Light source device and exposure apparatus

Abstract

This application discloses a light source device and an exposure device. The light source device includes a light source housing, a reflector, a light-emitting part, a base, a first support member, and at least one insulating part. The reflector is located in a receiving cavity, dividing the receiving cavity into a first receiving cavity and a second receiving cavity. The light-emitting part is located in the first receiving cavity, emitting light and causing the reflector to reflect the light from the light-emitting part. The base is located at the bottom of the reflector. The first support member is disposed between the bottom of the reflector and the upper surface of the base for supporting the bottom of the reflector. At least one insulating part is disposed between the upper surface of the base and the side of the reflector opposite to the light-emitting part, dividing the second receiving cavity into at least two heat-conducting cavities, which are filled with a heat-conducting medium. The thermal conductivity of the heat-conducting medium in adjacent heat-conducting cavities gradually decreases in the direction near the center of the reflector. The light source device of this application reduces the temperature gradient inside the reflector, thereby reducing the risk of reflector breakage.

Description

Technical Field

[0001] This application relates to the field of exposure apparatus technology, and in particular to a light source device and an exposure apparatus. Background Technology

[0002] In an exposure apparatus, the light source can be focused by a reflector. However, during the use of high-output light sources (such as discharge lamps), the reflector is heated by the light, causing its temperature to rise. Since the bottom of the reflector is in contact with the first support member, heat is transferred from the reflector to the first support member and the base, causing the temperature at the bottom of the reflector to drop, creating a large temperature gradient, and thus increasing the risk of the reflector breaking. Summary of the Invention

[0003] This application provides a light source device and an exposure device to solve the technical problem that in the exposure device, when the bottom of the reflector comes into contact with the first support member, heat is transferred from the reflector to the first support member and the base, causing the temperature of the bottom of the reflector to drop and forming a large temperature gradient, thereby increasing the risk of the reflector breaking.

[0004] To address the aforementioned technical problems, this application proposes a light source device, comprising: a light source housing having a receiving cavity; a reflector disposed within the light source housing and located within the receiving cavity, the reflector dividing the receiving cavity into a first receiving cavity and a second receiving cavity; a light-emitting part disposed within the light source housing and located within the first receiving cavity, the light-emitting part emitting light and causing the reflector to reflect the light from the light-emitting part; a base disposed within the light source housing and located at the bottom of the reflector; a first support member disposed between the bottom of the reflector and the upper surface of the base for supporting the bottom of the reflector; at least one insulating part disposed between the upper surface of the base and the side of the reflector opposite to the light-emitting part, dividing the second receiving cavity into at least two heat-conducting cavities, the heat-conducting cavities being filled with a heat-conducting medium; and the thermal conductivity of the heat-conducting medium in adjacent heat-conducting cavities gradually decreasing in the direction near the center of the reflector.

[0005] In this embodiment, at least one isolation portion includes a first isolation portion, which is disposed between the upper surface of the base and the side of the reflector opposite to the light-emitting portion and divides the second receiving cavity into a first heat-conducting cavity and a second heat-conducting cavity. The first heat-conducting cavity is filled with a first heat-conducting medium, and the second heat-conducting cavity is filled with a second heat-conducting medium. The thermal conductivity of the first heat-conducting medium is greater than that of the second heat-conducting medium.

[0006] At least one of the isolation parts further includes a second isolation part, which is disposed between the upper surface of the base and the side of the reflector away from the light-emitting part and divides the first heat-conducting cavity into a first sub-heat-conducting cavity and a second sub-heat-conducting cavity. The first sub-heat-conducting cavity is filled with a first heat-conducting medium, and the second sub-heat-conducting cavity is filled with a third heat-conducting medium. The thermal conductivity of the first heat-conducting medium is greater than that of the third heat-conducting medium, and the thermal conductivity of the third heat-conducting medium is greater than that of the second heat-conducting medium.

[0007] The size of the second sub-heat-conducting cavity is larger than that of the second heat-conducting cavity.

[0008] Wherein, the first heat-conducting medium is a first solid heat-conducting medium or a first liquid heat-conducting medium; and / or, the second heat-conducting medium is a second fixed heat-conducting medium or a second liquid heat-conducting medium or a gaseous heat-conducting medium; and / or, the third heat-conducting medium is a third solid heat-conducting medium or a third liquid heat-conducting medium.

[0009] The reflector includes a fixed part and a reflective part. The fixed part is arranged in a ring shape, and the reflective part is arranged in a spherical shape. One end of the fixed part is connected to the inner wall of the light source housing, and the other end is connected to the upper end of the reflective part. One end of the second insulating part is connected to the connection between the fixed part and the reflective part. The light source housing, the fixed part, the second insulating part, and the base are arranged to form a first sub-heat-conducting cavity.

[0010] The first isolation portion and / or the second isolation portion are arranged in a ring shape; preferably, the first isolation portion and / or the second isolation portion are arranged vertically.

[0011] The light source device includes a lifting unit that rises and falls on the base and separates the first sub-heat-conducting cavity and / or the second sub-heat-conducting cavity and / or the second heat-conducting cavity to form at least two heat-conducting cavities.

