High-stability autocollimation three-axis angle measurement device and measurement method

Abstract

This application discloses a highly stable self-collimating triaxial angle measuring device and method. The device includes a light source assembly, an optical path assembly, a target assembly, and an imaging assembly. The target assembly includes a target housing, a first plane mirror, a second plane mirror, a target beam splitter, a reference liquid, and a liquid-floating hemispherical base floating in the reference liquid. The first plane mirror is fixedly mounted on the inner wall of the target housing, and the second plane mirror is fixedly mounted on the liquid-floating hemispherical base. The surface of the reference liquid is horizontal. This application utilizes the target assembly to split the emitted laser beam into two, so that one beam carries the pitch and yaw angle information of the object under test, and the other beam carries the roll angle information, thereby realizing the measurement of the triaxial angle of the object under test. At the same time, the reference liquid and the liquid-floating hemispherical base are used to confine the second plane mirror within the target housing of the target assembly and keep it horizontal at all times, so as to adapt to working scenarios with large working distances.

Description

Technical Field

[0001] This application relates to a highly stable autocollimating triaxial angle measuring device and a highly stable autocollimating triaxial angle measuring method, belonging to the field of precision measurement technology. Background Technology

[0002] In the field of precision measurement technology, the combination of autocollimator and circular grating can perform arbitrary line angle measurements; the combination of autocollimation technology and multifaceted prisms can perform surface angle measurements and circular graduation measurements; the maximum working distance ranges from several meters to hundreds of meters; the resolution ranges from 0.1 arcseconds to 0.001 arcseconds. Autocollimation technology has the advantages of being non-contact, having high measurement accuracy, and being easy to use, and has been widely used in the aforementioned fields.

[0003] Traditional autocollimating instruments mainly consist of a light source, a transmission collimating mirror, a beam splitter, and an image sensor, with a plane mirror target placed on the surface of the object being measured. During operation, the light beam emitted from the light source is shaped into parallel light by the transmission collimating mirror and then directed towards the reflecting surface of the plane mirror target. The beam reflected from the plane mirror target surface returns and is ultimately imaged by the image sensor. In this structure, the beam returned from the plane mirror target's reflecting surface can only carry spatial angular information of the object being measured along two orthogonal axes. It cannot calculate the angle of rotation of the object around the direction of light propagation (optical axis), and can only measure the angles of the other two axes, thus limiting its measurement dimensions.

[0004] To address the aforementioned issues, current improved autocollimators generally utilize diffracted light from a grating or polarized beam splitting to measure the rotation angle around the optical axis, thus overcoming the shortcomings of traditional autocollimators. However, in the diffracted light approach, the large divergence angle means that the measurement light may not be captured by the image sensor at longer working distances, hindering the measurement objective. In the polarized beam splitting approach, the reflected light from a fixed plane mirror target is typically used to measure the rotation angle around the optical axis. However, the plane mirror target has limited size; when the target shifts with the object being measured, the reflected light may not be reflected at the target at longer working distances, further complicating the measurement. Summary of the Invention

[0005] This application discloses a highly stable autocollimating triaxial angle measuring device and a highly stable autocollimating triaxial angle measuring method. The high-stability autocollimation triaxial angle measuring device in this application includes a light source assembly, an optical path assembly, a target assembly, and an imaging assembly. The light source assembly is configured to act as a light source to provide an emitted laser beam, and the target assembly is fixedly disposed on the surface of the object to be measured. The target assembly includes a target shell, a first planar reflector, a second planar reflector, a target beam splitter, a reference liquid, and a liquid-floating hemispherical base floating in the reference liquid; the first planar reflector is fixedly disposed on the inner wall of the target shell, the second planar reflector is fixedly disposed on the liquid-floating hemispherical base, and the liquid surface of the reference liquid is a horizontal plane; The emitted laser beam is transmitted through the optical path assembly to the target beam splitter. The first emitted sub-beam transmitted through the target beam splitter is reflected by the first planar mirror and returns along the original path. It is then reflected by the optical path assembly to the imaging assembly. The second emitted sub-beam reflected by the target beam splitter is reflected by the second planar mirror and returns along the original path. It is then reflected by the optical path assembly to the imaging assembly.

[0006] The high-stability self-collimating triaxial angle measurement method in this application is based on the high-stability self-collimating triaxial angle measurement device described in the above-described embodiments, and the method specifically includes: Adjust the position of the object under test so that the imaging position of the imaging component meets the preset imaging position conditions; Based on the translation and / or rotation of the object under test in space, multiple difference parameters between the actual imaging position of the imaging component and the imaging position conditions are obtained. Based on the difference parameters and the attribute parameters of the optical path component, the three-axis angle parameters of the object under test in space are determined.

[0007] The beneficial effects of this application are as follows: The high-stability self-collimating triaxial angle measuring device in this application combines a target assembly with the object under test, splitting the emitted laser beam into two. One emitted sub-beam carries the pitch and yaw angle information of the object under test, while the other emits the roll angle information, thereby achieving the measurement of the three-axis angles of the object under test. Simultaneously, this application ensures measurement accuracy through the amplification effect of the optical lever, and utilizes the reference liquid in the target assembly and the liquid-floating hemispherical base to confine the second plane mirror within the target housing of the target assembly and maintain it horizontally at all times. This allows the second plane mirror to function as a roll angle sensing device for the object under test, and it can move with the object under test to adapt to working scenarios with large working distances. Attached Figure Description

[0008] Figure 1 This is one of the structural schematic diagrams of the high-stability self-collimating triaxial angle measuring device in the embodiments of this application; Figure 2 This is the second schematic diagram of the structure of the high-stability self-collimating triaxial angle measuring device in the embodiments of this application; Figure 3This is the third schematic diagram of the structure of the high-stability self-collimating triaxial angle measuring device in the embodiments of this application; Figure 4 This is the fourth schematic diagram of the structure of the high-stability self-collimating triaxial angle measuring device in the embodiments of this application; Figure 5 This is the fifth schematic diagram of the structure of the high-stability self-collimating triaxial angle measuring device in the embodiments of this application; Figure 6 This is the sixth schematic diagram of the high-stability self-collimating triaxial angle measuring device in the embodiments of this application; Figure 7 This is the seventh schematic diagram of the high-stability self-collimating triaxial angle measuring device in the embodiments of this application; Figure 8 This is the eighth schematic diagram of the high-stability self-collimating triaxial angle measuring device in the embodiments of this application; Figure 9 This is a schematic diagram of the slit shape of the first slit device and the second slit device in the embodiments of this application; Figure 10 This is a flowchart illustrating the highly stable autocollimating triaxial angle measurement method in the embodiments of this application.

[0009] Among them: 10, light source assembly; 11, laser light source; 12, half-wave plate; 13, first laser light source; 14, second laser light source; 15, first beam splitter; 20, optical path assembly; 21, second beam splitter; 22, transmission collimating lens; 23, fourth beam splitter; 24, third plane mirror; 30, target assembly; 31, target housing; 32, first plane mirror; 33, second plane mirror; 34, target beam splitter; 341, first polarizing beam splitter; 342. First dichroic mirror; 35. Reference liquid; 36. Liquid-floating hemispherical base; 37. First slit device; 38. Second slit device; 40. Imaging assembly; 411. First polarizing beam splitter; 412. Third beam splitter; 413. Second dichroic mirror; 42. First image sensor; 43. Second image sensor; 44. First polarizer; 45. Second polarizer; 46. First filter; 47. Second filter; 48. RGB color image sensor. Detailed Implementation

[0010] Please see Figure 1 The high-stability autocollimation triaxial angle measuring device in this application includes a light source assembly 10, an optical path assembly 20, a target assembly 30, and an imaging assembly 40. The light source assembly 10 is configured to act as a light source to provide an emitted laser beam, and the target assembly 30 is fixedly disposed on the surface of the object to be measured. The target assembly 30 includes a target housing 31, a first planar reflector 32, a second planar reflector 33, a target beam splitter 34, a reference liquid 35, and a liquid-floating hemispherical base 36 floating in the reference liquid 35; the first planar reflector 32 is fixedly disposed on the inner wall of the target housing 31, the second planar reflector 33 is fixedly disposed on the liquid-floating hemispherical base 36, and the liquid surface of the reference liquid 35 is a horizontal plane; The emitted laser beam is transmitted through the optical path assembly 20 to the target beam splitter 34. The first emitted sub-beam transmitted through the target beam splitter 34 is reflected by the first plane mirror 32 and returns along the original path. It is then reflected by the optical path assembly 20 to the imaging assembly 40. The second emitted sub-beam reflected by the target beam splitter 34 is reflected by the second plane mirror 33 and returns along the original path. It is then reflected by the optical path assembly 20 to the imaging assembly 40.

[0011] Specifically, in the above embodiments, the number of wavelength types included in the emitted laser beam provided by the light source component 10 varies depending on the laser source used. At the same time, the light source of the light source component 10 is generally a point light source. The imaging component 20 generally uses one or more image sensors. The function of the image sensor is to convert the light signal formed by the received light beam into position information. Furthermore, based on the geometric relationship within the entire high-stability autocollimation triaxial angle measuring device, the triaxial angle of the object under test in space can be calculated based on the above position information to realize the measurement of the triaxial angle.

