Measurement assembly, transport and measurement device, and measurement method

Abstract

The application provides a measuring assembly, a transportation and measuring device and a measuring method, relates to the field of semiconductor processing, and solves the technical problem that manual measurement of the height of a support column exceeding a static adsorption assembly is inaccurate. The measuring assembly comprises: a first support; a second support, which is arranged in a second direction and is spaced apart from the first support; and at least one limiting piece, which is detachably connected to the first support and is in contact with the second support. Through this structure, the connecting position of the limiting piece and the first support can be set according to a preset size range. When detecting whether the size of the support column exceeding the electrostatic adsorption assembly in the first direction meets the preset size range, the relative positions of the support end of the support column and the limiting piece in the first direction can be directly compared, so that whether the size of the support column exceeding the electrostatic adsorption assembly in the first direction meets the preset size range can be accurately determined, and the inaccuracy of the measurement result caused by measurement method errors and reading errors is avoided.

Description

Technical Field

[0001] This application relates to the field of semiconductor processing, and more specifically to a measurement component, a transportation and measurement device, and a measurement method. Background Technology

[0002] The process chamber of a magnetron sputtering machine typically houses an electrostatic adsorption assembly, which includes a platform and an electrostatic chuck (ESC) structure on the platform. Before film deposition in the magnetron sputtering process chamber, the glass substrate is supported by multiple support pins (PINs) that pass through the electrostatic adsorption assembly. Subsequently, the support pins descend below the electrostatic adsorption assembly, causing the glass substrate to fall onto the electrostatic adsorption structure and be supported by it.

[0003] To ensure the support columns stably support the glass substrate and prevent it from shifting or tilting, the height of the support columns above the surface of the electrostatic adsorption assembly must be consistent. Therefore, preventative maintenance (PM) typically uses manual measurement, employing a ruler to measure the height of the support columns above the electrostatic adsorption assembly. However, this manual method is prone to errors due to variations in measurement technique and reading, leading to inaccurate results and making it impossible to accurately determine whether the heights of the support columns above the electrostatic adsorption assembly are consistent. Summary of the Invention

[0004] To address the aforementioned technical problems, this application is proposed. Embodiments of this application provide a measuring component, a transportation and measuring apparatus, and a measuring method.

[0005] In a first aspect, one embodiment of this application provides a measuring component, characterized in that it is applied to a transportation and measuring device, the transportation and measuring device including an electrostatic adsorption component and a support column, the support column passing through the electrostatic adsorption component along a first direction, the measuring component being configured to measure whether the dimension of the support column exceeding the electrostatic adsorption component in the first direction meets a preset size range, the support column having a support end and a connecting end disposed opposite to each other in the first direction, the support end being configured to support a product; wherein, the measuring component includes: a first support member extending along the first direction, the end of the first support member near the electrostatic adsorption component being connectable to the electrostatic adsorption component; a second support member spaced apart from the first support member in a second direction, the second direction being perpendicular to the first direction, the end of the second support member near the electrostatic adsorption component being connectable to the electrostatic adsorption component, the surface of the first support member and / or the second support member having size markings; at least one limiting member detachably connected to the first support member and in contact with the second support member, the installation position of the limiting member on the first support member being determined based on the size markings, the limiting member extending along the second direction, the limiting member being close to the support end, the limiting member being configured to indicate that the support column exceeds the preset size range of the electrostatic adsorption component in the first direction.

[0006] In some embodiments, the first support member has a first elongated hole extending in a first direction and penetrating the first support member in a second direction, and the limiting member passes through the first elongated hole; wherein, the measuring assembly further includes: at least one first locking member, the first locking member passing through the first elongated hole and at least partially located on the side of the limiting member near the connecting end, the first locking member being configured to support and fix the position of the limiting member in the first direction.

[0007] In some embodiments, the first support member has a plurality of first through holes extending through the first support member along a second direction, the plurality of first through holes being arranged along a first direction, and the limiting member passing through one of the first through holes.

[0008] In some embodiments, the second support member has an elongated groove extending along a first direction, the bottom of the elongated groove being disposed opposite to the first support member, and the end of the limiting member near the second support member abutting against the bottom of the elongated groove.

[0009] In some embodiments, the second support has a second elongated hole extending along a first direction and penetrating the second support along a second direction, and the limiting member also passes through the second elongated hole; wherein the measuring assembly further includes: at least one second locking member passing through the second elongated hole and at least partially located on the side of the limiting member near the connecting end, the second locking member being configured to support and fix the position of the limiting member in the first direction.

[0010] In some embodiments, the preset size range includes a maximum size and a minimum size, and there are two limiting members. The two limiting members are spaced apart in a first direction. The first limiting member is configured to indicate that the support column exceeds the maximum size of the electrostatic adsorption assembly in the first direction, and the second limiting member is configured to indicate that the support column exceeds the minimum size of the electrostatic adsorption assembly in the first direction.

[0011] In some embodiments, the measuring component further includes: a first roller rotatably connected to one end of the first support member near the electrostatic adsorption component, and the first roller is capable of rolling connection with the electrostatic adsorption component, the first roller being configured to support and drive the first support member to move; and a second roller rotatably connected to one end of the second support member near the electrostatic adsorption component, and the second roller being capable of rolling connection with the electrostatic adsorption component, the second roller being configured to support and drive the second support member to move.

