Method for manufacturing metamaterial, coating device, metamaterial manufacturing system, metamaterial, and product thereof

Abstract

The purpose of this disclosure is to provide a method for manufacturing metamaterials, a coating apparatus, a metamaterial manufacturing system, metamaterials, and products thereof that can increase the film thickness of metamaterials without degrading the properties of metamaterials. The method for manufacturing metamaterials disclosed herein is performed by a metamaterial manufacturing system equipped with a coating apparatus (92) and a separation apparatus (93), wherein the method comprises: a first step in which the coating apparatus (92) impregnates and coats a non-conductive layer (13) onto a non-conductive film (11) having a conductive layer (12) having a superatom shape; and a second step in which the separation apparatus (93) separates the non-conductive film (102) coated with the non-conductive layer (13) into a metamaterial containing at least one of the superatoms.

Description

Technical Field

[0001] This disclosure relates to methods for manufacturing metamaterials, coating apparatus, metamaterial manufacturing systems, metamaterials and their products. Background Technology

[0002] This paper proposes artificially created structures with properties different from those of naturally occurring materials (hereinafter referred to as metamaterials). Metamaterials and meta-atoms, in terms of matter, share a matrix-atom relationship. The unit structure constituting such materials is the meta-atom.

[0003] Among the metamaterials produced to date are metamaterials that fabricate open-ring resonators on resin walls (e.g., see Non-Patent Document 1) and multilayer metamaterials (e.g., see Non-Patent Document 2). Existing technical documents Non-patent literature

[0004] Non-patent literature 1: D. Bruce et al. adv. Mater, 22, 5053-5057, 2010 Non-patent literature 2: N. Liu et al. Nature. Matter 7 31-37, 2008

[0005] However, the thickness that can be produced using the metamaterial in Non-Patent Document 1 is limited. The metamaterial in Non-Patent Document 2 can increase its thickness by becoming multilayered, but there is a possibility of refractive index differences arising at the interfaces between the layers. To improve the properties of metamaterials such as transmittance, optical rotation, and directionality, it is desirable to reduce the number of interfaces where refractive index differences may arise. Summary of the Invention

[0006] Therefore, the purpose of this disclosure is to provide a method for manufacturing metamaterials, a coating apparatus, a metamaterial manufacturing system, metamaterials and products thereof that can increase the film thickness of metamaterials without degrading the properties of metamaterials.

[0007] The inventors have developed a method for manufacturing metamaterials that reduces the possibility of interfaces that produce refractive index differences.

[0008] The method for manufacturing metamaterials disclosed herein includes: The first step involves impregnating and coating a non-conductive layer onto a non-conductive film having a conductive layer with a superatomic shape; and The second step involves separating the non-conductive film coated with the non-conductive layer into a metamaterial containing at least one of the superatoms.

[0009] It may also include a third step, in which the metamaterial obtained through the second step is individually heated and shaped.

[0010] Alternatively, a fourth step can be performed before the first step, wherein the fourth step forms a conductive layer having the shape of the superatoms on the non-conductive film.

[0011] If cutting is used when separating metamaterials containing at least one superatom, noise components can sometimes be generated due to the residue from the cutting tape. Therefore, this disclosure proposes two methods that do not use cutting in the second step. The first method involves performing the separation by hot-pressing the non-conductive film coated with the non-conductive layer into a shape corresponding to the shape of the metamaterial. The second method involves separating the non-conductive film coated with the non-conductive layer by cutting it into a shape corresponding to the shape of the metamaterial.

[0012] The coating apparatus disclosed herein is an immersion coating apparatus for immersing and coating a non-conductive layer onto a non-conductive film having a conductive layer with a superatomic shape. In the coating apparatus of this disclosure, the non-conductive film may be quadrilateral.

