Scanning system and scanning method

Abstract

The application belongs to the technical field of CT, and discloses a scanning system and a scanning method, wherein the scanning system comprises a sample table, a detector, a ray tube and a first adjusting frame; in a first direction, the sample table is located between the detector and the ray tube, the detector can swing around a deflection axis perpendicular to the first direction, the first adjusting frame comprises a support frame body, a sliding frame body and a first rotating frame body, the sliding frame body is slidingly arranged on the support frame body along the first direction, the first rotating frame body is rotationally installed on the sliding frame body, and the rotation axis is parallel to the first direction; the sample table is arranged on the first rotating frame body; and the scanning method uses the above scanning system. In the application, the sliding frame body is slidingly connected to the support frame body along the first direction, so that the sample table can be positionally adjusted between the detector and the ray tube, thereby effectively improving the magnification of the scanned sample; and the sample table can move in the first direction, can avoid being blocked, and can better detect the sample defects.

Description

Technical Field

[0001] This invention relates to the field of CT technology, and more particularly to a scanning system and scanning method. Background Technology

[0002] CT (Computed Tomography) is an imaging technique that uses X-ray beams to perform tomographic scanning of a sample and uses computer processing to produce detailed images of the sample's internal structure.

[0003] Existing CT scanning methods include PCT (Planar Computer Tomography). In PCT, two of the three components—sample, detector, and X-ray tube—move relative to each other. The sample moves in a 360-degree circle around a point in the plane on the sample stage to obtain images of the same area from different angles. PCT has no limit on sample size and can theoretically process samples of any size. Its advantages include high efficiency, short scan time (usually less than 10 minutes), small data volume, and fast processing speed. Its disadvantages include poor resolution, inability to display defects at specific angles of the sample, and poor image detail.

[0004] When performing PCT scanning, the detector needs to be deflected to a fixed angle. The larger the angle, the stronger the stereo information of the sample. For large circuit boards, the target scanning area is usually a single chip on the board. After the detector is deflected, the image information of other components around the target chip will overlap and interfere, affecting the scanning effect. On the other hand, reducing the detector deflection angle will result in a lack of stereo sense and affect the 3D reconstruction. Summary of the Invention

[0005] The purpose of this invention is to provide a scanning system and scanning method that can effectively avoid interference during the scanning process.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] The scanning system includes a sample stage, a detector, an X-ray tube, and a first adjustment frame. In a first direction, the sample stage is located between the detector and the X-ray tube. The detector is oscillating about a deflection axis perpendicular to the first direction. The first adjustment frame includes:

[0008] Support frame;

[0009] The sliding frame is slidably mounted on the support frame along the first direction;

[0010] The first rotating frame is rotatably mounted on the sliding frame, with its rotation axis parallel to the first direction, and the sample stage is set on the first rotating frame.

[0011] Preferably, the first adjustment frame also includes:

[0012] The second rotating frame is rotatably connected to the first rotating frame, with its rotation axis parallel to the second direction. The sample stage is rotatably connected to the second rotating frame, with its rotation axis parallel to the third direction. The first direction, the second direction, and the third direction are perpendicular to each other.

[0013] Preferably, one of the sliding frame and the first rotating frame is provided with a circular slide rail, and the other is provided with a slider, with the slider slidably connected to the circular slide rail.

[0014] Preferably, it also includes a first driver, a second driver, a third driver, and a fourth driver;

[0015] The first actuator is configured to drive the sliding frame to slide relative to the support frame;

[0016] The second actuator is configured to drive the first rotating frame to rotate relative to the sliding frame;

[0017] The third actuator is configured to drive the second rotating frame to rotate relative to the first rotating frame;

[0018] The fourth actuator is configured to drive the sample stage to rotate relative to the second rotating frame.

[0019] Preferably, a second adjustment frame is also included, the second adjustment frame comprising:

[0020] seat body;

[0021] The first swing frame is rotatably connected to the base, and the axis of rotation is the axis of deflection.

