A three-color plating method

CN122879644APending Publication Date: 2026-10-09苏州德罕电子科技有限公司
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Patent Information

Application Number
CN202611008720.1
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-07-08
Publication Date
2026-10-09

AI Technical Summary

Technical Problem

为了达到目标沉积效果,多采用分区域遮蔽后多镀膜的工艺,由于遮蔽精度低,极易出现边界溢色、过渡粗糙的缺陷

Benefits of technology

[0024]与现有技术相比,本发明的有益效果是:对第一遮蔽图案的边缘多余部分进行激光雕刻,达到去除第一遮蔽图案的边缘多余部分的目的;提高了第一遮蔽图案边缘精度的目的。形成的电泳涂层边缘更规整。对第二遮蔽图案的边缘多余部分进行激光雕刻,达到去除第二遮蔽图案的边缘多余部分的目的;提高了第二遮蔽图案的精度。形成的第三金属膜层边缘更规整。经过两局部修整,边缘精度高,无边界溢色、过渡粗糙的情形。

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Abstract

The application discloses a three-color coating method, comprising the following steps: etching, depositing a first metal film layer, first shielding, first local trimming, electrophoresis, cleaning the first shielding pattern, depositing a second metal film layer, washing off the electrophoresis coating, second shielding, second local trimming, fading, depositing a third metal film layer and washing off the second shielding pattern. Compared with the prior art, the application has the beneficial effects that: the edge excess part of the first shielding pattern is laser engraved to remove the edge excess part of the first shielding pattern; the edge precision of the first shielding pattern is improved; the edge of the formed electrophoresis coating is more regular; the edge excess part of the second shielding pattern is laser engraved to remove the edge excess part of the second shielding pattern; the precision of the second shielding pattern is improved; the edge of the formed third metal film layer is more regular; and after two local trimmings, the edge precision is high, and there is no situation of boundary color overflow and rough transition.
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Description

Technical Field

[0001] This invention relates to a PVD coating technology, and more particularly to a three-color coating method. Background Technology

[0002] PVD coating technology refers to a technique that uses physical methods under vacuum conditions to vaporize the surface of a material source into gaseous atoms or molecules, or partially ionize them into ions, and then deposits a thin film with specific functions onto a substrate surface through a low-pressure gas process. It is widely used for surface coatings of materials such as plastics, glass, and metals. To achieve the desired deposition effect, a process of multi-layer coating after area masking is often used. However, due to low masking precision, defects such as boundary bleeding and rough transitions are prone to occur. Therefore, improving masking precision is a technical problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0003] To overcome the above-mentioned shortcomings, the present invention aims to provide a three-color coating method.

[0004] To achieve the above objectives, the technical solution adopted by the present invention is: a three-color coating method, comprising the following steps:

[0005] A1. Etching: Etching on a substrate to obtain the etched area;

[0006] A2. Deposition of the first metal film layer: The substrate obtained from the A1 pretreatment is placed in a vacuum coating machine, and the first metal film layer is deposited using an arc ion plating process.

[0007] A3. First masking: Photosensitive oil is coated on the surface of the first metal film layer, the photosensitive oil is covered with film, and the photosensitive oil is exposed and developed. It is then cleaned with developing oil to form a first masking pattern with a preset masking accuracy of ±0.05mm.

[0008] A4. First partial trimming: Laser engraving is performed on the excess parts of the edge of the first masking pattern to remove the excess parts of the edge of the first masking pattern;

[0009] A5. Electrophoresis: The substrate is placed in an electrophoresis apparatus, and under the action of an electric field, the charged particles in the electrophoretic solution move toward the opposite electrode and are deposited on the surface of the workpiece to form a uniform first electrophoretic coating.

[0010] A6. Cleaning the first masking pattern: Clean the first masking pattern using ultrasonic waves and cleaning agent;

[0011] A7. Depositing the second metal film: Since the PVD coating cannot adhere to the electrophoretic coating, the substrate cleaned in A6 is placed in a vacuum coating machine, and an arc ion plating process is used to deposit the second metal film on the first metal film.

[0012] A8. Wash off the electrophoretic coating: Remove the first electrophoretic coating;

[0013] A9. Second masking: A photosensitive oil is coated on the surface of the substrate, covering the second metal film layer and the edge of the first metal film layer; the photosensitive oil is covered with film, and the photosensitive oil is exposed and developed, and cleaned with developing oil to form a second masking pattern with a preset masking accuracy of ±0.05mm.

[0014] A10. Second Partial Refinement: Laser engraving is performed on the excess parts of the edge of the second masking pattern to remove the excess parts of the edge of the second masking pattern;

[0015] A11. Stripping: In the area not covered by the second masking pattern, dissolve and peel off the first metal film layer on the surface of the substrate.

