A cooling cycle system and temperature control method

Abstract

The application discloses a cooling circulation system and a temperature control method. The cooling circulation system comprises a refrigerant input part connected to a first cavity and used for inputting refrigerant into the first cavity; a conduit comprising a first sub-conduit and a second sub-conduit, wherein the first sub-conduit is used for connecting the first cavity and a second cavity; the second sub-conduit is connected to the refrigerant input part and the second cavity respectively; a cavity outlet comprising a first sub-cavity outlet and a second sub-cavity outlet, wherein the first sub-cavity outlet is arranged on the first cavity, the second sub-cavity outlet is arranged on the second cavity, the refrigerant in the first cavity can flow out through the first sub-cavity outlet, and the refrigerant in the second cavity can flow out through the second sub-cavity outlet; and a controller connected to the conduit and the cavity outlet respectively, and used for controlling the conduction or the closing of the conduit and the cavity outlet. The above scheme can improve the overall cooling efficiency.

Description

Technical Field

[0001] This application relates to the field of cooling technology, and in particular to a cooling circulation system and temperature control method. Background Technology

[0002] In traditional drive devices, the heat generated by the coil group in the first processing area and the coil group in the second processing area is significantly different. The uniform cooling method used in the prior art results in poor overall cooling effect of the drive device. Summary of the Invention

[0003] This application provides at least one cooling circulation system and temperature control method that can improve overall cooling efficiency.

[0004] This application provides a cooling circulation system for cooling the coil assembly of a driving device. The driving device is used to move a target object to a first processing zone and a second processing zone for corresponding processing. The driving device includes a first cavity located in the first processing zone and a second cavity located in the second processing zone. Coil assemblies are respectively provided in the first cavity and the second cavity. The cooling circulation system includes: a refrigerant inlet connected to the first cavity for introducing refrigerant into the first cavity; and a conduit including a first sub-conduit and a second sub-conduit, the first sub-conduit connecting the first cavity and the second cavity, through which the refrigerant in the first cavity can... The refrigerant flows through a first sub-conduit to a second cavity; the second sub-conduit connects to both the refrigerant inlet and the second cavity, allowing the refrigerant in the inlet to flow into the second cavity; the cavity outlet includes a first sub-cavity outlet and a second sub-cavity outlet, the first and second sub-cavity outlets being located on the first and second cavities respectively, allowing the refrigerant in the first cavity to flow out through the first sub-cavity outlet and the refrigerant in the second cavity to flow out through the second sub-cavity outlet; a controller is connected to both the conduit and the cavity outlet, and the controller is used to control the opening or closing of the conduit and the cavity outlet.

[0005] One end of the first sub-conduit is connected to the conduit outlet of the first cavity, and the other end of the first sub-conduit is connected to the first inlet of the second cavity; one end of the second sub-conduit is connected to the refrigerant inlet, and the other end of the second sub-conduit is connected to the second inlet of the first cavity.

[0006] The refrigerant inlet, conduit outlet, and first sub-cavity outlet are respectively located on different sides of the first cavity; and / or the first inlet, second inlet, and second sub-cavity outlet are respectively located on different sides of the second cavity.

[0007] Wherein, the outlet of the first sub-cavity is located on the side of the first cavity away from the second cavity; and / or, the outlet of the second sub-cavity is located on the side of the second cavity away from the first cavity.

[0008] The cooling circulation system also includes a temperature sensor installed in the second cavity. The temperature sensor is used to send the detected internal temperature data of the second cavity to the controller. The controller is used to control the conduction of the conduit and the cavity outlet based on the internal temperature data.

[0009] The conduit also includes at least one valve, which is disposed at at least one of the following connections: the connection between the first sub-conduit and the first cavity, the connection between the first sub-conduit and the second cavity, the connection between the second sub-conduit and the second cavity, and the connection between the second sub-conduit and the refrigerant inlet. Each valve is connected to a controller, which controls the conduit to conduct by controlling the valve to open.

[0010] The first processing area is used to expose the target object, and the second processing area is used to measure the target object; and / or, the driving device further includes two stages respectively disposed on the first processing area and the second processing area, the stages being used to carry the target object and to drive the target object to move under the drive of the coil group.

[0011] A second aspect of this application provides a temperature control method, comprising: acquiring the internal temperature of a second cavity of a driving device; and, based on the internal temperature, controlling the opening or closing of a conduit and a cavity outlet in a cooling circulation system, respectively.

