An apparatus for producing isostatic graphite for semiconductor

Abstract

The application belongs to the technical field of graphite material processing, and specifically discloses a production device of isostatic pressing graphite for semiconductors, which comprises a saw blade master control machine, a controller, a screw rod driving mechanism and a strip-shaped saw blade. The strip-shaped saw blade is arranged at the lower end of the saw blade master control machine, and a base is arranged at the bottom of the saw blade master control machine. A cabinet is arranged above the base and close to one side of the saw blade master control machine. A splitting table is fixedly arranged above the cabinet. A pushing mechanism is arranged at the upper end of each side of the splitting table. The application realizes automatic clamping and quantitative stepping of graphite plates, replaces the manual repeated pushing and positioning operation mode, significantly reduces the labor intensity, and improves the continuous splitting efficiency.

Description

Technical Field

[0001] This invention belongs to the field of graphite material processing technology, and specifically discloses a production equipment for isostatic graphite for semiconductors. Background Technology

[0002] Isostatically pressed graphite is widely used as a key consumable in semiconductor manufacturing due to its high temperature resistance, good electrical and thermal conductivity, low coefficient of thermal expansion, and excellent thermal shock resistance and chemical stability. For example, it is used to manufacture heaters and crucibles for single-crystal silicon growth furnaces, as well as electrodes for ion implantation processes. In actual production, large blocks of isostatically pressed graphite slabs are typically cut into multiple slender graphite strips or blocks according to predetermined dimensions to facilitate subsequent fine processing.

[0003] Currently, the industry generally adopts a semi-automatic processing mode with manual assistance for the slitting of isostatic graphite slabs. A typical workflow is as follows: The operator first hoists the graphite slab to be slit onto the equipment's worktable, then manually moves or pushes the slab, using rulers or positioning blocks on the worktable for initial positioning and clamping. After slitting the first graphite strip, the operator needs to release the clamping mechanism, manually push the remaining slab forward a predetermined distance (i.e., the width of the graphite strip), and then use the positioning device again to perform a secondary positioning and clamping of the slab to ensure dimensional accuracy for the next cut.

[0004] However, the existing slitting equipment and operating methods have significant shortcomings. First, the feeding, positioning, and clamping processes throughout the slitting process heavily rely on manual operation, which is not only labor-intensive but also demands a high level of experience and skill from the operators. Second, the need to repeatedly perform this cyclical operation of "feeding, positioning, and clamping" leads to excessively long production support time, low slitting efficiency, and difficulty in meeting the needs of large-scale continuous production. More importantly, it is difficult to maintain consistent accuracy in manual feeding and secondary positioning, which easily leads to cumulative errors, affecting the dimensional consistency of the final graphite products and causing fluctuations in product yield. This reliance on manual judgment and operation has become a bottleneck restricting the production efficiency and quality stability of isostatically pressed graphite products for semiconductors.

[0005] Therefore, there is an urgent need in this field to develop a production equipment that can automatically feed, precisely position, and continuously cut graphite slabs to overcome the aforementioned deficiencies in the existing technology. Summary of the Invention

[0006] The purpose of this invention is to solve the problems existing in the background art, and to propose a production equipment for isostatic graphite for semiconductors, including a saw blade main control machine, a controller, a lead screw drive mechanism, and a strip saw blade. The strip saw blade is set at the lower end of the saw blade main control machine, and a base is set at the bottom of the saw blade main control machine. A cabinet is set on the side of the base and close to the saw blade main control machine. A slitting table is fixedly mounted on the top of the cabinet, and a pushing mechanism is set on the upper ends of both sides of the slitting table. Both sets of pushing mechanisms are equipped with sliding tables on their exteriors. One set of sliding tables clamps the graphite sheet to one side above it via a clamping assembly at its upper end. The other set of sliding tables is equipped with a transmission mechanism on one side. The transmission mechanism is equipped with a pushing mechanism for supporting and conveying the slit graphite strips. The slitting table is connected to a feeding ramp via reinforcing diagonal bars on both sides at one end. On the side of the slitting table away from the feeding ramp, a distance-fixing mechanism is provided above it to position the graphite sheet at the cutting position based on the cutting surface of the strip saw blade.

[0007] In the above scheme, the pushing mechanism further includes a support platform, a hydraulic cylinder is provided at the middle of one side of the support platform, the telescopic end of the hydraulic cylinder is connected to one side of the slide, the support platform is located at the upper end of one set of slides, limit rods are provided at both ends of one side of the support platform, the slide is slidably fitted on the outside of the two limit rods, the upper end face of the slide is connected to the lower end face of the support platform, the screw drive mechanism is threadedly engaged with the slide, and guide rails are provided on the upper end face of the cutting platform and near the slide, the slide is slidably engaged with the guide rails.

