A visual inspection system for die bonding

Abstract

The application discloses a kind of visual inspection systems for chip bonding, belong to chip manufacturing technical field, including the camera body for gathering bonding information, and for fixed mounting camera body's installation base frame, the camera body periphery is provided with for its outer surface and lens are cleaned cleaning mechanism, cleaning mechanism is controlled by hydraulic cylinder and reciprocates along camera body axis up and down as a whole, and hydraulic cylinder is fixedly installed on installation base frame;The cleaning mechanism includes fixed mounting on the output end of hydraulic cylinder support plate, and the movable port is opened on the support plate, and the frame body is slidably embedded in movable port, and the frame body is fixedly installed on installation base frame;The application is by the rotary sweeping motion of air head and lifting motion compound, so that cooling airflow covers the whole area of camera lens and outer surface in dynamic sweeping mode, same set of air path structure simultaneously completes two functions of dust removal and heat removal, without setting independent device for cleaning and heat dissipation respectively, structure is simple and efficient.

Description

Technical Field

[0001] This invention relates to the field of chip manufacturing technology, specifically to a visual inspection system for chip bonding. Background Technology

[0002] In chip bonding processes, vision inspection systems use cameras to capture image information of the bonding area to guide the bonding head for high-precision alignment and to monitor bonding quality in real time. During the bonding process, the bonding stage is typically heated to a high temperature of 150°C to 300°C. The camera lens is exposed to this high temperature environment for extended periods. Additionally, dust and volatile substances generated during the bonding process can easily adhere to the lens surface, leading to a decrease in image clarity and directly affecting alignment accuracy and inspection reliability. Therefore, appropriate cleaning and heat dissipation devices need to be installed in the bonding equipment to ensure the long-term stable operation of the vision inspection system.

[0003] In the existing technology, a variety of solutions have been proposed for the cleaning and heat dissipation of camera lenses. In terms of cleaning, some solutions use manual periodic wiping to clean the lens surface, but manual operation cannot achieve real-time online cleaning, and the wiping process is prone to scratching the optical coating. Some solutions set up an independent air blowing device, which blows compressed air onto the lens surface to remove the attached dust. In terms of heat dissipation, existing solutions mostly use methods such as setting heat sinks, fans or independent cooling pipes on the camera housing to cool the camera body through passive convection or active air cooling. The above-mentioned cleaning devices and heat dissipation devices are physically independent of each other, and each requires independent installation positions, fixing structures and air / circuit control.

[0004] The aforementioned existing technology still has the following drawbacks: the cleaning device and the heat dissipation device adopt two independent structures to realize their respective functions. The two are spatially separated and do not communicate with each other in the air path. This not only occupies the already compact installation space inside the bonding equipment and increases the difficulty of the overall layout, but also a single airflow can only achieve purging and cleaning or only achieve heat dissipation and cooling. It cannot simultaneously achieve both cleaning and heat dissipation functions in the same airflow, resulting in low functional integration and high device redundancy. Summary of the Invention

[0005] The purpose of this invention is to provide a visual inspection system for chip bonding, so as to solve the problem that the existing bonding inspection system cannot take into account both cleaning and heat dissipation, resulting in low functional integration and high device redundancy.

[0006] The technical problem to be solved by the present invention can be achieved by the following technical solution: including a camera body for collecting bonding information, and a mounting base for fixing the camera body, wherein a cleaning mechanism for cleaning its outer surface and lens is provided around the camera body, and the cleaning mechanism is controlled by a hydraulic cylinder to move up and down along the axis of the camera body, and the hydraulic cylinder is fixedly mounted on the mounting base. The cleaning mechanism includes a support plate fixedly installed on the output end of a hydraulic cylinder. The support plate has a movable opening, and a frame is slidably embedded in the movable opening. The frame is fixedly installed on a mounting base. An installation ring is integrally fixedly connected to one end of the support plate near the camera body. An outer support ring is rotatably installed inside the installation ring. Connecting rings are symmetrically fixedly connected to the inner wall of the outer support ring. A rotating ring is rotatably installed inside the connecting ring through two sets of upper and lower sealed bearings. The upper and lower rotating rings are fixedly connected by the ring body. Several air heads are equidistantly arranged on the inner wall of the rotating ring. The tilt of the air heads is adjusted by a connecting piece. The outer support ring is controlled to rotate by a primary drive component. The connecting piece as a whole is controlled to rotate by a secondary drive component. The inner wall of the connecting ring and the outer wall of the rotating ring are provided with connecting holes in the areas within the two sets of sealed bearings. The outer walls of the upper and lower connecting rings are respectively connected to connector one and connector two. Connector one and connector two extend to the outside of the mounting ring. Connector one and connector two are supplied with gas through a gas supply mechanism, which is set at any position in the bonding system.

