Exposure machine

Abstract

The application provides an exposure machine, which comprises a rack, a conveying trolley and a positioning mechanism. The rack has a containing space, and a placing position is arranged in the containing space. The conveying trolley is used for conveying a mask to the placing position. The positioning mechanism is arranged on the opposite sides of the placing position. An input port is arranged on the rack, and the input port is used for allowing the conveying trolley to enter the containing space. The positioning mechanisms arranged on the opposite sides of the placing position are used for abutting against the opposite sides of the conveying trolley respectively, so that the conveying trolley is aligned with the middle part of the placing position. The positioning mechanism comprises a positioning piece and a driving piece. The positioning piece is used for pushing the corresponding side of the conveying trolley. The driving piece is used for driving the positioning piece to move close to or away from the conveying trolley. The driving piece is mounted on the rack, and the positioning piece is connected to the driving end of the driving piece. The exposure machine provided by the application solves the technical problem that the trolley is difficult to be accurately sent into the predetermined position in the exposure machine, so that the conveying arm cannot accurately grasp and convey the mask.

Description

Technical Field

[0001] This application belongs to the field of display device technology, and more specifically, relates to an exposure machine. Background Technology

[0002] In the display panel manufacturing process, a photomask is first input into the exposure machine's input port. Then, a conveyor arm transports the photomask to the photomask storage area inside the exposure machine. The photomask is typically transported via a trolley. Specifically, the photomask is manually placed onto the trolley, which is then pushed into the exposure machine's input port to its designated position. However, it is difficult for manual operation to accurately position the trolley within the exposure machine, potentially leading to trolley misalignment and preventing the conveyor arm from accurately gripping and transporting the photomask. Summary of the Invention

[0003] The purpose of this application is to provide an exposure machine to solve the technical problem in the prior art where the trolley is difficult to be accurately fed into the predetermined position inside the exposure machine, resulting in the inability of the conveyor arm to accurately grasp and convey the mask.

[0004] To achieve the above objectives, the technical solution adopted in this application is as follows: An exposure machine is provided, comprising: a frame having a accommodating space, within which a placement position is provided; a transport trolley for transporting a photomask to the placement position; and a positioning mechanism, wherein positioning mechanisms are respectively provided on opposite sides of the placement position, an input port is provided on the frame for the transport trolley to enter the accommodating space, and the positioning mechanisms on opposite sides of the placement position respectively abut against opposite sides of the transport trolley to align the transport trolley with the center of the placement position; the positioning mechanism includes a positioning member and a driving member, the positioning member for pushing against the corresponding side of the transport trolley, and the driving member for driving the positioning member to move closer to or away from the transport trolley, the driving member being mounted on the frame, and the positioning member being connected to the driving end of the driving member.

[0005] In one alternative embodiment, the positioning element includes a clamping rod and a clamping head, one end of the clamping rod being connected to the driving end of the driving element, and the clamping head being connected to the other end of the clamping rod.

[0006] In one alternative embodiment, the clamping head includes a connecting rod portion and a clamping portion, the clamping portion being connected to one end of the clamping rod, and the other end of the clamping rod being sleeved outside the connecting rod portion and connected to the connecting rod portion.

[0007] In one alternative embodiment, the clamping portion has a supporting surface, which is either a planar surface or an arc surface.

[0008] In one alternative embodiment, the clamping rod includes a first connecting segment and a second connecting segment, the first connecting segment and the second connecting segment being bent and connected, the first connecting segment being connected to the driving end of the driving member, and the second connecting segment being connected to the clamping head.

[0009] In one alternative embodiment, at least two positioning mechanisms are provided on each side of the placement position.

[0010] In one alternative embodiment, the positioning mechanisms on opposite sides of the placement position are arranged opposite each other.

[0011] In one alternative embodiment, the drive element includes a pneumatic cylinder or an electric cylinder.

[0012] In an optional embodiment, the positioning mechanism further includes a crash pad and an adsorption element, both of which are installed on the side of the frame away from the input port. The crash pad is used to limit the movement of the conveyor trolley, and the adsorption element is used to adsorb the conveyor trolley.

[0013] In an optional embodiment, the rack is further provided with two tracks, which are located on both sides of the placement position and extend from the input port toward the placement position. The distance between the two tracks is greater than the width of the conveyor trolley.

