An ald atomic deposition valve and method of use thereof

Abstract

The application relates to the technical field of deposition valves, and discloses an ALD atomic deposition valve and an application method thereof, which comprise a valve body and a valve seat assembly, wherein the valve body is provided with an input flow channel, an output flow channel, a communication cavity communicating the input flow channel and the output flow channel, and a communication hole arranged between the input flow channel and the output flow channel and extending to the outside of the valve body at one end; the valve seat assembly comprises an inner ring plate corresponding to the end of the input flow channel and connected with the valve body, an outer ring plate coaxial with the inner ring plate and detachably connected with the valve body, a valve seat clamped between the inner ring plate and the outer ring plate, and a heating ring abutting against the valve body, the inner ring plate, the outer ring plate and the valve seat, and locally corresponding to the end of the communication hole. The application solves the problem of heat conduction lag caused by heating the outside of the valve body, enables heat to be directly and uniformly transmitted to the key sealing interface through which the precursor flows, ensures that the temperature of the valve seat area is highly consistent with that of the flow channel, thereby eliminating local cold spots, and can significantly improve the stability of the process.

Description

Technical Field

[0001] This invention relates to the field of deposition valve technology, and in particular to an ALD atomic deposition valve and its application method. Background Technology

[0002] Atomic layer deposition (ALD) is a method for depositing materials layer by layer onto a substrate surface in the form of single-atom films. It enables the deposition of nanoscale ultrathin films and is widely used in wafer or substrate surface treatment processes in semiconductor chips, MEMS devices, photovoltaic cells, and other fields. Each deposition cycle of the ALD process typically includes four core steps: precursor pulse, first inert gas purging, reactant pulse, and second inert gas purging. Through the alternating self-limiting chemical reactions between precursors and reactants on the substrate surface, thin films are grown layer by layer at the atomic scale.

[0003] A utility model patent with authorization announcement number CN220435492U discloses an atomic deposition (ALD) diaphragm valve, comprising: a valve body having an inflow passage and an outflow passage for fluid; a valve seat disposed in the valve chamber of the inflow passage within the valve body; a diaphragm controlling the connection or disconnection of the inflow passage and the outflow passage by contacting or separating from the valve seat; a pneumatic actuator for pressing the diaphragm; a valve cap sandwiched between the valve body and a valve cap nut, the valve cap having two holes of different diameters; a thermally insulating connecting rod that moves via the pneumatic actuator; and a diaphragm button located between the valve cap and the diaphragm; the pneumatic actuator is normally closed, and is in a closed state when the valve is not in operation.

[0004] In the deposition process, precursors are mostly delivered into the reaction chamber in gaseous form via a pulsed gas path system. ALD uses millisecond-level pulsed gas supply. Each time the valve is opened, the high-speed precursor gas flow rushes over the valve seat sealing surface and carries away heat through the throttling effect. The precursor delivery requires the entire valve body and flow channel to maintain a uniform high-temperature field to avoid precursor condensation and deposition or thermal decomposition.

[0005] The deposition valve structure described above is highly susceptible to internal cold spots, especially in the valve seat area. Existing heating methods often struggle to ensure uniform heating between the valve body and the valve seat area. The presence of localized cold spots can cause the precursor to condense, forming liquid pools or solid deposits, leading to unstable subsequent dosages and even clogging of the flow channels. Conversely, localized overheating can trigger precursor decomposition, altering its chemical properties and generating particulate contamination. Therefore, improvements to the existing solutions are urgently needed. Summary of the Invention

[0006] In view of this, the present invention proposes an ALD atomic deposition valve and its application method that can achieve targeted heating to ensure uniform thermal field, thereby solving the problem that existing solutions are unable to achieve uniform heating of the valve body interior and valve seat area.

[0007] The technical solution of this invention is implemented as follows: On one hand, the present invention provides an ALD atomic deposition valve, comprising a valve body and a valve seat assembly, wherein, The valve body is provided with an input flow channel, an output flow channel, a connecting cavity connecting the input flow channel and the output flow channel, and a connecting hole provided between the input flow channel and the output flow channel, with one end of the connecting hole extending to the outside of the valve body; The valve seat assembly is disposed in the communicating cavity. The valve seat assembly includes an inner ring plate corresponding to the end of the input flow channel and connected to the valve body, an outer ring plate coaxial with the inner ring plate and detachably connected to the valve body, a valve seat sandwiched between the inner ring plate and the outer ring plate, and a heating ring abutting against the valve body, the inner ring plate, the outer ring plate and the valve seat, with the end of the heating ring partially corresponding to the communicating hole.

[0008] Based on the above technical solutions, preferably, the outer ring plate includes a ring plate body and a support ring, and the valve seat includes a ring seat, a first annular protrusion, and a heat-conducting rod, wherein... One end of the ring plate body is provided with a thread and is screwed into the valve body, and the inner wall of the ring plate body is provided with a first limiting groove; The support ring is located on the inner side of the ring plate body, and the support ring has a through groove along the axial direction; The ring seat is inserted into the main body of the ring plate; The first annular protrusion is disposed on the outer circumferential surface of the ring seat, and the first annular protrusion is engaged in the first limiting groove; One end of the heat-conducting rod is connected to the ring seat, and the other end of the heat-conducting rod passes through the through groove and abuts against the heating ring.

[0009] Based on the above technical solutions, preferably, a rod-shaped heating element is arranged inside the connecting hole, and the rod-shaped heating element is connected to the heating ring; The ends of the inlet and outlet channels that are relatively far apart are equipped with clamps, and the clamps and valve bodies are equipped with corresponding retaining rings.