[0007] Preferably, the connector includes a ball head seat two hinged to the inner wall of the rotating ring, a straight tube fixedly extending outward from the ball head seat two, an air head fixedly connected to the outer end of the straight tube, the ball head seat two, the straight tube and the air head being internally connected, a ball head seat one slidably sleeved around the straight tube, and a ball joint seat hinged around the ball head seat one.

[0008] Preferably, the primary drive component includes a bevel gear ring fixedly connected to the lower side of the lower rotating ring, a bevel gear ring meshing with the outer periphery of the bevel gear ring, the bevel gear ring being rotatably mounted on the lower side of the support plate via a pivot pin, a rotating gear being fixedly connected to the outer end of the pivot pin connected to the bevel gear ring, a gear rail being fixedly connected to one side wall of the frame, and the rotating gear meshing with the gear rail.

[0009] Preferably, the secondary drive component includes an adjusting cylinder rotatably mounted on the upper end of the outer support ring with its vertical ring wall positioned at the ball joint seat. The adjusting cylinder has wave grooves corresponding to the upper and lower rotating rings, and the ball joint seat is slidably connected in the wave grooves. The interior of the adjusting cylinder is also fixedly connected by several connecting frames. A second bevel gear ring is fixedly connected to the upper end of the adjusting cylinder. A second bevel gear is meshed with the outer end of the second bevel gear ring. The second bevel gear is rotatably mounted on the support plate via a pivot pin. A friction roller is fixedly connected to the outer end of the pivot pin connected to the second bevel gear. A clamping component is provided inside the frame to stop the rotation of the friction roller at a designated position.

[0010] Preferably, the clamping component includes electric push rods symmetrically fixedly connected to the vertical walls on both sides of the frame. The output end of the electric push rod slides through the vertical wall of the frame and is fixedly connected to a bracket. A slide rod is fixedly connected inside the bracket. A slide seat is slidably connected to the slide rod. A friction plate is fixedly connected to the side of the slide seat near the central axis of the friction roller. A return spring is also sleeved on the slide rod, and the return spring is located on the side away from the friction roller.

[0011] Preferably, the spacing between the upper and lower abutment members is consistent with the length of the camera body that needs to be cleaned. Preferably, the gas delivery mechanism includes a pump, a heat exchanger for air cooling and heating, a filter for filtering and recovering dust from the gas, and a converter for changing the gas path. The pump's input end is connected to a negative pressure output pipe, the pump's output end is connected to a positive pressure output pipe, the filter is connected to the negative pressure output pipe, and the heat exchanger is connected to both the positive and negative output pipes.

[0012] Preferably, the heat exchanger is a semiconductor refrigerator.

[0013] Preferably, the filter element is a filter tube filled with multi-stage filter media. The multi-stage filter media are arranged in sequence according to the gas flow direction as coarse-pore filter paper, polytetrafluoroethylene membrane filter element and electrostatic adsorption plate. The filter tube is provided with a detachable structure for replacing the multi-stage filter media.

[0014] Preferably, the conversion component includes a housing, the interior of which is divided into four cavities by a cross-shaped partition. Each cavity is connected to an external pipe. Any two symmetrically distributed external pipes are connected to a negative pressure output pipe and a positive pressure output pipe, respectively. The remaining two external pipes are connected to connector one and connector two, respectively. A core cylinder is integrally fixedly connected to the center of the partition. A rotating core is rotatably installed inside the core cylinder. The core cylinder wall has four sets of symmetrically distributed air holes corresponding to the four cavities. The rotating core has an L-shaped upper channel and a lower channel corresponding to the upper and lower air holes. The upper and lower channels are also centrally symmetrical about the central axis of the rotating core. The rotating core is controlled to rotate by a drive component.

[0015] Compared with the prior art, the beneficial effects of this application are as follows: 1. This invention combines the rotational sweeping motion of the air head with the lifting motion, so that the cooling airflow covers the entire area of ​​the camera lens and outer surface in a dynamic sweeping manner. The same air path structure can simultaneously complete the two functions of dust removal and heat removal, without the need to set up separate devices for cleaning and heat dissipation. The structure is simple and efficient.