[0014] The beneficial effects of the exposure machine provided in this application are as follows: Compared with the prior art, the exposure machine in this application embodiment provides positioning mechanisms on opposite sides of the placement position. The positioning mechanism includes a driving component and a positioning component. The driving component can drive the positioning component to move closer to or away from the conveyor trolley. When the conveyor trolley enters from the input port, the positioning component automatically adjusts the position of the conveyor trolley to ensure that the conveyor trolley is aligned with the center of the placement position. This reduces complex manual adjustment steps, makes operation more convenient, and facilitates the subsequent conveyor arm to accurately grab and transport the mask, reducing downtime and maintenance costs and improving work efficiency. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a partial structural schematic diagram of the exposure machine provided in an embodiment of this application;

[0017] Figure 2 A schematic diagram illustrating the cooperation structure between the positioning mechanism and the conveying trolley provided in an embodiment of this application;

[0018] Figure 3 This is a schematic diagram of the positioning element provided in the embodiments of this application;

[0019] Figure 4 This is a schematic diagram of the clamping part provided in an embodiment of this application;

[0020] Figure 5 This is a schematic diagram of the positioning element provided in another embodiment of this application.

[0021] The following are the labeling elements in the figure:

[0022] 100-Exposure machine; 11-Railway; 20-Positioning mechanism; 21-Positioning component; 22-Clamping rod; 221-First connecting section; 222-Second connecting section; 23-Clamping head; 231-Connecting rod part; 232-Clamping part; 2321-Abutting surface; 233-Protective layer; 30-Transport trolley; 40-Transport arm; 50-Mask storage area. Detailed Implementation

[0023] To make the technical problems, technical solutions, and beneficial effects to be solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0024] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0025] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0026] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0027] In the display panel manufacturing process, photomasks are first input into the exposure machine's input port, and then a conveyor arm transports them to the photomask storage area inside the machine. Photomasks are typically transported by a trolley. The photomasks are manually placed onto the trolley, which is then pushed in through the input port. Guide rails are installed at the input port, and the trolley's wheels rest on these rails. During transport, the trolley slides along the rails. However, due to the weight of the photomasks and the fact that the trolley carries multiple photomasks at a time, the wheels are prone to wear, causing the trolley's position on the rails to shift. This can lead to the conveyor arm failing to accurately grasp and transport the photomasks, triggering an alarm. The process requires stopping the equipment and manually repositioning the trolley, which is cumbersome. Furthermore, even if the trolley is placed accurately initially, after the conveyor arm removes a photomask, the weight can cause the trolley to wobble, further shifting its position and preventing the conveyor arm from accurately grasping the remaining photomasks.

[0028] Please refer to the following: Figures 1 to 5 The exposure machine 100 provided in this application embodiment will now be described. The exposure machine 100 includes: a frame (not shown in the figure), the frame having a receiving space, and a placement position provided in the receiving space; a transport trolley 30, the transport trolley 30 being used to transport a photomask to the placement position; and a positioning mechanism 20, wherein positioning mechanisms 20 are respectively provided on opposite sides of the placement position, the frame having an input port for the transport trolley 30 to enter the receiving space, and the positioning mechanisms 20 on opposite sides of the placement position being used to abut against opposite sides of the transport trolley 30 to align the transport trolley 30 with the center of the placement position; the positioning mechanism 20 includes a positioning member 21 and a driving member, the positioning member 21 being used to push against the corresponding side of the transport trolley 30, and the driving member being used to drive the positioning member 21 to move closer to or away from the transport trolley 30, the driving member being mounted on the frame, and the positioning member 21 being connected to the driving end of the driving member.

[0029] The exposure machine 100 is used to accurately transfer circuit patterns onto a substrate coated with photosensitive material. The exposure machine 100 includes a frame, a positioning mechanism 20, and a transport trolley 30. The frame is used to support and mount components. The transport trolley 30 is used to transport the mask from the outside to the receiving space. The positioning mechanism 20 is used to adjust the position of the transport trolley 30 to ensure that the position of the transport trolley 30 is aligned with the placement position, so that the conveyor arm 40 can accurately grasp the mask and transport the mask to the mask storage area 50.