[0012] In some embodiments, the measuring component further includes: an auxiliary support component connected to the first support and the second support, and capable of contacting the electrostatic adsorption component, configured to support the first support and the second support to prevent the first support and the second support from tipping over.

[0013] Secondly, one embodiment of this application provides a transportation and measurement device, comprising: an electrostatic adsorption component capable of generating electrostatic force to adsorb a product; a plurality of support columns passing through the electrostatic adsorption component along a first direction, the support columns having a support end and a connecting end disposed opposite to each other in the first direction, the support end being configured to support the product; a driving device drivenly connected to the connecting end and configured to drive the support columns to move along the first direction; and a measurement component of any of the above-mentioned first aspects, disposed on the electrostatic adsorption component and configured to measure whether the size of the support column extending beyond the electrostatic adsorption component in the first direction meets a preset size range.

[0014] Thirdly, one embodiment of this application provides a measurement method applied to the transportation and measurement device in the second aspect above. The measurement method includes: placing a measuring component of the transportation and measurement device adjacent to a support column of the transportation and measurement device, so that a limiting member of the measuring component is close to the support end of the support column; comparing the relative positions of the support end and the limiting member in a first direction to determine whether the size of the support column exceeding the electrostatic adsorption component in the first direction meets a preset size range.

[0015] The measurement component, transportation and measurement device, and measurement method proposed in this application embodiment can set the connection position of the limiting member and the first support member according to the preset size range. When detecting whether the size of the support column exceeding the electrostatic adsorption component in the first direction meets the preset size range, the relative position of the support end of the support column and the limiting member in the first direction can be directly compared. This can accurately determine whether the size of the support column exceeding the electrostatic adsorption component in the first direction meets the preset size range, avoiding inaccurate measurement results due to measurement method errors and reading errors. Moreover, the measurement efficiency is high, saving manpower. Attached Figure Description

[0016] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 The diagram shows the structure of the support column, electrostatic adsorption assembly, and drive device.

[0018] Figure 2 The diagram shown is a structural schematic of a first measurement component provided in an exemplary embodiment of this application.

[0019] Figure 3 The diagram shown is a structural schematic of a transportation and measurement device provided in an exemplary embodiment of this application.

[0020] Figure 4 The image shown is a side view of a first support member provided in an exemplary embodiment of this application.

[0021] Figure 5a The image shown is a side view of a first support member provided in another exemplary embodiment of this application.

[0022] Figure 5b The diagram shown is a structural schematic of a second measurement component provided in an exemplary embodiment of this application.

[0023] Figure 6 The image shown is a side view of a second support member provided in an exemplary embodiment of this application.

[0024] Figure 7a The image shown is a side view of a second support member provided in another exemplary embodiment of this application.

[0025] Figure 7b The diagram shown is a structural schematic of a third measurement component provided in an exemplary embodiment of this application.

[0026] Figure 8 The image shown is a side view of a second support member provided in yet another exemplary embodiment of this application.

[0027] Figure 9 The diagram shown is a structural schematic of a fourth measurement component provided in an exemplary embodiment of this application.

[0028] Figure 10 The diagram shown is a structural schematic of a fifth measurement component provided in an exemplary embodiment of this application.

[0029] Figure 11 The diagram shown is a structural schematic of a sixth measurement component provided in an exemplary embodiment of this application.

[0030] Figure 12 The diagram shown is a flowchart of a measurement method provided in an exemplary embodiment of this application.

[0031] Figure label:

[0032] 100. Measuring component; 110. First support member; 111. First elongated hole; 112. First through hole; 120. Second support member; 121. Long groove; 122. Second elongated hole; 123. Second through hole; 130. Limiting member; 140. Dimension marking; 150. First locking member; 160. Second locking member; 170. First roller; 180. Second roller; 190. Auxiliary support component; 200. Support column; 210. Support end; 220. Connecting end; 300. Electrostatic adsorption component; 400. Product; 500. Transportation and measuring device; 600. Drive device. Detailed Implementation

[0033] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0034] Figure 1 The diagram shows the structure of the support column, electrostatic adsorption assembly, and drive device.

[0035] like Figure 1As shown, in the process chamber of the magnetron sputtering machine, the electrostatic adsorption assembly 300 includes a platform and an electrostatic adsorption structure on the platform. The electrostatic adsorption structure can generate electrostatic force to adsorb products 400 (such as glass substrates, wafers, silicon wafers, etc.). Multiple (e.g., 40) support pillars 200 pass through the electrostatic adsorption assembly 300 and support the products 400. Subsequently, the support pillars 200 can descend below the platform, so that the products 400 are supported by the electrostatic adsorption structure. To ensure that the support pillars 200 can stably support the products 400, it is necessary to measure the height of the multiple support pillars 200 above the surface of the electrostatic adsorption assembly 300 to ensure that the height of the multiple support pillars 200 is consistent. Currently, the height of the support column 200 above the surface of the electrostatic adsorption component 300 (specifically, the height above the surface of the electrostatic adsorption structure) is usually measured manually by staff using measuring tools such as rulers. Due to errors in the measurement method and readings, this method cannot accurately measure the height of multiple support columns 200 above the surface of the electrostatic adsorption component 300, and therefore cannot accurately determine whether the heights of multiple support columns 200 above the surface of the electrostatic adsorption component 300 are consistent.