[0013] The metamaterial manufacturing system disclosed herein has the following features: The coating apparatus disclosed herein; and A separation device separates a non-conductive film coated with a non-conductive layer in the coating device into a metamaterial containing at least one superatom, in a shape corresponding to the shape of the metamaterial.

[0014] The metamaterial manufacturing system disclosed herein may also include a heating device that individually heats and shapes the metamaterials obtained through the separation.

[0015] The metamaterial manufacturing system disclosed herein may also include a superatom forming apparatus that forms a conductive layer having the shape of the superatoms on a non-conductive film.

[0016] The metamaterial disclosed herein is a metamaterial that can be manufactured using the manufacturing method of the metamaterial disclosed herein, and can also be obtained using the coating apparatus of the disclosed herein.

[0017] Specifically, the metamaterial disclosed herein possesses: Non-conductive film; At least one conductive layer, disposed on the non-conductive film, having a superatomic shape; and A non-conductive layer is disposed on the non-conductive film and the conductive layer, wherein the thickness of the non-conductive layer is greater than the thickness of the conductive layer.

[0018] In one embodiment of this disclosure, the product may be equipped with the metamaterial disclosed herein.

[0019] Furthermore, it is possible to combine the above inventions as much as possible.

[0020] According to this disclosure, it is possible to provide a method for manufacturing metamaterials, a coating apparatus, a metamaterial manufacturing system, metamaterials and products thereof that can increase the film thickness of metamaterials without degrading the properties of metamaterials. Attached Figure Description

[0021] Figure 1 This is an example of an implementation of the metamaterial manufacturing system disclosed herein. Figure 2 This is an example of an implementation of the manufacturing method disclosed herein. Figure 3 This is an illustration of a metamaterial manufactured using the manufacturing method disclosed herein. Figure 4 This is an illustration of metamaterials manufactured using conventional methods. Figure 5 This is an example of an implementation of the manufacturing method disclosed herein. Figure 6 This is an example of an implementation of the manufacturing method disclosed herein. Figure 7 This is an example of an implementation of the manufacturing method disclosed herein. Figure 8 This is an example of an implementation of the manufacturing method disclosed herein. Detailed Implementation

[0022] The embodiments of this disclosure will now be described in detail with reference to the accompanying drawings. However, this disclosure is not limited to the embodiments shown below. These embodiments are merely illustrative, and this disclosure can be implemented in various ways with modifications and alterations based on the knowledge of those skilled in the art. Furthermore, in this specification and the accompanying drawings, the same reference numerals denote identical parts.

[0023] (First Implementation) Figure 1 The diagram illustrates an embodiment of the metamaterial manufacturing system of this disclosure. The metamaterial manufacturing system 90 of this embodiment includes a coating apparatus 92 and a separation apparatus 93, and performs the manufacturing method of this disclosure. Figure 1 An example of a metamaterial manufacturing system 90 is shown, which also includes a superatom forming device 91 and a heating device 94.

[0024] Figure 2 Examples of embodiments of the manufacturing method of this disclosure are shown in the figure. like Figure 2As shown in (a), the metamaterial-containing membrane 101 of this embodiment includes a resin membrane 11 and a conductive layer 12 disposed on the resin membrane 11. The manufacturing method of this embodiment includes: a first step (…). Figure 2 (b) The coating apparatus 92 coats the resin layer 13 onto the side of the metamaterial-containing membrane 101 where the conductive layer 12 is provided, thereby generating the metamaterial-containing membrane 102; and the second process ( Figure 2 (c) The separation device 93 separates the membrane 102 containing metamaterial into a metamaterial containing at least one superatom, generating metamaterial 103.

[0025] In this embodiment, the resin film 11 is not limited to resin, and can be a non-conductive film made of any non-conductive material capable of transmitting frequencies such as the terahertz band. The resin layer 13 can be a non-conductive layer made of any non-conductive material capable of transmitting frequencies such as the terahertz band. The refractive index of the resin layer 13 relative to the terahertz wave being targeted can be the same as or different from that of the resin film 11. For example, the resin layer 13 can be of the same type as the resin film 11.

