High-precision collimated beam pointing angle adjustment platform and use method

Abstract

The application belongs to the technical field of sensing product processing and detection, and particularly relates to a high-precision collimated light beam pointing angle adjustment and measurement platform and a use method thereof, which comprises: a mounting bracket and a high-precision guide rail fixedly installed on a damping table; a first fine adjustment frame is fixedly installed at the top of the mounting bracket, and a positioning clamp group is installed on the first fine adjustment frame; the first fine adjustment frame is used to drive the collimated laser to deflect in a first plane and a second plane; a universal adjusting rod and a second fine adjustment frame are fixedly installed on the sliding block; a micrometer is fixedly installed on the universal adjusting rod; a light spot analyzer is installed on the second fine adjustment frame, and the detection surface of the light spot analyzer is perpendicular to the length direction of the high-precision guide rail. The purpose is to ensure that the laser emitted by the collimated laser can be vertically irradiated on the detection surface of the light spot analyzer through the light port end face, and the theoretical light emitting direction of the collimated laser is parallel to the movement detection direction of the light spot analyzer.

Description

Technical Field

[0001] This invention belongs to the field of sensor product processing and testing technology, specifically relating to a high-precision collimated beam pointing angle adjustment platform and its usage method. Background Technology

[0002] In atomic clocks, laser magnetometers, and optical coherent detection equipment, precise measurements are often achieved through the interaction between light fields and atomic quantum particles.

[0003] The pointing angle of the collimated beam output by a collimated laser is the "spatial reference" for quantum precision measurement. It defines the spatial phase and momentum direction of the light field, directly determining the Doppler compensation accuracy of atomic motion, the suppression level of optical frequency shift and polarization error, and the signal-to-noise ratio and stability of quantum coherent signals.

[0004] Therefore, controlling the pointing angle of the collimated beam can ensure the spatial consistency of the atomic-optical field interaction, thereby improving the accuracy and long-term stability of frequency / magnetic field measurements.

[0005] Although a light source adjustment device can be added to the equipment to adjust the beam angle deflected by the collimating laser, the dimming device requires a large space in the system, which prevents the equipment from becoming smaller. Therefore, the pointing angle of the light source itself must be controlled within a certain range to reduce or avoid secondary adjustment on the equipment.

[0006] When detecting the pointing angle of the collimated beam output by the collimating laser, the optical port face of the collimating laser needs to be aligned with the center of the detection surface of the spot analyzer. That is, the laser emitted by the collimating laser can be perpendicularly irradiated onto the detection surface of the spot analyzer through the optical port face.

[0007] Therefore, a high-precision collimated beam pointing angle adjustment platform needs to be designed to solve the problems mentioned above. Summary of the Invention

[0008] The purpose of this invention is to provide a high-precision collimated beam pointing angle adjustment platform and its usage method, so as to ensure that the laser emitted by the collimated laser can be perpendicularly irradiated onto the detection surface of the spot analyzer through the optical port end face, and to make the theoretical output direction of the collimated laser parallel to the motion detection direction of the spot analyzer.

[0009] To achieve the above-mentioned technical objectives, the technical solution adopted by the present invention is as follows:

[0010] A high-precision collimated beam pointing angle adjustment platform includes:

[0011] Mounting brackets and high-precision guide rails are fixedly installed on the vibration damping platform;

[0012] The top of the mounting bracket is fixedly mounted with a first fine-tuning frame. The first fine-tuning frame is mounted with a positioning fixture group for fixing the collimated laser and exposing the upper part of the collimated laser. The collimated laser has an optical port end face. The length direction of the upper end face and side wall of the collimated laser is parallel to the central axis direction of the optical port end face.

[0013] The first fine-tuning frame is used to drive the collimating laser fixed on the positioning fixture assembly to deflect on the first plane and the second plane;

[0014] The first plane is a horizontal plane, and the second plane is a vertical plane that coincides with the length direction of the high-precision guide rail;

[0015] A slider is slidably mounted on the high-precision guide rail, and a universal adjustment rod and a second fine-tuning frame are fixedly mounted on the slider.

[0016] A dial indicator is fixedly mounted on the universal adjustment rod. The universal adjustment rod is used to fix the dial indicator when the probe of the dial indicator is in contact with the upper end face and side wall of the collimating laser.

