Planarization module and electronic device

Abstract

The present disclosure relates to a planarization module and an electronic device. The planarization module includes a frame including a frame body extending in a longitudinal direction from a first end to a second end and a mount forming an outer surface of the frame body. A first electrode includes a first electrode hub adjacent to the first end of the frame body and a plurality of first electrode segments extending in the longitudinal direction from the first electrode hub. A second electrode includes a second electrode hub adjacent to the second end of the frame body and a plurality of second electrode segments extending in the longitudinal direction from the second electrode hub. The plurality of first electrode segments and the plurality of second electrode segments are alternately arranged along a perimeter of the mount and spaced apart from each other.

Description

[0001] Cross-references to related applications

[0002] This application claims priority to Korean Patent Application No. 10-2025-0039739, filed on March 27, 2025, with the Korean Intellectual Property Office (KIPO), the entire disclosure of which is incorporated herein by reference. Technical Field

[0003] This disclosure relates to planarization modules and electronic devices, and more specifically, to thin film planarization modules and methods for forming thin films using said thin film planarization modules. Background Technology

[0004] In processes where fluids are applied to a substrate (such as those that can be performed during the manufacturing of a display panel), applying a fluid with uniform flatness can provide better quality results. To flatten the fluid applied to the substrate, an electric field can be applied to the fluid. Summary of the Invention

[0005] A planarization module includes a frame having a frame body and a mounting member. The frame body extends longitudinally from a first end to a second end of the frame body, and the mounting member forms the outer surface of the frame body. A first electrode includes a first electrode hub adjacent to the first end of the frame body and a plurality of first electrode segments extending longitudinally from the first electrode hub. A second electrode includes a second electrode hub adjacent to the second end of the frame body. A plurality of second electrode segments extend longitudinally from the second electrode hub. The first electrode segments of the plurality of first electrode segments and the second electrode segments of the plurality of second electrode segments are alternately arranged along the periphery of the mounting member and spaced apart from each other.

[0006] The potentials of the first electrode and the second electrode can be different from each other.

[0007] The first electrode hub and the second electrode hub can be mounted on the mounting component.

[0008] The frame body may include a first frame body end surface extending in a longitudinal direction and forming a first end, and a second frame body end surface extending in a longitudinal direction and forming a second end. A first electrode hub may be disposed on the first frame body end surface, and a second electrode hub may be disposed on the second frame body end surface.

[0009] The first electrode hub may include a first electrode hub body disposed on the end surface of the first frame body and a plurality of first electrode hub legs. Each of the plurality of first electrode hub legs may extend from the first electrode hub body to a corresponding one of the plurality of first electrode segments. The second electrode hub may include a second electrode hub body disposed on the end surface of the second frame body and a plurality of second electrode hub legs, each of the plurality of second electrode hub legs extending from the second electrode hub body to a corresponding one of the plurality of second electrode segments.

[0010] The mounting component can have a cylindrical shape.

[0011] The mounting component can have a polygonal column shape.

[0012] The mounting element may include multiple mounting surfaces. Multiple first electrode segments and multiple second electrode segments may be alternately mounted on the multiple mounting surfaces. Each of the multiple mounting edges may form a boundary between two corresponding adjacent mounting surfaces.

[0013] The mounting component may include multiple mounting surfaces. Multiple first electrode segments and multiple second electrode segments may be alternately mounted on the multiple mounting surfaces. Each of the multiple boundary surfaces may be positioned between two corresponding adjacent mounting surfaces.

[0014] The frame may include multiple protrusions extending from the outer surface of the frame body and multiple concave valleys on the outer surface of the frame body.

[0015] The protrusions of a plurality of protrusions and the valleys of a plurality of valleys may be arranged alternately along the periphery of the mounting member. The mounting member may include a plurality of mounting surfaces. Each of the plurality of mounting surfaces may be formed between two corresponding adjacent protrusions and valleys among the plurality of protrusions and valleys. A plurality of first electrode segments and a plurality of second electrode segments may be alternately disposed on the plurality of mounting surfaces.

[0016] The flattening module may also include a frame driver configured to provide rotational force to the frame.

[0017] A planarization device includes a planarization module and an electrode power supply configured to provide a potential to the planarization module. The planarization module includes a frame having a frame body and a mounting member. The frame body extends longitudinally from a first end to a second end of the frame body, and the mounting member forms an outer surface of the frame body. A frame actuator is configured to provide a rotational force to the frame. A first electrode includes a first electrode hub adjacent to the first end of the frame body and a plurality of first electrode segments extending longitudinally from the first electrode hub. A second electrode includes a second electrode hub adjacent to the second end of the frame body and a plurality of second electrode segments extending longitudinally from the second electrode hub. The first electrode segments of the plurality of first electrode segments and the second electrode segments of the plurality of second electrode segments are alternately arranged along the periphery of the mounting member and spaced apart from each other.

[0018] The planarization device may also include a mover rail system, which includes a mover mounting component and a mover rail. The planarization module is mounted on the mover mounting component, wherein the mover mounting component is movably coupled to the mover rail.

[0019] The planarization device may also include a sensor and a controller, wherein the sensor is configured to measure the thickness of the film layer disposed below the planarization module, and the controller is electrically connected to the sensor, the electrode power supply, and the planarization module.

[0020] The planarization module may include a front planarization module and a rear planarization module, which are spaced apart from each other and configured to move in a forward direction. A sensor may be disposed between the front and rear planarization modules, and a controller may control the rear planarization module based on information about the film thickness obtained from the sensor.

[0021] A method of forming a thin film includes moving a fluid application unit forward and applying a film layer to an upper surface of a substrate. A planarization module forms an electric field over the film layer and moves forward while rotating the film layer and planarizing it.