[0016] 2. In this invention, the primary drive component utilizes the relative motion between the support plate and the frame during the lifting process to convert linear motion into rotational motion of the ring through gear and toothed rail meshing. The circumferential sweeping power of the air head comes entirely from the lifting motion itself, eliminating the need for a separate motor drive. This simplifies the transmission structure, reduces costs and energy consumption, and is particularly suitable for the compact installation space of bonding equipment.

[0017] 3. In this invention, the cleaning mechanism is set around the camera body, and the air head is distributed on the radial outside of the lens. The cleaning action is always completed outside the imaging field of view, so it will not block or interfere with the image information of the bonding area acquired by the camera. At the same time, a non-contact pneumatic blowing method is adopted to avoid physical contact damage to the optical mirror. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall three-dimensional structure of the present invention; Figure 2 This is a three-dimensional connection structure diagram of the support plate, frame and clamping parts of the present invention; Figure 3 This is a cross-sectional structural schematic diagram of the cleaning mechanism of the present invention; Figure 4 This is the present invention. Figure 3 Enlarged structural diagram of region A in the middle; Figure 5 This is a front view structural diagram of the support plate, frame, and clamping parts of the present invention; Figure 6 This is a three-dimensional structural schematic diagram of the regulating cylinder of the present invention; Figure 7 This is a schematic diagram of the distribution structure of the gas delivery mechanism of the present invention; Figure 8 This is a three-dimensional sectional disassembly diagram of the conversion component of the present invention; Figure 9 This is a cross-sectional structural diagram of the rotating core of the present invention.

[0019] Explanation of reference numerals in the attached figures: 1. Mounting base; 2. Camera body; 3. Cleaning mechanism; 31. Primary drive component; 311. Gear rail; 312. Rotating gear; 313. Bevel gear ring one; 314. Bevel gear one; 32. Secondary drive component; 321. Friction roller; 322. Bevel gear two; 323. Bevel gear ring two; 324. Adjusting cylinder; 325. Wave groove; 326. Connecting frame; 33. Clamping component; 331. Return spring; 332. Bracket; 333. Slide seat; 334. Slide rod; 335. Friction plate; 336. Electric push rod; 34. Frame; 35. Connecting ring; 36. Rotating ring; 37. 38. Outer support ring; 39. Air head; 30. Connector; 31. Ball head seat one; 392. Straight pipe; 393. Ball joint seat; 394. Ball head seat two; 4. Hydraulic cylinder; 5. Support plate; 51. Mounting ring; 6. Connector one; 7. Connector two; 8. Air delivery mechanism; 81. Pump; 82. Positive pressure output pipe; 83. Heat exchanger; 84. Negative pressure output pipe; 85. Filter; 86. Drive component; 87. Converter; 871. Outer pipe; 872. Outer shell; 873. Air vent; 874. Core cylinder; 875. Spacer; 876. Upper channel; 877. Rotating core; 878. Lower channel. Detailed Implementation

[0020] The specific embodiments of the present invention will be described in detail below, but it should be understood that the scope of protection of the present invention is not limited to the specific embodiments.

[0021] Example 1 In the existing technology, the cleaning device and the heat dissipation device adopt two independent structures to realize their respective functions. The two are spatially separated and do not communicate with each other in the air path. This not only occupies the already compact installation space inside the bonding equipment and increases the difficulty of the overall layout, but also a single airflow can only achieve purging and cleaning or only achieve heat dissipation and cooling. It is impossible to simultaneously achieve both cleaning and heat dissipation functions in the same airflow, resulting in low functional integration and high device redundancy.

[0022] like Figures 1 to 9 To address the aforementioned issues, this embodiment includes a camera body 2 for acquiring bonding information and a mounting base 1 for fixing the camera body 2. The camera body 2 is surrounded by a cleaning mechanism 3 for cleaning its outer surface and lens. The cleaning mechanism 3 is controlled by a hydraulic cylinder 4 to move up and down along the axis of the camera body 2. The hydraulic cylinder 4 is fixedly mounted on the mounting base 1.

[0023] The cleaning mechanism 3 includes a support plate 5 fixedly installed on the output end of the hydraulic cylinder 4. The support plate 5 has an opening, and a frame 34 is slidably embedded in the opening. The frame 34 is fixedly installed on the mounting base 1. An installation ring 51 is integrally fixedly connected to one end of the support plate 5 near the camera body 2. An outer support ring 37 is rotatably installed inside the installation ring 51. A connecting ring 35 is symmetrically fixedly connected to the inner wall of the outer support ring 37. A rotating ring 36 is rotatably installed inside the connecting ring 35 through two sets of upper and lower sealed bearings. The upper and lower rotating rings 36 are fixedly connected by the ring body. Several air heads 38 are equidistantly arranged on the inner circumference of the rotating ring 36. The air heads 38 are adjusted in tilt by the connecting piece 39. The outer support ring 37 is controlled to rotate by the first-level drive component 31. The connecting piece 39 is controlled to rotate by the second-level drive component 32.