[0012] For the target assembly 30 equipped with the target beam splitter 34, compared with the current related technology that uses a plane mirror target, the target assembly 30 uses the target beam splitter 31 to split the emitted laser beam into two emitted sub-beams (corresponding to the first emitted sub-beam and the second emitted sub-beam) by the beam splitting effect of transmission and reflection. The first emitted sub-beam is transmitted by the target beam splitter 31 and incident on the first plane mirror 32. After reflection, it returns along the original path and is reflected by the optical path assembly 20 and then incident on the imaging assembly 40 for imaging. With the structural design of the first plane mirror 32 being fixedly mounted on the target housing 31, and the first measuring sub-beam being a beam obtained after the emitted laser beam is transmitted through the target beam splitter 34, it can be seen that the first emitted sub-beam carries two spatial angle information of the object under test, namely the pitch angle and the yaw angle, after being reflected by the first plane mirror 32.

[0013] The second emitted sub-beam is reflected by the target beam splitter 34 and incident on the second plane mirror 33. Since the second plane mirror 33 is fixed on the liquid-floating hemispherical base 36 floating on the surface of the reference liquid 35, the second plane mirror 33 can maintain a parallel state relative to the horizontal plane. Given that the second emitted sub-beam is a beam obtained after the emitted laser beam is reflected by the target beam splitter 34, it can be seen that the second emitted sub-beam carries the spatial angle information of the roll angle of the object under test around the optical axis after being reflected by the second plane mirror 33. Meanwhile, since the second plane mirror 33 is fixed on the liquid-floating hemispherical base 36 that floats on the surface of the reference liquid 35, the second plane mirror 33 can maintain a dynamic or static balance relative to the horizontal plane and will not exceed the size range limited by the target housing 31. Therefore, the path of the second emitted beam is limited by the target assembly 30. Based on this and in conjunction with the optical lever principle, in the high-stability autocollimating triaxial angle measuring device in the above embodiment, the size of the second plane mirror 33 in the target assembly 30 does not need to be excessively increased to achieve the measurement of the triaxial angle of the object under test under the condition of a large working distance.

[0014] In some embodiments, the optical path assembly 20 includes a second beam splitter 21 and a transmission collimator 22, wherein the second beam splitter 21 is configured to transmit the emitted laser beam and reflect the first emitted sub-beam and the second emitted sub-beam. The transmission collimator 22 is configured to collimate the outgoing laser beam so that the outgoing laser beam is incident parallel to the target assembly 30.

[0015] Specifically, regarding the composition of the optical path component 20, considering that the emitted sub-beams are split at the target component 30 using the target beam splitter 34, the optical path component 20, exemplarily, includes a second beam splitter 21 and a transmission collimator 22. The emitted laser beam is transmitted through the second beam splitter 21 and emitted towards the target component 30, while the first emitted sub-beams and the second emitted sub-beams reflected back from the target component 30 are reflected to the imaging component for imaging. In addition, when the emitted laser beam is incident on the target assembly 30, since it is necessary to split the beam into two emitted sub-beams and ensure that the two emitted sub-beams can return to the second beam splitter 21 along the same path, a transmission collimating lens 22 is also provided in the optical path assembly 20. On the one hand, it collimates the emitted sub-beam emitted by the light source assembly 10 into a parallel beam to facilitate subsequent beam splitting at the target assembly 30. On the other hand, it uses its focal length to place the imaging assembly 40 at its focal plane, so that the first emitted sub-beam and the second emitted sub-beam reflected by the target assembly 30 can be accurately focused on the imaging assembly 40 to achieve clear imaging.

[0016] In some embodiments, the light source assembly 10 includes a laser light source 11 and a half-wave plate 12, the laser light source 11 being configured to generate an outgoing laser beam, the outgoing laser beam being processed into a polarization state by the half-wave plate 12 and incident on the optical path assembly 20.

[0017] In some embodiments, the light source assembly 10 includes a first laser source 13, a second laser source 14, and a first beam splitter 15. The first laser source 13 generates a first laser beam with a first wavelength, and the second laser source 14 generates a second laser beam with a second wavelength. Both the first laser beam and the second laser beam are incident on the first beam splitter 15, which is configured to combine the first laser beam and the second laser beam into an output laser beam.

[0018] Specifically, the composition of the light source assembly 10 can generally employ a polarization-type light source or a wavelength-type light source. For example, a polarization-type light source generally includes a laser light source 11 and a half-wave plate 12. The laser light source 11 generates an emitted laser beam, and the half-wave plate 12 processes the emitted laser beam to induce a polarization state, so that a polarizing beam splitter can be used as a target beam splitting device 34 in the target assembly 30 to split the emitted laser beam.

[0019] For wavelength-type light sources, a typical configuration includes a first laser source 13, a second laser source 14, and a first beam splitter 15. The first laser source 13 generates a first laser beam with a first wavelength, and the second laser source 14 generates a second laser beam with a second wavelength. In the following examples, for ease of explanation, the first wavelength corresponds to red light, and the second wavelength corresponds to green light. It should be noted that the colors of the first and second wavelengths vary depending on the specific laser source selected. The red and green colors mentioned above are merely illustrative and should not be construed as limiting. The two sets of laser sources are generally orthogonally arranged. A first beam splitter 15 is positioned at the intersection of the first and second laser beams. The two beams are combined by the beam splitter 15 to form the emitted laser beam generated by the light source assembly 10. This emitted laser beam includes both the first and second wavelength components, allowing for subsequent beam splitting of the emitted laser beam using a dichroic mirror as the target beam splitter 34 in the target assembly 30.

[0020] The composition of the target beam splitter 34 and the imaging component 40 will be described below using several embodiments.

[0021] Example 1: In some implementations, please refer to Figure 2The target beam splitter 34 is a first polarizing beam splitter 341. The imaging assembly 40 includes a second polarizing beam splitter 411, a first image sensor 42, and a second image sensor 43. The first outgoing beam is incident on the imaging assembly 40 and transmitted through the second polarizing beam splitter 411 to the first image sensor 42 for imaging. The second outgoing beam is incident on the imaging assembly 40 and reflected through the second polarizing beam splitter 411 to the second image sensor 43 for imaging.

[0022] Specifically, in this embodiment, the light source assembly 10 includes a laser light source 11 and a half-wave plate 12.

[0023] It should be further explained that: First, by adjusting the position or orientation of the half-wave plate 12, the illumination intensity of the light beams received by the first image sensor 42 and the second image sensor 43 can be adjusted, thereby controlling the light intensity of the light beams received by the two image sensors to be basically the same, avoiding the problem that the position information cannot be obtained because at least one of the two image sensors receives a light beam with too strong an intensity.

[0024] Secondly, when the laser source 11 is on the optical axis of the transmission collimating lens 22, and the surface of the object to be measured on the fixed target assembly 30 is perpendicular to the optical axis of the transmission collimating lens 22, the imaging center point of the first image sensor 42 and the second image sensor 43 is at the center point of their imaging surfaces.

[0025] Third, the first polarizing beam splitter 341 and the second polarizing beam splitter 411 can distinguish the polarization state of the incident beam. The first polarizing beam splitter 341 splits the outgoing laser beam into two sets of outgoing sub-beams, while the second polarizing beam splitter 411 can reflect the returning first outgoing sub-beam to the first image sensor 42 for imaging and reflect the second outgoing beam to the second image sensor 43 for imaging.

[0026] Next, referring to Example 1, we will explain the measurement principle of determining the three-axis angles of the object under test based on the position information determined by the light signal obtained by the imaging component 40.

[0027] First, define the spatial coordinate system for the three-axis angles of the object to be measured. Please refer to [reference needed]. Figure 2 Let the direction to the left along the optical axis be... x The positive axis direction, along the normal to the surface of the reference liquid 37, is downwards. y Establish a right-handed Cartesian coordinate system along the positive axis. z The positive direction of the axis is perpendicular to Figure 2 If the plane faces outwards, then the three axes of the object being measured include the angles around the plane. x Roll angle of the shaft rotating clockwise , around y Yaw angle of the shaft rotating clockwise And around zPitch angle of the axis rotating clockwise Since the target assembly 30 is fixed on the surface of the object to be tested, the target assembly 30 also has the same three-axis angles as the object to be tested (i.e., the three mentioned above).

[0028] Next, when the emitted laser beam is incident on the imaging assembly 40, the distance between the center of the imaged spot and the center of the imaging surface of the first image sensor 42 is determined based on the image formed at the first image sensor 42 after the first emitted sub-beam transmitted through the first polarizing beam splitter 341 is reflected back along the original path by the first planar reflector 32. This distance is generally expressed as an orthogonal decomposition into... as well as The form is two-component. Then, based on geometric relationships and the focal length of the transmission collimating lens 22, we can obtain... as well as With yaw angle and pitch angle The relationship between them is shown in Formula 1.

[0029] ... Formula 1 in This is the focal length of the transmission collimating lens 22.

[0030] Simultaneously, when the emitted laser beam is incident on the imaging assembly 40, the distance between the center of the imaged spot and the center of the imaging surface of the second image sensor 43 is determined based on the image formed at the second image sensor 43 after the second emitted sub-beam reflected by the first polarizing beam splitter 341 returns along the original path after being reflected by the second planar reflector 33. Because the first polarizing beam splitter 341 rotates along the three axes of space with the object under test, while the surface of the second plane mirror 33 mounted on the liquid-floating hemispherical base 36 remains parallel to the horizontal plane, the second outgoing beam reflected by the second plane mirror 33, when reflected again by the first polarizing beam splitter 341, will produce an interference with the original beam. The angle deflection causes the light beam to converge on the second image sensor 43, resulting in the aforementioned deflection distance. ,So , And the focal length of the transmission collimating lens 22 There is also a geometric relationship between them, and the deflection angle... With roll angle Yaw angle and pitch angle There is a corresponding relationship among the three, so at the yaw angle and pitch angle Already obtained, and Given the measured values, the roll angle can be calculated. Thus, the measurement of the three-axis angles of the object under test was completed.

