Substrate cleaning apparatus and substrate cleaning method

Abstract

The application discloses a substrate cleaning device and a substrate cleaning method, and belongs to the technical field of thin film transistor display processing, and is designed to solve the problem that the existing substrate cleaning device is unstable when moving the substrate. The substrate cleaning device comprises two groups of sprayers, one group of sprayers has the same liquid outlet direction as the moving direction of the substrate to be cleaned, the other group of sprayers has the opposite liquid outlet direction to the moving direction of the substrate to be cleaned, the length of the strip-shaped liquid outlet is greater than the width of the substrate to be cleaned, and a cleaning liquid conveying assembly is arranged, wherein the cleaning liquid conveying pipe is located between the two groups of sprayers, and the cleaning liquid enters the sprayer from the cleaning liquid conveying pipe through the connecting pipe. The substrate cleaning device and the substrate cleaning method have the advantages that the pushing force directions of the cleaning liquid sprayed by the two groups of sprayers on the substrate to be cleaned are opposite, the two forces are offset, the substrate to be cleaned can keep a stable state in the whole cleaning process, and the cleaning efficiency of the substrate to be cleaned is improved.

Description

Technical Field

[0001] This invention relates to the field of thin-film transistor display processing technology, and more particularly to substrate cleaning apparatus and substrate cleaning method. Background Technology

[0002] A crucial component of thin-film transistor (TFT) displays is the substrate. To realize the substrate's function, a film needs to be deposited on it. If impurities exist between the substrate and the film, it will affect the substrate's performance and yield. Therefore, the substrate needs to be coated in a vacuum environment, and the substrate surface must be cleaned before coating to ensure that there are no residual particles, organic matter, or other impurities on the substrate surface.

[0003] Currently, commonly used substrate cleaning devices employ nozzles, with a slit or circular opening at the bottom. The cleaning solution is sprayed out in a fan or circular shape from the bottom of the nozzle. After the cleaning device is activated, the substrate passes under the nozzle, and the cleaning solution is sprayed from the front to the rear of the substrate. Since substrates are typically large, it is difficult for a single nozzle to cover both sides of the substrate with cleaning solution. To address this issue, some existing substrate cleaning devices arrange multiple nozzles in a row to ensure that the cleaning solution can cover both sides of the substrate laterally.

[0004] The shortcomings of existing substrate cleaning equipment include: in order to thoroughly clean the substrate surface, the nozzles usually spray the cleaning liquid at an angle towards the substrate surface. When the cleaning liquid reaches the substrate surface, it will exert a pushing force on the substrate. Whether the pushing force is in the same or opposite direction as the substrate's movement, it will affect the normal movement of the substrate, resulting in unstable substrate movement. When multiple nozzles arranged in a row spray the cleaning liquid at the same time, it is difficult to ensure that the cleaning liquid sprayed from each nozzle has the same flow rate. The difference in the flow rate of the cleaning liquid between nozzles will cause the substrate to vibrate or shift, affecting subsequent processes. Summary of the Invention

[0005] The purpose of this invention is to provide a substrate cleaning apparatus and a substrate cleaning method, which solves the problem of unstable substrate movement caused by existing substrate cleaning apparatuses and achieves good cleaning effect.

[0006] To achieve this objective, the present invention employs the following technical solution:

[0007] The substrate cleaning apparatus includes:

[0008] Two sets of sprayers are provided. Each sprayer has an internal cavity for holding cleaning fluid. A continuous strip-shaped outlet is located at the bottom of each sprayer. The cavity is connected to the external space through the outlet. The cleaning fluid is sprayed obliquely onto the substrate to be cleaned through the outlet. The outlet direction of one set of sprayers is the same as the moving direction of the substrate, while the outlet direction of the other set is opposite to the moving direction. The length of the strip-shaped outlet is greater than the width of the substrate, allowing the cleaning fluid to cover the entire substrate.

[0009] A cleaning fluid delivery assembly includes a cleaning fluid delivery pipe and at least two connecting pipes. The cleaning fluid delivery pipe is located between two sets of sprayers. The cleaning fluid delivery pipe is used to deliver the cleaning fluid. At least one connecting pipe is connected between the cleaning fluid delivery pipe and each set of sprayers. The cleaning fluid enters the sprayer from the cleaning fluid delivery pipe through the connecting pipe.

[0010] In one preferred embodiment, the strip-shaped liquid outlets of the two sets of sprayers are arranged in parallel, and the extension direction of the two strip-shaped liquid outlets is perpendicular to the moving direction of the substrate to be cleaned.

[0011] In one preferred embodiment, each of the sprayers is fixedly mounted with a sprayer shaft and a driver. The driver can drive the sprayer shaft to rotate around its own axis, and the sprayer can rotate synchronously with the sprayer shaft.

[0012] In one preferred embodiment, each set of sprayers is fixedly equipped with a sprayer shaft and a gear. The gear is sleeved on the sprayer shaft, and the two sets of gears have the same number of teeth and mesh with each other. The sprayer shaft of one set of sprayers is connected to a driving component, which can drive the sprayer shaft to rotate around its own axis. The sprayer can rotate synchronously with the sprayer shaft, and the sprayer shafts of the two sets of sprayers can rotate synchronously in opposite directions by the same angle.

[0013] In one preferred embodiment, each of the receiving cavities is provided with a long strip-shaped rotating nozzle at its bottom. The outlet end of the rotating nozzle is located at the strip-shaped liquid outlet. The two ends of the rotating nozzle are hinged to the side of the receiving cavity. When the rotating nozzle rotates around the hinge axis, it can change the tilt angle of the cleaning liquid relative to the surface of the substrate to be cleaned.

