A heat retaining furnace for PCVD deposition lathe and using method

Abstract

The present application relates to the technical fields of optical fiber preform, and discloses a heat preservation furnace for PCVD deposition lathe and a use method, which comprises a furnace body mechanism, the furnace body mechanism comprises a lower furnace shell and an upper furnace shell which are arranged in an upper-lower splicing mode, graphite heating rods are arranged at the inner corners of the lower furnace shell and the upper furnace shell respectively, resonance through holes are formed through the two sides of the lower furnace shell and the upper furnace shell, a driving mechanism is arranged below the lower furnace shell, a resonance mechanism penetrates the bottom of the lower furnace shell and is in sliding connection with the lower furnace shell, and the resonance mechanism is driven by the driving mechanism, in the process of closing the furnace body, the pressing arm pushes the inclined wedge frame, indirectly drives two groups of baffles to move towards each other, opens the opening of the chamber, and facilitates the outward heat conduction of the graphite heating rods, in the process of opening the furnace body, the baffles are automatically reset, the opening of the chamber is blocked, the graphite heating rods are prevented from directly contacting the external air, the structure of the graphite heating rods is protected, and cracks and internal mechanism damage are prevented.

Description

Technical Field

[0001] This invention relates to the field of optical fiber preform production technology, specifically to a holding furnace for PCVD deposition lathes and its usage method. Background Technology

[0002] PCVD, or Plasma Chemical Vapor Deposition, is a technology that uses a reactive gas source introduced into a low-pressure vacuum chamber. The gas is ionized by a radio frequency electric field to form a low-temperature plasma that activates the reactive molecules. At a low temperature of 200-500℃, a chemical reaction occurs on the surface of the workpiece, and a solid film is uniformly deposited. It also has strong film-substrate adhesion due to ion bombardment. It can be used for the preparation of glass layers for optical fiber preforms, and is also widely used in hard coatings for cutting tools, semiconductor insulating films, industrial protective coatings, and other applications. It is compatible with various high-temperature-sensitive substrates, and the film is dense and uniform with high process controllability. In existing technologies, when the graphite heating rods in a holding furnace are opened after use, the high-temperature, red-hot graphite rods are suddenly exposed to room-temperature cold air. The surface contracts rapidly while the interior remains in a state of high-temperature expansion. This huge temperature difference generates enormous internal stress, causing fine microcracks to appear on the surface. These cracks become channels for oxygen permeation, allowing oxidation to propagate deep into the rod, thus affecting subsequent use. Therefore, this invention proposes a holding furnace for PCVD deposition lathes and a method for using it to solve the aforementioned defects. Summary of the Invention

[0003] The purpose of this invention is to provide a holding furnace for a PCVD deposition lathe and a method of using it, in order to solve the problems mentioned in the background art. To achieve the above objective, this invention provides the following technical solution: It includes a furnace body mechanism, which comprises a lower furnace shell and an upper furnace shell joined together vertically. Graphite heating rods are respectively provided at the inner corners of the lower and upper furnace shells, and resonant through-holes are provided on both sides of the lower and upper furnace shells. A drive mechanism is located below the lower furnace shell; A resonant mechanism, which penetrates the bottom of the lower furnace shell and is slidably connected to the lower furnace shell, is driven by a drive mechanism; The protective mechanism is located inside the lower furnace shell and the upper furnace shell; The control mechanism is respectively installed on the outer surface of the lower furnace shell and the upper furnace shell on the side close to each other. A hydraulic cylinder is installed at the bottom of the lower furnace shell, and the output shaft of the hydraulic cylinder is fixedly connected to the upper furnace shell.

[0004] Preferably, the protective mechanism includes a frame surrounding the graphite heating rod, with both sides of the frame sealed to the corresponding furnace shell, a chamber inside the frame, and an opening on the surface of the frame.

[0005] Preferably, a return spring is movably sleeved on both sides of the inner side of the frame, and a baffle is slidably provided at the location where the return spring is installed on the frame. The baffle is arc-shaped and its main body is located at the through-hole for sliding to open and close the chamber at the through-hole. The two ends of the return spring abut against the frame and the baffle, respectively.

