Condensing structure containing flow-guiding orifice plate and cryopump containing the same

Abstract

The application relates to the technical field of cryogenic pumps, in particular to a condensing structure containing a flow guide type orifice plate and a cryogenic pump containing the same, which comprises a cylinder body and an orifice plate fixedly installed at the top of the cylinder body, an annular precooling channel is formed between the inner wall of the cylinder body and the orifice plate, and a plurality of holes are arranged in an annular array on the orifice plate; a cold umbrella is arranged in the cylinder body and located below the orifice plate; a top cover is located between the orifice plate and the cold umbrella; the annular precooling channel between the cylinder body and the orifice plate provides an independent flow path for gas, and the gas inflow is increased. The condensing structure containing the flow guide type orifice plate provides an independent flow path for three types of gas through the annular precooling channel between the cylinder body and the orifice plate, reduces molecular reflection and turn-back, significantly improves the activated carbon adsorption efficiency of hydrogen and other three types of gas, takes into account the precooling effect of the orifice plate holes on the second type of gas, and avoids the overload of the secondary load of the cold umbrella.

Description

Technical Field

[0001] This invention relates to the field of cryogenic pump technology, and in particular to a condensation structure with a flow guide orifice plate and a cryogenic pump containing the same structure. Background Technology

[0002] Cryogenic pumps are core vacuum-generating devices in fields such as semiconductor processing and vacuum coating. Their core function is to remove residual gases in the process chamber through low-temperature condensation and adsorption, providing a high-vacuum environment for related processes. Existing cryogenic pumps typically employ a two-stage cryogenic structure, including a baffle in the 80K temperature zone and a cooling umbrella in the 15K temperature zone. The baffle mainly pre-cools the gas, causing condensable gases (such as water vapor and carbon dioxide) to initially condense on the baffle surface. The uncondensed gases (such as hydrogen and helium) flow downwards to the cooling umbrella area, where the gases (such as water vapor and carbon dioxide) are further frozen on the surface of the cooling umbrella, and the gases (such as hydrogen and helium) are adsorbed by the activated carbon on the cooling umbrella.

[0003] During normal operation of a cryogenic pump, the gas moves in a molecular flow state. In this state, gas molecules move in a straight line without viscous resistance, behaving similarly to a beam of light. To avoid the gas directly impacting the cooling umbrella and causing excessive secondary load, the baffle in the prior art usually cannot have a large hole in the middle. Instead, it uses a dense array of small holes to achieve gas precooling and diversion.

[0004] However, this traditional baffle structure has obvious defects: when the gas enters the pump body through the small holes of the baffle, the flow path of the three types of gas is blocked by the baffle. A large number of the three types of gas molecules are reflected and deflected on the surface of the baffle, making it difficult to penetrate the baffle and reach the activated carbon area of ​​the cooling umbrella below. This results in a significant reduction in the adsorption efficiency of the three types of gas, which cannot meet the requirements of high vacuum process for the removal efficiency of the three types of gas. Summary of the Invention

[0005] Therefore, it is necessary to provide a condensation structure with a flow guide orifice plate and a cryogenic pump containing the above-mentioned technical problems.

[0006] The present invention provides a condensation structure with a flow guide orifice plate, comprising a cylinder and an orifice plate fixedly installed on the top of the cylinder. The diameter of the cylinder is larger than the diameter of the orifice plate. An annular precooling channel is formed between the inner wall of the cylinder and the orifice plate. Multiple holes are arranged in an annular array on the orifice plate. A cooling umbrella is provided inside the cylinder, located below the perforated plate; The top cover, located between the perforated plate and the cooling umbrella, is used to disperse the airflow flowing into the perforated plate; By setting up an annular precooling channel between the cylinder and the orifice plate, an independent flow path is provided for the gas, thereby increasing the gas inflow rate.

[0007] In one embodiment, partitions are fixedly and symmetrically arranged on both sides of the inner side of the cylinder. The partitions are placed vertically and have activated carbon on their surfaces. The surfaces of the partitions are designed to be breathable.

[0008] In one embodiment, auxiliary condensation zones are provided axially symmetrically on both sides inside the cylinder, located on one side of the partition.

[0009] In one embodiment, a rotating disk is rotatably mounted inside the perforated plate, on which a plurality of through holes are formed in a circular array. The diameter of the through holes is the same as the diameter of the holes, and the number of holes is twice the number of through holes.

