Reticle storage information management system and reticle storage information management method

Abstract

Embodiments of the present application provide a mask storage information management system and a mask storage information management method. The management system comprises a storage device, a management device and a host computer. The storage device comprises a packing box and a radio frequency tag. The packing box is used for storing masks, and the radio frequency tag is arranged on the packing box. The management device comprises a positioning unit, a communication unit and a read-write unit. The read-write unit can write first characteristic information to the radio frequency tag and / or read the first characteristic information of the radio frequency tag. The positioning unit can obtain position information of the management device. The host computer receives the position information and second characteristic information and generates storage information, so that the target mask can be conveniently queried and found through the storage information in the host computer. In this way, the storage management difficulty of the mask is reduced, the storage management accuracy of the mask is improved, the production line is efficiently and orderly operated, and the production efficiency of the display panel is improved.

Description

Technical Field

[0001] This application relates to the field of display device technology, and in particular to a mask storage information management system and a mask storage information management method. Background Technology

[0002] Organic light-emitting diode (OLED) and flat panel display devices based on light-emitting diode (LED) technologies are widely used in various consumer electronics products such as mobile phones, televisions, laptops, and desktop computers due to their advantages such as high image quality, energy saving, thin body and wide range of applications, becoming the mainstream of display devices.

[0003] In related technologies, photomasks are used in the manufacturing process of display devices. Since there are a large number of photomasks, those that are not in use need to be packaged and stored. How to efficiently and accurately manage the stored photomasks so that the production line can operate efficiently and in an orderly manner is a technical problem that urgently needs to be solved. Summary of the Invention

[0004] This application provides a mask storage information management system and a mask storage information management method, aiming to reduce the difficulty of mask storage management and improve the accuracy of mask storage management, so as to enable the production line to operate more efficiently and orderly.

[0005] An embodiment of the first aspect of this application provides a mask storage information management system. The management system is used to manage stored masks used for vapor deposition of display panels. The management system includes: a storage device, including a packing box and an RFID tag. The packing box includes a wall panel and a receiving cavity enclosed by the wall panel. The receiving cavity is used to contain the mask. The RFID tag is disposed on the wall panel and is used to store first feature information, which includes the specification information of the target mask in the receiving cavity; a management device, including a positioning unit, a communication unit, and a read / write unit. The read / write unit is used to communicate with the RFID tag to write the first feature information to the RFID tag and / or read the first feature information from the RFID tag. The read / write unit is connected to the communication unit to transmit second feature information to the communication unit. The second feature information includes the specification information of the target mask and the identification code of the RFID tag. The positioning unit is used to obtain the location information of the management device and is connected to the communication unit to transmit the location information to the communication unit; and a host computer, which is communicated with the communication unit. The host computer receives the location information and the second feature information uploaded by the communication unit and generates storage information.

[0006] According to any of the foregoing embodiments of the first aspect of this application, the RFID tag and the wall panel are detachably connected.

[0007] According to any of the foregoing embodiments of the first aspect of this application, a packing box is disposed in a storage position along a first direction, and a wall panel is provided with a limiting cavity with an opening at at least one end. An RFID tag is detachably disposed in the limiting cavity, and the opening is disposed away from the storage position, or the axis of the opening intersects with a straight line extending along the first direction.

[0008] According to any of the foregoing embodiments of the first aspect of this application, the wall panel is provided with a drying chamber, the cavity wall of the drying chamber is provided with a through hole, the drying chamber is connected to the receiving cavity through the through hole, the drying chamber is used to contain a desiccant, and the radio frequency tag is disposed in the drying chamber.

[0009] According to any of the foregoing embodiments of the first aspect of this application, the wall panel includes a first wall portion and a second wall portion, a receiving cavity is formed by the first wall portion, the first wall portion is provided with a groove, the second wall portion covers the groove opening to form a drying cavity, the first wall portion and the second wall portion are detachably connected, and an RFID tag is disposed on the second wall portion.

[0010] According to any of the foregoing embodiments of the first aspect of this application, the radio frequency tag includes a substrate and an adhesive layer stacked together, the substrate being used to store feature information, and the substrate being adhered to the wall panel through the adhesive layer.

[0011] According to any of the foregoing embodiments of the first aspect of this application, the radio frequency tag further includes a shielding layer disposed between the substrate and the adhesive layer.

[0012] According to any of the foregoing embodiments of the first aspect of this application, the wall panel includes a bottom wall, an end wall, and a side wall. The bottom wall and the end wall are disposed opposite to each other along a first direction, and the side wall is connected to the bottom wall and the end wall. The packing box is disposed in the storage position through the bottom wall. The side wall includes a first side wall and a second side wall that are connected to each other. The two first side walls are disposed opposite to each other along a third direction, and the two second side walls are disposed opposite to each other along a second direction. The area of ​​the first side wall is larger than that of the second side wall and the end wall. An RFID tag is disposed on the first side wall. The first direction, the second direction, and the third direction intersect each other.

[0013] According to any of the foregoing embodiments of the first aspect of this application, the first sidewall includes a first part and a second part that are interconnected, the orthographic projection of the first part in its thickness direction can cover the mask in the receiving cavity, and the radio frequency tag is disposed in the second part.

[0014] According to any of the foregoing embodiments of the first aspect of this application, the wall panel includes a bottom wall, an end wall, and a side wall. The bottom wall and the end wall are disposed opposite to each other along a first direction, and the side wall is connected to the bottom wall and the end wall. The packing box is disposed in the storage position through the bottom wall, and the radio frequency tag is disposed on the end wall.

[0015] According to any of the foregoing embodiments of the first aspect of this application, the radio frequency tag includes an interconnected radio frequency chip, a radio frequency antenna, and a light-emitting diode (LED). The radio frequency chip is used to store first feature information, and the radio frequency antenna and the LED are connected. The radio frequency antenna is used to generate an induced current to power the LED.

[0016] According to any of the foregoing embodiments of the first aspect of this application, the radio frequency chip receives a communication request from the read / write unit via a radio frequency antenna. The communication request includes the identification code of the target radio frequency tag. The radio frequency chip of the target radio frequency tag is used to close the loop between the light-emitting diode and the radio frequency antenna when responding to the communication request.