[0022] The second pendulum frame is slidably connected to the first pendulum frame, with the sliding direction perpendicular to the deflection axis, and the detector is installed on the second pendulum frame.

[0023] Preferably, a fifth drive and a sixth drive frame are also included;

[0024] The fifth actuator is configured to drive the first swing frame to rotate relative to the base.

[0025] The sixth actuator is configured to drive the second pendulum body to slide relative to the first pendulum body.

[0026] Preferably, a third adjustment frame is also included, on which the ray tube is slidably disposed along the first direction.

[0027] Preferably, a seventh drive is also included, the seventh drive frame being configured to drive the ray tube to move relative to the third adjustment frame.

[0028] A scanning method using a scanning system, the scanning system including a sample stage, a detector, an X-ray tube, and a first adjustment frame, wherein the sample stage is located between the detector and the X-ray tube in a first direction, the detector is oscillating about a deflection axis perpendicular to the first direction, the first adjustment frame includes a support frame, a sliding frame, and a first rotating frame, the sliding frame being slidably disposed on the support frame along the first direction, the first rotating frame being rotatably mounted on the sliding frame, the rotation axis being parallel to the first direction, and the sample stage being disposed on the first rotating frame, the scanning method including:

[0029] Step 1: Fix the sample on the sample stage, turn on the detector and X-ray tube, adjust the position of the detector and X-ray tube to scan the sample to achieve the set resolution, and record the state of the sample stage, detector and X-ray tube at this time as the initial state.

[0030] Step 2: Deflect the detector around the deflection axis to the avoidance orientation, adjust the position and orientation of the sample stage so that the scanning sample reaches the set resolution, and record the avoidance orientation of the detector and the position and orientation of the sample stage at this time as state P.

[0031] Step 3: Adjust the sample stage, detector, and X-ray tube to their initial positions. Rotate the sample stage around the first direction to various angles α. Detect the exposure of the target scanning area of ​​the sample at different angles α. When occlusion occurs, adjust the detector's clearance orientation and the sample stage's position orientation to state P to eliminate the occlusion of the target scanning area of ​​the sample. Record the information of the detector's clearance orientation and the sample stage's position orientation state P when the sample stage is at various angles α.

[0032] Step 4: Scan the sample using the information of the detector's avoidance orientation and the state P of the sample stage's position orientation at various angles α.

[0033] Preferably, the first adjustment frame further includes a second rotating frame, which is rotatably connected to the first rotating frame with its rotation axis parallel to the second direction. The sample stage is rotatably connected to the second rotating frame with its rotation axis parallel to the third direction. The first direction, the second direction, and the third direction are perpendicular to each other.

[0034] In step two, adjusting the position and orientation of the sample stage includes adjusting at least one of moving the sample stage along a first direction, rotating it around a second direction, and rotating it around a third direction.

[0035] Preferably, in step two, multiple avoidance orientations are set, and the position and orientation of the sample stage are adjusted at different avoidance orientations to make the magnification of the scanned sample the same, and finally multiple states P are recorded.

[0036] Preferably, in step three, when occlusion occurs, the detector's avoidance orientation and the sample stage's position orientation are sequentially adjusted to multiple states P and scanned until the occlusion of the target scanning area of ​​the sample is eliminated.

[0037] Preferably, step four includes:

[0038] S41. Record the information of the detector's avoidance orientation and the state P of the sample stage's position orientation at various angles α into the scanning system.

[0039] S42. Adjust the sample stage, detector, and X-ray tube to their initial positions and scan the sample. When the sample stage rotates to different angles α, adjust the detector's clearance orientation and the sample stage's position orientation to the corresponding state P.

[0040] As a preferred option, step four also includes:

[0041] S43. After the scan is completed, the images are composited to obtain a three-dimensional CT image of the target scan area of ​​the sample.

