MEMS tri-axial gyroscope

Abstract

The present disclosure provides a MEMS three-axis gyroscope, relating to the field of semiconductors, which comprises a substrate, a first four-mass three-axis gyroscope unit and a second four-mass three-axis gyroscope unit; the first four-mass three-axis gyroscope unit and the second four-mass three-axis gyroscope unit are symmetrically arranged along an X-axis center line on the substrate; the first four-mass three-axis gyroscope unit comprises a first X-axis mass block group, a first Y-axis mass block group, a first Z-axis mass block group and a first driving mass block group; the first Y-axis mass block group and the second Y-axis mass block group are coupled through an elastic coupling structure, so that the movement directions of the first Y-axis mass block group and the second Y-axis mass block group in the Y-axis detection state are oppositely arranged, the movement directions of the first X-axis mass block group and the second X-axis mass block group in the X-axis detection state are oppositely arranged, and the movement directions of the first Z-axis mass block group and the second Z-axis mass block group in the Z-axis detection state are oppositely arranged. The zero point stability of the MEMS three-axis gyroscope is improved.

Description

Technical Field

[0001] This disclosure relates to the field of semiconductor technology, and specifically to a MEMS three-axis gyroscope. Background Technology

[0002] An IMU (Inertial Measurement Unit) is a motion detection sensor. It typically includes an accelerometer and a gyroscope to detect acceleration and angular velocity, thereby monitoring the motion state of an object. Gyroscopes are manufactured using MEMS (Micro-Electro-Mechanical Systems) technology and are widely used in consumer, automotive, and industrial applications such as smartphones, smart cars, and robots. Currently, mainstream consumer MEMS gyroscopes feature closed-loop drive and open-loop detection design, with a three-mass design for detecting three-axis angular velocities.

[0003] Current consumer-grade three-axis gyroscopes are mainly packaged in LGA (Land Grid Array) packages, which are primarily made of resin materials, while MEMS gyroscopes use semiconductor silicon and metal materials. Thus, when temperature changes occur, the different coefficients of thermal expansion between these materials inevitably cause internal stress and lead to temperature drift in the device. Summary of the Invention

[0004] The main objective of this disclosure is to provide a MEMS triaxial gyroscope to improve the zero-point stability of the MEMS triaxial gyroscope.

[0005] To achieve the above objectives, a first aspect of this disclosure provides a MEMS triaxial gyroscope, comprising: a substrate, a first four-mass triaxial gyroscope unit, and a second four-mass triaxial gyroscope unit; the substrate has mutually perpendicular X-axis, Y-axis, and Z-axis, the X-axis and Y-axis being mutually perpendicular and parallel to the substrate surface, and the Z-axis being perpendicular to the substrate surface; the first four-mass triaxial gyroscope unit and the second four-mass triaxial gyroscope unit are symmetrically arranged on the substrate along the X-axis centerline; the first four-mass triaxial gyroscope unit includes: a first X-axis mass block group, a first Y-axis mass block group arranged around the first X-axis mass block group, a first Z-axis mass block group located on opposite sides of the first Y-axis mass block group in the X-axis direction, and a first Z-axis mass block group located on opposite sides of the first Z-axis mass block group in the X-axis direction. The first driving mass block group; the second four-mass triaxial gyroscope unit includes: a second X-axis mass block group, a second Y-axis mass block group arranged around the second X-axis mass block group, a second Z-axis mass block group located on opposite sides of the second Y-axis mass block group in the X-axis direction, and a second driving mass block group located on opposite sides of the second Z-axis mass block group in the X-axis direction; wherein, the first Y-axis mass block group and the second Y-axis mass block group are coupled by an elastic coupling structure so that the first Y-axis mass block group and the second Y-axis mass block group are set in opposite directions when in the Y-axis detection state, the first X-axis mass block group and the second X-axis mass block group are set in opposite directions when in the X-axis detection state, and the first Z-axis mass block group and the second Z-axis mass block group are set in opposite directions when in the Z-axis detection state.

[0006] In some embodiments of this disclosure, the first driving mass block group includes a first driving mass block and a second driving mass block symmetrically arranged on opposite sides of the first Z-axis mass block group in the X-axis direction; the first and second driving mass blocks reciprocate along the Y-axis in the driving state to drive the first X-axis mass block group and the first Y-axis mass block group to oscillate reciprocally around the center of the first X-axis mass block group along the Z-axis, while the first Z-axis mass block group remains stationary; the second driving mass block group includes a third driving mass block and a fourth driving mass block symmetrically arranged on opposite sides of the second Z-axis mass block group in the X-axis direction; the third and fourth driving mass blocks reciprocate along the Y-axis in the driving state to drive the second X-axis mass block group and the second Y-axis mass block group to oscillate reciprocally around the center of the second X-axis mass block group along the Z-axis, while the second Z-axis mass block group remains stationary; wherein, the first and third driving mass blocks reciprocate along the Y-axis in opposite directions in the driving state, and the first X-axis mass block group and the second X-axis mass block group oscillate in opposite directions in the driving state.

[0007] In some embodiments of this disclosure, a first X-axis anchor point structure and a second X-axis anchor point structure are spaced apart and symmetrically arranged on the substrate along the Y-axis direction; the first X-axis mass block group includes a first X-axis mass block arranged around the first X-axis anchor point structure, and the first X-axis mass block is coupled to the first X-axis anchor point structure through a first Y-axis elastic beam extending along a set Y-axis, so that the first X-axis mass block can rotate about the set Y-axis when in the X-axis detection state; the first Y-axis mass block group remains stationary when in the X-axis detection state; the second X-axis mass block group includes a second X-axis mass block arranged around the second X-axis anchor point structure, and the second X-axis mass block is coupled to the second X-axis anchor point structure through a second Y-axis elastic beam extending along the set Y-axis, so that the second X-axis mass block can rotate about the set Y-axis when in the X-axis detection state; the second Y-axis mass block group remains stationary when in the X-axis detection state; the first X-axis mass block and the second X-axis mass block are arranged in opposite directions of movement when in the X-axis detection state.

[0008] In some embodiments of this disclosure, a first X-axis fixed detection electrode, a second X-axis fixed detection electrode, a third X-axis fixed detection electrode, and a fourth X-axis fixed detection electrode are disposed on a substrate; wherein, the first X-axis fixed detection electrode and the second X-axis fixed detection electrode are symmetrically disposed on both sides of a defined Y-axis line, the portion of the first X-axis fixed detection electrode opposite to the position of the first X-axis mass block constitutes a first X-axis sub-detection capacitor, and the portion of the second X-axis fixed detection electrode opposite to the position of the first X-axis mass block constitutes a second X-axis detection capacitor; the third X-axis fixed detection electrode and the fourth X-axis fixed detection electrode are symmetrically disposed on both sides of a defined Y-axis line, the third X-axis fixed... The portion of the detection electrode opposite to the second X-axis mass block constitutes the third X-axis sub-detection capacitor, and the portion of the fourth X-axis fixed detection electrode opposite to the second X-axis mass block constitutes the fourth X-axis sub-detection capacitor; the first and third X-axis fixed detection electrodes are symmetrically arranged on both sides of the X-axis centerline, and the second and fourth X-axis fixed detection electrodes are symmetrically arranged on both sides of the X-axis centerline; the X-axis detection capacitor of the MEMS triaxial gyroscope in the X-axis detection state is equal to the sum of the second and third X-axis sub-detection capacitors, minus the sum of the first and fourth X-axis detection capacitors.

[0009] In some embodiments of this disclosure, the first Y-axis mass block group includes a first Y-axis mass block unit disposed around a first X-axis mass block. The first Y-axis mass block unit is rotatable about a first predetermined X-axis parallel to the X-axis during Y-axis detection. The first Y-axis mass block unit remains stationary during X-axis detection, and the first X-axis mass block remains stationary during Y-axis detection. The second Y-axis mass block group includes a second Y-axis mass block unit disposed around a second X-axis mass block. The second Y-axis mass block unit is rotatable about a second predetermined X-axis parallel to the X-axis during Y-axis detection. The second Y-axis mass block unit remains stationary during X-axis detection, and the second X-axis mass block remains stationary during Y-axis detection. The first Y-axis mass block unit and the second Y-axis mass block unit are arranged in opposite directions during Y-axis detection.

[0010] In some embodiments of this disclosure, a first Y-axis fixed detection electrode, a second Y-axis fixed detection electrode, a third Y-axis fixed detection electrode, and a fourth Y-axis fixed detection electrode are disposed on a substrate; wherein, the first Y-axis fixed detection electrode and the second Y-axis fixed detection electrode are symmetrically disposed on both sides of a first defined X-axis line, the portion of the first Y-axis fixed detection electrode opposite to the position of the first Y-axis mass block unit constitutes a first Y-axis sub-detection capacitor, and the portion of the second Y-axis fixed detection electrode opposite to the position of the first Y-axis mass block unit constitutes a second Y-axis detection capacitor; the third Y-axis fixed detection electrode and the fourth Y-axis fixed detection electrode are symmetrically disposed on... On both sides of the second set X-axis, the portion of the third Y-axis fixed detection electrode opposite to the position of the second Y-axis mass block unit constitutes the third Y-axis sub-detection capacitor, and the portion of the fourth Y-axis fixed detection electrode opposite to the position of the second Y-axis mass block unit constitutes the fourth Y-axis detection capacitor; the second Y-axis fixed detection electrode and the third Y-axis fixed detection electrode are located between the first set X-axis and the second set X-axis; the Y-axis detection capacitor of the MEMS three-axis gyroscope in the Y-axis detection state is equal to the sum of the first Y-axis sub-detection capacitor and the fourth Y-axis detection capacitor, minus the difference obtained by subtracting the sum of the second Y-axis detection capacitor and the third Y-axis detection capacitor.

[0011] In some embodiments of this disclosure, the first Z-axis mass block group includes a first Z-axis mass block and a second Z-axis mass block symmetrically arranged on opposite sides of the first Y-axis mass block unit in the X-axis direction. The first Z-axis mass block is coupled between the first Y-axis mass block unit and the first driving mass block, and the second Z-axis mass block is coupled between the second Y-axis mass block unit and the second driving mass block. When in Z-axis detection mode, the first Z-axis mass block and the second Z-axis mass block can reciprocate in opposite directions or move away from each other along the X-axis direction. The second Z-axis mass block group includes a third Z-axis mass block and a fourth Z-axis mass block symmetrically arranged on opposite sides of the second Y-axis mass block unit in the X-axis direction. The third Z-axis mass block is coupled between the second Y-axis mass block unit and the third driving mass block, and the fourth Z-axis mass block is coupled between the second Y-axis mass block unit and the fourth driving mass block. When in Z-axis detection mode, the third Z-axis mass block and the fourth Z-axis mass block can reciprocate in opposite directions or move away from each other along the X-axis direction. The first Z-axis mass block and the third Z-axis mass block move in opposite directions when in Z-axis detection mode.

[0012] In some embodiments of this disclosure, a first Z-axis fixed interdigital detection electrode, a second Z-axis fixed interdigital detection electrode, a third Z-axis fixed interdigital detection electrode, a fourth Z-axis fixed interdigital detection electrode, a fifth Z-axis fixed interdigital detection electrode, a sixth Z-axis fixed interdigital detection electrode, a seventh Z-axis fixed interdigital detection electrode, and an eighth Z-axis fixed interdigital detection electrode are disposed on the substrate. The portion of the first Z-axis fixed interdigital detection electrode that is positioned opposite to the first Z-axis mass block in the X-axis direction constitutes a first Z-axis detection sub-capacitor; the portion of the fifth Z-axis fixed interdigital detection electrode that is positioned opposite to the first Z-axis mass block in the X-axis direction constitutes a fifth Z-axis detection sub-capacitor; the portion of the second Z-axis fixed interdigital detection electrode that is positioned opposite to the second Z-axis mass block in the X-axis direction constitutes a second Z-axis detection sub-capacitor; and the portion of the sixth Z-axis fixed interdigital detection electrode that is positioned opposite to the second Z-axis mass block in the X-axis direction constitutes a second Z-axis detection sub-capacitor. The portions of the electrodes facing upwards relative to each other constitute the sixth Z-axis detection sub-capacitor; the portions of the third Z-axis fixed interdigitated detection electrode and the third Z-axis mass block facing each other in the X-axis direction constitute the third Z-axis detection sub-capacitor; the portions of the seventh Z-axis fixed interdigitated detection electrode and the third Z-axis mass block facing each other in the X-axis direction constitute the seventh Z-axis detection sub-capacitor; the portions of the fourth Z-axis fixed interdigitated detection electrode and the fourth Z-axis mass block facing each other in the X-axis direction constitute the fourth Z-axis detection sub-capacitor; the portions of the eighth Z-axis fixed interdigitated detection electrode and the fourth Z-axis mass block facing each other in the X-axis direction constitute the eighth Z-axis detection sub-capacitor; wherein, the Z-axis detection capacitance of the MEMS three-axis gyroscope in the Z-axis detection state is equal to the sum of the first Z-axis sub-detection capacitance to the fourth Z-axis detection capacitance, minus the sum of the fifth Y-axis sub-detection capacitance and the eighth Z-axis detection capacitance.

[0013] In some embodiments of this disclosure, the first Y-axis mass block unit includes: a first Y-axis mass frame surrounding the first X-axis mass block; the first Y-axis mass frame is coupled to the first X-axis mass block via a first XY transition frame; the first XY transition frame is coupled to the first X-axis mass block via a third Y-axis elastic beam at the center of the two inner frame sides in the Y-axis direction, so that the first X-axis mass block can rotate relative to the first XY transition frame along a set Y-axis line in the X-axis detection state; the first Y-axis mass frame is coupled to the first XY transition frame via a first X-axis elastic beam extending along a first set X-axis line at the center of the two inner frame sides in the X-axis direction, so that the first Y-axis mass frame can rotate around the first set X-axis line in the Y-axis detection state.