[0010] In one embodiment, two adjacent holes are grouped together. Multiple fixing frames are arranged in a circular array at the bottom of the perforated plate. The number of fixing frames corresponds to the number of groups of holes. A rotating rod is installed laterally inside the fixing frame. A rotating cylinder is fixedly sleeved on the outside of the rotating rod. A guide plate is fixedly sleeved on the outside of the rotating cylinder. The guide plate is inclined and a portion of it is located below a group of holes.

[0011] In one embodiment, one side of the rotating cylinder is fixedly connected to the side wall of the fixed frame by a torsion spring. The torsion spring is movably sleeved outside the rotating rod. The rotating rod moves through the side wall of the fixed frame at one end near the torsion spring, and a swing rod is fixedly installed at its end.

[0012] In one embodiment, a rotating ring is movably mounted on the bottom of the perforated plate, and multiple limiting rods are arranged in a ring array on the inner wall of the rotating ring. The number of limiting rods corresponds to the number of fixing frames. An inclined groove is formed at the end of the limiting rod away from the rotating ring, and the inclined groove movably abuts against the swing rod.

[0013] In one embodiment, the bottom of the perforated plate is provided with an arc-shaped groove on one side of the rotating ring, and an arc-shaped plate is movably installed in the arc-shaped groove. One end of the arc-shaped plate is fixedly connected to the bottom of the rotating disk, and the other end is fixedly connected to the side wall of the rotating ring.

[0014] In one embodiment, a slot is provided through the middle of the guide plate, a round rod is rotatably installed in the slot, and a baffle is fixedly sleeved on the outside of the round rod, the baffle being rotatably arranged with the slot.

[0015] In one embodiment, the rotating cylinder has a receiving groove, and a movable plate is movably disposed through the inner wall at the bottom of the groove. One end of the movable plate is located in the receiving groove. A curved groove is disposed on the outer side of the bottom of the round rod. A crossbar is disposed on the movable plate near one end of the rotating cylinder, and one end of the crossbar is slidably fitted with the curved groove.

[0016] In one embodiment, a fixing cylinder is fixedly provided on one side of the fixing frame. The fixing cylinder is movably sleeved on the outside of the rotating rod and movably passes through the side wall of the rotating cylinder. The end is located inside the receiving groove. A fixing ring is sleeved on the outside of the fixing cylinder. A protrusion is provided on the fixing ring. The end of the movable plate away from the crossbar is slidably embedded with the surface of the fixing ring and the protrusion.

[0017] In one embodiment, a cryogenic pump includes the aforementioned condensation structure with a flow-guiding orifice plate.

[0018] The aforementioned condensation structure with a flow-guiding orifice plate and the cryogenic pump incorporating this structure provide independent flow paths for three types of gases by setting an annular pre-cooling channel between the cylinder and the orifice plate. This reduces molecular reflection and backflow, significantly improving the activated carbon adsorption efficiency for the three types of gases, including hydrogen. It also takes into account the pre-cooling effect of the orifice plate pores on the second type of gas, avoiding overload of the secondary cooling umbrella. The coordinated operation of the rotating disk and the orifice plate pores allows for alternating gas flow positions, preventing the airflow from constantly scouring the local positions of the cooling umbrella and baffles, preventing localized saturation of activated carbon adsorption and localized accumulation of condensate, balancing the cold surface load, and extending the regeneration cycle of the cryogenic pump. The rotating disk and rotating ring are linked by an arc-shaped plate, driving the flow guide plate to deflect synchronously without the need for an additional independent drive source, simplifying the overall structure. The flow guide plate, in conjunction with the baffle plate, disperses the molecular flow, further optimizing airflow distribution and improving the uniformity of gas contact with the condensation and adsorption working surfaces. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the perforated plate in this invention; Figure 3 This is a schematic diagram of the structure of the hole in this invention; Figure 4 This is a schematic diagram of the bottom structure of the perforated plate in this invention; Figure 5 for Figure 4 Enlarged diagram of part A in the middle; Figure 6 This is a schematic diagram of the rotating disk in this invention; Figure 7 This is a schematic diagram of the flow guide plate in this invention; Figure 8This is a schematic diagram of the protrusion structure in this invention.