[0042] The beneficial effects of this invention are:

[0043] By setting a sliding frame that is slidably connected to the support frame along the first direction, the sample stage can be positioned between the detector and the X-ray tube, thereby effectively improving the magnification of the scanned sample. In addition to being able to rotate around the first direction, the sample stage can also move in the first direction, allowing the sample stage to be set to more states. During the scanning process, the target scanning area of ​​the sample can effectively avoid the obstruction of interference objects, thereby better detecting defects in the sample. Attached Figure Description

[0044] Figure 1 This is a side view of the scanning system described in an embodiment of the present invention;

[0045] Figure 2 This is a top view of the sample stage and the first adjustment frame as described in an embodiment of the present invention.

[0046] Figure 3 This is a front view of the detector and the second adjustment frame as described in an embodiment of the present invention.

[0047] Figure 4 This is a flowchart of the scanning method described in an embodiment of the present invention.

[0048] In the picture:

[0049] 100. Sample stage; 200. Detector; 300. X-ray tube;

[0050] 1. First adjustment frame;

[0051] 11. Support frame; 12. Sliding frame; 13. First rotating frame; 14. Second rotating frame; 15. Sliding block;

[0052] 2. Second adjustment frame;

[0053] 21. Base; 22. First swing frame; 23. Second swing frame;

[0054] 3. Third adjustment frame. Detailed Implementation

[0055] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar components or components having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0056] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection or a detachable connection; a mechanical connection or an electrical connection; a direct connection or an indirect connection through an intermediate medium; or the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0057] In the description of this invention, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0058] The technical solution of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0059] like Figures 1-3 As shown, the present invention provides a scanning system, including a sample stage 100, a detector 200, an X-ray tube 300, and a first adjustment frame 1, in which... Figure 1In the first direction shown, the sample stage 100 is located between the detector 200 and the X-ray tube 300. The detector 200 is capable of swinging around a deflection axis perpendicular to the first direction. The first adjustment frame 1 includes a support frame 11, a sliding frame 12, and a first rotating frame 13. The sliding frame 12 is slidably disposed on the support frame 11 along the first direction, and the first rotating frame 13 is rotatably mounted on the sliding frame 12 with its rotation axis parallel to the first direction. The sample stage 100 is disposed on the first rotating frame 13.

[0060] In this invention, by setting the sliding frame 12 to slide along the first direction and connect it to the support frame 11, the sample stage 100 can be adjusted between the detector 200 and the X-ray tube 300, thereby effectively improving the magnification of the scanned sample. In addition to being able to rotate around the first direction, the sample stage 100 can also move in the first direction, allowing the sample stage 100 to be set to more states. During the scanning process, the target scanning area of ​​the sample can effectively avoid the obstruction of interference objects, thereby better detecting defects in the sample.

[0061] For CT scans, magnification = FDD / FOD, where FDD is the focus detector distance, which is the distance from the X-ray tube 300 to the detector 200, and FOD is the focus object distance, which is the distance from the X-ray tube 300 to the sample. The optimal magnification is achieved by placing the sample as close as possible to the X-ray tube 300, while keeping the detector 200 as far away from the X-ray tube 300. Since the sample stage 100 can move in the first direction, the magnification of the scanned sample can be effectively improved.

[0062] Specifically, the first adjustment frame 1 also includes a second rotating frame 14, which is rotatably connected to the first rotating frame 13 with its rotation axis parallel to the second direction. The sample stage 100 is rotatably connected to the second rotating frame 14 with its rotation axis parallel to the third direction. The first, second, and third directions are perpendicular to each other. This configuration allows the sample stage 100 to rotate around the axes of the first, second, and third directions, and also to move in the first direction, further increasing the versatility of the sample stage 100's position and orientation. This provides more possibilities for adjusting the position and orientation of the sample stage 100, enabling the target scanning area of ​​the sample to effectively avoid obstruction by interference objects during scanning, thus allowing for better detection of sample defects.