[0036] In view of this, this application proposes a measuring component, a transportation and measuring device, and a measuring method. The connection position of the limiting member and the first support member can be set according to a preset size range. When detecting whether the size of the support column exceeding the electrostatic adsorption component in the first direction meets the preset size range, the relative position of the support end of the support column and the limiting member in the first direction can be directly compared. This allows for accurate determination of whether the size of the support column exceeding the electrostatic adsorption component in the first direction meets the preset size range, avoiding inaccurate measurement results due to measurement method errors and reading errors. Furthermore, the measurement efficiency is high, saving manpower.

[0037] Figure 2 The diagram shown is a structural schematic of a first type of measurement component provided in an exemplary embodiment of this application. Figure 3 The diagram shown is a structural schematic of a transportation and measurement device provided in an exemplary embodiment of this application.

[0038] like Figure 2 and Figure 3As shown, this application embodiment provides a measuring component 100 applied to a transportation and measuring device 500. The transportation and measuring device 500 includes an electrostatic adsorption component 300 and a support column 200. The support column 200 passes through the electrostatic adsorption component 300 along a first direction (i.e., the X direction in the figure). The measuring component 100 is configured to measure whether the dimension of the support column 200 extending beyond the electrostatic adsorption component 300 in the first direction meets a preset dimension range. The support column 200 has a support end 210 and a connecting end 220 disposed opposite to each other in the first direction. The support end 210 is configured to support the product 400. The measuring component 100 includes a first support member 110, a second support member 120, and at least one limiting member 130. The first support member 110 extends along the first direction, and the end of the first support member 110 near the electrostatic adsorption component 300 can be connected to the electrostatic adsorption component 300. The second support member 120 is spaced apart from the first support member 110 in a second direction (i.e., the Y direction in the figure), the second direction being perpendicular to the first direction. One end of the second support member 120 near the electrostatic adsorption assembly 300 can be connected to the electrostatic adsorption assembly 300. The surfaces of the first support member 110 and / or the second support member 120 have size markings 140. At least one limiting member 130 is detachably connected to the first support member 110 and contacts the second support member 120. The installation position of the limiting member 130 on the first support member 110 is determined based on the size markings 140. The limiting member 130 extends along the second direction and can approach the support end 210. The limiting member 130 is configured to indicate that the support post 200 extends beyond a preset size range of the electrostatic adsorption assembly 300 in the first direction.

[0039] For example, the first direction is the vertical direction and the second direction is the horizontal direction.

[0040] For example, the second support 120 extends along the first direction.

[0041] For example, the end of the first support member 110 near the electrostatic adsorption component 300 can be directly connected to the electrostatic adsorption component 300, or the end of the first support member 110 near the electrostatic adsorption component 300 can be connected to the electrostatic adsorption component 300 through other structures, such as supports, rolling elements, sliding elements, or other support or fixing structures.

[0042] For example, one end of the second support member 120 near the electrostatic adsorption component 300 can be directly connected to the electrostatic adsorption component 300, or the other end of the second support member 120 near the electrostatic adsorption component 300 can be connected to the electrostatic adsorption component 300 through other structures, such as supports, rolling elements, sliding elements, or other support or fixing structures.

[0043] For example, the preset size range is less than 105.1 mm.

[0044] For example, the preset size range is 104.9 mm to 105.1 mm.

[0045] For example, when measuring support column 200, the precision of dimension marking 140 is millimeters, but when measuring other objects, it can also be centimeters, decimeters, etc.

[0046] For example, both the first support member 110 and the second support member 120 have size markings 140.

[0047] For example, the installation position of at least one limiting member 130 on the first support member 110 can be determined based on at least one of the maximum size, minimum size, and intermediate size of the preset size range, as indicated by the size identifier 140.

[0048] For example, if the preset size range is less than 100 mm, the limiting member 130 can be installed at the same position as "100" in the size mark 140 in the first direction.

[0049] For example, the distance between the first support member 110 and the second support member 120 is greater than the dimension of the support column 200 in the second direction. For example, if the dimension of the support column in the second direction is 2 cm, then the distance between the first support member 110 and the second support member 120 can be 5 cm.

[0050] For example, the materials of the first support member 110, the second support member 120 and the limiting member 130 can all be metal or plastic. For example, metal can be steel, iron, aluminum, etc., and plastic can be polyethylene, polyvinyl chloride, etc.

[0051] For example, the cross-sectional shape of the first support member 110 perpendicular to the first direction is circular, rectangular, triangular, annular (such as a square ring or circular ring), elliptical, or other polygonal.

[0052] For example, the cross-sectional shape of the second support member 120 perpendicular to the first direction is circular, rectangular, triangular, annular (such as a square ring or circular ring), elliptical, or other polygonal.

[0053] For example, the cross-sectional shape of the limiting member 130 perpendicular to the second direction is circular, rectangular, triangular, annular (such as a square ring or circular ring), elliptical, or other polygonal.