[0017] A spot analyzer is mounted on the second fine-tuning frame. The second fine-tuning frame is used to drive the spot analyzer to move in the vertical direction and in the horizontal direction perpendicular to the length direction of the high-precision guide rail. The detection surface of the spot analyzer is perpendicular to the length direction of the high-precision guide rail.

[0018] Further specifying, the mounting bracket includes a vertically arranged cylinder and a rod that are nested together;

[0019] The cylinder is fixedly mounted on the vibration damping platform;

[0020] The rod is fixedly installed on the first fine-tuning frame;

[0021] A locking bolt is radially screwed onto the cylinder, and the inner end of the locking bolt rests against the rod.

[0022] This structural design, using vertically arranged and interlocking cylinders and rods to form a mounting bracket, allows the vertical height of the first fine-tuning frame relative to the vibration damping table to be adjusted. After adjustment, it is locked by locking bolts, thus adapting to collimating lasers of different heights and sizes, making it highly practical.

[0023] Further specified, the first fine-tuning frame includes a pitch swing table and a horizontal rotary table;

[0024] The pitch swing platform is fixedly mounted on the mounting bracket, and the horizontal rotary platform is fixedly mounted on the movable end of the pitch swing platform. The pitch swing platform is used to drive the horizontal rotary platform to deflect in the second plane.

[0025] The positioning fixture assembly is fixedly installed on the movable end of the horizontal rotary table, which is used to drive the positioning fixture assembly to deflect in the first plane.

[0026] This structural design, using a pitch swing table and a horizontal rotary table to form the first fine-tuning frame, completes the deflection of the positioning fixture assembly used to fix the collimating laser in the first and second planes. The structure is simple and highly practical.

[0027] Further specifying, the positioning fixture assembly includes a base, on which a placement slot and an installation slot are provided in communication with each other;

[0028] The placement slot is used to place the collimated laser, and the depth of the placement slot is smaller than the height of the collimated laser.

[0029] A pin is provided in the mounting groove, and a pressure block is rotatably mounted in the mounting groove via the pin.

[0030] A compression spring is provided between the pressure block and the base body below the pin;

[0031] The upper inner wall of the pressure block abuts against the side wall of the collimating laser under the action of the compression spring.

[0032] This structural design allows the collimated laser to be placed in a slot, and then a compression spring pushes the pressure block so that the upper inner wall of the pressure block abuts against the side wall of the collimated laser, thus fixing the collimated laser securely and making it highly practical.

[0033] Furthermore, the pressing block is Z-shaped.

[0034] This structural design, by setting the pressure block to a Z-shape, allows the tail of the Z-shaped pressure block to be pressed downwards when installing or removing the collimating laser. This overcomes the prestress of the compression spring, causing the upper inner wall of the pressure block to detach from the side wall of the collimating laser. At this point, the collimating laser can be easily removed, making it more convenient to use.

[0035] Furthermore, the second fine-tuning frame can also be used to drive the spot analyzer to move along the length of the high-precision guide rail.

[0036] This structural design adds an adjustment direction to the second fine-tuning frame, allowing for fine-tuning of the distance between the spot analyzer and the collimating laser, further improving measurement accuracy and making it highly practical.

[0037] Further specifying, the second fine-tuning frame is an XYZ three-way fine-tuning platform.

[0038] This structural design uses an XYZ three-way fine-tuning platform to form a second fine-tuning frame. The XYZ three-way fine-tuning platform is a mature product that can be purchased directly. Its construction has been tested in the market and has good stability and service life, making it highly practical.

[0039] Further, it also includes a servo motor and a ball screw. The servo motor is fixedly mounted on a high-precision guide rail, and the ball screw includes a screw and a nut. The output shaft of the servo motor is connected to the screw via a transmission, and the nut is fixedly connected to the slider.

[0040] This structural design, through the cooperation of a servo motor and a ball screw, drives the slider to move on a high-precision guide rail, thereby adjusting the distance between the collimating laser and the spot analyzer. It has high adjustment accuracy, is easy to operate, and is highly practical.