[0017] According to any of the foregoing embodiments of the first aspect of this application, a storage device is housed in a storage area, a management device is communicatively connected to an RFID tag in the storage area, and the system further includes a positioning mechanism disposed in the storage area. The positioning unit is communicatively connected to at least three non-collinear positioning mechanisms, and the positioning unit is used to obtain location information based on the positioning mechanisms.

[0018] The second aspect of this application also provides a mask storage information management method, applied to the mask storage information management system of the first aspect embodiment described above. The management method includes:

[0019] The target mask is housed within the receiving cavity of the packing box;

[0020] The read / write unit writes the first feature information into the RFID tag and inputs the second feature information into the communication unit;

[0021] The positioning unit acquires the current location information of the management device and inputs the location information into the communication unit;

[0022] The communication unit uploads the location information and second feature information to the host computer.

[0023] The host computer receives the location information and the second feature information and generates and stores the information.

[0024] According to any of the foregoing embodiments of the first aspect of this application, after the host computer stores the storage information...

[0025] Obtain target location information and target second feature information based on target storage information stored in the host computer;

[0026] The management device is moved to the corresponding target location based on the target location information;

[0027] The management device locates the target RFID tag at the target location based on the identification code in the target's second feature information, and reads the first feature information within the target RFID tag;

[0028] Determine whether the first feature information and the second feature information of the target match. If they match, determine that the mask in the packaging box with the target RFID tag is the target mask. If they do not match, determine that the target stored information is incorrect.

[0029] In the mask storage information management system provided in this application embodiment, the management system includes a storage device, a management device, and a host computer. The storage device includes a packing box and an RFID tag. The packing box is used to store the mask to provide protection for the mask, and the RFID tag is set on the wall panel of the packing box. The management device includes a positioning unit, a communication unit, and a read / write unit. The read / write unit can write first feature information to the RFID tag, and the RFID tag can reliably store the first feature information, reducing the difficulty of editing and storage. And / or the read / write unit can read the first feature information of the RFID tag, so that the target mask in the packing box can be clearly identified by obtaining the first feature information through the management device. The template specifications are defined without requiring unpacking and inspection, which helps reduce the difficulty of mask storage management. The positioning unit can obtain the location information of the management device, which can be used to easily locate the storage area of ​​the target mask. The communication unit uploads the location information and second feature information to the host computer. The host computer receives the location information and second feature information uploaded by the communication unit, integrates them, and generates storage information. This allows the target mask to be easily queried and found through the storage information in the host computer, thereby reducing the difficulty of mask storage management, improving the accuracy of mask storage management, helping the production line to operate efficiently and orderly, and improving the production efficiency of display panels. Attached Figure Description

[0030] Other features, objects, and advantages of this application will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings, wherein the same or similar reference numerals denote the same or similar features.

[0031] Figure 1 This is a schematic diagram of the structure of a mask storage information management system in one embodiment;

[0032] Figure 2 This is a schematic diagram of the storage device in a mask storage information management system according to one embodiment;

[0033] Figure 3 yes Figure 2 Sectional view at point AA;

[0034] Figure 4 This is a schematic diagram of the storage device of the mask storage information management system in another embodiment;

[0035] Figure 5 yes Figure 4 Enlarged structural diagram at point B;

[0036] Figure 6 This is a schematic diagram of the storage device of the mask storage information management system in another embodiment;

[0037] Figure 7 yes Figure 6 Sectional view at CC;

[0038] Figure 8 This is a schematic diagram of the structure of an RFID tag in a mask storage information management system in one embodiment;

[0039] Figure 9 This is a schematic diagram of the storage device of the mask storage information management system in another embodiment;

[0040] Figure 10 yes Figure 9 Sectional view at point DD;

[0041] Figure 11 This is a schematic diagram of the storage device of the mask storage information management system in another embodiment;

[0042] Figure 12 This is a schematic diagram of the structure of an RFID tag in a mask storage information management system in one embodiment;

[0043] Figure 13 This is a schematic diagram of the structure of the mask storage information management system in another embodiment;

[0044] Figure 14 This is a flowchart of a method for managing mask storage information in one embodiment;

[0045] Figure 15 This is a flowchart of a mask storage information management method in another embodiment.

[0046] Explanation of reference numerals in the attached figures:

[0047] 1. Mask storage information management system;

[0048] 2. Storage device; 21. Packing box; 22. Radio frequency tag; 23. Wall panel; 24. Receiving cavity; 231. Limiting cavity; 232. Drying cavity; 2321. Connecting hole; 234. First wall portion; 233. Second wall portion; 221. Substrate; 222. Adhesive layer; 223. Shielding layer;

[0049] 3. Management equipment; 31. Positioning unit; 32. Communication unit; 33. Read / write unit;

[0050] 4. Host computer;

[0051] 5. Positioning mechanism;

[0052] 6. Storage area;

[0053] 71. Bottom wall; 72. End wall; 73. Side wall; 731. First side wall; 732. Second side wall; 733. First part; 734. Second part;

[0054] 81. Radio frequency chip; 82. Radio frequency antenna; 83. Light-emitting diode;

[0055] X, first direction; Y, second direction; Z, third direction. Detailed Implementation

[0056] The features and exemplary embodiments of various aspects of this application will now be described in detail. Numerous specific details are set forth in the following detailed description to provide a comprehensive understanding of this application. However, it will be apparent to those skilled in the art that this application can be implemented without some of these specific details. The following description of embodiments is merely intended to provide a better understanding of this application by illustrating examples. In the accompanying drawings and the following description, at least some well-known structures and techniques are not shown to avoid unnecessarily obscuring the application; and, for clarity, the dimensions of some structures may be exaggerated. Furthermore, the features, structures, or characteristics described below can be combined in any suitable manner in one or more embodiments.

[0057] In the description of this application, it should be noted that, unless otherwise stated, "a plurality of" means two or more; the terms "upper," "lower," "left," "right," "inner," "outer," etc., indicating orientation or positional relationships are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0058] The directional terms appearing in the following description refer to the directions shown in the figures and are not intended to limit the specific structure of the embodiments of this application. It should also be noted in the description of this application that, unless otherwise explicitly specified and limited, the terms "installation" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0059] Please see Figure 1 , Figure 2 and Figure 3 , Figure 1 This is a schematic diagram of the structure of a mask storage information management system in one embodiment; Figure 2This is a schematic diagram of the storage device in a mask storage information management system according to one embodiment; Figure 3 yes Figure 2 Sectional view at point AA.