[0014] In one preferred embodiment, the spray angle of the cleaning liquid sprayed by each group of sprayers relative to the surface of the substrate to be cleaned is 40°±10°.

[0015] In one preferred embodiment, the substrate cleaning device further includes a matching screw and nut. At at least one end of the strip-shaped liquid outlet, the screw passes through both sides of the strip-shaped liquid outlet. The end of the screw is provided with a radially protruding limiting end. The limiting end and the nut respectively abut against the outer wall of both sides of the strip-shaped liquid outlet. The width of the strip-shaped liquid outlet is changed by adjusting the position of the nut on the screw.

[0016] In one preferred embodiment, the substrate cleaning apparatus further includes a liquid reservoir, a liquid delivery pump, a gas reservoir, a gas-liquid mixer, and a gas-liquid delivery pump. The liquid reservoir and the liquid delivery pump are sequentially connected to the gas-liquid mixer via pipelines. The gas reservoir is connected to the gas-liquid mixer via a pipeline. The gas-liquid mixer is connected to the gas-liquid delivery pump via a pipeline. The gas-liquid delivery pump is connected to the cleaning fluid delivery pipe via a pipeline. The gas-liquid mixer is used to mix the gas and liquid entering it to form a gas-liquid mixture, and the gas-liquid mixture is sent into the receiving cavity as a cleaning fluid.

[0017] In one preferred embodiment, the gas-liquid mixer is provided with a temperature control element that can increase or decrease the temperature of the gas-liquid mixture.

[0018] On the other hand, the present invention adopts the following technical solution:

[0019] The substrate cleaning method, based on the aforementioned substrate cleaning apparatus, involves one set of sprayers spraying cleaning liquid along the moving direction of the substrate to be cleaned, and another set of sprayers spraying cleaning liquid against the moving direction of the substrate to be cleaned. On the substrate to be cleaned, the distance L between the cleaning liquids sprayed by the two sets of sprayers is greater than a set value.

[0020] The substrate cleaning apparatus disclosed in this invention has two sets of sprayers that spray cleaning liquids onto the substrate to be cleaned in opposite directions. The two forces cancel each other out, preventing the substrate from being unable to move normally due to the impact of the cleaning liquid. The substrate can remain stable throughout the cleaning process, improving the cleaning efficiency of the substrate and not affecting the normal progress of subsequent coating processes.

[0021] The substrate cleaning method disclosed in this invention is based on the substrate cleaning apparatus described above. One set of sprayers sprays cleaning liquid in the direction of movement of the substrate to be cleaned, and another set of sprayers sprays cleaning liquid in the opposite direction of movement of the substrate to be cleaned. While ensuring thorough cleaning of the surface of the substrate to be cleaned, the impact force of the cleaning liquid on the surface of the substrate to be cleaned is reduced, and the movement of the substrate to be cleaned is more stable. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the substrate cleaning device provided in a specific embodiment of the present invention;

[0023] Figure 2 This is a schematic diagram of a half-section of the sprayer provided in a specific embodiment of the present invention;

[0024] Figure 3 This is a schematic diagram of a substrate cleaning method provided in a specific embodiment of the present invention;

[0025] Figure 4 This is a schematic diagram of another substrate cleaning method provided in a specific embodiment of the present invention;

[0026] Figure 5 This is a schematic diagram of the strip-shaped liquid outlet width adjustment structure provided in a specific embodiment of the present invention.

[0027] In the picture:

[0028] 1. Sprayer; 2. Substrate to be cleaned; 4. Screw; 5. Nut; 11. Receiving cavity; 12. Strip-shaped liquid outlet; 13. Liquid inlet; 14. Sprayer shaft; 31. Cleaning fluid delivery pipe; 32. Connecting pipe; 33. Flow regulating valve; 41. Limiting end. Detailed Implementation

[0029] To make the above-mentioned objects, features, and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of the present invention. However, the present invention can be practiced in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0030] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0031] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0032] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0033] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0034] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0035] This embodiment discloses a substrate cleaning apparatus that can be used, but is not limited to, for cleaning substrates in the processing of thin-film transistor displays. It ensures that the substrate is clean before coating, and guarantees the performance and yield of the product after coating, resulting in strong product competitiveness.

[0036] like Figure 1 and Figure 2As shown, the substrate cleaning apparatus includes two sets of sprayers 1 and a cleaning fluid delivery assembly. The cleaning fluid delivery assembly includes a cleaning fluid delivery pipe 31 and at least two connecting pipes 32. The cleaning fluid delivery pipe 31 is located between the two sets of sprayers 1, and at least one connecting pipe 32 connects the cleaning fluid delivery pipe 31 to each set of sprayers 1. The cleaning fluid enters the sprayer 1 from the cleaning fluid delivery pipe 31 through the connecting pipe 32.

[0037] The sprayer 1 has an internal cavity 11 for holding the cleaning fluid. The sprayer 1 is equipped with an inlet hole 13, allowing the cleaning fluid from the cleaning fluid delivery pipe 31 to enter the cavity 11 through the connecting pipe 32 and the inlet hole 13. A continuous strip-shaped outlet 12 is located at the bottom of the sprayer 1, connecting the cavity 11 to the external space. The cleaning fluid is sprayed obliquely onto the substrate 2 to be cleaned through the strip-shaped outlet 12. This oblique spraying of the cleaning fluid effectively cleans the substrate 2, removing and carrying away particles and organic matter of various sizes adhering to the surface of the substrate 2. This method is suitable for cleaning substrates 2 with various surface conditions and types of impurities.