[0041] This invention also discloses a method for using a high-precision collimated beam pointing angle adjustment platform, comprising the following steps:

[0042] 1) Mount the collimated laser on the positioning fixture assembly, ensuring that the optical port of the collimated laser faces the spot analyzer;

[0043] 2) Adjust the position of the dial indicator using the universal adjustment rod so that the probe of the dial indicator rests against the side wall parallel to the central axis of the collimating laser and the optical port end face, and so that the dial indicator reading is zero.

[0044] 3) Slide the slider along the high-precision guide rail to move the dial indicator laterally, so that the dial indicator's probe slides on the side wall of the collimating laser until the dial indicator's probe slides to the end of the side wall of the collimating laser.

[0045] 4) Keep the probe of the dial indicator at the end of the side wall of the collimating laser, and read the reading on the dial indicator at this time. Based on the reading on the dial indicator, the first fine adjustment frame drives the collimating laser to rotate along the first horizontal plane until the reading on the dial indicator is less than 5μm.

[0046] 5) Then readjust the position of the dial indicator using the universal adjustment rod so that the probe of the dial indicator rests against the upper surface of the collimating laser and the reading of the dial indicator is zero again.

[0047] 6) Then slide the slider along the high-precision guide rail to move the dial indicator laterally, so that the dial indicator probe slides on the upper surface of the collimating laser until the dial indicator probe slides to the end of the upper surface of the collimating laser.

[0048] 7) Keep the probe of the dial indicator at the end of the upper surface of the collimating laser, and read the reading on the dial indicator at this time. Based on the reading on the dial indicator, the collimating laser is deflected by the first fine adjustment frame along the second plane, which is a vertical plane that coincides with the length direction of the high-precision guide rail, until the reading on the dial indicator is less than 5μm.

[0049] 8) After adjustment, lock the first fine-tuning frame. At this time, the laser emitted by the collimating laser is perpendicular to the detection surface of the spot analyzer.

[0050] 9) Based on the position of the collimating laser's optical port end face, the position of the spot analyzer is adjusted by the second fine-tuning frame so that the optical port end face of the collimating laser is aligned with the detection surface of the spot analyzer, and the detection surface of the spot analyzer is perpendicular to the length direction of the high-precision guide rail.

[0051] 10) Finally, the beam pointing angle of the laser beam is detected by a beam analyzer.

[0052] Further, repeat steps 3) and / or 6), observe the change in the dial indicator reading, and continue to adjust the first fine-tuning frame according to the dial indicator reading until the maximum reading on the dial indicator is less than 5 μm.

[0053] This step-by-step setup allows for further verification of the adjustment effect of the first fine-tuning frame based on the dial indicator reading, thereby improving the accuracy of the adjustment.

[0054] The invention employing the above technical solution has the following advantages:

[0055] The collimated laser is adjusted using the first fine-tuning bracket, along with a universal adjustment rod mounted on the slider together with the second fine-tuning bracket. The universal adjustment rod and the second fine-tuning bracket are then connected to a dial indicator and a spot analyzer, respectively. The dial indicator is used to check the parallelism of the collimated laser's upper surface and side wall along the length of the high-precision guide rail, ensuring that the laser emitted by the collimated laser is perpendicular to the detection surface of the spot analyzer. The second fine-tuning bracket then moves the spot analyzer vertically and horizontally, perpendicular to the length of the high-precision guide rail. This ensures that the laser emitted by the collimated laser is perpendicularly irradiated onto the detection surface of the spot analyzer through the optical aperture, and that the theoretical output direction of the collimated laser is parallel to the movement and detection direction of the spot analyzer. Attached Figure Description

[0056] The present invention can be further illustrated by the non-limiting embodiments given in the accompanying drawings;

[0057] Figure 1 This is a schematic diagram of an embodiment of a high-precision collimated beam pointing angle adjustment platform and its usage method according to the present invention;

[0058] Figure 2 for Figure 1 Enlarged structural diagram at point A;

[0059] Figure 3 This is a cross-sectional view of the collimating laser and positioning fixture assembly in an embodiment of the high-precision collimating beam pointing angle adjustment platform and its usage method of the present invention.

[0060] The symbols for the main components are explained below:

[0061] Collimated laser 10, upper end face 101, side wall 102, optical port end face 103

[0062] Cylinder 11, Rod 12

[0063] 2. High-precision guide rail; 3. First fine-tuning frame; 31. Pitch swing table; 32. Horizontal rotary table.