[0024] The inner wall of the connecting ring 35 and the outer wall of the rotating ring 36 are provided with connecting holes in the areas within the two sets of sealed bearings. The outer walls of the upper and lower connecting rings 35 are respectively connected to connector 6 and connector 7. Connector 6 and connector 7 extend to the outside of the mounting ring 51. Connector 6 and connector 7 are supplied with gas through the gas supply mechanism 8, which is located at any position in the bonding system.

[0025] Working principle: The hydraulic cylinder 4 drives the support plate 5 and its mounting ring 51, outer support ring 37, rotating ring 36 and air head 38 to reciprocate along the axis of the camera body 2. During this process, the first-stage drive component 31 uses the relative movement between the support plate 5 and the frame 34 to drive the outer support ring 37 and rotating ring 36 to rotate around the axis of the camera body 2, so that the air head 38 performs a circumferential sweeping blow on the lens surface during the lifting and lowering process. At the same time, the air supply mechanism 8 supplies air to the air heads 38 of the upper and lower rotating rings 36 through connector 1 6 and connector 2 7 respectively.

[0026] It should be emphasized that the core improvement of this embodiment is that the cleaning mechanism 3 is driven by the hydraulic cylinder 4 to reciprocate along the camera axis. Combined with the first-stage drive component 31, the linear motion is converted into the rotational sweeping motion of the air head 38, so that the cleaning mechanism 3 can dynamically sweep and clean the lens surface during the lifting process. No additional rotation drive source is required. The structure is compact and does not interfere with the imaging optical path.

[0027] It should be noted that, such as Figure 3 and Figure 4 The connector 39 includes a ball head seat 394 hinged to the inner wall of the rotating ring 36. A straight tube 392 is fixedly attached to the ball head seat 394. An air head 38 is fixedly connected to the outer end of the straight tube 392. The ball head seat 394, the straight tube 392 and the air head 38 are internally connected. A ball head seat 391 is slidably sleeved on the outer periphery of the straight tube 392. A ball joint seat 393 is hinged to the outer periphery of the ball head seat 391.

[0028] Working principle: Through the double ball joint structure of ball joint 2 394 and ball joint 1 391, the air head 38 can swing freely within a certain angle range to adapt to different cleaning angle requirements.

[0029] It should be noted that, such as Figure 2 , Figure 3 and Figure 5 The primary drive component 31 includes a bevel gear ring 313 fixedly connected to the lower side of the lower rotating ring 36. A bevel gear 314 is meshed around the bevel gear ring 313. The bevel gear 314 is rotatably mounted on the lower side of the support plate 5 via a pivot pin. A drive gear 312 is fixedly connected to the outer end of the pivot pin connected to the bevel gear 314. A gear rail 311 is fixedly connected to one side wall of the frame 34. The drive gear 312 meshes with the gear rail 311. When the support plate 5 rises or falls relative to the frame 34, the drive gear 312 rolls along the gear rail 311, driving the bevel gear ring 313 to rotate through the bevel gear 314, thereby causing the rotating ring 36 to rotate.

[0030] Example 2 It is understandable that in Embodiment 1, the conventional air head 38 often blows vertically toward the camera lens surface. However, blowing vertically toward the camera surface has the following problems: First, when the vertical airflow acts on dust particles, its force direction coincides with the direction of dust adhesion, which instead presses the dust tightly onto the lens surface. Especially for particles that are firmly adhered due to high-temperature smoke or static electricity, vertical airflow not only fails to blow them away, but may also embed them into micro-scratches or coating gaps on the lens surface, causing permanent contamination. Second, the camera lens and its outer surface are not a single planar structure, but are composed of a multi-level stepped structure such as the lens barrel, lens edge, stepped surface, and protective glass. The vertical airflow can only act on the planar area directly opposite the air outlet, and it is difficult to reach the side walls, concave corners, and edge dead corners of the stepped structure. As a result, the dust in these areas cannot be effectively removed. After long-term accumulation, it may migrate to the central imaging area of ​​the lens through vibration or airflow disturbance, affecting the detection accuracy.