[0038] One set of sprayers 1 has a liquid outlet direction that is the same as the moving direction of the substrate 2 to be cleaned, while the other set of sprayers 1 has a liquid outlet direction that is opposite to the moving direction of the substrate 2 to be cleaned. Figure 1 The straight line with double arrows next to the substrate 2 to be cleaned indicates the direction of movement of the substrate 2 to be cleaned; that is, the substrate 2 to be cleaned can move to the left or to the right.

[0039] Regardless of the specific direction of movement of the substrate 2 to be cleaned, it is necessary that the liquid outlet direction of one set of sprayers 1 is the same as the direction of movement of the substrate 2 to be cleaned, and the liquid outlet direction of the other set of sprayers 1 is opposite to the direction of movement of the substrate 2 to be cleaned, so as to obtain a better cleaning effect.

[0040] The cleaning fluid sprayed by the two sets of sprayers 1 exerts opposite forces on the substrate 2 to be cleaned. The two forces cancel each other out, preventing the substrate 2 from being unable to move normally due to the impact of the cleaning fluid. The substrate 2 can remain stable throughout the cleaning process, improving the cleaning efficiency of the substrate 2 and not affecting the normal progress of subsequent coating processes.

[0041] The length of the strip-shaped liquid outlet 12 is greater than the width of the substrate 2 to be cleaned, so that the cleaning liquid covers the entire substrate 2. Replacing the multiple nozzles arranged in a row in the prior art with a continuous strip-shaped liquid outlet 12, the flow rate, flow rate and pressure of the cleaning liquid are more evenly distributed when sprayed from the strip-shaped liquid outlet 12. This solves the problem of substrate vibration or displacement caused by different flow rates of cleaning liquid between multiple nozzles in the prior art. It also solves the problem of uneven distribution of cleaning liquid on the substrate 2 caused by water particle collisions between adjacent nozzles in the prior art. The cleaning effect is better and the substrate 2 moves more smoothly.

[0042] When particulate matter or other impurities become stuck in the strip-shaped liquid outlet 12, the cleaning fluid sprayed from other locations in the strip-shaped liquid outlet 12 will squeeze and collide with the blockage, causing the blockage to be dislodged from the strip-shaped liquid outlet 12. Whether the blockage returns to the receiving cavity 11 or is sprayed out of the strip-shaped liquid outlet 12 with the cleaning fluid, it avoids the formation of cleaning blind spots on the surface of the substrate 2 due to blockage of the strip-shaped liquid outlet 12. When the blockage is sprayed out of the strip-shaped liquid outlet 12 with the cleaning fluid, the blockage will not adhere to the surface of the substrate 2; instead, it will be carried away by the cleaning fluid along with other impurities on the surface of the substrate 2, ensuring that the substrate 2 is sufficiently clean after cleaning and will not affect subsequent coating processes.

[0043] exist Figure 3 and Figure 4 In the diagram, the straight line with an arrow next to the substrate 2 to be cleaned indicates the direction of movement of the substrate 2. In this embodiment, the example of the substrate 2 moving to the right is used for explanation. It can be understood that the substrate cleaning method is the same when the substrate 2 moves to the left.

[0044] The substrate cleaning method based on the above-mentioned substrate cleaning apparatus is as follows: one set of sprayers 1 sprays cleaning liquid along the moving direction of the substrate 2 to be cleaned, and another set of sprayers 1 sprays cleaning liquid against the moving direction of the substrate 2 to be cleaned. This ensures thorough cleaning of the surface of the substrate 2 to be cleaned while reducing the impact force of the cleaning liquid on the surface of the substrate 2 to be cleaned, resulting in smoother movement of the substrate 2. Based on the relative positional relationship of the two sprayers 1, this substrate cleaning method can be divided into the following two execution methods.

[0045] The first execution method: such as Figure 3As shown, two sprayers 1 are arranged facing each other. The sprayer 1 on the left sprays the cleaning solution towards the right, so the sprayer 1 on the left sprays the cleaning solution in the direction of movement of the substrate 2 to be cleaned; the sprayer 1 on the right sprays the cleaning solution towards the left, so the sprayer 1 on the right sprays the cleaning solution against the direction of movement of the substrate 2 to be cleaned. The cleaning solution sprayed by the sprayer 1 on the left assists in the movement of the substrate 2 to be cleaned, while the cleaning solution sprayed by the sprayer 1 on the right hinders the movement of the substrate 2 to be cleaned. The assisting and hindering forces cancel each other out, allowing the substrate 2 to move normally under the drive of the rollers or conveyor belt.

[0046] The second execution method: such as Figure 4 As shown, the two sprayers 1 are arranged opposite each other. The sprayer 1 on the left sprays the cleaning solution to the left, so it sprays the cleaning solution against the direction of movement of the substrate 2 to be cleaned. The sprayer 1 on the right sprays the cleaning solution to the right, so it sprays the cleaning solution in the direction of movement of the substrate 2 to be cleaned. Accordingly, the cleaning solution sprayed by the sprayer 1 on the left hinders the movement of the substrate 2 to be cleaned, while the cleaning solution sprayed by the sprayer 1 on the right assists the movement of the substrate 2 to be cleaned. The assisting and hindering forces cancel each other out, and the substrate 2 to be cleaned can move normally under the drive of the rollers or conveyor belt.

[0047] When the cleaning liquid sprayed from the two sets of sprayers 1 can reach the same position on the surface of the substrate 2 to be cleaned, it can better remove impurities from the surface of the substrate 2. In particular, when impurities such as particulate matter and organic matter adhere to the surface of the substrate 2 to be cleaned, spraying the cleaning liquid from both the front and rear sides at the same time can better peel the impurities off the surface of the substrate 2 to be cleaned, resulting in a more thorough cleaning.

