Mask carrier assembly and exposure apparatus

Abstract

The application provides a mask bearing assembly and an exposure device, and relates to the technical field of exposure machines.The mask bearing assembly comprises a support platform and a mounting base.The support platform comprises a first mounting surface and a first bearing surface.The mounting base comprises a second mounting surface and a second bearing surface.The second mounting surface is used for loading a mask.The second bearing surface and the first bearing surface are close to each other.One of the first bearing surface and the second bearing surface is provided with a positioning column, and the other is provided with a positioning groove.The positioning column is used for being inserted into the positioning groove.The radial dimension of the positioning column is less than or equal to the radial dimension of the positioning groove.The dimension of the positioning column along the thickness direction of the support platform is less than or equal to the dimension of the positioning groove along the thickness direction of the support platform.The radial dimension of at least part of the positioning column gradually decreases in the direction away from the positioning groove.The mask bearing assembly provided by the application can improve the positioning accuracy of the mask.

Description

Technical Field

[0001] This application belongs to the field of exposure machine technology, and more specifically, relates to a mask carrier assembly and an exposure device. Background Technology

[0002] Masks are used in the fabrication of display panels and are a key component in the patterning process. They are especially necessary when using an exposure machine for exposure.

[0003] In related technologies, the photomask is transported to the support platform of the exposure machine via a drive device. The exposure machine is equipped with limiting components to limit the photomask, ensuring that it is accurately loaded onto the support platform. However, as the exposure machine is used for an extended period, the limiting components wear down, reducing their limiting accuracy and affecting the positioning accuracy of the photomask, which in turn affects the exposure results. Summary of the Invention

[0004] The purpose of this application is to provide a mask carrier component and an exposure device to improve the positioning accuracy of the mask.

[0005] To achieve the above objectives, the technical solution adopted in this application is as follows:

[0006] Firstly, this application provides a photomask support assembly applied to an exposure device. The photomask support assembly provided by this application includes a support platform, which includes a first mounting surface and a first bearing surface opposite each other along the thickness direction of the support platform. The first mounting surface is used to connect to the device body of the exposure device. In this way, the support platform can be mounted on the device body of the exposure device as a support foundation.

[0007] The mask support assembly provided in this application further includes a mounting base adapted to hold a mask. The mounting base includes a second mounting surface and a second bearing surface opposite each other along the thickness direction of the support platform. The second mounting surface is used to hold the mask, and the second bearing surface and the first bearing surface are close to each other. In this way, the mounting base can hold the mask.

[0008] Wherein, one of the first bearing surface and the second bearing surface is provided with a positioning post, and the other of the first bearing surface and the second bearing surface is provided with a positioning groove. The positioning post is used to insert into the positioning groove. The radial dimension of the positioning post is less than or equal to the radial dimension of the positioning groove. The dimension of the positioning post along the thickness direction of the support platform is less than or equal to the dimension of the positioning groove along the thickness direction of the support platform. At least a portion of the radial dimension of the positioning post gradually decreases along the direction away from the positioning groove.

[0009] Through the above technical solution, the mask support assembly provided in this application can utilize a support platform installed on the main body of the equipment as a support foundation, and can also utilize a mounting base to support the mask. At least a portion of the radial dimension of the positioning post gradually decreases along the direction away from the positioning groove. Even if there is a slight misalignment between the positioning post and the positioning groove, the positioning post can still be inserted into the positioning groove, thereby allowing the support platform and the mounting base to be smoothly assembled even if misalignment occurs.

[0010] In this way, the mask support assembly provided in this application can improve the installation accuracy of the support platform and the mounting base, improve the positioning accuracy of the mask, and at least to a certain extent avoid the exposure effect being affected by the positioning accuracy of the mask, thereby helping to improve the exposure effect.

[0011] In some embodiments, the first bearing surface is provided with a positioning post protruding in a direction away from the first mounting surface, and the second bearing surface is provided with a positioning groove recessed in a direction toward the second mounting surface. The positioning post includes a guide portion and a positioning body portion. The positioning body portion is connected to the first bearing surface, and the guide portion is connected to the end of the positioning body portion away from the first bearing surface. The radial dimension of the guide portion gradually decreases in the direction away from the first bearing surface.

[0012] In some embodiments, the positioning groove includes a groove bottom and a groove body. The radial dimension of the groove bottom gradually decreases along the direction away from the support platform. The groove bottom is located on the side of the groove body away from the support platform. The groove bottom is used to cooperate with the guide part, and the groove body is used to cooperate with the positioning body part.

[0013] In some embodiments, along the thickness direction of the support platform, the size of the positioning main body is smaller than the size of the guide body, and the size of the groove main body is smaller than the size of the groove bottom.

[0014] Optionally, the dimension of the support platform is 'a' along the thickness direction, and the value of 'a' is in the range of 15mm ≤ a ≤ 20mm.

[0015] Optionally, the dimension of the positioning column is b along the thickness direction of the support platform, and the value of b is in the range of 18mm≤b≤22mm.

[0016] Optionally, along the thickness direction of the support platform, the size of the positioning body is b1, and the value of b1 is in the range of 6mm≤b1≤10mm.

[0017] Optionally, along the thickness direction of the support platform, the dimension of the guide part is b2, and the value of b2 is in the range of 10mm≤b2≤15mm.

[0018] Optionally, the size of the mounting base is c along the thickness direction of the support platform, and the value of c is in the range of 23mm≤c≤28mm.

[0019] Optionally, the size of the positioning groove along the thickness direction of the support platform is d, and the value of d is in the range of 18mm≤d≤22mm.

[0020] Optionally, the dimension of the groove body along the thickness direction of the support platform is d1, and the value range of d1 is: 6mm≤d1≤10mm.

[0021] Optionally, along the thickness direction of the support platform, the dimension of the bottom of the groove is d2, and the value of d2 is in the range of 10mm≤d2≤15mm.

[0022] Optionally, the positioning post has a circular cross-section, the cross-section of the positioning post is perpendicular to the thickness direction of the support platform, and the radial dimension of the cross-section of the positioning post is e1, the value range of e1 is: 23mm≤e1≤28mm.