[0008] In the above scheme, the transmission mechanism further includes a transmission shaft and a rotating shaft, which are arranged in parallel and symmetrically. One end of the transmission shaft and the rotating shaft are respectively fixedly installed on the outside of another set of slides. Two sets of opposing synchronous belts are symmetrically fitted on the outside of one end of the transmission shaft and the rotating shaft. Two sets of machine bases are provided at the end of the cutting table near the rotating shaft. A support shaft and a control motor are respectively provided inside the two sets of machine bases. A rotating shaft is provided between the support shaft and the control motor. One end of the rotating shaft is fixedly connected to the output shaft of the control motor, and the other end of the rotating shaft is rotatably connected to the inside of the support shaft. The rotating shaft and the rotating shaft are connected by a transmission belt.

[0009] In the above scheme, the pushing mechanism further includes several rectangular shells. The four synchronous belts are divided into two groups from left to right. The several rectangular shells are respectively arranged between the pairs of synchronous belts in the same group. Each of the several rectangular shells is provided with a buffer pressing component. Each of the rectangular shells is slidably fitted with an L-shaped slide rod on the upper part of the interior. A lifting plate is arranged between the two pairs of L-shaped slide rods. The upper surface of the lifting plate is in contact with the lower surface of the graphite plate. The several rectangular shells are distributed at equal distances along the rotation trajectory of the synchronous belts.

[0010] In the above scheme, the buffer pressing assembly further includes a cylindrical shell, which is fixedly installed on the bottom of the inner side of a rectangular shell. A guide post is vertically slidably inserted inside the upper part of the cylindrical shell, and a spring is fitted on the outside of the guide post. The ends of the spring and the guide post away from the cylindrical shell are both connected to the lower end face of the L-shaped slide rod.

[0011] In the above scheme, the distance fixing mechanism further includes a screw drive mechanism, which is set on the upper end face of the cutting table away from the unloading inclined table. The upper surface of the screw drive mechanism is provided with a scale. The screw drive mechanism is connected to a laser positioning device through a sliding seat. The positioning point of the laser positioning device is based on one side of the strip saw blade.

[0012] In the above scheme, a bidirectional telescopic rod is further embedded in one side of the support platform. Both ends of the bidirectional telescopic rod are fixedly equipped with clamping blocks. The two sets of clamping blocks are close to each other on one side and abut against both sides of the graphite plate. Two sets of extension rods are respectively installed on the side wall of the support platform away from the bidirectional telescopic rod. The two sets of extension rods are arranged in parallel and symmetrically, and cylinders are fixedly installed on the outer side of each. Abutting blocks are fixedly installed on the telescopic ends of the two cylinders. The outer surfaces of the two abutting blocks are clamped to the other edge of the graphite plate.

[0013] In the above scheme, the controller is further fixedly installed on one side of the saw main control machine, and the controller is electrically connected to the lead screw drive mechanism, the control motor, and the bidirectional telescopic rod.

[0014] Compared with the prior art, the present invention has the following beneficial effects: 1. By setting up a pusher mechanism with clamping components and a slide with a transmission mechanism on both sides of the slitting table, automatic clamping and step feeding of graphite plates are realized, replacing the traditional manual pushing and positioning method, significantly reducing the labor intensity of operators and improving the continuity and automation of slitting operations.

[0015] 2. By setting a transmission mechanism driven by a drive shaft, rotating shaft, synchronous belt, and control motor on the outside of another set of slides, and distributing multiple pushing mechanisms with lifting plates and buffer pressing components at equal intervals between the synchronous belts, the graphite strips can be automatically received and pushed towards the discharge direction after cutting. Compared with the existing technology where manual pushing is still required after cutting, this structure effectively frees up manpower, avoids the physical exertion and efficiency loss caused by operators repeatedly pushing heavy graphite strips, and reduces the risk of graphite strips being damaged by uneven pushing speed or excessive force.