[0014] In some embodiments of this disclosure, the second Y-axis mass block unit includes: a third Y-axis mass frame M5 disposed around the second X-axis mass block; the third Y-axis mass frame M5 is coupled to the second X-axis mass block via a second XY transition frame, and the second XY transition frame is coupled to the second X-axis mass block via a fourth Y-axis elastic beam at the center of the two inner frame sides in the Y-axis direction, so that the second X-axis mass block can rotate relative to the second XY transition frame along a set Y-axis line in the X-axis detection state; the third Y-axis mass frame M5 is coupled to the second XY transition frame via a second X-axis elastic beam extending along a second set X-axis line at the center of the two inner frame sides in the X-axis direction, so that the third Y-axis mass frame M5 can rotate around the second set X-axis line in the Y-axis detection state.

[0015] In some embodiments of this disclosure, the first Y-axis mass block unit further includes: a second Y-axis mass frame surrounding the first Y-axis mass frame; the second Y-axis mass frame includes: a first L-shaped right-angle frame and a second L-shaped right-angle frame symmetrically arranged along a predetermined Y-axis and coupled by a first elastic connecting beam, and a third L-shaped right-angle frame and a fourth L-shaped right-angle frame symmetrically arranged along a predetermined Y-axis and coupled by a second elastic connecting beam; the first L-shaped right-angle frame and the third L-shaped right-angle frame are symmetrically arranged along a first predetermined X-axis, the second L-shaped right-angle frame and the fourth L-shaped right-angle frame are symmetrically arranged along the first predetermined X-axis, and the second elastic connecting beam and the elastic coupling structure are integral structures; the first Z-axis mass block is coupled to the connection between the first L-shaped right-angle frame and the third L-shaped right-angle frame through a first YZ transition frame, and the second Z-axis... The mass block is coupled to the connection between the second L-shaped right-angle frame and the fourth L-shaped right-angle frame via the second YZ transition frame, so that the second Y-axis mass frame can rotate around the first set X-axis in the Y-axis detection state; the first L-shaped right-angle frame is coupled to the first Y-axis mass frame via the first X-axis elastic connecting beam, the second L-shaped right-angle frame is coupled to the first Y-axis mass frame via the second X-axis elastic connecting beam, the third L-shaped right-angle frame is coupled to the first Y-axis mass frame via the third X-axis elastic connecting beam, and the fourth L-shaped right-angle frame is coupled to the first Y-axis mass frame via the fourth X-axis elastic connecting beam, so that the second Y-axis mass frame can deform in the Z-axis detection state, thereby realizing that the first YZ transition frame and the second YZ transition frame respectively drive the first Z-axis mass block and the second Z-axis mass block to reciprocate in opposite directions or move in opposite directions along the X-axis direction.

[0016] In some embodiments of this disclosure, the second Y-axis mass block unit further includes: a fourth Y-axis mass frame surrounding the third Y-axis mass frame M5; the fourth Y-axis mass frame includes: a fifth L-shaped right-angle frame and a sixth L-shaped right-angle frame symmetrically arranged along a predetermined Y-axis and coupled by a third elastic connecting beam, and a seventh L-shaped right-angle frame and an eighth L-shaped right-angle frame symmetrically arranged along a predetermined Y-axis and coupled by a fourth elastic connecting beam; the fifth L-shaped right-angle frame and the seventh L-shaped right-angle frame are symmetrically arranged along a second predetermined X-axis, the sixth L-shaped right-angle frame and the eighth L-shaped right-angle frame are symmetrically arranged along the second predetermined X-axis, and the third elastic connecting beam and the elastic coupling structure are integral structures; the third Z-axis mass block is coupled to the connection point of the fifth L-shaped right-angle frame and the seventh L-shaped right-angle frame through a third YZ transition frame, and the fourth Z-axis mass block... The fourth YZ transition frame is coupled to the connection between the sixth and eighth L-shaped right-angle frames, allowing the fourth Y-axis mass frame to rotate around the second set X-axis in the Y-axis detection state. The fifth L-shaped right-angle frame is coupled to the third Y-axis mass frame M5 via the fifth X-axis elastic connecting beam, the sixth L-shaped right-angle frame is coupled to the third Y-axis mass frame M5 via the sixth X-axis elastic connecting beam, the seventh L-shaped right-angle frame is coupled to the third Y-axis mass frame M5 via the seventh X-axis elastic connecting beam, and the eighth L-shaped right-angle frame is coupled to the third Y-axis mass frame M5 via the eighth X-axis elastic connecting beam, allowing the fourth Y-axis mass frame to deform in the Z-axis detection state. This enables the third YZ transition frame and the fourth YZ transition frame to drive the third Z-axis mass block and the fourth Z-axis mass block to reciprocate in opposite directions or move away from each other along the X-axis direction.

[0017] In some embodiments of this disclosure, a first Z-axis mass block is located inside the first YZ transition frame, and a second Z-axis mass block is located inside the second YZ transition frame; a first Z-axis anchor point structure and a second Z-axis anchor point structure are symmetrically arranged on the substrate along a set Y-axis; the first Z-axis mass block is coupled to the first Z-axis anchor point structure via a first Z-elastic beam, and the second Z-axis mass block is coupled to the second Z-axis anchor point structure via a second Z-elastic beam, so that the first Z-axis mass block and the second Z-axis mass block remain stationary in the driving state; the first YZ transition frame is coupled to the first driving mass block via a first outer transition elastic beam, and the first YZ transition... The first YZ adapter frame is coupled to the first Z-axis mass block via a first inner connecting elastic beam, so that in the driving state, the first driving mass block drives the first YZ adapter frame to move, and in the Z-axis detection state, the first YZ adapter frame can move relative to the first driving mass block along the X-axis; the second YZ adapter frame is coupled to the second driving mass block via a second outer connecting elastic beam, and the second YZ adapter frame is coupled to the second Z-axis mass block via a second inner connecting elastic beam, so that in the driving state, the second driving mass block drives the second YZ adapter frame to move, and in the Z-axis detection state, the second YZ adapter frame can move relative to the second driving mass block along the X-axis.

[0018] In some embodiments of this disclosure, the third Z-axis mass block is located inside the third YZ transition frame, and the fourth Z-axis mass block is located inside the fourth YZ transition frame; a third Z-axis anchor point structure and a fourth Z-axis anchor point structure are symmetrically arranged on the substrate along a set Y-axis; the third Z-axis mass block is coupled to the third Z-axis anchor point structure through a third Z-elastic beam, and the fourth Z-axis mass block is coupled to the fourth Z-axis anchor point structure through a fourth Z-elastic beam, so that the third Z-axis mass block and the fourth Z-axis mass block remain stationary in the driving state; the third YZ transition frame is coupled to the third driving mass block through a third outer transition elastic beam, and the third YZ transition frame... The connecting frame is coupled to the third Z-axis mass block via the third inner connecting elastic beam, so that in the driving state, the third driving mass block drives the third YZ connecting frame to move, and in the Z-axis detection state, the third YZ connecting frame can move relative to the third driving mass block along the X-axis; the fourth YZ connecting frame is coupled to the fourth driving mass block via the fourth outer connecting elastic beam, and the fourth YZ connecting frame is coupled to the fourth Z-axis mass block via the fourth inner connecting elastic beam, so that in the driving state, the fourth driving mass block drives the fourth YZ connecting frame to move, and in the Z-axis detection state, the fourth YZ connecting frame can move relative to the fourth driving mass block along the X-axis.

[0019] In some embodiments of this disclosure, the first four-mass three-axis gyroscope unit further includes: a first rigid beam extending along the X-axis direction and located on the side of the first Y-axis mass block unit away from the second four-mass three-axis gyroscope unit, the two ends of the first rigid beam being coupled to a first driving mass block and a second driving mass block respectively through a first elastic Y-axis connecting beam; the second four-mass three-axis gyroscope unit further includes: a second rigid beam extending along the X-axis direction and located on the side of the second Y-axis mass block unit away from the first four-mass three-axis gyroscope unit, the two ends of the second rigid beam being coupled to a third driving mass block and a fourth driving mass block respectively through a second elastic Y-axis connecting beam.

[0020] In some embodiments of this disclosure, the MEMS triaxial gyroscope further includes: a stress isolation frame coupled to the substrate by setting an anchor point structure; the first four-mass triaxial gyroscope unit and the second four-mass triaxial gyroscope unit are both disposed inside the stress isolation frame; the first driving mass block, the second driving mass block, the third driving mass block and the fourth driving mass block are coupled to the stress isolation frame by driving elastic beams so that they can reciprocate along the Y-axis in the driving state; the first rigid beam is coupled to the stress isolation frame by the first isolation elastic beam, and the second rigid beam is coupled to the stress isolation frame by the second isolation elastic beam.

[0021] The second aspect of this disclosure provides a chip, which includes any of the MEMS three-axis gyroscopes provided in the first aspect of this disclosure.

[0022] A third aspect of this disclosure provides an electronic device that includes the chip provided in the second aspect of this disclosure.

[0023] The MEMS triaxial gyroscope provided in this embodiment symmetrically arranges a first four-mass triaxial gyroscope unit and a second four-mass triaxial gyroscope unit along the X-axis centerline on a substrate. A first Y-axis mass block group and a second Y-axis mass block group are coupled through an elastic coupling structure, such that their motion directions are opposite during Y-axis detection. This allows the Y-axis detection capacitor formed by the first and second Y-axis mass block groups to have a differential design function, enabling it to fully or partially offset stress or temperature gradients along the Y-axis direction, thereby improving the zero-point stability of the MEMS triaxial gyroscope's Y-axis angular velocity detection. The first X-axis mass block group and the second X-axis mass block group... The mass blocks are arranged in opposite directions during X-axis detection, thus the X-axis detection capacitor formed by the first and second X-axis mass blocks has a differential design function to fully or partially offset stress or temperature gradients in the X-axis direction, improving the zero-point stability of the X-axis angular velocity detection of the MEMS triaxial gyroscope. Similarly, the first and second Z-axis mass blocks are arranged in opposite directions during Z-axis detection, thus the Z-axis detection capacitor formed by the first and second Z-axis mass blocks has a differential design function to fully or partially offset drift caused by temperature difference or stress, improving the zero-point stability of the Z-axis angular velocity detection of the MEMS triaxial gyroscope. This facilitates improving the overall zero-point stability of the MEMS triaxial gyroscope. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the specific embodiments or related technologies of this disclosure, the accompanying drawings used in the description of the specific embodiments or related technologies will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this disclosure. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 A top view schematic diagram of a MEMS three-axis gyroscope provided in an embodiment of this disclosure; Figures 2A to 2C A schematic diagram of the motion of a MEMS triaxial gyroscope in a driven state, provided in an embodiment of this disclosure; Figures 3A to 3C This is a schematic diagram of the motion of a MEMS triaxial gyroscope in the X-axis detection state according to an embodiment of the present disclosure; Figures 4A to 4C This is a schematic diagram of the motion of a MEMS triaxial gyroscope in the X-axis detection state according to an embodiment of the present disclosure; Figure 5 This is a schematic cross-sectional view of the Y-axis detection structure when the Z-axis interval changes due to stress or temperature gradient in the Y-axis direction, according to an embodiment of the present disclosure. Figures 6A to 6C This is a schematic diagram of the motion of a MEMS three-axis gyroscope in Z-axis detection state according to an embodiment of the present disclosure.

[0026] It should be noted that the elements in the attached diagram are schematic and not drawn to scale.