[0023] Optionally, the cross-section of the positioning post is rectangular, the cross-section of the positioning post is perpendicular to the thickness direction of the support platform, and the side length of the cross-section of the positioning post is e2, the value range of e2 is: 23mm≤e2≤28mm.

[0024] Optionally, the cross-section of the positioning groove is circular, the cross-section of the positioning groove is perpendicular to the thickness direction of the support platform, and the radial dimension of the cross-section of the positioning groove is f1, the value range of f1 is: 23mm≤f1≤28mm.

[0025] Optionally, the cross-section of the positioning groove is rectangular, the cross-section of the positioning groove is perpendicular to the thickness direction of the support platform, and the side length of the cross-section of the positioning groove is f2, the value range of f2 is: 23mm≤f2≤28mm.

[0026] Optionally, the cross-section of the support platform is circular, the cross-section of the support platform is perpendicular to the thickness direction of the support platform, and the radial dimension of the cross-section of the support platform is g, the value of g is in the range of 45mm≤g≤55mm.

[0027] Optionally, the cross-section of the support platform is rectangular, the cross-section of the support platform is perpendicular to the thickness direction of the support platform, and the side length of the cross-section of the support platform is h, the value of h is in the range of 45mm≤h≤55mm.

[0028] Optionally, the cross-section of the mounting base is circular, the cross-section of the mounting base is perpendicular to the thickness direction of the support platform, and the radial dimension of the cross-section of the mounting base is i, the value of i is in the range of 45mm≤i≤55mm.

[0029] Optionally, the cross-section of the mounting base is rectangular, the cross-section of the mounting base is perpendicular to the thickness direction of the support platform, and the side length of the cross-section of the mounting base is j, the value of j is in the range of 45mm≤j≤55mm.

[0030] In some embodiments, the outer surface of the guide is a convex arc surface, and the wall surface of the groove bottom is a concave arc surface.

[0031] In some embodiments, the guide portion is a hemispherical structure, and the bottom of the groove defines a hemispherical cavity for accommodating the guide portion.

[0032] In some embodiments, the outer peripheral surface of the positioning body is a cylindrical surface, and the groove body defines a cylindrical cavity for accommodating the positioning body.

[0033] In some embodiments, the positioning post is located at the center of the support platform, and the positioning groove is located at the center of the mounting base.

[0034] Secondly, this application provides an exposure apparatus, which includes an apparatus body and a mask carrier assembly as described in any of the above embodiments, with a first mounting surface connected to the apparatus body. The exposure apparatus provided in this application has the same or similar technical effects as the mask carrier assembly of any of the above embodiments, and will not be described in detail here.

[0035] In some embodiments, the exposure device provided in this application further includes a driving component, a limiting member, a limit switch, and a controller. The driving component is mounted on the device body and is used to drive a mounting base carrying a mask to move along a first direction and a second direction. The first direction is perpendicular to the thickness direction of the support platform, and the second direction is perpendicular to the first direction. The limiting member is mounted on the device body and is used to limit the mounting base in the first direction. The limit switch is mounted on the limiting member and is used to emit a detection signal when it contacts the mounting base in the first direction. The controller is electrically connected to the driving component and the limit switch, respectively, and is configured to:

[0036] The control drive component drives the mounting base to move along the first direction;

[0037] The control drive component, based on the detection signal, drives the mounting base to move along the second direction toward the support platform. Attached Figure Description

[0038] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0039] Figure 1 This is one of the structural schematic diagrams of the exposure device provided in the embodiments of this application;

[0040] Figure 2 For along Figure 1 One of the cross-sectional structural diagrams of the middle AA line;

[0041] Figure 3 for Figure 2 A schematic diagram of the central support platform;

[0042] Figure 4 for Figure 2 A schematic diagram of the mounting base;

[0043] Figure 5 One of the top view of the support platform or the bottom view of the mounting base provided in the embodiments of this application;

[0044] Figure 6 For along Figure 1 Sectional view of the middle AA line, part two;

[0045] Figure 7 for Figure 6 A schematic diagram of the central support platform;

[0046] Figure 8 for Figure 6 A schematic diagram of the mounting base;

[0047] Figure 9 A top view of the support platform or a bottom view of the mounting base provided in the embodiments of this application;

[0048] Figure 10 A top view of the support platform or a bottom view of the mounting base provided in the embodiments of this application;

[0049] Figure 11 A top view of the support platform or a bottom view of the mounting base provided in the embodiments of this application;

[0050] Figure 12 This is a second schematic diagram of the structure of the exposure device provided in the embodiments of this application.

[0051] The following are the labeling elements in the figure:

[0052] 1000 - Exposure equipment; 2000 - Mask; 100 - Equipment body; 200 - Mask support assembly; 210 - Support platform; 2101 - First mounting surface; 2102 - First support surface; 211 - Positioning post; 2111 - Positioning body; 2112 - Guide part; 220 - Mounting base; 2201 - Second mounting surface; 2202 - Second support surface; 221 - Positioning groove; 2211 - Groove body; 2212 - Groove bottom; 300 - Limiting component; 400 - Controller; 500 - Limit switch. Detailed Implementation

[0053] To make the technical problems, technical solutions, and beneficial effects to be solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0054] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0055] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0056] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0057] The mask 2000 is used in the fabrication of display panels and is a key component in the patterning process. It is particularly essential when using an exposure machine for exposure.

[0058] In related technologies, the photomask 2000 is transported to the support platform 210 of the exposure machine via a drive device. The exposure machine is equipped with limiting components to limit the photomask 2000, ensuring that the photomask 2000 is accurately loaded onto the support platform 210. However, as the exposure machine is used for an extended period, the limiting components wear down, reducing their limiting accuracy and affecting the positioning accuracy of the photomask 2000, which in turn affects the exposure effect.

[0059] To address the aforementioned technical problems, embodiments of this application provide a mask carrier assembly 200 and an exposure device 1000.

[0060] Please see Figure 1 , Figure 1 This is one of the structural schematic diagrams of the exposure device 1000 provided in the embodiments of this application. The exposure device 1000 includes a device body 100. The device body 100 is not the focus of protection in this application and is not limited here.

[0061] The exposure device 1000 provided in this application embodiment also includes a mask carrier component 200, that is, the mask carrier component 200 can be applied to the exposure device 1000.