[0048] However, if the cleaning fluid sprayed from the two sets of sprayers 1 is too close together, it can cause interference and collision between water particles, resulting in uneven distribution of the cleaning fluid on the surface of the substrate 2 to be cleaned, which reduces the cleaning ability. In other words, having the cleaning fluid sprayed from the two sets of sprayers 1 relatively close together has both advantages and disadvantages, and the specific distance value needs to be designed according to actual usage requirements. In this embodiment, the distance L between the cleaning fluid sprayed from the two sets of sprayers 1 on the substrate 2 to be cleaned is greater than a set value. The value of this distance L is not specifically limited and needs to be determined based on the state factors of the substrate 2 to be cleaned. These state factors can include, but are not limited to, the shape of the substrate 2 to be cleaned, the material used in its fabrication, the adhesion strength to impurities, and whether there were preceding heating or bonding processes. These state factors mainly affect the strength of the adhesion between impurities and the surface of the substrate 2 to be cleaned.

[0049] The specific spatial orientation of the sprayer 1 is not limited, as long as the strip-shaped liquid outlet 12 spans above the substrate 2 to be cleaned, and the substrate 2 passes through the liquid curtain formed by the cleaning liquid as it passes under the strip-shaped liquid outlet 12. To improve the cleaning effect, such as Figures 1 to 4 As shown, the strip-shaped liquid outlets 12 of the two sets of sprayers 1 are arranged in parallel, so that the cleaning liquid sprayed from the two strip-shaped liquid outlets 12 has a more balanced force on the surface of the substrate 2 to be cleaned, and can ensure that the substrate 2 to be cleaned can move stably as much as possible.

[0050] Moreover, the extension direction of the two strip-shaped liquid outlets 12 is perpendicular to the moving direction of the substrate 2 to be cleaned, so as to minimize the requirement for the length of the strip-shaped liquid outlets 12, reduce the volume of the sprayer 1, reduce the amount of cleaning liquid, reduce cost and energy consumption, and make the sprayer 1 more convenient to use.

[0051] Since different batches or types of substrates 2 to be cleaned may have different requirements for the spray angle of the cleaning solution, the cleaning solution needs to be able to swing to different tilt angles relative to the surface of the substrate 2 to be cleaned. The specific structure for changing the spray angle of the cleaning solution is not limited. In this embodiment, it mainly includes two methods: rotating the sprayer 1 and rotating other structures.

[0052] The strip-shaped liquid outlet 12 is located at the bottom of the sprayer 1. When the sprayer 1 is rotated at a set angle relative to the surface of the substrate 2 to be cleaned, the orientation of the strip-shaped liquid outlet 12 is also rotated at a set angle relative to the surface of the substrate 2 to be cleaned, thereby changing the angle between the cleaning liquid and the surface of the substrate 2 to be cleaned.

[0053] There are two main methods to achieve the rotation of the sprayer 1. One method is that each sprayer 1 is fixedly equipped with a sprayer shaft 14 and a driver. The driver can drive the sprayer shaft 14 to rotate around its own axis, and the sprayer 1 can rotate synchronously with the sprayer shaft 14. The driver can be, but is not limited to, a motor, as long as it can drive the sprayer shaft 14 to rotate around its own axis.

[0054] By using two drivers to control the rotation of two sets of sprayers 1 respectively, the two sets of sprayers 1 can be made to have different cleaning angles relative to the surface of the substrate 2 to be cleaned as needed. This makes the method more flexible and has a wide range of applications. It can adjust the tilt angle of each set of sprayers 1 to achieve better cleaning results, depending on the uneven distribution of impurities or particularly stubborn adhesion on the surface of the substrate 2 to be cleaned.

[0055] Another method is as follows: Each set of sprayers 1 is fixedly equipped with a sprayer shaft 14 and a gear. The gear is sleeved on the sprayer shaft 14, and the two sets of gears have the same number of teeth and mesh with each other. The sprayer shaft 14 of one set of sprayers 1 is connected to a driving component, which can drive the sprayer shaft 14 to rotate around its own axis. The sprayer 1 can rotate synchronously with the sprayer shaft 14, and the sprayer shafts 14 of the two sets of sprayers 1 can rotate synchronously in opposite directions by the same angle. The driving component can be, but is not limited to, a motor, as long as it can drive the sprayer shaft 14 to rotate around its own axis.

[0056] In this structure, the sprayer shaft 14 connected to the drive unit is the driving shaft, and the other sprayer shaft 14 is the driven shaft. The driving shaft and the driven shaft are driven by two gears with the same number of teeth, ensuring that the two sprayer shafts 14 can rotate synchronously in opposite directions by the same angle. As long as the angle between the two sets of sprayers 1 and the surface of the substrate 2 to be cleaned is the same in the initial state, the angle between the two sets of sprayers 1 and the surface of the substrate 2 to be cleaned will always be the same, no matter how the drive unit moves. The cleaning liquid sprayed by the two sets of sprayers 1 will always reach the surface of the substrate 2 to be cleaned at the same tilt angle, and the impact force on the surface of the substrate 2 to be cleaned can always cancel each other out, making the movement of the substrate 2 to be cleaned more stable.