[0031] Example 2: In some implementations, please refer to Figure 3 The target beam splitter 34 is a first polarizing beam splitter 341. The imaging assembly 40 includes a third beam splitter 412, a first polarizer 44, a first image sensor 42, a second polarizer 45, and a second image sensor 43. The first outgoing beam is incident on the imaging assembly 40, transmitted through the third beam splitter 412, processed by the first polarizer 44, and then incident on the first image sensor 42 for imaging. The second outgoing beam is incident on the imaging assembly 40, reflected by the third beam splitter 412, processed by the second polarizer 45, and then incident on the second image sensor 43 for imaging.

[0032] Specifically, in this embodiment, the light source assembly 10 also includes a laser light source 11 and a half-wave plate 12.

[0033] The difference between Embodiment 2 and Embodiment 1 is that the imaging component 40 uses a third beam splitter 412, a first polarizer 44, and a second polarizer 45 instead of the second polarizing beam splitter 411. The first polarizer 44 and the second polarizer 45 correspond to different light polarization states. The overall imaging process is similar to Embodiment 1, except that a common beam splitter is used to split the first and second outgoing beams that return along the original path after reflection, and two polarizers are used to further filter the polarization state of the light. This improves the stability of the optical path, reduces the difficulty of device debugging, significantly reduces the manufacturing cost of the device, and also significantly improves the ability of the optical path within the device to resist ambient light interference.

[0034] According to Embodiment 2, the measurement principle for determining the three-axis angles of the object under test based on the position information determined by the light signal acquired by the imaging component 40 is the same as that in Embodiment 1, and will not be repeated here.

[0035] Example 3: In some implementations, please refer to Figure 4 The target beam splitter 34 is a first dichroic mirror 342. The first emitted sub-beam transmitted through the first dichroic mirror 342 has a first wavelength, and the second emitted sub-beam reflected by the first dichroic mirror 342 has a second wavelength. The imaging assembly 40 includes a second dichroic mirror 413, a first image sensor 42, and a second image sensor 43. A first outgoing light beam is incident on the imaging assembly 40 and transmitted through the second dichroic mirror 413 to the first image sensor 42 for imaging. A second outgoing light beam is incident on the imaging assembly 40 and reflected through the second dichroic mirror 413 to the second image sensor 43 for imaging.

[0036] Specifically, in this embodiment, the light source assembly 10 includes a first laser light source 13, a second laser light source 14, and a first beam splitter 15.

[0037] Correspondingly, the target beam splitter 34 is adjusted to a first dichroic mirror 342, and the beam splitter in the imaging assembly 40 is adjusted to a second dichroic mirror 413. Unlike Embodiments 1 and 2, when the first and second emitted sub-beams are reflected at the target assembly 30 and return along their original path to the imaging assembly 40, they are split by the second dichroic mirror 412. In Embodiment 3, based on the light source assembly 10 and the first dichroic mirror 342, the first emitted sub-beam has a first wavelength and is red light, resulting in a red spot color at the first image sensor 42; the second emitted sub-beam has a second wavelength and is green light, resulting in a green spot color at the second image sensor 43.

[0038] Compared to Example 1, this example uses wavelength for differentiation, which makes it easier to distinguish the light spots corresponding to different beams with the naked eye than to differentiate by polarization state, thereby reducing the difficulty of device debugging.

[0039] According to Embodiment 3, the measurement principle for determining the three-axis angle of the object under test based on the position information determined by the light signal obtained by the imaging component 40 is the same as that in Embodiments 1 and 2, and will not be repeated here.

[0040] Example 4, in some implementations, please refer to Figure 5 The target beam splitter 34 is a first dichroic mirror 342. The first emitted sub-beam transmitted through the first dichroic mirror 342 has a first wavelength, and the second emitted sub-beam reflected by the first dichroic mirror 342 has a second wavelength. The imaging assembly 40 includes a third beam splitter 412, a first filter 46, a first image sensor 42, a second filter 47, and a second image sensor 43. A first outgoing beam is incident on the imaging assembly 40, transmitted through the third beam splitter 412, processed by the first filter 46, and then incident on the first image sensor 42 for imaging. A second outgoing beam is incident on the imaging assembly 40, reflected by the third beam splitter 412, processed by the second filter 47, and then incident on the second image sensor 43 for imaging.

[0041] Specifically, in this embodiment, the light source assembly 10 includes a first laser light source 13, a second laser light source 14, and a first beam splitter 15.

[0042] The difference between Embodiment 4 and Embodiment 3 is that the imaging component 40 uses a third beam splitter 412, a first filter 46, and a second filter 47 instead of a second dichroic mirror 413. The first filter 46 and the second filter 47 correspond to different wavelengths: the first filter 46 corresponds to the first wavelength (red filter), and the second filter 47 corresponds to the second wavelength (green filter). The overall imaging process is similar to Embodiment 3, except that a common beam splitter is used to split the first and second outgoing beams that return along the original path after reflection, and two filters are used to further filter the wavelengths of the outgoing beams. This improves the stability of the optical path, reduces the difficulty of device debugging, significantly reduces the manufacturing cost of the device, and also significantly improves the ability of the optical path within the device to resist ambient light interference.

[0043] According to Embodiment 4, the measurement principle for determining the three-axis angles of the object under test based on the position information determined by the light signal acquired by the imaging component 40 is the same as that in Embodiment 3, and will not be repeated here.

[0044] Example 5: In some implementations, please refer to Figure 6 The target beam splitter 34 is a first dichroic mirror 342. The first emitted sub-beam transmitted through the first dichroic mirror 342 has a first wavelength, and the second emitted sub-beam reflected by the first dichroic mirror 342 has a second wavelength. The imaging component 40 includes an RGB color image sensor 48.

[0045] Specifically, in this embodiment, the light source assembly 10 includes a first laser light source 13, a second laser light source 14, and a first beam splitter 15.

[0046] The difference between Embodiment 5 and Embodiments 3 and 4 is that the imaging component 40 uses a single RGB color image sensor 48. Therefore, both the first and second outgoing beams are imaged on the RGB color image sensor 26 after returning along the original optical path and being reflected by the first beam splitter 41. The first outgoing beam is imaged as a red spot on the RGB color image sensor 48, and the second outgoing beam is imaged as a green spot on the RGB color image sensor 48.

[0047] Compared to Embodiment 4, the imaging component 40 in this embodiment is served by a single RGB color image sensor 48, which significantly improves the integration level of the device, reduces the size of the device, enables the device to adapt to narrow or compact working space conditions, and the use of a single sensor makes it easier to maintain coaxial accuracy with the transmission collimator 22.

[0048] According to Embodiment 5, the measurement principle for determining the three-axis angle of the object under test based on the position information determined by the light signal obtained by the imaging component 40 is similar to that in the previous embodiment. The only difference is that the position information of the corresponding light spots of the two sets of outgoing light beams are obtained on the imaging surface of the same RGB color image sensor 48, which will not be described in detail here.

[0049] It should also be noted that the combination of the light source component 10, the target beam splitter 34, and the imaging component 40 is not limited to the above embodiments, and can be freely combined according to the actual situation.

[0050] In addition, see other examples. Figure 7 For the optical path assembly 20, in order to improve the measurement accuracy, the optical path assembly 20 also includes a fourth beam splitter 23 and a third plane mirror 24. A portion of the outgoing sub-beam is transmitted through the fourth beam splitter 23 and incident on the target assembly 30 to form a first outgoing sub-beam and a second outgoing sub-beam. At the same time, a portion is reflected at the third plane mirror 24 to form a reference beam and incident on the third plane mirror 24. Then, the reference beam is reflected by the third plane mirror 24 and returns along the original path, and is reflected by the second beam splitter 21 to the imaging assembly 40 for imaging.

[0051] Taking Example 1 as an example, based on Example 1, an optical path assembly 20 including a second beam splitter 21, a transmission collimating lens 22, a fourth beam splitter 23, and a third plane mirror 24 is used. The measurement principle is as follows: First, define the spatial coordinate system for the three-axis angles of the object to be measured. The specific definition method is the same as the implementation method described above. Please refer to [link / reference needed] for details. Figure 2 The above-described implementation methods will not be repeated here.

[0052] Next, in the example above, when the reference beam is incident on the imaging component 40 according to the optical path described in the above embodiment, the reference beam is split into a first imaging sub-beam and a second imaging sub-beam by the second polarizing beam splitter 411. The first imaging sub-beam is the portion of the reference beam transmitted through the second polarizing beam splitter 411, which is incident on the first image sensor 42 for imaging. The second imaging sub-beam is the portion of the reference beam reflected by the second polarizing beam splitter 411, which is incident on the second image sensor 43 for imaging. Based on the imaging of the first imaging sub-beam at the first image sensor 42, the distance between the center of the imaged spot and the center of the imaging surface of the first image sensor 42 is determined, which is generally represented by orthogonal decomposition into... as well as The two-component form, along with the change in the optical path, also allows us to obtain the change in the direction of the first imaging sub-beam due to laser beam drift, which is generally manifested along... y shaft and z Axis orthogonal decomposition into as well as The two-component form. Similarly, based on the imaging of the second imaging sub-beam at the second image sensor 43, the distance between the center of the imaged spot and the center of the imaging surface of the second image sensor 43 is determined. Meanwhile, based on the laser source 11, the change in direction of the second imaging sub-beam due to laser beam drift can be obtained. Therefore, the above quantities should satisfy the geometric relationship shown in Formula 2: ... Formula 2 in This is the focal length of the transmission collimating lens 22.