[0022] The planarization module may include a frame having a frame body and a mounting member. The frame body extends longitudinally from a first end to a second end, and the mounting member forms the outer surface of the frame body. A first electrode may include a first electrode hub adjacent to the first end of the frame body and a plurality of first electrode segments extending longitudinally from the first electrode hub. A second electrode may include a second electrode hub adjacent to the second end of the frame body and a plurality of second electrode segments extending longitudinally from the second electrode hub. The first electrode segments of the plurality of first electrode segments and the second electrode segments of the plurality of second electrode segments may be alternately arranged along the periphery of the mounting member and may be spaced apart from each other.

[0023] The operation of the planarization module can include rotating the front planarization module and moving it forward while the front planarization module generates an electric field. The thickness of the film layer at a point on the film layer can be measured using a sensor. The measured thickness can be compared with a reference thickness using a controller. When the measured thickness is greater than or equal to the reference thickness, an electric field can be generated above that point on the film layer by moving the rear planarization module, which is positioned behind the front planarization module, forward and rotating the rear planarization module.

[0024] When the measured thickness is less than the reference thickness, the sensor can change the thickness measurement position of the film and can measure the thickness of the film. Attached Figure Description

[0025] The accompanying drawings are included to provide a further understanding of the present disclosure, and are incorporated in and constitute a part of the present disclosure. The drawings illustrate embodiments of the present disclosure and, together with the description, serve to illustrate the principles of the present disclosure.

[0026] Figure 1 This is a perspective view showing the film layer being applied to the substrate.

[0027] Figure 2 This is a perspective view of the frame of a flattening module according to an embodiment of the present disclosure.

[0028] Figure 3 This is a side view showing the frame of a flattening module according to an embodiment of the present disclosure.

[0029] Figure 4 This is a perspective view showing the first electrode of an electrode assembly according to an embodiment of the present disclosure.

[0030] Figure 5 This is a perspective view showing the second electrode of an electrode assembly according to an embodiment of the present disclosure.

[0031] Figure 6 It is shown Figure 4 The first electrode shown in the figure and Figure 5 The second electrode shown is coupled to Figure 2 The perspective view of the frame shown in the image.

[0032] Figure 7 It is shown Figure 6 The exploded cross-sectional view of the flattening module is shown in the figure.

[0033] Figure 8 It is shown as Figure 7 The exploded cross-sectional view shown is of the spacers of the planarization module formed on the mounting.

[0034] Figure 9 This is a perspective view showing a frame with a polygonal column shape.

[0035] Figure 10 This is a perspective view showing a frame with boundary surfaces.

[0036] Figure 11 This shows the electrode assembly coupled to Figure 9 The frame shown is used to form a perspective view of the flattened module.

[0037] Figure 12 This is a cross-sectional view showing the frame in which the mounting surface forms mounting edges and mounting grooves.

[0038] Figure 13 This shows the electrode assembly coupled to Figure 12 The cross-sectional view of the frame is shown in the figure.

[0039] Figure 14 This is a perspective view showing a flattened module including the electrode hub body and electrode hub legs.

[0040] Figure 15 This is a perspective view showing the locator guide rail system.

[0041] Figure 16 This is a block diagram illustrating a planarization apparatus according to an embodiment of the present disclosure.

[0042] Figure 17 This is a cross-sectional view showing the planarization module installed on the display panel.

[0043] Figure 18 This is a cross-sectional view showing multiple planarization modules arranged on the display panel.

[0044] Figure 19 This is a flowchart illustrating a method for forming a thin film according to an embodiment of the present disclosure.

[0045] Figure 20 It is shown Figure 19 The flowchart shown is a process for operating the flattening module. Detailed Implementation

[0046] In embodiments of this disclosure, the XYZ coordinate system used may be a Cartesian coordinate system. For example, the positive Z-axis direction may indicate the upward direction, and the negative Z-axis direction may indicate the downward direction.

[0047] For example, the positive X-axis direction can indicate the forward direction, and the negative X-axis direction can indicate the backward direction. Similarly, the positive Y-axis direction can indicate the right direction, and the negative Y-axis direction can indicate the left direction.

[0048] Embodiments of this disclosure relate to novel thin-film planarization modules and methods for forming thin films to improve the uniformity of fluid-applied thin films (such as monomer layers) on substrates such as glass in display panel manufacturing. This technique addresses the common challenge of non-uniform thickness in liquid film layers applied to a substrate prior to curing or solidification. Variations in thickness can degrade display quality, and embodiments of this disclosure provide a means to planarize such films using spatially and temporally varying electric fields.

[0049] This can be achieved using a planarized module characterized by a cylindrical or polygonal column-shaped frame with mounting portions supporting complex electrode assemblies. This electrode assembly includes a first electrode and a second electrode, each having a corresponding hub at opposite ends of the frame and multiple electrode segments extending longitudinally along the outer surface of the frame. These electrode segments are arranged in an alternating azimuthal pattern, thereby forming a circumferentially varying electric field pattern around the frame. When different potentials are applied to the first and second electrodes, a time-varying electric field is generated between the first and second electrodes, particularly at specific structural features such as mounting edges or boundary surfaces on the frame. This electric field influences the charged or polarizable components in the fluid layer, redistributing material to achieve a more uniform film thickness.

[0050] To enhance the effectiveness of the electric field, the frame can rotate, allowing the electric field to interact dynamically with the fluid layer. The planarization modules can be mounted on a mover module (e.g., a mover rail system) that moves along the substrate, thus covering the entire membrane surface during planarization. Sensors measure the membrane thickness at various points in real time, and the controller adjusts the operation of one or more planarization modules accordingly.

[0051] In some embodiments, there are both a pre-flattening module and a post-flattening module: the pre-flattening module performs initial flattening, while the post-flattening module dynamically adjusts based on sensor feedback to improve any remaining uneven areas.

[0052] The method (method of forming a thin film) associated with this device (planarization module) includes steps of applying the film layer, operating the planarization module to rotate and translate, and using sensor-based feedback to optimize film uniformity. The process ensures that areas of excessive film thickness are selectively planarized, producing a consistent and high-quality film suitable for packaging in displays.

[0053] In summary, the embodiments of this disclosure integrate mechanical motion, electric field manipulation, and feedback control into a single system capable of providing precise thin-film planarization, which is beneficial for next-generation high-performance display technologies.