[0021] Figure label: 1. Cylinder body; 2. Precooling channel; 3. Cooling umbrella; 4. Top cover; 5. Orifice plate; 51. Hole; 52. Arc groove; 6. Baffle plate; 7. Activated carbon; 8. Auxiliary condensation zone; 9. Rotating disc; 91. Through hole; 10. Fixing frame; 11. Rotating rod; 12. Rotating cylinder; 121. Receiving groove; 13. Guide plate; 131. Groove opening; 14. Torsion spring; 15. Swing rod; 16. Rotating ring; 17. Limiting rod; 171. Inclined groove; 18. Arc plate; 19. Round rod; 191. Curved groove; 20. Baffle plate; 21. Movable plate; 22. Crossbar; 23. Fixing cylinder; 24. Fixing ring; 25. Protrusion. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0023] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on the other component or there may be an intermediate component. When a component is considered to be "connected to" another component, it can be directly connected to the other component or there may be an intermediate component present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this specification are for illustrative purposes only and do not represent the only possible implementation.

[0024] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0025] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature and the second feature are in indirect contact through an intermediate medium. Furthermore, "above," "over," and "on top" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0026] Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used in this specification includes any and all combinations of one or more of the associated listed items.

[0027] The following is combined Figures 1-8 The present invention describes a condensation structure containing a flow-guiding orifice plate and a cryogenic pump containing the same structure.

[0028] like Figures 1-4 As shown, this embodiment provides a condensation structure with a flow guide orifice plate, which is mainly used in cryogenic pumps to optimize the gas flow path, improve the gas precooling effect and adsorption efficiency, and avoid the problem of excessive secondary load of the cooling umbrella 3. The structure includes core components such as cylinder 1, orifice plate 5, precooling channel 2, cooling umbrella 3, and top cover 4. The components work together to achieve efficient processing of different types of gases.

[0029] The cylinder 1, serving as the main supporting structure, is made of high-strength, low-thermal-conductivity metal material. This ensures structural stability and reduces the transfer of external heat to the interior of the cylinder 1, lowering the refrigeration load of the cryogenic system. A perforated plate 5 is fixedly installed at the top of the cylinder 1. The diameter of the perforated plate 5 is smaller than that of the cylinder 1, creating an annular pre-cooling channel 2 between the inner wall of the cylinder 1 and the perforated plate 5. This pre-cooling channel 2 is interconnected with the interior of the cylinder 1, providing a dedicated flow path for the three types of gases. This prevents excessive reflection and return of the three types of gases on the surface of the perforated plate 5, effectively improving the efficiency of subsequent adsorption of the three types of gases by the activated carbon 7. Multiple holes 51 are arranged in a ring array on the perforated plate 5. These holes 51 serve as initial gas flow channels, primarily for the pre-cooling of the second type of gas. As the second type of gas passes through the holes 51, it initially condenses on the surface of the perforated plate 5, reducing the amount of second type of gas directly impacting the cooling umbrella 3 below, thus protecting the cooling umbrella 3 and preventing excessive secondary load.

[0030] See Figures 1-3As shown, a cooling umbrella 3 is installed inside the cylinder 1 below the orifice plate 5. The cooling umbrella 3 uses a low-temperature cold head in the 15K temperature range, and its surface is coated with activated carbon 7. It is mainly used to adsorb Class III gases and further freeze Class II gases that have not condensed on the orifice plate 5. Figure 1 The dark-colored area close to the orifice plate 5 is a "dedicated area for condensation of Class II gases", which can condense most of the Class II gases. A top cover 4 is fixedly installed above the cold umbrella 3. The top cover 4 is located between the orifice plate 5 and the cold umbrella 3. It can initially guide the gas flowing out of the holes 51 of the orifice plate 5 to prevent the gas from directly impacting the cold umbrella 3 vertically, further disperse the airflow, reduce the local load on the cold umbrella 3, and at the same time, the top cover 4 can also play a certain role in heat shielding, reduce the heat transfer between the orifice plate 5 and the cold umbrella 3, and ensure the stability of the low temperature environment of the cold umbrella 3.

