remove it from the annealing chamber 110. Since the workpieces are generally placed at intervals along the height direction in the annealing chamber 110 for annealing, if the furnace door 200 opens by sliding up and down (taking the upward sliding opening of the furnace door 200 as an example), when the furnace door 200 is opened, the workpieces located below the annealing chamber 110 will be exposed to the air first, and the workpieces located above the annealing chamber 110 will be exposed to the air later, resulting in differences in the workpieces in the annealing chamber 110.

[0110] Based on the above problems, this embodiment provides an annealing furnace, such as... Figure 9As shown, the furnace door 200 of the annealing furnace is slidably connected to the furnace body 100 in the horizontal direction to open or close the opening of the annealing chamber 110. That is, the furnace door 200 slides open to the left and right. When the furnace door 200 is open, all workpieces are exposed to the air at the same time, reducing the differences between individual workpieces.

[0111] During the opening of the furnace door 200, the temperature of the opened portion will initially dissipate, causing a momentary temperature unevenness within the annealing chamber 110. This abrupt change may affect the uniformity of the workpiece. Therefore, please refer to... Figure 9 In this embodiment, at the opening of the furnace body 100 near the annealing chamber 110, a plurality of first nozzles 400 are provided on one side wall of the furnace body 100 in the horizontal direction. The plurality of first nozzles 400 are spaced apart along the height direction of the furnace body 100. When the furnace door 200 slides open the opening of the annealing chamber 110, it moves away from the first nozzles 400. The plurality of first nozzles 400 are connected to the gas supply mechanism 500. The plurality of first nozzles 400 are used to spray high-temperature gas when the furnace door 200 is opened, so as to form an air curtain at the opening of the annealing chamber 110.

[0112] With this configuration, when the furnace door 200 is opened, the air curtain will cover the opening of the annealing chamber 110 exposed to the air, preventing the temperature inside the annealing chamber 110 from escaping through the opening, thus maintaining the temperature stability inside the annealing chamber 110 and improving the uniformity of the workpiece.

[0113] Understandably, the temperature of the gas ejected from the first nozzle 400 should be the same as the current temperature inside the annealing chamber 110 to ensure the heat preservation effect of the air curtain.

[0114] Optionally, the current temperature inside the annealing chamber 110 can be collected by installing a temperature sensor inside the annealing chamber 110.

[0115] It is worth noting that the air curtain formed by the multiple first nozzles 400 should be able to fully cover the opening of the annealing chamber 110 to ensure the heat preservation effect of the air curtain, thereby ensuring the temperature stability of the annealing chamber 110.

[0116] It is worth noting that the first nozzle 400 should be a nozzle capable of remote control of airflow and shutdown for ease of operation. Since the nozzle structure is existing technology, its specific structure will not be described in detail.

[0117] Furthermore, such as Figure 9As shown, to improve the heat preservation effect of the gas at the opening of the annealing chamber 110, multiple second nozzles 600 can be provided on another side wall of the furnace body 100 in the horizontal direction near the opening of the annealing chamber 110. These second nozzles 600 are connected to the gas supply mechanism 500 and are used to eject high-temperature gas when the furnace door 200 is opened. That is, the high-temperature gas ejected from the multiple first nozzles 400 and the multiple second nozzles 600 together form an air curtain at the opening of the annealing chamber 110, thereby improving the reliability of the air curtain's full coverage of the opening of the annealing chamber 110. Furthermore, the multiple first nozzles 400 and the multiple second nozzles 600 share a single gas supply structure, which reduces the number of components used, lowers costs, and improves the synchronization of the gas ejection from the multiple first nozzles 400 and the multiple second nozzles 600.

[0118] Optionally, in this embodiment, the plurality of second nozzles 600 are staggered with the plurality of first nozzles 400. This arrangement ensures that the air curtain formed by the gases ejected from the plurality of first nozzles 400 and the plurality of second nozzles 600 fully covers the opening of the annealing chamber 110, while reducing the number of nozzles used.

[0119] Optionally, see [link to relevant documentation] Figure 9 In one possible embodiment, the air supply mechanism 500 includes an air jacket (not shown), a first manifold 510, and a first air pump 520.

[0120] The air jacket is located inside the furnace body 100 and surrounds the annealing chamber 110. The air jacket provides insulation, effectively blocking heat conduction and reducing heat dissipation efficiency. The first manifold 510 has multiple air outlets, each connected to a first nozzle 400. The inlet of the first air pump 520 is connected to the air jacket, and the outlet of the first air pump 520 is connected to the inlet of the first manifold 510.

[0121] When the furnace door 200 is opened, the first air pump 520 is started and each first nozzle 400 is opened. The first air pump 520 can deliver high-temperature air from the air jacket to the first nozzle 400 and spray it out from the first nozzle 400.

[0122] Understandably, during the annealing process, the high temperature inside the annealing chamber 110 causes the gas temperature inside the air jacket to rise. The gas supply device provided in this embodiment uses the gas inside the air jacket as a gas source, utilizing the residual heat of the air inside the air jacket to improve energy utilization efficiency.

