Processing apparatus, substrate processing apparatus, processing method, method of manufacturing semiconductor device, and program product

Abstract

This invention provides a processing apparatus, a substrate processing apparatus, a processing method, a semiconductor device manufacturing method, and a program product that improves the efficiency of recipe editing. It includes: a display unit configured to display, in a recipe comprising multiple steps, setting values ​​for at least one item and a status indicating whether the setting value is to be saved, wherein the multiple steps define processing conditions for a substrate including at least one of the items; and a control unit configured to control such that, when at least one of the multiple steps is to be deleted, if the flag of the item in the step to be deleted is set to valid and the flag of the item in the next step of the step to be deleted is set to invalid, the setting of the flag of the item in the next step of the step to be deleted is switched to valid, and the setting value of the item in the step to be deleted is inherited to the setting value of the item in the next step of the step to be deleted.

Description

Technical Field

[0001] This disclosure relates to processing apparatus, substrate processing apparatus, processing method, semiconductor device manufacturing method and process product. Background Technology

[0002] Sometimes the recipe used in the manufacturing process of semiconductor devices is edited to perform treatment on the substrate (see, for example, Patent Document 1). Existing technical documents Patent documents

[0003] Patent Document 1: International Publication No. 2019 / 186649 Summary of the Invention

[0004] This disclosure provides techniques that can improve the efficiency of recipe editing.

[0005] According to one aspect of this disclosure, the following technology is provided, possessing: A display unit configured to display, in a recipe comprising multiple steps, at least a set value for an item and a state indicating whether the set value is a saveable item, wherein the multiple steps define processing conditions for a substrate including at least one of the items; and The control unit is configured to control that, when at least one of the plurality of steps is to be deleted, if the flag of the item in the step to be deleted is set to valid and the flag of the item in the next step of the step to be deleted is set to invalid, the setting of the flag of the item in the next step of the step to be deleted is switched to valid, and the setting value of the item in the step to be deleted is inherited to the setting value of the item in the next step of the step to be deleted. Invention Effects

[0006] According to this disclosure, the efficiency of recipe editing can be improved. Attached Figure Description

[0007] Figure 1 This is a perspective view showing an example of a substrate processing apparatus according to an embodiment. Figure 2 This is a cross-sectional view of the substrate processing apparatus of the embodiment viewed from the side. Figure 3 This is a block diagram illustrating an example of the functional structure of the control device included in the substrate processing apparatus of the embodiment. Figure 4 This is an example of a recipe editing screen showing an implementation method. Figure 5 This is a flowchart illustrating an example of the process when deleting a recipe editing screen. Figure 6 It means to Figure 4 This is an example of a recipe editing screen where the settings of the step to be deleted are inherited by the next step after the step to be deleted. Figure 7 It means not to Figure 4 This is an example of a recipe editing screen where the settings of the step to be deleted are inherited by the next step after the step to be deleted. Figure 8 This is an example of a recipe editing screen showing the deletion of multiple consecutive steps. Figure 9 It means to Figure 8 This is an example of a recipe editing screen where the settings of the step to be deleted are inherited by the next step after the step to be deleted. Explanation of reference numerals in the attached figures 200 wafers (substrates) 10. Substrate processing apparatus (processing apparatus) 100a CPU (Control Unit) 304 Display Section Detailed Implementation

[0008] The following is mainly based on Figures 1-9 One embodiment of this disclosure will be described below. It should be noted that the accompanying drawings used in the following description are schematic, and the dimensional relationships and ratios of the elements shown in the drawings may not necessarily correspond to reality. Furthermore, the dimensional relationships and ratios of the elements may not be consistent among multiple drawings. Additionally, elements that are substantially the same as those described in multiple drawings are shown with the same reference numerals, and their descriptions are omitted. Moreover, this disclosure is not limited to the following embodiments in any way, and can be implemented with appropriate modifications within the scope of this disclosure.

[0009] First, refer to Figure 1 and Figure 2 An overview of the substrate processing apparatus of this embodiment will be described.

[0010] Figure 1 This is a perspective view showing an example of the substrate processing apparatus 10 according to this embodiment. Additionally, Figure 2 This is a cross-sectional view of the substrate processing apparatus 10 of this embodiment viewed from the side. Figure 1 and Figure 2A vertically oriented substrate processing apparatus 10 is shown as an example of a substrate processing apparatus. Furthermore, regarding the substrate processed in the substrate processing apparatus 10, a semiconductor wafer made of silicon or the like is shown as an example. It should be noted that the term "wafer" as used in this specification can refer to the wafer itself, or to a laminate of the wafer and a specified layer or film formed on its surface. The term "surface of the wafer" as used in this specification can refer to the surface of the wafer itself, or to the surface of a specified layer, etc., formed on the wafer. When described as "forming a specified layer on the wafer," it can mean forming the specified layer directly on the surface of the wafer itself, or forming the specified layer on top of a layer, etc., formed on the wafer. The use of the term "substrate" in this specification is also synonymous with the use of the term "wafer."

[0011] like Figure 1 and Figure 2 As shown, the substrate processing apparatus 10 includes a housing 111. A wafer cassette loading / unloading outlet 112 is provided on the front wall 111a of the housing 111 to connect the inside and outside of the housing 111. The wafer cassette loading / unloading outlet 112 is opened and closed by a front gate (loading / unloading outlet opening / closing mechanism) 113. A loading port (substrate transport container transfer platform) 114 is provided on the front side of the wafer cassette loading / unloading outlet 112.

[0012] The wafer cassette 110 is a sealed substrate transport container configured to be transported into the loading port 114 by an in-process transport device (not shown) and then removed from the loading port 114.

[0013] A rotating wafer cassette holder (substrate transport container storage rack) 105 is provided on the upper part of the approximately central portion in the front-rear direction within the housing 111. The rotating wafer cassette holder 105 has a multi-layer shelf (substrate transport container carrier) 117, which is configured to store the wafer cassette 110 while at least one wafer cassette 110 is placed on it.

[0014] A wafer cassette opener (substrate transport container cover opening and closing mechanism) 121 is provided below the rotary wafer cassette holder 105. The wafer cassette opener 121 has a structure for holding the wafer cassette 110 and for opening and closing the cover of the wafer cassette 110.