[0006] Preferably, four baffles are provided, wherein the bottom of the baffles located on both sides inside the upper furnace shell is fixedly installed with plugs, and the top of the baffles located on both sides inside the lower furnace shell is fixedly installed with sockets, and the plugs and sockets are movably connected.

[0007] Preferably, mounting rings are fixedly provided on both sides of the inner wall of the lower furnace shell, and through grooves are opened on the surface of the mounting rings. A toothed ring is slidably provided on the inner ring of the mounting rings, and the outer surface of the toothed rings penetrates the through grooves.

[0008] Preferably, there are two toothed rings symmetrically arranged relative to the mounting ring. The side of the two toothed rings that are close to each other is configured with a conical tooth structure and engages with a conical wheel one. The top side of the conical wheel one engages with a conical wheel two.

[0009] Preferably, the outer surfaces of the two toothed rings are connected to through grooves and respectively to rings. The two ends of the rings are fixedly connected to levers. The levers are symmetrically arranged at the upper and lower diagonals of the two rings and move up and down towards each other. The surfaces of the levers abut against the sides of the corresponding plugs and sockets.

[0010] Preferably, the control mechanism includes a pressure arm fixedly installed on the side wall of the upper furnace shell, and a gear is fixedly connected at the axis of the second conical wheel through the side wall of the lower furnace shell.

[0011] Preferably, the gear is provided with a wedge frame on its side, the surface of the wedge frame abuts against the pressure arm, a rack is fixedly connected to one side of the wedge frame relative to the pressure arm, the top of the rack meshes with the gear, a spring frame is connected to the bottom of the rack, and the rack abuts against the elastic element on the spring frame.

[0012] Preferably, a method of using a holding furnace for a PCVD deposition lathe includes the following steps: S1: In the initial state, the hydraulic cylinder is controlled to raise the upper furnace shell, so that the furnace space is opened, and the fiber optic preform is placed inside the lower furnace shell. The preform passes through the resonant mechanism, ready for the resonant deposition operation. Then the output shaft of the hydraulic cylinder is controlled to retract, so that the two furnace shells are joined together. S2: During the downward movement and assembly of the upper furnace shell, the pressure arm contacts the inclined wedge frame, pushing the rack to move laterally, and the transmission gear rotates. When the gear rotates, the second conical wheel changes the transmission direction, driving the first conical wheel meshing on the side to rotate. During the rotation of the first conical wheel, it drives the two connected meshing parts to rotate respectively, and the two meshing parts rotate in opposite directions, synchronously driving the two rings to rotate, driving the lever to perform a scissor motion. One lever installed at the diagonal of the same ring moves upward around the circle, and the other moves downward around the circle. The four corresponding baffles move closer to each other, so that all the openings are opened. After the upper furnace shell and the lower furnace shell are assembled, the plug and socket are assembled. In the internal space of the furnace body, together with the baffle and the frame, a barrier layer is formed, and the assembly of the plug and socket can further prevent heat leakage. At this time, the deposition operation is performed through the drive mechanism. S3: After deposition is completed, the hydraulic cylinder drives upward to open the upper furnace shell. During the process, the four baffles gradually lose their thrust and return to their original position under the action of the return spring, sealing the opening to prevent heat from escalating and causing damage to the graphite heating rod.

[0013] Compared with the prior art, the beneficial effects of the present invention are as follows: In this invention, the graphite heating rod inside the furnace body is protected by the frame and baffles. The internal structure of the furnace body is made of high-temperature resistant materials. During the furnace body closing process, the pressure arm pushes the inclined wedge frame, which indirectly drives the two sets of baffles to move towards each other, opening the opening of the chamber to facilitate the graphite heating rod to conduct heat outward. During the furnace body opening process, the baffles automatically return to their original position to seal the opening of the chamber, preventing the graphite heating rod from directly contacting the outside air, protecting the structure of the graphite heating rod, and preventing cracks and damage to the internal mechanism. In this invention, by setting a baffle, the plug and socket are assembled simultaneously during the furnace body assembly process, forming a heat insulation layer inside the furnace body, further preventing internal heat from leaking out. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a side view of the structure of the present invention; Figure 3 This is a schematic diagram of the internal structure of the furnace shell of the present invention; Figure 4 This is a schematic diagram of the resonant mechanism of the present invention; Figure 5 This is a schematic diagram of the frame structure of the present invention; Figure 6 This is a schematic diagram of the protective mechanism of the present invention; Figure 7 This is a schematic diagram of the structure of the port and baffle of the present invention; Figure 8This is a schematic diagram of the unfolded protective mechanism of the present invention.