[0031] like Figures 2 to 5 To solve the above problems, an adjustable angled air blowing method is adopted. Specifically, the secondary drive component 32 includes an adjusting cylinder 324 rotatably mounted on the upper end of the outer support ring 37 with its vertical ring wall located at the ball joint seat 393. The adjusting cylinder 324 is provided with wave grooves 325 corresponding to the upper and lower rotating rings 36 respectively. The ball joint seat 393 is slidably connected in the wave grooves 325. The interior of the adjusting cylinder 324 is also fixedly connected by several connecting brackets 326. A bevel gear ring 323 is fixedly connected to the upper end of the adjusting cylinder 324. A bevel gear 322 is meshed with the outer end of the bevel gear ring 323. The bevel gear 322 is rotatably mounted on the support plate 5 through a pivot pin. A friction roller 321 is fixedly connected to the outer end of the pivot pin connected to the bevel gear 322. A clamping component 33 is provided in the frame 34 for stopping the rotation of the friction roller 321 at a designated position.

[0032] The clamping member 33 includes an electric push rod 336 symmetrically fixedly connected to the vertical walls on both sides of the frame 34. The output end of the electric push rod 336 slides through the vertical wall of the frame 34 and is fixedly connected to a bracket 332. A slide rod 334 is fixedly connected inside the bracket 332. A slide seat 333 is slidably connected to the slide rod 334. A friction plate 335 is fixedly connected to the side of the slide seat 333 closest to the central axis of the friction roller 321. A return spring 331 is also sleeved on the slide rod 334. The return spring 331 is located on the side away from the friction roller 321.

[0033] Working principle: When the cleaning mechanism 3 moves downward to the lens position of the camera body 2, the lower clamping member 33 actuates, causing the air head 38 to switch angles so that the upper air head 38 is angled downward and the lower air head 38 is vertical, achieving a combined cleaning and relaxation method of angled downward blowing and vertical suction. When the cleaning mechanism 3 moves upward to the lens position, the upper clamping member 33 actuates, causing the air head 38 to switch angles so that the upper air head 38 is vertical and the lower air head 38 is angled upward, achieving a combined cleaning method of vertical suction and angled upward blowing. The clamping member 33 adopts an elastic structure, which can adapt to the up and down movement of the friction roller 321 and avoid mechanical jamming. Through the reset spring 331, the working state of the clamping member 33 can be automatically reset to ensure normal secondary operation. The reason for adopting the above-mentioned adjustable angled blowing method is that when the angled airflow acts on the lens surface, its tangential component can cut into the dust. The adhesion interface between particles and the lens surface creates a "shovel" effect. Compared to the compressive effect of vertical airflow, oblique blowing can achieve more effective dust removal with less aerodynamic pressure. At the same time, the airflow path of oblique blowing covers a wider range, sweeping along the airflow direction through the side walls and concave corner areas of the stepped structure, carrying away dust particles accumulated on the edges and stepped surfaces. When moving downwards, oblique downward blowing can use the inertia of the airflow to push the dust downwards away from the lens surface, while vertical suction creates a negative pressure field in front of the lens to immediately suck away the blown dust, preventing the dust from suspending and falling back in front of the lens. When moving upwards, oblique upward blowing can reach the lens edges and side wall areas, lifting up the dust accumulated in the corners, and completing a secondary cleaning in conjunction with vertical suction. By switching the airflow angle according to the direction of movement, the blowing direction is always consistent with the cleaning direction, which not only improves dust removal efficiency but also avoids secondary pollution.

[0034] It should be emphasized that the core improvement of this embodiment is: in response to the technical defects of vertical air blowing being unable to effectively clean the surface of the stepped structure and easily compressing dust, an angled air blowing method with switchable angle is adopted. The friction roller 321 is selectively limited at the end of the lifting stroke by the clamping member 33, so that the adjusting cylinder 324 and the rotating ring 36 rotate relative to each other at the end point. The wave groove 325 drives the air head 38 to automatically switch the tilt direction at the end of the stroke through the ball joint seat 393, thereby adaptively adjusting the blowing angle according to the direction of movement. The tangential component of the angled airflow peels off the dust rather than compresses it, and achieves effective coverage of the side wall and concave corner area of ​​the stepped structure, ensuring that the airflow always brushes the lens surface at the same angle as the direction of movement, whether cleaning downward or upward.