[0062] Please refer to the following: Figure 1 , Figure 2 , Figure 3 and Figure 4 , Figure 2 For along Figure 1 One of the cross-sectional structural diagrams of the middle AA line. Figure 3 for Figure 2 A schematic diagram of the support platform 210. Figure 4 for Figure 2 A schematic diagram of the mounting base 220.

[0063] The mask support assembly 200 provided in this embodiment includes a support platform 210, and the support platform 210 includes components along the thickness direction of the support platform 210 (e.g., ...). Figure 1 The first mounting surface 2101 and the first bearing surface 2102 are opposite each other in the Z direction of the exposure equipment 1000. The first mounting surface 2101 is used to connect the equipment body 100 of the exposure equipment 1000. In this way, the support platform 210 can be mounted on the equipment body 100 of the exposure equipment 1000 as a bearing base.

[0064] Optionally, the thickness direction of the support platform 210 can be consistent with the vertical direction, that is, the thickness direction of the support platform 210 is parallel to the vertical direction.

[0065] The mask support assembly 200 provided in this embodiment further includes a mounting base 220, which is adapted to hold the mask 2000. The mounting base includes a second mounting surface 2201 and a second bearing surface 2202 opposite to each other along the thickness direction of the support platform 210. The second mounting surface 2201 is used to hold the mask 2000, and the second bearing surface 2202 and the first bearing surface 2102 are close to each other. That is, the first bearing surface 2102 is located on the side of the support platform 210 closer to the mounting base 220, and the first mounting surface 2101 is located on the side of the support platform 210 away from the mounting base 220. The second bearing surface 2202 is located on the side of the mounting base 220 closer to the support platform 210, and the second mounting surface 2201 is located on the side of the mounting base 220 away from the support platform 210. In this way, the mounting base 220 can hold the mask 2000.

[0066] In this embodiment, one of the first bearing surface 2102 and the second bearing surface is provided with a positioning post 211, and the other of the first bearing surface 2102 and the second bearing surface is provided with a positioning groove 221. The positioning post 211 is used to insert into the positioning groove 221. The radial dimension of the positioning post 211 is less than or equal to the radial dimension of the positioning groove 221. The dimension of the positioning post 211 along the thickness direction of the support platform 210 is less than or equal to the dimension of the positioning groove 221 along the thickness direction of the support platform 210. At least a portion of the radial dimension of the positioning post 211 gradually decreases in the direction away from the positioning groove 221.

[0067] Through the above technical solutions, the mask support assembly 200 provided in this application embodiment can use the support platform 210 installed on the main body of the equipment 100 as the support base, and can also use the mounting base 220 to support the mask 2000.

[0068] Furthermore, at least a portion of the radial dimension of the positioning post 211 gradually decreases in the direction away from the positioning groove 221. Even if there is a slight misalignment between the positioning post 211 and the positioning groove 221, the positioning post 211 can still be inserted into the positioning groove 221, thereby enabling the support platform 210 and the mounting base 220 to be smoothly assembled even if there is a misalignment.

[0069] In this way, the mask support assembly 200 provided in this application embodiment can improve the installation accuracy of the support platform 210 and the mounting base 220, improve the positioning accuracy of the mask 2000, and at least to a certain extent avoid the exposure effect being affected by the positioning accuracy of the mask 2000, thereby helping to improve the exposure effect.

[0070] Optionally, at least one of the second bearing surface 2202 and the first bearing surface 2102 is provided with a buffer pad (not shown in the figure), which can buffer the mounting base 220, thereby buffering the mask 2000.

[0071] For example, a cushioning pad is disposed on the first bearing surface 2102.

[0072] For example, a cushioning pad is disposed on the second bearing surface 2202.

[0073] For example, both the second bearing surface 2202 and the first bearing surface 2102 are provided with cushioning pads.

[0074] Optionally, the mask support assembly 200 provided in this application embodiment further includes a limiting member 300, which is installed on the device body 100 and can limit the mounting base 220.

[0075] Please continue reading. Figure 2 , Figure 3 and Figure 4 In some embodiments, the first bearing surface 2102 is provided with a positioning post 211 protruding in a direction away from the first mounting surface 2101, and the second bearing surface 2202 is provided with a positioning groove 221 recessed in a direction toward the second mounting surface 2201. That is, the positioning post 211 is disposed on the side of the support platform 210 facing the mounting base 220, and the positioning groove 221 is disposed on the side of the mounting base 220 facing the support platform 210. The positioning post 211 includes a guide portion 2112 and a positioning body 2111. The positioning body 2111 can be connected to the first bearing surface 2102, and the guide portion 2112 can be connected to the end of the positioning body 2111 that is away from the first bearing surface 2102. The radial dimension of the guide portion 2112 gradually decreases in the direction away from the first bearing surface 2102.

[0076] Understandably, the guide portion 2112 can serve as a guide, facilitating the insertion of the positioning post 211 into the positioning groove 221. That is, even if there is a slight misalignment between the positioning post 211 and the positioning groove 221, the positioning post 211 can still be inserted into the positioning groove 221 under the guidance of the guide portion 2112, thus enabling the support platform 210 and the mounting base 220 to be assembled smoothly even if there is misalignment.

[0077] In this way, the mask support assembly 200 provided in this application embodiment can improve the installation accuracy of the support platform 210 and the mounting base 220, and can improve the positioning accuracy of the mask 2000.

[0078] In other embodiments, the second bearing surface 2202 is provided with a positioning post 211 protruding in a direction away from the second mounting surface 2201, and the first bearing surface 2102 is provided with a positioning groove 221 recessed in a direction toward the first mounting surface 2101. That is, the positioning post 211 is disposed on the side of the mounting base 220 facing the support platform 210, and the positioning groove 221 is disposed on the side of the support platform 210 facing the mounting base 220. The positioning body 2111 of the positioning post 211 can be connected to the second bearing surface 2202, and the guide portion 2112 can be connected to the end of the positioning body 2111 that is away from the second bearing surface 2202. The radial dimension of the guide portion 2112 gradually decreases in the direction away from the second bearing surface 2202.