[0030] The input port can be set on the front or side of the rack. The input port is connected to the accommodating space so that the conveyor trolley 30 can enter. A placement position is set in the accommodating space. When the conveyor trolley 30 is pushed to the placement position, the conveyor arm 40 can accurately position the mask on the conveyor trolley 30. The conveyor arm 40 grabs and transfers the mask.

[0031] The driving component can be a lead screw, pneumatic cylinder, electric cylinder, or hydraulic cylinder, etc.; the driving component is installed on the frame, and the installation method can be threaded connection, riveting, or welding, etc.; the driving component is used to drive the positioning component 21 to move closer to or away from the conveying trolley 30, thereby controlling the positioning component 21 to adjust the position of the conveying trolley 30, ensuring that the conveying trolley 30 is aligned with the center of the placement position.

[0032] Positioning mechanisms 20 are arranged around the periphery of the conveying trolley 30, and multiple sets can be provided. In one embodiment, two sets of positioning mechanisms 20 are provided, respectively arranged on both sides of the placement position. The positioning mechanisms 20 on opposite sides of the placement position are used to abut against opposite sides of the conveying trolley 30 to align the conveying trolley 30 with the center of the placement position. In another embodiment, positioning mechanisms 20 are provided on the four corners of the conveying trolley 30 to provide omnidirectional positioning and ensure the accurate positioning of the conveying trolley 30. In yet another embodiment, multiple sets of positioning mechanisms 20 are staggered on one or more sides of the conveying trolley 30. The design can be tailored to the specific shape and size of the conveying trolley 30 to optimize space utilization and reduce stress concentration in a single direction.

[0033] By setting up a driving mechanism, the gripper head 23 can be accurately moved to the designated position, and the conveyor trolley 30 can be finely adjusted to ensure it is in the correct position. Furthermore, mechanized positioning reduces the uncertainty of manual operation, ensuring that position adjustments are performed to the same standard each time, improving operational consistency and reliability, increasing work efficiency, and reducing problems caused by human error.

[0034] After the positioning mechanism 20 is set up, when using it, the operator only needs to place the mask on the conveying trolley 30 and send the conveying trolley 30 into the input port. The subsequent position adjustment is automatically completed by the positioning mechanism 20, which reduces complicated manual adjustment steps and makes the operation more convenient.

[0035] Once the mask is accurately placed, it facilitates the subsequent gripping and transfer by the conveyor arm 40, which helps maintain subsequent product production, reduces the number of system alarms, reduces downtime, and lowers maintenance costs.

[0036] Compared with the prior art, the exposure machine 100 provided in this application provides a positioning mechanism 20 on both sides of the placement position. The positioning mechanism 20 includes a driving component and a positioning component 21. The driving component can drive the positioning component 21 to move closer to or away from the conveyor trolley 30. When the conveyor trolley 30 enters from the input port, the positioning component 21 automatically adjusts the position of the conveyor trolley 30 to ensure that the conveyor trolley 30 is aligned with the center of the placement position. This reduces complicated manual adjustment steps, makes operation more convenient, and facilitates the subsequent conveyor arm 40 to accurately grab and transport the mask, reducing downtime and maintenance costs and improving work efficiency.

[0037] In another embodiment of this application, please refer to Figure 3 and Figure 5 The positioning member 21 includes a clamping rod 22 and a clamping head 23. One end of the clamping rod 22 is connected to the driving end of the driving member, and the clamping head 23 is connected to the other end of the clamping rod 22.

[0038] The positioning component 21 consists of a clamping rod 22 and a clamping head 23. The clamping rod 22 supports and connects to the clamping head 23, facilitating the movement of the clamping head 23 by the driving component. The driving component moves the clamping rod 22, which in turn moves the clamping head 23. The clamping head 23 abuts against and pushes the conveying trolley 30 to adjust its position and ensure it is correctly aligned. The connection between the clamping rod 22 and the clamping head 23 can be achieved through threaded connection, riveting, or welding.

[0039] In another embodiment of this application, the clamping head 23 includes a connecting rod portion 231 and a clamping portion 232. The clamping portion 232 is connected to one end of the clamping rod 22, and the other end of the clamping rod 22 is sleeved on the outside of the connecting rod portion 231 and connected to the connecting rod portion 231.