[0060] like Figures 1 to 3 As shown, an embodiment of the first aspect of this application provides a mask storage information management system 1. The management system is used to manage stored masks, which are used for vapor deposition of display panels. The mask storage information management system 1 includes a storage device 2, a management device 3, and a host computer 4. The storage device 2 includes a packing box 21 and an RFID tag 22. The packing box 21 includes a wall panel 23 and a receiving cavity 24 enclosed by the wall panel 23. The receiving cavity 24 is used to receive the mask. The RFID tag 22 is disposed on the wall panel 23 and is used to store first feature information, which includes the specification information of the target mask in the receiving cavity 24. The management device 3 includes a positioning unit 31, a communication unit 32, and a reading unit. The writing unit 33 and the reading / writing unit 33 are used to communicate with the RFID tag 22 to write first feature information to the RFID tag 22 and / or read the first feature information of the RFID tag 22. The reading / writing unit 33 is connected to the communication unit 32 to transmit second feature information to the communication unit 32. The second feature information includes the specification information of the target mask and the identification code of the RFID tag 22. The positioning unit 31 is used to obtain the location information of the management device 3. The positioning unit 31 is connected to the communication unit 32 to transmit the location information to the communication unit 32. The host computer 4 is connected to the communication unit 32 to receive the location information and the second feature information uploaded by the communication unit 32 and generate storage information.

[0061] In the mask storage information management system 1 provided in this application embodiment, the management system includes a storage device 2, a management device 3, and a host computer 4. The storage device 2 includes a packing box 21 and an RFID tag 22. The packing box 21 is used to store the mask to provide protection for the mask. The RFID tag 22 is disposed on the wall panel 23 of the packing box 21. The management device 3 includes a positioning unit 31, a communication unit 32, and a read / write unit 33. The read / write unit 33 can write first feature information to the RFID tag 22, and the RFID tag 22 can reliably store the first feature information, reducing the difficulty of information editing and storage. And / or the read / write unit 33 can read the first feature information of the RFID tag 22, so that the first feature can be obtained through the management device 3. The information can clearly identify the target mask inside the packaging box 21 without opening the box for inspection, which helps reduce the difficulty of mask storage management. The positioning unit 31 can obtain the location information of the management device 3, and can easily locate the storage area of ​​the target mask through this location information. The communication unit 32 uploads the location information and the second feature information to the host computer 4. The host computer 4 receives the location information and the second feature information uploaded by the communication unit 32, integrates them and generates storage information, so that the target mask can be easily queried and found through the storage information in the host computer 4. This reduces the difficulty of mask storage management, improves the accuracy of mask storage management, helps the production line to operate efficiently and orderly, and improves the production efficiency of display panels.

[0062] In the production process of display devices, many photomasks are needed to deposit display panels. Different production lines use different photomasks. Therefore, photomasks that are not in use need to be packaged and stored. In related technologies, the method of manually recording and managing the storage information of photomasks through paper records has a high risk of information errors and loss, and the retrieval and inventory of photomasks are difficult.

[0063] The storage device 2 includes a packing box 21, which includes a wall panel 23 and a receiving cavity 24 enclosed by the wall panel 23 for receiving a mask.

[0064] Optionally, one or more masks can be disposed within the receiving cavity 24, which can be designed according to actual conditions. For example, one, two, three, five, etc., masks can be disposed within the receiving cavity 24.

[0065] Optionally, the wall panel 23 may be made of a transparent material to facilitate observation of the mask state inside the packing box 21. For example, the wall panel 23 may be made of polyoxymethylene, polytetrafluoroethylene, or the like.

[0066] Optionally, the shape of the packing box 21 can be designed by the user. For example, the packing box 21 is cube-shaped to match the rectangular mask.

[0067] Optionally, the wall panel 23 may include a first box and a second box, which are fastened together to form a closed receiving cavity 24 inside the packing box 21 to hold the mask. Here, "closed" means covered or closed, and can be sealed or not sealed.

[0068] For example, a seal is provided between the first housing and the second housing to improve the sealing performance of the receiving cavity 24 and reduce the risk of moisture intrusion into the receiving cavity 24 causing photomask corrosion.

[0069] Radio frequency tag 22 is used in radio frequency identification technology, which is a wireless communication technology that can identify specific targets and read and write relevant data through radio signals without the need for mechanical or optical contact between the identification system and the specific target.

[0070] The radio frequency tag 22 typically includes a radio frequency chip 81, a radio frequency antenna 82, and a packaging material. The radio frequency chip 81 is used to store first feature information and the unique electronic code of the radio frequency tag 22. The radio frequency chip 81 communicates with the outside world through the radio frequency antenna 82. The packaging material is used to encapsulate the radio frequency chip 81 and the radio frequency antenna 82. The packaging material can be plastic or ceramic, etc., to improve the structural strength of the radio frequency tag 22 and extend its service life.

[0071] Optionally, the encapsulation material can be a flexible material to allow the RFID tag 22 to be more securely positioned at different locations on the wall panel 23.

[0072] The radio frequency tag 22 is mounted on the wall panel 23 to reduce the interference of the metal mask on the radio frequency tag 22 and facilitate communication between the radio frequency tag 22 and external devices.

[0073] Optionally, the RFID tag 22 and the wall panel 23 are integrally formed. For example, the RFID tag 22 is injection molded into the wall panel 23, and the wall panel 23 provides protection for the RFID tag 22, reducing the risk of the RFID tag 22 being damaged and falling off under external force.

[0074] Optionally, the side of the RFID tag 22 facing away from the wall panel 23 is provided with a wear-resistant layer to reduce the risk of damage to the RFID tag 22 under external force.

[0075] The RFID tag 22 stores first feature information via the RFID chip 81. The first feature information includes the specifications of the target mask within the receiving cavity 24. The specifications may include at least one of the following: size information, weight information, shape features, material, physical properties, and applicable scenarios. The size information may include the length, width, and thickness of the mask; the shape features may include the dimensions of openings or slots on the mask; and the physical properties may include indicators such as hardness, strength, toughness, and corrosion resistance.

[0076] Optionally, the first feature information may also include information such as the production time, usage duration, and storage time of the mask.