[0027] Figure label: L1, X-axis centerline; L2, Z-axis centerline; L3, set Y-axis; L4, first set X-axis; L5, second set X-axis; Cell1, the first four-mass three-axis gyroscope unit; Cell2, the second four-mass three-axis gyroscope unit; K1, stress isolation frame; K2, first rigid beam; K3, second rigid beam; M1, Second Y-axis mass frame; M11, First L-shaped right-angle frame; M12, Second L-shaped right-angle frame; M13, Third L-shaped right-angle frame; M14, Fourth L-shaped right-angle frame; M2, first Y-axis mass frame; M3, first X-axis mass block; M4, Fourth Y-axis mass frame; M41, Fifth L-shaped right-angle frame; M42, Sixth L-shaped right-angle frame; M43, Seventh L-shaped right-angle frame; M44, Eighth L-shaped right-angle frame; M5, third Y-axis mass frame M5; M6, second X-axis mass block; M7, First YZ Adapter Frame; M8, Third YZ Adapter Frame; M9, Second YZ Adapter Frame; M10, Fourth YZ Adapter Frame; M11, First driving mass block; M12, Second driving mass block; M13, Third driving mass block; M14, Fourth driving mass block; M15, First Z-axis mass block; M16, Second Z-axis mass block; M17, Third Z-axis mass block; M18, Fourth Z-axis mass block; S25, Elastic coupling structure / second elastic connecting beam / third elastic connecting beam; S19, first Y-axis elastic beam; S51, second Y-axis elastic beam; S16 / S22, third Y-axis elastic beam; S50 / S69, fourth Y-axis elastic beam; S18 / S20, First X-axis elastic beam; S49 / S52, Second X-axis elastic beam; S12, First elastic connecting beam; S57, Fourth elastic connecting beam; S17, Fifth elastic connecting beam; S21, Sixth elastic connecting beam; S48, Seventh elastic connecting beam; S53, Eighth elastic connecting beam; S14, First X-axis elastic connecting beam; S15, Second X-axis elastic connecting beam; S23, Third X-axis elastic connecting beam; S24, Fourth X-axis elastic connecting beam; S70, Fifth X-axis elastic connecting beam; S71, Sixth X-axis elastic connecting beam; S54, Seventh X-axis elastic connecting beam; S55, Eighth X-axis elastic connecting beam; S4 / S8, First Z-elastic beam; S27 / S32, Second Z-elastic beam; S42 / S45, Third Z-elastic beam; S62 / S66, Fourth Z-elastic beam; S2 / S5 / S6 / S9, First external transition elastic beam; S26 / S29 / S31 / S34, Second external transition elastic beam; S39 / S41 / S43 / S46, Third external transition elastic beam; S61 / S64 / S65 / S68, Fourth external transition elastic beam; S3 / S7, First inner transition elastic beam; S28 / S33, Second inner transition elastic beam; S40 / S44, Third inner transition elastic beam; S63 / S67, Fourth inner transition elastic beam; S10 / S13, First elastic Y-axis connecting beam; S56 / S59, Second elastic Y-axis connecting beam; S1 / S30 / S35 / S36 / S37 / S38 / S47 / S60, driving elastic beam; S11, First isolation elastic beam; S58, Second isolation elastic beam; E37, First X-axis fixed detection electrode; E40, Second X-axis fixed detection electrode; E39, Third X-axis fixed detection electrode; E38, Fourth X-axis fixed detection electrode; E33, First Y-axis fixed detection electrode; E35, Second Y-axis fixed detection electrode; E36, Third Y-axis fixed detection electrode; E34, Fourth Y-axis fixed detection electrode; E25, First Z-axis fixed interdigital finger detection electrode; E27, Second Z-axis fixed interdigital finger detection electrode; E26, Third Z-axis fixed interdigital finger detection electrode; E28, Fourth Z-axis fixed interdigital finger detection electrode; E29, Fifth Z-axis fixed interdigital sensor electrode; E31, Sixth Z-axis fixed interdigital sensor electrode; E30, Seventh Z-axis fixed interdigital sensor electrode; E32, Eighth Z-axis fixed interdigital sensor electrode; A12 / A13, First X-axis anchor point structure; A16 / A17, Second X-axis anchor point structure; A11, First Z-axis anchor point structure; A14, Second Z-axis anchor point structure; A15, Third Z-axis anchor point structure; A18, Fourth Z-axis anchor point structure; A3 / A4 / A7 / A8 / A1 / A2 / A19 / A20 / A5 / A6 / A9 / A10, Set anchor point structure; E1 / E2 / E5 / E6 / E7 / E8 / E11 / E12, First driving electrode; E3 / E4 / E9 / E10, First driving detection electrode; E13 / E14 / E17 / E18 / E19 / E20 / E23 / E24, Second driving electrode; E15 / E16 / E21 / E22, Second driving detection electrode. Detailed Implementation

[0028] To enable those skilled in the art to better understand the present disclosure, the technical solutions of the present disclosure will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present disclosure, and not all embodiments. Based on the embodiments of the present disclosure, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present disclosure.

[0029] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this disclosure are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate for the embodiments of this disclosure described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0030] In this disclosure, the terms "upper," "middle," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily used to better describe this disclosure and its embodiments, and are not intended to limit the indicated devices, elements, or components to having a particular orientation, or to be constructed and operated in a particular orientation.

[0031] Unless otherwise defined, all terms used herein (including technical and scientific terms) shall have the same meaning as commonly understood by one of ordinary skill in the art to which this subject matter pertains. It will be further understood that terms such as those defined in commonly used dictionaries shall be interpreted as having the meaning consistent with their meaning in the context of the specification and in the relevant art, and shall not be interpreted in an idealized or overly formal form unless otherwise explicitly defined herein. As used herein, the statement of “connecting” or “coupling” two or more parts together shall mean that these parts are directly joined together or joined through one or more intermediate components.

[0032] It should be noted that, unless otherwise specified, the embodiments and features described in this disclosure can be combined with each other. This disclosure will now be described in detail with reference to the accompanying drawings and embodiments.

[0033] Example 1 To address the aforementioned problems, this disclosure provides a MEMS triaxial gyroscope, aiming to improve the zero-point stability of the MEMS triaxial gyroscope. For example... Figure 1 As shown, the MEMS triaxial gyroscope includes: a substrate, a first four-mass triaxial gyroscope unit Cell1, and a second four-mass triaxial gyroscope unit Cell2. The substrate has mutually perpendicular X-axis, Y-axis, and Z-axis. The X-axis and Y-axis are mutually perpendicular and parallel to the substrate surface, while the Z-axis is perpendicular to the substrate surface. The first four-mass triaxial gyroscope unit Cell1 and the second four-mass triaxial gyroscope unit Cell2 are symmetrically arranged on the substrate along the X-axis centerline L1. That is, the MEMS triaxial gyroscope consists of two completely symmetrical four-mass triaxial gyroscope units. For example, the first four-mass triaxial gyroscope unit Cell1 and the second four-mass triaxial gyroscope unit Cell2 can be symmetrically arranged along the XZ symmetry plane, wherein the X-axis centerline L1 and the Z-axis centerline L2 are located on the XZ symmetry plane, thus determining the position of the XZ symmetry plane.

[0034] The first four-mass three-axis gyroscope unit Cell1 includes: a first X-axis mass block group, a first Y-axis mass block group arranged around the first X-axis mass block group, a first Z-axis mass block group located on opposite sides of the first Y-axis mass block group in the X-axis direction, and a first drive mass block group located on opposite sides of the first Z-axis mass block group in the X-axis direction. That is, the first four-mass three-axis gyroscope unit Cell1 is essentially a four-mass three-axis gyroscope structure, which includes a first X-axis mass block group, a first Y-axis mass block group, a first Z-axis mass block group, and a first drive mass block group capable of three-axis detection.

[0035] The second four-mass three-axis gyroscope unit Cell2 includes: a second X-axis mass block group, a second Y-axis mass block group arranged around the second X-axis mass block group, a second Z-axis mass block group located on opposite sides of the second Y-axis mass block group in the X-axis direction, and a second drive mass block group located on opposite sides of the second Z-axis mass block group in the X-axis direction. In other words, the second four-mass three-axis gyroscope unit Cell2 is essentially a four-mass three-axis gyroscope structure, which includes a second X-axis mass block group, a second Y-axis mass block group, a second Z-axis mass block group, and a second drive mass block group capable of three-axis detection.

[0036] The first Y-axis mass block group and the second Y-axis mass block group are coupled through an elastic coupling structure S25, so that the first Y-axis mass block group and the second Y-axis mass block group are set in opposite directions of motion in the Y-axis detection state, the first X-axis mass block group and the second X-axis mass block group are set in opposite directions of motion in the X-axis detection state, and the first Z-axis mass block group and the second Z-axis mass block group are set in opposite directions of motion in the Z-axis detection state. That is, by symmetrically arranging the first four-mass three-axis gyroscope unit Cell1 and the second four-mass three-axis gyroscope unit Cell2 along the X-axis centerline L1 on the substrate, and by adjusting the layout of the first X-axis mass block group, the first Y-axis mass block group, the first Z-axis mass block group, the first driving mass block group, and the second X-axis mass block group, the second Y-axis mass block group, the second Z-axis mass block group, and the second driving mass block group, the first Y-axis mass block group and the second Y-axis mass block group can be coupled through the elastic coupling structure S25, thereby realizing the X-axis... In the detection state, Y-axis detection state, and Z-axis detection state, the first four-mass triaxial gyroscope cell Cell1 and the second four-mass triaxial gyroscope cell Cell2 are set in opposite directions of motion. Based on this characteristic of opposite motion directions, the detection capacitor formed by the first four-mass triaxial gyroscope cell Cell1 and the second four-mass triaxial gyroscope cell Cell2 contains a differential capacitor pair, thereby completely or partially canceling the drift caused by temperature difference or stress, and improving the zero-point stability of the Z-axis angular velocity detection of the MEMS triaxial gyroscope.

[0037] Specifically, the first X-axis mass group and the second X-axis mass group are arranged in opposite directions during X-axis detection. This allows the X-axis detection capacitor, formed by the first and second X-axis mass groups, to have a differential design function, thereby completely or partially offsetting stress or temperature gradients along the X-axis, improving the zero-point stability of the MEMS triaxial gyroscope's X-axis angular velocity detection. Similarly, the first Y-axis mass group and the second Y-axis mass group are arranged in opposite directions during Y-axis detection. This allows the Y-axis detection capacitor, formed by the first and second Y-axis mass groups, to have a differential design function, thereby completely or partially offsetting stress or temperature gradients along the Y-axis, improving the zero-point stability of the MEMS triaxial gyroscope's Y-axis angular velocity detection. The first and second Z-axis mass blocks are positioned in opposite directions during Z-axis detection, thus enabling the Z-axis detection capacitor formed by the first and second Z-axis mass blocks to have a differential design function. This allows for the complete or partial cancellation of drift caused by temperature differences or stress, improving the zero-point stability of the Z-axis angular velocity detection of the MEMS triaxial gyroscope. This facilitates improved zero-point stability of the overall MEMS triaxial gyroscope. Specifically, this disclosure integrates two completely identical independent four-mass triaxial gyroscope units within a symmetrical four-mass dual-unit design, enhancing the symmetry of the MEMS triaxial gyroscope design. Based on this symmetrical arrangement, a multi-differential configuration of the four masses is achieved, maximizing the zero-point stability and reliability of the MEMS triaxial gyroscope, reducing stress sensitivity, and improving resistance to temperature drift and stress. This disclosure couples the XYZ axis driving and detection of the first four-mass triaxial gyroscope unit Cell1 and the second four-mass triaxial gyroscope unit Cell2 through an elastic coupling structure S25, improving integration.

[0038] The following combination Figure 1 Figure 3 provides a detailed description of the MEMS three-axis gyroscope. It should be understood that... Figure 1 Figure 3 is used only for the description of MEMS triaxial gyroscopes and is not intended to limit the scope of protection for MEMS triaxial gyroscopes.

[0039] There are several ways to configure the first drive mass block group and the second drive mass block group. Some of these methods are illustrated below.

[0040] For example, refer to Figures 2A to 2CThe first driving mass block group may include a first driving mass block M11 and a second driving mass block M12 symmetrically arranged on opposite sides of the first Z-axis mass block group in the X-axis direction. In the driving state, the first driving mass blocks M11 and M12 reciprocate along the Y-axis, causing the first X-axis mass block group and the first Y-axis mass block group to oscillate reciprocally around the center of the first X-axis mass block group along the Z-axis, while the first Z-axis mass block group remains stationary. That is, when configuring the driving state based on the first driving mass block group, the driving motion of the first Z-axis mass block group used for Z-axis detection is decoupled from that of the first driving mass block group, keeping the first Z-axis mass block group stationary in the driving state, thereby reducing the impact of the driving motion on Z-axis detection and improving zero-point stability.

[0041] For example, refer to Figures 2A to 2C The second driving mass block group includes a third driving mass block M13 and a fourth driving mass block M14 symmetrically arranged on opposite sides of the second Z-axis mass block group in the X-axis direction. In the driving state, the third driving mass block M13 and the fourth driving mass block M14 reciprocate along the Y-axis, causing the second X-axis mass block group and the second Y-axis mass block group to oscillate reciprocally around the center of the second X-axis mass block group along the Z-axis, while the second Z-axis mass block group remains stationary. That is, when configuring the driving state based on the second driving mass block group, the driving motion of the second Z-axis mass block group used for Z-axis detection is decoupled from that of the second driving mass block group, keeping the second Z-axis mass block group stationary in the driving state, thereby reducing the impact of the driving motion on Z-axis detection and improving zero-point stability.

[0042] refer to Figures 2A to 2C Furthermore, the first driving mass block M11 and the third driving mass block M13 are arranged in opposite directions of reciprocating motion along the Y-axis during the driving state, and the first X-axis mass block group and the second X-axis mass block group are arranged in opposite directions of reciprocating oscillation along the Z-axis during the driving state. This facilitates the opposite motion directions of the first Y-axis mass block group and the second Y-axis mass block group during the Y-axis detection state, the opposite motion directions of the first X-axis mass block group and the second X-axis mass block group during the X-axis detection state, and the opposite motion directions of the first Z-axis mass block group and the second Z-axis mass block group during the Z-axis detection state.

[0043] There are several ways to implement the differential design of the X-axis detection capacitor configuration in the X-axis detection state. Some of these methods are illustrated below.

[0044] For example, refer to Figures 3A to 3CA first X-axis anchor point structure A12 / A13 and a second X-axis anchor point structure A16 / A17 are symmetrically arranged at intervals along the Y-axis direction on the substrate. The first X-axis mass block assembly includes a first X-axis mass block M3 arranged around the first X-axis anchor point structure A12 / A13. The first X-axis mass block M3 is coupled to the first X-axis anchor point structure A12 / A13 via a first Y-axis elastic beam S19 extending along a predetermined Y-axis line L3, so that the first X-axis mass block M3 can rotate around the predetermined Y-axis line L3 in the X-axis detection state. The first Y-axis mass block assembly remains stationary in the X-axis detection state. For example, refer to... Figures 3A to 3C The second X-axis mass block assembly includes a second X-axis mass block M6 arranged around a second X-axis anchor point structure A16 / A17. The second X-axis mass block M6 is coupled to the second X-axis anchor point structure A16 / A17 via a second Y-axis elastic beam S51 extending along a set Y-axis line L3, allowing the second X-axis mass block M6 to rotate about the set Y-axis line L3 during X-axis detection. The second Y-axis mass block assembly remains stationary during X-axis detection. The first X-axis mass block M3 and the second X-axis mass block M6 are arranged in opposite directions of motion during X-axis detection.

