Large vacuum drying device and film forming system

Abstract

The application relates to a large-scale vacuum drying device and a film forming system with uniform film forming, which comprises a box body, an air extraction device for extracting vacuum in the box body, a hot plate provided with a heating flow channel, and a cold plate located directly above the hot plate and provided with a cooling flow channel. The heating flow channel and the cooling flow channel are consistent in shape and vertically opposite. The flowing direction of the heating liquid in the heating flow channel is opposite to that of the cooling liquid in the cooling flow channel, so as to improve the consistency of the temperature difference of the corresponding positions of the heating flow channel and the cooling flow channel in the vertical direction. The flow channels in the hot plate and the cold plate are vertically opposite and the flow directions are opposite. At any vertical corresponding position, the temperature difference between the liquid in the heating flow channel and the liquid in the cooling flow channel tends to be balanced, so that the solvent evaporation consistency of the substrate is good, and the film forming quality is improved.

Description

Technical Field

[0001] This application relates to the field of vacuum drying technology, and in particular to a large-scale vacuum drying device and film-forming system for uniform film formation. Background Technology

[0002] Vacuum Chamber Dryers (VCDs) are core process equipment in semiconductor, flat panel display, photovoltaic cell, and flexible electronics manufacturing, widely used in key processes such as photoresist curing, thin film dehydration, coating drying, and solvent replacement. With the evolution of semiconductor wafers to 12 inches and larger, the development of OLED panels towards higher generation lines such as G8.5 / G10.5, and the rapid rise of perovskite solar cells and large flexible substrates, the area of ​​the substrate to be dried has significantly increased, leading to a substantial increase in the requirements for temperature field uniformity and vacuum drying consistency within the chamber.

[0003] The stage (hot plate) is used to support the substrate, and the cold plate is located above the hot plate and parallel to it. The temperature of the hot plate is higher than that of the cold plate, so when the solvent evaporates and forms a film on the substrate surface, it rises, increasing the evaporation rate.

[0004] In related technologies, the substrate size to be processed is small, so the corresponding hot plate and cold plate sizes are also small. The temperature uniformity of the hot plate and cold plate is easy to control, so as to ensure the uniform heating of the substrate by the hot plate and the consistent temperature difference between the hot plate and cold plate at various parts of the substrate. This ensures the consistency of solvent evaporation on the substrate surface and the consistency of film formation.

[0005] However, when the substrate size to be processed is large, the dimensional contrast between the hot plate and the cold plate becomes significant, and it is difficult to ensure the temperature consistency of both the hot and cold plates. This results in inconsistent heating levels across the substrate, affecting film formation consistency. The difficulty in ensuring the temperature consistency of the cold plate leads to variations in temperature differences between different locations on the hot and cold plates, resulting in different solvent evaporation rates at different locations on the substrate, which also negatively impacts film formation consistency. Summary of the Invention

[0006] This application provides a large-scale vacuum drying apparatus and film-forming system for uniform film formation, in order to solve the technical problem in related technologies where different solvent evaporation rates at different locations on the substrate have an adverse effect on film formation consistency.

[0007] Firstly, a large-scale vacuum drying apparatus for uniform film formation is provided, comprising: Box; A vacuum device is used to create a vacuum inside the chamber. A hot plate is located inside the housing and is used to support a substrate. The hot plate has heating channels that are distributed throughout it. Heating liquid is supplied to the heating channels to heat the surface of the hot plate. A cold plate is located inside the housing and directly above the hot plate. The cold plate has cooling channels inside and throughout it. Cooling liquid is supplied to the cooling channels to cool the surface of the cold plate. The heating channel and the cooling channel have the same shape and are vertically aligned. The flow direction of the heating liquid in the heating channel is opposite to that of the cooling liquid in the cooling channel, so that the temperature difference at each point in the vertical direction of the heating channel and the cooling channel is within a preset standard temperature difference range, and the temperature difference at each point in the vertical direction of the hot plate and the cold plate is within a preset standard temperature difference range.