[0063] In this embodiment, the scanning system performs scanning using the PCT method. The first direction is vertical, and the second and third directions are horizontal. The detector 200 is located at the top of the sample stage 100, and the X-ray tube 300 is located at the bottom of the sample stage 100. The sample is fixed on the sample stage 100. The detector 200 and the X-ray tube 300 are conventional devices in the art, and their specific structures and working principles will not be described in detail here.

[0064] Specifically, the sliding frame 12 and the first rotating frame 13 are each equipped with a circular slide rail and a slider 15, with the slider 15 slidably connected to the circular slide rail. This arrangement makes the relative rotation of the sliding frame 12 and the first rotating frame 13 more stable and avoids the structure at the rotating connection position from obstructing the sample on the sample stage 100.

[0065] More specifically, the sliding frame 12, the first rotating frame 13, and the second rotating frame 14 are all annular and coaxially arranged. The sample stage 100 is circular. The sliding frame 12 and the first rotating frame 13 are stacked in a first direction. The first rotating frame 13 is arranged around the outer periphery of the second rotating frame 14, and the second rotating frame 14 is arranged around the outer periphery of the sample stage 100. This arrangement further avoids obstruction of the sample on the sample stage 100.

[0066] In this embodiment, the support frame 11 is fixedly installed, the sliding frame 12 is provided with a circular slide rail, the first rotating frame 13 is provided with a plurality of sliders 15, the plurality of sliders 15 are evenly distributed on the circular slide rail, the rotation axis of the first rotating frame 13 coincides with its own axis, the rotation axis of the second rotating frame 14 extends along its own radial direction, and the rotation axis of the sample stage 100 extends along its own radial direction.

[0067] Specifically, the scanning system further includes a first driver, a second driver, a third driver, and a fourth driver. The first driver is configured to drive the sliding frame 12 to slide relative to the support frame 11; the second driver is configured to drive the first rotating frame 13 to rotate relative to the sliding frame 12; the third driver is configured to drive the second rotating frame 14 to rotate relative to the first rotating frame 13; and the fourth driver is configured to drive the sample stage 100 to rotate relative to the second rotating frame 14. This configuration allows the sample stage 100 to move easily and efficiently in a first direction, rotate around a first direction, rotate around a second direction, and rotate around a third direction.

[0068] In this embodiment, the support frame 11 is provided with a slide rail, and the sliding frame 12 is slidably connected to the slide rail. The first driver is a linear motor, which is installed on the support frame 11 and its output end is connected to the sliding frame 12. The second driver is a structure in which a motor and a gear cooperate. The motor is fixedly installed on the sliding frame 12, and the gear is connected to the output shaft of the motor and meshes with the outer periphery of the first rotating frame 13. The third driver is a motor, which is fixedly installed on the first rotating frame 13 and its output shaft is connected to the second rotating frame 14. The fourth driver is a motor, which is fixedly installed on the second rotating frame 14 and its output shaft is connected to the sample stage 100.

[0069] In other embodiments, the first driver can also be a linear drive device such as an electric cylinder or a linear slide table. The second driver can also be a structure in which a motor, a transmission wheel, and a transmission belt cooperate. The motor is fixedly installed on the sliding frame 12, the transmission wheel is connected to the output shaft of the motor, and the transmission belt is wrapped around the outside of the transmission wheel and the first rotating frame 13. The third driver can also be a structure in which a linear motor, a gear, and a rack cooperate. The linear motor drives the rack to translate, and the gear is fixedly installed on the rotating shaft of the second rotating frame 14 and meshes with the rack. The fourth driver can also be a structure in which a linear motor, a gear, and a rack cooperate. The linear motor drives the rack to translate, and the gear is fixedly installed on the rotating shaft of the sample stage 100 and meshes with the rack.

[0070] Specifically, the scanning system also includes a second adjustment frame 2, which comprises a base 21, a first swing frame 22, and a second swing frame 23. The first swing frame 22 is rotatably connected to the base 21, with its rotation axis being a deflection axis perpendicular to a first direction. The second swing frame 23 is slidably connected to the first swing frame 22, with its sliding direction perpendicular to the deflection axis. The detector 200 is mounted on the second swing frame 23. This configuration allows the detector 200 to swing above the sample stage 100 and also to move closer to or further away from the sample stage 100 along a straight line.