[0010] Based on the above technical solutions, preferably, it also includes a diaphragm, a valve cap, and a valve cap nut, wherein, The diaphragm is placed inside the communicating cavity; The valve cap and valve body clamp and fix the diaphragm; The valve cap nut is screwed onto the valve body and secures the valve cap.

[0011] Based on the above technical solutions, preferably, the device also includes a valve stem, an actuator, and a limiting component, wherein, The actuating end of the valve stem is positioned corresponding to the diaphragm, and the actuating end of the valve stem slides in conjunction with the valve cap; The actuator is connected to the valve cap nut, and the actuator is used to drive the axial displacement of the valve stem; The limiting component is used to limit the valve stem so that the diaphragm remains normally closed when the actuator is removed.

[0012] Based on the above technical solutions, preferably, the limiting component includes a positioning seat and an air bladder, and the actuating end of the valve stem is provided with a limiting plate, wherein, The positioning seat and the valve cap nut are connected by a threaded connection. The positioning seat has a ring-shaped structure. The positioning seat partially slides with the actuating end of the valve stem, and a sliding cavity is provided between the positioning seat and the valve cap. The airbag has a U-shaped cross-section, and the edge of the airbag is connected to the positioning seat. The positioning seat has an annular groove corresponding to the airbag. The valve cap and valve cap nut are an integral structure, and the valve cap and valve cap nut have air passages with connecting annular grooves. The limiting plate is located around the valve stem actuator end, inside the sliding cavity, and corresponds to the air bladder.

[0013] Based on the above technical solutions, preferably, a connecting cylinder and a disc spring are also included, wherein... One end of the connecting cylinder is threadedly connected to the valve cap nut, and the other end of the connecting cylinder is connected to the actuator; The disc spring is sleeved on the connecting cylinder, and the disc spring abuts against the valve cap nut and the connecting cylinder; The valve stem and limiting components are located inside the connecting cylinder.

[0014] Based on the above technical solutions, preferably, the limiting component further includes a sliding cylinder, a second annular protrusion, a sliding rod, and a spring, wherein, The slide tube is slidably positioned inside the connecting tube; The second annular protrusion is provided around the periphery of the slide cylinder, and the inner wall of the connecting cylinder is provided with a second limiting groove, and the second annular protrusion is engaged in the second limiting groove. One end of the slide rod is connected to the slide cylinder, and the other end of the slide rod is inserted into the valve cap nut and seals the air passage. A gap is left between the second annular protrusion and the lower side wall of the second limiting groove. The airway is connected to an external, normally open air source; One end of the spring abuts against the connecting cylinder, and the other end of the spring abuts against the sliding cylinder.

[0015] Based on the above technical solutions, preferably, the driving end of the valve stem is inserted into the driving rod of the actuator, and the valve stem and the driving rod of the actuator are fixedly connected by bolts.

[0016] On the other hand, the present invention provides a method for applying the above-mentioned ALD atomic deposition valve, comprising the following steps: When performing the opening and closing action, the air bladder is in a negative pressure state, the actuator drives the valve stem to move axially, and controls the opening and closing of the diaphragm through the valve stem; During maintenance, remove the bolts connecting the valve stem and the actuator, rotate the connecting cylinder, and disassemble the connecting cylinder and the actuator simultaneously. During this process, the connecting cylinder drives the limiting component to move synchronously, the slide rod disengages from the air passage, the external air source inflates the air bag, and the air bag limits the valve stem by pressing against the limiting plate, ensuring that the diaphragm is in a closed state.

[0017] The ALD atomic deposition valve and its application method of the present invention have the following advantages over the prior art: (1) By setting a heating ring at the valve seat position and extending the heating ring locally to the end of the connecting hole on the outside of the valve body, and simultaneously arranging rod-shaped heating elements connected to the heating ring in the connecting hole, a three-dimensional heating source surrounding the valve seat is formed. This structure solves the problem of heat conduction lag caused by heating the outside of the valve body, enabling heat to be directly and uniformly transferred to the key sealing interface through which the precursor flows, ensuring that the temperature of the valve seat area and the flow channel are highly consistent, thereby eliminating local cold spots and preventing the low vapor pressure precursor from condensing and depositing or undergoing thermal decomposition at the sealing surface, which can significantly improve the stability of the process.

[0018] (2) In the structure of the valve seat assembly, the valve seat is connected to the outer ring plate so that the valve body can be detachably connected through the outer ring plate, which is beneficial to shorten the maintenance time; and since the valve seat and the outer ring plate are disassembled and assembled at the same time, damage to the sealing section can be avoided; at the same time, the inner ring plate is directly connected to the valve seat, which is an integrated structure, which is beneficial to the rapid transfer of heat from the heating ring to the valve seat, reducing heat loss and ensuring a uniform temperature field.

[0019] (3) By setting a limiting component, the safety hazards during actuator removal and maintenance are resolved. Under normal operating conditions, the air bladder is in a negative pressure contraction state, which does not affect the normal stroke of the valve stem. When the actuator is removed, the connecting cylinder drives the sliding rod to move upward, the air passage is opened, and the external normally open air source inflates the air bladder. The inflated air bladder locks the valve stem in the closed position through the limiting plate, ensuring that the diaphragm is always in a closed state. This effectively prevents the precursor gas in the reaction chamber from escaping or the atmosphere from flowing back during maintenance, ensuring the safety of operators and the cleanliness of the process environment, thus solving the problem that the existing solution cannot control the diaphragm state when removing the actuator.