[0012] The second insulating part can be raised and lowered on the base and divides the first heat-conducting cavity into a first sub-heat-conducting cavity and a second sub-heat-conducting cavity.

[0013] To address the aforementioned technical problems, this application proposes an exposure apparatus, including the aforementioned light source device.

[0014] The beneficial effects of this application are as follows: Unlike existing technologies, this application provides a light source device. The light source device includes a light source housing, a reflector, a light-emitting part, a base, a first support member, and at least one insulating part. The light source housing forms a receiving cavity. The reflector is disposed within the light source housing and located within the receiving cavity. The reflector divides the receiving cavity into a first receiving cavity and a second receiving cavity. The light-emitting part is disposed within the light source housing and located within the first receiving cavity. The light-emitting part emits light and causes the reflector to reflect the light from the light-emitting part. The base is disposed within the light source housing and located at the bottom of the reflector. The first support member is disposed between the bottom of the reflector and the upper surface of the base for supporting the bottom of the reflector. At least one insulating part is disposed between the upper surface of the base and the side of the reflector opposite to the light-emitting part, dividing the second receiving cavity into at least two heat-conducting cavities. The heat-conducting cavities are filled with a heat-conducting medium. Near the center of the reflector, the thermal conductivity of the heat-conducting medium in adjacent heat-conducting cavities gradually decreases.

[0015] Through the combined action of the aforementioned light source housing, reflector, light-emitting part, base, first support member, and at least one insulating part, the thermal conductivity of the heat-conducting medium in the adjacent heat-conducting cavities gradually decreases in the direction close to the center of the reflector, thereby gradually reducing the heat conduction capacity of the adjacent heat-conducting cavities, thus reducing the temperature gradient inside the reflector, and consequently reducing the risk of reflector breakage. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort, wherein:

[0017] Figure 1 This is a partial cross-sectional schematic diagram of the first embodiment of the light source device of this application;

[0018] Figure 2 This is a partial cross-sectional schematic diagram of the second embodiment of the light source device of this application;

[0019] Figure 3 This is a partial cross-sectional schematic diagram of the third embodiment of the light source device of this application;

[0020] Figure 4 This is a partial cross-sectional schematic diagram of the fourth embodiment of the light source device of this application.

[0021] Reference numerals in the attached figures: 10, Light source device; 11, Light source housing; 111, First receiving cavity; 112, Second receiving cavity; 1121, First heat-conducting cavity; 1121a, First sub-heat-conducting cavity; 1121b, Second sub-heat-conducting cavity; 1122, Second heat-conducting cavity; 113, Air supply section; 114, Exhaust section; 12, Reflector; 121, Fixing section; 122, Reflecting section; 13, Light-emitting section; 14, Base; 141, Second heat dissipation structure; 15, First support member; 151, First heat dissipation structure; 16, Isolation section; 16a, First isolation section; 16b, Second isolation section; 17, Lifting section. Detailed Implementation

[0022] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0023] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0024] The light source device and exposure device provided by the present invention will be described in detail below with reference to the embodiments.

[0025] Please see Figure 1 and Figure 2 , Figure 1 This is a partial cross-sectional schematic diagram of the first embodiment of the light source device of this application; Figure 2 This is a partial cross-sectional schematic diagram of a second embodiment of the light source device of this application. This application provides a light source device. The light source device 10 includes a light source housing 11, a reflector 12, a light-emitting part 13, a base 14, a first support member 15, and at least one insulating part 16. The light source housing 11 provides mounting positions for the reflector 12 and the base 14, etc. The light source housing 11 has a receiving cavity (not shown in the figure). The receiving cavity can accommodate the reflector 12, the light-emitting part 13, the base 14, the first support member 15, and at least one insulating part 16, etc.

[0026] A reflector 12 is disposed within the light source housing 11 and located in the receiving cavity. The reflector 12 is fixedly or detachably connected to the inner wall of the light source housing 11. The reflector 12 can focus light. When the reflector 12 is installed on the inner wall of the light source housing 11, it divides the receiving cavity of the light source housing 11 into a first receiving cavity 111 and a second receiving cavity 112. The first receiving cavity 111 and the second receiving cavity 112 can be arranged vertically, for example, the first receiving cavity 111 is located above the second receiving cavity 112.

[0027] The light-emitting part 13 is disposed within the light source housing 11 and located in the first receiving cavity 111. The light-emitting part 13 emits light and causes the reflector 12 to reflect the light from the light-emitting part 13. The light-emitting part 13 can be, but is not limited to, a mercury lamp or an excimer laser. The light-emitting part 13 is used to connect to an external power source (not shown in the figure), which can provide electrical energy to the light-emitting part 13. When the light-emitting part 13 emits light into the reflector 12, the reflector 12 is heated by the light, and the temperature of the reflector 12 rises.

[0028] The base 14 is disposed inside the light source housing 11 and located at the bottom of the reflector 12. The base 14 is fixedly or detachably connected to the inner wall of the light source housing 11. The base 14 can support the reflector 12 and the light-emitting part 13, etc.