[0079] Similarly, the guide portion 2112 can serve as a guide, facilitating the insertion of the positioning post 211 into the positioning groove 221. That is, even if there is a slight misalignment between the positioning post 211 and the positioning groove 221, the positioning post 211 can still be inserted into the positioning groove 221 under the guidance of the guide portion 2112, thereby enabling the support platform 210 and the mounting base 220 to be assembled smoothly even if there is misalignment.

[0080] In this way, the mask support assembly 200 provided in this application embodiment can improve the installation accuracy of the support platform 210 and the mounting base 220, and can improve the positioning accuracy of the mask 2000.

[0081] Please continue reading. Figure 2 , Figure 3 and Figure 4 In some embodiments, the positioning groove 221 includes a groove bottom 2212 and a groove body 2211. The radial dimension of the groove bottom 2212 gradually decreases along the direction away from the support platform 210. The groove bottom 2212 is located on the side of the groove body 2211 away from the support platform 210. The groove bottom 2212 is used to cooperate with the guide part 2112, and the groove body 2211 is used to cooperate with the positioning body 2111.

[0082] In this way, the positioning post 211 can be adapted to the positioning groove 221.

[0083] Optionally, the positioning groove 221 can be tightly fitted with the positioning post 211, which can help prevent the positioning post 211 from moving within the positioning groove 221, thereby improving the stability of the mounting base 220 and the support platform 210.

[0084] Optionally, the positioning groove 221 can be clearance-fitted with the positioning post 211, which facilitates the insertion of the positioning post 211 into the positioning groove 221.

[0085] For example, elastic silicone can be provided at the mating gap between the positioning post 211 and the positioning groove 221. In this way, the elastic silicone can fill the mating gap between the positioning post 211 and the positioning groove 221, which helps to prevent the positioning post 211 from moving within the positioning groove 221, thereby improving the stability of the mounting base 220 and the support platform 210.

[0086] Please continue reading. Figure 2 , Figure 3 and Figure 4 In some embodiments, along the thickness direction of the support platform 210, the size of the positioning body 2111 is smaller than the size of the guide portion 2112, and the size of the groove body 2211 is smaller than the size of the groove bottom 2212. That is, the positioning groove 221 can be clearance-fitted with the positioning post 211, and the positioning post 211 can be smoothly inserted into the positioning groove 221.

[0087] Please continue reading. Figure 3 Optionally, along the thickness direction of the support platform 210, the dimension of the support platform 210 is a, and the value range of the dimension a of the support platform 210 can be: 15mm≤a≤20mm.

[0088] Optionally, along the thickness direction of the support platform 210, the value of dimension 'a' of the support platform 210 can be in the range of: 15mm ≤ a ≤ 16mm. Optionally, along the thickness direction of the support platform 210, the value of dimension 'a' of the support platform 210 can be in the range of: 16mm ≤ a ≤ 17mm. Optionally, along the thickness direction of the support platform 210, the value of dimension 'a' of the support platform 210 can be in the range of: 17mm ≤ a ≤ 18mm. Optionally, along the thickness direction of the support platform 210, the value of dimension 'a' of the support platform 210 can be in the range of: 18mm ≤ a ≤ 19mm. Optionally, along the thickness direction of the support platform 210, the value of dimension 'a' of the support platform 210 can be in the range of: 19mm ≤ a ≤ 20mm.

[0089] For example, along the thickness direction of the support platform 210, the value of dimension a of the support platform 210 can be: 15mm, 15.5mm, 16mm, 16.5mm, 17mm, 17.5mm, 18mm, 18.5mm, 19mm, 19.5mm, 20mm, etc.

[0090] Please continue reading. Figure 3 Optionally, along the thickness direction of the support platform 210, the size of the positioning column 211 is b, and the value of b can be in the range of 18mm≤b≤22mm.

[0091] Optionally, along the thickness direction of the support platform 210, the value of dimension b of the positioning post 211 can be in the range of: 18mm ≤ b ≤ 19mm. Optionally, along the thickness direction of the support platform 210, the value of dimension b of the positioning post 211 can be in the range of: 19mm ≤ b ≤ 20mm. Optionally, along the thickness direction of the support platform 210, the value of dimension b of the positioning post 211 can be in the range of: 20mm ≤ b ≤ 21mm. Optionally, along the thickness direction of the support platform 210, the value of dimension b of the positioning post 211 can be in the range of: 21mm ≤ b ≤ 22mm.

[0092] For example, along the thickness direction of the support platform 210, the dimension b of the positioning column 211 can be 18mm, 18.5mm, 19mm, 19.5mm, 20mm, 20.5mm, 21mm, 21.5mm, 22mm, etc.

[0093] Please continue reading. Figure 3 Optionally, along the thickness direction of the support platform 210, the size of the positioning body 2111 is b1, and the value of b1 can be in the range of 6mm≤b1≤10mm.

[0094] Optionally, along the thickness direction of the support platform 210, the dimension b1 of the positioning body 2111 can range from 6mm ≤ b1 ≤ 7mm. Alternatively, along the thickness direction of the support platform 210, the dimension b1 of the positioning body 2111 can range from 7mm ≤ b1 ≤ 8mm. Alternatively, along the thickness direction of the support platform 210, the dimension b1 of the positioning body 2111 can range from 8mm ≤ b1 ≤ 9mm. Alternatively, along the thickness direction of the support platform 210, the dimension b1 of the positioning body 2111 can range from 9mm ≤ b1 ≤ 10mm.

[0095] For example, along the thickness direction of the support platform 210, the dimension b1 of the positioning body 2111 can be 6mm, 6.5mm, 7mm, 7.5mm, 8mm, 8.5mm, 9mm, 9.5mm, 10mm, etc.

[0096] Please continue reading. Figure 3 Optionally, along the thickness direction of the support platform 210, the guide part 2112 has a size of b2, and the value of b2 can be in the range of 10mm≤b2≤15mm.

[0097] Optionally, along the thickness direction of the support platform 210, the dimension b2 of the guide portion 2112 can range from: 10mm ≤ b2 ≤ 11mm. Optionally, along the thickness direction of the support platform 210, the dimension b2 of the guide portion 2112 can range from: 11mm ≤ b2 ≤ 12mm. Optionally, along the thickness direction of the support platform 210, the dimension b2 of the guide portion 2112 can range from: 12mm ≤ b2 ≤ 13mm. Optionally, along the thickness direction of the support platform 210, the dimension b2 of the guide portion 2112 can range from: 13mm ≤ b2 ≤ 14mm. Optionally, along the thickness direction of the support platform 210, the dimension b2 of the guide portion 2112 can range from: 14mm ≤ b2 ≤ 15mm.

