Magnetic force detection system and magnetic force detection method

Abstract

This application discloses a magnetic force detection system and a magnetic force detection method. The magnetic force detection system includes a detection device and a control device. The detection device includes a detection plate, a detection section, and a pressure detection element. The detection plate has a magnetic opening that corresponds to the magnetic body of a magnetic attraction mechanism. The detection section is disposed in the magnetic opening and is magnetic. The pressure detection element is disposed on the side of the detection section facing the magnetic attraction mechanism and is used to detect the pressure data between the detection section and the magnetic body. The control device is electrically connected to the pressure detection element and is used to receive the pressure data fed back by the pressure detection element, compare and analyze the pressure data with a preset standard value, and if the pressure data does not meet the standard, the magnetic body can be adjusted to improve the reliability of the bonding between the substrate and the photomask.

Description

Technical Field

[0001] This application belongs to the field of display technology, and in particular relates to a magnetic force detection system and a magnetic force detection method. Background Technology

[0002] Vacuum evaporation is a method in which a evaporation source is heated in a vacuum evaporation chamber to heat the evaporation material, causing the atoms or molecules of the solid material to vaporize and escape from its surface, forming a gas. This gas then passes through a photomask, ultimately forming a solid thin film layer on the substrate to be evaporated. Currently, vacuum evaporation technology is widely used in the fabrication of display devices. When performing evaporation using a vacuum evaporation apparatus, a precise and tight bond between the substrate and the photomask is required. However, the reliability of the existing substrate-photomask bonding is not high, affecting the performance of the display panel. Summary of the Invention

[0003] The purpose of this application is to provide a magnetic force detection system and method that can improve the reliability of the bonding between the substrate and the mask.

[0004] The first aspect of this application provides a magnetic force detection system applied to a vapor deposition equipment. The vapor deposition equipment includes a magnetic attraction mechanism, a mask, and a substrate conveying mechanism. The substrate conveying mechanism is used to convey the substrate. A magnetic body is disposed in the magnetic attraction mechanism, which is used to attract the mask to the substrate. The magnetic force detection system includes a detection device and a control device. The detection device includes a detection plate, a detection section, and a pressure detection element. The detection plate is provided with a magnetic opening, which is used to correspond to the magnetic body of the magnetic attraction mechanism. The detection section is disposed in the magnetic opening and is magnetic. The pressure detection element is disposed on the side of the detection section facing the magnetic attraction mechanism and is used to detect the pressure data between the detection section and the magnetic body. The control device is electrically connected to the pressure detection element and is used to receive the pressure data fed back by the pressure detection element and compare and analyze the pressure data with a preset standard value.

[0005] In some embodiments, the detection device further includes a connector, through which the detection unit is connected to the detection plate;

[0006] Preferably, the connector is an elastic element;

[0007] Preferably, there are multiple elastic elements, which are spaced apart along the circumference of the magnetic opening.

[0008] In some embodiments, the material of the connector includes non-metallic components;

[0009] Preferably, the material of the detection plate includes metal or non-metal.

[0010] In some embodiments, there are multiple magnetic openings and multiple detection units, and the multiple magnetic openings are arranged in a one-to-one correspondence with the multiple detection units.

[0011] In some embodiments, the number of pressure detection elements is also multiple, and the multiple pressure detection elements are arranged in a one-to-one correspondence with multiple detection units.

[0012] In some embodiments, the side of the detection plate facing the magnetic attraction mechanism is a plane.

[0013] Secondly, this application also provides a magnetic force detection method, employing the magnetic force detection system of any of the above embodiments. The magnetic force detection method includes the following steps:

[0014] Align the magnetic opening of the detection plate with the magnetic body in the magnetic attraction mechanism;

[0015] The pressure data between the magnetic body and the detection unit is detected by a pressure detection device;

[0016] The control device receives pressure data, compares and analyzes the pressure data with preset standard values, and determines whether the pressure data is within the normal range.

[0017] In some embodiments, the step of aligning the magnetic opening of the detection plate with the magnetic body in the magnetic attraction mechanism includes:

[0018] The detection plate is attached to the side of the substrate away from the magnetic attraction mechanism.

[0019] In some embodiments, the vapor deposition apparatus further includes a cooling plate disposed on the side of the magnetic attraction mechanism facing the mask; the step of aligning the magnetic opening of the detection plate with the magnetic body in the magnetic attraction mechanism includes:

[0020] The detection plate is attached to the side of the cooling plate away from the magnetic attraction mechanism.

[0021] In some embodiments, the step of aligning the magnetic opening of the detection plate with the magnetic body in the magnetic attraction mechanism includes:

[0022] A simulated substrate is placed on the substrate transfer mechanism;

[0023] The detection plate is attached to the side of the analog substrate away from the magnetic attraction mechanism.