[0035] It should be noted that, such as Figure 2 The spacing between the upper and lower clamping members 33 is consistent with the length of the camera body 2 that needs to be cleaned, so that the angle switching of the air head 38 only occurs when the cleaning mechanism 3 moves to the upper and lower boundaries of the lens area.

[0036] It should be noted that, such as Figure 4 and Figure 6 The waveform design of the wave groove 325 determines the deflection angle range of the air head 38. In this embodiment, the crest and trough of the wave groove 325 correspond to two air head 38 postures: oblique downward and vertical. To ensure the tangential stripping effect of oblique blowing, the angle between the axis of the air head 38 and the normal of the lens surface is preferably 30° to 60°. Within this angle range, the airflow has both sufficient tangential force to strip dust and sufficient normal force to maintain the coverage of the airflow on the lens surface. The actual angle can be set within the range according to the lens surface morphology and dust characteristics.

[0037] Example 3 Understandably, in Embodiment 2, after the air head 38 switches its tilt direction at the upper and lower ends, the blowing and suction functions need to switch accordingly—when moving downwards, the upper air head 38 should blow air and the lower air head 38 should inhale air, and when moving upwards, the upper air head 38 should inhale air and the lower air head 38 should blow air. However, in the structure of Embodiment 2, when the tilt direction of the air head 38 is switched, the gas type supplied by the gas delivery mechanism 8 to connector 1 6 and connector 2 7 does not switch accordingly, resulting in a mismatch between the blowing and suction functions and the direction of movement, making it impossible to achieve the coordinated cleaning effect of "downward blowing and downward suction, upward suction and downward blowing". If two independent air sources are used to supply positive and negative pressure respectively, the system will be complex, costly, and bulky, which is not conducive to integration in the compact space of the bonding equipment.

[0038] like Figures 7 to 9To solve the above problems, a single gas source supply scheme is adopted, that is, only one pump 81 is set as the gas source, and the dual-channel output of positive pressure and negative pressure and its switching are realized through the conversion component 87. The gas transmission mechanism 8 includes pump 81, heat exchange component 83 for air heat exchange, filter component 85 for filtering and recovering dust in the gas, and conversion component 87 for changing the gas path. The input end of pump 81 is connected to negative pressure output pipe 84, the output end of pump 81 is connected to positive pressure output pipe 82, filter component 85 is connected to negative pressure output pipe 84, and heat exchange component 83 is connected to positive and negative output pipes.

[0039] The conversion component 87 includes a housing 872. The housing 872 is divided into four cavities by a cross-shaped partition 875. Each cavity is connected to an external pipe 871. Any two symmetrically distributed external pipes 871 are connected to the negative pressure output pipe 84 and the positive pressure output pipe 82, respectively. The remaining two external pipes 871 are connected to connector 6 and connector 7, respectively. A core cylinder 874 is integrally fixedly connected to the center of the partition 875. A rotating core 877 is rotatably installed inside the core cylinder 874. The core cylinder 874 has four sets of symmetrically distributed air holes 873 on its wall corresponding to the four cavities. Inside the rotating core 877, corresponding to the upper and lower air holes 873, there are L-shaped upper channels 876 and lower channels 878. The upper channels 876 and lower channels 878 are also centrally symmetrical about the central axis of the rotating core 877. The rotating core 877 is controlled to rotate by a drive component 86 (the drive component 86 is a micro motor).

[0040] Working principle: The upper channel 876 and lower channel 878 inside the rotating core 877 are L-shaped and centrally symmetrically distributed. When the rotating core 877 rotates, the upper channel 876 can selectively connect the positive pressure output pipe 82 or the negative pressure output pipe 84 to connector 6. The lower channel 878 simultaneously connects another pressure source to connector 7. The driving component 86 is a micro motor, and its rotation timing is synchronized with the action timing of the clamping component 33. It is uniformly coordinated by the control system (the control system is configured by computer professionals). After the pump 81 starts, its output end generates positive pressure and its input end generates negative pressure. These are connected to the conversion component 87 through the positive pressure output pipe 82 and the negative pressure output pipe 84, respectively. The conversion component 87 switches between the two air circuit states through the rotation of the rotating core 877 without changing the working state of the pump 81. The advantage of using a single air source is that only one pump 81 is needed to provide positive and negative pressure at the same time, which greatly simplifies the air circuit system structure, reduces the size and cost of the equipment, and has fast switching response and high reliability. It is suitable for the compact installation space of bonding equipment.