[0015] A wafer cassette transport mechanism (container transport mechanism) 118 is provided between the loading port 114 and the rotary wafer cassette holder 105 and the wafer cassette opener 121, configured to transport wafer cassettes 110 between the loading port 114, the rotary wafer cassette holder 105 and the wafer cassette opener 121.

[0016] A sub-house 119 is provided in the lower part of the approximately central portion in the front-rear direction within the housing 111, in the rear end region. A pair of wafer loading and unloading outlets (substrate loading and unloading outlets) 120 are provided on the front wall 119a of the sub-house 119 for loading and unloading the wafer 200, which serves as a substrate, into and out of the sub-house 119.

[0017] The wafer cassette opener 121 includes a mounting stage 122 for holding a wafer cassette 110 and an opening / closing mechanism 123 for opening and closing the cover of the wafer cassette 110. The wafer cassette opener 121 is configured to open and close the wafer inlet / outlet of the wafer cassette 110 by opening and closing the cover of the wafer cassette 110 placed on the mounting stage 122 using the opening / closing mechanism 123.

[0018] The sub-housing 119 forms an airtight transfer chamber 124 relative to the space (wafer cassette transport space) where the wafer cassette transport mechanism 118 and the rotary wafer cassette holder 105 are located. A wafer transfer mechanism (substrate transfer mechanism) 125 is provided in the front region of the transfer chamber 124. It is configured to transfer a specified number of wafers (in...) via the wafer transfer mechanism 125. Figure 2 The wafers 200 (containing 5 wafers) can move linearly in the horizontal direction, rotate in the horizontal direction, or be raised and lowered. The wafer transfer mechanism 125 is configured to load and remove the wafers 200 relative to the boat (substrate holder) 217.

[0019] A standby section 126 is formed in the rear region of the transfer chamber 124 to house the vessel 217 and keep it in standby mode. A vertically oriented processing furnace 202 is provided above the standby section 126. In addition, the processing furnace 202 is also referred to as a processing container for processing the wafer 200.

[0020] Next, the operation of the substrate processing apparatus 10 will be explained.

[0021] When the wafer cassette 110 is supplied to the loading port 114, the wafer cassette inlet / outlet 112 is opened through the front gate 113. The wafer cassette 110 on the loading port 114 is moved into the housing 111 through the wafer cassette inlet / outlet 112 via the wafer cassette transport mechanism 118 and placed on the designated shelf 117 of the rotary wafer cassette holder 105. After being temporarily stored by the rotary wafer cassette holder 105, the wafer cassette 110 is moved from the shelf 117 to a wafer cassette opener 121 and transferred to the loading stage 122 via the wafer cassette transport mechanism 118, or it is directly transferred from the loading port 114 to the loading stage 122.

[0022] Regarding the wafer cassette 110 placed on the mounting stage 122, its open side end face is pressed against the opening edge of the wafer loading / unloading outlet 120 in the front wall 119a of the sub-cassette 119, and the cover is removed by the opening / closing mechanism 123, thereby opening the wafer loading / unloading outlet.

[0023] When the wafer cassette 110 is opened by the wafer cassette opener 121, the wafer transfer mechanism 125 removes the wafer 200 from the wafer cassette 110 and moves it into the standby section 126, loading it into the boat 217.

[0024] When a pre-specified number of wafers 200 are loaded into the boat 217, the furnace opening of the processing furnace 202, which has been closed by the furnace opening gate 147, is opened through the furnace opening gate 147. Then, the boat 217 is raised by the boat elevator 115 and moved (loaded) into the processing chamber 201.

[0025] After loading, the furnace opening is airtightly sealed by the sealing cap 219. In addition, in this embodiment, a purging process (pre-purging process) is included to replace the processing chamber 201 with an inactive gas at this time (after loading).

[0026] Vacuum exhaust is performed using a vacuum pump (not shown) to bring the processing chamber 201 to the desired pressure (vacuum level). Additionally, the chamber is heated to a specified temperature using a heater (not shown) to achieve the desired temperature distribution.

[0027] Furthermore, a processing gas, controlled at a predetermined flow rate, is supplied through a processing gas supply source (not shown). As the processing gas flows through the processing chamber 201, it contacts the surface of the wafer 200, performing a predetermined treatment on the surface of the wafer 200. The processed gas, after reaction, is discharged from the processing chamber 201 through a gas discharge mechanism (not shown). It should be noted that the processing gas referred to here refers to the gas supplied into the processing chamber 201. This will also be the case in the following description.

[0028] After a preset processing time, inert gas is supplied from an inert gas supply source (not shown), the processing chamber 201 is replaced with inert gas, and the pressure in the processing chamber 201 returns to atmospheric pressure (post-purging process). Then, the boat 217 is lowered via the boat lift 115 and by means of the sealing cover 219. It should be noted that the processing time mentioned here refers to the duration of the processing. This also applies to the following description.

[0029] Regarding the removal of the processed wafers 200, the wafers 200 and wafer cassette 110 are moved out of the housing 111 in the reverse order described above. Unprocessed wafers 200 are then loaded into the boat 217 for batch processing. Alternatively, the wafer cassette 110 containing the processed wafers 200 may be temporarily stored in the rotating wafer cassette holder 105, then transported from the rack 117 to the loading port 114 via the wafer cassette transport mechanism 118, and removed out of the housing 111.

[0030] like Figure 1 and Figure 2 As shown, the substrate processing apparatus 10 includes a control device 100. The control device 100 controls the substrate processing apparatus 10. The control device 100 may be built into the substrate processing apparatus 10 or may be provided externally to the substrate processing apparatus 10 in an accessible manner.

[0031] Next, refer to Figure 3 The structure of the control system of the substrate processing apparatus 10 of this embodiment will be described. Figure 3 This is a block diagram illustrating an example of the functional structure of the control device 100 included in the substrate processing apparatus 10 of this embodiment.

[0032] like Figure 3 As shown, the substrate processing apparatus 10 includes a control device (main controller) 100, an external communication unit 301, an external storage unit 302, an operation unit 303, a display unit 304, a process control unit 305, and a drive control unit 306.