[0024] This application provides a magnetic force detection system and a magnetic force detection method. The magnetic force detection system includes a detection device and a control device. The detection device includes a detection plate, a detection section, and a pressure detection element. The detection plate has a magnetic opening that corresponds to the magnetic body of the magnetic attraction mechanism. The detection section is disposed in the magnetic opening and is magnetic. The pressure detection element is disposed on the side of the detection section facing the magnetic attraction mechanism and is used to detect the pressure data between the detection section and the magnetic body. The control device is electrically connected to the pressure detection element and is used to receive the pressure data fed back by the pressure detection element, compare and analyze the pressure data with a preset standard value, and adjust the magnetic body if the pressure data does not meet the standard, thereby improving the reliability of the bonding between the substrate and the mask. Attached Figure Description

[0025] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the embodiments of this application will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of the structure of the vapor deposition equipment provided in some embodiments of this application;

[0027] Figure 2 This is a schematic diagram of the structure of the detection device provided in some embodiments of this application;

[0028] Figure 3 A partial side view of a detection device provided in some embodiments of this application;

[0029] Figure 4 This is a partial schematic diagram of a detection device provided in some embodiments of this application;

[0030] Figure 5 Flowcharts of detection methods provided in some embodiments of this application;

[0031] Explanation of reference numerals in the attached figures:

[0032] 10. Magnetic attraction mechanism; 11. Magnetic body; 30. Substrate transfer mechanism; 40. Substrate; 50. Detection device; 51. Detection plate; 511. Magnetic opening; 52. Detection section; 53. Pressure detection component; 54. Connector; 61. Moving plate; 62. Moving shaft; 63. Cooling plate. Detailed Implementation

[0033] The embodiments of this application will be described in further detail below with reference to the accompanying drawings and examples. The detailed description of the following embodiments and the accompanying drawings are used to illustrate the principles of this application by way of example, but should not be used to limit the scope of this application, that is, this application is not limited to the described embodiments.

[0034] In the description of this application, it should be noted that, unless otherwise stated, "a plurality of" means two or more; the terms "upper," "lower," "left," "right," "inner," and "outer," etc., indicating orientation or positional relationships, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. Furthermore, the terms "first," "second," and "third," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance. "Vertical" is not vertical in the strict sense, but within the allowable tolerance range. "Parallel" is not parallel in the strict sense, but within the allowable tolerance range.

[0035] In this application, the reference to "embodiment" means that a specific feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a mutually exclusive, independent, or alternative embodiment. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described in this application can be combined with other embodiments.

[0036] The directional terms used in the following description refer to the directions shown in the figures and are not intended to limit the specific structure of this application. It should also be noted in the description of this application that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0037] Vacuum evaporation is a method in which a evaporation source is heated in a vacuum evaporation chamber to heat the evaporation material, causing the atoms or molecules of the solid material to vaporize and escape from its surface, forming a gas. This gas then passes through a photomask, ultimately forming a solid thin film layer on the substrate to be evaporated. Currently, vacuum evaporation technology is widely used in the fabrication of display devices. When performing evaporation using a vacuum evaporation apparatus, a precise and tight bond between the substrate and the photomask is required. However, the reliability of the existing substrate-photomask bonding is not high, affecting the performance of the display panel.

[0038] Please refer to the following: Figures 1-3The first aspect of this application provides a magnetic force detection system applied to a vapor deposition equipment. The vapor deposition equipment includes a magnetic attraction mechanism 10, a mask, and a substrate conveying mechanism 30. The substrate conveying mechanism 30 is used to convey a substrate 40. A magnetic body 11 is disposed in the magnetic attraction mechanism 10, which is used to attract the mask to the substrate 40. The magnetic force detection system includes a detection device 50 and a control device. The detection device 50 includes a detection plate 51, a detection part 52, and a pressure detection element 53. The detection plate 51 is provided with a magnetic opening 511, which corresponds to the magnetic body 11 of the magnetic attraction mechanism 10. The detection part 52 is disposed in the magnetic opening 511 and is magnetic. The pressure detection element 53 is disposed on the side of the detection part 52 facing the magnetic attraction mechanism 10, and is used to detect the pressure data between the detection part 52 and the magnetic part. The control device is electrically connected to the pressure detection element 53 and is used to receive the pressure data fed back by the pressure detection element 53 and compare and analyze the pressure data with a preset standard value.

[0039] The substrate transport mechanism 30 acts like an automated conveyor belt, responsible for precisely transporting the substrate 40 to a designated position. For example, the substrate transport mechanism 30 has two tracks arranged vertically, connecting the two sides of the substrate 40 to the two tracks respectively, so as to move and transport the substrate 40 downwards. Then, a mask is attached to the bottom of the substrate 40, and material is evaporated onto the substrate 40 through the openings on the mask to achieve patterned film deposition.