[0016] 3. A screw drive mechanism is installed on the side of the slitting table away from the unloading ramp, with a scale on its upper surface. The laser positioning device is mounted on the screw drive mechanism via a sliding seat. During operation, the control system can slide and adjust the laser positioning device to the target position along the scale according to the required width of the graphite strip, and quickly and accurately set the cutting position using the cutting surface of the strip saw as a reference. This structure makes the positioning and adjustment process intuitive and convenient, adaptable to the slitting needs of graphite strips of different widths, and significantly improves the equipment's versatility and changeover efficiency. Simultaneously, in conjunction with the automatic feeding mechanism, each feeding is precisely positioned according to the reference position determined by the laser positioning device, eliminating the cumulative errors caused by repeated manual positioning, effectively ensuring the high consistency of the width dimensions of graphite strips in the same batch, and fully meeting the stringent dimensional tolerance requirements of isostatic graphite for semiconductors. Attached Figure Description

[0017] Figure 1 A schematic diagram of the overall structure of a semiconductor isostatic graphite production equipment provided by the present invention; Figure 2 Another overall structural schematic diagram of a semiconductor isostatic graphite production equipment provided by the present invention; Figure 3 A schematic diagram of the connection structure between the slitting table and the lead screw drive mechanism in a semiconductor isostatic graphite production equipment provided by the present invention. Figure 4 A schematic diagram of the connection structure between the drive shaft and the rotating shaft in a semiconductor isostatic graphite production equipment provided by the present invention. Figure 5 A schematic diagram of the disassembled connection structure between the graphite plate and the support platform in a semiconductor isostatic graphite production equipment provided by the present invention. Figure 6 A schematic diagram of the partial connection structure between the synchronous belt and the rectangular shell in a semiconductor isostatic graphite production equipment provided by the present invention. Figure 7 A schematic diagram of the connection structure between the hydraulic cylinder and the slide frame in a production equipment for isostatic graphite for semiconductors provided by the present invention; Figure 8 This invention relates to a production apparatus for isostatically pressed graphite for semiconductors. Figure 3 Enlarged schematic diagram of the structure at point A in the middle; Figure 9 This invention relates to a production apparatus for isostatically pressed graphite for semiconductors. Figure 5 Enlarged schematic diagram of the structure at point B.

[0018] In the diagram: 1. Saw blade main control unit; 2. Controller; 3. Cabinet; 4. Unloading ramp; 5. Screw drive mechanism; 6. Cutting table; 7. Strip saw blade; 8. Screw drive mechanism; 9. Laser positioning device; 10. Slide table; 11. Support platform; 12. Limiting rod; 13. Support shaft rod; 14. Control motor; 15. Drive shaft; 16. Synchronous belt; 17. Transmission belt; 18. Clamping block; 19. Extension rod; 20. Machine base; 21. L-shaped slide bar; 22. Lifting plate; 23. Spring; 24. Cylinder shell; 25. Rectangular shell; 26. Guide post; 27. Bidirectional telescopic rod; 28. Slide frame; 29. ​​Cylinder; 30. Abutment block; 31. Rotating shaft; 32. Graphite plate; 33. Hydraulic cylinder. Detailed Implementation

[0019] To better understand the above-mentioned objectives, features, and advantages of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0020] Numerous specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and therefore the invention is not limited to the specific embodiments disclosed below.

[0021] like Figures 1-9 The production equipment for isostatic graphite for semiconductors shown includes a saw main controller 1, a controller 2, a screw drive mechanism 5, and a strip saw 7. The strip saw 7 is located at the lower end of the saw main controller 1 and is driven by the saw main controller 1 to perform lifting and cutting actions. The bottom of the saw main controller 1 is provided with a base, and a cabinet 3 is provided on the side of the base and close to the saw main controller 1. A slitting table 6 is fixedly mounted on the top of the cabinet 3. The slitting table 6 is used to carry and transport graphite plates 32. Pushing mechanisms are provided on both sides of the upper end of the slitting table 6 to push the graphite plates 32 in the cutting direction. Both sets of pushing mechanisms are equipped with slides 10 on the outside. One set of slides 10 clamps the graphite plate 32 on one side above the upper end through the clamping component at the upper end. The other set of slides 10 is equipped with a transmission mechanism on one side. The transmission mechanism is equipped with a pushing mechanism for supporting and conveying the slit graphite strips. The slitting table 6 is connected to the unloading inclined table 4 through the reinforcing inclined bars on both sides at one end. On the side of the slitting table 6 away from the unloading inclined table 4, a distance fixing mechanism is provided to position the cutting position of the graphite plate 32 based on the cutting surface of the strip saw 7.

[0022] Specifically, the strip saw blade 7 is long and narrow with the cutting edge facing downwards, and is used to cut the graphite plate 32 in a straight line. The cabinet 3 is a rectangular box structure, located above the base and close to the saw blade main control unit 1. The interior of the cabinet 3 can be used to house electrical components and control circuits.