[0033] The control device 100 includes a CPU (Central Processing Unit) 100a as a control unit, a RAM (Random Access Memory) 100b as volatile memory, a storage unit 100c, and an I / O port 100d.

[0034] The control device 100 is connected to the operation unit 303 and the display unit 304, and is also connected to the process control unit 305 and the drive control unit 306 via the I / O port 100d. The control device 100 is electrically connected to the process control unit 305 and the drive control unit 306 via the I / O port 100d, thus enabling it to transmit and receive data and download and upload files.

[0035] The control device 100 is connected to an external host computer (not shown) via an external communication unit 301. Therefore, even if the board processing device 10 is installed in a clean room, the host computer can be installed in an office or other location outside the clean room. Furthermore, the control device 100 is connected to an external storage unit 302, which serves as a mounting unit and allows for the insertion and removal of a USB (Universal Serial Bus) memory or similar recording medium.

[0036] The process control unit 305 includes a temperature control unit 307, a gas flow control unit 308, and a pressure control unit 309. The temperature control unit 307, gas flow control unit 308, and pressure control unit 309 each constitute a sub-controller and are electrically connected to the process control unit 305. Therefore, it is configured to perform data transmission and reception, and file download and upload. Furthermore, while the process control unit 305 and each sub-controller (temperature control unit 307, gas flow control unit 308, and pressure control unit 309, etc.) are shown as separate units, they can also be integrated into a single unit.

[0037] The temperature control unit 307 is configured to control the processing temperature based on the set values ​​for each zone in the recipe and the measured values ​​detected by temperature sensors (not shown) installed in each zone. The temperature control unit 307 is configured to adjust the temperature inside the processing chamber 201 or the temperature of the wafer 200 by controlling the temperature of the heaters (not shown) in each zone. Furthermore, the processing temperature referred to herein refers to the temperature of the wafer 200 or the temperature inside the processing chamber 201.

[0038] Furthermore, each zone represents a region obtained by dividing the processing chamber 201 into multiple parts along the height direction; in this embodiment, for example, it is divided into five zones. However, the number of zones is not limited to five; depending on the structure of the device, it may be divided into more than five zones. Additionally, heaters are provided for each zone; in this embodiment, five heaters are used. The temperature within the processing chamber 201 or the temperature of the wafer 200 is controlled by these five heaters.

[0039] The gas flow control unit 308 is configured to adjust the flow rate of gas entering the processing chamber 201 based on the set values ​​set in the recipe and the measured values ​​detected by the gas flow sensor (not shown), so that the flow rate is the desired flow rate. Furthermore, the gas flow control unit 308 is configured to control the opening and closing of the valve in accordance with the valve's opening and closing state set in the recipe. The gas flow control unit 308 regulates the flow rate of gas entering the processing chamber 201 by controlling the mass flow controller (MFC), which functions as a flow controller (flow control unit), and the opening and closing of the valve.

[0040] The pressure control unit 309 is configured to control the processing pressure based on the set value set in the formula and the pressure value detected by the pressure sensor (not shown). The pressure control unit 309 is configured to control the switching (on / off) of the pressure adjustment device and the vacuum pump, so that the pressure inside the processing chamber 201 reaches the desired pressure at the desired time. Furthermore, the processing pressure referred to herein refers to the pressure inside the processing chamber 201.

[0041] The drive control unit 306 includes a transport control unit 311, a rotation control unit 312, and a lifting control unit 313. Furthermore, while the drive control unit 306, transport control unit 311, rotation control unit 312, and lifting control unit 313 are shown as separate units, they can also be a single integrated structure.

[0042] The transport control unit 311 is configured to, for example, control the transport actions of the boat lift 115, the wafer cassette transport mechanism 118, and the wafer transfer mechanism 125, respectively.

[0043] The rotation control unit 312 is configured to control, for example, the rotation of the wafer cassette transport mechanism 118, the wafer transfer mechanism 125, and the rotation axis 116 disposed at the center of the rotating wafer cassette holder 105.

[0044] The lifting control unit 313 is configured to, for example, control the lifting actions of the boat lifting machine 115, the wafer cassette transport mechanism 118, and the wafer transfer mechanism 125 respectively.

[0045] It should be noted that the control device 100, process control unit 305, and drive control unit 306 of this embodiment do not depend on a dedicated system and can be implemented using a conventional computer system. For example, each controller that performs the specified process can be configured by installing the program stored on a recording medium (CD-ROM, USB, etc.) containing the program for performing the above-described process onto a general-purpose computer.

[0046] The operation unit 303 integrally includes a display unit 304, or is connected to the display unit 304 via a video cable or the like. The display unit 304 is, for example, a liquid crystal display panel. It is configured to display various operation screens for operating the substrate processing apparatus 10 on the display unit 304. The operation screens include a recipe editing screen 12 for controlling the process system controlled by the process control unit 305 and the drive system controlled by the drive control unit 306 for substrate processing. The display unit 304 is configured to display, on the recipe editing screen 12, at least the setting value of an item and a status indicating whether the setting value is a save target in a recipe including multiple steps, wherein the multiple steps define the processing conditions of the substrate, including at least one item.

[0047] Here, the flag indicates whether the item and its setting value in the steps of the recipe editing screen 12 are objects to be saved to the storage unit 100c. For example, if the flag of an item in a step is set to valid (i.e., the flag is ON or 1), it indicates that the item and its setting value in that step are objects to be saved to the storage unit 100c. Conversely, if the flag of an item in a step is set to invalid (i.e., the flag is OFF or 0), it indicates that the item and its setting value in that step are not objects to be saved to the storage unit 100c.

[0048] That is, CPU 100a is configured to store items and settings in steps where the flag is set to be valid in multiple steps of the recipe into storage unit 100c, and not to store items and settings in steps where the flag is set to be invalid into storage unit 100c. Therefore, the storage capacity used for storing recipes can be reduced.

[0049] Furthermore, the operation unit 303 is configured to edit the recipe displayed on the display unit 304 via the recipe editing screen 12. For example, the operation unit 303 is configured to operate the recipe editing screen 12 to edit the settings of each item in each step. Additionally, the operation unit 303 is configured to edit the status of the flags for each item in each step, and to switch the settings of the flags for each item individually. Furthermore, the operation unit 303 is configured to specify at least one step in the recipe editing screen 12 and delete the specified step. Additionally, the operation unit 303 is configured to add at least one new step in the recipe editing screen 12.