[0020] (4) In the structure of the limiting component, the sliding cylinder and the connecting cylinder are slidably connected. In this way, the sliding cylinder can be placed at the end of the connecting cylinder first, and the sliding rod is inserted into the corresponding air passage and the valve body. When the connecting cylinder and the valve cap nut are screwed together, the sliding cylinder and the sliding rod will move down simultaneously so that the sliding rod can close the air passage. At this time, the second annular protrusion and the second limiting groove are engaged and pressed by the spring, which can effectively ensure the assembly accuracy and airtightness.

[0021] (5) The axial limiting function is achieved by the cooperation between the second annular protrusion and the limiting groove. A gap is left between the lower side wall of the second annular protrusion and the second limiting groove. This gap allows the slide cylinder and slide rod to move slightly in the axial direction. This makes it convenient for the spring to press the slide cylinder and slide rod together. There will be no problem that the air passage cannot be completely sealed because the end face of the second annular protrusion abuts against the end face of the second limiting groove. When the connecting cylinder is disassembled, this slight displacement will not cause the diaphragm to open. The connecting cylinder can rotate freely and can drive the slide cylinder and slide rod to move upward through the second annular protrusion so that the air passage can be opened. This makes it convenient to limit the self-inflation of the airbag and will not damage the interference slide rod.

[0022] (6) The valve cap nut and the positioning seat provide a stable sliding guide for the valve stem's actuating end; at the same time, the disc spring provides continuous elastic compensation force to offset the loss of preload caused by thermal expansion and contraction and vibration, ensuring the stability of the connection structure of each component and achieving continuous sealing and leak prevention. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a perspective view of the ALD atomic deposition valve of the present invention; Figure 2 This is a front view of the ALD atomic deposition valve of the present invention; Figure 3 This is a cross-sectional view of the ALD atomic deposition valve of the present invention; Figure 4 This is a partial cross-sectional view of the ALD atomic deposition valve of the present invention; Figure 5 The ALD atomic deposition valve of the present invention Figure 4 Enlarged view of the structure at point A in the middle; Figure 6 The ALD atomic deposition valve of the present invention Figure 4 Enlarged view of the structure at point B; Figure 7 The ALD atomic deposition valve of the present invention Figure 4 Enlarged view of the structure at point C; Figure 8 This is an exploded perspective view of the ALD atomic deposition valve of the present invention; Figure 9 This is an exploded front view of the ALD atomic deposition valve of the present invention; Figure 10This is an exploded cross-sectional view of the ALD atomic deposition valve of the present invention; Figure 11 This is a cross-sectional view of the valve body of the ALD atomic deposition valve of the present invention; Figure 12 This is an exploded view of the valve seat assembly of the ALD atomic deposition valve of the present invention; Figure 13 This is a cross-sectional view of the valve cap and valve cap nut of the ALD atomic deposition valve of the present invention. Figure 14 This is a cross-sectional view of the connecting cylinder and valve stem of the ALD atomic deposition valve of the present invention; Figure 15 This is a cross-sectional view of the connection structure between the positioning seat and the airbag of the ALD atomic deposition valve of the present invention. Figure 16 This is a perspective view of the disassembled structure of the connecting seat and airbag of the ALD atomic deposition valve of the present invention; Figure 17 This is a perspective view of the connection structure between the slide cylinder and the slide rod of the ALD atomic deposition valve of the present invention; Figure 18 This is a schematic diagram of a mating structure between the slide and the positioning seat of the ALD atomic deposition valve of the present invention.

[0025] In the diagram: 1. Valve body; 11. Clamp; 12. Snap ring; 101. Inlet flow channel; 102. Outlet flow channel; 103. Connecting cavity; 104. Connecting hole; 2. Valve seat assembly; 22. Outer ring plate; 221. Ring plate body; 222. Support ring; 21. Inner ring plate; 23. Valve seat; 231. Ring seat; 232. First annular protrusion; 233. Heat-conducting rod; 24. Heating ring; 201. First limiting groove; 202. Through groove; 3. Diaphragm; 4. Valve cap ; 401, Sliding cavity; 5, Valve cap nut; 501, Air passage; 6, Valve stem; 61, Limiting plate; 7, Actuator; 8, Limiting component; 81, Positioning seat; 82, Air bladder; 83, Slide cylinder; 84, Second annular protrusion; 85, Slide rod; 86, Spring; 87, Guide cylinder; 88, Plastic positioning component; 801, Annular groove; 802, Air ring groove; 803, Sealing surface; 804, Air guide hole; 9, Connecting cylinder; 901, Second limiting groove; 10, Disc spring. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0027] In the description of the embodiments of the present invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of the present invention based on the specific circumstances.

[0028] In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of the present invention.

[0029] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0030] Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0031] The following disclosure provides numerous different embodiments or examples for implementing various structures of the invention. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the invention. Furthermore, reference numerals and / or letters may be repeated in different examples. Such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. Additionally, examples of various specific processes and materials are provided in this invention; however, those skilled in the art will recognize the applicability of other processes and / or the use of other materials.

[0032] like Figures 1-18As shown, the ALD atomic deposition valve of the present invention includes a valve body 1, a valve seat assembly 2, a diaphragm 3, a valve cap 4, a valve cap nut 5, a valve stem 6, an actuator 7, a limiting component 8, a connecting cylinder 9, and a disc spring 10.