[0029] A first support member 15 is disposed between the bottom of the reflector 12 and the upper surface of the base 14. The first support member 15 is used to support the bottom of the reflector 12. The first support member 15 is fixedly or detachably connected to the upper surface of the base 14. The first support member 15 and the bottom of the reflector 12 can be rigidly connected or flexibly connected, etc., which is not limited here.

[0030] The number of insulating parts 16 can be, but is not limited to, one, two, three, four, or more than five, and the number of insulating parts 16 can be determined according to the actual situation, and will not be listed here. In this embodiment, the number of insulating parts 16 is two. At least one insulating part 16 is disposed between the upper surface of the base 14 and the side of the reflector 12 opposite to the light-emitting part 13, and divides the second receiving cavity 112 to form at least two heat-conducting cavities. The lower part of the insulating part 16 is detachably or fixedly connected to the upper surface of the base 14. The upper part of the insulating part 16 is detachably or fixedly connected to the side of the reflector 12 opposite to the light-emitting part 13. When the insulating part 16 is disposed between the upper surface of the base 14 and the side of the reflector opposite to the light-emitting part 13, at least one insulating part 16 divides the second receiving cavity 112 to form at least two heat-conducting cavities.

[0031] For example, when there is one insulating part 16, the second receiving cavity 112 is divided into two heat-conducting cavities. When there are two insulating parts 16, the two insulating parts 16 divide the second receiving cavity 112 into three heat-conducting cavities. When there are three insulating parts 16, the three insulating parts 16 divide the second receiving cavity 112 into four heat-conducting cavities. When there are four insulating parts 16, the four insulating parts 16 divide the second receiving cavity 112 into five heat-conducting cavities. Similarly, when there are n insulating parts 16, the n insulating parts 16 divide the second receiving cavity 112 into n+1 heat-conducting cavities.

[0032] The heat-conducting cavity is filled with a heat-conducting medium (not shown in the figure). The heat-conducting medium can conduct heat. The heat-conducting medium can be, but is not limited to, solid, liquid, and gaseous heat-conducting media. In the direction near the center of the reflector 12, the thermal conductivity of the heat-conducting medium in adjacent heat-conducting cavities gradually decreases. When the second receiving cavity 112 is divided to form two heat-conducting cavities, the thermal conductivity of the heat-conducting medium in the cavity near the reflector 12 is less than that in the cavity farther from the reflector 12. When the second receiving cavity 112 is divided to form three heat-conducting cavities, in the opposite direction near the center of the reflector 12, the thermal conductivity of the heat-conducting medium in all three cavities gradually decreases. Similarly, when the second receiving cavity 112 is divided to form n heat-conducting cavities, in the direction near the center of the reflector 12, the thermal conductivity of the heat-conducting medium in all n cavities gradually decreases. The number of heat-conducting cavities can be determined according to actual conditions and will not be elaborated further here.

[0033] Through the combined action of the aforementioned light source housing 11, reflector 12, light-emitting part 13, base 14, first support member 15, and at least one isolation part 16, the thermal conductivity of the heat-conducting medium in the adjacent heat-conducting cavity gradually decreases in the direction close to the center of the reflector 12, thereby gradually reducing the heat conduction capacity of the adjacent heat-conducting cavity, thus reducing the temperature gradient inside the reflector 12, and further reducing the risk of damage to the reflector 12.

[0034] In some embodiments, at least one insulating portion 16 includes a first insulating portion 16a. The first insulating portion 16a is disposed between the upper surface of the base 14 and the side of the reflector 12 facing away from the light-emitting portion 13, dividing the second receiving cavity 112 into a first heat-conducting cavity 1121 and a second heat-conducting cavity 1122. The lower portion of the first insulating portion 16a is detachably or fixedly connected to the upper surface of the base 14. The upper portion of the first insulating portion 16a is detachably or fixedly connected to the side of the reflector 12 facing away from the light-emitting portion 13. In this embodiment, the lower portion of the first insulating portion 16a is fixed to the upper surface of the base 14; the upper portion of the first insulating portion 16a is fixed to the side of the reflector 12 facing away from the light-emitting portion 13.

[0035] The first heat-conducting cavity 1121 is filled with a first heat-conducting medium (not shown in the figure). This first heat-conducting medium is capable of conducting heat. The second heat-conducting cavity 1122 is filled with a second heat-conducting medium (not shown in the figure). This second heat-conducting medium is also capable of conducting heat. The thermal conductivity of the first heat-conducting medium is greater than that of the second heat-conducting medium. That is, the heat conduction capacity of the first heat-conducting cavity 1121 is greater than that of the second heat-conducting cavity 1122.

[0036] Through the combined action of the first insulating part 16a, the first heat-conducting cavity 1121, the second heat-conducting cavity 1122, the first heat-conducting medium, and the second heat-conducting medium, the heat conduction capacity of the two heat-conducting cavities is gradually reduced, thereby reducing the temperature gradient inside the reflector 12 and thus reducing the risk of damage to the reflector 12; it also simplifies the structure and reduces costs.