[0123] It is worth noting that after the furnace door 200 is opened, the workpieces will be taken out one by one from the annealing chamber 110. Once all the workpieces have been taken out, the jetting of the first nozzle 400 can be stopped. Therefore, the jetting time required by the first nozzle 400 is relatively short, and the high-temperature air in the air jacket is sufficient for use.

[0124] Optionally, the gas in the air gap can be nitrogen, oxygen, or hydrogen, etc., depending on actual needs, and this application does not impose specific limitations.

[0125] Understandably, additional air supply equipment can be installed in the air jacket for use during the next annealing.

[0126] Optionally, for a design where multiple second nozzles 600 are provided on another side wall of the annealing chamber 110, a second manifold (not shown in the figure) and a second air pump (not shown in the figure) can be provided. Specifically, the second manifold has multiple air outlets, each of which is connected to one of the second nozzles 600. The inlet of the second air pump is connected to the air jacket, and the outlet of the second air pump is connected to the inlet of the second manifold. In this way, by controlling the second air pump and the second nozzles 600, the high-temperature air in the air jacket can also be ejected from the second nozzles 600.

[0127] Alternatively, in other possible embodiments, the gas source of the gas supply mechanism 500 may also be a combination of a room temperature gas source and a heating device. The specific configuration can be determined according to actual needs, and this application does not impose any particular limitation.

[0128] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. An annealing furnace, characterized in that, The furnace includes a furnace body and a furnace door. The furnace body is provided with an annealing chamber, and an opening is provided on one side of the annealing chamber. The furnace door is provided on the furnace body and is used to open and close the opening of the annealing chamber. Each inner wall surface of the annealing chamber and the side of the furnace door facing the annealing chamber are provided with a heat insulation layer. On the insulation layer, a heat-reflecting structure is provided at the corner formed by any three adjacent inner wall surfaces of the annealing cavity. The heat-reflecting structure includes three connecting surfaces and a heat-reflecting surface. The three connecting surfaces are arranged adjacently and respectively fit against the three adjacent inner wall surfaces of the annealing cavity. The heat-reflecting surface connects the three connecting surfaces. The heat-reflecting surface is an arc surface, and the arc surface is recessed at the corner of the annealing cavity. The heat-reflecting surface is used to reflect heat radiation back into the annealing cavity.

2. The annealing furnace according to claim 1, characterized in that, The heat-reflective structure is made of heat-reflective material; or, the heat-reflective surface is provided with a heat-reflective coating, the heat-reflective coating containing heat-reflective material.

3. The annealing furnace according to claim 2, characterized in that, The heat-reflective material includes at least one of metal or ceramic.

4. The annealing furnace according to claim 1, characterized in that, The heat-reflective structure also includes a hollow section.

5. The annealing furnace according to claim 4, characterized in that, The hollow part is a vacuum cavity disposed inside the heat-reflective structure; Alternatively, the hollow part is a cavity disposed inside the heat-reflective structure, and the cavity is filled with a phase change energy storage material; Alternatively, the hollow portion may be a layer of hollow microspheres disposed on the heat-reflective surface.

6. The annealing furnace according to claim 1, characterized in that, The heat-reflective surface is provided with several protrusions; Alternatively, the heat-reflective surface may have several grooves. Alternatively, a phase change microcapsule layer may be coated on the heat-reflective surface.

7. The annealing furnace according to any one of claims 1-6, characterized in that, The furnace door is slidably connected to the furnace body in the horizontal direction to open or close the opening of the annealing chamber.

8. The annealing furnace according to claim 7, characterized in that, At the opening of the furnace body near the annealing chamber, a plurality of first nozzles are provided on one side wall of the furnace body in the horizontal direction. The plurality of first nozzles are spaced apart along the height direction of the furnace body. When the furnace door slides open the opening of the annealing chamber, it moves away from the first nozzles. The plurality of first nozzles are connected to a gas supply mechanism. The plurality of first nozzles are used to spray high-temperature gas when the furnace door is opened to form an air curtain at the opening of the annealing chamber.

9. The annealing furnace according to claim 8, characterized in that, At the opening of the furnace body near the annealing chamber, a plurality of second nozzles are provided on another side wall of the furnace body in the horizontal direction. The plurality of second nozzles are connected to the gas supply mechanism and are used to spray high-temperature gas when the furnace door is opened. The plurality of second nozzles are staggered with the plurality of first nozzles.

10. The annealing furnace according to claim 8, characterized in that, The gas supply mechanism includes: An air jacket is disposed inside the furnace body and surrounds the annealing chamber; A first manifold, wherein the first manifold is provided with a plurality of air outlets, each of the air outlets being connected to a first nozzle; A first air pump, the inlet of which is connected to the air interlayer, and the outlet of which is connected to the inlet of the first manifold.

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