Pressure sensing device and method of forming the same

Abstract

The application discloses a pressure sensing device and a forming method thereof. The pressure sensing device comprises a plurality of sensor layers, the plurality of sensor layers are vertically stacked, each of the plurality of sensor layers comprises an elastic material layer and at least one pressure sensor in the elastic material layer, and a wear-resistant layer is arranged on one side of the plurality of sensor layers in the vertical direction, and a first side of the wear-resistant layer faces away from the plurality of sensor layers. At least one pressure sensor in each sensor layer is used for sensing pressure from the first side of the wear-resistant layer, and the hardness of each elastic material layer of the plurality of sensor layers is different.

Description

Technical Field

[0001] Embodiments of this application relate to a pressure sensing device and a method for forming the same. Background Technology

[0002] Pressure sensing devices can be used in a variety of applications; however, existing pressure sensing devices are not satisfactory in all aspects. For example, see... Figure 1A As shown, for the humanoid robot 20 with a foot structure, when the humanoid robot 20 moves, an optical sensor acquires images of the surrounding environment, which are then analyzed by a computer for judgment. Since the optical sensor only receives images from all around, it is difficult to determine the condition of the soles of the feet. When the slope of the ground 50 changes, see... Figure 1B It may not be possible to correct the center of gravity of the humanoid robot 20 in real time. Additionally, existing humanoid robots have built-in gyroscopes, which are used to sense changes in the center of gravity of the humanoid robot 20, such as... Figure 1B The center of gravity is shown to be tilted forward. Only after the gyroscope senses the shift in the center of gravity does it correct the robot's center of gravity through movement, for example... Figure 1C The center of gravity is corrected backward as shown. Summary of the Invention

[0003] To address the above problems, this application proposes a pressure sensing device and a method for forming the same.

[0004] According to one aspect of this application, a pressure sensing device is provided, comprising: a plurality of sensor layers, the plurality of sensor layers being vertically stacked, each of the plurality of sensor layers including an elastic material layer and at least one pressure sensor located in the elastic material layer; and a wear-resistant layer disposed vertically on one side of the plurality of sensor layers, the first side of the wear-resistant layer facing away from the plurality of sensor layers; wherein at least one pressure sensor in each sensor layer is used to sense pressure from the first side of the wear-resistant layer, and wherein the hardness of each elastic material layer of the plurality of sensor layers is different.

[0005] In some embodiments, the hardness of the multiple elastic material layers of the multiple sensor layers is increased in the direction away from the wear-resistant layer.

[0006] In some embodiments, the plurality of sensor layers include a first sensor layer and a second sensor layer, wherein the first sensor layer is closer to the wear-resistant layer than the second sensor layer, wherein at least one pressure sensor in the first sensor layer is triggered when the pressure reaches a first threshold, and at least one pressure sensor in the second sensor layer is triggered when the pressure reaches a second threshold greater than the first threshold.

[0007] In some embodiments, the plurality of sensor layers further includes a third sensor layer, which is further away from the wear-resistant layer than the first and second sensor layers, wherein at least one pressure sensor in the third sensor layer is triggered when the pressure reaches a third threshold greater than the second threshold.

[0008] In some embodiments, the plurality of sensor layers include a first sensor layer closest to the wear-resistant layer, and the first sensor layer is further provided with at least one infrared sensor for sensing the distance between the pressure sensing device and the target object.

[0009] In some embodiments, each of the plurality of sensor layers further includes a support membrane, and at least one pressure sensor in each sensor layer is disposed on the support membrane.

[0010] In some embodiments, pressure sensors in two vertically adjacent sensor layers are arranged offset from each other when viewed from above.

[0011] In some embodiments, each of the plurality of sensor layers further includes at least one electrical connection connected to at least one pressure sensor, wherein the electrical connection of one sensor layer is connected to an electrical connection of another sensor layer, wherein the at least one electrical connection includes a conductive post or a pin connection.

[0012] According to another aspect of this application, a pressure sensing device for a humanoid robot is provided. The pressure sensing device is disposed on the sole of the humanoid robot's foot. The pressure sensing device includes: a plurality of vertically stacked sensor layers, each of the plurality of sensor layers comprising an elastic material layer and at least one pressure sensor located in the elastic material layer, wherein the hardness of each elastic material layer of the plurality of sensor layers is different; and a wear-resistant layer disposed vertically on one side of the plurality of sensor layers and serving as the outermost layer of the sole of the humanoid robot's foot.

[0013] In some embodiments, the pressure sensing device is used to sense pressure generated by an object under the foot, wherein the hardness of multiple elastic material layers of multiple sensor layers increases in the direction away from the wear-resistant layer, wherein pressure is transmitted from the sensor layer with lower hardness to the sensor layer with higher hardness among the multiple sensor layers.