[0064] Positioning clamp assembly 4, base 41, mounting slot 410, pin 420, pressure block 42, compression spring 43.

[0065] 5. Slider; 6. Universal adjustment rod; 7. Dial indicator; 70. Probe.

[0066] Second fine-tuning frame 8, spot analyzer 9, detector surface 90. Detailed Implementation

[0067] The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments. It should be noted that similar or identical parts are referred to by the same reference numerals in the drawings or description. Implementations not shown or described in the drawings are forms known to those skilled in the art. In addition, directional terms mentioned in the embodiments, such as "up," "down," "top," "bottom," "left," "right," "front," and "back," are only for reference to the directions in the drawings and are not intended to limit the scope of protection of the present invention.

[0068] like Figures 1-3 As shown, a high-precision collimated beam pointing angle adjustment platform of the present invention includes:

[0069] Mounting brackets and high-precision guide rails 2 are fixedly installed on the vibration damping platform;

[0070] The top of the mounting bracket is fixedly mounted with a first fine-tuning frame 3. The first fine-tuning frame 3 is mounted with a positioning fixture group 4 for fixing the collimated laser 10 and exposing the upper part of the collimated laser 10. The collimated laser 10 has an optical port end face 103. The length direction of the upper end face 101 and the side wall 102 of the collimated laser 10 is parallel to the central axis direction of the optical port end face 103.

[0071] The first fine-tuning frame 3 is used to drive the collimating laser 10, which is fixed on the positioning fixture group 4, to deflect on the first plane and the second plane.

[0072] The first plane is a horizontal plane, and the second plane is a vertical plane that coincides with the length direction of the high-precision guide rail 2;

[0073] A slider 5 is slidably mounted on a high-precision guide rail 2, and a universal adjustment rod 6 and a second fine-tuning frame 8 are fixedly mounted on the slider 5.

[0074] A dial indicator 7 is fixedly mounted on the universal adjustment rod 6. The universal adjustment rod 6 is used to fix the dial indicator 7 when the probe 70 of the dial indicator 7 is in contact with the upper end face 101 and side wall 102 of the collimating laser 10.

[0075] The second fine-tuning frame 8 is equipped with a spot analyzer 9. The second fine-tuning frame 8 is used to drive the spot analyzer 9 to move in the vertical direction and in the horizontal direction perpendicular to the length direction of the high-precision guide rail 2. The detection surface 90 of the spot analyzer 9 is perpendicular to the length direction of the high-precision guide rail 2.

[0076] This invention also discloses a method for using a high-precision collimated beam pointing angle adjustment platform, comprising the following steps:

[0077] 1) Mount the collimated laser 10 on the positioning fixture group 4, and make the optical port end face 103 of the collimated laser 10 face the spot analyzer 9.

[0078] 2) Adjust the position of the dial indicator 7 using the universal adjustment rod 6 so that the probe 70 of the dial indicator 7 rests against the side wall 102 of the collimating laser 10, which is parallel to the central axis of the optical port end face 103, and so that the reading of the dial indicator 7 is zero.

[0079] 3) Slide the slider 5 along the high-precision guide rail 2 to move the dial indicator 7 laterally, so that the probe 70 of the dial indicator 7 slides on the side wall 102 of the collimating laser 10 until the probe 70 of the dial indicator 7 slides to the end of the side wall 102 of the collimating laser 10.

[0080] 4) Keep the probe 70 of the dial indicator 7 sliding to the end of the side wall 102 of the collimating laser 10, read the reading on the dial indicator 7 at this time, and according to the reading on the dial indicator 7, drive the collimating laser 10 to rotate along the first horizontal plane by the first fine adjustment frame 3 until the reading on the dial indicator 7 is less than 5μm.

[0081] 5) Then, readjust the position of the dial indicator 7 using the universal adjustment rod 6 so that the probe 70 of the dial indicator 7 rests against the upper end face 101 of the collimating laser 10, and the reading of the dial indicator 7 is zero again.

[0082] 6) Then slide the slider 5 along the high-precision guide rail 2 to drive the dial indicator 7 to move laterally, so that the probe 70 of the dial indicator 7 slides on the upper end face 101 of the collimating laser 10 until the probe 70 of the dial indicator 7 slides to the end of the upper end face 101 of the collimating laser 10.