[0041] It should be emphasized that the core improvement of this embodiment lies in the following: through the L-shaped upper channel 876 and lower channel 878 symmetrically distributed within the rotating core 877, and the four independent cavities formed by the cross spacer 875, a single pump 81 can simultaneously provide positive and negative pressure, and can quickly switch between the two air path distribution states. When the rotating core 877 rotates, the pressure sources of the upper and lower air path channels are synchronously reversed, ensuring that the blowing and suction functions switch simultaneously when the tilt direction of the air head 38 changes. A single air source realizes the output of positive and negative pressure dual channels and their alternating switching, so that the system can cooperate with the integrated heat dissipation, cleaning and single air source operation mode of Embodiment 2 without the need to add a second air source.

[0042] It should be noted that the heat exchanger 83 is a semiconductor cooler, and its cooling temperature can be preset in the control system according to the bonding environment temperature and heat dissipation requirements.

[0043] It should be noted that the filter element 85 is a filter tube filled with multi-stage filter media. The multi-stage filter media are arranged in sequence according to the gas flow direction as coarse-pore filter paper, polytetrafluoroethylene membrane filter element and electrostatic adsorption plate. The filter tube is provided with a detachable structure for replacing the multi-stage filter media, so as to ensure the sustainability of dust collection capacity during long-term use.

[0044] It should be noted that the technical solutions of Embodiment 1, Embodiment 2 and Embodiment 3 can be implemented in the same cleaning device in multiple combinations: the basic structure of Embodiment 1 alone can realize the integrated function of lifting, sweeping, cleaning and heat dissipation of the cleaning mechanism 3; by superimposing Embodiment 2 on the basis of Embodiment 1, the blowing angle of the air head 38 can be adaptively adjusted according to the cleaning movement direction to avoid secondary pollution; by superimposing Embodiment 3 on the basis of Embodiment 1 and Embodiment 2, the tilting direction of the air head 38 and the blowing and suction function can be synchronously adjusted, and a complete full-function cleaning device can be formed with a single air source.

[0045] The basic principles, main features, and advantages of this application have been described above. Those skilled in the art should understand that this application is not limited to the above embodiments. The embodiments and descriptions in the specification are merely the principles of this application. Various changes and modifications can be made to this application without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed application.

Claims

1. A visual inspection system for chip bonding, comprising a camera body (2) for acquiring bonding information, and a mounting base (1) for fixing the camera body (2), characterized in that, The camera body (2) is provided with a cleaning mechanism (3) for cleaning its outer surface and lens. The cleaning mechanism (3) is controlled by a hydraulic cylinder (4) to move up and down along the axis of the camera body (2). The hydraulic cylinder (4) is fixedly installed on the mounting base (1). The cleaning mechanism (3) includes a support plate (5) fixedly installed on the output end of the hydraulic cylinder (4). The support plate (5) has an opening for movement. A frame (34) is slidably embedded in the opening. The frame (34) is fixedly installed on the mounting base (1). The end of the support plate (5) near the camera body (2) is integrally fixedly connected to an installation ring (51). An outer support ring (37) is rotatably installed inside the installation ring (51). A connecting ring (35) is symmetrically fixedly connected to the inner wall of the outer support ring (37). A rotating ring (36) is rotatably installed inside the connecting ring (35) through two sets of upper and lower sealed bearings. The upper and lower rotating rings (36) are fixedly connected through the ring body. Several air heads (38) are equidistantly arranged on the inner wall of the rotating ring (36). The air heads (38) are adjusted in tilt by the connecting piece (39). The outer support ring (37) is controlled to rotate by a first-level drive component (31). The connecting piece (39) is controlled to rotate by a second-level drive component (32). The inner wall of the connecting ring (35) and the outer wall of the rotating ring (36) are provided with connecting holes in the areas within the two sets of sealed bearings. The outer walls of the upper and lower connecting rings (35) are respectively connected to connector one (6) and connector two (7). Connector one (6) and connector two (7) extend to the outside of the mounting ring (51). Connector one (6) and connector two (7) input gas through the gas supply mechanism (8). The gas supply mechanism (8) is set at any position in the bonding system.

2. The visual inspection system for chip bonding as described in claim 1, characterized in that, The connector (39) includes a ball head seat two (394) hinged to the inner wall of the rotating ring (36), a straight tube (392) extending outward from the ball head seat two (394), an air head (38) fixedly connected to the outer end of the straight tube (392), the ball head seat two (394), the straight tube (392) and the air head (38) are connected internally, a ball head seat one (391) is slidably sleeved on the outer periphery of the straight tube (392), and a ball joint seat (393) is hinged on the outer periphery of the ball head seat one (391).