[0008] In some embodiments, the heating channel includes multiple heating sub-channels, each of which has an independent inlet and outlet; the cooling channel includes multiple cooling sub-channels, each of which has an independent inlet and outlet. Each of the heating sub-channels corresponds to a cooling sub-channel in the vertical direction, forming a group, and the liquid flow direction in each group of heating sub-channels and cooling sub-channels is opposite.

[0009] In some embodiments, the hot plate is divided into multiple heating zones from its edge to its center, and each heating zone is provided with multiple heating sub-channels; The cold plate is divided into multiple cooling zones from its edge to its center, and each cooling zone is provided with multiple cooling sub-channels.

[0010] In some embodiments, each of the heating sub-channels and each of the cooling sub-channels includes multiple channels, with the multiple channels of each heating sub-channel arranged adjacent to each other at intervals, and the multiple channels of each cooling sub-channel arranged adjacent to each other at intervals; the liquid flow direction in adjacent channels is opposite.

[0011] In some embodiments, the liquid flow directions in two adjacent heating sub-channels that are close to each other are opposite; the liquid flow directions in two adjacent cooling sub-channels that are close to each other are opposite.

[0012] In some embodiments, stress structures are arranged on the opposite sides of the hot plate and the cold plate to reduce the stress inside the hot plate and the cold plate.

[0013] In some embodiments, the large-scale vacuum drying apparatus for uniform film formation further includes multiple visual monitoring elements, all of which are mounted on the top of the housing. Multiple through holes are provided on the cold plate, allowing the multiple visual monitoring elements to pass through the cold plate and image the film layer on the substrate surface on the hot plate. The multiple visual monitoring elements are used to image the film layer on the substrate surface at different heating areas of the hot plate.

[0014] In some embodiments, the inlet and outlet of the heating sub-channel are connected to the same corner of the top surface of the box via pipes, and the inlet and outlet of multiple heating sub-channels are respectively connected to multiple corners of the top surface of the box via pipes. The inlet and outlet of the cooling sub-channel are connected to the same corner of the bottom surface of the box body through pipes, and the inlet and outlet of multiple cooling sub-channels are respectively connected to multiple corners of the bottom surface of the box body through pipes. Corrugated pipes are arranged at the corners of the outer top and bottom surfaces of the housing. The corrugated pipes are connected to the interior of the housing. The pipes that connect to the inlet and outlet of the cooling sub-channel and the heating sub-channel extend to the outside of the housing through the corrugated pipes.

[0015] In some embodiments, maintenance doors are provided on opposite sides of the housing, and the maintenance doors are arranged close to the corrugated pipe.

[0016] The beneficial effects of the technical solution provided in this application include: This application provides a large-scale vacuum drying apparatus for uniform film formation. Heating and cooling channels are respectively arranged throughout the hot and cold plates, with the heating and cooling channels having the same shape and facing each other vertically. Simultaneously, the flow directions of the heating and cooling liquids are opposite, forming a "counter-convection" heat exchange mode. When the heating liquid flows along the heating channel, its temperature gradually decreases due to heat loss; when the cooling liquid flows in the opposite direction along the cooling channel, its temperature gradually increases due to heat absorption. Because the two channels have the same shape, are vertically facing each other, and flow in opposite directions, the temperature difference between the liquid in the heating channel and the liquid in the cooling channel remains constant at any corresponding vertical position. The counter-convection design ensures that the temperature difference between the hot and cold plates is highly consistent at corresponding points in the vertical direction, reducing the temperature gradient caused by the increase in plate size.

[0017] Because the temperature difference between the hot and cold plates remains consistent at any corresponding location, the thermal driving conditions (heating intensity of the lower surface) and cold traction conditions (cooling intensity of the upper surface) experienced by each area of ​​the substrate surface are at the same level, resulting in uniform evaporation driving force of the solvent from all parts of the substrate surface. This ensures synchronous and balanced solvent evaporation rates across the entire substrate area, avoiding defects such as film cracking caused by localized over-drying and film flow or pinholes caused by localized under-drying. It significantly improves the film thickness uniformity, surface smoothness, and microstructure consistency, meeting the extremely high manufacturing requirements for film quality in semiconductor wafers, high-generation OLED panels, and large-area perovskite solar cells.