[0033] like Figures 1-5 , Figure 11 and Figure 12 As shown, the valve body 1 is provided with an input flow channel 101, an output flow channel 102, a connecting cavity 103 connecting the input flow channel 101 and the output flow channel 102, and a connecting hole 104 provided between the input flow channel 101 and the output flow channel 102, one end of the connecting hole 104 extending to the outside of the valve body 1; the valve seat assembly 2 is provided in the connecting cavity 103, the valve seat assembly 2 includes an inner ring plate 21 corresponding to the end of the input flow channel 101 and connected to the valve body 1, an outer ring plate 22 coaxial with the inner ring plate 21 and detachably connected to the valve body 1, a valve seat 23 clamped between the inner ring plate 21 and the outer ring plate 22, and a heating ring 24 abutting against the valve body 1, the inner ring plate 21, the outer ring plate 22 and the valve seat 23, the heating ring 24 partially corresponding to the end of the connecting hole 104.

[0034] As described above, the valve body 1 has an input flow channel 101 for medium input. The medium then passes through the valve seat assembly 2 into the communication cavity 103 and then into the output flow channel 102 for output.

[0035] The valve seat assembly 2 is used in conjunction with the diaphragm to control the opening and closing of the flow. Since the temperature is easily lost, its structure is adjusted.

[0036] Specifically, in the structure of valve seat assembly 2, valve seat 23 is used to cooperate with diaphragm to form a sealing interface and realize the flow control of the medium.

[0037] Among them, the valve seat 23 of the valve seat assembly 2 has an annular structure, and the outer side of the valve seat 23 is connected and fixed to the outer ring plate 22 so as to achieve a detachable connection between the valve seat 23 and the valve body 1.

[0038] The valve body 1 is provided with an inner ring plate 21. After the valve seat 23 and the outer ring plate 22 are assembled, the inner ring plate 21 is sleeved onto the inner ring plate 21, and the outer ring plate 22 is threadedly connected to the valve body 1. At this time, the inner ring plate 21 is located inside the valve seat 23, so that the inner side of the valve seat 23 can be positioned.

[0039] In this structure, a heating ring 24 is also provided. The heating ring 24 is pressed into the valve body 1 by the valve seat 23 so that the valve seat 23 can be heated by the heating ring 24, thereby achieving targeted local heating to ensure a uniform temperature field of the valve.

[0040] In this structure, the heating ring 24 also abuts against the inner ring plate 21 and the outer ring plate 22, so that heat can be transferred to the valve seat 23 through the inner ring plate 21 and the outer ring plate 22, and then to the key sealing interface through which the precursor flows, ensuring that the temperature of the valve seat area is highly consistent with that of the flow channel, thereby eliminating local cold spots, preventing the low vapor pressure precursor from condensing and depositing or undergoing thermal decomposition at the sealing surface, solving the problem of heat conduction lag caused by external heating of the valve body, and significantly improving the stability of the process.

[0041] Furthermore, a connecting hole 104 is provided, which facilitates the wiring harness connection to the heating ring 24 or the installation of other heating components to achieve internal heating of the valve body 1.

[0042] The inner ring plate 21 and the valve body 1 are designed as an integral structure, which can further ensure heat transfer efficiency and improve the assembly accuracy of the valve seat 23.

[0043] like Figure 4 , Figure 5 and Figure 12 As shown, the outer ring plate 22 includes a ring plate body 221 and a support ring 222, and the valve seat 23 includes a ring seat 231, a first annular protrusion 232 and a heat-conducting rod 233. One end of the ring plate body 221 is threaded and screwed into the valve body 1, and the inner wall of the ring plate body 221 is provided with a first limiting groove 201. The support ring 222 is disposed on the inner side of the ring plate body 221, and the support ring 222 is provided with a through groove 202 along the axial direction. The ring seat 231 is inserted into the ring plate body 221. The first annular protrusion 232 is disposed on the outer circumferential surface of the ring seat 231, and the first annular protrusion 232 is engaged in the first limiting groove 201. One end of the heat-conducting rod 233 is connected to the ring seat 231, and the other end of the heat-conducting rod 233 passes through the through groove 202 and abuts against the heating ring 24.

[0044] As described above, in the structure of the outer ring plate 22, one end of the ring plate body 221 is provided with a thread to facilitate screwing and connection with the valve body 1, achieving a detachable connection. Simultaneously, the ring plate body 221 is provided with a first limiting groove 201 for engaging the valve seat 23, thus integrating the outer ring plate 22 and the valve seat 23. This facilitates simultaneous assembly of the outer ring plate 22 and the valve seat 23 onto the valve body 1, or simultaneous disassembly. This design minimizes the risk of damage to the sealing interface of the valve seat 23 during maintenance, ensuring application stability.

[0045] In the structure of valve seat 23, the ring seat 231 is a sealing component, and the end face of the ring seat 231 is used to cooperate with the diaphragm to form a sealing interface. At the same time, the outer peripheral surface of the ring seat 231 is provided with a first annular protrusion 232 for engaging with the first limiting groove 201 of the ring plate body 221 to achieve integrated fixation.

[0046] Furthermore, a support ring 222 is provided on the inner side of the ring plate body 221, and the support ring 222 has a through groove 202. A heat-conducting rod 233 is provided at the bottom of the ring seat 231 of the valve seat 23. The heat-conducting rod 233 passes through the through groove 202 and abuts against the heating ring 24. This facilitates the improvement of heat conduction efficiency, so as to realize the direct heating of the valve seat 23 by the heating ring 24, thereby ensuring heating efficiency, and also helps to improve the positioning accuracy of the valve seat 23.