[0098] For example, along the thickness direction of the support platform 210, the dimension b2 of the guide portion 2112 can be 10mm, 10.5mm, 11mm, 11.5mm, 12mm, 12.5mm, 13mm, 13.5mm, 14mm, 14.5mm, 15mm, etc.

[0099] Please continue reading. Figure 4 Optionally, along the thickness direction of the support platform 210, the size of the mounting base 220 is c, and the value of c can be in the range of 23mm≤c≤28mm.

[0100] Optionally, along the thickness direction of the support platform 210, the value of dimension c of the mounting base 220 can be in the range of: 23mm ≤ c ≤ 24mm. Optionally, along the thickness direction of the support platform 210, the value of dimension c of the mounting base 220 can be in the range of: 24mm ≤ c ≤ 25mm. Optionally, along the thickness direction of the support platform 210, the value of dimension c of the mounting base 220 can be in the range of: 25mm ≤ c ≤ 26mm. Optionally, along the thickness direction of the support platform 210, the value of dimension c of the mounting base 220 can be in the range of: 26mm ≤ c ≤ 27mm. Optionally, along the thickness direction of the support platform 210, the value of dimension c of the mounting base 220 can be in the range of: 27mm ≤ c ≤ 28mm.

[0101] For example, along the thickness direction of the support platform 210, the dimension c of the mounting base 220 can be 23mm, 23.5mm, 24mm, 24.5mm, 25mm, 25.5mm, 26mm, 26.5mm, 27mm, 27.5mm, 28mm, etc.

[0102] Please continue reading. Figure 4 Optionally, the size of the positioning groove 221 along the thickness direction of the support platform 210 is d, and the value of d can be in the range of 18mm≤d≤22mm.

[0103] Optionally, along the thickness direction of the support platform 210, the dimension d of the positioning groove 221 can be in the range of: 18mm ≤ d ≤ 19mm. Optionally, along the thickness direction of the support platform 210, the dimension d of the positioning groove 221 can be in the range of: 19mm ≤ d ≤ 20mm. Optionally, along the thickness direction of the support platform 210, the dimension d of the positioning groove 221 can be in the range of: 20mm ≤ d ≤ 21mm. Optionally, along the thickness direction of the support platform 210, the dimension d of the positioning groove 221 can be in the range of: 21mm ≤ d ≤ 22mm.

[0104] For example, along the thickness direction of the support platform 210, the dimension d of the positioning groove 221 can be 18mm, 18.5mm, 19mm, 19.5mm, 20mm, 20.5mm, 21mm, 21.5mm, 22mm, etc.

[0105] Please continue reading. Figure 4 Optionally, along the thickness direction of the support platform 210, the dimension of the groove body 2211 is d1, and the value range of d1 can be: 6mm≤d1≤10mm.

[0106] Optionally, along the thickness direction of the support platform 210, the dimension d1 of the channel body 2211 can range from: 6mm ≤ d1 ≤ 7mm. Alternatively, along the thickness direction of the support platform 210, the dimension d1 of the channel body 2211 can range from: 7mm ≤ d1 ≤ 8mm. Alternatively, along the thickness direction of the support platform 210, the dimension d1 of the channel body 2211 can range from: 8mm ≤ d1 ≤ 9mm. Alternatively, along the thickness direction of the support platform 210, the dimension d1 of the channel body 2211 can range from: 9mm ≤ d1 ≤ 10mm.

[0107] For example, along the thickness direction of the support platform 210, the dimension d1 of the groove body 2211 can be 6mm, 6.5mm, 7mm, 7.5mm, 8mm, 8.5mm, 9mm, 9.5mm, 10mm, etc.

[0108] Please continue reading. Figure 4 Optionally, along the thickness direction of the support platform 210, the dimension of the groove bottom 2212 is d2, and the value range of d2 can be: 10mm≤d2≤15mm.

[0109] Optionally, along the thickness direction of the support platform 210, the value range of the dimension d2 of the groove bottom 2212 can be: 10mm ≤ d2 ≤ 11mm. Optionally, along the thickness direction of the support platform 210, the value range of the dimension d2 of the groove bottom 2212 can be: 11mm ≤ d2 ≤ 12mm. Optionally, along the thickness direction of the support platform 210, the value range of the dimension d2 of the groove bottom 2212 can be: 12mm ≤ d2 ≤ 13mm. Optionally, along the thickness direction of the support platform 210, the value range of the dimension d2 of the groove bottom 2212 can be: 13mm ≤ d2 ≤ 14mm. Optionally, along the thickness direction of the support platform 210, the value range of the dimension d2 of the groove bottom 2212 can be: 14mm ≤ d2 ≤ 15mm.

[0110] For example, along the thickness direction of the support platform 210, the value of the dimension d2 of the groove bottom 2212 can be: 10mm, 10.5mm, 11mm, 11.5mm, 12mm, 12.5mm, 13mm, 13.5mm, 14mm, 14.5mm, 15mm, etc.

[0111] Please continue reading. Figure 2 , Figure 3 and Figure 4 and combined Figure 5 , Figure 5 This is one of a top view of the support platform 210 or a bottom view of the mounting base 220 provided in the embodiments of this application. In some embodiments, the outer surface of the guide portion 2112 is a convex arc surface, and the wall surface of the groove bottom 2212 is a concave arc surface that mates with the convex arc surface. In this way, the guide portion 2112 can be inserted into the groove bottom 2212.

[0112] Optionally, the guide portion 2112 has a hemispherical structure, and the bottom of the groove 2212 defines a hemispherical cavity for accommodating the guide portion 2112.

[0113] Optionally, the outer peripheral surface of the positioning body 2111 is a cylindrical surface, and the groove body 2211 defines a cylindrical cavity for accommodating the positioning body 2111.