[0040] The clamping head 23 is configured to include a connecting rod portion 231 and a clamping portion 232. The connecting rod portion 231 is used to connect to the clamping rod 22, and the clamping portion 232 is fixed to one end of the connecting rod portion 231. This facilitates the smooth transmission of power from the driving component to the connecting rod portion 231 and the clamping portion 232 through the clamping rod 22, ensuring a more direct and effective force transmission during clamping. Furthermore, in some embodiments, the connecting rod portion 231 and the clamping portion 232 are integrally formed.

[0041] The clamping part 232 can be in the shape of a flat plate, cylinder, or hemisphere, etc.; the clamping surface of the clamping part 232 can be a plane, an arc surface, or multiple abutment points. The connecting rod part 231 can be designed as a straight rod, which has the simplest structure, is easy to manufacture and maintain, and has a low cost. It provides high rigidity and stability in the straight direction, and can directly and effectively transmit driving force, reducing energy loss. It can also be designed as an L-shape, which can change the direction of force through a 90-degree bend, helping to optimize the equipment layout and make the space more compact. It can also be designed as a Z-shape, which can achieve angle adjustment in multiple directions through two bending points, providing greater freedom and flexibility to adapt to irregular shapes of the frame. The working area can be designed according to the specific shape of the frame.

[0042] By sleeve one end of the clamping rod 22 onto the outside of the connecting rod 231 and connecting it, the clamping head 23 can maintain rigidity while having a certain adjustment space, which can compensate for installation errors to a certain extent and ensure that the clamping head 23 can accurately contact the conveying trolley 30, making it easier for the clamping head 23 to adjust the position of the conveying trolley 30.

[0043] The clamping part 232 is fixed by connecting the clamping rod 22 to the connecting rod 231, ensuring that the clamping head 23 will not accidentally fall off or shift during the entire operation, thus improving the stability of the clamping head 23. The connection between the clamping rod 22 and the connecting rod 231 can be achieved by bolting them together, resulting in a simple structure, easy implementation, convenient disassembly and assembly, and easy maintenance and replacement of parts. Alternatively, welding can be used to directly weld the clamping rod 22 and the connecting rod 231 together to form a single unit, providing extremely high structural strength and rigidity, eliminating the risk of loosening at the connection point, and making it suitable for high-load applications. The system can be configured as needed to better adapt to the requirements of different conveying trolleys 30, and the same positioning mechanism 20 can be applied to objects of different sizes and shapes.

[0044] In another embodiment of this application, please refer to [the relevant document / reference]. Figures 3 to 5 The clamping part 232 has a supporting surface 2321, which is either a flat surface or an arc surface.

[0045] In some embodiments, such as Figure 5 The clamping part 232's abutting surface 2321 is designed as a plane. This planar design provides a larger contact area, allowing the force to be distributed more evenly on the surface of the conveyor trolley 30, ensuring stable contact between the clamping head 23 and the conveyor trolley 30. The planar abutting surface 2321 can better conform to the surface of the conveyor trolley 30, providing greater friction. Compared to point contact or line contact, this prevents the conveyor trolley 30 from moving during clamping, ensuring operational safety and reliability, guaranteeing the accuracy of position adjustment, and reducing the possibility of slippage or displacement during clamping. The planar structure of the clamping part 232 is relatively simple and easy to manufacture.

[0046] In other embodiments, such as Figure 3 and Figure 4 The clamping part 232's abutting surface 2321 is designed as an arc surface. The arc-shaped contact surface can distribute pressure more evenly, the contact method is gentler, reducing the possibility of stress concentration and avoiding excessive wear or surface damage caused by local high pressure points. In other words, the clamping part 232 with an arc surface reduces the risk of direct impact or scratching of the conveyor trolley 30, which is beneficial to maintaining the long-term performance of the trolley, reducing the risk of scratches or damage to the surface of the conveyor trolley 30, reducing the need for maintenance and replacement due to wear, extending the service life of the conveyor trolley 30 and its components, and reducing maintenance workload and costs.

[0047] In another embodiment of this application, the clamping head 23 is made of plastic.

[0048] Using plastic helps reduce the weight of the gripper head 23, making the entire assembly lighter and easier to move quickly or adjust frequently, thus improving operational efficiency. The plastic's low hardness and coefficient of friction ensure that the gripper head 23 will not scratch or abrade the surface of the conveyor trolley 30 during contact, reducing the risk of scratches and damage to the object's surface.