[0014] In some embodiments, the plurality of sensor layers include a first sensor layer and a second sensor layer, the first sensor layer being closer to the wear-resistant layer than the second sensor layer, and the hardness of the elastic material layer of the first sensor layer being less than the hardness of the elastic material layer of the second sensor layer, pressure triggering the pressure sensor in the first sensor layer but not triggering the pressure sensor in the second sensor layer.

[0015] In some embodiments, the bottom layer of the plurality of sensor layers further includes at least one infrared sensor for sensing the distance between the sole of the foot and the target object to determine the height at which the humanoid robot lifts its foot.

[0016] In some embodiments, the pressure sensed by the pressure sensing device is used to determine whether there is a change in the slope of the ground, so as to adjust the center of gravity of the humanoid robot according to the change in slope.

[0017] According to another aspect of this application, a method for forming a pressure sensing device is provided, the method comprising forming a plurality of sensor layers stacked together. Forming each of the plurality of sensor layers includes the steps of: placing a layer of pressure sensors in a mold, the layer of pressure sensors including a plurality of pressure sensors electrically connected by connecting lines; filling the mold with an elastic material layer to encapsulate at least one pressure sensor, thereby forming a sensor layer, wherein an elastic material layer of different hardness is applied to each of the plurality of sensor layers. The method further includes: attaching a wear-resistant layer to the bottommost sensor layer of the plurality of sensor layers.

[0018] In some embodiments, a plurality of sensor layers are independently formed using elastic material layers of corresponding hardness, wherein, prior to attaching the wear-resistant layer, the method further includes: vertically joining the plurality of sensor layers in order of increasing hardness, wherein the elastic material layer with the lowest hardness is used to attach to the wear-resistant layer.

[0019] In some embodiments, placing a pressure sensor in a mold includes: placing a support membrane on the mold; and placing a pressure sensor on the support membrane, wherein an elastic material layer further covers the support membrane.

[0020] In some embodiments, after forming one sensor layer and before forming another sensor layer thereon, the method further includes placing another mold over the formed sensor layer to form another sensor layer directly on one sensor layer.

[0021] In some embodiments, placing a layer of pressure sensors in a mold includes: providing at least one electrical connector for vertical electrical connection on at least one of a plurality of pressure sensors, wherein an elastic material layer laterally surrounds at least one electrical connector.

[0022] In some embodiments, when forming the bottommost sensor layer, the method further includes: placing an infrared sensor laterally adjacent to a pressure sensor in a layer of pressure sensors in a mold, wherein the elastic material layer also covers the infrared sensor.

[0023] In some embodiments, the method further includes attaching a plurality of sensor layers to the sole of a humanoid robot, such that a wear-resistant layer is the outermost layer of the sole of the humanoid robot, wherein the hardness of a plurality of elastic material layers of the plurality of sensor layers is increased in the direction away from the wear-resistant layer. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1A This is a schematic diagram of an existing humanoid robot.

[0026] Figure 1B and Figure 1C These are schematic diagrams illustrating the changes in the center of gravity and the correction of the center of gravity of existing humanoid robots when the ground slope changes.

[0027] Figure 2A This is a cross-sectional schematic diagram of a pressure sensing device according to an embodiment of this application.

[0028] Figure 2B This is an exploded view of a pressure sensing device according to an embodiment of this application.

[0029] Figure 3A This is a schematic diagram of an electrical connector that is a pin connector.

[0030] Figure 3B This is a schematic diagram showing the interconnection of vertically adjacent pin connectors.

[0031] Figure 4 This is a cross-sectional schematic diagram of a pressure sensing device 200 according to another embodiment of this application.

[0032] Figures 5A to 5D These are perspective views of various steps in the method of forming the pressure sensing device according to the embodiments of this application.

[0033] Figure 6 This is a cross-sectional schematic diagram of a pressure sensing device 300 according to another embodiment of this application.

[0034] Figure 7A , Figure 7B , Figure 7C-1 , Figure 7D-1 and Figure 7E This is a perspective view of several steps in a method for forming a pressure sensing device according to another embodiment of this application.

[0035] Figure 7C-2 and Figure 7D-2 They correspond to Figure 7C-1 and Figure 7D-1 A cross-sectional schematic diagram.

[0036] Figure 8 This is a schematic diagram of a pressure sensing device according to an embodiment of this application used in a humanoid robot. Detailed Implementation

[0037] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of this application are within the scope of protection of this application.

[0038] The following disclosure provides numerous different embodiments or instances for implementing various features of the provided subject matter. Specific examples of elements and arrangements will be described below to simplify the invention. These are merely examples and are not intended to limit the invention. For example, in the following description, forming a first component above or on a second component can include embodiments where the first and second components are in direct contact, or embodiments where an additional component is formed between the first and second components such that the first and second components are not in direct contact. Furthermore, reference numerals and / or letters may be repeated throughout the various instances. Such repetition is for brevity and clarity only and does not in itself indicate a relationship between the various embodiments and / or configurations discussed.