[0053] Similarly, based on the imaging of the first outgoing beam returning along the original path at the first image sensor 42, the distance between the center of the imaged spot and the center of the imaging surface of the first image sensor 42 is determined, which is generally represented by orthogonal decomposition into as well as The two-component form, along with the change in the optical path, also allows us to obtain the change in direction of the first emitted beam due to laser beam drift, which is generally expressed as along... y shaft and z Axis orthogonal decomposition into as well as Given a two-component form, the quantities mentioned above should satisfy the geometric relationship shown in Formula 3: ... Formula 3 Based on Formulas 2 and 3, the yaw angle of the object under test can be calculated using the measured quantities and geometric relationships. and pitch angle .

[0054] Furthermore, based on the imaging of the second emitted beam at the second image sensor 43, the distance between the center of the imaged spot and the center of the imaging surface of the second image sensor 43 is determined. Furthermore, based on the change in the optical path, the change in the direction of the third imaging sub-beam caused by the laser beam drift can also be obtained. Furthermore, since the third plane mirror 35 remains parallel to the horizontal plane under the influence of the reference liquid 37 and the liquid-floating hemispherical base 38, the light beam reflected by the third plane mirror 35 and then reflected by the first polarizing beam splitter 311 will produce a deflection angle. Then the deflection angle and the change in direction Satisfying the geometric relationship shown in Formula 4: ... Formula 4 Furthermore, based on spatial geometric relationships, the focal length of the transmission collimating lens 22 For parameters, and deflection angle There is also a corresponding relationship between them.

[0055] Based on the focal length of the transmission collimating lens 22 The above as well as The deflection angle can then be calculated. The deflection angle can be determined based on spatial geometric relationships. 'With roll angle Yaw angle and pitch angle There is a corresponding relationship among the three, at the yaw angle. and pitch angle Given a fixed value, based on the deflection angle The roll angle can then be calculated. This completes the measurement of the three-axis angles of the object under test.

[0056] In other embodiments, when the optical path assembly 20 includes a second beam splitter 21, a transmission collimating lens 22, a fourth beam splitter 23, and a third plane mirror 24, the corresponding triaxial angle measurement principle is similar to or the same as the measurement principle corresponding to Embodiment 1. The only difference is the color of the imaging spot and / or the imaging device, which will not be elaborated here.

[0057] In addition, see other examples. Figure 8 The target assembly 30 also includes a first slit device 37 and a second slit device 38, wherein the slit of the first slit device 37 and the slit of the second slit device 38 have different shapes. The first slit device 37 is disposed on the mirror surface of the first planar reflector 32, and the second slit device 38 is disposed on the mirror surface of the second planar reflector 33.

[0058] Specifically, to distinguish between the images corresponding to the first emitted beam and the images corresponding to the second emitted beam, for example, a first slit device 37 is provided on the mirror surface of the first plane mirror 32, and a second slit device 38 is provided on the mirror surface of the second plane mirror 33, and the slit shapes of the two sets of slit devices are different. Regarding the slit shapes of the two slit devices, selection is generally based on factors such as high distinguishability, ease of identification, and ease of processing. For example, please refer to... Figure 9 The slit shape of the first slit device 37 is two line segments that are orthogonal cross-shaped and bisected by each other, while the slit shape of the second slit device 38 is two line segments that are intersecting and bisected by each other at an angle of 60°. The above two slit shapes are simple in structure and easy to process and manufacture.

[0059] In this way, the spot of the first emitted beam at the imaging assembly 40 is affected by the first slit device 37, exhibiting the slit shape of the first slit device 37; similarly, the spot of the second emitted beam at the imaging assembly 40 is affected by the second slit device 38, exhibiting the slit shape of the second slit device 38. Furthermore, if the optical path assembly 20 includes a second beam splitter 21, a transmission collimating lens 22, a fourth beam splitter 23, and a third plane mirror 24, since the mirror surface of the third plane mirror 24 does not have a slit device, the spot of the reference beam at the imaging assembly 40 is not affected by the slits and maintains its existing shape. In summary, when determining the positional difference information based on the spots corresponding to the first emitted beam, the second emitted beam, or even the reference beam, the shape of the spot can directly determine which of the three beams—the reference beam, the first emitted beam, or the second emitted beam—it corresponds to.

[0060] Please see Figure 10 The high-stability autocollimation triaxial angle measurement method in this application is based on the high-stability autocollimation triaxial angle measurement device described in the above embodiments, and the method specifically includes: Step 01: Adjust the position of the object to be measured so that the imaging position of the imaging component 40 meets the preset imaging position conditions. Step 02: Based on the translation and / or rotation of the object under test in space, obtain multiple difference parameters between the actual imaging position of the imaging component 40 and the imaging position conditions; Step 03: Determine the three-axis angle parameters of the object under test in space based on the difference parameters and the attribute parameters of the optical path component 20.

[0061] Specifically, the process of measuring the three-axis angle parameters of the object under test in space using the highly stable self-collimating triaxial angle measuring device based on the above embodiments generally includes three parts.

[0062] First, the position of the object to be measured needs to be adjusted. This process involves zeroing the imaging position of each incident beam in the imaging component 40 so that the imaging position of each incident beam can meet the preset imaging position conditions.

[0063] After the imaging position is zeroed, the imaging position of each beam at the imaging component 40 shifts relative to the imaging position conditions described above due to the translation and / or rotation of the object under test in space. According to the measurement principle in the above embodiment, the sensor in the imaging component 40 is used to measure the shift and obtain multiple difference parameters.

[0064] Finally, based on the measurement principle described above, and combining the measured difference parameters with the focal length of the transmission collimating lens 22, the solution is performed using the geometric relationships in space, thus obtaining the three-axis angle parameters of the object under test in space.

[0065] Next, based on the above five sets of embodiments, the specific execution process of the high-stability autocollimation triaxial angle measurement method in the embodiments of this application will be described.

[0066] Example 1-1: In some embodiments, when the light source assembly 10 includes a laser light source 11 and a half-wave plate 12, the target beam splitter 34 is a first polarizing beam splitter 341, the imaging assembly 40 includes a second polarizing beam splitter 411, a first image sensor 42 and a second image sensor 43, and the optical path assembly 20 includes a transmission collimating lens 22, step 01 includes: With the laser light source 11 lit, the position of the object under test is adjusted so that the imaging positions of the first image sensor 42 and the second image sensor 43 satisfy the imaging position conditions. The imaging position conditions include: the center of the light spot received by the first image sensor 42 is located at the center of the first image sensor 42, and the center of the light spot received by the second image sensor 43 is located at the center of the second image sensor 43; and Adjust the fast axis direction of the half-wave plate 12 so that the brightness of the light spot received by the first image sensor 42 is consistent with that of the light spot received by the first image sensor 42. Step 02 includes: Based on the translation and / or rotation of the object under test in space, a first offset between the imaging position of the first image sensor 42 and the center of the first image sensor 42, and a second offset between the imaging position of the second image sensor 43 and the center of the second image sensor 43 are obtained. The difference parameters include the first offset and the second offset; Step 03 includes: Based on the first offset and the focal length of the transmission collimating lens 22, the first and second orientation angles of the object under test in space are determined. The first direction angle is the angle of rotation around the first coordinate axis in a clockwise direction, and the second direction angle is the angle of rotation around the second coordinate axis in a clockwise direction. The first coordinate axis, the second coordinate axis, and the third coordinate axis form a right-handed system in space. The first coordinate axis is along the normal direction of the liquid surface of the reference liquid 35 in the target assembly 30, and the third coordinate axis is along the optical axis direction of the transmission collimating lens 22. Based on the first orientation angle, the second orientation angle, the second offset, and the focal length of the transmission collimating lens 22, the third orientation angle of the object under test in space is determined. The third coordinate angle is the angle of rotation in a clockwise direction around the third coordinate axis.

[0067] Specifically, Example 1-1 is a high-stability autocollimation triaxial angle measurement method based on the high-stability autocollimation triaxial angle measurement device in Example 1. The execution process is described in the following exemplary description.

[0068] First, the imaging position is zeroed. Specifically, the target assembly 30 is fixed to the surface of the object under test and the laser source 11 is turned on. Then, the position of the object under test is adjusted until the center of the imaging spot on the imaging surface of the first image sensor 42 coincides with the center of the imaging surface, and the center of the imaging spot on the imaging surface of the second image sensor 43 coincides with the center of the imaging surface. At this time, the reflecting surface of the second planar reflector 33 in the target assembly 30 is parallel to the exit surface of the first polarizing beam splitter 341.

[0069] In addition to zeroing the imaging position, it is also necessary to control the light intensity received by the first image sensor 42 and the second image sensor 43. Specifically, after the laser source 11 is lit, the brightness of the light spots on the imaging surfaces of the first image sensor 42 and the second image sensor 43 is observed at any time. If there is a significant difference in brightness between the two, the brightness difference between them is controlled by adjusting the fast axis direction of the half-wave plate 12. The goal is to keep the brightness of the light spots on the imaging surfaces of the first image sensor 42 and the second image sensor 43 basically consistent.