[0054] In the above embodiments, this structure allows the connection position of the limiting member 130 and the first support member 110 to be set according to a preset size range. When detecting whether the size of the support column 200 exceeding the electrostatic adsorption component 300 in the first direction meets the preset size range, the relative positions of the support end 210 of the support column 200 and the limiting member 130 in the first direction can be directly compared. This enables accurate determination of whether the size of the support column 200 exceeding the electrostatic adsorption component 300 in the first direction meets the preset size range, avoiding inaccurate measurement results due to measurement method errors and reading errors. Furthermore, it has high measurement efficiency and saves manpower.

[0055] Figure 4 The image shown is a side view of a first support member provided in an exemplary embodiment of this application.

[0056] In some embodiments, such as Figure 2 and Figure 4 As shown, the first support member 110 has a first elongated hole 111 extending along a first direction, and the first elongated hole 111 penetrates the first support member 110 along a second direction, with the limiting member 130 passing through the first elongated hole 111. The measuring assembly 100 further includes at least one first locking member 150. The first locking member 150 passes through the first elongated hole 111 and is at least partially located on the side of the limiting member 130 near the connecting end 220. The first locking member 150 is configured to fix and support the position of the limiting member 130 in the first direction.

[0057] For example, the first locking member 150 is a screw, bolt, or other structure that can be engaged in the first elongated hole 111. If the first locking member 150 is a screw or bolt, by rotating the first locking member 150 into the first elongated hole 111, the first locking member 150 can be engaged in the first elongated hole 111, thereby supporting and fixing the position of the limiting member 130 in the first direction.

[0058] In the above embodiments, by providing a first elongated hole 111 extending along the first direction, the installation position of the limiting member 150 in the first direction can be flexibly adjusted, thereby allowing the measurement of support columns 200 with different preset size ranges. Furthermore, the limiting member 130 is fixed by the first locking member 150, resulting in a simple structure that is easy to install.

[0059] Figure 5a The image shown is a side view of a first support member provided in another exemplary embodiment of this application. Figure 5b The diagram shown is a structural schematic of a second measurement component provided in an exemplary embodiment of this application.

[0060] In some embodiments, such as Figure 5a and Figure 5bAs shown, the first support member 110 has a plurality of first through holes 112 extending through the first support member 110 along the second direction. The plurality of first through holes 112 are arranged along the first direction, and the limiting member 130 passes through one of the first through holes 112.

[0061] For example, the first support member 110 is provided with 10 first through holes 112 at 5 mm intervals along the first direction.

[0062] In the above embodiments, by providing multiple first through holes 112, the limiting member 130 can pass through different first through holes 112, thereby adjusting the installation position of the limiting member 130 in the first direction. This allows for the measurement of support columns 200 with different preset size ranges. Furthermore, the inner wall of the first through hole 112 can support the limiting member 130, eliminating the need for a locking member 150 to fix the limiting member 130, thus saving costs.

[0063] In some embodiments, the end of the limiting member 130 near the second support member 120 abuts against the side wall of the second support member 120.

[0064] In the above embodiments, when the limiting member 130 is detachably connected to the first support member 110, by making one end of the limiting member 130 close to the second support member 120 abut against the side wall of the second support member 120, the limiting member 130 can be prevented from tilting, thereby improving structural stability.

[0065] Figure 6 The image shown is a side view of a second support member provided in an exemplary embodiment of this application.

[0066] In some embodiments, such as Figure 2 and Figure 6 As shown, the second support member 120 has a long groove 121 extending along the first direction. The bottom of the long groove 121 is disposed opposite to the first support member 110. The end of the limiting member 130 near the second support member 120 abuts against the bottom of the long groove 121.

[0067] In the above embodiments, when the limiting member 130 and the first support member 110 are detachably connected, by setting the long groove 121 and making one end of the limiting member 130 near the second support member 120 abut against the bottom of the long groove 121, the limiting member 130 can be prevented from tilting, thereby improving structural stability.

[0068] Figure 7a The image shown is a side view of a second support member provided in another exemplary embodiment of this application. Figure 7b The diagram shown is a structural schematic of a third measurement component provided in an exemplary embodiment of this application.

[0069] In some embodiments, such as Figure 7a and Figure 7bAs shown, the second support member 120 has a second elongated hole 122 extending along a first direction, and the second elongated hole 122 penetrates the second support member 120 along a second direction. The limiting member 130 also passes through the second elongated hole 122. The measuring assembly 100 further includes at least one second locking member 160. The second locking member 160 passes through the second elongated hole and is at least partially located on the side of the limiting member 130 near the connecting end 220. The second locking member 160 is configured to fix the position of the limiting member 130 in the first direction.

[0070] For example, the second locking member 160 is a screw, bolt, or other structure that can be engaged within the second elongated hole 122. If the second locking member 160 is a screw or bolt, by rotating the second locking member 160 into the second elongated hole 122, the second locking member 160 can be engaged within the second elongated hole 122, thereby supporting and fixing the position of the limiting member 130 in the first direction.

[0071] In the above embodiments, by providing a second elongated hole 122 extending along the first direction, the installation position of the limiting member 150 in the first direction can be flexibly adjusted, thereby allowing the measurement of support columns 200 with different preset size ranges. Furthermore, when the limiting member 130 is detachably connected to the first support member 110, the limiting member 130 can be fixed by the second locking member 160 to prevent the limiting member 130 from tilting and improve structural stability.