[0023] Two sets of pushing mechanisms are respectively located on the upper left and right sides of the slitting table 6, extending along the length of the slitting table 6. Each set of pushing mechanisms is fixedly connected to a slide table 10 at its bottom, and the slide table 10 slides in cooperation with the guide rail provided on the upper surface of the slitting table 6. A clamping assembly is fixedly installed on the upper end of one set of slide tables 10 for clamping and fixing the graphite plate 32; a transmission mechanism is fixedly installed on the outer side of the other set of slide tables 10, and a pushing mechanism is provided on the transmission mechanism.

[0024] The feeding ramp 4 extends downwards, and a collection box can be placed at the lower end during the cutting operation.

[0025] In this embodiment, the pushing mechanism includes a support platform 11. A hydraulic cylinder 33 is disposed at the middle of one side of the support platform 11. The telescopic end of the hydraulic cylinder 33 is connected to one side of the slide 28. When the piston rod of the hydraulic cylinder 33 extends or retracts, it can push the support platform 11 to move slightly back and forth relative to the slide 28 and the slide table 10 along the feeding direction. This slight movement is used to retract the remaining graphite sheet 32 ​​a small distance (e.g., 0.5-2mm) after each cutting, thereby slightly opening the kerf and preventing the cut graphite strips from colliding with the remaining sheet during the pushing process. To prevent friction or jamming, the support platform 11 is used to place the graphite sheet 32 ​​to be cut. The support platform 11 is located on the upper end of one of the slides 10. Limit rods 12 are provided at both ends of one side of the support platform 11. The two limit rods 12 are slidably fitted with a slide 28. The upper end face of the slide 28 is connected to the lower end face of the support platform 11. The screw drive mechanism 5 is threadedly engaged with the slide 10. The upper end face of the cutting table 6 and near the slide 10 are provided with guide rails. The slide 10 slides with the guide rails, and the guide rails guide and support the movement of the slide 10.

[0026] Specifically, the lead screw drive mechanism 5 includes a drive motor and a lead screw connected to the output end of the drive motor. The lead screw is horizontally arranged along the length direction of the slitting table 6, and the lead screw forms a threaded engagement with a threaded hole provided inside one side of the slide table 10.

[0027] When the drive motor of the lead screw drive mechanism 5 is started, the lead screw rotates, causing the slide table 10 to reciprocate linearly along the guide rail. A guide rail is fixedly installed along the length direction on the upper end face of the slitting table 6 near the slide table 10. A sliding groove matching the guide rail is provided at the bottom of the slide table 10. The slide table 10 slides with the guide rail through the sliding groove to ensure the straightness and stability of the slide table 10 when it moves.

[0028] The cooperation structure between the limit rod 12 and the slide 28 makes the support platform 11 more stable when it is pushed forward as a whole with the slide 10.

[0029] In this embodiment, the transmission mechanism includes a transmission shaft 15 and a rotating shaft 31, which are arranged in parallel and symmetrically. One end of the transmission shaft 15 and the rotating shaft 31 are respectively fixedly installed on the outside of another set of slides 10. Two sets of opposing synchronous belts 16 are symmetrically fitted on the outside of one end of the transmission shaft 15 and the rotating shaft 31. Two sets of machine bases 20 are provided at the end of the slitting table 6 near the rotating shaft 31. Support shafts 13 and control motors 14 are respectively provided inside the two sets of machine bases 20. A rotating shaft is provided between the support shafts 13 and the control motors 14. One end of the rotating shaft is fixedly connected to the output shaft of the control motor 14, and the other end of the rotating shaft is rotatably connected to the inside of the support shafts 13. The rotating shaft and the rotating shaft 31 are connected by a transmission belt 17.

[0030] Specifically, both the drive shaft 15 and the rotating shaft 31 are cylindrical shaft structures. Both ends of the drive shaft 15 and both ends of the rotating shaft 31 are equipped with pulleys. Each set of synchronous belts 16 connects the pulley at one end of the drive shaft 15 and the corresponding pulley at the other end of the rotating shaft 31, forming two parallel synchronous rotation circuits.

[0031] Driven by the control motor 14, the rotating shaft can rotate freely with the support of the support rod 13 at one end. The rotating shaft and the rotating shaft 31 are connected by a transmission belt 17. Specifically, a driving pulley is provided in the middle of the rotating shaft, and a driven pulley is provided in the middle of the rotating shaft 31. The transmission belt 17 is sleeved between the driving pulley and the driven pulley. When the control motor 14 starts, its output shaft drives the rotating shaft to rotate. The rotating shaft transmits power to the rotating shaft 31 through the transmission belt 17. The rotating shaft 31 then drives the transmission shaft 15 to rotate synchronously through the synchronous belt 16, thereby realizing the synchronous rotation of the two sets of synchronous belts 16.