3. The visual inspection system for chip bonding as described in claim 1, characterized in that, The first-stage drive component (31) includes a bevel gear ring (313) fixedly connected to the lower side of the lower rotating ring (36). A bevel gear (314) is meshed around the bevel gear ring (313). The bevel gear (314) is rotatably mounted on the lower side of the support plate (5) via a pivot pin. A rotating gear (312) is fixedly connected to the outer end of the pivot pin connected to the bevel gear (314). A gear rail (311) is fixedly connected to one side wall of the frame (34). The rotating gear (312) meshes with the gear rail (311).

4. The visual inspection system for chip bonding as described in claim 1, characterized in that, The secondary drive component (32) includes an adjusting cylinder (324) rotatably mounted on the upper end of the outer support ring (37) with its vertical ring wall positioned at the ball joint seat (393). The adjusting cylinder (324) is provided with wave grooves (325) corresponding to the upper and lower side rotating rings (36). The ball joint seat (393) is slidably connected in the wave groove (325). The interior of the adjusting cylinder (324) is also fixedly connected by several connecting frames (326). The upper end of the adjusting cylinder (324) is fixedly connected to a bevel gear ring (323). The outer end of the bevel gear ring (323) is meshed with a bevel gear ring (322). The bevel gear ring (322) is rotatably mounted on the support plate (5) by a pivot pin. The outer end of the pivot pin connected to the bevel gear ring (322) is fixedly connected to a friction roller (321). The frame (34) is provided with a clamping component (33) for stopping the rotation of the friction roller (321) at a specified position.

5. The visual inspection system for chip bonding as described in claim 4, characterized in that, The clamping member (33) includes an electric push rod (336) symmetrically fixedly connected to the vertical walls on both sides of the frame (34). The output end of the electric push rod (336) slides through the vertical wall of the frame (34) and is fixedly connected to a bracket (332). A slide rod (334) is fixedly connected inside the bracket (332). A slide seat (333) is slidably connected on the slide rod (334). A friction plate (335) is fixedly connected on the side of the slide seat (333) close to the central axis of the friction roller (321). A return spring (331) is also sleeved on the slide rod (334). The return spring (331) is located on the side away from the friction roller (321).

6. The visual inspection system for chip bonding as described in claim 4, characterized in that, The spacing between the upper and lower clamping members (33) is consistent with the required cleaning length of the camera body (2).

7. The visual inspection system for chip bonding as described in claim 1, characterized in that, The gas delivery mechanism (8) includes a pump (81), a heat exchanger (83) for air heat exchange, a filter (85) for filtering and recovering dust in the gas, and a converter (87) for changing the gas path. The input end of the pump (81) is connected to a negative pressure output pipe (84), the output end of the pump (81) is connected to a positive pressure output pipe (82), the filter (85) is connected to the negative pressure output pipe (84), and the heat exchanger (83) is connected to the positive and negative output pipes.

8. The visual inspection system for chip bonding as described in claim 7, characterized in that, The heat exchanger (83) is a semiconductor refrigerator.

9. The visual inspection system for chip bonding as described in claim 7, characterized in that, The filter element (85) is a filter tube filled with multi-stage filter media. The multi-stage filter media are arranged in sequence according to the gas flow direction as coarse pore filter paper, polytetrafluoroethylene membrane filter element and electrostatic adsorption plate. The filter tube is provided with a detachable structure for replacing the multi-stage filter media.

10. A visual inspection system for chip bonding as described in claim 7, characterized in that, The conversion component (87) includes a housing (872). The housing (872) is divided into four cavities by a cross-shaped partition (875). Each cavity is connected to an external pipe (871). Any two symmetrically distributed external pipes (871) are connected to the negative pressure output pipe (84) and the positive pressure output pipe (82), respectively. The remaining two external pipes (871) are connected to connector one (6) and connector two (7), respectively. A core cylinder (874) is integrally fixedly connected to the center of the partition (875). The core cylinder (874) is rotatably installed inside the core cylinder (874). The core cylinder (874) wall is provided with four sets of air holes (873) distributed symmetrically in the upper and lower parts. The rotating core (877) is provided with an upper channel (876) and a lower channel (878) in an L shape in the upper and lower air holes (873). The upper channel (876) and the lower channel (878) are also centrally symmetrical about the central axis of the rotating core (877). The rotating core (877) is controlled to rotate by a drive component (86).

Images