[0018] Secondly, a film-forming system is provided, including a large-scale vacuum drying apparatus for uniform film formation as described above.

[0019] Another embodiment of this application provides a film-forming system. Since the film-forming system includes a large-scale vacuum drying device for uniform film formation as described above, the beneficial effects of the film-forming system are consistent with the beneficial effects of the large-scale vacuum drying device for uniform film formation described above, and will not be repeated here. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 A schematic diagram of a large-scale vacuum drying apparatus for uniform film formation provided in the embodiments of this application; Figure 2 A partial perspective view of a large-scale vacuum drying apparatus for uniform film formation provided in an embodiment of this application; Figure 3 A schematic diagram of the hot plate and cold plate provided in an embodiment of this application; Figure 4 This is a schematic diagram of the internal structure of the hot plate and cold plate provided in an embodiment of this application; Figure 5 A schematic diagram of the heating flow channels inside the hot plate from a top view provided in an embodiment of this application; Figure 6 This is a schematic diagram of the cooling channels inside the cold plate from a top view, provided for an embodiment of this application.

[0022] In the diagram: 1. Hot plate; 1a. Heating channel; 1a1. Heating sub-channel; 2. Cold plate; 21. Cooling channel; 21a. Cooling sub-channel; 3. Housing; 4. Evacuation device; 5. Visual monitoring component; 6. Bellows; 7. Maintenance door; a. Stress structure. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0024] This application provides a large-scale vacuum drying apparatus and film-forming system for uniform film formation. By vertically aligning and opposing the flow channels within the hot and cold plates, the temperature difference between the liquid in the heating channel and the liquid in the cooling channel remains constant at any corresponding vertical position. This ensures good solvent evaporation consistency across the substrate and improves film quality. This application addresses the technical problem in related technologies where different solvent evaporation rates at different locations on the substrate negatively impact film formation consistency.

[0025] Reference Figure 1 and Figure 2 A large-scale vacuum drying device for uniform film formation includes a housing 3, an air extraction device 4, a hot plate 1, and a cold plate 2.

[0026] The housing 3 is a sealed housing 3, and the vacuum device 4 is connected to the housing 3. The vacuum device 4 is used to evacuate the housing 3. In this embodiment, the vacuum device 4 includes a dry pump and a molecular pump. The dry pump is used first, and then the molecular pump is used to evacuate, so as to achieve a high vacuum degree inside the housing 3.

[0027] Reference Figure 1 Preferably, the suction port of the molecular pump is connected to the inside of the box body 3 from the side, and the suction port of the dry pump is connected to the inside of the box body 3 from the bottom.

[0028] Hot plate 1 and cold plate 2 are both arranged inside the housing 3, with hot plate 1 located below cold plate 2, and hot plate 1 and cold plate 2 facing each other vertically.

[0029] The hot plate 1 is used to support the substrate to accelerate the evaporation of the solvent on the substrate. In addition, the temperature of the hot plate 1 is higher than that of the cold plate 2. By utilizing the temperature difference between the cold plate 2 and the hot plate 1, the solvent on the substrate surface is subjected to thermal driving conditions and cold traction conditions to accelerate the solvent evaporation rate. Moreover, the evaporated solvent rises, avoiding the solvent from falling back to the substrate surface and affecting the film formation quality.

[0030] Reference Figures 3-5Specifically, the hot plate 1 is provided with heating channels 1a, which are distributed throughout the hot plate 1. Heating liquid is supplied to the heating channels 1a to heat the surface of the hot plate 1. In this embodiment, the temperature of the heating liquid includes a temperature between 30°C and 70°C.

[0031] Reference Figure 4 and Figure 6 Specifically, the cold plate 2 has cooling channels 21 inside, which are distributed throughout the cold plate 2. Cooling liquid is supplied to the cooling channels 21 to cool the surface of the cold plate 2. In this embodiment, the temperature of the cooling liquid includes a temperature between 0°C and 20°C.

[0032] This setup allows for temperature control of hot plate 1 and cold plate 2 through heating and cooling liquids, making it easier to adjust the temperatures of hot plate 1 and cold plate 2 themselves, thereby facilitating the adjustment of the temperature difference between hot plate 1 and cold plate 2 to adapt to different film-forming processes.