[0050] CPU 100a is configured to control display unit 304, enabling switching of the display of setting values ​​for the recipe edited by operation unit 303. Furthermore, CPU 100a is configured to control display unit 304, enabling switching of flag settings for items in the edited steps based on the setting values ​​of items in the steps edited by operation unit 303. Additionally, CPU 100a is configured to change the setting values ​​in the following steps to the edited setting values ​​and invalidate the flags; that is, these steps are steps following the step where the flag state is switched, and are steps between steps where the flags are valid. Moreover, CPU 100a is configured to control display unit 304, temporarily storing items with invalidated flags and the setting values ​​of each step, including these items, in RAM 100b, and displaying the recipe including the temporarily stored items and their setting values ​​on recipe editing screen 12. This facilitates editing of the recipe on recipe editing screen 12. Furthermore, by controlling the display unit 304 using the CPU 100a based on the operation of the operation unit 303, the load on the operation unit 303 and the display unit 304 can be reduced, and the operation process becomes smoother.

[0051] Furthermore, the CPU 100a is configured to control the display unit 304, causing the display of the setting value of an item in a step that has been edited through the operation unit 303 to differ from the display of the setting value of that item in other steps that have not been edited. Specifically, the CPU 100a, for example, switches the background color or text color of the cells containing the setting value in the edited step to a color different from the background color or text color of the cells containing the setting value in the unedited step. Additionally, the CPU 100a adds a thick border around the cells containing the setting value in the edited step, and adds a border of a different color around the cells containing the setting value in the edited step, etc., so that the state displayed on the recipe editing screen 12 can be recognized that the setting value has been edited. Thus, the setting value of the item in the edited step can be easily recognized.

[0052] Furthermore, the CPU 100a is configured to control the display unit 304, causing the display of the flag's status to switch after being switched by the operation unit 303. Specifically, the CPU 100a is configured to control the display unit 304 so that when the flag setting is switched from invalid to valid by the operation unit 303, the flag display is switched from an invalid display to a valid display. Additionally, the CPU 100a is configured to control the display unit 304 so that when the flag setting is switched from valid to invalid by the operation unit 303, the flag display is switched from a valid display to an invalid display. In this case, the CPU 100a is configured to control the setting value of the step where the flag is switched to invalid, and the setting value between the steps where the flag is set to valid after the step where the flag is switched to invalid, to the setting value of the steps where the flag is set to valid before the step where the flag is switched to invalid. Therefore, by switching the flag to invalid, the settings for subsequent steps can be automatically changed, making it easier to edit the recipe on the recipe editing screen 12. Furthermore, by controlling the display unit 304 using the CPU 100a based on the operation of the operation unit 303, the load on the operation unit 303 and the display unit 304 can be reduced.

[0053] Furthermore, the CPU 100a is configured to control the display unit 304 so that the display of the marker in the step edited by the operation unit 303 is different from the display of the marker in other steps that have not been edited. Additionally, the CPU 100a can control the display unit 304 so that the display of the marker corresponding to the setting value of an item in the step edited by the operation unit 303 is different from the display of the marker corresponding to the setting value of the same item in other steps that have not been edited. Specifically, the CPU 100a, for example, switches the background color or text color of the ON or OFF cells of the marker in the edited step to a color different from the background color or text color of the ON or OFF cells of the marker in the unedited step. Furthermore, the CPU 100a adds a thick border around the ON or OFF cells of the marker in the edited step, and adds a border of a different color around the ON or OFF cells of the marker in the edited step, and so on, displaying a state on the recipe editing screen 12 that indicates that the marker display has been edited. This makes it easy to recognize the status of the items' markers in the edited steps.

[0054] Additionally, the operation unit 303 may output information displayed on the display unit 304 to a device such as a USB memory inserted into the external storage unit 302. The operation unit 303 receives input data (input instructions) from the operation screen displayed on the display unit 304 and sends the input data to the control device 100. Furthermore, the operation unit 303 is configured to receive instructions (control instructions) to execute any substrate processing recipe (also called a process recipe) from among the recipes displayed in the RAM 100b or the recipes stored in the storage unit 100c, and send them to the control device 100. Moreover, the operation unit 303 and the display unit 304 may also be composed of a touch panel. Here, the operation unit 303 and the display unit 304 are separate from the control device 100, but they may also be integrated into the control device 100.

[0055] Furthermore, the means by which these programs are supplied are arbitrary. In addition to being supplied via a prescribed recording medium as described above, they can also be supplied via communication lines, communication networks, and communication systems.

[0056] The control device 100 is configured as a computer equipped with a CPU 100a, RAM 100b, storage unit 100c, and I / O port 100d. The storage unit 100c stores recipe files that define processing procedures (processing order) and processing conditions, control program files for executing these recipe files, parameter files (set value files) containing recipe information for setting processing procedures and conditions, error handling program files and error handling parameter files, as well as various screen files (not shown), including input screens for inputting process parameters, and various icon files. Furthermore, the control device 100 uses an external communication unit 301 to connect to networks such as the Internet, LAN (Local Area Network), and WAN (Wide Area Network), enabling communication with external devices via the network.

[0057] In addition, the storage unit 100c uses non-volatile memory such as HDD (Hard Disk Drive), SSD (Solid State Drive), and flash memory.

[0058] In addition, the storage unit 100c stores recipe information, parameter information, and registered user information used in the recipe editing program. Furthermore, the parameter information can be set for each registered user (per user), and stored in a corresponding manner with the registered user information.

[0059] The recipe information includes settings related to multiple items in multiple processing steps of the recipe editing screen 12. Here, as recipe information, at least the items and settings whose flags are set to valid in the multiple steps of the recipe are stored. That is, the storage unit 100c stores at least the items and settings whose flags are set to valid in the multiple steps of the recipe. By storing only the items and settings whose flags are valid, the recipe file size is reduced, and the consumption of storage space in the storage unit 100c can be suppressed.