[0039] Furthermore, where there is no conflict, the embodiments and features described in this application can be combined with each other. This application will now be described in detail with reference to the accompanying drawings and embodiments.

[0040] According to an embodiment of this application, a pressure sensing device is provided. Figure 2A This is a cross-sectional schematic diagram of a pressure sensing device according to an embodiment of this application. Figure 2B This is an exploded view of a pressure sensing device according to an embodiment of this application. First, see... Figure 2A As shown, the pressure sensing device 100 may include multiple sensor layers stacked in a vertical direction. In the following description, the multiple sensor layers include a first sensor layer 210, a second sensor layer 220, a third sensor layer 230, and a fourth sensor layer 240 as examples. It should be understood that the number of sensor layers in the pressure sensing device 100 can be flexibly increased or decreased according to actual application requirements.

[0041] Combination Figure 2A and Figure 2BAs shown, the first sensor layer 210 may include a first elastic material layer 212 and at least one pressure sensor 290 located within the first elastic material layer 212. The second sensor layer 220 may include a second elastic material layer 222 and at least one pressure sensor 290 located within the second elastic material layer 222. The third sensor layer 230 may include a third elastic material layer 232 and at least one pressure sensor 290 located within the third elastic material layer 232. The fourth sensor layer 240 may include a fourth elastic material layer 242 and at least one pressure sensor 290 located within the fourth elastic material layer 242.

[0042] Pressure sensors 290 in each of the first sensor layers 210 to the fourth sensor layers 240 can be arranged as an array of multiple rows and columns. The pressure sensors 290 in the first sensor layers 210 to the fourth sensor layers 240 can be electrically connected to each other via corresponding connection lines 302 in the first elastic material layers 212 to the fourth elastic material layers 242.

[0043] The pressure sensing device 100 may further include a wear-resistant layer 260 disposed below the first sensor layer 210, with its first side S1 facing away from the first sensor layer 210 to the fourth sensor layer 240. In some embodiments, the hardness of the wear-resistant layer 260 is greater than the hardness of each of the first sensor layer 210 to the fourth sensor layer 240. The wear-resistant layer 260 can protect the first sensor layer 210 to the fourth sensor layer 240. The pressure sensors 290 of the first sensor layer 210 to the fourth sensor layer 240 are all used to sense the pressure F from the first side S1 of the wear-resistant layer 260. In some embodiments, since the pressure F causes deformation of the corresponding sensor layer in the first sensor layer 210 to the fourth sensor layer 240, the pressure sensor 290 in the corresponding sensor layer can sense the pressure magnitude based on this deformation.

[0044] In some embodiments, the first elastic material layer 212, the second elastic material layer 222, the third elastic material layer 232, and the fourth elastic material layer 242 have different hardnesses. By stacking the first elastic material layer 212 to the fourth elastic material layer 242 with different hardnesses, a multi-level pressure sensing design for measuring spatial pressure changes is provided.

[0045] In some embodiments, the first elastic material layer 212 to the fourth elastic material layer 242 may be flexible materials with different hardness. The first elastic material layer 212 to the fourth elastic material layer 242 may be a transparent flexible adhesive. In some embodiments, the first elastic material layer 212 to the fourth elastic material layer 242 may include LSR (Liquid Silicone Rubber).

[0046] Table 1 below provides various parameters for some optional adhesive materials, from the first elastic material layer 212 to the fourth elastic material layer 242. Types 527, CN8400, 3-6635, Q3-6575, EG-3896, and EG-3810 can all contain LSR and can have different hardnesses by adjusting fillers and modifiers. For example, compared to the standard type 527, type CN8400 can have a single filler, achieving lower cost and lower hardness; types 3-6635 and Q3-6575 can have additional active catalysts, achieving low-temperature curing and lower hardness; type EG-3896 can have reinforcing fillers, toughening modifiers, and self-adhesives, achieving high toughness, self-adhesion, and high hardness; type EG-3810 can have temperature stabilizers, achieving high and low temperature resistance and lower hardness. Furthermore, single-component (1-part) types can be used directly without mixing, while two-component (2-part) types require mixing before use. All types of adhesive materials can form elastic material layers after curing.