[0032] In this embodiment, the pushing mechanism includes several rectangular shells 25. The four synchronous belts 16 are divided into two groups from left to right, that is, there are four synchronous belts 16 in total, with the two on the left as one group and the two on the right as another group. The several rectangular shells 25 are respectively arranged between the pairs of synchronous belts 16 in the same group, that is, each rectangular shell 25 is arranged between the two synchronous belts 16 on the left or the two synchronous belts 16 on the right. Each of the several rectangular shells 25 is provided with a buffer pressing component. An L-shaped slide rod 21 is slidably fitted on the upper part of each rectangular shell 25. The L-shaped slide rod 21 can slide up and down along the inside of the rectangular shell 25. A lifting plate 22 is arranged between the two pairs of L-shaped slide rods 21. The upper end face of the lifting plate 22 is in contact with the lower end face of the graphite plate 32. The several rectangular shells 25 are evenly distributed along the rotation trajectory of the synchronous belts 16, that is, the L-shaped slide rod 21 on the left synchronous belt 16 and the L-shaped slide rod 21 on the right synchronous belt 16 jointly support the same lifting plate 22. The upper surface of the support plate 22 contacts the lower surface of the graphite plate 32, and is used to receive and support the graphite strips that have been cut.

[0033] Specifically, the two ends of the rectangular shell 25 are fixedly connected to two synchronous belts 16, so that the rectangular shell 25 can rotate together with the synchronous belts 16.

[0034] The buffer pressing assembly applies an upward elastic thrust to the L-shaped slide bar 21. The L-shaped slide bar 21 is slidably fitted inside the rectangular shell 25. The L-shaped slide bar 21 has an L-shaped bent structure; its vertical section slides into the rectangular shell 25, and its horizontal section extends laterally from the top of the rectangular shell 25. A lifting plate 22 is fixedly connected between the horizontal sections of two opposing sets of L-shaped slide bars 21. The lifting plate 22 is a long, flat plate with a smooth upper surface for contact with the lower surface of the graphite sheet 32. After the graphite strip is cut, the lifting plate 22 is pushed upwards by the buffer pressing assembly, tightly supporting the bottom of the graphite strip to prevent it from falling or shifting during transport.

[0035] Several rectangular shells 25 are evenly distributed at equal intervals along the rotation trajectory of the synchronous belt 16, ensuring that during the continuous rotation of the synchronous belt 16, a lifting plate 22 always passes under the cutting position to receive and transport the continuously cut graphite strips one by one. The upper surface area of ​​the lifting plate 22 is larger than the lower surface area of ​​the graphite strip, ensuring that the graphite strip can be stably placed on the lifting plate 22 without tipping over.

[0036] In this embodiment, the buffer pressure assembly includes a cylindrical shell 24, which is fixedly installed at the bottom of the inner side of a rectangular shell 25. A guide post 26 is vertically slidably inserted into the upper part of the cylindrical shell 24, and a spring 23 is fitted on the outside of the guide post 26. The ends of the spring 23 and the guide post 26 away from the cylindrical shell 24 are connected to the lower end face of an L-shaped slide rod 21, and the upper end of the spring 23 abuts against the lower end face of the L-shaped slide rod 21. When the L-shaped slide rod 21 is subjected to downward pressure, the L-shaped slide rod 21 compresses the spring 23 and drives the guide post 26 to slide into the cylindrical shell 24; when the external force disappears, the elastic restoring force of the spring 23 pushes the L-shaped slide rod 21 to return to its original position upward, and drives the guide post 26 to slide upward out of the cylindrical shell 24.

[0037] In this embodiment, the distance fixing mechanism includes a screw drive mechanism 8, which is located on the upper surface of the cutting table 6 away from the unloading ramp 4. A scale is provided on the upper surface of the screw drive mechanism 8, with the scale increasing from small to large on both sides centered on the strip saw blade 7. The screw drive mechanism 8 is connected to a laser positioning device 9 via a sliding seat. The positioning point of the laser positioning device 9 is based on one side of the strip saw blade 7, that is, the laser beam emitted by the laser positioning device 9 is coplanar with the cutting surface of the strip saw blade 7, and is used to indicate the starting position of the next cut.