[0071] In this embodiment, the base 21 is fixedly installed, and the first pendulum frame 22 and the second pendulum frame 23 are both rod-shaped. One end of the first pendulum frame 22 is rotatably connected to the base 21, and the deflection axis is parallel to the third direction. The second pendulum frame 23 is set perpendicular to the first pendulum frame 22 and is slidably connected to the first pendulum frame 22 along the length direction of the first pendulum frame 22. The detector 200 is installed at the end of the second pendulum frame 23.

[0072] Specifically, the scanning system also includes a fifth actuator and a sixth actuator. The fifth actuator is configured to drive the first pendulum frame 22 to rotate relative to the base 21, and the sixth actuator is configured to drive the second pendulum frame 23 to slide relative to the first pendulum frame 22. This configuration allows the detector 200 to swing and translate simply and efficiently.

[0073] In this embodiment, the fifth driver includes a motor, which is fixed to the base 21 and its output shaft is connected to the first swing frame 22. The sixth driver includes a linear motor, which is fixedly installed on the first swing frame 22 and its output end is connected to the second swing frame 23.

[0074] In other embodiments, the fifth driver may also be a structure consisting of a linear motor, a gear, and a rack, with the linear motor driving the rack to translate, the gear being fixedly mounted on the rotating shaft of the first swing frame 22 and meshing with the rack, and the sixth driver may also be a linear drive device such as an electric cylinder or a linear slide.

[0075] Specifically, the scanning system also includes a third adjustment frame 3, on which the X-ray tube 300 is slidably mounted along the first direction. This arrangement allows the X-ray tube 300 to move safely and reliably.

[0076] More specifically, the scanning system also includes a seventh driver, which is configured to drive the X-ray tube 300 to move relative to the third adjustment frame 3. This configuration makes the translation of the X-ray tube 300 simpler and more efficient.

[0077] In this embodiment, the third adjustment frame 3 is fixedly installed, and the seventh driver is a linear motor, which is fixedly installed on the third adjustment frame 3 and its output end is connected to the ray tube 300.

[0078] In other embodiments, the seventh actuator can also be a linear drive device such as an electric cylinder or a linear slide. In other embodiments, the third adjustment frame 3 can be omitted, and the ray tube 300 can be directly installed at the output end of the seventh actuator.

[0079] In the scanning system of the present invention, in order to prevent the sample from colliding with the detector 200 or the X-ray tube 300, the sample size is configured by software to limit the range of mechanical axis movement. This is a common method in the art and will not be described in detail here.

[0080] like Figure 4 As shown, the present invention also provides a scanning method using the above-described scanning system, comprising the following steps:

[0081] Step 1: Fix the sample on the sample stage 100, turn on the detector 200 and X-ray tube 300, adjust the position of the detector 200 and X-ray tube 300 so that the sample is scanned to the set resolution, and record the state of the sample stage 100, detector 200 and X-ray tube 300 at this time as the initial state.

[0082] In this step, the sample is fixed at the center of the sample stage 100. Based on the size of the sample and the information of the target scanning area on the sample, the position and orientation of the detector 200 and the X-ray tube 300 are adjusted to obtain the best resolution when scanning the sample. The state of the sample stage 100, detector 200 and X-ray tube 300 at this time is recorded as the initial state.

[0083] Step 2: Deflect the detector 200 around the deflection axis to the avoidance orientation, adjust the position and orientation of the sample stage 100 so that the scanning sample reaches the set resolution, and record the avoidance orientation of the detector 200 and the position and orientation of the sample stage 100 at this time as state P.