[0012] The system includes a first sub-catheter and a second sub-catheter, and a cavity outlet includes a first sub-cavity outlet and a second sub-cavity outlet. Based on the internal temperature, the system controls the opening and closing of the catheters and cavity outlets in the cooling circulation system, including: controlling the first sub-catheter, the second sub-catheter, and the second sub-cavity outlet to open and closing the first sub-cavity outlet in response to an internal temperature greater than or equal to a first temperature threshold; controlling the second sub-catheter, the first sub-cavity outlet, and the second sub-cavity outlet to open and closing the first sub-catheter in response to an internal temperature greater than or equal to a second temperature threshold and less than the first temperature threshold, wherein the first temperature threshold is greater than the second temperature threshold; and controlling the first sub-catheter and the second sub-cavity outlet to open and close the second sub-catheter and the first sub-cavity outlet in response to an internal temperature less than the second temperature threshold.

[0013] Among them, controlling the opening or closing of the conduit and cavity outlet in the cooling circulation system includes: controlling the opening or closing of the conduit by controlling the opening or closing of the valve in the conduit.

[0014] The above scheme utilizes the refrigerant input section of the cooling circulation system to input refrigerant into the first cavity. After the refrigerant cools the coil assembly in the first cavity, the controller can control the first sub-conduit to open, allowing the refrigerant to flow through the first sub-conduit to the second cavity, where it cools the coil assembly again. Finally, the refrigerant flows out from the outlet of the second sub-cavity. The controller can also control the second sub-conduit to open, allowing the refrigerant in the cooling circulation system to directly enter the second cavity through the second sub-conduit. The controller can also control the opening of the outlet of the first sub-cavity, allowing the refrigerant to flow out from the outlet of the first sub-cavity. This avoids overcooling the second cavity, saves resources, and improves overall cooling efficiency.

[0015] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and are not intended to limit this application. Attached Figure Description

[0016] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with this application and, together with the specification, serve to explain the technical solutions of this application.

[0017] Figure 1 This is a top view schematic diagram of an embodiment of the cooling circulation system of this application;

[0018] Figure 2 This is a schematic diagram of the structure of an embodiment of the driving device of this application;

[0019] Figure 3 This is a connection diagram of an embodiment of the controller of this application;

[0020] Figure 4 This is a schematic flowchart of an embodiment of the temperature control method of this application;

[0021] Figure 5 This is a schematic diagram of the framework of an embodiment of the electronic device of this application;

[0022] Figure 6 This is a schematic diagram of a framework of an embodiment of the computer-readable storage medium of this application. Detailed Implementation

[0023] The embodiments of this application will now be described in detail with reference to the accompanying drawings.

[0024] In the following description, specific details such as particular system architectures, interfaces, and technologies are presented for illustrative purposes rather than for limiting purposes, in order to provide a thorough understanding of this application.

[0025] In this document, the term "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. Additionally, the character " / " generally indicates that the preceding and following related objects have an "or" relationship. Furthermore, "many" in this document means two or more. Moreover, the term "at least one" in this document means any combination of at least two of any one or more of a plurality of objects. For example, including at least one of A, B, and C can mean including any one or more elements selected from the set consisting of A, B, and C.

[0026] In modern semiconductor manufacturing, display panel manufacturing, optoelectronic devices, and various high-precision industrial production fields, array equipment, with its superior performance and high-precision operation capabilities, has become a crucial link in the production process. The exposure unit, in particular, is a core component affecting product quality and production efficiency. To ensure the stable and efficient operation of the exposure unit, a precise and efficient cooling circulation system is used to cool the coil assembly of the drive unit, playing an indispensable role.

[0027] Please see Figure 1 , Figure 1 This is a top view schematic diagram of an embodiment of the cooling circulation system of this application. The cooling circulation system 100 of this application is used to cool the coil assembly of a driving device. The driving device is used to move a target object to a first processing area and a second processing area for corresponding processing. The driving device includes a first cavity 210 located in the first processing area and a second cavity 220 located in the second processing area. Coil assemblies are respectively provided in the first cavity 210 and the second cavity 220. The first processing area is used for exposing the target object, and the second processing area is used for measuring the target object.

[0028] See also Figure 2 The drive unit 200 also includes two platforms (first platform 230 and second platform 240) respectively disposed on the first processing area and the second processing area. The platforms are used to carry the target object and drive the target object to move under the drive of the coil group.

[0029] In one specific embodiment, the cooling circulation system 100 of this application is used to cool the driving device 200 in the exposure apparatus of the array device, wherein the two target objects to be driven in the driving device 200 are substrates. Please refer to [reference needed]. Figure 2 , Figure 2 This is a schematic diagram of one embodiment of the driving device 200 of this application. An exposure optical system (PL) is disposed in the first processing area, and a measurement optical system (ALG) for alignment measurement is disposed in the second processing area.

[0030] In array devices, high-precision exposure processing of the substrate is required. This process necessitates that the two stages carrying the substrate can move independently in the first and second processing areas. The device responsible for driving the stage movement has a complex and precise internal structure, containing several key components, among which the coil assembly is one of the core power sources. When energized, the coil assembly generates a strong electromagnetic force, driving the stage to perform corresponding operations in the corresponding processing areas according to a preset trajectory and speed, thereby improving throughput.