[0083] 7) Keep the probe 70 of the dial indicator 7 sliding to the end of the upper end face 101 of the collimating laser 10, read the reading on the dial indicator 7 at this time, and according to the reading on the dial indicator 7, drive the collimating laser 10 to deflect along the second plane of the vertical plane that coincides with the length direction of the high-precision guide rail 2 by the first fine adjustment frame 3 until the reading on the dial indicator 7 is less than 5μm;

[0084] 8) After adjustment, lock the first fine-tuning frame 3. At this time, the laser emitted by the collimating laser 10 is perpendicular to the detection surface 90 of the spot analyzer 9.

[0085] 9) Based on the position of the optical port end face 103 of the collimating laser 10, the position of the spot analyzer 9 is adjusted by the second fine-tuning frame 8 so that the optical port end face 103 of the collimating laser 10 is aligned with the detection surface 90 of the spot analyzer 9, and the detection surface 90 of the spot analyzer 9 is perpendicular to the length direction of the high-precision guide rail 2.

[0086] 10) Finally, the beam pointing angle of the laser 10 is detected by the beam analyzer 9.

[0087] Repeat steps 3) and / or 6), observe the change in the reading of dial indicator 7, and continue to adjust the first fine-tuning frame 3 according to the reading of dial indicator 7 until the maximum reading on dial indicator 7 is less than 5 μm.

[0088] The adjustment effect of the first fine-tuning frame 3 is further verified based on the reading of dial indicator 7 to improve the accuracy of the adjustment.

[0089] The mounting bracket includes a vertically arranged cylinder 11 and a rod 12 that are nested together;

[0090] The cylinder 11 is fixedly installed on the vibration damping platform;

[0091] Rod 12 is fixedly installed on the first fine-tuning frame 3;

[0092] A locking bolt is radially screwed onto the cylinder 11, and the inner end of the locking bolt rests against the rod 12.

[0093] In practice, depending on the actual situation, an integrated frame can be selected as the mounting bracket, without adjusting the vertical height of the first fine-tuning frame 3. In this embodiment, the mounting bracket is formed by vertically arranged and interlocking cylinder 11 and rod 12, so that the vertical height of the first fine-tuning frame 3 relative to the vibration damping table can be adjusted. After the adjustment is completed, it is locked by locking bolts, thus adapting to collimating lasers 10 of different heights and sizes, which is highly practical.

[0094] The first fine-tuning frame 3 includes a pitch swing table 31 and a horizontal rotary table 32;

[0095] The pitch swing table 31 is fixedly mounted on the mounting bracket, and the horizontal rotary table 32 is fixedly mounted on the movable end of the pitch swing table 31. The pitch swing table 31 is used to drive the horizontal rotary table 32 to deflect in the second plane.

[0096] The positioning fixture assembly 4 is fixedly installed on the movable end of the horizontal rotary table 32, which is used to drive the positioning fixture assembly 4 to deflect in the first plane.

[0097] The first fine-tuning frame 3 is formed by the pitch swing table 31 and the horizontal rotation table 32, which completes the deflection of the positioning fixture group 4 used to fix the collimating laser 10 in the first plane and the second plane. The structure is simple and highly practical.

[0098] The positioning fixture assembly 4 includes a base 41, on which a placement groove and an installation groove 410 are provided that are interconnected.

[0099] The placement slot is used to place the collimated laser 10, and the depth of the placement slot is smaller than the height of the collimated laser 10.

[0100] A pin 420 is provided in the mounting groove 410, and a pressure block 42 is rotatably mounted in the mounting groove 410 via the pin 420.

[0101] A compression spring 43 is provided between the pressure block 42 and the seat 41 below the pin 420;

[0102] The upper inner wall of the pressure block 42 is pressed against the side wall 102 of the collimating laser 10 by the compression spring 43.

[0103] In practice, depending on the actual situation, a fixing bolt connected to the placement slot can be screwed in, with the inner end of the fixing bolt resting against the collimating laser 10 to fix the collimating laser 10. In this embodiment, the collimating laser 10 is placed in the placement slot, and then the compression spring 43 pushes the pressure block 42, so that the upper inner wall of the pressure block 42 rests against the side wall 102 of the collimating laser 10, thus fixing the collimating laser 10. The fixation is stable and highly practical.