[0033] Reference Figures 4-6 Furthermore, the heating channel 1a and the cooling channel 21 have the same shape and are vertically aligned. The flow direction of the heating liquid in the heating channel 1a is opposite to the flow direction of the cooling liquid in the cooling channel 21. That is, the heating channel 1a and the cooling channel 21 are arranged symmetrically in a horizontal plane. Figure 5 and Figure 6 The direction of liquid flow in the heating and cooling channels has been marked.

[0034] This configuration ensures that the temperature difference between the heating channel 1a and the cooling channel 21 at corresponding points in the vertical direction is within a preset standard temperature difference range. In this embodiment, the deviation range of the temperature difference between the heating channel 1a and the cooling channel 21 at corresponding points in the vertical direction does not exceed 1℃, and preferably does not exceed 0.5℃, to guarantee a high degree of consistency in temperature differences.

[0035] This ensures that the temperature difference between the hot plate 1 and the cold plate 2 at various points in the vertical direction is within a preset standard temperature difference range. In this embodiment, the deviation range of the temperature difference between the hot plate 1 and the cold plate 2 at various points in the vertical direction does not exceed 1℃, and preferably does not exceed 0.5℃, to guarantee a high degree of consistency in temperature differences at all points.

[0036] It is important to note that during the flow of the heating liquid, because its temperature is higher than the ambient temperature, it loses heat as it flows, thus lowering its temperature. Conversely, the cooling liquid, whose temperature is lower than the ambient temperature, heats up as it flows. By reversing the flow directions of the heating and cooling liquids, the positions of the hotter heating liquid in heating channel 1a and the hotter coolant in cooling channel 21 are vertically aligned, and the positions of the colder heating liquid in heating channel 1a and the colder coolant in cooling channel 21 are vertically aligned. Therefore, at any vertically corresponding position, the temperature difference between the liquid in heating channel 1a and the liquid in cooling channel 21 remains constant.

[0037] This configuration, with heating channels 1a and cooling channels 21 distributed throughout the hot plate 1 and cold plate 2 respectively, and the heating channels 1a and cooling channels 21 having the same shape and facing each other vertically, while the flow directions of the heating and cooling liquids are opposite, forms a "counter-convection" heat exchange mode. When the heating liquid flows along the heating channel 1a, its temperature gradually decreases due to heat loss; when the cooling liquid flows in the opposite direction along the cooling channel 21, its temperature gradually increases due to heat absorption. Because the two channels have the same shape, are vertically facing each other, and flow in opposite directions, the temperature difference between the liquid in the heating channel 1a and the liquid in the cooling channel 21 remains constant at any corresponding vertical position. The counter-convection design ensures that the temperature difference at corresponding points in the vertical direction of the hot plate 1 and cold plate 2 is highly consistent, eliminating the temperature gradient problem caused by the increase in plate size.

[0038] Because the temperature difference between the hot plate 1 and the cold plate 2 remains consistent at any corresponding position, the thermal driving conditions (heating intensity of the lower surface) and cold traction conditions (cooling intensity of the upper surface) experienced by each area of ​​the substrate surface are at the same level, resulting in uniform evaporation driving force of the solvent from all parts of the substrate surface. This ensures that the solvent evaporation rate is synchronized and balanced across the entire substrate area, avoiding defects such as film cracking caused by localized over-drying and film flow or pinholes caused by localized under-drying. This significantly improves the film thickness uniformity, surface smoothness, and microstructure consistency, meeting the extremely high manufacturing requirements for film quality in semiconductor wafers, high-generation OLED panels, and large-area perovskite solar cells.

[0039] Reference Figure 5 and Figure 6 The heating channel 1a includes multiple heating sub-channels 1a1, each with its own inlet and outlet. The cooling channel 21 includes multiple cooling sub-channels 21a, each with its own inlet and outlet.

[0040] Reference Figures 4-6Specifically, each heating sub-channel 1a1 is paired with a cooling sub-channel 21a in the vertical direction, and the liquid flow directions in each pair of heating sub-channels 1a1 and cooling sub-channels 21a are opposite.