[0054] Figure 1 This is a perspective view showing the film layer being applied to the substrate.

[0055] refer to Figure 1 The display panel can be used to display images. The display panel may include a substrate SB. For example, the substrate SB may include a glass material.

[0056] For example, the substrate SB can have the shape of a flat plate or a plate. For example, the substrate SB can have an upper surface and a lower surface. For example, the substrate SB can extend from the front end to the rear end.

[0057] The display panel may include a film layer FL. The film layer FL may include a monomer. The film layer FL may be stacked on a substrate SB. For example, the film layer FL may be applied to the upper surface of the substrate SB.

[0058] For example, the fluid application unit FAU can apply a fluid-state film layer FL to a substrate SB. For example, the fluid application unit FAU can apply a film layer FL encapsulating a substrate SB to the substrate SB during a thin-film encapsulation process.

[0059] For example, the fluid application unit FAU can apply a fluid-state film FL to the substrate SB while moving in the longitudinal direction. Alternatively, the fluid application unit FAU can apply a fluid-state film FL to the substrate SB while it is moving in the longitudinal direction.

[0060] The film layer FL applied to the substrate SB can solidify over time (e.g., transform into a solid state). The thickness of the film layer FL applied to the substrate SB can be measured with reference to the orientation in which the film layer FL is stacked on the substrate SB.

[0061] The thickness of the film layer FL applied to the substrate SB can vary depending on the horizontal position of the film layer FL. For example, the thickness of the film layer FL applied to the substrate SB can vary depending on the vertical position of the substrate SB. Planarization module 10 according to an embodiment of this disclosure (see...) Figures 2 to 15 This can flatten the FL film layer.

[0062] Therefore, the membrane layer composed of fluid monomers is applied to the upper surface of the substrate by a fluid application unit that moves along the length of the substrate, and since the thickness of the resulting layer may vary depending on the location, a planarization module is used to achieve uniformity.

[0063] Figure 2 and Figure 3 The diagram illustrates the framework of the flattened module according to embodiments of the present disclosure when viewed from different directions. Specifically, Figure 2 This is a perspective view of the frame of a flattening module according to an embodiment of the present disclosure. Figure 3 This is a side view showing the frame of a flattening module according to an embodiment of the present disclosure.

[0064] refer to Figure 2 and Figure 3 According to embodiments of the present disclosure, the flattening module 10 may include a frame 100. The frame 100 may include a frame body 110.

[0065] The frame body 110 can be columnar. For example, the frame body 110 can be cylindrical. For example, the outer surface of the frame body 110 can be cylindrical.

[0066] For example, the frame body 110 can extend from a first end of the frame body 110 to a second end of the frame body 110. The direction in which the frame body 110 extends can be the longitudinal direction of the frame body 110.

[0067] For example, the first frame body end surface 110E1 may be a surface formed at the first end of the frame body 110. For example, the second frame body end surface 110E2 may be a surface formed at the second end of the frame body 110.

[0068] The first frame main body end surface 110E1 and the second frame main body end surface 110E2 can be oriented toward the longitudinal direction of the frame main body 110. The direction facing the first frame main body end surface 110E1 can be opposite to the direction facing the second frame main body end surface 110E2.

[0069] Frame 100 may include frame axis 120. Frame axis 120 may be the axis of rotation of frame body 110. For example, frame body 110 may rotate about frame axis 120 as the axis of rotation.

[0070] Multiple frame axes 120 may be provided. For example, frame 100 may include a first frame axis 121 and a second frame axis 122. Frame axes 120 may include or indicate at least one of the first frame axis 121 and the second frame axis 122.

[0071] The frame shaft 120 can be connected to, coupled to, or formed on the frame body 110.

[0072] For example, the first frame shaft 121 may be connected to, coupled to, or formed at a first end of the frame body 110. For example, the first frame shaft 121 may protrude from the end surface 110E1 of the first frame body.

[0073] For example, the second frame shaft 122 may be connected to, coupled to, or formed at the second end of the frame body 110. For example, the second frame shaft 122 may protrude from the end surface 110E2 of the second frame body.

[0074] For example, the frame axis 120 and the frame body 110 can be integrally formed as a single continuous structure. For example, the frame axis 120 can extend from or protrude from the frame body 110.

[0075] For example, the frame axis 120 may protrude from the frame body 110 in the longitudinal direction of the frame body 110. For example, the longitudinal direction of the frame body 110 may be the "axial direction" of the frame 100.

[0076] For example, a first frame shaft 121 may protrude from a first end of the frame body 110. For example, a second frame shaft 122 may protrude from a second end of the frame body 110.

[0077] Frame 100 may include mounting member 130. Mounting member 130 may be part of the outer surface of frame body 110. For example, mounting member 130 may extend in the longitudinal direction of frame body 110.

[0078] Therefore, the planarization module includes a cylindrical frame with a longitudinal axis and an integral rotation axis at both ends, as well as mounting portions on the outer surface of the frame for supporting additional components.

[0079] Figure 4 This is a perspective view showing the first electrode of an electrode assembly according to an embodiment of the present disclosure. Figure 5 This is a perspective view showing the second electrode of an electrode assembly according to an embodiment of the present disclosure. Figure 6 It is shown Figure 4 The first electrode shown in the figure and Figure 5 The second electrode shown is coupled to Figure 2 The perspective view of the frame shown in the image.

[0080] refer to Figures 4 to 6 The planarization module 10 may include an electrode assembly 200. The electrode assembly 200 may be coupled to the frame 100. For example, at least a portion of the electrode assembly 200 may be coupled to or connected to the mounting member 130 (see [link to mounting member]). Figure 2 ).

[0081] The electrode assembly 200 may include or indicate at least one of the first electrode 201 and the second electrode 202. The electrode assembly 200 may include electrode segments 210.

[0082] Electrode segment 210 can be in frame 100 (see Figure 2 It extends in the longitudinal direction. For example, the longitudinal direction of electrode segment 210 can be the direction in which electrode segment 210 extends.