[0057] To facilitate adjustment of the sprayer 1's tilt angle, a ring of graduations (e.g., a short line or a dot) can be engraved or drawn on the sprayer's rotating shaft 14, and an origin point can be engraved or drawn on a fixed component. When the strip-shaped liquid outlet 12 is vertically downward, the graduation mark on the sprayer's rotating shaft 14 aligned with the origin is 0°, and the degrees of other graduation marks are calculated from this 0°. Specifically, multiple graduation marks are evenly engraved or drawn on the outer circumference of the sprayer's rotating shaft 14, and the angle difference between two adjacent graduation marks is 360° divided by the number of graduation marks.

[0058] Of course, it is not necessary to use the graduation mark aligned with the origin when the strip outlet 12 is in a vertically downward position as 0°. It can also be set to 0° when the sprayer 1 is in other spatial positions. The determination of the 0° point is only for determining the angle value of other graduation marks and does not affect the normal use of the sprayer 1.

[0059] The specific number of graduation marks engraved or drawn on the outer circumference of the sprayer shaft 14 is not limited, but it cannot be too many, as closely spaced graduation marks will affect the reading value; nor can it be too few, as the angle control precision will be low. In this embodiment, seventy-two graduation marks are engraved or drawn on the outer circumference of the sprayer shaft 14, and the angle difference between two adjacent graduation marks is 5°, which makes it more convenient to use and improves the efficiency of angle adjustment.

[0060] To avoid damaging the outer circumference of the sprayer shaft 14, other methods can be used instead of engraving or drawing the graduation marks. In this embodiment, a ring-shaped sleeve made of rubber, metal, or wood is fitted around the outer circumference of the sprayer shaft 14, and then graduation marks are evenly engraved or drawn on the sleeve. When the graduation marks become faded or damaged, only a new sleeve needs to be replaced to repair the graduation marks, without needing to replace the entire sprayer shaft 14. This makes it more convenient to use, reduces operating costs, and extends the service life of the sprayer shaft 14.

[0061] The sprayer 1 and the cleaning fluid contained therein have a certain weight. When the sprayer shaft 14 rotates the sprayer 1 to a certain angle, the weight of the sprayer 1 and the cleaning fluid tends to cause the sprayer shaft 14 to rotate in the opposite direction and return to its original position. To solve this problem, the substrate cleaning device also includes a stop member. When the stop member is attached to the outer wall of the sprayer shaft 14, it can prevent the sprayer shaft 14 from rotating in the opposite direction, thereby keeping the sprayer 1 at the set cleaning angle. The sprayer 1 will not change its angle throughout the entire spraying process, thereby ensuring that the cleaning fluid can be sprayed evenly on the surface of the substrate 2 to be cleaned and avoiding cleaning blind spots.

[0062] The specific structure of the stop is not limited; any existing structure that can provide a stopping effect and cooperate with the sprayer shaft 14 is acceptable. In this embodiment, the stop includes a semi-circular base made of metal, hard plastic, or wood, and a semi-circular friction part made of soft rubber, cloth, paper, or fur. The materials used to make the friction part all possess high frictional strength, enabling better application of stopping frictional force to the sprayer shaft 14. The shape and size of the base and the friction part are consistent with the outer circumferential surface of the sprayer shaft 14, ensuring a sufficiently large contact area between the friction part and the sprayer shaft 14, resulting in stronger stopping capability.

[0063] The base is fixedly connected to the motor or push-pull rod. When it is necessary to adjust the rotation angle of the sprayer shaft 14, the motor or push-pull rod drives the base away from the sprayer shaft 14 to ensure that the sprayer shaft 14 can be smoothly and accurately adjusted to the target angle value. After the sprayer shaft 14 has finished rotating, the motor or push-pull rod drives the base to approach the sprayer shaft 14 until the friction part is tightly attached to the outer circumferential surface of the sprayer shaft 14.

[0064] With the support of the motor or push-pull rod, the base and friction part can always remain in a fixed state. The friction force provided by the friction part to the sprayer shaft 14 is sufficient to counteract the torque exerted on the sprayer shaft 14 by the sprayer 1 and the cleaning fluid, thereby completely stopping the sprayer shaft 14 and preventing it from rotating in the opposite direction. The cleaning fluid can be sprayed onto the surface of the substrate 2 to be cleaned at an ideal angle, resulting in a good cleaning effect.

[0065] The specific structure of "changing the spray angle of the cleaning liquid to rotate other structures" is not limited. In this embodiment, each receiving cavity 11 is provided with a long strip-shaped rotating nozzle at the bottom. The outlet end of the rotating nozzle is located at the strip-shaped liquid outlet 12. The two ends of the rotating nozzle are hinged to the side of the receiving cavity 11. When the rotating nozzle rotates around the hinge axis, it can change the tilt angle of the cleaning liquid relative to the surface of the substrate 2 to be cleaned.

[0066] The shape of the rotating nozzle is the same as that of the strip-shaped liquid outlet 12, but slightly smaller in size, so that the rotating nozzle can be inserted into the strip-shaped liquid outlet 12 and can rotate relative to the surface of the substrate 2 to be cleaned. In use, the strip-shaped liquid outlet 12 is always in a vertically downward position. By changing the orientation of the rotating nozzle, the spray direction of the cleaning liquid can be changed, achieving the same cleaning effect as the oscillating sprayer 1.

[0067] In order to enable the rotary nozzle to swing more smoothly in the strip outlet 12, a rotating shaft is provided at both ends of the rotary nozzle. The rotating shaft passes through the wall of the strip outlet 12 and is connected to the output end of the drive unit. The drive unit can drive the rotating shaft to rotate clockwise or counterclockwise around its own axis, so that the rotary nozzle and the rotating shaft rotate synchronously.