[0031] The primary task of the cooling circulation system 100 is to effectively dissipate heat from the coil assembly in the drive unit 200. Since the coil assembly generates a significant amount of heat during operation, failure to dissipate this heat promptly can lead to excessively high coil temperatures, affecting its performance and lifespan, and potentially causing equipment failure, production interruptions, and substantial economic losses. The cooling circulation system 100 addresses this by establishing cooling circulation channels within the first chamber 210 and the second chamber 220. This allows the refrigerant to continuously flow under the action of a circulation pump, absorbing the heat generated by the coil assembly and transferring it to an external radiator for dissipation, thereby ensuring that the coil assembly remains within a suitable operating temperature range.

[0032] The first and second processing zones typically have different process environments and temperature conditions to meet the exposure requirements of the substrate at different stages. For example, the first processing zone may be used for preliminary photolithography pattern exposure, which requires higher temperature control; while the second processing zone may be used for substrate alignment, which requires lower temperature control precision. The cooling circulation system 100 can independently control the temperature and manage the heat dissipation of the coil groups in the first cavity 210 and the second cavity 220 according to the specific conditions of the two processing zones, ensuring that the coil groups can operate stably when the stage moves between different processing zones, without performance fluctuations due to temperature changes.

[0033] Please refer to the following: Figure 1 and Figure 3 , Figure 3This is a connection diagram of an embodiment of the controller of this application. The cooling circulation system 100 includes: a refrigerant input section 110, a first sub-conduit 121, a second sub-conduit 122, a first sub-cavity outlet 131, a second sub-cavity outlet 132, and a controller 140. The refrigerant input section 110 is connected to the first cavity 210 and is used to input refrigerant into the first cavity 210. The first sub-conduit 121 connects the first cavity 210 and the second cavity 220, allowing refrigerant in the first cavity 210 to flow to the second cavity 220 via the first sub-conduit 121. The second sub-conduit 122 connects to both the refrigerant input section 110 and the second cavity 220, allowing refrigerant in the refrigerant input section 110 to flow to the second cavity 220 via the second sub-conduit 122. The first sub-cavity outlet 131 is located on the first cavity 210, and the second sub-cavity outlet 132 is located on the second cavity 220. Refrigerant in the first cavity 210 can flow out through the first sub-cavity outlet 131, and refrigerant in the second cavity 220 can flow out through the second sub-cavity outlet 132. A controller 140 is connected to the conduit and the cavity outlet respectively, and the controller 140 is used to control the opening or closing of the conduit and the cavity outlet. The refrigerant can be a gas, liquid, or other medium, or it can be ammonia, water, etc., without specific limitations.

[0034] In some embodiments, the refrigerant inlet 110 serves as the starting point of the entire refrigeration system, and its design and installation location are crucial. In this system, the refrigerant inlet 110 is tightly connected to the first cavity 210 via a pipe. This connection method typically employs welding or threaded connections to ensure the sealing and reliability of the connection. In practical applications, the refrigerant inlet 110 is usually installed on the top or side of the drive unit 200, allowing gravity to facilitate a smoother flow of refrigerant into the first cavity 210.

[0035] In some embodiments, the first sub-conduit 121 and the second sub-conduit 122 play a crucial connecting role in the system, and their structure and arrangement directly affect the refrigerant flow efficiency and the system's cooling effect. The first sub-conduit 121 connects the first cavity 210 and the second cavity 220. Specifically, one end of the first sub-conduit 121 is connected to the conduit outlet (not shown) of the first cavity 210, and the other end is connected to the first inlet (not shown) of the second cavity 220. The diameter, length, and degree of curvature of the first sub-conduit 121 require careful design. In practical applications, the first sub-conduit 121 can be made of materials such as copper or aluminum to ensure a smooth inner wall and reduce resistance during refrigerant flow. When the refrigerant pressure in the first cavity 210 is higher than that in the second cavity 220, the refrigerant will naturally flow through the first sub-conduit 121 to the second cavity 220.

[0036] Furthermore, since the first sub-conduit 121 is exposed outside the drive device 200, its length can be appropriately extended. This allows sufficient time for the refrigerant to exchange heat with the outside air through the first sub-conduit 121 during the process of the refrigerant flowing from the first cavity 210 to the second cavity 220. This reduces the temperature of the refrigerant flowing out of the first cavity 210 to a certain extent, resulting in a better cooling effect of the refrigerant flowing out of the first cavity 210 on the second cavity 220. Therefore, the first sub-conduit 121 can be made of a material with good thermal conductivity.