[0045] The above method simplifies the structure of the first X-axis mass block group and the second X-axis mass block group, and also facilitates the configuration of the first X-axis mass block group and the second X-axis mass block group with opposite motion directions during X-axis detection. Furthermore, since the first X-axis anchor point structure A12 / A13 is coupled to the first X-axis mass block M3 through the first Y-axis elastic beam S19, and the second X-axis anchor point structure A16 / A17 is coupled to the second X-axis mass block M6 through the second Y-axis elastic beam S51, the deformation of the first Y-axis elastic beam S19 and the second Y-axis elastic beam S51 can partially or completely prevent the stress on the substrate from being transmitted to the first X-axis mass block M3 and the second X-axis mass block M6, thereby improving zero-point stability. Moreover, the above method enables decoupling of the drive and X-axis detection, improving the zero-point stability of the gyroscope.

[0046] For example, refer to Figures 3A to 3C A first X-axis fixed detection electrode E37, a second X-axis fixed detection electrode E40, a third X-axis fixed detection electrode E39, and a fourth X-axis fixed detection electrode E38 are disposed on the substrate. The first X-axis fixed detection electrode E37 and the second X-axis fixed detection electrode E40 are symmetrically disposed on both sides of the defined Y-axis line L3. The portion of the first X-axis fixed detection electrode E37 opposite to the position of the first X-axis mass block M3 constitutes the first X-axis sub-detection capacitor, and the portion of the second X-axis fixed detection electrode E40 opposite to the position of the first X-axis mass block M3 constitutes the second X-axis sub-detection capacitor.

[0047] refer to Figures 3A to 3CThe third X-axis fixed detection electrode E39 and the fourth X-axis fixed detection electrode E38 are symmetrically arranged on both sides of the set Y-axis L3. The portion of the third X-axis fixed detection electrode E39 opposite to the position of the second X-axis mass block M6 constitutes the third X-axis sub-detection capacitor, and the portion of the fourth X-axis fixed detection electrode E38 opposite to the position of the second X-axis mass block M6 constitutes the fourth X-axis sub-detection capacitor. The first X-axis fixed detection electrode E37 and the third X-axis fixed detection electrode E39 are symmetrically arranged on both sides of the X-axis centerline L1, and the second X-axis fixed detection electrode E40 and the fourth X-axis fixed detection electrode E38 are symmetrically arranged on both sides of the X-axis centerline L1.

[0048] refer to Figures 3A to 3C The X-axis detection capacitance of a MEMS triaxial gyroscope in X-axis detection mode is equal to the sum of the second and third X-axis sub-detection capacitors, minus the sum of the first and fourth X-axis sub-detection capacitors. This method facilitates the design of the first and second X-axis mass blocks moving in opposite directions during X-axis detection, allowing the X-axis detection capacitance of the MEMS triaxial gyroscope to be configured as a differential design containing multiple differential capacitor pairs, thereby improving the zero-point stability of the MEMS triaxial gyroscope during X-axis detection.

[0049] There are several ways to implement the differential design of the Y-axis detection capacitor configuration in the Y-axis detection state. Some of these methods are illustrated below.

[0050] For example, refer to Figures 4A to 4CThe first Y-axis mass block group includes a first Y-axis mass block unit surrounding a first X-axis mass block M3. In the Y-axis detection state, the first Y-axis mass block unit can rotate about a first predetermined X-axis line L4 parallel to the X-axis. The first Y-axis mass block unit remains stationary in the X-axis detection state, and the first X-axis mass block M3 also remains stationary in the Y-axis detection state. The second Y-axis mass block group includes a second Y-axis mass block unit surrounding a second X-axis mass block M6. In the Y-axis detection state, the second Y-axis mass block unit can rotate about a second predetermined X-axis line L5 parallel to the X-axis. Both the second Y-axis mass block unit and the second X-axis mass block M6 remain stationary in the Y-axis detection state. The first Y-axis mass block unit and the second Y-axis mass block unit are configured with opposite directions of movement in the Y-axis detection state. This simplifies the structure of the first and second Y-axis mass block groups and facilitates the implementation of a configuration where the first and second Y-axis mass block groups have opposite directions of movement in the Y-axis detection state. Furthermore, the motion modes of the first X-axis mass block M3 and the first Y-axis mass block unit in the X-axis detection state and the Y-axis detection state are decoupled, and the motion modes of the second X-axis mass block M6 and the second Y-axis mass block unit in the X-axis detection state and the Y-axis detection state are also decoupled, thereby improving zero-point stability.

[0051] For example, refer to Figures 4A to 4C A first Y-axis fixed detection electrode E33, a second Y-axis fixed detection electrode E35, a third Y-axis fixed detection electrode E36, and a fourth Y-axis fixed detection electrode E34 are disposed on the substrate. The first Y-axis fixed detection electrode E33 and the second Y-axis fixed detection electrode E35 are symmetrically disposed on both sides of a first predetermined X-axis line L4. The portion of the first Y-axis fixed detection electrode opposite to the position of the first Y-axis mass block unit constitutes a first Y-axis sub-detection capacitor, and the portion of the second Y-axis fixed detection electrode E35 opposite to the position of the first Y-axis mass block unit constitutes a second Y-axis detection capacitor. The third Y-axis fixed detection electrode E36 and the fourth Y-axis fixed detection electrode E34 are symmetrically disposed on both sides of a second predetermined X-axis line L5. The portion of the third Y-axis fixed detection electrode E36 opposite to the position of the second Y-axis mass block unit constitutes a third Y-axis detection capacitor, and the portion of the fourth Y-axis fixed detection electrode E34 opposite to the position of the second Y-axis mass block unit constitutes a fourth Y-axis detection capacitor.

[0052] refer to Figures 4A to 4C The second Y-axis fixed detection electrode E35 and the third Y-axis fixed detection electrode E36 are located between the first set X-axis line L4 and the second set X-axis line L5. The Y-axis detection capacitance of the MEMS three-axis gyroscope in Y-axis detection state is equal to the sum of the first Y-axis sub-detection capacitance and the fourth Y-axis detection capacitance, minus the difference between the sum of the second Y-axis detection capacitance and the third Y-axis detection capacitance.

[0053] The above method facilitates the design of the first Y-axis mass block group and the second Y-axis mass block group moving in opposite directions during Y-axis detection. This allows the Y-axis detection capacitor of the MEMS triaxial gyroscope to be configured as a differential design containing multiple differential capacitor pairs, thereby improving the zero-point stability of the MEMS triaxial gyroscope during Y-axis detection.

[0054] There are several ways to implement the differential design of the Z-axis detection capacitor configuration in the Z-axis detection state. Some of these methods are illustrated below.

[0055] For example, refer to Figures 6A to 6C The first Z-axis mass block group includes a first Z-axis mass block M15 and a second Z-axis mass block M16 symmetrically arranged on opposite sides of the first Y-axis mass block unit in the X-axis direction. The first Z-axis mass block M15 is coupled between the first Y-axis mass block unit and the first driving mass block M11, and the second Z-axis mass block M16 is coupled between the second Y-axis mass block unit and the second driving mass block M12. When in the Z-axis detection state, the first Z-axis mass block M15 and the second Z-axis mass block M16 can reciprocate in opposite directions or move away from each other along the X-axis direction. The second Z-axis mass block group includes a third Z-axis mass block M17 and a fourth Z-axis mass block M18 symmetrically arranged on opposite sides of the second Y-axis mass block unit in the X-axis direction. The third Z-axis mass block M17 is coupled between the second Y-axis mass block unit and the third driving mass block M13, and the fourth Z-axis mass block M18 is coupled between the second Y-axis mass block unit and the fourth driving mass block M14. In the Z-axis detection state, the third Z-axis mass block M17 and the fourth Z-axis mass block M18 can reciprocate in opposite directions or move in opposite directions along the X-axis direction. The first Z-axis mass block M15 and the third Z-axis mass block M17 are arranged in opposite directions in the Z-axis detection state. This simplifies the structure of both the first and second Z-axis mass block groups and facilitates the opposite movement directions of the first and second Z-axis mass block groups in the Z-axis detection state.

[0056] For example, refer to Figures 6A to 6C The substrate is provided with a first Z-axis fixed interdigital detection electrode E25, a second Z-axis fixed interdigital detection electrode E27, a third Z-axis fixed interdigital detection electrode E26, a fourth Z-axis fixed interdigital detection electrode E28, a fifth Z-axis fixed interdigital detection electrode E29, a sixth Z-axis fixed interdigital detection electrode E31, a seventh Z-axis fixed interdigital detection electrode E30, and an eighth Z-axis fixed interdigital detection electrode E32.

[0057] refer to Figures 6A to 6CThe first Z-axis fixed interdigital detection electrode E25 and the portion of the first Z-axis mass block M15 that are positioned opposite each other in the X-axis direction constitute the first Z-axis detection sub-capacitor; the fifth Z-axis fixed interdigital detection electrode E29 and the portion of the first Z-axis mass block M15 that are positioned opposite each other in the X-axis direction constitute the fifth Z-axis detection sub-capacitor; the second Z-axis fixed interdigital detection electrode E27 and the portion of the second Z-axis mass block M16 that are positioned opposite each other in the X-axis direction constitute the second Z-axis detection sub-capacitor; the sixth Z-axis fixed interdigital detection electrode E31 and the portion of the second Z-axis mass block M16 that are positioned opposite each other in the X-axis direction constitute the sixth Z-axis detection sub-capacitor. The portion of the third Z-axis fixed interdigital detection electrode E26 and the third Z-axis mass block M17 that are positioned opposite each other in the X-axis direction constitutes the third Z-axis detection sub-capacitor; the portion of the seventh Z-axis fixed interdigital detection electrode E30 and the third Z-axis mass block M17 that are positioned opposite each other in the X-axis direction constitutes the seventh Z-axis detection sub-capacitor; the portion of the fourth Z-axis fixed interdigital detection electrode E28 and the fourth Z-axis mass block M18 that are positioned opposite each other in the X-axis direction constitutes the fourth Z-axis detection sub-capacitor; and the portion of the eighth Z-axis fixed interdigital detection electrode E32 and the fourth Z-axis mass block M18 that are positioned opposite each other in the X-axis direction constitutes the eighth Z-axis detection sub-capacitor.

[0058] refer to Figures 6A to 6C The Z-axis detection capacitance of a MEMS triaxial gyroscope in Z-axis detection mode is equal to the sum of the first to fourth Z-axis sub-detection capacitances, minus the sum of the fifth and eighth Z-axis detection capacitances. This method facilitates the design of the first and second Z-axis mass blocks moving in opposite directions during Z-axis detection, allowing the Y-axis detection capacitance of the MEMS triaxial gyroscope in Z-axis detection mode to be configured as a differential design containing multiple differential capacitor pairs, thereby improving the zero-point stability of the MEMS triaxial gyroscope during Z-axis detection.

[0059] There are several ways to set up the first Y-axis mass block unit and the second Y-axis mass block unit. Some of these methods are illustrated below.

[0060] For example, refer to Figures 3A to 3C The first Y-axis mass block unit may include: a first Y-axis mass frame M2 surrounding the first X-axis mass block M3; the first Y-axis mass frame M2 is coupled to the first X-axis mass block M3 via a first XY transition frame; the first XY transition frame is coupled to the first X-axis mass block M3 at the center of the two inner frame edges in the Y-axis direction via a third Y-axis elastic beam S16 / S22, so that the first X-axis mass block M3 can rotate relative to the first XY transition frame along a set Y-axis line L3 in the X-axis detection state. (Reference) Figures 4A to 4CThe first Y-axis mass frame M2 is coupled to the first XY transition frame at the center of the two inner frame sides in the X-axis direction via a first X-axis elastic beam S18 / S20 extending along the first predetermined X-axis line L4, so that the first Y-axis mass frame M2 can rotate around the first predetermined X-axis line L4 in the Y-axis detection state. This method facilitates the decoupling of the motion modes of the first X-axis mass block M3 and the first Y-axis mass block unit in the X-axis and Y-axis detection states, achieving decoupling between drive and Y-axis detection, and improving the zero-point stability of the gyroscope.

[0061] For example, refer to Figures 3A to 3C The second Y-axis mass block unit may include: a third Y-axis mass frame M5 surrounding the second X-axis mass block M6; the third Y-axis mass frame M5 is coupled to the second X-axis mass block M6 via a second XY transition frame; the second XY transition frame is coupled to the second X-axis mass block M6 at the center of the two inner frame edges in the Y-axis direction via a fourth Y-axis elastic beam S50 / S69, so that the second X-axis mass block M6 can rotate relative to the second XY transition frame along a set Y-axis line L3 in the X-axis detection state. (Reference) Figures 4A to 4C The third Y-axis mass frame M5 is coupled to the second XY transition frame at the center of the two inner frame sides in the X-axis direction via a second X-axis elastic beam S49 / S52 extending along the second predetermined X-axis line L5, so that the third Y-axis mass frame M5 can rotate around the second predetermined X-axis line L5 in the Y-axis detection state. This method facilitates the decoupling of the motion modes of the second X-axis mass block M6 and the second Y-axis mass block unit in the X-axis and Y-axis detection states, achieving decoupling between drive and Y-axis detection, and improving the zero-point stability of the gyroscope.

[0062] For example, refer to Figures 4A to 4C The first Y-axis mass block unit may further include a second Y-axis mass frame M1 surrounding the first Y-axis mass frame M2. The second Y-axis mass frame M1 may include a first L-shaped right-angle frame M11 and a second L-shaped right-angle frame M12 symmetrically arranged along a set Y-axis L3 and coupled by a first elastic connecting beam S12, and a third L-shaped right-angle frame M13 and a fourth L-shaped right-angle frame M14 symmetrically arranged along a set Y-axis L3 and coupled by a second elastic connecting beam. The first L-shaped right-angle frame M11 and the third L-shaped right-angle frame M13 are symmetrically arranged along a first set X-axis L4, and the second L-shaped right-angle frame M12 and the fourth L-shaped right-angle frame M14 are symmetrically arranged along a first set X-axis L4. The second elastic connecting beam and the elastic coupling structure S25 are integrated into one structure, which not only simplifies the structure of the second elastic connecting beam and the elastic coupling structure S25, but also realizes the coupling and linkage between the first four-mass three-axis gyroscope unit Cell1 and the second four-mass three-axis gyroscope unit Cell2 shown above.