[0047] In some embodiments, a rod-shaped heating element is arranged in the connecting hole 104, and the rod-shaped heating element is connected to the heating ring 24; a clamp 11 is provided at the relatively far ends of the input flow channel 101 and the output flow channel 102, and the clamp 11 and the valve body 1 are provided with opposing retaining rings 12.

[0048] As described above, a rod-shaped heating element is arranged inside the connecting hole 104. The rod-shaped heating element is connected to the heating ring 24, thereby achieving synchronous heating of the valve body 1 and the valve seat assembly 2, ensuring the overall temperature of the valve, and facilitating connection with external power supply components.

[0049] Specifically, the rod-shaped heating element and the heating ring 24 are integrated into a single structure, which can be assembled into the valve body 1 and locked in place by the valve seat 23. Specifically, the heating elements in the rod-shaped heating element and the heating ring 24 employ heating components such as heating wires.

[0050] The clamp 11 is provided with a retaining ring 12 opposite to the valve body 1, which can be used to clamp and fix the heat preservation component or the heating component to achieve heat preservation or heating of the input flow channel 101 and the output flow channel 102.

[0051] like Figure 4 and Figure 13 As shown, the diaphragm 3 is disposed in the communicating cavity 103; the valve cap 4 and the valve body 1 clamp and fix the diaphragm 3; the valve cap nut 5 is connected to the valve body 1 by threaded engagement and fixes the valve cap 4.

[0052] As described above, diaphragm 3 is an umbrella-shaped diaphragm with its convex surface away from valve seat assembly 2. It is configured as a normally open structure. During operation, the valve stem presses against diaphragm 3, causing diaphragm 3 to adhere to the top surface of valve seat assembly 2, thus sealing the flow channel. After the valve stem moves away, diaphragm 3 returns to its original position due to its elasticity, and the valve then opens.

[0053] Specifically, a valve cap 4 is provided to cooperate with the valve body 1 to clamp and fix the diaphragm 3. At the same time, a valve cap nut 5 is provided to fix the valve cap 4, and the valve cap nut 5 is connected to the valve body 1 by threaded engagement.

[0054] like Figure 4 , Figures 8-10As shown, the actuating end of the valve stem 6 is positioned corresponding to the diaphragm 3, and the actuating end of the valve stem 6 is slidably engaged with the valve cap 4; the actuator 7 is connected to the valve cap nut 5, and the actuator 7 is used to drive the axial displacement of the valve stem 6; the limiting component 8 is used to limit the valve stem 6 so that the diaphragm 3 is normally closed when the actuator 7 is removed.

[0055] As described above, the valve stem 6 controls the movement of the diaphragm 3. The actuating end of the valve stem 6 corresponds to the diaphragm 3, and the driving section of the valve stem 6 is connected to the actuator. To ensure the stability of the operation, the actuating end of the valve stem 6 slides against the valve cap 4 to achieve stable guidance.

[0056] The actuator 7 is connected to the valve cap nut 5 to control the valve stem 6 to move.

[0057] Furthermore, considering maintenance needs, a limit component 8 is provided to ensure that the diaphragm 3 is in a closed state when the actuator 7 is removed.

[0058] like Figure 4 , Figure 6 , Figure 9 , Figures 15-17 As shown, the limiting component 8 includes a positioning seat 81 and an air bladder 82. The actuating end of the valve stem 6 is provided with a limiting plate 61. The positioning seat 81 is connected to the valve cap nut 5 by a threaded connection. The positioning seat 81 has an annular structure and partially slides with the actuating end of the valve stem 6. A sliding cavity 401 is provided between the positioning seat 81 and the valve cap 4. The air bladder 82 has a U-shaped cross-section. The edge of the air bladder 82 is connected to the positioning seat 81, and the positioning seat 81 has an annular groove 801 corresponding to the air bladder 82. The valve cap 4 and the valve cap nut 5 are an integral structure. The valve cap 4 and the valve cap nut 5 have an air passage 501 that connects to the annular groove 801. The limiting plate 61 is provided on the periphery of the actuating end of the valve stem 6. The limiting plate 61 is located in the sliding cavity 401 and corresponds to the air bladder 82.

[0059] As described above, the limiting component 8 is provided with a positioning seat 81 connected to the valve cap nut 5, and an air bladder 82 is provided on the positioning seat 81. The actuating end of the valve stem 6 is provided with a limiting plate 61 that cooperates with the air bladder 82.

[0060] During assembly, the positioning seat 81 and the valve cap nut 5 are connected by threaded engagement, and the air bladder 82 is connected to the positioning seat 81 to achieve integrated assembly.

[0061] The airbag 82 has a U-shaped cross-section and is connected to the positioning seat 81. The cross-section of the airbag 82 and the annular groove 801 opened in the positioning seat 81 together form an air storage space.

[0062] When it is necessary to remove the actuator 7, inflate the air storage space. At this time, the air bag 82 will press the limit plate 61 to lock the position of the valve stem 6, so that the valve stem 6 presses the diaphragm 3 to ensure that the valve is in the closed state. At this time, disconnect the valve stem 6 from the actuator 7, and the actuator 7 can be removed for maintenance, ensuring the convenience of maintenance.

[0063] This structure effectively prevents the precursor gas from escaping from the reaction chamber or the atmosphere from flowing back during maintenance, ensuring the safety of operators and the cleanliness of the process environment.