[0037] To better detect the refrigerant flow rate in the first sub-conduit 121, a flow sensor (not shown) can be installed in the first sub-conduit 121 to monitor the refrigerant flow rate in real time and feed the data back to the controller 140 for precise control of the system operation. The flow sensor can promptly detect abnormal changes in refrigerant flow rate, allowing for proactive measures to prevent system malfunctions.

[0038] In some embodiments, to avoid the problem of low cooling effect caused by refrigerant flowing into the second cavity 220 and causing blockage or refrigerant not completing heat exchange with the heat generated by the coil group in the second cavity 220 and being discharged from the second cavity 220, the refrigerant inlet 110, the conduit outlet and the first sub-cavity outlet 131 can be respectively provided on different sides of the first cavity 210, so that the refrigerant can fully complete heat exchange in the second cavity 220.

[0039] In some examples, one end of the second sub-conduit 122 is connected to the refrigerant inlet 110, and the other end is connected to the second inlet (not shown) of the first cavity 210. The second sub-conduit 122 connects to both the refrigerant inlet 110 and the second cavity 220, providing an additional refrigerant source to the second cavity 220. Similarly, the second sub-conduit 122 can also be made of copper or aluminum to ensure a smooth inner wall, reducing resistance to refrigerant flow.

[0040] A flow regulating valve can be installed on the second sub-conduit 122. The controller 140 adjusts the valve opening according to the actual needs of the system to control the refrigerant flow. When the temperature inside the second chamber 220 rises, the controller 140 increases the opening of the flow regulating valve on the second sub-conduit 122, allowing more refrigerant to flow into the second chamber 220, thereby improving cooling efficiency and ensuring stable operation of the coil assembly in the second chamber 220. Furthermore, the second sub-conduit 122 can also be equipped with a pressure sensor (not shown) to monitor refrigerant pressure changes in real time, ensuring safe system operation. The pressure sensor can promptly detect pressure anomalies in the second sub-conduit 122, preventing equipment damage or reduced cooling effect due to excessively high or low pressure.

[0041] It is understandable that no specific limitations are made here regarding the number and diameter of the first sub-conduit 121 and the second sub-conduit 122.

[0042] In some embodiments, to avoid the problem of low cooling effect caused by refrigerant flowing into the second cavity 220 and causing blockage or refrigerant not completing heat exchange with the heat generated by the coil group in the second cavity 220 and being discharged from the second cavity 220, the first inlet, the second inlet, and the second sub-cavity outlet 132 can be respectively arranged on different sides of the second cavity 220, so that the refrigerant can fully complete heat exchange in the second cavity 220.

[0043] Please continue reading. Figure 1 The first sub-cavity outlet 131 may be located on the side of the first cavity 210 away from the second cavity 220. The second sub-cavity outlet 132 may be located on the side of the second cavity 220 away from the first cavity 210.

[0044] The first sub-cavity outlet 131 and the second sub-cavity outlet 132 are respectively located on the first cavity 210 and the second cavity 220. Their structure and control method are crucial to the outflow of refrigerant and the overall operation of the system.

[0045] In practical applications, the first sub-cavity outlet 131 and the second sub-cavity outlet 132 can be equipped with valves such as ball valves, butterfly valves, and solenoid valves, which offer good sealing performance and adjustment flexibility. After the refrigerant in the first cavity 210 completes heat exchange with the heat generated by the coil assembly, it needs to flow out through the first sub-cavity outlet 131. At this time, the controller 140 will control the valve of the first sub-cavity outlet 131 to open or close according to the system's pressure and temperature parameters. Similarly, the control principle of the second sub-cavity outlet 132 is similar. It is precisely controlled by the controller 140 based on the refrigerant state in the second cavity 220 and the overall operating requirements of the system, ensuring that the refrigerant can be discharged in a timely and smooth manner, maintaining the normal operation of the system.

[0046] Furthermore, the outlet 131 of the first sub-cavity can be interchanged with the outlet of the catheter: the outlet 131 of the first sub-cavity can be located at... Figure 1 At the catheter outlet, the catheter outlet is located at the first sub-cavity outlet 131. Similarly, the second sub-cavity outlet 132 can be located at the first inlet, and the first inlet is located at the second sub-cavity outlet 132.

[0047] Therefore, the specific locations of the first sub-cavity outlet 131 and the second sub-cavity outlet 132 are not limited here.

[0048] In some embodiments, the first sub-cavity outlet 131 and the second sub-cavity outlet 132 may also be equipped with electric actuators to achieve automated valve control. Through the electric actuators, the controller 140 can adjust the opening degree of the cavity outlet valves in real time according to the refrigerant flow rate and the temperature of the coil assembly, optimizing the refrigerant flow distribution and improving the response speed and energy efficiency ratio of the cooling circulation system 100. Furthermore, a safety valve may be installed at the cavity outlet. When the pressure inside the cooling circulation system 100 exceeds the safety limit, the safety valve automatically opens to release excess pressure, protecting the cooling circulation system 100 and the equipment. The safety valve effectively prevents conduit rupture or cavity damage caused by excessive pressure, ensuring reliable system operation.