[0026] In this embodiment, the conductive layer 12 is any conductive material capable of forming superatoms, such as metallic materials like Au, semiconductors like graphite and silicon carbide.

[0027] The coating apparatus 92 employs dip coating, which involves immersing the membrane 101 containing the metamaterial in a resin solution to coat the resin layer 13. Therefore, any resin capable of dip coating can be used for the resin layer 13. Examples of such resins include cyclic olefin polymers (COC / COP), polyethylene (PE), polymethylpentene (PMP), Teflon (PTFE), polycarbonate (PC), polypropylene (PP), acrylic resin (PMMA), ABS resin, and combinations thereof.

[0028] The coating apparatus 92 coats the resin layer 13 to a desired film thickness. For example, the film thickness of the resin layer 13 is greater than that of the conductive layer 12. The film thickness of the resin layer 13 can be the same as or greater than that of the resin film 11. For example, the resin film 11 and the resin layer 13 can be made to have the same thickness by having the superatoms as cubes and the conductive layer 12 formed at the center of the superatoms. The resin layer 13 can also be 1.5 times or 2 times the thickness of the resin film 11.

[0029] Figure 3An example of a metamaterial 103 manufactured by the manufacturing method of this embodiment is shown. The metamaterial 103 of this embodiment includes: a resin film 11; a conductive layer 12 formed on the resin film 11; and a resin layer 13 covering the conductive layer 12. The conductive layer 12 is disposed on the resin film 11 and has a superatomic shape. In this embodiment, the resin layer 13 is thickly coated on the resin film 11 and the conductive layer 12. Therefore, when the refractive index of the resin film 11 is n1 and the refractive index of the resin layer 13 is n2, an interface of n1 / n2 is generated within the metamaterial 103.

[0030] In contrast, in the case of not using impregnation coating in previous examples, such as Figure 4 As shown, resin layer 113 needs to be coated around conductive layer 112 on resin film 111A before further bonding resin film 111B. Therefore, when the refractive index of resin film 111A is n1, the refractive index of resin layer 113 is n3, and the refractive index of resin film 111B is n2, an interface of n1 / n3 and an interface of n3 / n2 are generated within metamaterial 1103. Furthermore, if hot pressing is used during bonding, an air layer may be included at the boundary between resin layer 113 and resin film 111B.

[0031] In this embodiment, since the coating apparatus 92 uses dip coating for thick film coating in the first step, bonding of the resin film 111B is not required. Furthermore, the dip coating performed by the coating apparatus 92 is a process in which an air layer does not enter at the boundary between the metamaterial-containing film 101 and the resin layer 13. Therefore, this embodiment reduces the number of interfaces in the metamaterial structure and prevents the entry of air layers, thereby generally reducing the number of interfaces in the metamaterial and improving the properties of the metamaterial.

[0032] Furthermore, the resin film 11 coated by the coating apparatus 92 can be circular or quadrilateral. By making the resin film 11 quadrilateral, the batch collection rate increases, and the distribution of the impregnation coating is less likely to occur compared to wafers. Therefore, the yield of the resin layer 13 when thick film coating can be improved.

[0033] (Second Implementation) Figure 5 China indicates Figure 1 An example of the second process performed by the separation device 93 shown in the diagram. For example... Figure 5 As shown in (a), the metamaterial-containing membrane 102 includes conductive layers 12 that form superatoms at predetermined intervals. The separation device 93 separates the metamaterial-containing membrane 102 (… Figure 5 (a) Hot stamping is performed using a mold 81 of a shape corresponding to the shape of the metamaterial at predetermined intervals of superatoms. Figure 5 (b) ), thereby forming a recess 82 in the membrane 102 containing the metamaterial. Figure 5(c) and apply force from both sides of the membrane 102 containing the metamaterial using pressure rollers, etc., thereby separating the membrane 102 containing the metamaterial along the recess 82. Figure 5 (d) Thus, the membrane 102 containing metamaterial is separated into metamaterials containing at least one superatom, generating metamaterial 103.