[0072] Figure 8 The image shown is a side view of a second support member provided in yet another exemplary embodiment of this application.

[0073] In some embodiments, such as Figure 5b and Figure 8 As shown, the second support member 120 has a plurality of second through holes 123 extending through the second support member 120 along the second direction. The plurality of second through holes 123 are arranged along the first direction, and the limiting member 130 passes through one of the second through holes 123.

[0074] For example, the second support member 120 is provided with 15 second through holes 123 at 3 mm intervals along the first direction.

[0075] In the above embodiments, by providing multiple second through holes 123, the limiting member 130 can pass through different second through holes 123 to adjust the installation position of the limiting member 130 in the first direction. This allows for the measurement of support columns 200 with different preset size ranges. Furthermore, the inner wall of the second through hole 123 can also support the limiting member 130, eliminating the need for a locking member 150 to fix the limiting member 130, thus saving costs. In addition, when the limiting member 130 is detachably connected to the first support member 110, this structure can fix the end of the limiting member 130 near the second support member 120, preventing the limiting member 130 from tilting and improving structural stability.

[0076] In some embodiments, the limiting member 130 has a third through hole at one end near the first support member 110, the first support member 110 has a plurality of first threaded holes arranged along a first direction, and the measuring assembly 100 further includes at least one first screw connector. The first screw connector passes through the third through hole and is threaded into the first threaded hole.

[0077] For example, the first threaded component is a screw or bolt.

[0078] For example, the third through hole extends along a third direction, and the first threaded hole extends along a third direction, which is perpendicular to the first direction and the second direction.

[0079] In the above embodiments, by screwing the first screw member into the threads of different first threaded holes, the installation position of the limiting member 130 in the first direction can be adjusted, thereby enabling the measurement of support columns 200 with different preset size ranges.

[0080] In some embodiments, the limiting member 130 has a fourth through hole at one end near the second support member 120, the second support member 120 has a plurality of second threaded holes arranged along a first direction, and the measuring assembly 100 further includes at least one second screw connector. The second screw connector passes through the fourth through hole and is threaded into the second threaded hole.

[0081] For example, the second screw is a screw or bolt.

[0082] For example, the fourth through hole extends along a third direction, and the second threaded hole extends along a third direction, which is perpendicular to the first and second directions.

[0083] In the above embodiments, by threading the second screw member with different second threaded holes, the installation position of the limiting member 130 in the first direction can be adjusted, thereby allowing measurement of support columns 200 corresponding to different preset size ranges. Furthermore, when the limiting member 130 is detachably connected to the first support member 110, this structure can fix the end of the limiting member 130 near the second support member 120, preventing the limiting member 130 from tilting and improving structural stability.

[0084] The fixing structures of the first support member 110 and the limiting member 130 and the second support member 120 and the limiting member 130 described in the above embodiments can be arbitrarily arranged and combined to fix the limiting member 130 from two points and prevent the limiting member 130 from tipping over.

[0085] For example, such as Figure 2As shown, the first support member 110 has a first elongated hole 111. The limiting member 130 is fixed to the first support member 110 by the first locking member 150. The second support member 120 has an elongated groove 121. The limiting member 130 is fixed to the second support member 120 by making one end of the limiting member 130 close to the bottom of the elongated groove 121.

[0086] For example, such as Figure 5b As shown, the first support member 110 has a plurality of first through holes 112, the second support member 120 has a plurality of second through holes 123, and the limiting member 130 passes through one first through hole 112 and one second through hole 123.

[0087] For example, such as Figure 7b As shown, the first support member 110 has a first elongated hole 111, and the limiting member 130 is fixed to the first support member 110 by the first locking member 150. The second support member 120 has a second elongated hole 122, and the limiting member 130 is fixed to the second support member 120 by the second locking member 160.

[0088] Figure 9 The diagram shown is a structural schematic of a fourth measurement component provided in an exemplary embodiment of this application.

[0089] In some embodiments, the preset size range includes a maximum size and a minimum size, such as Figure 9 As shown, there are two limiting members 130, which are spaced apart in the first direction. The first limiting member 130 is configured to indicate the maximum size of the support column 200 exceeding the electrostatic adsorption assembly 300 in the first direction, and the second limiting member 130 is configured to indicate the minimum size of the support column 200 exceeding the electrostatic adsorption assembly 300 in the first direction.

[0090] For example, if the preset size range is 109 mm to 110 mm, the first limiting member 130 can be installed at the same position as "110" in the size mark 140 in the first direction, so that the first limiting member 130 indicates that the support column 200 exceeds the maximum size of the electrostatic adsorption assembly 300 by 110 mm in the first direction, and the second limiting member 130 can be installed at the same position as "109" in the size mark 140 in the first direction, so that the second limiting member 130 indicates that the support column 200 exceeds the minimum size of the electrostatic adsorption assembly 300 by 109 mm in the first direction.