[0015] In the picture: 100. Furnace body structure; 101. Lower furnace shell; 102. Upper furnace shell; 103. Graphite heating rod; 104. Resonance through-hole; 200. Drive mechanism; 300. Resonance mechanism; 400. Protective mechanism; 401. Frame; 402. Chamber; 403. Through port; 404. Return spring; 405. Baffle; 406. Insert; 407. Socket; 408. Mounting ring; 409. Through groove; 410. Toothed ring; 411. Conical wheel one; 412. Conical wheel two; 413. Ring; 414. Lever; 500. Control mechanism; 501. Pressure arm; 502. Gear; 503. Wedge frame; 504. Rack; 505. Spring frame; 600. Hydraulic cylinder. Detailed Implementation

[0016] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0017] Please see Figures 1 to 8 The present invention provides a technical solution: including a furnace body mechanism 100, the furnace body mechanism 100 including a lower furnace shell 101 and an upper furnace shell 102 that are assembled together, graphite heating rods 103 are respectively provided at the inner corners of the lower furnace shell 101 and the upper furnace shell 102, and resonant through holes 104 are provided on both sides of the lower furnace shell 101 and the upper furnace shell 102. Drive mechanism 200, which is located below the lower furnace shell 101; The resonant mechanism 300 passes through the bottom of the lower furnace shell 101 and is slidably connected to the lower furnace shell 101. The resonant mechanism 300 is driven by the drive mechanism 200. The protective mechanism 400 is installed inside the lower furnace shell 101 and the upper furnace shell 102. The control mechanism 500 is respectively installed on the outer surface of the lower furnace shell 101 and the upper furnace shell 102 on the side close to each other. The bottom of the lower furnace shell 101 is provided with a hydraulic cylinder 600, and the output shaft of the hydraulic cylinder 600 is fixedly connected to the upper furnace shell 102. The protective mechanism 400 includes a frame 401 that is framed outside the graphite heating rod 103. The two sides of the frame 401 are sealed to the corresponding furnace shell. A chamber 402 is provided inside the frame 401. An opening 403 is provided on the surface of the frame 401. Return springs 404 are movably sleeved on both sides of the inner side of the frame 401. A baffle 405 is slidably provided at the location where the return springs 404 are installed on the frame 401. The baffle 405 is arc-shaped and its main body is located at the through opening 403. It is used to slide at the through opening to open and close the chamber 402. The two ends of the return spring 404 abut against the frame 401 and the baffle 405 respectively. Four baffles 405 are provided. The bottom of the baffles 405 located inside the upper furnace shell 102 is fixedly installed with plugs 406, and the top of the baffles 405 located inside the lower furnace shell 101 is fixedly installed with sockets 407. The plugs 406 and sockets 407 are movably connected. Mounting rings 408 are fixedly installed on both sides of the inner wall of the lower furnace shell 101. A through groove 409 is opened on the surface of the mounting ring 408. A toothed ring 410 is slidably installed on the inner ring of the mounting ring 408. The outer surface of the toothed ring 410 penetrates the through groove 409. Two toothed rings 410 are symmetrically arranged relative to the mounting ring 408. The side of the two toothed rings 410 that is close to each other is set with a conical tooth structure and engages with a conical wheel 411. The top side of the conical wheel 411 engages with a conical wheel 412. Two toothed rings 410 have through grooves 409 on their outer surfaces and are respectively fixedly connected to rings 413. Two levers 414 are fixedly connected to both ends of the rings 413. The levers 414 are symmetrically arranged at the upper and lower diagonals of the two rings 413, and the levers 414 move up and down towards each other. The surfaces of the levers 414 abut against the sides of the corresponding plug-in 406 and socket 407 respectively. The control mechanism 500 includes a pressure arm 501 fixedly installed on the side wall of the upper furnace shell 102, and a gear 502 fixedly connected through the axis of the conical wheel 412 through the side wall of the lower furnace shell 101. A wedge bracket 503 is provided on the side of the gear 502. The surface of the wedge bracket 503 abuts against the pressure arm 501. A rack 504 is fixedly connected to one side of the wedge bracket 503 relative to the pressure arm 501. The top of the rack 504 meshes with the gear 502. A spring bracket 505 is connected to the bottom of the rack 504. The rack 504 abuts against the elastic element on the spring bracket 505.