[0077] It should be clarified that when the packaging box 21 contains multiple masks, the first feature information should include information about all masks.

[0078] Optionally, considering that the mask is stored in the packaging box 21 for a long time, the RFID tag 22 can be a passive RFID tag 22 to reduce management difficulty.

[0079] The management device 3 includes a read / write unit 33, which can communicate with the RFID tag 22 to write first feature information to the RFID chip 81 or read the first feature information already stored in the RFID chip 81.

[0080] Specifically, the read / write unit 33 sends a request message to the RFID tag 22. The RFID chip 81 receives this request message through the RFID antenna 82. When the RFID chip 81 responds to this request message, the read / write unit 33 can write or read the first feature information into the RFID chip 81. If there are multiple RFID tags 22 within the transmission range of the read / write unit 33, the request message may include an identification code. When the RFID chip 81 receives the request message and the identification code matches the unique identification code of the RFID chip 81, the RFID chip 81 responds to the request message.

[0081] For example, the read / write unit 33 and the RFID tag 22 communicate via ultra-high frequency electromagnetic waves, with a frequency of 840MHz-960MHz, enabling long-distance communication between the read / write unit 33 and the RFID tag 22. For example, the maximum communication distance between the read / write unit 33 and the RFID tag 22 using ultra-high frequency electromagnetic wave communication can be 3-10 meters.

[0082] The management device 3 also includes a communication unit 32, through which the management device 3 is wirelessly or wiredly connected to the host computer 4. For example, the communication unit 32 can be a USB port, an Ethernet port, an optical fiber port, a Bluetooth module, a Wi-Fi module, etc.

[0083] The read / write unit 33 transmits second feature information to the communication unit 32. The second feature information includes the identification code of the radio frequency tag 22 and the specification information of the mask written into the radio frequency tag 22 with the identification code.

[0084] Optionally, the second feature information may include the first feature information to simplify the processing.

[0085] Optionally, the second feature information, in addition to the first feature information, may also include the mask's production time, usage duration, storage time, storage area code, environmental information, etc. The environmental information may include the temperature and humidity information of the surrounding environment when the target mask is placed in the receiving cavity for 24 hours.

[0086] The management device 3 also includes a positioning unit 31, which is used to obtain the current location information of the management device 3 and use the location information to indicate the storage location of the mask.

[0087] For example, when retrieving or inventorying a mask, the location information can be used to reach the target point, and the target packing box 21 can be located and the target mask can be found by connecting the management device 3 and the target RFID tag 22.

[0088] For example, the positioning unit 31 can be a GPS (Global Positioning System) positioning module, an LBS (Location Based Service) positioning module, or a UWB (Ultra-Wideband) positioning module.

[0089] Optionally, when the read / write unit 33 writes the first feature information to the RFID tag 22, the positioning unit 31 obtains the current location information of the management device 3 to improve the reliability of the location information.

[0090] The host computer 4 receives the location information and second feature information uploaded by the communication unit 32 and generates storage information. Users can use the host computer 4 to retrieve the stored information to query and inventory the mask, and can easily find the target mask through the stored information.

[0091] In some alternative embodiments, such as Figures 1 to 3 As shown, the RFID tag 22 and the wall panel 23 are detachably connected.

[0092] In these alternative embodiments, the RFID tag 22 and the wall panel 23 are detachably connected to reduce the difficulty of repairing or replacing the RFID tag 22.

[0093] Relatively speaking, the RFID tag 22 is more easily damaged than the wall panel 23. Therefore, in this embodiment, the RFID tag 22 and the wall panel 23 are detachably connected so that the RFID tag 22 can be easily replaced when it is damaged.

[0094] Optionally, when the packaging box 21 stores a mask and the RFID tag 22 stores the first feature information, after replacing the RFID tag 22, the first feature information should be written into the new RFID tag 22 through the management device 3, and the identification code, second feature information, and current location information of the new RFID tag 22 should be uploaded to the host computer 4 to generate new stored information. The new first feature information can be generated based on the original second feature information stored in the host computer 4, or obtained by opening the packaging box 21 and re-measuring and confirming the mask features.

[0095] For example, the encapsulation layers of the wall panel 23 and the radio frequency tag 22 are respectively formed with a first snap-fit ​​and a second snap-fit, and the first snap-fit ​​and the second snap-fit ​​are detachably snap-fit ​​connected.

[0096] Please see Figure 4 and Figure 5 , Figure 4 This is a schematic diagram of the storage device of the mask storage information management system in another embodiment; Figure 5 yes Figure 4 A magnified structural diagram at point B in the middle.

[0097] In some alternative embodiments, such as Figure 4 and Figure 5 As shown, the packing box 21 is disposed in the storage position along the first direction X, and the wall panel 23 is provided with a limiting cavity 231 with an opening at least one end. The radio frequency tag 22 is detachably disposed in the limiting cavity 231, with the opening facing away from the storage position, or the axis of the opening intersects with a straight line extending along the first direction X.

[0098] In these optional embodiments, the wall panel 23 forms a limiting cavity 231, and the RFID tag 22 is detachably disposed within the limiting cavity 231. The limiting cavity 231 formed by the wall panel 23 can provide good protection for the RFID tag 22, reducing the risk of damage to the RFID tag 22 under external pressure and collision. The detachable placement of the RFID tag 22 within the limiting cavity 231 facilitates the replacement and maintenance of the RFID tag 22. The opening is set away from the storage position, or the axis of the opening intersects with a straight line extending along the first direction X, so as to reduce the probability of the limiting cavity 231 detaching from the limiting cavity 231 under its own gravity.

[0099] Optionally, the specific dimensions of the limiting cavity 231 can be designed by the user, and it should be able to accommodate at least the RFID tag 22.

[0100] Optionally, the limiting cavity 231 includes two openings arranged opposite each other, so that the RFID tag 22 can be inserted into the limiting cavity 231 through one opening and can be removed from the limiting cavity 231 through the other opening under the action of thrust.

[0101] Optionally, the RFID tag 22 is squeezed by the cavity wall of the limiting cavity 231 on both sides in its thickness direction so that the RFID tag 22 can be stably held in the limiting cavity 231.

[0102] Please see Figure 6 and Figure 7 , Figure 6 This is a schematic diagram of the storage device of the mask storage information management system in another embodiment; Figure 7 yes Figure 6 Sectional view at point CC.