[0104] The pressing block 42 is Z-shaped.

[0105] In practice, depending on the actual situation, the pressure block 42 can also be set as a straight line. In this embodiment, the pressure block 42 is set as a Z-shape. When installing or removing the collimating laser 10, the tail of the Z-shaped pressure block 42 can be pressed downward to overcome the prestress of the compression spring 43, so that the upper inner wall of the pressure block 42 is separated from the side wall 102 of the collimating laser 10. At this time, the collimating laser 10 can be easily removed, making it more convenient to use.

[0106] The second fine-tuning frame 8 can also be used to drive the spot analyzer 9 to move along the length of the high-precision guide rail 2.

[0107] In practice, depending on the actual situation, the second fine-tuning frame 8 can be configured to only drive the spot analyzer 9 to move in the vertical direction and in the horizontal direction perpendicular to the length direction of the high-precision guide rail 2. In this embodiment, the second fine-tuning frame 8 is provided with an adjustment direction, which can fine-tune the distance between the spot analyzer 9 and the collimating laser 10, further improving the measurement accuracy and making it more practical.

[0108] The second fine-tuning frame 8 is an XYZ three-way fine-tuning platform.

[0109] The second fine-tuning frame 8 is constructed by the XYZ three-way fine-tuning platform. The XYZ three-way fine-tuning platform is a mature product that can be purchased directly. Its structure has been tested by the market and has good stability and service life, making it highly practical.

[0110] It also includes a servo motor and a ball screw. The servo motor is fixedly mounted on the high-precision guide rail 2. The ball screw includes a screw and a nut. The output shaft of the servo motor is connected to the screw for transmission. The nut is fixedly connected to the slider 5.

[0111] In practice, the slider 5 can also be moved manually according to the actual situation. The slider 5 can be precisely adjusted by setting a scale on the high-precision guide rail 2. In this embodiment, the slider 5 is driven to move on the high-precision guide rail 2 through the cooperation of the servo motor and the ball screw, thereby adjusting the distance between the collimating laser 10 and the spot analyzer 9. The adjustment accuracy is high, the operation is convenient, and the practicality is strong.

[0112] In this embodiment, during use, the height of the mounting bracket is adjusted according to the collimating laser 10 and fixed by locking screws;

[0113] Press the tail of the Z-shaped pressure block 42 downward to overcome the prestress of the compression spring 43, so that the pressure block 42 rotates clockwise around the pin 420, thereby causing the upper inner wall of the pressure block 42 to warp outward. Then place the collimated laser 10 in the placement slot of the base 41 so that the optical port end face 103 of the collimated laser 10 faces the spot analyzer 9.

[0114] Release the pressure on the pressure block 42, and the pressure block 42 will rotate counterclockwise under the action of the compression spring 43, so that the upper inner wall of the pressure block 42 abuts against the side wall 102 of the collimating laser 10.

[0115] Move the universal adjustment lever 6 so that the probe 70 of the dial indicator 7 mounted on the universal adjustment lever 6 rests against the side wall 102 of the collimating laser 10 and the reading of the dial indicator 7 is zero. Then slide the slider 5 along the high-precision guide rail 2 to move the dial indicator 7 laterally, so that the probe 70 of the dial indicator 7 slides on the side wall 102 of the collimating laser 10 and the reading on the dial indicator 7 is read.

[0116] The deflection angle of the collimating laser 10 is adjusted by the horizontal rotary table 32 according to the reading on the dial indicator 7.

[0117] Adjust repeatedly until the reading on dial indicator 7 is less than 5 μm;

[0118] Similarly, move the universal adjustment rod 6 so that the probe 70 of the dial indicator 7 mounted on the universal adjustment rod 6 rests against the upper end face 101 of the collimating laser 10. Then slide the slider 5. According to the reading of the dial indicator 7, adjust the pitch angle of the collimating laser 10 by the pitch swing table 31 until the reading on the dial indicator 7 is less than 5μm.

[0119] After adjustment, the pitch swing stage 31 and the horizontal rotation stage 32 are locked. At this time, the laser emitted by the collimating laser 10 is perpendicular to the detection surface 90 of the spot analyzer 9.