[0060] The parameter information includes a parameter that defines whether or not the setting value of the item in the step to be deleted is inherited into the next step when at least one step is deleted in the recipe editing screen 12. Specifically, as a parameter, it is possible to set "inherit the information of the step to be deleted into the next step" or "do not inherit the information of the step to be deleted into the next step (i.e., trace back the steps without inheriting the information of the step to be deleted, and the inheritance flag is set to the information of the previous step)".

[0061] The registered user information is the information of the user displayed on the recipe editing screen 12, including at least the username, password, and security level. For each user, a corresponding username, password, and security level are stored.

[0062] In addition, the aforementioned formula information, parameter information, registered user information, etc., can also be stored in the external storage unit 302.

[0063] CPU 100a expands the recipe to RAM 100b based on the items whose flags are set to valid and their setting values ​​stored in storage unit 100c. Specifically, CPU 100a expands the setting values ​​of items in steps where flags are set to valid, as setting values ​​for other steps that follow this step and whose setting values ​​are not stored in storage unit 100c. Furthermore, CPU 100a temporarily stores the items and setting values ​​of each step of the recipe to RAM 100b by setting the flags in the other steps where the setting values ​​have been expanded to invalid.

[0064] Furthermore, the CPU 100a is configured to control the display unit 304, causing the screen to display recipes that include temporarily stored flags set to valid, flags set to invalid, and the setting values ​​of these items. That is, the display unit 304 displays a recipe editing screen 12 that includes items temporarily stored in RAM 100b and their setting values.

[0065] The recipe editing process and recipe information can be pre-installed on the substrate processing device 10, for example. The recipe editing process and recipe information can be implemented by recording on a non-volatile recording medium or by publishing via a network and appropriately installing them on the substrate processing device 10. Furthermore, examples of non-volatile recording media include CD-ROMs, optical disks, HDDs, DVD-ROMs, flash memory, memory cards, and USB storage devices.

[0066] The recipe editing process is a program (also called a program product) used by a computer to enable the substrate processing apparatus 10 to perform a process of editing a recipe that includes multiple steps and processing the wafer 200 using the edited recipe, wherein the multiple steps define the processing conditions of the substrate, including at least one item and the setting value of the item.

[0067] Next, an example of the recipe editing screen 12 in this embodiment will be described. Figure 4 This diagram shows an example of a recipe editing screen 12 displayed on the display unit 304. The recipe editing screen 12 is displayed on the display unit 304 by the control device 100 according to the operation of the operation unit 303.

[0068] In the recipe editing screen 12, it is configured to edit the processing steps in one process of semiconductor device manufacturing, multiple items that are processing conditions in each processing step, and multiple setting values ​​for multiple items in each processing step. Here, editing includes adding and deleting processing steps (i.e., steps), adding and deleting items, inputting, copying, pasting, changing, deleting setting values ​​for each item in each processing step as parameters, and switching the flags of each item.

[0069] As described above, at least the items and settings of the steps in which the flags are set to be valid are stored in the storage unit 100c. Furthermore, when the CPU 100a expands the recipe to the RAM 100b based on the items and settings stored in the storage unit 100c, it expands the settings of the steps in which the flags are set to be valid as settings of other steps that are subsequent to that step and whose settings are not stored in the storage unit 100c. Moreover, the CPU 100a temporarily stores the settings of each step of the recipe in the RAM 100b by setting the flags of the other steps in which the settings have been expanded to be invalid, and displays the recipe, including the temporarily stored settings, on the recipe editing screen 12.

[0070] In other words, CPU 100a controls the display unit 304 to use the recipe information displayed on RAM 100b when expanding the recipe to RAM 100b. In other words, CPU 100a controls the display unit 304 to supplement items and settings not stored in storage unit 100c on RAM 100b when expanding the recipe to RAM 100b, based on the items and settings stored in storage unit 100c. This allows for the display unit 304 to display all items and settings from all steps. This reduces the storage capacity of storage unit 100c while simplifying operations on the recipe editing screen 12.

[0071] The recipe editing screen 12 includes a recipe display area 13, a setting display area 14, an ESC key 15, a SAVE key 16 as a save button, a STEP INS key 17 as an insert button for adding at least one step, and a STEP DELETE key 18 as a delete button for deleting at least one step.

[0072] The recipe display area 13 is configured to display the recipe name and its execution time. This allows the user to view the recipe's content and execution time within the recipe editing screen 12.

[0073] In the setting display area 14, the recipe, which consists of multiple steps that define the processing conditions of the chip 200, including at least one item and the setting value of the item, is in the form of a table where the multiple steps are defined as the vertical axis (also called the Y-axis, column) and the multiple items that constitute the conditions in each step are defined as the horizontal axis (also called the X-axis, row). The status (ON or OFF) of the editable setting value and the flag is displayed at the intersection of the two axes.

[0074] The processing conditions include at least one category such as temperature, gas flow rate, and pressure, with each category containing at least one item. Each item is configured to include at least one setpoint. Specifically, for example, Figure 4 As shown, in the recipe editing screen 12, areas are divided for each category, and the settings and status of each item are displayed. In other words, the CPU 100a is configured to control the display unit 304, enabling the division of areas by category and the display of each item in the recipe. In this way, various items can be referenced in the recipe editing screen 12, thus improving work efficiency.

[0075] The SAVE key 16 is configured to save (also called store) the recipe as a recipe file to the storage unit 100c when pressed. Furthermore, the CPU 100a is configured to control the status of the verification flag based on the operation of the SAVE key 16. This makes the status of the verification flag readily apparent, reducing the load on the CPU 100a during recipe editing.

[0076] The STEP DELETE key 18, when pressed, deletes the specified step. Specifically, for example... Figure 4 As shown, Step 4 is specified, and the STEP DELETE key 18 is pressed, thereby deleting Step 4. The CPU 100a is configured such that the settings of the specified deleted step are inherited into the settings of the next step after the specified deleted step. This avoids accidental operation caused by step deletion.