[0103] In some alternative embodiments, such as Figure 6 and Figure 7 As shown, the wall panel 23 is provided with a drying chamber 232. A through hole 2321 is provided through the cavity wall of the drying chamber 232. The drying chamber 232 is connected to the receiving cavity 24 through the through hole 2321. The drying chamber 232 is used to contain desiccant. The radio frequency tag 22 is disposed in the drying chamber 232.

[0104] In these optional embodiments, the wall panel 23 is provided with a drying cavity 232 for containing desiccant. The drying cavity 232 is connected to the receiving cavity 24 through a connecting hole 2321, so that the desiccant in the drying cavity 232 can absorb the moisture in the receiving cavity 24, reducing the probability of the mask in the receiving cavity 24 being corroded by moisture. The RFID tag 22 is disposed in the drying cavity 232 to make full use of the space of the packing box 21. The drying cavity 232 provides protection for the RFID tag 22, reducing the risk of damage to the RFID tag 22 under external force and reducing the risk of the RFID tag 22 falling off and being lost.

[0105] Optionally, the specific size and shape of the drying chamber 232 can be designed by the user, at least ensuring that the drying chamber 232 will not interfere with the mask plate in the receiving chamber 24.

[0106] Optionally, the wall panel 23 may be provided with one or more drying chambers 232, and the RFID tag 22 may be disposed in only one of the drying chambers 232.

[0107] Optionally, the desiccant may be one or more of the following: molecular sieve, calcium oxide, silica gel, alumina, anhydrous copper sulfate, and magnesium chloride.

[0108] Optionally, the RFID tag 22 can be adhered to or snapped onto the inner wall of the drying chamber 232.

[0109] In some alternative embodiments, such as Figure 6 and Figure 7As shown, the wall panel 23 includes a first wall portion 234 and a second wall portion 233. The receiving cavity 24 is enclosed by the first wall portion 234. The first wall portion 234 is provided with a groove. The second wall portion 233 covers the groove opening to form a drying cavity 232. The first wall portion 234 and the second wall portion 233 are detachably connected. The radio frequency tag 22 is disposed on the second wall portion 233.

[0110] In these alternative embodiments, the first wall portion 234 is provided with a groove, and the second wall portion 233 covers the groove opening to form a drying chamber 232. The first wall portion 234 and the second wall portion 233 are detachably connected to facilitate the replacement of the desiccant in the drying chamber 232, reduce the probability of the mask in the receiving cavity 24 being corroded by moisture, and place the radio frequency tag 22 on the second wall portion 233 so that the radio frequency tag 22 can be easily repaired and replaced when the first wall portion 234 and the second wall portion 233 are separated.

[0111] Optionally, a sealing element is provided between the second wall portion 233 and the first wall portion 234 to improve the sealing performance of the drying chamber 232. The sealing element can be a sealing ring or a sealing strip, etc.

[0112] Optionally, the first wall portion 234 and the second wall portion 233 are snap-fitted together.

[0113] Optionally, the RFID tag 22 is attached to the side surface of the second wall portion 233 facing the drying chamber 232 to facilitate removing the RFID tag 22 from the drying chamber 232 when the second wall portion 233 is removed from the first wall portion 234.

[0114] Optionally, the second wall portion 233 includes a free end and a connecting end disposed opposite to each other. The connecting end is rotatably hinged to the first wall portion 234, and the free end is snap-fitted to the first wall portion 234. A limiting groove is provided on the surface of the free end, and the RFID tag 22 is disposed in the limiting groove. When the second wall portion 233 covers the opening of the groove, the opening of the limiting groove is blocked by the second wall portion 233, reducing the risk of the RFID tag 22 falling off. At this time, the connecting end and the first wall portion 234 are detachably rotatably hinged together.

[0115] Please see Figure 8 , Figure 8 This is a schematic diagram of the structure of an RFID tag in a mask storage information management system in one embodiment.

[0116] In some alternative embodiments, such as Figure 3 and Figure 8 As shown, the radio frequency tag 22 includes a substrate 221 and an adhesive layer 222 stacked together. The substrate 221 is used to store feature information, and the substrate 221 is bonded to the wall panel 23 through the adhesive layer 222.

[0117] In these alternative embodiments, the RFID tag 22 is bonded to the wall panel 23 by an adhesive layer 222, thereby reducing the difficulty of repairing and replacing the RFID tag 22, and reducing the processing difficulty and processing cost of the RFID tag 22.

[0118] Optionally, the adhesive layer 222 may be an insulating adhesive layer or double-sided adhesive, etc.

[0119] Optionally, the adhesive layer 222 is disposed on the edge of the substrate 221 to increase the difficulty of peeling between the substrate 221 and the wall panel 23 and improve the stability of the radio frequency tag 22.

[0120] In some alternative embodiments, such as Figure 3 and Figure 8 As shown, the radio frequency tag 22 also includes a shielding layer 223, which is disposed between the substrate 221 and the adhesive layer 222.

[0121] In these alternative embodiments, a shielding layer 223 is provided between the substrate 221 and the adhesive layer 222 to optimize the electromagnetic wave propagation characteristics, thereby improving the communication distance and communication reliability between the RFID tag 22 and the read / write unit 33.

[0122] The shielding layer 223 disposed between the adhesive layer 222 and the substrate 221 can focus electromagnetic wave signals and improve the signal strength of the effective radiation area.

[0123] Optionally, the shielding layer 223 is made of metal, so that the shielding layer 223 can optimize the electromagnetic wave propagation characteristics while improving the structural strength of the RFID tag 22. Exemplary shielding layers 223 are made of copper or aluminum, etc.

[0124] Optionally, the shielding layer 223 and the adhesive layer 222 can be integrated together. For example, copper foil tape or aluminum foil tape can be used instead of the shielding layer 223 and the adhesive layer 222.

[0125] Please see Figure 9 and Figure 10 , Figure 9 This is a schematic diagram of the storage device of the mask storage information management system in another embodiment; Figure 10 yes Figure 9 Sectional view at point DD.