[0016] A12, Deposition of the third metal film: The substrate cleaned in A11 is placed in a vacuum coating machine, and the third metal film is deposited using an arc ion plating process.

[0017] A13. Remove the second masking pattern: Clean the second masking pattern using ultrasonic waves and cleaning agents.

[0018] A further feature of this invention is that the etching solution is a mixed etching solution containing copper chloride and hydrochloric acid, and the etching method is immersion.

[0019] A further feature of the present invention is that the material of the first metal film layer is one of titanium, chromium, or zirconium.

[0020] The present invention is further configured such that: the electrophoretic solution is composed of emulsion, mortar, solvent, additives, neutralizer and pure water, and the electrophoresis form is cathodic electrophoresis.

[0021] The present invention is further configured such that: the cleaning method is ultrasonic cleaning, the ultrasonic frequency is 20Hz, and the ultrasonic cleaning time is not less than 10min.

[0022] The present invention is further configured as follows: after the first masking image is formed, the photosensitive oil is baked to promote the cross-linking and curing of the developing oil molecules; after the second masking image is formed, the photosensitive oil is baked to promote the cross-linking and curing of the developing oil molecules; the baking temperature is 80°C and the baking time is 30 min.

[0023] The present invention is further configured such that: the first masking pattern formed in A3 completely covers the first metal film layer and extends 0.1 mm into the etched area; and the edge of the first masking pattern formed in A4 by laser engraving is aligned with the edge of the etched area.

[0024] Compared with the prior art, the beneficial effects of the present invention are: Laser engraving is performed on the excess portions of the first masking pattern's edges to remove them, thus improving the edge precision of the first masking pattern. The resulting electrophoretic coating has more regular edges. Laser engraving is also performed on the excess portions of the second masking pattern to remove them, improving the precision of the second masking pattern. The resulting third metal film layer has more regular edges. After these two local finishing processes, the edge precision is high, with no boundary overflow or rough transitions. Attached Figure Description

[0025] Figure 1 This is a partial structural schematic diagram of the three-color coating method;

[0026] Figure 2 This is another partial structural schematic diagram of the three-color coating method. Detailed Implementation

[0027] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby providing a clearer and more explicit definition of the scope of protection of the present invention.

[0028] See Figure 1-2 As shown, a three-color coating method in this embodiment includes the following steps:

[0029] A1. Etching: Etching on a substrate to obtain the etched area;

[0030] A2. Deposition of the first metal film layer: The substrate obtained from the A1 pretreatment is placed in a vacuum coating machine, and the first metal film layer is deposited using an arc ion plating process.

[0031] A3. First masking: Photosensitive oil is coated on the surface of the first metal film layer, the photosensitive oil is covered with film, and the photosensitive oil is exposed and developed. It is then cleaned with developing oil to form a first masking pattern with a preset masking accuracy of ±0.05mm.

[0032] A4. First partial trimming: Laser engraving is performed on the excess parts of the edge of the first masking pattern to remove the excess parts of the edge of the first masking pattern;

[0033] A5. Electrophoresis: The substrate is placed in an electrophoresis apparatus, and under the action of an electric field, the charged particles in the electrophoretic solution move toward the opposite electrode and are deposited on the surface of the workpiece to form a uniform first electrophoretic coating.

[0034] A6. Cleaning the first masking pattern: Clean the first masking pattern using ultrasonic waves and cleaning agent;

[0035] A7. Deposit the second metal film layer: Since the PVD coating cannot adhere to the electrophoretic coating, the substrate cleaned in A6 is placed in a vacuum coating machine, and the second metal film layer is deposited on the first metal film layer using an arc ion plating process.

[0036] A8. Wash off the electrophoretic coating: Remove the first electrophoretic coating;

[0037] A9. Second masking: Photosensitive oil is coated on the substrate surface, covering the second metal film layer and the edge of the first metal film layer; the photosensitive oil is covered with film, and the photosensitive oil is exposed and developed, and cleaned with developing oil to form a second masking pattern with a preset masking accuracy of ±0.05mm.

[0038] A10. Second local trimming: Laser engraving is performed on the excess parts of the edge of the second masking pattern to remove the excess parts of the edge of the second masking pattern;

[0039] A11. Stripping: In the area not covered by the second masking pattern, dissolve and peel off the first metal film layer on the surface of the substrate.

[0040] A12. Deposition of the third metal film: The substrate cleaned in A11 is placed in a vacuum coating machine, and the third metal film is deposited using an arc ion plating process.

[0041] A13. Remove the second masking pattern: Clean the second masking pattern using ultrasonic waves and cleaning agents.