[0049] In some embodiments, the cooling circulation system 100 also has intelligent monitoring and regulation functions. Please refer to [reference needed]. Figure 3 By installing temperature sensor 160 and flow sensor 170 inside the cavity, the temperature and flow parameters of the coolant are monitored in real time, and the data is fed back to controller 140. Controller 140 automatically adjusts the rotational speed of refrigerant input unit 110 and the flow rate of refrigerant based on this data to adapt to the heat dissipation requirements of the coil assembly under different workloads. For example, when the stage moves at high speed or undergoes high-frequency reciprocating motion, the heat generated by the coil assembly increases significantly. At this time, cooling circulation system 100 automatically increases the refrigerant flow rate to enhance heat dissipation. Conversely, when the equipment is in standby or low-load operation, cooling circulation system 100 reduces the flow rate to save energy and avoid unnecessary wear caused by excessive refrigerant circulation.

[0050] To better adjust the refrigerant flow rate in the cooling circulation system 100, at least one valve can be installed in the conduit. The at least one valve is respectively installed at at least one of the following connections: the connection between the first sub-conduit 121 and the first cavity 210, the connection between the first sub-conduit 121 and the second cavity 220, the connection between the second sub-conduit 122 and the second cavity 220, and the connection between the second sub-conduit 122 and the refrigerant inlet 110. Each valve is connected to a controller 140, which controls the conduit flow by controlling the valve to open.

[0051] Specifically, the cooling circulation system 100 also includes a temperature sensor 160 disposed within the second cavity 220. The temperature sensor 160 is used to send the detected internal temperature data of the second cavity 220 to the controller 140. A first valve 151 is disposed at the connection between the first sub-conduit 121 and the first cavity 210, and a second valve 152 is disposed at the connection between the second sub-conduit 122 and the second cavity 220. The controller 140 is used to control the flow of the conduit and the cavity outlet based on the internal temperature data.

[0052] In some specific embodiments, a temperature sensor 160 within the second cavity 220 is used to detect the internal temperature data of the second cavity 220 in real time, and this internal temperature data is sent to a controller 140. The controller 140 then adjusts the opening and closing degrees of the first valve 151 and the second valve 152, as well as the opening and closing of the first sub-cavity outlet 131 and the second sub-cavity outlet 132, based on the internal temperature data of the second cavity 220, to adjust the refrigerant flow rate in the system. Furthermore, to more precisely adjust the refrigerant flow rate in the system, a flow sensor 170 can be used to obtain the refrigerant flow rate in the first sub-conduit 121 and the second sub-conduit 122, based on the detected internal temperature data of the second cavity 220, to more precisely control the opening and closing degrees of the first valve 151 and the second valve 152. In this embodiment, flow sensors 170 can be respectively installed in the first sub-conduit 121 and the second sub-conduit 122.

[0053] In other specific embodiments, to reduce system costs, flow regulating valves can be installed on the first sub-conduit 121 and the second sub-conduit 122 respectively. The flow regulating valves function in the same way as the valve and the flow sensor 170. The controller 140 adjusts the opening of the flow regulating valves according to the actual needs of the system to control the refrigerant flow. The controller 140 can also obtain the refrigerant flow rate through the flow regulating valves, thereby improving refrigeration efficiency and meeting the refrigeration requirements of the system.

[0054] When refrigerant enters the first chamber 210 from the refrigerant inlet 110, its flow rate and pressure need to be precisely controlled. In some embodiments, a solenoid valve (not shown) can be installed between the refrigerant inlet 110 and the first chamber 210, and the opening of the solenoid valve can be adjusted by the controller 140 to control the amount of refrigerant input.

[0055] Furthermore, a temperature sensor can also be installed in the first cavity 210. When the temperature sensor 160 in the first cavity 210 detects that the temperature of the first cavity 210 is too high, the controller 140 will send a signal to open the solenoid valve at a certain angle, allowing an appropriate amount of refrigerant to flow into the first cavity 210. At the same time, the controller 140 will also control the outlet 131 of the first sub-cavity to open at a certain angle, so that the refrigerant can flow through the first cavity 210 at a faster speed, thereby quickly removing the heat flow of the first cavity 210 to meet the cooling demand of the first cavity 210.