[0084] In this step, based on the initial state, the detector 200 is deflected around the deflection axis to an avoidance orientation. Adjusting the position and orientation of the sample stage 100 includes adjusting at least one of moving the sample stage 100 along a first direction, rotating it around a second direction, and rotating it around a third direction. By increasing the degrees of freedom of the sample stage 100, the target scanning area in the sample can be minimized from being obstructed.

[0085] In this step, multiple avoidance orientations are set. At different avoidance orientations, the position and orientation of the sample stage 100 are adjusted to ensure that the magnification of the scanned sample is the same, and finally multiple states P are recorded. By increasing the number of avoidance orientations, the target scanning area in the sample can be avoided from being occluded to the greatest extent.

[0086] Taking the setting of two avoidance directions and the adjustment of the position and orientation of the sample stage 100, including adjusting the movement of the sample stage 100 in the first direction, as an example, the following explanation is provided:

[0087] S21. Deflect the detector 200 around the deflection axis by an angle θ1, and move the sample stage 100 up and down along the first direction to find the optimal resolution for scanning the sample at the current deflection angle. Record the values ​​and ratios of FDD and FOD at this time, and record the avoidance orientation of the detector 200 and the position orientation of the sample stage 100 as state P1.

[0088] S22. Deflect the detector 200 around the deflection axis by an angle θ2, and move the sample stage 100 up and down along the first direction to find the optimal resolution for scanning the sample at the current deflection angle. Based on the values ​​and ratio of FDD and FOD in state P1, fine-tune the position of the sample stage 100 at this time to ensure that there is no deviation in the actual magnification of the scanned sample. Record the values ​​and ratio of FDD and FOD at this time, and record the avoidance orientation of the detector 200 and the position orientation of the sample stage 100 at this time as state P2.

[0089] By setting the above two avoidance orientations, the sample stage 100 can be moved vertically up and down in the first direction according to the image presented by the target scanning area at different deflection angles during CT scanning to obtain the best effect.

[0090] Step 3: Adjust the sample stage 100, detector 200, and X-ray tube 300 to their initial states. Rotate the sample stage 100 around the first direction to various angles α. Detect the exposure of the target scanning area of ​​the sample at different angles α. When occlusion occurs, adjust the avoidance orientation of the detector 200 and the position orientation of the sample stage 100 to state P, so that the occlusion of the target scanning area of ​​the sample is eliminated. Record the information of the state P of the avoidance orientation of the detector 200 and the position orientation of the sample stage 100 at various angles α.

[0091] In this step, using the initial state as a reference, the sample stage 100 is rotated around the first direction to various angles α. When obstruction occurs, the avoidance orientation of the detector 200 and the position orientation of the sample stage 100 are sequentially adjusted to multiple states P and scanning is performed until the obstruction in the target scanning area of ​​the sample is eliminated. The above settings can efficiently eliminate obstruction.

[0092] Taking the avoidance orientation of detector 200 and the position orientation of sample stage 100 as an example, including states P1 and P2, in this step, when occlusion occurs, the avoidance orientation of detector 200 and the position orientation of sample stage 100 are adjusted to state P1 or state P2 and scanning is performed.

[0093] Step 4: Scan the sample using the information of the avoidance orientation of the detector 200 and the position orientation state P of the sample stage 100 at various angles α.

[0094] In this embodiment, step four is specifically performed as follows:

[0095] S41. Information recording and scanning system for the state P of the detector 200's avoidance orientation and the position orientation of the sample stage 100 when the sample stage 100 is at various angles α.

[0096] S42. Adjust the sample stage 100, detector 200 and X-ray tube 300 to the initial state and scan the sample. When the sample stage 100 rotates to different angles α, adjust the clearance orientation of the detector 200 and the position orientation of the sample stage 100 to the corresponding state P.

[0097] In this sub-step, the sample is scanned, and the system adjusts the avoidance orientation of the detector 200 and the state of the sample stage 100 to the corresponding state P in a timely manner during the scanning process based on the previously input information.

[0098] S43. After the scan is completed, the images are composited to obtain a three-dimensional CT image of the target scan area of ​​the sample.