[0068] To prevent the cleaning fluid from seeping between the outer surface of the rotary nozzle and the inner surface of the strip outlet 12, a seal is provided between the rotary nozzle and the strip outlet 12 to ensure that there are no gaps between them.

[0069] Since the gap between the rotary nozzle and the strip outlet 12 may widen or narrow during the rotation of the rotary nozzle within the strip outlet 12, in this embodiment, the sealing element is a sealing strip or sealing ring made of soft rubber. Soft rubber has good elastic deformation capabilities; in the initial state, the sealing element is slightly flattened and fills the gap between the rotary nozzle and the strip outlet 12. During the rotation of the rotary nozzle, when the gap between the rotary nozzle and the strip outlet 12 widens, the cross-section of the sealing element becomes appropriately rounded, completely filling the gap; when the gap narrows, the sealing element is flattened further, still tightly filling the gap, providing good protection against cleaning fluid leakage.

[0070] To prevent the rotating nozzle from reversing and resetting due to its own weight or the pressure of the cleaning fluid after swinging to the set angle, a stop is provided at the rotating shaft of the rotating nozzle in this embodiment. Specifically, rotating shafts are provided at both ends of the rotating nozzle, one of which is connected to the drive component, and the stop is located near the other rotating shaft.

[0071] The specific structure of the stop is not limited; any existing structure capable of stopping the rotating shaft is acceptable. In this embodiment, the stop includes a connected base, a friction part, and a driving device. The base, made of metal, hard plastic, or wood, provides support for the friction part; the friction part, made of soft rubber, cloth, paper, or fur, generates sufficient friction with the rotating shaft; the output end of the driving device is connected to the base, driving the base to move and providing support. The specific shapes of the base and friction part are not limited, as long as they can fully contact the rotating shaft. In this embodiment, both the base and the friction part are semi-circular, slightly larger than the rotating shaft, to ensure full contact between the friction part and the shaft, thus improving the stopping capability.

[0072] When the tilt angle of the rotating nozzle needs to be adjusted, the motor or push-pull rod, which serves as the drive device, moves the base away from the rotating shaft to avoid affecting the normal rotation of the shaft. After the rotating shaft has rotated to the set angle, the motor or push-pull rod moves the base closer to the rotating shaft until the friction part is attached to the outer circumference of the rotating shaft, providing a stopping force for the rotating shaft. This ensures that the rotating nozzle will not malfunction during the entire cleaning process, and the cleaning fluid can always maintain a reasonable spray angle, resulting in good cleaning effect.

[0073] The cleaning effect can be improved by spraying the cleaning solution at an angle onto the surface of the substrate 2 to be cleaned, and the specific angle is not limited. In this embodiment, the spraying angle of the cleaning solution sprayed by each group of sprayers 1 relative to the surface of the substrate 2 to be cleaned is 40°±10°, preferably 30°, 35°, 40°, 45° and 50°, which can better remove impurities on the surface of the substrate 2 to be cleaned and prepare it for the subsequent coating process.

[0074] The substrate cleaning device can adjust the spray angle of the cleaning liquid to adapt to various usage requirements, and can more thoroughly remove impurities from the surface of the substrate 2 to be cleaned, improve the cleaning effect, and make the movement of the substrate 2 to be cleaned more stable.

[0075] Besides changing the spray angle of the cleaning solution to improve the cleaning effect, changing the spray flow rate of the cleaning solution also improves the cleaning effect. Specifically, when the spray flow rate of the cleaning solution is high, the impact force on the surface of the substrate 2 to be cleaned is strong, which can better remove impurities from the surface of the substrate 2 to be cleaned. Especially when impurities are stuck to the surface of the substrate 2 to be cleaned, the cleaning ability of the high-speed liquid flow is more significant. When the spray flow rate of the cleaning solution is low, the impact force on the surface of the substrate 2 to be cleaned is small, avoiding damage to the substrate 2 to be cleaned, and the movement of the substrate 2 to be cleaned is more stable.

[0076] The specific method for changing the spray flow rate of the cleaning fluid is not limited. In this embodiment, the flow rate of the cleaning fluid can be changed by altering the width of the strip outlet 12. Specifically, when there is sufficient cleaning fluid in the receiving cavity 11, the wider the strip outlet 12, the lower the flow rate of the cleaning fluid when it leaves the strip outlet 12; the narrower the strip outlet 12, the higher the flow rate of the cleaning fluid when it leaves the strip outlet 12.

[0077] The specific structure for adjusting the width of the strip outlet 12 is not limited; in this embodiment, for example... Figure 5 As shown, the substrate cleaning device also includes a screw 4 and a nut 5 that are adapted to each other. At at least one end of the strip-shaped liquid outlet 12, the screw 4 passes through both sides of the strip-shaped liquid outlet 12. The end of the screw 4 is provided with a radially protruding limiting end 41. The limiting end 41 and the nut 5 respectively abut against the outer wall of both sides of the strip-shaped liquid outlet 12. The width of the strip-shaped liquid outlet 12 can be changed by adjusting the position of the nut 5 on the screw 4.

[0078] Regardless of whether the sprayer 1 is made of metal or hard plastic, its edges possess a certain degree of elastic deformation capability. The closer the distance between the limiting end 41 and the nut 5, the more the edge of the sprayer 1 is deformed, the two sides of the strip-shaped liquid outlet 12 move closer together, and the width of the strip-shaped liquid outlet 12 becomes narrower; the farther the distance between the limiting end 41 and the nut 5, the more the edge of the sprayer 1 returns to its original shape, the two sides of the strip-shaped liquid outlet 12 move further apart, and the width of the strip-shaped liquid outlet 12 becomes wider.