[0018] The invention relates to a holding furnace for PCVD deposition lathes and its operating method, which works as follows: like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 As shown: S1: In the initial state, control the hydraulic cylinder 600 to lift the upper furnace shell 102, so that the furnace space is opened, and place the optical fiber preform inside the lower furnace shell 101. The preform passes through the resonant mechanism 300, preparing for the resonant deposition operation. Then control the output shaft of the hydraulic cylinder 600 to retract, so that the two furnace shells are joined together. S2: During the downward movement and assembly of the upper furnace shell 102, the pressure arm 501 contacts the inclined wedge frame 503, pushing the rack 504 to move laterally. The transmission gear 502 rotates. When the gear 502 rotates, the second conical wheel 412 changes the transmission direction, driving the side-meshing first conical wheel 411 to rotate. During the rotation of the first conical wheel 411, it drives the two connected meshing gears to rotate respectively, and the rotation directions of the two meshing gears are opposite. It synchronously drives the two rings 413 to rotate, driving the lever 414 to perform a scissor motion. The same ring 413 rotates. One of the levers 414 installed at the opposite corners of the 13 moves upward in a circle and the other moves downward in a circle. The four corresponding baffles 405 move closer to each other, so that the openings 403 are all opened. After the upper furnace shell 102 and the lower furnace shell 101 are assembled, the plug 406 and the socket 407 are assembled. In the internal space of the furnace body, the baffles 405 and the frame 401 form a barrier layer. The assembly of the plug 406 and the socket 407 can further prevent heat leakage. At this time, the deposition operation is performed by the drive mechanism 200. S3: After deposition is completed, the hydraulic cylinder 600 drives upward to open the upper furnace shell 102. During the process, the four baffles 405 gradually lose their thrust and return to their original position under the action of the return spring 404, thus sealing the opening 403 and preventing heat from escaping and causing damage to the graphite heating rod 103.

[0019] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A holding furnace for a PCVD deposition lathe, characterized in that, The furnace body includes a furnace body mechanism (100), which includes a lower furnace shell (101) and an upper furnace shell (102) that are assembled together. Graphite heating rods (103) are respectively provided at the inner corners of the lower furnace shell (101) and the upper furnace shell (102). Resonance through holes (104) are provided on both sides of the lower furnace shell (101) and the upper furnace shell (102). A drive mechanism (200) is disposed below the lower furnace shell (101); A resonant mechanism (300) is provided, which penetrates the bottom of the lower furnace shell (101) and is slidably connected to the lower furnace shell (101). The resonant mechanism (300) is driven by a drive mechanism (200). A protective mechanism (400) is provided inside the lower furnace shell (101) and the upper furnace shell (102); The control mechanism (500) is respectively set on the outer surface of the lower furnace shell (101) and the upper furnace shell (102) on the side close to each other. The bottom of the lower furnace shell (101) is provided with a hydraulic cylinder (600), and the output shaft of the hydraulic cylinder (600) is fixedly connected to the upper furnace shell (102).

2. The holding furnace for a PCVD deposition lathe according to claim 1, characterized in that: The protective mechanism (400) includes a frame (401) that is framed outside the graphite heating rod (103). The two sides of the frame (401) are sealed to the corresponding furnace shell. A chamber (402) is provided inside the frame (401). An opening (403) is provided on the surface of the frame (401).

3. The holding furnace for a PCVD deposition lathe according to claim 2, characterized in that: Return springs (404) are movably sleeved on both sides of the inner side of the frame (401). A baffle (405) is slidably provided at the location where the return spring (404) is installed on the frame (401). The baffle (405) is arc-shaped and its main body is located at the opening (403) for sliding at the opening to open and close the chamber (402). The two ends of the return spring (404) abut against the frame (401) and the baffle (405) respectively.