[0126] In some alternative embodiments, such as Figure 9 and Figure 10As shown, the wall panel 23 includes a bottom wall 71, an end wall 72, and a side wall 73. The bottom wall 71 and the end wall 72 are arranged opposite each other along the first direction X. The side wall 73 is connected to the bottom wall 71 and the end wall 72. The packing box 21 is set in the storage position through the bottom wall 71. The side wall 73 includes a first side wall 731 and a second side wall 732 that are connected to each other. The two first side walls 731 are arranged opposite each other along the third direction Z. The two second side walls 732 are arranged opposite each other along the second direction Y. The area of ​​the first side wall 731 is larger than that of the second side wall 732. The radio frequency tag 22 is set on the first side wall 731. The first direction X, the second direction Y, and the third direction Z intersect each other.

[0127] In these optional embodiments, the wall panel 23 includes a bottom wall 71, an end wall 72, and a side wall 73. The packing box 21 is disposed in the storage position through the bottom wall 71. The area of ​​the first side wall 731 is larger than that of the second side wall 732. By placing the RFID tag 22 at the first side wall 731 with the largest area, it is intended to have a larger operating space and reduce the difficulty of combining the RFID tag 22 and the packing box 21.

[0128] Optionally, the radio frequency tag 22 is disposed on the inner surface of the first sidewall 731 to reduce the risk of the first sidewall 731 falling off and being damaged under external force.

[0129] In some alternative embodiments, such as Figure 9 and Figure 10 As shown, the first sidewall 731 includes a first part 733 and a second part 734 that are connected to each other. The orthographic projection of the first part 733 in its thickness direction can cover the mask in the receiving cavity 24, and the radio frequency tag 22 is disposed in the second part 734.

[0130] In these alternative embodiments, the first sidewall 731 includes a first portion 733 and a second portion 734 that are interconnected. The first portion 733, when projected in its thickness direction, can cover the mask inside the receiving cavity 24. The radio frequency tag 22 is disposed in the second portion 734 to reduce the shielding effect of the radio frequency tag 22 on the mask inside the packing box 21. This facilitates observation of the mask stored in the receiving cavity 24 from the outside and reduces the shielding effect of the metal mask on the radio frequency tag 22.

[0131] Optionally, the specific shape and size of the first part 733 and the second part 734 can be designed by oneself. For example, the shape of the first part 733 matches the mask. If the mask is rectangular, then the first part 733 is rectangular.

[0132] Please see Figure 11 , Figure 11 This is a schematic diagram of the storage device of the mask storage information management system in another embodiment.

[0133] In some alternative embodiments, such as Figure 3 and Figure 11 As shown, the wall panel 23 includes a bottom wall 71, an end wall 72 and a side wall 73. The bottom wall 71 and the end wall 72 are arranged opposite each other along the first direction X. The side wall 73 is connected to the bottom wall 71 and the end wall 72. The packing box 21 is set in the storage position through the bottom wall 71, and the radio frequency tag 22 is set on the end wall 72.

[0134] In these alternative embodiments, the wall panel 23 includes a bottom wall 71 and an end wall 72 disposed opposite each other along the first direction X. The packing box 21 is disposed in the storage location via the bottom wall 71. By disposing of the RFID tag 22 on the end wall 72, the shielding effect of the metal mask on the signal can be reduced, thereby improving the communication reliability and communication distance of the RFID tag 22 and the management device 3.

[0135] Comparatively, placing the RFID tag 22 at the end reduces the probability of the end face being scratched by external forces during both mask storage and transportation processes, lowers the risk of the RFID tag 22 falling off and breaking, and extends its service life.

[0136] Optionally, the encapsulation layer of the RFID tag 22 is made of a flexible material to more easily conform to curved or uneven surfaces.

[0137] Optionally, the bottom wall 71 is provided with casters to facilitate the movement of the packing box 21.

[0138] Please see Figure 12 , Figure 12 This is a schematic diagram of the structure of an RFID tag in a mask storage information management system in one embodiment.

[0139] In some alternative embodiments, such as Figure 1 and Figure 12 As shown, the radio frequency tag 22 includes an RF chip 81, an RF antenna 82, and a light-emitting diode 83 connected to each other. The RF chip 81 is used to store first feature information. The RF antenna 82 and the light-emitting diode 83 are connected. The RF antenna 82 is used to generate an induced current to power the light-emitting diode 83.

[0140] In these optional embodiments, the RFID tag 22 includes an interconnected RFID chip 81, an RFID antenna 82, and a light-emitting diode 83. The RFID antenna 82 and the light-emitting diode 83 are connected, and the induced current generated by the RFID antenna 82 powers the light-emitting diode 83, causing the light-emitting diode 83 to emit light. This can not only facilitate the verification of whether the RFID chip 81 can work properly, but also reduce the difficulty of finding the packing box 21 corresponding to the target RFID tag 22.

[0141] Specifically, the radio frequency antenna 82 is located within the magnetic field of the management device 3, and the coil of the radio frequency antenna 82 can generate an induced current to light up the light-emitting diode 83. That is, when the light-emitting diode 83 can light up, it can at least be said that the radio frequency antenna 82 is in normal condition and there is no damage or breakage.

[0142] Specifically, when the device arrives at the target location based on location information, multiple packing boxes 21 can be set up near the management device 3. At this time, the target RFID tag 22 can be searched around the target location based on the communication range of the management device 3, thereby finding the target packing box 21. Alternatively, according to this embodiment, when the management device 3 is at the target location, the RFID antenna 82 of the RFID tag 22 in the nearby communication range generates an induced current to light up the LED 83, so that the user can easily determine the search range and reduce the difficulty of finding the target packing box 21.

[0143] Optionally, the RFID tag 22 may also include a buzzer electrically connected to the RFID antenna 82, wherein the induced current of the RFID antenna 82 powers the buzzer so that the buzzer can be used to alert the user in a bright environment when the diode light is not obvious.

[0144] Optionally, the light-emitting diode 83 can be a colored light-emitting diode 83 to make it more visible in bright environments.

[0145] In some alternative embodiments, such as Figure 1 and Figure 12 As shown, the radio frequency chip 81 receives the communication request from the read / write unit 33 through the radio frequency antenna 82. The communication request includes the identification code of the target radio frequency tag 22. The radio frequency chip 81 of the target radio frequency tag 22 is used to close the loop between the light-emitting diode 83 and the radio frequency antenna 82 when responding to the communication request.