[0037] In some embodiments, at least one isolation portion 16 further includes a second isolation portion 16b. That is, the light source device 10 includes two isolation portions 16, such as a first isolation portion 16a and a second isolation portion 16b. The second isolation portion 16b is disposed between the upper surface of the base 14 and the side of the reflector 12 facing away from the light-emitting portion 13, dividing the first heat-conducting cavity 1121 into a first sub-heat-conducting cavity 1121a and a second sub-heat-conducting cavity 1121b. The lower part of the second isolation portion 16b is detachably or fixedly connected to the upper surface of the base 14; the upper part of the second isolation portion 16b is detachably or fixedly connected to the side of the reflector 12 facing away from the light-emitting portion 13. As in this embodiment, the lower part of the second isolation portion 16b is fixedly connected to the upper surface of the base 14; the upper part of the second isolation portion 16b is fixedly connected to the side of the reflector 12 facing away from the light-emitting portion 13.

[0038] The first sub-heat-conducting cavity 1121a is filled with a first heat-conducting medium, which is capable of conducting heat. The second sub-heat-conducting cavity 1121b is filled with a third heat-conducting medium (not shown in the figure), which is also capable of conducting heat. The thermal conductivity of the first heat-conducting medium is greater than that of the third heat-conducting medium. The thermal conductivity of the third heat-conducting medium is greater than that of the second heat-conducting medium. That is, the thermal conductivity of the first heat-conducting medium > the thermal conductivity of the third heat-conducting medium > the thermal conductivity of the second heat-conducting medium. In other words, the heat conduction capacity of the first sub-heat-conducting cavity 1121a is greater than that of the second sub-heat-conducting cavity 1121b, and the heat conduction capacity of the second sub-heat-conducting cavity 1121b is greater than that of the second heat-conducting cavity 1122.

[0039] Through the combined action of the first insulating part 16a, the second insulating part 16b, the first sub-heat-conducting cavity 1121a, the second sub-heat-conducting cavity 1121b, the second heat-conducting cavity 1122, the first heat-conducting medium, the second heat-conducting medium, and the third heat-conducting medium, not only is the number of heat-conducting cavities increased, but the heat conduction capacity of the heat-conducting cavities is also gradually reduced, thereby reducing the temperature gradient inside the reflector 12 and thus reducing the risk of damage to the reflector 12; at the same time, the structure is simple and the cost is reduced.

[0040] In some other embodiments, the light source device 10 may include a third isolation portion in addition to the first isolation portion 16a and the second isolation portion 16b. The number of heat-conducting cavities can be four. Alternatively, the light source device 10 may include a third isolation portion and a fourth isolation portion. The number of heat-conducting cavities can be five. Alternatively, the light source device 10 may include a third isolation portion, a fourth isolation portion, and a fifth isolation portion. The number of heat-conducting cavities can be six. Alternatively, the light source device 10 may include a third isolation portion, a fourth isolation portion, a fifth isolation portion, and a sixth isolation portion, etc. The number of heat-conducting cavities can be seven. Of course, the light source device 10 may also include an nth isolation portion. The number of heat-conducting cavities is n+1, and will not be elaborated further here.

[0041] Continue reading Figure 1 and Figure 2 In some embodiments, the size of the second sub-heat-conducting cavity 1121b is larger than that of the second heat-conducting cavity 1122. That is, the contact area between the third heat-conducting medium in the second sub-heat-conducting cavity 1121b and the surface of the reflector 12 is larger than the contact area between the second heat-conducting medium in the second heat-conducting cavity 1122 and the surface of the reflector 12. This makes the heat conduction capacity of the second sub-heat-conducting cavity 1121b greater than that of the second heat-conducting cavity 1122, further reducing the temperature gradient of the reflector 12, etc.

[0042] In some embodiments, the first thermally conductive medium is a first solid thermally conductive medium (not shown in the figure) or a first liquid thermally conductive medium (not shown in the figure). And / or, the second thermally conductive medium is a second fixed thermally conductive medium (not shown in the figure), a second liquid thermally conductive medium (not shown in the figure), or a gaseous thermally conductive medium (not shown in the figure). And / or, the third thermally conductive medium is a third solid thermally conductive medium (not shown in the figure) or a third liquid thermally conductive medium (not shown in the figure).

[0043] The aforementioned first, second, and / or third fixed thermally conductive media may be, but are not limited to, metallic thermally conductive media, ceramic thermally conductive media, carbon-based material thermally conductive media, and composite material thermally conductive media. Metallic thermally conductive media may be, but are not limited to, copper, aluminum, and silver. Ceramic thermally conductive media may be, but are not limited to, alumina, aluminum nitride, and silicon carbide. Carbon-based material thermally conductive media may be, but are not limited to, graphite. Composite material thermally conductive media may be, but are not limited to, metal-based composite materials and ceramic-carbon-based composite materials.