[0031] A partition plate 6 is axially symmetrically fixed on both sides inside the cylinder 1. The partition plate 6 is placed vertically and has activated carbon 7 on its surface. The surface of the partition plate 6 is designed to be breathable. The partition plate 6 can further expand the adsorption area of ​​the three types of gases. The breathable surface design does not hinder the flow of gas and ensures that the gas and activated carbon 7 are in full contact, thereby improving the adsorption efficiency of the three types of gases. At the same time, an auxiliary condensation area 8 is axially symmetrically provided on both sides inside the cylinder 1. The auxiliary condensation area 8 is located on one side of the partition plate 6. It can provide additional condensation space for the second type of gas, further disperse the condensation position of the second type of gas, avoid excessive local ice layer on the surface of the cooling umbrella 3, and extend the regeneration cycle of the cryogenic pump.

[0032] See Figures 3-6 As shown, a rotating disk 9 is rotatably installed inside the perforated plate 5. Multiple through holes 91 are arranged in a ring array on the rotating disk 9. The diameter of each through hole 91 is the same as the diameter of each hole 51, and the number of holes 51 is twice the number of through holes 91. The rotating disk 9 can reciprocate at a small angle inside the perforated plate 5. Initially, the through holes 91 on the rotating disk 9 are aligned with a set of holes 51 on the perforated plate 5, and the gas flows downwards through the through holes 91 and this set of holes 51. When the rotating disk 9 rotates a certain angle, the through holes 91 are aligned with another set of holes 51. The position of the rotating disk 9 without through holes 91 blocks the first set of holes 51, changing the gas flow position and preventing the gas from concentrating in the same area for a long time, thus avoiding the problem of excessive local load on the cooling umbrella 3 and local adsorption saturation of the activated carbon 7. This allows the gas to be evenly distributed on the surface of the cooling umbrella 3 and the activated carbon 7 of the partition plate 6, improving the overall adsorption and condensation effect.

[0033] The bottom of the perforated plate 5 is arranged in a ring array with multiple fixing brackets 10. The number of fixing brackets 10 corresponds to the number of groups of holes 51, with two adjacent holes 51 forming a group. A rotating rod 11 is installed laterally inside the fixing bracket 10. A rotating cylinder 12 is fixedly sleeved on the outside of the rotating rod 11. A guide plate 13 is fixedly sleeved on the outside of the rotating cylinder 12. The guide plate 13 is inclined and part of it is located below a group of holes 51. The guide plate 13 can guide the gas flowing out of the holes 51 in a secondary manner, so that the gas can flow evenly to different areas of the cooling umbrella 3 and the partition 6, further optimizing the gas distribution and avoiding the gas from concentrating and impacting local areas. At the same time, the inclined design can also extend the gas flow path and enhance the gas pre-cooling effect.

[0034] See Figure 5 and Figure 7 As shown, one side of the rotating cylinder 12 is fixedly connected to the side wall of the fixed frame 10 by a torsion spring 14. The torsion spring 14 is movably sleeved on the outside of the rotating rod 11. The rotating rod 11 moves through the side wall of the fixed frame 10 at one end near the torsion spring 14, and a swing rod 15 is fixedly installed at the end. The torsion spring 14 can provide a restoring force for the rotating cylinder 12, so that the guide plate 13 can automatically return to the initial position after rotation, ensuring the stable guiding effect of the guide plate 13. The swing rod 15 is used to transmit power, drive the rotating rod 11 and the rotating cylinder 12 to rotate, thereby realizing the angle adjustment of the guide plate 13.

[0035] See Figure 4 and Figure 5 As shown, a rotating ring 16 is movably installed at the bottom of the orifice plate 5. Multiple limiting rods 17 are installed in a ring array on the inner wall of the rotating ring 16. The number of limiting rods 17 corresponds to the number of fixed frames 10. An inclined groove 171 is opened at the end of the limiting rod 17 away from the rotating ring 16. The inclined groove 171 is in movable contact with the swing rod 15. When the rotating ring 16 rotates, it drives the limiting rods 17 to rotate synchronously. The cooperation between the inclined groove 171 and the swing rod 15 can convert the circular motion of the rotating ring 16 into the reciprocating swing of the swing rod 15, thereby driving the rotating rod 11 and the rotating cylinder 12 to rotate, realizing the synchronous adjustment of the angle of the guide plate 13, so that the guiding direction of the guide plate 13 is matched with the switching of the through hole 91 of the rotating disk 9, further improving the uniformity of gas distribution.