[0049] The clamping head 23 can be made of polytetrafluoroethylene (PTFE), which has a smooth surface and a low coefficient of friction. Using PTFE to make the clamping head 23 reduces friction with the conveyor trolley 30, preventing scratches or wear. Alternatively, the clamping head 23 can be made of polycarbonate, which has high mechanical strength and toughness, making it resistant to breakage or deformation under significant external forces. Even after long-term use, it maintains its precise shape and dimensions. Using polycarbonate ensures that the conveyor trolley 30 is not damaged and enables stable clamping operation and high-precision positioning. Finally, the clamping head 23 can be made of nylon, which has good tensile and compressive strength, excellent wear resistance, long service life, and low cost.

[0050] In another embodiment of this application, the clamping head 23 is made of metal; a protective layer 233 is provided on the outer surface of the abutting surface 2321 of the clamping head 23, and the protective layer 233 is made of plastic or rubber.

[0051] The clamping head 23 is made of metal, which gives it sufficient mechanical strength to withstand large forces and torques, ensuring that the clamping head 23 will not be deformed or damaged during use, thus extending its service life and reducing the frequency of maintenance.

[0052] A protective layer 233 is provided outside the bearing surface 2321 of the clamping head 23. The soft protective layer 233 can better fit the surface of the conveying trolley 30, increasing the actual contact area, thereby improving the friction and helping to improve the stability and safety of the adjustment.

[0053] The protective layer 233 is made of plastic, which has good wear resistance, provides a certain cushioning effect, maintains good shape, and has high durability and a certain degree of flexibility. The protective layer 233 is also made of rubber, which provides high friction, helps prevent slippage on the conveyor trolley 30, has good gripping and cushioning effects, and can quickly return to its original shape.

[0054] Using metal as the main material for the gripper head 23 and adding a soft protective layer 233 to its surface not only utilizes the high strength and durability of metal but also leverages the advantages of non-metallic materials to protect the conveyor trolley 30 from damage, while improving operational safety and flexibility. If only the protective layer 233 is damaged, it can be easily replaced without replacing the entire gripper head 23 assembly, reducing maintenance costs and time.

[0055] In another embodiment of this application, please refer to Figure 3 and Figure 5 The clamping rod 22 includes a first connecting section 221 and a second connecting section 222. The first connecting section 221 and the second connecting section 222 are bent and connected. The first connecting section 221 is connected to the driving end of the driving member, and the second connecting section 222 is connected to the clamping head 23.

[0056] By designing the clamping rod 22 in an L-shape, the direction of force can be changed, allowing the clamping rod 22 and the clamping head 23 to be installed in a limited space, improving space utilization and operational flexibility, and enabling the clamping head 23 to contact the conveyor trolley 30. The L-shaped design can adjust the direction of force according to actual needs, avoiding unnecessary energy loss, such as... Figure 2 and Figure 3 This ensures that the force of the driving component is horizontally transmitted to the clamping rod 22 and the clamping head 23, guaranteeing that the force on the driving component can be transmitted to the clamping head 23 in the most efficient way, while ensuring the stability and accuracy of the operation.

[0057] In one embodiment, such as Figure 3 and Figure 5 The second connecting section 222 is sleeved on the outside of the connecting rod portion 231 and connected to the connecting rod portion 231. This design can enhance the rigidity and stability of the overall structure. The bending design of the clamping rod 22 can help disperse stress and reduce the risk of deformation or damage caused by excessive force in one direction.

[0058] In another embodiment of this application, the clamping rod 22 is horizontally extended by the driving member toward the placement position, and the clamping head 23 is horizontally positioned.

[0059] The horizontal direction refers to the horizontal direction along the conveyor trolley 30. The clamping rod 22 is located between the drive unit and the clamping head 23. The clamping rod 22 is set horizontally, and the clamping head 23 is also set horizontally, which can provide a more stable operation and help reduce the skewing or tilting caused by gravity. This makes the clamping head 23 more stable and smooth during movement, and facilitates the clamping head 23 to push and adjust the position of the conveyor trolley 30 in the horizontal direction, so that it is accurately placed in the center of the placement position.

[0060] Furthermore, the horizontal arrangement is a relatively simple mechanical design, reducing the need for complex angle adjustments or additional support. The drive component can directly push the clamping rod 22 along one dimension. Compared with complex multi-axis motion systems, this not only reduces manufacturing and operating costs but also makes the equipment easier to inspect and maintain on a daily basis.