[0083] Multiple electrode segments 210 may be provided. For example, electrode assembly 200 may include multiple electrode segments 210. The multiple electrode segments 210 may be spaced apart from each other.

[0084] For example, multiple electrode segments 210 can be arranged sequentially in the azimuth direction. The azimuth direction can be referenced to frame 100 (see...). Figure 2The azimuth direction is set by the rotation axis of the mounting component 130. For example, the azimuth direction can be set by the rotation axis of the mounting component 130 (see [reference]). Figure 2 The circumferential direction of ).

[0085] Electrode assembly 200 may include electrode hub 220. Electrode hub 220 may be coupled to frame 100 (see [link]). Figure 2 The ends of the first electrode 201 are adjacent to each other. For example, the electrode hub 220 of the first electrode 201 may be adjacent to the frame 100 (see [link]). Figure 2 The first end of the second electrode 202 is adjacent to the first end of the first electrode 202. For example, the electrode hub 220 of the second electrode 202 may be adjacent to the frame 100 (see [link]). Figure 2 The second ends of the two elements are adjacent. As used herein, the term “adjacent” may mean that two elements are close to each other, that two elements can touch each other, or that in the case of many similar elements arranged in a row, if there is no similar element placed between the two elements, then the two elements are adjacent to each other.

[0086] Electrode hub 220 can be connected to electrode segment 210. For example, electrode segment 210 can extend from electrode hub 220. For example, electrode segment 210 of first electrode 201 can extend from electrode hub 220 of first electrode 201. For example, electrode segment 210 of second electrode 202 can extend from electrode hub 220 of second electrode 202.

[0087] The electrode segment 210 of the first electrode 201 can be referred to as the "first electrode segment". The electrode segment 210 of the second electrode 202 can be referred to as the "second electrode segment". The electrode hub 220 of the first electrode 201 can be referred to as the "first electrode hub". The electrode hub 220 of the second electrode 202 can be referred to as the "second electrode hub".

[0088] Therefore, the planarization module includes an electrode assembly, which includes a first electrode and a second electrode, each having a plurality of electrode segments extending longitudinally from a corresponding hub at opposite ends of the frame, and the plurality of electrode segments being arranged in an azimuth pattern around the mounting portion.

[0089] Figure 7 It is shown Figure 6 The exploded cross-sectional view of the flattening module is shown in the figure.

[0090] refer to Figure 6 and Figure 7 The first electrode 201 and the second electrode 202 can be spaced apart from each other. For example, the first electrode 201 and the second electrode 202 can be electrically separated.

[0091] For example, if different potentials are applied to the first electrode 201 and the second electrode 202, an electric field can be formed between the first electrode 201 and the second electrode 202.

[0092] For example, the multiple electrode segments 210 of the first electrode 201 and the multiple electrode segments 210 of the second electrode 202 can be arranged alternately in the azimuth direction, that is, the multiple electrode segments 210 of the first electrode 201 and the multiple electrode segments 210 of the second electrode 202 can be arranged alternately along the periphery of the mounting member 130.

[0093] For example, the electrode segment 210 of the first electrode 201 and the electrode segment 210 of the second electrode 202 may be spaced apart in the azimuth direction. For example, an electric field in the azimuth direction may be formed between the electrode segment 210 of the first electrode 201 and the electrode segment 210 of the second electrode 202.

[0094] Therefore, the first electrode and the second electrode of the planarization module are electrically separated, and the electrode segments are arranged alternately in the azimuth direction, so that an electric field can be formed between the first electrode and the second electrode when different potentials are applied.

[0095] Figure 8 It is shown as Figure 7 The exploded cross-sectional view shown is of the spacers of the planarization module formed on the mounting.

[0096] refer to Figure 8 The frame 100 may include a spacer 140. For example, the spacer 140 may be formed on the mount 130. For example, the spacer 140 may protrude from the mount 130.

[0097] Spacer 140 may be connected to or coupled to frame body 110 (see Figure 2 For example, spacer 140 can be connected to frame body 110 (see...). Figure 2 The integrated terrain becomes a single continuous structure.

[0098] Spacer 140 may be, for example, in frame body 110 (see Figure 2 It extends in the longitudinal direction. The longitudinal direction of the spacer 140 can be the direction in which the spacer 140 extends.

[0099] Multiple spacers 140 may be provided. For example, frame 100 may include multiple spacers 140. The multiple spacers 140 may be arranged sequentially in the azimuth direction. For example, multiple spacers 140 and multiple electrode segments 210 (see...) Figure 4 and Figure 5 They can be arranged alternately in the azimuth direction.

[0100] Figure 9 This is a perspective view showing a frame with a polygonal column shape. Figure 10 This is a perspective view showing a frame with boundary surfaces. Figure 11 This shows the electrode assembly coupled to Figure 9The frame shown is used to form a perspective view of the flattened module.

[0101] refer to Figure 9 The shape of the frame body 110 can be, for example, a polygonal column shape. For example, the shape of the frame body 110 can be an octagonal column shape. For example, the shape of the mounting member 130 can be a polygonal column shape. For example, the shape of the mounting member 130 can be an octagonal column shape.

[0102] Mounting member 130 may include mounting surface 130F. Electrode segment 210 (see...) Figure 4 and Figure 5 It can be installed, coupled or connected to the mounting surface 130F.

[0103] Mounting surface 130F may be part of the outer surface of frame body 110. Mounting surface 130F may be planar. Mounting surface 130F may be divided into multiple parts (i.e., multiple mounting surfaces 130F). For example, multiple mounting surfaces 130F may be arranged sequentially in the azimuth direction.

[0104] Mounting element 130 may include mounting edge 130E. Mounting edge 130E may form a boundary between two adjacent mounting surfaces 130F. For example, multiple mounting surfaces 130F and multiple mounting edges 130E may be arranged alternately in the azimuth direction.