[0064] Specifically, to ensure ease of application, the valve cap 4 and valve cap nut 5 are designed as an integrated structure, with the valve cap 4 and valve cap nut 5 being two parts of the same main body. This facilitates preparation and subsequent assembly, and allows for the simultaneous locking and fixing of the diaphragm 3 after assembly.

[0065] Meanwhile, the valve cap 4 and valve cap nut 5 are integrated into a single structure without seams. This structure also facilitates the opening of a seamless air passage 501 that runs through the valve cap 4 and valve cap nut 5, making it easier to fill the air storage space with air and reducing the possibility of air leakage.

[0066] A sliding cavity 401 is provided between the positioning seat 81 and the valve cap 4 to accommodate the airbag 82 and the limiting plate 61, and to ensure that the airbag 82 is positioned relative to the limiting plate 61.

[0067] like Figure 16 As shown, the outer peripheral surface of the positioning seat 81 is provided with an air ring groove 802, and the upper and lower sides of the air ring groove 802 are provided with sealing surfaces 803. The sealing surfaces 803 are used to fit against the inner wall surface of the valve cap nut 5 to achieve sealing of the air ring groove 802.

[0068] Meanwhile, the air ring groove 802 is provided with an air guide hole 804 that connects to the air storage space. With this structure, it can be ensured that after the positioning seat 81 is screwed into place, the air passage 501 is always connected to the air ring groove 802, and then connected to the air storage space through the air guide hole 804.

[0069] like Figure 1 , Figure 14 As shown, one end of the connecting cylinder 9 is connected to the valve cap nut 5 by a threaded connection, and the other end of the connecting cylinder 9 is connected to the actuator 7; the disc spring 10 is sleeved on the connecting cylinder 9, and the disc spring 10 abuts against the valve cap nut 5 and the connecting cylinder 9; the valve stem 6 and the limiting component 8 are arranged inside the connecting cylinder 9.

[0070] As described above, in order to facilitate the disassembly and assembly of the valve stem 6 and the actuator 7, and to arrange the limiting component 8, a connecting cylinder 9 is provided for connecting the actuator 7 and the valve cap nut 5.

[0071] At the same time, a disc spring 10 is provided, which can provide continuous elastic compensation force to offset the loss of preload caused by thermal expansion and contraction and vibration, ensuring the stability of the connection structure of each component and achieving continuous sealing and leak prevention.

[0072] Specifically, the valve stem 6 and the limiting component 8 are installed inside the connecting cylinder 9.

[0073] like Figures 4-7 As shown, the limiting component 8 also includes a sliding cylinder 83, a second annular protrusion 84, a sliding rod 85, and a spring 86. The sliding cylinder 83 is slidably disposed within the connecting cylinder 9. The second annular protrusion 84 is disposed around the periphery of the sliding cylinder 83. The inner wall of the connecting cylinder 9 is provided with a second limiting groove 901, and the second annular protrusion 84 is engaged within the second limiting groove 901. One end of the sliding rod 85 is connected to the sliding cylinder 83, and the other end of the sliding rod 85 is inserted into the valve cap nut 5 and closes the air passage 501. A gap is left between the second annular protrusion 84 and the lower side wall of the second limiting groove 901. The air passage 501 is connected to an external normally open air source. One end of the spring 86 abuts against the connecting cylinder 9, and the other end of the spring 86 abuts against the sliding cylinder 83.

[0074] As described above, in the structure of the limiting component 8, a sliding cylinder 83 is provided that slides with the connecting cylinder 9, and a sliding rod 85 is provided on the sliding cylinder 83. The sliding rod 85 is used to block the air passage 501.

[0075] During actual assembly, the slide cylinder 83 is not directly assembled into the connecting cylinder 9. The slide cylinder 83 is only inserted into the connecting cylinder 9 through a part of its end, so as to facilitate the alignment of the slide rod 85 with the rod hole in the valve cap nut 5 for sealing the air passage.

[0076] During assembly, the end of the connecting cylinder 9 abuts against the end face of the second annular protrusion 84 around the slide cylinder 83. Then, the connecting cylinder 9 is rotated to connect the connecting cylinder 9 with the valve cap nut 5. During this process, the slide cylinder 83 and the slide rod 85 are pressed down simultaneously until the slide rod 85 blocks the air passage 501.

[0077] After the slide rod 85 blocks the air passage 501, as the connecting cylinder 9 continues to rotate, the second annular protrusion 84 will enter the connecting cylinder 9. At this time, the rotational resistance increases, and the spring 86 is compressed until the second annular protrusion 84 is engaged in the second limiting groove 901 on the inner wall of the connecting cylinder 9, and the assembly is completed.

[0078] After assembly, the end face of the second annular protrusion 84 does not abut against the upper or lower side wall of the second limiting groove 901. A gap is left between the second annular protrusion 84 and the lower side wall of the second limiting groove 901 so that the slide cylinder 83 and the slide rod 85 have a small amount of axial movement space, which facilitates the spring 86 to press the slide cylinder 83 and the slide rod 85.

[0079] When the connecting cylinder 9 is disassembled, this slight displacement will not cause the diaphragm 3 to open. That is, as the connecting cylinder 9 moves upward, the displacement distance of the lower wall surface of the second limiting groove 901 from not contacting the lower end of the second annular protrusion 84 to abutting the lower end of the second annular protrusion 84 is insufficient to cause the diaphragm 3 to open.

[0080] When the connecting cylinder 9 moves upward again, the slide rod 85 no longer completely seals the air passage 501, and the external normally open air source will supply air through the air passage 501 to inflate the airbag 82, thereby limiting the valve rod 6.