[0047] Table 1

[0048]

[0049] In some embodiments, the hardness of the first elastic material layer 212 to the fourth elastic material layer 242 increases in the direction away from the wear-resistant layer 260. The first elastic material layer 212, closest to the wear-resistant layer 260, may have the lowest hardness, and the fourth elastic material layer 242, furthest from the wear-resistant layer 260, may have the highest hardness. For example, the hardness of the first elastic material layer 212 may be in the range of 50 grams to 150 grams, and the hardness of the fourth elastic material layer 242 may be in the range of 150 grams to 300 grams. The hardness of the second elastic material layer 222 may be greater than the hardness of the first elastic material layer 212. The hardness of the third elastic material layer 232 may be greater than the hardness of the second elastic material layer 222. In some embodiments, the increased hardness of the first elastic material layer 212 to the fourth elastic material layer 242 can be achieved by using different flexible materials. In one embodiment, the first elastic material layer 212 may be any one of the above-mentioned adhesive materials of type 3-6635, Q3-6575, and EG-3810, the second elastic material layer 222 may be an adhesive material of type CN8400, the third elastic material layer 232 may be an adhesive material of type 527, and the fourth elastic material layer 242 may be an adhesive material of type EG-3896.

[0050] By stacking the first elastic material layer 212 to the fourth elastic material layer 242 sequentially with increasing hardness, pressure sensors 290 at different levels of the first sensor layer 210 to the fourth sensor layer 240 are triggered according to the magnitude of the pressure F. Specifically, when the pressure F reaches a first threshold, the pressure sensor 290 in the first sensor layer 210 is triggered, but the second sensor layers 220 to the fourth sensor layer 240 are not triggered. When the pressure F reaches a second threshold greater than the first threshold, the pressure sensor 290 in the second sensor layer 220 is further triggered, but the third sensor layers 230 to the fourth sensor layer 240 are not triggered. When the pressure F reaches a third threshold greater than the second threshold, the pressure sensor 290 in the third sensor layer 230 is further triggered, but the fourth sensor layer 240 is not triggered. When the pressure F reaches a fourth threshold greater than the third threshold, the pressure sensor 290 in the fourth sensor layer 240 is triggered. In other words, a slight pressure F will only trigger the lower-level pressure sensor 290 (with a softer elastic material layer), and as the applied pressure F increases, it will gradually trigger the upper-level pressure sensor 290. This design can avoid generating too many useless pressure signals, thereby reducing the computing burden.

[0051] In some embodiments, at least one infrared sensor 295 may also be disposed in the first sensor layer 210. The infrared sensor 295 is an optical element used to sense the distance between the pressure sensing device 100 and a target object. In embodiments where the infrared sensor 295 is included in the first sensor layer 210, the wear-resistant layer 260 may be light-transmitting.

[0052] In some embodiments, see Figure 2B Each of the first sensor layers 210 to the fourth sensor layer 240 may further include at least one electrical connector 304 connected to a corresponding pressure sensor 290. In some embodiments, the electrical connector 304 may be located on the corresponding pressure sensor 290. The electrical connector 304 of each of the first sensor layers 210 to the fourth sensor layer 240 may be electrically connected to the electrical connector 304 of the other sensor layer, which forms a signal conduction channel, such as signal conduction channels P1 and P2, through the first sensor layer 210 to the fourth sensor layer 240. By providing electrical connectors 304 in each sensor layer to form vertical conduction and signal conduction channels P1 and P2, the pressure-sensitive current generated by the pressure sensor 290 can be conducted, and the corresponding signal can be directly transmitted without the need to form a separate vertical signal transmission line.

[0053] In some embodiments, such as Figure 2B As shown, the electrical connector 304 can be a conductive pillar formed of a conductive material, such as a copper pillar. In other embodiments, see [reference needed]. Figure 3AAs shown, electrical connector 304 can be a pin-fit connector 305. See also Figure 3B As shown, two vertically adjacent pin connectors 305 can be directly connected to each other. Specifically, the bottom tip of the upper pin connector 305 is inserted into the top end of the lower pin connector 305 for direct connection.

[0054] Figure 4 This is a cross-sectional schematic diagram of a pressure sensing device 200 according to another embodiment of this application. See also Figure 4 As shown, the pressure sensors 290 in vertically adjacent sensor layers from the first sensor layer 210 to the fourth sensor layer 240 do not overlap in the vertical direction. For example, the pressure sensor 290 in the second sensor layer 220 does not overlap vertically with the pressure sensor 290 in the adjacent first sensor layer 210, nor with the pressure sensor 290 in the adjacent third sensor layer 230. In other words, the pressure sensors 290 in two vertically adjacent sensor layers are staggered from each other in a top-view arrangement. This is more advantageous for sensing the applied pressure F in each region.

[0055] Figures 5A to 5D This is a schematic diagram of several steps in the method of forming the pressure sensing device according to an embodiment of this application. Figures 5A to 5D The method shown can be used to form the pressure sensing device 100 or 200 described above. First see... Figure 5A As shown, a single-layer pressure sensor 290 is first fabricated. The single-layer pressure sensor 290 is arranged in an array of multiple pressure sensors 290. The multiple pressure sensors 290 are electrically connected to each other via laterally extending connecting lines 302. Multiple electrical connectors 304 for vertical electrical connection can be respectively provided on some of the pressure sensors 290.