[0061] The horizontal alignment helps maintain the parallel relationship between the clamping head 23 and the conveying trolley 30, making it easier to achieve precise positioning during approach and pushing, and improving the accuracy of aligning the clamping head 23 with the conveying trolley 30. The horizontally extending clamping rod 22 ensures the accurate positioning of the clamping head 23, avoids collisions or misalignment, and ensures stability and reliability during the pushing process.

[0062] Furthermore, the horizontal orientation allows the gripper head 23 to move quickly and smoothly to the target position, reducing unnecessary lifting and lowering movements, thereby shortening the operation cycle time, accelerating operation speed, and improving overall efficiency. The horizontally extended design maximizes the use of the work area space, avoids vertical interference problems, and effectively utilizes the limited workspace.

[0063] In another embodiment of this application, see [reference] Figure 2 Each side of the placement position is provided with at least two positioning mechanisms 20.

[0064] By setting at least two positioning mechanisms 20 on each side of the placement position, during use, at least two sets of positioning mechanisms 20 on both sides of the conveying trolley 30 can adjust the conveying trolley 30. Force can be applied from both sides of the conveying trolley 30 at the same time, avoiding the problem of tilting or unstable movement of the conveying trolley 30 caused by force on one side, and improving operational stability.

[0065] It can also form multi-point positioning, allowing the conveyor trolley 30 to be adjusted into position more precisely, achieving more accurate position control and adjustment, and facilitating the conveyor arm 40 to more accurately grasp the mask. For example... Figure 2 The four positioning mechanisms 20 work together to distribute the load evenly to different positions of the conveying trolley 30, preventing damage caused by local overload and extending the service life of the conveying trolley 30.

[0066] Furthermore, the spacing between two adjacent positioning mechanisms 20 on the same side allows for flexible adjustment of the spacing according to actual needs, accommodating conveyor trolleys 30 of different sizes and weights, thus increasing versatility and flexibility. The combined action of multiple positioning mechanisms 20 can evenly distribute the total load across different positions of the conveyor trolley 30, preventing damage caused by localized overload, extending equipment lifespan, and significantly improving positioning accuracy and operational stability, thereby enhancing equipment safety and adaptability.

[0067] Thanks to the coordinated operation of multiple positioning mechanisms 20, the accurate positioning of the conveyor trolley 30 can be completed in a short time, reducing waiting time, speeding up operation, and improving production efficiency.

[0068] In one alternative embodiment, see Figure 2 The positioning mechanisms 20 on opposite sides of the placement position are arranged opposite each other.

[0069] The positioning mechanisms 20 located on opposite sides of the placement position are arranged in pairs. Multiple sets of positioning mechanisms 20 are symmetrically arranged along the center line of the placement position, which can ensure that a balanced force is applied from both sides of the conveying trolley 30 at the same time, avoiding the problem of tilting or unstable movement of the conveying trolley 30 caused by unilateral force, and improving operational stability.

[0070] In addition, the dual-sided clamping design ensures that even if one of the positioning mechanisms 20 malfunctions, the other positioning mechanisms 20 can still maintain a certain level of control, thus improving the safety of the entire operation process.

[0071] In one alternative embodiment, the drive element includes a pneumatic cylinder or an electric cylinder.

[0072] In some embodiments, the driving component is a cylinder. The cylinder has a relatively simple mechanical structure, lacks complex electronic components, reduces potential failure points, improves system reliability, and lowers maintenance difficulty and cost. Furthermore, the cylinder can complete extension and retraction movements in a short time, providing rapid response and facilitating quick adjustment of the position of the conveyor trolley 30. The mask plate is relatively heavy, and its placement on the conveyor trolley 30 contributes to the overall weight, while the cylinder generates a large output force, providing strong pushing and pulling force for easily pushing and lifting the conveyor trolley 30. The pneumatic control system is mature, with a simple interface to the control system, facilitating automated operation.