[0036] An arc-shaped groove 52 is provided at the bottom of the orifice plate 5 on one side of the rotating ring 16. An arc-shaped plate 18 is movably installed in the arc-shaped groove 52. One end of the arc-shaped plate 18 is fixedly connected to the bottom of the rotating disk 9, and the other end is fixedly connected to the side wall of the rotating ring 16. The arc-shaped plate 18 can transmit the rotational power of the rotating disk 9 to the rotating ring 16, so that the rotating disk 9 and the rotating ring 16 can rotate synchronously without the need for an additional drive mechanism, which simplifies the structural design. At the same time, the arc-shaped groove 52 can limit the movement of the arc-shaped plate 18, ensuring that the rotation angle of the rotating disk 9 and the rotating ring 16 is precisely matched, and ensuring that the guiding effect of the guide plate 13 and the switching of the gas flow path are synchronized and coordinated.

[0037] See Figure 7 and Figure 8 As shown, a slot 131 is formed through the middle of the guide plate 13. A round rod 19 is rotatably installed inside the slot 131, and a baffle 20 is fixedly sleeved on the outside of the round rod 19. The baffle 20 is rotatably set with the slot 131. The baffle 20 can disturb the gas passing through the guide plate 13, disperse the gas molecule flow, avoid the formation of concentrated gas flow bundles, and further improve the uniformity of gas distribution. At the same time, the rotational design of the baffle 20 can increase the contact opportunity between the gas and the low-temperature surface, enhance the pre-cooling effect of the second type of gas, and improve the contact efficiency between the third type of gas and the activated carbon 7.

[0038] The rotating cylinder 12 has a receiving groove 121. A movable plate 21 is movably installed through the inner wall of the bottom of the groove 131. One end of the movable plate 21 is located in the receiving groove 121. A curved groove 191 is opened on the outer side of the bottom of the round rod 19. A crossbar 22 is installed on the movable plate 21 near the end of the rotating cylinder 12. One end of the crossbar 22 is slidably attached to the curved groove 191. The up-and-down reciprocating movement of the movable plate 21 will drive the crossbar 22 to slide along the curved groove 191, thereby driving the round rod 19 to rotate back and forth, realizing the rotation of the turbulence plate 20 and improving the uniformity of gas distribution.

[0039] A fixed cylinder 23 is fixedly installed on one side of the fixed frame 10. The fixed cylinder 23 is movably sleeved on the outside of the rotating rod 11 and movably passes through the side wall of the rotating cylinder 12. The end is located inside the receiving groove 121. A fixed ring 24 is sleeved on the outside of the fixed cylinder 23. A protrusion 25 is provided on the fixed ring 24. The end of the movable plate 21 away from the crossbar 22 is slidably embedded with the surface of the fixed ring 24 and the protrusion 25. When the rotating cylinder 12 drives the guide plate 13 to swing back and forth, the fixed cylinder 23 and the fixed ring 24 remain stationary. One end of the movable plate 21 slides along the surface of the protrusion 25, which can realize the reciprocating movement of the movable plate 21, thereby realizing the rotation of the baffle 20.

[0040] This embodiment provides a cryogenic pump, including the above-mentioned flow-guiding orifice plate 5 structure. This cryogenic pump is mainly used in fields that require a high vacuum environment, such as semiconductor processes and vacuum coating. It can efficiently remove various residual gases in the process chamber and provide a stable high vacuum environment for related processes.

[0041] In the above scheme, the perforated plate 5, top cover 4, partition plate 6 and other structures are made of oxygen-free copper. Oxygen-free copper has excellent thermal conductivity, which improves gas precooling efficiency, promotes the condensation of type II gases, and has low vacuum outgassing and good low-temperature toughness. The rotating disk 9, rotating ring 16, arc plate 18 and other moving parts are made of 316L stainless steel, which has high strength, wear resistance, thermal expansion matching, stable friction pair pairing, and no need to worry about wear debris. The torsion spring 14 is made of Inconel 718 nickel-based alloy spring wire, which maintains stable elasticity at low temperature, does not undergo brittle fracture at low temperature, resists alternating cycles, and has low vacuum outgassing.

[0042] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0043] The above-described embodiments are merely illustrative of several implementations of the present invention, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of the invention. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements all fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the appended claims.