[0105] refer to Figure 10 A boundary surface 130B can be formed between two adjacent mounting surfaces 130F among a plurality of mounting surfaces 130F. Multiple boundary surfaces 130B can be provided. For example, the plurality of mounting surfaces 130F and the plurality of boundary surfaces 130B can be arranged alternately in the azimuth direction.

[0106] refer to Figures 9 to 11 If different potentials are applied to the first electrode 201 and the second electrode 202, an electric field can be formed between the first electrode 201 and the second electrode 202.

[0107] For example, if different potentials are applied to the first electrode 201 and the second electrode 202, an electric field can be formed at the mounting edge 130E or the boundary surface 130B.

[0108] Therefore, the frame may include multiple spacers that protrude from the mounting members and are arranged alternately with the electrode segments in the azimuth direction, and when different potentials are applied to the first and second electrodes mounted on the polygonal surface, an electric field can be formed at the mounting edge or boundary surface between adjacent electrode segments.

[0109] Figure 12This is a cross-sectional view showing the frame in which the mounting surface forms mounting edges and mounting grooves. Figure 13 This shows the electrode assembly coupled to Figure 12 The cross-sectional view of the frame is shown in the figure.

[0110] refer to Figure 12 and Figure 13 Mounting surfaces 130F1 and 130F2 may include or indicate at least one of the first mounting surface 130F1 and the second mounting surface 130F2. For example, a plurality of first mounting surfaces 130F1 and a plurality of second mounting surfaces 130F2 may be arranged alternately in the azimuth direction.

[0111] Mounting surfaces 130F1 and 130F2 may form mounting edges 130E and mounting grooves 130T. For example, multiple mounting edges 130E and multiple mounting grooves 130T may be arranged alternately in the azimuth direction, that is, multiple mounting edges 130E and multiple mounting grooves 130T may be arranged along the mounting member 130 (see...). Figure 9 The mounting surfaces 130F1 and 130F2 are arranged alternately around their peripheries. For example, mounting surfaces 130F1 and 130F2 may be located between adjacent mounting edges 130E and mounting grooves 130T.

[0112] For example, the mounting edge 130E may be the area where the first mounting surface 130F1 and the second mounting surface 130F2, which are adjacent to each other, intersect to form a protrusion.

[0113] For example, the mounting groove 130T may be an area in which the second mounting surface 130F2 and the first mounting surface 130F1, which are adjacent to each other, intersect to form a concave portion or valley.

[0114] Electrode segments 210 can be disposed on or mounted on mounting surfaces 130F1 and 130F2. Electrode segments 210 of the first electrode 201 and the second electrode 202 can be spaced apart from each other.

[0115] For example, the electrode segment 210 of the first electrode 201 can be disposed on or mounted on the first mounting surface 130F1, and the electrode segment 210 of the second electrode 202 can be disposed on or mounted on the second mounting surface 130F2.

[0116] The electrode segment 210 disposed on or mounted on the mounting surfaces 130F1 and 130F2 may have a flat plate shape or a strip shape. For example, the electrode segment 210 disposed on or mounted on the mounting surfaces 130F1 and 130F2 may have a line shape.

[0117] If different potentials are applied to the first electrode 201 and the second electrode 202, an electric field can be formed at the mounting edge 130E. The electric field formed at the mounting edge 130E can be related to the film layer FL (see...). Figure 1 )intersect.

[0118] Therefore, the frame includes alternating first and second mounting surfaces, which form protruding edges and recessed grooves in the azimuth direction, and electrode segments are mounted on the first and second mounting surfaces such that when different potentials are applied to the first and second electrodes, an electric field is generated at the mounting edges to interact with the film.

[0119] Figure 14 This is a perspective view showing a flattened module including the electrode hub body and electrode hub legs.

[0120] refer to Figures 2 to 5 and Figure 14 The electrode hub 220 and the frame body 110 can be arranged in the longitudinal direction of the frame body 110. For example, the electrode hub 220 of the first electrode 201, the frame body 110, and the electrode hub 220 of the second electrode 202 can be arranged sequentially in the longitudinal direction of the frame body 110.

[0121] The electrode hub 220 may include an electrode hub body 220B and an electrode hub leg 220L. The electrode hub body 220B may be disposed at or coupled to an end of the frame body 110.

[0122] For example, the electrode hub body 220B of the first electrode 201 can be disposed on or coupled to the end surface 110E1 of the first frame body (see...). Figure 3 For example, the electrode hub body 220B of the second electrode 202 can be disposed on or coupled to the end surface 110E2 of the second frame body.

[0123] The electrode hub leg 220L can be connected to the electrode hub body 220B. For example, the electrode hub leg 220L can extend from the electrode hub body 220B in the radial direction. For example, the electrode hub leg 220L can extend from the electrode hub body 220B and lead to the electrode segment 210.

[0124] Multiple electrode hub legs 220L can be provided. For example, the multiple electrode hub legs 220L can be spaced apart in the azimuth direction.

[0125] Each of the multiple electrode hub legs 220L can be connected to a corresponding one of the multiple electrode segments 210.

[0126] For example, each of the plurality of electrode hub legs 220L of the first electrode 201 can be connected to a corresponding one of the plurality of electrode segments 210 of the first electrode 201.

[0127] For example, each of the plurality of electrode hub legs 220L of the second electrode 202 can be connected to a corresponding one of the plurality of electrode segments 210 of the second electrode 202.

[0128] The electrode hub body 220B of the first electrode 201 can be referred to as the "first electrode hub body". The electrode hub body 220B of the second electrode 202 can be referred to as the "second electrode hub body".

[0129] The electrode hub leg 220L of the first electrode 201 can be referred to as the "first electrode hub leg". The electrode hub leg 220L of the second electrode 202 can be referred to as the "second electrode hub leg".

[0130] refer to Figures 2 to 14 The conductivity of the electrode assembly 200 can be higher than that of the frame 100.

[0131] For example, electrode assembly 200 may be formed of a material including at least one of conductive polymers, carbon nanotubes, and metals. For example, frame 100 may be formed of a material including at least one of polymers and ceramics.