[0114] Please refer to the following: Figure 6 , Figure 7 , Figure 8 and Figure 9 , Figure 6 For along Figure 1 The second sectional view of the middle AA line. Figure 7 for Figure 6 A schematic diagram of the support platform 210. Figure 8 for Figure 6 A schematic diagram of the mounting base 220. Figure 9 This is a top view of the support platform 210 or a bottom view of the mounting base 220 provided in the embodiments of this application.

[0115] In other embodiments, the positioning body 2111 can be a prism structure, and the groove body 2211 defines a prism-shaped cavity for accommodating the positioning body 2111. Optionally, the positioning body 2111 can be a quadrangular prism structure. In this way, the positioning post 211 and the positioning groove 221 can be phased with each other in the circumferential direction, which can avoid relative rotation between the support platform 210 and the mounting base 220, and help improve the assembly accuracy between the support platform 210 and the mounting base 220.

[0116] Optionally, the guide portion 2112 may be conical. For example, the guide portion 2112 may be conical or pyramidal. Optionally, the bottom of the groove 2212 defines a conical cavity for receiving the guide portion 2112. In this way, the guide portion 2112 can have a better guiding effect.

[0117] Please continue reading. Figure 5 Optionally, the positioning post 211 has a circular cross-section, the cross-section of the positioning post 211 is perpendicular to the thickness direction of the support platform 210, and the radial dimension of the cross-section of the positioning post 211 is e1, the value range of e1 can be: 23mm≤e1≤28mm.

[0118] Optionally, the radial dimension e1 of the cross-section of the positioning post 211 can be in the range of: 23mm ≤ e1 ≤ 24mm. Optionally, the radial dimension e1 of the cross-section of the positioning post 211 can be in the range of: 24mm ≤ e1 ≤ 25mm. Optionally, the radial dimension e1 of the cross-section of the positioning post 211 can be in the range of: 25mm ≤ e1 ≤ 26mm. Optionally, the radial dimension e1 of the cross-section of the positioning post 211 can be in the range of: 26mm ≤ e1 ≤ 27mm. Optionally, the radial dimension e1 of the cross-section of the positioning post 211 can be in the range of: 27mm ≤ e1 ≤ 28mm.

[0119] For example, the radial dimension e1 of the cross-section of the positioning post 211 can be 23mm, 23.5mm, 24mm, 24.5mm, 25mm, 25.5mm, 26mm, 26.5mm, 27mm, 27.5mm, 28mm, etc.

[0120] Please continue reading. Figure 5 Optionally, the cross-section of the positioning groove 221 is circular, the cross-section of the positioning groove 221 is perpendicular to the thickness direction of the support platform 210, and the radial dimension of the cross-section of the positioning groove 221 is f1, the value range of f1 can be: 23mm≤f1≤28mm.

[0121] Optionally, the radial dimension f1 of the cross-section of the positioning groove 221 can be in the range of: 23mm ≤ f1 ≤ 24mm. Optionally, the radial dimension f1 of the cross-section of the positioning groove 221 can be in the range of: 24mm ≤ f1 ≤ 25mm. Optionally, the radial dimension f1 of the cross-section of the positioning groove 221 can be in the range of: 25mm ≤ f1 ≤ 26mm. Optionally, the radial dimension f1 of the cross-section of the positioning groove 221 can be in the range of: 26mm ≤ f1 ≤ 27mm. Optionally, the radial dimension f1 of the cross-section of the positioning groove 221 can be in the range of: 27mm ≤ f1 ≤ 28mm.

[0122] For example, the radial dimension f1 of the cross-section of the positioning groove 221 can be 23mm, 23.5mm, 24mm, 24.5mm, 25mm, 25.5mm, 26mm, 26.5mm, 27mm, 27.5mm, 28mm, etc.

[0123] Please continue reading. Figure 9 Optionally, the cross-section of the positioning post 211 is rectangular, the cross-section of the positioning post 211 is perpendicular to the thickness direction of the support platform 210, and the side length of the cross-section of the positioning post 211 is e2, the value range of e2 can be: 23mm≤e2≤28mm.

[0124] Optionally, the side length e2 of the cross-section of the positioning post 211 can be in the range of: 23mm ≤ e2 ≤ 24mm. Optionally, the side length e2 of the cross-section of the positioning post 211 can be in the range of: 24mm ≤ e2 ≤ 25mm. Optionally, the side length e2 of the cross-section of the positioning post 211 can be in the range of: 25mm ≤ e2 ≤ 26mm. Optionally, the side length e2 of the cross-section of the positioning post 211 can be in the range of: 26mm ≤ e2 ≤ 27mm. Optionally, the side length e2 of the cross-section of the positioning post 211 can be in the range of: 27mm ≤ e2 ≤ 28mm.

[0125] For example, the side length e2 of the cross section of the positioning post 211 can be 23mm, 23.5mm, 24mm, 24.5mm, 25mm, 25.5mm, 26mm, 26.5mm, 27mm, 27.5mm, 28mm, etc.

[0126] Please continue reading. Figure 8 Optionally, the cross-section of the positioning groove 221 is rectangular, the cross-section of the positioning groove 221 is perpendicular to the thickness direction of the support platform 210, and the side length of the cross-section of the positioning groove 221 is f2, the value range of f2 can be: 23mm≤f2≤28mm.

[0127] Optionally, the side length f2 of the cross-section of the positioning groove 221 can be in the range of: 23mm ≤ f2 ≤ 24mm. Optionally, the side length f2 of the cross-section of the positioning groove 221 can be in the range of: 24mm ≤ f2 ≤ 25mm. Optionally, the side length f2 of the cross-section of the positioning groove 221 can be in the range of: 25mm ≤ f2 ≤ 26mm. Optionally, the side length f2 of the cross-section of the positioning groove 221 can be in the range of: 26mm ≤ f2 ≤ 27mm. Optionally, the side length f2 of the cross-section of the positioning groove 221 can be in the range of: 27mm ≤ f2 ≤ 28mm.

[0128] For example, the side length f2 of the cross section of the positioning groove 221 can be 23mm, 23.5mm, 24mm, 24.5mm, 25mm, 25.5mm, 26mm, 26.5mm, 27mm, 27.5mm, 28mm, etc.