[0040] The magnetic attraction mechanism 10 can be fixed to the movable plate 61. The movable plate 61 is fixed to the movable shaft 62 extending in the vertical direction. The movable shaft 62 can move in the vertical direction to drive the magnetic attraction mechanism 10 to move in the vertical direction, closer to or away from the substrate 40.

[0041] Generally, a photomask is made of metal. When the magnetic attraction mechanism 10 approaches the substrate 40, the magnetic body 11 in the magnetic attraction mechanism 10 can generate an attractive force on the photomask, allowing the photomask to adhere tightly to the substrate 40. However, because the magnetic bodies 11 of the magnetic attraction mechanism 10 may be unevenly distributed, or there may be differences between multiple magnetic bodies 11, the tightness of the adhesion between the photomask and the substrate 40 is also uneven. That is, the adsorption pressure at different positions of the photomask and the substrate 40 is different, and the adsorption pressure at some positions corresponding to some magnetic bodies 11 cannot reach the standard, resulting in unreliable adhesion between the substrate 40 and the photomask.

[0042] However, in this embodiment, the detection plate 51 simulates a mask, and its shape and size are similar to the mask. Magnetic openings 511 are provided on the detection plate 51, and the positions of these openings correspond one-to-one with the magnetic bodies 11 in the magnetic attraction mechanism 10, acting as custom-made "observation windows" for each magnetic body 11. The magnetic body 11 can be a permanent magnet or an electromagnet, and the detection unit 52 can be metal or a permanent magnet, placed in the magnetic opening 511 and possessing its own magnetism. It acts like a "magnetic induction probe," capable of interacting with the magnetic body 11. A pressure detection element 53 is installed on the side of the detection unit 52 facing the magnetic attraction mechanism 10. The pressure detection element 53 can be a precision piezoresistive sensor, and its task is to accurately detect the pressure data between the detection unit 52 and the magnetic body 11. Since the magnitude of the magnetic force directly affects the pressure between the two, relevant information about the magnetic force can be indirectly obtained by measuring the pressure.

[0043] The control device and the pressure detection element 53 are connected by a circuit. The pressure detection element 53 rapidly feeds back the real-time pressure data to the control device. After receiving the data, the control device immediately compares and analyzes it with a pre-set standard value. The pre-set standard value is determined based on the ideal operating conditions of the vapor deposition equipment and the process requirements.

[0044] The magnetic force detection system can monitor the magnetic force of each magnetic body 11 in the magnetic attraction mechanism 10 in real time. Once an abnormal magnetic force is detected, i.e., the pressure data is lower than the preset standard value range, the control device will either automatically generate a magnetic force adjustment command (if the system has an automatic adjustment function) to correct the magnetic force of the magnetic attraction mechanism 10, or promptly output an alarm message to remind the operator to check and manually intervene. In this way, it can be ensured that the magnetic attraction mechanism 10 always works in the best condition, maintaining a stable and appropriate attraction force between the mask and the substrate 40, thereby improving the stability of the vapor deposition process and product quality, and reducing product defects and defect rates caused by uneven magnetic force.

[0045] The detection device 50 of this application includes a detection plate 51, a detection part 52, and a pressure detection element 53. The detection plate 51 is provided with a magnetic opening 511, which is used to correspond to the magnetic body 11 of the magnetic attraction mechanism 10. The detection part 52 is disposed in the magnetic opening 511 and is magnetic. The pressure detection element 53 is disposed on the side of the detection part 52 facing the magnetic attraction mechanism 10 and is used to detect the pressure data between the detection part 52 and the magnetic part. A control device is electrically connected to the pressure detection element 53 and is used to receive the pressure data fed back by the pressure detection element 53, compare and analyze the pressure data with a preset standard value, and if the pressure data does not meet the standard, the magnetic body 11 can be adjusted to improve the reliability of the bonding between the substrate 40 and the mask.

[0046] like Figure 4 As shown, in some embodiments, the detection device 50 further includes a connector 54, and the detection unit 52 is connected to the detection plate 51 through the connector 54.

[0047] The connector 54 can be a flexible rubber band, rope, or a buckle. The detection unit 52 is securely positioned within the magnetic opening 511 via the connector 54, ensuring that the detection unit 52 will not detach or shift during the entire detection process, maintaining its relative position with the magnetic body 11 in the magnetic attraction mechanism 10.

[0048] Preferably, the connector 54 is an elastic element.