[0132] Therefore, the electrode hubs of the first and second electrodes are positioned at opposite ends of the frame, and each electrode hub includes an electrode hub body and a plurality of radially extending electrode hub legs connected to the corresponding electrode segment, and the electrode assembly is made of a material that is more conductive than the frame.

[0133] Figure 15 This is a perspective view showing the locator guide rail system.

[0134] refer to Figure 15 The mover guide system 50 may include a mover guide rail 51. The mover guide rail 51 may have a guide rail shape. The mover guide rail 51 may have a shape that extends in one direction.

[0135] For example, the extending direction of the mover guide rail 51 can be the longitudinal direction of the mover guide rail 51. For example, the longitudinal direction of the mover guide rail 51 can be the base SB (see...). Figure 1 The longitudinal direction of ).

[0136] The mover rail system 50 may include a mover mount 52. The mover mount 52 may be movably coupled to the mover rail 51. For example, the mover mount 52 may be movable along the mover rail 51. For example, the mover rail system 50 may separately include elements for driving the mover mount 52.

[0137] Flattening module 10 (see Figures 2 to 14It can be connected to, coupled to, or mounted to the mobile device mounting component 52. For example, the flattening module 10 (see...) Figures 2 to 14 The position of the ) can depend on the position of the mover mount 52.

[0138] Figure 16 This is a block diagram illustrating a planarization apparatus according to an embodiment of the present disclosure.

[0139] refer to Figures 1 to 16 The flattening device 1 may include an input unit 61. The input unit 61 may obtain input from the user, etc.

[0140] Input unit 61 can generate a first signal S1. The first signal S1 may include information about the input obtained by input unit 61. For example, the first signal S1 may include command information about the operation of flattening device 1.

[0141] The planarization device 1 may include a sensor 62. The sensor 62 may include at least one of an infrared sensor, an ultrasonic sensor, a laser sensor, and a visible light sensor.

[0142] For example, sensor 62 can measure the thickness of the film layer FL. Sensor 62 can generate a second signal S2. For example, the second signal S2 may include information about the value measured by sensor 62.

[0143] The flattening device 1 may include a controller 63. The controller 63 can perform calculations. For example, the controller 63 may be implemented by at least one of a processor, a central processing unit (CPU), a graphics processing unit (GPU), circuitry, a circuit board, and a computer.

[0144] Controller 63 can process signals. Controller 63 can transmit and receive signals. For example, controller 63 can generate output signals S3, S4 and S5 based on input signals S1 and S2.

[0145] Input signals S1 and S2 may include at least one of the first signal S1 and the second signal S2. Output signals S3, S4 and S5 may include at least one of the third signal S3, the fourth signal S4 and the fifth signal S5.

[0146] The flattening module 10 may include a frame driver 300. For example, the frame driver 300 may include an electric motor. The frame driver 300 may be mounted to, coupled to, or fixed to, for example, a mover mount 52.

[0147] Frame driver 300 can be coupled to frame 100. For example, frame driver 300 can be coupled to frame shaft 120. Frame driver 300 can provide rotational force to frame 100. For example, frame 100 can be rotated by frame driver 300.

[0148] The controller 63 can control the frame driver 300. For example, the controller 63 can transmit a third signal S3 to the frame driver 300. The frame driver 300 can operate in response to the third signal S3. For example, the third signal S3 can include command information regarding at least one of the rotation direction and rotation speed of the frame 100.

[0149] The planarization device 1 may include an electrode power supply 40. The electrode power supply 40 may be electrically connected to the first electrode 201 and the second electrode 202.

[0150] For example, a potential difference can be formed between the first electrode 201 and the second electrode 202 using the electrode power supply 40. For example, the electrode power supply 40 can apply different potentials to the first electrode 201 and the second electrode 202.

[0151] For example, the potential of the first electrode 201 can be constant (i.e., does not change with time), and the potential of the second electrode 202 can be constant.

[0152] For example, the potential of the first electrode 201 can change with time, and the potential of the second electrode 202 can also change with time. However, the potential difference between the first electrode 201 and the second electrode 202 can be constant.

[0153] For example, the potential of the first electrode 201 can be the same as the potential of the second electrode 202, and the difference between the phase of the potential of the first electrode 201 and the phase of the potential of the second electrode 202 can be 180 degrees.

[0154] The controller 63 can control the electrode power supply 40. For example, the controller 63 can transmit a fourth signal S4 to the electrode power supply 40. The electrode power supply 40 can operate in response to the fourth signal S4. The fourth signal S4 may include information about the potential of the electrode assembly 200.

[0155] The controller 63 can control the mover rail system 50. For example, the controller 63 can transmit a fifth signal S5 to the mover rail system 50. The fifth signal S5 may include information about the position of the planarization module 10 relative to the substrate SB. For example, the fifth signal S5 may include information about the position of the mover mount 52 relative to the mover rail 51.

[0156] The mover guide rail system 50 can operate in response to the fifth signal S5. For example, the mover guide rail system 50 can adjust the position of the mover mounting member 52 in response to the fifth signal S5.

[0157] Figure 17 This is a cross-sectional view showing the planarization module installed on the display panel.

[0158] refer to Figure 17 The planarization module 10 can be disposed above the film layer FL. For example, the film layer FL can be disposed between the substrate SB and the planarization module 10. For example, the lower surface of the film layer FL can face and contact the substrate SB, and the upper surface of the film layer FL can face the planarization module 10.

[0159] refer to Figures 1 to 17 The film layer FL stacked on the substrate SB can be formed with different thicknesses depending on the points on the substrate SB. An electric field can be formed between the electrode segment 210 of the first electrode 201 and the electrode segment 210 of the second electrode 202.

[0160] For example, the electric field formed by the planarization module 10 can intersect with the film layer FL. For example, the film layer FL can be affected by the electric field formed by the planarization module 10.

[0161] For example, charges included in the membrane layer FL or electric dipoles formed in the membrane layer FL can receive forces from the electric field formed by the planarization module 10.