[0077] Furthermore, the CPU100a is configured to control the display so that it can identify valid flags relative to flags that are set to invalid. For example, the CPU100a displays the background or text color of cells marked "ON" as a different color than the background or text color of cells marked "OFF". Additionally, the CPU100a adds a thick border around cells marked "ON" and a border of a different color around cells marked "OFF", and so on, displaying a state on the recipe editing screen 12 that indicates the flag is set to valid. Thus, items with valid flags can be easily identified.

[0078] Furthermore, the CPU 100a is configured to control the display unit 304 so that when the flag of an item in the next step after the deletion step is set to be valid, the display of that flag is different from the display of other flags that are set to be invalid. This makes it easier to identify items whose flags are set to be valid.

[0079] Furthermore, the CPU 100a is configured to control the process such that, in the recipe editing screen 12, when deleting at least one of multiple steps, if the flag of the item in the step to be deleted is set to valid and the flag of the item in the next step of the step to be deleted is set to invalid, the CPU switches the flag setting of the item in the next step of the step to be valid and inherits the setting value of the item in the step to be deleted. This improves work efficiency by inheriting information such as the setting values ​​of the deleted step.

[0080] Specifically, for example in Figure 4 In the recipe editing screen 12 shown, when Step 4 is to be deleted, if the Step 4 flag is set to ON in the item "Temp Zone 3" and the flag of the next Step 5 is set to OFF, switch the Step 5 flag to ON, and inherit the setting value "200.0" of the Step 4 to be deleted to the setting value of the next Step 5 and set it to "200.0".

[0081] Furthermore, the CPU100a is configured to control the process so that if the flag of an item in the step to be deleted is set to invalid, it does not switch the flag of that item in the next step of the step to be deleted, nor does it inherit the setting value of the item in the step to be deleted from the setting value of the item in the next step. This improves work efficiency.

[0082] Specifically, for example, Figure 4 As shown, when the flag of the item "Temp Zone 1" in Step 4 to be deleted is set to OFF, the flag of the item "Temp Zone 1" in Step 5 following Step 4 will also remain OFF and will not be switched. The setting value of the item "Temp Zone 1" in Step 4 will not be inherited to the setting value of the item "Temp Zone 1" in Step 5. That is, on the recipe editing screen 12, even if Step 4 is deleted, the setting value "100.000" and the flag of the item "Temp Zone 1" in Step 5 will remain OFF.

[0083] Furthermore, the CPU100a is configured to control the process so that if the flag of an item in the step following the step to be deleted is set to valid, the setting value of the item in the step to be deleted will not be inherited into the setting value of the item in the step following the step to be deleted. This prevents incorrect recipe settings.

[0084] Specifically, for example, Figure 4 As shown, if the flag of the project "MFC CH1" in Step 4, which is to be deleted, is set to ON, and the flag of the project "MFC CH1" in Step 5, which follows Step 4, is also set to ON, the setting value "400.000" of the project "MFC CH1" in Step 4 will not be inherited to the setting value "300.000" of the project "MFC CH1" in Step 5. That is, even if Step 4 is deleted, the setting value "300.000" and the ON flag of the project "MFC CH1" in Step 5 will be maintained.

[0085] Next, use Figures 4-7 An example of the process when deleting a step in the recipe editing screen 12 will be described. The recipe editing screen 12, which includes multiple steps, is displayed on the display unit 304. These multiple steps define the processing conditions of the substrate, including at least one item and the setting value of the item.

[0086] First, such as Figure 4 As shown, if the step to be deleted is specified in the recipe editing screen 12 and the STEP DELETE key 18 is pressed, then in step S11, the CPU 100a retrieves the items in the specified step to be deleted whose flags are set to active (i.e., ON or 1). Specifically, for example, it retrieves the item "Temp Zone 3" whose flag for Step 4 to be deleted is set to ON.

[0087] At this time, the CPU 100a is configured to control the display unit 304 so that, if an instruction as an execution condition is set in the step to be deleted, a message confirming the deletion of the step is displayed. Specifically, it is configured to display a message such as "An execution condition has been set in the step to be deleted. Can it be deleted?". Instructions are used such as "Sub Call" for calling other recipes, "Jump" for jumping to different steps, and "Loop" for repeating between specified steps. This avoids affecting other steps.

[0088] Next, in step S12, CPU100a determines whether the flag is set to valid in the next step of the item whose flag is set to valid (i.e., ON or 1). If the flag is set to valid in the next step of the item to be deleted, the process proceeds to the next step S17; if the flag is not set to valid in the next step of the item to be deleted, i.e., the flag is set to invalid (i.e., OFF or 0), the process proceeds to the next step S13.

[0089] Next, in step S13, if the flag is not set to valid in the next step of the step to be deleted (i.e., the flag is set to invalid), the CPU100a determines whether the setting value of that step inherits the setting value of the step to be deleted (i.e., whether it is set to be the same as the setting value of the step to be deleted). If the setting value is inherited according to the parameter information or settings, the process proceeds to the next step S14; if the setting value is not inherited from the step to be deleted, the process proceeds to the next step S15.

[0090] At this time, the CPU 100a is configured to control the display unit 304, causing it to display a message confirming whether the setting value of the step to be deleted has been inherited into the next step. Specifically, for example, it displays a message confirming whether the setting value has been inherited, such as "The step to be deleted contains a setting value. Can the setting value be inherited into the next step?" This helps prevent accidental operations caused by step deletion.

[0091] Furthermore, the CPU 100a is configured to control the inheritance of the setting value of the item to be deleted in the step following the step to be deleted, according to the parameters in the parameter information stored in the storage unit 100c. Additionally, the CPU 100a is configured to control the inheritance of the setting value of the item to be deleted in the step following the step to be deleted, based on parameters corresponding to the registered user. By allowing the registered user (also known as the operator) to select whether or not to inherit the setting value, erroneous input can be avoided.

[0092] Next, in step S14, after setting the value of the step to be deleted to be inherited, CPU 100a switches the flag of the next step of the step to be deleted to ON, and inherits the setting value of the step to be deleted to the setting value of the next step of the step to be deleted. That is, the setting value of the next step of the step to be deleted is set to be the same as the setting value of the step to be deleted. In addition, at this time, CPU 100a inherits the setting value of the step to be deleted to the setting value of the next step of the step to be deleted, and the setting values ​​up to the following step, which is the step whose flag is set to valid immediately after the step to be deleted.