[0073] For example, the cylinder can be electrically connected to the controller and mounted on the frame via a flange to control its movement position; one end of the clamping rod 22 is connected to the drive end of the cylinder. By setting the controller to be electrically connected to the cylinder, the movement position of the cylinder can be precisely controlled, ensuring that the clamping rod 22 and the clamping head 23 can accurately reach the predetermined position, adjusting the position of the conveying trolley 30, and achieving precise positioning of the conveying trolley 30. The controller can automatically adjust the cylinder's action according to a preset program or sensor feedback, without manual intervention, saving manpower. The flange mounting method of the cylinder provides a stable mechanical support, preventing positional displacement caused by vibration or external force, ensuring stable operation over a long period of time, and reducing errors; at the same time, it does not occupy too much extra space, effectively utilizing limited space resources. In addition, the controller can also integrate multiple protection functions, such as overload protection and emergency stop, to prevent equipment damage or personnel injury due to abnormal conditions. The design of anti-collision pads and adsorption components can further enhance operational safety.

[0074] In other embodiments, the drive element is an electric cylinder. Electric cylinders are typically used in conjunction with servo motors or stepper motors, and when combined with a closed-loop control system, they can provide very high positioning accuracy and repeatability, facilitating the alignment of the conveyor trolley 30 with the center of the placement position. Furthermore, electric cylinders have high energy conversion efficiency, consuming electricity only during actual operation, and their relatively simple structure reduces long-term operating costs and maintenance frequency. In addition, electric cylinders have a fast response speed, quickly responding to control signals, with short start and stop times, which helps to quickly adjust the position of the conveyor trolley 30, improving production efficiency.

[0075] In another embodiment of this application, the positioning mechanism 20 further includes a crash pad (not shown) and an adsorption member (not shown). Both the crash pad and the adsorption member are installed on the side of the frame away from the input port. The crash pad is used to limit the movement of the conveyor trolley 30, and the adsorption member is used to adsorb the conveyor trolley 30.

[0076] The anti-collision pad can be used as a physical limit to restrict the travel of the conveyor trolley 30. It acts as a limiting structure in front of the conveyor trolley 30 to ensure that the conveyor trolley 30 stops accurately at the predetermined position in the direction of travel, avoiding positional deviation caused by exceeding the travel range, and achieving precise limiting of the conveyor trolley 30.

[0077] Anti-collision pads can be made of materials such as rubber, silicone, or polyethylene, possessing good elasticity and resilience, as well as good friction properties, and are lightweight and durable. Anti-collision pads provide cushioning when conveyor trolleys approach each other, reducing impact force and preventing equipment damage caused by hard collisions. By absorbing impact energy, anti-collision pads reduce direct metal-to-metal collisions, decrease wear between equipment, thereby extending the service life of related components and reducing long-term operating costs.

[0078] The adsorption component can hold the conveyor trolley 30 in place, keeping it firmly in place and reducing minor movements caused by vibration or other external factors, thereby improving the stability of the conveyor trolley 30 in place.

[0079] The adsorption component can be an electromagnet, which generates a magnetic field through an electric current to adsorb the conveyor trolley 30 containing iron or steel. Adsorption and release can be quickly achieved by controlling the on / off state of the current. Furthermore, adjusting the current magnitude can change the magnetic field strength, thereby regulating the adsorption force. This allows for rapid adsorption of the conveyor trolley 30 with strong adsorption force, maintaining its stability. Alternatively, it can be a vacuum suction cup, utilizing the principle of air pressure difference. By extracting air from the vacuum suction cup to create negative pressure, it adsorbs the surface of the conveyor trolley 30. This structure is relatively simple, easy to install, and has low maintenance costs. It can adsorb not only flat objects but also curved surfaces to a certain extent. Finally, it can be a locking structure, directly connecting the conveyor trolley 30 through a locking mechanism.

[0080] In use, the conveyor trolley 30 is pushed in through the input port. When the conveyor trolley 30 is pushed in to its maximum stroke, the anti-collision pad limits the trolley, and the adsorption component can hold the conveyor trolley 30 in place, stabilizing its position. Then, the positioning mechanism 20 finely adjusts the position of the conveyor trolley 30 to make it straight and precisely aligned with the placement position, which facilitates subsequent steps and is very convenient to operate.

[0081] By setting up anti-collision pads and suction components, not only is the safety and accuracy of operation improved, but wear between equipment is also effectively reduced, the operation process is optimized, and the loading, unloading and transfer of photomasks can be completed more smoothly, thereby improving overall production efficiency.

[0082] In another embodiment of this application, the rack is further provided with two tracks 11, which are located on both sides of the placement position and extend from the input port toward the placement position. The distance between the two tracks 11 is greater than the width of the conveying trolley 30.