[0056] In some embodiments, to protect the integrity of the equipment in the cooling circulation system 100, pressure sensors (not shown) can be respectively installed in the first cavity 210 and the second cavity 220. The pressure sensors are used to detect the pressure in the first cavity 210 or the second cavity 220 to prevent excessive refrigerant from flowing into the cavity while the amount of refrigerant flowing out of the cavity is small, which could cause excessive pressure in the cavity and damage the cavity. The pressure sensors are also connected to the controller 140, which dynamically adjusts the refrigerant flow rate in the cooling circulation system 100 based on the pressure data fed back by the pressure sensors.

[0057] In some embodiments, the refrigerant flowing out from the first sub-cavity outlet 131 of the first cavity 210 and the second sub-cavity outlet 132 of the second cavity 220 flows uniformly to an external radiator (not shown) to dissipate heat and maintain the cooling effect of the refrigerant. The external radiator then delivers the cooled refrigerant to a circulation pump (not shown), which in turn delivers the refrigerant to the refrigerant inlet 110, thereby ensuring that the coil assembly is always within a suitable operating temperature range.

[0058] In some embodiments, the controller 140 is the central hub of the entire refrigerant flow control system. Through its connection with the conduit, cavity outlet, and other related components, it achieves precise control of the entire cooling cycle system 100. In practical applications, the controller 140 typically employs intelligent devices such as microprocessors or programmable logic controllers (PLCs), possessing powerful data processing and control functions. The controller 140 monitors the system's operating status in real time by receiving signals from various sensors in the system, such as temperature sensor 160, pressure sensor, and flow sensor 170. The controller 140 continuously receives data from the temperature sensor 160 and pressure sensor inside the cavity, and then adjusts the valves on the conduit and the cavity outlet according to preset control algorithms and strategies. When the temperature inside the cavity is too high, the controller 140 increases the refrigerant input and adjusts the opening of the conduit and cavity outlet valves to allow more refrigerant to flow to the area requiring cooling; when the temperature reaches the set value, it appropriately reduces the refrigerant flow to maintain stable system operation.

[0059] In some embodiments, the controller 140 may also have remote monitoring and fault diagnosis functions, enabling managers to remotely access the controller 140 via the network to view the system's operating parameters in real time. When a fault occurs, the controller 140 can automatically diagnose the cause of the fault and promptly notify maintenance personnel to carry out repairs, ensuring that the data center's cooling circulation system 100 is always in good operating condition.

[0060] To achieve more precise and efficient control, the controller 140 can employ various control strategies. For example, the proportional-integral-derivative (PID) control algorithm is a commonly used control method that can dynamically adjust the control output based on system deviations, achieving precise regulation of parameters such as refrigerant flow and pressure. Furthermore, the controller 140 can also employ advanced intelligent control strategies such as fuzzy control and neural network control. These strategies can better handle the nonlinearity and complexity of the system, improving its adaptability and robustness. For instance, the controller 140 employing a fuzzy control strategy can flexibly adjust control decisions based on actual conditions, achieving optimized operation of the entire cooling cycle system 100.

[0061] The application of this cooling circulation system significantly improves the stability and reliability of the exposure apparatus in the array device. It not only extends the service life of key components such as coil assemblies, reducing equipment maintenance costs and downtime, but also ensures high precision and high quality in the substrate exposure process. In fields with extremely high precision requirements, such as semiconductor chip manufacturing, the precise heat dissipation capability of this cooling circulation system enables the stage to maintain micron- or even nanometer-level movement accuracy in complex process environments, providing a solid technical guarantee for the production of high-performance, highly integrated electronic chips.

[0062] Please see Figure 4 , Figure 4 This is a schematic flowchart of an embodiment of the temperature control method of this application. The temperature control method can be implemented based on the aforementioned cooling circulation system 100. Specifically, it may include the following steps:

[0063] Step S410: Obtain the internal temperature of the second cavity of the drive device.

[0064] The driving device 200 is used to move the target object to a first processing zone and a second processing zone for corresponding processing. The driving device 200 includes a first cavity 210 located in the first processing zone and a second cavity 220 located in the second processing zone. Coil groups are respectively provided in the first cavity 210 and the second cavity 220. When the driving device 200 moves the target object, the coil groups generate heat to provide driving force. In practical applications, the load in the first processing zone is higher, therefore the coil groups in the first cavity 210 in the first processing zone generate more heat, while the load in the second processing zone is lower, therefore the coil groups in the second cavity 220 in the second processing zone generate less heat. To ensure that the heat generated by the coil groups can be dissipated from the cavities as quickly as possible, and to avoid overcooling of the heat-generating second cavity 220, it is necessary to obtain the internal temperature of the second cavity 220 to adjust the refrigerant flow rate in the entire cooling cycle system 100.

[0065] In some embodiments, the internal temperature of the second cavity can be obtained by a temperature sensor 160 disposed in the second cavity 220.

[0066] Step S420: Based on the internal temperature, control the opening or closing of the conduit and cavity outlet in the cooling circulation system respectively.