[0056] Then, mold 410 is provided. Mold 410 can be, for example, a steel plate with an opening at the top. A single-layer pressure sensor 290 is placed in mold 410. Subsequently, the material of the first elastic material layer 212 is potted into mold 410 to encapsulate the single-layer pressure sensor 290 and laterally surround the electrical connector 304. After the material of the first elastic material layer 212 solidifies, it is removed from mold 410, thus forming the first sensor layer 210, as shown below. Figure 5B As shown. In some embodiments, a single-layer pressure sensor 290 can be placed using a pick and place machine. In some embodiments, a portion of the material of the first elastic material layer 212 can be injected into the mold 410 first, and then the single-layer pressure sensor 290 can be placed. Subsequently, another portion of the material of the first elastic material layer 212 can be injected to form a first elastic material layer 212 encapsulating the single-layer pressure sensor 290.

[0057] It should be understood that in some embodiments, when forming the pressure sensor 290 in the bottom first sensor layer 210, the pressure sensor 290 and the infrared sensor 295 are arranged together in an array and electrically connected through the connection line 302, and then the first elastic material layer 212 is formed to cover the pressure sensor 290 and the infrared sensor 295.

[0058] according to Figures 5A to 5B The described steps can form a second sensor layer 220, a third sensor layer 230, and a fourth sensor layer 240, respectively. Specifically, elastic material layers of different hardness can be applied to the first sensor layer 210 to the fourth sensor layer 240, so that the first sensor layer 210 to the fourth sensor layer 240 can be formed independently using elastic material layers of corresponding hardness.

[0059] Then, the formed first sensor layer 210 to the fourth sensor layer 240 can be stacked vertically, as follows: Figure 5C As shown. The first sensor layer 210 to the fourth sensor layer 240 are bonded together, as shown. Figure 5D As shown. In some embodiments, the first sensor layer 210 to the fourth sensor layer 240 are joined in order of increasing hardness from bottom to top. In some embodiments, during the joining of the first sensor layer 210 to the fourth sensor layer 240, openings exposing electrical connectors 304 at each layer may be formed, and vertically adjacent electrical connectors 304 may be electrically connected together to form the aforementioned signal conduction channels P1, P2 extending vertically through the first sensor layer 210 to the fourth sensor layer 240.

[0060] exist Figure 5D Following the steps shown, the wear-resistant layer 260 can be further attached to the bottommost first sensor layer 210 among the first sensor layers 210 to the fourth sensor layers 240. The first elastic material layer 212, which has the lowest hardness among the first elastic material layers 212 to the fourth elastic material layers 242, can be used to attach to the wear-resistant layer 260.

[0061] Figures 5A to 5D The described process allows for the flexible fabrication of pressure sensing devices with the required number of layers, based on specific needs. Compared to fabricating multiple sensor layers all at once, this application integrates some functions to create a single-layer sensor layer, which simplifies the process and results in a higher product yield.

[0062] Figure 6 This is a cross-sectional schematic diagram of a pressure sensing device 300 according to another embodiment of this application. See also Figure 6As shown, in the pressure sensing device 300, each of the first sensor layers 210 to the fourth sensor layers 240 may further include a first support film 216 to a fourth support film 246. Specifically, the first sensor layer 210 includes a first support film 216, and a plurality of pressure sensors 290 and infrared sensors 295 in the first sensor layer 210 are disposed on the first support film 216. A first elastic material layer 212 covers the first support film 216 and the plurality of pressure sensors 290 and infrared sensors 295. The second sensor layer 220 includes a second support film 226, and a plurality of pressure sensors 290 in the second sensor layer 220 are disposed on the second support film 226. A second elastic material layer 222 covers the second support film 226 and the plurality of pressure sensors 290. The third sensor layer 230 includes a third support membrane 236, and a plurality of pressure sensors 290 in the third sensor layer 230 are disposed on the third support membrane 236. A third elastic material layer 232 covers the third support membrane 236 and the plurality of pressure sensors 290. The fourth sensor layer 240 includes a fourth support membrane 246, and a plurality of pressure sensors 290 in the fourth sensor layer 240 are disposed on the fourth support membrane 246. A fourth elastic material layer 242 covers the fourth support membrane 246 and the plurality of pressure sensors 290.