[0041] This configuration, by arranging multiple heating sub-channels 1a1, shortens the flow distance of the heating liquid within the hot plate 1, resulting in smaller temperature changes during the flow of the heating liquid. This makes it easier to ensure temperature uniformity throughout the hot plate 1.

[0042] By arranging multiple cooling sub-channels 21a, the flow distance of the cooling liquid within the cold plate 2 is shortened, resulting in smaller temperature changes during the flow of the cooling liquid. This makes it easier to ensure temperature uniformity throughout the cold plate 2.

[0043] The hot plate 1 is divided into multiple heating zones from its edge to its center, and each heating zone is provided with multiple heating sub-channels 1a1.

[0044] Reference Figure 4 and Figure 5 Specifically, the heating zones are arranged in concentric circles from the center to the edge of the hot plate 1, and each heating zone has multiple heating sub-channels 1a1 laid inside.

[0045] This configuration, by dividing the hot plate 1 into multiple heating zones from the center to the edge, allows for independent control of these zones. It also makes it easier to ensure temperature consistency throughout the hot plate 1.

[0046] It is understandable that, due to the large size of the hot plate 1, the heat loss in the middle and the edge of the hot plate 1 is different. By controlling the temperature of different heating areas, the temperature consistency of the hot plate 1 can be ensured.

[0047] Reference Figure 4 and Figure 6 The cold plate 2 is divided into multiple cooling zones from its edge to its center, and each cooling zone is provided with multiple cooling sub-channels 21a.

[0048] Specifically, the cooling zones are arranged in concentric circles from the center to the edge of the cold plate 2, and each cooling zone has multiple cooling sub-channels 21a inside.

[0049] This configuration, by dividing the cold plate 2 into multiple cooling zones from the center to the edge, allows for independent control of these zones. It also makes it easier to ensure temperature consistency throughout the cold plate 2.

[0050] It is understandable that, due to the large size of the cold plate 2, the heat loss in the middle and the edge of the cold plate 2 is different. By controlling the temperature of different cooling areas, the temperature consistency of the cold plate 2 can be ensured.

[0051] By controlling the temperature zones of hot plate 1 and cold plate 2, the temperature uniformity of each part of hot plate 1 and cold plate 2 is ensured, thereby improving the uniformity of solvent evaporation rate on the substrate surface and ensuring film formation uniformity.

[0052] Reference Figure 5 and Figure 6 Furthermore, each heating sub-channel 1a1 includes multiple channels, and the multiple channels of each heating sub-channel 1a1 are arranged adjacent to each other. For ease of understanding, the heating sub-channel 1a1 forms different channels by bending 180 degrees each time, and the two channels formed by each 180-degree bend are adjacent.

[0053] Reference Figure 5 and Figure 6 Correspondingly, each cooling sub-channel 21a includes multiple channels, and the multiple channels of each cooling sub-channel 21a are arranged adjacent to each other. For ease of understanding, the cooling sub-channel 21a forms different channels by bending 180 degrees each time, and the two channels formed by each 180-degree bend are adjacent.

[0054] Reference Figure 5 and Figure 6 The liquid flows in opposite directions in adjacent channels of each heating subchannel 1a1, and the liquid flows in opposite directions in adjacent channels of each cooling subchannel 21a.

[0055] With this configuration, the portion of the heating sub-channel 1a1 near the inlet is adjacent to the portion near the outlet, and the portion of the heating sub-channel 1a1 away from the inlet is adjacent to the portion away from the outlet. Therefore, the heating liquid entering the heating sub-channel 1a1 provides temperature compensation to the heating liquid flowing out of the heating sub-channel 1a1, resulting in better temperature uniformity of the heating liquid throughout the heating sub-channel 1a1, and thus improving the temperature uniformity throughout the hot plate 1.