[0049] For example, the connector 54 can be an elastic rubber band, rope, or similar material. The elastic connector 54 has excellent elastic deformation capability. When the detection unit 52 is subjected to the magnetic force of the magnetic body 11, the elastic connector 54 allows the detection unit 52 to make adaptive displacements within a certain range. For example, when the magnetic force of the magnetic body 11 fluctuates or becomes locally uneven, the detection unit 52 can respond more sensitively to changes in magnetic force with the buffer provided by the elastic connector 54, thereby enabling the pressure detection unit 53 to capture more accurate pressure change data.

[0050] Preferably, there are multiple elastic elements, which are spaced apart along the circumference of the magnetic opening 511.

[0051] To further optimize the stability of the detection unit 52 within the magnetic opening 511 and its responsiveness to changes in magnetic force, multiple elastic connectors 54 can be provided, spaced apart along the circumference of the magnetic opening 511. This arrangement ensures that the detection unit 52 receives uniform support in all directions and can respond flexibly to changes in magnetic force from different directions. For example, when the magnetic force of the magnetic body 11 increases in a certain direction, the elastic connector 54 in the corresponding direction deforms, causing the detection unit 52 to move closer to the magnetic body 11, allowing the pressure detection element 53 to detect pressure changes more accurately.

[0052] In some embodiments, the material of the connector 54 includes non-metallic materials.

[0053] For example, the connector 54 can be made of polycarbonate (PC), which has good mechanical strength, meeting the strength requirements of the connector 54 and ensuring the stability of the detection unit 52 in the connected state, while not interfering with the magnetic field. Rubber materials, such as silicone rubber, not only possess a certain degree of elasticity, which can buffer the detection unit 52 when subjected to magnetic force, helping the detection unit 52 to respond more sensitively to changes in magnetic force, but also have good insulation properties, preventing the induced current from affecting the detection results. Furthermore, ceramic materials are also an option, possessing high hardness and chemical stability, maintaining stable performance in harsh working environments without interfering with the magnetic field.

[0054] In summary, metallic materials may be affected by magnetic fields, generating induced currents or becoming magnetized, thereby interfering with the original magnetic interaction between the detection unit 52 and the magnetic body 11, leading to deviations in the detection data. Non-metallic materials, such as high-strength plastics and rubber, are not magnetized and do not interfere with magnetic fields, ensuring the accuracy of the detection results.

[0055] Preferably, the material of the detection plate 51 includes metal or non-metal.

[0056] If the material of the detection plate 51 is metal, aluminum alloy, stainless steel, etc. can be used. Aluminum alloy has the characteristics of low density and high strength, and its light weight facilitates the installation and operation of the detection device 50. At the same time, its good strength ensures that the detection plate 51 is not easily deformed during long-term use, maintaining a stable relative positional relationship between the detection part 52 and the magnetic body 11. Stainless steel is known for its excellent corrosion resistance. In the complex working environment of the vapor deposition equipment, it can effectively resist the erosion of various chemicals, ensuring the stable performance of the detection plate 51. In addition, the conductivity of metallic materials can be utilized in some special designs. For example, by setting specific circuits on the metal detection plate 51, preliminary processing or transmission of detection data can be achieved.

[0057] If the material of the detection plate 51 is non-metallic, polyoxymethylene (POM) can be used. It has good mechanical properties, wear resistance, and self-lubricating properties, which can reduce friction between the detection part 52 and the detection plate 51 to a certain extent, extending the service life of the detection device 50. Furthermore, its good insulation properties will not interfere with magnetic detection. Fiber-reinforced composite materials, such as carbon fiber reinforced epoxy resin matrix composites, are also suitable. These have high strength and low density, reducing the overall weight while ensuring the structural strength of the detection plate 51, making them suitable for detection scenarios with strict weight requirements. In addition, glass fiber reinforced plastics are also commonly used. They have good dimensional stability and chemical corrosion resistance, maintaining the shape accuracy of the detection plate 51 under different environmental conditions.

[0058] When the working environment of the vapor deposition equipment is harsh, with a large amount of corrosive gases or liquids, stainless steel, a corrosion-resistant metal, is the preferred material for the detection plate 51. If the equipment has strict weight restrictions on the detection device 50 and the strength requirements for the detection plate 51 are relatively low, then non-metallic materials such as low-density aluminum alloys or fiber-reinforced composite materials are more suitable. In some detection scenarios with extremely high insulation requirements, non-metallic materials such as engineering plastics or glass fiber reinforced plastics can effectively avoid interference with magnetic detection caused by leakage current and other problems. The various properties of metallic and non-metallic materials allow the detection plate 51 to meet the diverse needs of different vapor deposition equipment. Whether there are special requirements for strength, corrosion resistance, weight, or insulation, these can be achieved by selecting appropriate materials, thereby expanding the applicability of the magnetic detection system and enabling it to be applied to various types of vapor deposition equipment and working environments.