[0063] refer to Figures 4A to 4CThe first Z-axis mass block M15 is coupled to the connection between the first L-shaped right-angle frame M11 and the third L-shaped right-angle frame M13 via the first YZ adapter frame M7. The second Z-axis mass block M16 is coupled to the connection between the second L-shaped right-angle frame M12 and the fourth L-shaped right-angle frame M14 via the second YZ adapter frame M9, so that the second Y-axis mass frame M1 can rotate around the first set X-axis line L4 in the Y-axis detection state. For example, refer to... Figures 4A to 4C The first Z-axis mass block M15 is coupled to the first YZ transition frame M7. The first YZ transition frame M7 is coupled to the connection between the first L-shaped right-angle frame M11 and the third L-shaped right-angle frame M13 via the fifth elastic connecting beam S17. The first L-shaped right-angle frame M11 is also coupled to the third L-shaped right-angle frame M13 via the fifth elastic connecting beam S17. The second Z-axis mass block M16 is coupled to the second YZ transition frame M9. The second YZ transition frame M9 is coupled to the connection between the second L-shaped right-angle frame M12 and the fourth L-shaped right-angle frame M14 via the sixth elastic connecting beam S21. The second L-shaped right-angle frame M12 is also coupled to the fourth L-shaped right-angle frame M14 via the sixth elastic connecting beam S21, so that the second Y-axis mass frame M1 can rotate around the first set X-axis L4 in the Y-axis detection state.

[0064] refer to Figures 6A to 6C The first L-shaped right-angle frame M11 is coupled to the first Y-axis mass frame M2 via the first X-axis elastic connecting beam S14. The second L-shaped right-angle frame M12 is coupled to the first Y-axis mass frame M2 via the second X-axis elastic connecting beam S15. The third L-shaped right-angle frame M13 is coupled to the first Y-axis mass frame M2 via the third X-axis elastic connecting beam S23. The fourth L-shaped right-angle frame M14 is coupled to the first Y-axis mass frame M2 via the fourth X-axis elastic connecting beam S24. This allows the second Y-axis mass frame M1 to deform in the Z-axis detection state, thereby changing the maximum or minimum distance between the two sides of the second Y-axis mass frame M1 on the X-axis. This prevents interference with the reciprocating opposite or backward movements of the first YZ transition frame M7 and the second YZ transition frame M9 along the X-axis. As a result, the first YZ transition frame M7 and the second YZ transition frame M9 respectively drive the first Z-axis mass block M15 and the second Z-axis mass block M16 to reciprocate opposite or backward movements along the X-axis. The second Y-axis mass frame M1, set up in the above manner, not only has the function of Y-axis detection, but also does not interfere with the execution of the Z-axis detection function.

[0065] For example, refer to Figures 4A to 4CThe second Y-axis mass block unit may further include a fourth Y-axis mass frame M4 surrounding the third Y-axis mass frame M5. The fourth Y-axis mass frame M4 may include a fifth L-shaped right-angle frame M41 and a sixth L-shaped right-angle frame M42, symmetrically arranged along the set Y-axis L3 and coupled by a third elastic connecting beam; and a seventh L-shaped right-angle frame M43 and an eighth L-shaped right-angle frame M44, symmetrically arranged along the set Y-axis L3 and coupled by a fourth elastic connecting beam S57. The fifth L-shaped right-angle frame M41 and the seventh L-shaped right-angle frame M43 are symmetrically arranged along the second set X-axis L5, and the sixth L-shaped right-angle frame M42 and the eighth L-shaped right-angle frame M44 are symmetrically arranged along the second set X-axis L5. The third elastic connecting beam and the elastic coupling structure S25 are integrated, which not only simplifies the structure of the third elastic connecting beam and the elastic coupling structure S25, but also realizes the coupling and linkage between the first four-mass three-axis gyroscope unit Cell1 and the second four-mass three-axis gyroscope unit Cell2 shown above.

[0066] refer to Figures 4A to 4C The third Z-axis mass block M17 is coupled to the connection point of the fifth L-shaped right-angle frame M41 and the seventh L-shaped right-angle frame M43 via the third YZ adapter frame M8. The fourth Z-axis mass block M18 is coupled to the connection point of the sixth L-shaped right-angle frame M42 and the eighth L-shaped right-angle frame M44 via the fourth YZ adapter frame M10, so that the fourth Y-axis mass frame M4 can rotate around the second set X-axis line L5 in the Y-axis detection state. For example, refer to Figures 4A to 4C The third Z-axis mass block M17 is coupled to the third YZ transition frame M8. The third YZ transition frame M8 is coupled to the connection between the fifth L-shaped right-angle frame M41 and the seventh L-shaped right-angle frame M43 via the seventh elastic connecting beam S48. The fifth L-shaped right-angle frame M41 is also coupled to the seventh L-shaped right-angle frame M43 via the seventh elastic connecting beam S48. The fourth Z-axis mass block M18 is coupled to the fourth YZ transition frame M10. The fourth YZ transition frame M10 is coupled to the connection between the sixth L-shaped right-angle frame M42 and the eighth L-shaped right-angle frame M44 via the eighth elastic connecting beam S53. The sixth L-shaped right-angle frame M42 is also coupled to the eighth L-shaped right-angle frame M44 via the eighth elastic connecting beam S53, so that the fourth Y-axis mass frame M4 can rotate around the second set X-axis L5 in the Y-axis detection state.

[0067] refer to Figures 6A to 6CThe fifth L-shaped right-angle frame M41 is coupled to the third Y-axis mass frame M5 via the fifth X-axis elastic connecting beam S70; the sixth L-shaped right-angle frame M42 is coupled to the third Y-axis mass frame M5 via the sixth X-axis elastic connecting beam S71; the seventh L-shaped right-angle frame M43 is coupled to the third Y-axis mass frame M5 via the seventh X-axis elastic connecting beam S54; and the eighth L-shaped right-angle frame M44 is coupled to the third Y-axis mass frame M5 via the eighth X-axis elastic connecting beam S55, so that the fourth Y-axis mass frame M4 is... During Z-axis detection, the fourth Y-axis mass frame M4 can deform, thereby changing the maximum or minimum distance between its two opposite sides on the X-axis. This prevents interference with the reciprocating or opposing movements of the third YZ transition frame M8 and the fourth YZ transition frame M10 along the X-axis. Consequently, the third YZ transition frame M8 and the fourth YZ transition frame M10 respectively drive the third Z-axis mass block M17 and the fourth Z-axis mass block M18 to reciprocate or opposing movements along the X-axis. The fourth Y-axis mass frame M4, configured in this way, not only performs Y-axis detection but also ensures that the Z-axis detection function is not interfered with.

[0068] There are several ways to set up the first Z-axis mass block M15 to the fourth Z-axis mass block M18. Some of these methods are illustrated below.

[0069] For example, refer to Figures 6A to 6C The first Z-axis mass block M15 is located inside the first YZ transition frame M7, and the second Z-axis mass block M16 is located inside the second YZ transition frame M9. A first Z-axis anchor point structure A11 and a second Z-axis anchor point structure A14 are symmetrically arranged on the substrate along the defined Y-axis line L3. The first Z-axis mass block M15 is coupled to the first Z-axis anchor point structure A11 via the first Z-elastic beam S4 / S8, and the second Z-axis mass block M16 is coupled to the second Z-axis anchor point structure A14 via the second Z-elastic beam S27 / S32. This keeps the first Z-axis mass block M15 and the second Z-axis mass block M16 stationary during the driving state. As a result, during the driving state, the first YZ transition frame M7 and the second YZ transition frame M9 cannot drive the first Z-axis mass block M15 and the second Z-axis mass block M16 to reciprocate in the Y-axis direction. This ensures that the first Z-axis mass block M15 and the second Z-axis mass block M16 do not follow the movement of the first driving mass block M11 and the second driving mass block M12 during the driving state, thereby decoupling the driving and Z-axis detection and improving the zero-point stability of the gyroscope.

[0070] For example, refer to Figures 6A to 6CThe first YZ adapter frame M7 is coupled to the first driving mass block M11 through the first outer elastic beam S2 / S5 / S6 / S9, and the first YZ adapter frame M7 is coupled to the first Z-axis mass block M15 through the first inner elastic beam S3 / S7. In the driving state, the first driving mass block M11 drives the first YZ adapter frame M7 to move, and in the Z-axis detection state, the first YZ adapter frame M7 can move relative to the first driving mass block M11 along the X-axis, realizing the movement of the first YZ adapter frame M7 in both the X-axis and Y-axis directions. In the driving state, the first Z-axis mass block M15 remains stationary, while the first YZ adapter frame M7 can sense the angular velocity in the Z-axis direction to drive the first Z-axis mass block M15 to move in the X-axis direction, thereby realizing the Z-axis detection function.

[0071] For example, refer to Figures 6A to 6C The second YZ adapter frame M9 is coupled to the second driving mass block M12 via the second outer adapter elastic beam S26 / S29 / S31 / S34, and the second YZ adapter frame M9 is coupled to the second Z-axis mass block M16 via the second inner adapter elastic beam S28 / S33. In the driving state, the second driving mass block M12 drives the second YZ adapter frame M9 to move, and in the Z-axis detection state, the second YZ adapter frame M9 can move relative to the second driving mass block M12 along the X-axis, realizing the movement of the second YZ adapter frame M9 in both the X and Y axes. In the driving state, the second Z-axis mass block M16 remains stationary, while the second YZ adapter frame M9 can sense the angular velocity in the Z-axis direction to drive the second Z-axis mass block M16 to move in the X-axis direction, thereby realizing the Z-axis detection function.

[0072] For example, refer to Figures 6A to 6C The third Z-axis mass block M17 is located inside the third YZ transition frame M8, and the fourth Z-axis mass block M18 is located inside the fourth YZ transition frame M10. The third Z-axis anchor point structure A15 and the fourth Z-axis anchor point structure A18 are symmetrically arranged on the substrate along the set Y-axis line L3. The third Z-axis mass block M17 is coupled to the third Z-axis anchor structure A15 via the third Z-elastic beam S42 / S45, and the fourth Z-axis mass block M18 is coupled to the fourth Z-axis anchor structure A18 via the fourth Z-elastic beam S62 / S66. This ensures that the third Z-axis mass block M17 and the fourth Z-axis mass block M18 remain stationary during the driving state. Consequently, during the driving state, the third YZ transition frame M8 and the fourth YZ transition frame M10 cannot drive the reciprocating motion of the third Z-axis mass block M17 and the fourth Z-axis mass block M18 in the Y-axis direction. This prevents the third Z-axis mass block M17 and the fourth Z-axis mass block M18 from following the movement of the third driving mass block M13 and the fourth driving mass block M14, thus decoupling the driving and Z-axis detection and improving the zero-point stability of the gyroscope.

[0073] For example, refer to Figures 6A to 6C The third YZ adapter frame M8 is coupled to the third driving mass block M13 via the third outer elastic beam S39 / S41 / S43 / S46, and the third YZ adapter frame M8 is coupled to the third Z-axis mass block M17 via the third inner elastic beam S40 / S44. In the driving state, the third driving mass block M13 drives the third YZ adapter frame M8 to move, while in the Z-axis detection state, the third YZ adapter frame M8 can move relative to the third driving mass block M13 along the X-axis, realizing the movement of the third YZ adapter frame M8 in both the X and Y axes. In the driving state, the third Z-axis mass block M17 remains stationary, while the third YZ adapter frame M8 can sense the angular velocity in the Z-axis direction to drive the third Z-axis mass block M17 to move in the X-axis direction, thereby realizing the Z-axis detection function.

[0074] For example, refer to Figures 6A to 6C The fourth YZ adapter frame M10 is coupled to the fourth driving mass block M14 via the fourth outer elastic beam S61 / S64 / S65 / S68, and the fourth YZ adapter frame M10 is coupled to the fourth Z-axis mass block M18 via the fourth inner elastic beam S63 / S67. In the driving state, the fourth driving mass block M14 drives the fourth YZ adapter frame M10 to move, while in the Z-axis detection state, the fourth YZ adapter frame M10 can move relative to the fourth driving mass block M14 along the X-axis, realizing the movement of the fourth YZ adapter frame M10 in both the X and Y axes. In the driving state, the fourth Z-axis mass block M18 remains stationary, while the fourth YZ adapter frame M10 can sense the angular velocity in the Z-axis direction to drive the fourth Z-axis mass block M18 to move in the X-axis direction, thereby realizing the Z-axis detection function.

[0075] For example, refer to Figure 1 The first four-mass three-axis gyroscope unit Cell1 may further include: a first rigid beam K2 extending along the X-axis direction and located on the side of the first Y-axis mass unit away from the second four-mass three-axis gyroscope unit Cell2, wherein the two ends of the first rigid beam K2 are coupled to the first driving mass M11 and the second driving mass M12 respectively through the first elastic Y-axis connecting beam S10 / S13. For example, refer to Figure 1 The first rigid beam K2 is located on the side of the second Y-axis mass frame M1 away from the second four-mass three-axis gyroscope unit Cell2. For example, refer to... Figure 1 The second four-mass three-axis gyroscope unit Cell2 may further include: a second rigid beam K3 extending along the X-axis direction and located on the side of the second Y-axis mass unit away from the first four-mass three-axis gyroscope unit Cell1, with the two ends of the second rigid beam K3 coupled to the third driving mass M13 and the fourth driving mass M14 respectively via the second elastic Y-axis connecting beams S56 / S59. For example, refer to Figure 1The second rigid beam K3 is located on the side of the fourth Y-axis mass frame M4 away from the first four-mass three-axis gyroscope unit Cell1. By setting the first rigid beam K2 and the second rigid beam K3, it is convenient to achieve the operational coupling of the X-axis and Y-axis parts when the second Y-axis mass frame M1 and the fourth Y-axis mass frame M4 are deformable.