[0146] In these optional embodiments, the RF chip 81 receives a communication request from the read / write unit 33 via the RF antenna 82. The communication request includes the identification code of the target RF tag 22. The RF chip 81 of the target RF tag 22 is used to close the circuit between the light-emitting diode 83 and the RF antenna 82 when responding to the communication request, so as to light up the light-emitting diode 83. This facilitates the management device 3 in finding the target RF tag 22 and the target packing box 21 when it is in the target location, thereby improving the reliability of the mask storage management system.

[0147] Based on the target location information and the identification code of the target RFID tag 22 in the stored information, when the management device 3 is at the target location, it sends a communication request with the identification code of the target RFID tag 22 to the surrounding RFID tags 22. The unique identification code of the target RFID tag 22 corresponds to the identification code in the communication request. In response to the communication request, the target RFID tag 22 closes the circuit between the light-emitting diode 83 and the radio frequency antenna 82. The induced current generated by the radio frequency antenna 82 lights up the light-emitting diode 83 to indicate the position of the target packing box 21.

[0148] Please see Figure 13 , Figure 13 This is a schematic diagram of the structure of the mask storage information management system in another embodiment.

[0149] In some alternative embodiments, such as Figure 13 As shown, the storage device 2 is housed in the storage area 6, the management device 3 is in the storage area 6 and is communicatively connected to the RFID tag 22, and the system also includes a positioning mechanism 5, which is disposed in the storage area 6. The positioning unit 31 is communicatively connected to at least three non-collinear positioning mechanisms 5, and the positioning unit 31 is used to obtain location information based on the positioning mechanisms 5.

[0150] In these optional embodiments, a positioning mechanism 5 is provided in the storage area 6. At least three non-collinear positioning mechanisms 5 are communicatively connected to the positioning unit 31. Through the three-point positioning principle, the positioning unit 31 can obtain accurate position information based on the positioning mechanism 5, thereby improving the accuracy of the mask storage management system.

[0151] For example, storage area 6 can be a warehouse or factory, etc., for storing packing boxes 21.

[0152] For example, the positioning unit 31 can acquire location information based on UWB technology. Three non-collinear positioning mechanisms 5 are arranged in the storage area 6. The positioning unit 31 transmits pulse signals to the three positioning mechanisms 5. After receiving the pulse signals, the three positioning mechanisms 5 measure intermediate information such as the arrival time, time difference of arrival, or angle of arrival. The positioning mechanisms 5 feed back the intermediate information to the control system. The control system obtains the location information based on the positions of the three positioning mechanisms 5 and the intermediate information. The control system can be integrated into the positioning unit 31 of the management device 3.

[0153] Optionally, the location information may include the location coordinates of storage area 6.

[0154] Optionally, at least three non-collinear positioning mechanisms 5 are located at the edge of the storage area 6.

[0155] Please see Figure 14 , Figure 14This is a flowchart of a mask storage information management method in one embodiment.

[0156] like Figure 13 and Figure 14 As shown, an embodiment of the second aspect of this application also provides a mask storage information management method, applied to the mask storage information management system 1 of the first aspect embodiment described above. The management method includes:

[0157] S1: The target mask is accommodated in the receiving cavity 24 of the packing box 21;

[0158] S2: Instruct the read / write unit 33 to write the first feature information into the radio frequency tag 22 and input the second feature information into the communication unit 32;

[0159] S3: Instruct the positioning unit 31 to obtain the current location information of the management device 3, and input the location information into the communication unit 32;

[0160] S4: Instruct the communication unit 32 to upload the location information and the second feature information to the host computer 4;

[0161] S5: Instruct the host computer 4 to receive the location information and the second feature information and generate storage information.

[0162] In the mask storage information management method provided in this application embodiment, the target mask is housed in the receiving cavity 24 of the packaging box 21. The first feature information is written to the RFID tag 22 by the read / write unit 33, reducing the difficulty of editing and storing the first feature information. The second feature information is input into the communication unit 32. The current location information of the management device 3 is obtained by the positioning unit 31 to facilitate the location of the target mask. The location information is also input into the communication unit 32. The communication unit 32 uploads the location information and the second feature information to the host computer 4. The host computer 4 receives the location information and the second feature information and generates storage information. The target mask can be easily queried and found through the storage information in the host computer 4, thereby reducing the difficulty of mask storage management, improving the accuracy of mask storage management, helping the production line to operate efficiently and orderly, and improving the production efficiency of the display panel.

[0163] Optionally, in step S2, the first feature information is included in the second feature information. When the read / write unit 33 writes the first feature information to the RFID tag 22, the second feature information is synchronously transmitted to the communication unit 32 to improve the processing speed of the management device 3.

[0164] Optionally, in step S3, when the read / write unit 33 writes the first feature information to the RFID tag 22, the location information is simultaneously transmitted to the communication unit 32 to improve the processing speed of the management device 3.

[0165] Please see Figure 15 , Figure 15This is a flowchart of a mask storage information management method in another embodiment.

[0166] In some alternative embodiments, such as Figure 13 and Figure 15 As shown, after step S5,

[0167] S6: Obtain target location information and target second feature information based on the target storage information stored in the host computer 4;

[0168] S7: Move the management device 3 to the corresponding target location based on the target location information;

[0169] S8: Instruct the management device 3 to locate the target RFID tag 22 at the target location based on the identification code in the second feature information of the target, and read the first feature information within the target RFID tag 22;

[0170] S9: Determine whether the first feature information and the second feature information of the target match. If they match, determine that the mask in the packaging box 21 with the target RFID tag 22 is the target mask. If they do not match, determine that the target storage information is incorrect.

[0171] In these optional embodiments, the target storage information based on the host computer 4 can easily find the required mask through the second feature information of the target. The target location information can easily determine the storage location of the target mask, reducing the difficulty of mask storage management. After the management device 3 moves to the corresponding target location based on the target location information, the management device 3 determines the target RFID tag 22 based on the identification code in the second feature information of the target and reads the first feature information in the target RFID tag 22. The first feature information and the second feature information are compared to improve the accuracy of mask storage management. If the first feature information and the target second feature information do not match, error information is uploaded. If they match, it is determined that the mask in the packaging box 21 with the target RFID tag 22 is the target mask, thereby reducing the probability of the production line being adversely affected by the incorrect use of the mask and helping to improve the production efficiency of the display panel.