[0059] In some embodiments, there are multiple magnetic openings 511 and multiple detection units 52, and the multiple magnetic openings 511 are arranged in a one-to-one correspondence with the multiple detection units 52.

[0060] The magnetic attraction mechanism 10 typically includes multiple magnetic bodies 11 distributed at different locations, each with varying magnetic strength and states. The detection plate 51 has multiple magnetic openings 511 corresponding to the positions of the magnetic bodies 11, with a detection unit 52 placed in each opening 511. This allows for individual magnetic force detection of each magnetic body 11. This one-to-one correspondence configuration enables precise acquisition of the magnetic force interaction data between each magnetic body 11 and the detection unit 52, providing detailed data for subsequent magnetic force adjustments and optimizations of the magnetic attraction mechanism 10.

[0061] By assigning multiple magnetic openings 511 and detection units 52 one-to-one, the magnetic force of each magnetic body 11 can be detected individually, avoiding interference between multiple magnetic bodies 11 and improving the accuracy of magnetic force detection. This allows operators to more accurately understand the magnetic state of each magnetic body 11 in the magnetic attraction mechanism 10, promptly identify magnetic bodies 11 with abnormal magnetic force, and make targeted adjustments and repairs.

[0062] The layout of the magnetic openings 511 and the detection units 52 is determined based on the distribution of the magnetic bodies 11 in the magnetic attraction mechanism 10. For example, a matrix layout or a ring layout can be used. If the magnetic bodies 11 are arranged in a regular matrix, then the magnetic openings 511 and the detection units 52 will also be distributed in a matrix on the detection plate 51. This ensures that each detection unit 52 accurately corresponds to a magnetic body 11, facilitating comprehensive detection of the entire magnetic attraction area. For example, in some large vapor deposition equipment, the magnetic bodies 11 of the magnetic attraction mechanism 10 may be arranged in a 5×5 or 10×10 matrix, and the magnetic openings 511 and the detection units 52 on the detection plate 51 will also be set according to the same matrix. For some circular or ring-shaped magnetic attraction mechanisms 10, the magnetic openings 511 and the detection units 52 will adopt a ring layout to adapt to the distribution characteristics of the magnetic bodies 11.

[0063] Multiple detection units 52 can simultaneously detect different positions of the magnetic attraction mechanism 10, thereby comprehensively evaluating the overall magnetic attraction effect of the magnetic attraction mechanism 10. By analyzing the data from each detection unit 52, it is possible to understand whether the magnetic force distribution of the magnetic attraction mechanism 10 is uniform and whether there are localized areas of excessively strong or weak magnetic force. This helps to optimize the design and adjustment of the magnetic attraction mechanism 10, ensuring that the mask can be uniformly and stably adsorbed onto the substrate 40, thereby improving the quality and stability of the vapor deposition process.

[0064] In some embodiments, the number of pressure detection elements 53 is also multiple, and the multiple pressure detection elements 53 are arranged in a one-to-one correspondence with the multiple detection units 52.

[0065] The magnetic attraction mechanism 10 of the vapor deposition equipment consists of multiple magnetic bodies 11, each with potentially different magnetic forces. To accurately detect the magnetic force exerted by each magnetic body 11 on its corresponding detection unit 52, multiple pressure detection elements 53 are provided, each corresponding one-to-one with a detection unit 52. Each pressure detection element 53 is specifically responsible for detecting the pressure data between its corresponding detection unit 52 and the magnetic body 11. This one-to-one arrangement allows the system to independently acquire the magnetic force information at the location of each detection unit 52, avoiding data interference from different detection locations, thereby achieving detailed detection of the magnetic force distribution of the entire magnetic attraction mechanism 10.

[0066] Different types of pressure sensing elements 53 can be selected to meet different testing needs and working environments. For example, in scenarios with extremely high accuracy requirements, a high-precision thin-film pressure sensor can be used as the pressure sensing element 53, which can accurately sense minute pressure changes and precisely convert magnetic force changes into electrical signal output. In environments with high requirements for stability and anti-interference capabilities, a piezoresistive pressure sensor is more suitable, as it has good linearity and temperature stability and can work stably under complex working conditions.

[0067] Each testing unit 52 is equipped with a dedicated pressure testing element 53, which can independently and accurately detect the magnetic force at the corresponding location. This avoids the detection errors and data confusion that may occur when multiple testing units 52 share a single pressure testing element 53, significantly improving testing accuracy. This allows operators to accurately locate the position of the magnetic object 11 with abnormal magnetic force, providing an accurate basis for subsequent magnetic force adjustments. It ensures that the adsorption force between the mask and the substrate 40 is uniform and stable during the vapor deposition process, thereby improving product quality.