[0120] Then, based on the position of the optical port end face 103 of the collimating laser 10, the position of the spot analyzer 9 is adjusted by the XYZ three-way fine adjustment platform (second fine adjustment frame 8) so that the optical port end face 103 of the collimating laser 10 is aligned with the detection surface 90 of the spot analyzer 9, and the detection surface 90 of the spot analyzer 9 is perpendicular to the length direction of the high-precision guide rail 2.

[0121] At this point, the sliding of the slider 5 on the high-precision guide rail 2 can drive the spot analyzer 9 to move relative to the collimated laser 10, thereby enabling the detection of the beam pointing angle of the collimated laser 10.

[0122] The above provides a detailed description of a high-precision collimated beam pointing angle adjustment platform and its usage method provided by the present invention. The specific embodiments described are merely for the purpose of helping to understand the method and core ideas of the present invention. It should be noted that those skilled in the art can make various improvements and modifications to the present invention without departing from its principles, and these improvements and modifications also fall within the protection scope of the claims of the present invention.

Claims

1. A high-precision collimated beam pointing angle adjustment platform, characterized in that: include: Mounting brackets and high-precision guide rails fixedly installed on the vibration damping platform (2); The top of the mounting bracket is fixedly mounted with a first fine-tuning frame (3). The first fine-tuning frame (3) is mounted with a positioning fixture group (4) for fixing the collimated laser (10) and exposing the upper part of the collimated laser (10). The collimated laser (10) has an optical port end face (103). The length direction of the upper end face (101) and side wall (102) of the collimated laser (10) is parallel to the central axis direction of the optical port end face (103). The first fine-tuning frame (3) is used to drive the collimating laser (10) fixed on the positioning fixture group (4) to deflect on the first plane and the second plane; The first plane is a horizontal plane, and the second plane is a vertical plane that coincides with the length direction of the high-precision guide rail (2); A slider (5) is slidably mounted on the high-precision guide rail (2), and a universal adjustment rod (6) and a second fine adjustment frame (8) are fixedly mounted on the slider (5). A dial indicator (7) is fixedly installed on the universal adjustment rod (6). The universal adjustment rod (6) is used to fix the dial indicator (7) when the probe (70) of the dial indicator (7) is in contact with the upper end face (101) and side wall (102) of the collimating laser (10). The second fine-tuning frame (8) is equipped with a spot analyzer (9). The second fine-tuning frame (8) is used to drive the spot analyzer (9) to move in the vertical direction and in the horizontal direction perpendicular to the length direction of the high-precision guide rail (2). The detection surface (90) of the spot analyzer (9) is perpendicular to the length direction of the high-precision guide rail (2).

2. The high-precision collimated beam pointing angle adjustment platform according to claim 1, characterized in that: The mounting bracket includes a vertically arranged cylinder (11) and a rod (12) nested together. The cylinder (11) is fixedly installed on the shock-absorbing platform; The rod (12) is fixedly installed on the first fine-tuning frame (3); A locking bolt is radially screwed onto the cylinder (11), and the inner end of the locking bolt rests against the rod (12).

3. The high-precision collimated beam pointing angle adjustment platform according to claim 1, characterized in that: The first fine-tuning frame (3) includes a pitch swing table (31) and a horizontal rotary table (32). The pitch swing platform (31) is fixedly installed on the mounting bracket, and the horizontal rotary platform (32) is fixedly installed on the movable end of the pitch swing platform (31). The pitch swing platform (31) is used to drive the horizontal rotary platform (32) to deflect in the second plane. The positioning fixture assembly (4) is fixedly installed on the movable end of the horizontal rotary table (32), which is used to drive the positioning fixture assembly (4) to deflect in the first plane.

4. The high-precision collimated beam pointing angle adjustment platform according to claim 1, characterized in that: The positioning fixture assembly (4) includes a base (41), on which a placement slot and an installation slot (410) are provided in communication with each other. The placement slot is used to place the collimated laser (10), and the depth dimension of the placement slot is smaller than the height dimension of the collimated laser (10); The mounting groove (410) is provided with a pin (420), and a pressure block (42) is rotatably mounted in the mounting groove (410) via the pin (420). A compression spring (43) is provided between the pressure block (42) and the seat (41) below the pin (420); The upper inner wall of the pressure block (42) is pressed against the side wall (102) of the collimating laser (10) under the action of the compression spring (43).