[0091] In the above embodiment, the maximum and minimum dimensions of the preset size range are indicated by two limiting members 130. During measurement, if the support end 210 of the support column 200 is located between the two limiting members 130 in the first direction, it indicates that the dimension of the support column 200 exceeding the electrostatic adsorption component 300 in the first direction meets the preset size range. Therefore, with this structure, it is possible to quickly and accurately measure whether the dimension of the support column 200 exceeding the electrostatic adsorption component 300 in the first direction meets the preset size range, thereby improving measurement efficiency and accuracy.

[0092] Figure 10 The diagram shown is a structural schematic of a fifth measurement component provided in an exemplary embodiment of this application.

[0093] In some embodiments, such as Figure 10 As shown, the measuring assembly 100 further includes a first roller 170 and a second roller 180. The first roller 170 is rotatably connected to the end of the first support member 110 near the electrostatic adsorption assembly 300, and the first roller 170 is capable of rolling connection with the electrostatic adsorption assembly 300. The first roller 170 is configured to support and drive the first support member 110 to move. The second roller 180 is rotatably connected to the end of the second support member 120 near the electrostatic adsorption assembly 300, and the second roller 180 is capable of rolling connection with the electrostatic adsorption assembly 300. The second roller 180 is configured to support and drive the second support member 120 to move.

[0094] For example, the measuring assembly 100 further includes a first rotating shaft and a second rotating shaft. The first rotating shaft is connected to the first support member 110, the first roller 170 is rotatably connected to the first rotating shaft, the second rotating shaft is connected to the second support member 120, and the second roller 180 is rotatably connected to the second rotating shaft.

[0095] In the above embodiments, by providing the first roller 170 and the second roller 180, the measuring component 100 can move along the surface of the electrostatic adsorption component 300, thereby enabling the measuring component 100 to move quickly and effortlessly. Furthermore, if the preset size range is smaller than a certain size, the measuring component 100 can be pushed towards the support column 200. If the support column 200 can pass through the space enclosed by the first support member 110, the second support member 120, and the limiting member 130, then the size of the support column 200 exceeding the electrostatic adsorption component 300 in the first direction meets the preset size range. If the support column 200 is blocked by the limiting member 130, then the size of the support column 200 exceeding the electrostatic adsorption component 300 in the first direction does not meet the preset size range. Therefore, this structure allows for simple, accurate, and rapid measurement of whether the size of the support column 200 in the first direction meets the preset size range.

[0096] In some embodiments, the measuring component 100 further includes two guide rails and two sliders. The two guide rails are connectable to the electrostatic adsorption component 300, and each guide rail is slidably connected to one slider. One slider is connected to the end of the first support 110 near the electrostatic adsorption component 300, and the other slider is connected to the end of the second support 120 near the electrostatic adsorption component 300.

[0097] In practical applications, when placing the measuring component 100 on the electrostatic adsorption component 300, the support column 200 to be measured can be placed between two guide rails. The guide rails contact the electrostatic adsorption component 300 and support structures such as the slider, the first support member 110, the second support member 120, and the limiting member 130. Before measurement, the slider can be positioned at one end of the guide rail. If the preset size range is smaller than a certain size, the slider can carry the first support member 110, the second support member 120, and the limiting member 130, and move along the extension direction of the guide rail towards the support column 200. If the support column 200 can pass through the space enclosed by the first support member 110, the second support member 120, and the limiting member 130, then the size of the support column 200 exceeding the electrostatic adsorption component 300 in the first direction meets the preset size range. If the support column 200 is blocked by the limiting member 130, then the size of the support column 200 exceeding the electrostatic adsorption component 300 in the first direction does not meet the preset size range. Therefore, this structure allows for a simple, accurate, and quick measurement of whether the dimensions of the support column 200 in the first direction meet the preset size range.

[0098] For example, in addition to manually pushing the first support 110, the second support 120, the limiting member 130, or the slider, the measuring assembly 100 may also include a slider driving assembly. The slider driving assembly is configured to drive the slider to slide along the extension direction of the guide rail. The slider driving assembly may exemplary include a motor, a cylinder, or an electric actuator, etc.

[0099] Figure 11 The diagram shown is a structural schematic of a sixth measurement component provided in an exemplary embodiment of this application.

[0100] In some embodiments, such as Figure 11 As shown, the measuring assembly 100 also includes an auxiliary support assembly 190. The auxiliary support assembly 190 is connected to the first support member 110 and the second support member 120 and is capable of contacting the electrostatic adsorption assembly 300. It is configured to support the first support member 110 and the second support member 120 to prevent the first support member 110 and the second support member 120 from tipping over.

[0101] For example, the auxiliary support component 190 may include a support or support frame (such as a tripod).

[0102] In the above embodiments, by providing the auxiliary support component 190, the measuring component 100 can be prevented from tipping over, thereby damaging the support column 200 and the electrostatic adsorption component 300.

[0103] In some embodiments, the measurement component 100 further includes an image acquisition component and an analysis component. The image acquisition component and the analysis component are communicatively connected. The image acquisition component is capable of acquiring detection images of the limiting member 130 and the support column 200, and sending the detection images to the analysis component. The analysis component is capable of determining the position information of the limiting member 130 and the support column 200 in the detection images, respectively, and determining whether the size of the support column 200 in the first direction meets a preset size range based on the position information of the limiting member 130 and the support column 200 in the detection images.