[0076] For example, refer to Figure 1 The MEMS triaxial gyroscope may further include: a stress isolation frame K1 coupled to the substrate via anchor point structures A3 / A4 / A7 / A8 / A1 / A2 / A19 / A20 / A5 / A6 / A9 / A10; and a first four-mass triaxial gyroscope unit Cell1 and a second four-mass triaxial gyroscope unit Cell2, both disposed inside the stress isolation frame K1. A first driving mass M11, a second driving mass M12, a third driving mass M13, and a fourth driving mass M14 are coupled to the stress isolation frame K1 via driving elastic beams S1 / S30 / S35 / S36 / S37 / S38 / S47 / S60, enabling reciprocating motion along the Y-axis during driving. A first rigid beam K2 is coupled to the stress isolation frame K1 via a first isolation elastic beam S11, and a second rigid beam K3 is coupled to the stress isolation frame K1 via a second isolation elastic beam S58. By setting a stress isolation frame K1 on the periphery, external stress is isolated from the internal four-mass three-axis gyroscope unit structure of the MEMS three-axis gyroscope, reducing the transmission of external stress to the internal structure of the MEMS three-axis gyroscope and improving the stress resistance and zero-point stability of the MEMS three-axis gyroscope.

[0077] The following is Figures 2A to 2C For example, we will introduce its specific driving states. Figure 2A This is a schematic diagram of the MEMS three-axis gyroscope in the driving state of this embodiment. The arrows represent the movement directions of each part. Figure 2AE1, E2, E5, E6, E7, E8, E11, and E12 are the first driving electrodes (drive 1), which, together with the first driving mass blocks M11 to the fourth driving mass blocks M14 (M11~M14), form the first driving capacitor C_DR1. E13, E14, E17, E18, E19, E20, E23, and E24 are the second driving electrodes (drive 2), which, together with the first driving mass blocks M11 to the fourth driving mass blocks M14 (M11~M14), form the second capacitor C_DR2. E3, E4, E9, and E10 are the first drive detection electrodes (drive sense1), which together with the first drive mass blocks M11 to the fourth drive mass blocks M14 (M11~M14) form the first drive detection capacitor C_DS1. E15, E16, E21, and E22 are the second drive detection electrodes (drive sense2), which together with the first drive mass blocks M11 to the fourth drive mass blocks M14 (M11~M14) form the second drive detection capacitor C_DS2.

[0078] refer to Figures 2A to 2C Taking the first four-mass three-axis gyroscope unit Cell1 as an example, when alternating voltages in opposite directions are applied across the first driving capacitor C_DR1 and the second driving capacitor C_DR2, alternating electrostatic force is generated, causing the first driving mass M11 and the second driving mass M12 to reciprocate along the Y-axis. Simultaneously, the first driving mass block M11 is connected to the first YZ transition frame M7 via the first external elastic beams S2, S5, S6, and S9, thus transmitting its motion to the first YZ transition frame M7. Since the first YZ transition frame M7 is connected to the second Y-axis mass frame M1 via the fifth elastic connecting beam S17, and the second Y-axis mass frame M1 is connected to the first Y-axis mass frame M2 via the first X-axis elastic connecting beams S14, S15, S23, and S24, and the first Y-axis mass frame M2 is connected to the first X-axis mass block M3 via the first X-axis elastic beams S18 and S20, and the third Y-axis elastic beams S16 and S22, the first Y-axis mass block M3 is connected to it. When the first YZ transition frame M7 reciprocates along the Y-axis, it drives the second Y-axis mass frame M1, the first Y-axis mass frame M2, and the first X-axis mass block M3 to move together. The first X-axis mass block M3 is connected to the fixed first X-axis anchor points A12 and A13 via the first Y-axis elastic beam S19, thus restricting its direction of motion. This means that the second Y-axis mass frame M1, the first Y-axis mass frame M2, and the first X-axis mass block M3 can only rotate clockwise or counterclockwise around the first X-axis anchor points A12 and A13, with the midpoint of the first four-mass three-axis gyroscope unit Cell1 as the center (within a certain range). Figures 2A to 2C (Use the orientation as a reference) Rotate in the direction.

[0079] Similarly, the second driving mass block M12 is connected to the second YZ transition frame M9 via the second external elastic beams S26, S2, S31, and S34. The second YZ transition frame M9 is connected to the second Y-axis mass frame M1 via the sixth elastic connecting beam S21. The second YZ transition frame M9 moves in the opposite direction to the first YZ transition frame M7, perfectly following the rotational trajectories of the second Y-axis mass frame M1, the first Y-axis mass frame M2, and the first X-axis mass block M3. Simultaneously, the first driving mass block M11 and the second driving mass block M12 are connected to the first rigid beam K2 via the first elastic Y-axis connecting beams S10 and S13, respectively. The first rigid beam K2 is connected to the stress isolation frame K1 via the first isolation elastic beam S11. Since the first driving mass block M11 moves in the opposite direction to the second driving mass block M12, and the first isolation elastic beam S11 restricts the movement direction of the first rigid beam K2, the first rigid beam K2 also rotates clockwise or counterclockwise around the first X-axis anchor point structures A12 and A13, similar to the second Y-axis mass frame M1, the first Y-axis mass frame M2 and the first X-axis mass block M3, with the midpoint of the first four-mass three-axis gyroscope unit Cell1 structure as the center.

[0080] For the first Z-axis mass block M15, it is connected to the first YZ transition frame M7 via the first inner transition elastic beams S3 and S7, and to the first Z-axis anchor point structure A11 via the first Z-elastic beams S4 and S8. Because the first Z-elastic beams S4 and S8 have very high stiffness in the Y-axis direction and low stiffness in the X-axis direction, they restrict the first YZ transition frame M7 to move only in the Y-axis direction. Therefore, when the reciprocating motion along the Y-axis from the first YZ transition frame M7 is transmitted through the first inner transition elastic beams S3 and S7, the first Z-axis mass block M15 does not produce displacement, and thus remains stationary in the driving state. Similarly, the second Z-axis mass blocks M16 to the fourth Z-axis mass blocks M18 (M16~M18) also remain stationary in the driving state.

[0081] The second four-mass three-axis gyroscope unit Cell2 moves in a direction symmetrical to the first four-mass three-axis gyroscope unit Cell1 about the X-axis centerline L1, such as... Figure 2A Taking the direction of the annotation as an example, the second Y-axis mass frame M1 and the fourth Y-axis mass frame M4 are coupled through the elastic coupling structure S25, so that the motion of the first rigid beam K2, the second Y-axis mass frame M1, the first Y-axis mass frame M2, the first X-axis mass block M3 is coupled with the motion of the second rigid beam K3, the fourth Y-axis mass frame M4, the third Y-axis mass frame M5, and the second X-axis mass block M6, as shown below. Figure 2AAs shown, the top rotation is clockwise, and the bottom rotation is counterclockwise. Simultaneously, the first YZ adapter frame M7 and the fourth YZ adapter frame M10 move in the same direction, while the third YZ adapter frame M8 and the second YZ adapter frame M9 move in the same direction, but opposite to the first YZ adapter frame M7 and the fourth YZ adapter frame M10.

[0082] The following is Figures 3A to 3C Taking this as an example, we will exemplify its specific X-axis detection status. Figure 3A This is a schematic diagram of the MEMS triaxial gyroscope in X-axis detection state according to this embodiment. The arrows represent the motion directions of each part. Taking the first four-mass triaxial gyroscope unit Cell1 as an example, when the MEMS triaxial gyroscope is driven, the second Y-axis mass frame M1, the first Y-axis mass frame M2, and the first X-axis mass block M3 rotate clockwise or counterclockwise. When there is an external X-axis angular velocity input, the second Y-axis mass frame M1, the first Y-axis mass frame M2, and the first X-axis mass block M3 will be subjected to a Coriolis force rotating around the Y-axis, causing the second Y-axis mass frame M1, the first Y-axis mass frame M2, and the first X-axis mass block M3 to rotate around the Y-axis. Figures 3A to 3C Because the fifth elastic connecting beam S17, the sixth elastic connecting beam S21, and the first X-axis elastic beams S18 and S20 have high stiffness around the Y-axis, the second Y-axis mass frame M1 and the first Y-axis mass frame M2 cannot rotate and remain stationary. For the first X-axis mass block M3, the third Y-axis elastic beams S16 and S22, and the first Y-axis elastic beam S19 have low stiffness around the Y-axis, so the first X-axis mass block M3 will rotate around the Y-axis. Figures 3A to 3C The first X-axis mass block M3 shown in the figure moves in opposite directions to the left and right portions.

[0083] The first X-axis fixed detection electrode E37 and the fourth X-axis fixed detection electrode E38 are X-axis detection electrodes (X1); the third X-axis fixed detection electrode E39 and the second X-axis fixed detection electrode E40 are X-axis detection electrodes (X2), forming X-axis detection capacitors C_X1 and C_X2 with the first X-axis mass block M3 and the second X-axis mass block M6. At this time, the distance between the first X-axis mass block M3 and the first X-axis fixed detection electrode E37 and the second X-axis fixed detection electrode E40 changes in opposite directions. That is, the first X-axis sub-detection capacitor C_X1_Cell1 and the second X-axis sub-detection capacitor C_X2_Cell1 change in opposite directions. The X-axis detection capacitance ΔC_X_Cell1 of the first four-mass three-axis gyroscope unit Cell1 is equal to C_X1_Cell1 - C_X2_Cell1, thus completing the detection of the X-axis angular velocity. Similarly, for the second four-mass three-axis gyroscope unit Cell2, the same principle applies; the second X-axis mass M6 will rotate around the Y-axis, i.e. Figures 3A to 3C As shown, the movement of the left and right portions of the second X-axis mass block M6 in opposite directions causes changes in the third X-axis sub-detection capacitor C_X1_Cell2 and the fourth X-axis detection capacitor C_X2_Cell2. The X-axis detection capacitance ΔC_X_Cell2 of the second four-mass triaxial gyroscope unit Cell2 then changes, resulting in C_X_Cell2 = C_X1_Cell2 - C_X2_Cell2, thus completing the detection of the X-axis angular velocity. Finally, the X-axis detection capacitance of the MEMS triaxial gyroscope device is ΔC_X = ΔC_X_Cell1 + ΔC_X_Cell2.

[0084] The dual four-mass triaxial gyroscope unit design in this embodiment comprises two completely symmetrical four-mass triaxial gyroscope units, Cell1 and Cell2, about the X-axis centerline L1. The MEMS triaxial gyroscope device experiences changes in its Z-axis spacing due to stress or temperature gradients along the X-axis. For a traditional single four-mass triaxial gyroscope unit design (considering only Cell1), when there is no angular velocity input, the X-axis sensing capacitance of the MEMS triaxial gyroscope is ΔC_X = C_X1 - C_X2 = ΔC_E40 - ΔC_E37, where ΔC_E40 ≠ ΔC_E37 ≠ 0. Therefore, the final output of the four-mass triaxial gyroscope ΔC_X is not zero. This indicates that the MEMS triaxial gyroscope device has generated an angular velocity output, which can be considered as zero-point drift due to temperature or stress.

[0085] And for such Figures 3A to 3CThe dual-unit design, due to the temperature or stress gradient along the X-axis, generates capacitance changes. Therefore, ΔC_E40 = ΔC_E38, and ΔC_E37 = ΔC_E39. Thus, the X-axis sensing capacitance of the MEMS triaxial gyroscope, ΔC_X = ΔC_X_Cell1 + ΔC_X_Cell2 = (C_X1_Cell1 + C_X1_Cell2) - (C_X2_Cell1 + C_X2_Cell2) = (ΔC_E40 - ΔC_E37) + (ΔC_E39 - ΔC_E38) = (ΔC_E40 - ΔC_E38) + (ΔC_E39 - ΔC_E37) = 0 - 0 = 0. Therefore, the multi-differential X-axis design of the dual four-mass triaxial gyroscope unit shown in this embodiment can completely or partially cancel out stress or temperature gradients along the X-axis.

[0086] For the temperature or stress gradient along the Y-axis, ΔC_E40 = ΔC_E37, ΔC_E39 = ΔC_E38. Therefore, the X-axis sensing capacitance of the MEMS triaxial gyroscope, ΔC_X = ΔC_X_Cell1 + ΔC_X_Cell2 = (C_X1_Cell1 + C_X1_Cell2) - (C_X2_Cell1 + C_X2_Cell2) = (ΔC_E40 - ΔC_E37) + (ΔC_E39 - ΔC_E38) = 0. The stress or temperature gradient along the Y-axis can also be completely or partially canceled out.