Claims

1. A condensation structure containing a flow-guiding orifice plate, characterized in that, It includes a cylindrical body and a perforated plate fixedly installed on the top of the cylindrical body. The diameter of the cylindrical body is larger than the diameter of the perforated plate. An annular precooling channel is formed between the inner wall of the cylindrical body and the perforated plate. Multiple holes are arranged in an annular array on the perforated plate. A cooling umbrella is provided inside the cylinder, located below the perforated plate; The top cover, located between the perforated plate and the cooling umbrella, is used to disperse the airflow flowing into the perforated plate; By setting up an annular precooling channel between the cylinder and the orifice plate, an independent flow path is provided for the gas, increasing the gas inflow rate. The orifice plate has a rotating disk rotatably mounted inside, with multiple through holes arranged in a ring array on it. The diameter of each through hole is the same as the diameter of the orifice. The number of orifices is twice the number of through holes. Two adjacent orifices form a group. The bottom of the orifice plate has multiple fixing brackets arranged in a ring array. The number of fixing brackets corresponds to the number of groups of orifices. A rotating rod is rotatably mounted laterally inside each fixing bracket. A rotating cylinder is fixedly sleeved on the outside of the rotating rod. A guide plate is fixedly sleeved on the outside of the rotating cylinder. The guide plate is inclined and part of it is located below a group of orifices.

2. The condensation structure with a flow-guiding orifice plate according to claim 1, characterized in that, The cylinder has axially symmetrically fixed partitions on both sides inside. The partitions are placed vertically and have activated carbon on their surfaces. The surfaces of the partitions are designed to be breathable.

3. A condensation structure with a flow-guiding orifice plate according to claim 2, characterized in that, The cylinder has axially symmetrical auxiliary condensation zones on both sides inside, located on one side of the partition.

4. A condensation structure with a flow-guiding orifice plate according to claim 1, characterized in that, One side of the rotating cylinder is fixedly connected to the side wall of the fixed frame by a torsion spring. The torsion spring is movably sleeved outside the rotating rod. The rotating rod moves through the side wall of the fixed frame at one end near the torsion spring, and a swing rod is fixedly installed at its end.

5. A condensation structure with a flow-guiding orifice plate according to claim 4, characterized in that, A rotating ring is movably installed at the bottom of the perforated plate. Multiple limiting rods are arranged in a ring array on the inner wall of the rotating ring. The number of limiting rods corresponds to the number of fixed frames. An inclined groove is opened at the end of the limiting rod away from the rotating ring. The inclined groove movably abuts against the swing rod.

6. A condensation structure with a flow-guiding orifice plate according to claim 5, characterized in that, The bottom of the perforated plate is provided with an arc-shaped groove on one side of the rotating ring. An arc-shaped plate is movably installed in the arc-shaped groove. One end of the arc-shaped plate is fixedly connected to the bottom of the rotating disk, and the other end is fixedly connected to the side wall of the rotating ring.

7. A condensation structure with a flow-guiding orifice plate according to claim 1, characterized in that, The guide plate has a slot through the middle, and a round rod is rotatably installed in the slot. A baffle is fixedly sleeved on the outside of the round rod, and the baffle is rotatably set with the slot.

8. A condensation structure with a flow-guiding orifice plate according to claim 7, characterized in that, The rotating cylinder has a receiving groove, and a movable plate is movably installed through the inner wall at the bottom of the groove. One end of the movable plate is located in the receiving groove. A curved groove is opened on the outer side of the bottom of the round rod. A crossbar is installed on the movable plate near one end of the rotating cylinder, and one end of the crossbar slides in contact with the curved groove.

9. A condensation structure with a flow-guiding orifice plate according to claim 8, characterized in that, A fixing cylinder is fixedly installed on one side of the fixing frame. The fixing cylinder is movably sleeved on the outside of the rotating rod and movably passes through the side wall of the rotating cylinder. The end is located inside the receiving groove. A fixing ring is sleeved on the outside of the fixing cylinder. A protrusion is provided on the fixing ring. The end of the movable plate away from the crossbar is slidably embedded with the surface of the fixing ring and the protrusion.

10. A cryogenic pump, characterized in that, The condensation structure including the flow-guiding orifice plate as described in any one of claims 1-9.

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