[0044] The aforementioned first liquid heat-conducting medium, and / or second liquid heat-conducting medium, and / or third liquid heat-conducting medium may be, but is not limited to, water, oils, liquid metals, organic liquids, ionic liquids, and nanofluids. Water may be, but is not limited to, pure water or deionized water. Oils may be, but are not limited to, mineral oils, silicone oils, and synthetic oils. Organometallic substances may be, but are not limited to, fluorinated liquids and hydrocarbons.

[0045] The aforementioned gaseous medium may include, but is not limited to, air, helium, nitrogen, and carbon dioxide.

[0046] In this embodiment, the first heat-conducting medium of the first sub-heat-conducting cavity 1121a can be a first solid heat-conducting medium or a first liquid heat-conducting medium. The third heat-conducting medium of the second sub-heat-conducting cavity 1121b can be a third solid heat-conducting medium or a third liquid heat-conducting medium. Because the second heat-conducting cavity 1122 is located near the bottom of the reflector 12, the bottom of the reflector 12 can transfer some heat to the first support member 15. That is, the thermal conductivity of the second heat-conducting medium in the second heat-conducting cavity 1122 can be lower than the thermal conductivity of the heat-conducting medium in other heat-conducting cavities, so that the second heat-conducting medium of the second heat-conducting cavity 1122 can be a gaseous heat-conducting medium.

[0047] In other embodiments, the heat-conducting media in the first sub-heat-conducting cavity 1121a, the second sub-heat-conducting cavity 1121b, and the second heat-conducting cavity 1122 can all be solid heat-conducting media, as long as the thermal conductivity of the fixed heat-conducting media gradually decreases. When the heat-conducting media in the first sub-heat-conducting cavity 1121a, the second sub-heat-conducting cavity 1121b, and the second heat-conducting cavity 1122 are all solid heat-conducting media, the first insulating part 16a and the second insulating part 16b can be removed, thereby reducing costs, etc.

[0048] Alternatively, the heat-conducting media in the first sub-heat-conducting cavity 1121a, the second sub-heat-conducting cavity 1121b, and the second heat-conducting cavity 1122 can all be liquid heat-conducting media, as long as the thermal conductivity of the liquid heat-conducting media gradually decreases. When the heat-conducting media in the first sub-heat-conducting cavity 1121a, the second sub-heat-conducting cavity 1121b, and the second heat-conducting cavity 1122 are all liquid heat-conducting media, the first isolation part 16a and the second isolation part 16b need to be retained to reduce the mutual influence between different liquid heat-conducting media.

[0049] Alternatively, the first sub-heat-conducting cavity 1121a may be a solid heat-conducting medium; the second sub-heat-conducting cavity 1121b may be a liquid heat-conducting medium; and the second heat-conducting cavity 1122 may be a gaseous heat-conducting medium. In this case, the first isolation part 16a and the second isolation part 16b need to be retained to reduce the mutual influence between different liquid heat-conducting media.

[0050] Continue reading Figure 1 and Figure 2 In some embodiments, the reflector 12 includes a fixing part 121 and a reflecting part 122. The fixing part 121 is arranged in a ring shape. The reflecting part 122 is arranged in a spherical shape. One end of the fixing part 121 is connected to the inner wall of the light source housing 11. The fixing part 121 is fixedly or detachably connected to the inner wall of the light source housing 11. The fixing part 121 serves to fix and support, such as mounting the reflecting part 122 on the inner wall of the light source housing 11. The other end of the fixing part 121 is connected to the upper end of the reflecting part 122. The fixing part 121 is fixedly or detachably connected to the upper end of the reflecting part 122.

[0051] One end of the second insulating part 16b is connected to the connection between the fixing part 121 and the reflecting part 122. The second insulating part 16b is detachably or fixedly connected to the connection. The first sub-heat-conducting cavity 1121a is formed by the light source housing 11, the fixing part 121, the second insulating part 16b, and the base 14.

[0052] Through the combined action of the fixing part 121, the reflecting part 122, the second insulating part 16b, and the light source housing 11, not only is the number of heat-conducting cavities increased, thereby changing the temperature gradient of the reflector 12; but it also provides a certain support for the reflector 12, improving the stability of the reflector 12 installed in the receiving cavity.

[0053] The light source device 10 includes a second support member (not shown in the figure). When one end of the second insulating part 16b is connected to the connection between the fixing part 121 and the reflecting part 122, the second insulating part 16b can provide a certain supporting force. When both the second support member and the first support member 15 are present, the second support member is located above the first support member 15, and the size of the second support member is smaller than that of the first support member 15. When the light source device 10 does not include the first support member 15, the size of the second support member is smaller than that of the first support member 15. In this case, the second support member is directly disposed between the bottom of the reflector 12 and the upper surface of the base 14. Through the above-mentioned second support member, the contact area between the reflector 12 and the second support member can be reduced, heat transfer can be reduced, and the risk of damage to the reflector 12 can be reduced.

[0054] When the second insulating part 16b can provide a certain supporting force, the second support member is directly set between the bottom of the reflector 12 and the upper surface of the base 14. At this time, the second support member and the bottom of the reflector 12 are flexibly connected. The flexible connection can alleviate the stress caused by the difference in thermal expansion between the bottom of the reflector 12 and the second support member to a certain extent, thereby reducing the risk of damage to the reflector 12.