[0172] For example, in step S6, the user finds the target storage information corresponding to the target mask based on the mask specification information stored in the storage information, and obtains the target position information and the corresponding target second feature information of the target mask through the target storage information.

[0173] Optionally, in step S9, if the first feature information and the second feature information match, it means that the information in the same part of the first feature information and the second feature information is the same. For example, if the mask specification information stored in the first feature information and the second feature information is the same, then the first feature information and the second feature information are considered to match.

[0174] Optionally, in step S9, if the first feature information and the second feature information match, it is considered that the target mask is stored in the packaging box 21 with the target RFID tag 22; if the first feature information and the second feature information do not match, it is determined that the target storage information is incorrect, and the error information is transmitted to the host computer 4.

[0175] Although this application has been described with reference to preferred embodiments, various modifications can be made thereto and components can be replaced with equivalents without departing from the scope of this application. In particular, the technical features mentioned in the various embodiments can be combined in any manner, provided there is no structural conflict. This application is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A mask storage information management system, characterized in that, The management system is used to manage stored photomasks used for vapor deposition of display panels, and the management system includes: A storage device includes a packing box and an RFID tag. The packing box includes a wall panel and a receiving cavity enclosed by the wall panel. The receiving cavity is used to receive the mask. The RFID tag is disposed on the wall panel and is used to store first feature information, which includes the specification information of the target mask in the receiving cavity. The management device includes a positioning unit, a communication unit, and a read / write unit. The read / write unit is used to communicate with the RFID tag to write first feature information to the RFID tag and / or read the first feature information of the RFID tag. The read / write unit is connected to the communication unit to transmit second feature information to the communication unit. The second feature information includes the specification information of the target mask and the identification code of the RFID tag. The positioning unit is used to obtain the location information of the management device. The positioning unit is connected to the communication unit to transmit the location information to the communication unit. The host computer is connected to the communication unit. The host computer receives the location information and the second feature information uploaded by the communication unit and generates the storage information.

2. The mask storage information management system according to claim 1, characterized in that, The RFID tag and the wall panel are detachably connected; Preferably, the packing box is disposed at the storage location along the first direction, the wall panel is provided with a limiting cavity with an opening at at least one end, the RFID tag is detachably disposed in the limiting cavity, the opening is disposed away from the storage location, or the axis of the opening intersects with a straight line extending along the first direction.

3. The mask storage information management system according to claim 2, characterized in that, The wall panel is provided with a drying chamber, and the wall of the drying chamber is provided with a through hole. The drying chamber is connected to the receiving chamber through the through hole. The drying chamber is used to contain desiccant, and the radio frequency tag is placed in the drying chamber. Preferably, the wall panel includes a first wall portion and a second wall portion, the receiving cavity is enclosed by the first wall portion, the first wall portion is provided with a groove, the second wall portion covers the groove opening to form the drying cavity, the first wall portion and the second wall portion are detachably connected, and the radio frequency tag is disposed on the second wall portion.

4. The mask storage information management system according to claim 2, characterized in that, The radio frequency tag includes a substrate and an adhesive layer stacked together. The substrate is used to store feature information, and the substrate is adhered to the wall panel through the adhesive layer. Preferably, the RFID tag further includes a shielding layer disposed between the substrate and the adhesive layer.

5. The mask storage information management system according to any one of claims 1 to 4, characterized in that, The wall panel includes a bottom wall, an end wall, and side walls. The packing box is positioned in the storage location via the bottom wall. The bottom wall and the end wall are arranged opposite each other along a first direction. The side walls are connected to the bottom wall and the end wall. Each side wall includes interconnected first and second side walls. The two first side walls are arranged opposite each other along a third direction, and the two second side walls are arranged opposite each other along a second direction. The area of ​​the first sidewall is larger than that of the second sidewall, the RFID tag is disposed on the first sidewall, and the first direction, the second direction and the third direction intersect each other; Preferably, the first sidewall includes a first part and a second part that are connected to each other, wherein the orthographic projection of the first part in its thickness direction can cover the mask in the receiving cavity, and the radio frequency tag is disposed in the second part.

6. The mask storage information management system according to any one of claims 1 to 4, characterized in that, The wall panel includes a bottom wall, an end wall, and a side wall. The bottom wall and the end wall are arranged opposite each other along a first direction. The side wall is connected to the bottom wall and the end wall. The packing box is disposed in the storage position through the bottom wall, and the radio frequency tag is disposed on the end wall.

7. The mask storage information management system according to claim 1, characterized in that, The RFID tag includes an interconnected RFID chip, an RFID antenna, and a light-emitting diode. The RFID chip is used to store the first feature information. The RFID antenna and the light-emitting diode are connected. The RFID antenna is used to generate an induced current to power the light-emitting diode. Preferably, the radio frequency chip receives a communication request from the read / write unit via the radio frequency antenna. The communication request includes the identification code of the target radio frequency tag. The radio frequency chip of the target radio frequency tag is used to close the loop between the light-emitting diode and the radio frequency antenna when responding to the communication request.

8. The mask storage information management system according to claim 1, characterized in that, The storage device is housed in a storage area, and the management device is communicatively connected between the storage area and the RFID tag. The system further includes a positioning mechanism disposed in the storage area. The positioning unit is communicatively connected to at least three non-collinear positioning mechanisms. The positioning unit is used to obtain the location information based on the positioning mechanisms.

9. A method for managing information stored in a photomask, characterized in that, The mask storage information management system according to any one of claims 1-8, wherein the management method comprises: The target mask is accommodated within the receiving cavity of the packing box; The read / write unit writes the first feature information into the RFID tag and inputs the second feature information into the communication unit; The positioning unit acquires the current location information of the management device and inputs the location information into the communication unit; The communication unit is instructed to upload the location information and the second feature information to the host computer. The host computer receives the location information and the second feature information and generates the stored information.

10. The mask storage information management method according to claim 9, characterized in that, After the host computer stores the stored information Based on the target storage information stored in the host computer, obtain the target location information and the target second feature information; Based on the target location information, the management device is moved to the corresponding target location; The management device is instructed to locate the target RFID tag at the target location based on the identification code in the second feature information of the target, and to read the first feature information within the target RFID tag; Determine whether the first feature information and the second feature information of the target match. If they match, determine that the mask in the packaging box with the target RFID tag is the target mask. If they do not match, determine that the target storage information is incorrect.

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