[0063] In some embodiments, the first support film 216, the second support film 226, the third support film 236, and the fourth support film 246 are all polymer films. In some embodiments, the first support film 216, the second support film 226, the third support film 236, and the fourth support film 246 have different hardnesses. In some embodiments, the hardness of the first support film 216 to the fourth support film 246 increases in the direction away from the wear-resistant layer 260. In some embodiments, the hardness of the first support film 216 of the first sensor layer 210 and the first elastic material layer 212 may be the same or substantially the same. The hardness of the second support film 226 of the second sensor layer 220 and the second elastic material layer 222 may be the same or substantially the same. The hardness of the third support film 236 of the third sensor layer 230 and the third elastic material layer 232 may be the same or substantially the same. The hardness of the fourth support film 246 of the fourth sensor layer 240 and the fourth elastic material layer 242 may be the same or substantially the same. With this stiffness configuration, as the applied pressure F increases, the upper-level pressure sensor 290 is gradually triggered. This design can avoid generating too many useless pressure signals, thereby reducing the computational burden.

[0064] Figures 7A to 7E This is a schematic diagram of several steps in a method for forming a pressure sensing device according to another embodiment of this application. Figures 7A to 7E The method shown can be used to form the pressure sensing device 300 described above.

[0065] See Figure 7A As shown, a monolayer pressure sensor 290 is fabricated. The monolayer pressure sensor 290 is arranged as an array of multiple pressure sensors 290. The multiple pressure sensors 290 are electrically connected to each other via laterally extending connecting lines 302. Electrical connectors 304 for vertical electrical connection are respectively provided on some of the pressure sensors 290. A first support membrane 216 is provided. The formed monolayer pressure sensor 290 is placed on the first support membrane 216. In some embodiments, the monolayer pressure sensor 290 can be placed on the first support membrane 216 using a pick-and-place machine.

[0066] See Figure 7B A mold 421 is provided. In some embodiments, the mold 421 may be, for example, a steel plate. A first support membrane 216 and a single layer of pressure sensor 290 thereon are placed on the mold 421.

[0067] Figure 7C-1 Is Figure 7B A three-dimensional diagram of the subsequent stages. Figure 7C-2 It corresponds to Figure 7C-1 A schematic diagram of the cross-section at section line C1-C1. (Combined with...) Figure 7C-1 and Figure 7C-2 As shown, another mold 422 is placed on the edge region of mold 421. Subsequently, the material of the first elastic material layer 212 is filled into mold 422 in a potting manner to encapsulate the single-layer pressure sensor 290, forming the first sensor layer 210.

[0068] It should be understood that in some embodiments, when forming the pressure sensor 290 of the bottom first sensor layer 210, the pressure sensor 290 and the infrared sensor 295 are arranged together in an array and electrically connected through the connection line 302, and then placed on the first support film 216. Then, a first elastic material layer 212 is formed to cover the first support film 216 to cover the pressure sensor 290 and the infrared sensor 295.

[0069] Figure 7D-1 Is Figure 7C-1 A three-dimensional diagram of the subsequent stages. Figure 7D-2 It corresponds to Figure 7D-1 A schematic diagram of the cross-section at section line C2-C2. (Combined with...) Figure 7D-1 and Figure 7D-2As shown, after the first elastic material layer 212 of the first sensor layer 210 solidifies, a second support film 226 is placed on the first sensor layer 210, and another monolayer pressure sensor 290 is placed on the second support film 226. Then, another mold 423 is set above the mold 422. The material of the second elastic material layer 222 is filled into the mold 423 to encapsulate the corresponding pressure sensor 290, thus forming the second sensor layer 220 directly on the first sensor layer 210.

[0070] Repeating the above process, a third support film 236 is placed on the formed second sensor layer 220, and another monolayer pressure sensor 290 is placed on the third support film 236. Then, another mold 424 is placed above the mold 423. The material of the third elastic material layer 232 is filled into the mold 424 to encapsulate the corresponding pressure sensor 290, forming the third sensor layer 230. Subsequently, the above process can be repeated to form a reference on the third sensor layer 230. Figure 6 The fourth sensor layer 240 is described. Elastic material layers of different hardness can be applied to the first sensor layer 210 through the fourth sensor layer 240.

[0071] See Figure 7E After the elastic material layer solidifies, the first sensor layer 210 to the fourth sensor layer 240 are removed from the mold, and the first sensor layer 210 to the fourth sensor layer 240 are bonded together. In some embodiments, the first sensor layer 210 to the fourth sensor layer 240 are bonded in order of increasing hardness from bottom to top. In some embodiments, during the bonding of the first sensor layer 210 to the fourth sensor layer 240, openings exposing electrical connectors 304 at each layer may be formed, and vertically adjacent electrical connectors 304 may be electrically connected together.

[0072] exist Figure 7E Following the steps shown, the wear-resistant layer 260 can be further attached to the bottommost first sensor layer 210 among the first sensor layers 210 to the fourth sensor layers 240. In some embodiments, the first support film 216 with the lowest hardness is used to attach to the wear-resistant layer 260.

[0073] Figures 7A to 7E The described process can also flexibly manufacture the required number of pressure sensing layers according to needs. Compared to manufacturing multiple sensor layers at once, this application first integrates some functions to create a single sensor layer, which is simpler in terms of process difficulty and can achieve a higher product yield.