[0042] Laser engraving is performed on the excess edges of the first masking pattern to remove them, thus improving the edge precision of the first masking pattern. This results in a more regular edge for the formed electrophoretic coating. Similarly, laser engraving is performed on the excess edges of the second masking pattern to remove them, improving its precision. This results in a more regular edge for the formed third metal film layer. After these two local refinements, the edge precision is high, with no boundary overflow or rough transitions.

[0043] The etching solution is a mixed etching solution containing copper chloride and hydrochloric acid, and the etching method is immersion. The material of the first metal film layer is one of titanium, chromium, or zirconium. The electrophoresis solution is a mixture of emulsion, slurry, solvent, additives, neutralizer, and pure water, and the electrophoresis form is cathodic electrophoresis. The cleaning method is ultrasonic cleaning, with an ultrasonic frequency of 20 Hz and an ultrasonic cleaning time of not less than 10 minutes. After the first masking pattern is formed, the photosensitive oil is baked to promote the cross-linking and curing of the developing oil molecules; after the second masking pattern is formed, the photosensitive oil is baked to promote the cross-linking and curing of the developing oil molecules; the baking temperature is 80℃ and the baking time is 30 minutes.

[0044] The above embodiments are only for illustrating the technical concept and features of the present invention. Their purpose is to enable those skilled in the art to understand the content of the present invention and implement it. They should not be used to limit the scope of protection of the present invention. All equivalent changes or modifications made in accordance with the spirit and essence of the present invention should be covered within the scope of protection of the present invention.

Claims

1. A three-color coating method, characterized in that, The method includes the following steps: A1. Etching: Etching on a substrate to obtain the etched area; A2. Deposition of the first metal film layer: The substrate obtained from the A1 pretreatment is placed in a vacuum coating machine, and the first metal film layer is deposited using an arc ion plating process. A3. First masking: Photosensitive oil is coated on the surface of the first metal film layer, the photosensitive oil is covered with film, and the photosensitive oil is exposed and developed. It is then cleaned with developing oil to form a first masking pattern with a preset masking accuracy of ±0.05mm. A4. First partial trimming: Laser engraving is performed on the excess parts of the edge of the first masking pattern to remove the excess parts of the edge of the first masking pattern; A5. Electrophoresis: The substrate is placed in an electrophoresis apparatus, and under the action of an electric field, the charged particles in the electrophoretic solution move toward the opposite electrode and are deposited on the surface of the workpiece to form a uniform first electrophoretic coating. A6. Cleaning the first masking pattern: Clean the first masking pattern using ultrasonic waves and cleaning agent; A7. Deposit the second metal film layer: Since the PVD coating cannot adhere to the electrophoretic coating, the substrate cleaned in A6 is placed in a vacuum coating machine, and the second metal film layer is deposited on the first metal film layer using an arc ion plating process. A8. Wash off the electrophoretic coating: Remove the first electrophoretic coating; A9. Second masking: Photosensitive oil is coated on the substrate surface, covering the second metal film layer and the edge of the first metal film layer; the photosensitive oil is covered with film, and the photosensitive oil is exposed and developed, and cleaned with developing oil to form a second masking pattern with a preset masking accuracy of ±0.05mm. A10. Second local trimming: Laser engraving is performed on the excess parts of the edge of the second masking pattern to remove the excess parts of the edge of the second masking pattern; A11. Stripping: In the area not covered by the second masking pattern, dissolve and peel off the first metal film layer on the surface of the substrate. A12. Deposition of the third metal film: The substrate cleaned in A11 is placed in a vacuum coating machine, and the third metal film is deposited using an arc ion plating process. A13. Remove the second masking pattern: Clean the second masking pattern using ultrasonic waves and cleaning agents.

2. The three-color coating method according to claim 1, characterized in that, The etching solution is a mixed etching solution containing copper chloride and hydrochloric acid, and the etching method is immersion.

3. The three-color coating method according to claim 1, characterized in that, The first metal film layer is made of one of titanium, chromium, or zirconium.

4. The three-color coating method according to claim 1, characterized in that, The electrophoretic solution is composed of emulsion, mortar, solvent, additives, neutralizer and pure water, and the electrophoresis form is cathodic electrophoresis.

5. The three-color coating method according to claim 1, characterized in that, The cleaning method is ultrasonic cleaning, with an ultrasonic frequency of 20Hz and an ultrasonic cleaning time of not less than 10 minutes.

6. The three-color coating method according to claim 1, characterized in that, After the first masking image is formed, the photosensitive oil is baked to promote cross-linking and curing of the developing oil molecules; after the second masking image is formed, the photosensitive oil is baked to promote cross-linking and curing of the developing oil molecules; the baking temperature is 80℃ and the baking time is 30min.

7. The three-color coating method according to claim 1, characterized in that, The first masking pattern formed in A3 completely covers the first metal film layer and extends 0.1 mm into the etched area; the edge of the first masking pattern formed by laser engraving in A4 is aligned with the edge of the etched area.