[0083] By setting two tracks 11, with the distance between the two tracks 11 being greater than the width of the conveying trolley 30, the conveying trolley 30 can move smoothly along a predetermined path within the two tracks 11. The two tracks 11 provide a clear guiding path for the conveying trolley 30. By reasonably setting the distance between the tracks 11, the conveying trolley 30 can pass smoothly without contacting the frame or other fixed devices, reducing the risk of equipment damage caused by collisions or friction, and ensuring the straightness and stability during movement.

[0084] The movement of the conveyor trolley 30 guided by track 11 is more controllable, reducing the possibility of accidents and improving the safety of the entire operation. Furthermore, the design of track 11 eliminates the need for large additional safety clearances, allowing for a compact layout and maximizing the use of available space.

[0085] This design allows the conveyor trolley 30 to pass safely while preventing it from colliding or rubbing against other components (such as the frame). This not only protects the equipment itself but also reduces the risk of equipment damage, lowers maintenance costs, and protects expensive production equipment.

[0086] The exposure machine 100 also includes a conveyor arm 40, a light source mechanism, a projection optics mechanism, and a photomask mechanism. The photomask is transported by a conveyor trolley 30, the photomask is picked up by the conveyor arm 40, and the photomask is transferred to the photomask storage area 50. The light source mechanism provides a high-precision light source for the exposure process. In the projection optics mechanism, a series of precisely designed lens groups reduce the pattern on the photomask and project it clearly onto the photoresist layer on the substrate surface. The photomask mechanism carries and precisely positions the photomask, on which the fine pattern needs to be transferred to the substrate.

[0087] The above are merely preferred embodiments of this application and are not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. An exposure machine, characterized in that, The exposure machine includes: A rack having a accommodating space, wherein a placement space is provided within the accommodating space; A transport trolley, used to transport the photomask to the placement position; and The positioning mechanism is provided on both sides of the placement position. The frame is provided with an input port for the conveying trolley to enter the accommodating space. The positioning mechanisms on both sides of the placement position are used to abut against the opposite sides of the conveying trolley to align the conveying trolley with the center of the placement position. The positioning mechanism includes a positioning component and a driving component. The positioning component is used to push against the corresponding side of the conveying trolley, and the driving component is used to drive the positioning component to move closer to or away from the conveying trolley. The driving component is mounted on the frame, and the positioning component is connected to the driving end of the driving component.

2. The exposure machine as described in claim 1, characterized in that, The positioning element includes a clamping rod and a clamping head. One end of the clamping rod is connected to the driving end of the driving element, and the clamping head is connected to the other end of the clamping rod.

3. The exposure machine as described in claim 2, characterized in that, The clamping head includes a connecting rod portion and a clamping portion. The clamping portion is connected to one end of the clamping rod, and the other end of the clamping rod is sleeved outside the connecting rod portion and connected to the connecting rod portion.

4. The exposure machine as described in claim 3, characterized in that, The clamping part has a supporting surface, which is either a plane or an arc surface.

5. The exposure machine as described in claim 2, characterized in that, The clamping rod includes a first connecting segment and a second connecting segment. The first connecting segment and the second connecting segment are bent and connected. The first connecting segment is connected to the driving end of the driving member, and the second connecting segment is connected to the clamping head.

6. The exposure machine as described in any one of claims 1 to 5, characterized in that, At least two positioning mechanisms are provided on each side of the placement position.

7. The exposure machine as described in claim 6, characterized in that, The positioning mechanisms on opposite sides of the placement position are arranged opposite each other.

8. The exposure machine as described in any one of claims 1 to 5, characterized in that, The driving component includes a pneumatic cylinder or an electric cylinder.

9. The exposure machine as described in any one of claims 1 to 5, characterized in that, The positioning mechanism also includes a crash pad and an adsorption component. Both the crash pad and the adsorption component are installed on the side of the frame away from the input port. The crash pad is used to limit the movement of the conveying trolley, and the adsorption component is used to adsorb the conveying trolley.

10. The exposure machine as described in any one of claims 1 to 5, characterized in that, The frame is also equipped with two tracks, which are located on both sides of the placement position and extend from the input port toward the placement position. The distance between the two tracks is greater than the width of the conveying trolley.

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