[0129] Please continue reading. Figure 5 Optionally, the cross-section of the support platform 210 is circular, the cross-section of the support platform 210 is perpendicular to the thickness direction of the support platform 210, and the radial dimension of the cross-section of the support platform 210 is g, the value of g can be in the range of 45mm≤g≤55mm.

[0130] Optionally, the radial dimension g of the cross-section of the support platform 210 can be in the range of 45mm ≤ g ≤ 50mm. Optionally, the radial dimension g of the cross-section of the support platform 210 can be in the range of 50mm ≤ g ≤ 55mm.

[0131] For example, the radial dimension g of the cross-section of the support platform 210 can be 45mm, 46mm, 47mm, 48mm, 49mm, 50mm, 51mm, 52mm, 53mm, 54mm, 55mm, etc.

[0132] Please continue reading. Figure 5 Optionally, the mounting base 220 has a circular cross-section, the cross-section of the mounting base 220 is perpendicular to the thickness direction of the support platform 210, and the radial dimension of the cross-section of the mounting base 220 is i, the value of i can be in the range of 45mm≤i≤55mm.

[0133] Optionally, the radial dimension i of the cross-section of the mounting base 220 can be in the range of 45mm ≤ i ≤ 50mm. Optionally, the radial dimension i of the cross-section of the mounting base 220 can be in the range of 50mm ≤ i ≤ 55mm.

[0134] For example, the radial dimension i of the cross-section of the mounting base 220 can be 45mm, 46mm, 47mm, 48mm, 49mm, 50mm, 51mm, 52mm, 53mm, 54mm, 55mm, etc.

[0135] Please refer to the following: Figure 10 and Figure 11 , Figure 10 This is a top view of the support platform 210 or a bottom view of the mounting base 220 provided in the embodiments of this application. Figure 11 Fourth of four views of the support platform 210 or the mounting base 220 provided in the embodiments of this application.

[0136] Optionally, the cross-section of the support platform 210 is rectangular, the cross-section of the support platform 210 is perpendicular to the thickness direction of the support platform 210, and the side length of the cross-section of the support platform 210 is h, the value of h can be in the range of 45mm≤h≤55mm.

[0137] Optionally, the side length h of the cross-section of the support platform 210 can be in the range of 45mm ≤ h ≤ 50mm. Optionally, the side length h of the cross-section of the support platform 210 can be in the range of 50mm ≤ h ≤ 55mm.

[0138] For example, the side length h of the cross section of the support platform 210 can be 45mm, 46mm, 47mm, 48mm, 49mm, 50mm, 51mm, 52mm, 53mm, 54mm, 55mm, etc.

[0139] Optionally, the mounting base 220 has a rectangular cross-section, the cross-section of the mounting base 220 is perpendicular to the thickness direction of the support platform 210, and the side length of the cross-section of the mounting base 220 is j, the value of j can be in the range of 45mm≤j≤55mm.

[0140] Optionally, the side length j of the cross-section of the mounting base 220 can be in the range of 45mm ≤ j ≤ 50mm. Optionally, the side length j of the cross-section of the mounting base 220 can be in the range of 50mm ≤ j ≤ 55mm.

[0141] For example, the side length j of the cross section of the mounting base 220 can be 45mm, 46mm, 47mm, 48mm, 49mm, 50mm, 51mm, 52mm, 53mm, 54mm, 55mm, etc.

[0142] Optionally, the positioning post 211 is located at the center of the support platform 210, and the positioning groove 221 is located at the center of the mounting base 220. This can improve the balance of the mounting base 220.

[0143] It is understood that the exposure device 1000 provided in this application embodiment has the same or similar technical effects as the mask carrier assembly 200 in any of the above embodiments, and will not be described again here.

[0144] Please see Figure 12 , Figure 12 This is a second schematic diagram of the structure of the exposure device 1000 provided in the embodiments of this application. In some embodiments, the exposure device 1000 provided in the embodiments of this application further includes a driving component, which is installed on the device body 100. The driving component is used to drive the mounting base 220, on which the mask 2000 is loaded, to move along a first direction and a second direction. The first direction is perpendicular to the thickness direction of the support platform 210, and the second direction is perpendicular to the first direction.

[0145] The exposure device 1000 provided in this application embodiment also includes a limiting member 300. The limiting member 300 is installed on the device body 100. When the driving component drives the mounting base 220 loaded with the mask 2000 to move along the first direction, the limiting member 300 can limit the mounting base 220 in the first direction.

[0146] Optionally, the limiting member 300 can also limit the mask 2000 in the first direction.

[0147] The exposure device 1000 provided in this application embodiment also includes a limit switch 500, which is installed on the limit member 300 and is used to emit a detection signal when it contacts the mounting base 220 in the first direction.

[0148] The exposure apparatus 1000 provided in this application embodiment further includes a controller 400, which is electrically connected to the drive assembly and the limit switch 500, respectively. The controller 400 can acquire the detection signal from the limit switch 500. The controller 400 is configured as follows:

[0149] S1, the controller 400 controls the drive assembly to drive the mounting base 220 to move along the first direction. It can be understood that during the process of the controller 400 controlling the drive assembly to drive the mounting base 220 to move along the first direction, when the mounting base 220 reaches above the support platform 210 and contacts the limit switch 500, the limit switch 500 can send a detection signal.

[0150] S2, based on the detection signal, the controller 400 controls the drive assembly to drive the mounting base 220 to move along the second direction toward the support platform 210. After the controller 400 obtains the detection signal from the limit switch 500, it controls the drive assembly to drive the mounting base 220 to move along the second direction toward the support platform 210, so that the mounting base 220 carrying the mask 2000 can be assembled onto the support platform 210.

[0151] In this way, the exposure device 1000 provided in this application embodiment can assemble the mounting base 220 carrying the mask 2000 onto the support platform 210, thereby enabling exposure using the mask 2000.