[0081] In some embodiments, even if the connecting cylinder 9 moves the sliding cylinder 83 and the sliding rod 85 slightly upward, the diaphragm 3 will not open to leave a window for the airbag 82 to inflate. The amount of this slight upward movement needs to be precisely controlled to avoid affecting the diaphragm 3's responsiveness. This design ensures that the valve remains closed at all times.

[0082] In this structure, the connecting cylinder 9 can rotate freely and can drive the sliding cylinder 83 and the sliding rod 85 upward through the second annular protrusion 84, so that the air passage 501 is opened, which facilitates the self-inflation limit of the airbag 82 without damaging or interfering with the sliding rod 85. This achieves automatic inflation limit, which helps to improve the convenience and fault tolerance during maintenance.

[0083] like Figure 18 As shown, in some embodiments, a guide cylinder 87 is provided on the positioning seat 81, and a plastic positioning element 88 is provided on the guide cylinder 87.

[0084] Specifically, this structure does not include a spring 86, and the valve cap nut 5 has a stepped hole and an internal thread for connecting the positioning seat 81 and the connecting cylinder 9.

[0085] During assembly, first connect the positioning seat 81 to the small diameter section of the stepped hole of the valve cap nut 5, then install the slide cylinder 83 and slide rod 85 into the valve cap nut 5, and make the slide rod 85 block the air passage 501. At this time, the guide cylinder 87 cooperates with the inner wall of the slide cylinder 83 to ensure stable position.

[0086] In the initial state, the plastic positioning part 88 is in a vertical position to avoid interfering with the fit between the guide cylinder 87 and the slide cylinder 83. After the guide cylinder 87 is inserted into the inner wall of the slide cylinder 83, the plastic positioning part 88 is folded over to position the slide cylinder 83, and then the connecting cylinder 9 is assembled.

[0087] During the assembly of the connecting cylinder 9, since the second annular protrusion 84 needs to enter the second limiting groove 901, in order to avoid excessive friction between the second annular protrusion 84 and the inner wall of the connecting cylinder 9, which could damage the slide rod 85, multiple slide rods 85 can be inserted into the valve cap nut 5 to improve the torsional strength.

[0088] The positioning seat 81 serves as the base for installing the airbag 82. The plastic positioning component 88 is connected to the positioning seat 81 via the guide tube 87. The positioning seat 81 is also configured to correspond to the air passage 501. The slide rod 85 is used to block the air passage 501, and the slide tube 83 is used to support the slide rod 85. In this way, after the slide tube 83 is positioned by the plastic positioning component 88, the overall positional accuracy can be ensured. The position of the slide rod 85 can also be used to determine whether it is in place, thus improving the assembly accuracy and reliability.

[0089] like Figure 14 As shown, the driving end of the valve stem 6 is inserted into the driving rod of the actuator 7, and the valve stem 6 and the driving rod of the actuator 7 are fixedly connected by bolts.

[0090] As described above, the valve stem 6 and the drive rod of the actuator 7 are connected by a plug-in structure and fixed with bolts. When the actuator 7 needs to be removed, the bolts are first released. At this time, the valve stem 6 will not move under the pressure of the drive rod of the actuator 7. Then, when the connecting cylinder 9 is rotated to remove it, the air passage 501 is opened and the air bag 82 is inflated to synchronously restrict the valve stem 6. After that, the valve stem 6 and the drive rod of the actuator 7 can be separated.

[0091] When it is necessary to reinstall the actuator 7, the air bag 82 can be deflated only after the drive rod is connected to the valve stem 6, and the drive rod will then limit the valve stem 6.

[0092] The application method of the ALD atomic deposition valve of the present invention includes the following steps: When the opening and closing action is performed, the air bag 82 is in a negative pressure state, the actuator 7 drives the valve stem 6 to move axially, and controls the opening and closing of the diaphragm 3 through the valve stem 6; During maintenance, remove the bolts connecting the valve stem 6 and the actuator 7, rotate the connecting cylinder 9, and disassemble the connecting cylinder 9 and the actuator 7 simultaneously. During this process, the connecting cylinder 9 drives the limiting component 8 to move synchronously, the slide rod 85 disengages from the air passage 501, the external air source inflates the air bag 82, and the air bag 82 limits the valve stem 6 by abutting against the limiting plate 61, ensuring that the diaphragm 3 is in a closed state.

[0093] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An ALD atomic deposition valve, characterized in that: Includes valve body (1) and valve seat assembly (2), wherein, The valve body (1) is provided with an input flow channel (101), an output flow channel (102), a connecting cavity (103) connecting the input flow channel (101) and the output flow channel (102), and a connecting hole (104) provided between the input flow channel (101) and the output flow channel (102), one end of the connecting hole (104) extending to the outside of the valve body (1); The valve seat assembly (2) is disposed in the communicating cavity (103). The valve seat assembly (2) includes an inner ring plate (21) corresponding to the end of the input flow channel (101) and connected to the valve body (1), an outer ring plate (22) coaxial with the inner ring plate (21) and detachably connected to the valve body (1), a valve seat (23) clamped between the inner ring plate (21) and the outer ring plate (22), and a heating ring (24) abutting against the valve body (1), the inner ring plate (21), the outer ring plate (22) and the valve seat (23). The heating ring (24) partially corresponds to the end of the communicating hole (104). The heating ring (24) uses an electric heating wire as a heating element. The outer ring plate (22) includes a ring plate body (221) and a support ring (222). The valve seat (23) includes a ring seat (231), a first annular protrusion (232), and a heat-conducting rod (233). One end of the ring plate body (221) is threaded and screwed into the valve body (1). The inner wall of the ring plate body (221) is provided with a first limiting groove (201). The support ring (222) is located inside the ring plate body (221). (222) A through groove (202) is provided along the axial direction; the ring seat (231) is inserted into the ring plate body (221); the first annular protrusion (232) is provided on the outer circumferential surface of the ring seat (231), and the first annular protrusion (232) is engaged in the first limiting groove (201); one end of the heat-conducting rod (233) is connected to the ring seat (231), and the other end of the heat-conducting rod (233) passes through the through groove (202) and abuts against the heating ring (24).