[0104] In practical applications, the measuring component 100 can be moved to the position of the limiting member 130 near the support end 210 of the support column 200, and then the image acquisition component can acquire the detection images of the limiting member 130 and the support column 200.

[0105] For example, the image acquisition component includes a camera.

[0106] For example, if there is only one limiting member 130, the analysis component can determine the position information of one limiting member 130 and the position information of one support column 200 in the detection image, and determine whether the size of the support column 200 in the first direction meets the preset size range based on the position information of one limiting member 130 and the position information of one support column 200 in the detection image.

[0107] For example, if the number of limiting members 130 is more than one, the analysis component can determine the position information of all limiting members 130 and the position information of the support column 200 in the detection image, and determine whether the size of the support column 200 in the first direction meets the preset size range based on the position information of all limiting members 130 and the position information of the support column 200 in the detection image.

[0108] Based on the same concept, such as Figure 3As shown in the illustration, this application also provides a transportation and measurement device 500, which includes: an electrostatic adsorption component 300, a plurality of support columns 200, a driving device 600, and the measurement component 100 described in the above embodiment. The electrostatic adsorption component 300 is capable of generating electrostatic force to adsorb products. The plurality of support columns 200 pass through the electrostatic adsorption component 300 along a first direction. Each support column 200 has a support end 210 and a connecting end 220 disposed opposite to each other in the first direction. The support end 210 is configured to support the product 400. The driving device 600 is drivenly connected to the connecting end 220 and is configured to drive the support column 200 to move along the first direction. The measurement component 100 is disposed on the electrostatic adsorption component 300 and is configured to measure whether the dimension of the support column 200 extending beyond the electrostatic adsorption component 300 in the first direction meets a preset dimension range.

[0109] For example, the electrostatic adsorption assembly 300 includes a platform and an electrostatic Chuck (ESC) structure disposed on the platform, the electrostatic adsorption structure being able to generate electrostatic force to adsorb products.

[0110] For example, the platform can rotate, thereby causing the electrostatic adsorption structure to rotate.

[0111] Since the transport and measuring device 500 includes the measuring component 100, all the technical features and effects of the transport and measuring device 500 including the measuring component 100 will not be described in detail here.

[0112] Figure 12 The diagram shown is a flowchart of a measurement method provided in an exemplary embodiment of this application.

[0113] Based on the same concept, such as Figure 12 As shown, this application embodiment also provides a measurement method applied to the transportation and measurement device 500 in the above embodiment. The measurement method includes the following steps 701 and 702.

[0114] Step 701: Place the measuring component of the transport and measuring device adjacent to the support column of the transport and measuring device, so that the limiting member of the measuring component is close to the support end of the support column.

[0115] Step 702: Compare the relative positions of the support end and the limiting member in the first direction to determine whether the size of the support column exceeding the electrostatic adsorption component in the first direction meets the preset size range.

[0116] In some embodiments, when there is only one limiting member 130, the limiting member 130 is used to indicate the maximum size in the preset size range. The measuring component 100 can be moved to the limiting member 130 near the support end 210 of the support column 200. By observing and comparing the relative positions of the limiting member 130 and the support end 210 in the first direction, it can be determined whether the size of the support column 200 exceeding the electrostatic adsorption component 300 in the first direction meets the preset size range.

[0117] In some embodiments, when there is only one limiting member 130, the limiting member 130 is used to indicate the maximum size in the preset size range. If the detection component 100 also includes a first roller 170 and a second roller 180, the measuring component 100 can be pushed to move towards the support column 200. If the support column 200 can pass through the space enclosed by the first support member 110, the second support member 120 and the limiting member 130, then the size of the support column 200 exceeding the electrostatic adsorption component 300 in the first direction meets the preset size range. If the support column 200 is blocked by the limiting member 130, then the size of the support column 200 exceeding the electrostatic adsorption component 300 in the first direction does not meet the preset size range.

[0118] In some embodiments, when there is only one limiting member 130, the limiting member 130 is used to indicate the maximum size within a preset size range. If the detection component 100 also includes two guide rails and two sliders, the sliders can be pushed to carry the first support member 110, the second support member 120 and the limiting member 130, and move along the extension direction of the guide rails toward the support column 200. If the support column 200 can pass through the space enclosed by the first support member 110, the second support member 120 and the limiting member 130, then the size of the support column 200 exceeding the electrostatic adsorption component 300 in the first direction meets the preset size range. If the support column 200 is blocked by the limiting member 130, then the size of the support column 200 exceeding the electrostatic adsorption component 300 in the first direction does not meet the preset size range.

[0119] In some embodiments, when there are two limiting members 130, the first limiting member 130 is configured to indicate the maximum size of the support column 200 exceeding the electrostatic adsorption assembly 300 in the first direction, and the second limiting member 130 is configured to indicate the minimum size of the support column 200 exceeding the electrostatic adsorption assembly 300 in the first direction. The measuring assembly 100 can be moved to the limiting member 130 near the support end 210 of the support column 200. By observing and comparing whether the support end 210 is located between the two limiting members 130 in the first direction, it can be determined whether the size of the support column 200 exceeding the electrostatic adsorption assembly 300 in the first direction meets the preset size range.