[0056] Correspondingly, the portion of the cooling sub-channel 21a near the inlet is adjacent to the portion of the cooling sub-channel 21a near the outlet, and the portion of the cooling sub-channel 21a away from the inlet is adjacent to the portion of the cooling sub-channel 21a away from the outlet. Therefore, the cooling liquid entering the cooling sub-channel 21a provides temperature compensation for the cooling liquid flowing out of the cooling sub-channel 21a, resulting in better temperature uniformity of the cooling liquid throughout the cooling sub-channel 21a, thereby improving the temperature uniformity throughout the cold plate 2.

[0057] Furthermore, the liquid flows in opposite directions in the two adjacent heating sub-channels 1a1 that are close to each other.

[0058] With this configuration, the flow direction of the heating liquid in adjacent channels of all heating sub-channels 1a1 is opposite. This ensures that the temperature of the heating liquid in adjacent channels is complementary, resulting in better temperature consistency across channels and guaranteeing the temperature consistency of the hot plate 1.

[0059] The liquid flows in opposite directions in the two adjacent cooling sub-channels 21a that are close to each other.

[0060] With this configuration, the coolant flows in opposite directions in all channels of the cooling sub-channels 21a. This ensures that the temperature of the coolant in adjacent channels is complementary, resulting in better temperature consistency across all channels and guaranteeing the temperature consistency of the cold plate 2.

[0061] Reference Figure 3 Among them, stress structure a is arranged on the opposite sides of hot plate 1 and cold plate 2 to reduce the stress inside hot plate 1 and cold plate 2.

[0062] With this configuration, by arranging stress structure a, the large-sized cold plate 2 and hot plate 1 are less prone to deformation after temperature alternation, thereby maintaining the shape of hot plate 1 and cold plate 2 and ensuring the consistency of temperature difference at corresponding positions of hot plate 1 and cold plate 2.

[0063] Reference Figure 3 Specifically, stress structure a includes multiple stress ring grooves, which are arranged sequentially from the inside out.

[0064] By arranging stress ring grooves, the stress generated when adjusting the temperature changes of hot plate 1 and cold plate 2 is reduced, that is, space is reserved for the deformation of hot plate 1 and cold plate 2 themselves, thereby avoiding deformation of cold plate 2 and hot plate 1 during environmental changes such as temperature and air pressure.

[0065] Reference Figure 1 and Figure 2 The inlet and outlet of the heating sub-channel 1a1 are connected to the same corner of the top surface of the box 3 through pipes, and the inlet and outlet of multiple heating sub-channels 1a1 are respectively connected to multiple corners of the top surface of the box 3 through pipes.

[0066] The inlet and outlet of the cooling sub-channel 21a are connected to the same corner of the bottom surface of the box 3 through pipes, and the inlet and outlet of multiple cooling sub-channels 21a are respectively connected to multiple corners of the bottom surface of the box 3 through pipes.

[0067] This configuration allows the inlet and outlet of the heating sub-channel 1a1 and the cooling sub-channel 21a to be led to the corner of the housing 3 via pipes, making it convenient to lead the pipes out of the housing 3 to supply liquid to each channel.

[0068] Reference Figure 1 and Figure 2 Corrugated pipes 6 are arranged at the corners of the top and bottom surfaces of the housing 3. The corrugated pipes 6 are connected to the interior of the housing 3. The pipes connected to the inlet and outlet of the cooling sub-channel 21a and the heating sub-channel 1a1 are extended to the outside of the housing 3 through the corrugated pipes 6.

[0069] This configuration, with the corrugated pipe 6 leading the pipe out of the housing 3, prevents air leakage at the point where the pipe exits from the housing 3, thus ensuring the sealing of the housing 3.

[0070] Furthermore, maintenance doors 7 are provided on both opposite sides of the housing 3, and the maintenance doors 7 are arranged close to the corrugated pipe 6.

[0071] With this configuration, since the corrugated pipes 6 on the top and bottom surfaces of the housing 3 are located at the corners of the housing 3, maintenance can be carried out through a single maintenance door 7. This also facilitates the routing of pipes connected to the heating sub-channel 1a1 and the cooling sub-channel 21a from the corrugated pipes 6. The single maintenance door 7 for maintenance of the heating sub-channel 1a1 and the cooling sub-channel 21a reduces the number of openings on the housing 3, making it easier to ensure the sealing performance of the housing 3.