[0162] For example, the degree of influence received by the film layer FL from the electric field can vary depending on the thickness of the film layer FL. For example, the influence received by the film layer FL from the electric field at points where the film layer FL is relatively thick can be greater than the influence received by the film layer FL from the electric field at points where the film layer FL is relatively thin.

[0163] For example, the film layer FL, located at a point where its thickness is relatively thick, can be moved towards a point where its thickness is relatively thin. Through this process, the film layer FL can be planarized.

[0164] Figure 18 This is a cross-sectional view showing multiple planarization modules arranged on the display panel.

[0165] refer to Figure 18 The planarization device 1 may include multiple planarization modules 10. For example, the planarization device 1 may include a front planarization module 10F and a rear planarization module 10R.

[0166] For example, the front planarization module 10F and the rear planarization module 10R can be disposed above the film layer FL. The front planarization module 10F can be disposed in front of the rear planarization module 10R.

[0167] Sensor 62 can be positioned between the front flattening module 10F and the rear flattening module 10R. For example, the relative positions of the front flattening module 10F, the rear flattening module 10R, and sensor 62 can remain constant over time.

[0168] The front flattening module 10F, the rear flattening module 10R, and the sensor 62 can move simultaneously. For example, the front flattening module 10F, the rear flattening module 10R, and the sensor 62 can move forward simultaneously.

[0169] Sensor 62 can be positioned behind the front planarization module 10F. Sensor 62 can measure the thickness of the portion of the film layer FL that has been planarized by the front planarization module 10F.

[0170] Controller 63 (see Figure 16 The post-planarization module 10R can be controlled in response to the second signal S2. For example, the post-planarization module 10R can apply an electric field to the unplanarized portion of the film layer FL.

[0171] refer to Figures 1 to 18 When different potentials are applied to the first electrode 201 and the second electrode 202, the planarization module 10 can form an electric field.

[0172] For example, an electric field can be formed between the electrode segment 210 of the first electrode 201 and the electrode segment 210 of the second electrode 202. For example, an electric field can be formed at multiple mounting edges 130E, multiple boundary surfaces 130B, and multiple spacers 140.

[0173] The electric field generated by the planarization module 10 can intersect the film layer FL in the azimuth direction of the longitudinal direction of the reference frame body 110.

[0174] The azimuth direction can be set with reference to the longitudinal direction of the frame body 110. If the frame driver 300 is operated, the frame body 110 can rotate in the azimuth direction.

[0175] For example, if the frame body 110 rotates in the azimuth direction, the electric field formed by the flattening module 10 can rotate in the azimuth direction.

[0176] For example, if the frame body 110 rotates in the azimuth direction, the electric field formed between the frame 100 and the membrane layer FL can change with time.

[0177] If the potential difference between the first electrode 201 and the second electrode 202 changes over time, the electric field formed between the frame 100 and the film layer FL can also change over time. For example, the voltage supplied to the electrode assembly 200 by the electrode power supply 40 may include an alternating current (AC) voltage.

[0178] For example, if the frame body 110 rotates in the azimuth direction or the potential difference between the first electrode 201 and the second electrode 202 changes with time, the electric field applied to the film layer FL can change with time.

[0179] Since the electric field applied to the film layer FL changes over time, the phenomenon of electric field concentration in a portion of the film layer FL can be suppressed. Therefore, the film layer FL can be effectively planarized.

[0180] Figure 19 This is a flowchart illustrating a method for forming a thin film according to an embodiment of the present disclosure.

[0181] refer to Figures 1 to 19 The thin film formation method S10 may include a step S100 of applying a film layer FL to a substrate SB. For example, a fluid application unit FAU may apply the film layer FL to the substrate SB. The film layer FL may form a thin film.

[0182] The thin film formation method S10 may include step S200 of operating the planarization module 10. For example, the controller 63 may control the electrode power supply 40 to create an electric field between the first electrode 201 and the second electrode 202. For example, when the frame driver 300 is operated, the frame 100 may rotate. The direction of rotation of the frame 100 may be a rolling direction relative to the direction in which the frame 100 moves.

[0183] Frame 100 may move relative to base SB. For example, frame 100 may move forward relative to base SB. For example, frame 100 may remain stationary while base SB may move, or base SB may remain stationary while frame 100 may move, or frame 100 and base SB may move at different rates.

[0184] Figure 20 It is shown Figure 19 The flowchart shown is a process for operating the flattening module.

[0185] Figure 20 The operation flattening module 10 shown in the figure (see Figures 2 to 14 Step S200 can represent the operation. Figure 18 The method of the front flattening module 10F, sensor 62 and rear flattening module 10R shown in the figure.

[0186] refer to Figures 1 to 20 Step S200 of operating the flattening module 10 may include step S210 of operating the front flattening module 10F. For example, the front flattening module 10F may form an electric field and may rotate and move.

[0187] Step S200 of operating the planarization module 10 may include step S220 of the sensor 62 measuring the thickness of the film layer FL at a point in the film layer FL. For example, the controller 63 may obtain information about the thickness of the film layer FL at that point in the film layer FL from the second signal S2 transmitted by the sensor 62.

[0188] Step S200 of operating the planarization module 10 may include step S230 of determining whether the thickness of the film layer FL at that point in the film layer FL is greater than or equal to a reference thickness. For example, the controller 63 may perform step S230.

[0189] If the thickness of the membrane layer FL at that point is determined to be less than the reference thickness, the thickness measurement position of the membrane layer FL can be changed, and step S220 of measuring the thickness of the membrane layer FL at a point can be performed.

[0190] Step S200 of operating the planarization module 10 may include step S240 of operating the post-planarization module 10R at that point. For example, if the thickness of the film layer FL at that point is determined to be greater than or equal to a reference thickness, the post-planarization module 10R can operate at that point. Therefore, the film layer FL can be effectively planarized.