[0120] In some embodiments, if the detection component 100 further includes an image acquisition component and an analysis component, the measurement component 100 can be moved to a position where the limiting member 130 is close to the support end 210 of the support column 200. Then, the image acquisition component acquires detection images of the limiting member 130 and the support column 200 and sends the detection images to the analysis component. The analysis component can determine the position information of the limiting member 130 and the support column 200 in the detection images respectively, and determine whether the size of the support column 200 in the first direction meets the preset size range based on the position information of the limiting member 130 and the support column 200 in the detection images.

[0121] Since the measurement method in the above embodiments is applied to the transportation and measurement device 500 in the above embodiments, the measurement method in the above embodiments includes all the technical features and technical effects of the measurement component 100, which will not be repeated here.

[0122] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0123] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0124] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0125] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0126] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A measuring component, characterized in that, An application is made in a transportation and measurement device, the transportation and measurement device including an electrostatic adsorption component and a support column, the support column passing through the electrostatic adsorption component along a first direction, the measurement component being configured to measure whether the size of the support column exceeding the size of the electrostatic adsorption component in the first direction meets a preset size range, the support column having a support end and a connecting end arranged opposite to each other in the first direction, the support end being configured to support a product; The measurement component includes: A first support member extends along the first direction, and one end of the first support member near the electrostatic adsorption component can be connected to the electrostatic adsorption component. The second support member is spaced apart from the first support member in a second direction, which is perpendicular to the first direction. One end of the second support member near the electrostatic adsorption component can be connected to the electrostatic adsorption component. The surfaces of the first support member and / or the second support member have size markings. At least one limiting member is detachably connected to the first support member and contacts the second support member, and the installation position of the limiting member on the first support member is determined based on the size marking. The limiting member extends along the second direction and is accessible to the support end. The limiting member is configured to indicate that the support column extends beyond the preset size range of the electrostatic adsorption assembly in the first direction.

2. The measuring component according to claim 1, characterized in that, The first support member has a first elongated hole extending along the first direction, and the first elongated hole penetrates the first support member along the second direction, and the limiting member passes through the first elongated hole; The measurement component further includes: At least one first locking member passes through the first elongated hole and is at least partially located on the side of the limiting member near the connecting end, the first locking member being configured to support and fix the position of the limiting member in the first direction.

3. The measuring component according to claim 1, characterized in that, The first support member has a plurality of first through holes extending through the first support member along the second direction, the plurality of first through holes being arranged along the first direction, and the limiting member passing through one of the first through holes.

4. The measuring component according to any one of claims 1 to 3, characterized in that, The second support member has an elongated groove extending along the first direction, the bottom of the elongated groove being disposed opposite to the first support member, and the end of the limiting member near the second support member abutting against the bottom of the elongated groove.

5. The measuring component according to claim 2, characterized in that, The second support member has a second elongated hole extending along the first direction, and the second elongated hole penetrates the second support member along the second direction; the limiting member also passes through the second elongated hole. The measurement component further includes: At least one second locking member passes through the second elongated hole and is at least partially located on the side of the limiting member near the connecting end, the second locking member being configured to support and fix the position of the limiting member in the first direction.

6. The measuring component according to any one of claims 1 to 3, characterized in that, The preset size range includes a maximum size and a minimum size. There are two limiting members, which are spaced apart in the first direction. The first limiting member is configured to indicate that the support column exceeds the maximum size of the electrostatic adsorption component in the first direction, and the second limiting member is configured to indicate that the support column exceeds the minimum size of the electrostatic adsorption component in the first direction.

7. The measuring component according to any one of claims 1 to 3, characterized in that, The measurement component also includes: The first roller is rotatably connected to one end of the first support member near the electrostatic adsorption component, and the first roller is capable of rolling connection with the electrostatic adsorption component. The first roller is configured to support and drive the first support member to move. The second roller is rotatably connected to one end of the second support member near the electrostatic adsorption component, and the second roller is capable of rolling connection with the electrostatic adsorption component. The second roller is configured to support and drive the second support member to move.

8. The measuring component according to any one of claims 1 to 3, characterized in that, The measurement component also includes: An auxiliary support assembly, connected to the first support member and the second support member and capable of contacting the electrostatic adsorption assembly, is configured to support the first support member and the second support member to prevent the first support member and the second support member from tipping over.

9. A transportation and measuring device, characterized in that, include: An electrostatic adsorption component, which generates electrostatic force to adsorb products; Multiple support columns pass through the electrostatic adsorption assembly along the first direction. Each support column has a support end and a connecting end that are arranged opposite to each other in the first direction. The support end is configured to support the product. A driving device, which is driven to the connecting end, is configured to drive the support column to move along the first direction; The measuring component according to any one of claims 1 to 8 is disposed on the electrostatic adsorption component and configured to measure whether the dimension of the support column exceeding the electrostatic adsorption component in the first direction meets a preset dimension range.

10. A measurement method, characterized in that, The measurement method, applied to the transportation and measurement apparatus of claim 9, comprises: The measuring component of the transport and measuring device is placed adjacent to the support column of the transport and measuring device, such that the limiting member of the measuring component is close to the support end of the support column. By comparing the relative positions of the support end and the limiting member in the first direction, it is determined whether the size of the support column exceeding the electrostatic adsorption component in the first direction meets the preset size range.

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