[0087] The following is Figures 4A to 4C Taking this as an example, we will exemplify its specific Y-axis detection status. Figure 4A This is a schematic diagram of the Y-axis detection state of the three-axis MEMS gyroscope in this embodiment. The arrows represent the motion directions of each part. Taking the first four-mass three-axis gyroscope unit Cell1 as an example, when the MEMS three-axis gyroscope is driven, the second Y-axis mass frame M1, the first Y-axis mass frame M2, and the first X-axis mass block M3 rotate clockwise or counterclockwise. When there is an external Y-axis angular velocity input, the second Y-axis mass frame M1, the first Y-axis mass frame M2, and the first X-axis mass block M3 will be subjected to a Coriolis force rotating around the X-axis, causing the second Y-axis mass frame M1, the first Y-axis mass frame M2, and the first X-axis mass block M3 to rotate around the Y-axis. Figure 4AAs shown, the first X-axis mass block M3 remains stationary because the spring beams, the third Y-axis elastic beams S16 and S22, and the first Y-axis elastic beam S19 have high stiffness in the X-axis direction. For the second Y-axis mass frame M1 and the first Y-axis mass frame M2, the fifth elastic connecting beam S17, the sixth elastic connecting beam S21, and the first X-axis elastic beams S18 and S20 have low stiffness in the rotational direction around the X-axis. Therefore, the second Y-axis mass frame M1 and the first Y-axis mass frame M2 will rotate around the X-axis, i.e., around the fifth elastic connecting beam S17, the sixth elastic connecting beam S21, and the first X-axis elastic beams S18 and S20. Figures 4A to 4C The upper and lower halves of the second Y-axis mass frame M1 and the first Y-axis mass frame M2 shown in the diagram move in opposite directions.

[0088] E33 is the first fixed Y-axis detection electrode, and E34 is the fourth fixed Y-axis detection electrode (Y1). E35 and E36 are the second and third fixed Y-axis detection electrodes (Y2), forming Y-axis detection capacitors C_Y1 and C_Y2 with the second Y-axis mass frame M1, the first Y-axis mass frame M2, the fourth Y-axis mass frame M4, and the third Y-axis mass frame M5. At this time, the distance between the second Y-axis mass frame M1 and the first Y-axis mass frame M2 and the first and second fixed Y-axis detection electrodes E33 and E35 changes in opposite directions. That is, the first Y-axis sub-detection capacitor C_Y1_Cell1 and the second Y-axis sub-detection capacitor C_Y2_Cell1 change in opposite directions. The Y-axis detection capacitor ΔC_Y_Cell1 of the first four-mass three-axis gyroscope unit Cell1 = C_Y1_Cell1 - C_Y2_Cell1, thus completing the detection of the Y-axis angular velocity. Similarly, for the second four-mass three-axis gyroscope unit Cell2, the same principle applies; the fourth Y-axis mass frame M4 and the third Y-axis mass frame M5 will rotate around the X-axis, i.e. Figures 4A to 4C The upper and lower halves of the fourth Y-axis mass frame M4 and the third Y-axis mass frame M5 shown in the diagram move in opposite directions. This causes changes in the third Y-axis sub-detection capacitor C_Y1_Cell2 and the fourth Y-axis detection capacitor C_Y2_Cell2, in opposite directions. The Y-axis detection capacitance ΔC_Y_Cell2 of the second four-mass triaxial gyroscope unit Cell2 is then calculated as C_Y1_Cell2 - C_Y2_Cell2, completing the detection of the Y-axis angular velocity. Finally, the Y-axis detection capacitance ΔC_Y = ΔC_Y_Cell1 + ΔC_Y_Cell2 of the MEMS triaxial gyroscope device.

[0089] In this implementation, the dual four-mass triaxial gyroscope unit design comprises two completely symmetrical four-mass triaxial gyroscope units, Cell1 and Cell2, about the X-axis centerline L1. The MEMS triaxial gyroscope device experiences a change in its Z-axis spacing due to stress or temperature gradients along the Y-axis. For a traditional single four-mass triaxial gyroscope unit design (considering only Cell1), when there is no angular velocity input, the Y-axis sensing capacitance ΔC_Y = C_Y1 - C_Y2 = C_E33 - C_E35 ≠ 0, meaning the final output Y-axis sensing capacitance ΔC_Y is not zero. Therefore, the MEMS triaxial gyroscope device generates an angular velocity output, which can be considered as the device experiencing zero-point drift due to temperature or stress.

[0090] Figure 5 This is a schematic cross-sectional view of the structure along the Y-axis when the Z-axis interval changes due to stress or temperature gradients in the Y-axis direction. When stress or temperature gradients in the Y-axis direction cause changes in the Z-axis interval, such as... Figure 5 As shown in d1~d4. Because the size of the MEMS triaxial gyroscope is very small, the gradient can be considered linear. Due to symmetry, we can obtain: C_E33-C_E35= C_E36-C_E34, C_E33-C_E36=C_E34-C_E35. Therefore, the final Y-axis sensing capacitance of the MEMS triaxial gyroscope is ΔC_Y=ΔC_Y_Cell1+ΔC_Y_Cell2=(C_E33-C_E35)+ (C_E34-C_E36)= (C_E36-C_E34)+(C_E34-C_E36)=0. Therefore, the multi-difference Y-axis design of the dual four-mass triaxial gyroscope unit can completely or partially cancel out the stress or temperature gradient in the Y-axis direction.

[0091] For the temperature or stress gradient in the X-axis direction, it has been completely or partially canceled out during the difference: C_33-C_E35 and C_34-C_36, thus achieving complete or partial cancellation of the stress or temperature gradient in the X-axis direction.

[0092] The following is Figures 6A to 6CFor example, the specific Z-axis detection state is illustrated in Figure 6. Figure 6 is a schematic diagram of the Z-axis detection state of the MEMS triaxial gyroscope in this embodiment, with arrows representing the motion directions of each part. Taking the first four-mass triaxial gyroscope unit Cell1 as an example, when the MEMS triaxial gyroscope is driven, the first YZ transition frame M7 and the second YZ transition frame M9 move in opposite directions. When there is an external Z-axis angular velocity input, the first YZ transition frame M7 and the second YZ transition frame M9 will be subjected to a Coriolis force along the X-axis direction. Since the first YZ transition frame M7 and the second YZ transition frame M9 move in opposite directions, the Coriolis force they are subjected to is also in opposite directions, and therefore their motion directions are also opposite. Figures 6A to 6C The motion direction is shown. The first YZ transition frame M7 drives the first Z-axis mass block M15 to move together through the first inner transition elastic beams S3 and S7. The second YZ transition frame M9 drives the second Z-axis mass block M16 to move together through the second inner transition elastic beams S28 and S33. The first Z-axis mass block M15 and the second Z-axis mass block M16 move in opposite directions.

[0093] The first Z-axis fixed interdigital detection electrode E25, the third Z-axis fixed interdigital detection electrode E26, the second Z-axis fixed interdigital detection electrode E27, and the fourth Z-axis fixed interdigital detection electrode E28 constitute the first Z-axis detection electrode (Z1); the fifth Z-axis fixed interdigital detection electrode E29, the seventh Z-axis fixed interdigital detection electrode E30, the sixth Z-axis fixed interdigital detection electrode E31, and the eighth Z-axis fixed interdigital detection electrode E32 constitute the second Z-axis detection electrode (Z2), forming capacitors C_Z1 and C_Z2 with the first Z-axis mass block M15 to the fourth Z-axis mass block M18 (M15~M18).

[0094] At this time, for the first four-mass three-axis gyroscope unit Cell1, the distances between the first Z-axis mass block M15 and the second Z-axis mass block M16 and the first Z-axis fixed interdigital detection electrode E25, the fifth Z-axis fixed interdigital detection electrode E29, the sixth Z-axis fixed interdigital detection electrode E31, and the second Z-axis fixed interdigital detection electrode E27 change. That is, the first Z-axis detection capacitance C_Z1_Cell1 and the second Z-axis detection capacitance C_Z2_Cell1 of the first four-mass three-axis gyroscope unit Cell1 change, and the changes are in opposite directions. The Z-axis detection capacitance ΔC_Z_Cell1 = C_Z1_Cell1 - C_Z2_Cell1 of the first four-mass three-axis gyroscope unit Cell1 is thus completed, completing the detection of the Z-axis angular velocity.

[0095] Similarly, for the second four-mass triaxial gyroscope unit Cell2, the distances between the third Z-axis mass block M17 and the fourth Z-axis mass block M18 and the seventh Z-axis fixed interdigital detection electrode E30, the third Z-axis fixed interdigital detection electrode E26, the fourth Z-axis fixed interdigital detection electrode E28, and the eighth Z-axis fixed interdigital detection electrode E32 change. This means that the first Z-axis detection capacitances C_Z1_Cell2 and C_Z2_Cell2 of the second four-mass triaxial gyroscope unit Cell2 change in opposite directions. Therefore, the Z-axis detection capacitance ΔC_Z_Cell2 = C_Z1_Cell2 - C_Z2_Cell2, thus completing the detection of the Z-axis angular velocity. Finally, the ΔC_Z of the MEMS triaxial gyroscope device is ΔC_Z = ΔC_Z_Cell1 + ΔC_Z_Cell2.

[0096] The dual four-mass triaxial gyroscope unit design in this embodiment adds a differential component for Z-axis detection. Theoretically, more differential components can partially offset drift caused by temperature difference or stress. Similar to the XY axis, please refer to the foregoing description.

[0097] The extreme stability of the three-mass design in related technologies needs improvement. For example, in extreme environments, such as drops or rapid changes in temperature and humidity, the zero point and sensitivity of the MEMS three-axis gyroscope may change, leading to inaccurate readings. Compared with related technologies, the MEMS three-axis gyroscope disclosed above can improve the zero-point stability of the MEMS three-axis gyroscope, thereby improving the detection accuracy of the MEMS three-axis gyroscope. At the same time, the three-mass design in related technologies may lead to structural fracture reliability accidents in extreme tests such as drop impacts. The MEMS three-axis gyroscope disclosed above, through the various elastic coupling beams and coupling design shown above, couples two independent and complete units (the first four-mass three-axis gyroscope unit Cell1 and the second four-mass three-axis gyroscope unit Cell2) together, which not only improves the overall structure, but also buffers the impact caused by drops and other extreme conditions by the buffering and shock absorption characteristics of the various elastic coupling beams, thereby improving the structural reliability.

[0098] It should be understood that the MEMS triaxial gyroscope disclosed herein may include other components in addition to the components shown above, and these components are all within the protection scope of the MEMS triaxial gyroscope disclosed herein.

[0099] Example 2 This disclosure provides a chip, which includes any of the MEMS three-axis gyroscopes provided in Embodiment 1 of this disclosure.

[0100] Example 3 This disclosure provides an electronic device, which includes the chip provided in Embodiment 2 of this disclosure.

[0101] Unless otherwise expressly indicated by the context, the singular form of words used herein and in the appended claims includes the plural form, and vice versa. Thus, when referring to the singular, the plural form of the corresponding term is generally included. Similarly, the terms “comprising” and “including” shall be interpreted as including rather than exclusively. Likewise, the terms “including” and “or” shall be interpreted as including unless such interpretation is expressly prohibited herein. Where the term “example” is used herein, particularly when it follows a set of terms, “example” is merely exemplary and illustrative and should not be considered exclusive or extensive.

[0102] Further aspects and scope of adaptation become apparent from the description provided herein. It should be understood that various aspects of this disclosure may be implemented individually or in combination with one or more other aspects. It should also be understood that the descriptions and specific embodiments herein are for illustrative purposes only and are not intended to limit the scope of this disclosure.

[0103] Several embodiments of this disclosure have been described in detail above. However, it is obvious that those skilled in the art can make various modifications and variations to the embodiments of this disclosure without departing from the spirit and scope of this disclosure. The scope of protection of this disclosure is defined by the appended claims. Although embodiments of this disclosure have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of this disclosure, and all such modifications and variations fall within the scope defined by the appended claims.

Claims

1. A MEMS three-axis gyroscope, characterized in that, include: A substrate having mutually perpendicular X-axis, Y-axis and Z-axis, wherein the X-axis and Y-axis are mutually perpendicular and both parallel to the substrate surface, and the Z-axis is perpendicular to the substrate surface; A first four-mass three-axis gyroscope unit and a second four-mass three-axis gyroscope unit are symmetrically arranged on the substrate along the X-axis centerline. The first four-mass three-axis gyroscope unit includes: a first X-axis mass block group, a first Y-axis mass block group arranged around the first X-axis mass block group, a first Z-axis mass block group located on opposite sides of the first Y-axis mass block group in the X-axis direction, and a first drive mass block group located on opposite sides of the first Z-axis mass block group in the X-axis direction. The second four-mass three-axis gyroscope unit includes: a second X-axis mass block group, a second Y-axis mass block group arranged around the second X-axis mass block group, a second Z-axis mass block group located on opposite sides of the second Y-axis mass block group in the X-axis direction, and a second drive mass block group located on opposite sides of the second Z-axis mass block group in the X-axis direction; The first Y-axis mass block group and the second Y-axis mass block group are coupled by an elastic coupling structure so that the first Y-axis mass block group and the second Y-axis mass block group are set in opposite directions when in the Y-axis detection state, the first X-axis mass block group and the second X-axis mass block group are set in opposite directions when in the X-axis detection state, and the first Z-axis mass block group and the second Z-axis mass block group are set in opposite directions when in the Z-axis detection state.

2. The MEMS triaxial gyroscope as described in claim 1, characterized in that, The first driving mass block group includes a first driving mass block and a second driving mass block symmetrically arranged on opposite sides of the first Z-axis mass block group in the X-axis direction; the first driving mass block and the second driving mass block reciprocate along the Y-axis in the driving state to drive the first X-axis mass block group and the first Y-axis mass block group to swing back and forth along the Z-axis around the center of the first X-axis mass block group, while the first Z-axis mass block group remains stationary; The second driving mass block group includes a third driving mass block and a fourth driving mass block symmetrically arranged on opposite sides of the second Z-axis mass block group in the X-axis direction; When the third and fourth driving mass blocks are in the driving state, they reciprocate along the Y-axis to drive the second X-axis mass block group and the second Y-axis mass block group to swing back and forth along the Z-axis around the center of the second X-axis mass block group, while the second Z-axis mass block group remains stationary. The first driving mass block and the third driving mass block are arranged in opposite directions of reciprocating motion along the Y-axis when in the driving state, and the first X-axis mass block group and the second X-axis mass block group are arranged in opposite directions of reciprocating swing along the Z-axis when in the driving state.