[0034] The separation device 93 of this embodiment can separate the membrane 102 containing metamaterials into metamaterials 103 without cutting. Therefore, noise components caused by cutting tape residue can be removed. In addition, by setting the shape of the mold 81, metamaterials 103 of various shapes can be manufactured. That is, this embodiment can make the shape of the resin powder containing metaatoms arbitrary.

[0035] (Third implementation method) Figure 6 China indicates Figure 1 This is an example of the second process performed by the separation apparatus 93 shown. The separation apparatus 93 heats the membrane 102 containing the metamaterial formed by the coating apparatus 92 to above the softening point of the resin membrane 11 and resin layer 13 constituting the membrane 102 containing the metamaterial. Figure 6 (a) The membrane 102 containing metamaterial is pressed onto a heated metal forming plate 83 arranged with predetermined intervals or perforations. Figure 6 (b)), thereby melting the membrane 102 containing metamaterial, for the melt and solidification of the metamaterial drooping from the open gaps or holes of the metal forming plate 83. Figure 6 (c) Using a cutting blade 84, the cut metamaterial is severed from the membrane 102 containing the metamaterial in a direction perpendicular to the drooping metamaterial. Figure 6 (d) Thus, the metamaterial 103 is generated by separating the metamaterial 102 containing the metamaterial from the membrane 102 containing at least one metaatom.

[0036] The separation device 93 of this embodiment can separate the membrane 102 containing metamaterials into metamaterials 103 without cutting. Therefore, noise components caused by cutting tape residue can be removed. In addition, by setting the shape of the metal forming plate 83, metamaterials 103 of various shapes can be manufactured. That is, this embodiment can make the shape of the resin powder containing metaatoms arbitrary.

[0037] (Fourth Implementation) The manufacturing method of this embodiment can also be used in... Figure 1 The separation device 93 shown in the figure has the following functions after the second process: Figure 1 The heating device 94 shown in the figure performs the third process. The heating device 94 individually heats and shapes the metamaterial 103 obtained through the second process.

[0038] Figure 7 The diagram shows an example of the third step performed by the heating device 94. The heating device 94 causes the metamaterials 103 to fall one by one inside the tube 86 and heats the metamaterials 103 one by one. The heating can be performed using any device that can soften the surface of the resin film 11 and the resin layer 13, for example, a burner 85 can be exemplified.

[0039] The heating device 94 heats the resin film 11 and the resin layer 13 above their softening point, thereby deforming and shaping them into a metamaterial 103 with rounded corners. By adjusting the heating time and temperature of the heating device 94, the metamaterial 103 can be made spherical. That is, this embodiment can make the resin powder containing superatoms spherical.

[0040] (Fifth Implementation) The manufacturing method of this embodiment can also be performed before the first step of generating the membrane 102 containing metamaterial. Figure 1 The fourth step performed by the superatom forming apparatus 91 shown in the figure. The superatom forming apparatus 91 generates a film 101 containing a supermaterial by forming a conductive layer 12 having a superatom shape on the resin film 11. In this embodiment, the shape of the superatom is arbitrary, and for example, an open-ring resonator with a ring width of 1 μm or more and an average radius of 1 to 500 μm can be exemplified.

[0041] Figure 8 The image shows an example of the fourth step performed by the superatom forming apparatus 91. The superatom forming apparatus 91 forms a conductive layer 12 over the entire resin film 11. Figure 8 (b) A photoresist 21 is coated on the upper surface of the conductive layer 12. Figure 8 (c) Ultraviolet light is used to irradiate the photoresist 21 to form a superatomic shape using a photomask 22. Figure 8 (d) ), developing the photoresist 21 ( Figure 8 (e) ), to perform etching ( Figure 8 (f) Thus, a membrane 101 containing a metamaterial is formed on the resin membrane 11, wherein a conductive layer 12 with a metaatomic shape is formed.