[0038] The laser positioning device 9 is a laser beam positioning device. Its emitting end projects a linear laser beam downwards. The projection direction of the laser beam is parallel to the cutting surface of the strip saw 7. The projection line formed by the laser beam on the upper surface of the cutting table 6 is the target cutting position line.

[0039] Specifically, the screw drive mechanism 8 consists of a screw, a U-shaped frame, and a rotary motor. The output shaft of the rotary motor drives the screw to rotate. The sliding seat has a screw hole that matches the screw. The two are threaded together and slide outside the U-shaped frame, thereby driving the laser positioning instrument 9 to adjust to a suitable position.

[0040] In this embodiment, a bidirectional telescopic rod 27 is embedded in one side of the support platform 11. Both ends of the bidirectional telescopic rod 27 are fixedly equipped with clamping blocks 18. The sides of the two sets of clamping blocks 18 that are close to each other abut against the two sides of the graphite plate 32. Two sets of extension rods 19 are respectively installed on the side wall of the support platform 11 away from the bidirectional telescopic rod 27. The two sets of extension rods 19 are arranged in parallel and symmetrically, and cylinders 29 are fixedly installed on the outer side of each set. A stop block 30 is fixedly installed on the telescopic end of each of the two cylinders 29. The outer surface of the two stop blocks 30 is clamped on the other side edge of the graphite plate 32.

[0041] The piston rods at both ends of the bidirectional telescopic rod 27 extend from the left and right sides of the support platform 11, respectively, and a clamping block 18 is fixedly installed at the end of each piston rod. The clamping block 18 has an L-shaped structure and an anti-slip pad layer on its inner surface to increase the friction between it and the side wall of the graphite plate 32, thereby enabling the clamping and loosening of the left and right sides of the graphite plate 32.

[0042] After a set of graphite strips is cut, the bidirectional telescopic rod 27, in conjunction with the hydraulic cylinder 33, drives the graphite plate 32 to be slightly adjusted to the rear end, waiting for the graphite strips to be conveyed out.

[0043] Controller 2 is fixedly installed on one side of the saw main control unit 1. Controller 2 is electrically connected to the lead screw drive mechanism 5, control motor 14, and bidirectional telescopic rod 27. Controller 2 is a programmable logic controller (PLC) with a pre-set control program to coordinate the timing of actions of the lead screw drive mechanism 5, control motor 14, bidirectional telescopic rod 27, and other actuators, achieving fully automatic step-by-step slitting operations. Operators can set cutting parameters such as advance step distance and cutting speed through the human-machine interface of controller 2, and the equipment automatically completes continuous slitting according to the preset program.

[0044] In summary, this invention, through the cooperation of the lead screw drive mechanism 5 and the slide table 10, combined with the coordinated control of the controller 2, realizes the automatic clamping and quantitative stepping advance of the graphite plate 32, effectively replacing the manual repeated pushing and positioning operation, significantly reducing labor intensity and improving continuous cutting efficiency; By using the screw drive mechanism 8 and the scale above in conjunction with the laser positioning instrument 9, the cutting surface of the strip saw 7 is used as the absolute reference surface for distance determination, eliminating the cumulative error caused by repeated manual positioning and ensuring the strict requirements of dimensional tolerances for isostatic graphite used in semiconductors. The graphite strips after sliding are automatically received and smoothly transported to the unloading inclined table 4 by a pushing mechanism consisting of a synchronous belt 16, a lifting plate 22, and a spring 23 on the outside of another set of slide tables 10. This eliminates the need for manual pushing, saving time and effort.

[0045] Working principle: The operator places the graphite plate 32 to be cut on the support platform 11 above the cutting table 6, with its front end close to the strip saw blade 7. The controller 2 activates the bidirectional telescopic rod 27, and the piston rods at both ends extend synchronously, pushing the two sets of clamping blocks 18 to clamp the graphite plate 32 from both sides; at the same time, the cylinder 29 pushes the stop block 30 to clamp from the other side edge, forming a stable clamp and preventing deviation during cutting.

[0046] After the graphite plate 32 is clamped, a scale is provided on the screw drive mechanism 8 on the side of the cutting table 6 away from the unloading ramp 4. The control system drives the screw drive mechanism 8 to rotate according to the required graphite strip width, which in turn moves the sliding seat and the laser positioning device 9. Using the cutting surface of the strip saw 7 as the reference surface, the laser positioning point is precisely set at the target cutting position. After the reference surface of the graphite plate 32 is aligned with the strip saw 7, the laser positioning device 9 is moved to the cutting width, so that the graphite strips are cut more clearly according to each width specification. It should be noted that the normal range of use for the graphite strip width is within the bearing area of ​​the subsequent pushing mechanism.