[0070] Next, after zeroing the imaging position, the measurement can begin. Based on the measurement principle described in the above embodiment, as the target assembly 30 translates and / or rotates in space with the object under test, the following two sets of offsets are measured: One method is to determine the distance between the center of the imaged spot and the center of the imaging surface of the first image sensor 42 based on the imaging of the first emitted beam at the first image sensor 42. as well as (Corresponding to the first offset); Secondly, the distance between the center of the imaged spot and the center of the imaging surface of the second image sensor 43 is determined based on the imaging of the second emitted beam at the second image sensor 43. (Corresponding to the second offset).

[0071] Based on the aforementioned measured offsets and the measurement principle described in the above embodiments, and according to the focal length of the transmission collimating lens 22... , as well as It can determine the yaw angle of the object being measured. and pitch angle Then, based further on the focal length of the transmission collimating lens 22... , And the yaw angle just obtained and pitch angle It can determine the roll angle of the object being measured. This completes the measurement of the three-axis angles of the object at a certain location in space. Furthermore, along the path of the object... z When the axis is translated, the above measurement and calculation process can be repeated to obtain the position of the object under test. z The triaxial angle information at different positions on the axis enables the measurement of the triaxial angle parameters of the object under test in space.

[0072] Example 2-1: In some embodiments, when the light source assembly 10 includes a laser light source 11 and a half-wave plate 12, the target beam splitter 34 is a first polarizing beam splitter 341, the imaging assembly 40 includes a third beam splitter 412, a first polarizer 44, a first image sensor 42, a second polarizer 45, and a second image sensor 43, and the optical path assembly 20 includes a transmission collimating lens 22, step 01 includes: With the laser light source 11 lit, the position of the object under test is adjusted so that the imaging positions of the first image sensor 42 and the second image sensor 43 satisfy the imaging position conditions. The imaging position conditions include: the center of the light spot received by the first image sensor 42 is located at the center of the first image sensor 42, and the center of the light spot received by the second image sensor 43 is located at the center of the second image sensor 43; Adjust the fast axis direction of the half-wave plate 12 so that the brightness of the light spot received by the first image sensor 42 is consistent with that of the light spot received by the first image sensor 42. Adjust the position of the first polarizer 44 so that the brightness of the light spot received by the first image sensor 42 reaches its maximum; The position of the second polarizer 45 is adjusted so that the brightness of the light spot received by the second image sensor 43 reaches the maximum and the second polarizer 45 is perpendicular to the first polarizer 44. Step 02 includes: Based on the translation and / or rotation of the object under test in space, a first offset between the imaging position of the first image sensor 42 and the center of the first image sensor 42, and a second offset between the imaging position of the second image sensor 43 and the center of the second image sensor 43 are obtained, wherein the difference parameters include the first offset and the second offset. Step 03 includes: Based on the first offset and the focal length of the transmission collimating lens 22, the first and second orientation angles of the object under test in space are determined. The first direction angle is the angle of rotation around the first coordinate axis in a clockwise direction, and the second direction angle is the angle of rotation around the second coordinate axis in a clockwise direction. The first coordinate axis, the second coordinate axis, and the third coordinate axis form a right-handed system in space. The first coordinate axis is along the normal direction of the liquid surface of the reference liquid 35 in the target assembly 30, and the third coordinate axis is along the optical axis direction of the transmission collimating lens 22. Based on the first orientation angle, the second orientation angle, the second offset, and the focal length of the transmission collimating lens 22, the third orientation angle of the object under test in space is determined. The third coordinate angle is the angle of rotation in a clockwise direction around the third coordinate axis.

[0073] Specifically, Example 2-1 is a high-stability autocollimation triaxial angle measurement method based on the high-stability autocollimation triaxial angle measurement device in Example 2. The execution process is described in the following exemplary description.

[0074] First, the imaging position is zeroed. Specifically, the target assembly 30 is fixed to the surface of the object under test and the laser source 11 is turned on. Then, the position of the object under test is adjusted until the center of the imaging spot on the imaging surface of the first image sensor 42 coincides with the center of the imaging surface, and the center of the imaging spot on the imaging surface of the second image sensor 43 coincides with the center of the imaging surface. At this time, the reflecting surface of the second planar reflector 33 in the target assembly 30 is parallel to the exit surface of the first polarizing beam splitter 341.

[0075] In addition to zeroing the imaging position, it is also necessary to control the light intensity received by the first image sensor 42 and the second image sensor 43. Specifically, after the laser source 11 is lit, the brightness of the light spots on the imaging surfaces of the first image sensor 42 and the second image sensor 43 is observed at any time. If there is a significant difference in brightness between the two, the brightness difference between them is controlled by adjusting the fast axis direction of the half-wave plate 12. The goal is to keep the brightness of the light spots on the imaging surfaces of the first image sensor 42 and the second image sensor 43 basically consistent.

[0076] Furthermore, while zeroing, the positions of the first polarizer 44 and the second polarizer 45 can also be determined by position adjustment. Specifically, when the first laser source 13 and the second laser source 14 are lit, the position of the first polarizer 44 is adjusted so that its mirror surface is parallel to the exit surface of the transmitted light in the third beam splitter 412; the position of the second polarizer 45 is adjusted so that it is parallel to the exit surface of the reflected light in the third beam splitter 412 and perpendicular to the first polarizer 44. This ensures the effective polarization state filtering of the first and second emitted sub-beams by the two sets of polarizers.

[0077] Next, after zeroing the imaging position, the measurement can begin. Based on the measurement principle described in the above embodiment, as the target assembly 30 translates and / or rotates in space with the object under test, the following two sets of offsets are measured: One method is to determine the distance between the center of the imaged spot and the center of the imaging surface of the first image sensor 42 based on the imaging of the first emitted beam at the first image sensor 42. as well as (Corresponding to the first offset); Secondly, the distance between the center of the imaged spot and the center of the imaging surface of the second image sensor 43 is determined based on the imaging of the second emitted beam at the second image sensor 43. (Corresponding to the second offset).

[0078] Based on the aforementioned measured offsets and the measurement principle described in the above embodiments, and according to the focal length of the transmission collimating lens 22... , as well as It can determine the yaw angle of the object being measured. and pitch angle Then, based further on the focal length of the transmission collimating lens 22... , And the yaw angle just obtained and pitch angle It can determine the roll angle of the object being measured. This completes the measurement of the three-axis angles of the object at a certain location in space. Furthermore, along the path of the object... z When the axis is translated, the above measurement and calculation process can be repeated to obtain the position of the object under test. z The triaxial angle information at different positions on the axis enables the measurement of the triaxial angle parameters of the object under test in space.

[0079] Example 3-1: In some embodiments, when the light source assembly 10 includes a first laser light source 13, a second laser light source 14, and a first beam splitter 15, the target beam splitter 34 is a first dichroic mirror 342, the imaging assembly 40 includes a second dichroic mirror 413, a first image sensor 42, and a second image sensor 43, and the optical path assembly 20 includes a transmissive collimating mirror 22, step 01 includes: With the first laser source 13 and the second laser source 14 illuminated, the position of the object under test is adjusted so that the first wavelength imaging position of the first image sensor 42 and the second wavelength imaging position of the second image sensor 43 satisfy the imaging position condition. The imaging position conditions include: the center of the light spot of the first wavelength received by the first image sensor 42 is located at the center of the first image sensor 42, and the center of the light spot of the second wavelength received by the second image sensor 43 is located at the center of the second image sensor 43. Step 02 includes: Based on the translation and / or rotation of the object under test in space, a first offset between the imaging position of the first image sensor 42 and the center of the first image sensor 42, and a second offset between the imaging position of the second image sensor 43 and the center of the second image sensor 43 are obtained. The difference parameters include the first offset and the second offset; Step 03 includes: Based on the first offset and the focal length of the transmission collimating lens 22, the first and second orientation angles of the object under test in space are determined. The first direction angle is the angle of rotation around the first coordinate axis in a clockwise direction, and the second direction angle is the angle of rotation around the second coordinate axis in a clockwise direction. The first coordinate axis, the second coordinate axis, and the third coordinate axis form a right-handed system in space. The first coordinate axis is along the normal direction of the liquid surface of the reference liquid 35 in the target assembly 30, and the third coordinate axis is along the optical axis direction of the transmission collimating lens 22. Based on the first orientation angle, the second orientation angle, the second offset, and the focal length of the transmission collimating lens 22, the third orientation angle of the object under test in space is determined. The third coordinate angle is the angle of rotation in a clockwise direction around the third coordinate axis.

[0080] Specifically, Example 3-1 is a high-stability autocollimation triaxial angle measurement method based on the high-stability autocollimation triaxial angle measurement device in Example 3. The execution process is described in the following exemplary description.

[0081] First, the imaging position is zeroed. Specifically, the target assembly 30 is fixed to the surface of the object to be tested, and the first laser source 13 and the second laser source 14 are illuminated. Then, the position of the object to be tested is adjusted until the center of the red imaging spot on the imaging surface of the first image sensor 42 coincides with the center of the imaging surface, and the center of the green imaging spot on the imaging surface of the second image sensor 43 coincides with the center of the imaging surface. At this time, the reflecting surface of the second planar reflector 33 in the target assembly 30 is parallel to the exiting surface of the first dichroic mirror 342.