2. The ALD atomic deposition valve as described in claim 1, characterized in that: A rod-shaped heating element is arranged inside the connecting hole (104), and the rod-shaped heating element is connected to the heating ring (24); The input flow channel (101) and the output flow channel (102) are provided with clamps (11) at their relatively far ends, and the clamps (11) and the valve body (1) are provided with opposing retaining rings (12).

3. The ALD atomic deposition valve as described in claim 1, characterized in that: It also includes a diaphragm (3), a valve cap (4), and a valve cap nut (5), wherein, The diaphragm (3) is disposed within the communicating cavity (103); The valve cap (4) and the valve body (1) clamp and fix the diaphragm (3). The valve cap nut (5) is connected to the valve body (1) by a threaded connection and fixes the valve cap (4).

4. The ALD atomic deposition valve as described in claim 3, characterized in that: It also includes a valve stem (6), an actuator (7), and a limiting component (8), wherein, The actuating end of the valve stem (6) is provided corresponding to the diaphragm (3), and the actuating end of the valve stem (6) is slidably engaged with the valve cap (4); The actuator (7) is connected to the valve cap nut (5), and the actuator (7) is used to drive the valve stem (6) to move axially. The limiting component (8) is used to limit the valve stem (6) so that the diaphragm (3) is normally closed when the actuator (7) is removed.

5. The ALD atomic deposition valve as described in claim 4, characterized in that: The limiting component (8) includes a positioning seat (81) and an airbag (82), and the actuating end of the valve stem (6) is provided with a limiting plate (61), wherein, The positioning seat (81) and the valve cap nut (5) are connected by threaded engagement. The positioning seat (81) has an annular structure. The positioning seat (81) partially slides with the actuating end of the valve stem (6). A sliding cavity (401) is provided between the positioning seat (81) and the valve cap (4). The airbag (82) has a U-shaped cross-section. The edge of the airbag (82) is connected to the positioning seat (81), and the positioning seat (81) has an annular groove (801) corresponding to the airbag (82). The valve cap (4) and the valve cap nut (5) are an integral structure, and the valve cap (4) and the valve cap nut (5) are provided with an air passage (501) that connects to the annular groove (801). The limiting plate (61) is disposed on the periphery of the actuating end of the valve stem (6), the limiting plate (61) is located in the sliding cavity (401), and the limiting plate (61) corresponds to the airbag (82).

6. The ALD atomic deposition valve as described in claim 5, characterized in that: It also includes a connecting cylinder (9) and a disc spring (10), wherein, One end of the connecting cylinder (9) is threadedly connected to the valve cap nut (5), and the other end of the connecting cylinder (9) is connected to the actuator (7); The disc spring (10) is sleeved on the connecting cylinder (9), and the disc spring (10) abuts against the valve cap nut (5) and the connecting cylinder (9). The valve stem (6) and the limiting component (8) are disposed inside the connecting cylinder (9).

7. The ALD atomic deposition valve as described in claim 6, characterized in that: The limiting component (8) further includes a slide cylinder (83), a second annular protrusion (84), a slide rod (85), and a spring (86), wherein, The slide tube (83) is slidably disposed inside the connecting tube (9); The second annular protrusion (84) is disposed around the periphery of the slide cylinder (83), and the inner wall of the connecting cylinder (9) is provided with a second limiting groove (901), and the second annular protrusion (84) is engaged in the second limiting groove (901); One end of the slide rod (85) is connected to the slide cylinder (83), and the other end of the slide rod (85) is inserted into the valve cap nut (5) and closes the air passage (501). The second annular protrusion (84) and the lower side wall of the second limiting groove (901) are spaced apart. The airway (501) is connected to an external normally open air source; One end of the spring (86) abuts against the connecting cylinder (9), and the other end of the spring (86) abuts against the slide cylinder (83).

8. The ALD atomic deposition valve as described in claim 7, characterized in that: The driving end of the valve stem (6) is inserted into the driving rod of the actuator (7), and the valve stem (6) and the driving rod of the actuator (7) are fixedly connected by bolts.

9. A method for applying the ALD atomic deposition valve as described in claim 8, characterized in that, Includes the following steps: When the opening and closing action is performed, the airbag (82) is in a negative pressure state, the actuator (7) drives the valve stem (6) to move axially, and controls the opening and closing of the diaphragm (3) through the valve stem (6); During maintenance, remove the bolts connecting the valve stem (6) and the actuator (7), rotate the connecting cylinder (9), and disassemble the connecting cylinder (9) and the actuator (7) simultaneously. During this process, the connecting cylinder (9) drives the limiting component (8) to move synchronously, the slide rod (85) disengages from the air passage (501), the external air source inflates the air bag (82), and the air bag (82) abuts against the limiting plate (61) to limit the valve stem (6) and ensure that the diaphragm (3) is in a closed state.

Images