4. The holding furnace for a PCVD deposition lathe according to claim 3, characterized in that: Four baffles (405) are provided. The bottom of the baffles (405) located inside the upper furnace shell (102) is fixedly installed with plugs (406), and the top of the baffles (405) located inside the lower furnace shell (101) is fixedly installed with sockets (407). The plugs (406) and sockets (407) are movably connected.

5. A holding furnace for a PCVD deposition lathe according to claim 4, characterized in that: The inner walls of the lower furnace shell (101) are fixedly provided with mounting rings (408) on both sides. The surface of the mounting rings (408) is provided with through grooves (409). The inner ring of the mounting rings (408) is slidably provided with a toothed ring (410). The outer surface of the toothed ring (410) penetrates the through groove (409).

6. A holding furnace for a PCVD deposition lathe according to claim 5, characterized in that: Two toothed rings (410) are symmetrically arranged relative to the mounting ring (408). The two toothed rings (410) are arranged with a conical tooth structure on the side that is close to each other, and are engaged with a conical wheel (411). The top side of the conical wheel (411) is engaged with a conical wheel (412).

7. A holding furnace for a PCVD deposition lathe according to claim 6, characterized in that: The outer surfaces of the two toothed rings (410) pass through the through groove (409) and are respectively fixedly connected to a ring (413). The two ends of the ring (413) are fixedly connected to a lever (414). The levers (414) are symmetrically arranged at the upper and lower diagonals of the two rings (413), and the levers (414) move up and down towards each other. The surfaces of the levers (414) abut against the sides of the corresponding plug (406) and socket (407).

8. A holding furnace for a PCVD deposition lathe according to claim 7, characterized in that: The control mechanism (500) includes a pressure arm (501) fixedly installed on the side wall of the upper furnace shell (102), and a gear (502) is fixedly connected through the axis of the conical wheel (412) through the side wall of the lower furnace shell (101).

9. A holding furnace for a PCVD deposition lathe according to claim 8, characterized in that: The gear (502) has a wedge frame (503) on its side. The surface of the wedge frame (503) abuts against the pressure arm (501). A rack (504) is fixedly connected to one side of the wedge frame (503) relative to the pressure arm (501). The top of the rack (504) meshes with the gear (502). A spring frame (505) is connected to the bottom of the rack (504). The rack (504) abuts against the elastic element on the spring frame (505).

10. A method of using a holding furnace for a PCVD deposition lathe according to any one of claims 1-9, characterized in that, Includes the following steps: S1: In the initial state, the hydraulic cylinder (600) is controlled to raise the upper furnace shell (102), so that the furnace space is opened, and the fiber optic preform is placed inside the lower furnace shell (101). The preform passes through the resonant mechanism (300) in preparation for the resonant deposition operation. Then the output shaft of the hydraulic cylinder (600) is controlled to retract, so that the two furnace shells are joined together. S2: During the downward movement and assembly of the upper furnace shell (102), the pressure arm (501) contacts the inclined wedge frame (503), pushing the rack (504) to move laterally, and the transmission gear (502) rotates. When the gear (502) rotates, the second conical wheel (412) changes the transmission direction, driving the first conical wheel (411) meshing on the side to rotate. During the rotation of the first conical wheel (411), it drives the two connected meshing gears to rotate respectively, and the rotation directions of the two meshing gears are opposite, synchronously driving the two rings (413) to rotate, driving the lever (414) to perform scissor motion. The same ring (413) rotates. 3) The levers (414) installed at opposite corners move in a circle upwards and downwards, and the four corresponding baffles (405) move closer to each other, so that the openings (403) are all opened. After the upper furnace shell (102) and the lower furnace shell (101) are assembled, the plug (406) and the socket (407) are assembled. In the internal space of the furnace body, the baffles (405) and the frame (401) form a barrier layer. The assembly of the plug (406) and the socket (407) can further prevent heat leakage. At this time, the deposition operation is carried out by the drive mechanism (200). S3: After deposition is completed, the hydraulic cylinder (600) drives upward to open the upper furnace shell (102). During the process, the four baffles (405) gradually lose thrust and return to their original position under the action of the return spring (404), sealing the opening (403) to prevent heat from escalating and causing damage to the graphite heating rod (103).

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