[0082] Next, after zeroing the imaging position, the measurement can begin. Based on the measurement principle described in the above embodiment, as the target assembly 30 translates and / or rotates in space with the object under test, the following two sets of offsets are measured: One method is to determine the distance between the center of the red spot in the image and the center of the imaging surface of the first image sensor 42 based on the red image formed by the first emitted beam at the first image sensor 42. as well as (Corresponding to the first offset); Secondly, based on the green image formed by the second emitted beam at the second image sensor 43, the distance between the center of the green spot and the center of the imaging surface of the second image sensor 43 is determined. (Corresponding to the second offset).

[0083] Based on the aforementioned measured offsets and the measurement principle described in the above embodiments, and according to the focal length of the transmission collimating lens 22... , as well as It can determine the yaw angle of the object being measured. and pitch angle Then, based further on the focal length of the transmission collimating lens 22... , And the yaw angle just obtained and pitch angle It can determine the roll angle of the object being measured. This completes the measurement of the three-axis angles of the object at a certain location in space. Furthermore, along the path of the object... z When the axis is translated, the above measurement and calculation process can be repeated to obtain the position of the object under test. z The triaxial angle information at different positions on the axis enables the measurement of the triaxial angle parameters of the object under test in space.

[0084] Example 4-1: In some embodiments, when the light source assembly 10 includes a first laser light source 13, a second laser light source 14, and a first beam splitter 15, the target beam splitter 34 is a first dichroic mirror 342, the imaging assembly 40 includes a third beam splitter 412, a first filter 46, a first image sensor 42, a second filter 47, and a second image sensor 43, and the optical path assembly 20 includes a transmissive collimating lens 22, step 01 includes: With the first laser source 13 and the second laser source 14 illuminated, the position of the object under test is adjusted so that the first wavelength imaging position of the first image sensor 42 and the second wavelength imaging position of the second image sensor 43 satisfy the imaging position condition. The imaging position conditions include: the center of the light spot of the first wavelength received by the first image sensor 42 is located at the center of the first image sensor 42, and the center of the light spot of the second wavelength received by the second image sensor 43 is located at the center of the second image sensor 43. Adjust the position of the first filter 46 so that it is parallel to the exit surface of the transmitted light in the third beam splitter 412; and Adjust the position of the second filter 47 so that the second filter 47 is parallel to the exit surface of the reflected light in the third beam splitter 412 and perpendicular to the first filter 46; Step 02 includes: Based on the translation and / or rotation of the object under test in space, a first offset between the imaging position of the first image sensor 42 and the center of the first image sensor 42, and a second offset between the imaging position of the second image sensor 43 and the center of the second image sensor 43 are obtained. The difference parameters include the first offset and the second offset; Step 03 includes: Based on the first offset and the focal length of the transmission collimating lens 22, the first and second orientation angles of the object under test in space are determined. The first direction angle is the angle of rotation around the first coordinate axis in a clockwise direction, and the second direction angle is the angle of rotation around the second coordinate axis in a clockwise direction. The first coordinate axis, the second coordinate axis, and the third coordinate axis form a right-handed system in space. The first coordinate axis is along the normal direction of the liquid surface of the reference liquid 35 in the target assembly 30, and the third coordinate axis is along the optical axis direction of the transmission collimating lens 22. Based on the first orientation angle, the second orientation angle, the second offset, and the focal length of the transmission collimating lens 22, the third orientation angle of the object under test in space is determined. The third coordinate angle is the angle of rotation in a clockwise direction around the third coordinate axis.

[0085] Specifically, Example 4-1 is a high-stability autocollimation triaxial angle measurement method based on the high-stability autocollimation triaxial angle measurement device in Example 4. The execution process is described in the following exemplary description.

[0086] First, the imaging position is zeroed. Specifically, the target assembly 30 is fixed to the surface of the object under test, and the first laser source 13 and the second laser source 14 are illuminated. Then, the position of the object under test is adjusted until the center of the red imaging spot on the imaging surface of the first image sensor 42 coincides with the center of the imaging surface, and the center of the green imaging spot on the imaging surface of the second image sensor 43 coincides with the center of the imaging surface. At this time, the reflecting surface of the second planar reflector 33 in the target assembly 30 is parallel to the exiting surface of the first dichroic mirror 342.

[0087] Furthermore, while zeroing, the positions of the first filter 46 and the second filter 47 can also be determined by position adjustment. Specifically, when the first laser source 13 and the second laser source 14 are lit, the position of the first filter 46 is adjusted so that its mirror surface is parallel to the exit surface of the transmitted light in the third beam splitter 412; the position of the second filter 47 is adjusted so that it is parallel to the exit surface of the reflected light in the third beam splitter 412 and perpendicular to the first filter 46. This ensures the wavelength selection effect of the two sets of filters on the first and second emitted sub-beams.

[0088] Next, after zeroing the imaging position, the measurement can begin. Based on the measurement principle described in the above embodiment, as the target assembly 30 translates and / or rotates in space with the object under test, the following two sets of offsets are measured: One method is to determine the distance between the center of the imaged spot and the center of the imaging surface of the first image sensor 42 based on the red image formed by the first emitted beam at the first image sensor 42. as well as (Corresponding to the first offset); Secondly, the distance between the center of the imaged spot and the center of the imaging surface of the second image sensor 43 is determined based on the green image formed by the second emitted beam at the second image sensor 43. (Corresponding to the second offset).

[0089] Based on the aforementioned measured offsets and the measurement principle described in the above embodiments, and according to the focal length of the transmission collimating lens 22... , as well as It can determine the yaw angle of the object being measured. and pitch angle Then, based further on the focal length of the transmission collimating lens 22... , And the yaw angle just obtained and pitch angle It can determine the roll angle of the object being measured. This completes the measurement of the three-axis angles of the object at a certain location in space. Furthermore, along the path of the object... z When the axis is translated, the above measurement and calculation process can be repeated to obtain the position of the object under test. z The triaxial angle information at different positions on the axis enables the measurement of the triaxial angle parameters of the object under test in space.

[0090] Example 5-1: In some embodiments, when the light source assembly 10 includes a first laser light source 13, a second laser light source 14, and a first beam splitter 15, the target beam splitter 34 is a first dichroic mirror 342, the imaging assembly 40 is an RGB color image sensor 48, and the optical path assembly 20 includes a transmissive collimating lens 22, step 01 includes: With the first laser source 13 and the second laser source 14 illuminated, the position of the object under test is adjusted so that the first wavelength imaging position and the second wavelength imaging position of the RGB color image sensor 48 meet the imaging position conditions. The imaging position conditions include: the center of the first wavelength light spot received by the RGB color image sensor 48 is located at the center of the RGB color image sensor 48, and the center of the second wavelength light spot received by the RGB color image sensor 48 is located at the center of the RGB color image sensor 48. Step 02 includes: Based on the translation and / or rotation of the object under test in space, the first offset between the first wavelength imaging position of the RGB color image sensor 48 and the center of the RGB color image sensor 48, and the second offset between the second wavelength imaging position of the RGB color image sensor 48 and the center of the RGB color image sensor 48 are obtained. The difference parameters include the first offset and the second offset; Step 03 includes: Based on the first offset and the focal length of the transmission collimating lens 22, the first and second orientation angles of the object under test in space are determined. The first direction angle is the angle of rotation around the first coordinate axis in a clockwise direction, and the second direction angle is the angle of rotation around the second coordinate axis in a clockwise direction. The first coordinate axis, the second coordinate axis, and the third coordinate axis form a right-handed system in space. The first coordinate axis is along the normal direction of the liquid surface of the reference liquid 35 in the target assembly 30, and the third coordinate axis is along the optical axis direction of the transmission collimating lens 22. Based on the first orientation angle, the second orientation angle, the second offset, and the focal length of the transmission collimating lens 22, the third orientation angle of the object under test in space is determined. The third coordinate angle is the angle of rotation in a clockwise direction around the third coordinate axis.

[0091] Specifically, Example 5-1 is a high-stability autocollimation triaxial angle measurement method based on the high-stability autocollimation triaxial angle measurement device in Example 5. The execution process is described in the following exemplary description.

[0092] First, the imaging position is zeroed. Specifically, the target assembly 30 is fixed to the surface of the object under test, and the first laser light source 13 and the second laser light source 14 are illuminated. Then, the position of the object under test is adjusted until the center of the red imaging spot on the imaging surface of the RGB color image sensor 48 coincides with the center of the imaging surface, and the center of the green imaging spot on the imaging surface of the RGB color image sensor 48 coincides with the center of the imaging surface. At this time, the reflecting surface of the second planar reflector 33 in the target assembly 30 is parallel to the exiting surface of the first dichroic mirror 342.

[0093] Next, after zeroing the imaging position, the measurement can begin. Based on the measurement principle described in the above embodiment, as the target assembly 30 translates and / or rotates in space with the object under test, the following two sets of offsets are measured: One method is to determine the distance between the center of the imaged spot and the center of the imaging surface of the RGB color image sensor 48 based on the red image formed by the first emitted beam in the RGB color image sensor 48. as well as (Corresponding to the first offset); Secondly, the distance between the center of the imaged spot and the center of the imaging surface of the RGB color image sensor 48 is determined based on the green image formed by the second emitted beam on the RGB color image sensor 48. (Corresponding to the second offset).