[0067] As can be seen from the above-described cooling circulation system 100, the cooling circulation system 100 includes a first sub-conduit 121, a second sub-conduit 122, a first sub-cavity outlet 131, and a second sub-cavity outlet 132. Therefore, the conduction or closure of the conduits and cavity outlets in the cooling circulation system can be controlled according to the obtained internal temperature. Specifically, if the internal temperature is greater than or equal to a first temperature threshold, the first sub-conduit, the second sub-conduit, and the second sub-cavity outlet are controlled to be open, and the first sub-cavity outlet is controlled to be closed; if the internal temperature is greater than or equal to a second temperature threshold and less than the first temperature threshold, the second sub-conduit, the first sub-cavity outlet, and the second sub-cavity outlet are controlled to be open, and the first sub-conduit is controlled to be closed, wherein the first temperature threshold is greater than the second temperature threshold; if the internal temperature is less than the second temperature threshold, the first sub-conduit and the second sub-cavity outlet are controlled to be open, and the second sub-conduit and the first sub-cavity outlet are controlled to be closed.

[0068] For example, the first temperature threshold is 65°C, the second temperature threshold is 50°C, the internal temperature of the second cavity detected by the temperature sensor 160 is 40°C, after the controller receives the temperature data fed back by the temperature sensor 160, it controls the outlet of the first sub-catheter and the second sub-cavity to be connected, and controls the outlet of the second sub-catheter and the first sub-cavity to be closed.

[0069] It is understandable that no specific limitations are made here regarding the setting of the first and second temperature thresholds.

[0070] In some embodiments, valves are respectively provided in the first sub-conduit 121 and the second sub-conduit 122, and the opening or closing of the conduit is controlled by controlling the opening or closing of the valves in the conduit.

[0071] Furthermore, the first sub-cavity outlet 131 and the second sub-cavity outlet 132 can also be equipped with electric actuators to achieve automated control of the valves in the first sub-cavity outlet 131 and the second sub-cavity outlet 132. Through the electric actuators, the controller 140 can adjust the opening degree of the cavity outlet valves in real time according to the refrigerant flow rate and the temperature of the coil assembly, optimizing the refrigerant flow distribution and improving the response speed and energy efficiency ratio of the cooling cycle system 100.

[0072] Those skilled in the art will understand that, in the above-described method of the specific implementation, the order in which each step is written does not imply a strict execution order and does not constitute any limitation on the implementation process. The specific execution order of each step should be determined by its function and possible internal logic.

[0073] Please see Figure 5 , Figure 5 This is a schematic diagram of an embodiment of the electronic device 50 of this application. The electronic device 50 includes a memory 51 and a processor 52 coupled to each other. The processor 52 is used to execute program instructions stored in the memory 51 to implement the steps in any of the temperature control method embodiments shown above. In a specific implementation scenario, the electronic device 50 may include, but is not limited to, a microcomputer or a server. In addition, the electronic device 50 may also include mobile devices such as laptops and tablets, which are not limited here.

[0074] Specifically, processor 52 controls itself and memory 51 to implement the steps in any of the above-described temperature control method embodiments. Processor 52 can also be referred to as a CPU (Central Processing Unit). Processor 52 may be an integrated circuit chip with signal processing capabilities. Processor 52 can also be a general-purpose processor, digital signal processor (DSP), application-specific integrated circuit (ASIC), field-programmable gate array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, or discrete hardware components. A general-purpose processor can be a microprocessor or any conventional processor. Furthermore, processor 52 can be implemented using integrated circuit chips.

[0075] Please see Figure 6 , Figure 6 This is a schematic diagram of a framework of an embodiment of the computer-readable storage medium 60 of this application. The computer-readable storage medium 60 stores program instructions 601 that can be executed by a processor. The program instructions 601 are used to implement the steps in any of the above-described temperature control method embodiments.

[0076] In some embodiments, the functions or modules of the apparatus provided in this disclosure can be used to perform the methods described in the above method embodiments. The specific implementation can be referred to the description of the above method embodiments, and for the sake of brevity, it will not be repeated here.

[0077] The description of the various embodiments above tends to emphasize the differences between the various embodiments. The similarities or similarities between them can be referred to, and for the sake of brevity, they will not be repeated here.

[0078] In the several embodiments provided in this application, it should be understood that the disclosed methods and apparatus can be implemented in other ways. For example, the apparatus implementations described above are merely illustrative; for instance, the division of modules or units is only a logical functional division, and in actual implementation, there may be other division methods. For example, units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the mutual coupling or direct coupling or communication connection shown or discussed may be through some interfaces; the indirect coupling or communication connection of devices or units may be electrical, mechanical, or other forms.