[0047] Controller 2 controls the simultaneous activation of two sets of lead screw drive mechanisms 5, driving two sets of slides 10 to move synchronously along the guide rail at the upper end of the cutting table 6 towards the strip saw 7. One set of slides 10 is connected to the clamping assembly via the support platform 11, driving the clamped graphite plate 32 forward; the other set of slides 10 drives the transmission mechanism and the pushing mechanism to move forward synchronously, keeping the pushing mechanism always near the cutting position. When the front end of the graphite plate 32 reaches the cutting start position indicated by the laser positioning instrument 9, the two sets of lead screw drive mechanisms 5 pause, and the cutting process is ready.

[0048] The saw blade main controller 1 drives the lower strip saw blade 7 to cut the graphite plate 32 into a graphite strip of a predetermined width. During the cutting process, the transmission mechanism located outside another set of slides 10 remains in standby mode, and the pushing mechanism on the synchronous belt 16 is in a low position. At this time, the upper end face of the lifting plate 22 abuts against the lower end face of the graphite plate 32, providing bottom support for the cut graphite strip and avoiding the cutting path of the strip saw blade 7, ensuring that the cutting operation is not disturbed. After the cutting is completed, the controller 2 first controls the piston rod of the hydraulic cylinder 33 to retract, driving the slide 28, the support table 11, and the remaining graphite plate 32 to retract slightly backward along the feeding direction, so that the cut between the newly cut graphite strip and the remaining plate is slightly opened, avoiding mutual scraping during subsequent pushing. Then, the controller 2 starts the control motor 14, which drives the rotating shaft 31 and the transmission shaft 15 to rotate synchronously through the transmission belt 17, driving the two sets of opposing synchronous belts 16 to run along the rotation trajectory. Several rectangular shells 25 are evenly distributed between the synchronous belts 16. Each rectangular shell 25 contains a buffer pressing assembly consisting of a cylindrical shell 24, a guide post 26, and a spring 23. Its upper end is connected to a lifting plate 22 via an L-shaped slide rod 21. When the lifting plate 22 rotates with the synchronous belt 16 to a position below the graphite strip, the spring 23 pushes the L-shaped slide rod 21 upward to lift the lifting plate 22, making it tightly support the bottom of the slit graphite strip. As the synchronous belt 16 continues to rotate, the lifting plate 22 conveys the graphite strip from the cutting area to the end of the slitting table 6, and finally pushes it to the unloading ramp 4, where it slides down to the collection area by gravity.

[0049] After one round of material discharge, controller 2 controls the two sets of lead screw drive mechanisms 5 to start simultaneously again, and the two sets of slides 10 advance synchronously, pushing the remaining graphite sheet 32 ​​forward by a cutting width, i.e., the distance set by the laser positioning instrument 9. At the same time, the pushing mechanism follows synchronously to the new cutting position. The above cutting, receiving, and discharging process is repeated until the entire graphite sheet 32 ​​is completely cut. Throughout the process, controller 2 coordinates the control of the lead screw drive mechanism 5, control motor 14, bidirectional telescopic rod 27, and other actuators to achieve fully automatic, continuous, and precise step-by-step cutting operation.

[0050] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed invention.

Claims

1. A production equipment for isostatically pressed graphite for semiconductors, comprising a saw blade main control unit (1), a controller (2), a lead screw drive mechanism (5), and a strip saw blade (7), characterized in that, The strip saw blade (7) is located at the lower end of the saw blade main control machine (1), and a base is provided at the bottom of the saw blade main control machine (1). A cabinet (3) is provided above the base and on the side close to the saw blade main control machine (1). A slitting table (6) is fixedly mounted on the upper part of the cabinet (3), and a pushing mechanism is provided on both sides of the upper end of the slitting table (6). Both sets of the pushing mechanism are equipped with slides (10) on the outside. One set of slides (10) clamps the graphite plate (32) on one side above the upper end through the clamping assembly. The other set of slides (10) is equipped with a transmission mechanism on one side. The transmission mechanism is equipped with a pushing mechanism for supporting and conveying the graphite strips after slitting. The slitting table (6) is connected to the unloading inclined table (4) through the reinforcing inclined rods on both sides of one end. The slitting table (6) is equipped with a distance-fixing mechanism on the side away from the unloading inclined table (4) to position the graphite plate (32) at the cutting position based on the cutting surface of the strip saw (7).