[0074] Figure 8 This is a schematic diagram of a pressure sensing device according to an embodiment of this application used in a humanoid robot. See also Figure 8As shown, a pressure sensing device 100 is disposed on the foot 800 of the humanoid robot and serves as the sole 820 of the foot 800. A wear-resistant layer 260 is the outermost layer of the sole 820. The wear-resistant layer 260 is the layer that contacts the bottom surface during the humanoid robot's movement. A first side S1 of the wear-resistant layer 260 faces away from the first sensor layer 210 to the fourth sensor layer 240, and the pressure sensing device 100 is used to sense the pressure F from the first side S1 of the wear-resistant layer 260. In some embodiments, the pressure F is generated by an object on the bottom surface.

[0075] In some embodiments, the hardness of the first elastic material layer 212 to the fourth elastic material layer 242 increases in the vertically upward direction away from the wear-resistant layer 260. The pressure F is transmitted from the first sensor layer 210 (where the hardness is less) to the fourth sensor layer 240 (where the hardness is greater). As described above, a slight pressure F will only trigger the pressure sensor 290 of the lower level (with a softer elastic material layer), and as the applied pressure F increases, it will gradually trigger the pressure sensor 290 of the upper level. This design can avoid generating too many useless pressure signals, thereby reducing the computational burden.

[0076] In some embodiments, the pressure F sensed by the pressure sensing device 100 is used to determine whether there is a change in ground slope, so as to adjust the center of gravity of the humanoid robot according to the change in slope. By measuring the pressure F by the pressure sensing device 100 and based on the signal fed back by the pressure sensing device 100, the change in ground slope can be determined, and the center of gravity can be corrected accordingly. Compared with existing methods that rely solely on gyroscopes to correct the center of gravity, this method can correct the center of gravity more timely and accurately.

[0077] The bottommost first sensor layer 210 among the first to fourth sensor layers 240 may further include at least one infrared sensor 295. The infrared sensor 295 can be used to sense the distance between the foot and a target object to determine the height at which the humanoid robot lifts its foot. In some embodiments, the target object may be the ground, or other objects on the ground. Using the infrared sensor 295 allows for application to more complex terrain. If the ground has slight undulations, the signal detected by this application can be more accurate and sensitive compared to existing optical sensors that require image-based judgment.

[0078] By incorporating an infrared sensor 295 in the bottommost first sensor layer 210 to sense the distance between the foot and the target object, spatial signals can be provided even when the foot is not in contact with the target object, assisting in determining the height of the humanoid robot's foot lift. In extreme environments, such as in the absence of light or on uneven ground, the humanoid robot can obtain sufficient ground information through the pressure sensing device provided in this application to determine its actions. Furthermore, by utilizing multiple sensor layers on the foot, the ground conditions of the foot can be determined using indirect signals (such as infrared radiation from the infrared sensor 295) and direct signals (such as pressure signals from the pressure sensor 290), and this information is fed back in real-time to the humanoid robot's logic unit to make action decisions, thus aiding in balance and the execution of optimal movements.

[0079] It should be understood that, Figure 8 In the illustrated embodiment, pressure sensing device 100 is used as an example. In other embodiments, other pressure sensing devices 200 or 300 described above may also be used.

[0080] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A pressure sensing device, characterized in that, include: Multiple sensor layers are vertically stacked, and each sensor layer includes an elastic material layer and at least one pressure sensor located in the elastic material layer; as well as A wear-resistant layer is disposed on one side of the plurality of sensor layers in a vertical direction, with the first side of the wear-resistant layer facing away from the plurality of sensor layers; Wherein, the at least one pressure sensor in each sensor layer is used to sense pressure from the first side of the wear-resistant layer. The hardness of each of the multiple sensor layers is different.

2. The pressure sensing device according to claim 1, characterized in that, The hardness of the plurality of elastic material layers of the plurality of sensor layers increases in the direction away from the wear-resistant layer.

3. The pressure sensing device according to claim 1, characterized in that, The plurality of sensor layers includes a first sensor layer and a second sensor layer, wherein the first sensor layer is closer to the wear-resistant layer than the second sensor layer. When the pressure reaches a first threshold, at least one pressure sensor in the first sensor layer is triggered. When the pressure reaches a second threshold greater than the first threshold, at least one pressure sensor in the second sensor layer is triggered.

4. The pressure sensing device according to claim 3, characterized in that, The plurality of sensor layers further includes a third sensor layer, which is further away from the wear-resistant layer than the first sensor layer and the second sensor layer. When the pressure reaches a third threshold greater than the second threshold, at least one pressure sensor in the third sensor layer is triggered.

5. The pressure sensing device according to claim 1, characterized in that, The plurality of sensor layers includes a first sensor layer that is closest to the wear-resistant layer. The first sensor layer also includes at least one infrared sensor for sensing the distance between the pressure sensing device and the target object.