[0191] Step S200 of operating the planarization module 10 may include step S250 of determining whether there is a reason for termination. In step S250, the controller 63 may determine whether there is a reason for terminating step S200 of operating the planarization module 10. If the controller 63 determines that there is no reason for terminating step S200 of operating the planarization module 10, the controller 63 may perform step S220 of measuring the thickness of the film layer FL at a point.

[0192] For example, the reason for terminating step S200 of the planarization module 10 could be at least one of the following: the point measured by sensor 62 is the rear end of the film layer FL; a malfunction occurs in the planarization device 1; or the first signal S1 includes a forced termination command.

[0193] For example, the step S250 of determining whether there is a reason for termination can be performed between the step S210 of the pre-operation planarization module and the step S220 of measuring the thickness of the film layer FL at a point.

[0194] For example, the step S250 of determining whether there is a reason for termination can be performed between the step S220 of measuring the thickness of the film layer FL at a point on the film layer FL and the step S230 of comparing the thickness of the film layer FL at that point with a reference thickness.

[0195] refer to Figures 1 to 20 The planarization module 10 can planarize the film layer FL applied to the substrate SB, and the film layer FL can form a thin film. In this context, the planarization module 10 can be referred to as a "thin film planarization module", and the planarization device 1 can be referred to as a "thin film planarization device".

[0196] It should be noted that the planarization module can be part of an electronic device used in the production of electronic products such as display panels. The electronic device can be a planarization device and can include the planarization module and various other components such as electrode power supplies, housings, controllers, computers, etc.

[0197] Although various embodiments of the present disclosure have been specifically shown and described with reference to the accompanying drawings, those skilled in the art will understand that various changes in form and detail may be made in the embodiments without departing from the spirit and scope of the present disclosure.

Claims

1. A flattening module, wherein, The flattening module includes: The framework includes: The frame body extends longitudinally from a first end of the frame body to a second end of the frame body; and Mounting components form the outer surface of the main frame body; The first electrode includes: A first electrode hub is adjacent to the first end of the frame body; and Multiple first electrode segments extend from the first electrode hub in the longitudinal direction; and The second electrode includes: The second electrode hub is adjacent to the second end of the frame body; and A plurality of second electrode segments extend from the second electrode hub in the longitudinal direction, wherein the first electrode segments of the plurality of first electrode segments and the second electrode segments of the plurality of second electrode segments are alternately arranged and spaced apart from each other along the periphery of the mounting member. The planarization module is configured to provide potentials for the first electrode and the second electrode that are different from each other.

2. The planarization module according to claim 1, wherein, The main body of the framework includes: The first frame body end surface extends along the longitudinal direction and forms the first end; and The second frame body end surface extends along the longitudinal direction and forms the second end. The first electrode hub is disposed on the end surface of the first frame body, and The second electrode hub is disposed on the end surface of the second frame body.

3. The planarization module according to claim 2, wherein, The first electrode hub includes: The first electrode hub body is disposed on the end surface of the first frame body; and A plurality of first electrode hub legs, each of the plurality of first electrode hub legs extending from the first electrode hub body to a corresponding one of the plurality of first electrode segments. The second electrode hub includes: The second electrode hub body is disposed on the end surface of the second frame body; and A plurality of second electrode hub legs, each of the plurality of second electrode hub legs extending from the second electrode hub body to a corresponding one of the plurality of second electrode segments.

4. The planarization module according to claim 1, wherein, The mounting component has at least one of a polygonal column shape and a cylindrical shape.

5. The planarization module according to claim 4, wherein, The mounting component has the polygonal column shape. The mounting component includes: Multiple mounting surfaces, wherein the multiple first electrode segments and the multiple second electrode segments are alternately mounted on the multiple mounting surfaces; and Multiple mounting edges, each of which forms the boundary between two corresponding adjacent mounting surfaces in the plurality of mounting surfaces.

6. The planarization module according to claim 4, wherein, The mounting component has the polygonal column shape. The mounting component includes: Multiple mounting surfaces, wherein the multiple first electrode segments and the multiple second electrode segments are alternately mounted on the multiple mounting surfaces; and A plurality of boundary surfaces, each of which is disposed between two corresponding adjacent mounting surfaces of the plurality of mounting surfaces.

7. The planarization module according to claim 1, wherein, The framework includes: Multiple protrusions protrude from the outer surface of the frame body; and Multiple concave valleys on the outer surface of the frame body. The protrusions of the plurality of protrusions and the valleys of the plurality of valleys are arranged alternately along the periphery of the mounting member. The mounting component includes multiple mounting surfaces, each of which is formed between two adjacent protrusions and valleys among the multiple protrusions and valleys. The plurality of first electrode segments and the plurality of second electrode segments are alternately disposed on the plurality of mounting surfaces.

8. An electronic device, wherein, The electronic device includes: Flattening module; and An electrode power supply is configured to provide a potential to the planarization module. The flattening module includes: The framework includes: The frame body extends longitudinally from a first end of the frame body to a second end of the frame body; and Mounting components form the outer surface of the main frame body; A frame driver is configured to provide rotational force to the frame; The first electrode includes: A first electrode hub is adjacent to the first end of the frame body; and Multiple first electrode segments extend from the first electrode hub in the longitudinal direction; and The second electrode includes: The second electrode hub is adjacent to the second end of the frame body; and A plurality of second electrode segments extend from the second electrode hub in the longitudinal direction, wherein the first electrode segments of the plurality of first electrode segments and the second electrode segments of the plurality of second electrode segments are alternately arranged along the periphery of the mounting member and spaced apart from each other.

9. The electronic device according to claim 8, wherein, The electronic device also includes: A sensor is configured to measure the thickness of a film layer disposed beneath the planarization module; and The controller is electrically connected to the sensor, the electrode power supply, and the planarization module.

10. The electronic device according to claim 9, wherein, The flattening module includes a front flattening module and a rear flattening module, which are spaced apart from each other and configured to move in the forward direction. The sensor is positioned between the front planarization module and the rear planarization module. The controller is configured to control the post-planarization module based on information about the thickness of the film obtained from the sensor.

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