5. The high-precision collimated beam pointing angle adjustment platform according to claim 4, characterized in that: The pressing block (42) is Z-shaped.

6. The high-precision collimated beam pointing angle adjustment platform according to claim 1, characterized in that: The second fine-tuning frame (8) can also be used to drive the spot analyzer (9) to move along the length of the high-precision guide rail (2).

7. A high-precision collimated beam pointing angle adjustment platform according to claim 6, characterized in that: The second fine-tuning frame (8) is an XYZ three-way fine-tuning platform.

8. The high-precision collimated beam pointing angle adjustment platform according to claim 1, characterized in that: It also includes a servo motor and a ball screw. The servo motor is fixedly mounted on a high-precision guide rail (2). The ball screw includes a screw and a nut. The output shaft of the servo motor is connected to the screw drive. The nut is fixedly connected to the slider (5).

9. A method for using a high-precision collimated beam pointing angle adjustment platform, characterized in that: Using the high-precision collimated beam pointing angle adjustment platform according to any one of claims 1 to 8, the following steps are included: 1) Install the collimated laser (10) on the positioning fixture group (4) and make the optical port end face (103) of the collimated laser (10) face the spot analyzer (9). 2) Adjust the position of the dial indicator (7) using the universal adjustment rod (6) so that the probe (70) of the dial indicator (7) rests against the side wall (102) parallel to the central axis of the collimating laser (10) and the optical port end face (103), and make the reading of the dial indicator (7) zero. 3) Slide the slider (5) along the high-precision guide rail (2) to move the dial indicator (7) laterally, so that the probe (70) of the dial indicator (7) slides on the side wall (102) of the collimating laser (10) until the probe (70) of the dial indicator (7) slides to the end of the side wall (102) of the collimating laser (10); 4) Keep the probe (70) of the dial indicator (7) sliding to the end of the side wall (102) of the collimating laser (10), read the reading on the dial indicator (7) at this time, and according to the reading on the dial indicator (7), drive the collimating laser (10) to rotate along the first horizontal plane by the first fine adjustment frame (3) until the reading on the dial indicator (7) is less than 5μm; 5) Then, readjust the position of the dial indicator (7) using the universal adjustment rod (6) so that the probe (70) of the dial indicator (7) rests against the upper end face (101) of the collimating laser (10) and the reading of the dial indicator (7) is zero again. 6) Then slide the slider (5) along the high-precision guide rail (2) to move the dial indicator (7) laterally, so that the probe (70) of the dial indicator (7) slides on the upper end face (101) of the collimating laser (10) until the probe (70) of the dial indicator (7) slides to the end of the upper end face (101) of the collimating laser (10); 7) Keep the probe (70) of the dial indicator (7) sliding to the end of the upper surface (101) of the collimating laser (10), read the reading on the dial indicator (7) at this time, and according to the reading on the dial indicator (7), drive the collimating laser (10) to deflect along the second plane of the vertical plane that coincides with the length direction of the high-precision guide rail (2) by the first fine adjustment frame (3) until the reading on the dial indicator (7) is less than 5μm; 8) After adjustment, lock the first fine-tuning frame (3). At this time, the laser emitted by the collimating laser (10) is perpendicular to the detection surface (90) of the spot analyzer (9). 9) Then, based on the position of the optical port end face (103) of the collimating laser (10), the position of the spot analyzer (9) is adjusted by the second fine-tuning frame (8) so that the optical port end face (103) of the collimating laser (10) is aligned with the detection surface (90) of the spot analyzer (9), and the detection surface (90) of the spot analyzer (9) is perpendicular to the length direction of the high-precision guide rail (2); 10) Finally, the beam pointing angle of the laser (10) is detected by the beam spot analyzer (9).

10. The method of using the high-precision collimated beam pointing angle adjustment platform according to claim 9, characterized in that: Repeat step 3) and / or step 6), observe the change in the reading of the dial indicator (7), and continue to adjust the first fine-tuning frame (3) according to the reading of the dial indicator (7) until the maximum reading on the dial indicator (7) is less than 5 μm.

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