[0055] In some embodiments, since the reflective portion 122 is spherically arranged, when the first insulating portion 16a and / or the second insulating portion 16b is annularly arranged, the first sub-heat-conducting cavity 1121a, the second sub-heat-conducting cavity 1121b, and the second heat-conducting cavity 1122 can be annularly arranged. This not only increases the contact area between the first heat-conducting medium in the first sub-heat-conducting cavity 1121a, the third heat-conducting medium in the second sub-heat-conducting cavity 1121b, and the second heat-conducting medium in the second heat-conducting cavity 1122 and the side of the reflector 12 away from the light-emitting portion 13, but also allows the heat conduction capacity of the first sub-heat-conducting cavity 1121a, the second sub-heat-conducting cavity 1121b, and the second heat-conducting cavity 1122 to change in a gradient, thereby reducing the risk of damage to the reflector 12; it also makes the first sub-heat-conducting cavity 1121a, the second sub-heat-conducting cavity 1121b, and the second heat-conducting cavity 1122 arranged adjacent to each other along the center of their reflector 12.

[0056] Specifically, the first isolation portion 16a and / or the second isolation portion 16b are arranged in a ring shape, and the first isolation portion 16a and / or the second isolation portion 16b are arranged vertically, so that the first sub-heat conducting cavity 1121a, the second sub-heat conducting cavity 1121b and the second heat conducting cavity 1122 are concave cylindrical shapes to match the bottom surface of the reflector 12.

[0057] When there are multiple isolation sections 16, the multiple isolation sections 16 are arranged in a ring shape and vertically, and the multiple isolation sections 16 are arranged in a cylindrical shape in sequence in the direction close to the center of the reflector 12. Among them, the top shape of the multiple heat-conducting cavities is matched with the shape of the side of the reflector 12 opposite to the light-emitting part 13.

[0058] Please see Figure 3 , Figure 3 This is a partial cross-sectional schematic diagram of the third embodiment of the light source device of this application. (In conjunction with...) Figure 1 and Figure 2 In some embodiments, the light source device 10 includes a lifting section 17. The lifting section 17 rises and falls on the base 14 and divides the first sub-heat-conducting cavity 1121a, and / or the second sub-heat-conducting cavity 1121b, and / or the second heat-conducting cavity 1122 into at least two heat-conducting cavities. The lifting section 17 can extend into or out of the second receiving cavity 112. When the lifting section 17 extends into the second receiving cavity 112, it can divide the first sub-heat-conducting cavity 1121a, and / or the second sub-heat-conducting cavity 1121b, and / or the second heat-conducting cavity 1122 into at least two heat-conducting cavities. When the lifting section 17 extends out of the second receiving cavity 112, the first sub-heat-conducting cavity 1121a, the second sub-heat-conducting cavity 1121b, and the second heat-conducting cavity 1122 can be independent cavities.

[0059] The size of the first sub-heat-conducting cavity 1121a and / or the second sub-heat-conducting cavity 1121b and / or the second heat-conducting cavity 1122 can be flexibly adjusted through the aforementioned lifting part 17, thereby adjusting the heat dissipation capacity. The number of lifting parts 17 may be, but is not limited to, one, two, three, or four or more, etc., and is not limited here.

[0060] In this embodiment, the light source device 10 includes a lifting section 17. The lifting section 17 extends into or out of the second sub-heat-conducting cavity 1121b, dividing the second sub-heat-conducting cavity 1121b into two sub-heat-conducting cavities. The size of the second sub-heat-conducting cavity 1121b can be flexibly adjusted, thereby flexibly adjusting the heat dissipation capacity. In other embodiments, the light source device 10 may also include two or three lifting sections 17, etc., which will not be described in detail here.

[0061] In some embodiments, the light source device 10 further includes a drive assembly (not shown in the figure). The drive assembly drives the lifting part 17 to rise and fall on the base 14, so that the lifting part 17 extends into or out of the second receiving cavity 112. The drive assembly may be, but is not limited to, a motor screw and nut structure (not shown in the figure), a hydraulic cylinder structure (not shown in the figure), a pneumatic cylinder structure (not shown in the figure), a chain and sprocket structure (not shown in the figure), and a gear and rack structure (not shown in the figure), etc.

[0062] In addition to the lifting part 17 being able to adjust the size of the second receiving cavity 112, the second insulating part 16b can also be raised and lowered on the base 14 to divide the first heat-conducting cavity 1121 into a first sub-heat-conducting cavity 1121a and a second sub-heat-conducting cavity 1121b. At this time, the second insulating part 16b has the same function as the lifting part 17, and can divide the heat-conducting cavity into at least two sub-heat-conducting cavities.

[0063] It should be noted that, in the above different embodiments, the fixed connection method may include, but is not limited to, welding and integral molding. The detachable connection method may include, but is not limited to, snap-fit, plug-in, and bolt connection.