[0094] Based on the aforementioned measured offsets and the measurement principle described in the above embodiments, and according to the focal length of the transmission collimating lens 22... , as well as It can determine the yaw angle of the object being measured. and pitch angle Then, based further on the focal length of the transmission collimating lens 22... , And the yaw angle just obtained and pitch angle It can determine the roll angle of the object being measured. This completes the measurement of the three-axis angles of the object at a certain location in space. Furthermore, along the path of the object... z When the axis is translated, the above measurement and calculation process can be repeated to obtain the position of the object under test. z The triaxial angle information at different positions on the axis enables the measurement of the triaxial angle parameters of the object under test in space.

[0095] The above description is merely a preferred embodiment of this application and is not intended to limit this application in any way. Although this application has disclosed the preferred embodiment as above, it is not intended to limit this application. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the technical solution of this application. Any simple modifications, equivalent substitutions, and improvements made to the above embodiments without departing from the technical solution of this application, based on the technical essence of this application and within the spirit and principles of this application, shall still fall within the protection scope of the technical solution of this application.

Claims

1. A highly stable self-collimating triaxial angle measuring device, characterized in that, The device includes a light source assembly (10), an optical path assembly (20), a target assembly (30), and an imaging assembly (40). The light source assembly (10) is configured to act as a light source to provide an emitted laser beam, and the target assembly (30) is fixedly disposed on the surface of the object to be tested. The target assembly (30) includes a target housing (31), a first planar reflector (32), a second planar reflector (33), a target beam splitter (34), a reference liquid (35), and a liquid-floating hemispherical base (36) floating in the reference liquid (35); the first planar reflector (32) is fixedly disposed on the inner wall of the target housing (31), the second planar reflector (33) is fixedly disposed on the liquid-floating hemispherical base (36), and the liquid surface of the reference liquid (35) is a horizontal plane; The emitted laser beam is transmitted through the optical path assembly (20) to the target beam splitter (34). The first emitted sub-beam transmitted through the target beam splitter (34) is reflected by the first plane mirror (32) and returns along the original path. It is then reflected by the optical path assembly (20) to the imaging assembly (40). The second emitted sub-beam reflected by the target beam splitter (34) is reflected by the second plane mirror (33) and returns along the original path. It is then reflected by the optical path assembly (20) to the imaging assembly (40).

2. The apparatus according to claim 1, characterized in that, The light source assembly (10) includes a laser light source (11) and a half-wave plate (12). The laser light source (11) is configured to generate the emitted laser beam, which is polarized by the half-wave plate (12) and incident on the optical path assembly (20).

3. The apparatus according to claim 1, characterized in that, The light source assembly (10) includes a first laser source (13), a second laser source (14), and a first beam splitter (15). The first laser source (13) generates a first laser beam with a first wavelength, and the second laser source (14) generates a second laser beam with a second wavelength. Both the first laser beam and the second laser beam are incident on the first beam splitter (15). The first beam splitter (15) is configured to combine the first laser beam and the second laser beam into the emitted laser beam.

4. The apparatus according to claim 1, characterized in that, The target beam splitter (34) is a first polarizing beam splitter (341). The imaging component (40) includes a second polarizing beam splitter (411), a first image sensor (42), and a second image sensor (43). The first outgoing beam is incident on the imaging component (40) and transmitted through the second polarizing beam splitter (411) to the first image sensor (42) for imaging. The second outgoing beam is incident on the imaging component (40) and reflected through the second polarizing beam splitter (411) to the second image sensor (43) for imaging.

5. The apparatus according to claim 1, characterized in that, The target beam splitter (34) is a first polarizing beam splitter (341). The imaging assembly (40) includes a third beam splitter (412), a first polarizer (44), a first image sensor (42), a second polarizer (45), and a second image sensor (43). The first outgoing beam is incident on the imaging assembly (40), transmitted through the third beam splitter (412), processed by the first polarizer (44), and then incident on the first image sensor (42) for imaging. The second outgoing beam is incident on the imaging assembly (40), reflected by the third beam splitter (412), processed by the second polarizer (45), and then incident on the second image sensor (43) for imaging.

6. The apparatus according to claim 1, characterized in that, The target beam splitter (34) is a first dichroic mirror (342). The first emitted sub-beam transmitted through the first dichroic mirror (342) of the emitted laser beam has a first wavelength, and the second emitted sub-beam reflected by the first dichroic mirror (342) of the emitted laser beam has a second wavelength. The imaging component (40) includes a second dichroic mirror (413), a first image sensor (42), and a second image sensor (43). The first outgoing light beam is incident on the imaging component (40) and transmitted through the second dichroic mirror (413) to the first image sensor (42) for imaging. The second outgoing light beam is incident on the imaging component (40) and reflected through the second dichroic mirror (413) to the second image sensor (43) for imaging.

7. The apparatus according to claim 1, characterized in that, The target beam splitter (34) is a first dichroic mirror (342). The first emitted sub-beam transmitted through the first dichroic mirror (342) of the emitted laser beam has a first wavelength, and the second emitted sub-beam reflected by the first dichroic mirror (342) of the emitted laser beam has a second wavelength. The imaging component (40) includes a third beam splitter (412), a first filter (46), a first image sensor (42), a second filter (47), and a second image sensor (43). The first outgoing beam is incident on the imaging component (40), transmitted through the third beam splitter (412), processed by the first filter (46), and then incident on the first image sensor (42) for imaging. The second outgoing beam is incident on the imaging component (40), reflected by the third beam splitter (412), processed by the second filter (47), and then incident on the second image sensor (43) for imaging.

8. The apparatus according to claim 1, characterized in that, The target beam splitter (34) is a first dichroic mirror (342). The first emitted sub-beam transmitted through the first dichroic mirror (342) of the emitted laser beam has a first wavelength, and the second emitted sub-beam reflected by the first dichroic mirror (342) of the emitted laser beam has a second wavelength. The imaging component (40) includes an RGB color image sensor (48).

9. The apparatus according to any one of claims 1-8, characterized in that, The optical path assembly (20) includes a second beam splitter (21) and a transmission collimator (22). The second beam splitter (21) is configured to transmit the emitted laser beam and reflect the first emitted sub-beam and the second emitted sub-beam. The transmission collimator (22) is configured to collimate the emitted laser beam so that the emitted laser beam is incident parallel to the target assembly (30).

10. A highly stable self-collimating triaxial angle measurement method, characterized in that, The method is implemented based on the high-stability self-collimating triaxial angle measuring device as described in any one of claims 1-9, and the method includes: Adjust the position of the object to be tested so that the imaging position of the imaging component (40) meets the preset imaging position conditions; Based on the translation and / or rotation of the object under test in space, multiple difference parameters between the actual imaging position of the imaging component (40) and the imaging position conditions are obtained; Based on the difference parameters and the attribute parameters of the optical path component (20), the three-axis angle parameters of the object under test in space are determined.

11. The method according to claim 10, characterized in that, When the light source assembly (10) includes a laser light source (11) and a half-wave plate (12), the target beam splitter (34) is a first polarizing beam splitter (341), the imaging assembly (40) includes a second polarizing beam splitter (411), a first image sensor (42) and a second image sensor (43), and the optical path assembly (20) includes a transmission collimating lens (22), adjusting the position of the object under test so that the imaging position of the imaging assembly (40) meets the preset imaging position conditions includes: When the laser source (11) is lit, the position of the object under test is adjusted so that the imaging position of the first image sensor (42) and the imaging position of the second image sensor (43) satisfy the imaging position condition, wherein the imaging position condition includes: the center of the light spot received by the first image sensor (42) is located at the center of the first image sensor (42), and the center of the light spot received by the second image sensor (43) is located at the center of the second image sensor (43); and Adjust the fast axis direction of the half-wave plate (12) so that the light spot received by the first image sensor (42) is consistent with the brightness of the light spot received by the first image sensor (42); The method of obtaining multiple difference parameters between the actual imaging position of the imaging component (40) and the imaging position conditions based on the translation and / or rotation of the object under test in space includes: Based on the translation and / or rotation of the object under test in space, a first offset between the imaging position of the first image sensor (42) and the center of the first image sensor (42) and a second offset between the imaging position of the second image sensor (43) and the center of the second image sensor (43) are obtained, wherein the difference parameter includes the first offset and the second offset. The step of determining the three-axis angular parameters of the object under test in space based on the difference parameters and the attribute parameters of the optical path component (20) includes: Based on the first offset and the focal length of the transmission collimating lens (22), the first orientation angle and the second orientation angle of the object under test in space are determined. The first direction angle is the angle of rotation around the first coordinate axis in a clockwise direction, the second direction angle is the angle of rotation around the second coordinate axis in a clockwise direction, the first coordinate axis, the second coordinate axis and the third coordinate axis form a right-handed system in space, the first coordinate axis is along the normal direction of the liquid surface of the reference liquid (35) in the target assembly (30), and the third coordinate axis is along the optical axis direction of the transmission collimating lens (22); Based on the first orientation angle, the second orientation angle, the second offset, and the focal length of the transmission collimating lens (22), the third orientation angle of the object under test in space is determined. The third coordinate angle is the angle of rotation in a clockwise direction around the third coordinate axis.