[0099] In this sub-step, all images are synthesized and optimized using software to form 3D CT images. The specific software optimization and synthesis methods and operation steps are existing technologies in this field and will not be described in detail here.

[0100] The scanning method of the present invention does not require changes to key components such as detector 200 and X-ray tube 300. It only optimizes the mechanical parts and software algorithms, thereby improving the scanning rate compared to ACT (Axial Computer Tomography) and the scanning accuracy compared to PCT without sacrificing resolution. This makes the resolution of defect scanning close to that of ACT, but improves the working efficiency by more than 2 times.

[0101] In other embodiments, after recording the state P of the avoidance orientation of the detector 200 and the position orientation of the sample stage 100 at various angles α in step three, it is analyzed that the range of angles α of the sample stage 100 that need to be adjusted is small, and the number of states P is small. For example, only when α is 30 degrees, the avoidance orientation of the detector 200 and the position orientation of the sample stage 100 need to be adjusted to state P1 to eliminate obstruction. Therefore, in step four, when scanning the sample, the sample stage 100 is first rotated one revolution around the first direction to perform a normal scan of the sample on the sample stage 100. Then, the sample stage 100 is rotated to angle α separately, and the avoidance orientation of the detector 200 and the position orientation of the sample stage 100 are adjusted to state P1 before scanning once. This allows for efficient and rapid acquisition of all images. Then, all images are synthesized and optimized using software to form a three-dimensional CT image.

[0102] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A scanning system, characterized in that, The device includes a sample stage (100), a detector (200), an X-ray tube (300), and a first adjustment frame (1). In a first direction, the sample stage (100) is located between the detector (200) and the X-ray tube (300). The detector (200) is capable of swinging about a deflection axis perpendicular to the first direction. The first adjustment frame (1) includes: Support frame (11); The sliding frame (12) is slidably mounted on the support frame (11) along the first direction; The first rotating frame (13) is rotatably mounted on the sliding frame (12), with the rotation axis parallel to the first direction, and the sample stage (100) is set on the first rotating frame (13).

2. The scanning system according to claim 1, characterized in that, The first adjustment frame (1) also includes: The second rotating frame (14) is rotatably connected to the first rotating frame (13), and its rotation axis is parallel to the second direction. The sample stage (100) is rotatably connected to the second rotating frame (14), and its rotation axis is parallel to the third direction. The first direction, the second direction and the third direction are perpendicular to each other.

3. The scanning system according to claim 1 or 2, characterized in that, On both the sliding frame (12) and the first rotating frame (13), one is provided with a circular slide rail and the other is provided with a slider (15), with the slider (15) slidably connected to the circular slide rail.

4. The scanning system according to any one of claims 1-3, characterized in that, It also includes a first drive, a second drive, a third drive, and a fourth drive; The first actuator is configured to drive the sliding frame (12) to slide relative to the support frame (11); The second drive is configured to drive the first rotating frame (13) to rotate relative to the sliding frame (12); The third drive is configured to drive the second rotating frame (14) to rotate relative to the first rotating frame (13); The fourth actuator is configured to drive the sample stage (100) to rotate relative to the second rotating frame (14).

5. The scanning system according to any one of claims 1-4, characterized in that, It also includes a second adjustment frame (2), which includes: base(21); The first swing frame (22) is rotatably connected to the base (21), and the axis of rotation is the axis of deflection; The second pendulum frame (23) is slidably connected to the first pendulum frame (22), and the sliding direction is perpendicular to the deflection axis. The detector (200) is installed on the second pendulum frame (23).

6. The scanning system according to any one of claims 1-5, characterized in that, It also includes a fifth drive and a sixth drive frame; The fifth actuator is configured to drive the first swing frame (22) to rotate relative to the base (21); The sixth actuator is configured to drive the second pendulum body (23) to slide relative to the first pendulum body (22).