[0079] Furthermore, the functional units in the various embodiments of this application can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The integrated unit can be implemented in hardware or as a software functional unit.

[0080] If the integrated unit is implemented as a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or all or part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) or processor to execute all or part of the steps of the methods of various embodiments of this application. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

Claims

1. A cooling circulation system for cooling coil groups of a driving device, the driving device being used to move a target object to a first processing zone and a second processing zone for corresponding processing, the driving device comprising a first cavity located in the first processing zone and a second cavity located in the second processing zone, wherein coil groups are respectively disposed in the first cavity and the second cavity, characterized in that, The cooling circulation system includes: A refrigerant inlet is connected to the first cavity and is used to inlet refrigerant into the first cavity; The conduit includes a first sub-conduit and a second sub-conduit. The first sub-conduit connects the first cavity and the second cavity, allowing refrigerant in the first cavity to flow to the second cavity via the first sub-conduit. The second sub-conduit connects the refrigerant inlet and the second cavity, allowing refrigerant in the refrigerant inlet to flow to the second cavity via the second sub-conduit. The cavity outlet includes a first sub-cavity outlet and a second sub-cavity outlet. The first sub-cavity outlet is disposed on the first cavity, and the second sub-cavity outlet is disposed on the second cavity. The refrigerant in the first cavity can flow out through the first sub-cavity outlet, and the refrigerant in the second cavity can flow out through the second sub-cavity outlet. A controller is connected to the catheter and the cavity outlet respectively, and the controller is used to control the opening or closing of the catheter and the cavity outlet.

2. The system according to claim 1, characterized in that, One end of the first sub-catheter is connected to the catheter output port of the first cavity, and the other end of the first sub-catheter is connected to the first input port of the second cavity; One end of the second sub-conduit is connected to the refrigerant inlet, and the other end of the second sub-conduit is connected to the second inlet of the first cavity.

3. The system according to claim 2, characterized in that, The refrigerant inlet, the conduit outlet, and the first sub-cavity outlet are respectively located on different sides of the first cavity; And / or, the first input port, the second input port, and the second sub-cavity outlet are respectively located on different sides of the second cavity.

4. The system according to claim 1, characterized in that, The outlet of the first sub-cavity is located on the side of the first cavity away from the second cavity; And / or, the outlet of the second sub-cavity is located on the side of the second cavity away from the first cavity.

5. The system according to claim 1, characterized in that, The cooling circulation system also includes a temperature sensor disposed in the second cavity, the temperature sensor being used to send the detected internal temperature data of the second cavity to the controller; The controller is used to control the opening of the catheter and cavity outlet based on the internal temperature data.

6. The system according to claim 1, characterized in that, The catheter also includes: At least one valve is provided at at least one of the following connections: the connection between the first sub-conduit and the first cavity, the connection between the first sub-conduit and the second cavity, the connection between the second sub-conduit and the second cavity, and the connection between the second sub-conduit and the refrigerant inlet. Each valve is connected to the controller, which controls the conduit to conduct by controlling the valve to open.

7. The system according to claim 1, characterized in that, The first processing area is used to expose the target object, and the second processing area is used to measure the target object; And / or, the driving device further includes two platforms respectively disposed on the first processing area and the second processing area, the platforms being used to carry the target object and to move the target object under the drive of the coil group.

8. A temperature control method, characterized in that, The temperature control method is applied to the cooling circulation system according to any one of claims 1 to 7; the method includes: Obtain the internal temperature of the second cavity of the drive unit; Based on the internal temperature, the opening or closing of the conduit and cavity outlet in the cooling circulation system is controlled respectively.

9. The method according to claim 8, characterized in that, The catheter includes a first sub-catheter and a second sub-catheter, and the cavity outlet includes a first sub-cavity outlet and a second cavity outlet; The method of controlling the opening or closing of the conduit and cavity outlet in the cooling circulation system based on the internal temperature includes: In response to the internal temperature being greater than or equal to a first temperature threshold, the outlets of the first sub-catheter, the second sub-catheter, and the second sub-cavity are controlled to open, and the outlet of the first sub-cavity is controlled to close. In response to the internal temperature being greater than or equal to a second temperature threshold and less than a first temperature threshold, the second sub-catheter, the first sub-cavity outlet, and the second sub-cavity outlet are controlled to be open, and the first sub-catheter is controlled to be closed, wherein the first temperature threshold is greater than the second temperature threshold. In response to the internal temperature being lower than a second temperature threshold, the outlets of the first sub-catheter and the second sub-cavity are controlled to open, and the outlets of the second sub-catheter and the first sub-cavity are controlled to close.

10. The method according to claim 8, characterized in that, The control of opening or closing the conduit and cavity outlet in the cooling circulation system includes: The opening or closing of the conduit is controlled by controlling the opening or closing of the valve in the conduit.

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