[0064] Please see Figure 4 , Figure 4 This is a partial cross-sectional schematic diagram of the fourth embodiment of the light source device of this application. Combined with... Figures 1 to 3 The above embodiment reduces the temperature gradient of the reflector 12 by adding a heat-conducting cavity and a heat-conducting medium in the second receiving cavity 112. In other embodiments, the temperature gradient of the reflector 12 can also be reduced by changing the structure of the first support member 15.

[0065] In one embodiment, a first heat dissipation structure 151 is provided on the surface of the first support member 15. The first heat dissipation structure 151 can increase the heat dissipation area, reduce the accumulation of heat between the bottom of the reflector 12 and the first support member 15, accelerate the dissipation of heat into the surrounding environment, and thus reduce the temperature gradient of the reflector 12.

[0066] In one specific embodiment, the first heat dissipation structure 151 includes a first heat dissipation fin (not shown in the figure). The first heat dissipation fin is disposed on the surface of the first support member 15. The shape of the first heat dissipation fin may be, but is not limited to, straight, interdigitated, and spiral. The first heat dissipation fin is a heat-conducting medium. The heat-conducting medium may be, but is not limited to, aluminum and copper.

[0067] In another specific embodiment, the first heat dissipation structure 151 includes a first heat dissipation channel (not shown in the figure). The first heat dissipation channel is disposed within the first support member 15. The first heat dissipation channel may be filled with a cooling medium. The cooling medium carries away the heat absorbed by the first support member 15. The first heat dissipation channel may be arranged in a ring shape, a cross shape, or a mesh shape, etc.

[0068] In another embodiment, when the reflector 12 is supported at least partially by the second insulating part 16b, the second support member may be provided with an elastic support structure (not shown in the figure). The elastic support structure makes the contact between the reflector 12 and the second support member more uniform, and avoids excessive local contact pressure leading to concentrated heat transfer.

[0069] Specifically, the elastic support structure can be, but is not limited to, springs (not shown in the figure), rubber pads (not shown in the figure), or bellows (not shown in the figure). The elastic support structure can, to a certain extent, accommodate the displacement of the reflector 12 caused by thermal expansion or deformation, maintain good contact, and at the same time provide a certain degree of thermal insulation.

[0070] In other alternative embodiments, the temperature gradient of the reflector 12 can also be reduced by changing the structure of the base 14.

[0071] In one embodiment, a second heat dissipation structure 141 is provided on the upper surface of the base 14. The second heat dissipation structure 141 can increase the heat dissipation area, reduce the accumulation of heat between the first support member 15 and the upper surface of the base 14, accelerate the dissipation of heat into the surrounding environment, and thus indirectly reduce the temperature gradient of the reflector 12.

[0072] In one specific embodiment, the second heat dissipation structure 141 includes a second heat dissipation fin (not shown in the figure). The second heat dissipation fin is disposed on the upper surface of the base 14. The shape of the second heat dissipation fin may be, but is not limited to, straight, interdigitated, and spiral. The heat dissipation fin is made of a thermally conductive medium. The thermally conductive medium may be, but is not limited to, aluminum and copper.

[0073] In another specific embodiment, the second heat dissipation structure 141 includes a second heat dissipation channel (not shown in the figure). The second heat dissipation channel is disposed within the base 14. The second heat dissipation channel may be filled with a cooling medium. The cooling medium carries away the heat absorbed within the base 14. The second heat dissipation channel may be arranged in a ring, cross, or mesh pattern, among other things.

[0074] As in other specific embodiments, the second heat dissipation structure 141 includes a perforated structure (not shown in the figure). The perforated structure is disposed on the base 14. The perforated structure not only reduces the weight of the base 14, but also increases the air circulation channel, allowing air to flow inside the base 14 and carry away heat.

[0075] Specifically, the perforated structure can be filled at least partially with a thermally conductive medium. This medium can be, but is not limited to, metal foam, graphene composite materials, etc. By filling the perforated structure with a thermally conductive medium, heat can be effectively transferred from the reflector 12 to the heat dissipation surface of the base 14, reducing heat accumulation in localized areas and lowering the temperature gradient of the reflector 12.

[0076] In another embodiment, a flexible connector (not shown in the figure) is provided between the upper surfaces of the first support member 15 and the base 14. The flexible connector can compensate for the displacement of the reflector 12, the first support member 15 and the base 14 due to the difference in thermal expansion to a certain extent, and avoid poor heat transfer caused by stress concentration at the connection between the first support member 15 and the base 14.

[0077] In some embodiments, an air supply section 113 is provided at the upper side of the light source housing 11. An exhaust section 114 is provided at the lower part of the light source housing 11. The exhaust section 114 is centrally connected to the base 14. Airflow sequentially flows from the air supply section 113, the first receiving cavity 111, the center of the reflector 12, and the center of the base 14, and is discharged to the exhaust section 114. The air supply section 113 and the exhaust section 114 serve to cool the light source device 10.