6. The pressure sensing device according to claim 1, characterized in that, Each of the plurality of sensor layers further includes a support membrane, wherein the at least one pressure sensor in each sensor layer is disposed on the support membrane.

7. The pressure sensing device according to claim 1, characterized in that, Pressure sensors in two vertically adjacent sensor layers are staggered from each other when viewed from above.

8. The pressure sensing device according to claim 1, characterized in that, Each of the plurality of sensor layers further includes at least one electrical connection connected to the at least one pressure sensor, wherein the electrical connection of one sensor layer is connected to the electrical connection of another sensor layer. The at least one electrical connector includes a conductive post or a pin connector.

9. A pressure sensing device for a humanoid robot, characterized in that, The pressure sensing device is disposed on the sole of the humanoid robot's foot, and the pressure sensing device includes: A plurality of vertically stacked sensor layers, each of the plurality of sensor layers comprising an elastic material layer and at least one pressure sensor located within the elastic material layer, wherein the stiffness of each of the elastic material layers is different; and A wear-resistant layer is disposed on one side of the plurality of sensor layers in a vertical direction and serves as the outermost layer of the sole of the humanoid robot's foot.

10. The pressure sensing device for a humanoid robot according to claim 9, characterized in that, The pressure sensing device is used to sense the pressure generated by an object beneath the foot. In the direction away from the wear-resistant layer, the hardness of the multiple elastic material layers of the plurality of sensor layers increases. The pressure is transmitted from the sensor layer with lower hardness to the sensor layer with higher hardness among multiple sensor layers.

11. The pressure sensing device for a humanoid robot according to claim 10, characterized in that, The plurality of sensor layers includes a first sensor layer and a second sensor layer, wherein the first sensor layer is closer to the wear-resistant layer than the second sensor layer, and the hardness of the elastic material layer of the first sensor layer is less than the hardness of the elastic material layer of the second sensor layer. The pressure triggers the pressure sensor in the first sensor layer but does not trigger the pressure sensor in the second sensor layer.

12. The pressure sensing device for a humanoid robot according to claim 9, characterized in that, The bottom layer of the plurality of sensor layers also includes at least one infrared sensor, which is used to sense the distance between the sole of the foot and the target object in order to determine the height at which the humanoid robot lifts its foot.

13. The pressure sensing device for a humanoid robot according to claim 9, characterized in that, The pressure sensed by the pressure sensing device is used to determine whether there is a change in the slope of the ground, so as to adjust the center of gravity of the humanoid robot according to the change in slope.

14. A method for forming a pressure sensing device, characterized in that, The system includes multiple sensor layers arranged in a stacked configuration, wherein forming each of the multiple sensor layers includes the following steps: A layer of pressure sensors is placed in the mold, the layer of pressure sensors comprising a plurality of pressure sensors electrically connected by connecting lines; An elastic material layer is filled into the mold to encapsulate the at least one pressure sensor, thereby forming a sensor layer, wherein an elastic material layer of different hardness is applied to each of the plurality of sensor layers; The method further includes attaching a wear-resistant layer to the bottommost sensor layer of the plurality of sensor layers.

15. The method according to claim 14, characterized in that, in, The plurality of sensor layers are formed independently using elastic material layers of corresponding hardness. The method further includes, prior to attaching the wear-resistant layer, vertically bonding the plurality of sensor layers in order of increasing hardness, wherein the elastic material layer with the lowest hardness is used to attach to the wear-resistant layer.

16. The method according to claim 14, characterized in that, Placing the pressure sensor layer in the mold includes: A support membrane is placed on the mold; and The pressure sensor is placed on a support membrane, wherein the elastic material layer also covers the support membrane.

17. The method according to claim 16, characterized in that, The method further includes, after forming one sensor layer and before forming another sensor layer on top of it: Another mold is placed above the formed sensor layer to form the other sensor layer directly on the first sensor layer.

18. The method according to claim 14, characterized in that, Placing the pressure sensor layer in the mold includes: At least one electrical connector for vertical electrical connection is provided on at least one of the plurality of pressure sensors, wherein the elastic material layer laterally surrounds the at least one electrical connector.

19. The method according to claim 14, characterized in that, When forming the bottommost sensor layer, the method further includes: An infrared sensor is placed in the mold that is laterally adjacent to the pressure sensor in the layer of pressure sensors, wherein the elastic material layer also covers the infrared sensor.

20. The method according to claim 14, characterized in that, Also includes: The plurality of sensor layers are attached to the soles of the humanoid robot's feet, with the wear-resistant layer serving as the outermost layer of the humanoid robot's soles. In particular, the hardness of the multiple elastic material layers of the multiple sensor layers increases in the direction away from the wear-resistant layer.

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