3. The MEMS triaxial gyroscope as described in claim 2, characterized in that, The substrate is provided with a first X-axis anchor point structure and a second X-axis anchor point structure spaced apart and symmetrically arranged along the Y-axis direction. The first X-axis mass block group includes a first X-axis mass block arranged around the first X-axis anchor point structure. The first X-axis mass block is coupled to the first X-axis anchor point structure by a first Y-axis elastic beam extending along a set Y-axis, so that the first X-axis mass block can rotate around the set Y-axis when in the X-axis detection state; the first Y-axis mass block group remains stationary when in the X-axis detection state. The second X-axis mass block group includes a second X-axis mass block arranged around the second X-axis anchor point structure. The second X-axis mass block is coupled to the second X-axis anchor point structure via a second Y-axis elastic beam extending along the set Y-axis, so that the second X-axis mass block can rotate around the set Y-axis when in the X-axis detection state; the second Y-axis mass block group remains stationary when in the X-axis detection state; the first X-axis mass block and the second X-axis mass block are arranged in opposite directions of motion when in the X-axis detection state.

4. The MEMS triaxial gyroscope as described in claim 3, characterized in that, The substrate is provided with a first X-axis fixed detection electrode, a second X-axis fixed detection electrode, a third X-axis fixed detection electrode and a fourth X-axis fixed detection electrode; The first and second X-axis fixed detection electrodes are symmetrically arranged on both sides of the set Y-axis. The portion of the first X-axis fixed detection electrode opposite to the position of the first X-axis mass block constitutes the first X-axis sub-detection capacitor, and the portion of the second X-axis fixed detection electrode opposite to the position of the first X-axis mass block constitutes the second X-axis sub-detection capacitor. The third and fourth X-axis fixed detection electrodes are symmetrically arranged on both sides of the set Y-axis. The portion of the third X-axis fixed detection electrode opposite to the position of the second X-axis mass block constitutes the third X-axis sub-detection capacitor, and the portion of the fourth X-axis fixed detection electrode opposite to the position of the second X-axis mass block constitutes the fourth X-axis detection capacitor. The first and third X-axis fixed detection electrodes are symmetrically arranged on both sides of the X-axis centerline, and the second and fourth X-axis fixed detection electrodes are symmetrically arranged on both sides of the X-axis centerline. The X-axis detection capacitance of the MEMS triaxial gyroscope in the X-axis detection state is equal to the sum of the second X-axis sub-detection capacitance and the third X-axis detection capacitance, minus the sum of the first X-axis detection capacitance and the fourth X-axis detection capacitance.

5. The MEMS triaxial gyroscope as described in claim 3, characterized in that, The first Y-axis mass block group includes a first Y-axis mass block unit arranged around the first X-axis mass block. The first Y-axis mass block unit can rotate about a first predetermined X-axis parallel to the X-axis when in Y-axis detection state. The first Y-axis mass block unit remains stationary when in X-axis detection state, and the first X-axis mass block remains stationary when in Y-axis detection state. The second Y-axis mass block group includes a second Y-axis mass block unit arranged around the second X-axis mass block. The second Y-axis mass block unit can rotate about a second predetermined X-axis line parallel to the X-axis when in the Y-axis detection state. The second Y-axis mass block unit remains stationary when in the X-axis detection state, and the second X-axis mass block remains stationary when in the Y-axis detection state. The first Y-axis mass block unit and the second Y-axis mass block unit are set to move in opposite directions during the Y-axis detection state.

6. The MEMS three-axis gyroscope as described in claim 5, characterized in that, The substrate is provided with a first Y-axis fixed detection electrode, a second Y-axis fixed detection electrode, a third Y-axis fixed detection electrode and a fourth Y-axis fixed detection electrode; The first and second Y-axis fixed detection electrodes are symmetrically arranged on both sides of the first predetermined X-axis. The portion of the first Y-axis fixed detection electrode opposite to the position of the first Y-axis mass block unit constitutes the first Y-axis sub-detection capacitor, and the portion of the second Y-axis fixed detection electrode opposite to the position of the first Y-axis mass block unit constitutes the second Y-axis detection capacitor. The third and fourth Y-axis fixed detection electrodes are symmetrically arranged on both sides of the second predetermined X-axis. The portion of the third Y-axis fixed detection electrode opposite to the position of the second Y-axis mass block unit constitutes the third Y-axis detection capacitor, and the portion of the fourth Y-axis fixed detection electrode opposite to the position of the second Y-axis mass block unit constitutes the fourth Y-axis detection capacitor. The second and third Y-axis fixed detection electrodes are located between the first predetermined X-axis and the second predetermined X-axis. The Y-axis detection capacitance of the MEMS triaxial gyroscope in the Y-axis detection state is equal to the sum of the first Y-axis sub-detection capacitance and the fourth Y-axis detection capacitance, minus the sum of the second Y-axis detection capacitance and the third Y-axis detection capacitance.

7. The MEMS triaxial gyroscope as described in claim 5, characterized in that, The first Z-axis mass block group includes a first Z-axis mass block and a second Z-axis mass block symmetrically arranged on opposite sides of the first Y-axis mass block unit in the X-axis direction. The first Z-axis mass block is coupled between the first Y-axis mass block unit and the first driving mass block, and the second Z-axis mass block is coupled between the second Y-axis mass block unit and the second driving mass block. When in the Z-axis detection state, the first Z-axis mass block and the second Z-axis mass block can reciprocate in opposite directions or move in opposite directions along the X-axis direction. The second Z-axis mass block group includes a third Z-axis mass block and a fourth Z-axis mass block symmetrically arranged on opposite sides of the second Y-axis mass block unit in the X-axis direction. The third Z-axis mass block is coupled between the second Y-axis mass block unit and the third driving mass block, and the fourth Z-axis mass block is coupled between the second Y-axis mass block unit and the fourth driving mass block. When in Z-axis detection state, the third Z-axis mass block and the fourth Z-axis mass block can reciprocate in opposite directions or move in opposite directions along the X-axis direction. The first Z-axis mass block and the third Z-axis mass block are set to move in opposite directions during Z-axis detection.

8. The MEMS three-axis gyroscope as described in claim 7, characterized in that, The substrate is provided with a first Z-axis fixed interdigital detection electrode, a second Z-axis fixed interdigital detection electrode, a third Z-axis fixed interdigital detection electrode, a fourth Z-axis fixed interdigital detection electrode, a fifth Z-axis fixed interdigital detection electrode, a sixth Z-axis fixed interdigital detection electrode, a seventh Z-axis fixed interdigital detection electrode, and an eighth Z-axis fixed interdigital detection electrode. The portion of the first Z-axis fixed interdigital detection electrode that is opposite to the first Z-axis mass block in the X-axis direction constitutes the first Z-axis detection sub-capacitor, and the portion of the fifth Z-axis fixed interdigital detection electrode that is opposite to the first Z-axis mass block in the X-axis direction constitutes the fifth Z-axis detection capacitor. The portion of the second Z-axis fixed interdigital detection electrode that is opposite to the second Z-axis mass block in the X-axis direction constitutes the second Z-axis detection sub-capacitor, and the portion of the sixth Z-axis fixed interdigital detection electrode that is opposite to the second Z-axis mass block in the X-axis direction constitutes the sixth Z-axis detection capacitor; The portion of the third Z-axis fixed interdigital detection electrode that is opposite to the third Z-axis mass block in the X-axis direction constitutes the third Z-axis detection sub-capacitor, and the portion of the seventh Z-axis fixed interdigital detection electrode that is opposite to the third Z-axis mass block in the X-axis direction constitutes the seventh Z-axis detection sub-capacitor. The portion of the fourth Z-axis fixed interdigital detection electrode that is opposite to the fourth Z-axis mass block in the X-axis direction constitutes the fourth Z-axis detection sub-capacitor, and the portion of the eighth Z-axis fixed interdigital detection electrode that is opposite to the fourth Z-axis mass block in the X-axis direction constitutes the eighth Z-axis detection sub-capacitor. Wherein, the Z-axis detection capacitance of the MEMS triaxial gyroscope in the Z-axis detection state is equal to the sum of the first Z-axis sub-detection capacitance to the fourth Z-axis sub-detection capacitance, minus the sum of the fifth Y-axis detection capacitance and the eighth Z-axis detection capacitance.

9. The MEMS triaxial gyroscope as described in claim 7, characterized in that, The first Y-axis mass block unit includes: a first Y-axis mass frame disposed around the first X-axis mass block; The first Y-axis mass frame is coupled to the first X-axis mass block through the first XY transition frame. The first XY transition frame is coupled to the first X-axis mass block through the third Y-axis elastic beam at the center of the two inner frame sides in the Y-axis direction, so that the first X-axis mass block can rotate relative to the first XY transition frame along the set Y-axis in the X-axis detection state. The first Y-axis mass frame is coupled to the first XY transition frame at the center of the two inner frame sides in the X-axis direction via a first X-axis elastic beam extending along the first set X-axis, so that the first Y-axis mass frame can rotate around the first set X-axis in the Y-axis detection state.

10. The MEMS triaxial gyroscope as described in claim 9, characterized in that, The first Y-axis mass block unit further includes: a second Y-axis mass frame disposed around the first Y-axis mass frame; The second Y-axis mass frame includes: a first L-shaped right-angle frame and a second L-shaped right-angle frame symmetrically arranged along the set Y-axis and coupled by a first elastic connecting beam; and a third L-shaped right-angle frame and a fourth L-shaped right-angle frame symmetrically arranged along the set Y-axis and coupled by a second elastic connecting beam; the first L-shaped right-angle frame and the third L-shaped right-angle frame are symmetrically arranged along the first set X-axis, the second L-shaped right-angle frame and the fourth L-shaped right-angle frame are symmetrically arranged along the first set X-axis, and the second elastic connecting beam and the elastic coupling structure are an integral structure; The first Z-axis mass block is coupled to the connection between the first L-shaped right-angle frame and the third L-shaped right-angle frame through the first YZ adapter frame, and the second Z-axis mass block is coupled to the connection between the second L-shaped right-angle frame and the fourth L-shaped right-angle frame through the second YZ adapter frame, so that the second Y-axis mass frame can rotate around the first set X-axis in the Y-axis detection state; The first L-shaped right-angle frame is coupled to the first Y-axis mass frame via a first X-axis elastic connecting beam; the second L-shaped right-angle frame is coupled to the first Y-axis mass frame via a second X-axis elastic connecting beam; the third L-shaped right-angle frame is coupled to the first Y-axis mass frame via a third X-axis elastic connecting beam; and the fourth L-shaped right-angle frame is coupled to the first Y-axis mass frame via a fourth X-axis elastic connecting beam. This allows the second Y-axis mass frame to deform during Z-axis detection, thereby enabling the first YZ transition frame and the second YZ transition frame to respectively drive the first Z-axis mass block and the second Z-axis mass block to reciprocate in opposite directions or move in opposite directions along the X-axis.

11. The MEMS triaxial gyroscope as described in claim 10, characterized in that, The first Z-axis mass block is located inside the first YZ adapter frame, and the second Z-axis mass block is located inside the second YZ adapter frame. The substrate is symmetrically provided with a first Z-axis anchor point structure and a second Z-axis anchor point structure along the set Y-axis; the first Z-axis mass block is coupled to the first Z-axis anchor point structure through a first Z-elastic beam, and the second Z-axis mass block is coupled to the second Z-axis anchor point structure through a second Z-elastic beam, so that the first Z-axis mass block and the second Z-axis mass block remain stationary in the driving state; The first YZ adapter frame is coupled to the first driving mass block through the first outer adapter elastic beam, and the first YZ adapter frame is coupled to the first Z-axis mass block through the first inner adapter elastic beam, so that when the first driving mass block drives the first YZ adapter frame to move in the driving state, the first YZ adapter frame can move relative to the first driving mass block along the X-axis in the Z-axis detection state. The second YZ adapter frame is coupled to the second driving mass block via the second outer adapter elastic beam, and the second YZ adapter frame is coupled to the second Z-axis mass block via the second inner adapter elastic beam, so that while the second driving mass block drives the second YZ adapter frame to move in the driving state, the second YZ adapter frame can move relative to the second driving mass block along the X-axis in the Z-axis detection state.

12. The MEMS triaxial gyroscope as described in claim 11, characterized in that, The first four-mass three-axis gyroscope unit further includes: a first rigid beam extending along the X-axis direction and located on the side of the first Y-axis mass block unit away from the second four-mass three-axis gyroscope unit, wherein the two ends of the first rigid beam are respectively coupled to the first driving mass block and the second driving mass block through a first elastic Y-axis connecting beam; The second four-mass three-axis gyroscope unit further includes: a second rigid beam extending along the X-axis direction and located on the side of the second Y-axis mass block unit away from the first four-mass three-axis gyroscope unit, wherein the two ends of the second rigid beam are coupled to the third driving mass block and the fourth driving mass block respectively through a second elastic Y-axis connecting beam.

13. The MEMS triaxial gyroscope as described in claim 12, characterized in that, Also includes: By setting an anchor point structure to couple the stress isolation frame of the substrate, both the first four-mass three-axis gyroscope unit and the second four-mass three-axis gyroscope unit are located inside the stress isolation frame. The first driving mass block, the second driving mass block, the third driving mass block, and the fourth driving mass block are coupled to the stress isolation frame through a driving elastic beam so that they can reciprocate along the Y-axis in the driving state. The first rigid beam is coupled to the stress isolation frame via a first insulating elastic beam, and the second rigid beam is coupled to the stress isolation frame via a second insulating elastic beam.

14. A chip, characterized in that, The chip includes a MEMS three-axis gyroscope as described in any one of claims 1 to 13.

15. An electronic device, characterized in that, The electronic device includes the chip as described in claim 14.

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