[0078] See Figures 1 to 4 This application provides an exposure apparatus. The exposure apparatus (not shown in the figure) includes the light source device 10 described above. It should be noted that the light source device 10 is the same as the light source device 10 described in the above embodiments, and is not limited thereto. By using the light source device 10, the thermal conductivity of the heat-conducting medium in the adjacent heat-conducting cavities gradually decreases in the direction near the center of the reflector 12, thereby gradually reducing the heat conduction capacity of the adjacent heat-conducting cavities, thereby reducing the temperature gradient inside the reflector 12, and thus reducing the risk of damage to the reflector 12.

[0079] The aforementioned exposure apparatus illuminates a mask (not shown in the figure) to expose its image onto a substrate (not shown in the figure). The exposure apparatus includes an illumination system (not shown in the figure) and a projection system (not shown in the figure). The illumination system illuminates the mask. The projection system projects the image of the mask onto a substrate coated with a photosensitive agent.

[0080] The terms "first," "second," and "third" in this application are for descriptive purposes only and should not be construed as indicating the number of technical features indicated. Therefore, a feature defined as "first," "second," or "third" may explicitly or implicitly include at least one of those features. All directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of this application are only used to explain the relative positional relationships and movements between components in a specific orientation (as shown in the figures). If the specific orientation changes, the directional indications will change accordingly. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. A process, method, system, product, or device that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to these processes, methods, products, or devices.

[0081] The above description is merely an embodiment of this application and does not limit the patent scope of this application. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.

Claims

1. A light source device, characterized in that, include: The light source housing has a receiving cavity; A reflector is disposed within the housing of the light source and located in the receiving cavity, the reflector dividing the receiving cavity into a first receiving cavity and a second receiving cavity; A light-emitting part is disposed inside the light source housing and located in the first receiving cavity; the light-emitting part emits light and the reflector reflects the light from the light-emitting part. The base is disposed inside the housing of the light source and located at the bottom of the reflector; A first support member is disposed between the bottom of the reflector and the upper surface of the base, for supporting the bottom of the reflector; At least one insulating portion is disposed between the upper surface of the base and the side of the reflector opposite to the light-emitting portion, and divides the second receiving cavity to form at least two heat-conducting cavities, wherein the heat-conducting cavities are filled with a heat-conducting medium; the thermal conductivity of the heat-conducting medium in adjacent heat-conducting cavities gradually decreases in the direction near the center of the reflector.

2. The light source device according to claim 1, characterized in that, At least one of the isolation portions includes a first isolation portion, which is disposed between the upper surface of the base and the side of the reflector opposite to the light-emitting portion and divides the second receiving cavity into a first thermally conductive cavity and a second thermally conductive cavity. The first thermally conductive cavity is filled with a first thermally conductive medium, and the second thermally conductive cavity is filled with a second thermally conductive medium. The thermal conductivity of the first thermally conductive medium is greater than that of the second thermally conductive medium.

3. The light source device according to claim 2, characterized in that, At least one of the isolation portions further includes a second isolation portion, which is disposed between the upper surface of the base and the side of the reflector opposite to the light-emitting portion and divides the first heat-conducting cavity into a first sub-heat-conducting cavity and a second sub-heat-conducting cavity. The first sub-heat-conducting cavity is filled with the first heat-conducting medium, and the second sub-heat-conducting cavity is filled with a third heat-conducting medium. The thermal conductivity of the first heat-conducting medium is greater than that of the third heat-conducting medium, and the thermal conductivity of the third heat-conducting medium is greater than that of the second heat-conducting medium.

4. The light source device according to claim 3, characterized in that, The second sub-heat-conducting cavity is larger in size than the second heat-conducting cavity.

5. The light source device according to claim 3, characterized in that, The first heat-conducting medium is a first solid heat-conducting medium or a first liquid heat-conducting medium; and / or, the second heat-conducting medium is a second fixed heat-conducting medium or a second liquid heat-conducting medium or a gaseous heat-conducting medium; And / or, the third heat-conducting medium is a third solid heat-conducting medium or a third liquid heat-conducting medium.

6. The light source device according to claim 3, characterized in that, The reflector includes a fixing part and a reflecting part. The fixing part is arranged in a ring shape, and the reflecting part is arranged in a spherical shape. One end of the fixing part is connected to the inner sidewall of the light source housing, and the other end is connected to the upper end of the reflecting part. The second insulating part is connected at one end to the connection between the fixing part and the reflecting part. The light source housing, the fixing part, the second insulating part, and the base form the first sub-heat-conducting cavity.

7. The light source device according to claim 6, characterized in that, The first isolation portion and / or the second isolation portion are arranged in a ring shape; Preferably, the first isolation portion and / or the second isolation portion are arranged vertically.

8. The light source device according to any one of claims 3 to 7, characterized in that, The light source device includes a lifting unit that moves up and down on the base and separates the first sub-heat-conducting cavity and / or the second sub-heat-conducting cavity and / or the second heat-conducting cavity to form at least two heat-conducting cavities.

9. The light source device according to any one of claims 3 to 7, characterized in that, The second insulating part can be raised and lowered on the base and divides the first heat-conducting cavity into the first sub-heat-conducting cavity and the second sub-heat-conducting cavity.

10. An exposure apparatus, characterized in that, Includes the light source device according to any one of claims 1 to 9.

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