7. The scanning system according to any one of claims 1-6, characterized in that, It also includes a third adjustment frame (3), and the ray tube (300) is slidably disposed on the third adjustment frame (3) along the first direction.

8. The scanning system according to any one of claims 1-7, characterized in that, It also includes a seventh drive, which is configured to drive the ray tube (300) to move relative to the third adjustment frame (3).

9. A scanning method, characterized in that, Using a scanning system, the scanning system includes a sample stage (100), a detector (200), an X-ray tube (300), and a first adjustment frame (1). In a first direction, the sample stage (100) is located between the detector (200) and the X-ray tube (300). The detector (200) is oscillating about a deflection axis perpendicular to the first direction. The first adjustment frame (1) includes a support frame (11), a sliding frame (12), and a first rotating frame (13). The sliding frame (12) is slidably disposed on the support frame (11) along the first direction. The first rotating frame (13) is rotatably mounted on the sliding frame (12). The rotation axis is parallel to the first direction. The sample stage (100) is disposed on the first rotating frame (13). The scanning method includes: Step 1: Fix the sample on the sample stage (100), turn on the detector (200) and X-ray tube (300), adjust the position of the detector (200) and X-ray tube (300) so that the sample is scanned to the set resolution, and record the state of the sample stage (100), detector (200) and X-ray tube (300) at this time as the initial state. Step 2: Deflect the detector (200) around the deflection axis to the avoidance orientation, adjust the position and orientation of the sample stage (100) so that the scanning sample reaches the set resolution, and record the avoidance orientation of the detector (200) and the position and orientation of the sample stage (100) as state P. Step 3: Adjust the sample stage (100), detector (200) and X-ray tube (300) to their initial state. Rotate the sample stage (100) around the first direction to various angles α. Detect the exposure of the target scanning area of ​​the sample at different angles α. When occlusion occurs, adjust the avoidance orientation of the detector (200) and the position orientation of the sample stage (100) to state P so that the occlusion of the target scanning area of ​​the sample is eliminated. Record the information of the state P of the avoidance orientation of the detector (200) and the position orientation of the sample stage (100) at various angles α. Step 4: Scan the sample using the information of the avoidance orientation of the detector (200) and the position orientation state P of the sample stage (100) at various angles α.

10. The scanning method according to claim 9, characterized in that, The first adjustment frame (1) also includes a second rotating frame (14), which is rotatably connected to the first rotating frame (13) with its rotation axis parallel to the second direction. The sample stage (100) is rotatably connected to the second rotating frame (14) with its rotation axis parallel to the third direction. The first direction, the second direction, and the third direction are perpendicular to each other. In step two, adjusting the position and orientation of the sample stage (100) includes adjusting at least one of moving the sample stage (100) along a first direction, rotating it around a second direction, and rotating it around a third direction.

11. The scanning method according to claim 9 or 10, characterized in that, In step two, multiple avoidance orientations are set. At different avoidance orientations, the position orientation of the sample stage (100) is adjusted so that the magnification of the scanned sample is the same, and finally multiple states P are recorded.

12. The scanning method according to any one of claims 9-11, characterized in that, In step three, when occlusion occurs, the avoidance orientation of the detector (200) and the position orientation of the sample stage (100) are sequentially adjusted to multiple states P and scanned until the occlusion of the target scanning area of ​​the sample is eliminated.

13. The scanning method according to any one of claims 9-12, characterized in that, Step four includes: S41. The information of the avoidance orientation of the detector (200) and the position orientation of the sample stage (100) at various angles α is entered into the scanning system. S42. Adjust the sample stage (100), detector (200) and X-ray tube (300) to the initial state and scan the sample. When the sample stage (100) rotates to different angles α, adjust the clearance orientation of the detector (200) and the position orientation of the sample stage (100) to the corresponding state P.

14. The scanning method according to any one of claims 9-13, characterized in that, Step four also includes: S43. After the scan is completed, the images are composited to obtain a three-dimensional CT image of the target scan area of ​​the sample.

Images