12. The method according to claim 10, characterized in that, When the light source assembly (10) includes a laser light source (11) and a half-wave plate (12), the target beam splitter (34) is a first polarizing beam splitter (341), the imaging assembly (40) includes a third beam splitter (412), a first polarizer (44), a first image sensor (42), a second polarizer (45), and a second image sensor (43), and the optical path assembly (20) includes a transmission collimating lens (22), adjusting the position of the object under test so that the imaging position of the imaging assembly (40) meets the preset imaging position conditions includes: When the laser light source (11) is lit, the position of the object to be tested is adjusted so that the imaging position of the first image sensor (42) and the imaging position of the second image sensor (43) meet the imaging position conditions, wherein the imaging position conditions include: the center of the light spot received by the first image sensor (42) is located at the center of the first image sensor (42), and the center of the light spot received by the second image sensor (43) is located at the center of the second image sensor (43). Adjust the fast axis direction of the half-wave plate (12) so that the light spot received by the first image sensor (42) is consistent with the brightness of the light spot received by the first image sensor (42); Adjust the position of the first polarizer (44) so ​​that the brightness of the light spot received by the first image sensor (42) reaches its maximum; Adjust the position of the second polarizer (45) so that the brightness of the light spot received by the second image sensor (43) reaches the maximum and the second polarizer (45) is perpendicular to the first polarizer (44); The step of determining the three-axis angular parameters of the object under test in space based on the difference parameters and the attribute parameters of the optical path component (20) includes: Based on the translation and / or rotation of the object under test in space, a first offset between the imaging position of the first image sensor (42) and the center of the first image sensor (42) and a second offset between the imaging position of the second image sensor (43) and the center of the second image sensor (43) are obtained, wherein the difference parameter includes the first offset and the second offset. The step of determining the three-axis angular parameters of the object under test in space based on the difference parameters and the attribute parameters of the optical path component (20) includes: Based on the first offset and the focal length of the transmission collimating lens (22), the first orientation angle and the second orientation angle of the object under test in space are determined. The first direction angle is the angle of rotation around the first coordinate axis in a clockwise direction, the second direction angle is the angle of rotation around the second coordinate axis in a clockwise direction, the first coordinate axis, the second coordinate axis and the third coordinate axis form a right-handed system in space, the first coordinate axis is along the normal direction of the liquid surface of the reference liquid (35) in the target assembly (30), and the third coordinate axis is along the optical axis direction of the transmission collimating lens (22); Based on the first orientation angle, the second orientation angle, the second offset, and the focal length of the transmission collimating lens (22), the third orientation angle of the object under test in space is determined. The third coordinate angle is the angle of rotation in a clockwise direction around the third coordinate axis.

13. The method according to claim 10, characterized in that, When the light source assembly (10) includes a first laser light source (13), a second laser light source (14), and a first beam splitter (15), the target beam splitter (34) is a first dichroic mirror (342), the imaging assembly (40) includes a second dichroic mirror (413), a first image sensor (42), and a second image sensor (43), and the optical path assembly (20) includes a transmissive collimating mirror (22), adjusting the position of the object under test so that the imaging position of the imaging assembly (40) meets the preset imaging position conditions includes: When the first laser source (13) and the second laser source (14) are lit, the position of the object to be tested is adjusted so that the first wavelength imaging position of the first image sensor (42) and the second wavelength imaging position of the second image sensor (43) satisfy the imaging position condition, wherein the imaging position condition includes: the center of the first wavelength light spot received by the first image sensor (42) is located at the center of the first image sensor (42), and the center of the second wavelength light spot received by the second image sensor (43) is located at the center of the second image sensor (43); The method of obtaining multiple difference parameters between the actual imaging position of the imaging component (40) and the imaging position conditions based on the translation and / or rotation of the object under test in space includes: Based on the translation and / or rotation of the object under test in space, a first offset between the imaging position of the first image sensor (42) and the center of the first image sensor (42) and a second offset between the imaging position of the second image sensor (43) and the center of the second image sensor (43) are obtained, wherein the difference parameter includes the first offset and the second offset. The step of determining the three-axis angular parameters of the object under test in space based on the difference parameters and the attribute parameters of the optical path component (20) includes: Based on the first offset and the focal length of the transmission collimating lens (22), the first orientation angle and the second orientation angle of the object under test in space are determined. The first direction angle is the angle of rotation around the first coordinate axis in a clockwise direction, the second direction angle is the angle of rotation around the second coordinate axis in a clockwise direction, the first coordinate axis, the second coordinate axis and the third coordinate axis form a right-handed system in space, the first coordinate axis is along the normal direction of the liquid surface of the reference liquid (35) in the target assembly (30), and the third coordinate axis is along the optical axis direction of the transmission collimating lens (22); Based on the first orientation angle, the second orientation angle, the second offset, and the focal length of the transmission collimating lens (22), the third orientation angle of the object under test in space is determined. The third coordinate angle is the angle of rotation in a clockwise direction around the third coordinate axis.

14. The method according to claim 10, characterized in that, When the light source assembly (10) includes a first laser light source (13), a second laser light source (14), and a first beam splitter (15), the target beam splitter (34) is a first dichroic mirror (342), the imaging assembly (40) includes a third beam splitter (412), a first filter (46), a first image sensor (42), a second filter (47), and a second image sensor (43), and the optical path assembly (20) includes a transmissive collimating lens (22), adjusting the position of the object under test so that the imaging position of the imaging assembly (40) meets the preset imaging position conditions includes: When the first laser source (13) and the second laser source (14) are lit, the position of the object to be tested is adjusted so that the first wavelength imaging position of the first image sensor (42) and the second wavelength imaging position of the second image sensor (43) satisfy the imaging position condition, wherein the imaging position condition includes: the center of the first wavelength light spot received by the first image sensor (42) is located at the center of the first image sensor (42), and the center of the second wavelength light spot received by the second image sensor (43) is located at the center of the second image sensor (43); Adjust the position of the first filter (46) so that the first filter (46) is parallel to the exit surface of the transmitted light in the third beam splitter (412); and Adjust the position of the second filter (47) so that the second filter (47) is parallel to the exit surface of the reflected light in the third beam splitter (412) and perpendicular to the first filter (46); The method of obtaining multiple difference parameters between the actual imaging position of the imaging component (40) and the imaging position conditions based on the translation and / or rotation of the object under test in space includes: Based on the translation and / or rotation of the object under test in space, a first offset between the imaging position of the first image sensor (42) and the center of the first image sensor (42) and a second offset between the imaging position of the second image sensor (43) and the center of the second image sensor (43) are obtained, wherein the difference parameter includes the first offset and the second offset. The step of determining the three-axis angular parameters of the object under test in space based on the difference parameters and the attribute parameters of the optical path component (20) includes: Based on the first offset and the focal length of the transmission collimating lens (22), the first orientation angle and the second orientation angle of the object under test in space are determined. The first direction angle is the angle of rotation around the first coordinate axis in a clockwise direction, the second direction angle is the angle of rotation around the second coordinate axis in a clockwise direction, the first coordinate axis, the second coordinate axis and the third coordinate axis form a right-handed system in space, the first coordinate axis is along the normal direction of the liquid surface of the reference liquid (35) in the target assembly (30), and the third coordinate axis is along the optical axis direction of the transmission collimating lens (22); Based on the first orientation angle, the second orientation angle, the second offset, and the focal length of the transmission collimating lens (22), the third orientation angle of the object under test in space is determined. The third coordinate angle is the angle of rotation in a clockwise direction around the third coordinate axis.

15. The method according to claim 10, characterized in that, When the light source assembly (10) includes a first laser light source (13), a second laser light source (14), and a first beam splitter (15), the target beam splitter (34) is a first dichroic mirror (342), the imaging assembly (40) is an RGB color image sensor (48), and the optical path assembly (20) includes a transmissive collimating lens (22), adjusting the position of the object under test so that the imaging position of the imaging assembly (40) meets the preset imaging position conditions includes: When the first laser light source (13) and the second laser light source (14) are lit, the position of the object to be tested is adjusted so that the first wavelength imaging position and the second wavelength imaging position of the RGB color image sensor (48) meet the imaging position conditions, wherein the imaging position conditions include: the center of the light spot of the first wavelength received by the RGB color image sensor (48) is located at the center of the RGB color image sensor (48), and the center of the light spot of the second wavelength received by the RGB color image sensor (48) is located at the center of the RGB color image sensor (48); The method of obtaining multiple difference parameters between the actual imaging position of the imaging component (40) and the imaging position conditions based on the translation and / or rotation of the object under test in space includes: Based on the translation and / or rotation of the object under test in space, a first offset between the first wavelength imaging position of the RGB color image sensor (48) and the center of the RGB color image sensor (48) and a second offset between the second wavelength imaging position of the RGB color image sensor (48) and the center of the RGB color image sensor (48) are obtained, wherein the difference parameter includes the first offset and the second offset; The step of determining the three-axis angular parameters of the object under test in space based on the difference parameters and the attribute parameters of the optical path component (20) includes: Based on the first offset and the focal length of the transmission collimating lens (22), the first orientation angle and the second orientation angle of the object under test in space are determined. The first direction angle is the angle of rotation around the first coordinate axis in a clockwise direction, the second direction angle is the angle of rotation around the second coordinate axis in a clockwise direction, the first coordinate axis, the second coordinate axis and the third coordinate axis form a right-handed system in space, the first coordinate axis is along the normal direction of the liquid surface of the reference liquid (35) in the target assembly (30), and the third coordinate axis is along the optical axis direction of the transmission collimating lens (22); Based on the first orientation angle, the second orientation angle, the second offset, and the focal length of the transmission collimating lens (22), the third orientation angle of the object under test in space is determined. The third coordinate angle is the angle of rotation in a clockwise direction around the third coordinate axis.

Images