[0093] Specifically, for example in Figure 4 In the recipe editing screen 12 shown, when Step 4 is deleted, the Step 4 flag is set to ON in the "Temp Zone 3" item, and the flag for the next Step 5 is set to OFF. This is in the case where the settings for inheriting the values ​​of the steps to be deleted are shown below. Figure 6 As shown, CPU100a switches the Step 5 flag to ON, inherits the setting value "200.0" of Step 4 to be deleted, and sets it to "200.0" in the next Step 5. Furthermore, CPU100a inherits the setting value "200.0" of Step 5 to the setting values ​​up to Step 9 before Step 10, which is the next step whose flag is set to ON.

[0094] Next, in step S15, if the CPU100a has set the setting value of the step to be deleted without inheriting the setting value, the CPU100a obtains the setting value of the step whose flag is set to be valid immediately preceding the step to be deleted.

[0095] In the next step S16, CPU100a changes the setting value from the step immediately preceding the step to be deleted, where the flag is set to be valid, up to the step immediately following the step to be deleted, where the flag is set to be valid, to the setting value of the step immediately preceding the step to be deleted, where the flag is set to be valid.

[0096] For example, the CPU100a is configured to control the setting so that, if a setting is made based on parameters without inheriting the setting value, and the flag of the item in the next step after the step to be deleted is set to invalid, the setting value from the step immediately preceding the step to be deleted where the flag was set to valid, up to the step immediately following the step to be deleted where the flag was set to valid, is changed to the setting value of the step immediately preceding the step to be deleted where the flag was set to valid. By allowing the registered user (also known as the operator) to select whether or not the setting value is inherited, incorrect input can be avoided.

[0097] Specifically, for example in Figure 4 In the recipe editing screen 12 shown, when Step 4 is deleted, the Step 4 flag is set to ON in the "Temp Zone 3" item, and the flag for the next Step 5 is set to OFF. If the settings for the step to be deleted are not inherited, the CPU 100a acquires the setting value "100.0" of Step 2, the step immediately preceding Step 4 to be deleted, whose flag is set to ON. In this case, as... Figure 7 As shown, CPU100a will change the setting value from Step3, which is the step after Step2, up to Step9, which is the step whose flag is set to be valid, and before Step10, to the setting value of Step2, "100.0".

[0098] In the next step S17, CPU100a determines whether the confirmation of the flags for all items in the step to be deleted has ended. If the confirmation of the flags for all items has not ended, the process returns to the next step S11; if the confirmation of the flags for all items has ended, the process ends.

[0099] Next, use Figure 8 and Figure 9 An example of how to handle the deletion of multiple steps in recipe editing screen 12 is explained.

[0100] In recipe editing screen 12, as follows Figure 8 As shown, by specifying multiple consecutive steps and pressing the STEP DELETE key, you can delete the specified multiple consecutive steps.

[0101] When multiple consecutive steps are specified and the STEP DELETE key is pressed, the CPU 100a, in the recipe editing screen 12, determines whether any items whose flags are set to "valid" are included in the steps to be deleted. If so, the CPU 100a switches the flag setting of that item to "valid" in the next step after the steps to be deleted. Furthermore, the CPU 100a is configured to control the setting value of the item in the last step of the multiple steps to be deleted, where the flag is set to "valid," to be inherited by the setting value of the item in the next step after the steps to be deleted. Similarly, as with deleting a single step, it can also be set not to inherit the setting value of the item in the last step of the multiple steps to be deleted. This avoids incorrect recipe settings.

[0102] Specifically, for example, in Figure 8 When Steps 3-5 are deleted in the recipe editing screen 12 shown, the flags for Steps 4 and 5 are set to ON in the project "MFC CH1", and the flag for the next Step 6 is set to OFF. This is in the case where the settings for the steps to be deleted are inherited, such as... Figure 9 As shown, CPU100a switches the flag of Step6 to ON, and the setting value "300.0" of the last step whose flag of Step3 to 5 is set to ON is inherited to the setting value of the next Step6 and remains "300.0".

[0103] It should be noted that, in the above description, the substrate processing apparatus of the illustrated embodiment has been described, but the embodiment may also be in the form of a program for causing a computer to perform the functions of the substrate processing apparatus. The embodiment may also be in the form of a computer-readable non-transitory recording medium storing such programs.

[0104] In addition, the structure of the substrate processing apparatus described in the above embodiments is an example and can be changed according to the situation without departing from the main idea.

[0105] In addition, the process flow described in the above embodiments is also an example, and unnecessary steps can be deleted, new steps can be added, or the processing order can be changed without departing from the main idea.

[0106] Furthermore, while the above embodiments describe the implementation of the implementation method using a computer via a software structure through program execution, the implementation is not limited to this. The implementation method can also be implemented, for example, through a hardware structure, or a combination of a software structure and a hardware structure.

[0107] Furthermore, the above embodiments describe an example of forming a film using a batch-type substrate processing apparatus that processes multiple substrates at once. This disclosure is not limited to the above methods; for example, it can also be applied to cases where a leaf-type substrate processing apparatus that processes one or more substrates at once is used to form a film. Additionally, the above embodiments describe an example of forming a film using a substrate processing apparatus with a hot-wall type furnace. This disclosure is not limited to the above methods; it can also be applied to cases where a substrate processing apparatus with a cold-wall type furnace is used to form a film.

[0108] When using these substrate processing devices, each process can be performed with the same processing procedure and processing conditions as in the above embodiments, and the same effects as in the above embodiments can be obtained.

Claims

1. A processing apparatus, characterized in that, have: A display unit configured to display, in a recipe comprising multiple steps, at least a set value for an item and a state indicating whether the set value is a saveable item, wherein the multiple steps define processing conditions for a substrate including at least one of the items; and The control unit is configured to control that, when at least one of the plurality of steps is to be deleted, if the flag of the item in the step to be deleted is set to valid and the flag of the item in the next step of the step to be deleted is set to invalid, the setting of the flag of the item in the next step of the step to be deleted is switched to valid, and the setting value of the item in the step to be deleted is inherited to the setting value of the item in the next step of the step to be deleted.