[0068] Multiple pressure sensors 53 generate a large amount of data, requiring an efficient data transmission and integration mechanism. A multi-channel data acquisition module can be used to quickly and accurately acquire and transmit the electrical signals output by each pressure sensor 53 to the control device. During transmission, shielded cables or anti-interference technologies used in wireless transmission can be employed to prevent signal interference. After receiving the data, the control device uses a specialized algorithm to integrate and analyze it. By comparing the data from pressure sensors 53 at different locations, a magnetic force distribution map of the entire magnetic attraction mechanism 10 is plotted, visually presenting the magnetic force distribution.

[0069] In some embodiments, the detection plate 51 is a plane on the side facing the magnetic attraction mechanism 10.

[0070] When manufacturing the detection plate 51, high-precision machining processes, such as precision grinding and polishing, can be employed. These processes reduce the surface roughness of the detection plate 51 to an extremely low level, ensuring a highly flat plane and providing a foundation for stable magnetic interaction between the detection unit 52 and the magnetic body 11. To further optimize the magnetic interaction between the plane and the magnetic body 11, the material on one side of the plane of the detection plate 51 can be specially treated. If the detection plate 51 is made of metal, the plane can be surface-insulated, such as by spraying insulating paint or plating an insulating film. This prevents the detection plate 51 from interfering with the magnetic force between the detection unit 52 and the magnetic body 11 due to its own conductivity, ensuring that the pressure data acquired by the pressure detection element 53 purely reflects the magnitude of the magnetic force. For non-metallic detection plates 51, a coating with specific magnetic response characteristics can be added to the plane to enhance the magnetic coupling effect between the detection unit 52 and the magnetic body 11, improving detection sensitivity.

[0071] In the magnetic force detection system of the vapor deposition equipment, the side of the detection plate 51 facing the magnetic attraction mechanism 10 is designed as a plane, which can provide a stable and regular detection environment. The planar structure allows the detection plate 51 and the magnetic body 11 in the magnetic attraction mechanism 10 to achieve a more uniform and stable magnetic force interaction. When the detection plate 51 is close to the magnetic body 11, the plane can ensure that the position of the detection part 52 in the magnetic opening 511 is relatively fixed, so that the distance between the detection part 52 and the magnetic body 11 remains relatively consistent throughout the detection area. The pressure data obtained by the pressure detection element 53 is more representative and accurate, and can truly reflect the magnetic force of the magnetic body 11 at the corresponding position. This avoids the unevenness of the surface of the detection plate 51, which would cause inconsistent distances between the detection part 52 and the magnetic body 11, thus affecting the pressure detection results.

[0072] The planar design of the detection plate 51 ensures a uniform and stable distance between the detection unit 52 and the magnetic body 11, resulting in more accurate pressure data acquired by the pressure detection element 53 and effectively reducing detection errors caused by unevenness on the surface of the detection plate 51. This allows operators to more accurately determine the magnetic force of the magnetic body 11, providing a reliable basis for subsequent magnetic force adjustment of the magnetic attraction mechanism 10, ensuring uniform and stable adsorption force between the mask and the substrate 40 during the vapor deposition process, and improving the quality of the vapor-deposited products.

[0073] like Figure 5 As shown, in a second aspect, embodiments of this application also provide a magnetic force detection method, employing a magnetic force detection system as described in any of the above embodiments. The magnetic force detection method includes the following steps:

[0074] S10. Align the magnetic opening 511 of the detection plate 51 with the magnetic body 11 in the magnetic attraction mechanism 10.

[0075] Matching mechanical positioning structures, such as positioning pins and positioning holes, can be installed on the detection plate 51 and the magnetic attraction mechanism 10, respectively. When the detection plate 51 approaches the magnetic attraction mechanism 10, the positioning pin can accurately insert into the positioning hole, guiding the magnetic opening 511 to align with the magnetic body 11. Real-time images of the detection plate 51 and the magnetic attraction mechanism 10 can also be acquired using visual devices such as cameras. Image recognition algorithms are used to identify the positions of the magnetic opening 511 and the magnetic body 11, and the deviation between them is calculated. Based on the deviation information, the control system drives the motor and other actuators to adjust the position of the detection plate 51 until the magnetic opening 511 and the magnetic body 11 are precisely aligned.

[0076] Auxiliary magnetic elements can also be provided at the edge of the magnetic opening 511 of the detection plate 51 or around the magnetic body 11 to assist in alignment using the principle of attraction between opposite magnetic poles. For example, a small permanent magnet can be embedded at the edge of the magnetic opening 511, and an attractive magnetic material patch can be placed at the corresponding position of the magnetic body 11. When the detection plate 51 approaches the magnetic attraction mechanism 10, the attraction force generated by the auxiliary magnetic elements will guide the detection plate 51 to automatically move towards the correct position, achieving initial alignment of the magnetic opening 511 and the magnetic body 11. Further precise alignment can then be achieved by combining with a fine-tuning device.