[0072] Reference Figure 1 and Figure 2 Optionally, the large-scale vacuum drying device for uniform film formation also includes multiple visual monitoring elements 5, all of which are mounted on the top of the housing 3. Multiple through holes are provided on the cold plate 2, allowing the multiple visual monitoring elements 5 to pass through the cold plate 2 and image the film layer on the substrate surface of the hot plate 1.

[0073] Specifically, a mounting box is installed on the top of the housing 3, the visual monitoring component 5 is installed in the mounting box, and the imaging end of the visual monitoring component 5 extends into the housing 3 and passes through the cold plate 2.

[0074] The film formation status is monitored by the visual monitoring component 5, so as to detect uneven film formation in time and adjust the temperature of the cold plate 2 and the hot plate 1 in a timely manner.

[0075] By adjusting the temperature of corresponding positions on hot plate 1 and cold plate 2 in real time through the film formation monitoring screen, the consistency of film formation can be ensured.

[0076] Preferably, multiple visual monitoring elements 5 are used to image the substrate surface film layer located in different heating areas of the hot plate 1.

[0077] Due to the large size of the substrate, the film formation in the middle and edge of the substrate is more likely to be inconsistent. By arranging multiple visual monitoring devices 5 from the middle to the edge of the substrate, the film formation state at different positions of the substrate can be recorded in real time, and the liquid temperature in different heating sub-channels 1a1 and cooling sub-channels 21a can be adjusted in time to ensure that the film formation is consistent throughout the substrate.

[0078] In this embodiment, the visual monitoring device 5 includes a camera.

[0079] This application provides a large-scale vacuum drying apparatus for uniform film formation. Heating channels 1a and cooling channels 21 are respectively arranged throughout the hot plate 1 and cold plate 2, with the heating channels 1a and cooling channels 21 having the same shape and facing each other vertically. Simultaneously, the flow directions of the heating and cooling liquids are opposite, forming a "counter-convection" heat exchange mode. When the heating liquid flows along the heating channel 1a, its temperature gradually decreases due to heat loss; when the cooling liquid flows in the opposite direction along the cooling channel 21, its temperature gradually increases due to heat absorption. Because the two channels have the same shape, are vertically facing each other, and flow in opposite directions, the temperature difference between the liquid in the heating channel 1a and the liquid in the cooling channel 21 remains constant at any corresponding vertical position. The counter-convection design ensures that the temperature difference at corresponding points in the vertical direction on the hot plate 1 and cold plate 2 is highly consistent, eliminating the temperature gradient problem caused by the increase in plate size.

[0080] Because the temperature difference between the hot plate 1 and the cold plate 2 remains consistent at any corresponding position, the thermal driving conditions (heating intensity of the lower surface) and cold traction conditions (cooling intensity of the upper surface) experienced by each area of ​​the substrate surface are at the same level, resulting in uniform evaporation driving force of the solvent from all parts of the substrate surface. This ensures that the solvent evaporation rate is synchronized and balanced across the entire substrate area, avoiding defects such as film cracking caused by localized over-drying and film flow or pinholes caused by localized under-drying. This significantly improves the film thickness uniformity, surface smoothness, and microstructure consistency, meeting the extremely high manufacturing requirements for film quality in semiconductor wafers, high-generation OLED panels, and large-area perovskite solar cells.

[0081] Secondly, a film-forming system is provided, including a large-scale vacuum drying apparatus for uniform film formation as described above.

[0082] Another embodiment of this application provides a film-forming system. Since the film-forming system includes a large-scale vacuum drying device for uniform film formation as described above, the beneficial effects of the film-forming system are consistent with the beneficial effects of the large-scale vacuum drying device for uniform film formation described above, and will not be repeated here.

[0083] In the description of this application, it should be noted that the terms "upper," "lower," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Unless otherwise expressly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication between two elements. For those skilled in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances.

[0084] It should be noted that in this application, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0085] The above description is merely a specific embodiment of this application, enabling those skilled in the art to understand or implement this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features claimed herein.