2. The processing apparatus according to claim 1, characterized in that, The control unit is configured to control that, if the flag of an item in the step to be deleted is set to invalid, the flag of the item in the next step of the step to be deleted is not switched, and the setting value of the item in the step to be deleted is not inherited to the setting value of the item in the next step of the step to be deleted.

3. The processing apparatus according to claim 1 or 2, characterized in that, The control unit is configured to control that, if the flag of an item in the next step after the step to be deleted is set to valid, the setting value of the item in the next step after the step to be deleted is not inherited to the setting value of the item in the next step after the step to be deleted.

4. The processing apparatus according to any one of claims 1 to 3, characterized in that, The control unit is configured to control that, when deleting multiple consecutive steps, if an item whose flag is set to be valid is included in the multiple steps to be deleted, the flag setting of the item in the next step of the multiple steps to be deleted is switched to be valid, and the setting value of the item in the last step in the multiple steps to be deleted where the flag is set to be valid is inherited to the setting value of the item in the next step of the multiple steps to be deleted.

5. The processing apparatus according to any one of claims 1 to 4, characterized in that, The control unit is configured to control the display unit such that, if the flag of an item in the next step after the deletion step is set to be valid, the display of that flag is different from the display of other flags that are set to be invalid.

6. The processing apparatus according to any one of claims 1 to 5, characterized in that, It includes an operation unit capable of editing the recipe displayed on the display unit. The control unit is configured to control the display unit so that, based on the setting value of the item in the edited step as operated by the operation unit, the setting of the flag of that item in the edited step is switched.

7. The processing apparatus according to claim 6, characterized in that, The control unit is configured to control the display unit such that the display of the setting value of an item in a step that has been edited by the operation of the operation unit is different from the display of the setting value of the same item in other steps that have not been edited.

8. The processing apparatus according to claim 7, characterized in that, The control unit is configured to control the display unit such that the display of the flag corresponding to the setting value of an item in a step that has been edited by the operation unit is different from the display of the flag corresponding to the setting value of the same item in other steps that have not been edited.

9. The processing apparatus according to any one of claims 1 to 8, characterized in that, The control unit has a parameter that defines whether the setting value of the flag of the item to be deleted is inherited from the setting value of the item in the next step of the step to be deleted. The control unit is configured to control the process such that, in accordance with the parameters, in the next step of the step to be deleted, the setting value of the item in the step to be deleted is inherited to the setting value of the item in the next step of the step to be deleted.

10. The processing apparatus according to claim 9, characterized in that, These parameters can be set for each registered user. The control unit is configured to control the process such that, based on the parameters corresponding to the registered user, in the next step of the step to be deleted, the setting value of the item in the step to be deleted is inherited to the setting value of the item in the next step of the step to be deleted.

11. The processing apparatus according to claim 9 or 10, characterized in that, The control unit is configured to control that, in the case where the parameter is set to not inherit the set value, and the flag of the item in the next step after the step to be deleted is set to invalid, the set value of the item in the step immediately preceding the step to be deleted, where the flag is set to valid, is inherited.

12. The processing apparatus according to any one of claims 1 to 11, characterized in that, The control unit is configured to control the display unit so that, when an execution condition is set in the step to be deleted, a message confirming whether the set value is inherited is displayed.

13. The processing apparatus according to any one of claims 1 to 12, characterized in that, The control unit is configured to control the display unit such that, when at least one of the plurality of steps is to be deleted, a message confirming whether the set value in the next step of the step to be deleted is inherited is displayed.

14. The processing apparatus according to any one of claims 1 to 13, characterized in that, It has a delete button that can delete at least one of the multiple steps. The control unit is configured to control the process such that when a specified step is deleted via the delete button, the setting value of the specified step is inherited into the setting value of the next step after the specified step.

15. A substrate processing apparatus, characterized in that, have: The display unit is configured to display at least a setting value for an item and a state indicating whether the setting value is a saveable item in a recipe comprising multiple steps, wherein the multiple steps define processing conditions for a substrate including at least one of the items. The control unit is configured to control that, when at least one of the plurality of steps is to be deleted, if the flag of the item in the step to be deleted is set to valid and the flag of the item in the next step of the step to be deleted is set to invalid, the setting of the flag of the item in the next step of the step to be deleted is switched to valid, and the setting value of the item in the step to be deleted is inherited to the setting value of the item in the next step of the step to be deleted; and A processing container that processes the substrate in accordance with the processing conditions of the formula.

16. A processing method, characterized in that, have: A process that, in a recipe comprising multiple steps, at least displays a set value for an item and a state indicating whether the set value is a saved object, wherein the multiple steps define processing conditions for a substrate including at least one of the items; and When deleting at least one of the plurality of steps, if the flag of the item in the step to be deleted is set to valid and the flag of the item in the next step of the step to be deleted is set to invalid, the process is to switch the setting of the flag of the item in the next step of the step to be deleted to valid and inherit the setting value of the item in the step to be deleted to the setting value of the item in the next step of the step to be deleted.

17. A method for manufacturing a semiconductor device, characterized in that, have: The recipe, which includes multiple steps, at least displays the set value of an item and a process indicating whether the set value is a saved object, wherein the multiple steps define the processing conditions of a substrate including at least one of the items. When deleting at least one of the plurality of steps, if the flag of the item in the step to be deleted is set to valid and the flag of the item in the next step of the step to be deleted is set to invalid, the process of switching the flag setting of the item in the next step of the step to be deleted to valid and inheriting the setting value of the item in the step to be deleted to the setting value of the item in the next step of the step to be deleted; and The process of processing the substrate according to the processing conditions described in the formula.

18. A program product comprising a program, characterized in that, The program causes the substrate processing device to perform the following processes via a computer: A process that, in a recipe comprising multiple steps, at least displays a set value for an item and a state indicating whether the set value is a saved object, wherein the multiple steps define processing conditions for a substrate including at least one of the items; and When deleting at least one of the plurality of steps, if the flag of the item in the step to be deleted is set to valid and the flag of the item in the next step of the step to be deleted is set to invalid, the process of switching the flag setting of the item in the next step of the step to be deleted to valid and inheriting the setting value of the item in the step to be deleted to the setting value of the item in the next step of the step to be deleted.

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