[0077] S20. The pressure data between the magnetic body 11 and the detection unit 52 is detected by the pressure detection element 53.

[0078] The pressure detection element 53 typically employs a high-precision sensor, such as a precision piezoresistive sensor. Its working principle involves converting the pressure change caused by the magnetic force between the detection unit 52 and the magnetic body 11 into an electrical signal output. Since there is a certain correlation between the magnitude of the magnetic force and the pressure between the two, the magnetic force information of the magnetic body 11 can be indirectly obtained by accurately measuring this pressure data.

[0079] S30. Receive pressure data through the control device, compare and analyze the pressure data with the preset standard value, and determine whether the pressure data is within the normal range.

[0080] The preset standard value is determined based on the normal operating requirements of the vapor deposition equipment and a large amount of experimental data. It represents the range of pressure data that should exist between the magnetic body 11 and the detection unit 52 under ideal operating conditions. The control device compares and analyzes the received actual pressure data with the preset standard value, using specific algorithms and logic to make judgments. If the pressure data is within the preset standard value range, it indicates that the magnetic force of the magnetic body 11 is in a normal state; if it is below this range, it indicates that the magnetic force of the magnetic body 11 may be abnormal and needs to be adjusted to improve the reliability of the bonding between the substrate 40 and the mask.

[0081] In some embodiments, the step of aligning the magnetic opening 511 of the detection plate 51 with the magnetic body 11 in the magnetic attraction mechanism 10 includes: attaching the detection plate 51 to the side of the substrate 40 away from the magnetic attraction mechanism 10.

[0082] Bolts, nuts, and other connectors 54 can be used to fix the detection plate 51 onto the base plate 40 to ensure the stability of the fit and prevent the detection plate 51 from shifting during the detection process, thereby affecting the detection accuracy.

[0083] In this embodiment, by attaching the detection plate 51 to the substrate 40, the detection unit 52 can more accurately sense the magnetic force of the magnetic body 11, and the pressure data obtained by the pressure detection element 53 can more realistically reflect the actual magnetic force of the magnetic body 11, thereby improving the detection accuracy of the entire magnetic force detection system.

[0084] In some embodiments, the vapor deposition apparatus further includes a cooling plate 63 disposed on the side of the magnetic attraction mechanism 10 facing the mask; the step of aligning the magnetic opening 511 of the detection plate 51 with the magnetic body 11 in the magnetic attraction mechanism 10 includes: attaching the detection plate 51 to the side of the cooling plate 63 away from the magnetic attraction mechanism 10.

[0085] In the vapor deposition equipment, the cooling plate 63 is used to cool the magnetic attraction mechanism 10 and the mask plate, etc., to ensure that the equipment operates in a stable temperature environment and avoid the vapor deposition effect and equipment life due to excessive temperature.

[0086] Mechanical fixing methods, such as using bolts or clips, can be used to firmly fix the detection plate 51 to the cooling plate 63, ensuring that the detection plate 51 will not shift during equipment operation. Alternatively, materials with a certain degree of adhesion, such as silicone gaskets, can be used to achieve both adhesion and cushioning and shock absorption, reducing the impact of equipment vibration on the detection.

[0087] By attaching the cooling plate 63 and utilizing the relatively fixed positional relationship between the cooling plate 63 and the magnetic attraction mechanism 10, the alignment of the magnetic opening 511 and the magnetic body 11 can be achieved more accurately. Compared with other alignment methods, this method reduces human error and interference from external factors, improves the accuracy of detection, and allows the detection results to more accurately reflect the magnetic properties of the magnetic body 11. Moreover, by directly attaching the detection plate 51 to the cooling plate 63, the magnetic attraction is strong, the measured data changes are obvious, and subsequent adjustments are easy.

[0088] In some embodiments, the step of aligning the magnetic opening 511 of the detection plate 51 with the magnetic body 11 in the magnetic attraction mechanism 10 includes: placing a simulated substrate 40 on the substrate transfer mechanism 30; and attaching the detection plate 51 to the side of the simulated substrate 40 away from the magnetic attraction mechanism 10.

[0089] In the magnetic force detection process of the vapor deposition equipment, using a simulated substrate 40 to assist the alignment of the magnetic opening 511 of the detection plate 51 with the magnetic body 11 in the magnetic attraction mechanism 10 is a flexible and effective method. The substrate conveying mechanism 30 of the vapor deposition equipment is responsible for conveying the substrate 40 to the designated position to cooperate with the vapor deposition operation. However, if a real substrate 40 is used directly during magnetic force detection, it may cause inconvenience due to factors such as affecting the normal production process or the characteristics of the substrate 40 itself being unfavorable to the detection operation.