[0042] As explained above, the manufacturing method and metamaterial manufacturing system of this disclosure include the coating apparatus 92 of this disclosure, thus enabling the manufacture of metamaterials 103 with an interface reduced to one. Therefore, by using the manufacturing method of this disclosure, metamaterials with improved transmittance, optical rotation, and directivity for desired frequency bands such as the terahertz band can be manufactured.

[0043] Furthermore, the manufacturing method and metamaterial manufacturing system of this disclosure include the separation device 93 of this disclosure, thus enabling the resin powder containing metaatoms to be shaped into any form. Additionally, the manufacturing method and metamaterial manufacturing system of this disclosure include the heating device 94 of this disclosure, thus enabling the resin powder containing metaatoms to be spherical. In this way, the manufacturing method and metamaterial manufacturing system of this disclosure can accommodate shapes other than cubic structures, thereby increasing the metaatom content in products containing metamaterial 103. Explanation of reference numerals in the attached figures

[0044] 11, 111A, 111B: Resin film 12, 112: Conductor layer 13, 113: Resin layer 21: Photoresist 22: Photomask 81: Mold 82: Concave 83: Metal Forming Sheet 84: Cutting knife 85: Burner 86: pipe 90: Metamaterials Manufacturing System 91: Superatomic Forming Device 92: Coating apparatus 93: Separation device 94: Heating device 101, 102: Membranes containing metamaterials 103, 1103: Metamaterials.

Claims

1. A method for manufacturing metamaterials, wherein, have: The first step involves impregnating and coating a non-conductive layer onto a non-conductive film having a conductive layer with a superatomic shape; and The second step involves separating the non-conductive film coated with the non-conductive layer into a metamaterial containing at least one of the superatoms.

2. The method for manufacturing metamaterials according to claim 1, wherein, It also includes a third process, in which the metamaterial obtained through the second process is individually heated and shaped.

3. The method for manufacturing metamaterials according to claim 1, wherein, In the second step, the separation is performed by hot-pressing the non-conductive film coated with the non-conductive layer into a shape corresponding to the shape of the metamaterial.

4. The method for manufacturing metamaterials according to claim 1, wherein, In the second step, the separation is performed by cutting the non-conductive film coated with the non-conductive layer into a shape corresponding to the shape of the metamaterial.

5. The method for manufacturing metamaterials according to claim 1, wherein, A fourth step is performed before the first step, wherein a conductive layer having the shape of the superatoms is formed on the non-conductive film.

6. A coating apparatus, wherein, A non-conductive layer is impregnated and coated onto a non-conductive film having a conductive layer with a superatomic shape.

7. The coating apparatus according to claim 6, wherein, The non-conductive film is quadrilateral.

8. A metamaterial manufacturing system, wherein, have: The coating apparatus according to claim 6 or 7; and A separation device separates a non-conductive film coated with a non-conductive layer in the coating device into a metamaterial containing at least one superatom, in a shape corresponding to the shape of the metamaterial.

9. The metamaterial manufacturing system according to claim 8, wherein, It also includes a heating device that individually heats and shapes the metamaterials obtained through the separation.

10. The metamaterial manufacturing system according to claim 8, wherein, It also includes a superatom forming apparatus that forms a conductive layer having the shape of the superatoms on a non-conductive film.

11. A metamaterial, wherein, have: Non-conductive film; At least one conductive layer is disposed on the non-conductive film and has a superatomic shape; as well as A non-conductive layer is disposed on the non-conductive film and the conductive layer, wherein the thickness of the non-conductive layer is greater than the thickness of the conductive layer.

12. A product, wherein, It possesses the metamaterial described in claim 11.

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