[0152] The above description is merely a specific embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A photomask carrier assembly, characterized in that, The mask support assembly is used in the exposure equipment, and the mask support assembly includes: A support platform, the support platform including a first mounting surface and a first bearing surface opposite each other along the thickness direction of the support platform, the first mounting surface being used to connect the device body of the exposure equipment; Mounting base, the mounting base being adapted to mount a mask, the mounting base including a second mounting surface and a second bearing surface opposite each other along the thickness direction of the support platform, the second mounting surface being used to mount the mask, the second bearing surface and the first bearing surface being close to each other; In this embodiment, one of the first bearing surface and the second bearing surface is provided with a positioning post, and the other of the first bearing surface and the second bearing surface is provided with a positioning groove. The positioning post is used to insert into the positioning groove. The radial dimension of the positioning post is less than or equal to the radial dimension of the positioning groove. The dimension of the positioning post along the thickness direction of the support platform is less than or equal to the dimension of the positioning groove along the thickness direction of the support platform. At least a portion of the radial dimension of the positioning post gradually decreases in the direction away from the positioning groove.

2. The mask support assembly as described in claim 1, characterized in that, The first bearing surface is provided with a positioning post protruding in the direction away from the first mounting surface, and the second bearing surface is provided with a positioning groove recessed in the direction toward the second mounting surface. The positioning post includes a guide part and a positioning body part. The positioning body part is connected to the first bearing surface, and the guide part is connected to the end of the positioning body part away from the first bearing surface. The radial dimension of the guide part gradually decreases in the direction away from the first bearing surface.

3. The mask support assembly as described in claim 2, characterized in that, The positioning groove includes a groove bottom and a groove body. The radial dimension of the groove bottom gradually decreases in the direction away from the support platform. The groove bottom is located on the side of the groove body away from the support platform. The groove bottom is used to cooperate with the guide part, and the groove body is used to cooperate with the positioning body part.

4. The mask support assembly as described in claim 3, characterized in that, Along the thickness direction of the support platform, the size of the positioning main body is smaller than the size of the guide part, and the size of the groove main body is smaller than the size of the groove bottom; Preferably, along the thickness direction of the support platform, the dimension of the support platform is 'a', and the value of 'a' ranges from 15mm to 20mm. Preferably, along the thickness direction of the support platform, the size of the positioning column is b, and the value of b is in the range of 18mm≤b≤22mm; Preferably, along the thickness direction of the support platform, the size of the positioning body is b1, and the value of b1 is in the range of 6mm≤b1≤10mm; Preferably, along the thickness direction of the support platform, the dimension of the guide portion is b2, and the value of b2 is in the range of 10mm≤b2≤15mm; Preferably, along the thickness direction of the support platform, the dimension of the mounting base is c, and the value of c ranges from 23mm to 28mm. Preferably, the size of the positioning groove along the thickness direction of the support platform is d, and the value of d is in the range of 18mm≤d≤22mm; Preferably, along the thickness direction of the support platform, the dimension of the groove body is d1, and the value range of d1 is: 6mm≤d1≤10mm; Preferably, along the thickness direction of the support platform, the dimension of the groove bottom is d2, and the value range of d2 is: 10mm≤d2≤15mm; Preferably, the positioning post has a circular cross-section, the cross-section of the positioning post is perpendicular to the thickness direction of the support platform, and the radial dimension of the cross-section of the positioning post is e1, the value of e1 is in the range of 23mm≤e1≤28mm. Preferably, the positioning post has a rectangular cross-section, the cross-section of the positioning post is perpendicular to the thickness direction of the support platform, and the side length of the cross-section of the positioning post is e2, the value range of e2 is: 23mm≤e2≤28mm; Preferably, the cross-section of the positioning groove is circular, the cross-section of the positioning groove is perpendicular to the thickness direction of the support platform, and the radial dimension of the cross-section of the positioning groove is f1, the value range of f1 is: 23mm≤f1≤28mm; Preferably, the cross-section of the positioning groove is rectangular, the cross-section of the positioning groove is perpendicular to the thickness direction of the support platform, and the side length of the cross-section of the positioning groove is f2, the value range of f2 is: 23mm≤f2≤28mm; Preferably, the cross-section of the support platform is circular, the cross-section of the support platform is perpendicular to the thickness direction of the support platform, and the radial dimension of the cross-section of the support platform is g, the value of g is in the range of 45mm≤g≤55mm; Preferably, the cross-section of the support platform is rectangular, the cross-section of the support platform is perpendicular to the thickness direction of the support platform, and the side length of the cross-section of the support platform is h, the value of h is in the range of 45mm≤h≤55mm; Preferably, the cross-section of the mounting base is circular, the cross-section of the mounting base is perpendicular to the thickness direction of the support platform, and the radial dimension of the cross-section of the mounting base is i, the value of i being 45mm≤i≤55mm; Preferably, the cross-section of the mounting base is rectangular, the cross-section of the mounting base is perpendicular to the thickness direction of the support platform, and the side length of the cross-section of the mounting base is j, the value of j is in the range of 45mm≤j≤55mm.

5. The mask support assembly as described in claim 3, characterized in that, The outer surface of the guide is a convex arc surface, and the wall surface of the groove bottom is a concave arc surface.

6. The mask support assembly as described in claim 5, characterized in that, The guide portion has a hemispherical structure, and the bottom of the groove defines a hemispherical cavity for accommodating the guide portion.

7. The mask support assembly as described in claim 3, characterized in that, The outer peripheral surface of the positioning body is a cylindrical surface, and the groove body defines a cylindrical cavity for accommodating the positioning body.

8. The mask support assembly as described in any one of claims 1 to 7, characterized in that, The positioning post is located at the center of the support platform, and the positioning groove is located at the center of the mounting base.

9. An exposure apparatus, characterized in that, include: Equipment body; The mask carrier assembly as described in any one of claims 1 to 8, wherein the first mounting surface is connected to the device body.

10. The exposure apparatus as described in claim 9, characterized in that, The exposure device also includes: A drive assembly is installed on the main body of the device. The drive assembly is used to drive the mounting base loaded with the mask to move along a first direction and a second direction. The first direction is perpendicular to the thickness direction of the support platform, and the second direction is perpendicular to the first direction. A limiting component is installed on the main body of the device and is used to limit the mounting base in the first direction; A limit switch is installed on the limiting member, and the limit switch is used to emit a detection signal when it contacts the mounting base in the first direction; The controller is electrically connected to the drive assembly and the limit switch, respectively, and the controller is configured to: The drive assembly is controlled to drive the mounting base to move along the first direction; The drive assembly is controlled according to the detection signal to drive the mounting base to move along the second direction and toward the support platform.

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