Claims

1. A large-scale vacuum drying apparatus for uniform film formation, characterized in that, It includes: Box; A vacuum device, used to create a vacuum inside the chamber; A hot plate is located inside the housing and is used to support a substrate. The hot plate has heating channels that are distributed throughout it. Heating liquid is supplied to the heating channels to heat the surface of the hot plate. A cold plate is located inside the housing and directly above the hot plate. The cold plate has cooling channels inside and throughout it. Cooling liquid is supplied to the cooling channels to cool the surface of the cold plate. The heating channel and the cooling channel have the same shape and are vertically aligned. The flow direction of the heating liquid in the heating channel is opposite to that of the cooling liquid in the cooling channel, so that the temperature difference at each point in the vertical direction of the heating channel and the cooling channel is within a preset standard temperature difference range, and the temperature difference at each point in the vertical direction of the hot plate and the cold plate is within a preset standard temperature difference range.

2. The large-scale vacuum drying apparatus for uniform film formation according to claim 1, characterized in that, The heating channel includes multiple heating sub-channels, each with an independent liquid inlet and outlet; the cooling channel includes multiple cooling sub-channels, each with an independent liquid inlet and outlet. Each of the heating sub-channels corresponds to a cooling sub-channel in the vertical direction, forming a group, and the liquid flow direction in each group of heating sub-channels and cooling sub-channels is opposite.

3. The large-scale vacuum drying apparatus for uniform film formation according to claim 2, characterized in that, The hot plate is divided into multiple heating zones from its edge to its center, and each heating zone is provided with multiple heating sub-channels; The cold plate is divided into multiple cooling zones from its edge to its center, and each cooling zone is provided with multiple cooling sub-channels.

4. The large-scale vacuum drying apparatus for uniform film formation according to claim 2 or 3, characterized in that, Each of the heating sub-channels and each of the cooling sub-channels includes multiple channels, with the multiple channels of each heating sub-channel arranged adjacent to each other at intervals, and the multiple channels of each cooling sub-channel arranged adjacent to each other at intervals; the liquid flow direction in adjacent channels is opposite.

5. The large-scale vacuum drying apparatus for uniform film formation according to claim 4, characterized in that, The liquid flows in opposite directions in two adjacent heating sub-channels that are close to each other; the liquid flows in opposite directions in two adjacent cooling sub-channels that are close to each other.

6. The large-scale vacuum drying apparatus for uniform film formation according to claim 1, characterized in that, Stress structures are arranged on the opposite sides of the hot plate and the cold plate to reduce the stress inside the hot plate and the cold plate.

7. The large-scale vacuum drying apparatus for uniform film formation according to claim 3, characterized in that, It also includes multiple visual monitoring devices, all of which are installed on the top of the housing. Multiple through holes are provided on the cold plate, and the multiple through holes allow the multiple visual monitoring devices to pass through the cold plate to image the film layer on the substrate surface on the hot plate. The multiple visual monitoring devices are used to image the substrate surface film layer at different heating areas of the hot plate.

8. The large-scale vacuum drying apparatus for uniform film formation according to claim 2, characterized in that, The inlet and outlet of the heating sub-channel are connected to the same corner of the top surface of the box body through pipes, and the inlet and outlet of multiple heating sub-channels are respectively connected to multiple corners of the top surface of the box body through pipes. The inlet and outlet of the cooling sub-channel are connected to the same corner of the bottom surface of the box body through pipes, and the inlet and outlet of multiple cooling sub-channels are respectively connected to multiple corners of the bottom surface of the box body through pipes. Corrugated pipes are arranged at the corners of the outer top and bottom surfaces of the housing. The corrugated pipes are connected to the interior of the housing. The pipes that connect to the inlet and outlet of the cooling sub-channel and the heating sub-channel extend to the outside of the housing through the corrugated pipes.

9. The large-scale vacuum drying apparatus for uniform film formation according to claim 8, characterized in that, The enclosure is provided with maintenance doors on both opposite sides, and the maintenance doors are arranged close to the corrugated pipe.

10. A film-forming system comprising a large-scale vacuum drying apparatus for uniform film formation as described in any one of claims 1 to 9.

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