[0090] The simulated substrate 40 is a replacement specifically designed for magnetic force detection, and its shape and some physical properties are similar to those of the real substrate 40. By placing the simulated substrate 40 on the substrate transport mechanism 30, the positioning function of the substrate transport mechanism 30 can accurately transport the simulated substrate 40 to the correct position corresponding to the magnetic attraction mechanism 10.

[0091] This embodiment uses a simulated substrate 40 for magnetic force detection, avoiding potential interference from using a real substrate 40 during normal production, thus ensuring the normal production process of the vapor deposition equipment remains unaffected. Magnetic force detection can be performed during equipment idle periods or periodic maintenance, ensuring both normal equipment operation and timely monitoring of the magnetic force status of the magnetic attraction mechanism 10. This embodiment can measure the magnetic attraction capability in actual processes with a substrate 40 present, allowing for assessment of both individual magnetic forces and overall adsorption.

[0092] While the embodiments disclosed in this application are as described above, the content is merely for the purpose of facilitating understanding of this application and is not intended to limit the invention. Any person skilled in the art to which this application pertains may make any modifications and changes in form and detail of the implementation without departing from the spirit and scope disclosed in this application; however, the scope of protection of this application shall still be determined by the scope defined in the appended claims.

[0093] The above description is merely a specific embodiment of this application. Those skilled in the art will clearly understand that, for the sake of convenience and brevity, substitutions for other connection methods described above can be made by referring to the corresponding processes in the foregoing method embodiments, and will not be repeated here. It should be understood that the scope of protection of this application is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in this application, and these modifications or substitutions should all be covered within the scope of protection of this application.

Claims

1. A magnetic force detection system, characterized in that, An application is made in evaporation equipment, the evaporation equipment including a magnetic attraction mechanism, a mask, and a substrate conveying mechanism, the substrate conveying mechanism for conveying the substrate, the magnetic attraction mechanism having a magnetic element for attracting the mask to the substrate, and the magnetic force detection system including: A detection device includes a detection plate, a detection section, and a pressure detection element. The detection plate has a magnetic opening that corresponds to the magnetic body of the magnetic attraction mechanism. The detection section is disposed in the magnetic opening and is magnetic. The pressure detection element is disposed on the side of the detection section facing the magnetic attraction mechanism and is used to detect the pressure data between the detection section and the magnetic body. A control device, electrically connected to the pressure detection element, is used to receive pressure data fed back by the pressure detection element and compare and analyze the pressure data with a preset standard value.

2. The magnetic force detection system according to claim 1, characterized in that, The detection device further includes a connector, and the detection unit is connected to the detection plate through the connector; Preferably, the connector is an elastic element; Preferably, there are multiple elastic elements, which are spaced apart along the circumference of the magnetic opening.

3. The magnetic force detection system according to claim 2, characterized in that, The material of the connector includes non-metals; Preferably, the material of the detection plate includes metal or non-metal.

4. The magnetic force detection system according to claim 1, characterized in that, The number of magnetic openings and detection units are both multiple, and the multiple magnetic openings are arranged in a one-to-one correspondence with the multiple detection units.

5. The magnetic force detection system according to claim 4, characterized in that, The number of pressure detection elements is also multiple, and the multiple pressure detection elements are arranged in a one-to-one correspondence with the multiple detection units.

6. The magnetic force detection system according to claim 1, characterized in that, The detection plate is flat on the side facing the magnetic attraction mechanism.

7. A magnetic force detection method, characterized in that, Using the magnetic force detection system as described in any one of claims 1-6, the magnetic force detection method includes the following steps: Align the magnetic opening of the detection plate with the magnetic body in the magnetic attraction mechanism; The pressure data between the magnetic body and the detection unit is detected by a pressure detection device; The control device receives the pressure data, compares and analyzes it with a preset standard value, and determines whether the pressure data is within the normal range.

8. The magnetic force detection method according to claim 7, characterized in that, The step of aligning the magnetic opening of the detection plate with the magnetic body in the magnetic attraction mechanism includes: The detection plate is attached to the side of the substrate away from the magnetic attraction mechanism.

9. The magnetic force detection method according to claim 7, characterized in that, The vapor deposition equipment further includes a cooling plate disposed on the side of the magnetic attraction mechanism facing the mask; the step of aligning the magnetic opening of the detection plate with the magnetic body in the magnetic attraction mechanism includes: The detection plate is attached to the side of the cooling plate opposite to the magnetic attraction mechanism.

10. The magnetic force detection method according to claim 7, characterized in that, The step of aligning the magnetic opening of the detection plate with the magnetic body in the magnetic attraction mechanism includes: A simulated substrate is placed on the substrate conveying mechanism; The detection plate is attached to the side of the analog substrate away from the magnetic attraction mechanism.

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