[0079] The screw 4 and nut 5 are only located at the end of the strip-shaped liquid outlet 12. Their position extends beyond the side of the substrate 2 to be cleaned. The screw 4 and nut 5 will not affect the spraying of cleaning liquid onto the surface of the substrate 2 to be cleaned, and will not form a cleaning blind zone on the surface of the substrate 2 to be cleaned, resulting in a good cleaning effect.

[0080] When it is necessary to adjust the spray angle of the cleaning fluid using a rotary nozzle, the width of the rotary nozzle can be changed using the same structure. Specifically, the screw 4 passes through the end of the rotary nozzle, and the limiting end 41 and the nut 5 abut against the outer walls of the two sides of the rotary nozzle from opposite sides. When it is necessary to reduce the width of the rotary nozzle, the nut 5 is rotated and moved along the screw 4 towards the limiting end 41; when it is necessary to increase the width of the rotary nozzle, the nut 5 is rotated and moved along the screw 4 away from the limiting end 41.

[0081] Based on the above structure, the substrate cleaning apparatus also includes a liquid storage tank, a liquid transfer pump, a gas storage tank, a gas-liquid mixer, a gas-liquid transfer pump, and a control device. The liquid storage tank and the liquid transfer pump are connected to the gas-liquid mixer in sequence through pipelines. The gas storage tank is connected to the gas-liquid mixer through a pipeline. The gas-liquid mixer is connected to the gas-liquid transfer pump through a pipeline. The gas-liquid transfer pump is connected to the cleaning liquid delivery pipe 31 through a pipeline.

[0082] The gas-liquid mixer mixes incoming gas and liquid to form a gas-liquid mixture (liquid with bubbles), which serves as the cleaning fluid. Using a gas-liquid mixture as the cleaning fluid results in stronger cleaning capabilities. Specifically, when the gas-liquid mixture is sprayed onto the surface of the substrate 2 to be cleaned, the impact causes the bubbles in the liquid to burst. The bursting of the bubbles generates a small impact force, which helps to flush impurities away from the surface of the substrate 2, improving cleaning efficiency. In addition, the gas-liquid mixture can impact blockages in the strip-shaped liquid outlet 12, causing the blockages to exit the strip-shaped liquid outlet 12 or be flushed out of the strip-shaped liquid outlet 12 along with the cleaning fluid. This avoids the formation of cleaning blind spots on the surface of the substrate 2 due to blockage of the strip-shaped liquid outlet 12, resulting in better cleaning performance.

[0083] A liquid flow regulating valve is installed on the pipeline between the liquid transfer pump and the gas-liquid mixer, and a gas flow regulating valve is installed on the pipeline between the gas storage tank and the gas-liquid mixer. The control device is connected to the liquid transfer pump, the liquid flow regulating valve, the gas flow regulating valve, and the gas-liquid transfer pump, respectively.

[0084] In this embodiment, the control device can be a centralized or distributed controller. For example, the controller can be a single microcontroller or a combination of multiple distributed microcontrollers. The microcontroller can run a control program to control the liquid transfer pump, liquid flow regulating valve, gas flow regulating valve and gas-liquid transfer pump to achieve their functions.

[0085] The liquid flow regulating valve and the gas flow regulating valve can control the mixing ratio of gas and liquid in the gas-liquid mixer, and ensure that the gas and liquid are uniformly mixed into a gas-liquid mixture (liquid with bubbles) in the gas-liquid mixer. The cleaning liquid delivery pipe 31 is set between the two sets of sprayers 1, and the bubble-filled liquid in the cleaning liquid delivery pipe 31 is guided to the receiving cavity 11 of each set of sprayers 1 through multiple connecting pipes 32, ensuring that the pressure, bubble content and other parameters of the cleaning liquid (bubble-filled liquid) in the two sets of sprayers 1 are the same, and the impact force when the cleaning liquid is sprayed onto the surface of the substrate 2 to be cleaned is the same, making the movement of the substrate 2 to be cleaned more stable; the two sets of sprayers 1 are filled with the same bubble-filled liquid, and the cleaning effect on the surface of the substrate 2 to be cleaned is the same, and the surface will not have cleaning blind spots or uneven cleaning effect.

[0086] To better control the spray speed, spray volume, and pressure of the cleaning fluid, a flow regulating valve 33 is installed on the cleaning fluid delivery pipe 31. When the flow regulating valve 33 indicates that the pressure in the cleaning fluid delivery pipe 31 is too high, the control device reduces the opening of the gas-liquid delivery pump to reduce the gas-liquid mixture entering the cleaning fluid delivery pipe 31; when the flow regulating valve 33 indicates that the pressure in the cleaning fluid delivery pipe 31 is too low, the control device increases the opening of the gas-liquid delivery pump to increase the gas-liquid mixture entering the cleaning fluid delivery pipe 31.

[0087] Based on the above structure, the gas-liquid mixer is equipped with a temperature control element, which can raise or lower the temperature of the gas-liquid mixture to meet the temperature requirements of the cleaning solution for the substrate 2 to be cleaned. In particular, when the cleaning solution is raised to a certain temperature, the activity of the cleaning solution and the surface of the substrate 2 to be cleaned can be enhanced, and residual impurities such as particulate matter and organic matter adhering to the surface of the substrate 2 to be cleaned can be removed more thoroughly and efficiently.