2. The production equipment for isostatically pressed graphite for semiconductors according to claim 1, characterized in that, The pushing mechanism includes a support platform (11), a hydraulic cylinder (33) is provided at the middle of one side of the support platform (11), the telescopic end of the hydraulic cylinder (33) is connected to one side of the slide (28), the support platform (11) is located at the upper end of one set of slides (10), and limit rods (12) are provided at both ends of one side of the support platform (11). The slide (28) is slidably fitted on the outside of the two limit rods (12). The upper end face of the slide (28) is connected to the lower end face of the support platform (11). The screw drive mechanism (5) is threadedly engaged with the slide (10). The upper end face of the cutting table (6) and near the slide (10) are provided with guide rails. The slide (10) is slidably engaged with the guide rails.

3. The production equipment for isostatically pressed graphite for semiconductors according to claim 1, characterized in that, The transmission mechanism includes a transmission shaft (15) and a rotating shaft (31). The transmission shaft (15) and the rotating shaft (31) are arranged in parallel and symmetrically. One end of the transmission shaft (15) and the rotating shaft (31) are respectively fixedly installed on the outside of another set of slides (10). Two sets of opposing synchronous belts (16) are symmetrically fitted on the outside of one end of the transmission shaft (15) and the rotating shaft (31). Two sets of machine bases (20) are provided on the end of the cutting table (6) near the rotating shaft (31). The two sets of machine bases (20) are respectively provided with a support shaft (13) and a control motor (14). A rotating shaft is provided between the support shaft (13) and the control motor (14). One end of the rotating shaft is fixedly connected to the output shaft of the control motor (14). The other end of the rotating shaft is rotatably connected to the inside of the support shaft (13). The rotating shaft and the rotating shaft (31) are connected by a transmission belt (17).

4. The production equipment for isostatically pressed graphite for semiconductors according to claim 3, characterized in that, The pushing mechanism includes several rectangular shells (25). The four synchronous belts (16) are divided into two groups from left to right. Several rectangular shells (25) are respectively arranged between the two opposite synchronous belts (16) in the same group. Each of the several rectangular shells (25) is provided with a buffer pressing component. Each rectangular shell (25) is slidably fitted with an L-shaped slide rod (21) on the upper part of the interior. A lifting plate (22) is provided between the two opposite groups of L-shaped slide rods (21). The upper end face of the lifting plate (22) is in contact with the lower end face of the graphite plate (32). Several rectangular shells (25) are distributed at equal distances along the rotation trajectory of the synchronous belts (16).

5. The production equipment for isostatically pressed graphite for semiconductors according to claim 4, characterized in that, The buffer pressing assembly includes a cylindrical shell (24), which is fixedly installed on the bottom of the inner side of a rectangular shell (25). A guide post (26) is vertically slidably inserted inside the upper part of the cylindrical shell (24). A spring (23) is fitted on the outside of the guide post (26). The ends of the spring (23) and the guide post (26) away from the cylindrical shell (24) are connected to the lower end face of the L-shaped slide rod (21).

6. The production equipment for isostatically pressed graphite for semiconductors according to claim 1, characterized in that, The distance fixing mechanism includes a screw drive mechanism (8), which is located on the upper surface of the cutting table (6) away from the unloading inclined table (4). A scale is provided on the upper surface of the screw drive mechanism (8). The screw drive mechanism (8) is connected to a laser positioning device (9) through a sliding seat. The positioning point of the laser positioning device (9) is based on one side of the strip saw (7).

7. The production equipment for isostatically pressed graphite for semiconductors according to claim 2, characterized in that, A bidirectional telescopic rod (27) is embedded in one side of the support platform (11). Both ends of the bidirectional telescopic rod (27) are fixedly fitted with clamping blocks (18). The two sets of clamping blocks (18) are close to each other on one side and abut against both sides of the graphite plate (32). Two sets of extension rods (19) are respectively installed on the side wall of the support platform (11) away from the bidirectional telescopic rod (27). The two sets of extension rods (19) are arranged in parallel and symmetrical, and cylinders (29) are fixedly installed on the outer side of each. A stop block (30) is fixedly installed on the telescopic end of each of the two cylinders (29). The outer surface of the two stop blocks (30) is clamped on the other side edge of the graphite plate (32).

8. The production equipment for isostatically pressed graphite for semiconductors according to claim 7, characterized in that, The controller (2) is fixedly installed on one side of the saw main controller (1), and the controller (2) is electrically connected to the lead screw drive mechanism (5), the control motor (14), and the bidirectional telescopic rod (27).

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