[0088] The specific structure of the temperature control element is not limited; any existing technology capable of changing the temperature of the gas-liquid mixture can be used. In this embodiment, the temperature control element is a heating wire sealed in a housing. After activation, the heating wire heats the gas-liquid mixture in the gas-liquid mixer, resulting in better cleaning and decontamination effects. Existing heating wire products are mature and can accurately and efficiently control the temperature, allowing for controllable temperature and activity of the gas-liquid mixture, providing a good user experience.

[0089] Note that the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of the present invention, the scope of which is determined by the scope of the appended claims.

Claims

1. A substrate cleaning apparatus, characterized in that, include: Two sets of sprayers (1) are provided. Each sprayer (1) has an internal cavity (11) for containing cleaning fluid. A continuous strip-shaped outlet (12) is provided at the bottom of each sprayer (1). The cavity (11) is connected to the external space through the strip-shaped outlet (12). The cleaning fluid is sprayed obliquely onto the substrate (2) to be cleaned through the strip-shaped outlet (12). The outlet direction of one set of sprayers (1) is the same as the moving direction of the substrate (2) to be cleaned, while the outlet direction of the other set of sprayers (1) is opposite to the moving direction of the substrate (2) to be cleaned. The length of the strip-shaped outlet (12) is greater than the width of the substrate (2) to be cleaned, so that the cleaning fluid covers the entire substrate (2) to be cleaned. The cleaning fluid delivery assembly includes a cleaning fluid delivery pipe (31) and at least two connecting pipes (32). The cleaning fluid delivery pipe (31) is located between two sets of sprayers (1). The cleaning fluid delivery pipe (31) is used to deliver the cleaning fluid. At least one connecting pipe (32) is connected between the cleaning fluid delivery pipe (31) and each set of sprayers (1). The cleaning fluid enters the sprayer (1) from the cleaning fluid delivery pipe (31) through the connecting pipe (32).

2. The substrate cleaning apparatus according to claim 1, characterized in that, The strip-shaped liquid outlets (12) of the two sets of sprayers (1) are arranged in parallel, and the extension direction of the two strip-shaped liquid outlets (12) is perpendicular to the moving direction of the substrate (2) to be cleaned.

3. The substrate cleaning apparatus according to claim 1, characterized in that, Each set of sprayers (1) is fixedly equipped with a sprayer shaft (14) and a driver. The driver can drive the sprayer shaft (14) to rotate around its own axis, and the sprayer (1) can rotate synchronously with the sprayer shaft (14).

4. The substrate cleaning apparatus according to claim 1, characterized in that, Each set of sprayers (1) is fixedly equipped with a sprayer shaft (14) and a gear. The gear is sleeved on the sprayer shaft (14). The two sets of gears have the same number of teeth and mesh with each other. The sprayer shaft (14) of one set of sprayers (1) is connected to a driving member. The driving member can drive the sprayer shaft (14) to rotate around its own axis. The sprayer (1) can rotate synchronously with the sprayer shaft (14). The sprayer shafts (14) of the two sets of sprayers (1) can rotate synchronously in opposite directions by the same angle.

5. The substrate cleaning apparatus according to claim 1, characterized in that, Each of the receiving cavities (11) is provided with a long strip-shaped rotating nozzle at its bottom. The outlet end of the rotating nozzle is located at the strip-shaped liquid outlet (12). The two ends of the rotating nozzle are hinged to the side of the receiving cavity (11). When the rotating nozzle rotates around the hinge axis, it can change the tilt angle of the cleaning liquid relative to the surface of the substrate (2) to be cleaned.

6. The substrate cleaning apparatus according to any one of claims 1 to 5, characterized in that, The spraying angle of the cleaning liquid sprayed by each set of sprayers (1) relative to the surface of the substrate (2) to be cleaned is 40°±10°.

7. The substrate cleaning apparatus according to any one of claims 1 to 5, characterized in that, The substrate cleaning device further includes a screw (4) and a nut (5) that are adapted to each other. At at least one end of the strip-shaped liquid outlet (12), the screw (4) passes through both sides of the strip-shaped liquid outlet (12). The end of the screw (4) is provided with a radially protruding limiting end (41). The limiting end (41) and the nut (5) respectively abut against the outer wall of both sides of the strip-shaped liquid outlet (12). The width of the strip-shaped liquid outlet (12) can be changed by adjusting the position of the nut (5) on the screw (4).

8. The substrate cleaning apparatus according to any one of claims 1 to 5, characterized in that, The substrate cleaning apparatus further includes a liquid storage tank, a liquid delivery pump, a gas storage tank, a gas-liquid mixer, and a gas-liquid delivery pump. The liquid storage tank and the liquid delivery pump are connected to the gas-liquid mixer in sequence through pipes. The gas storage tank is connected to the gas-liquid mixer through a pipe. The gas-liquid mixer is connected to the gas-liquid delivery pump through a pipe. The gas-liquid delivery pump is connected to the cleaning liquid delivery pipe (31) through a pipe. The gas-liquid mixer is used to mix the gas and liquid entering it to form a gas-liquid mixture. The gas-liquid mixture is sent into the receiving cavity (11) as the cleaning liquid.

9. The substrate cleaning apparatus according to claim 8, characterized in that, The gas-liquid mixer is equipped with a temperature control element, which can increase or decrease the temperature of the gas-liquid mixture.

10. A substrate cleaning method, based on the substrate cleaning apparatus as described in any one of claims 1 to 9, characterized in that, One set of sprayers (1) sprays cleaning liquid along the moving direction of the substrate (2) to be cleaned, and another set of sprayers (1) sprays cleaning liquid against the moving direction of the substrate (2) to be cleaned. On the substrate (2) to be cleaned, the distance L between the cleaning liquids sprayed by the two sets of sprayers (1) is greater than a set value.

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